High throughput defect detection

Abstract

A method for high throughput defect detection can include (i) performing a simultaneous inspection process using a first detection channel through a segmented pupil plane comprising a plurality of pupil plane segments to select one or more pupil plane segments of interest from the plurality of pupil plane segments; (ii) configuring one or more configurable filters associated with a second detection channel to pass radiation received from the one or more pupil plane segments of interest and block radiation received from one or more non-pupil plane segments of interest; and (iii) performing a partial masking pupil plane inspection process using the second detection channel.

Description

[0001] This application claims priority to U.S. Application No. 17 / 729,863, filed April 26, 2022, the disclosure of which is incorporated by reference herein in its entirety for all purposes. BACKGROUND

[0002] The sensitivity of an inspection system can depend on various parameters, including but not limited to the signal-to-noise ratio (SNR) of the radiation reaching one or more sensors of the inspection system.

[0003] When inspecting a sample, radiation emanating from certain regions of the sample can exhibit a satisfactory SNR, while radiation emanating from certain other regions of the sample can exhibit a lower SNR. The mapping between pixels belonging to the satisfactory SNR regions and the unsatisfactory SNR regions is not known a priori.

[0004] There is an increasing need to determine in real-time which pixels belong to the satisfactory SNR regions and which pixels belong to the unsatisfactory SN regions. SUMMARY

[0005] A system, method, and non-transitory computer readable medium for high throughput defect detection can be provided.

[0006] A high throughput inspection system can be provided that can include a first detection channel, a second detection channel, illumination optics for illuminating a sample, a controller, and collection optics that can include one or more configurable filters. The collection optics are configured to collect radiation emitted from the sample as a result of illumination of the sample. The first detection channel is configured to generate detection signals while inspecting a process through a segmented pupil plane including a plurality of pupil plane segments. The controller is configured to (a) select one or more pupil plane segments of interest from the plurality of pupil plane segments based on the detection signals generated by the first detection channel; and (b) configure one or more configurable filters associated with the second detection channel to pass radiation received from the one or more pupil plane segments of interest and block radiation received from one or more pupil plane segments that are not of interest. The second detection channel is configured to generate detection signals in a partially masked pupil plane inspection process.

[0007] A method for high throughput defect detection can be provided that can include (i) performing a simultaneous inspection process using a first detection channel through a segmented pupil plane comprising a plurality of pupil plane segments to select one or more pupil plane segments of interest from the plurality of pupil plane segments; (ii) configuring one or more configurable filters associated with a second detection channel to pass radiation received from the one or more pupil plane segments of interest and block radiation received from one or more non-pupil plane segments of interest; and (iii) performing a partial masking pupil plane inspection process using the second detection channel.

[0008] A non-transitory computer readable medium for high throughput defect detection can be provided that can include (i) performing a simultaneous inspection process using a first detection channel through a segmented pupil plane comprising a plurality of pupil plane segments to select one or more pupil plane segments of interest from the plurality of pupil plane segments; (ii) configuring one or more configurable filters associated with a second detection channel to pass radiation received from the one or more pupil plane segments of interest and block radiation received from one or more non-pupil plane segments of interest; and (iii) performing a partial masking pupil plane inspection process using the second detection channel. BRIEF DESCRIPTION OF DRAWINGS

[0009] The subject matter regarded as the embodiments of the present disclosure is particularly pointed out and distinctly claimed in the concluding portion of the specification. The embodiments of the present disclosure, both as to organization and method of operation, together with objects, features, and advantages thereof, can best be understood by reference to the following detailed description when read with the accompanying drawings in which:

[0010] Figure 1 is an example of a method;

[0011] Figure 2 is an example of an inspection system;

[0012] Figure 3 is an example of an inspection system; and

[0013] Figure 4 is an example of a method. DETAILED DESCRIPTION

[0014] In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the present disclosure.

[0015] However, it will be apparent to one of ordinary skill in the art that the present embodiments of the present disclosure can be practiced without these specific details. In other instances, well-known methods, procedures and components have not been described in detail so as not to obscure the embodiments of the present disclosure.

[0016] The subject matter regarded as the embodiments of the present disclosure is particularly pointed out and distinctly claimed in the concluding portion of the specification. The embodiments of the present disclosure, both as to organization and method of operation, together with objects, features, and advantages thereof, can best be understood by reference to the following detailed description when read with the accompanying drawings in which:

[0017] It will be understood that, for clarity's sake, the elements shown in the drawings are not necessarily to scale. For example, the dimensions of some of the elements can be exaggerated relative to others for clarity. Also, where considered appropriate, reference numerals have been repeated among the figures to indicate corresponding or analogous elements.

[0018] Since the illustrated embodiments of the present disclosure can be mostly implemented using electronic components and circuits known to those skilled in the art, in order to understand and appreciate the basic concepts of the present embodiments and in order to avoid obscuring or confusing the teachings of the present embodiments, no explanation of details is given on any greater scope than is considered necessary for the understanding and appreciation of the basic concepts of the present embodiments, except as otherwise explained as considered necessary.

[0019] Any reference in the specification to a method should be considered to mean that the method can be performed by a system.

[0020] Any reference in the specification to a system should be considered to mean that the method can be performed by the system.

[0021] The term "and / or" means additionally or alternatively.

[0022] The term "corresponding" when referring to different images means being located at the same position in the different images, e.g. the same combination of row and column values.

[0023] The term "region" of a sample can be the entire sample or only one or more portions of the region. The sample can be a semiconductor wafer or another sample.

[0024] Figure 1 A method 100 for high throughput defect detection is shown.

[0025] The method 100 can start with a step 110 of performing a simultaneous inspection process using a first detection channel through a segmented pupil plane comprising a plurality of pupil plane segments to select one or more pupil plane segments of interest from the plurality of pupil plane segments.

[0026] Light scattered from the pupil plane segment of interest can (i) indicate a suspect defect or (ii) meet SNR requirements (e.g. have at least a certain SNR value) or (ii) can do both.

[0027] Selecting a pupil plane segment associated with radiation that meets the SNR requirement can improve the sensitivity of defect detection because it results in blocking radiation from unsatisfactory SNR regions.

[0028] When selecting a pupil plane segment of interest associated with a suspect defect, the method can block radiation from the pupil plane segment.

[0029] Step 110 can include a step 112 of illuminating the sample with a single beam of radiation.

[0030] Step 110 can include a step 114 of using a plurality of optical fibers to distribute different reflected beam segments associated with different pupil plane segments to different first detection channels. For example, each first detection channel can receive radiation from a unique pupil plane segment.

[0031] Step 110 can include a step 116 of operating the radiation distribution unit in a first mode.

[0032] Step 110 can include a step 118 of processing first detection signals from the first detection channels and selecting one or more pupil plane segments of interest.

[0033] Step 110 can be followed by a step 120 of configuring one or more configurable filters associated with second detection channels to pass radiation received from the one or more pupil plane segments of interest and block radiation received from one or more non-pupil plane segments of interest.

[0034] Steps 110 and 120 can improve the sensitivity of the inspection process while tailoring the inspection process to obtain and process light from pupil plane segments of interest.

[0035] By using a segmented pupil plane, steps 110 and 120 can define the one or more configurable filters at a finer resolution at the resolution of the pupil plane segments.

[0036] Step 120 can be followed by a step 130 of performing a partially masked pupil plane inspection process using the second detection channels.

[0037] There can be any number of first detection channels, any number of second detection channels, and any relationship between the number of first and second detection channels.

[0038] A detection channel can operate as a first detection channel during step 110 and can operate as a second detection channel during step 130. Alternatively, a detection channel can be only a first detection channel or only a second detection channel.

[0039] Step 130 can include a step 132 of illuminating the sample with a plurality of beams of radiation.

[0040] Step 130 can comprise a step 134 of operating the radiation distribution unit in a second mode. This can comprise distributing radiation from different radiation beams to different second detection channels. This step comprises passing the radiation through one or more configurable filters associated with the second detection channels.

[0041] Step 130 can comprise a step 138 of processing the second detection signals from the second detection channels to find defects.

[0042] It is noted that step 110 can comprise scanning the sample with a first number (N1) of radiation beams, and step 130 can comprise scanning the sample with a second number (N2) of radiation beams, where N2 can exceed N1, N1 can equal one or can exceed one, and assuming a third number (N3) of second detection channels, N3 can equal N2 or be different from N2. In Figure 2 and Figure 3 In, the first detection channels are also the second detection channels, N3 equals N2, and N2 equals 2K+1. K, N1, N2, N3 are positive integers.

[0043] Figure 2 An example of an inspection system 9 during an inspection process through segmented pupil planes is shown, as well as a sample 30.

[0044] The inspection system 9 comprises an illumination module 10 illuminating the sample 30 with a single radiation beam 12 passing through a beam splitter 32, impinging on an objective lens 34 and focusing onto the sample 30 (forming a single spot 60). The illumination module 10, the beam splitter 32 and the objective lens 34 belong to the illumination optics 14.

[0045] Scattered radiation from the sample is collected by the objective lens 34 and directed through a mirror 36 to a distribution lens 38. The mirror is present during a synchronized inspection process through segmented pupil planes, while it is not present in a partially masked pupil plane inspection process. The mirror can be replaced by a configurable beam splitter.

[0046] The distribution lens 38 is located at a distribution plane. Configurable filters 42 are located within a pupil plane. The distribution plane and the pupil are conjugate planes. The configurable filters 42 are utilized during a partially masked pupil plane inspection process.

[0047] The distribution lens 38 distributes the scattered light to a plurality of optical fibers, one optical fiber per distribution lens plane segment. The distribution lens plane segments are denoted 38(1) to 38(2K-1).

[0048] The plurality of optical fibers is denoted collectively 40 and individually 40(1) to 40(2K-1). The plurality of optical fibers transports radiation from different distribution lens plane segments, one distribution lens plane segment per optical fiber.

[0049] As a conjugate pupil plane, each distribution lens plane segment has a corresponding pupil plane segment.

[0050] After the plurality of optical fibers is a fiber output optic 48(1) through 34(2K-1) (e.g., a collimating lens) that sends radiation propagating through the plurality of optical fibers to a first detection channel 50(1) through 50(2K-1)). The first detection channel includes an input lens 54(1) through 54(2K-1) (such as a manifold lens), an intermediate optic 56(1) through 56(2K-1), and a sensor 58(1) through 58(2K-1).

[0051] The sensor is configured to generate a first detection signal that is processable by a processor 71 to select one or more pupil plane segments of interest. The intermediate optic can include an optical fiber and one or more additional lenses. The inspection system can be controlled by a controller 72 and can further include a memory 73 and a communication unit or interface 74 for communication with other systems.

[0052] The beam splitter 32, the objective lens 34, the mirror 36, the distribution lens 38, the configurable filter 42, the plurality of optical fibers 40, and the fiber output optics 48(1) through 34(2K-1) belong to a collection optic 15 of the inspection system.

[0053] Figure 3 An example of the inspection system 9 during a partially masked pupil plane inspection process is shown, as well as a sample 30.

[0054] For simplicity of illustration, Figure 3 The optical fibers and fiber output optical elements are not shown in the

[0055] The inspection system 9 includes an illumination module 10 that illuminates the sample 30 with a plurality of beams of radiation 12 (only one beam is shown due to the side view). The plurality of beams of radiation passes through the beam splitter 32, impinges on the objective lens 34, and is focused onto the sample 30 (forming a plurality of spots 60(1) through 60(2K-1)). In Figure 3 In the Figure 3 , the spots can form an array with longitudinal axes that extend beyond the

[0056] The illumination module 10 can form a plurality of traveling lenses within an acousto-optic medium and the plurality of traveling lenses can focus the radiation to form the plurality of spots on the sample. An example of an inspection system with traveling lens shaping optics is described in U.S. Patent 6,809,808, which is incorporated herein by reference.

[0057] Scattered radiation from the sample is collected by the objective lens 34 and propagates (in the absence of the mirror 36) to the configurable filter 42.

[0058] The configurable filter 42 comprises configurable filter segments 41(1) to 42(2K-1) and is configured to pass radiation received from one or more pupil plane segments of interest and block (see black segments) radiation received from one or more pupil plane segments of non-interest.

[0059] The configurable filter 42 is followed by a lens, such as a tube lens 44, which is configured to distribute radiation scattered from different spots (radiation denoted 11(1) to 11(2K-1)) to different second detection channels, Figure 3 The different second detection channels in Figure 2 are the same as the detection channels in

[0060] The processor and / or controller can comprise one or more processing circuits. The processing circuitry can be implemented as a Central Processing Unit (CPU) and / or one or more other integrated circuits such as an Application Specific Integrated Circuit (ASIC), Field-Programmable Gate Array (FPGA), a digital signal processor (DSP), a custom circuit, and / or other circuitry, or combinations thereof.

[0061] Figure 4 A method 200 for high throughput defect detection is shown.

[0062] The method 200 can comprise:

[0063] (a) illuminating, by an optical module, at least one point of a sample with a single beam. S202.

[0064] (b) receiving, at a split plane that is conjugate to a pupil plane of the light distribution module, at least one reflected radiation signal emitted from the at least one point. S204.

[0065] (c) spatially splitting the at least one reflected radiation signal between different first detection channels, wherein the different first detection channels receive different radiation segments associated with different split plane portions. S206

[0066] (d) generating, by the different first detection channels, first detection signals. S208

[0067] (e) determining, based on the first detection signals, one or more pupil plane portions of interest. S210

[0068] (f) configuring one or more configurable masks of different second detection channels to pass radiation received from the one or more pupil plane portions of interest and to block radiation received from pupil plane portions other than the one or more pupil plane portions of interest. S212.

[0069] (g) illuminating the points of the sample simultaneously by the light module with different beams. S214.

[0070] (h) distributing the different reflected radiation signals emitted from the different points between different second detection channels. S216.

[0071] (i) filtering the different reflected radiation signals by one or more configurable masks to provide different filtered reflected radiation signals. S218.

[0072] (j) generating second detection signals by the second detection channels, the second detection signals being indicative of the different filtered reflected radiation signals. S220.

[0073] In the foregoing specification, embodiments of the disclosure have been described with reference to specific examples thereof. It will, however, be evident that various modifications and changes can be made thereto without departing from the broader spirit and scope of embodiments of the disclosure as set forth in the appended claims.

[0074] Also, the terms "front," "back," "top," "bottom," "over," "under," and the like in the description and in the claims, if any, are used for descriptive purposes and not necessarily for describing permanent relative positions. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments of the disclosure described herein are capable of operation in other orientations than described or otherwise shown in the figures.

[0075] Connections as discussed herein can be any type of connection suitable to communicate signals from or to the respective nodes, units, or devices, for example, via intermediate devices. Thus, unless otherwise implied or apparent from context or the specification, any connection can be an electrical, optical, electromagnetic, or any combination thereof. As used herein, the term "coupled" and variations thereof means connected, whether directly or indirectly through intervening components, whether electrically, mechanically, or otherwise, and includes any wireless interaction. As used herein, the term "connected" and variations thereof means in electrical communication, whether directly or indirectly through intervening components, and includes being electrically coupled, mechanically coupled, or otherwise coupled through electrical, magnetic, electromagnetic, or other means.

[0076] Any arrangement of components to achieve the same functionality is effectively "associated" such that the desired functionality is achieved. Hence, any two components herein combined to achieve a particular functionality can be seen as "associated with" each other such that the desired functionality is achieved, irrespective of architectures or intermediate components. Likewise, any two components so associated can also be viewed as being "operably connected," or "operably coupled," to each other to achieve the desired functionality.

[0077] Furthermore, those skilled in the art will recognize that boundaries between the operations are merely illustrative. The multiple operations can be combined into a single operation, a single operation can be distributed in additional operations and operations can be executed at least partially overlapping in time. Moreover, alternative embodiments can include multiple instances of a particular operation, and the order of operations can be altered in various other embodiments.

[0078] Also, for example, in one embodiment, the illustrated examples can be implemented as circuitry located within the same physical hardware, or separate physical hardware but executing on the same device. Alternatively, examples can be implemented as any number of separate integrated circuits or separate devices interconnected with each other in a suitable manner.

[0079] However, other modifications, changes and alternatives are also possible. The specification and drawings are accordingly to be regarded in an illustrative rather than in a restrictive sense.

[0080] In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word comprising” does not exclude the presence of additional elements or steps than those listed in a claim. Further, the word “a” or “an” preceding an element does not exclude the presence of a plurality of such elements. Furthermore, the wording “one” or “another” preceding an element does not exclude the presence of more than one of such elements, nor does it imply that all or even some of the elements must be identical. Also, the wording “comprising” is to be interpreted as including any additional steps and elements which do not modify the basic and novel properties of the methods or compositions described in the claims. The use of introductory phrases such as “at least one” and “one or more” in the claims intends to include the possibility that a combination of elements listed in the claim can be present in the application, even if such a combination is not explicitly mentioned in the summary of application. Also, the use of “comprising” (and any variations such as “comprise”, “comprises”, “including”, “includes”, “contain” or “contains”) does not exclude other elements or steps than those listed in the claim. The mere fact that different features are recited in mutually different dependent claims does not indicate that multiple patents can be directed at a plurality of different features. Furthermore, any portion of the application can be implemented in a high-level language, a low-level language, or a pre-compiler language (e.g., ASP pages). Any of the applications can be implemented as a routine embedded in a microprocessor environment, as a program, a component, or a computer program product.

[0081] While certain features of the embodiments of the disclosure have been illustrated and described, numerous modifications, substitutions, changes, and equivalents will now occur to those skilled in the art. Therefore, it is to be understood that the appended claims are intended to cover all such modifications and changes as fall within the true spirit of the embodiments of the disclosure.

Claims

1. A method for high throughput defect detection using an inspection system configured to detect defects on a sample, the method comprising: illuminating the sample with a beam of radiation; receiving a scattered portion of the beam of radiation at a distribution lens of the inspection system, the distribution lens being divided into a plurality of distribution lens plane segments; directing the scattered portion of the beam of radiation received at the plurality of distribution lens plane segments to a first detection channel, wherein the scattered portion of the beam of radiation received at each of the plurality of distribution lens plane segments is directed into a different first detection channel of the first detection channel; identifying one or more of the plurality of distribution lens plane segments as a segment of interest based on the scattered portion of the beam of radiation received at the first detection channel, wherein the plurality of distribution lens plane segments have corresponding pupil plane segments and a pupil plane segment associated with the segment of interest is identified as a pupil plane segment of interest; configuring a configurable filter associated with a second detection channel, wherein the configurable filter has configurable filter segments each associated with one of the pupil plane segments and the configurable filter is configured to pass radiation on the pupil plane segment of interest and block radiation on non-pupil plane segments of interest; and performing a partial masked pupil plane inspection process using the second detection channel.

2. The method of claim 1, wherein at least one first detection channel is also at least one second detection channel.

3. The method of claim 1, comprising selecting a pupil plane segment of interest when it is determined that scattered light associated with the pupil plane segment is indicative of a suspect defect.

4. The method of claim 1, comprising selecting a pupil plane segment of interest when it is determined that scattered light associated with the pupil plane segment is indicative of a suspect defect and satisfies a signal to noise requirement.

5. The method of claim 1, wherein at least one first detection channel is different from at least one second detection channel.

6. The method of claim 1, wherein the partial masked pupil plane inspection process comprises illuminating the sample with a plurality of beams of radiation.

7. The method of claim 1, wherein illuminating the sample comprises using a plurality of optical fibers to distribute different reflected beam segments associated with different pupil plane segments to different first detection channels.

8. The method of claim 1, comprising operating a radiation distribution unit in a first mode by segmenting a pupil plane and operating the radiation distribution unit in a second mode during the partial masked pupil plane inspection process.

9. A non-transitory computer readable medium for high throughput defect detection using an inspection system configured to detect defects on a sample, the non-transitory computer readable medium containing instructions for causing the inspection system to perform a method comprising: illuminating the sample with a beam of radiation; receiving a scattered portion of the beam of radiation at a distribution lens of the inspection system, the distribution lens being divided into a plurality of distribution lens plane segments; ​ directing the scattered portion of the radiation beam received at the plurality of distribution lens plane segments to a first detection channel, wherein the scattered portion of the radiation beam received at each of the plurality of distribution lens plane segments is directed into a different first detection channel of the first detection channel; identifying one or more of the plurality of distribution lens plane segments as a segment of interest based on the scattered portion of the radiation beam received at the first detection channel, wherein the plurality of distribution lens plane segments have corresponding pupil plane segments and a pupil plane segment associated with the segment of interest is identified as a pupil plane segment of interest; configuring a configurable filter associated with a second detection channel, wherein the configurable filter has configurable filter segments each associated with one of the pupil plane segments and the configurable filter is configured to pass radiation on the pupil plane segment of interest and block radiation on non-pupil plane segments of interest; and performing a partial masked pupil plane inspection process using the second detection channel.

10. The non-transitory computer readable medium of claim 9, wherein at least one first detection channel is also at least one second detection channel.

11. The non-transitory computer readable medium of claim 9, comprising instructions to select a pupil plane segment of interest when it is determined that the scattered light associated with the pupil plane segment indicates a suspect defect.

12. The non-transitory computer readable medium of claim 9, comprising instructions to select a pupil plane segment of interest when it is determined that the scattered light associated with the pupil plane segment indicates a suspect defect and a signal to noise ratio requirement is satisfied.

13. The non-transitory computer readable medium of claim 9, wherein at least one first detection channel is different from at least one second detection channel.

14. The non-transitory computer readable medium of claim 9, wherein the partial masked pupil plane inspection process comprises illuminating the sample with a plurality of radiation beams.

15. The non-transitory computer readable medium of claim 9, wherein illuminating the sample comprises instructions to use a plurality of optical fibers to distribute different reflected radiation beam segments associated with different pupil plane segments to different first detection channels.

16. The non-transitory computer readable medium of claim 9, comprising instructions to operate a radiation distribution unit in a first mode through a segmented pupil plane and operate the radiation distribution unit in a second mode during the partial masked pupil plane inspection process.

17. A high throughput inspection system, comprising: a first detection channel; a second detection channel; illumination optics to illuminate a sample with a radiation beam; collection optics comprising a configurable filter; wherein the collection optics are configured to collect radiation emitted from the sample as a result of illumination of the sample; a controller configured to: (a) illuminate the sample using the illumination optics; (b) direct the collected radiation to the first detection channel; (c) identify one or more of the plurality of distribution lens plane segments as a segment of interest based on the collected radiation received at the first detection channel, wherein the plurality of distribution lens plane segments have corresponding pupil plane segments and a pupil plane segment associated with the segment of interest is identified as a pupil plane segment of interest; (d) configure a configurable filter associated with a second detection channel, wherein the configurable filter has configurable filter segments each associated with one of the pupil plane segments and the configurable filter is configured to pass radiation on the pupil plane segment of interest and block radiation on non-pupil plane segments of interest; and (e) perform a partial masked pupil plane inspection process using the second detection channel. (b) receiving a scattered portion of the radiation beam at a distribution lens of the collection optics, the distribution lens being divided into a plurality of distribution lens plane segments; (c) directing the scattered portion of the radiation beam received at the plurality of distribution lens plane segments to the first detection channels, wherein the scattered portion of the radiation beam received at each of the plurality of distribution lens plane segments is directed into a different first detection channel of the first detection channels; (d) identifying one or more of the plurality of distribution lens plane segments as a segment of interest based on the scattered portion of the radiation beam received at the first detection channels, wherein the plurality of distribution lens plane segments have corresponding pupil plane segments and a pupil plane segment associated with the segment of interest is identified as a pupil plane segment of interest; (e) configuring the configurable filter associated with the second detection channel, wherein the configurable filter has configurable filter segments each associated with one of the pupil plane segments and the configurable filter is configured to pass radiation over a pupil plane segment of interest and block radiation over a non-pupil plane segment of interest; and (f) performing a partial masked pupil plane inspection process using the second detection channel.

18. The high throughput inspection system of claim 17, wherein at least one first detection channel is also at least one second detection channel.

19. The high throughput inspection system of claim 17, wherein the controller is configured to select a pupil plane segment of interest when it is determined that scattered light associated with the pupil plane segment is indicative of a suspect defect.

20. The high throughput inspection system of claim 17, wherein the controller is configured to select a pupil plane segment of interest when it is determined that scattered light associated with the pupil plane segment is indicative of a suspect defect and a signal to noise ratio requirement is satisfied.

21. The high throughput inspection system of claim 17, wherein at least one first detection channel is different than at least one second detection channel.

22. The high throughput inspection system of claim 17, wherein the illumination optics are configured to illuminate the sample with a plurality of radiation beams in the partial masked pupil plane inspection process.

23. The high throughput inspection system of claim 17, wherein the collection optics include a plurality of optical fibers configured to distribute different reflected radiation beam segments associated with different pupil plane segments to different first detection channels.

24. The high throughput inspection system of claim 17, wherein the collection optics include a radiation distribution unit configured to operate in a first mode through a segmented pupil plane and configured to operate in a second mode during the partial masked pupil plane inspection process. ​

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