Piezoelectric pump and heat dissipation circulation system

Abstract

This invention discloses a piezoelectric pump and a heat dissipation circulation system. The piezoelectric pump includes a valve seat, a valve body assembly, an excitation assembly, and a pressure regulating assembly. The valve seat has a spaced inlet and an outlet. The valve body assembly is stacked with the valve seat and forms a unidirectional liquid channel, the outlet of which is connected to the outlet. The excitation assembly is located on the side of the valve body assembly opposite to the valve seat and forms a pump chamber therewith. The pressure regulating assembly is sandwiched between the valve body assembly and the valve seat and has a pressure regulating chamber that connects the inlet and the inlet of the liquid channel. The excitation assembly drives liquid to enter through the inlet, and through the pressure regulating chamber, the liquid channel, and the pump chamber, flows out through the outlet. The volume change trend of the pressure regulating chamber is opposite to that of the pump chamber. The piezoelectric pump of this invention has a compact structure, which can effectively reduce the space occupied and is beneficial to the miniaturization of the heat dissipation circulation system.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of piezoelectric devices, in particular to a piezoelectric pump and a heat dissipation circulation system. BACKGROUND

[0002] The piezoelectric pump is a new type of liquid device using the inverse piezoelectric effect of piezoelectric ceramics and a piezoelectric vibrator as a driver, which is widely used in the fields of biological medicine, heat dissipation and cooling, and portable detection equipment.

[0003] In the field of liquid cooling and heat dissipation, when the piezoelectric pump is used as a driving element, the heat dissipation circulation system needs to additionally increase a liquid storage device to eliminate the volume change caused by the operation of the piezoelectric pump, so as to ensure the normal operation of the heat dissipation circulation system, thereby resulting in a large volume and low integration of the entire heat dissipation circulation system. SUMMARY

[0004] The main purpose of the present application is to provide a piezoelectric pump, which aims to solve the technical problem of a large volume of a heat dissipation system.

[0005] To achieve the above-mentioned purpose, the piezoelectric pump provided by the present application comprises:

[0006] A valve seat is formed with a spaced water inlet and a water outlet;

[0007] A valve body assembly is arranged in layers with the valve seat and is formed with a single-flow liquid channel, and the outlet of the liquid channel is in communication with the water outlet;

[0008] An excitation assembly is arranged on the side of the valve body assembly away from the valve seat and forms a pump cavity together with the valve seat; and

[0009] A pressure regulating assembly is arranged between the valve body assembly and the valve seat and has a pressure regulating cavity, and the pressure regulating cavity is in communication with the water inlet and the inlet of the liquid channel;

[0010] The excitation assembly drives the liquid to enter from the water inlet, pass through the pressure regulating cavity, the liquid channel and the pump cavity, and flow out from the water outlet, and the volume change trend of the pressure regulating cavity is opposite to that of the pump cavity.

[0011] In an optional embodiment, the pressure regulating assembly comprises a pressure regulating plate and a diaphragm arranged on one side of the pressure regulating plate, the pressure regulating plate is formed with a pressure regulating hole, and the hole wall of the pressure regulating hole and the diaphragm form the pressure regulating cavity together;

[0012] The valve seat is provided with a pressure relief hole, the diaphragm is arranged towards the valve seat, the pressure relief hole is in communication with the pressure regulating cavity through the diaphragm, so that the diaphragm is deformed into the pressure regulating hole when the volume of the pump cavity increases.

[0013] Optionally, the diaphragm is provided with a relief hole, the pressure regulating plate is provided with spaced water inlet holes and water outlet holes, the water inlet holes are communicated with the pressure regulating cavity through flow guide grooves, the water inlet, the relief hole and the water inlet holes are vertically correspondingly communicated, and the water outlet holes are communicated with the water outlet and the outlet of the liquid channel.

[0014] Optionally, the pressure regulating hole is arranged at one end of the pressure regulating plate, and the water inlet holes and the water outlet holes are arranged side by side at the other end of the pressure regulating plate.

[0015] Optionally, the valve body assembly comprises a first pressing plate, a valve plate and a second pressing plate which are sequentially stacked, the second pressing plate is attached to the pressure regulating plate, and the first pressing plate is attached to the excitation assembly.

[0016] The first pressing plate and the second pressing plate are each provided with a large flow hole and a small flow hole, the valve plate is connected with deformable liquid inlet valve plates and liquid outlet valve plates, the area of each of the liquid inlet valve plates and the liquid outlet valve plates is larger than the area of the small flow hole and smaller than the area of the large flow hole, the small flow hole of the second pressing plate, the liquid inlet valve plate and the large flow hole of the first pressing plate are vertically correspondingly arranged to form a liquid inlet flow channel, the large flow hole of the second pressing plate, the liquid outlet valve plate and the small flow hole of the first pressing plate are vertically correspondingly arranged to form a liquid outlet flow channel, and the liquid inlet flow channel and the liquid outlet flow channel form the liquid channel.

[0017] Optionally, there are at least two liquid inlet valve plates and at least two liquid outlet valve plates, and there are at least two large flow holes and at least two small flow holes in the first pressing plate and the second pressing plate.

[0018] Optionally, one small flow hole of the second pressing plate corresponds to one liquid inlet valve plate and one large flow hole of the first pressing plate, one large flow hole of the second pressing plate corresponds to one liquid outlet valve plate and one small flow hole of the first pressing plate, and at least two large flow holes of the second pressing plate are correspondingly communicated with the water outlet.

[0019] Optionally, the valve plate is provided with a plurality of connecting holes, each liquid inlet valve plate is in a cantilever structure and connected to the hole wall of one connecting hole at one end, and each liquid outlet valve plate is in a cantilever structure and connected to the hole wall of one connecting hole at one end.

[0020] Optionally, the hole wall of each connecting hole is connected with two spaced connecting arms, and one end of the liquid inlet valve plate or the liquid outlet valve plate is connected with the two connecting arms.

[0021] And / or, the shape of the liquid inlet valve sheet and the liquid outlet valve sheet is square, and the opening shape of the large flow hole and the small flow hole is square.

[0022] In an optional embodiment, the excitation assembly comprises a piezoelectric sheet, a vibrating plate and a backing plate arranged in layers, the piezoelectric sheet is arranged on the side of the vibrating plate away from the valve body assembly, the backing plate is provided with a through hole, and the vibrating plate, the hole wall of the through hole and the first pressing plate jointly enclose the pump cavity, and the area of the through hole is larger than the total area of the large flow hole and the small flow hole of the first pressing plate.

[0023] The application further provides a heat dissipation circulation system comprising the piezoelectric pump.

[0024] In the technical scheme of the application, the piezoelectric pump comprises a valve seat, a valve body assembly, an excitation assembly and a pressure regulating assembly, the valve seat is formed with spaced water inlets and water outlets, the valve body assembly is formed with a single-flow liquid channel, the outlet of the liquid channel is communicated with the water outlet, the excitation assembly and the valve body assembly jointly enclose a pump cavity, and the volume of the pump cavity can be increased by the driving of the excitation assembly, so that the pressure of the liquid channel is reduced, liquid can flow into the pump cavity through the water inlet and the liquid channel, and the volume of the pump cavity is reduced with the change of the excitation assembly, so that liquid can be driven to flow out of the water outlet, thereby completing the circulation and pumping of liquid. Here, the pressure regulating assembly is directly clamped between the valve body assembly and the valve seat, and has a pressure regulating cavity communicated with the water inlet and the inlet of the liquid channel, the volume of the pressure regulating cavity can also be changed, and the change trend is opposite to that of the pump cavity, that is, when the volume of the pump cavity is increased, the volume of the pressure regulating cavity is reduced, so that the pressure in the closed circulation space of the piezoelectric pump is in a balanced state, and the circulation and flow of liquid are ensured to be efficient.

[0025] Since the pressure regulating assembly is arranged in the piezoelectric pump and is arranged in layers with the valve body assembly and the valve seat, an additional liquid storage device is not needed, the piezoelectric pump has a compact structure and high integration, and the volume of the heat dissipation circulation system can be reduced, thereby facilitating the miniaturization design. BRIEF DESCRIPTION OF DRAWINGS

[0026] In order to more clearly illustrate the technical scheme in the embodiments of the application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description only show some embodiments of the application, and other drawings can be obtained by those skilled in the art without any creative effort on the basis of the drawings shown.

[0027] Figure 1 It is a longitudinal sectional view of one direction of an embodiment of the piezoelectric pump of the application;

[0028] Figure 2 for Figure 1 A longitudinal sectional view of the piezoelectric pump in another direction;

[0029] Figure 3 for Figure 1 The diagram shows a piezoelectric pump in the liquid being pumped in.

[0030] Figure 4 for Figure 1 The diagram shows a piezoelectric pump in the liquid being pumped out.

[0031] Figure 5 This is an exploded view of the structure of the piezoelectric pump of the present invention;

[0032] Figure 6 for Figure 3 The diagram shows the structure of the valve plate in the piezoelectric pump.

[0033] Explanation of icon numbers:

[0034] Reference Name Reference Name 10 Piezoelectric pump 3 Excitation assembly 1 Valve seat 3a Pump cavity 11 Water inlet 31 Piezoelectric sheet 12 Water outlet 32 Vibration plate 13 Pressure relief hole 33 Backing plate 2 Valve body assembly 331 Via hole 21 First pressing plate 4 Pressure regulating assembly 22 Valve sheet plate 4a Pressure regulating cavity 221 Connecting hole 41 Pressure regulating plate 222 Connecting arm 411 Pressure regulating hole 23 Second pressing plate 412 Water inlet hole 231 Large flow hole 413 Water outlet hole 232 Small flow hole 414 Flow guide groove 24 Inlet valve sheet 42 Diaphragm 25 Outlet valve sheet 421 Avoidance hole

[0035] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0036] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0037] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indication will also change accordingly.

[0038] Furthermore, in this invention, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0039] In addition, the technical solutions in the various embodiments of the present application can be combined with each other, but the combination of the technical solutions should be considered not to exist and not within the protection scope of the present application when the combination of the technical solutions appears to be contradictory or unachievable on the basis that the combination of the technical solutions can be realized by the ordinary skilled in the art.

[0040] The piezoelectric pump is a new type of liquid driver. It does not need an additional driving motor, but uses the inverse piezoelectric effect of the piezoelectric ceramic to make the piezoelectric vibrator deform, and then the deformation generates the volume change of the pump cavity to realize the liquid output or uses the piezoelectric vibrator to generate the wave to transmit the liquid. The present application provides a piezoelectric pump. By arranging the pressure regulating assembly between the valve body assembly and the valve seat, the water inlet is connected, which is beneficial to the miniaturization design.

[0041] Please refer to Figures 1 to 4 In an optional embodiment of the present application, the piezoelectric pump 10 comprises a valve seat 1, a valve body assembly 2, an excitation assembly 3 and a pressure regulating assembly 4. The valve seat 1 is formed with a spaced water inlet 11 and a water outlet 12.

[0042] The valve body assembly 2 is arranged in layers with the valve seat 1 and is formed with a single-flow liquid channel. The outlet of the liquid channel is communicated with the water outlet 12. The excitation assembly 3 is arranged on the side of the valve body assembly 2 away from the valve seat 1 and forms a pump cavity 3a with the valve body assembly 2. The pressure regulating assembly 4 is arranged between the valve body assembly 2 and the valve seat 1 and has a pressure regulating cavity 4a. The pressure regulating cavity 4a is communicated with the water inlet 11 and the inlet of the liquid channel.

[0043] The excitation assembly 3 drives the liquid to enter from the water inlet 11, pass through the pressure regulating cavity 4a, the liquid channel and the pump cavity 3a and flow out from the water outlet 12. The volume change trend of the pressure regulating cavity 4a is opposite to that of the pump cavity 3a.

[0044] The valve seat 1 is formed with a water inlet 11 and a water outlet 12. The valve body assembly 2 is formed with a single-flow liquid channel. The excitation assembly 3 is used to provide driving force for the piezoelectric pump 10, so as to drive the liquid to enter from the water inlet 11, pass through the liquid channel and the pump cavity 3a and flow out from the water outlet 12. Since the water inlet 11 and the water outlet 12 are on one side of the piezoelectric pump 10, the liquid channel is backbent, that is, the liquid flows from one side of the valve seat 1 to the excitation assembly 3, turns back to flow out in the direction of the valve seat 1 after reaching the pump cavity 3a of the excitation assembly 3. In addition, pipelines or circulating water lines are connected to the sides of the water inlet 11 and the water outlet 12 away from the valve body assembly 2, so that the liquid flows from the water outlet 12 into the water inlet 11, forming a closed liquid circulation.

[0045] In an example, the valve seat 1, the valve body assembly 2 and the excitation assembly 3 are all flat plate structures, and the water inlet 11 and the water outlet 12 of the valve seat 1 are circular in shape for facilitating connection with pipelines. In other examples, the water inlet 11 and the water outlet 12 can also be square, oval or the like in shape. The water inlet 11 and the water outlet 12 can be located at the same end of the valve seat 1 or at two ends of the valve seat 1, which is not limited herein. The pressure regulating assembly 4 is arranged between the valve seat 1 and the valve body assembly 2, and has a pressure regulating cavity 4a with a variable volume. At least part of the cavity wall of the pressure regulating cavity 4a is elastically deformable, so that it can be deformed under pressure when the volume of the pump cavity 3a changes and the internal pressure changes, thereby changing the volume of the pressure regulating cavity 4a to balance the internal pressure. For example, the pressure regulating assembly 4 can be an elastic membrane structure, or a combination of a support structure and an elastic membrane, which is not limited herein. The pressure regulating cavity 4a is in communication with the water inlet 11, which can be arranged at a position corresponding to the pressure regulating cavity 4a, or a flow guide structure can be arranged to communicate the water inlet 11 and the pressure regulating cavity 4a, which is not limited herein. The shape of the pressure regulating cavity 4a is not limited, and the spatial shape can be a circular cylinder or a square cylinder, etc. The volume of the pressure regulating cavity 4a can be set according to the size of the volume of the pump cavity 3a to meet the demand of compensating for the volume change of the pump cavity 3a.

[0046] The valve body assembly 2 has a liquid channel, the inlet of which is in communication with the pressure regulating cavity 4a, which can be arranged to correspond to the inlet of the liquid channel, or can be communicated by a flow guide structure. The liquid channel is single-flow, and the valve body assembly 2 is internally provided with an inlet valve structure and an outlet valve structure, both of which can be opened and closed under certain conditions, so that the liquid entering from the water inlet 11 can only pass through the inlet valve structure, and then flow from the outlet valve structure to the water outlet 12 after passing through the pump cavity 3a, thereby realizing the unidirectional flow of the liquid. The valve structure herein is not limited to a wheel valve or a cantilever beam valve, as long as it can realize the unidirectional control of the liquid. In an example, the valve body assembly 2 can be an integral structure with a through hole formed to form the liquid channel. In another example, the valve body assembly 2 can also be a split structure with multiple plate body structures stacked, and the holes on each split body are arranged correspondingly to form the liquid channel.

[0047] The excitation assembly 3 includes a piezoelectric sheet 31 and a vibrating plate 32. The piezoelectric sheet 31 is a piezoelectric ceramic structure, which deforms and moves up and down according to the inverse piezoelectric effect. The piezoelectric sheet 31 and the vibrating plate 32 are connected by adhesive or welding, thereby driving the vibrating plate 32 to vibrate up and down. The vibrating plate 32 is made of metal, such as copper sheet. In one example, the piezoelectric sheet 31 has a circular cross-sectional shape, and the vibrating plate 32 has a square shape. The center of the piezoelectric sheet 31 and the center of the vibrating plate 32 are aligned in the vertical direction. The periphery of the excitation assembly 3 is connected to the valve body assembly 2, and a pump cavity 3a is formed between the lower surface and the upper surface of the valve body assembly 2. When the piezoelectric sheet 31 drives the vibrating plate 32 to move upward, the volume of the pump cavity 3a can be increased.

[0048] In the technical solution of the present invention, the piezoelectric pump 10 includes a valve seat 1, a valve body assembly 2, an excitation assembly 3, and a pressure regulating assembly 4. The valve seat 1 forms an inlet 11 and an outlet 12 spaced apart. The valve body assembly 2 forms a unidirectional liquid channel, and the outlet 12 of the liquid channel is connected. The excitation assembly 3 and the valve body assembly 2 enclose a pump chamber 3a. By driving the excitation assembly 3, the volume of the pump chamber 3a can be increased, thereby reducing the pressure of the liquid channel. Liquid can flow in from the inlet 11 and enter the pump chamber 3a through the liquid channel. As the excitation assembly 3 changes, the volume of the pump chamber 3a decreases, which can drive the liquid to flow out from the outlet 12, completing the circulation pumping of the liquid. Here, the pressure regulating component 4 is directly clamped between the valve body component 2 and the valve seat 1, and has a pressure regulating chamber 4a with an inlet connecting the water inlet 11 and the liquid channel. The volume of the pressure regulating chamber 4a can also change, and the trend of change is opposite to the trend of change of the volume of the pump chamber 3a. That is, when the volume of the pump chamber 3a increases, the volume of the pressure regulating chamber 4a decreases, so that the pressure in the closed circulation space of the piezoelectric pump 10 is in a balanced state, ensuring efficient circulation of the liquid.

[0049] Because the pressure regulating component 4 is located inside the piezoelectric pump 10 and is stacked with the valve body component 2 and the valve seat 1, there is no need to set up an additional liquid storage device. This makes the piezoelectric pump 10 compact and highly integrated, thereby reducing the volume of the required heat dissipation circulation system and facilitating miniaturization design.

[0050] Please combine Figure 3 and Figure 5 In an optional embodiment, the pressure regulating component 4 includes a pressure regulating plate 41 and a diaphragm 42 attached to one side of the pressure regulating plate 41. The pressure regulating plate 41 has a pressure regulating hole 411, and the hole wall of the pressure regulating hole 411 and the diaphragm 42 surround each other to form the pressure regulating cavity 4a.

[0051] The valve seat 1 has a pressure relief hole 13, and the diaphragm 42 is positioned facing the valve seat 1. The pressure relief hole 13 is connected to the pressure regulating chamber 4a through the diaphragm 42, so that when the volume of the pump chamber 3a increases, the diaphragm 42 deforms into the pressure regulating hole 411.

[0052] In this embodiment, the pressure regulating assembly 4 includes a pressure regulating plate 41 and a diaphragm 42. The pressure regulating plate 41 is made of a rigid material and provides a certain supporting function; for example, it can be made of metal or plastic. The diaphragm 42 is made of a metal sheet, a plastic sheet, or synthetic fiber, and has certain elastic properties, allowing it to undergo elastic deformation under pressure. The pressure regulating plate 41 has a pressure regulating hole 411, and the diaphragm 42 is attached to one surface of the pressure regulating plate 41, thereby sealing one opening of the pressure regulating hole 411 and forming a pressure regulating cavity 4a with the lower surface of the valve body assembly 2. The shape and size of the diaphragm 42 are adapted to the shape and size of the pressure regulating plate 41, thereby increasing the connection between the pressure regulating plate 41 and the diaphragm 42 and ensuring edge sealing with the valve seat 1. In other examples, the diaphragm 42 can also be configured to only cover the size of the pressure regulating hole 411. This structure of the pressure regulating assembly 4 makes only part of the cavity wall of the pressure regulating cavity 4a deformable, improving structural strength and extending its service life.

[0053] The valve seat 1 also has a pressure relief hole 13. In one example, the pressure relief hole 13 and the pressure regulating hole 411 are arranged correspondingly in the stacking direction, so that the diaphragm 42 can be connected to the pressure regulating hole 411 through the air-permeable diaphragm 42, making it easier to drive the deformation of the diaphragm 42 to regulate the pressure. When the volume of the pump chamber 3a increases, the internal pressure of the piezoelectric pump 10 decreases, and the external atmospheric pressure can drive the diaphragm 42 to elastically deform towards the side of the valve body assembly 2, so that the volume of the pressure regulating chamber 4a decreases, compensating for the large increase in the volume of the pump chamber 3a. In one example, the shape of the pressure regulating plate 41 is adapted to the shape of the valve seat 1, for example, both are cuboids, so that the circumferential sealing of the piezoelectric pump 10 can be achieved. The opening shape of the pressure relief hole 13 can be circular, square or other irregular shapes, etc., and is not limited here. The opening size of the pressure relief hole 13 is smaller than the opening size of the pressure regulating hole 411, and is designed to be smaller in size to improve the sealing performance of the piezoelectric pump 10 and prevent liquid leakage.

[0054] Please refer to Figure 5 In an optional embodiment, the diaphragm 42 is provided with a clearance hole 421, and the pressure regulating plate 41 is provided with a water inlet hole 412 and a water outlet hole 413 spaced apart. The water inlet hole 412 is connected to the pressure regulating chamber 4a through a guide groove 414. The water inlet 11, the clearance hole 421 and the water inlet hole 412 are correspondingly connected in the vertical direction. The water outlet hole 413 is connected to the water outlet 12 and the outlet of the liquid channel.

[0055] In this embodiment, to improve the smoothness of liquid flow, clearance holes 421 are respectively provided at the positions of the diaphragm 42 corresponding to the inlet / outlet and the outlet 12, and the pressure regulating plate 41 is provided with an inlet 412 and an outlet 413. In one example, the inlet 11, clearance holes 421, and inlet 412 are vertically aligned, thereby enabling the liquid to flow more quickly from the inlet 11 to the pressure regulating chamber 4a, improving the efficiency of pumping in liquid. For example, the centers of the inlet 11, clearance holes 421, and inlet 412 are vertically aligned to further reduce liquid resistance and improve pumping efficiency. In another example, the outlet 413, clearance holes 421, and outlet 12 are vertically aligned, thereby improving the efficiency of pumping out liquid. For example, the centers of the outlet 413, clearance holes 421, and outlet 12 are vertically aligned to improve pumping efficiency. The water inlet 412 is connected to the pressure regulating chamber 4a through the guide groove 414. The guide groove 414 is opened between the water inlet 412 and the pressure regulating hole 411, so as to separate it from the vent hole and avoid affecting the pressure regulation.

[0056] Please continue to refer to Figure 5 In an optional embodiment, the pressure regulating hole 411 is located at one end of the pressure regulating plate 41, and the water inlet hole 412 and the water outlet hole 413 are arranged side by side at the other end of the pressure regulating plate 41.

[0057] In this embodiment, the pressure regulating hole 411 is designed according to the volume of the pump chamber 3a. The size of the pressure regulating hole 411 is larger than that of the inlet hole 412 and the outlet hole 413. Therefore, the inlet hole 412 and the outlet hole 413 are arranged side-by-side with intervals along the width direction of the pressure regulating plate 41, while the inlet hole 412 and the pressure regulating hole 411 are arranged with intervals along the length direction of the pressure regulating plate 41. This allows for a reasonable layout, a compact structure, and a reduction in the volume of the pressure regulating plate 41, thereby further reducing the overall volume of the piezoelectric pump 10 and facilitating miniaturization. Here, the guide groove extends along the length direction of the pressure regulating plate.

[0058] Please combine Figure 1 , Figure 3 and Figure 4 In an optional embodiment, the valve body assembly 2 includes a first pressure plate 21, a valve plate 22 and a second pressure plate 23 stacked in sequence, the second pressure plate 23 being attached to the pressure regulating plate 41 and the first pressure plate 21 being attached to the excitation assembly 3;

[0059] The first pressure plate 21 and the second pressure plate 23 are each provided with a large flow hole 231 and a small flow hole 232. The valve plate 22 is connected with a deformable inlet valve plate 24 and an outlet valve plate 25. The areas of the inlet valve plate 24 and the outlet valve plate 25 are both larger than the area of ​​the small flow hole 232 and smaller than the area of ​​the large flow hole 231. The small flow hole 232 of the second pressure plate 23, the inlet valve plate 24 and the large flow hole 231 of the first pressure plate 21 are arranged vertically to form an inlet flow channel. The large flow hole 231 of the second pressure plate 23, the outlet valve plate 25 and the small flow hole 232 of the first pressure plate 21 are arranged vertically to form an outlet flow channel. The inlet flow channel and the outlet flow channel form the liquid channel.

[0060] In this embodiment, the valve body assembly 2 is a split structure consisting of multiple stacked plates. The first pressure plate 21, the valve plate 22, and the second pressure plate 23 together form the aforementioned inlet valve structure and outlet valve structure. Both the first pressure plate 21 and the second pressure plate 23 are provided with small flow holes 232 and large flow holes 231. In one example, the first pressure plate 21 and the second pressure plate 23 are identical in shape for ease of processing. The only difference is that the directions of the large flow holes 231 and the small flow holes 232 are opposite. That is, the small flow holes 232 of the second pressure plate 23 correspond to the large flow holes 231 of the first pressure plate 21, and an inlet valve plate 24 is sandwiched between them. The large flow holes 231 of the second pressure plate 23 correspond to the small flow holes 232 of the first pressure plate 21, and an outlet valve plate 25 is sandwiched between them. The liquid outlet valve plate 25 and the liquid inlet valve plate 24 have approximately the same planar area, which is larger than the opening area of ​​the small flow orifice 232 but smaller than the opening area of ​​the large flow orifice 231. This allows the liquid inlet valve plate 24 to deform only towards the first pressure plate 21, enabling liquid pumping in, and the liquid outlet valve plate 25 to deform only towards the second pressure plate 23, enabling liquid pumping out. In other examples, the shapes and sizes of the large flow orifice 231 and the small flow orifice 232 of the first pressure plate 21 and the second pressure plate 23 can be different, as long as they cooperate with the liquid inlet valve plate 24 and the liquid outlet valve plate 25.

[0061] The inlet valve plate 24 and outlet valve plate 25 here can be of the same type and size, for example, both cantilever or wheel valves. The arrangement of the inlet and outlet flow channels here improves the smoothness of liquid flow and increases the flow rate of the pumped liquid. Thus, the inlet of the liquid channel is the small flow hole 232 of the second pressure plate 23, which corresponds to the pressure regulating hole 411, thereby improving the efficiency of pumping in liquid. The outlet of the liquid channel corresponds to the large flow hole 231 of the second pressure plate 23 and is corresponding to the outlet hole 413, thereby improving the efficiency of pumping out liquid.

[0062] Please refer to again Figure 5In an optional embodiment, the inlet valve plate 24 is provided with at least two, the outlet valve plate 25 is provided with at least two, the first pressure plate 21 is provided with at least two large flow holes 231 and at least two small flow holes 232, and the second pressure plate 23 is provided with at least two large flow holes 231 and at least two small flow holes 232.

[0063] Wherein, a small flow hole 232 of the second pressure plate 23 corresponds to an inlet valve plate 24 and a large flow hole 231 of the first pressure plate 21, a large flow hole 231 of the second pressure plate 23 corresponds to an outlet valve plate 25 and a small flow hole 232 of the first pressure plate 21, and at least two of the large flow holes 231 of the second pressure plate 23 are connected to the outlet 12.

[0064] In this embodiment, the shape and size of at least two inlet valve plates 24 can be the same or different; the shape and size of at least two outlet valve plates 25 can be the same or different. At least two small flow holes 232, at least two inlet valve plates 24, and at least two large flow holes 231 are all corresponding to the pressure regulating chamber 4a and the pump chamber 3a; at least two small flow holes 232, at least two outlet valve plates 25, and at least two large flow holes 231 correspond to the water outlet hole 413. Thus, by increasing the number of inlet valve plates 24, outlet valve plates 25, large flow holes 231, and small flow holes 232, the pumped liquid flow rate is increased under the drive of the excitation component 3, thereby reducing liquid stagnation and improving liquid circulation efficiency.

[0065] Optionally, both the large flow holes 231 and the small flow holes 232 are arranged along the length direction on the first pressure plate 21 and the second pressure plate 23. In this case, at least two large flow holes 231 are arranged along the width direction on both the first pressure plate 21 and the second pressure plate 23, and at least two small flow holes 232 are arranged along the width direction on both the first pressure plate 21 and the second pressure plate 23. The inlet valve plate 24 and the outlet valve plate 25 are arranged in the same manner. This further compacts the structure and saves space. At least two large flow holes 231 on the second pressure plate 23 are correspondingly arranged with the outlet holes 413 on the pressure regulating plate 41. Here, the pressure regulating plate 41 has a guide groove, and an outlet hole 413 is formed at the bottom of the groove corresponding to the outlet 12, thereby maximizing the connection of multiple large flow holes 231 and ensuring that all liquid flows out from the outlet 12, improving pumping efficiency.

[0066] Please refer to Figure 6 In an optional embodiment, the valve plate 22 has a plurality of connection holes 221, each of the liquid inlet valve plates 24 is a cantilever structure and one end is connected to the hole wall of a connection hole 221, and each of the liquid outlet valve plates 25 is a cantilever structure and one end is connected to the hole wall of a connection hole 221.

[0067] In this embodiment, the inlet valve plate 24 and the outlet valve plate 25 are both cantilever structures. This cantilever structure allows for better elastic deformation, improving the efficiency of pumping liquid. A connecting hole 221 is formed on the surface of the valve plate 22. One end of the inlet valve plate 24 is connected to the wall of the connecting hole 221, while the other end is suspended, allowing it to deform relative to the valve plate 22 under the influence of the liquid. The connecting hole 221 can be circular, square, or polygonal, and its shape can be adapted to match the shapes of the inlet valve plate 24 and the outlet valve plate 25.

[0068] Please continue to refer to Figure 6 In an optional embodiment, each of the connecting holes 221 is connected to two connecting arms 222 spaced apart, and the two connecting arms 222 are connected to one end of the inlet valve plate 24 or the outlet valve plate 25.

[0069] And / or, the inlet valve plate 24 and the outlet valve plate 25 are square in shape, and the opening shape of the large flow hole 231 and the small flow hole 232 is square.

[0070] In this embodiment, a connecting arm 222 is connected to the wall of the connecting hole 221. This connecting arm 222 serves to connect, support, and connect the inlet valve plate 24 or the outlet valve plate 25. Optionally, the connecting arm 222, the inlet valve plate 24, and the valve plate 22 are integrally formed, thereby improving the connection strength and stability between the valve plate 22 and the inlet valve plate 24 or the outlet valve plate 25, and extending their service life. In one example, two connecting arms 222 are provided, spaced apart on the wall of the connecting hole 221. The two connecting arms 222 increase the connection area between the inlet valve plate 24 or the outlet valve plate 25 and the valve plate 22, further enhancing the connection strength and stability.

[0071] Based on the structure of the connecting arm 222, which may or may not be limited, the inlet valve plate 24 and the outlet valve plate 25 are both square in shape, and the large flow orifice 231 and the small flow orifice 232 are also square in shape. The size of the large flow orifice 231 can be slightly larger than the size of the outlet valve plate 25 and the inlet valve plate 24 to allow passage, thereby improving the structural utilization of the valve body assembly 2 and further reducing the volume of the piezoelectric pump 10. In one example, the inlet valve plate 24 and the outlet valve plate 25 are both rectangular in shape, and correspondingly, the connecting hole 221 is also rectangular in shape, and the large flow orifice 231 is also rectangular in shape. One end of the inlet valve plate 24 and the outlet valve plate 25 in the length direction is connected to one hole wall in the length direction of the connecting hole 221, thereby further increasing the elastic deformation of both and further increasing the pumped liquid flow rate. In other examples, when the inlet valve plate 24 and the outlet valve plate 25 are square in shape, and the large flow orifice 231 is also square in shape, the opening shape of the small flow orifice 232 can be circular or other irregular shapes, such that the maximum opening size of the small flow orifice 232 is smaller than the size of the smallest side of the inlet valve plate 24 and the outlet valve plate 25.

[0072] Please combine Figure 1 and Figure 5 In an optional embodiment, the excitation component 3 includes a piezoelectric sheet 31, a vibrating plate 32, and a pad 33 stacked together. The piezoelectric sheet 31 is disposed on the side of the vibrating plate 32 away from the valve body component 2. The pad 33 has a through hole 331. The vibrating plate 32, the hole wall of the through hole 331, and the first pressure plate 21 together enclose the pump cavity 3a. The area of ​​the through hole 331 is larger than the total area of ​​the large flow hole 231 and the small flow hole 232 of the first pressure plate 21.

[0073] In this embodiment, by adding the pad 33, the size of the pump chamber 3a in the stacking direction can be increased, thereby increasing the volume of the pump chamber 3a, enhancing the driving force of the pumped liquid, and further increasing the pumping volume. In other examples, the peripheral wall of the vibrating plate 32 can be connected to the periphery of the valve body assembly 2, and the middle part of the vibrating plate 32 can be bent away from the valve body assembly 2, thereby forming a larger volume pump chamber 3a. The material of the pad 33 is not limited and can be metal or plastic, etc. The shape of the pad 33 is adapted to the shape of the vibrating plate 32 and the valve body assembly 2, and the size of the pad 33 is adapted to the shape of the vibrating plate 32 and the valve body assembly 2, thereby forming a larger through hole 331, which can connect the large through hole 231 and the small through hole 232 of the first pressure plate 21.

[0074] Please combine Figure 3 and Figure 4The working principle of the piezoelectric pump 10 is as follows: When the piezoelectric element 31 drives the vibrating plate 32 to vibrate upward, the volume of the pump chamber 3a increases and the pressure decreases. Under the action of pressure, the liquid in the liquid channel causes the inlet valve plate 24 to deform upward, and the liquid enters from the small flow hole 232 of the second pressure plate 23 into the large flow hole 231 of the first pressure plate 21. At the same time, under the action of pressure, the liquid in the large flow hole 231 of the second pressure plate 23 causes the outlet valve plate 25 to stick tightly to the first pressure plate 21, preventing the liquid from flowing into the small flow hole 232 of the first pressure plate 21. Since the piezoelectric pump 10 has a closed circulating water circuit, after the liquid in the small flow hole 232 of the second pressure plate 23 flows into the large flow hole 231 of the first pressure plate 21, it will cause the liquid volume in the small flow hole 232 of the second pressure plate 23 and the pressure regulating chamber 4a to decrease, generating negative pressure. This will cause the diaphragm 42 to deform upward, reducing the volume of the pressure regulating chamber 4a, so that the pressure in the piezoelectric pump 10 reaches balance.

[0075] When the piezoelectric plate 31 drives the vibrating plate 32 to vibrate downwards, the volume of the pump chamber 3a decreases and the pressure increases. Under the action of pressure, the liquid in the small flow hole 232 of the first pressure plate 21 causes the outlet valve plate 25 to deform downwards. The liquid enters the large flow hole 231 of the second pressure plate 23 from the small flow hole 232 of the first pressure plate 21. At the same time, the inlet valve plate 24 is pressed tightly against the second pressure plate 23 under the action of pressure, preventing the liquid from entering the small flow hole 232 of the second pressure plate 23. At this time, the liquid in the large flow hole 231 of the second pressure plate 23 flows out from the outlet 12 through the outlet hole 413. The pressure in the pressure regulating chamber 4a increases, causing the diaphragm 42 to deform downwards, increasing the volume of the pressure regulating chamber 4a, thereby reducing the pressure in the piezoelectric pump 10, and finally achieving pressure balance.

[0076] The liquid flowing out of the outlet 12 flows back into the inlet 11 through the external circulation water path, and so on.

[0077] The present invention also proposes a heat dissipation circulation system (not shown), which includes a piezoelectric pump 10 as described in any of the above embodiments. Since the piezoelectric pump 10 of this heat dissipation circulation system adopts all the technical solutions of all the foregoing embodiments, it has at least the beneficial effects brought about by the technical solutions of the foregoing embodiments, which will not be described in detail here.

[0078] Here, the heat dissipation circulation system can be a chip manufacturing system, using a piezoelectric pump 10 to dissipate the heat generated during chip manufacturing. Alternatively, the heat dissipation circulation system can also be a car cooling circulation system, etc., without limitation.

[0079] The above description is merely a preferred embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural transformations made using the contents of the present invention's specification and drawings under the inventive concept of the present invention, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present invention.

Claims

1. A piezoelectric pump, characterized in that, The piezoelectric pump includes: A valve seat having a spaced inlet and outlet. A valve body assembly, wherein the valve body assembly and the valve seat are stacked together and form a unidirectional liquid channel, the outlet of the liquid channel being connected to the water outlet; An excitation assembly; the excitation assembly is disposed on the side of the valve body assembly opposite to the valve seat, and surrounds it to form a pump chamber; and A pressure regulating assembly is sandwiched between the valve body assembly and the valve seat, and has a pressure regulating chamber that connects the water inlet and the inlet of the liquid channel; The excitation component drives the liquid to enter through the inlet, and flows out through the pressure regulating chamber, the liquid channel and the pump chamber, and out through the outlet. The volume change trend of the pressure regulating chamber is opposite to that of the volume change trend of the pump chamber. The pressure regulating assembly includes a pressure regulating plate and a diaphragm attached to one side of the pressure regulating plate. The pressure regulating plate has a pressure regulating hole, and the hole wall of the pressure regulating hole and the diaphragm enclose the pressure regulating cavity. The valve seat has a pressure relief hole, and the diaphragm is positioned facing the valve seat. The pressure relief hole is connected to the pressure regulating chamber through the diaphragm, so that the diaphragm deforms into the pressure regulating hole when the volume of the pump chamber increases.

2. The piezoelectric pump as described in claim 1, characterized in that, The diaphragm has clearance holes, the pressure regulating plate has spaced water inlet holes and water outlet holes, the water inlet holes are connected to the pressure regulating chamber through a guide groove, the water inlet, the clearance holes and the water inlet holes are vertically connected, and the water outlet holes are connected to the outlet of the liquid channel.

3. The piezoelectric pump as described in claim 2, characterized in that, The pressure regulating hole is located at one end of the pressure regulating plate, and the water inlet hole and the water outlet hole are arranged side by side at the other end of the pressure regulating plate.

4. The piezoelectric pump according to any one of claims 1 to 3, characterized in that, The valve body assembly includes a first pressure plate, a valve plate, and a second pressure plate stacked sequentially. The second pressure plate is attached to the pressure regulating plate, and the first pressure plate is attached to the excitation assembly. The first pressure plate and the second pressure plate are each provided with a large flow hole and a small flow hole. The valve plate is connected with a deformable inlet valve plate and an outlet valve plate. The area of ​​the inlet valve plate and the outlet valve plate is larger than the area of ​​the small flow hole and smaller than the area of ​​the large flow hole. The small flow hole of the second pressure plate, the inlet valve plate and the large flow hole of the first pressure plate are arranged vertically to form an inlet flow channel. The large flow hole of the second pressure plate, the outlet valve plate and the small flow hole of the first pressure plate are arranged vertically to form an outlet flow channel. The inlet flow channel and the outlet flow channel form the liquid channel.

5. The piezoelectric pump as described in claim 4, characterized in that, The liquid inlet valve plate is provided with at least two, the liquid outlet valve plate is provided with at least two, the first pressure plate is provided with at least two large flow holes and at least two small flow holes, and the second pressure plate is provided with at least two large flow holes and at least two small flow holes; Wherein, a small flow hole of the second pressure plate corresponds to an inlet valve plate and a large flow hole of the first pressure plate, a large flow hole of the second pressure plate corresponds to an outlet valve plate and a small flow hole of the first pressure plate, and at least two of the large flow holes of the second pressure plate are connected to the outlet.

6. The piezoelectric pump as described in claim 4, characterized in that, The valve plate has multiple connection holes. Each inlet valve plate is a cantilever structure, with one end connected to the wall of one of the connection holes. Each outlet valve plate is a cantilever structure, with one end connected to the wall of one of the connection holes.

7. The piezoelectric pump as described in claim 6, characterized in that, Each of the connecting holes has two connecting arms spaced apart on its hole wall, and the two connecting arms are connected to one end of the inlet valve plate or the outlet valve plate. And / or, the inlet valve plate and outlet valve plate are square in shape, and the opening shape of the large flow hole and the small flow hole is square.

8. The piezoelectric pump as described in claim 4, characterized in that, The excitation component includes a piezoelectric sheet, a vibrating plate, and a pad stacked together. The piezoelectric sheet is located on the side of the vibrating plate away from the valve body assembly. The pad has a through hole. The vibrating plate, the wall of the through hole, and the first pressure plate together enclose the pump cavity. The area of ​​the through hole is larger than the total area of ​​the large and small flow holes of the first pressure plate.

9. A heat dissipation circulation system, characterized in that, The heat dissipation circulation system includes a piezoelectric pump as described in any one of claims 1 to 8.

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