An optical control flexible scanning galvanometer mirror system based on photo-induced deformation oscillator

Abstract

The application discloses a light-controlled flexible scanning galvanometer system based on a photo-induced deformation oscillator and relates to the technical fields of intelligent driving and laser radar. The photo-induced deformation oscillator is a flexible film with a four-layer structure, including an MXene layer, a polyimide layer PI, a copper layer Cu and a polyethylene layer PE. The application has the advantages of simple preparation method, low preparation cost of the photo-induced deformation oscillator, wide-angle scanning in front of the light-controlled flexible scanning galvanometer system through the self-oscillation effect of the photo-induced deformation oscillator, high-speed rotation of the light-reflecting prism and the light-reflecting effect of the copper layer in the middle layer of the oscillator and the side mirror surface of the prism, accurate information such as the position and appearance of an obstacle can be measured and calculated through signal processing, and the accurate adjustment of oscillation deformation in the system is realized.

Description

Technical Field

[0001] This invention relates to the fields of intelligent drive and lidar technology, and specifically to a light-controlled flexible scanning rotating mirror system based on a photodeformation oscillator. Background Technology

[0002] In recent years, with the development of the new energy industry and autonomous driving technology, the demand for driver assistance systems in mass-produced vehicles has been increasing, leading to rapid development of related perception hardware. As an effective device for vehicles to perceive their surroundings, automotive radar's precise object detection capabilities are receiving increasing attention. Traditional millimeter-wave radar has limited accuracy, making it difficult to determine the specific outline of obstacles, and even failing to determine vertical height information; its judgment of small obstacles is even more ambiguous. Compared to ordinary millimeter-wave radar, lidar uses a laser beam, operating at a much higher frequency than millimeter waves. This gives lidar better resolution and anti-interference capabilities, as well as advantages such as small size and light weight.

[0003] However, existing lidar technology is not perfect. For example, even the relatively mature rotating mirror lidar technology still suffers from problems such as a small number of scanning lines in one-dimensional rotating mirrors, and high integration difficulty and manufacturing costs in two-dimensional rotating mirrors. At the same time, prolonged high-frequency deflection reduces the lifespan of the galvanometer mirror responsible for longitudinal laser scanning in the two-dimensional rotating mirror, thereby reducing the overall service life of the rotating mirror lidar.

[0004] Chinese patent application CN115403807A discloses a photothermal actuation film, its preparation method, and its applications. This photothermal actuation film has a bilayer structure with a total thickness of 35-50 μm. In the thickness direction, from one surface to a thickness of 15-25 μm, it is composed of a polymer. The remaining thickness consists of a polymer and a photothermal filler uniformly dispersed within the polymer. The mass ratio of the polymer to the filler is (70-97):(3-30). The polymer has a high coefficient of thermal expansion, while the filler has a low coefficient of thermal expansion. This photothermal actuation film has a simple structure, is easy to prepare, and has a fast response speed. However, the material has poor performance, is easily damaged, and its application in lidar is not disclosed. Summary of the Invention

[0005] The technical problem to be solved by this invention is: how to solve the problem of complex manufacturing process and high cost of existing two-dimensional rotating mirror lidar.

[0006] The present invention solves the above-mentioned technical problems through the following technical means:

[0007] The first aspect of this invention provides a light-controlled flexible scanning rotating mirror system based on a photodeformation oscillator, comprising a substrate, a reflective prism, a micromotor, a photodeformation oscillator, a light source assembly, and a thin-film fixing bracket; the micromotor is fixed inside the substrate, with its rotation axis perpendicular to the upper surface of the substrate and higher than the upper surface of the substrate, the end of the rotation axis being fixedly connected to the bottom end of the reflective prism, and the rotation axis coinciding with the central axis of the prism; the bottom end of the thin-film fixing bracket is fixed to the surface of the substrate; the port of the thin-film fixing bracket has a thin-film clamp, on which the photodeformation oscillator is fixed;

[0008] The photodeformation oscillator is a flexible thin film with a four-layer structure consisting of a photothermal conversion layer, a polyimide (PI) layer, a copper (Cu) layer, and a thermal expansion layer.

[0009] The light source assembly consists of two laser sources. One laser source is fixed to the upper surface of the substrate, and the laser emission direction is parallel to the plane of the substrate. The other laser source is located near the bottom of the thin film fixing bracket and is fixed to the upper surface of the substrate, with the laser emission direction directed towards the photodeformation oscillator at an angle upward.

[0010] Beneficial effects: The preparation method of this invention is simple and the preparation cost of the photodeformation oscillator is low. Through the self-oscillation effect of the photodeformation oscillator, the high-speed rotation of the reflective prism, and the reflective effect of the copper layer in the middle layer of the oscillator and the mirror surface on the side of the prism, a wide-angle scan is achieved in front of the light-controlled flexible scanning rotating mirror system. Then, after signal processing, the position and shape of the obstacle can be calculated with precision, realizing the precise adjustment of the oscillation deformation in the system.

[0011] Preferably, the reflective prism is a pentagonal reflective prism, a hexagonal reflective prism, a heptagonal reflective prism, or other prisms whose sides can reflect light.

[0012] Preferably, the photothermal conversion layer is an MXene layer, and the MXene layer has a stacked layered structure inside.

[0013] Beneficial effects: MXene is a two-dimensional layered material with excellent photothermal conversion ability and good thermal conductivity. At the same time, due to the presence of water molecules between the layers, the MXene film will shrink and deform slightly when the temperature rises due to water loss, making it a very good light-driven material.

[0014] Preferably, the intermediate layer of the photodeformation oscillator is a PI layer and a Cu layer.

[0015] Beneficial effects: Polyimide (PI) material has high flexibility, providing good flexible support for the oscillating film; Cu, as a metal material, has good reflective properties. When the emitted laser irradiates the copper layer, the Cu layer acts as a mirror to reflect the laser; at the same time, the presence of the Cu layer can act as a shielding layer to prevent the external laser from completely irradiating the driver.

[0016] Preferably, the thermal expansion layer is polyethylene (PE).

[0017] Beneficial effects: Polyethylene (PE) material has a large coefficient of thermal expansion. As the temperature rises, PE will expand and deform significantly, providing a driving force for the bending deformation of the film.

[0018] Preferably, the photodeformation oscillator is a four-layer structure with MXene / PI / Cu / PE arranged in sequence.

[0019] Preferably, the film fixing bracket is at a certain angle to the long side of the substrate and faces the middle of the substrate.

[0020] Beneficial effect: The photodeformation oscillator on the support is at a certain angle to the direction of the external incident laser, which can reflect the laser onto the side of the reflective prism.

[0021] Preferably, the photodeformation oscillator is fixed to the film clamp perpendicular to the substrate plane.

[0022] Beneficial effects: The photodeformation oscillator placed perpendicular to the substrate plane produces regular small-angle oscillation behavior that bends towards the laser source when irradiated by a laser source at an angle below. It can act as a galvanometer with a certain deflection angle, producing a similar effect to a galvanometer in reflecting incident laser light. In this way, the laser light emitted by the laser source fixed on the upper surface of the substrate can be regularly reflected onto the side of the hexagonal reflective prism.

[0023] A second aspect of the present invention provides a method for fabricating the above-mentioned photodeformation oscillator, comprising the following steps:

[0024] (1) Preparation of intermediate PI / Cu layer: The PI / Cu film was immersed in NaOH solution, and the PI surface was hydrophilically treated with NaOH solution. After immersion, a wetted PI / Cu bilayer film was obtained.

[0025] (2) Preparation of MXene / PI / Cu three-layer structure film: Place the PI / Cu film on a flat substrate, take MXene solution and coat it evenly on the PI side of the PI / Cu film, heat and dry the solution on a heating platform, and after the solution is dried, the MXene / PI / Cu film with MXene nanosheets deposited is obtained.

[0026] (3) Preparation of MXene / PI / Cu / PE four-layer structure film: The Cu surface of (2) without MXene deposition is pasted with PE tape to obtain a flexible four-layer structure MXene / PI / Cu / PE photodeformation oscillator.

[0027] Preferably, in step (1), the concentration of NaOH solution is 0.1-0.5 mol / L, the immersion time is 6-12 hours, and the thickness of the PI / Cu film is 10-30 μm.

[0028] Preferably, in step (2), the thickness of the MXene nanosheets is 1–20 μm; and the concentration of the MXene solution is 1–8 mg / ml.

[0029] Preferably, the thickness of the PE tape in step (3) is 30-50 μm.

[0030] A third aspect of the present invention proposes a photodeformation oscillator prepared using the above-described preparation method.

[0031] The advantages of this invention are:

[0032] 1. The preparation method of this invention is simple and the preparation cost of the photodeformation oscillator is low. The wide-angle scanning in front of the light-controlled flexible scanning rotating mirror system is achieved by the self-oscillation effect of the photodeformation oscillator, the high-speed rotation of the reflective prism, and the reflection effect of the copper layer in the middle layer of the oscillator and the mirror surface on the side of the prism. Then, after signal processing, the position and shape of the obstacle can be calculated to obtain accurate information, and the oscillation deformation in the system can be precisely adjusted.

[0033] 2. The photothermal conversion layer of the photodeformation oscillator of the present invention is MXene, which is a two-dimensional layered material with excellent photothermal conversion capability and good thermal conductivity. At the same time, due to the presence of water molecules between the layers, the MXene film will shrink due to water loss and produce small deformation when the temperature rises, making it a very good light-driven material.

[0034] 3. The intermediate layer of the photodeformation oscillator of the present invention uses PI and Cu. Polyimide (PI) material has high flexibility, providing good flexible support for the oscillation film. Cu, as a metal material, has good reflective properties. When the emitted laser irradiates the copper layer, the Cu layer acts as a mirror to reflect the laser. At the same time, the presence of the Cu layer can act as a shielding layer to prevent the external laser from completely irradiating the driver.

[0035] 4. The thermal expansion layer of the photodeformation oscillator of the present invention is PE, which has a large coefficient of thermal expansion. As the temperature rises, it will produce a large expansion deformation, providing a driving force for the bending deformation of the film. Attached Figure Description

[0036] Figure 1 This is a flowchart illustrating the manufacturing process of the photodeformation oscillator of Embodiment 1 of the present invention.

[0037] Figure 2 This is a schematic diagram illustrating the self-oscillation effect of the photodeformation oscillator in Embodiment 1 of the present invention.

[0038] Figure 3 This is a schematic diagram illustrating the principle of how the photodeformation oscillator of Embodiment 1 of the present invention reflects incident laser light onto the side of a hexagonal reflective prism.

[0039] Figure 4 This is a schematic diagram of the overall structure of the optically controlled flexible scanning rotating mirror system in Embodiment 4 of the present invention;

[0040] Figure 5 This is a scanning electron microscope image of the cross-section of the photodeformation oscillator in Embodiment 1 of the present invention;

[0041] Figure 6 This is a physical image of the photodeformation oscillator of Embodiment 1 of the present invention;

[0042] Figure 7 The diagram shows the cyclic stability of the photodeformation oscillator in Embodiment 1 of the present invention, where A is the periodic displacement diagram of the photodeformation oscillator under constant laser irradiation for 7200 seconds, and B is the frequency change diagram of the photodeformation oscillator under constant laser irradiation for 7500 seconds.

[0043] Figure 8 This is a graph showing the oscillation amplitude and frequency changes of the photodeformation oscillator in Embodiment 1 of the present invention when the laser light intensity changes. In this graph, C is the relationship between the oscillation displacement of the photodeformation oscillator and the change in laser light intensity, and D is the relationship between the amplitude and frequency of the photodeformation oscillator and the change in laser light intensity.

[0044] Figure 9 This is a diagram showing the displacement and temperature changes during the oscillation process of the photodeformation oscillator in Embodiment 1 of the present invention.

[0045] In the figure: 1. MXene / PI / Cu / PE four-layer photodeformation oscillator; 2 and 3. Laser light source; 4. Thin film fixing bracket; 5. Photodeformation oscillator; 6. Hexagonal reflective prism; 7. Micro motor rotating shaft; 8. Substrate. Detailed Implementation

[0046] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0047] Unless otherwise specified, all test materials and reagents used in the following examples are commercially available.

[0048] Example 1:

[0049] A method for fabricating a photodeformation oscillator includes a photothermal conversion layer MXene, PI and Cu as intermediate layers, and a thermal expansion layer PE, specifically comprising the following steps:

[0050] (1) Preparation of intermediate PI / Cu: Commercial PI / Cu film was immersed in 0.3 mol / L NaOH solution, and the PI surface was hydrophilically treated with NaOH solution. After immersion for 8 hours, a wetted PI / Cu bilayer film (thickness of 20 μm) was obtained.

[0051] (2) Preparation of MXene / PI / Cu three-layer structure film: The PI / Cu film was placed on a flat substrate, and 5 mg / ml MXene solution was uniformly coated on the PI side of the PI / Cu film. The solution was heated and dried on a heating platform. After the solution was dried, MXene / PI / Cu film with MXene nanosheets (thickness of 10 μm) was obtained.

[0052] (3) Preparation of MXene / PI / Cu / PE four-layer structure film: The Cu surface of (2) without MXene deposition was pasted with commercial PE tape (thickness of 40μm) to obtain a flexible four-layer structure MXene / PI / Cu / PE photodeformation oscillator.

[0053] The obtained four-layer flexible film was further cut into rectangular shapes to obtain the target photodeformation oscillator.

[0054] Figure 1 This is a flowchart illustrating the manufacturing process of the photodeformation oscillator of Embodiment 1 of the present invention.

[0055] Figure 2 This is a schematic diagram illustrating the self-oscillation effect of the photodeformation oscillator in Embodiment 1 of the present invention.

[0056] Figure 3 This is a schematic diagram illustrating the principle of how the photodeformation oscillator of Embodiment 1 of the present invention reflects incident laser light onto the side of a hexagonal reflective prism.

[0057] Figure 5 This is a scanning electron microscope image of the cross-section of the photodeformation oscillator in Embodiment 1 of the present invention;

[0058] Figure 6 This is a physical image of the photodeformation oscillator of Embodiment 1 of the present invention;

[0059] Figure 7The figure shows the cyclic stability of the photodeformation oscillator in Embodiment 1 of the present invention. A is the periodic displacement diagram of the photodeformation oscillator under constant laser irradiation for 7200 seconds, and B is the frequency change diagram of the photodeformation oscillator under constant laser irradiation for 7500 seconds. It can be seen from the figure that the photodeformation oscillator is relatively stable during the oscillation process and has excellent performance.

[0060] Figure 8 The graph shows the changes in oscillation amplitude and frequency of the photodeformation oscillator in Embodiment 1 of the present invention when the laser light intensity changes. In the graph, C is the relationship between the oscillation displacement of the photodeformation oscillator and the change in laser light intensity, and D is the relationship between the amplitude and frequency of the photodeformation oscillator and the change in laser light intensity. It can be seen from the graph that the oscillation displacement and frequency of the photodeformation oscillator can be controlled by changing the laser light intensity.

[0061] Figure 9 The figure shows the relationship between displacement and temperature during the oscillation of the photodeformation oscillator in Embodiment 1 of the present invention. It can be seen from the figure that the magnitude of the displacement of the photodeformation oscillator during the oscillation process corresponds to the temperature. When the temperature increases, the bending driving force of the photodeformation oscillator increases, thereby causing the displacement to increase; when the temperature decreases, the bending driving force of the photodeformation oscillator decreases, and the displacement decreases.

[0062] Example 2:

[0063] A method for fabricating a photodeformation oscillator includes a photothermal conversion layer MXene, PI and Cu as intermediate layers, and a thermal expansion layer PE, specifically comprising the following steps:

[0064] (1) Preparation of intermediate PI / Cu: Commercial PI / Cu film was immersed in 0.1 mol / L NaOH solution, and the PI surface was hydrophilically treated with NaOH solution. After immersion for 12 h, a wetted PI / Cu bilayer film (thickness of 10 μm) was obtained.

[0065] (2) Preparation of MXene / PI / Cu three-layer structure film: The PI / Cu film was placed on a flat substrate, and 8 mg / ml MXene solution was uniformly coated on the PI side of the PI / Cu film. The solution was heated and dried on a heating platform. After the solution was dried, an MXene / PI / Cu film with MXene nanosheets (thickness of 20 μm) was obtained.

[0066] (3) Preparation of MXene / PI / Cu / PE four-layer structure film: The Cu surface of (2) without MXene deposition was pasted with commercial PE tape (thickness of 30μm) to obtain a flexible four-layer structure MXene / PI / Cu / PE photodeformation oscillator.

[0067] The obtained four-layer flexible film was further cut into rectangular shapes to obtain the target photodeformation oscillator.

[0068] Example 3:

[0069] A method for fabricating a photodeformation oscillator includes a photothermal conversion layer MXene, PI and Cu as intermediate layers, and a thermal expansion layer PE, specifically comprising the following steps:

[0070] (1) Preparation of intermediate PI / Cu: Commercial PI / Cu film was immersed in 0.5 mol / L NaOH solution, and the PI surface was hydrophilically treated with NaOH solution. After immersion for 6 h, a wetted PI / Cu bilayer film (thickness of 30 μm) was obtained.

[0071] (2) Preparation of MXene / PI / Cu three-layer structure film: The PI / Cu film was placed on a flat substrate, and 1 mg / ml MXene solution was uniformly coated on the PI side of the PI / Cu film. The solution was heated and dried on a heating platform. After the solution was dried, an MXene / PI / Cu film with MXene nanosheets (thickness of 1 μm) was obtained.

[0072] (3) Preparation of MXene / PI / Cu / PE four-layer structure film: The Cu surface of (2) without MXene deposition was pasted with commercial PE tape (thickness of 50μm) to obtain a flexible four-layer structure MXene / PI / Cu / PE photodeformation oscillator.

[0073] The obtained four-layer flexible film was further cut into rectangular shapes to obtain the target photodeformation oscillator.

[0074] The performance of the photodeformation oscillators prepared in Examples 2 and 3 is similar to that of the photodeformation oscillator in Example 1.

[0075] Example 4:

[0076] A light-controlled flexible scanning rotating mirror system based on a photodeformation oscillator, such as Figure 4 As shown, it includes a light source assembly 2, a light source assembly 3, a thin film fixing bracket 4, a photodeformation oscillator 5 prepared in Example 1, a hexagonal reflective prism 6, a micro motor, and a substrate 8.

[0077] The light source assembly includes two laser sources. Laser source 2 is fixed to the upper surface of the substrate, with the laser emission direction parallel to the substrate plane and the long side of the substrate. Laser source 3 is located below the thin film fixing bracket and is also fixed to the upper surface of the substrate, with the laser emission direction directed towards the oscillating thin film diagonally upward. The thin film fixing bracket 4 is fixed to the substrate surface, and the bracket port has a thin film clamp. The bracket as a whole and the oscillating thin film are at a certain angle to the long side of the substrate and face the center of the rectangular substrate. The photodeformation oscillator 5 is fixed to the thin film clamp of the thin film fixing bracket. When not in operation, the thin film plane is perpendicular to the substrate surface. The bottom end of the hexagonal reflective prism 6 is fixed to the rotation shaft 7 of the micro motor, and the rotation shaft is coincident with the central axis of the prism. The micro motor is fixed inside the substrate, and the rotation shaft 7 is perpendicular to the upper surface of the substrate and slightly higher than the upper surface of the substrate. The substrate 8 has a rectangular cross-section, but is not limited to a rectangle.

[0078] The above-mentioned fixing and installation methods can be achieved by using screws, bolts, tight clamps, or adhesive.

[0079] To achieve a wide laser scanning area in front of the substrate, a photodeformation oscillator 5 and a hexagonal reflective prism 6 work together. The small-angle oscillation behavior of the photodeformation oscillator and its orientation at a certain angle to the long side of the substrate towards the center of the rectangular substrate reflect the laser beam emitted by the laser source 2 onto the side mirrors of the hexagonal reflective prism 6, displaying a line scanning angle perpendicular to the substrate surface on the prism's side surface. Driven by a micro-motor, the hexagonal reflective prism 6 rotates at high speed, causing the incident laser beam passing through the side mirrors to generate a certain line scanning angle in a direction parallel to the substrate surface. Ultimately, the small-angle oscillation effect of the oscillating film 5 and the high-speed rotation of the hexagonal reflective prism 6 create a wide-angle scanning area in front of the optically controlled flexible scanning mirror system.

[0080] The working principle of this embodiment:

[0081] (1) Photo-induced oscillation effect of flexible film 1: Under laser irradiation, due to the excellent photothermal conversion performance and thermal conductivity of the MXene film, it can convert light energy into heat energy, acting as a photothermal conversion layer, and transfer the heat to the polyethylene polymer tape through the PI / Cu layer. At the same time, the MXene film will lose water molecules between layers due to the increase in temperature, resulting in a small shrinkage deformation. The polyethylene with a large coefficient of thermal expansion will expand and deform under heat, acting as a thermal expansion layer. The final result is that the four-layer structure in the film will deform, resulting in a bending phenomenon towards the MXene layer. When the film bends to a certain angle, the incident laser can no longer irradiate the MXene layer, and the film no longer has the driving force to continue bending, and the film tends to restore its original shape. After the film recovers to a certain extent, the incident laser can irradiate the MXene side of the photothermal conversion layer again, and the film will generate the driving force for bending deformation again, thus forming the self-oscillation effect of the photodeformation oscillator in a cycle. (2) Wide-angle scanning of the optically controlled flexible scanning mirror system: Under the continuous irradiation of the laser source 3 at an angle below, the thin film exhibits regular small-angle oscillation behavior. The copper layer, as the intermediate layer of the oscillating thin film, has a good reflective effect and can reflect laser light incident at different angles. The laser beam emitted by the laser source 2 on the upper surface of the substrate 8 first irradiates the oscillating thin film. Under the small-angle oscillation behavior of the thin film, the laser beam is reflected onto the side mirror of the hexagonal reflective prism 6, displaying a line scanning angle perpendicular to the substrate surface on the side of the prism. The hexagonal reflective prism rotates at high speed driven by a micro motor, which allows the incident laser beam passing through the side mirror to generate a certain line scanning angle in a direction parallel to the surface of the substrate 8. Finally, a wide-angle scanning field is generated in front of the optically controlled flexible scanning mirror system under the small-angle oscillation effect of the oscillating thin film 1 and the high-speed rotation of the hexagonal reflective prism 6.

[0082] The advantages of this embodiment are: the micro motor is fixed inside the substrate, which avoids damage to the motor from fine dust on the outside, and at the same time reduces the size of the entire optically controlled flexible scanning rotating mirror system, making it lighter and more miniaturized.

[0083] The photothermal conversion layer of the photodeformation oscillator 1 is MXene, a two-dimensional layered material with excellent photothermal conversion capability and good thermal conductivity. At the same time, due to the presence of water molecules between the layers, the MXene film will shrink due to water loss and produce small deformation when the temperature rises, making it a good light-driven material.

[0084] The intermediate layer of the photodeformation oscillator 1 is made of PI and Cu. Polyimide (PI) material has high flexibility, which provides good flexible support for the oscillation film. Cu, as a metal material, has good reflective effect. When the emitted laser irradiates the copper layer, the Cu layer acts as a mirror to reflect the laser. At the same time, the presence of the Cu layer can act as a shielding layer to prevent the external laser from completely irradiating the driver.

[0085] The thermal expansion layer of the photodeformation oscillator 1 is PE, which has a large coefficient of thermal expansion. As the temperature rises, it will produce a large expansion deformation, providing a driving force for the bending deformation of the film.

[0086] The plane of oscillator 1 is at a certain angle to the direction of the laser beam emitted by laser source 2 fixed on the substrate surface. This thin film arrangement can reflect the laser beam onto the side of hexagonal reflective prism 6. The photodeformation oscillator 1, placed perpendicular to the substrate plane, produces regular small-angle oscillation behavior towards the laser source 3 under the illumination of the laser source 3 at an angle below. It can act as a galvanometer with a certain deflection angle, producing a similar effect to a galvanometer in reflecting incident laser light. In this way, the laser emitted by laser source 2 fixed on the upper surface of the substrate can be regularly reflected onto the side of hexagonal reflective prism 6.

[0087] Example 5:

[0088] The difference between this embodiment and embodiment 4 is that the hexagonal reflective prism is replaced with a pentagonal reflective prism, a heptagonal reflective prism, or other prisms whose sides can reflect light.

[0089] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A light controlled flexible scanning mirror system based on a light induced morphing oscillator, characterized in that, The device includes a substrate, a reflective prism, a micromotor, a photodeformation oscillator, a light source assembly, and a thin film mounting bracket. The micromotor is fixed inside the substrate, with its rotation axis perpendicular to the upper surface of the substrate and higher than the upper surface. The end of the rotation axis is fixedly connected to the bottom of the reflective prism, and the rotation axis coincides with the central axis of the prism. The bottom of the thin film mounting bracket is fixed to the surface of the substrate. The port of the thin film mounting bracket has a thin film clamp, on which the photodeformation oscillator is fixed. The photodeformation oscillator is a flexible thin film with a four-layer structure consisting of a photothermal conversion layer, a polyimide (PI) layer, a copper (Cu) layer, and a thermal expansion layer. The light source assembly consists of two laser sources. One laser source is fixed to the upper surface of the substrate, and the laser emission direction is parallel to the plane of the substrate. The other laser source is located near the bottom of the thin film fixing bracket and is fixed to the upper surface of the substrate, with the laser emission direction directed towards the photodeformation oscillator at an angle upward.

2. The light-controlled flexible scanning mirror system based on a light-induced morphing oscillator according to claim 1, wherein, The photothermal conversion layer is an MXene layer, and the MXene layer has a stacked layered structure inside; the thermal expansion layer is polyethylene (PE).

3. The light-controlled flexible scanning mirror system based on a light-induced morphing oscillator according to claim 1 or 2, characterized in that The photodeformation oscillator is a four-layer structure with MXene / PI / Cu / PE arranged in sequence.

4. The light-controlled flexible scanning mirror system based on a light-induced morphing oscillator according to claim 3, wherein, The thin film fixing bracket is at a certain angle to the long side of the substrate and faces the middle of the substrate.

5. The light-controlled flexible scanning mirror system based on a light-induced morphing oscillator according to claim 4, wherein, The photodeformation oscillator is fixed to the vertical substrate plane on the thin film clamp.

6. A method of fabricating a photostrffable oscillator as claimed in claim 1, characterized in that, Includes the following steps: (1) Preparation of intermediate PI / Cu layer: The PI / Cu film was immersed in NaOH solution, and the PI surface was hydrophilically treated with NaOH solution. After immersion, a wetted PI / Cu bilayer film was obtained. (2) Preparation of MXene / PI / Cu three-layer structure film: Place the PI / Cu film on a flat substrate, take MXene solution and coat it evenly on the PI side of the PI / Cu film, heat and dry the solution on a heating platform, and after the solution is dried, the MXene / PI / Cu film with MXene nanosheets deposited is obtained. (3) Preparation of MXene / PI / Cu / PE four-layer structure film: The Cu surface of (2) without MXene deposition is pasted with PE tape to obtain a flexible four-layer structure MXene / PI / Cu / PE photodeformation oscillator.

7. The method for fabricating a photodeformation oscillator according to claim 6, characterized in that, In step (1), the concentration of NaOH solution is 0.1-0.5 mol / L, the immersion time is 6-12 hours, and the thickness of PI / Cu film is 10-30 μm.

8. The method for fabricating a photodeformation oscillator according to claim 6, characterized in that, In step (2), the thickness of the MXene nanosheets is 1–20 μm; the concentration of the MXene solution is 1–8 mg / ml.

9. The method for fabricating a photodeformation oscillator according to claim 6, characterized in that, The thickness of the PE tape in step (3) is 30-50 μm.

10. A photodeformation oscillator prepared by the preparation method according to any one of claims 6-9.

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