A bonding head position calibration method, system and storage medium

Abstract

The embodiment of the application discloses a bonding head position calibration method, system and storage medium, the method determines a first identification area according to an actual wedge mark image, carries out standardization processing on the first identification area to generate a second identification area, translates the second wedge mark area in the second identification area, calculates the gray value of each pixel of the image in the second identification area located in the second wedge mark area every time a pixel is moved, and determines the center position coordinates of the wedge template according to the gray value. The application ensures the accuracy of the center position coordinates calculation of the wedge template, automatically finds the wedge position and creates a template when the wedge template is created, effectively avoids the error caused when determining the first identification area according to the actual wedge mark image due to the different standards of each person, and ensures the calibration effect of the bonding head position.

Description

Technical Field

[0001] Embodiments of the present invention relate to the field of semiconductor packaging technology, and in particular to a bonding head position calibration method, system, and storage medium. Background Art

[0002] Bonding machines are crucial equipment in the semiconductor packaging and testing process. To ensure bonding accuracy, the bonder needs to calibrate the deviation between the camera coordinate system and the bond head coordinate system. This deviation is then used to calibrate the bond head's bonding position.

[0003] The current common method for calibrating the deviation between the camera coordinate system and the bond head coordinate system involves manually creating a recognition template based on the mark made by the wrecking knife. A processor then directly matches the camera image with the manually created recognition template to calculate the deviation value, which is then used for calibration. However, due to the inevitable discrepancies between the actual wrecking knife mark and the standard mark, and the fact that each person has their own standards when creating the recognition template based on the wrecking knife mark, deviations between the recognition templates can occur, directly affecting the calculated deviation between the camera coordinate system and the bond head coordinate system. This makes calibration ineffective and ultimately affects bonding accuracy.

[0004] The above problems need to be solved urgently. Summary of the Invention

[0005] In order to solve the related technical problems, the present invention provides a bonding head position calibration method, system and storage medium to solve the problems mentioned in the above background technology section.

[0006] To achieve the above objectives, the embodiments of the present invention adopt the following technical solutions:

[0007] In a first aspect, an embodiment of the present invention provides a bonding head position calibration method, the method comprising generating a first wedge mark area corresponding to a wedge in a bonding machine;

[0008] generating a second cleaver mark area according to the first cleaver mark area;

[0009] Acquire an actual cleaving mark image when the cleaving knife is pressed down, and acquire a first recognition area determined according to the actual cleaving mark image;

[0010] performing standardization processing on the first recognition area to generate a second recognition area;

[0011] translating the second cleaver mark area in the second recognition area, and calculating the grayscale value of each pixel of the image of the second recognition area located in the second cleaver mark area each time the second recognition area is moved by one pixel;

[0012] The center position coordinates of the wedge template are determined according to the grayscale value, and the center point of the second wedge mark area is translated to the center position coordinates of the wedge template to complete the bond head position calibration.

[0013] After the first recognition area is determined based on the actual cleaver mark image, the first recognition area is not directly used for bond head position calibration. Instead, the first recognition area is standardized to generate a second recognition area. The second cleaver mark area is translated within the second recognition area. For each pixel moved, the grayscale value of each pixel of the image of the second recognition area located in the second cleaver mark area is calculated. The center position coordinates of the cleaver template are determined based on the grayscale value, thereby ensuring the accuracy of the center position coordinates, effectively avoiding errors caused by different standards of each person when determining the first recognition area based on the actual cleaver mark image, and ensuring the calibration effect of the bond head position.

[0014] As an optional implementation manner, generating a first wedge mark area corresponding to a wedge in a bonding machine includes:

[0015] Obtaining a pre-stored two-dimensional drawing corresponding to the wrecking knife;

[0016] Draw the outline of the splitting knife mark according to the two-dimensional drawing;

[0017] The cleaver mark outline is filled to form a first cleaver mark area corresponding to the cleaver.

[0018] The specifications of the splitters in the bonding machine are not exactly the same. In this embodiment, two-dimensional drawings corresponding to splitters of different specifications are pre-stored. When calibrating the bond head position, the pre-stored two-dimensional drawings corresponding to the splitters are obtained, and the splitter mark outline is drawn according to the two-dimensional drawing. The splitter mark outline is filled to form the first splitter mark area corresponding to the splitter, which ensures the correctness of the generated first splitter mark area and is compatible with the bond head position calibration of splitters of various specifications.

[0019] As an optional implementation manner, generating the second cleave mark area according to the first cleave mark area includes:

[0020] Obtaining a first minimum circumscribed regular rectangle of the first cleavage mark area;

[0021] Obtain the upper left corner point and the lower right corner point of the first minimum circumscribed regular rectangle;

[0022] Generate a first translation matrix according to the upper left corner point;

[0023] According to the first translation matrix, the first minimum circumscribed rectangle is translated to the upper left corner position of the first splitting blade printing area, the first minimum circumscribed rectangle after translation is taken as a second splitting blade printing area, and the center position coordinates of the splitting blade template are determined by using the second splitting blade printing area, so that the accuracy of the center position coordinates is ensured.

[0024] As an optional implementation, the gray scale value of each pixel of the image located in the second splitting blade printing area is calculated every time the splitting blade template moves one pixel, including:

[0025] The first type of image in the second splitting blade printing area after movement is obtained every time the splitting blade template moves, and the gray scale mean and gray scale variance in the first type of image are calculated;

[0026] The first type of image in the second splitting blade printing area after movement is obtained every time the splitting blade template moves one pixel, and the gray scale mean and gray scale variance in the first type of image are calculated, the optimal center point coordinates are calculated by the gray scale mean and gray scale variance in the first type of image as the center position coordinates of the splitting blade template, so that the accuracy and reliability of the center position coordinates of the splitting blade template are ensured.

[0027] As an optional implementation, the center position coordinates of the splitting blade template are determined according to the gray scale value, including:

[0028] The first type of image with a gray scale mean less than a preset gray scale mean threshold is selected from the calculated gray scale mean;

[0029] The first type of image with the minimum gray scale variance is obtained from the selected first type of image;

[0030] The position coordinates of the obtained first type of image are taken as the center position coordinates of the splitting blade template.

[0031] The first type of image is first screened by the gray scale mean, the first type of image after the first screening is second screened by the gray scale variance, then the position coordinates of the first type of image are obtained, and the position coordinates are taken as the center position coordinates of the splitting blade template, so that the accuracy of the calculated center position coordinates of the splitting blade template is ensured.

[0032] As an optional implementation, the second splitting blade printing area is generated according to the first splitting blade printing area, including:

[0033] The first splitting blade printing area is dilated and eroded to obtain a peripheral contour area and an inner ring contour area;

[0034] A second minimum circumscribed rectangle of the peripheral contour area is obtained;

[0035] A second translation matrix is generated according to the upper left corner point and the lower right corner point of the second minimum circumscribed rectangle, and the second minimum circumscribed rectangle is moved to the upper left corner position of the first splitting print area according to the second translation matrix, and the second minimum circumscribed rectangle after translation is taken as the second splitting print area.

[0036] The second splitting print area is obtained through the peripheral contour area of the first splitting print area, and the center position coordinates of the splitting template are determined by using the second splitting print area, so that the accuracy of the center position coordinates is ensured.

[0037] As an optional implementation, the gray scale value of each pixel of the image in the second splitting print area is calculated every time the first recognition area is moved by one pixel, and the calculation includes:

[0038] The second type of image in which the peripheral contour area after movement is located in the second recognition area is obtained every time the movement is performed, the gray scale value of the gray scale in the second type of image is calculated, and the first gray scale value array is stored; the third type of image in which the inner ring contour area after movement is located in the second recognition area is obtained, the gray scale value of the gray scale in the third type of image is calculated, and the second gray scale value array is stored. The center position coordinates of the splitting template are calculated by using the first gray scale value array and the second gray scale value array, so that the accuracy and reliability of the center position coordinates of the splitting template are ensured.

[0039] As an optional implementation, the center position coordinates of the splitting template are determined according to the gray scale value, and the determination includes:

[0040] According to the first gray scale value array and the second gray scale value array, the ρ value corresponding to each movement is calculated by using the Pearson formula, and the position coordinates of the second minimum circumscribed rectangle corresponding to the maximum ρ value are taken as the center position coordinates of the splitting template.

[0041] In the embodiment, the ρ value corresponding to each movement is calculated by using the Pearson formula, and the position coordinates of the second minimum circumscribed rectangle corresponding to the maximum ρ value are taken as the center position coordinates of the splitting template, so that the accuracy and reliability of the center position coordinates of the splitting template are ensured.

[0042] As an optional implementation, the first recognition area is subjected to standardization processing to generate the second recognition area, and the processing includes:

[0043] The first recognition area is subjected to matting, denoising, contrast enhancement, and smoothing processing to generate the second recognition area.

[0044] The embodiment does not directly use the first recognition area for the position calibration of the bonding head, but generates a second recognition area by performing matting, denoising, contrast enhancement and smoothing processing on the first recognition area, and calculates the center position coordinates of the cleaver template by using the second recognition area, so that the error caused by different standards of different persons when determining the first recognition area according to the actual cleaver printing image is effectively avoided.

[0045] In a second aspect, the embodiment of the present application provides a bonding head position calibration system, which adopts the bonding head position calibration method in any one of the embodiments of the first aspect, and comprises:

[0046] a first generation module configured to generate a first cleaver printing area corresponding to a cleaver in a bonder;

[0047] a second generation module configured to generate a second cleaver printing area according to the first cleaver printing area;

[0048] a determination module configured to acquire an actual cleaver printing image when the cleaver is pressed down, and acquire a first recognition area determined according to the actual cleaver printing image;

[0049] a third generation module configured to perform standardization processing on the first recognition area to generate a second recognition area;

[0050] a calculation module configured to translate the second cleaver printing area in the second recognition area, and calculate the gray value of each pixel of the image of the second recognition area in the second cleaver printing area every time one pixel is moved;

[0051] a calibration module configured to determine the center position coordinates of a cleaver template according to the gray value, translate the center point of the second cleaver printing area to the center position coordinates of the cleaver template, and complete the position calibration of the bonding head.

[0052] After the determination module determines the first recognition area according to the actual cleaver printing image, the first recognition area is not directly used for the position calibration of the bonding head, but the third generation module performs standardization processing on the first recognition area to generate a second recognition area, the calculation module translates the second cleaver printing area in the second recognition area, and calculates the gray value of each pixel of the image of the second recognition area in the second cleaver printing area every time one pixel is moved, and the calibration module determines the center position coordinates of the cleaver template according to the gray value, so that the accuracy of the center position coordinates is ensured, the error caused by different standards of different persons when determining the first recognition area according to the actual cleaver printing image is effectively avoided, and the position calibration effect of the bonding head is ensured.

[0053] In a third aspect, an embodiment of the present invention provides a computer-readable storage medium, in which computer-executable instructions are stored. When the computer-executable instructions are executed by a processor, they are used to implement the bond head position calibration method as described in the embodiment of the first aspect above. BRIEF DESCRIPTION OF THE DRAWINGS

[0054] In order to more clearly illustrate and understand the technical solutions in the embodiments of the present invention, a brief introduction is given below to the background technology of the present invention and the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without any creative work.

[0055] Figure 1 A schematic flow chart of a bonding head position calibration method according to the first embodiment of the present invention;

[0056] Figure 2 A schematic flow chart of a bonding head position calibration method according to a second embodiment of the present invention;

[0057] Figure 3 Schematic diagram of the bond head position calibration system provided in embodiment 3 of the present invention. DETAILED DESCRIPTION

[0058] To make the technical problems solved, the technical solutions adopted, and the technical effects achieved by the present invention more clearly understood, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. It is apparent that the described embodiments are only some of the embodiments of the present invention, not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort shall fall within the scope of protection of the present invention.

[0059] Example 1

[0060] Please refer to Figure 1 As stated, Figure 1 This is a flow chart of a bond head position calibration method according to a first embodiment of the present invention. As shown in the figure, the bond head position calibration method 100 in this embodiment includes the following steps:

[0061] S101. Generate a first cleaver print area corresponding to the cleaver in the bonding machine;

[0062] S102. Generating a second cleaver mark area according to the first cleaver mark area;

[0063] S103. Acquire an actual cleaver mark image when the cleaver is pressed down, and acquire a first recognition area determined based on the actual cleaver mark image;

[0064] S104. Standardize the first recognition area to generate a second recognition area;

[0065] S105. translating the second cleaver mark area in the second identification area, and calculating the grayscale value of each pixel of the image of the second identification area located in the second cleaver mark area each time the pixel is moved;

[0066] S106. Determine the center position coordinates of the wedge template according to the grayscale value, translate the center point of the second wedge mark area to the center position coordinates of the wedge template, and complete the bond head position calibration.

[0067] In this embodiment, after the first recognition area is determined based on the actual cleaver mark image, the first recognition area is not directly used for bond head position calibration. Instead, the first recognition area is standardized to generate a second recognition area. The second cleaver mark area is translated within the second recognition area. For each pixel moved, the grayscale value of each pixel of the image of the second recognition area located in the second cleaver mark area is calculated. The center position coordinates of the cleaver template are determined based on the grayscale values. This ensures the accuracy of the center position coordinates, effectively avoids errors caused by different standards of each person when determining the first recognition area based on the actual cleaver mark image, and ensures the calibration effect of the bond head position.

[0068] Exemplarily, the step of generating a first wedge mark area corresponding to a wedge in a bonding machine includes:

[0069] Obtaining a pre-stored two-dimensional drawing corresponding to the wrecking knife;

[0070] Draw the outline of the splitting knife mark according to the two-dimensional drawing;

[0071] The cleaver mark outline is filled to form a first cleaver mark area corresponding to the cleaver.

[0072] The specifications of the splitting knives of the bonding machine are not exactly the same. In this embodiment, the two-dimensional drawings corresponding to the splitting knives of different specifications are pre-stored in the memory. When calibrating the bond head position, the pre-stored two-dimensional drawings corresponding to the splitting knives are obtained, and the splitting knife mark outline is drawn according to the two-dimensional drawing. The splitting knife mark outline is filled to form the first splitting knife mark area corresponding to the splitting knife, which ensures the correctness of the generated first splitting knife mark area (standard template) and is compatible with the bond head position calibration of splitting knives of various specifications.

[0073] Exemplarily, generating the second cleaver mark area according to the first cleaver mark area includes:

[0074] Obtaining a first minimum circumscribed regular rectangle of the first cleavage mark area;

[0075] Obtain the upper left corner point and the lower right corner point of the first minimum circumscribed regular rectangle;

[0076] Generate a first translation matrix according to the upper left corner point;

[0077] The specific process is as follows: obtain the first minimum circumscribed rectangle of the first chopping knife mark area; obtain the upper left corner point (RecX1, RecY1) and the lower right corner point (RecX2, RecY2) of the first minimum circumscribed rectangle; generate a translation matrix based on the upper left corner point (RecX1, RecY1)

[0078]

[0079] In this embodiment, the first minimum circumscribed regular rectangle is translated to the upper left corner of the first cleavage mark area according to the first translation matrix, and the translated first minimum circumscribed regular rectangle is used as the second cleavage mark area. The second cleavage mark area is used to determine the center position coordinates of the cleavage template, thereby ensuring the accuracy of the center position coordinates.

[0080] Exemplarily, obtaining an actual cleaving mark image when the cleaving knife is pressed down, and obtaining a first identification area determined based on the actual cleaving mark image, includes:

[0081] The actual cleaver mark image when the cleaver is pressed down is obtained and displayed. After the first recognition area is manually framed according to the image, the first recognition area data will be automatically generated, and the manually framed first recognition area can be obtained in the background.

[0082] Exemplarily, the standardizing the first recognition area to generate the second recognition area includes:

[0083] The first recognition area is subjected to cutout, denoising, contrast enhancement, and smoothing processing to generate a second recognition area.

[0084] The specific process is as follows: obtain an area SelectRegion that is 1.5 times the size of the first recognition area; obtain the image ReduceImage within SelectRegion (the mean and variance of the grayscale values ​​within the image); perform binomial filtering on the image ReduceImage to denoise the image; perform proportional enhancement on the filtered image to enhance the light and dark contrast of the image; apply a 7*7 contrast factor kernel to the proportionally enhanced image to enhance the image; and apply the following formula to transform the enhanced image:

[0085]

[0086] Wherein, m is the maximum gray value of the image, o is the O parent method set, γ represents Gamma, t represents the threshold value Threshold of the linear part and the exponential part, and s is a parameter for making the linear part and the exponential part continuous; the transformed image is smoothed to obtain a second recognition area.

[0087] In the embodiment, the first recognition area is not directly used for the position calibration of the bonding head, but is subjected to matting, denoising, contrast enhancement and smoothing to generate a second recognition area, and the center position coordinates of the cleaving knife template are calculated by using the second recognition area, so that the error caused when the first recognition area is determined according to the actual cleaving knife image due to the different standards of each person is effectively avoided.

[0088] For example, the gray value of each pixel of the image in the second recognition area is calculated every time one pixel is moved, and the gray value of each pixel of the image in the second recognition area is calculated every time one pixel is moved, including:

[0089] The first type of image in the second cleaving knife printing area after the movement is obtained every time the movement is made, and the mean gray value and the gray variance in the first type of image are calculated.

[0090] The specific process is as follows:

[0091] The top-left corner point (ChopX1, ChopY1) and the bottom-right corner point (ChopX2, ChopY2) of the second cleaving knife printing area are obtained;

[0092] The top-left corner point (SelectX1, SelectY1) and the bottom-right corner point (SelectX2, SelectY2) of the second recognition area are obtained;

[0093] The translation matrix is generated every time one pixel is moved from left to right (SelectY1+(ChopY1+ChopY2) / 2) to right (SelectY2-(ChopY1+ChopY2) / 2) from the top-left corner of the second recognition area, and then from top to bottom (SelectX1+(ChopX1+ChopX2) / 2) to bottom (SelectX2-(ChopX1+ChopX2) / 2). The second cleaving knife printing area is moved;

[0094] The first type of image in the second cleaving knife printing area after the movement is obtained, the mean gray value and the gray variance in the first type of image are calculated, and the gray value array is stored.

[0095] In the embodiment, the first type of image in the second split knife printing area after movement is acquired every time one pixel is moved, and the gray mean value and the gray variance in the first type of image are calculated, the optimal center point coordinate is calculated by the gray mean value and the gray variance in the first type of image as the center position coordinate of the split knife template, and the accuracy and reliability of the center position coordinate of the split knife template are ensured. It should be noted that in the embodiment, the calculation of the center position coordinate of the split knife template by the gray mean value and the gray variance of the image is not limited, and the standard deviation of the image can also be calculated.

[0096] For example, the center position coordinate of the split knife template is determined according to the gray value, including:

[0097] The first type of image with a gray mean value less than a preset gray mean value threshold is screened from the calculated gray mean value;

[0098] The first type of image with the minimum gray variance is acquired from the screened first type of image;

[0099] The position coordinate of the acquired first type of image is taken as the center position coordinate of the split knife template.

[0100] The specific process is as follows:

[0101] The first type of image with a gray mean value less than a preset gray mean value threshold is screened from the calculated gray mean value, the coordinates X and Y of the position of the image are recorded in the arrays PosX and PosY, and the image variance of the position is recorded in the array PosDev;

[0102] The minimum value in the array PosDev is calculated;

[0103] The coordinates X and Y of the position corresponding to the minimum value in the array PosDev are acquired as the center position coordinate of the split knife template.

[0104] In the embodiment, the first type of image is screened for the first time by the gray mean value, the first type of image after the first screening is screened for the second time by the gray variance, then the position coordinate of the first type of image is acquired, and the position coordinate is taken as the center position coordinate of the split knife template, so that the accuracy of the calculated center position coordinate of the split knife template is ensured.

[0105] Embodiment two

[0106] Please refer to Figure 2 The, Figure 2 The bonding head position calibration method flow chart provided by the embodiment two of the application is shown in the figure. As shown in the figure, the bonding head position calibration method 200 in the embodiment includes the following steps:

[0107] S201. Generating a first cleaver printing area corresponding to the cleaver in the bonder;

[0108] S202. Generating a second cleaver printing area according to the first cleaver printing area;

[0109] S203. Obtaining an actual cleaver printing image when the cleaver is pressed down, and obtaining a first identification area determined according to the actual cleaver printing image;

[0110] S204. Standardizing the first identification area to generate a second identification area;

[0111] S205. Translating the second cleaver printing area in the second identification area, and calculating the gray value of each pixel of the image in the second identification area located in the second cleaver printing area every time a pixel is moved;

[0112] S206. Determining the center position coordinate of the cleaver template according to the gray value, translating the center point of the second cleaver printing area to the center position coordinate of the cleaver template, and completing the bonder position calibration.

[0113] In this embodiment, after the first identification area is determined according to the actual cleaver printing image, the first identification area is not directly used for bonder position calibration, but is standardized to generate a second identification area. The second cleaver printing area is translated in the second identification area, the gray value of each pixel of the image in the second identification area located in the second cleaver printing area is calculated every time a pixel is moved, the center position coordinate of the cleaver template is determined according to the gray value, and the accuracy of the center position coordinate is ensured. The cleaver position is automatically found and the template is created when the cleaver template is created, the cleaver position is automatically found and the template is created when the cleaver template is created, the error caused by the difference between the standards of each person when the first identification area is determined according to the actual cleaver printing image is effectively avoided, and the calibration effect of the bonder position is ensured.

[0114] For example, the first cleaver printing area corresponding to the cleaver in the bonder is generated by:

[0115] Obtaining a pre-stored two-dimensional drawing corresponding to the cleaver;

[0116] Drawing a cleaver printing contour according to the two-dimensional drawing;

[0117] Filling the cleaver printing contour to form the first cleaver printing area corresponding to the cleaver.

[0118] The specifications of the splitting knives of the bonding machine are not exactly the same. In this embodiment, the two-dimensional drawings corresponding to the splitting knives of different specifications are pre-stored in the memory. When calibrating the bond head position, the pre-stored two-dimensional drawings corresponding to the splitting knives are obtained, and the splitting knife mark outline is drawn according to the two-dimensional drawing. The splitting knife mark outline is filled to form the first splitting knife mark area corresponding to the splitting knife, which ensures the correctness of the generated first splitting knife mark area (standard template) and is compatible with the bond head position calibration of splitting knives of various specifications.

[0119] Exemplarily, generating the second cleaver mark area according to the first cleaver mark area includes:

[0120] Performing expansion and corrosion processing on the first cleaver mark area to obtain an outer contour area and an inner circle contour area;

[0121] Get the second smallest circumscribed rectangle of the outer contour area;

[0122] A second translation matrix is ​​generated based on the upper left corner point and the lower right corner point of the second minimum circumscribed regular rectangle, and the second minimum circumscribed regular rectangle is moved to the upper left corner position of the first chopping knife mark area according to the second translation matrix, and the translated second minimum circumscribed regular rectangle is used as the second chopping knife mark area.

[0123] The specific process is as follows:

[0124] Create the dilation matrix and the corrosion matrix

[0125] Apply the dilation matrix to the first cleavage print area ChooperXLD to obtain the outer contour area ChooperDilationXLD;

[0126] Applying the erosion matrix to the first cleavage mark area ChooperXLD to obtain the inner circle contour area ChooperErosionXLD; thereby obtaining concentric circles consisting of the outer contour area and the inner circle contour area;

[0127] Get the second smallest circumscribed rectangle Rectangle of the outer contour area ChooperDilationXLD;

[0128] Get the upper left corner (RecX1, RecY1) and lower right corner (RecX2, RecY2) of the second minimum circumscribed rectangle;

[0129] Generate the second translation matrix based on the upper left corner point (RecX1, RecY1)

[0130] The second minimum circumscribed regular rectangle is moved to the upper left corner of the first cleaver mark area according to the second translation matrix, and the translated second minimum circumscribed regular rectangle is used as the second cleaver mark area.

[0131] In this embodiment, the second cleaver mark area is obtained through the outer contour area of ​​the first cleaver mark area, and the center position coordinates of the cleaver template are determined using the second cleaver mark area, thereby ensuring the accuracy of the center position coordinates.

[0132] Exemplarily, obtaining an actual cleaving mark image when the cleaving knife is pressed down, and obtaining a first identification area determined based on the actual cleaving mark image, includes:

[0133] The actual cleaver mark image when the cleaver is pressed down is obtained and displayed. After the first recognition area is manually framed according to the image, the first recognition area data will be automatically generated, and the manually framed first recognition area can be obtained in the background.

[0134] Exemplarily, the standardizing the first recognition area to generate the second recognition area includes:

[0135] The first recognition area is subjected to cutout, denoising, contrast enhancement, and smoothing processing to generate a second recognition area.

[0136] The specific process is as follows: obtain an area SelectRegion that is 1.5 times the size of the first recognition area; obtain the image ReduceImage within SelectRegion (the mean and variance of the grayscale values ​​within the image); perform binomial filtering on the image ReduceImage to denoise the image; perform proportional enhancement on the filtered image to enhance the light and dark contrast of the image; apply a 7*7 contrast factor kernel to the proportionally enhanced image to enhance the image; and apply the following formula to transform the enhanced image:

[0137]

[0138] Where m is the maximum grayscale value of the image, o is the O parent method set, γ represents Gamma, t represents the threshold of the linear part and the exponential part, and s is a parameter that makes the linear part and the exponential part continuous; the transformed image is smoothed to obtain the second recognition area.

[0139] In this embodiment, the first recognition area is not directly used for bond head position calibration. Instead, the first recognition area is subjected to cropping, denoising, contrast enhancement, and smoothing processing to generate a second recognition area. The second recognition area is used to calculate the center position coordinates of the cleaver template, effectively avoiding errors caused by different standards of each person when determining the first recognition area based on the actual cleaver mark image.

[0140] Exemplarily, each time a pixel is moved, calculating the grayscale value of each pixel of the image in which the second identification area is located in the second cleaver mark area includes:

[0141] Each time the movement is performed, a second type of image is obtained in which the outer contour area is located within the second recognition area after the movement, the grayscale value of the grayscale in the second type of image is calculated, and the grayscale value is stored in the first grayscale value array; a third type of image is obtained in which the inner circle contour area is located within the second recognition area after the movement, the grayscale value of the grayscale in the third type of image is calculated, and the grayscale value is stored in the second grayscale value array.

[0142] The specific process is as follows:

[0143] Get the upper left corner point (ChopX1, ChopY1) and lower right corner point (ChopX2, ChopY2) of the outer contour region ChooperDilationRegion;

[0144] Get the upper left corner point (SelectX1, SelectY1) and lower right corner point (SelectX2, SelectY2) of the second recognition area SelectRegion;

[0145] From the upper left corner of the second recognition area SelectRegion, from the left (SelectY1+(ChopY1+

[0146] ChopY2) / 2) to the right (SelectY2-(ChopY1+ChopY2) / 2), and then from top (SelectX1+(ChopX1+ChopX2) / 2) to bottom (SelectX2-(ChopX1+ChopX2) / 2) to generate the translation matrix one pixel at a time Move the second chopping knife mark area (i.e., translate the outer area ChooperDilationXLD and the inner circle area ChooperErosionXLD respectively) until the lower right corner point of the outer contour area moves to the lower right corner point position of the second recognition area;

[0147] Obtain the second type of image whose outer contour area ChooperDilationXLD is located within the second recognition area after movement, calculate the grayscale value of the grayscale in the second type of image, and store it in the first grayscale value array DilationGrays; obtain the third type of image whose inner contour area ChooperErosionXLD is located within the second recognition area after movement, calculate the grayscale value of the grayscale in the third type of image, and store it in the second grayscale value array ErosionGrays.

[0148] In the embodiment, the center position coordinates of the cleaver template are calculated by the first gray value array and the second gray value array, so that the accuracy and reliability of the center position coordinates of the cleaver template are ensured.

[0149] For example, the center position coordinates of the cleaver template are determined according to the gray values, including:

[0150] According to the first gray value array and the second gray value array, the corresponding ρ value of each movement is calculated by a Pearson formula, and the position coordinates of the second smallest circumscribed positive rectangle corresponding to the maximum ρ value are taken as the center position coordinates of the cleaver template.

[0151] The specific process is as follows:

[0152] The ρ value is calculated according to the following Pearson formula, wherein X is ErosionGrays, and Y is DilationGrays, the calculated ρ value of Person is recorded in a tuple P, and the corresponding X and Y values at this time are recorded in corresponding tuples XSet and YSet.

[0153]

[0154] The maximum ρ value in the tuple P is calculated, wherein the greater the ρ value, the greater the correlation;

[0155] The position coordinates of the second smallest circumscribed positive rectangle corresponding to the maximum ρ value in the tuple P are obtained, and the coordinates are the center position coordinates of the cleaver template.

[0156] In the embodiment, the corresponding ρ value of each movement is calculated by the Pearson formula, and the position coordinates of the second smallest circumscribed positive rectangle corresponding to the maximum ρ value are taken as the center position coordinates of the cleaver template, so that the accuracy and reliability of the center position coordinates of the cleaver template are ensured.

[0157] Embodiment three

[0158] Please refer to Figure 3 The, Figure 3 A bonding head position calibration system schematic diagram provided by the embodiment three of the present application. As shown in the figure, the bonding head position calibration system 300 in the embodiment adopts the bonding head position calibration method (100, 200) provided by any one of the above-mentioned embodiment one and embodiment two, and includes:

[0159] The first generation module 301 is configured to generate a first cleaver printing area corresponding to a cleaver in a bonder.

[0160] The second generation module 302 is configured to generate a second cleaver printing area according to the first cleaver printing area.

[0161] A determination module 303 is configured to obtain an actual cleaving mark image when the cleaving knife is pressed down, and obtain a first recognition area determined according to the actual cleaving mark image;

[0162] A third generating module 304 is configured to perform standardization processing on the first recognition area to generate a second recognition area;

[0163] a calculation module 305 for translating the second chopping knife mark area in the second identification area, and calculating the grayscale value of each pixel of the image of the second identification area located in the second chopping knife mark area each time the second identification area is moved by one pixel;

[0164] The calibration module 306 is configured to determine the center position coordinates of the wedge template according to the grayscale value, and translate the center point of the second wedge mark area to the center position coordinates of the wedge template to complete the bond head position calibration.

[0165] In this embodiment, after the determination module 303 determines the first recognition area based on the actual cleaver mark image, the first recognition area is not directly used for bond head position calibration. Instead, the third generation module 304 performs standardization processing on the first recognition area to generate a second recognition area. The calculation module 305 translates the second cleaver mark area in the second recognition area. For each pixel moved, the grayscale value of each pixel of the image of the second recognition area located in the second cleaver mark area is calculated. The calibration module 306 determines the center position coordinates of the cleaver template based on the grayscale value, ensuring the accuracy of the center position coordinates. When creating a template for the cleaver, the cleaver position is automatically found and the template is created. This effectively avoids errors caused by different standards of each person when determining the first recognition area based on the actual cleaver mark image, thereby ensuring the bond head position calibration effect.

[0166] Example 4

[0167] An embodiment of the present invention provides a computer-readable storage medium, wherein the computer-readable storage medium stores computer-executable instructions. When the computer-executable instructions are executed by a processor, the method (100, 200) for calibrating a bond head position as provided in any one of the first and second embodiments is implemented. The method ensures the accuracy of the coordinates of the center position of a cleaver template, automatically finds the cleaver position and creates the template when creating a template for the cleaver, effectively avoids errors caused by different standards of each person when determining the first recognition area according to an actual cleaver mark image, and ensures the bond head position calibration effect.

[0168] It should be noted that the above-mentioned readable storage medium can be implemented by any type of volatile or non-volatile storage device or a combination thereof, such as static random access memory (SRAM), electrically erasable programmable read-only memory (EEPROM), erasable programmable read-only memory (EPROM), programmable read-only memory (PROM), read-only memory (ROM), magnetic storage, flash memory, magnetic disk, or optical disk. The readable storage medium can be any available medium that can be accessed by a general-purpose or special-purpose computer.

[0169] Note that the above are only preferred embodiments of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments, and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments and may include many other equivalent embodiments without departing from the concept of the present invention. The scope of the present invention is determined by the scope of the appended claims.

Claims

1. A bonding head position calibration method, characterized in that: The bonding head position calibration method comprises: Generate a first wedge mark area corresponding to a wedge in a bonding machine; generating a second cleaver mark area according to the first cleaver mark area; Acquire an actual cleaving mark image when the cleaving knife is pressed down, and acquire a first recognition area determined according to the actual cleaving mark image; performing standardization processing on the first recognition area to generate a second recognition area; translating the second cleaver mark area in the second recognition area, and calculating the grayscale value of each pixel of the image of the second recognition area located in the second cleaver mark area each time the second recognition area is moved by one pixel; The center position coordinates of the wedge template are determined according to the grayscale value, and the center point of the second wedge mark area is translated to the center position coordinates of the wedge template to complete the bond head position calibration.

2. The bonding head position calibration method according to claim 1, wherein: The step of generating a first wedge mark area corresponding to a wedge in a bonding machine includes: Obtaining a pre-stored two-dimensional drawing corresponding to the wrecking knife; Draw the outline of the splitting knife mark according to the two-dimensional drawing; The cleaver mark outline is filled to form a first cleaver mark area corresponding to the cleaver.

3. The bonding head position calibration method according to claim 1, wherein: The generating of the second cleavage mark area according to the first cleavage mark area includes: Obtaining a first minimum circumscribed regular rectangle of the first cleavage mark area; Obtain the upper left corner point and the lower right corner point of the first minimum circumscribed regular rectangle; Generate a first translation matrix according to the upper left corner point; The first minimum circumscribed regular rectangle is translated to the upper left corner of the first wedge mark area according to the first translation matrix, and the translated first minimum circumscribed regular rectangle is used as the second wedge mark area.

4. The bonding head position calibration method according to claim 3, wherein: The step of calculating the grayscale value of each pixel of the image in which the second identification area is located in the second cleavage mark area each time a pixel is moved includes: Each time the movement is performed, a first type of image in the second chopping knife mark area after the movement is obtained, and the grayscale mean and grayscale variance in the first type of image are calculated.

5. The bonding head position calibration method according to claim 4, wherein: Determining the center position coordinates of the wrecking template according to the grayscale value includes: Filtering out a first category of images whose grayscale mean is less than a preset grayscale mean threshold from the calculated grayscale mean; Obtaining a first-category image with the smallest grayscale variance from the screened first-category images; The acquired position coordinates of the first type of image are used as the center position coordinates of the wrecking template.

6. The bonding head position calibration method according to claim 1, wherein: The generating of the second cleavage mark area according to the first cleavage mark area includes: Performing expansion and corrosion processing on the first cleaver mark area to obtain an outer contour area and an inner circle contour area; Get the second smallest circumscribed rectangle of the outer contour area; A second translation matrix is ​​generated based on the upper left corner point and the lower right corner point of the second minimum circumscribed regular rectangle, and the second minimum circumscribed regular rectangle is moved to the upper left corner position of the first chopping knife mark area according to the second translation matrix, and the translated second minimum circumscribed regular rectangle is used as the second chopping knife mark area.

7. The bonding head position calibration method according to claim 6, wherein: The step of calculating the grayscale value of each pixel of the image in which the second identification area is located in the second cleavage mark area each time a pixel is moved includes: Each time the movement is performed, a second type of image is obtained in which the outer contour area is located within the second recognition area after the movement, the grayscale value of the grayscale in the second type of image is calculated, and the grayscale value is stored in the first grayscale value array; a third type of image is obtained in which the inner circle contour area is located within the second recognition area after the movement, the grayscale value of the grayscale in the third type of image is calculated, and the grayscale value is stored in the second grayscale value array.

8. The bonding head position calibration method according to claim 7, wherein: Determining the center position coordinates of the wrecking template according to the grayscale value includes: According to the first gray value array and the second gray value array, the ρ value corresponding to each movement is calculated by the Pearson formula, and the position coordinates of the second minimum circumscribed regular rectangle corresponding to the maximum ρ value obtained are used as the center position coordinates of the wrecking template.

9. The bonding head position calibration method according to claim 1, wherein: The step of normalizing the first recognition area to generate a second recognition area includes: The first recognition area is subjected to cutout, denoising, contrast enhancement, and smoothing processing to generate a second recognition area.

10. A bonding head position calibration system, characterized in that: The system adopts the bond head position calibration method according to any one of claims 1 to 9, comprising: A first generating module is used to generate a first wedge mark area corresponding to a wedge in a bonding machine; A second generating module, configured to generate a second cleavage mark area according to the first cleavage mark area; a determination module, configured to obtain an actual cleaving mark image when the cleaving knife is pressed down, and obtain a first recognition area determined according to the actual cleaving mark image; a third generating module, configured to perform standardization processing on the first recognition area to generate a second recognition area; a calculation module, configured to translate the second chopping knife mark area in the second identification area, and calculate the grayscale value of each pixel of the image of the second identification area located in the second chopping knife mark area each time the second identification area is moved by one pixel; The calibration module is used to determine the center position coordinates of the wedge template according to the grayscale value, translate the center point of the second wedge mark area to the center position coordinates of the wedge template, and complete the bond head position calibration.

11. A computer-readable storage medium, characterized in that The computer-readable storage medium stores computer-executable instructions, which are used to implement the bond head position calibration method according to any one of claims 1 to 9 when executed by a processor.

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