Annular spot laser processing system

Abstract

The application provides a kind of annular spot laser processing system, including laser light source, first lens, laser crystal, first dichroic mirror, second lens, second dichroic mirror, third dichroic mirror, third lens, fourth dichroic mirror, galvanometer mechanism, target workpiece, platform.The annular spot laser processing system only needs to generate composite laser by using one laser light source, realizes composite laser processing effect, and in the processing process, the main laser can use 500-550nm green laser, which is located in the central inner ring area.The auxiliary laser can use 1000-1100nm infrared light, which is located in the outer ring area, mainly used for preheating and heat transition of target workpiece working area, used for improving green light processing efficiency.The whole process has little spatter, and the heat influence of non-target processing area is small, which greatly improves the workpiece processing precision and yield, and the light conversion efficiency of laser is high, which greatly improves the energy utilization, and the production cost is also lower.

Description

Technical Field

[0001] The present invention relates to the field of laser technology, and more particularly to a ring-shaped spot laser processing system. Background Art

[0002] In recent years, the booming demand from the new energy industry has placed higher demands on front-end laser processing technology. Limited by material absorption factors, traditional infrared lasers have a very low absorption rate for highly reflective materials. This leads to numerous issues in welding, cutting, and other precision applications, such as spatter, low efficiency, and power limitations due to the single-module power supply. These issues have made them inadequate for welding and cutting highly reflective materials like copper.

[0003] Green lasers have significant advantages over infrared lasers due to copper's high absorption of green light beams. However, the laser beams of green lasers, like those of infrared lasers, have a Gaussian distribution. During laser processing, if the temperature of the machining center is too high, it may still cause spattering during the process and damage electronic components around the workpiece. At the same time, due to the large temperature difference between the machining center and the surrounding area during processing, a temperature gradient is formed, causing uneven heating of the workpiece, which can lead to various problems such as deformation, bubbles, and cracks in the workpiece.

[0004] Based on this, it is necessary to invent a ring-shaped spot laser processing system, which outputs a composite light of infrared and green light. The composite light output is in the form of a ring-shaped spot output, which can greatly improve the processing efficiency while reducing spatter.

[0005] Currently, there are two common ring-beam-assisted processing systems. One is to directly set up a ring-beam laser to form a ring-shaped spot for auxiliary processing; the other is a laser processing system with a ring fiber, created by IPG. Specifically, the laser's fiber structure consists of a central fiber and a ring fiber. The central fiber and the ring fiber are controlled by the laser to form a central beam and a ring beam respectively. The central beam performs laser processing, while the ring beam performs auxiliary processing. Both of these common laser processing systems are relatively complex and have high production costs.

[0006] Based on this, it is necessary to invent a laser processing system with simple structure, low cost, easy operation and excellent spot quality, which can also alleviate problems such as workpiece curling, spattering, bubbles and cracks during laser processing. Summary of the Invention

[0007] The purpose of this application is to provide a ring spot laser processing system to solve the problems raised in the above background technology.

[0008] To achieve the above-mentioned objectives, the present application provides the following technical solutions: a ring spot laser processing system, comprising a laser light source, a first lens, a laser crystal, a first dichroic mirror, a second lens, a second dichroic mirror, a third dichroic mirror, a third lens, a fourth dichroic mirror, a galvanometer mechanism, a target workpiece, and a platform.

[0009] The laser light source is mainly used to output 1000-1100nm infrared light as the fundamental frequency beam.

[0010] The first lens is used to converge the energy of the fundamental frequency light beam to increase the energy density or power density of the fundamental frequency light beam.

[0011] The laser crystal is an LBO / BBO or other frequency-doubling crystal, which is used to perform frequency conversion on the fundamental frequency light beam. When the fundamental frequency light of 1000-1100nm passes through the crystal and the power density reaches the nonlinear threshold, the corresponding second harmonic, i.e., the frequency-doubled light, is generated. The frequency of the generated frequency-doubled light is half of the fundamental frequency light, and the green light generated at this time is 500-550nm.

[0012] The first dichroic mirror, coated with a 500-550nm high-reflection coating and a 1000-1100nm anti-reflection coating, separates the frequency-doubled light generated by the laser crystal from the residual fundamental light. The separated 500-550nm frequency-doubled light becomes the first laser beam, and the remaining 1000-1100nm fundamental light becomes the second laser beam.

[0013] The second lens is arranged behind the first dichroic mirror reflecting the laser beam and is used to collimate the first laser beam of 500-550nm reflected by the first dichroic mirror. The second lens is a convex lens.

[0014] The second dichroic mirror is mainly coated with a 500-550nm high-reflection film and a 1000-1100nm anti-reflection film to reflect and redirect the 500-550nm light beam collimated by the second lens, and at the same time filter out the 1000-1100nm light beam that is incompletely separated after passing through the second lens.

[0015] A third dichroic mirror is provided behind the first dichroic mirror that transmits the laser beam, and is mainly used to reflect and redirect the second laser beam of 1000-1100 nm that passes through the first dichroic mirror.

[0016] The third lens is arranged in the rear direction of the third dichroic mirror reflecting the laser beam, and is used to collimate the second laser beam reflected by the third dichroic mirror. The third lens is also a convex lens.

[0017] In a preferred embodiment, the optical path from the third lens to the laser crystal must be greater than the optical path from the second lens to the laser crystal, so that the green laser beam of 500 to 550 nm is distributed in the central inner ring area, and the infrared light of 1000 to 1100 nm is distributed in the outer ring area (outside the central inner ring area).

[0018] The fourth dichroic mirror is disposed behind the third lens and can adjust the first laser beam and the second laser beam to the same laser output direction.

[0019] A galvanometer mechanism is provided behind the fourth dichroic mirror, and the galvanometer mechanism is mainly used to integrate the composite light beam transmitted by the fourth dichroic mirror, so that the first laser beam and the second laser beam act on the target workpiece according to production requirements.

[0020] The target workpiece is a component that needs to be processed.

[0021] The platform is mainly used to carry, clamp and move the target workpiece to facilitate processing of the target workpiece.

[0022] The annular spot laser processing system provided by this application only needs to use a single laser light source to generate a composite laser and achieve a composite laser processing effect. During the processing, the main laser can use a 500-550nm green laser. The green laser beam output by the system is distributed in a ring shape and is located in the central inner ring area. The auxiliary laser uses 1000-1100nm infrared light and is located in the outer ring area (the outer ring area covers the inner ring area). It is mainly used to preheat and heat the target workpiece working area to improve the efficiency of green light processing. The power density of the inner ring area is higher than that of the outer ring area. During the working process, the energy density of the inner ring is high, and the workpiece is hot-melted. The outer ring area is not processed due to its low power density. The entire process is highly efficient, with minimal spatter, the processing area is quickly processed, and the heat impact on the non-target processing area is small, greatly improving the workpiece processing accuracy, yield and efficiency. The laser's light-to-light conversion efficiency is extremely high, with basically no other energy loss, greatly improving energy utilization, and lowering the production cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present application or the technical solutions of the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0024] Figure 1 This is a first structural schematic diagram of the annular spot laser processing system provided by this application;

[0025] Figure 2 This is a second structural schematic diagram of the annular spot laser processing system provided by this application;

[0026] Figure 3 This is a third structural schematic diagram of the annular spot laser processing system provided by this application;

[0027] Figure 4 This is a fourth structural schematic diagram of the annular spot laser processing system provided by this application;

[0028] Figure 5 This is a fifth structural schematic diagram of the annular spot laser processing system provided by this application;

[0029] Figure 6 This is the sixth structural schematic diagram of the annular spot laser processing system provided in this application.

[0030] Figure numerals: 1. laser light source, 2. first lens, 3. laser crystal, 4. first dichroic mirror, 5. second lens, 6. first displacement mechanism, 7. second dichroic mirror, 8. third dichroic mirror, 9. third lens, 10. second displacement mechanism, 11. fourth dichroic mirror, 12. window, 13. galvanometer mechanism, 14. target workpiece, 15. platform, 16. fifth dichroic mirror, L, fundamental frequency beam, L1, first laser beam, L2, second laser beam. DETAILED DESCRIPTION

[0031] In order to enable those skilled in the art to better understand the present application, the present application is further described in detail below in conjunction with the accompanying drawings and specific embodiments. Obviously, the embodiments described are only part of the embodiments of the present application and are not intended to limit the scope of the rights of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0032] See also Figure 1 , Figure 1 This is a first structural schematic diagram of the annular spot laser processing system provided in this application. The annular spot laser processing system includes: a laser light source 1, a first lens 2, a laser crystal 3, a first dichroic mirror 4, a second lens 5, a second dichroic mirror 7, a third dichroic mirror 8, a third lens 9, a fourth dichroic mirror 11, a galvanometer mechanism 13, a target workpiece 14, and a platform 15.

[0033] The laser light source 1 is mainly used to output a fundamental frequency light beam L of 1000-1100 nm. The laser light source 1 can be a fiber laser or a semiconductor laser.

[0034] The first lens 2 is used to converge the energy of the fundamental frequency light beam L, thereby increasing the energy density or power density of the fundamental frequency light beam L and improving the subsequent frequency conversion efficiency. A plano-convex lens is usually used.

[0035] Laser crystal 3 is an LBO / BBO or other frequency-doubling crystal, used to perform frequency conversion on the fundamental frequency light beam L. When the fundamental frequency light of 1000-1100nm passes through the crystal and the power density reaches the nonlinear threshold, a corresponding second harmonic, i.e., frequency-doubled light, is generated. The frequency of the generated frequency-doubled light is half that of the fundamental frequency light, and the green light generated at this time is 500-550nm.

[0036] First dichroic mirror 4, coated with a 500-550nm high-reflection coating and a 1000-1100nm anti-reflection coating, separates the frequency-doubled light generated by laser crystal 3 from the residual fundamental light. The separated 500-550nm frequency-doubled light becomes first laser beam L1, and the residual 1000-1100nm fundamental light becomes second laser beam L2.

[0037] The second lens 5 is disposed in the rear direction of the first dichroic mirror 4 reflecting the laser beam, and is used to collimate the first laser beam L1 of 500-550 nm reflected by the first dichroic mirror 4. The second lens 5 is a convex lens.

[0038] The second dichroic mirror 7 is mainly coated with a 500-550nm high-reflection film and a 1000-1100nm anti-reflection film to reflect and redirect the 500-550nm light beam collimated by the second lens 5, and at the same time filter out the 1000-1100nm light beam that is incompletely separated after passing through the second lens 5.

[0039] A third dichroic mirror 8 is provided behind the transmitted laser of the first dichroic mirror 4. The third dichroic mirror 8 is coated with a 1000-1100nm high-reflection film and a 500-550nm anti-reflection film. The third dichroic mirror 8 is mainly used to reflect and redirect the second laser beam L2 of 1000-1100nm after passing through the first dichroic mirror 4, and filter out the first laser beam L1 of 500-550nm.

[0040] The third lens 9 is disposed in the rear direction of the third dichroic mirror 8 reflecting the laser beam, and is used to collimate the second laser beam L2 reflected by the third dichroic mirror 8. The third lens 9 is also a convex lens.

[0041] Furthermore, the optical path from the third lens 9 to the laser crystal 3 must be greater than the optical path from the second lens 5 to the laser crystal 3, so that the first laser beam L1 is a small-spot laser beam in the center, and the second laser beam L2 is a large-spot ring laser beam on the outside. This is because when the first laser beam L1 of 500-550nm is used to process highly reflective metal materials, the metal material has a better absorption rate of the laser beam, has better processing accuracy, and has smaller thermal effect side effects.

[0042] The fourth dichroic mirror 11 is disposed behind the third lens 9 and adjusts the first laser beam L1 and the second laser beam L2 to the same laser output direction.

[0043] A galvanometer mechanism 13 is provided behind the fourth dichroic mirror 11. The galvanometer mechanism 13 is mainly used to integrate the composite light beam transmitted by the fourth dichroic mirror 11, and to control the movement or deflection of the first laser beam L1 and the second laser beam L2 in two directions perpendicular to each other on a plane by optical scanning, so that the first laser beam L1 and the second laser beam L2 act on the target workpiece 14 according to production requirements.

[0044] The target workpiece 14 is a component that needs to be processed.

[0045] The platform 15 is mainly used to carry, clamp, and move the target workpiece 14 to facilitate processing of the target workpiece 14 .

[0046] Furthermore, in order to reduce the power loss of the system and improve the light-to-light conversion efficiency of the laser processing system, the first lens 2 can be coated with a 1000-1100nm anti-reflection film, and the side of the laser crystal 3 close to the first lens 2 is coated with a 1000-1100nm anti-reflection film, and the side away from the first lens 2 is coated with 500-550nm and 1000-1100nm anti-reflection films.

[0047] Furthermore, the first dichroic mirror 4 is coated with a 500-550nm high-reflection film and a 1000-1100nm anti-reflection film on the side close to the laser crystal 3, and is coated with a 1000-1100nm anti-reflection film on the side away from the laser crystal 3.

[0048] Furthermore, in order to reduce the power loss of the system and improve the light-to-light conversion efficiency of the laser processing system, the second lens 5 is coated with a 500-550nm anti-reflection film, and the third lens 9 is coated with a 1000-1100nm anti-reflection film.

[0049] Furthermore, the wavelength of the laser output by the second dichroic mirror 7 is 1000-1100 nm, and the surface of the second dichroic mirror 7 on the side close to the second lens 5 is coated with a 500-550 nm high-reflection film and a 1000-1100 nm anti-reflection film, while the surface on the side away from the second lens 5 is coated with a 1000-1100 nm anti-reflection film.

[0050] Furthermore, if Figure 1 As shown, the fourth dichroic mirror 11 can adjust the first laser beam L1 and the second laser beam L2 to the same laser output direction by coating a 1000-1100nm high-reflection film and a 500-550nm anti-reflection film (in other embodiments, the effect of adjusting the first laser beam L1 and the second laser beam L2 to the same laser output direction can also be achieved by coating other film layers and combining other placement angles).

[0051] See also Figure 2 , Figure 2 This is a second structural diagram of the annular spot laser processing system provided by this application. The annular spot laser processing system is Figure 1 The laser processing system further includes a first displacement mechanism 6 and a second displacement mechanism 10.

[0052] The first displacement mechanism 6 is connected to or carries the second lens 5, and can drive the second lens 5 to move back and forth in a direction parallel to the optical path. By driving the second lens 5 to move, the optical path between the second lens 5 and the laser crystal 3 can be changed. At the same time, the output divergence angle and Rayleigh length of the first laser beam L1 of 500-550nm can also be changed, thereby changing the spot size and focal position of the first laser beam L1 acting on the target workpiece 14.

[0053] The second displacement mechanism 10 is connected to or carries the third lens 9, and can drive the third lens 9 to move back and forth in a direction parallel to the optical path. The optical path between the third lens 9 and the laser crystal 3 can be changed by driving the third lens 9 to move. At the same time, the output divergence angle and Rayleigh length of the second laser beam L2 of 1000-1100nm can also be changed, thereby changing the spot size and focal position of the second laser beam L2 acting on the target workpiece 14.

[0054] Furthermore, the power density of the first laser beam L1 and the second laser beam L2 can also be autonomously adjusted by simultaneously changing the conversion efficiency of the laser crystal 3 to meet different application requirements. Compared with the existing composite laser processing system, the laser processing system of the present application does not require an additional power density adjustment mechanism.

[0055] See also Figure 3 , Figure 3 This is a third structural diagram of the annular spot laser processing system provided by this application. The annular spot laser processing system is Figure 2 The laser processing system further includes a window 12, which is located between the fourth dichroic mirror 11 and the galvanometer mechanism 13. The window 12 is mainly used to seal the annular spot laser processing system, isolate the composite light and the annular light generating system from the external environment, and realize a clean laser generating environment.

[0056] Furthermore, in order to reduce system loss, the window 12 is generally coated with anti-reflection films on both sides, namely, a 1000-1100 nm anti-reflection film and a 500-550 nm anti-reflection film.

[0057] Furthermore, to reduce the impact on the output laser beam, the window 12 can be a double-ended flat lens. The beam output through the window 12 includes a first laser beam L1 located in the center with a wavelength of 500 to 550 nm and a second laser beam L2 located in the outer ring with a wavelength of 1000 to 1100 nm. The output spot diameter of the first laser beam L1 is r1, and the output spot diameter of the second laser beam L2 is r2, where r2>r1. In the laser processing system, the difference in the inner and outer ring sizes of r1 and r2 can be designed accordingly by adjusting the optical path difference between the second lens 5 and the laser crystal 3 and the optical path difference between the third lens 9 and the laser crystal 3.

[0058] See also Figure 4 , Figure 4 This is a fourth structural diagram of the annular spot laser processing system provided by this application. The annular spot laser processing system is Figure 1 The laser processing system shown in the figure further includes a fifth dichroic mirror 16, which is located between the fourth dichroic mirror 11 and the galvanometer mechanism 13. The fifth dichroic mirror 16 is mainly used to steer the transmission direction of the composite laser beam to adapt to more application scenarios, facilitate the introduction of the laser beam into the target application system, and further filter out stray light.

[0059] like Figure 4 As shown, the fourth dichroic mirror 11 is arranged behind the third lens 9. The fourth dichroic mirror 11 can adjust the first laser beam L1 and the second laser beam L2 to the same laser output direction by coating with a 500-550nm high reflection film and a 1000-1100nm anti-reflection film (the coating and Figure 1 The fourth dichroic mirror 11 of the laser processing system is different), and the fifth dichroic mirror 16 is coated with a 1000-1100nm high reflection film and a 500-550nm high reflection film.

[0060] Furthermore, in order to reduce the negative impact on the output laser beam, the fifth dichroic mirror 16 is a flat mirror.

[0061] See also Figure 5 , Figure 5This is a fifth structural diagram of the annular spot laser processing system provided by this application. The annular spot laser processing system is Figure 1 The laser processing system shown in FIG. 1 further includes a first displacement mechanism 6 and a second displacement mechanism 10. The working principle and effect of the first displacement mechanism 6 and the second displacement mechanism 10 are similar to those of FIG. Figure 2 The laser processing system shown is the same as that shown in the figure and will not be described again here.

[0062] See also Figure 6 , Figure 6 This is a sixth structural diagram of the annular spot laser processing system provided by this application. The annular spot laser processing system is Figure 5 The laser processing system shown in FIG. 1 further includes a window 12, which is located between the fourth dichroic mirror 11 and the fifth dichroic mirror 16. Figure 6 The working principle and effect of the window piece 12 in Figure 3 The laser processing system shown is the same as that shown in the figure and will not be described again here.

[0063] The laser processing system of the present application has adjustable melting depth. Since the output composite laser beams have their own parameter adjustment systems such as divergence angle, the parameters of the laser processing system are adjusted in real time through external control. By adjusting or compensating the processing parameters during the laser processing process, synchronous processing with different melting depths or dynamic transformation processing with different melting depths can be achieved, which can meet the needs of various difficult processing scenarios.

[0064] It should be noted that the technical solutions of the above embodiments of the present application can be combined. If there is no inclusion relationship between the embodiments, unless there is an obviously contradictory solution, it is not limited to the scope of the single embodiment, but can be combined into a new embodiment. In this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device comprising a series of elements are inherent to the elements. In the absence of further restrictions, the elements defined by the sentence "comprising a ..." do not exclude the presence of other identical elements in the process, method, article or device comprising the elements. In addition, the above-mentioned technical solutions provided in the embodiments of the present application that are consistent with the corresponding technical solutions in the prior art are not described in detail to avoid excessive elaboration.

[0065] Specific examples are used herein to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only intended to help understand the method and core ideas of the present application. It should be noted that, for those skilled in the art, without departing from the principles of the present application, various improvements and modifications may be made to the present application, as well as combinations of the various embodiments in the present application. Such improvements, modifications, and combinations also fall within the scope of protection of the claims of the present application.

Claims

1. A ring spot laser processing system, characterized in that , include: Laser light source (1), first lens (2), laser crystal (3), first dichroic mirror (4), second lens (5), second dichroic mirror (7), third dichroic mirror (8), third lens (9), fourth dichroic mirror (11), galvanometer mechanism (13), target workpiece (14), platform (15); The laser light source (1) is used to output a fundamental frequency light beam (L) of 1000 to 1100 nm; The first lens (2) is used to converge the energy of the fundamental frequency light beam (L); The laser crystal (3) is used to perform frequency conversion on the fundamental frequency light beam (L) to generate green light of 500 to 550 nm; The first dichroic mirror (4) is coated with a high-reflection film of 500-550 nm and an anti-reflection film of 1000-1100 nm, and separates the doubled frequency light and the residual fundamental frequency light generated after conversion by the laser crystal (3). The doubled frequency light of 500-550 nm after separation is the first laser beam (L1), and the residual fundamental frequency light of 1000-1100 nm is the second laser beam (L2). The second lens (5) is arranged in the rear direction of the laser light reflected by the first dichroic mirror (4) and is used for collimating and adjusting the first laser beam (L1) of 500 to 550 nm reflected by the first dichroic mirror (4); The second dichroic mirror (7) is coated with a 500-550nm high-reflection film and a 1000-1100nm anti-reflection film, and reflects and redirects the 500-550nm light beam collimated by the second lens (5); A third dichroic mirror (8) is provided behind the transmitted laser of the first dichroic mirror (4) for reflecting and redirecting the second laser beam (L2) of 1000 to 1100 nm after passing through the first dichroic mirror (4); The third lens (9) is arranged in the rear direction of the laser light reflected by the third dichroic mirror (8) and is used to collimate the second laser beam (L2) reflected by the third dichroic mirror (8); The fourth dichroic mirror (11) is arranged behind the third lens (9) and adjusts the first laser beam (L1) and the second laser beam (L2) to the same laser output direction; A galvanometer mechanism (13) is provided behind the fourth dichroic mirror (11), and the galvanometer mechanism (13) is mainly used to integrate a composite beam of the first laser beam (L1) and the second laser beam (L2) transmitted by the fourth dichroic mirror (11); The target workpiece (14) is a component to be processed; the platform (15) is used to carry, clamp, and move the target workpiece (14) to facilitate processing of the target workpiece (14); the optical path from the third lens (9) to the laser crystal (3) must be greater than the optical path from the second lens (5) to the laser crystal (3), the output spot diameter of the first laser beam (L1) is r1, the output spot diameter of the second laser beam (L2) is r2, and r2>r1.

2. The annular spot laser processing system according to claim 1, characterized in that: It also includes a first displacement mechanism (6) and a second displacement mechanism (10); The first displacement mechanism (6) is connected to or carries the second lens (5), driving the second lens (5) to move forward and backward in a direction parallel to the optical path; The second displacement mechanism (10) is connected to or carries the third lens (9), driving the third lens (9) to move forward and backward in a direction parallel to the optical path.

3. The annular spot laser processing system according to claim 1, characterized in that: It also includes a window plate (12), which is located between the fourth color separation mirror (11) and the galvanometer mechanism (13) and is used to seal the annular spot laser processing system.

4. The annular spot laser processing system according to claim 1, characterized in that , the power density of the first laser beam (L1) and the second laser beam (L2) is adjusted by simultaneously changing the conversion efficiency of the laser crystal (3).

5. The annular spot laser processing system according to claim 1, characterized in that The fourth dichroic mirror (11) adjusts the first laser beam (L1) and the second laser beam (L2) to the same laser output direction by coating a 1000-1100nm high reflection film and a 500-550nm anti-reflection film.

6. The annular spot laser processing system according to claim 1, characterized in that , further comprising a fifth dichroic mirror (16), the fifth dichroic mirror (16) being located between the fourth dichroic mirror (11) and the galvanometer mechanism (13), and being used for steering the transmission direction of the composite laser beam, the fourth dichroic mirror (11) adjusting the first laser beam (L1) and the second laser beam (L2) to the same laser output direction by coating a 500-550nm high-reflection film and a 1000-1100nm anti-reflection film.

7. The annular spot laser processing system according to claim 1, characterized in that: The first lens (2) is coated with a 1000-1100nm antireflection film, the side of the laser crystal (3) close to the first lens (2) is coated with a 1000-1100nm antireflection film, and the side away from the first lens (2) is coated with 500-550nm and 1000-1100nm antireflection films.

8. The annular spot laser processing system according to claim 1, characterized in that: The second lens (5) is coated with a 500-550nm anti-reflection film, and the third lens (9) is coated with a 1000-1100nm anti-reflection film.

9. The annular spot laser processing system according to claim 1, characterized in that: The second dichroic mirror (7) is coated with a 500-550nm high-reflection film and a 1000-1100nm anti-reflection film on the surface of the side close to the second lens (5), and is also coated with a 1000-1100nm anti-reflection film on the surface of the side away from the second lens (5).

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