Binding metal collection device and collection method

Abstract

The application belongs to the technical field of sputtering film coating, and discloses a binding metal collecting device and a collecting method. The binding metal collecting device comprises a metal collecting pipe body and a flow guide sheet, and the metal collecting pipe body and the flow guide sheet are both tubular structures with two open ends sleeved on the outer wall of a target material. The top of the metal collecting pipe body is provided with an annular opening, and a metal collecting cavity is formed between the bottom of the metal collecting pipe body, the inner wall of the metal collecting pipe body and the outer wall of the metal collecting pipe body. The bottom opening of the flow guide sheet is connected with the inner wall of the top opening of the metal collecting pipe body, the pipe diameter of the flow guide sheet gradually decreases in the direction away from the metal collecting pipe body, and a flow guide slope is formed towards the annular opening. The outer wall of the metal collecting pipe body and / or the flow guide sheet is provided with a fastening assembly, and the top opening of the flow guide sheet is sealingly and closely arranged between the outer wall of the target material by the fastening assembly. The binding metal collecting device and the collecting method improve the utilization rate of the binding metal, can prevent personnel from being scalded, and improve work efficiency.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of sputtering coating, and relates to a binding metal collecting device and a collecting method, in particular to a binding metal collecting device and a collecting method in a rotary target material unbonding process. BACKGROUND

[0002] At present, sputtering coating technology is widely used, and rotary target material is used as the main sputtering material. In the bonding process of the rotary target material, defects are often caused to the target material or the bonding rate of the target material is unqualified. After the unqualified target material is confirmed by C scanning, the bonded target material needs to be unbonded.

[0003] Most target materials are bonded by sections. The adjacent sections are usually bonded by a specific binding metal. A gap of 0.4-0.7 mm is usually required between the sections. For the target material that needs to be unbonded, the current common process is as follows: the defective target material is heated to melt the binding metal, the molten binding metal directly flows out of the gap, flows onto the target material or the ground, and is manually processed by a shovel after cooling. This method has the following problems: the molten binding metal will splash, which can easily cause injury to the cleaning personnel and also cause unnecessary waste; the cleaning process takes a long time. SUMMARY

[0004] In view of the above problems in the prior art, one of the purposes of the present application is to provide a binding metal collecting device.

[0005] The second purpose of the present application is to provide a binding metal collecting method.

[0006] To achieve the above purposes, the technical solution adopted by the present application is as follows:

[0007] A binding metal collecting device, comprising a metal collecting pipe body and a flow guide piece, the metal collecting pipe body and the flow guide piece are both tubular structures with open ends sleeved on the outer wall of the target material;

[0008] The top of the metal collecting pipe body is provided with an annular opening, and a metal collecting cavity is formed between the bottom of the metal collecting pipe body, the inner wall of the metal collecting pipe body and the outer wall of the metal collecting pipe body;

[0009] The bottom opening of the flow guide piece is connected with the inner wall of the top opening of the metal collecting pipe body, the pipe diameter of the flow guide piece gradually decreases in the direction away from the metal collecting pipe body, forming a flow guide slope towards the annular opening;

[0010] The outer wall of the metal collecting pipe body and / or the flow guide piece is provided with a fastening assembly, and the top opening of the flow guide piece is sealingly and closely arranged between the outer wall of the target material through the fastening assembly.

[0011] Further, the fastening assembly is a buckle fastening assembly which is sleeved on the outer wall of the metal collecting tube body and / or the deflector.

[0012] Further preferably, the buckle fastening assembly comprises a first semicircular ring and a second semicircular ring which are spliced together to form a ring structure, one end of the first semicircular ring and the second semicircular ring are hinged to each other, and the other end is provided with a locking unit for locking the two.

[0013] Further preferably, the locking unit comprises two fixed blocks fixed at the ends of the first semicircular ring and the second semicircular ring respectively, connecting holes provided on the two fixed blocks respectively, and a bolt structure fastening the two connecting holes.

[0014] Further, the inner wall of the metal collecting tube body and the deflector are integrally formed; the metal collecting tube body and the deflector are made of titanium alloy material.

[0015] Further, the slope of the deflector is 0°< slope ≤ 15°. The slope is set so that the binding metal will not scatter out of the metal collecting cavity during the collecting process.

[0016] Further, a gasket is arranged between the top opening of the deflector and the outer wall of the target material; the fastening assembly locks the metal collecting tube body and / or the deflector, so that the top opening of the deflector is fastened to the outer wall of the target material through the gasket.

[0017] Further preferably, the gasket is a high-temperature-resistant rubber gasket.

[0018] A binding metal collecting method, characterized in that the binding metal collecting device is used, comprising the following steps:

[0019] (1) Clean the gap below the defective target material, open the fastening assembly of the binding metal collecting device, sleeve the binding metal collecting device onto the defective target material, so that the top opening of the deflector is located below the gap, and fasten the fastening assembly to make the top opening of the deflector seal and fit with the outer wall of the target material;

[0020] (2) Heat the target material until the binding metal flows out of the gap, flows to the annular opening through the deflector, and is collected by the metal collecting cavity.

[0021] Further, the gap below the defective target material is cleaned with a blade.

[0022] Further, the top opening of the deflector is located 3-5 cm below the gap.

[0023] Further, the gap is wrapped with high-temperature adhesive paper without adhesive, and after wrapping the adhesive tape, the binding metal will not splash after melting, and it is easier to flow to the metal collecting cavity along the deflector.

[0024] Compared with the prior art, the present application has the following beneficial effects:

[0025] The binding metal collecting device has simple structure and convenient operation, can realize collection of the binding metal, and is detachable, facilitating taking out of the collected binding metal and continuous use of the device.

[0026] The binding metal collecting device and the collecting method improve the utilization rate of the binding metal, can prevent scalding of personnel, and improve work efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0027] The accompanying drawings are included to provide a further understanding of the present application, and constitute a part of the specification, illustrate the present application and explain the principles of the present application, and do not constitute a limitation of the present application. In the drawings:

[0028] Figure 1 It is a structural schematic view of the binding metal collecting device.

[0029] Figure 2 It is a structural schematic view of the fastening assembly.

[0030] Among them:

[0031] 1 - metal collecting pipe body, 11 - annular opening, 12 - metal collecting cavity, 13 - reinforcing rib;

[0032] 2 - guide vane;

[0033] 3 - gasket;

[0034] 4 - fastening assembly, 41 - first semicircle ring, 42 - second semicircle ring, 43 - fixed block, 44 - hinge, 45 - bolt, 46 - nut. DETAILED DESCRIPTION

[0035] In order to facilitate the understanding of the present application, the present application will be described in more detail and in a more comprehensive and detailed manner in combination with the drawings of the specification and the preferred embodiments, but the protection scope of the present application is not limited to the following specific embodiments.

[0036] Unless otherwise defined, all professional terms used in the following have the same meaning as generally understood by those skilled in the art. The professional terms used in this paper are only for the purpose of describing specific embodiments and are not intended to limit the protection scope of the present application.

[0037] Example 1

[0038] As Figure 1 shown, the present embodiment discloses a binding metal collecting device and a binding metal collecting method.

[0039] The binding metal collecting device comprises a metal collecting pipe body 1 and a flow guide piece 2, both of which are tubular structures with open ends and are sleeved on the outer wall of the target material;

[0040] The metal collecting pipe body 1 is provided with an annular opening 11 at the top, and a metal collecting cavity 12 is formed between the bottom of the metal collecting pipe body, the inner wall of the metal collecting pipe body and the outer wall of the metal collecting pipe body.

[0041] The bottom opening of the flow guide piece 2 is connected to the inner wall of the top opening of the metal collecting pipe body 1, and the pipe diameter of the flow guide piece 2 gradually decreases in the direction away from the metal collecting pipe body 1, forming a flow guide slope towards the annular opening 11.

[0042] The outer wall of the metal collecting pipe body 1 is provided with a fastening assembly 4, and the top opening of the flow guide piece 3 is arranged in sealing and fitting with the outer wall of the target material through the fastening assembly 4.

[0043] As one of the preferred schemes of the embodiment, the fastening assembly 4 is a buckle fastening assembly sleeved on the outer wall of the metal collecting pipe body 1. In the embodiment, as shown in the figure, the buckle fastening assembly comprises a first semicircular ring 41 and a second semicircular ring 42 which are spliced into an annular structure, one end of the first semicircular ring 41 and the second semicircular ring 42 is hinged to each other (hinged through a hinge 44), and the other end is provided with a locking unit for locking the two. Figure 2 The locking unit comprises two fixed blocks 43 fixed at the end of the first semicircular ring 41 and the second semicircular ring 42 respectively, connecting holes arranged on the two fixed blocks respectively, and a bolt structure fastening the two connecting holes, wherein the bolt structure comprises a bolt 45 and a nut 46 matched with the bolt.

[0044] As one of the preferred schemes of the embodiment, the inner wall of the metal collecting pipe body 1 and the flow guide piece 2 are integrally formed.

[0045] In the embodiment, the metal collecting pipe body 1 and the flow guide piece 2 are made of titanium alloy material or other suitable material, which can be deformed under the fastening of the fastening assembly 4, and the top opening of the flow guide piece 3 is arranged in sealing and fitting with the outer wall of the target material through the fastening assembly 4.

[0046] In the embodiment, 0° < the slope of the flow guide slope ≤ 15°.

[0047] As one of the preferred schemes of the embodiment, a gasket 3 is arranged between the top opening of the flow guide piece 2 and the outer wall of the target material, and the fastening assembly 4 locks the metal collecting pipe body 1, so that the top opening of the flow guide piece 2 is fastened and sleeved on the outer wall of the target material through the gasket 3. In the embodiment, the gasket 3 is a high-temperature-resistant rubber gasket.

[0048] As one of the preferred solutions of this embodiment, the fastening component 4 is sleeved on the outer wall of the metal collection tube 1. In order to enhance its fastening effect, three reinforcing ribs 13 are evenly placed horizontally on the annular opening 11.

[0049] As one of the preferred embodiments of this invention, this embodiment also discloses a method for collecting bound metals, using the aforementioned bound metal collecting device, comprising the following steps:

[0050] (1) Clean the gap under the defective target material with a blade, open the fastening assembly of the binding metal collection device, put the binding metal collection device onto the defective target material until the top opening of the guide plate is below the gap, and fasten the fastening assembly so that the top opening of the guide plate is sealed and fitted with the outer wall of the target material.

[0051] (2) The target material is heated until the binding metal flows out from the gap, flows through the guide plate to the annular opening, and is collected by the metal collection chamber.

[0052] Example 2

[0053] This embodiment uses the metal collection device and collection method from Embodiment 1, including the following steps:

[0054] (1) Clean the gap under the defective copper-gallium alloy rotating target with a blade, open the fastening assembly of the binding metal collection device, put the binding metal collection device onto the defective target, until the top opening of the guide plate is 3-5cm below the gap, tighten the fastening assembly so that the top opening of the guide plate is sealed and fitted with the outer wall of the target, and wrap the gap with high temperature adhesive tape without glue.

[0055] (2) The binding metal of the copper-gallium alloy target is indium. The target is heated to 180°C. At this time, the binding metal flows out from the gap. The temperature is maintained at 180°C until no binding metal flows out from the gap. The molten binding metal flows to the annular opening through the guide plate and is collected by the metal collection chamber.

[0056] In this embodiment, the bonded metal melts without splashing and flows along the guide plate into the metal collection chamber, and the cleaning process only takes 5 minutes.

[0057] Comparative Example 1

[0058] This comparative example involves collecting gold-bonding metal from defective copper-gallium alloy rotating targets. The defective copper-gallium alloy rotating targets used are the same as those in Example 2, and the bonding metal of this target is indium.

[0059] In the present comparative example, no device is used in the unwinding process. The target material is heated to 180°C, and the binding metal starts to melt. The molten binding metal directly flows out and onto the copper-gallium alloy rotating target material and the ground. After cooling, the molten binding metal is manually removed with a shovel.

[0060] In the present comparative example, splashes are generated after the binding metal melts. The cleaning process takes 30 minutes.

[0061] The above merely illustrates the preferred embodiments of the present application, and is not used to limit the present application. Any modification, equivalent replacement, improvement, etc. within the spirit and principle of the present application should be included in the scope of the present application.

Claims

1. A binding metal collection device characterized by, The binding metal collecting device comprises a metal collecting tube and a deflector, both of which are tubular structures with open ends and sleeved on the outer wall of the target material; The metal collecting tube is provided with an annular opening at the top, and a metal collecting cavity is formed between the bottom of the metal collecting tube, the inner wall of the metal collecting tube, and the outer wall of the metal collecting tube; The bottom opening of the deflector is connected to the inner wall of the top opening of the metal collecting tube, and the tube diameter of the deflector gradually decreases in the direction away from the metal collecting tube, forming a deflector slope towards the annular opening; The outer wall of the metal collecting tube and / or the deflector is provided with a fastening assembly, and the top opening of the deflector is sealingly and closely arranged between the fastening assembly and the outer wall of the target material.

2. The binding metal collection device of claim 1, wherein, The fastening assembly is a buckle fastening assembly sleeved on the outer wall of the metal collecting tube and / or the deflector.

3. The binding metal collection device of claim 2, wherein, The buckle fastening assembly comprises a first semicircular ring and a second semicircular ring which are spliced together to form an annular structure, one end of the first semicircular ring and the second semicircular ring are hingedly connected to each other, and the other end is provided with a locking unit for locking the two.

4. The binding metal collection device of claim 3, wherein, The locking unit comprises two fixed blocks fixed at the ends of the first semicircular ring and the second semicircular ring, respectively, connecting holes provided on the two fixed blocks, and a bolt structure fastening the two connecting holes.

5. The binding metal collection device of claim 1, wherein, The metal collecting tube inner wall and the deflector are integrally formed.

6. The binding metal collection device of claim 1, wherein, 0° < slope of the deflector slope ≤ 15°.

7. The binding metal collection device according to any one of claims 1 to 6, wherein A gasket is arranged between the top opening of the deflector and the outer wall of the target material; the fastening assembly locks the metal collecting tube and / or the deflector, and the top opening of the deflector is fastened to the outer wall of the target material through the gasket.

8. The binding metal collection device of claim 7, wherein, The gasket is a high-temperature-resistant rubber gasket.

9. A method of binding metal collection, characterized by, The binding metal collecting device of any one of claims 1-8 is used, comprising the following steps: (1) Clean the gap below the defective target material, open the fastening assembly of the binding metal collecting device, and sleeve the binding metal collecting device onto the defective target material until the top opening of the deflector is located below the gap, and use the fastening assembly to fasten and seal the top opening of the deflector and the outer wall of the target material; (2) Heat the target material until the binding metal flows out of the gap, flows to the annular opening through the deflector, and is collected by the metal collecting cavity.

10. The binding metal collection method of claim 9, wherein, The top opening of the deflector is located 3-5 cm below the gap; a high-temperature adhesive paper without adhesive is wound around the gap.

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