Chip detection device

Abstract

The application relates to the technical field of chip detection devices, and discloses a chip detection device which comprises a base, a clamp unit, a detection unit, a position adjusting unit arranged on the base and a shutdown unit, the clamp unit comprises a supporting plate and an adjusting part arranged on the base, and a limiting groove is arranged on the top surface of the supporting plate; the detection part of the detection unit is arranged on the position adjusting unit and located directly above the supporting plate. The chip is limited by the cooperation between the supporting plate and the adjusting part, the chip in the limiting groove is limited in the horizontal direction under the resistance of the inner wall of the limiting groove, the position deviation of the chip is prevented, the horizontal freedom of the supporting plate is limited, the supporting plate of different sizes and shapes is replaced, the whole clamp unit can be suitable for the chip detection under different conditions such as the bare chip and the chip on the circuit board, the detection difficulty of various chips is greatly reduced, and unnecessary troubles are reduced.

Description

Technical Field

[0001] The invention relates to a chip detection device. Background Art

[0002] Currently, the testing of packaged common electronic components is often performed using some test fixtures or customized fixtures. When testing bare chips, there are often no available test fixtures and test methods.

[0003] Especially for very small independent bare chip units cut from the wafer, the testing of these bare chips is very different from that of the entire wafer on the ordinary process line. During wafer testing, since the single chip is in an uncut state on the wafer, and the size of the wafer is generally 4 inches, 6 inches, 8 inches or even larger, and the size is relatively fixed, it is relatively easy to fix and accurately position it during actual testing. However, for a single bare chip unit, due to its small size and large differences in shape and size, traditional fixtures are obviously unable to fix it. When testing an unfixed bare chip unit, the force of the test probe when contacting the chip can easily cause the chip to move; and for the detection of chips that have been soldered on the circuit board, another fixture is required for fixation. Summary of the Invention

[0004] In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the present invention is to provide a chip detection device that can fix and test a single bare chip and a chip on a circuit board.

[0005] In order to solve the above technical problems, a technical solution adopted by the present invention is: to provide a chip detection device and specifically include a base, a clamp unit, a detection unit, a position adjustment unit and a shutdown unit, the clamp unit includes a support plate and an adjustment part arranged on the base for limiting the support plate in the horizontal direction, a limiting groove adapted to the outer contour of the bare chip is provided on the top surface of the support plate, the limiting groove is used to limit the bare chip, no matter what kind of chip, a matching limiting groove can be provided on the support plate to realize the positioning of chips of different sizes and prevent the chip from shifting, and the adjustment part can be used to limit the support plate and facilitate the replacement of the support plate, so that it can be used for the detection and limitation of different chips; the detection unit is used to detect the electrical properties of the chip, The position adjustment unit is arranged on the base, and the detection part of the detection unit is arranged on the position adjustment unit and is located directly above the support plate. The position adjustment unit is used to drive the detection unit to move along the X-axis, Y-axis and Z-axis relative to the support plate, so that the detection unit can contact the test pad (pad, referring to the input / output port of the chip) of the chip through the detection part, so as to achieve the purpose of aligning the bare chip and completing the electrical performance test of the chip, and can replace the support plate for installing the circuit board, so as to monitor the chip on the circuit board; the shutdown unit is electrically connected to the detection unit and the position adjustment unit respectively, and is used to shut down the detection unit and the position adjustment unit when the equipment is abnormal to prevent further losses.

[0006] Furthermore, the detection unit includes a control part arranged on the base and a probe electrically connected to the control part; the position adjustment unit includes a first support seat arranged on the base for sliding along the X-axis, a second support seat arranged on the first support seat for sliding along the Y-axis, and a first driving part for driving the first support seat to move along the X-axis and driving the second support seat to move along the Y-axis. A second driving part is arranged on the second support seat along the Z-axis direction, and a test frame is arranged on the output end of the second driving part for sliding connection to the second support seat along the Z-axis direction. The test frame is located directly above the support plate, and the probe is installed on the test frame with the detection end facing the support plate, so that the position between the probe and the support plate can be adjusted, so that the probe can be aligned with the chip by adjusting the position, thereby ensuring the accuracy of the data after the chip test.

[0007] Furthermore, the test stand is provided with a plurality of adjustment limit parts arranged along the Z-axis direction and movable along the Z-axis direction to abut against the support plate, so as to limit the degree of freedom of the support plate in the Z-axis direction.

[0008] Furthermore, it also includes a sensing unit arranged on each side wall of the base, which is used to detect whether a person or object is approaching, and to issue a prompt when a person or object is approaching to avoid affecting the chip detection.

[0009] Furthermore, the adjusting portion includes a bottom plate arranged on the top surface of the base and having a supporting plane, a plurality of limit blocks slidably arranged on the supporting plane of the bottom plate and spaced apart along the outer side of the bottom plate for resisting the supporting plate, and a plurality of locking structures arranged in the bottom plate and adapted to each limit block for limiting the sliding of the limit blocks, wherein a part of the limit blocks are respectively arranged on both sides of the supporting plate along the X-axis and slide along the X-axis, and another part of the limit blocks are respectively arranged on both sides of the supporting plate along the Y-axis and slide along the Y-axis, so that support plates of different sizes can be placed between the limit blocks to limit the chip in different situations; the adjusting portion also includes a traction structure arranged on the base and respectively connected to each locking structure, one end of the traction structure extends outside the base, and the traction structure is used to contact the locking structure to lock the limit block.

[0010] Furthermore, a limiting cavity is provided inside the base plate at a position corresponding to each limiting block, and each locking structure is arranged in each limiting cavity. A sliding groove is provided on the top surface of the base plate at a position corresponding to each limiting cavity, which is arranged along the sliding direction of the corresponding limiting block and connected to the limiting cavity. The bottom of each limiting block moves through the corresponding sliding groove and extends into the limiting cavity, and the part of the limiting block extending to the limiting cavity engages with the locking structure. The limiting block can slide inwardly along the sliding direction relative to the locking structure, and the locking structure can limit the limiting block from sliding outward along the sliding direction, thereby limiting the supporting plate after the limiting block abuts against the supporting plate.

[0011] Furthermore, the locking structure includes a first self-restoring spring and a rack arranged in the limit cavity along the sliding direction of the limit block, the first self-restoring spring is located on the outward side of the limit block and its two ends are respectively connected to the inner wall of the limit cavity and the limit block, when the limit block is located at the outward end of the slide groove, the first self-restoring spring is in a normal state, and after the limit block slides toward the inside, the first self-restoring spring will be in a stretched state and always pull the limit block, and when the limit block is unlocked from the rack, the first self-restoring spring can make the limit block Quickly retract and away from the supporting plate; an inwardly inclined meshing tooth is provided on the top surface of the rack, and an engaging groove engaged with the meshing tooth is formed on the side of the limit block facing the rack; the rack is arranged in the limit cavity for sliding along the Z-axis direction, and a second self-restoring spring with two ends respectively connected to the rack and the inner wall of the limit cavity is provided at the bottom of the rack along the Z-axis direction, and the second self-restoring spring is in a compressed state to always squeeze the rack toward one side of the rack, so that the rack can always be pressed against the limit block to lock the limit block.

[0012] Further, a placing cavity is formed in the interior of the base, and a first through hole is formed in the top of the placing cavity and corresponds to the position directly below each rack in the Z-axis direction; the traction structure comprises a roller set rotatably arranged in the placing cavity and a plurality of pull ropes, one end of each pull rope is connected to the corresponding rack and the other end passes through the first through hole and is wound around the roller set, and the ends of the pull ropes away from the racks are gathered together and then are pulled out of the base, so that the unlocking of each limiting block can be realized by pulling the pull ropes, and the operation is convenient and simple.

[0013] Further, a second through hole is formed in the outer wall of the base and communicates with the placing cavity; the traction structure further comprises a pull ring with a diameter greater than that of the second through hole, and the ends of the pull ropes away from the racks are pulled out of the second through hole and are connected to the pull ring, so that all the limiting blocks can be unlocked by pulling one pull ring to pull all the pull ropes, and each limiting block is reset under the action of each first self-recovery spring to facilitate the removal of the support plate, and the pull ring can simplify the operation process of the pull ropes and avoid the injury caused by the pull ropes.

[0014] Further, an elastic pad is arranged on the side of each limiting block facing the support plate to avoid the injury of the support plate caused by the abutting of the limiting block.

[0015] The chip detection device of the present application has at least the following beneficial effects:

[0016] By cooperating between the support plate and the adjusting part, a limiting groove with a contour matching the chip is formed to limit the chip, and the chip in the limiting groove is limited in the horizontal direction under the resistance of the inner wall of the limiting groove, so that the position deviation of the detection unit during the detection of the chip is avoided; and the adjusting part can be used to limit the freedom of the support plate in the horizontal direction, so that different sizes and shapes of the support plate can be replaced, and even the circuit board with the chip to be detected can be directly placed, so that the entire clamp unit can be applied to the detection of chips in different situations such as bare chips and chips on circuit boards, thereby greatly reducing the detection difficulty of various chips and reducing unnecessary troubles; at the same time, for the detachable support plate, the circuit board with the chip to be detected can be limited on the adjusting part after the support plate is detached to detect the chip on the circuit board, and the multifunctional and multi-range use is realized. BRIEF DESCRIPTION OF DRAWINGS

[0017] The accompanying drawings, which are included to provide a further understanding of the present application and constitute a part of this application, illustrate certain illustrative embodiments of the present application and are used to explain the present application, but do not limit the present application. In the drawings:

[0018] Figure 1 is a front view of the chip detection device of the present application;

[0019] Figure 2 It is a right side view of the chip detection device of the present invention;

[0020] Figure 3 A top view of the chip detection device of the present invention;

[0021] Figure 4 It is a partial right side cross-sectional view of the limit block of the clamp unit of the present invention in the initial position;

[0022] Figure 5 It is a partial right side cross-sectional view of the clamp unit of the present invention after the limit block slides inward;

[0023] Figure 6 It is a partial right side cross-sectional view of the clamp unit of the present invention, showing the limiting block being reset after the pull rope is pulled.

[0024] The meanings of the reference numerals in the accompanying drawings are:

[0025] Base-1; first through-hole-11; placement cavity-12;

[0026] Clamp unit 2; adjustment portion 21; bottom plate 211; limiting cavity 2111; slide groove 2112; slide rod 2113; limiting block 212; first slider 2121; meshing groove 2122; locking structure 213; first self-restoring spring 2131; rack 2132; meshing tooth 2133; inclined surface 2133a; vertical surface 2133b; second self-restoring spring 2134; traction structure 214; roller assembly 2141; pull rope 2142; pull ring 2143; elastic pad 215;

[0027] Detection unit-3; control unit-31; probe-32;

[0028] Position adjustment unit 4; second support base 41; third slide rail 411; first drive unit 42; second drive unit 43; test stand 44; adjustment limit unit 45;

[0029] Sensing unit-5;

[0030] Shut down unit-6. DETAILED DESCRIPTION

[0031] The present invention will be further described below with reference to the accompanying drawings.

[0032] Reference Figures 1 to 6 As shown, the chip detection device of the present invention includes a base 1, a clamp unit 2 arranged on the base 1 for restricting the chip, a detection unit 3 arranged on the base 1 and used to detect the electrical properties of the chip, and a position adjustment unit 4 and a shutdown unit 6 arranged on the base 1.

[0033] The top surface of the base 1 is located on a horizontal plane for supporting each unit. The clamp unit 2 includes a support plate (not shown in the figure) with a plate-like structure and an adjustment portion 21 arranged on the top surface of the base 1. The support plate is placed on the adjustment portion 21, and a limiting groove is provided on the top surface of the support plate, which is consistent with the outer contour of the bare chip to adapt to the bare chip. The groove depth of the limiting groove can be consistent with the thickness of the bare chip or greater than the thickness of the bare chip. Therefore, after the bare chip is clamped in the limiting groove, the side wall of the limiting groove in the horizontal direction can limit the bare chip in the horizontal direction, thereby preventing the bare chip from being displaced due to the contact with the detection unit 3 after contact with the detection unit 3. The use of the limiting groove, for small and thin bare chips, limits the movement of the chip while avoiding the possibility of the clamp directly acting on the bare chip and possibly damaging the bare chip, thereby well protecting the bare chip and preventing the bare chip from being damaged during detection; the adjustment portion 21 can limit the freedom of the support plate on the X-axis and Y-axis, that is, the freedom of the support plate in the horizontal direction, thereby ensuring the stability of the support plate when the detection unit 3 detects the chip, so as to further ensure that the position of the chip does not shift. At the same time, the arrangement of the adjustment portion 21 and the support plate enables the support plate to be replaced. For chips of different sizes and shapes, limiting grooves that are compatible with the outer contours of different bare chips are opened on the same support plate or different support plates, that is, a number of identical or different limiting grooves can be set on a support plate, thereby achieving the purpose of limiting different chips; and the detection of some chips is to detect the chip on the circuit board after the bare chip is soldered on the circuit board. At this time, the use of the support plate is obviously no longer applicable. For this reason, the support plate can be directly removed and the circuit board of the chip to be detected can be directly placed on the adjustment portion 21 and limited, thereby realizing the performance detection of bare chips of different shapes and sizes and chips under different conditions. One machine has multiple uses, achieves the purpose of multi-function, and has a wider range of use. Compared with the need to prepare different fixtures or detection equipment for the detection of different chips, it saves costs and reduces trouble.

[0034] The support plate is a rectangular sheet-like structure, with several limiting grooves formed on its top surface corresponding to the outer contours of the bare chips. This allows the bare chips to be placed in the corresponding limiting grooves during testing, thereby restraining the bare chips. Because the different limiting grooves are located in different positions, after the corresponding bare chips are installed in the corresponding limiting grooves, the position of the bare chips on the support plate between the testing unit 3 can be adjusted using the adjustment unit 21. This allows the position of bare chips at different positions on the support plate to be adjusted relative to the testing unit 3, ensuring that the testing of each bare chip can proceed normally.

[0035] The adjusting part 21 comprises a bottom plate 211 provided on the top surface of the base 1 and having a supporting surface, a plurality of limiting blocks 212 slidingly provided on the supporting surface of the bottom plate 211 and spacedly distributed along the outer side of the bottom plate 211 and used for abutting against the supporting plate, a plurality of locking structures 213 provided in the bottom plate 211 and adapted to the limiting blocks 212 and used for limiting the sliding of the limiting blocks 212, and a plurality of traction structures 214 provided on the base 1 and respectively connected to the locking structures 213, the bottom plate 211 being used for supporting the supporting plate and the limiting blocks 212, the locking structures 213 being used for limiting the further movement of the limiting blocks 212 after the limiting blocks 212 abut against the supporting plate, thereby positioning the limiting blocks 212 and enabling the limiting blocks 212 to limit the freedom of the supporting plate in the horizontal direction, and the traction structures 214 being used for releasing the locking of the limiting blocks 212 by the locking structures 213, thereby facilitating the dismounting of the supporting plate and the chip.

[0036] The bottom plate 211 has a plate-like structure, the bottom surface of the bottom plate 211 is connected to the top surface of the base 1, the entire top surface of the bottom plate 211 is the supporting surface, a limiting cavity 2111 is formed in the bottom plate 211 corresponding to the position directly below each limiting block 212, a sliding groove 2112 is provided on the top surface of the bottom plate 211 corresponding to the position directly above each limiting cavity 2111 and communicating with the limiting cavity 2111, the bottom part of each limiting block 212 is slidingly provided in each sliding groove 2112 and penetrates into the limiting cavity 2111, and each locking structure 213 is provided in the limiting cavity 2111 and located directly below each limiting block 212, the bottom part of each limiting block 212 extending into the limiting cavity 2111 is adapted to each locking structure 213, so that each locking structure 213 can limit different limiting blocks 212, thereby enabling the different limiting blocks 212 to be adjusted to different degrees according to the actual situation to fix different supporting plates or circuit boards, thereby ensuring that the chip can correspond to the detection unit 3 so that the chip is located within the detection range of the detection unit 3. The limiting cavities 2111 can be separately provided as a plurality of limiting cavities corresponding to the locking structures 213, or only one limiting cavity extending to the lower part of each limiting block 212.

[0037] The limit blocks 212 are provided with at least two, preferably at least four, wherein a part of the limit blocks 212 are provided on both sides of the support plate along the X axis, and the corresponding slide grooves 2112 of the limit blocks 212 provided on both sides of the support plate along the X axis are arranged along the X axis so that the limit blocks 212 can slide along the X axis, and the remaining part of the limit blocks 212 are provided on both sides of the support plate along the Y axis, and the corresponding slide grooves 2112 of the limit blocks 212 provided on both sides of the support plate along the Y axis are arranged along the Y axis. The limiting blocks 212 are arranged on each of the four sides of the support plate so that they can slide along the Y-axis. At least one limiting block 212 is provided on each of the four sides of the support plate. Thus, each limiting block 212 can slide relative to the support plate on the four sides of the support plate. When the support plate needs to be restricted, each limiting block 212 slides inwardly toward the support plate along the sliding direction from the four sides of the support plate until it contacts the support plate. The locking structure 213 then restricts the limiting block 212 from sliding outwardly in the sliding direction, thereby locking the limiting block 212 and positioning the support plate. A vertical plane is formed on the side of the limiting block 212 facing the support plate so that it can contact the edge of the support plate or circuit board. Preferably, an elastic pad 215 is provided on the vertical plane of each limit block 212 facing the support plate. The elastic pad 215 can be made of materials such as rubber and silicone, or structures such as sponge and airbags can be used to prevent the edge of the limit block 212 or the circuit board from being deformed or indented when the limit block 212 is pressed against the support plate or the circuit board. In particular, for the circuit board, due to its thin thickness, it is easy for the edge to be deformed or paint stripped under the direct compression of the limit block 212 with greater hardness, thereby causing damage to the circuit board and affecting the quality of the circuit board. The provision of the elastic pad 215 plays a buffering role while ensuring that the limit block 212 presses the circuit board, avoiding hard interference, and thus protecting the edge of the circuit board and the support plate. It should be noted that the outward end of the slide groove 2112 described in the present invention is the end of the slide groove 2112 away from the midpoint of the base plate 211, and the inward end of the slide groove 2112 is the end of the slide groove 2112 close to the midpoint of the base plate 211, and the degree of freedom of the limit block 212 in the Z-axis direction has been restricted by the slide groove 2112.

[0038] The number of locking structures 213 is consistent with the number of limit blocks 212. Each locking structure 213 includes a first self-restoring spring 2131 arranged in the limit cavity 2111 along the sliding direction of the corresponding limit block 212 and a rack 2132 arranged in the limit cavity 2111 along the sliding direction of the limit block 212. The first self-restoring spring 2131 is located on the outward side of the limit block 212 and its two ends are respectively connected to the limit cavity 2111 and the inner wall and the outer wall of the limit block 212. When the limit block 212 is located on the side of the outward end of the slide groove 2112, the first self-restoring spring 2131 is in a normal state or a compressed state. Preferably, the first self-restoring spring 2131 is in a normal state or a compressed state at this time. 31 is in a normal state to ensure that the service life of the first self-recovery spring 2131 is longer; and the top surface of the rack 2132 has meshing teeth 2133 that are adjacent to each other in sequence and protrude along the length direction of the rack 2132, and the side of each meshing tooth 2133 away from the rack 2132 is a gradually narrowing and sharp side, and the meshing teeth 2133 are tilted toward the inside, that is, the top surface of the meshing tooth 2133 is tilted from the outside to the inside along the length direction of the rack 2132 from the top surface of the rack 2132 toward the side away from the rack 2132 to form an inclined surface 2133a, and the side surface of each meshing tooth 2133 facing inward is perpendicular to the top surface of the rack 2132 to form a vertical surface 2133b. A first slider 2121 is formed on the bottom surface of the limit block 212, and the first slider 2121 moves through the slide groove 2112 and extends into the limit cavity 2111. An engaging groove 2122 is formed on the bottom surface of the first slider 2121, which is consistent with the top surface contour of the engaging teeth 2133 for engagement. The inclined surface 2133a enables the first slider 2121 to move smoothly when moving inward along the sliding direction, while the vertical surface 2133b prevents the first slider 2121 from sliding outward along the sliding direction to enable the limit block 212 and the locking structure 213 to engage with each other.

[0039] Slide rods 2113 are vertically disposed along the Z-axis at positions corresponding to both ends of each rack 2132 within the limiting cavity 2111. Third through-holes are formed along the Z-axis at both ends of each rack 2132, corresponding to the positions of the slide rods 2113. Each end of each rack 2132 is slidably mounted on the corresponding slide rod 2113 through the third through-holes, enabling the rack 2132 to slide along the Z-axis. A plurality of second self-restoring springs 2134 are disposed between the bottom of the rack 2132 and the bottom wall of the limiting cavity 2111, distributed along the Z-axis. The ends of the second self-restoring springs 2134 are connected to the rack 2132 and the bottom of the limiting cavity 2111, respectively. The second self-restoring springs 2134 are always compressed, pressing the rack 2132 toward the first slider 2121 and engaging with the tooth groove.

[0040] When the support plate or the circuit board is placed on the base plate 211, the limit blocks 212 are all located at the initial position of the outward end of the sliding groove 2112, and then the limit blocks 212 are pushed inward one by one, the inclined surface 2133a causes the limit blocks 212 moving inward to extrude the rack 2132 and make the rack 2132 slide downward, so that the limit blocks 212 can continue to slide inward, until the limit blocks 212 are respectively abutted against the four side edges of the support plate or the circuit board, the support plate limits the limit blocks 212 from continuing to slide inward, while the vertical plane always limits the limit blocks 212 from sliding outward, thereby limiting the freedom of movement of the support plate in the horizontal direction, ensuring the relative position of the support plate and the chip.

[0041] A placing cavity 12 is formed in the interior of the base 1, and a first through hole 11 is formed through the top surface of the placing cavity 12 in the Z-axis direction and corresponds to the position directly below each rack 2132, the first through hole 11 is directly opposite the midpoint of the rack 2132 and communicates with the limit cavity 2111 and the placing cavity 12. The traction structure 214 includes a roller set 2141 rotatably arranged in the placing cavity 12 and a plurality of pull ropes 2142 corresponding to the racks 2132, one end of each pull rope 2142 is connected to the corresponding rack 2132 and the other end passes through the first through hole 11 and is wound around the roller set 2141, and a pull ring 2143 connected to the end of each pull rope 2142 away from the rack 2132, the roller set 2141 is used to guide each pull rope 2142, and the pull rope 2142 is convenient for operation, by pulling the rack 2132 along the Z-axis direction away from the first sliding block 2121 to make the meshing teeth 2133 away from the meshing groove 2122 to contact the meshing state between the limit block 212 and the rack 2132, so that the limit block 212 released from the constraint slides outward along the sliding direction under the action of the first self-restoring spring 2131 until it is reset to the initial position, then the limit of the limit block 212 on the support plate or the circuit board is released, so as to take out the support plate or the circuit board.

[0042] The roller assembly 2141 includes a plurality of first rollers positioned directly below each first through-hole 11 and rotatably connected to the placement cavity 12, and at least one second roller positioned below each first roller and rotatably connected to the placement cavity 12. The number of first rollers matches the number of locking structures 213. Within the placement cavity 12, corresponding to each first roller and second roller, rollers can be positioned horizontally along the X-axis or Y-axis within the placement cavity 12. Each first roller and second roller is rotatably mounted on the roller to achieve rotational connection between the first roller and the second roller and the placement cavity 12. One end of each pull rope 2142 is connected to the center of the bottom surface of each rack 2132, and the other end of each pull rope 2142 is movable through each first through-hole 11 and is wound around each first roller. When the second roller is set to one, each pull rope 2142 continues to extend after passing around the first roller and passes around the second roller to converge into a strand to be connected to the pull ring 2143. When the second roller is set to two or more, each pull rope 2142 can be installed on the number of second rollers, and is wound around different second rollers in groups and connected to the pull ring 2143. 3. In this way, when it is necessary to contact the limit block 212 to limit the support plate or circuit board, the pull ring 2143 is pulled so that the pull ring 2143 simultaneously pulls the racks 2132 toward the side away from the limit blocks 212 through the pull rope 2142 to release the lock of the limit blocks 212. Then, the limit blocks 212 are away from the support plate or circuit board under the action of the first self-recovery spring 2131. The whole process is simple, convenient and fast to operate, which not only has high disassembly efficiency but also has lower cost than setting up some electric control limit structures.

[0043] Preferably, a second through-hole connected to the placement cavity 12 is formed on the outer wall of the base 1, and the diameter of the pull ring 2143 is larger than the diameter of the second through-hole. The end of each pull rope 2142 away from the rack 2132 converges into a strand after passing around the second roller and moves through the second through-hole to pass out of the base 1. The pull ring 2143 is located outside the base 1, and the end of each pull rope 2142 passing through the outside of the base 1 is connected to the pull ring 2143. The pull rope 2142 is restricted outside the base 1 by the second through-hole for easy operation.

[0044] Compared with the prior art, the chip detection device of the present invention has a manually pushed limit block 212, which is not only lower in cost, but also can adjust the positional relationship between the chip and the detection unit 3 and the positional relationship between the support plate or circuit board and the base plate 211 according to the conditions of the support plate or circuit board when corresponding to support plates or circuit boards of different shapes and sizes, and ensure the positioning limit of the support plate or circuit board. Compared with mechanized operation, it can ensure that the support plate or circuit board will not be damaged, and there is no need for advance debugging and data entry, which reduces unnecessary trouble.

[0045] The detection unit 3 includes a control unit 31 disposed on the base 1 and a probe 32 electrically connected to the control unit 31. The probe 32 is disposed on the position adjustment unit 4 and is located directly above the support plate so as to be used to perform electrical performance tests on the chip on the support plate or circuit board. The control unit 31 is composed of a test data acquisition box, a communication control box, a probe connection line, and a communication connection line, and is used to collect and store chip performance data collected at the probe 32. A sensor for detecting whether the probe 32 is in contact with the chip is disposed on the probe 32 of the detection unit 3 or on the position adjustment unit 4. The sensor and the control unit 31 are both controlled by a controller. After the sensor detects that the probe 32 is in contact with the chip, a signal is sent and the controller controls the probe 32 to operate and detect the chip.

[0046] The position adjustment unit 4 includes a first support seat slidably arranged on the base 1 along the X-axis, a second support seat 41 slidably arranged on the first support seat along the Y-axis, a first driving part 42 that drives the first support seat to move along the X-axis and drives the second support seat 41 to move along the Y-axis, and a second driving part 43 that is arranged on the second support seat 41 along the Z-axis. A test frame 44 is arranged on the output shaft of the second driving part 43, and the test frame 44 is slidably connected to the second support seat 41 along the Z-axis. The test frame 44 is located directly above the support plate, and the probe 32 is installed on the test frame 44 along the Z-axis and the detection end of the probe 32 is arranged toward one side of the support plate so as to be able to drive the probe 32 to move relative to the support plate along the X-axis, Y-axis and Z-axis. In cooperation with the fixture unit 2, as long as the chip on the fixture unit 2 is within the moving range of the probe 32, the position adjustment unit 4 can adjust the position of the probe 32 so that the detection end of the probe 32 is always located directly above the chip and accurately contacts the chip, thereby accurately positioning the test point of the chip to ensure that the electrical performance test of the chip can be completed.

[0047] A first slide rail is provided on the base 1 along the X-axis direction, and a second slider is fixedly connected to the bottom of the first support seat. The second slider is slidably connected to the first slide rail so that the first support seat can slide relative to the base 1 along the X-axis direction. A second slide rail is fixedly provided on the first support seat along the Y-axis direction, and a third slider is fixedly connected to the bottom of the second support seat 41. The third slider is slidably connected to the second slide rail so that the second support seat 41 can slide relative to the base 1 along the Y-axis direction. The first drive unit 42 may include two stepper motors, which are mounted on the base 1 and whose output shafts drive the first support seat and the second support seat 41 along the corresponding slide rails through gear transmission. The first drive unit 42 may also be configured as a drive device such as two first cylinders or electric push rods, wherein one first cylinder is provided on the base 1 along the X-axis and its output shaft is connected to the first support seat, and the other first cylinder is provided on the first support seat along the Y-axis and its output shaft is connected to the second support seat 41. The first drive unit 42 is also electrically connected to a controller so that the controller controls the operation of the first drive unit 42 to adjust the horizontal position of the probe 32 relative to the chip. The second driving unit 43 includes a second cylinder arranged on the second support seat 41 along the Z-axis direction, a third slide rail 411 is vertically arranged on the second support seat 41 along the Z-axis direction, and a fourth through-hole is opened on the test frame 44 along the Z-axis direction for the third slide rail 411 to slide through so that the test frame 44 can be slid along the Z-axis on the second support seat 41. When the first driving unit 42 and the second driving unit 43 are respectively operated, the test frame 44 can be controlled to move along the X-axis, Y-axis and Z-axis relative to the support plate so that the detection end of the probe 32 on the test frame 44 can be aligned with the test point on the chip. The number and position of the test points are fixed. When there are multiple test points on the chip, the position adjustment unit 4 can adjust the position in time after testing any test point. After the probe 32 completes the detection, the test data acquisition box records and exports the detection data of the probe 32, thereby facilitating the judgment of the quality of the chip.

[0048] The test frame 44 is provided with several adjustment stoppers 45 arranged along the Z-axis and movable in the Z-axis to abut against the support plate, thereby limiting the support plate's freedom in the Z-axis. The adjustment stoppers 45 include four adjustment screws mounted on the test frame 44 along the Z-axis. After the test frame 44 is adjusted relative to the support plate using the position adjustment unit, the contact distance and force between the probe 32 and the chip contact portion can be adjusted by manually rotating the adjustment screws.

[0049] Sensing units 5 are also installed on each side wall of the base 1. These include sensors (such as proximity switches or infrared sensors) and an alarm. When the sensing units 5 detect a foreign object approaching the base 1, the alarm sounds and, based on the distance between the object and the base 1, shuts down the entire device under the control of the controller. An emergency stop button is also provided on the base 1, allowing the device to be manually shut down if an abnormality occurs during the detection process, preventing further damage.

[0050] The shutdown unit 6 includes an emergency stop button arranged on the base 1 and a protective cover surrounding the emergency stop button. The emergency stop button is electrically connected to the first drive unit 42, the second drive unit 43, the controller and the control unit 31 respectively. When an abnormal situation occurs in the entire detection process, the entire equipment can be manually shut down to prevent further losses, and the protective cover can avoid accidentally pressing the emergency stop button to a certain extent.

[0051] The working method of one embodiment of the chip detection device of the present invention is as follows: a circuit board or a support plate with a chip to be tested is placed on a base plate 211, and the limit adjustment is performed by the movable limit blocks 212 on all sides according to the specific size of the circuit board or the support plate. The controller issues instructions to control the operation of the first drive unit 42 and the second drive unit 43 to realize the movement of the test frame 44 on the X axis, Y axis and Z axis. When the probe 32 on the test frame 44 contacts the chip to be tested, the adjustment screws on all sides of the test frame 44 can be adjusted to finely adjust the contact position and contact force between the probe 32 and the test point of the chip to be tested, and observe the contact situation of the probe 32 and the test point of the chip to be tested. When the probe 32 is in good contact with the chip to be tested, the start device is turned on to pass the external power supply to apply the working power supply voltage to the chip to be tested, so that the chip enters the working state. At this time, the test parameter data detected by the probe 32 is stored in the test data acquisition box through the probe connection line, and the data is transmitted in real time through the communication control box and the communication connection line, so as to judge the quality of the device and complete the chip electrical performance test.

Claims

1. A chip detection device, characterized in that: include: base; A fixture unit, the fixture unit comprising a support plate and an adjusting portion disposed on a base for limiting the support plate in a horizontal direction, wherein a limiting groove adapted to the outer contour of the bare chip is formed on the top surface of the support plate; A detection unit, used to detect the electrical properties of the chip; a position adjustment unit, disposed on the base, wherein the detection portion of the detection unit is disposed on the position adjustment unit and is located directly above the support plate, and the position adjustment unit is used to drive the detection unit to move relative to the support plate along the X-axis, the Y-axis, and the Z-axis; and a shut-down unit, electrically connected to the detection unit and the position adjustment unit, respectively, for shutting down the detection unit and the position adjustment unit when an abnormality occurs in the device; The detection unit includes a control portion provided on a base and a probe electrically connected to the control portion; The position adjustment unit includes a first support seat slidably arranged on the base along the X-axis, a second support seat slidably arranged on the first support seat along the Y-axis direction, and a first driving part that drives the first support seat to move along the X-axis and drives the second support seat to move along the Y-axis. A second driving part is provided on the second support seat along the Z-axis direction, and a test frame slidably connected to the second support seat along the Z-axis direction is provided on the output end of the second driving part. The test frame is located directly above the support plate, and the probe is installed on the test frame with the detection end facing the support plate. The adjusting portion includes a bottom plate provided on the top surface of the base and having a supporting plane, a plurality of limit blocks slidably provided on the supporting plane of the bottom plate and spaced apart along the outer side of the bottom plate for resisting the supporting plate, and a plurality of locking structures provided in the bottom plate and adapted to the limit blocks for limiting the sliding of the limit blocks, wherein a portion of the limit blocks are respectively provided on both sides of the supporting plate along the X-axis and slide along the X-axis, and another portion of the limit blocks are respectively provided on both sides of the supporting plate along the Y-axis and slide along the Y-axis; The adjusting portion further comprises a traction structure provided on the base and connected to each locking structure respectively, and one end of the traction structure extends out of the base.

2. The chip detection device according to claim 1, wherein: The test stand is provided with a plurality of adjustment limit parts arranged along the Z-axis direction and movable along the Z-axis direction to abut against the support plate, so as to limit the degree of freedom of the support plate in the Z-axis direction.

3. The chip detection device according to claim 2, wherein: The invention also includes a sensing unit arranged on each side wall of the base.

4. The chip detection device according to claim 1, wherein: A limiting cavity is provided inside the base plate at a position corresponding to each limiting block, and each locking structure is arranged in each limiting cavity. A sliding groove is provided on the top surface of the base plate at a position corresponding to each limiting cavity, which is arranged along the sliding direction of the corresponding limiting block and connected to the limiting cavity. The bottom of each limiting block moves through the corresponding sliding groove and extends into the limiting cavity. The part of the limiting block extending to the limiting cavity engages with the locking structure. The limiting block can slide inwardly along the sliding direction relative to the locking structure, and the locking structure can limit the limiting block from sliding outward along the sliding direction.

5. The chip detection device according to claim 4, wherein: The locking structure includes a first self-resetting spring and a rack arranged in the limit cavity along the sliding direction of the limit block, the first self-resetting spring is located on the outward side of the limit block and its two ends are respectively connected to the inner wall of the limit cavity and the limit block. When the limit block is located at the outward end of the slide groove, the first self-resetting spring is in a normal state; an inwardly inclined meshing tooth is provided on the top surface of the rack, and an engaging groove that engages with the meshing tooth is formed on the side of the limit block facing the rack; the rack is arranged in the limit cavity for sliding along the Z-axis direction, and a second self-resetting spring with two ends respectively connected to the rack and the inner wall of the limit cavity is provided at the bottom of the rack along the Z-axis direction, and the second self-resetting spring is in a compressed state.

6. The chip detection device according to claim 5, wherein: A placement cavity is formed inside the base, and a first through-hole is provided at the top of the placement cavity corresponding to the position directly below each rack and extending through the Z-axis direction; the traction structure includes a roller group rotatably arranged in the placement cavity and a plurality of pull ropes corresponding to the racks, one end of which is connected to the corresponding rack and the other end passes through the first through-hole and is wound around the roller group, and the pull ropes are gathered into a strand at one end away from the rack and then move out of the base.

7. The chip detection device according to claim 6, wherein: A second through hole connected to the placement cavity is formed on the outer wall of the base; the traction structure also includes a pull ring with a diameter larger than the diameter of the second through hole, and one end of each pull rope away from the rack is movable through the second through hole and connected to the pull ring.

8. The chip detection device according to claim 7, wherein: An elastic pad is provided on one side of each limit block facing the support plate.

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