Light intensity adjustment method, detection device and system, and computer readable storage medium

Abstract

The application discloses an optical intensity adjustment method, a detection device, a detection system and a nonvolatile computer readable storage medium. The adjustment method comprises the following steps: acquiring a historical detection value, and concurrently scanning a to-be-detected object with detection light intensity for one round, wherein the historical detection value is a detection value of a historical scanning image of the to-be-detected object acquired when the to-be-detected object is scanned before the current round of scanning; acquiring a scanning image corresponding to the current round of scanning of the to-be-detected object and a current round detection value of the scanning image; acquiring a target detection value, adjusting the detection light intensity according to the target detection value, the current round detection value and the historical detection value, wherein the target detection value is a detection value representing that the detection light intensity is qualified; and updating the historical detection value according to the current round detection value. The optical intensity adjustment method disclosed by the application embodiment can quickly and accurately find a suitable detection light intensity, and is suitable for detection in various application scenarios.

Description

Technical Field

[0001] This application relates to the field of detection technology, and more specifically, to a light intensity adjustment method, a detection device, a detection system, and a non-volatile computer-readable storage medium. Background Technology

[0002] In the field of Automated Optical Inspection (AOI) for panels, the main purpose of AOI inspection equipment is to detect various defects (such as particles, dirt, scratches, bumps, dents, short circuits, open circuits, etc.) that exist in the panel during the production process. The primary method used is to use multiple side-by-side scanning CCD (Charge Coupled Device) probes, stitched together, to completely scan the panel. Based on the captured images, image processing algorithms are used to analyze various defects on the panel. The quality of the captured images directly affects the defect detection capability. Key image quality parameters to consider include image brightness, sharpness, and spatial fidelity. Image brightness varies depending on the stage of the panel's manufacturing process, requiring adjustments to hardware parameters for different panels to achieve similar brightness results. Furthermore, hardware differences (such as cameras, light sources, and optical fibers) between different CCD probes make it difficult to use the same light source intensity for all CCD probes. Therefore, finding suitable light source brightness values ​​quickly and accurately is crucial. Summary of the Invention

[0003] This application provides a light intensity adjustment method, a detection device, a detection system, and a non-volatile computer-readable storage medium.

[0004] The light intensity adjustment method of this application includes: acquiring historical detection values, and simultaneously performing a scan of the test piece using a detection light intensity, wherein the historical detection values ​​are the detection values ​​of the historical scan image of the test piece acquired when the test piece was scanned before the current scan; acquiring the scan image of the test piece corresponding to the current scan and the current scan detection value of the scan image; acquiring a target detection value, adjusting the detection light intensity according to the target detection value, the current scan detection value, and the historical detection values, wherein the target detection value is a detection value that indicates the detection light intensity is qualified; and updating the historical detection values ​​according to the current scan detection value.

[0005] The workpiece inspection device according to this application includes an irradiation module, a first acquisition module, a second acquisition module, an adjustment module, and an update module. The irradiation module is used to perform a single scan of the workpiece under test using a detection light intensity. The first acquisition module is used to acquire historical detection values, which are detection values ​​from historical scan images of the workpiece under test acquired before the current scan. The second acquisition module is used to acquire the scan image of the workpiece under test corresponding to the current scan and the current scan detection value of the scan image. The adjustment module is used to acquire a target detection value and adjust the detection light intensity based on the target detection value, the current scan detection value, and the historical detection value, where the target detection value is a detection value indicating that the detection light intensity is qualified. The update module is used to update the historical detection value based on the current scan detection value.

[0006] The detection system of this application includes a carrier device, a light source, a detection probe, and a controller. The carrier device carries the test piece. The light source illuminates the test piece. The detection probe acquires a scan image of the test piece. The controller is configured to: acquire historical detection values, and concurrently control the light source to perform a scan of the test piece using a detection light intensity; acquire the scan image of the test piece and the current round detection value of the scan image; acquire a target detection value, adjust the detection light intensity based on the target detection value, the current round detection value, and the historical detection values, wherein the target detection value is a detection value indicating that the detection light intensity is qualified; and update the historical detection values ​​based on the current round detection value.

[0007] The non-volatile computer-readable storage medium of this application includes a computer program that, when executed by one or more processors, causes the processors to perform the following adjustment method: acquiring historical detection values ​​and concurrently performing a scan of the device under test (DUT) using a detection light intensity, wherein the historical detection values ​​are detection values ​​of a historical scan image of the DUT acquired when the DUT was scanned before the current scan; acquiring a scan image of the DUT corresponding to the current scan and the current scan detection value of the scan image; acquiring a target detection value; adjusting the detection light intensity based on the target detection value, the current scan detection value, and the historical detection values, wherein the target detection value is a detection value indicating that the detection light intensity is qualified; and updating the historical detection values ​​based on the current scan detection value.

[0008] The light intensity adjustment method, detection device, detection system, and non-volatile computer-readable storage medium of this application acquire historical detection values ​​and simultaneously perform a round of scanning of the test piece using the detection light intensity. The detection light intensity is adjusted according to the target detection value, the current round of detection value, and historical detection values, which can quickly and accurately find a suitable detection light intensity and is applicable to detection in various application scenarios.

[0009] Additional aspects and advantages of embodiments of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of embodiments of this application. Attached Figure Description

[0010] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, wherein:

[0011] Figure 1 This is a flowchart illustrating a light intensity adjustment method according to certain embodiments of this application;

[0012] Figure 2 This is a schematic diagram of the structure of the detection system according to some embodiments of this application;

[0013] Figure 3 This is a scanning schematic diagram of the detection system according to some embodiments of this application;

[0014] Figure 4 This is a schematic diagram of the structure of the detection device according to some embodiments of this application;

[0015] Figure 5 This is a schematic diagram of historical detection values, current round detection values, target detection values, and corresponding historical light intensity values, current round light intensity values, and target light intensity values ​​in certain embodiments of this application.

[0016] Figure 6 This is a flowchart illustrating a light intensity adjustment method according to certain embodiments of this application;

[0017] Figure 7 This is a flowchart illustrating a light intensity adjustment method according to certain embodiments of this application;

[0018] Figure 8 This is a flowchart illustrating a light intensity adjustment method according to certain embodiments of this application;

[0019] Figure 9 This is a flowchart illustrating a light intensity adjustment method according to certain embodiments of this application;

[0020] Figure 10 This is a flowchart illustrating a light intensity adjustment method according to certain embodiments of this application;

[0021] Figure 11This is a schematic diagram of the relationship curve between light intensity and detection value in certain embodiments of this application;

[0022] Figure 12 This is a schematic diagram illustrating the linear relationship between light intensity and detection value in certain embodiments of this application;

[0023] Figure 13 This is a flowchart illustrating a light intensity adjustment method according to certain embodiments of this application;

[0024] Figure 14 This is a schematic diagram of the detection value range and light intensity range of certain embodiments of this application;

[0025] Figure 15 This is a flowchart illustrating a light intensity adjustment method according to certain embodiments of this application;

[0026] Figure 16 This is a schematic diagram of historical detection values, current round detection values, and target detection values ​​in certain embodiments of this application;

[0027] Figure 17 This is a schematic diagram illustrating the connection state of a computer-readable storage medium and a processor according to certain embodiments of this application. Detailed Implementation

[0028] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the embodiments of this application, and should not be construed as limiting the embodiments of this application.

[0029] Please see Figures 1 to 3 This application provides a light intensity adjustment method, which includes:

[0030] 01: Acquire historical detection values ​​and simultaneously perform a scan of the test piece 200 using the detection light intensity. The historical detection values ​​are the detection values ​​of the historical scan images of the test piece 200 obtained when the test piece 200 was scanned before the current scan.

[0031] 02: Obtain the scan image of the test piece 200 in the current scan and the detection value of the scan image in the current scan;

[0032] 03: Obtain the target detection value, and adjust the detection light intensity based on the target detection value, the current round detection value, and historical detection values. The target detection value is the detection value that indicates the detection light intensity is qualified; and

[0033] 04: Update historical detection values ​​based on the current round of detection values.

[0034] Please combine Figure 2 This application also provides a detection system 100. The detection system 100 includes: a support device 20, a light source (not shown), a detection probe 60, and a controller 80. The support device 20 is used to support a test piece 200. The light source is used to illuminate the test piece 200. The detection probe 60 is used to acquire a scan image of the test piece 200. The controller 80 is used to implement the adjustment methods in 01, 02, 03, and 04.

[0035] The historical detection values ​​include one or more detection values ​​from the historical scan images of the test piece 200 acquired before the current scan. Updating the historical detection values ​​based on the current scan values ​​means adding the current scan values ​​to the set of historical detection values. For example, please refer to... Figure 4 The target detection value is Gt, the current detection value is G1, and the historical detection values ​​include detection values ​​Gl1 and Gl2. The scan round in which detection value Gl1 was acquired was earlier than the scan round in which detection value Gl2 was acquired. As the light intensity is adjusted with each scan, the detection value continuously approaches the target detection value Gt. After updating the historical detection values ​​based on the current detection value G1, the historical detection values ​​include detection values ​​Gl1, Gl2, and G1. That is, for a new scan round after the current scan, detection values ​​Gl1, Gl2, and G1 all belong to the historical detection values.

[0036] Method 03: Obtain the target detection value, and adjust the detection light intensity based on the target detection value, the current round detection value, and historical detection values. This allows for parallel adjustment during a single scan, based on the current scan result (current round detection value) and with the help of the results from previous or multiple scans (historical detection values). Please combine this with... Figure 4 Parallel adjustment of light intensity means that the fixed target detection value, the current round detection value, and historical detection values ​​all affect the adjustment of light intensity. For example, in... Figure 4 In this embodiment, when the light intensity is adjusted from Il2 to I1, the light intensity Il2 is increased by ΔI1 to obtain the light intensity I1. The light intensity increment ΔI1 is obtained by comprehensively considering the current detection value G1, historical detection values ​​Gl1, historical detection values ​​Gl2, and the target detection value Gt. In related technologies, the traditional adjustment method adjusts the light intensity I according to a preset step size, obtains the detection value G corresponding to the adjusted light intensity I, and if the detection value G corresponding to the light intensity I differs significantly from the target detection value Gt, then the light intensity I is further adjusted according to the preset step size to obtain a new light intensity I'. The light intensity adjustment method of this application can perform parallel adjustment based on the current scan result (current scan detection value) and with the help of the scan results of the previous or multiple scans (historical detection values) during a single scan cycle. This allows the detected light intensity to be adjusted to meet the qualification conditions with fewer adjustment cycles, thereby accelerating the light intensity adjustment process and improving adjustment efficiency.

[0037] Please combine Figure 3 For example, with an initial light intensity of I0, multiple test objects 200 move laterally relative to the detection probe 60, allowing the detection probe 60 to scan each test object sequentially. In the first scan, the detection probe 60 scans the first three test objects 200, acquiring scan images of these three test objects 200 and the first-round detection value G0. The detection value G0 is the detection result obtained under light intensity I0. After acquiring the detection value G0, the initial light intensity I0 is adjusted to I1 based on the target detection value, the current round (currently the first round) detection value G0, and historical detection values ​​(there are no historical detection values ​​for the first round). During the light intensity adjustment process, the test objects 200 continue to move laterally relative to the detection probe 60; that is, the scanning process continues. For example, when the initial light intensity I0 is adjusted to I1, the detection probe 60 concurrently scans the fourth device under test 200, but only scans the fourth device under test 200 without acquiring a scan image, or the scan image of the fourth device under test 200 is not used to acquire a detection value. After adjusting the initial light intensity I0 to I1, the historical detection value is updated according to the detection value G0 of the first round, that is, the detection value G0 is added to the historical detection value, and simultaneously, the fifth to seventh devices under test 200 are scanned in a second round using the adjusted detection light intensity I1. After the second round of scanning, the second round detection value G1 corresponding to the light intensity I1 is acquired. Figure 3 In this embodiment, there is an interval between the seventh and eighth test objects 200. Before the detection probe 60 scans the eighth test object 200, during the ongoing scanning process, the light intensity I1 is adjusted to I2 in parallel based on the target detection value, the current round (currently the first round) detection value G0, and the historical detection value (for the first round of scanning, there is no historical detection value yet). After adjusting the initial light intensity I0 to I1, the historical detection value is updated based on the detection value G1 of the second round, that is, the detection value G1 is added to the historical detection value. At this time, the historical detection value includes the detection value G0 and the detection value G1. Simultaneously, the adjusted detection light intensity I1 is used to perform a second round of scanning on the fifth to seventh test objects 200. Similarly, when adjusting the light intensity I2 to light intensity I3 in the third round of scanning, it is necessary to perform parallel adjustments based on the target detection value and the scanning result obtained in the third round of scanning: detection value G2, as well as the scanning results obtained before the third round of scanning: historical detection values ​​(including detection values ​​G0 and G1). This is to adjust the detection light intensity to meet the qualification conditions with fewer adjustments, thereby speeding up the light intensity adjustment process and improving adjustment efficiency.

[0038] Please see Figure 5This application also provides a detection device 10. The detection device 10 includes an illumination module 11, a first acquisition module 12, a second acquisition module 13, an adjustment module 14, and an update module 15. The illumination module 11 and the first acquisition module 12 are used to implement the method in 01, wherein the illumination module 11 is used to perform a scan of the test piece 200 using a detection light intensity; the first acquisition module 12 is used to acquire historical detection values. The second acquisition module 13 is used to implement the method in 02. The adjustment module 14 is used to implement the method in 03. The update module 15 is used to implement the method in 04. Please refer to... Figure 2 and Figure 5 In some embodiments, the illumination module 11 includes a light source.

[0039] Please see Figure 1 and Figure 2 The detection system 100 is used to detect the workpiece 200. For example, the workpiece 200 is illuminated by a light source with a detection light intensity, and a scan image of the workpiece 200 is acquired by a detection probe 60, so that the workpiece 200 can be detected based on the scan image. The detection may include defect detection, pass rate detection, parameter detection, quantity statistics, etc., and is not limited here.

[0040] The following description uses the inspection system 100 to perform defect detection on the test piece 200 as an example. In some embodiments, the acquired image can be compared with an image of a sample piece to detect defects in the test piece 200. The sample piece is a manually selected workpiece of the same type as the test piece 200.

[0041] In one embodiment, the sample part can be a workpiece with almost no defects. The defects of the test part 200 can be determined by comparing the differences between the image of the test part 200 and the image of the sample part. For example, if the surface of the sample part is free of scratches, while the surface of a test part 200 has scratches, then by comparing the image of the test part 200 with the image of the sample part, it can be determined that the test part 200 has a scratch defect.

[0042] In another embodiment, the image of the sample part can be an image of a workpiece with a specific type of defect. The defect type of the test part 200 can be determined by comparing the similarities between the image of the test part 200 and the image of the sample part. For example, the image of the sample part includes pit images and convex images. After acquiring the image of the test part 200, the image of the test part 200 is compared with the pit images and convex images respectively. If an area identical to the pit image is found in the acquired image of the test part 200, it is determined that the test part 200 has a pit-type defect; similarly, if an area identical to the convex image is found in the acquired image of the test part 200, it is determined that the test part 200 has a convex-type defect.

[0043] In some embodiments, after the detection probe 60 acquires an image of a workpiece 200 under test, the image is processed (e.g., binarized) to obtain a scanned image of the workpiece 200, and defects in the workpiece 200 are detected based on this scanned image. For example, the presence of a defect in the workpiece 200 can be determined by whether the detection value of the scanned image is within the normal detection range. As another example, the scanned image of the workpiece 200 can be compared with a scanned image of a sample workpiece to identify defects. In one embodiment, the sample workpiece can be a workpiece with almost no defects, and the area where the defect is located can be determined by comparing the differences in detection values ​​between the scanned images of the workpiece 200 and the sample workpiece. In yet another embodiment, the scanned image of the sample workpiece can be a scanned image of a workpiece with a specific type of defect, and the type of defect in the workpiece 200 can be determined by comparing the similarities between the scanned images of the workpiece 200 and the sample workpiece.

[0044] In some embodiments, the detection system 100 is used for AOI (Automated Optical Inspection). The detection probe 60 is a CCD (Charge Coupled Device) probe. In one embodiment, the device under test 200 is a panel, such as a display panel of an electronic device: an LCD (Liquid Crystal Display) panel, an LED (light-emitting diode) panel, an OLED (Organic Light-Emitting Diode) panel, etc., which is not limited here. In other embodiments, the device under test 200 can be a precision hardware part, an electronic component, a silicone rubber part, a ceramic part, etc., which is not limited here. The following description uses a panel as the device under test 200.

[0045] Please see Figure 1 and Figure 2 In one scan, the device under test (DUT) 200 moves relative to the light source and the detection probe 60, allowing the detection probe 60 to capture an image of the DUT 200 under the detection light intensity. The scanning method can include various approaches. In one embodiment, during the scanning process, multiple DUTs 200 move relative to the fixed light source and detection probe 60, allowing the multiple DUTs 200 to be scanned sequentially. In another embodiment, the detection probe 60 and the light source can also move relative to the multiple DUTs 200 to scan them sequentially; this is not limited to this approach.

[0046] In one embodiment, the light source illuminates the test piece 200 and moves accordingly, that is, the light source scans the test piece 200. This allows the light emitted by the light source to illuminate multiple angles of the test piece 200, thereby enabling the detection probe 60 to clearly acquire images of the test piece 200 from multiple angles, so as to comprehensively and completely detect the test piece 200.

[0047] In one embodiment, the light source is connected to the detection system 100 via an external optical fiber to provide illumination to the device under test 200. In one embodiment, each light source corresponds to one detection probe 60. For example, the illumination range of the light source can cover the field of view of one detection probe 60, and the detection probe 60 takes pictures under the detection light intensity of the corresponding light source. In another embodiment, one light source can correspond to multiple detection probes 60. For example, the illumination range of the light source can cover the field of view of multiple detection probes 60, and the multiple detection probes 60 take pictures under the detection light intensity of the corresponding light source. This is not limited here.

[0048] Please see Figure 2 In some embodiments, to improve detection efficiency, multiple side-by-side detection probes 60 are used to simultaneously detect multiple test objects 200. In one embodiment, the multiple test objects 200 are arranged in multiple queues, each queue including multiple test objects 200. Multiple detection probes 60 are included, with the arrangement direction of the multiple detection probes 60 as the longitudinal direction Y, and the direction in which the test objects 200 move relative to the detection probes 60 as the transverse direction X. The detection probes 60 can sequentially scan each test object 200 in the transverse direction X for detection.

[0049] In different application scenarios, such as when using detection probes 60 with different parameters for detection, the appropriate detection light intensity may vary. If the detection light intensity is not suitable when detecting the test piece 200, for example, if the detection light intensity is too bright or too dim, it may affect the quality of the generated scan image, leading to inaccurate detection results. The light intensity adjustment method, detection device 10, and detection system 100 provided by the present invention can adjust the detection light intensity to adapt to various application scenarios.

[0050] Different detection probes 60 have different hardware parameters, different detection processes, or different types of test pieces 200. Therefore, the required light intensity of the light source is also different. It is difficult to use the same light source intensity to adapt to all detection probes 60. Therefore, it is necessary to quickly and accurately find the detection light intensity that is compatible with the detection probe 60 before the formal testing, so as to use the compatible detection light intensity to scan the test piece and ensure the accuracy of the test results.

[0051] Please see Figure 1 and Figure 2The light intensity adjustment method provided in this application is used to adjust the light intensity of the light source so that the light intensity of the light source can be adapted to the detection probe 60 for detection. Whether the detection light intensity of the light source can be adapted to the detection probe 60 can be determined based on the detection value of the scan image of the test piece 200 collected by the detection probe 60 under the illumination of the detection light intensity.

[0052] In some implementations, if the brightness of the image of the device under test 200 acquired by the detection probe 60 reaches a predetermined image brightness threshold, it can be considered that the detection light intensity is compatible with the detection probe 60. That is, it can be considered that the quality of the scan image acquired under this detection light intensity meets the detection requirements and will not lead to inaccurate detection results. Correspondingly, the detection value can be a parameter that characterizes brightness. The brightness of the image acquired by the detection probe 60 is determined based on the magnitude of the detection value, thereby determining whether the detection light intensity of the light source is compatible with the detection probe 60. If the light intensity of the light source is not compatible with the detection probe 60, the light intensity of the light source is adjusted according to the magnitude of the detection value of the scan image to adapt the detection light intensity of the light source to the detection probe 60. For example, the light intensity of the light source can be increased if the detection value of the scan image is too small, and decreased if the detection value of the scan image is too large, thereby adjusting the detection light intensity of the light source to be compatible with the detection probe 60.

[0053] Please see Figure 1 The implementation method of this application can acquire historical detection values ​​and simultaneously perform a scan of the test piece 200 in one round. This allows for the acquisition of the current round detection value of the scan image corresponding to the test piece 200 in the current scan, as well as the acquisition of the target detection value. The detection light intensity is adjusted based on the target detection value, the current round detection value, and the historical detection values.

[0054] The target detection value is the value that indicates the detection light intensity is qualified. Qualified detection light intensity means that the detection light intensity is compatible with the detection probe 60, that is, the quality of the scan image acquired under qualified detection light intensity meets the detection requirements and will not lead to inaccurate detection results.

[0055] Please combine Figure 4 For example, the target detection value is a pre-set detection value based on the needs of defect detection. When a defect in the scanned image of the test piece 200 can be clearly and completely detected, the detection value of the scanned image of the test piece 200 is taken as the target detection value Gt. That is, if the detection value of the scanned images of other test pieces 200 acquired by the detection probe 60 can reach the target detection value Gt, then if other test pieces 200 also have defects, then the defects can also be clearly and completely detected in the scanned images of those other test pieces 200. Therefore, when the detection value of the scanned image of the test piece 200 reaches the target detection value Gt, it is considered that the detection light intensity of the scanned test piece is compatible with the detection probe 60.

[0056] In one embodiment, the detected value is the grayscale value of the scanned image; the current round detected value is the grayscale value of the scanned image corresponding to the current round of scanning; the historical detected value is the grayscale value of the scanned image corresponding to one or more rounds of scanning before the current round of scanning; the target detected value is a preset grayscale value. The closer the current round detected value is to the target detected value, the closer the detection light intensity corresponding to the current round detected value is to a qualified value. In some embodiments, when the difference between the current round detected value and the target detected value is within a preset range, it can be considered that the detection light intensity corresponding to the current round detected value is compatible with the detection probe 60.

[0057] By comparing the current detection value with the target detection value, it can be determined whether the detection light intensity corresponding to the current detection value is compatible with the detection probe 60. If they are not compatible, the light intensity can be adjusted before the next scan. For example, if the current detection value is close to the target detection value, the current light intensity of the light source can be considered compatible with the detection probe 60, and no adjustment of the light source intensity is needed. If the current detection value is less than the target detection value, the brightness of the scanned image is considered low, and the detection light intensity needs to be increased for the next scan; similarly, if the current detection value is greater than the target detection value, the brightness of the scanned image is considered high, and the detection light intensity needs to be decreased for the next scan.

[0058] Historical detection values ​​are the set of detection values ​​corresponding to previous scans of the test piece 200 before the current scan. If no detection values ​​were acquired before the current scan, the historical detection values ​​are empty. After the current scan is completed, the historical detection values ​​are updated based on the current scan values. That is, the current scan is a historical scan relative to the next scan, and the current detection values ​​are historical detection values ​​relative to the detection values ​​of the next scan. After the current scan is completed, the current detection values ​​are added to the set of historical detection values ​​to update the historical detection values. Historical detection values ​​are used to determine the degree of adjustment to the detection light intensity when adjustment is needed, such as by how much to increase or decrease the light intensity.

[0059] Typically, the adjustment of the detection light intensity of the light source can only be done step by step according to a preset minimum adjustment step size, combined with the brightness of the image acquired by the detection probe 60, until the brightness of the image acquired by the detection probe 60 reaches the preset brightness value, thus satisfying the requirement that the detection light intensity is compatible with the detection probe 60. This adjustment method is rather "rigid" and usually requires multiple adjustments to determine the appropriate detection light intensity.

[0060] The light intensity adjustment method of this application adjusts the detection light intensity based on the target detection value, the current round detection value, and historical detection values, thereby improving the efficiency of light intensity adjustment.

[0061] Please see Figure 4In one embodiment, the historical detection values ​​include historical detection values ​​Gl1 and Gl2, where historical detection value Gl2 is the detection value of the scan image of the device under test 200 obtained in the previous round of scanning. Let the target detection value be Gt, and the current round detection value be G1. Assume that in the previous round of light intensity adjustment, the light intensity ΔI1 was increased based on the light intensity Il2 corresponding to the historical detection value Gl2 to obtain the light intensity I1 corresponding to the current round detection value G1. Based on the target detection value Gt, the current round detection value G1, and the historical detection value Gl2, it is found that the change in the detection value after the previous round of light intensity adjustment ΔG1 = |G1 - Gl2|, and the distance between the target detection value Gt and the current round detection value G1 ΔGt = |Gt - G1|. Let the adjusted light intensity be I2, which is obtained by increasing the light intensity ΔI2 based on the light intensity I1. If ΔGt > ΔG1, then the light intensity increment ΔI2 during adjustment can be greater than ΔI1, allowing for a larger increase in light intensity during adjustment to make the adjusted light intensity closer to the light intensity corresponding to the adaptation condition. If ΔGt < ΔG1, then the light intensity increment ΔI2 during adjustment can be less than ΔI1, allowing for a smaller increase in light intensity during adjustment to avoid excessive increase in light intensity, and making the adjusted light intensity closer to the light intensity corresponding to the adaptation condition.

[0062] Figure 4 The example shown is merely an illustration of adjusting the detection light intensity based on the target detection value, the current round detection value, and historical detection values, i.e., one implementation of method 03. The implementation of adjustment in method 03 is not limited to the implementation shown in the illustrated example; the adjustment amount of light intensity can also be determined based on methods such as the bisection method and the function method, which are not limited here.

[0063] After adjusting the detection light intensity, the next scan after the current scan becomes a new scan. The detection value obtained in the new scan is the new detection value for the current scan. The detection values ​​corresponding to the scans already completed in this round are added to the set of historical detection values ​​to update the historical detection values ​​and help adjust the detection light intensity for the new scan. For example, the historical detection values ​​include historical detection values ​​Gl1 and Gl2. If the current scan obtains the detection value G1, before the new scan, the current scan detection value G1 corresponding to this scan is added to the set of historical detection values ​​as historical detection value Gl3.

[0064] In summary, the light intensity adjustment method of this application can adjust the detection light intensity by combining the scanning results of previous rounds (i.e., historical detection values) with the scanning results of the current round (i.e., the current detection value) and the target detection value. Compared with the traditional fixed-step adjustment method, the light intensity adjustment method of this application can make the detection light intensity after each adjustment closer to the target light intensity (i.e., the light intensity adapted to the detection probe 60), so that the detection light intensity can be adjusted to the target light intensity with fewer adjustments.

[0065] Furthermore, in the embodiments of this application, the process of acquiring historical detection values ​​and performing a round (current round) of scanning is carried out in parallel, which can further improve the efficiency of light intensity adjustment.

[0066] Please see Figure 6 For example, if the target detection value is fixed and has already been acquired before the i-th scan, subsequent target detection values ​​are known and do not need to be acquired again. Historical detection values ​​are acquired in parallel during the i-th scan, and the current scan value is obtained after the i-th scan. The detection light intensity can be adjusted based on the historical detection value, the current scan value, and the target detection value (not shown in the figure). The adjusted detection light intensity is used for the (i+1)-th scan. Historical detection values ​​are acquired in parallel during the i-th scan to repeat the process of adjusting the detection light intensity based on historical detection values, the current scan value, and the target detection value (not shown in the figure). The historical detection values ​​acquired in parallel during the i-th scan include the current scan value corresponding to the i-th scan.

[0067] The following is a further explanation with reference to the accompanying drawings.

[0068] Please see Figure 2 and 7 In some embodiments, multiple test devices 200 are arranged into multiple queues, each queue including multiple test devices 200. 02: Obtaining the scan image of the test device corresponding to the current round of scanning and the current round detection value of the scan image includes:

[0069] 021: Scan each device under test in the queue 200 times to obtain multiple scan images; and

[0070] 022: Obtain the detection value of the current round based on the average detection value of each scan image.

[0071] This reduces the impact of outlier individuals on light intensity adjustment judgment, thus enabling accurate light intensity adjustment.

[0072] Please combine Figure 2 In some embodiments, controller 80 can also be used to implement the light intensity adjustment methods in 021 and 022.

[0073] Please combine Figure 5 In some embodiments, the second acquisition module 13 can also be used to implement the light intensity adjustment methods in 021 and 022.

[0074] Please see Figure 2For example, test pieces 201, 202, 203, 204, 205, and 206 belong to one queue; test pieces 207, 208, 209, 210, 211, and 212 belong to another queue. The detection probe 60 scans along the horizontal direction X1 from the head of one queue to the tail of that queue (e.g., from test piece 201 to test piece 206). During this process, it acquires a scan image of each test piece 200 in that queue, and obtains the current round's detection value based on the average detection value of each scan image. Using the average detection value of the scan images of each test piece 200 in a queue as the current round's detection value for the entire queue provides a better reflection of the overall detection value of the queue. To avoid misjudging the light intensity of a scan cycle by solely relying on the significantly different detection value of a particular test piece 200 compared to others, which could lead to incorrect assessments of the light intensity, a different approach is taken. In cases where outliers may exist, the average detection value of each scan image in the queue is used as the current scan value for the entire queue. This average value is then used to determine whether the light intensity needs adjustment for a scan cycle, thus reducing the impact of outliers on the light intensity adjustment decision.

[0075] In one embodiment, after scanning the queue consisting of test pieces 201, 202, 203, 204, 205, and 206, the multiple queues move relative to the detection probe 60 along the longitudinal direction Y, allowing test piece 207 to enter the detection range of the detection probe 60. The detection probe 60 then scans from test piece 207 to test piece 212 along the transverse direction X2. Thus, the detection probe 60 scans relative to the queues along an "S"-shaped trajectory, i.e., in the order of head-tail-tail-head, eliminating the need to reset the relative position of the detection probe 60 to the head position after scanning one queue, saving time and improving scanning efficiency.

[0076] Please see Figure 2 In one embodiment, each queue includes six devices under test (DUTs) 200. A light source and a detection probe 60 are fixed, and the queue moves relative to the light source along the horizontal direction X to be scanned sequentially. When a DUT 200 in the queue enters the imaging range of the detection probe 60, the detection probe 60 acquires an image of the DUT 200, and a scanned image of the DUT 200 can be obtained from the image. According to the implementation of method 011, one scan will scan six DUTs 200 in one queue and acquire six scanned images.

[0077] In some embodiments, the detection values ​​of six scan images are acquired separately, and the average value of the six scan images is calculated. This average value is then used as the detection value for the current round of scanning. In other embodiments, statistical values ​​such as the median, variance, standard deviation, and Euclidean distance of the detection values ​​from the six scan images acquired in one round can also be used as the detection value for the current round of scanning; this is not a limitation.

[0078] Further, please refer to Figure 8 In some implementations, 03: Adjusting the light intensity used to scan the test piece 200 based on the target detection value, the current round detection value, and historical detection values ​​includes:

[0079] 031: Adjust the detection light intensity after completing a scan of a queue; and

[0080] 032: Scan the next queue based on the adjusted detection light intensity.

[0081] In this way, the detection light intensity can be adjusted by using the time of the queue scanned by the switching detection probe 60, thereby improving the efficiency of light intensity adjustment.

[0082] Please combine Figure 2 In some embodiments, the controller 80 can also be used to implement the light intensity adjustment methods in 031 and 032.

[0083] Please combine Figure 5 In some embodiments, the adjustment module 14 can also be used to implement the light intensity adjustment methods in 031 and 032.

[0084] Specifically, please combine Figure 2 In some embodiments, the light source sequentially scans the test pieces 201, 202, 203, 204, 205, and 206, and the detection probe 60 sequentially acquires images of the test pieces 201, 202, 203, 204, 205, and 206 as the light source scans. In one embodiment, after acquiring the image of each individual test piece 200, the image of the test piece 200 is immediately processed to obtain a scanned image of the test piece 200. In another embodiment, after all the images of the test pieces 200 in a queue have been acquired, the images of each test piece 200 in the queue can be processed uniformly to obtain multiple scanned images; this is not limited to this embodiment.

[0085] In some implementations, the completion of a scan queue is marked after the image of the device under test 206 is acquired. In other implementations, the completion of a scan queue is marked only after the image of the device under test 206 is acquired and the image is processed to obtain the corresponding scan image; this is not a limitation.

[0086] After completing the scan of a queue, the detection value of the current round of the queue is obtained based on the detection value of the scan image of each test piece 200 in the queue. Based on the detection value of the current round and the target detection value, it is determined whether the detection light intensity needs to be adjusted, so that the detection light intensity can be adjusted in a timely manner if necessary.

[0087] After adjusting the detection light intensity, the next queue is scanned using the adjusted detection light intensity. For example, if the current round scanned the queue consisting of test pieces 201, 202, 203, 204, 205, and 206, the detection light intensity of the light source is adjusted after the current round of scanning is completed. Then, the current round detection values ​​corresponding to test pieces 201, 202, 203, 204, 205, and 206 are added to the set of historical detection values ​​(i.e., the historical detection values ​​are updated). Simultaneously, a new round of scanning is performed using the adjusted detection light intensity on the queue consisting of test pieces 207, 208, 209, 210, 211, and 212.

[0088] Please see Figure 2 In some implementations, each queue includes an alternating first sub-queue and a second sub-queue. The devices under test (DUTs) in the first sub-queue are used to acquire scan maps, and the number of DUTs in the first sub-queue is greater than the number of DUTs in the second sub-queue. For example, in... Figure 2 In the embodiment, test device 201 and test device 202 belong to the first sub-queue, and test device 203 belongs to the second sub-queue.

[0089] Please see Figure 2 In one embodiment, the detection probe 60 only acquires images of the devices under test 200 in the first sub-queue. When a device under test in the second sub-queue enters the acquisition range (e.g., field of view) of the detection probe 60, the detection probe 60 does not acquire an image, and the controller 80 obtains a scan image and its detection value based on the image of the device under test 200 in the first sub-queue. In another embodiment, the detection probe 60 acquires images of the devices under test 200 in both the first and second sub-queues, but the controller 80 only obtains a scan image and its detection value based on the image of the device under test 200 in the first sub-queue.

[0090] In this way, the light intensity can be adjusted during the scanning of a queue, without having to wait for the scanning of a queue to be completed, thus speeding up the light intensity adjustment process.

[0091] Please see Figure 9 In some implementations, 01: Acquire historical detection values ​​and simultaneously perform a scan of the test piece using the detection light intensity, including:

[0092] 011: Scan each test piece 200 in the first sub-queue to obtain multiple scan images.

[0093] 02: Obtain the scan image of the test piece 200 in the current scan cycle and the detection value of the scan image in the current scan cycle, including:

[0094] 023: Obtain the detection value of the current round based on the average detection value of each scan image.

[0095] 03: Obtain the target detection value, and adjust the detection light intensity based on the target detection value, the current round detection value, and historical detection values, including:

[0096] 033: Adjust the detection light intensity when scanning the second sub-queue; and

[0097] 034: Scan the next first sub-queue based on the adjusted detection light intensity.

[0098] Please combine Figure 2 In some embodiments, the controller 80 can also be used to implement the light intensity adjustment methods in 011, 023, 033 and 034.

[0099] Please combine Figure 5 In some embodiments, the illumination module 11 can also be used to implement the light intensity adjustment method in 011. The second acquisition module 13 can also be used to implement the light intensity adjustment method in 023. The adjustment module 14 can also be used to implement the light intensity adjustment methods in 033 and 034.

[0100] Please combine Figure 2 In one embodiment, in a queue consisting of test pieces 201, 202, 203, 204, 205, and 206, test pieces 201 and 202 belong to the first sub-queue A1, test piece 203 belongs to the second sub-queue B1, test pieces 204 and 205 belong to the first sub-queue A2, and test piece 206 belongs to the second sub-queue B2. The current detected light intensity value is set to I1, the target detection value to Gt, and the set of historical detection values ​​to Gl. It is also set that the target light intensity can be obtained based on the current round detection value, the target detection value, and the historical detection values. The adjustment of the detected light intensity is as follows: the detected light intensity value is adjusted to the target light intensity value.

[0101] In the current scan, under the illumination of light intensity I1, the detection probe 60 acquires images of the test piece 201 and the test piece 202. After completing the scan of the test pieces 201 and 202, the second sub-queue B1 enters the acquisition range of the detection probe 60. At this time, the controller 80 obtains the current round detection value G1 corresponding to the first sub-queue A1 based on the scan images of the test pieces 201 and 202, and obtains the target light intensity value I2 based on the current round detection value G1, the target detection value Gt, and the set of historical detection values ​​Gl. The controller 80 adjusts the detection light intensity value of the light source, and the adjusted detection light intensity value is I2, so that the test piece 200 is illuminated with a detection light intensity value of I2 in the next scan (new scan).

[0102] After the detection light intensity value is adjusted to I2, the current round detection value G1 is added to the historical detection value set Gl as historical detection value Gl1. Simultaneously, a new round of scanning is performed. The detection probe 60 acquires images of the test pieces 204 and 205 located in the first sub-queue A2. After scanning the test pieces 204 and 205, the second sub-queue B2 enters the acquisition range of the detection probe 60. At this time, the controller 80 obtains the current round detection value G2 corresponding to the first sub-queue A2 based on the scan images of the test pieces 204 and 205, and obtains the target light intensity value I3 based on the current round detection value G2, the target detection value Gt, and the historical detection value set Gl. The controller 80 adjusts the detection light intensity value of the light source to I3, so that the test piece 200 is illuminated with a detection light intensity value of I3 in the next round of scanning (the new round of scanning).

[0103] Please see Figure 10 In some implementations, 03: Obtaining the target detection value, and adjusting the detection light intensity based on the target detection value, the current round detection value, and historical detection values, including:

[0104] 035: Obtain historical light intensity values. Historical light intensity values ​​are the light intensity values ​​scanned on the test piece 200 when obtaining historical detection values.

[0105] 036: Obtain the current light intensity value of the wheel. The current light intensity value is the light intensity value of the sample 200 scanned when the current wheel detection value is obtained.

[0106] 037: Based on historical light intensity values, current light intensity values, historical detection values, and current detection values, a relationship is obtained. This relationship characterizes the correspondence between the light intensity used to irradiate the test piece and the detection value of the test piece 200; and

[0107] 038: Adjust the detection light intensity according to the relationship and the target detection value.

[0108] For example, if a detection light intensity of Il1 is used to scan the test piece 200 and a corresponding historical detection value Gl1 is obtained, then the light intensity value Il1 is the historical light intensity value corresponding to the historical detection value Gl1. Similarly, if a detection light intensity of I1 is used to scan the test piece 200 and a corresponding current wheel detection value G1 is obtained, then the light intensity value I1 is the current wheel light intensity value corresponding to the current wheel detection value G1.

[0109] The relational expression characterizes the relationship between light intensity and detection value. In one embodiment, substituting the target detection value into the relational expression yields the corresponding light intensity value, referred to as the target light intensity. The target detection value is the detection value of the scan image obtained when the detection light intensity that actually meets the qualification (adaptation) conditions scans the test piece 200, while the target light intensity is the theoretically calculated detection light intensity that meets the qualification (adaptation) conditions.

[0110] Based on the formula, the detection light intensity that closely approximates the actual compliance condition can be calculated. The more accurate the formula, the closer the target light intensity obtained based on the formula and the target detection value will be to the actual compliance condition. Therefore, adjusting the detection light intensity according to the formula and the target detection value allows for fewer adjustments to match the light intensity to the detection probe 60, thus improving the efficiency of light intensity adjustment.

[0111] Please combine Figure 2 In some embodiments, the controller 80 can also be used to implement the light intensity adjustment methods in 035, 036, 037 and 038.

[0112] Please combine Figure 5 In some embodiments, the adjustment module 14 can also be used to implement the light intensity adjustment methods in 035, 036, 037 and 038.

[0113] Please see Figure 11 In one embodiment, the target detection value Gt is known. Historical detection values ​​include Gl1 and Gl2, corresponding to historical light intensity values ​​Il1 and Il2, respectively. The current round of scanning is performed using the detection light intensity with the current round light intensity value I1, and the corresponding current round detection value obtained is G1. Figure 10 As shown, based on historical light intensity values ​​Il1 and Il2, the current light intensity value I1, historical detection values ​​Gl1 and Gl2, and the current detection value G1, the mapping relationship between light intensity and detection value can be determined as a curve, called the light intensity-detection value relationship curve. This relationship curve can be fitted using a polynomial function. Let the polynomial function be:

[0114]

[0115] Where M is the order of the polynomial, w0, ..., w mLet W be the coefficient of the polynomial, x be the light intensity, and y be the detected value. Substituting the historical light intensity values ​​Il1 and Il2, the detected light intensity I1, the historical detected values ​​Gl1 and Gl2, and the current round's detected value G1 into the polynomial function, we can solve for the coefficients of the polynomial function and obtain the relation y(I). The relation y(I) is:

[0116] Substituting the target detection value Gt into the relation y(I) yields the target light intensity It. Adjusting the detection light intensity based on the relation and the target detection value can be done by adjusting the detection light intensity to match the target light intensity It. Whether the adjusted detection light intensity is compatible with the detection probe 60 can be confirmed through a new scan. If the adjusted detection light intensity is compatible with the detection probe 60, no further adjustment is needed after the new scan. If the adjusted detection light intensity is not compatible with the detection probe 60, repeat the light intensity adjustment methods in steps 035, 036, 037, and 038 to obtain a new relation, and then adjust the detection light intensity based on the new relation and the target detection value.

[0117] Please see Figure 12 In one embodiment, the target detection value Gt is known. Historical detection values ​​include Gl1 and Gl2, corresponding to historical light intensity values ​​Il1 and Il2, respectively. The current round of scanning is performed using the detection light intensity with the current round light intensity value I1, and the corresponding current round detection value obtained is G1. Figure 11 As shown, based on the historical light intensity values ​​Il1 and Il2, the current light intensity value I1, the historical detection values ​​Gl1 and Gl2, and the current detection value G1, it can be determined that the relationship between light intensity and detection value is linear, which can be described by the formula y(I)=Kt*I.

[0118] Specifically, in one embodiment, a first slope K1 is obtained based on historical light intensity values ​​Il1 and Il2 and historical detection values ​​Gl1 and Gl2, where K1 = (Gl2 - Gl1) / (Il2 - Il1). A second slope K2 is obtained based on historical light intensity value Il2, current round light intensity value I1, historical detection value Gl2, and current round detection value G1, where K2 = (G1 - Gl2) / (I1 - Il2). The average of the first slope K1 and the second slope K2 is taken as the slope Kt, where Kt = (K1 + K2) / 2. After obtaining the slope Kt, the target detection value Gt can be substituted into the relation y(I) = Kt * I to solve for the target light intensity It. The detection light intensity can be adjusted according to the relation and the target detection value, which can be to adjust the value of the detection light intensity to be the same as the value of the target light intensity It.

[0119] Please see Figure 13 In some implementations, 03: Obtaining the target detection value, and adjusting the detection light intensity based on the target detection value, the current round detection value, and historical detection values, including:

[0120] 039: Obtain the adjustment range based on the target detection value, the current round light intensity value corresponding to the current round detection value, and the historical light intensity value corresponding to the historical detection value; and

[0121] 0310: Adjust the detection light intensity according to the adjustment range.

[0122] The adjustment range is a range reflecting the light intensity value. In one embodiment, a bisection method is used to adjust the detected light intensity according to the adjustment range; that is, each adjustment uses the midpoint of the adjustment range as the adjusted detected light intensity value. In this way, the detected light intensity value can be continuously made closer to the value under the adaptation condition, so as to accurately adjust the detected light intensity to be compatible with the detection probe 60.

[0123] Please combine Figure 2 In some embodiments, the controller 80 can also be used to implement the light intensity adjustment methods in 039 and 0310.

[0124] Please combine Figure 5 In some embodiments, the adjustment module 14 can also be used to implement the light intensity adjustment methods in 039 and 0310.

[0125] The adjustment interval is a dynamically changing interval that is updated as the scanning results change. In one embodiment, the boundary of the adjustment interval is determined based on the light intensity of the smallest interval that includes the target detection value Gt and is not considered a boundary among the detection value intervals consisting of the maximum detection value Gmax, the minimum detection value Gmin, the target detection value Gt, and the historical detection values ​​acquired in each iteration.

[0126] Please combine Figure 14 In one embodiment, the current scan is the third round, with the first and second rounds of scans already performed. The target detection value Gt is known. Historical detection values ​​include the historical detection value Gl1 obtained from the first round of scan and the historical detection value Gl2 obtained from the second round of scan, corresponding to historical light intensity values ​​Il1 and Il2, respectively.

[0127] In the third round of scanning, the detection light intensity with the current round light intensity value of I1 is used for the current round of scanning, and the corresponding current round detection value is G1. Assume that the detection light intensity value can be adjusted to a maximum value of Imax and a minimum value of Imin. The maximum value of Imax and the minimum value of Imin are known, and the maximum detection value Gmax corresponding to the maximum value of Imax and the minimum detection value Gmin corresponding to the minimum value of Imax have been obtained in advance.

[0128] Initially, before historical detection values ​​are acquired, the smallest interval containing Gt without Gt serving as a boundary is the interval bounded by Gmax and Gmin, respectively. Gmax and Gmin correspond to Imax and Imin, respectively. Therefore, the initial adjustment interval is the interval bounded by the maximum value Imax and the minimum value Imin. Based on this adjustment interval, the detection light intensity is adjusted to the midpoint between the maximum value Imax and the minimum value Imin, so that the adjusted detection light intensity is used for scanning in the first round of scanning. After the first round of scanning, this midpoint (i.e., the adjusted detection light intensity value) is set as the historical light intensity value Il1.

[0129] The first scan yields the historical detection value Gl1. After the first scan, based on the existing scan results, the smallest interval containing Gt without Gt serving as a boundary is the interval bounded by Gmax and Gl1. Gmax and Gl1 correspond to Imax and Il1 respectively. Therefore, the adjustment interval after the first scan is the interval bounded by Imax and Il1. Based on this adjustment interval, the detection light intensity is adjusted to the midpoint between the maximum value Imax and the historical light intensity value Il1. This adjusted detection light intensity is then used for the second scan, and after the second scan, this midpoint (i.e., the adjusted detection light intensity) is set as the historical light intensity value Il2.

[0130] The second scan yields the historical detection value Gl2. After the second scan, based on the existing scan results, the smallest interval containing Gt without Gt serving as a boundary is the interval bounded by Gl1 and Gl2. Gl1 and Gl2 correspond to Il1 and Il2 respectively. Therefore, the adjustment interval after the second scan is the interval bounded by Il1 and Il2. Based on this adjustment interval, the detection light intensity is adjusted to the midpoint between the historical light intensity values ​​Il1 and Il2, so that the adjusted detection light intensity is used for scanning in the third scan. After the third scan, this midpoint (i.e., the adjusted detection light intensity value) is set as the historical light intensity value Il3.

[0131] The detection light intensity value used in the third round (current round) is I1. The detection value G1 of the current round can be obtained through the third round (current round) scan. If it can be determined from the current round detection value G1 and the target detection value Gt that the detection light intensity is compatible with the detection probe 60, then there is no need to adjust the detection light intensity. Otherwise, adjust the detection light intensity according to the adjustment range corresponding to the third round.

[0132] Based on the scan results from the third round (current round), the smallest interval containing Gt without Gt serving as a boundary is the interval with G1 and Gl2 as boundaries. G1 and Gl2 correspond to I1 and Il2 respectively. Therefore, the adjustment interval after the third round (current round) scan is the interval formed by I1 and Il2 as boundaries, and the value of the detected light intensity after the third round (current round) adjustment is the median value of the interval formed by I1 and Il2 as boundaries.

[0133] Please see Figure 15 In some implementations, 03: Adjusting the light intensity used to scan the test piece 200 based on the target detection value, the current round detection value, and historical detection values ​​includes:

[0134] 0311: Obtain the light intensity adjustment amount, which is the amount of change in light intensity each time the light intensity is adjusted;

[0135] 0312: An adjustment coefficient is obtained based on the target detection value, the current round detection value, and historical detection values. This adjustment coefficient is a multiple of the light intensity adjustment amount.

[0136] 0313: Adjust the detection light intensity according to the light intensity adjustment amount and adjustment coefficient.

[0137] Please combine Figure 2 In some embodiments, the controller 80 can also be used to implement the light intensity adjustment methods in 0310, 0311 and 0312.

[0138] Please combine Figure 5 In some embodiments, the adjustment module 14 can also be used to implement the light intensity adjustment methods in 0310, 0311 and 0312.

[0139] Wherein, the light intensity adjustment amount ΔI is the preset change in light intensity for each adjustment. In one embodiment, when adjusting the detected light intensity, each adjustment changes the value of the detected light intensity by ΔIt, which is called the adjustment amount. The adjustment amount ΔIt is the product of the light intensity adjustment amount ΔI and the adjustment coefficient α, i.e., ΔIt = ΔI * α. The value of the adjustment coefficient α is related to the absolute value of the difference between the current round detected value and the target detected value (hereinafter the same) L1, and the absolute value of the difference between the historical detected value and the current round detected value (hereinafter the same) L2. If the difference L2 is small and the difference L1 is large, it means that the adjustment range in the previous adjustment was not large enough. The adjustment coefficient α can be increased so that the adjustment amount ΔIt used in the next adjustment of the detected light intensity is larger, so that the light intensity can be changed significantly in the next adjustment, that is, a larger adjustment step size is used for adjustment, thereby improving the adjustment efficiency. If the difference L2 is large and the difference L1 is small, it means that the adjustment range was large in the previous adjustment. The adjustment coefficient α can be reduced so that the adjustment amount ΔIt used to detect the light intensity in the next adjustment is smaller. This allows for a small change in the light intensity in the next adjustment, that is, the adjustment step size is used to improve the adjustment accuracy and make the light intensity adjustment accurate.

[0140] Please combine Figure 16 In one embodiment, the target detection value Gt is known. Historical detection values ​​include Gl1, corresponding to historical light intensity values ​​Il1. The current detection value obtained in the current scan is G1. The difference between the current detection value G1 and the target detection value Gt is L1, and the difference between the historical detection value Gl1 and the current detection value Gt is L2. Let the adjustment coefficient α = L1 / L2.

[0141] exist Figure 16 The upper and lower diagrams illustrate two application scenarios. In the upper scenario, L1 is greater than L2, indicating that the preset adjustment amount ΔI was small compared to the previous adjustment, resulting in a small adjustment range. The adjustment coefficient α = L1 / L2 > 1 for this adjustment of the light intensity means that the adjustment amount ΔIt = ΔI * α > ΔI, i.e., an adjustment amount ΔIt greater than the preset adjustment amount ΔI is used to change the detected light intensity, allowing for a larger adjustment step size and improved adjustment efficiency. In the lower scenario, L1 is less than L2, indicating that the preset adjustment amount ΔIt was large compared to the previous adjustment, resulting in a larger adjustment range. The current detected light intensity may already be close to the light intensity compatible with the detection probe 60. The adjustment coefficient α = L1 / L2 < 1 for this adjustment means that the adjustment amount ΔIt = ΔI * α < ΔI, i.e., an adjustment amount ΔIt less than the preset adjustment amount ΔI is used to change the detected light intensity, allowing for a smaller adjustment step size and improved adjustment accuracy.

[0142] In summary, the adjustment method provided in this application can perform one scan of the test piece 200 and adjust the detection light intensity based on the current detection value obtained in one scan, the historical detection value obtained when scanning the test piece 200 before one scan, and the preset target detection value. Compared with the adjustment method of adjusting the detection light intensity by a fixed step size each time, this method can reduce the number of adjustments and improve adjustment efficiency.

[0143] Please see Figure 17 This application also provides a non-volatile computer-readable storage medium 300 containing a computer program 301. When the computer program 301 is executed by the processor 30, the processor 30 performs the adjustment method of any of the above embodiments.

[0144] In the description of this specification, the references to terms such as "some embodiments," "in one example," "exemplarily," etc., indicate that a specific feature, structure, material, or characteristic described in connection with the described embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0145] Any process or method described in the flowchart or otherwise herein can be understood as representing a module, segment, or portion of code comprising one or more executable instructions for implementing a particular logical function or process, and the scope of the preferred embodiments of this application includes additional implementations in which functions may be performed not in the order shown or discussed, including substantially simultaneously or in reverse order depending on the function involved, as will be understood by those skilled in the art to which embodiments of this application pertain.

[0146] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A method for adjusting light intensity, characterized in that, include: Historical detection values ​​are acquired, and the test piece is scanned concurrently using the detection light intensity. The historical detection values ​​are the detection values ​​of the test piece's historical scan image acquired when the test piece was scanned before the current scan. Obtain the scan image of the test piece corresponding to the current round scan and the detection value of the scan image in the current round; Obtain a target detection value, and adjust the detection light intensity based on the target detection value, the current round detection value, and the historical detection values. The target detection value is a detection value that indicates that the detection light intensity is qualified. and The historical detection values ​​are updated based on the current round detection values.

2. The adjustment method according to claim 1, characterized in that, Multiple devices under test (DUTs) are arranged into multiple queues, each queue including multiple DUTs. The step of obtaining the scan image corresponding to the DUT in the current scan round and the detection value of the scan image in the current round includes: Scan each of the devices under test in the queue to obtain multiple scan images; and The current round detection value is obtained based on the average of the detection values ​​of each scan image.

3. The adjustment method according to claim 2, characterized in that, The step of acquiring the target detection value and adjusting the detection light intensity based on the target detection value, the current round detection value, and the historical detection values ​​includes: After completing a scan of one of the queues, the detection light intensity is adjusted; and The next queue is scanned according to the adjusted detection light intensity.

4. The adjustment method according to claim 1, characterized in that, Multiple devices under test (DUTs) are arranged into multiple queues. Each queue includes an alternating first sub-queue and a second sub-queue. The number of DUTs in the first sub-queue is greater than the number of DUTs in the second sub-queue. The DUTs in the first sub-queue are used to acquire the scan image. The acquisition of historical detection values, and the concurrent scanning of the DUTs using detection light intensity, include: Each of the devices under test in the first sub-queue is scanned to obtain multiple scan images; The step of obtaining the scan image of the test piece corresponding to the current round of scanning and the detection value of the scan image in the current round includes: The current round detection value is obtained based on the average of the detection values ​​of each scan image.

5. The adjustment method according to claim 4, characterized in that, The step of acquiring the target detection value and adjusting the detection light intensity based on the target detection value, the current round detection value, and the historical detection values ​​includes: Adjust the detection light intensity while scanning the second sub-queue; and The first sub-queue is scanned next according to the adjusted detection light intensity.

6. The adjustment method according to any one of claims 1-5, characterized in that, The step of acquiring the target detection value and adjusting the detection light intensity based on the target detection value, the current round detection value, and the historical detection values ​​includes: Acquire historical light intensity values, which are the light intensity values ​​scanned when the historical detection values ​​were acquired; Obtain the current light intensity value of the wheel, wherein the current light intensity value is the light intensity value scanned when the current wheel detection value is obtained; A relationship is obtained based on the historical light intensity value, the current light intensity value, the historical detection value, and the current detection value. This relationship is used to characterize the correspondence between the light intensity used to irradiate the test object and the detection value of the test object. Adjust the detection light intensity according to the relationship and the target detection value.

7. The adjustment method according to any one of claims 1-5, characterized in that, The step of acquiring the target detection value and adjusting the detection light intensity based on the target detection value, the current round detection value, and the historical detection values ​​includes: The adjustment range is obtained based on the target detection value, the current light intensity value corresponding to the current round detection value, and the historical light intensity value corresponding to the historical detection value; and Adjust the detection light intensity according to the adjustment range.

8. The adjustment method according to any one of claims 1-5, characterized in that, Adjusting the detection light intensity based on the target detection value, the current round detection value, and the historical detection values ​​includes: The light intensity adjustment amount is the amount of light intensity change each time the light intensity is adjusted. An adjustment coefficient is obtained based on the target detection value, the current round detection value, and the historical detection values. This adjustment coefficient is a multiple of the light intensity adjustment amount. The detection light intensity is adjusted according to the light intensity adjustment amount and the adjustment coefficient.

9. A detection device, characterized in that, The detection module includes: An illumination module, wherein the illumination module is used to perform a scan of the test piece using detected light intensity; The first acquisition module is used to acquire historical detection values, which are the detection values ​​of the historical scan image of the test piece acquired when the test piece is scanned before the current scan. The second acquisition module is used to acquire the scan image of the test piece corresponding to the current round scan and the current round detection value of the scan image; An adjustment module is used to acquire a target detection value and adjust the detection light intensity based on the target detection value, the current round detection value, and the historical detection values. The target detection value is a detection value that indicates the detection light intensity is qualified. An update module is used to update the historical detection values ​​based on the current round detection values.

10. A detection system, characterized in that, The detection system includes: A support device for supporting the test piece; A light source, used to illuminate the test piece; A detection probe, used to acquire a scan image of the test piece; and The controller is configured to: acquire historical detection values, and concurrently control the light source to perform a scan of the test piece using a detection light intensity; acquire a scan image of the test piece and the current round detection value of the scan image; acquire a target detection value, adjust the detection light intensity according to the target detection value, the current round detection value, and the historical detection values, wherein the target detection value is a detection value that indicates the detection light intensity is qualified; and update the historical detection values ​​according to the current round detection values.

11. One or more non-volatile computer-readable storage media storing a computer program, characterized in that, When the computer program is executed by one or more processors, it implements the adjustment method according to any one of claims 1 to 8.

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