Ultrasonic vibration assisted blade self-adaptive chemical mechanical polishing intelligent equipment and processing method

Abstract

The present application relates to a kind of ultrasonic vibration assisted blade adaptive chemical mechanical polishing intelligent equipment and processing method.The device includes bed, general control system and be set in the main shaft of bed, ultrasonic vibration device, grinding barrel, polishing liquid supply device, polishing abrasive supply device and blade scanning device, the end of main shaft is connected with the blade to be polished by clamp, grinding barrel bottom is connected with the bottom of bed by ultrasonic vibration device, polishing liquid supply device and polishing abrasive supply device can deliver polishing liquid and abrasive to grinding barrel, blade scanning device is used to scan blade, during polishing, the blade to be polished enters grinding barrel under the control of main shaft, and based on the data of blade scanning device, the working state of main shaft, ultrasonic vibration device, polishing liquid supply device, polishing abrasive supply device and blade scanning device is controlled by general control system, and then the motion track of reciprocating motion, multi-angle hovering, rotation and revolution around the main shaft of blade is adjusted.

Description

Technical Field

[0001] This invention relates to the field of machining equipment technology, and more particularly to an intelligent equipment and processing method for ultrasonic vibration-assisted adaptive chemical mechanical polishing of blades. Background Technology

[0002] In the current field of ultra-precision machining, chemical mechanical polishing (CMP) is widely considered the most ideal method for planarizing hard and brittle materials. It achieves uniform material removal through a combination of chemical reaction and mechanical grinding, achieving high processing efficiency while maintaining overall planarity. While polishing techniques for planes and spheres are relatively mature, the theoretical framework for ultra-precision polishing of complex curved surfaces (such as gas turbine blades) is still incomplete. Currently, gas turbine blades primarily employ polishing methods that remove material through mechanical stress, such as manual polishing, belt polishing, robotic polishing, and CNC polishing. These methods suffer from problems such as significant material residue on the polished surface, large damage layers, poor polishing consistency, and low polishing efficiency, severely hindering the production of high-quality gas turbines. Therefore, there is an urgent need to research an efficient, high-precision, and low-damage polishing method for heavy-duty gas turbine blades to solve the challenges of manufacturing high-quality gas turbines. Compared to traditional polishing processes, ultra-precision polishing of gas turbine blades is more complex in terms of material removal mechanisms, machining path planning, polishing equipment, and surface profile correction. It also results in lower polishing efficiency. Residual machining marks, cracks, surface profile errors, and subsurface damage on the blade surface can significantly impact gas turbine performance. To achieve high-quality gas turbine manufacturing, research into material removal processes for blade polishing must focus on high-quality, high-efficiency, and low-damage manufacturing of gas turbine blades. Summary of the Invention

[0003] To address the aforementioned technical problems, this paper provides an intelligent equipment and processing method for ultrasonic vibration-assisted adaptive chemical mechanical polishing of turbine blades. Utilizing an integrated immersion chemical mechanical polishing method, the blade is immersed in a rotatable polishing slurry. A laser triangulation instrument is used to monitor the blade's surface morphology and contour accuracy in real time, feeding this information back to the central control system to control the blade's reciprocating motion, multi-angle hovering, rotation, and revolution around the main shaft. Combined with the ultrasonic vibration assistance of the grinding barrel, adaptive chemical mechanical polishing of gas turbine blades is achieved. Through adaptive control technology, efficient, high-precision, and low-damage adaptive chemical mechanical polishing of turbine blade surfaces can be achieved. This avoids the problems of insufficient or excessive polishing caused by uneven blade surfaces in traditional polishing processes, as well as the high labor intensity, low polishing efficiency, poor polishing consistency, material residue, and messy scratches associated with manual polishing. It improves polishing accuracy and efficiency while reducing the time and cost of manual intervention, lowering production costs, and increasing production efficiency and product quality. This method has significant promotional value and application prospects in the field of turbine blade processing.

[0004] The technical means employed in this invention are as follows:

[0005] An intelligent equipment for ultrasonic vibration-assisted adaptive chemical mechanical polishing of blades includes a machine bed, a central control system, and a spindle, an ultrasonic vibration device, a grinding barrel, a polishing slurry supply device, a polishing abrasive supply device, and a blade scanning device disposed within the machine bed. The end of the spindle is connected to the blade to be polished via a clamp. The grinding barrel is disposed below the spindle, and its bottom end is connected to the bottom of the machine bed via the ultrasonic vibration device. The output ends of the polishing slurry supply device and the polishing abrasive supply device can deliver polishing slurry and abrasive particles to the grinding barrel. The blade scanning device is used to scan the blade. The spindle, ultrasonic vibration device, polishing slurry supply device, polishing abrasive supply device, and blade scanning device are all connected to the central control system. During the polishing process, the blade to be polished enters the grinding barrel under the control of the spindle. Based on the data from the blade scanning device, the central control system controls the working state of the spindle, ultrasonic vibration device, polishing slurry supply device, polishing abrasive supply device, and blade scanning device, thereby adjusting the blade's reciprocating motion, multi-angle hovering, rotation, and revolution around the spindle.

[0006] Furthermore, the grinding barrel is a polygonal grinding barrel, and a grinding barrel turntable is installed on the grinding barrel base below the grinding barrel. The grinding barrel turntable is connected to the main control system. The ultrasonic vibration device includes an ultrasonic vibration motor and ultrasonic vibration springs. The output end of the ultrasonic vibration motor is connected to the center of the grinding barrel base, and several ultrasonic vibration springs are arranged around the grinding barrel base and between the bed.

[0007] Furthermore, the output end of the main shaft is connected to a floating turntable, on which a guide rail is provided. A blade rotation motor is mounted on the floating turntable via the guide rail, and the output end of the blade rotation motor is connected to the blade to be polished. A first torque sensor is provided on the floating turntable. The torque sensor and the blade rotation motor are connected to the central control system. Based on the force data of the blade during the polishing process acquired in real time by the torque sensor, the central control system controls the corresponding device to act and adjusts the movement trajectory of the blade. The central control system controls the position of the blade rotation motor on the slide rail and adjusts the linear speed of the blade rotating around the main shaft to meet the polishing requirements of different types of blades for different linear speeds.

[0008] Furthermore, the spindle is installed inside the spindle box, and a second torque sensor is installed on the spindle. This torque sensor is used to monitor the force on the floating turntable in real time during the polishing process, thereby adjusting the rotation speed, the axial rotation and radial movement of the spindle, driving the floating turntable to rotate and reciprocate up and down. In addition, the blade rotation motor causes the blade to rotate and deflect at a certain angle, thereby simultaneously realizing the blade's revolution around the spindle axis and the blade's rotation.

[0009] Furthermore, the polishing slurry supply device is installed on the machine bed and stores various polishing slurry components. The polishing slurry matching the blade polishing requirements is transported to the grinding tank through pipelines by the overall control system. The polishing abrasive supply device is installed on the machine bed and stores various abrasives of different sizes. The abrasives matching the blade polishing requirements are transported to the polygonal grinding tank through pipelines by the overall control system.

[0010] Furthermore, it also includes a polishing slurry suction device, which is connected to the main control system. The polishing slurry suction device is installed on the machine bed and is used to suction and collect the polishing slurry that has failed after polishing the blades. The main control system analyzes and decides whether to recycle the polishing slurry or treat the waste slurry.

[0011] Furthermore, it also includes a CCD monitoring device connected to the central control system. The CCD monitoring device is installed on the machine bed and is used to monitor the clamping, positioning and polishing process of the blades in real time. If the equipment is in an abnormal operating state or an abnormality occurs during the polishing process, the information will be fed back to the central control system in a timely manner.

[0012] Furthermore, the blade scanning device includes a laser triangulation measuring instrument, which is used to perform omnidirectional scanning of the surface morphology and contour of the blade to be processed and the processed blade. After the detection data is transmitted back to the central control system, the central control system adjusts the movement trajectory of the blade to achieve adaptive polishing of the blade surface. After polishing is completed, the blade is scanned again to compare the before and after polishing. The central control system records the polishing data of each blade to provide process reference for subsequent blade polishing.

[0013] This invention also provides a processing method based on the above-mentioned ultrasonic vibration-assisted adaptive chemical mechanical polishing intelligent equipment for blades, used for adaptive chemical mechanical polishing of blades, comprising the following steps:

[0014] Step 1: The equipment control system is turned on, the polishing slurry supply device and the polishing abrasive supply device are turned on, and the appropriate polishing slurry and polishing abrasive are matched according to the polishing requirements of the blade to be polished and transported to the polygonal grinding barrel through the pipeline. The ultrasonic vibration device is turned on and the grinding barrel turntable is turned on, so that the polishing slurry and polishing abrasive are fully stirred and mixed into polishing slurry.

[0015] Step 2: The blade is transported to the equipment's sealed door entrance. The central control system controls the sealing door to open, the CCD monitoring device is activated, the blade is installed on the blade's special fixture, the laser triangulation instrument is activated and scans to obtain the initial morphological data of the blade, the ultrasonic vibration device is activated, the blade rotation motor is activated, and the main shaft is activated. Based on the blade's shape and position accuracy and polishing requirements, the blade's deflection angle, rotation speed and revolution speed around the main shaft, the linear velocity of the blade rotating around the main shaft, and the up-and-down reciprocating motion speed of the blade following the main shaft are adjusted. The central control system plans the composite motion trajectory of the blade and performs adaptive polishing of the blade.

[0016] Step 3: Perform adaptive polishing on the blades according to actual processing requirements. The CCD monitoring device monitors the polishing status in real time, the central control system monitors the operating status of each device in real time, and the laser triangulation instrument scans the polished blades so that the central control system can continuously optimize the blade running trajectory. The central control system controls the equipment spindle, blade rotary motor, grinding barrel speed and ultrasonic vibration frequency in real time to achieve adaptive chemical mechanical polishing of the blades.

[0017] Step 4: After processing is completed, the main control system shuts down the spindle, blade rotation motor, grinding drum turntable, and ultrasonic vibration motor, opens the sealing door, and removes the blade.

[0018] Compared with the prior art, the present invention has the following advantages:

[0019] 1. The present invention provides an intelligent equipment and processing method for ultrasonic vibration-assisted adaptive chemical mechanical polishing of blades. It utilizes the fluidity characteristics of fluids and combines the chemical and mechanical coupling effect of polishing slurry. It adopts chemical dissolution fluid pressure loading and chemical (chemical) flow (flow field) solid (abrasive) coupling removal method to achieve efficient, high-precision, and low-damage adaptive chemical mechanical polishing of blades. It solves the problems of obvious material residue on the polished surface, large damage layer, poor polishing consistency and low polishing efficiency that exist in the current polishing method of gas turbine blades which mainly uses mechanical stress to remove materials.

[0020] 2. This invention provides an intelligent equipment and processing method for ultrasonic vibration-assisted adaptive chemical mechanical polishing of blades. It drives the blades to rotate around the main shaft and reciprocate up and down through a main shaft and a motor. In addition, the blade rotation motor causes the blades to rotate, realizing the revolution and rotation of the blades around the main shaft axis. The distance between the blades and the main shaft axis is adjustable, i.e., the linear velocity is adjustable. The rotation speed of the blades is adjustable. The speed and distance of the radial reciprocating motion of the blades along the main shaft are also adjustable. The blades can also be suspended at any rotation angle. In addition, the polishing slurry is rotated by the grinding barrel to increase the relative velocity between the polishing slurry and the blades. With the assistance of ultrasonic vibration of the grinding barrel, high-quality and high-efficiency adaptive chemical mechanical polishing of the blades is achieved.

[0021] Based on the above reasons, this invention can be widely applied in the field of gas turbine blade polishing. By designing special fixtures and optimizing motion trajectories, high-quality and high-efficiency adaptive chemical mechanical polishing of blades with various structures can be achieved. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the three-dimensional assembly structure of the equipment in an embodiment of the present invention.

[0024] Figure 2 for Figure 1 A magnified view of a portion of the floating turntable area.

[0025] In the diagram: 1. Sealed door; 2. Support base; 3. Polishing slurry supply device; 4. Polishing abrasive supply device; 5. Ultrasonic vibration spring; 6. Ultrasonic vibration motor; 7. Grinding barrel turntable; 8. Polygonal grinding barrel; 9. Operating status display window; 10. Emergency stop button; 11. Operating status indicator light; 12. Central control system; 13. Bed; 14. Laser triangulation measuring instrument; 15. Blade-specific fixture; 16. Blade rotary motor; 17. Spindle box; 18. Spindle; 19. Floating turntable; 19.1. Slide rail; 20. Blade; 21. CCD monitoring device; 22. Polishing slurry suction device. Detailed Implementation

[0026] It should be noted that, unless otherwise specified, the embodiments and features described in the present invention can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0027] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present invention or its application or use. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0028] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of exemplary embodiments according to the invention. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0029] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of the invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following figures denote similar items; therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0030] In the description of this invention, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is generally based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this invention and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this invention. The directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0031] For ease of description, spatial relative terms such as "above," "over," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation besides the orientation of the device as described in the figures. For example, if the device in the figures is inverted, a device described as "above" or "above" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0032] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore should not be construed as limiting the scope of protection of this invention.

[0033] Example 1

[0034] like Figure 1 As shown, this invention provides an intelligent equipment for ultrasonic vibration-assisted adaptive chemical mechanical polishing of blades, mainly including a sealed door 1, a support base 2, a bed 13 mounted on the support base, an ultrasonic vibration spring 5 and an ultrasonic vibration motor 6 mounted inside the bed, a polygonal grinding barrel 8, a blade-specific clamp 15, a blade rotary motor 16, a floating turntable 19, a spindle 18, a spindle box 19, a polishing fluid supply device 3, a polishing abrasive supply device 4, a polishing slurry suction device 22, a CCD monitoring device 21, a laser triangulation measuring instrument 14, an operating status display window 9, and a central control system 12, etc. This invention utilizes a blade-specific fixture and a self-developed green and environmentally friendly polishing slurry. Taking advantage of the fluid's flowability and the chemical-mechanical coupling effect of the polishing slurry, it employs chemical dissolution fluid pressure loading and a chemical-fluid-solid coupling removal method. A laser triangulation instrument is used to detect the blade's surface morphology and contour accuracy in real time, which is then fed back to the central control system to control the blade's reciprocating motion, multi-angle hovering, rotation, and revolution around the main shaft. Combined with the ultrasonic vibration assistance of the grinding barrel, this invention achieves efficient, high-precision, and low-damage adaptive chemical-mechanical polishing of gas turbine blades.

[0035] The bed 13 is mounted above the support base 2, and an ultrasonic vibration device is installed at the bottom of the bed 13. In this embodiment, an ultrasonic vibration motor 6 is used as the vibration source, and in conjunction with an ultrasonic vibration spring 5, an adjustable frequency ultrasonic vibration can be applied to the polygonal grinding barrel 8 to promote the polishing of the blades.

[0036] The polygonal grinding barrel 8 is mounted on the grinding barrel turntable 7 above the ultrasonic vibration device. The grinding barrel is polygonal and can be rotated by the turntable, thereby causing the polishing slurry to rotate. The polygonal design of the grinding barrel makes it easy for the polishing slurry that has been thrown to the edge by centrifugal force to bounce back to the center of the grinding barrel. It also allows the polishing slurry placed in the grinding barrel to rotate at any adjustable speed, thereby increasing the relative speed and shear force between the polishing slurry and the blade, and improving the polishing efficiency.

[0037] The blade-specific clamp 15 is mounted on the blade rotary motor 16. This clamp is a blade-specific clamp that can conveniently and quickly fix the blade and restrict its degrees of freedom. Controlled by the blade rotary motor 16, the blade mounted on the clamp can perform controllable rotation, deflection within a certain angle, and hovering, facilitating adaptive polishing of the blade. In this embodiment, the clamp is used to hold the blade in a vertical position.

[0038] The blade rotation motor 16 is mounted on the floating turntable 19 and is equipped with a first torque sensor, which can monitor the force on the blade in real time during the polishing process, thereby adaptively adjusting the movement trajectory of the blade. In addition, the motor 16 can also slide along the slide rail 19.1 on the floating turntable 19 to any position on the track, that is, adjust the linear speed of the blade rotating around the main shaft to meet the polishing requirements of different types of blades for different linear speeds.

[0039] The floating turntable 19 is installed at the end of the main shaft 18, and the center of the turntable is connected to the spherical end of the main shaft. The turntable 19 can rotate around the main shaft 18 and float controllably in a plane perpendicular to the main shaft 18. In this embodiment, three blade rotary motors 16 are evenly distributed on the turntable 19. The rotary motors 16 can achieve adjustable distance from the axis of the main shaft 18 by moving on the slide rail 19.1, that is, the linear speed of the blades 20 rotating around the main shaft 18 is adjustable. In addition, the turntable 19 drives the blades 20 to float controllably, so that three blades can be simultaneously subjected to adaptive ultra-precision chemical mechanical polishing.

[0040] The main shaft 18 is installed inside the main shaft box 17. The main shaft 18 is equipped with a second torque sensor, which can monitor the force on the floating turntable 19 during polishing in real time, thereby adjusting the rotation speed. The main shaft 18 can achieve axial rotation and radial movement, thus driving the floating turntable 19 to rotate and reciprocate up and down. In addition, the blade rotation motor can cause the blades to rotate and deflect at a certain angle, thus simultaneously achieving the blades' revolution around the main shaft axis and their rotation. The distance between the blades and the main shaft axis is adjustable, meaning the linear velocity of the blades' revolution around the main shaft axis is adjustable. The blade rotation motor can also adjust the blades' rotation speed. The main shaft can drive the blades, making the speed and distance of their radial reciprocating motion along the main shaft adjustable. The blades can also be suspended at any deflection angle. Combined with the polygonal grinding barrel driving the polishing slurry to rotate in the opposite direction of the blades' revolution around the main shaft, increasing the relative speed between the polishing slurry and the blades, and with the ultrasonic vibration assistance of the grinding barrel and the coordinated control of the overall control system, high-quality and high-efficiency adaptive chemical mechanical polishing of the blades is achieved.

[0041] The spindle box 17 is mounted on the top of the bed 13 and can provide sufficient rotational speed to the spindle 18, enabling the spindle 18 to reciprocate radially, thereby providing sufficient power and multiple motion trajectories for polishing the blade 20.

[0042] The polishing slurry supply device 3 is installed on the left side of the bed 13. It can store a variety of polishing slurry formulas and, through the central control system, delivers polishing slurry that matches the polishing requirements of the blades to the grinding tank via pipeline.

[0043] The polishing abrasive supply device 4 is installed on the left side of the bed 13. The device contains a variety of abrasives of different sizes. The abrasives that match the polishing requirements of the blades are controlled by the central control system and transported through pipelines to the polygonal grinding barrel.

[0044] The polishing slurry suction device 22 is installed on the left side inside the bed 13. It is used to suction and collect the polishing slurry that has failed after polishing the blades. The system analyzes and decides whether to recycle the polishing slurry or treat the waste slurry.

[0045] The CCD monitoring device 21 is installed on the left side of the bed 13 and extends into the polishing area. It can monitor the clamping, positioning and polishing process of the blade 20 in real time, and promptly report any abnormal operation of the equipment or any abnormal situation that occurs during the polishing process to the central control system 12.

[0046] The laser triangulation measuring instrument 14 is installed inside the right side of the bed 13, which facilitates a comprehensive scan of the surface morphology and contour of the blade to be processed 20 and the processed blade. The measurement data is transmitted back to the central control system 12. The central control system 12 adjusts the movement trajectory of the blade to achieve adaptive polishing of the blade surface. After polishing, the blade is scanned again to compare before and after polishing. The central control system records the polishing data of each blade to provide process reference for subsequent blade polishing.

[0047] The operating status display window 9 is installed on the right side of the bed 13, below the interface of the main control system 12. It is equipped with an operating status indicator light 11 and an emergency stop button 10. It is used to monitor the operating status of each instrument and equipment in the equipment in real time, display the operating status information in real time, and provide timely warnings for faults.

[0048] The central control system 12 is installed on the upper right side of the bed 13 and is used to receive feedback information from various systems in the equipment and to analyze and process it.

[0049] This invention also provides a method for adaptive chemical mechanical polishing of blades using ultrasonic vibration assistance, comprising the following steps:

[0050] Step 1: The equipment control system 12 is turned on, the polishing liquid supply device 3 and the polishing abrasive supply device 4 are turned on, and the appropriate polishing liquid and polishing abrasive are matched according to the polishing requirements of the blade to be polished and transported to the polygonal grinding barrel 8 through the pipeline. The ultrasonic vibration device is turned on, and the grinding barrel turntable 7 is turned on, so that the polishing liquid and polishing abrasive are fully stirred and mixed into polishing slurry.

[0051] Step 2: The blade 20 is transported to the entrance of the equipment sealing door 1. The main control system 12 controls the sealing door 1 to open, the CCD monitoring device 21 is turned on, the blade is installed on the blade special fixture 15, the laser triangulation measuring instrument 14 is turned on and scans to obtain the initial morphology data of the blade 20, the ultrasonic vibration device is turned on, the blade rotary motor 16 is turned on, and the main shaft 18 is turned on. The deflection angle, rotation speed and revolution speed around the main shaft, linear speed of the blade rotating around the main shaft 18 and the up-and-down reciprocating speed of the blade following the main shaft 18 are adjusted according to the shape and position accuracy and polishing requirements of the blade 20. The composite motion trajectory of the blade is planned by the main control system 12 to perform adaptive polishing of the blade.

[0052] Step 3: Perform adaptive polishing on blade 20 according to actual processing requirements. CCD monitoring device 21 monitors polishing status in real time, and central control system 12 monitors the operating status of each device in real time. Laser triangulation instrument 14 scans polished blade 20 so that central control system 12 can continuously optimize the running trajectory of blade 20. Through central control system 12, control equipment spindle 18, blade rotary motor 16, grinding barrel speed and ultrasonic vibration frequency in real time to realize adaptive chemical mechanical polishing of blade.

[0053] Step 4: After processing is completed, the main control system 12 controls the spindle 18, blade rotation motor 16, grinding barrel turntable 7, and ultrasonic vibration motor 6 to shut down, and the sealing door 1 to open, and the blade 20 is taken out.

[0054] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An intelligent equipment for ultrasonic vibration-assisted adaptive chemical mechanical polishing of blades, characterized in that, The system includes a machine bed, a central control system, and a spindle, an ultrasonic vibration device, a grinding barrel, a polishing slurry supply device, a polishing abrasive supply device, and a blade scanning device, all housed within the machine bed. The end of the spindle is connected to the blade to be polished via a clamp. The grinding barrel is located below the spindle, and its bottom end is connected to the bottom of the machine bed via the ultrasonic vibration device. The output ends of the polishing slurry supply device and the polishing abrasive supply device can deliver polishing slurry and abrasive particles to the grinding barrel. The blade scanning device is used to scan the blade. The spindle, ultrasonic vibration device, polishing slurry supply device, polishing abrasive supply device, and blade scanning device are all connected to the central control system. During the polishing process, the blade to be polished enters the grinding barrel under the control of the spindle. Based on the data from the blade scanning device, the central control system controls the working status of the spindle, ultrasonic vibration device, polishing slurry supply device, polishing abrasive supply device, and blade scanning device, thereby adjusting the blade's reciprocating motion, multi-angle hovering, rotation, and revolution around the spindle. The output end of the main shaft is connected to a floating turntable, and a guide rail is provided on the floating turntable. The blade rotation motor is mounted on the floating turntable through the guide rail. The output end of the blade rotation motor is connected to the blade to be polished. A first torque sensor is provided on the floating turntable. The torque sensor and the blade rotation motor are connected to the main control system. Based on the force data of the blade during the polishing process obtained in real time by the torque sensor, the main control system controls the corresponding device to act and adjusts the movement trajectory of the blade. The central control system controls the position of the blade rotary motor on the slide rail and adjusts the linear speed of the blade rotating around the main shaft to meet the polishing requirements of different types of blades for different linear speeds. The spindle is installed inside the spindle box and is equipped with a second torque sensor. This torque sensor is used to monitor the force on the floating turntable in real time during the polishing process, thereby adjusting the rotation speed, axial rotation and radial movement of the spindle, driving the floating turntable to rotate and reciprocate up and down. In addition, the blade rotation motor causes the blade to rotate and deflect at a certain angle, thus simultaneously realizing the blade's revolution around the spindle axis and the blade's rotation.

2. The intelligent equipment for ultrasonic vibration-assisted adaptive chemical mechanical polishing of blades according to claim 1, characterized in that, The grinding barrel is a polygonal grinding barrel, and a grinding barrel turntable is installed on the grinding barrel base below the grinding barrel. The grinding barrel turntable is connected to the main control system. The ultrasonic vibration device includes an ultrasonic vibration motor and ultrasonic vibration springs. The output end of the ultrasonic vibration motor is connected to the center of the grinding barrel base, and several ultrasonic vibration springs are arranged around the grinding barrel base and between the grinding barrel base and the bed.

3. The intelligent equipment for ultrasonic vibration-assisted adaptive chemical mechanical polishing of blades according to claim 1, characterized in that, The polishing slurry supply device is installed on the machine bed and stores various polishing slurry components. The polishing slurry matching the blade polishing requirements is transported to the grinding tank through pipelines by the overall control system. The polishing abrasive supply device is installed on the machine bed and stores various abrasives of different sizes. The abrasives matching the blade polishing requirements are transported to the polygonal grinding tank through pipelines by the overall control system.

4. The intelligent equipment for ultrasonic vibration-assisted adaptive chemical mechanical polishing of blades according to claim 1, characterized in that, It also includes a polishing slurry suction device, which is connected to the main control system. The polishing slurry suction device is installed on the machine bed and is used to collect and extract the polishing slurry that has failed after polishing the blades. The main control system analyzes and decides whether to recycle the polishing slurry or treat the waste slurry.

5. The intelligent equipment for ultrasonic vibration-assisted adaptive chemical mechanical polishing of blades according to claim 1, characterized in that, It also includes a CCD monitoring device, which is connected to the central control system. The CCD monitoring device is installed on the machine bed and is used to monitor the clamping, positioning and polishing process of the blades in real time. If the equipment is in an abnormal operating state or an abnormality occurs during the polishing process, the information will be fed back to the central control system in a timely manner.

6. The intelligent equipment for ultrasonic vibration-assisted adaptive chemical mechanical polishing of blades according to claim 1, characterized in that, The blade scanning device includes a laser triangulation measuring instrument, which is used to perform omnidirectional scanning of the surface morphology and contour of the blade to be processed and the processed blade. After the detection data is transmitted back to the central control system, the central control system adjusts the movement trajectory of the blade to achieve adaptive polishing of the blade surface. After polishing is completed, the blade is scanned again to compare the before and after polishing. The central control system records the polishing data of each blade to provide process reference for subsequent blade polishing.

7. A processing method based on the ultrasonic vibration-assisted adaptive chemical mechanical polishing intelligent equipment for blades according to any one of claims 1 to 6, characterized in that, The method for adaptive chemical mechanical polishing of blades includes the following steps: Step 1: The equipment control system is turned on, the polishing slurry supply device and the polishing abrasive supply device are turned on, and the appropriate polishing slurry and polishing abrasive are matched according to the polishing requirements of the blade to be polished and transported to the polygonal grinding barrel through the pipeline. The ultrasonic vibration device is turned on and the grinding barrel turntable is turned on, so that the polishing slurry and polishing abrasive are fully stirred and mixed into polishing slurry. Step 2: The blade is transported to the equipment's sealed door entrance. The central control system controls the sealing door to open, the CCD monitoring device is activated, the blade is installed on the blade's special fixture, the laser triangulation instrument is activated and scans to obtain the initial morphological data of the blade, the ultrasonic vibration device is activated, the blade rotation motor is activated, and the main shaft is activated. Based on the blade's shape and position accuracy and polishing requirements, the blade's deflection angle, rotation speed and revolution speed around the main shaft, the linear velocity of the blade rotating around the main shaft, and the up-and-down reciprocating motion speed of the blade following the main shaft are adjusted. The central control system plans the composite motion trajectory of the blade and performs adaptive polishing of the blade. Step 3: Perform adaptive polishing on the blades according to actual processing requirements. The CCD monitoring device monitors the polishing status in real time, the central control system monitors the operating status of each device in real time, and the laser triangulation instrument scans the polished blades so that the central control system can continuously optimize the blade running trajectory. The central control system controls the equipment spindle, blade rotary motor, grinding barrel speed and ultrasonic vibration frequency in real time to achieve adaptive chemical mechanical polishing of the blades. Step 4: After processing is completed, the main control system shuts down the spindle, blade rotation motor, grinding drum turntable, and ultrasonic vibration motor, opens the sealing door, and removes the blade.

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