A high-precision white light adjustable diaphragm device for multiple use conditions

Abstract

This invention discloses a high-precision white light adjustable aperture device for various operating conditions. It is characterized by comprising two absorber assemblies, each with an absorber assembly attitude adjustment mechanism, a two-dimensional precision displacement system, and a two-dimensional precision displacement system adjustment mechanism located below it. The upstream and downstream absorber assemblies are used to receive synchrotron radiation and adjust its exit angle. The two-dimensional precision displacement system adjustment mechanism is used to adjust the attitude and height of the two-dimensional precision displacement system. The two-dimensional precision displacement system is used to control the horizontal and vertical displacement of the absorber assembly. The absorber assembly attitude adjustment mechanism is used to adjust the attitude of the absorber assembly. This invention can simultaneously receive multiple types of synchrotron radiation, achieving the function of using a single adjustable aperture device to handle multiple different operating conditions within the limited space of the front-end area.

Description

Technical Field

[0001] This invention belongs to the field of synchrotron radiation technology and relates to a high-precision white light adjustable aperture device for various operating conditions. It is applied to the front-end area of ​​a synchrotron radiation device and is used in an ultra-high vacuum environment. Background Technology

[0002] The High Energy Synchrotron Radiation Facility (HEPS) currently under construction in my country is the world's brightest fourth-generation synchrotron radiation facility to date. To conduct various types of scientific experiments and meet the diverse needs of users in various fields, the peak power density and extraction angle of synchrotron radiation vary significantly across different beamlines of the HEPS. Even within the same beamline, different types of insert light sources can produce considerably different synchrotron radiation. Therefore, some devices in the HEPS front-end region and beamlines need to simultaneously meet the operating conditions of different types of insert light sources. The white light water-cooled adjustable aperture, as a crucial device for standardizing the front-end region, absorbs excess heat load while allowing adjustment of the synchrotron radiation extraction angle according to different user requirements.

[0003] The white light adjustable apertures used in the first and second generation synchrotron radiation devices had relatively low thermal loads and small absorber sizes. Most of them used four independently moving white light adjustable apertures within a vacuum chamber. However, starting with the third generation of synchrotron radiation devices, the brightness of synchrotron radiation increased significantly, leading to a substantial increase in the thermal load of the adjustable apertures. Therefore, the absorbers of later white light adjustable apertures typically used a very small-angle inclined plane to receive synchrotron radiation light in order to reduce the surface power density. The size of the absorber also had to be increased accordingly to reduce the thermal load of the absorber.

[0004] Most existing high-energy synchrotron radiation sources use white light water-cooled adjustable apertures that employ two L-shaped grazing-incidence long absorbers, one upstream and one downstream. The extraction angle of the synchrotron radiation is adjusted by the two-dimensional relative motion of the two absorbers. The light-blocking principle is as follows: Figure 1 As shown. Meanwhile, heavy metal blades are installed on the downstream end face of each absorber to block high-energy light and improve the clarity of the light spot edges.

[0005] In existing technologies, the grazing incidence angle of the absorber is relatively small, and within the limited space of the front-end region, it can only receive small-sized synchrotron radiation. For larger-sized synchrotron radiation, the absorber needs to be very long along the optical axis, which increases the difficulty of obtaining raw materials, raises material costs, increases the difficulty of processing, and occupies a large amount of space in the front-end region. In addition, existing white light adjustable apertures are applicable to only a limited range of operating conditions and cannot cope with complex and variable operating conditions. Summary of the Invention

[0006] In view of the problems existing in the prior art, the purpose of this invention is to provide a high-precision white light adjustable aperture device for various operating conditions.

[0007] This invention mainly comprises two L-shaped absorber assemblies, one upstream and one downstream, which adjust the synchrotron radiation extraction angle through the relative movement of the two absorbers. To address various operating conditions of different types of insert light sources, this invention provides a novel design concept for an adjustable aperture absorber, offering a technical basis for beamline design across various insert types.

[0008] The technical solution adopted in this invention is:

[0009] A high-precision white light adjustable aperture device for various operating conditions is characterized by comprising two absorber assemblies connected in series along the light incident direction, namely an upstream absorber assembly and a downstream absorber assembly; each absorber assembly is respectively provided with an absorber assembly attitude adjustment mechanism, a two-dimensional precision displacement system, and a two-dimensional precision displacement system adjustment mechanism below it; wherein...

[0010] The upstream absorber assembly and the downstream absorber assembly are used to receive synchrotron radiation and adjust its extraction angle.

[0011] The two-dimensional precision displacement system adjustment mechanism is used to adjust the attitude of the two-dimensional precision displacement system to make it horizontal; and to adjust the height of the two-dimensional precision displacement system.

[0012] The two-dimensional precision displacement system is used to control the horizontal and vertical displacement of the absorber assembly.

[0013] The absorber assembly attitude adjustment mechanism is used to adjust the attitude of the absorber assembly.

[0014] Furthermore, the upstream absorber assembly is provided with a first through hole that tapers gradually from upstream to downstream and a first blind hole that tapers gradually and communicates with it in parallel; the upstream absorber assembly is provided with a second through hole that tapers gradually from upstream to downstream and a second blind hole that tapers gradually and communicates with it in parallel; the first blind hole and the second blind hole are symmetrical about the optical axis center; when the center line of the upstream absorber assembly is not coincident with the center line of the upstream absorber assembly, at least a portion of the first through hole and the second through hole are connected to form a light-transmitting hole, otherwise the light-transmitting hole is closed.

[0015] Furthermore, the upstream absorber assembly includes an upstream absorber body and a first welding plate, the first welding plate being welded to the upstream absorber body; the downstream absorber assembly includes a downstream absorber body and a second welding plate, the second welding plate being welded to the downstream absorber body.

[0016] The upstream absorber body has a first inclined surface machined upwards from the bottom of its upstream port along the incident direction. A second inclined surface is machined upwards from the top of the first inclined surface. The left side of the second inclined surface extends to the bottom of a third inclined surface, and the top of the third inclined surface extends to the top of the downstream port of the upstream absorber body. A flat surface is machined starting from the right side of a predetermined position within the second inclined surface and extending to the downstream port of the upstream absorber body, thus forming a first through hole and a first blind hole. The left side of the first inclined surface, the second inclined surface, and the third inclined surface constitute the bottom surface of the first blind hole. The right side of the first inclined surface, the second inclined surface, and the flat surface constitute the bottom surface of the first through hole. A first welding plate constitutes the top surface of the first through hole and the first blind hole. The lengths of the first and third inclined surfaces are shorter than those of the second inclined surface, and the angles of the first and third inclined surfaces are greater than those of the second inclined surface.

[0017] A fourth inclined surface is machined downwards from the top of the upstream port of the downstream absorber body along the incident direction. A fifth inclined surface is machined downwards from the top of the fourth inclined surface. The right side of the fifth inclined surface extends to the bottom of a sixth inclined surface downwards. The top of the sixth inclined surface extends to the top of the downstream port of the downstream absorber body. A second plane is machined starting from the left side of a predetermined position within the fifth inclined surface and extending to the downstream port of the downstream absorber body, thereby forming a second through hole and a second blind hole. The right side of the fourth and fifth inclined surfaces and the sixth inclined surface constitute the bottom surface of the second blind hole. The left side of the fourth and fifth inclined surfaces and the second plane constitute the bottom surface of the second through hole. The second welding plate constitutes the top surface of the second through hole and the second blind hole. The inclined surface lengths of the fourth and sixth inclined surfaces are less than those of the fifth inclined surface, and the inclined surface angles of the fourth and sixth inclined surfaces are greater than those of the fifth inclined surface.

[0018] Furthermore, the upstream absorber assembly includes a heavy metal blade; the heavy metal blade is installed on the downstream end face of the upstream absorber body to block high-energy light and obtain a clear light spot edge; after oxygen-free copper transition tubes are welded to both ends of the upstream absorber body, loose flanges and fixed flanges are welded to the upstream and downstream end faces respectively; the downstream absorber assembly includes a heavy metal blade, which is installed on the downstream end face of the downstream absorber body to block high-energy light and obtain a clear light spot edge; after oxygen-free copper transition tubes are welded to both ends of the downstream absorber body, loose flanges and fixed flanges are welded to the upstream and downstream end faces respectively.

[0019] Furthermore, it also includes a fixed support assembly; the downstream port of the upstream absorber assembly is connected to one end of the fixed support assembly via a first welded bellows, and the upstream port of the downstream absorber assembly is connected to the other end of the fixed support assembly via a second welded bellows; the upstream absorber assembly, the downstream absorber assembly, the first welded bellows, the second welded bellows, and the fixed support assembly are connected to form a vacuum-sealed environment.

[0020] Furthermore, the fixed support assembly includes a support main board 301, fasteners 302, support ribs 303, a support base plate 304, a height adjustment assembly 305, and a target seat 306; the fasteners 302 are fixed to the support main board 301, and a target seat 306 is provided above the fasteners 302; a support rib 303 is welded to each side of the support main board 301, and both the support main board 301 and the support ribs 303 are welded to the support base plate 304; the height adjustment assembly 305 is provided on the support base plate 304 for leveling and adjusting the height of the fixed support assembly.

[0021] Furthermore, the upper surface and both sides of the upstream absorber body and the downstream absorber body are provided with multiple target seats for position calibration and collimation.

[0022] Furthermore, the absorber posture adjustment mechanism includes an upper base plate 501, a lower base plate 502, a second height adjustment component 503, and a first translational adjustment component 504; the upper base plate 501 is mounted on the lower base plate 502 via the second height adjustment component 503 to install and fix the absorber component; the second height adjustment component 503 and the first translational adjustment component 504 are mounted above the lower base plate 502 to adjust the installation position of the absorber component.

[0023] Furthermore, the displacement system attitude adjustment mechanism includes a translation plate 701, a second translation adjustment component 702, an overall height adjustment mechanism 703, a base plate 704, and a welded base plate 705; the two-dimensional precision displacement system is mounted on the translation plate 701, and the position of the translation plate 701 is changed by adjusting the screws of the second translation adjustment component 702; both the translation plate 701 and the second translation adjustment component 702 are mounted on the base plate 704; the overall height adjustment mechanism 703 is mounted between the base plate 704 and the welded base plate 705, and is used to adjust the height of the overall device and level the two-dimensional precision displacement system.

[0024] Furthermore, the absorber body is provided with multiple cooling water channels; oxygen-free copper springs are placed inside the cooling water channels to increase water flow disturbance, thereby increasing convective heat transfer.

[0025] This invention relates to a high-precision white light adjustable aperture device for various operating conditions. It comprises two L-shaped absorber assemblies, upstream and downstream. The main body of the absorbers is made of a dispersed copper alloy, capable of withstanding high thermal loads while also receiving large light spots. Each absorber assembly has its own independent attitude adjustment system and a two-dimensional precision displacement system. Furthermore, it includes an intermediate fixed support assembly to prevent motion interference between the upstream and downstream absorbers.

[0026] The absorber assembly includes an upstream absorber assembly and a downstream absorber assembly. The main material of the absorber is dispersed copper. The absorber's interior is machined with a light-receiving bevel and a light-passing hole. The bevel angle and the size of the light-passing hole are determined based on the power density distribution of the light source in the insert and the size of the light spot at its location. To cope with different operating conditions and enable it to receive both high-power-density small light spots and large light spots within a certain length, the absorber's light-receiving surface is designed in segments: along the optical axis, the middle part of the absorber uses a small-angle light-receiving surface to receive higher-power-density light spots; while the two ends use large-angle light-receiving surfaces to receive lower-power-density light spots. However, due to the complex structure of the internal light-receiving surface, wire cutting cannot be used for machining. Therefore, the non-light-receiving side of the absorber is cut open, the internal light-receiving surface is machined, and the process opening is sealed by welding. The bevel angle (i.e., the angle of the light-receiving surface) refers to the angle between the bevel and the optical axis.

[0027] Both absorbers are provided with multiple circular cooling channels, and oxygen-free copper springs are placed inside the cooling channels to increase water flow disturbance and thus increase the convective heat transfer coefficient.

[0028] Both absorber bodies are welded to oxygen-free copper square tubes at both ends along the optical axis as transition tubes, and then welded to vacuum-sealed flanges.

[0029] The fixed support assembly is located between the upstream and downstream absorber assemblies and is connected to the vacuum-sealed flanges of the two absorber assemblies by welded bellows to avoid motion interference when the two absorbers move relative to each other.

[0030] The inner and outer diameters of the welded corrugated pipe are determined according to the size of the light spot to prevent the synchrotron radiation from hitting the inner wall of the corrugated pipe when the absorber undergoes lateral displacement. The free length of the corrugated pipe is determined according to the magnitude of the lateral displacement of the absorber.

[0031] Both upstream and downstream absorber components have an independently controlled two-dimensional precision displacement system, which serves as the motion drive device for the absorber components. This system controls the precise horizontal and vertical displacement of the absorber components, enabling precise adjustment of the synchrotron radiation extraction angle. The two-dimensional precision displacement system consists of two displacement stages: a horizontally driven electric linear displacement stage and a vertically driven electric lifting stage.

[0032] Both the absorber assembly and the two-dimensional precision displacement system are equipped with an attitude adjustment system. The attitude adjustment system consists of two layers. The lower layer is the attitude adjustment mechanism of the two-dimensional precision displacement system, which ensures that the installation attitude of the two-dimensional precision displacement system is horizontal, thereby ensuring the correct movement direction of the absorber assembly. The upper layer is the attitude adjustment mechanism of the absorber assembly, which consists of a height adjustment screw and a swing angle adjustment block. By adjusting the attitude of the absorber, the relative position of its initial position with the center of the optical axis is ensured, thus ensuring the correct position of the absorber assembly installed on the beamline.

[0033] Multiple target seats are provided on the upper surface and both sides of the absorber body and above the fixed support assembly for the position calibration and alignment of the device.

[0034] The absorber of this invention adopts a segmented absorber structure. The light-receiving surface is divided into light-receiving slopes at different angles according to the power density of synchrotron radiation under different operating conditions. This allows for the simultaneous reception of multiple types of synchrotron radiation, enabling the use of a single adjustable aperture device to handle various operating conditions within the limited space of the front-end area. Specific features include:

[0035] 1. The absorber of the adjustable aperture is made of diffused copper alloy or chromium zirconium copper alloy and can be welded to the vacuum flange through an oxygen-free copper transition tube. The internal light passage is in an ultra-high vacuum environment.

[0036] 2. The light-receiving surfaces of both the upstream and downstream absorbers are designed as segmented, multi-angle light-receiving surfaces. The angle size is determined according to the power density of the synchrotron radiation light, which can meet the needs of receiving various types of synchrotron radiation light spots within a limited installation space.

[0037] 3. After the light-receiving surface inside the absorber body is processed from the non-light-receiving side of the absorber, a welding plate is welded to this side to seal the absorber and form a sealed vacuum environment.

[0038] 4. The entire device has two sets of attitude adjustment mechanisms: one for the absorber assembly and the other for the displacement system. These two attitude adjustment mechanisms together ensure the accuracy of the absorber's initial position in the optical path and the accuracy of its direction of motion.

[0039] Compared with the prior art, the advantages of the present invention are as follows:

[0040] First, the absorber in this invention is made of diffused copper material or chromium zirconium copper material, and is equipped with water cooling pipes inside, which can avoid excessive thermal deformation caused by high temperature of the absorber when blocking light, thus affecting the light blocking effect, and at the same time ensure the service life of the adjustable aperture device.

[0041] Second, the light-receiving surfaces of the upstream and downstream absorbers are designed as segmented, multi-angled light-receiving slopes, which can meet the needs of receiving various types of synchrotron radiation spots within a limited installation space and can cope with various operating conditions.

[0042] Third, the two attitude adjustment mechanisms together ensure the accuracy of the initial position of the absorber in the optical path and the accuracy of its direction of motion. Attached Figure Description

[0043] Figure 1 This is a schematic diagram of a traditional L-shaped grazing incidence long absorber.

[0044] Figure 2 This is an example of a white light adjustable aperture device according to the present invention.

[0045] Figure 3 This is a structural diagram of the upstream absorber assembly.

[0046] Figure 4 for Figure 3 Sectional view of AA.

[0047] Figure 5 This is a structural diagram of the upstream absorber.

[0048] Figure 6 Cross-sectional view of the light-receiving surface structure inside the upstream absorber body.

[0049] Figure 7 A schematic diagram of the upstream absorber receiving a small spot of high power density light.

[0050] Figure 8 This is a schematic diagram of the upstream absorber receiving a large light spot with low power density.

[0051] Figure 9 This is a structural diagram of the downstream absorber assembly.

[0052] Figure 10 This is a structural diagram of the fixed support component.

[0053] Figure 11 This is a structural diagram of the absorber attitude adjustment mechanism.

[0054] Figure 12 This is a diagram of a two-dimensional precision displacement system.

[0055] Figure 13 This is a structural diagram of the attitude adjustment mechanism of the displacement system. Detailed Implementation

[0056] The present invention will now be described in further detail with reference to the accompanying drawings. The examples given are only for explaining the present invention and are not intended to limit the scope of the present invention.

[0057] like Figure 2 The illustrated white light adjustable aperture device of this invention mainly includes an upstream absorber assembly 1, a downstream absorber assembly 2, a fixed support assembly 3, a welded bellows 4, an absorber attitude adjustment mechanism 5, a two-dimensional precision displacement system 6, and a displacement system attitude adjustment mechanism 7. The upstream absorber assembly 1 and the downstream absorber assembly 2 are connected by two welded bellows 4 to form a vacuum-sealed environment. The fixed support assembly 3 is installed on the flange of one of the welded bellows 4 to fix and support the welded bellows 4. The absorber attitude adjustment mechanism 5 is installed below the absorber assembly to adjust the position of the absorber in the optical path. The two-dimensional precision displacement system is installed below the absorber attitude adjustment mechanism 5 to control the precise displacement of the absorber assembly in both horizontal and vertical directions. The displacement system attitude adjustment mechanism 7 is installed below the two-dimensional precision displacement system 6 to adjust the installation position of the displacement system and the overall height of the device.

[0058] like Figure 3 The upstream absorber assembly 1 shown mainly comprises an upstream absorber body 101, a welding plate 102, a fixed bracket 103, an oxygen-free copper transition pipe 104, a loose flange 105, a fixed flange 106, a target seat 107, a water connector 108, and a heavy metal blade 109. The upstream absorber body 101 is integrally machined from a dispersed copper alloy material. For ease of installation and fixation, the outer surface of the absorber body is hexahedral. The welding plate 102 is welded to the upstream absorber body to form a sealed vacuum environment. The material can be dispersed copper alloy or oxygen-free copper. After welding the oxygen-free copper transition pipes 104 to both ends of the upstream absorber body 101, loose flanges 105 and fixed flanges 106 are welded upstream and downstream respectively to connect with upstream and downstream equipment to form a sealed vacuum environment. The upstream absorber body 101 is mounted on the absorber attitude adjustment system 5 via the fixed bracket 103. Multiple target seats 107 are provided on the upper surface and both sides of the upstream absorber body 101. The upstream absorber body 101 is equipped with a circular cooling water pipe, which forms a cooling water inlet and outlet circuit through a water connector 108. The heavy metal blade 109 is installed on the downstream end face of the upstream absorber body 101. The material can be heavy metals such as tungsten or tantalum, which is used to block high-energy light and at the same time obtain a clearer light spot edge.

[0059] like Figure 4 As shown Figure 3 In the AA cross-sectional view, it can be seen that the longitudinal section of the upstream absorber body 101 along the optical axis has three gradually changing angles. Since the internal light-receiving surface cannot be processed by wire cutting, after the internal light-receiving surface is processed from the upper surface of the upstream absorber body 101, the welding plate 102 is welded to the upper surface of the upstream absorber body 101 to seal the process port and form a closed vacuum environment.

[0060] like Figure 5 The image shows the upstream absorber body 101, which has an internal light-passing hole forming an L-shaped light-receiving bevel. The lower and left sides of the upstream absorber body 101 are light-receiving surfaces. The left light-receiving surface is composed of bevel 1, bevel 2, and bevel 3, while the lower light-receiving surface is composed of bevel 1 and bevel 2. The upper right side has a rectangular light-passing hole, the size of which is determined based on the size of the synchrotron radiation spot, and the bevel angle is determined by the power density of the synchrotron radiation light. Figure 5 The middle inclined plane 2 is a small-angle light-receiving inclined plane, used to receive small light spots with high power density. Inclined planes 1 and 3 are large-angle light-receiving inclined planes with larger light-receiving sizes, which can receive large light spots with lower power density. Multiple circular cooling water channels are provided on both sides of the L-shaped light-receiving surface.

[0061] like Figure 6 The diagram shows an internal cross-sectional view of the upstream absorber body 101, which provides a more intuitive view of the distribution of the three inclined surfaces. Inclined surfaces 1 and 3 are large-angle light-receiving surfaces located at both ends of the upstream absorber body 101; inclined surface 2 is a small-angle light-receiving surface located in the middle of the upstream absorber body 101.

[0062] like Figure 7 The diagram illustrates an example of an upstream absorber 101 receiving a small, high-power-density light spot. The synchrotron radiation spot only falls on the small-angle receiving slope 2; the large-angle slopes 1 and 3 do not receive the spot. Furthermore, when the spot falls on slope 1, a certain margin is maintained in both the vertical and horizontal directions to prevent the synchrotron radiation spot from shifting and causing the high-power-density spot to fall on the large-angle slope.

[0063] like Figure 8 The diagram illustrates an example of an upstream absorber body 101 receiving a large light spot with low power density. The synchrotron radiation spot is distributed across three inclined receiving surfaces, with margins in both the horizontal and vertical directions to prevent spot offset. Since the power density of the large light spot is low, only a large-angle receiving surface is required. This receiving surface design ensures that it can receive small light spots with high power density while also receiving large light spots within the allowable length of the absorber.

[0064] like Figure 9 The downstream absorber assembly 2 is shown, and its structure is roughly the same as that of the upstream absorber assembly 1. The difference is that the downstream absorber body 201 receives light from the top and right sides, and its L-shaped light-receiving surface is exactly opposite to the upstream absorber body 101. The welding plate 202 is welded to the lower surface of the downstream absorber body 201. When the upstream and downstream absorber assemblies are aligned in the optical axis direction, they are in a state of complete light blocking (no light transmission). When light transmission is required, the two absorbers can be moved in a two-dimensional direction as needed to obtain a rectangular light-transmitting hole.

[0065] like Figure 10The diagram shows the fixed support assembly 3, used to support the flange of the welded bellows 4, preventing motion interference when the upstream absorber assembly 1 and the downstream absorber assembly 2 move relative to each other. The main structural components are a support main plate 301, fasteners 302, support ribs 303, a support base plate 304, a first height adjustment assembly 305, a target seat 306, and fastening screws 307. The support main plate 301 provides primary support, with a hole drilled in the middle to reduce weight. The fasteners 302 are fixed to the support main plate 301 by the fastening screws 307, together securing the welded bellows flange. A target seat 306 is also provided above for alignment of the device. Four support ribs 303 are welded to both sides of the support main plate 301 to increase its rigidity. Both the support main plate 301 and the support ribs 303 are welded to the support base plate 304. The first height adjustment assembly 305 is installed below the overall assembly and is used to level and adjust the height of the entire assembly.

[0066] like Figure 11 The absorber attitude adjustment mechanism 5 shown mainly includes an upper base plate 501, a lower base plate 502, a second height adjustment component 503, and a first translational adjustment component 504. The upper base plate 501 is used to install and fix the upstream absorber component 1 or the downstream absorber component 2, and a weight reduction hole can be machined in its center to reduce weight depending on the load. The second height adjustment component 503 and the first translational adjustment component 504 are installed above the lower base plate 502 to adjust the installation position of the upstream absorber component 1 or the downstream absorber component 2.

[0067] like Figure 12 The figure shows a two-dimensional precision displacement system 6, which mainly includes an electric lifting platform 601 and an electric linear displacement platform 602, which respectively control the precise movement of the absorber assembly in the vertical and horizontal directions, thereby realizing the precise adjustment of the synchrotron radiation extraction angle of the device.

[0068] like Figure 13 The displacement system attitude adjustment mechanism 7 is shown, installed below the overall device. Its main structure includes a translation plate 701, a second translation adjustment component 702, an overall height adjustment mechanism 703, a base plate 704, and a welded base plate 705. The two-dimensional precision displacement system 6 is mounted on the translation plate 701, and its position is changed by adjusting the screws of the second translation adjustment component 702. Both the translation plate 701 and the second translation adjustment component 702 are mounted on the base plate 704. The overall height adjustment mechanism 703 is installed between the base plate 704 and the welded base plate 705 to adjust the height of the overall device and simultaneously level the two-dimensional precision displacement system 6, ensuring accurate movement direction.

[0069] For beamlines with multiple operating conditions, multiple adjustable aperture devices can be used to receive different types of synchrotron radiation spots. However, compared to the present invention, the processing cost of multiple devices is higher, the space occupied is larger, and the linkage between multiple devices should be noted, and the control scheme is also relatively complex.

[0070] The present invention can receive both large light spots with low power and small light spots with high power, while absorbing excess heat load. It can also precisely adjust the extraction angle of synchrotron radiation light using the same device under various operating conditions within a limited space in the front-end area, according to the user's needs.

[0071] Although specific embodiments of the invention have been disclosed for illustrative purposes to aid in understanding and implementing the invention, those skilled in the art will understand that various substitutions, variations, and modifications are possible without departing from the spirit and scope of the invention and the appended claims. Therefore, the invention should not be limited to the content disclosed in the preferred embodiments, and the scope of protection claimed by the invention is defined by the claims.

Claims

1. A high-precision white light adjustable aperture device for various operating conditions, characterized in that, It includes two absorber assemblies connected in series along the light incident direction, namely an upstream absorber assembly and a downstream absorber assembly; each absorber assembly is respectively provided with an absorber assembly attitude adjustment mechanism, a two-dimensional precision displacement system, and a two-dimensional precision displacement system adjustment mechanism below it; wherein, The upstream absorber assembly and the downstream absorber assembly are used to receive synchrotron radiation and adjust its extraction angle; The two-dimensional precision displacement system adjustment mechanism is used to adjust the attitude of the two-dimensional precision displacement system to make it horizontal; and to adjust the height of the two-dimensional precision displacement system. The two-dimensional precision displacement system is used to control the horizontal and vertical displacement of the absorber assembly. The absorber assembly posture adjustment mechanism is used to adjust the posture of the absorber assembly; the absorber assembly posture adjustment mechanism includes an upper base plate (501), a lower base plate (502), a second height adjustment component (503), and a first translational adjustment component (504); the upper base plate (501) is mounted on the lower base plate (502) through the second height adjustment component (503) to install and fix the absorber assembly; the second height adjustment component (503) and the first translational adjustment component (504) are mounted above the lower base plate (502) to adjust the installation position of the absorber assembly.

2. The high-precision white light adjustable aperture device according to claim 1, characterized in that, The upstream absorber assembly has a first through hole that tapers gradually from upstream to downstream and a first blind hole that tapers gradually and communicates with it in parallel; the upstream absorber assembly has a second through hole that tapers gradually from upstream to downstream and a second blind hole that tapers gradually and communicates with it in parallel; the first blind hole and the second blind hole are symmetrical about the optical axis center; when the center line of the upstream absorber assembly is not coincident with the center line of the upstream absorber assembly, at least a portion of the first through hole and the second through hole are connected to form a light-transmitting hole, otherwise the light-transmitting hole is closed.

3. The high-precision white light adjustable aperture device according to claim 2, characterized in that, The upstream absorber assembly includes an upstream absorber body and a first welding plate, wherein the first welding plate is welded to the upstream absorber body; the downstream absorber assembly includes a downstream absorber body and a second welding plate, wherein the second welding plate is welded to the downstream absorber body. The upstream absorber body has a first inclined surface machined upwards from the bottom of its upstream port along the incident direction. A second inclined surface is machined upwards from the top of the first inclined surface. The left side of the second inclined surface extends to the bottom of a third inclined surface, and the top of the third inclined surface extends to the top of the downstream port of the upstream absorber body. A flat surface is machined starting from the right side of a predetermined position within the second inclined surface and extending to the downstream port of the upstream absorber body, thus forming a first through hole and a first blind hole. The left side of the first inclined surface, the second inclined surface, and the third inclined surface constitute the bottom surface of the first blind hole. The right side of the first inclined surface, the second inclined surface, and the flat surface constitute the bottom surface of the first through hole. A first welding plate constitutes the top surface of the first through hole and the first blind hole. The lengths of the first and third inclined surfaces are shorter than those of the second inclined surface, and the angles of the first and third inclined surfaces are greater than those of the second inclined surface. A fourth inclined surface is machined downwards from the top of the upstream port of the downstream absorber body along the incident direction. A fifth inclined surface is machined downwards from the top of the fourth inclined surface. The right side of the fifth inclined surface extends to the bottom of a sixth inclined surface downwards. The top of the sixth inclined surface extends to the top of the downstream port of the downstream absorber body. A second plane is machined starting from the left side of a predetermined position within the fifth inclined surface and extending to the downstream port of the downstream absorber body, thereby forming a second through hole and a second blind hole. The right side of the fourth and fifth inclined surfaces and the sixth inclined surface constitute the bottom surface of the second blind hole. The left side of the fourth and fifth inclined surfaces and the second plane constitute the bottom surface of the second through hole. The second welding plate constitutes the top surface of the second through hole and the second blind hole. The inclined surface lengths of the fourth and sixth inclined surfaces are less than those of the fifth inclined surface, and the inclined surface angles of the fourth and sixth inclined surfaces are greater than those of the fifth inclined surface.

4. The high-precision white light adjustable aperture device according to claim 3, characterized in that, The upstream absorber assembly includes a heavy metal blade; the heavy metal blade is installed on the downstream end face of the upstream absorber body to block high-energy light and obtain a clear light spot edge; after oxygen-free copper transition tubes are welded to both ends of the upstream absorber body, loose flanges and fixed flanges are welded to the upstream and downstream end faces respectively; the downstream absorber assembly includes a heavy metal blade, which is installed on the downstream end face of the downstream absorber body to block high-energy light and obtain a clear light spot edge; after oxygen-free copper transition tubes are welded to both ends of the downstream absorber body, loose flanges and fixed flanges are welded to the upstream and downstream end faces respectively.

5. The high-precision white light adjustable aperture device according to claim 1, characterized in that, It also includes a fixed support assembly; the downstream port of the upstream absorber assembly is connected to one end of the fixed support assembly via a first welded bellows, and the upstream port of the downstream absorber assembly is connected to the other end of the fixed support assembly via a second welded bellows; the upstream absorber assembly, the downstream absorber assembly, the first welded bellows, the second welded bellows, and the fixed support assembly are connected to form a vacuum-sealed environment.

6. The high-precision white light adjustable aperture device according to claim 5, characterized in that, The fixed support assembly includes a support main board (301), fasteners (302), support ribs (303), a support base plate (304), a height adjustment assembly (305), and a target seat (306). The fasteners (302) are fixed to the support main board (301), and a target seat (306) is provided above the fasteners (302). A support rib (303) is welded to each side of the support main board (301), and the support main board (301) and the support ribs (303) are both welded to the support base plate (304). The height adjustment assembly (305) is provided on the support base plate (304) to level and adjust the height of the fixed support assembly.

7. The high-precision white light adjustable aperture device according to claim 3, characterized in that, Multiple target seats are provided on the upper surface and both sides of the upstream absorber body and the downstream absorber body for position calibration and collimation.

8. The high-precision white light adjustable aperture device according to claim 1, characterized in that, The displacement system attitude adjustment mechanism includes a translation plate (701), a second translation adjustment component (702), an overall height adjustment mechanism (703), a base plate (704), and a welded base plate (705). The two-dimensional precision displacement system is installed on the translation plate (701), and the position of the translation plate (701) is changed by adjusting the screws of the second translation adjustment component (702). Both the translation plate (701) and the second translation adjustment component (702) are installed on the base plate (704). The overall height adjustment mechanism (703) is installed between the base plate (704) and the welded base plate (705) to adjust the height of the overall device and level the two-dimensional precision displacement system.

9. The high-precision white light adjustable aperture device according to claim 1, characterized in that, The absorber body is provided with multiple cooling water channels; oxygen-free copper springs are placed inside the cooling water channels to increase water flow disturbance, thereby increasing convective heat transfer.

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