A business process control method

Through the combination of business state machine and task state machine, the problems of insufficient code reusability and scalability in the multi-workstation business processing of the lithography machine are solved, efficient business state management and task execution are achieved, and the flexibility and efficiency of the lithography machine system are improved.

CN117270841BActive Publication Date: 2025-10-03NEW YIDONG (SHANGHAI) TECH CO LTD
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Patent Information

Application Number
CN202311087273.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-08-28
Publication Date
2025-10-03
Estimated Expiration
2043-08-28

AI Technical Summary

Technical Problem

In the business processing between multiple workstations of existing lithography machines, the logical judgment method leads to poor code reusability and inconvenient maintenance, while the object-oriented method has the problem of poor code scalability and flexibility.

Method used

By combining the business state machine and the task state machine, the business state set and task chain are formed by parsing the business processing request, and the tasks are sorted and issued in sequence according to the business logic to achieve independent encapsulation and flexible management of business states and tasks.

Benefits of technology

The code reusability and scalability of the lithography machine system are improved, ensuring that changes in business status do not affect other statuses, and improving the system's transmission and control efficiency and flexibility.

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Abstract

The present invention provides a business process control method, comprising: responding to a business processing request, parsing the business processing request to determine the business state associated with the business processing request and encapsulating the associated business state to form a business state set; sorting the business states included in the business state set according to business logic to form a business state chain; determining tasks corresponding to the business states in the business state chain, sorting the tasks according to business logic to form a task chain, and sequentially issuing the tasks according to the order included in the task chain to execute the corresponding operations. The present invention ensures code reusability, scalability, and flexibility.
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Description

Technical Field

[0001] The present invention relates to the field of system control technology, and in particular to a business process control method. Background Art

[0002] A photolithography machine is a precision device used in semiconductor manufacturing. It uses an ultraviolet light source to illuminate a pre-fabricated photoresist pattern and transfer the pattern onto a silicon wafer or other semiconductor material. A photolithography machine primarily consists of a light source system, an optical lens system, a mask system, a silicon wafer system, and a control system. The control system is used to control the movement and operation of various components, as well as monitor and adjust various parameters during the photolithography process. Specifically, when multiple workstations are involved, there is a need to control the transport of the mask / silicon wafer, and the control system then controls the movement and operation between the various workstations.

[0003] Current lithography machines mainly use the following two solutions for complex business processing between multiple workstations: one is through logical judgment, and the other is through object-oriented approach. Specifically, in the logical judgment approach, the code logic is written in series from top to bottom based on the developer's understanding of the business logic. Although the use of a large amount of logical judgment makes the code highly readable and clear, the code reusability is poor. At the same time, the large amount of code stacking causes maintenance inconvenience. In the object-oriented approach, the problem is objectified during the problem handling process. The upper-level module only focuses on the problem handling results, and the lower-level module encapsulates the problem handling. In order to improve the reusability of the code and reduce the amount of code through layered encapsulation, when business expansion is required, the existing code needs to be modified, which leads to poor scalability and flexibility of the code.

[0004] In view of this, it is necessary to improve the lithography machine business process control method in the existing technology to solve the above problems. Summary of the Invention

[0005] The purpose of the present invention is to solve the problems of poor code reusability and inconvenient maintenance in the prior art when using a logical judgment method to process complex business operations of multiple workstations of a lithography machine, and the problem of poor code scalability and flexibility when using an object-oriented method.

[0006] To achieve the above objectives, the present invention provides a business process control method, comprising:

[0007] In response to the business processing request, the business processing request is parsed to determine a business state associated with the business processing request and the associated business state is encapsulated to form a business state set;

[0008] Sort the business states contained in the business state set according to the business logic to form a business state chain;

[0009] The tasks corresponding to the business states in the business state chain are determined and the tasks are sorted according to the business logic to form a task chain. The tasks are issued in sequence according to the order included in the task chain to perform operations corresponding to the tasks.

[0010] As a further improvement of the present invention, the service logic includes: service state parallel logic, service state serial logic, task parallel logic and task serial logic, and the service logic is pre-configured by the main control end.

[0011] As a further improvement of the present invention, the business processing request is formed in an external module, and the external module sends the business processing request to the control module, and the control module responds to the business processing request and parses the business processing request.

[0012] As a further improvement of the present invention, the business processing request is parsed by the control module to obtain different business states stored in the business state machine. The control module determines the business state associated with the business processing request from different business states based on the parsing result of the business processing request, and performs an encapsulation operation on the associated business state to encapsulate to form a business state set, and sends the business state set to the business state machine.

[0013] As a further improvement of the present invention, the sorting of the service states contained in the service state set according to the service logic is implemented by the service management module, and is specifically as follows:

[0014] The service management module performs a monitoring operation on the service state machine. When a new service state set is detected in the service state machine, the service states included in the service state set are sorted according to the service logic to form a service state chain.

[0015] As a further improvement of the present invention, tasks corresponding to the service states in the service state chain are determined to be implemented by a task state machine, and the task state machine stores tasks corresponding to different service states.

[0016] As a further improvement of the present invention, the sorting of tasks according to the business logic is implemented by the task management module, and is specifically as follows:

[0017] The task management module performs monitoring operations on the task state machine. When a new business state is detected in the task state machine, the tasks corresponding to the business state are sorted according to the business logic to form a task chain, and the tasks are sent to the hardware devices in sequence according to the order contained in the task chain.

[0018] As a further improvement of the present invention, when inserting a service state into a service state chain, a code corresponding to the service state to be inserted and a code set corresponding to the service state chain are determined, and the code corresponding to the service state to be inserted is inserted into the code set to form a new code set, so that the service state is issued based on the new code set.

[0019] or,

[0020] When deleting a business state in the business state chain, determine the code corresponding to the business state to be deleted and the code set corresponding to the business state chain, delete the code corresponding to the business state to be deleted from the code set to form a new code set, and issue the business state based on the new code set.

[0021] As a further improvement of the present invention, when an error occurs when a hardware device performs an operation corresponding to a task, an error message is generated according to the error situation and the error message is reported to the task state machine. When the task management module monitors the newly added error message in the task state machine, the error message is analyzed to determine the error level corresponding to the error message, and whether the error level reaches a first preset threshold value.

[0022] If so, the task state machine reports the error information and error level to the business state machine;

[0023] If not, the task management module generates a first repair instruction according to the error condition, so that the hardware device executes a repair operation corresponding to the first repair instruction.

[0024] As a further improvement of the present invention, when the task state machine reports both the error information and the error level to the business state machine, the business management module monitors the new error information in the business state machine and determines whether the error level reaches a second preset threshold;

[0025] If so, the business state machine reports the error information and error level to the control module;

[0026] If not, the service management module generates a second repair instruction according to the error situation, so that the hardware device executes the repair operation corresponding to the second repair instruction.

[0027] Compared with the prior art, the present invention has the following beneficial effects:

[0028] The business state machine issues business states in sequence according to the order contained in the business state chain. Each business state corresponds to a set of independent codes. Multiple sets of independent codes form the code set corresponding to the business state chain. When a business state needs to be added or deleted, the business state is directly added or deleted to the code set to form a new code set. Therefore, changes in the business state will not cause changes in other business states, and there is no need to rewrite the entire code, thereby ensuring the reusability of the code. The business state machine always issues business states in sequence according to the order contained in the business state chain. Therefore, changes in the business state will not cause changes in the business state machine itself, which can further ensure the reusability of the code. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 A topological diagram of a lithography system according to the present invention;

[0030] Figure 2 This is a flow chart of a business process control method shown in the present invention;

[0031] Figure 3 A topology diagram when an error occurs when a hardware device performs a task corresponding to an operation;

[0032] Figure 4 A flowchart for determining whether to perform a repair operation based on whether the error level reaches a first preset threshold;

[0033] Figure 5 A flowchart for determining whether to perform a repair operation based on whether the error level corresponding to the error information reaches a second preset threshold;

[0034] Figure 6 This is a topology diagram of a business process control system according to the present invention. DETAILED DESCRIPTION

[0035] The present invention is described in detail below with reference to the various embodiments shown in the accompanying drawings, but it should be noted that these embodiments are not limitations of the present invention, and any equivalent transformations or substitutions in functions, methods, or structures made by ordinary technicians in this field based on these embodiments are all within the scope of protection of the present invention.

[0036] Ginseng Figures 1 to 5As shown, the present invention shows a specific implementation method of a business process control method (hereinafter referred to as the "method"), and specifically, in response to a business processing request, the business processing request is parsed to determine the business status associated with the business processing request and the associated business status is encapsulated to form a business status set; the business status contained in the business status set is sorted according to the business logic to form a business status chain; the tasks corresponding to the business states in the business status chain are determined and the tasks are sorted according to the business logic to form a task chain, and the tasks are issued in sequence according to the order contained in the task chain to perform the corresponding operations of the tasks. The application scenario of this method is the complex business processing between multiple workstations of the lithography machine, and it is specifically applied to the control system inside the lithography machine (the applicant uses the lithography machine system 10 as an example for exemplary explanation in the following description), so as to solve the problems of poor code reusability and unchanged maintenance in the prior art using the logical judgment method, and the problems of insufficient code scalability and flexibility in the object-oriented method.

[0037] Ginseng Figure 1 As shown, an external module 11, a control module 12, a business state machine 13, a business manager 14, a task state machine 15, a task manager 16 and a hardware device 17 are deployed in the lithography machine system 10; the control module 12 is connected to the external module 11 and the business state machine 13 respectively, the business state machine 13 is connected to the business manager 14 and the task state machine 15 respectively, and the task state machine 15 is connected to the task manager 16 and the hardware device 17 respectively. Among them, the external module 11 is used to respond to user operations to form a business processing request, and send the business processing request to the control module 12; the control module 12 is used to receive and respond to the business processing request sent by the external module 11, parse the business processing request to determine the business status associated with the business processing request and encapsulate the associated business status to form a business status set, and send the business status set to the business state machine 13; the business manager 14 is used to sort the business states contained in the business status set according to the business logic to form a business status chain; the business state machine 13 is used to send the business states to the task state machine 15 in sequence according to the order contained in the business status chain; the task manager 16 is used to sort the tasks corresponding to the business states in the business status chain according to the business logic to form a task chain; the task state machine 15 is used to determine the tasks corresponding to the business states in the business status chain, and send tasks to the hardware device 17 in sequence according to the order contained in the task chain; the hardware device 17 is used to receive the tasks sent by the task state machine 15 and perform the corresponding operations of the tasks.

[0038] It should be noted that the business state machine 13 issues business states in sequence according to the order contained in the business state chain. Each business state corresponds to a set of independent codes, and a code set corresponding to the business state chain is formed by multiple sets of independent codes. When a business state needs to be added or deleted, the business state is directly added or deleted to the code set to form a new code set. Therefore, changes in the business state will not cause changes in other business states, and there is no need to rewrite the entire code, thereby ensuring the reusability of the code. The business state machine 13 always issues business states in sequence according to the order contained in the business state chain. Therefore, changes in the business state will not cause changes in the business state machine 13 itself, thereby further ensuring the reusability of the code. Each module in the lithography system 10 (i.e., external module 11, control module 12, business state machine 13, business manager 14, task state machine 15, task manager 16, and hardware device 17) performs its own functions and is an independent entity. When a workstation needs to be added, only the corresponding business state and action need to be added. Therefore, changes in a single module will not cause a chain reaction in other modules, thereby ensuring the scalability and flexibility of the lithography system 10 business. Business states and tasks are sorted according to business logic to form business state chains and task chains respectively. The business logic includes business state parallel logic, business state serial logic, task parallel logic, and task serial logic. The order of issuing business states and tasks is adjusted based on the business logic, thereby improving the transmission and control efficiency of the entire lithography system 10.

[0039] At the same time, the aforementioned external module 11 is used to respond to user operations to form business processing requests, including direct responses to user operations and indirect responses to user operations. Specifically, when the external module 11 directly responds to user operations, the external module 11 can be, for example, a human-computer interaction page, and the user directly performs corresponding operations through the external module 11 (i.e., the human-computer interaction interface) to form a business processing request; when the external module 11 indirectly responds to user operations, the external module 11 can be, for example, a module that can accept instructions from other control devices, and for example, after the operation corresponding to a business processing request is completed, the next business processing request is given to the external module 11 to indirectly respond to the user operation. This embodiment does not limit the specific type of the external module 11, as long as it can form a business processing request and send the business processing request to the control module 12.

[0040] Ginseng Figure 2 As shown, a business process control method shown in the present invention includes the following steps S1 to S3.

[0041] Step S1: In response to a business processing request, the business processing request is parsed to determine a business state associated with the business processing request and the associated business state is encapsulated to form a business state set.

[0042] Exemplarily, a business processing request is generated by external module 11 and sent to control module 12. Control module 12 then responds to the request and parses it. Control module 12 parses the request by obtaining the different business states stored in business state machine 13.

[0043] Specifically, a user issues a business processing request through the external module 11, which then sends the business processing request to the control module 12. The control module 12 receives and responds to the business processing request, obtains the different business states stored in the business state machine 13, parses the business processing request, determines the business state associated with the business processing request from the different business states based on the parsed result of the business processing request, performs an encapsulation operation on the associated business states to form a business state set, and sends the business state set to the business state machine 13. The business state associated with the business processing request refers to the business state required or dependent on for executing the operation corresponding to the business processing request.

[0044] It should be noted that the business state machine 13 pre-stores different business states, which are pre-stored by the user. When adding a work station, the user stores the business state corresponding to the work station in the business state machine 13 for reading by the control module 12. For example, if the hardware device 17 includes four work stations, namely RM (i.e., mask storage area), PRE (i.e., pre-alignment station), RS (i.e., mask work station), and CS (i.e., mask buffer station), the business states stored in the business state machine 13 include RM plate retrieval state, RM plate placement state, PRE plate retrieval state, PRE plate placement state, RS plate retrieval state, RS plate placement state, CS plate retrieval state, and CS plate placement state. The control module 12 determines the business state associated with the business processing request from the different business states stored in the business state machine 13 based on the analysis result of the business processing request, and takes the above-mentioned eight business states as an example that are all business states associated with the business processing request, and performs encapsulation operations on the RM version retrieval state, RM version release state, PRE version retrieval state, PRE version release state, RS version retrieval state, RS version release state, CS version retrieval state and CS version release state, so as to form a business state set by encapsulating the eight business states, and send the business state set to the business state machine 13.

[0045] Step S2: Sort the service states included in the service state set according to the service logic to form a service state chain.

[0046] Exemplarily, the sorting of the service states included in the service state set according to the service logic is implemented by the service management module.

[0047] Specifically, the business management module 14 performs a monitoring operation on the business state machine 13 in real time. After the control module 12 sends the business state set to the business state machine 13, it is monitored by the business management module 13 (that is, when the business management module 14 monitors the newly added business state set in the business state machine 13), and the business states contained in the business state set are sorted according to the business logic to form a business state chain. The business state machine 13 sends the business states to the task state machine 15 in sequence according to the order contained in the business state chain. Among them, the business logic is configured by the main control end (i.e., the user) and is used to determine the order of issuing business states and the order of issuing tasks, including: business state parallel logic, business state serial logic, task parallel logic and task serial logic. If there are two business states that can be issued together (i.e., can be executed together), the corresponding relationship between the two business states that can be issued together is defined as a parallel relationship in the business state chain, and they are issued together to the task state machine 15; at the same time, if there are two tasks that can be issued together (i.e., can be executed together), the corresponding relationship between the two tasks that can be issued together is defined as a parallel relationship in the task chain, and they are issued together to the hardware device 17, so as to reduce unnecessary transmission and control time, thereby improving the transmission and control efficiency of the entire lithography machine system 10.

[0048] For example, taking the aforementioned business states associated with the business processing request including the aforementioned eight business states as an example, the eight business states are sorted according to the business logic, and the sorting is to determine the order in which the business states are sent from the business state machine 13 to the task state machine 15. The first is the RM version retrieval state, the second is the PRE version retrieval state, the third is the PRE version release state, the fourth is the RS version retrieval state, the fifth is the RS version release state, the sixth is the CS version retrieval state, the seventh is the CS version release state, and the eighth is the RM version release state, thereby forming a business state chain. The business state machine 13 sends the business states to the task state machine 15 in sequence according to the order contained in the business state chain, that is, the first one sends the RM version retrieval state to the task state machine 15, the second one sends the PRE version retrieval state to the task state machine 15, and so on.

[0049] It should be noted that each business state corresponds to a set of independent codes. When inserting a business state in the business state chain, the code corresponding to the business state to be inserted and the code set corresponding to the business state chain are determined, and the code corresponding to the business state to be inserted is inserted into the code set to form a new code set, and then the business state is issued based on the new code set. Similarly, when deleting a business state in the business state chain, the code corresponding to the business state to be deleted and the code set corresponding to the business state chain are determined, and the code corresponding to the business state to be deleted is deleted from the code set to form a new code set, and then the business state is issued based on the new code set. By corresponding each business state to a set of independent codes, a new business state can be inserted into the code set corresponding to the business state chain, or a business state can be deleted. The codes corresponding to the remaining business states in the business state chain will not change. This not only ensures the reusability of the code, but also ensures the scalability and flexibility of the lithography machine system 10 business.

[0050] Step S3: determine the tasks corresponding to the business states in the business state chain and sort the tasks according to the business logic to form a task chain, and issue the tasks in sequence according to the order included in the task chain to execute the operations corresponding to the tasks.

[0051] For example, determining the tasks corresponding to the business states in the business state chain is implemented by task state machine 15. Tasks corresponding to different business states are pre-stored in task state machine 15 by the user. When adding a workstation and a corresponding business state, the user stores the task corresponding to the business state in task state machine 15, allowing task state machine 15 to determine the corresponding task based on the business state. Task management module 16 implements the sorting of tasks according to business logic.

[0052] Specifically, after the business state machine 13 sends the business states to the task state machine 15 in sequence according to the order included in the business state chain, the task state machine 15 determines the tasks corresponding to the business states in the business state chain based on the tasks corresponding to the different business states stored in it (i.e., the task state machine 15). The task manager 16 performs a monitoring operation on the task state machine 15 in real time. When a new business state is detected in the task state machine 15, it obtains the task corresponding to the business state determined by the task state machine 15, sorts the tasks corresponding to the business state according to the business logic to form a task chain, and sends the tasks to the hardware device 17 in sequence according to the order included in the task chain, so that the hardware device 17 can perform the corresponding operation of the task.

[0053] For example, taking the above eight business states as an example, the RM plate-taking state corresponds to five tasks and are: robot shifting, box opening module opening, scanning module shifting, scanning module scanning and robot plate taking, and the PRE plate-putting state corresponds to five tasks and are: robot shifting, scanner scanning, robot putting, robot moving out and calibration cylinder calibration, etc., which will not be repeated here. Taking the five tasks corresponding to the RM plate-taking state as an example, the five tasks are sorted according to the business logic, that is, the order in which the tasks perform the corresponding operations in the hardware device 17, the first is robot shifting, the second is box opening module opening, the third is scanning module shifting, the fourth is scanning module scanning, and the fifth is robot plate taking; among them, the robot shifting, box opening module opening and scanning module shifting can be performed together, then the corresponding relationship of the three tasks is defined as a parallel relationship in the task chain, and the three tasks are sent to the hardware device 17 together, so that the hardware device 17 can perform the corresponding operations of the tasks together, thereby ensuring the transmission and control efficiency of the entire lithography machine system 10.

[0054] Ginseng Figures 3 to 5 As shown, when the hardware device 17 makes an error when performing the operation corresponding to the task, an error message is generated according to the error situation and the error message is reported to the task state machine 15. When the task management module 16 monitors the new error message in the task state machine 15, it parses the error message to determine the error level corresponding to the error message, and determines whether to perform a repair operation based on whether the error level reaches a first preset threshold, including the following steps S41 to S43.

[0055] Step S41: Determine whether the error level reaches a first preset threshold; if so, execute step S42; if not, execute step S43.

[0056] Step S42: The task state machine uploads the error information and error level to the business state machine.

[0057] Step S43: The task management module generates a first repair instruction according to the error condition, so that the hardware device executes a repair operation corresponding to the first repair instruction.

[0058] When the task state machine 15 reports both the error information and the error level to the business state machine 13, the business management module 14 monitors the new error information in the business state machine 13 to determine whether to perform a repair operation based on whether the error level corresponding to the error information reaches a second preset threshold, including the following steps S51 to S53.

[0059] Step S51: Determine whether the error level reaches a second preset threshold; if so, execute step S52; if not, execute step S53.

[0060] Step S52: The service state machine reports the error information and error level to the control module.

[0061] Step S53: The service management module generates a second repair instruction according to the error condition, so that the hardware device executes a repair operation corresponding to the second repair instruction.

[0062] When the service state machine 13 reports both the error information and the error level to the control module 12 , the control module 12 sends the error information and the error level to the external module 11 for the user to view, and the user can repair the error.

[0063] It should be noted that when an error occurs in the hardware device 17 when the hardware device 17 performs the corresponding operation of the task, an error message is generated according to the error situation, and the error message is analyzed to determine the error level of the error message. If the error level does not reach the first preset threshold, the task management module 16 generates a first repair instruction to perform the corresponding repair operation (that is, when the error situation is relatively minor, the repair operation can be, for example, to reset the hardware device 17 and re-execute the corresponding operation of the task when the error occurred); if the error level reaches the first preset threshold, the business management module 14 will make another judgment (that is, when the error situation is not minor, the business management module 14 will make another judgment); if the error level does not reach the second preset threshold, the business management module 14 will generate a second repair instruction to perform the corresponding repair operation (that is, the business management module 14 can perform repairs in the event of an error); if the error level reaches the second preset threshold, the control module 12 will report it to the external device 17 for judgment by the user (that is, the error situation is relatively serious). The user sets the second preset threshold and the first preset threshold in the business management module 14 and the task management module 16 respectively in advance. The business management module 14 and the task management module 16 can handle error situations of different error levels respectively. When the business management module 14 and the task management module 16 are unable to handle the error situation, the user customizes the analysis of the error situation with clear division of labor to further improve the efficiency of the entire lithography machine system 10.

[0064] Based on the same invention idea, Figure 6As shown, the present invention also discloses a business process control system, which includes: a determination module 61, a first sorting module 62, a second sorting module 63, and an execution module 64. The determination module 61 is used to respond to a business processing request, parse the business processing request to determine the business state associated with the business processing request, and encapsulate the associated business state to form a business state set; the first sorting module 62 is used to sort the business states included in the business state set according to business logic to form a business state chain; the second sorting module 63 is used to determine the tasks corresponding to the business states in the business state chain and sort the tasks according to business logic to form a task chain; and the execution module 64 is used to sequentially issue tasks according to the order included in the task chain to perform the corresponding operations of the tasks.

[0065] It should be noted that the logic contained in step S1 in a business process control method in the aforementioned embodiment is implemented by the determination module 61 in the business process control system, the logic contained in step S2 is implemented by the first sorting module 62 and the second sorting module 63 in the business process control system, and the logic contained in step S3 is implemented by the execution module 64 in the business process control system.

[0066] The series of detailed descriptions listed above are only specific descriptions of feasible implementation methods of the present invention. They are not intended to limit the scope of protection of the present invention. Any equivalent implementation methods or changes that do not deviate from the technical spirit of the present invention should be included in the scope of protection of the present invention.

[0067] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be included therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

[0068] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A business process control method, characterized in that: The business process control method is applied to a lithography machine system, wherein an external module, a control module, a business state machine, a business management module, a task state machine, a task management module and hardware equipment are deployed in the lithography machine system; The business process method includes: The external module forms a business processing request and sends the business processing request to the control module; The control module receives and responds to the business processing request, parses the business processing request to determine the business status associated with the business processing request, encapsulates the associated business status to form a business status set, and sends the business status set to the business state machine; The service management module sorts the service states contained in the service state set according to the service logic to form a service state chain, and the service state machine sends the service states to the task state machine in sequence according to the order contained in the service state chain; The task management module determines the tasks corresponding to the business states in the business state chain and sorts the tasks according to the business logic to form a task chain. The task state machine sends tasks to the hardware devices in sequence according to the order included in the task chain to execute the corresponding operations of the tasks; Among them, when the hardware device makes an error when performing an operation corresponding to a task, an error message is generated according to the error situation and the error message is reported to the task state machine. When the task management module monitors the newly added error message in the task state machine, it parses the error message to determine the error level corresponding to the error message, and determines whether the error level reaches a first preset threshold; if so, the task state machine reports both the error message and the error level to the business state machine; if not, the task management module generates a first repair instruction according to the error situation, so that the hardware device executes the repair operation corresponding to the first repair instruction; When the task state machine reports both the error information and the error level to the business state machine, and the business management module monitors the new error information in the business state machine, it determines whether the error level reaches the second preset threshold; if so, the business state machine reports both the error information and the error level to the control module; if not, the business management module forms a second repair instruction based on the error situation, so that the hardware device executes the repair operation corresponding to the second repair instruction.

2. The business process control method according to claim 1, characterized in that: The business logic includes: business state parallel logic, business state serial logic, task parallel logic and task serial logic, and the business logic is pre-configured by the main control end.

3. The business process control method according to claim 1, characterized in that: The business processing request is parsed by the control module to obtain different business states stored in the business state machine. The control module determines the business state associated with the business processing request from different business states based on the parsing result of the business processing request, and performs an encapsulation operation on the associated business state to encapsulate to form a business state set, and sends the business state set to the business state machine.

4. The business process control method according to claim 3, characterized in that: The business management module is responsible for sorting the business states contained in the business state set according to the business logic, and specifically: The service management module performs a monitoring operation on the service state machine. When a new service state set is detected in the service state machine, the service states included in the service state set are sorted according to the service logic to form a service state chain.

5. The business process control method according to claim 4, characterized in that: Determining the tasks corresponding to the service states in the service state chain is implemented by a task state machine, in which tasks corresponding to different service states are stored.

6. The business process control method according to claim 5, characterized in that: The task management module implements the sorting of tasks according to business logic, and specifically: The task management module performs monitoring operations on the task state machine. When a new business state is detected in the task state machine, the tasks corresponding to the business state are sorted according to the business logic to form a task chain, and the tasks are sent to the hardware devices in sequence according to the order contained in the task chain.

7. The business process control method according to claim 6, characterized in that: When inserting a service state into the service state chain, determining the code corresponding to the service state to be inserted and the code set corresponding to the service state chain, inserting the code corresponding to the service state to be inserted into the code set to form a new code set, and issuing the service state based on the new code set; or, When deleting a business state in the business state chain, determine the code corresponding to the business state to be deleted and the code set corresponding to the business state chain, delete the code corresponding to the business state to be deleted from the code set to form a new code set, and issue the business state based on the new code set.

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