A temperature control device and system

Abstract

The application provides a temperature control device and system, and relates to the technical field of electromagnetic lens temperature control.The device comprises a concentric inner cylinder, a jet cylinder and a heat exchange cylinder, the inner cylinder is used for containing a charged particle beam, and an electromagnetic coil is wound on the outer side wall surface of the heat exchange cylinder; a first rib plate, the jet cylinder and the inner cylinder form a plurality of inner flow channels parallel to the central axis, a second rib plate, the heat exchange cylinder and the jet cylinder form a plurality of outer flow channels parallel to the central axis; a plurality of jet slits are arranged on the jet cylinder, so that the heat exchange medium of the inner flow channel enters the outer flow channel in the form of jet impact.The device has the advantages of micro-channel flow heat exchange and jet impact heat exchange, can realize accurate temperature control of the electromagnetic lens, avoid mechanical instability caused by heating of the electromagnetic coil, improve the accurate performance of the charged particle beam system, has good temperature control and temperature equalization effects, is sensitive in response, has small heat exchange medium consumption and small pressure drop loss.

Description

Technical Field

[0001] This application relates to the field of electromagnetic lens temperature control technology, and more specifically, to a temperature control device and system. Background Technology

[0002] As a key component of charged particle beam systems, electromagnetic lenses play a crucial role in the precise positioning of the electron beam. Electromagnetic lenses operate using the magnetic field generated by the current flowing through an electromagnetic coil, which typically operates at a relatively large current. However, when a large current flows through the coil, it causes significant thermal effects. Excessive coil temperature leads to instability in electrical characteristics such as coil resistance and excitation current, and causes thermal expansion and deformation of critical components (e.g., pole pieces in the electron beam device), resulting in mechanical instability. This severely impacts the positioning accuracy of the electromagnetic lens for the electron beam.

[0003] Currently, temperature control technology for electromagnetic lenses suffers from problems such as large pressure drop losses, poor temperature control and uniformity, and slow response.

[0004] Therefore, how to precisely control the temperature of electromagnetic lenses, avoid mechanical instability caused by the heating of electromagnetic coils, and improve the precision performance of charged particle beam systems are technical problems that urgently need to be solved by those skilled in the art. Summary of the Invention

[0005] The purpose of this application is to provide a temperature control device to solve the technical problem in the prior art of how to accurately control the temperature of an electromagnetic lens, avoid mechanical instability caused by the heating of the electromagnetic coil, and improve the precision performance of a charged particle beam system.

[0006] Another objective of this application is to provide a temperature control system to solve the technical problem in the prior art of how to accurately control the temperature of an electromagnetic lens, avoid mechanical instability caused by the heating of the electromagnetic coil, and improve the precision performance of a charged particle beam system.

[0007] This application is implemented as follows:

[0008] On one hand, this application provides a temperature control device, which is disposed in an electromagnetic lens. The temperature control device includes an inner cylinder, a jet cylinder and a heat exchange cylinder with the same central axis. The jet cylinder is sleeved outside the inner cylinder, and the heat exchange cylinder is sleeved outside the jet cylinder. The inner cylinder is used to contain a charged particle beam, and an electromagnetic coil is wound on the outer wall of the heat exchange cylinder.

[0009] A plurality of first ribs are provided between the jet tube and the inner tube, the first ribs connecting the jet tube and the inner tube, and the first ribs, the jet tube and the inner tube forming a plurality of inner flow channels parallel to the central axis;

[0010] A plurality of second ribs are provided between the heat exchange cylinder and the jet cylinder. The second ribs connect the heat exchange cylinder and the jet cylinder. The second ribs, the heat exchange cylinder and the jet cylinder form a plurality of external flow channels parallel to the central axis.

[0011] The jet tube is provided with multiple jet slits so that the heat exchange medium in the inner flow channel enters the outer flow channel by jet impact.

[0012] Furthermore, the jet tube includes a middle cylinder and a first annular disk. The first annular disk is disposed at one end of the middle cylinder. Multiple medium inlets are provided on the outer wall surface of the first annular disk. The channel of the medium inlet penetrates the wall thickness area of ​​the first annular disk and is tangent to the arc of the inner wall surface of the middle cylinder. The first annular disk is located below the entire temperature control device during installation.

[0013] The heat exchange cylinder includes an outer cylinder and a second annular disk. The second annular disk is disposed at both ends of the outer cylinder. Multiple medium outlets are provided on the outer wall surface of the second annular disk. The channels of the medium outlets penetrate the wall thickness area of ​​the second annular disk and are tangent to the arc of the inner wall surface of the outer cylinder.

[0014] Furthermore, the inner cylinder, jet cylinder, and heat exchange cylinder are all cylindrical, the included angles between the first ribs and between the second ribs are equal, and each first rib has a corresponding second rib on the same plane.

[0015] Furthermore, the injection slot is arranged along the axial direction of the injection tube and is located between two adjacent first ribs.

[0016] Furthermore, the temperature control device also includes an annular bottom plate and an annular top plate. The annular bottom plate is connected to one end of the first annular disc and the inner cylinder, and the annular top plate is connected to the other end of the second annular disc, the jet tube, and the inner cylinder. The annular bottom plate is located at the bottom of the entire temperature control device, and the annular top plate is located at the top of the entire temperature control device.

[0017] The annular base plate is provided with a first circular hole arranged in a circle for connecting the first annular disk;

[0018] On the end face of the annular top plate that connects to the inner cylinder, jet cylinder and heat exchange cylinder, there are three annular grooves, a fourth groove, a fifth groove and a sixth groove respectively, from the inside to the outside. Each of the three grooves contains a sealing ring. The annular top plate has a fifth circular hole arranged in a circle around the sixth groove for connecting the second annular disk.

[0019] Furthermore, a first annular groove is provided on the end face of the inner cylinder connected to the annular base plate, and a sealing ring is placed in the first groove. The inner cylinder seals the connection gap between itself and the annular base plate by pressing the sealing ring placed in the first groove.

[0020] The inner cylinder is provided with a first annular protrusion on the other end face where it is connected to the annular top plate. The first protrusion fits into the fourth groove on the annular top plate. The inner cylinder seals the connection gap between itself and the annular top plate by pressing the sealing ring placed in the fourth groove.

[0021] Furthermore, a second annular groove is provided on the end face where the first annular disk connects to the annular base plate. A sealing ring is placed in the second groove. The first annular disk seals the connection gap between itself and the annular base plate by pressing the sealing ring placed in the second groove.

[0022] The first annular disk has a second circular hole arranged in a circle around the second groove, the position and size of which correspond to the first circular hole on the annular base plate;

[0023] The other contact end of the jet tube engages with the fifth groove on the annular top plate, and the jet tube seals the connection gap between itself and the annular top plate by pressing the sealing ring placed in the fifth groove.

[0024] Furthermore, on the end face of the second annular disk located at one end of the outer cylinder, where it connects with the first annular disk, a third annular groove is provided. A sealing ring is placed in the third groove. The second annular disk seals the connection gap between itself and the first annular disk by pressing the sealing ring placed in the third groove.

[0025] The second annular disk has a third circular hole arranged in a circle around the third groove, the position and size of which correspond to the second circular hole on the first annular disk;

[0026] On the end face of the second annular disk located at the other end of the outer cylinder, which is connected to the annular top plate, there is a second annular protrusion structure. The second protrusion structure fits into the sixth groove on the annular top plate. The heat exchange cylinder seals the connection gap between itself and the annular top plate by pressing the sealing ring placed in the sixth groove.

[0027] The second annular disk has a fourth circular hole arranged in a circle around the periphery of the second protrusion structure, the position and size of which correspond to the fifth circular hole on the annular top plate.

[0028] On the other hand, this application embodiment also provides a temperature control system, the temperature control system including a gas-liquid separation device, a compressor, an external heat exchanger, a throttling valve, and a temperature control device as described in any one of claims 1 to 8; the outlet of the compressor is connected to the input end of the external heat exchanger, the output end of the external heat exchanger is connected to the medium inlet of the temperature control device through the throttling valve, and the medium outlet of the temperature control device is connected to the inlet of the compressor through the gas-liquid separation device.

[0029] Furthermore, an electromagnetic coil is wound around the outer wall of the heat exchange cylinder, and a temperature sensor is installed on the electromagnetic coil. The temperature sensor is used to connect to the controller, and the controller controls the operating power of the compressor and the opening degree of the throttle valve according to the temperature measured by the temperature sensor, thereby controlling the temperature of the electromagnetic coil.

[0030] Compared with the prior art, this application has the following advantages:

[0031] This application provides a temperature control device and system. By setting a first rib and a second rib, the inner and outer flow channels, acting as microchannels, have a large specific surface area, thereby giving the temperature control device a large effective heat exchange area. By setting a jet slit on the jet tube wall, the heat exchange medium enters the outer flow channel from the inner flow channel through the slit and exchanges heat with the electromagnetic coil via jet impact. Since the heat exchange medium enters the microchannel via jet impact, this increases the turbulence of the fluid within the microchannel, enhancing the heat exchange capacity. Furthermore, the presence of the microchannel slows down the decrease in the local heat transfer coefficient outside the direct jet impact area, improving heat exchange uniformity.

[0032] This device combines the advantages of microchannel flow heat transfer and jet impingement heat transfer, fully utilizing the constant temperature and high heat transfer coefficient of the heat transfer medium during the gas-liquid phase change process to achieve precise temperature control of the electromagnetic lens. This device effectively improves the mechanical instability of the electromagnetic lens caused by coil heating, enhancing the accuracy of the charged particle beam system. The system features excellent temperature control and homogenization, rapid response, low heat transfer medium consumption, and low pressure drop loss. Attached Figure Description

[0033] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0034] Figure 1 This is a schematic diagram of the structure of a temperature control device provided in an embodiment of this application;

[0035] Figure 2 This is an exploded schematic diagram of a temperature control device provided in an embodiment of this application;

[0036] Figure 3 This is a schematic diagram of the structure of the annular base plate provided in the embodiments of this application;

[0037] Figure 4 This is a schematic diagram of the inner cylinder provided in an embodiment of this application from a first-view perspective.

[0038] Figure 5 This is a schematic diagram of the inner cylinder provided in an embodiment of this application from a second perspective.

[0039] Figure 6 This is a schematic diagram of the jet tube provided in an embodiment of this application from a first-view perspective.

[0040] Figure 7 This is a schematic diagram of the jet tube provided in an embodiment of this application from a second perspective.

[0041] Figure 8 This is a schematic diagram of the heat exchange cylinder provided in an embodiment of this application from a first-view perspective.

[0042] Figure 9 This is a schematic diagram of the heat exchange cylinder provided in an embodiment of this application from a second perspective.

[0043] Figure 10 This is a structural schematic diagram illustrating the positional relationship between the inner and outer flow channels provided in an embodiment of this application.

[0044] Figure 11 This is a schematic diagram of the structure of the first annular disk provided in an embodiment of this application;

[0045] Figure 12 This is a schematic diagram of the structure of the second annular disk provided in an embodiment of this application;

[0046] Figure 13 This is a schematic diagram of the annular top plate provided in an embodiment of this application from a first-view perspective.

[0047] Figure 14 This is a schematic diagram of the annular top plate provided in an embodiment of this application from a second perspective.

[0048] Figure 15 This is a cross-sectional view of a temperature control device provided in an embodiment of this application;

[0049] Figure 16 This is a schematic diagram of a temperature control system provided in an embodiment of this application.

[0050] Icons: 10-Temperature control device; 1-Annular base plate; 2-Inner cylinder; 3-Jet cylinder; 4-Heat exchange cylinder; 5-Annular top plate; 11-First circular hole; 21-First groove; 22-First protruding structure; 31-Second circular hole; 32-First rib; 33-Second groove; 34-Medium inlet; 35-First annular disc; 36-Jet slit; 37-Middle cylinder; 38-Inner flow channel; 39-Contact end; 41-Outer cylinder; 42-Second rib; 43-Medium outlet; 44-Third circular hole; 45-Third groove; 46-Second annular disc; 47-Second protruding structure; 48-Fourth circular hole; 49-Outer flow channel; 51-Sixth groove; 52-Fifth groove; 53-Fourth groove; 54-Fifth circular hole; 60-Gas-liquid separation device; 70-Compressor; 80-External heat exchanger; 90-Throttle valve. Detailed Implementation

[0051] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0052] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0053] In the description of this application, it should be noted that relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0054] Currently, temperature control technology for electromagnetic lenses suffers from problems such as large pressure drop losses, poor temperature control and uniformity, and slow response.

[0055] Therefore, how to precisely control the temperature of electromagnetic lenses, avoid mechanical instability caused by the heating of electromagnetic coils, and improve the precision performance of charged particle beam systems are technical problems that urgently need to be solved by those skilled in the art.

[0056] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0057] Please see Figure 1 and Figure 2 , Figure 1 A schematic diagram of a temperature control device 10 provided in an embodiment of this application is shown. The temperature control device 10 is disposed in an electromagnetic lens and includes: an inner cylinder 2, a jet cylinder 3, a heat exchange cylinder 4, an annular bottom plate 1, and an annular top plate 5, all aligned on a central axis. The inner cylinder 2 is used to contain a charged particle beam, and an electromagnetic coil is wound around the outer wall of the heat exchange cylinder 4.

[0058] Figure 2 An exploded schematic diagram of the temperature control device 10 is shown, wherein the jet tube 3 is sleeved outside the inner cylinder 2, the heat exchange tube 4 is sleeved outside the jet tube 3, one end of the inner cylinder 2, the jet tube 3 and the heat exchange tube 4 are connected to the annular bottom plate 1, and the other end is connected to the annular top plate 5.

[0059] It should be noted that the term "connection" should be interpreted broadly. For example, it can refer to a fixed connection or a detachable connection; it can be a direct connection or an indirect connection through an intermediate medium. In the embodiments of this application, the heat exchange cylinder 4 and the annular base plate 1 are indirectly connected.

[0060] In order to make the electromagnetic coil evenly wound on the outer wall of the heat exchange cylinder 4, the inner cylinder 2, the jet cylinder 3 and the heat exchange cylinder 4 in this embodiment can all be set as cylinders, and correspondingly, the annular bottom plate 1 and the annular top plate 5 can both be set as rings.

[0061] The structure of the annular base plate 1 is as follows Figure 3 As shown, the annular base plate 1 has a first circular hole 11 arranged in a circle. Bolts pass through the first circular hole 11, so that the annular base plate 1 is connected and sealed to the inner cylinder 2 and the jet cylinder 3 by the compression of the bolts. The annular base plate 1 is located at the bottom of the entire temperature control device 10.

[0062] Please see Figure 4 and Figure 5 , Figure 4 and Figure 5 The diagrams show the inner cylinder 2 from both a first and a second perspective. The inner cylinder 2 has an overall cylindrical shape with a certain thickness, and its hollow area serves as a channel for charged particle beams. The inner diameter of the inner cylinder 2 is the same as the inner diameter of the annular top plate 5 and the annular bottom plate 1.

[0063] like Figure 4 As shown, a first annular groove 21 with a width of 2-3 mm is provided on the end face of the inner cylinder 2 where it connects to the annular bottom plate 1. The width of the first groove 21 is less than the thickness of the cylinder wall, and its center line is located in the middle of the cylinder wall thickness. Under the action of external pressure, the inner cylinder 2 squeezes the sealing ring placed in the first groove 21, thereby sealing the connection gap between it and the annular bottom plate 1.

[0064] In addition, on the other end face where the inner cylinder 2 connects to the annular top plate 5, there is a [feature] such as Figure 5 The annular first protrusion 22 shown has a width of 1-2 mm. The width of the first protrusion 22 is less than the thickness of the cylinder wall, and its outer edge coincides with the outer edge of the cylinder wall. Under external pressure, the inner cylinder 2, through the first protrusion 22, squeezes the sealing ring placed in the corresponding groove of the annular top plate 5, thereby sealing the connection gap between the inner cylinder 2 and the annular top plate 5.

[0065] Alternatively, the sealing ring can be made of other materials such as silicone or rubber.

[0066] The structure of the jet tube 3, which is fitted outside the inner tube 2, is as follows: Figure 6 and Figure 7 As shown, Figure 6 and Figure 7 The diagrams show the structure of the jet tube 3 from both a first and a second perspective. The jet tube 3 includes a middle tube 37 and a first annular disk 35 of a certain height. The first annular disk 35 is located at one end of the middle tube 37 and connected to an annular base plate 1, which is located at the bottom of the entire temperature control device 10. Furthermore, the inner diameter of the middle tube 37 is the same as the outer diameter of the inner tube 2, and the inner and outer diameters of the first annular disk 35 are the same as the inner and outer diameters of the annular base plate 1.

[0067] like Figure 6 As shown, a second annular groove 33, 2-3 mm wide, is provided on the bottom surface of the first annular disk 35 where it contacts the annular base plate 1, for placing the sealing ring. Around the periphery of the second groove 33, second circular holes 31 are arranged circumferentially, their positions and sizes being similar to those shown in the figure. Figure 3Corresponding to the first circular hole 11 on the annular base plate 1, the second circular hole 31 penetrates the upper and lower bottom surfaces of the first annular disk 35. Under the pressure of the bolts, the first annular disk 35 presses against the sealing ring placed in the second groove 33, thereby sealing the connection gap between it and the annular base plate 1.

[0068] like Figure 7 As shown, the other contact end 39 of the middle cylinder 37 is used to connect to the annular top plate 5. The thickness of the contact end 39 is generally 1 mm. The contact end 39 seals the connection gap between itself and the annular top plate 5 by pressing the sealing ring placed in the corresponding groove of the annular top plate 5.

[0069] In this embodiment, the inner wall of the middle cylinder 37 is provided with multiple first ribs 32 parallel to the central axis. The first ribs 32 divide the entire inner wall area of ​​the middle cylinder 37 into multiple parallel microchannels. In other words, the first ribs 32, the jet cylinder 3, and the inner cylinder 2 form multiple inner channels 38 parallel to the central axis.

[0070] Meanwhile, the middle cylinder 37 is provided with multiple injection slits 36 parallel to the central axis. The injection slits 36 penetrate the inner and outer walls of the middle cylinder 37 and are located between two adjacent first ribs 32. The heat exchange medium flows out of the inner flow channel 38 from the injection slits 36 in the form of jet impact. The heat exchange medium can also be referred to as refrigerant.

[0071] Optionally, the height of the first rib 32 is 0.5 to 2.5 mm, the thickness is 0.3 to 1 mm, the spacing is 0.2 to 2 mm, its length is slightly less than the length of the middle cylinder 37, and the width of the injection slot 36 is 0.04 to 0.4 mm.

[0072] The structure of the heat exchange cylinder 4, which is fitted outside the jet cylinder 3, is as follows: Figure 8 and Figure 9 As shown, Figure 8 and Figure 9 The structural schematic diagrams of the heat exchange cylinder 4 are shown from the first and second perspectives, respectively.

[0073] The heat exchange cylinder 4 includes an outer cylinder 41 and a second annular disk 46, which are disposed at both ends of the outer cylinder 41. The inner diameter of the outer cylinder 41 is the same as the outer diameter of the middle cylinder 37, and the outer diameter of the second annular disk 46 is the same as the outer diameter of the first annular disk 35. The height of the second annular disk 46 is half the height of the first annular disk 35, and its function is to fix and constrain the electromagnetic coil wound on the side wall of the outer cylinder 41.

[0074] like Figure 8As shown, a third annular groove 45, 2-3 mm wide, is provided on the bottom surface of the second annular disk 46 that contacts the heat exchange cylinder 4 and the jet cylinder 3. This groove is used to place the sealing ring. Around the third groove 45, a third circular hole 44 is arranged circumferentially, its position and size corresponding to the second circular hole 31 on the first annular disk 35. The third circular hole 44 penetrates the second annular disk 46 to a depth of 4-6 mm, without penetrating the upper and lower bottom surfaces of the second annular disk 46. Under the pressure of the bolts, the second annular disk 46 compresses the sealing ring placed in the third groove 45, thereby sealing the connection gap between it and the first annular disk 35 in the jet cylinder 3.

[0075] like Figure 9 As shown, on the bottom surface of the second annular disk 46, which contacts the annular top plate 5, a second annular protrusion 47 with a width of 1-2 mm is provided. Around the periphery of the second protrusion 47, a fourth circular hole 48 is also provided, its position and size corresponding to the circular holes on the annular top plate 5. The fourth circular hole 48 penetrates the second annular disk 46 to a depth of 4-6 mm, without penetrating the upper and lower bottom surfaces of the second annular disk 46. Under the pressure of the bolts, the second annular disk 46, through the second protrusion 47, presses against the sealing ring placed in the corresponding groove of the annular top plate 5, thereby sealing the connection gap between it and the annular top plate 5.

[0076] In this embodiment, multiple second ribs 42 parallel to the central axis are provided on the inner wall surface of the outer cylinder 41. The second ribs 42 divide the entire inner wall area of ​​the outer cylinder 41 into multiple parallel microchannels. In other words, the second ribs 42, the heat exchange cylinder 4, and the jet cylinder 3 form multiple external channels 49 parallel to the central axis.

[0077] Optionally, the height of the second rib 42 is 0.5 to 1.5 mm, and its length, thickness and spacing are the same as those of the first rib 32 on the middle cylinder 37.

[0078] This application incorporates a jet slit 36 ​​on the wall of a conventional microchannel, allowing the heat exchange medium to enter the inner flow channel 38 and then, through the jet slit 36, enter the outer flow channel 49 via a jet impact, exchanging heat with the electromagnetic coil. Because the heat exchange medium enters the microchannel via a jet impact, this increases the turbulence of the fluid within the microchannel, enhancing the heat exchange capacity. Simultaneously, the presence of the microchannel slows down the decrease in the local heat transfer coefficient outside the direct jet impact area, improving heat exchange uniformity. Therefore, the temperature control device 10 provided in this embodiment integrates the advantages of both a microchannel temperature control system and a jet temperature control system.

[0079] Furthermore, in order to achieve uniform heat transfer to the electromagnetic coil, such as Figure 10As shown, the included angles between the first ribs 32 and between the second ribs 42 are equal, and each first rib 32 has a corresponding second rib 42 on the same plane, meaning that the position of each outer flow channel 49 corresponds one-to-one with the position of each inner flow channel 38. This ensures that each jet slit 36 ​​on the jet tube 3 is located in the middle of both the inner flow channels 38 and the outer flow channels 49, and that each inner flow channel 38 and each outer flow channel 49 are of equal size, resulting in uniform flow rate and pressure around the perimeter, thus achieving more uniform heat exchange.

[0080] Based on the above design, it can only ensure that the heat exchange medium flows evenly to each outer channel 49 through the injection slit 36. In order to further improve the temperature uniformity of the temperature control device 10, it is also necessary to ensure that the heat exchange medium can flow evenly into the inner channel 38 and out of the outer channel 49.

[0081] Please see Figure 11 Multiple medium inlets 34 are provided on the outer wall of the first annular disk 35 for the heat exchange medium to flow into the jet cylinder 3. The channels of the medium inlets 34 penetrate the entire wall thickness of the first annular disk 35, reaching the inner wall of the jet cylinder 3, near the area of ​​each inner flow channel 38. Furthermore, as... Figure 8 As shown, the channel of the medium inlet 34 is tangent to the circular arc of the inner wall of the jet cylinder 3. After the heat exchange medium enters through the medium inlet 34, it will flow in the inner annular cavity region between the first annular disk 35 and the inner cylinder 2, and be distributed into each inner flow channel 38 that communicates with the inner annular cavity region.

[0082] In this embodiment, the channel where the medium inlet 34 is located is tangent to the circular arc of the inner wall of the jet cylinder 3. Based on this structural design, it can be ensured that the heat exchange medium entering through the medium inlet 34 is evenly distributed into each inner flow channel 38 between the middle cylinder 37 and the inner cylinder 2.

[0083] Furthermore, since the first annular disk 35 with the medium inlet 34 is connected to the annular base plate 1, and the annular base plate 1 is located at the bottom of the entire temperature control device 10, it is equivalent to the first annular disk 35 being located below the entire temperature control device 10. This allows the heat exchange medium to enter each inner flow channel 38 from below the jet cylinder 3 when it is injected into the temperature control device 10. Under the action of gravity, it is easier to discharge the gas in each inner flow channel 38, avoiding the situation where residual bubbles block the flow channel, and ensuring that the heat exchange medium can be more evenly distributed in each inner flow channel 38 on the jet cylinder 3.

[0084] Please see Figure 12 The outer wall of the second annular disk 46 is provided with multiple medium outlets 43 for the heat exchange medium to flow out of the heat exchange cylinder 4. The channels of the medium outlets 43 penetrate the entire wall thickness area of ​​the second annular disk 46, reaching the inner wall surface of the heat exchange cylinder 4, near the area of ​​each outer flow channel 49. Furthermore, as... Figure 11 As shown, the channel of the medium outlet 43 is tangent to the circular arc of the inner wall of the heat exchange cylinder 4. After the heat exchange medium is heated in the outer flow channel 49, it flows along the outer flow channel 49 to both ends and collects in the outer annular cavity area between the second annular disk 46 and the jet cylinder 3 at the upper and lower ends. Finally, it is collected by the medium outlets 43 located in the second annular disk 46 and discharged from the heat exchange cylinder 4.

[0085] In this embodiment, the channel where the medium outlet 43 is located is tangent to the circular arc of the inner wall of the heat exchange cylinder 4. Based on this structural design, it can be ensured that the flow field pressure in each outer flow channel 49 on the heat exchange cylinder 4 is evenly distributed, thereby ensuring that the heat exchange medium is evenly distributed in each outer flow channel 49, improving the uniformity of temperature distribution in the circumferential direction of the heat exchange cylinder 4, and further improving the temperature uniformity of the temperature control device 10.

[0086] To connect the annular top plate 5 to the inner cylinder 2, the jet cylinder 3, and the heat exchange cylinder 4, please refer to... Figure 13 and Figure 14 The inner diameter of the annular top plate 5 is the same as the inner diameter of the inner cylinder 2, and its outer diameter is the same as the outer diameter of the second disk. On the side of the annular top plate 5 that contacts the inner cylinder 2, the jet cylinder 3, and the heat exchange cylinder 4, there is a... Figure 13 The fourth groove 53, fifth groove 52, and sixth groove 51 shown correspond to the first protrusion 22 on the inner cylinder 2, the contact end 39 of the jet cylinder 3, and the second protrusion 47 of the second annular disk 46, respectively. The width of the three grooves on the annular top plate 5 is generally 2-3 mm, and a sealing ring is placed in each of the three grooves. Around the sixth groove 51, a fifth circular hole 54 is also provided, its position and size corresponding to the fourth circular hole 48 on the second annular disk 46 in the heat exchange cylinder 4. The annular top plate 5 is connected and sealed to the inner cylinder 2, jet cylinder 3, and heat exchange cylinder 4 by the compression of bolts. Furthermore, the annular top plate 5 is located at the top of the entire temperature control device 10.

[0087] Since the jet tube 3 is fitted outside the inner tube 2 and the heat exchange tube 4 is fitted outside the jet tube 3, in order to make the connection between the three more tight, in this embodiment of the application, the inner tube 2, the jet tube 3 and the heat exchange tube 4 are nested by means of thermal expansion and contraction.

[0088] During assembly, the inner cylinder 2 is first cooled to make its outer diameter smaller than its normal size; then the jet tube 3 is heated to make its inner diameter larger than its normal size. At this point, the outer diameter of the inner cylinder 2 after the temperature change treatment is smaller than the inner diameter of the jet tube 3. The inner cylinder 2 is then immediately inserted into the jet tube 3. After returning to room temperature, the jet tube 3 and the inner cylinder 2 are tightly bound together.

[0089] Next, the nested jet tube 3 and inner tube 2 are cooled down so that the outer diameter of the jet tube 3 is smaller than its size at room temperature; then the heat exchange tube 4 is heated up so that its inner diameter is larger than its size at room temperature. At this point, the outer diameter of the jet tube 3 after the temperature change treatment is smaller than the inner diameter of the heat exchange tube 4. The jet tube 3 is then immediately inserted into the heat exchange tube 4. After returning to room temperature, the heat exchange tube 4 and the jet tube 3 are tightly bound together.

[0090] After two thermal expansion and contraction processes, the inner cylinder 2, the jet cylinder 3, and the heat exchange cylinder 4 can be tightly bound together.

[0091] The cross-sectional structure of the temperature control device 10 provided in this application embodiment is as follows: Figure 15 As shown. When cooling of the electromagnetic coil is required, the heat exchange medium first flows evenly into each inner channel 38 through the medium inlet 34 located on the first annular disk 35. Then, under pressure, the heat exchange medium enters the outer channel 49 through the jet slits 36 on the wall of the middle cylinder 37 in a jet impact manner and exchanges heat with the electromagnetic coil. The liquid heat exchange medium absorbs the heat from the electromagnetic coil and undergoes a vaporization phase change, becoming a gas-liquid two-phase flow, flowing along both ends of the outer channel 49, and finally exiting the temperature control device 10 through the medium outlet 43 located on the second annular disk 46 at both ends of the outer cylinder 41.

[0092] As one implementation method, please refer to Figure 16 This application also provides a temperature control system, which includes an external circulation pipeline and a temperature control device 10. The external circulation pipeline includes a gas-liquid separator 60, a compressor 70, an external heat exchanger 80, and a throttling valve 90.

[0093] The outlet of compressor 70 is connected to the input end of external heat exchanger 80. The output end of external heat exchanger 80 is connected to the medium inlet 34 in temperature control device 10 through throttle valve 90. The medium outlet 43 in temperature control device 10 is connected to the inlet of compressor 70 through gas-liquid separator 60.

[0094] The temperature sensor placed on the electromagnetic coil is connected to the controller. The controller controls the operating power of the compressor 70 and the opening degree of the throttle valve 90 according to the temperature measured by the temperature sensor, thereby controlling the temperature of the electromagnetic coil.

[0095] The entire temperature control system operates as follows:

[0096] When the temperature sensor detects that the actual temperature of the electromagnetic coil is higher than the preset temperature, the system will cool the electromagnetic coil.

[0097] After passing through the throttling valve 90, the liquid heat exchange medium enters the temperature control device 10 through the medium inlet 34 on the side wall of the first annular disk 35 at the bottom of the jet cylinder 3. The heat exchange medium first flows along the inner annular cavity region between the first annular disk 35 and the inner cylinder 2, and is evenly distributed into each inner flow channel 38 between the jet cylinder 3 and the inner cylinder 2. After entering the inner flow channel 38, the heat exchange medium, under pressure, impacts each outer flow channel 49 on the inner wall of the heat exchange cylinder 4 through the jet slit 36 ​​at the bottom of the inner flow channel 38 in a jet impact manner.

[0098] The heat exchange medium undergoes heat exchange within each outer flow channel 49, absorbing heat generated by the electromagnetic coils on the outer wall of the heat exchange cylinder 4. During this process, most of the liquid heat exchange medium absorbs heat and undergoes a phase change to gaseous state, mixing with a small portion of the unvaporized liquid heat exchange medium to form a gas-liquid two-phase flow. The heat exchange medium after heat exchange is discharged from the upper and lower ends of each outer flow channel 49 of the heat exchange cylinder 4, and then collects in the upper and lower outer annular cavity regions between the heat exchange cylinder 4 and the jet cylinder 3, before being discharged from the temperature control device 10 through the medium outlets 43 on the side walls of the upper and lower second annular disks 46 of the heat exchange cylinder 4.

[0099] After the heat exchange medium flows out of the temperature control device 10, it first passes through the gas-liquid separation device 60, and then flows into the compressor 70, where it becomes a high-temperature, high-pressure gas. Then, the gaseous heat exchange medium enters the external heat exchanger 80, undergoes phase change condensation and heat release, and finally becomes a liquid heat exchange medium again.

[0100] The refrigerant used in the refrigeration system can be ethanol, methanol, R32, R134a, R22, etc.

[0101] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

[0102] It will be apparent to those skilled in the art that this application is not limited to the details of the exemplary embodiments described above, and that this application can be implemented in other specific forms without departing from the spirit or essential characteristics of this application. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this application is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this application. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A temperature control device, characterized in that, The temperature control device is disposed in the electromagnetic lens. The temperature control device includes an inner cylinder, a jet cylinder and a heat exchange cylinder with the same central axis. The jet cylinder is sleeved outside the inner cylinder and the heat exchange cylinder is sleeved outside the jet cylinder. The inner cylinder is used to contain the charged particle beam. An electromagnetic coil is wound on the outer wall of the heat exchange cylinder. A plurality of first ribs are provided between the jet tube and the inner tube, the first ribs connecting the jet tube and the inner tube, and the first ribs, the jet tube and the inner tube forming a plurality of inner flow channels parallel to the central axis; A plurality of second ribs are provided between the heat exchange cylinder and the jet cylinder. The second ribs connect the heat exchange cylinder and the jet cylinder. The second ribs, the heat exchange cylinder and the jet cylinder form a plurality of external flow channels parallel to the central axis. The jet tube is provided with multiple jet slits so that the heat exchange medium in the inner flow channel enters the outer flow channel by jet impact. The jet tube includes a middle cylinder and a first annular disk. The first annular disk is disposed at one end of the middle cylinder. Multiple medium inlets are provided on the outer wall surface of the first annular disk. The channels of the medium inlets penetrate the wall thickness area of ​​the first annular disk and are tangent to the arc of the inner wall surface of the middle cylinder. The first annular disk is located below the entire temperature control device during installation. The heat exchange cylinder includes an outer cylinder and a second annular disk. The second annular disk is disposed at both ends of the outer cylinder. Multiple medium outlets are provided on the outer wall surface of the second annular disk. The channels of the medium outlets penetrate the wall thickness area of ​​the second annular disk and are tangent to the arc of the inner wall surface of the outer cylinder.

2. The temperature control device as described in claim 1, characterized in that, The inner cylinder, jet cylinder, and heat exchange cylinder are all cylindrical. The included angles between the first ribs and between the second ribs are equal. Each first rib has a corresponding second rib on the same plane.

3. The temperature control device as described in claim 2, characterized in that, The jet slit is arranged along the axial direction of the jet tube and is located between two adjacent first ribs.

4. The temperature control device as described in claim 1, characterized in that, The temperature control device also includes an annular bottom plate and an annular top plate. The annular bottom plate is connected to one end of the first annular disc and the inner cylinder, and the annular top plate is connected to the other end of the second annular disc, the jet tube, and the inner cylinder. The annular bottom plate is located at the bottom of the entire temperature control device, and the annular top plate is located at the top of the entire temperature control device. The annular base plate is provided with a first circular hole arranged in a circle for connecting the first annular disk; On the end face of the annular top plate that connects to the inner cylinder, jet cylinder and heat exchange cylinder, there are three annular grooves, a fourth groove, a fifth groove and a sixth groove respectively, from the inside to the outside. Each of the three grooves contains a sealing ring. The annular top plate has a fifth circular hole arranged in a circle around the sixth groove for connecting the second annular disk.

5. The temperature control device as described in claim 4, characterized in that, A first annular groove is provided on one end face of the inner cylinder connected to the annular base plate. A sealing ring is placed in the first groove. The inner cylinder seals the connection gap between itself and the annular base plate by pressing the sealing ring placed in the first groove. The inner cylinder is provided with a first annular protrusion on the other end face where it is connected to the annular top plate. The first protrusion fits into the fourth groove on the annular top plate. The inner cylinder seals the connection gap between itself and the annular top plate by pressing the sealing ring placed in the fourth groove.

6. The temperature control device as described in claim 4, characterized in that, A second annular groove is provided on the end face of the first annular disk that connects to the annular base plate. A sealing ring is placed in the second groove. The first annular disk seals the connection gap between itself and the annular base plate by pressing the sealing ring placed in the second groove. The first annular disk has a second circular hole arranged in a circle around the second groove, the position and size of which correspond to the first circular hole on the annular base plate; The other contact end of the jet tube engages with the fifth groove on the annular top plate, and the jet tube seals the connection gap between itself and the annular top plate by pressing the sealing ring placed in the fifth groove.

7. The temperature control device as described in claim 6, characterized in that, On the end face of the second annular disk located at one end of the outer cylinder, which is connected to the first annular disk, there is a third annular groove. A sealing ring is placed in the third groove. The second annular disk seals the connection gap between itself and the first annular disk by pressing the sealing ring placed in the third groove. The second annular disk has a third circular hole arranged in a circle around the third groove, the position and size of which correspond to the second circular hole on the first annular disk; On the end face of the second annular disk located at the other end of the outer cylinder, which is connected to the annular top plate, there is a second annular protrusion structure. The second protrusion structure fits into the sixth groove on the annular top plate. The heat exchange cylinder seals the connection gap between itself and the annular top plate by pressing the sealing ring placed in the sixth groove. The second annular disk has a fourth circular hole arranged in a circle around the periphery of the second protrusion structure, the position and size of which correspond to the fifth circular hole on the annular top plate.

8. A temperature control system, characterized in that, The temperature control system includes a gas-liquid separator, a compressor, an external heat exchanger, a throttling valve, and a temperature control device as described in any one of claims 1 to 7; the outlet of the compressor is connected to the input end of the external heat exchanger, the output end of the external heat exchanger is connected to the medium inlet of the temperature control device through the throttling valve, and the medium outlet of the temperature control device is connected to the inlet of the compressor through the gas-liquid separator.

9. The temperature control system as described in claim 8, characterized in that, An electromagnetic coil is wound around the outer wall of the heat exchange cylinder. A temperature sensor is installed on the electromagnetic coil. The temperature sensor is connected to a controller. The controller controls the operating power of the compressor and the opening degree of the throttle valve according to the temperature measured by the temperature sensor, thereby controlling the temperature of the electromagnetic coil.

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