A measuring device

Abstract

The application discloses a measuring device and relates to the technical field of precision measurement. The measuring device comprises a guide piece, a sliding piece slidably connected with the guide piece in the vertical direction, a lever assembly rotatably connected with the sliding piece, and a measuring assembly rotatably connected with one end of the lever assembly. The length direction of the lever assembly intersects with the vertical direction, the measuring assembly comprises a measuring rod, the measuring rod is provided with a measuring head for contacting a product to be measured, the center line of the measuring rod is parallel to the vertical direction, a plurality of lever assemblies are arranged at intervals in the vertical direction, and at least one lever assembly is provided with a balancing piece away from one end of the measuring assembly. The measuring device provided by the application can make the measuring head of the measuring rod contact the product to be measured with extremely small measuring force or even zero measuring force, thereby reducing the deformation of the product to be measured, improving the thickness measurement accuracy, and reducing the damage to the product to be measured and improving the yield of the product to be measured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of precision measurement, and particularly relates to a measuring device. BACKGROUND

[0002] In the related art, a combination of a grating ruler, a grating sensor and a measuring rod is used in a measuring device to measure the thickness of a product to be measured such as a film or a chip. However, when the measuring head of the measuring rod slides in the vertical direction and contacts the product to be measured, there is a large measuring force, which can cause pressure on the surface of the product to be measured, resulting in micro-deformation of the product, thereby causing measurement errors and reducing the measurement accuracy. SUMMARY

[0003] Therefore, the present application aims to provide a measuring device, which aims to solve the technical problem that in the prior art, when the thickness of a product to be measured is measured, the measuring head can cause pressure on the product to be measured, resulting in micro-deformation of the product, thereby causing measurement errors and reducing the measurement accuracy.

[0004] To achieve the above-mentioned purpose, the technical scheme adopted by the present application is as follows:

[0005] The embodiment of the present application provides a measuring device, which comprises:

[0006] a guide member and a sliding member, wherein the sliding member is slidably connected with the guide member in the vertical direction;

[0007] a lever assembly, which is rotatably connected with the sliding member, and the length direction of the lever assembly intersects with the vertical direction;

[0008] a measuring assembly, which is rotatably connected with one end of the lever assembly, and the measuring assembly comprises a measuring rod, the measuring rod has a measuring head for contacting the product to be measured, and the center line of the measuring rod is parallel to the vertical direction;

[0009] wherein the lever assembly is provided in plurality, two adjacent lever assemblies are arranged at intervals in the vertical direction, and at least one lever assembly is provided with a balancing member at one end away from the measuring assembly.

[0010] In one embodiment, the lever assembly provided with the balancing member comprises a first lever, a second lever and a connecting member, the sliding member and the measuring assembly are respectively hinged between the first lever and the second lever, the connecting member is connected between the first lever and the second lever, and the connecting member is connected with the balancing member.

[0011] In one embodiment, the balancing member is connected with the connecting member through an adjusting screw, and the center line of the adjusting screw is arranged obliquely relative to the length direction of the lever assembly.

[0012] In one of the embodiments, the angle between the center line of the adjusting screw and the length direction of the lever assembly is θ, and the relationship is 30°≤θ≤60°.

[0013] In one of the embodiments, the lever assembly has a center line, the distance between the rotation axis of the sliding member and the rotation axis of the measuring assembly is L1, the distance between the center line of the connecting member and the rotation axis of the sliding member is L2, and the distance between the rotation axes of two adjacent lever assemblies is H, and the relationship is L1=L2, 30mm≤H≤60mm.

[0014] In one of the embodiments, the measuring device further comprises an optical coupling sensor and a light blocking member, the optical coupling sensor is arranged on the sliding member, the light blocking member is arranged on one of the lever assemblies, and the optical coupling sensor has a detection opening, at least part of the light blocking member is located in the detection opening.

[0015] In one of the embodiments, the measuring device further comprises a driving member, a transmission assembly and a lead screw, the driving member is arranged on the guide member, the transmission assembly is connected between the driving member and the lead screw, and the part of the lead screw away from the transmission assembly is arranged in the sliding member, the driving member drives the lead screw to rotate through the transmission assembly, so as to drive the sliding member to slide along the vertical direction.

[0016] In one of the embodiments, the transmission assembly comprises a driving gear and a driven gear, the driven gear is fixed to one end of the lead screw away from the sliding member, and the driving gear is fixed to the output end of the driving member and is engaged with the driven gear.

[0017] In one of the embodiments, the pitch circle diameter of the driving gear is d1, and the pitch circle diameter of the driven gear is d2, and the relationship is d2 / d1=i, 3≤i≤5.

[0018] In one of the embodiments, the measuring assembly further comprises a grating ruler and a grating sensor, one end of the grating ruler is connected with the measuring rod, and the part of the grating ruler away from the measuring rod is arranged opposite to the grating sensor.

[0019] The beneficial effects of the present application are:

[0020] The application provides a measuring device, comprising a guide, a sliding piece, a plurality of lever assemblies and a measuring assembly, each lever assembly is rotationally connected with the sliding piece, the length direction of each lever assembly intersects with the vertical direction, one end of each lever assembly is rotationally connected with the measuring assembly, and the two adjacent lever assemblies are arranged at intervals along the vertical direction. On this basis, at least one lever assembly is provided with a balancing piece at one end away from the measuring assembly, when measuring the thickness of the product to be measured, the balancing piece can balance the weight of one end of the lever assembly close to the measuring assembly, so that the lever assembly tends to be in a balanced state, so that the measuring head of the measuring rod can contact the product to be measured with extremely small measuring force or even zero measuring force, thereby reducing the deformation of the product to be measured under pressure, improving the accuracy of thickness measurement, and at the same time, the damage to the product to be measured can be reduced, and the yield of the product to be measured can be improved.

[0021] In order to make the above-mentioned purposes, features and advantages of the application more obvious and easy to understand, the following preferred embodiments are described in detail below, and the accompanying drawings are described as follows. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0023] Figure 1 A perspective structural schematic diagram of the measuring device in some embodiments of the application is shown;

[0024] Figure 2 A one-view structural schematic diagram of part of the measuring device in some embodiments of the application is shown;

[0025] Figure 3 A structural schematic diagram of part A in Figure 2 is shown;

[0026] Figure 4 A structural schematic diagram of part B in Figure 2 is shown;

[0027] Figure 5 Another one-view structural schematic diagram of part of the measuring device in some embodiments of the application is shown;

[0028] Figure 6 Still another one-view exploded structural schematic diagram of part of the measuring device in some embodiments of the application is shown.

[0029] Main element symbol explanation:

[0030] 100-measuring device; 110-guide; 120-sliding member; 121-connection part; 130-lever assembly; 131-first lever; 132-second lever; 133-connection part; 140-measuring assembly; 141-measuring rod; 1411-measuring head; 142-grating ruler; 143-grating sensor; 144-connection plate; 145-mounting bracket; 1451-accommodation space; 1452-guiding groove; 150-balancing member; 160-driving member; 170-transmission assembly; 171-driving gear; 172-driven gear; 180-screw rod; 191-adjusting screw rod; 192-optocoupler sensor; 1921-detecting opening; 193-light blocking member; 1931-light blocking sheet; 1932-connection sheet; 194-bottom plate; 1941-through hole; 195-supporting arm; 196-threaded retainer; 197-threaded column; 198-marble platform; 199-circuit board. DETAILED DESCRIPTION

[0031] Embodiments of the present application are described below in detail, examples of which are shown in the accompanying drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary, only for explaining the present application, and cannot be understood as a limitation of the present application.

[0032] In the description of the present application, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0033] In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specifically limited.

[0034] In the present application, unless specifically defined and limited otherwise, the terms "mounting", "connected", "connecting", "fixed", and the like, should be interpreted broadly, for example, can be fixed connection, can also be detachable connection, or integral; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0035] In the present application, unless specifically defined and limited otherwise, the first feature is "on" or "under" the second feature. The first and second features can be in direct contact, or the first and second features can be indirectly in contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be the first feature directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be the first feature directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0036] As shown in Figure 1 The embodiment of the present application provides a measuring device 100, which relates to the field of precision measurement technology and is mainly used for measuring the thickness of a product to be measured, such as a film, a chip, glass and the like.

[0037] As shown in Figure 1 and Figure 2 The measuring device 100 mainly comprises a guide piece 110, a sliding piece 120, a lever assembly 130 and a measuring assembly 140.

[0038] The sliding piece 120 is slidably connected with the guide piece 110 in the vertical direction, so that the sliding piece 120 can slide on the guide piece 110 in the vertical direction. The lever assembly 130 is rotationally connected with the sliding piece 120, and the length direction of the lever assembly 130 intersects with the vertical direction. When the lever assembly 130 rotates relative to the sliding piece 120 to the length direction coincides with the horizontal direction, the length direction of the lever assembly 130 is perpendicular to the vertical direction.

[0039] The measuring assembly 140 is rotationally connected with one end of the lever assembly 130, and the measuring assembly 140 comprises a measuring rod 141, the measuring rod 141 has a measuring head 1411, the measuring head 1411 is used for contacting the product to be measured, and the center line of the measuring rod 141 is parallel to the vertical direction. The lever assembly 130 is provided with a plurality of, so that one end of each lever assembly 130 is rotationally connected with the measuring assembly 140, and the adjacent two lever assemblies 130 are arranged at intervals in the vertical direction. At least one end of the lever assembly 130 away from the measuring assembly 140 is provided with a balancing piece 150.

[0040] It should be noted that the balancing member 150 is used to balance the weight of the one end of the lever assembly 130 close to the measuring assembly 140, so that the lever assembly 130 tends to be in a balanced state, that is, the length direction of the lever assembly 130 coincides with the horizontal direction. Exemplarily, the balancing member 150 is a weight, and of course, the balancing member 150 can also be other devices capable of balancing the weight, such as a counterweight.

[0041] Exemplarily, the guide member 110 can be a guide rail, and the sliding member 120 is a slider used in cooperation with the guide rail, and of course, the guide member 110 and the sliding member 120 can also be other combinations, such as the guide member 110 is a guide rod, and the sliding member 120 is a linear bearing sleeved on the guide rod, which can all achieve the sliding of the sliding member 120 on the guide member 110 in the vertical direction. In addition, the number of the lever assemblies 130 can be set to two, and of course, it can also be set to three, four, five, etc.

[0042] In the related art, the combination of the grating ruler, the grating sensor and the measuring rod is used in the measuring device to measure the thickness of the product to be measured. However, when the measuring head of the measuring rod slides in the vertical direction and contacts the product to be measured, there is a large measuring force, which can cause pressure on the surface of the product to be measured, resulting in micro-deformation of the product, thereby causing measurement error and leading to a decrease in measurement accuracy.

[0043] In the measuring device 100 provided in the embodiment, a plurality of lever assemblies 130 are arranged, each of the lever assemblies 130 is rotationally connected with the sliding member 120, the length direction of each of the lever assemblies 130 intersects with the vertical direction, one end of each of the lever assemblies 130 is rotationally connected with the measuring assembly 140, and the two adjacent lever assemblies 130 are arranged in the vertical direction. On this basis, the one end of at least one of the lever assemblies 130 away from the measuring assembly 140 is provided with a balancing member 150. When the thickness of the product to be measured is measured, the balancing member 150 can balance the weight of the one end of the lever assembly 130 close to the measuring assembly 140, so that the lever assembly 130 tends to be in a balanced state. In this way, the measuring head 1411 of the measuring rod 141 can contact the product to be measured with a very small measuring force or even a measuring force tending to zero, thereby reducing the deformation of the product to be measured and improving the accuracy of the thickness measurement.

[0044] At the same time, since the measuring force is very small or even tends to zero, the damage to the product to be measured can also be reduced, and the yield of the product to be measured can be improved.

[0045] In combination with Figure 2 and Figure 6As shown, in one embodiment, the lever assembly 130 with the balancer 150 includes a first lever 131, a second lever 132 and a connector 133. The slider 120 and the measuring assembly 140 are respectively hinged between the first lever 131 and the second lever 132. The connector 133 is connected between the first lever 131 and the second lever 132 and is connected to the balancer 150.

[0046] It is understood that by hinged the slider 120 and the measuring component 140 between the first lever 131 and the second lever 132 respectively, the first lever 131 and the second lever 132 can support the two opposite sides of the measuring component 140, improve the stability of the measuring component 140, and thus reduce the swaying of the measuring rod 141 in the vertical direction.

[0047] Based on this, the balancer 150 is set at the end of the lever assembly 130 away from the measuring assembly 140 via the connector 133. It is used to balance the weight of the lever assembly 130 at the end close to the measuring assembly 140, so that the lever assembly 130 tends to be in a balanced state. In this way, during the thickness measurement process, the probe 1411 of the measuring rod 141 can contact the product to be measured with a very small measuring force or even a measuring force close to zero, thereby further improving the measurement accuracy of the thickness of the product to be measured and enhancing market competitiveness.

[0048] like Figure 2 As shown, the balancer 150 is further connected to the connector 133 via the adjusting screw 191, and the center line of the adjusting screw 191 is inclined relative to the length direction of the lever assembly 130.

[0049] Understandably, since the balancer 150 is connected to the connector 133 via the adjusting screw 191, the user can increase or decrease the distance between the balancer 150 and the lever assembly 130 by rotating the adjusting screw 191, thereby adjusting the length of the lever arm. Therefore, the adjusting screw 191 allows the user to easily adjust the lever assembly 130 to a balanced state, thus improving the accuracy of thickness measurement.

[0050] refer to Figure 5 As illustrated, when the lever assembly 130 tilts clockwise, the length of the lever arm can be reduced by decreasing the distance between the balancer 150 and the lever assembly 130, allowing the lever assembly 130 to rotate counterclockwise until it reaches a balanced state. Similarly, when the lever assembly 130 tilts counterclockwise, the length of the lever arm can be increased by increasing the distance between the balancer 150 and the lever assembly 130, allowing the lever assembly 130 to rotate clockwise until it reaches a balanced state.

[0051] like Figure 5Further, the inclination angle of the center line of the adjusting screw 191 relative to the length direction of the lever assembly 130 is θ, which satisfies the relationship: 30°≤θ≤60°.

[0052] For example, the inclination angle θ of the center line of the adjusting screw 191 relative to the length direction of the lever assembly 130 is 50°. Of course, the inclination angle θ of the center line of the adjusting screw 191 relative to the length direction of the lever assembly 130 can also be 30°, 32°, 35°, 40°, 45°, 48°, 49.5°, 50.2°, 54°, 55°, 58°, 60°, etc.

[0053] It should be noted that, under the condition that the angle of the adjusting screw 191 is the same, the greater the θ, the smaller the length change of the lever force arm. The smaller the θ, the greater the length change of the lever force arm. It is easy to understand that too large and too small θ are not convenient for the user to adjust the lever assembly 130 to the balance state.

[0054] It should be understood that, by controlling the inclination angle θ of the center line of the adjusting screw 191 relative to the length direction of the lever assembly 130 within the range of 30°-60°, it is more convenient for the user to adjust the size of the lever force arm, so as to easily adjust the lever assembly 130 to the balance state, thereby improving the adjustment efficiency.

[0055] For example, the connecting piece 133 can be a stud, which is located between the first lever 131 and the second lever 132, one end of the stud is connected with the first lever 131 by a screw, and the other end is also connected with the second lever 132 by a screw.

[0056] It can be understood that when the screw is tightened, the stud does not move relative to the first lever 131 and the second lever 132, and the inclination angle θ remains fixed. When the screw is loosened, the stud can rotate relative to the first lever 131 and the second lever 132, at which time the user can adjust the inclination angle θ of the balance piece 150 relative to the length direction of the lever assembly 130 by rotating the stud. Of course, the connecting piece 133 can also be other elements, such as a connecting rod, etc.

[0057] Continuing to refer to Figure 5 Further, the connecting piece 133 has a center line, for example, the connecting piece 133 is a stud or a connecting rod, which has a center line, the distance between the rotation axis of the lever assembly 130 relative to the sliding piece 120 and the rotation axis of the measuring assembly 140 is L1, the distance between the center line of the connecting piece 133 and the rotation axis of the lever assembly 130 relative to the sliding piece 120 is L2, and the distance between the rotation axes of two adjacent lever assemblies 130 relative to the sliding piece 120 is H, which satisfies the relationship: L1=L2, 30mm≤H≤60mm.

[0058] Exemplarily, the distance H between the rotation axes of the two adjacent lever assemblies 130 relative to the sliding member 120 is selected as 45 mm. Of course, the distance H between the rotation axes of the two adjacent lever assemblies 130 relative to the sliding member 120 can also be selected as 30 mm, 32 mm, 35 mm, 36 mm, 38 mm, 40 mm, 41 mm, 43 mm, 44 mm, 44.5 mm, 45.5 mm, 46 mm, 50 mm, 54 mm, 56 mm, 60 mm, etc.

[0059] It should be understood that by setting L1 and L2 as equal, and controlling the distance H between the rotation axes of the two adjacent lever assemblies 130 relative to the sliding member 120 within the range of 30 mm to 60 mm, the phenomenon of the measuring rod 141 shaking relative to the vertical direction can be effectively improved, so that the measuring rod 141 has higher stability and can be maintained in a vertical state, so that the moving direction of the measuring rod 141 and the thickness direction of the product to be measured are on the same straight line or extension line, that is, the Abbe principle is met: in length measurement, the standard length quantity (standard line) should be placed on the extension line of the measured length quantity (measured line), thereby improving the accuracy of thickness measurement.

[0060] Of course, the lever assembly 130 without the balance member 150 can also adopt the above structure, which will not be exemplified one by one here.

[0061] In combination with Figure 2 and Figure 4 shown, in one embodiment, the measuring device 100 further comprises a light coupling sensor 192 and a light blocking member 193, the light coupling sensor 192 is arranged on the sliding member 120, the light blocking member 193 is arranged on one of the plurality of lever assemblies 130, the light coupling sensor 192 has a detection opening 1921, and at least part of the light blocking member 193 is located in the detection opening 1921.

[0062] In combination with Figure 3 and Figure 4 shown, exemplarily, the light blocking member 193 comprises a connecting piece 1932 and a light blocking piece 1931, one end of the connecting piece 1932 is connected with the sliding member 120, and the other end of the connecting piece 1932 away from the sliding member 120 is connected with the light blocking piece 1931, and at least part of the light blocking piece 1931 is located in the detection opening 1921.

[0063] It can be understood that, by arranging the light coupling sensor 192 on the sliding piece 120 and the light blocking piece 193 on one of the lever assemblies 130, when the measuring head 1411 contacts the product to be measured, the lever assembly 130 will be unbalanced, and the light blocking piece 193 will move at the detection opening 1921 under the action of the lever, thereby triggering the light coupling sensor 192. As can be seen, through the cooperation of the light coupling sensor 192 and the light blocking piece 193, it can be detected whether the measuring head 1411 contacts the product to be measured, thereby improving the automation degree of the measuring device 100.

[0064] Further, the light blocking piece 193 and the light coupling sensor 192 are arranged away from the rotation axis of the lever assembly 130 relative to the sliding piece 120, so as to improve the detection accuracy and sensitivity of the light coupling sensor 192, thereby being able to more timely and accurately detect whether the measuring head 1411 contacts the product to be measured. For example, the light blocking piece 193 and the light coupling sensor 192 can be arranged on the side of the lever assembly 130 close to the measuring assembly 140, or on the side of the lever assembly 130 close to the balancing piece 150.

[0065] As shown in Figure 2 Further, the sliding piece 120 is further provided with a circuit board 199, such as a printed circuit board (PCB) or a flexible printed circuit (FPC), and the circuit board 199 is electrically connected with the light coupling sensor 192.

[0066] It should be understood that, by arranging the circuit board 199, the voltage signal of the light coupling sensor 192 can be received and processed, and the real-time state of the lever assembly 130 can be output, so as to facilitate the user to judge whether the measuring head 1411 contacts the product to be measured, thereby facilitating the thickness measurement.

[0067] Exemplarily, the measuring device 100 further comprises a prompter, such as a sound prompter, a light prompter, etc., and the prompter is electrically connected with the circuit board 199, so that when the measuring head 1411 contacts the product to be measured, the prompter outputs prompt information, so as to facilitate the user to judge.

[0068] In combination with Figure 1 and Figure 2 In one embodiment, the measuring device 100 further comprises a driving piece 160, a transmission assembly 170 and a lead screw 180, the driving piece 160 is arranged on the guide piece 110, the transmission assembly 170 is connected between the driving piece 160 and the lead screw 180, and the part of the lead screw 180 away from the transmission assembly 170 is arranged through the sliding piece 120, and the driving piece 160 drives the lead screw 180 to rotate through the transmission assembly 170, so as to drive the sliding piece 120 to slide in the vertical direction.

[0069] Exemplarily, the driving member 160 is a rotary motor, and of course, the driving member 160 can also be other devices capable of outputting torque, such as a driving motor.

[0070] It can be understood that, since the driving member 160, the transmission assembly 170 and the lead screw 180 are arranged, wherein the transmission assembly 170 is connected between the lead screw 180 and the driving member 160, and the part of the lead screw 180 away from the transmission assembly 170 is arranged through the sliding member 120, therefore, when measuring the thickness of the product to be measured, the driving member 160 drives the transmission assembly 170 to move, the transmission assembly 170 transmits the torque of the driving member 160 to the lead screw 180, thereby driving the lead screw 180 to rotate, so that the sliding member 120 slides along the vertical direction, and the probe 1411 of the measuring rod 141 approaches or moves away from the product to be measured along the vertical direction.

[0071] As shown in Figure 2 and Figure 6 , in one specific embodiment, the transmission assembly 170 includes a driving gear 171 and a driven gear 172, the driven gear 172 is fixed to one end of the lead screw 180 away from the sliding member 120, and the driving gear 171 is fixed to the output end of the driving member 160 and is engaged with the driven gear 172.

[0072] Exemplarily, the driven gear 172 can be fixed to the lead screw 180 by means of key connection, welding, screw connection, clamping connection and the like, and of course, the driving gear 171 can also be fixed to the output end of the driving member 160 by means of the above-mentioned ways.

[0073] It can be understood that, through the combined use of the driving gear 171 and the driven gear 172, when measuring the thickness of the product to be measured, the driving member 160 drives the driving gear 171 to rotate, thereby driving the driven gear 172 engaged with the driving gear 171 to rotate, and then driving the sliding member 120 to slide along the vertical direction on the guide member 110 through the lead screw 180, so as to realize the probe 1411 of the measuring rod 141 to approach or move away from the product to be measured along the vertical direction, to meet the thickness measurement needs of the product to be measured.

[0074] Further, the pitch circle diameter of the driving gear 171 is d1, the pitch circle diameter of the driven gear 172 is d2, and the relationship d2 / d1=i, 3≤i≤5 is satisfied.

[0075] It should be pointed out that the driving gear 171 and the driven gear 172 form a gear assembly, and the ratio i of the pitch circle diameter d2 of the driven gear 172 to the pitch circle diameter d1 of the driving gear 171 refers to the transmission ratio of the above-mentioned gear assembly.

[0076] Exemplarily, i is selected as 25 / 6, i.e. the transmission ratio of the gear assembly is 25 / 6, of course, i can also be selected as 3, 3.1, 3.2, 3.5, 3.8, 4, 4.2, 4.5, 4.8, 5, etc.

[0077] It should be understood that by controlling the transmission ratio i of the gear assembly in the range of 3-5, the effect of "speed reduction and torque increase" is achieved, so that the power of the driving member 160 is sufficient to drive the sliding member 120 to slide in the vertical direction on the guide member 110, at the same time, the sliding speed of the sliding member 120 is optimized, so that the speed of the lever assembly 130 moving in the vertical direction is moderate, which can effectively reduce the imbalance of the lever assembly 130 caused by external airflow interference, so that the probe 1411 of the measuring rod 141 can contact the product to be measured with extremely small measurement force or even zero measurement force, thereby improving the accuracy of thickness measurement.

[0078] As shown in Figure 2 and Figure 6 , the sliding member 120 is provided with a connecting portion 121, the connecting portion 121 is provided with a threaded hole penetrating through it, and the part of the lead screw 180 away from the transmission assembly 170 is arranged in the threaded hole and matched with the internal thread of the threaded hole.

[0079] It should be understood that by providing the connecting portion 121 on the sliding member 120 and providing the threaded hole in the connecting portion 121, the arrangement and assembly of the lead screw 180 are facilitated.

[0080] In another specific embodiment, the transmission assembly 170 includes a worm and a worm gear, one end of the worm gear is fixed to the output end of the driving member 160, the part of the worm gear away from the driving member 160 is engaged with the worm, and the worm is fixed to the end of the lead screw 180 away from the sliding member 120, so that when the worm rotates, it can drive the worm engaged with it to rotate, and also drive the sliding member 120 to slide along the guide member 110, so as to realize the measuring rod 141 approaching or moving away from the product to be measured in the vertical direction.

[0081] In combination with Figure 2 and Figure 6 , in one embodiment, the measuring assembly 140 further includes a grating ruler 142 and a grating sensor 143, one end of the grating ruler 142 is connected with the measuring rod 141, and the part of the grating ruler 142 away from the measuring rod 141 is arranged opposite to the grating sensor 143.

[0082] It can be understood that by setting the grating sensor 143 and the grating ruler 142 in cooperation, one end of the grating ruler 142 is connected with the measuring rod 141, and the part of the grating ruler 142 away from the measuring rod 141 is arranged opposite to the grating sensor 143, so that when the thickness of the product to be measured is measured, the measuring rod 141 approaches the product to be measured along the vertical direction until the measuring head 1411 contacts the surface of the product to be measured, and in this process, the distance difference between the surface of the product to be measured and the reference position is measured by using the displacement measurement function of the grating ruler 142 and the grating sensor 143, and then the thickness of the product to be measured can be calculated.

[0083] In the above measurement process, since the balance piece 150 can balance the weight of one end of the lever assembly 130 close to the measuring assembly 140, the lever assembly 130 tends to be in a balanced state, so that the measuring head 1411 of the measuring rod 141 can contact the product to be measured with extremely small measurement force or even zero measurement force, thereby reducing the stress deformation of the product to be measured, improving the accuracy of thickness measurement, and at the same time, reducing the damage to the product to be measured and improving the yield of the product to be measured.

[0084] In combination with the figures shown in Figure 2 , Figure 3 and Figure 6 , further, the measuring assembly 140 further comprises a connecting plate 144 and a mounting bracket 145, the mounting bracket 145 has a spacing between the lever assembly 130, and is provided with an accommodating space 1451 open at both ends along the vertical direction, and is provided with a measurement opening along the horizontal direction, the grating sensor 143 is arranged at the measurement opening, at least part of the grating ruler 142 is accommodated in the accommodating space 1451, and the measurement opening is arranged opposite to the grating ruler 142, one side of the connecting plate 144 is connected with the grating ruler 142 or the measuring rod 141, and the other side of the connecting plate 144 is rotatably connected with one end of each lever assembly 130.

[0085] It can be understood that the connecting plate 144 is arranged to facilitate the assembly of the measuring rod 141, the grating ruler 142 and the lever assembly 130, and the mounting bracket 145 is arranged to facilitate the assembly of the grating sensor 143. When the thickness of the product to be measured is measured, the grating ruler 142 moves at the accommodating space 1451 along the vertical direction, and the distance difference between the surface of the product to be measured and the reference position is measured by cooperating with the grating sensor 143, so as to obtain the thickness of the product to be measured.

[0086] As shown in Figure 3 and Figure 6 , still further, the mounting bracket 145 is provided with a guide groove 1452 along the vertical direction close to one side of the lever assembly 130, the guide groove 1452 is communicated with the accommodating space 1451, and in the plurality of lever assemblies 130, one end of at least one lever assembly 130 away from the balance piece 150 is located in the guide groove 1452.

[0087] It can be understood that by opening the guide groove 1452 on the mounting bracket 145 in the vertical direction, when the sliding piece 120 slides on the guide piece 110 in the vertical direction, one end of the lever assembly 130 located at the position of the guide groove 1452 can abut the groove wall of the guide groove 1452 and slide on the groove wall of the guide groove 1452 in the vertical direction. In this process, the guide groove 1452 plays a guiding and limiting role on the lever assembly 130, which can effectively reduce the imbalance of the lever assembly 130, so that the measuring rod 141 can contact the product to be measured in the vertical direction, meet the Abbe principle, and improve the accuracy of thickness measurement.

[0088] As shown in Figure 6 , in one embodiment, the measuring device 100 further comprises a bottom plate 194, the bottom plate 194 is provided with a through hole 1941, the measuring rod 141 is arranged in the through hole 1941, and the guide piece 110 is arranged on the bottom plate 194.

[0089] It can be understood that by arranging the bottom plate 194, the arrangement and assembly of the measuring rod 141 and the guide piece 110 are facilitated, and at the same time, the bottom plate 194 is used to bear the weight of the lever assembly 130, the balancing piece 150 and other structures.

[0090] As shown in Figure 1 , further, the measuring device 100 further comprises a marble platform 198, a threaded column 197, a threaded retaining ring 196 and a support arm 195. The marble platform 198 is used to place the product to be measured. The threaded column 197 is vertically arranged on the marble platform 198. The support arm 195 is slidingly arranged on the threaded column 197. The bottom plate 194 is arranged on the support arm 195. The threaded retaining ring 196 is arranged on the threaded column 197 in a spiral manner and is connected with the bottom of the support arm 195, which is used to adjust the distance between the support arm 195 and the marble platform 198, so as to adjust the distance between the measuring assembly 140 and the marble platform 198.

[0091] It can be understood that by arranging the marble platform 198, the product to be measured can be placed conveniently. By arranging the support arm 195 and the threaded retaining ring 196, the distance between the measuring assembly 140 and the marble platform 198 can be adjusted, so as to meet the thickness measurement requirements of different specifications of the product to be measured.

[0092] In summary, when the measuring device 100 provided by the embodiment is used, the driving member 160 drives the screw rod 180 to rotate through the transmission assembly 170, so as to drive the sliding member 120 to slide along the vertical direction on the guide member 110, and further drive the measuring rod 141 to move along the vertical direction, until the measuring head 1411 of the measuring rod 141 is in contact with the surface of the product to be measured with a very small measuring force or even a measuring force tending to zero. In this process, the grating sensor 143 cooperates with the grating ruler 142 to measure the distance between the surface of the product to be measured and the reference position, so as to calculate the thickness of the product to be measured.

[0093] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples. In addition, different embodiments or examples described in the present specification and the features of different embodiments or examples can be combined and combined by those skilled in the art without contradiction.

[0094] Although the embodiments of the present application have been shown and described above, it should be understood that the above embodiments are exemplary and should not be construed as limiting the present application, and those skilled in the art can make changes, modifications, replacements and variations to the above embodiments within the scope of the present application.

Claims

1. A measuring device, characterized in that, include: A guide and a slider, wherein the slider is slidably connected to the guide in the vertical direction; A lever assembly is rotatably connected to the sliding member, and the length direction of the lever assembly intersects the vertical direction; A measuring component is rotatably connected to one end of the lever assembly. The measuring component includes a measuring rod, a grating ruler, a grating sensor, a connecting plate, and a mounting bracket. One end of the grating ruler is connected to the measuring rod, and the portion of the grating ruler away from the measuring rod is positioned opposite to the grating sensor. The mounting bracket is spaced from the lever assembly and has a receiving space with openings at both ends along the vertical direction, and a measuring opening along the horizontal direction. The grating sensor is positioned at the measuring opening. At least a portion of the grating ruler is housed within the receiving space and positioned opposite to the measuring opening. The mounting bracket has a guide groove along the vertical direction on the side near the lever assembly, and the guide groove communicates with the receiving space. The measuring rod has a probe for contacting the product to be measured, and the centerline of the measuring rod is parallel to the vertical direction. The lever assembly comprises multiple lever components, with adjacent lever components spaced apart along the vertical direction. At least one lever component has a balancing element at its end away from the measuring component. One side of the connecting plate is connected to the grating ruler or the measuring rod, and the other side of the connecting plate is rotatably connected to one end of each lever component. Among the multiple lever components, at least one lever component has its end away from the balancing element located within the guide groove. The lever component with the balancing element includes a first lever, a second lever, and a connecting element. The sliding element and the measuring component are respectively hinged between the first lever and the second lever. The connecting element connects between the first lever and the second lever and is connected to the balancing element. The connecting element has a center line. The distance between the rotation axis of the lever component relative to the sliding element and the rotation axis of the lever component relative to the measuring component is L1. The distance between the center line of the connecting element and the rotation axis of the lever component relative to the sliding element is L2. The distance between two adjacent lever components relative to the rotation axis of the sliding element is H, satisfying the following relationships: L1=L2, 30mm≤H≤60mm.

2. The measuring device according to claim 1, characterized in that, The balancing component is connected to the connecting component via an adjusting screw, and the centerline of the adjusting screw is inclined relative to the length direction of the lever assembly.

3. The measuring device according to claim 2, characterized in that, The tilt angle of the centerline of the adjusting screw relative to the length direction of the lever assembly is θ, which satisfies the relationship: 30°≤θ≤60°.

4. The measuring device according to any one of claims 1 to 3, characterized in that, The measuring device further includes an optical coupler sensor and a light-blocking component. The optical coupler sensor is disposed on the sliding component, and the light-blocking component is disposed on one of the lever components. The optical coupler sensor has a detection opening, and at least a portion of the light-blocking component is located within the detection opening.

5. The measuring device according to any one of claims 1 to 3, characterized in that, The measuring device further includes a driving component, a transmission assembly, and a lead screw. The driving component is disposed on the guide component, and the transmission assembly is connected between the driving component and the lead screw. The portion of the lead screw away from the transmission assembly passes through the sliding component. The driving component drives the lead screw to rotate through the transmission assembly, thereby causing the sliding component to slide along the vertical direction.

6. The measuring device according to claim 5, characterized in that, The transmission assembly includes a driving gear and a driven gear. The driven gear is fixed to the end of the lead screw away from the sliding member, and the driving gear is fixed to the output end of the driving member and meshes with the driven gear.

7. The measuring device according to claim 6, characterized in that, The pitch circle diameter of the driving gear is d1, and the pitch circle diameter of the driven gear is d2, satisfying the relationship: d2 / d1=i, 3≤i≤5.

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