An electron beam rust removal and polishing metal vapor recovery device and rust removal and polishing method

Abstract

This invention relates to the field of high-energy beam surface modification technology, and more particularly to an electron beam rust removal and polishing metal vapor recovery device and method. The Y-axis moving mechanism is mounted on the X-axis moving mechanism, and a worktable is mounted on the Y-axis moving mechanism. A platform is mounted on the worktable, and a condenser assembly for placing a metal sample to be treated is provided on the platform. A movable insert assembly for restricting the movement of the condenser assembly is provided on the outer periphery of the condenser assembly, and the movable insert assembly is detachably connected to the worktable. The advantages of this invention are: the condenser assembly can fully adhere rust layer vapor to the surface of the recovery plate, preventing contamination inside the vacuum chamber, and facilitating the movement of the metal sample placed inside the condenser assembly along the required path, thus facilitating electron beam rust removal and polishing of the metal sample.

Description

Technical Field

[0001] This invention relates to the field of high-energy beam surface modification technology, and in particular to an electron beam rust removal and polishing metal vapor recovery device and a rust removal and polishing method. Background Technology

[0002] Surface corrosion of metal parts can lead to reduced quality, surface failure, and insufficient bonding strength. Therefore, it is necessary to remove the rust layer from the surface of parts during use to extend their service life and prepare them for subsequent processing. Currently, commonly used rust removal methods include mechanical grinding, shot peening, sandblasting, and pickling. However, these methods have drawbacks such as high energy consumption, environmental pollution, and damage to the substrate.

[0003] Electron beam surface modification technology boasts advantages such as high energy, high processing efficiency, and vacuum cleaning without pollution. By adjusting the electron beam energy, a series of thermal processes, including melting, vaporizing, and solidifying the rust layer on parts, can be achieved, resulting in the vaporization of the rust layer and surface purification. However, existing electron beam rust removal methods still face some common problems that urgently need to be addressed. First, due to the high electron beam energy, the molten pool on the part surface flows violently, forming molten pits and wrinkled surface defects after solidification. The significant surface roughness affects the subsequent performance of the parts. Second, during electron beam rust removal, a large amount of metal vapor is generated. This dispersed metal vapor adheres to the walls of the vacuum chamber and other surfaces of the parts, causing pollution. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide an electron beam rust removal and polishing metal vapor recovery device and a rust removal and polishing method, which can effectively reduce the pollution caused during the rust removal process, and at the same time recover the metal vapor of the rust layer to improve the surface finish of the metal.

[0005] The technical solution of the present invention to solve the above-mentioned technical problems is as follows: An electron beam rust removal and polishing metal vapor recovery device includes an X-axis moving mechanism and a Y-axis moving mechanism. The Y-axis moving mechanism is installed on the X-axis moving mechanism and is used to move back and forth in the X-axis direction under the drive of the X-axis moving mechanism. A worktable is installed on the Y-axis moving mechanism to drive the worktable to move back and forth in the Y-axis direction. A platform is installed on the worktable, and a condenser cylinder assembly for placing the metal sample to be treated is provided on the platform. A movable insert plate assembly for restricting the movement of the condenser cylinder assembly is provided on the outer periphery of the condenser cylinder assembly. The movable insert plate assembly is detachably connected to the platform.

[0006] The beneficial effects of this invention are as follows: This invention restricts the condenser assembly on the platform through the movable insert plate assembly. The condenser assembly can fully adhere the rust layer vapor to the surface of the recovery plate, preventing contamination inside the vacuum chamber. The X-axis and Y-axis moving mechanisms drive the worktable to move, realizing feed motion in two vertical directions, thereby achieving movement at any position in the plane. This facilitates the movement of the metal sample placed in the condenser assembly along the required track, making it convenient for electron beam rust removal and polishing of the metal sample.

[0007] Based on the above technical solution, the present invention can be further improved as follows.

[0008] Furthermore, the condenser assembly includes four movable condenser plates, which are connected end to end to form a rectangular cylindrical structure. The bottom end of the rectangular cylindrical structure abuts against the upper surface of the platform, and the top opening of the rectangular cylindrical structure faces upward. The outer walls of the four movable condenser plates abut against the inner wall of the movable insert plate assembly.

[0009] The beneficial effect of adopting the above-mentioned further solution is that the condenser assembly is a rectangular cylindrical structure composed of four movable condenser plates that abut each other in sequence. When performing electron beam rust removal on the metal sample, the metal sample is placed inside the rectangular cylindrical structure. During the rust removal process, the rust layer vapor adheres to the inner wall of the movable condenser plate, preventing contamination inside the vacuum chamber.

[0010] Furthermore, the movable insert plate assembly includes two parallel and spaced-apart first insert plates and two parallel and spaced-apart second insert plates. The first insert plates and the second insert plates are slidably disposed on the upper surface of the platform. The two first insert plates are sandwiched between the two second insert plates. The two second insert plates are limitedly connected to the upper surface of the platform. The condenser cylinder assembly is disposed inside the first insert plates and the second insert plates.

[0011] The beneficial effect of adopting the above-mentioned further solution is that by clamping the two first inserts with two second inserts and then restricting the two second inserts on the platform, the installation of the first inserts and the second inserts can be realized, and the installation and disassembly are convenient.

[0012] Furthermore, the upper surface of the worktable is provided with two first T-shaped slide grooves arranged along the X-axis and two second T-shaped slide grooves arranged along the Y-axis. The first T-shaped slide grooves and the second T-shaped slide grooves extend from the adjacent two sides of the platform to the middle of the worktable, and the first T-shaped slide grooves and the second T-shaped slide grooves are connected. The bottom of the first insert plate is provided with a first inverted T-shaped seat that matches the first T-shaped slide groove, and the bottom of the second insert plate is provided with a second inverted T-shaped seat that matches the second T-shaped slide groove. The first inverted T-shaped seat is slidably disposed in the first T-shaped slide groove, and the second inverted T-shaped seat is slidably disposed in the second T-shaped slide groove.

[0013] The beneficial effects of adopting the above-mentioned further solution are: by setting the first T-shaped slide and the second T-shaped slide, the first insert plate and the second insert plate can be restricted, while facilitating the installation and disassembly of the first insert plate and the second insert plate.

[0014] Furthermore, the bottom side wall of the second insert plate is provided with a positioning plate, which is detachably and fixedly connected to the platform by bolts.

[0015] The beneficial effects of adopting the above-mentioned further solution are: by installing a positioning plate at the bottom of the second insert plate and fixing the positioning plate to the platform with bolts, the second insert plate is restricted and prevented from moving. Since the two second insert plates clamp the two first insert plates, the entire movable insert plate assembly is fixedly installed on the platform, making installation and disassembly convenient.

[0016] Furthermore, the outer peripheral wall of the condenser cylinder assembly is uniformly provided with a plurality of vertically arranged trapezoidal protrusions, and the inner wall of the movable insert plate assembly is provided with trapezoidal grooves corresponding to the trapezoidal protrusions one by one, and the trapezoidal protrusions are slidably inserted into the trapezoidal grooves one by one.

[0017] The beneficial effect of adopting the above-mentioned further solution is that by setting trapezoidal protrusions, the connection between the condenser cylinder assembly and the movable insert plate assembly is strengthened, which facilitates the assembly of the condenser cylinder assembly.

[0018] Furthermore, both the X-axis moving mechanism and the Y-axis moving mechanism adopt ball screw linear guide slides.

[0019] The beneficial effects of adopting the above-mentioned further solution are: both the X-axis moving mechanism and the Y-axis moving mechanism adopt ball screw linear guide slides, which can accurately control the movement of the platform.

[0020] Furthermore, the Y-axis moving mechanism includes a first lead screw support frame and a first lead screw. The first lead screw support frame has a first front end support bearing and a first rear end support bearing fixedly installed at both ends. The first lead screw has both ends connected to the first front end support bearing and the second rear end support bearing, respectively. The end of the first lead screw away from the first rear end support bearing extends out of the first front end support bearing and is connected to the output shaft of the first motor via a first coupling. The worktable is mounted on the first lead screw support frame and its bottom is threadedly connected to the first lead screw.

[0021] The beneficial effects of adopting the above-mentioned further solution are: the rotation of the first motor drives the rotation of the first lead screw, thereby driving the worktable to move back and forth along the Y-axis, which is convenient to operate and allows for precise control of the movement distance.

[0022] Furthermore, the X-axis moving mechanism includes a second lead screw support frame and a second lead screw. The two ends of the second lead screw support frame are respectively provided with a second front end support bearing and a second rear end support bearing. The two ends of the second lead screw are respectively connected to the second front end support bearing and the second rear end support bearing. The end of the second lead screw away from the second rear end support bearing extends out of the second front end support bearing and is connected to the output shaft of the second motor via a second coupling. The Y-axis moving mechanism is mounted on the second lead screw support frame and threadedly connected to the second lead screw.

[0023] The advantages of adopting the above-mentioned further solution are: the rotation of the second motor drives the rotation of the second lead screw, thereby driving the worktable to move back and forth along the Y-axis, which is convenient to operate and allows for precise control of the movement distance.

[0024] This invention also provides an electron beam rust removal and polishing method to solve the above-mentioned technical problems. The method utilizes the aforementioned electron beam rust removal and polishing metal vapor recovery device for composite electron beam rust removal and polishing, and includes the following steps:

[0025] Step 1, pretreatment: The rusted metal sample is first cleaned with anhydrous ethanol, and then ultrasonically cleaned to remove surface oil and dust.

[0026] Step 2: Place the above-mentioned electron beam rust removal and polishing metal vapor recovery device in the vacuum chamber of the electron beam machine, and place the sample on the stage inside the condenser assembly;

[0027] Step 3: Use a vacuum pump to evacuate the vacuum chamber of the electron beam machine;

[0028] Step 4: Set the parameters of the electron beam machine, turn on the electron beam emission device to vaporize the surface modification layer of the sample, and remove rust from the entire metal sample surface by adjusting the moving direction and speed of the stage.

[0029] Step 5: Change the electron beam down-beam process parameters and the stage movement trajectory to polish the sample surface;

[0030] Step 6: Turn off the electron beam emitting device, keep the metal sample and condenser assembly stationary, and allow the metal vapor to fully adhere to the inner wall of the condenser assembly. Then open the vacuum chamber and remove the condenser assembly and sample respectively.

[0031] Step 7: When there is too much metal deposit on the inner wall of the condenser assembly, the deposit is removed by grinding.

[0032] Furthermore, in step four, the parameters of the electron beam machine are: electron beam accelerating voltage of 60kV, focusing current of 390mA, accelerating current of 15-20mA, beam spot diameter of 1mm, overlap rate of 50%, and stage horizontal moving speed of 10mm / s.

[0033] Furthermore, in step five, the parameters of the electron beam machine are as follows: electron beam accelerating voltage is 60kV, focusing current is 390mA, accelerating current is 3-7mA, outer diameter of the annular beam spot is 8mm, inner diameter is 4mm, overlap rate is 0, and the horizontal moving speed of the stage is 10mm / s.

[0034] The beneficial effects of adopting the above scheme are as follows: the present invention first uses an ultra-high energy concentrated electron beam to remove the rust layer, which is conducive to fully realizing the vaporization treatment of the rust layer and improving the surface purity; the setting of the metal vapor recovery plate can fully attach the rust layer vapor to the surface of the recovery plate and prevent the contamination of the vacuum chamber; the use of a low energy annular electron beam is conducive to making the surface smoother and improving the surface finish. Attached Figure Description

[0035] Figure 1 This is a schematic diagram of the structure of the present invention;

[0036] Figure 2 This is a schematic diagram of the installation of the Y-axis moving mechanism of the present invention on the X-axis moving mechanism;

[0037] Figure 3 This is a schematic diagram of the Y-axis moving mechanism of the present invention;

[0038] Figure 4 This is a three-dimensional structural diagram of the condenser cylinder assembly and the movable insert plate assembly mounted on the platform in this invention;

[0039] Figure 5 This is a top view of the condenser cylinder assembly and the movable insert plate assembly mounted on the platform in this invention;

[0040] Figure 6 For the present invention Figure 5Sectional view of plane AA in the middle;

[0041] Figure 7 This refers to the movement trajectory of the platform in step four of the method of the present invention.

[0042] Figure 8 This refers to the movement trajectory of the platform in step five of the method of the present invention.

[0043] Figure 9 This is a schematic diagram of the rust removal and polishing treatment of the metal sample in the method of the present invention;

[0044] Figure 10 This is a schematic diagram of the surface of the metal sample after rust removal treatment in the method of the present invention;

[0045] Figure 11 This is a schematic diagram of the surface of the metal sample after polishing in the method of the present invention;

[0046] The attached diagram lists the components represented by each number as follows:

[0047] 1. First motor; 2. First coupling; 3. First front-end support bearing; 4. First lead screw; 5. First lead screw support frame; 6. Second front-end support bearing; 7. Second coupling; 8. Second motor; 9. Second lead screw support frame; 10. Second lead screw; 11. Worktable; 12. First rear-end support bearing; 13. Platform; 14. First insert plate; 15. Second insert plate; 16. Movable condenser plate; 17. Positioning plate; 18. Second rear-end support bearing; 19. Second guide rail; 20. First guide rail; 21. Lead screw nut seat; 22. Guide rail slider; 23. First T-shaped slide groove; 24. Second T-shaped slide groove; 25. Second inverted T-shaped seat; 26. Trapezoidal protrusion; 27. Trapezoidal groove. Detailed Implementation

[0048] The principles and features of the present invention are described below with reference to the accompanying drawings. The examples given are only for explaining the present invention and are not intended to limit the scope of the present invention.

[0049] Example 1

[0050] like Figure 1 , Figure 2 , Figure 3As shown, this embodiment includes an X-axis moving mechanism and a Y-axis moving mechanism. In this embodiment, both the X-axis moving mechanism and the Y-axis moving mechanism adopt ball screw linear guide slides. The Y-axis moving mechanism is mounted on the X-axis moving mechanism and is used to move back and forth in the X-axis direction under the drive of the X-axis moving mechanism. A worktable 11 is mounted on the Y-axis moving mechanism to drive the worktable 11 to move back and forth in the Y-axis direction. A platform 13 is mounted on the worktable 11. The platform 13 is provided with a condenser cylinder assembly for placing the metal sample to be processed. A movable insert plate assembly is provided on the outer periphery of the condenser cylinder assembly to restrict the movement of the condenser cylinder assembly. The movable insert plate assembly is detachably connected to the platform 13. In this embodiment, the X-axis direction and the Y-axis direction generally refer to two mutually perpendicular horizontal directions.

[0051] This invention uses a movable insert plate assembly to confine the condenser assembly on the stage 13. The condenser assembly can fully adhere the rust layer vapor to the surface of the recovery plate, preventing contamination inside the vacuum chamber. The X-axis and Y-axis moving mechanisms drive the worktable 11 to move, enabling feed movements in two vertical directions, thus achieving movement to any position in the plane. This facilitates the movement of the metal sample placed inside the condenser assembly along the required track, making it convenient for electron beam rust removal and polishing of the metal sample.

[0052] Example 2

[0053] like Figure 4 , Figure 5 As shown, based on the above embodiment, this embodiment also makes the following improvements: The condenser assembly includes four movable condenser plates 16, which are connected end to end to form a rectangular cylindrical structure. The bottom end of the rectangular cylindrical structure abuts against the upper surface of the platform 13, and the top opening of the rectangular cylindrical structure faces upward. The outer walls of the four movable condenser plates 16 abut against the inner wall of the movable insert plate assembly. All four movable condenser plates 16 are vertically arranged, and the vertical side of each movable condenser plate 16 is set as a 45-degree inclined surface, so that after two adjacent movable condenser plates 16 abut against each other, the two 45-degree inclined surfaces can fit completely together to form a sealed and fitted structure, preventing rust layer vapor from passing through the abutment gap between two adjacent movable condenser plates 16 and causing contamination to the movable insert plate assembly. The condenser assembly is a rectangular cylindrical structure consisting of four movable condenser plates 16 that abut each other in sequence. When performing electron beam rust removal on a metal sample, the metal sample is placed inside the rectangular cylindrical structure. During the rust removal process, the rust vapor adheres to the inner wall of the movable condenser plates 16, preventing contamination inside the vacuum chamber.

[0054] like Figure 6As shown in this embodiment, multiple horizontally arranged grid plates are integrally fixed on the inner wall of the movable condenser plate 16 from bottom to top. The width of the multiple grid plates (referring to the distance between the side of the grid plate away from the inner wall of the movable condenser plate 16 and the inner wall of the movable condenser plate 16) gradually increases from bottom to top, so that the surface of the multiple grid plates away from the inner wall of the movable condenser plate 16 forms an inclined surface from bottom to top away from the inner wall of the movable condenser plate 16. This makes the inner cavity of the condenser cylinder assembly form a square frustum shape with a large bottom and a small top, which increases the contact area with the rust layer vapor, thereby greatly reducing the steam overflow, which is conducive to absorbing more steam and maximizing the structural benefits.

[0055] Example 3

[0056] like Figure 4 , Figure 5 As shown, based on the above embodiments, this embodiment also makes the following improvements: The movable insert plate assembly includes two parallel and spaced-apart first insert plates 14 and two parallel and spaced-apart second insert plates 15. The two first insert plates 14 are the same size, and the two second insert plates 15 are the same size. The first insert plates 14 and the second insert plates 15 are slidably disposed on the upper surface of the platform 13. The two first insert plates 14 are clamped between the two second insert plates 15. The two second insert plates 15 are limitedly connected to the upper surface of the platform 13. The condenser cylinder assembly is disposed inside the first insert plates 14 and the second insert plates 15. The two first insert plates 14 are clamped by the two second insert plates 15, and then the two second insert plates 15 are restricted on the platform 13, thereby realizing the installation of the first insert plates 14 and the second insert plates 15. The installation and disassembly are convenient.

[0057] Example 4

[0058] like Figure 4 , Figure 6As shown, based on the above embodiment three, this embodiment also makes the following improvements: Two first T-shaped slide grooves 23 spaced apart along the X-axis and two second T-shaped slide grooves 24 spaced apart along the Y-axis are provided on the upper surface of the worktable 11. The first T-shaped slide grooves 23 and the second T-shaped slide grooves 24 extend from adjacent side edges of the platform 13 to the middle of the worktable 11, and the first T-shaped slide grooves 23 and the second T-shaped slide grooves 24 are connected. The two first T-shaped slide grooves 23 and the two second T-shaped slide grooves 24 are intersected and arranged to form a connection with the middle of the platform 13. The bottom inner cavity of the condenser assembly has a rectangular platform with matching dimensions; the bottom of the first insert plate 14 is provided with a first inverted T-shaped seat that matches the first T-shaped slide groove 23, and the bottom of the second insert plate 15 is provided with a second inverted T-shaped seat 25 that matches the second T-shaped slide groove 24. The first inverted T-shaped seat is slidably disposed in the first T-shaped slide groove 23, and the second inverted T-shaped seat 25 is slidably disposed in the second T-shaped slide groove 24. The first insert plate 14 and the second insert plate 15 can be restricted by the first T-shaped slide groove 23 and the second T-shaped slide groove 24, while facilitating the installation and removal of the first insert plate 14 and the second insert plate 15.

[0059] In this embodiment, a positioning plate 17 is provided on the bottom side wall of the second insert plate 15. The positioning plate 17 is detachably and fixedly connected to the platform 13 by bolts. By installing the positioning plate 17 at the bottom of the second insert plate 15 and fixing the positioning plate 17 to the platform 13 by bolts, the second insert plate 15 is restricted from moving. Since the two second insert plates 15 clamp the two first insert plates 14, the entire movable insert plate assembly is fixedly installed on the platform 13, making installation and disassembly convenient.

[0060] Example 5

[0061] Based on the above embodiment 3, the following improvements have been made in this embodiment: After the two first insert plates 14 and the two second insert plates 15 form a rectangular structure that matches the condenser cylinder assembly, they are fixed to the platform 13 by bolts. In order to facilitate the fixing of the first insert plates 14 and the second insert plates 15, the bottom side walls of the first insert plates 14 and the second insert plates 15 are provided with fixing seats, and then the fixing seats are fixedly installed on the platform 13 by bolts.

[0062] Example 6

[0063] like Figure 4 , Figure 5As shown, based on the above embodiments, this embodiment also makes the following improvements: a plurality of vertically arranged trapezoidal protrusions 26 are uniformly provided on the outer peripheral wall of the condenser cylinder assembly, and trapezoidal grooves 27 are provided on the inner wall of the movable insert plate assembly, which correspond one-to-one with the trapezoidal protrusions 26. The trapezoidal protrusions 26 are slidably inserted into the trapezoidal grooves 27. By setting the trapezoidal protrusions 26, the connection between the condenser cylinder assembly and the movable insert plate assembly is strengthened, which facilitates the assembly of the condenser cylinder assembly.

[0064] In this embodiment, to facilitate the installation of each movable condenser plate 16 in the condenser assembly during installation, protrusions can be provided on the outer wall of the movable condenser plate 16, and corresponding grooves can be provided on the inner walls of the first insert plate 14 and the second insert plate 15. Alternatively, protrusions can be provided on the inner walls of the first insert plate 14 and the second insert plate 15, and grooves can be provided on the outer wall of the movable condenser plate 16, thereby enabling one-to-one insertion connection. The use of trapezoidal protrusions 26 and trapezoidal grooves 27 prevents the movable condenser plate 16 from detaching from the first insert plate 14 or the second insert plate 15.

[0065] Example 7

[0066] like Figure 2 , Figure 3As shown, based on the above embodiment, this embodiment also makes the following improvements: The Y-axis moving mechanism includes a first lead screw support frame 5 and a first lead screw 4. The two ends of the first lead screw support frame 5 are respectively fixedly provided with a first front end support bearing 3 and a first rear end support bearing 12. The two ends of the first lead screw 4 are respectively connected to the first front end support bearing 3 and the second rear end support bearing 18. The end of the first lead screw 4 away from the first rear end support bearing 12 extends out of the first front end support bearing 3 and is connected to the output shaft of the first motor 1 through a first coupling 2. The worktable 11 is installed on the first lead screw support frame 5 and its bottom is threadedly connected to the first lead screw 4. Specifically, a lead screw nut seat 21 is threadedly connected to the first lead screw 4. The first lead screw support frame 5 is provided with a first guide rail 20 arranged parallel to the first lead screw 4. There are two first guide rails 20, which are respectively arranged on both sides of the first lead screw 4. Guide rail sliders 22 are slidably provided on the two first guide rails 20. The worktable 11 is fixedly connected to both guide rail sliders 22. The worktable 11 is fixedly connected to the lead screw nut seat 21. The X-axis moving mechanism includes a second lead screw support frame 9 and a second lead screw 10. The second lead screw support frame 9 has a second front-end support bearing 6 and a second rear-end support bearing 18 at both ends. The two ends of the second lead screw 10 are connected to the second front-end support bearing 6 and the second rear-end support bearing 18, respectively. The end of the second lead screw 10 away from the second rear-end support bearing 18 extends out of the second front-end support bearing 6 and is connected to the output shaft of the second motor 8 via a second coupling 7. The Y-axis moving mechanism is mounted on the second lead screw support frame 9 and threadedly connected to the second lead screw 10. The second lead screw support frame 9 has two second guide rails 19 arranged parallel to the second lead screw 10. Each of the two second guide rails 19 has a sliding guide rail slider 22. The first lead screw 4 is also threadedly connected to a lead screw nut seat 21. The bottom of the first lead screw support frame 5 is fixedly connected to the lead screw nut seat 21 and the two guide rail sliders 22. The structure is simple, easy to operate, and provides precise control of the moving distance.

[0067] Example 8

[0068] like Figure 9 As shown, this embodiment discloses an electron beam rust removal and polishing method, which uses the electron beam rust removal and polishing metal vapor recovery device described above for electron beam rust removal and composite polishing, including the following steps:

[0069] Step 1, pretreatment: The rusted metal sample is first cleaned with anhydrous ethanol, and then ultrasonically cleaned to remove surface oil and dust.

[0070] Step 2: Place the aforementioned electron beam rust removal and polishing metal vapor recovery device in the vacuum chamber of the electron beam machine, and place the sample on the stage 13 inside the condenser assembly. Specifically, first, slide the second inverted T-shaped seat 25 on a second insert plate 15 into the second T-shaped groove 24 away from the inlet of the first T-shaped groove 23. Then, slide the two first insert plates 14 from the two first T-shaped grooves 23 until they abut against one side of the second insert plate 15. Insert the three movable condenser plates 16 into one second insert plate 15 and the two first insert plates 14 that have been installed on the stage 13. Then, slide the other second insert plate 15 from the other second T-shaped groove 24 and insert the remaining movable condenser plate 16 into the other second insert plate 15. Fix the positioning plates 17 on the two second insert plates 15 to the stage 13 with bolts to achieve the installation of the condenser assembly.

[0071] Step 3: Use a vacuum pump to evacuate the vacuum chamber of the electron beam machine;

[0072] Step four: Set the parameters for the electron beam machine. The parameters are as follows: electron beam accelerating voltage of 60kV, focusing current of 390mA, accelerating current of 15-20mA, beam spot diameter of 1mm, overlap rate of 50%, and horizontal moving speed of stage 13 of 10mm / s. Turn on the electron beam emission device to vaporize the surface modification layer of the sample. By adjusting the moving direction and speed of stage 13, the moving trajectory of stage 13 is as follows: Figure 7 As shown, rust removal is achieved on the entire surface of the metal sample;

[0073] Step 5: Modify the electron beam down-beam process parameters and the trajectory of stage 13. The modified parameters are: electron beam accelerating voltage of 60kV, focusing current of 390mA, accelerating current of 3-7mA, outer diameter of the annular beam spot of 8mm, inner diameter of 4mm, overlap rate of 0, and horizontal moving speed of stage 13 of 10mm / s. Polish the sample surface. The trajectory of stage 13 is as follows: Figure 8 As shown;

[0074] Step 6: Turn off the electron beam emitting device, keep the metal sample and condenser assembly stationary, and allow the metal vapor to fully adhere to the inner wall of the condenser assembly. Then open the vacuum chamber and remove the condenser assembly and sample respectively.

[0075] Step 7: When there is too much metal deposit on the inner wall of the condenser assembly, the deposit is removed by grinding.

[0076] In this embodiment, an ultra-high energy concentrated electron beam is first used to remove the rust layer, which facilitates the full vaporization of the rust layer and improves surface purity. Figure 10As shown; the metal vapor recovery plate effectively traps rust layer vapor on its surface, preventing contamination inside the vacuum chamber; the use of a low-energy annular electron beam helps to smooth the surface and improve its finish, such as... Figure 11 As shown.

[0077] In the description of this invention, it should be understood that the terms "center," "length," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "inner," "outer," "circumferential," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the system or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0078] In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0079] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0080] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0081] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An apparatus for recovering metal vapors from an electron beam derusting and polishing process, comprising: The application relates to a metal sample processing device, which comprises an X-axis moving mechanism and a Y-axis moving mechanism, the Y-axis moving mechanism is installed on the X-axis moving mechanism and is driven by the X-axis moving mechanism to move back and forth along the X-axis direction, a workbench (11) is installed on the Y-axis moving mechanism and drives the workbench (11) to move back and forth along the Y-axis direction, a carrier (13) is installed on the workbench (11), a condensing cylinder assembly for placing a metal sample to be treated is arranged on the carrier (13), a movable insertion plate assembly for limiting the movement of the condensing cylinder assembly is arranged on the periphery of the condensing cylinder assembly, and the movable insertion plate assembly is detachably connected with the carrier (13).

2. The apparatus of claim 1, wherein the apparatus further comprises a vapor recovery system. The condensing cylinder assembly comprises four movable condensing plates (16), the four movable condensing plates (16) are sequentially abutted at the head and tail to form a rectangular cylinder structure, the bottom end of the rectangular cylinder structure is abutted on the upper surface of the carrier (13), the top opening of the rectangular cylinder structure is arranged upwards, and the outer walls of the four movable condensing plates (16) are abutted with the inner walls of the movable insertion plate assembly.

3. The apparatus of claim 1, wherein the apparatus further comprises a vapor recovery system. The movable insertion plate assembly comprises two first insertion plates (14) which are arranged in parallel and at intervals and two second insertion plates (15) which are arranged in parallel and at intervals, the first insertion plates (14) and the second insertion plates (15) are slidably arranged on the upper surface of the carrier (13), the two first insertion plates (14) are clamped between the two second insertion plates (15), the two second insertion plates (15) are limitingly connected with the upper surface of the carrier (13), and the condensing cylinder assembly is arranged on the inner side of the first insertion plate (14) and the second insertion plate (15).

4. The apparatus of claim 3, wherein the apparatus further comprises a vapor recovery system. Two first T-shaped sliding grooves (23) which are arranged along the X-axis direction and two second T-shaped sliding grooves (24) which are arranged along the Y-axis direction are arranged at intervals on the upper surface of the carrier (13), the first T-shaped sliding grooves (23) and the second T-shaped sliding grooves (24) are respectively extended from the adjacent two side edges of the carrier (13) to the middle part of the carrier (13), the first T-shaped sliding grooves (23) and the second T-shaped sliding grooves (24) are communicated, the bottom of the first insertion plate (14) is provided with a first inverted T-shaped seat which is matched with the first T-shaped sliding groove (23), the bottom of the second insertion plate (15) is provided with a second inverted T-shaped seat (25) which is matched with the second T-shaped sliding groove (24), the first inverted T-shaped seat is slidably arranged in the first T-shaped sliding groove (23), and the second inverted T-shaped seat (25) is slidably arranged in the second T-shaped sliding groove (24).

5. The apparatus of claim 3, wherein the vapor recovery device is a metal vapor recovery device for an electron beam derusting and polishing machine. A positioning plate (17) is arranged on the bottom side wall of the second insertion plate (15), and the positioning plate (17) is detachably fixedly connected with the carrier (13) through bolts.

6. The apparatus of any one of claims 1 to 5, wherein the apparatus is configured to operate at a pressure of 10"5 to 10"2 Torr. A plurality of vertically arranged trapezoidal protrusions (26) are uniformly arranged on the peripheral wall of the condensing cylinder assembly, trapezoidal grooves (27) which are one-to-one corresponding to the trapezoidal protrusions (26) are arranged on the inner wall of the movable insertion plate assembly, and the trapezoidal protrusions (26) are one-to-one corresponding slidably arranged in the trapezoidal grooves (27).

7. The apparatus of any one of claims 1 to 5, wherein the apparatus is an electron beam derusting and polishing metal vapor recovery apparatus. The X-axis moving mechanism and the Y-axis moving mechanism both adopt ball screw linear guide rail sliding tables.

8. An electron beam derusting and polishing method, characterized by, The application discloses an electron beam rust removal and polishing metal vapor recovery device, and relates to the field of electron beam rust removal and polishing. Step one, pretreatment, the metal sample with rust on the surface is cleaned by anhydrous ethanol and then cleaned by ultrasonic waves to remove oil stains and dust on the surface; Step two, the electron beam rust removal and polishing metal vapor recovery device is placed in a vacuum chamber of an electron beam machine, and the sample is placed on a carrier (13) in a condensing cylinder assembly; Step three, a vacuum pump is used to perform vacuumizing treatment on the vacuum chamber of the electron beam machine; Step four, parameters of the electron beam machine are set, the electron beam emitting device is started, the surface modification layer of the sample is vaporized, the moving direction and speed of the carrier (13) are controlled, and the rust on the surface of the metal sample is removed; Step five, the polishing treatment is performed on the surface of the sample by changing the electron beam process parameters and the moving track of the carrier (13); Step six, the electron beam emitting device is turned off, the metal sample and the condensing cylinder assembly are kept still, the metal vapor is fully attached to the inner wall of the condensing cylinder assembly, then the vacuum chamber is opened, and the condensing cylinder assembly and the sample are taken out respectively; Step seven, when the metal attachment on the inner wall of the condensing cylinder assembly is too much, the attachment is removed by grinding.

9. The method of claim 8, wherein the method further comprises: In the step four, the parameters of the electron beam machine are as follows: the electron beam accelerating voltage is 60kV, the focusing current is 390mA, the accelerating current is 15-20mA, the beam spot diameter is 1mm, the overlap rate is 50%, and the horizontal moving speed of the carrier (13) is 10mm / s.

10. The method of claim 8, wherein the method further comprises: In the step five, the parameters of the electron beam machine are as follows: the electron beam accelerating voltage is 60kV, the focusing current is 390mA, the accelerating current is 3-7mA, the outer diameter of the annular beam spot is 8mm, the inner diameter is 4mm, the overlap rate is 0, and the horizontal moving speed of the carrier (13) is 10mm / s.

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