A clamping system and operating method for preventing abrasive disc cleaning machine from missing clamps

Abstract

The present invention discloses a clamping system and an operating method for preventing a grinding disc cleaning machine from missing a clamp, comprising a movable seat sleeved on a driving frame of the grinding disc cleaning machine, a clamping structure provided at the bottom of the movable seat, the movable seat comprising a sliding seat sleeved on the driving frame of the grinding disc cleaning machine, and a displacement adjustment seat slidably connected through the bottom of the sliding seat, the clamping structure being installed at the bottom of the displacement adjustment seat, and the present invention relates to the technical field. The clamping system and an operating method for preventing a grinding disc cleaning machine from missing a clamp can effectively hook both sides of a film box by providing an anti-slip structure composed of hooks at the bottom of the clamp, thereby improving the anti-slip effect, and the entire clamping structure can be slightly translated at the bottom of the sliding seat by the displacement adjustment seat, even if the film box has a small offset in the cleaning tank, the clamping structure can be made to slide itself to adapt to the offset of the film box by utilizing the symmetrical clamping force on both sides when clamping it again, thereby ensuring that the clamping jaws on both sides can clamp stably and firmly.

Description

Technical Field

[0001] The present invention relates to the technical field, and in particular to a clamping system and an operating method for preventing a grinding disc cleaning machine from missing a clamp. Background Art

[0002] Cleaning equipment is often used in semiconductor wafer cleaning, so the arm of the cleaning machine is particularly important. If the arm design is not good, it will often cause the arm to miss the clamping and cause the wafer box to miss the clamping, or fail to grab the wafer box, resulting in product loss. Therefore, the design of the arm is more important. The arms commonly used in the cleaning machine after the grinding process have the following problems:

[0003] 1. The part that grabs the film box is made of metal with a protective corrosion-resistant plastic cover on the outside. However, after long-term contact with chemical liquids, the protective cover is prone to oxidation and cracking. Long-term use will cause metal contamination of the product. 2. Due to the frame structure, the position of the film box must be adjusted very accurately during use. During the cleaning process, if the product is offset due to the push of water flow or the vibration of some ultrasonic cleaning machines, resulting in large deviations on both sides of the frame, it will cause the clamps on both sides to not be able to accurately clamp the film box, which can easily cause missed clamping or damage the film box, resulting in product loss: 3. The arm is made of 8MM diameter steel wire bending, so it is relatively easy to deform: 4. The arm support is welded with PVC material, so the distance in the Y-axis direction cannot be adjusted, resulting in the film box not being able to be very tight, and the film box may fall during operation; 5. The missed clamping protection on the arm does not play its role. Summary of the Invention

[0004] In view of the deficiencies in the prior art, the present invention provides a clamping system and an operating method for preventing abrasive disc cleaning machines from missing clamps, thereby solving the above-mentioned problems.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: a clamping system for preventing a grinding disc cleaning machine from missing a clamp, comprising a movable seat sleeved on a driving frame of the grinding disc cleaning machine, a clamping claw structure being provided at the bottom of the movable seat, the movable seat comprising a sliding seat sleeved on the driving frame of the grinding disc cleaning machine, and a displacement adjustment seat being slidably connected through the bottom of the sliding seat, the clamping claw structure being installed at the bottom of the displacement adjustment seat, the sliding direction of the displacement adjustment seat being horizontally perpendicular to the sliding direction of the sliding seat on the driving frame of the grinding disc cleaning machine, so that the clamping claw structure slides horizontally when clamping a disc cassette with an offset position to adaptively adjust the clamping position, and an adjustment structure for adjusting the centering of the displacement adjustment seat is further provided in the sliding seat;

[0006] The clamping structure includes two groups of clamping jaws symmetrically connected to the bottom of the displacement adjustment seat, and the bottom of the clamping jaws is provided with an anti-slip structure and a positioning structure, and a driving structure for controlling the expansion or closure of the two clamping jaws is provided between the two side clamping jaws.

[0007] Preferably, the clamp is U-shaped, and each end of the clamp is connected to a group of movable seats, and the anti-slip structure includes a hook fixedly connected to the bottom of the clamp, and the hook located on the inner side of the clamp is set to a hook shape.

[0008] Preferably, the hook is made of an inner layer of steel plate covered with PEEK material, and the clamping claw is also covered with PEEK material.

[0009] Preferably, the positioning structure includes an elastic positioning rod, and the top end of the elastic positioning rod is fixed to the front and rear sides of the clamp through a sleeve, the main body of the elastic positioning rod is arranged on the front and rear vertical surfaces of the clamp, and the bottom ends of the front and rear elastic positioning rods are bent forward and backward.

[0010] Preferably, the driving structure includes a double-headed cylinder whose two ends are respectively connected to the middle upper position on the same side of the clamping jaws on both sides, and the middle of the double-headed cylinder is fixed to the bottom of the displacement adjustment seat through a bracket. The middle sections of the front and rear groups of double-headed cylinders are connected to air distribution pipes, and the two air distribution pipes are connected to the main air pipe through a tee, and one end of the main air pipe is connected to an external air supply device.

[0011] Preferably, the displacement adjustment seat is composed of a base plate and a vertical plate in the middle of its top that passes through the bottom of the sliding seat. The front and rear sides of the vertical plate are rotatably connected to support rollers that overlap the bottom inner side of the sliding seat. The front side of the sliding seat is provided with an opening for installing the support roller.

[0012] Preferably, a mounting plate is installed on the inner top of the sliding seat, and the bottom of the mounting plate and the top of the displacement adjustment seat are both embedded with fixedly connected magnets that attract each other to attract the displacement adjustment seat to the center, and a sliding groove is provided at the bottom of the sliding seat for the displacement adjustment seat to slide.

[0013] Preferably, wear-resistant sleeves sleeved on the grinding plate cleaning machine drive frame are installed inside both sides of the sliding seat, and an elastic driving member connected to the driving screw on the grinding plate cleaning machine drive frame is installed inside the middle of the sliding seat.

[0014] Preferably, the elastic driving member includes a square tube fixedly connected to the inside of the sliding seat, the inside of the square tube is slidably connected to a square slider, and the square slider is threadedly sleeved on the outside of the driving screw, and elastic members are pressed between the two ends of the square slider and the two end surfaces inside the square tube.

[0015] The present invention also discloses an operating method of a clamping system for preventing a grinding disc cleaning machine from missing a clamp, comprising:

[0016] Step 1: Control the drive frame of the grinding disc cleaning machine to drive the clamping system to descend until the bottom of the clamping structure drops below the two sides of the film box;

[0017] Step 2: Control the driving structure to drive the clamping claw structure to retract until the bottom of the clamping claw structure clamps and hooks the two sides of the film box, and uses the symmetrical clamping force to make the clamping claw structure slide to adapt to the position of the film box for uniform clamping;

[0018] Step 3: First, control the drive frame of the grinding disc cleaning machine to rise, so that the clamping system can lift the film box. After draining, control the clamping system to move horizontally along the drive frame of the grinding disc cleaning machine to remove the film box from the immersion tank.

[0019] Beneficial effects

[0020] The present invention provides a clamping system and operating method for preventing leakage in a grinding disc cleaning machine. Compared with the prior art, it has the following advantages:

[0021] 1. The clamping system and operating method for preventing the grinding disc cleaning machine from missing clamps can effectively hook the two sides of the film box by arranging an anti-slip structure composed of hooks at the bottom of the clamping jaws, which can improve the anti-slip effect. The entire clamping jaw structure can be slightly translated at the bottom of the sliding seat through the displacement adjustment seat. Even if the film box has a small offset in the cleaning tank, the clamping jaw structure can be symmetrically clamped on both sides to slide to adapt to the offset of the film box when it is clamped again, ensuring that the clamping jaws on both sides can clamp stably and firmly. The elastic positioning rods arranged at the front and back of the bottom can squeeze the bottom of the film box when it is lowered, so that the moving seat can perform a small forward and backward displacement to adapt to the front and rear errors, so that the clamping jaws are more evenly stressed and more stable when clamping the film box. The surface material is PEEK material, which also improves the corrosion resistance of the clamping jaws and hooks.

[0022] 2. The clamping system and operating method for preventing the grinding disc cleaning machine from missing clamps are designed to provide a support roller on the top of the displacement adjustment seat to overlap the sliding seat, making the displacement adjustment seat slide more smoothly, and using magnets to attract the displacement adjustment seat to the center, so that the film box can be slowly and automatically centered after being lifted, ensuring the accuracy of the position each time it is put down, and avoiding the problem of errors accumulated after cleaning that exceed the adaptive range of the clamping structure and become unable to clamp.

[0023] 3. The clamping system and operating method for preventing the grinding disc cleaning machine from missing clamps are configured by arranging an elastic driving member in the sliding seat to connect the driving screw. On the one hand, the clamping system can cooperate with the elastic positioning rod to have a small self-adjustment function in the front and rear directions. At the same time, when the driving screw drives the clamping system to move to a stationary state, the spring is used for buffering and deceleration to avoid excessive shaking of the film box caused by sudden stop, thereby increasing the probability of falling off. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a front view of the structure of the present invention;

[0025] Figure 2 A three-dimensional diagram of the elastic positioning rod of the present invention;

[0026] Figure 3 A top view of the double-ended cylinder and the gas distribution pipe of the present invention;

[0027] Figure 4 This is a schematic diagram of the internal structure of the mobile seat of the present invention;

[0028] Figure 5 It is a partial cross-sectional view of the elastic driving member of the present invention.

[0029] In the figure: 1-moving seat, 11-sliding seat, 12-displacement adjustment seat, 13-support roller, 14-mounting plate, 15-magnet, 16-chute, 17-wear-resistant sleeve, 18-elastic driving member, 181-square cylinder, 182-square slider, 183-elastic member, 2-clamping claw structure, 21-clamping claw, 22-hooking claw, 23-elastic positioning rod, 24-double-headed cylinder, 25-bracket, 26-gas distribution pipe, 27-main gas pipe, 3-driving screw. DETAILED DESCRIPTION

[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0031] The present invention discloses a clamping system for preventing abrasive disc cleaning machines from missing clamps, and provides three technical solutions:

[0032] Figure 1-3 The first embodiment is shown: a clamping system for preventing a grinding disc cleaning machine from missing a clamp, comprising a movable base 1 sleeved on a drive frame of the grinding disc cleaning machine, a clamping structure 2 being provided at the bottom of the movable base 1, the movable base 1 comprising a sliding base 11 sleeved on the drive frame of the grinding disc cleaning machine, and a displacement adjustment base 12 being slidably connected through the bottom of the sliding base 11, the clamping structure 2 being mounted on the bottom of the displacement adjustment base 12, the sliding direction of the displacement adjustment base 12 being horizontally perpendicular to the sliding direction of the sliding base 11 on the drive frame of the grinding disc cleaning machine, so that the clamping structure 2 slides horizontally when clamping a disc cassette with an offset position to adaptively adjust the clamping position, and an adjustment structure for adjusting the centering of the displacement adjustment base 12 is further provided in the sliding base 11;

[0033] The clamping structure 2 includes two sets of clamping jaws 21 symmetrically connected to the bottom of the displacement adjustment seat 12, and the bottom of the clamping jaws 21 is provided with an anti-slip structure and a positioning structure, and a driving structure for controlling the expansion or closing of the two clamping jaws 21 is provided between the two side clamping jaws.

[0034] The clamping jaw 21 is U-shaped, and a set of movable seats 1 are connected to each end of the clamping jaw 21. The anti-slip structure includes a hook claw 22 fixedly connected to the bottom of the clamping jaw 21. The hook claw 22 is located on the inner side of the clamping jaw 21 and is set to a hook shape. The hook claw 22 is composed of an inner layer of steel plate covered with PEEK material, and the outside of the clamping jaw 21 is also covered with PEEK material.

[0035] The positioning structure includes an elastic positioning rod 23, and the top end of the elastic positioning rod 23 is fixed to the front and rear sides of the clamp 21 through a sleeve. The main part of the elastic positioning rod 23 is arranged on the front and rear vertical surfaces of the clamp 21, and the bottom ends of the front and rear elastic positioning rods 23 are bent in the forward and backward directions.

[0036] The driving structure includes a double-headed cylinder 24 whose two ends are respectively connected to the middle upper position of the same side of the clamping jaws 21 on both sides, and the middle of the double-headed cylinder 24 is fixed to the bottom of the displacement adjustment seat 12 through a bracket 25. The middle sections of the front and rear groups of double-headed cylinders 24 are connected to the air distribution pipe 26, and the two air distribution pipes 26 are connected to the main air pipe 27 through a tee. One end of the main air pipe 27 is connected to the external air supply device.

[0037] By arranging an anti-slip structure composed of hooks 22 at the bottom of the clamping jaws 21, the two sides of the film box can be effectively hooked, which can improve the anti-slip effect, and the entire clamping jaw structure 2 can be slightly translated at the bottom of the sliding seat 11 through the displacement adjustment seat 12. Even if the film box has a small offset in the cleaning tank, when it is clamped again, the clamping jaw structure 2 can slide itself to adapt to the offset of the film box by utilizing the symmetrical clamping force on both sides, ensuring that the clamping jaws 21 on both sides can clamp stably and firmly, and the elastic positioning rods 23 arranged at the front and back of the bottom can squeeze the bottom of the film box when it descends, so that the movable seat 1 can perform a small forward and backward displacement to adapt to the front and rear errors, so that the clamping jaws 21 can be more evenly stressed and more stably clamped when clamping the film box. The surface material is PEEK material, which also improves the corrosion resistance of the clamping jaws 21 and hooks 22.

[0038] Figure 4 A second embodiment is shown, the main difference from the first embodiment being that the displacement adjustment seat 12 is composed of a bottom plate and a vertical plate in the middle of its top that passes through the bottom of the sliding seat 11. The front and rear sides of the vertical plate are rotatably connected to support rollers 13 that overlap the inner bottom of the sliding seat 11, and an opening for installing the support roller 13 is opened on the front side of the sliding seat 11.

[0039] A mounting plate 14 is installed on the top inner side of the sliding seat 11. The bottom of the mounting plate 14 and the top of the displacement adjustment seat 12 are both embedded with magnets 15 fixedly connected to each other to attract the displacement adjustment seat 12 to the center. A sliding groove 16 is provided at the bottom of the sliding seat 11 for the displacement adjustment seat 12 to slide.

[0040] By setting a support roller 13 on the top of the displacement adjustment seat 12 to overlap the sliding seat 11, the displacement adjustment seat 12 can slide more smoothly, and the magnet 15 can be used to attract the displacement adjustment seat 12 to the center, so that the film box can be slowly and automatically centered after being lifted, ensuring the accuracy of the position each time it is put down, and avoiding the problem of errors accumulating after cleaning that exceed the adaptive range of the clamping structure 2 and cannot be clamped.

[0041] Figure 5 A third embodiment is shown, which mainly differs from the second embodiment in that wear-resistant sleeves 17 mounted on the drive frame of the grinding disc cleaning machine are installed inside both sides of the sliding seat 11, and an elastic driving member 18 connected to the driving screw 3 on the drive frame of the grinding disc cleaning machine is installed inside the middle of the sliding seat 11.

[0042] The elastic driving member 18 includes a square tube 181 fixedly connected to the inside of the sliding seat 11, and a square slider 182 is slidably connected to the inside of the square tube 181, and the square slider 182 is threadedly sleeved on the outside of the driving screw 3. Elastic members 183 are pressed between the two ends of the square slider 182 and the two end surfaces inside the square tube 181, and the elastic member 183 is a spring.

[0043] By arranging an elastic driving member 18 in the sliding seat 11 to connect the driving screw 3, on the one hand, the clamping system can cooperate with the elastic positioning rod 23 to have a small self-adjustment function in the front and rear directions. At the same time, when the driving screw 3 drives the clamping system to move to a stationary state, the spring is used for buffering and deceleration to avoid excessive shaking of the film box caused by sudden stop, thereby increasing the probability of falling off.

[0044] The present invention also discloses an operating method of a clamping system for preventing a grinding disc cleaning machine from missing a clamp, comprising:

[0045] Step 1: Control the drive frame of the grinding disc cleaning machine to drive the clamping system to descend until the bottom of the clamping structure 2 drops to the lower side of the outer sides of the hook 22 of the disc box;

[0046] Step 2: Control the air supply structure to extract air from the double-headed cylinder 24, causing the two side clamping jaws 2 to close until the bottom of the clamping jaws 2 clamp and hook the two sides of the film box. The symmetrical clamping force causes the clamping jaws 2 to drive the displacement adjustment seat 12 to slide slightly on the bottom of the sliding seat 11 to adapt to the position of the film box and evenly clamp it.

[0047] Step 3: First control the drive frame of the grinding disc cleaning machine to rise, so that the clamping system lifts the film box. After draining, control the motor to drive the driving screw 3 to rotate, and use the square slider 182 to push the elastic part 183 and the square cylinder 181 to indirectly push the sliding seat 11 along the guide rod of the drive frame of the grinding disc cleaning machine, so that the clamping system as a whole drives the film box to move horizontally along the drive frame of the grinding disc cleaning machine, and remove the film box from the immersion tank.

[0048] At the same time, the contents not described in detail in this specification belong to the existing technology known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited, and conventional equipment can be used.

[0049] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0050] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A clamping system for preventing missed clamping in a grinding disc cleaning machine, comprising a movable base mounted on a drive frame of the grinding disc cleaning machine, wherein a clamping structure is provided at the bottom of the movable base, and characterized in that: The movable seat includes a sliding seat sleeved on the drive frame of the grinding disc cleaning machine, and the bottom of the sliding seat is slidably connected to the displacement adjustment seat, the clamping claw structure is installed at the bottom of the displacement adjustment seat, and the sliding direction of the displacement adjustment seat is horizontally perpendicular to the sliding direction of the sliding seat on the drive frame of the grinding disc cleaning machine, so that the clamping claw structure can slide horizontally when clamping the film box with an offset position to adaptively adjust the clamping position, and an adjustment structure for adjusting the center of the displacement adjustment seat is also provided in the sliding seat; The clamping structure includes two groups of clamping jaws symmetrically connected to the bottom of the displacement adjustment seat, and the bottom of the clamping jaws is provided with an anti-slip structure and a positioning structure, and a driving structure for controlling the expansion or closure of the two clamping jaws is provided between the two side clamping jaws.

2. The clamping system for preventing leakage of abrasive disc cleaning machine according to claim 1, characterized in that: The clamp is U-shaped, and both ends of the clamp are respectively connected to a group of movable seats. The anti-slip structure includes a hook fixedly connected to the bottom of the clamp, and the hook located on the inner side of the clamp is set to a hook shape.

3. The clamping system for preventing leakage of abrasive disc cleaning machine according to claim 2, characterized in that: The hook is made of an inner steel plate covered with PEEK material, and the clamping claw is also covered with PEEK material.

4. The clamping system for preventing leakage of a grinding disc cleaning machine according to claim 1, characterized in that: The positioning structure includes an elastic positioning rod, and the top end of the elastic positioning rod is fixed to the front and rear sides of the clamp through a sleeve. The main body of the elastic positioning rod is arranged on the front and rear vertical surfaces of the clamp, and the bottom ends of the front and rear elastic positioning rods are bent in the forward and backward directions.

5. The clamping system for preventing missed clamping in a grinding disc cleaning machine according to claim 1, characterized in that: The driving structure includes a double-headed cylinder with its two ends respectively connected to the middle upper position of the same side of the clamping jaws on both sides, and the middle of the double-headed cylinder is fixed to the bottom of the displacement adjustment seat through a bracket. The middle sections of the front and rear groups of double-headed cylinders are connected to the air distribution pipes, and the two air distribution pipes are connected to the main air pipe through a tee. One end of the main air pipe is connected to the external air supply device.

6. The clamping system for preventing leakage of a grinding disc cleaning machine according to claim 1, characterized in that: The displacement adjustment seat is composed of a base plate and a vertical plate in the middle of its top that passes through the bottom of the sliding seat. The front and rear sides of the vertical plate are rotatably connected to support rollers that overlap the bottom inner side of the sliding seat. The front side of the sliding seat is provided with an opening for installing the support roller.

7. The clamping system for preventing leakage of a grinding disc cleaning machine according to claim 1, characterized in that: A mounting plate is installed on the top inner side of the sliding seat. The bottom of the mounting plate and the top of the displacement adjustment seat are both embedded with fixedly connected magnets that attract each other to attract the displacement adjustment seat to the center. A sliding groove is provided at the bottom of the sliding seat for the displacement adjustment seat to slide.

8. The clamping system for preventing missed clamping in a grinding disc cleaning machine according to claim 1, characterized in that: Wear-resistant sleeves sleeved on the drive frame of the grinding plate cleaning machine are installed inside both sides of the sliding seat, and an elastic driving member connected to the driving screw on the drive frame of the grinding plate cleaning machine is installed inside the middle of the sliding seat.

9. The clamping system for preventing missed clamping in a grinding disc cleaning machine according to claim 8, characterized in that: The elastic driving member includes a square tube fixedly connected to the inside of the sliding seat, a square slider is slidably connected to the inside of the square tube, and the square slider is threadedly sleeved on the outside of the driving screw rod, and elastic members are pressed between the two ends of the square slider and the two end surfaces inside the square tube.

10. A clamping system for preventing missed clamping in a grinding disc cleaning machine according to any one of claims 1 to 9, characterized in that: The operation method includes: Step 1: Control the drive frame of the grinding disc cleaning machine to drive the clamping system to descend until the bottom of the clamping structure drops below the two sides of the film box; Step 2: Control the driving structure to drive the clamping claw structure to retract until the bottom of the clamping claw structure clamps and hooks the two sides of the film box, and uses the symmetrical clamping force to make the clamping claw structure slide to adapt to the position of the film box for uniform clamping; Step 3: First, control the drive frame of the grinding disc cleaning machine to rise, so that the clamping system can lift the film box. After draining, control the clamping system to move horizontally along the drive frame of the grinding disc cleaning machine to remove the film box from the immersion tank.

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