Miniature vacuum pump and miniature vacuum pumping device

Abstract

The embodiment of the present application provides a kind of micro vacuum pump and micro vacuumizing device, micro vacuum pump includes the exhaust chamber being equipped with air inlet nozzle and exhaust hole, leather bowl subassembly, drive motor and vacuum breaking subassembly, vacuum breaking subassembly includes: the air inlet hole being formed through the bottom wall of exhaust chamber;Plate is movably sleeved on the section of output shaft in exhaust chamber and correspondingly covers air inlet hole;Rotary seat is coaxially fixedly assembled on output shaft and located at the side of plate away from bottom wall, the outside of rotary seat is provided with pivot frame;Centrifugal swing lever is pivotally arranged on pivot frame by means of vertical pivot of output shaft, the center of gravity of centrifugal swing lever is arranged at one end away from rotary seat, the one end of centrifugal swing lever close to rotary seat is bent and extended to plate direction to form pressing portion for pressing plate;Reset elastic member is used to push plate away from bottom wall to make air inlet hole communicate with the inner cavity of exhaust chamber.This embodiment can realize exhaust operation without electromagnetic valve.

Description

Technical Field

[0001] The present invention relates to the field of vacuum pumping device technology, and in particular to a micro vacuum pump and a micro vacuum pumping device. Background Technology

[0002] Existing small household appliances such as mini vacuum packaging machines and electric breast pumps all require vacuuming devices. Due to different requirements for performance indicators such as power, vacuum level, service life, noise, size, and safety, large vacuum pumps and vacuuming devices that are widely used in industry or commerce are not suitable, and miniature vacuuming devices are required.

[0003] A typical miniature vacuum pump consists of a miniature vacuum pump, a solenoid valve, and a controller. The vacuum pump's suction nozzle is connected to a corresponding vacuum container via a corresponding suction pipe. The solenoid valve is typically a three-way valve connected to the suction pipe. The solenoid valve's first and second ports are connected to the suction nozzle and the vacuum container, respectively, while the third port is open to the outside. When vacuuming is required, the controller first controls the solenoid valve to connect the first port to the second port and close the third port. Then, it controls the vacuum pump's drive motor to operate the air intake and exhaust assembly to draw air out of the vacuum container, thus achieving the vacuuming operation. When de-vacuuming is required, the controller controls the solenoid valve to connect the second port to the third port, allowing outside air to enter the vacuum container.

[0004] However, the inventors discovered in specific embodiments that existing micro vacuum pumping devices use solenoid valves to achieve the vacuuming operation of vacuum containers. Solenoid valves are prone to exhaust vibration during operation, which generates a lot of noise. Moreover, solenoid valves occupy a relatively large volume and cost, which is not conducive to the miniaturization of micro vacuum pumping devices and the reduction of production costs. Summary of the Invention

[0005] The technical problem to be solved by the embodiments of the present invention is to provide a miniature vacuum pump that can perform vacuuming operations without relying on a solenoid valve.

[0006] The technical problem to be further solved by the embodiments of the present invention is to provide a miniature vacuum pumping device that can realize vacuuming operation without the use of solenoid valves, and can effectively reduce volume, production costs and operating noise.

[0007] To address the aforementioned technical problems, the present invention first provides the following technical solution: a miniature vacuum pump, comprising an exhaust chamber with an inlet and an exhaust port, a cup assembly assembled within the inner cavity of the exhaust chamber, and a drive motor whose output shaft passes through the bottom wall of the exhaust chamber, extends into the inner cavity, and is connected to the cup assembly for driving the cup assembly. The miniature vacuum pump further comprises a vacuum breaking component, which includes:

[0008] An air inlet hole that penetrates the bottom wall of the exhaust chamber;

[0009] A pressure plate is movably sleeved on the section of the output shaft located in the exhaust chamber and correspondingly covers the air inlet; a rotating seat is coaxially fixedly assembled on the output shaft and located on the side of the pressure plate away from the bottom wall, and a pivot frame is provided on the outer side of the rotating seat.

[0010] The middle section utilizes a centrifugal pendulum pivotally mounted on a pivot frame on the outer side of the rotating seat, the pivot being perpendicular to the output shaft. The center of gravity of the centrifugal pendulum is located at the end away from the rotating seat, and the end of the centrifugal pendulum near the rotating seat bends and extends towards the pressure plate to form a pressing portion for pressing against the pressure plate; and

[0011] The reset elastic element has one end fixed relative to the exhaust chamber and the other end abutting against the side of the pressure plate facing the bottom wall, and is used to push the pressure plate away from the bottom wall so that the air inlet is connected to the inner cavity of the exhaust chamber.

[0012] Furthermore, a pivot frame is symmetrically arranged on each of the opposite sides of the rotating seat, and a centrifugal pendulum is pivotally mounted on each pivot frame.

[0013] Furthermore, the pressure plate and the bottom surface of the rotating seat have a gap in the axial direction of the output shaft, and the end of the pressing part is inserted into the gap and abuts against the bottom surface of the rotating seat when the output shaft is not rotating.

[0014] Furthermore, a sealing gasket is provided on the side of the pressure plate facing the bottom wall, at the position opposite the air inlet.

[0015] Furthermore, the outer wall surface of the bottom wall is correspondingly recessed to form a noise reduction groove with one end connected to the outer end opening of the air inlet and the other end having a groove on the outer side of the air collection and exhaust chamber, and the noise reduction groove is filled with sound insulation cotton.

[0016] Furthermore, the pressure plate is provided with a guide hole that is axially parallel to the output shaft, and a guide rod that is protruding from the bottom wall and is parallel to the output shaft and passes through the guide hole.

[0017] Furthermore, a through hole is provided in the middle of the pressure plate, and a ball bearing is fixedly assembled in the through hole. The output shaft passes through the inner ring of the ball bearing and is axially movable relative to the inner ring.

[0018] Furthermore, a stepped hole is provided in the middle of the bottom wall. One end of the stepped hole that connects to the inner cavity of the exhaust chamber is a narrow diameter end, and the other end that is away from the exhaust chamber is a wide diameter end. The output shaft passes through the stepped hole and extends into the inner cavity of the exhaust chamber. A sealing gasket is also assembled inside the wide diameter end. One side of the sealing gasket abuts against the connecting stepped surface of the narrow diameter end and the wide diameter end, while on the opposite side, an abutting ring is provided that protrudes around the inner hole of the sealing gasket for abutting against the end face of the drive motor.

[0019] Furthermore, the reset elastic element is a helical compression spring correspondingly sleeved on the output shaft. The middle part of the side plate of the pressure plate facing the bottom wall is correspondingly convex to form a corresponding convex ring surrounding the through hole. One end of the helical compression spring is sleeved on the convex ring, and the other end passes through the stepped hole and the inner hole of the sealing gasket and is sleeved on the shaft seat corresponding to the end face of the drive motor for the output shaft to pass through.

[0020] On the other hand, in order to solve the above-mentioned further technical problems, the present invention provides the following technical solution: a miniature vacuum pump, including a miniature vacuum pump and a controller connected to the drive motor of the miniature vacuum pump for controlling the working state of the drive motor, wherein the miniature vacuum pump is the vacuum pump as described above.

[0021] After adopting the above technical solution, the embodiments of the present invention have at least the following beneficial effects: The miniature vacuum pump of the present invention, by adding a vacuum-breaking component, specifically, provides an air inlet on the bottom wall of the exhaust chamber, and simultaneously uses a pressure plate to dynamically cover the air inlet. When the miniature vacuum pump needs to perform vacuuming operations and starts the drive motor, since the center of gravity of the centrifugal pendulum is set at the end away from the rotating seat, the output shaft of the drive motor rotates, causing the rotating seat to rotate, and the centrifugal pendulum deflects around the pivot under the action of centrifugal force. At this time, the pressing part of the centrifugal pendulum near the rotating seat immediately pushes against the pressure plate, thereby causing the pressure plate to overcome the elastic force of the reset elastic element. By covering the air inlet, the inner cavity of the exhaust chamber is isolated from the outside atmosphere, enabling normal vacuuming operations. When the micro vacuum pump needs to perform vacuuming operations and the drive motor is turned off, the output shaft and rotating seat of the drive motor stop rotating, the centrifugal force disappears, and the pressing part of the centrifugal pendulum no longer applies pressure to the pressure plate. Under the elastic force of the reset elastic element, the pressure plate returns to its initial position, the air inlet opens, and the inner cavity of the exhaust chamber is connected to the outside atmosphere. Outside air enters the inner cavity of the exhaust chamber through the air inlet, realizing vacuuming operations. Vacuuming and vacuuming can be achieved without relying on a solenoid valve, reducing production costs and operating noise. Attached Figure Description

[0022] Figure 1 This is a schematic diagram showing the split structure of an optional embodiment of the miniature vacuum pump of the present invention.

[0023] Figure 2 This is a schematic diagram of the assembly structure of an optional embodiment of the miniature vacuum pump of the present invention.

[0024] Figure 3 This is a schematic diagram showing the disassembled structure of the vacuum breaking component in an optional embodiment of the miniature vacuum pump of the present invention.

[0025] Figure 4 This is a schematic diagram of the assembly structure of the vacuum breaking component, excluding the reset elastic element, in an optional embodiment of the miniature vacuum pump of the present invention.

[0026] Figure 5 This is a cross-sectional structural diagram of an optional embodiment of the miniature vacuum pump of the present invention, showing a pressure plate covering the air inlet.

[0027] Figure 6 This is a schematic cross-sectional view of the pressure plate opening the air inlet in an optional embodiment of the miniature vacuum pump of the present invention.

[0028] Figure 7 This is a schematic diagram of the inverted, disassembled structure of an optional embodiment of the miniature vacuum pump of the present invention.

[0029] Figure 8 This is a schematic diagram of a possible embodiment of the miniature vacuum pumping device of the present invention. Detailed Implementation

[0030] The present application will now be described in further detail with reference to the accompanying drawings and specific embodiments. It should be understood that the following illustrative embodiments and descriptions are only used to explain the present invention and are not intended to limit the present invention. Moreover, the embodiments and features in the embodiments of the present application can be combined with each other unless otherwise specified.

[0031] like Figures 1-6 As shown, an optional embodiment of the present invention provides a miniature vacuum pump A, including an exhaust chamber 1 with an inlet 10 and an exhaust port 12, a cup assembly 3 assembled in the inner cavity 1a of the exhaust chamber 1, and a drive motor 5 that drives the cup assembly 3 by means of an output shaft 50 passing through the bottom wall of the exhaust chamber 1 and extending into the inner cavity 1a and being driven by the cup assembly 3. The miniature vacuum pump further includes a vacuum breaking component 7, which includes:

[0032] An air inlet 70 is formed by penetrating the bottom wall 1b of the exhaust chamber 1;

[0033] A pressure plate 72 is movably sleeved on the section of the output shaft 50 located in the exhaust chamber 1 and correspondingly covers the air inlet 70;

[0034] A rotating seat 74 is coaxially fixedly assembled on the output shaft 50 and located on the side of the pressure plate 72 away from the bottom wall 1b. A pivot frame 741 is provided on the outer side of the rotating seat 74.

[0035] A centrifugal pendulum 76, pivotally mounted on a pivot frame on the outer side of the rotating seat 74 via a pivot 76a perpendicular to the output shaft 50, has its center of gravity located at the end away from the rotating seat 74. The end of the centrifugal pendulum 76 closest to the rotating seat 74 bends and extends towards the pressure plate 72 to form a pressing portion 761 for pressing against the pressure plate 72.

[0036] The reset elastic member 78 has one end fixed relative to the exhaust chamber 1 and the other end abutting against the side of the pressure plate 72 facing the bottom wall 1b, and is used to push the pressure plate 72 away from the bottom wall 1b so that the air inlet 70 is connected to the inner cavity 1a of the exhaust chamber 1.

[0037] In this embodiment of the invention, the micro vacuum pump A incorporates a vacuum breaking component 7. Specifically, an air inlet 70 is provided on the bottom wall of the exhaust chamber 1, and a pressure plate 72 is used to movably cover the air inlet 70. When the micro vacuum pump A needs to perform vacuuming operations and the drive motor 5 is started, since the center of gravity of the centrifugal pendulum 76 is set at the end away from the rotating seat 74, the output shaft 50 of the drive motor rotates, causing the rotating seat 74 to rotate. This causes the centrifugal pendulum 76 to deflect around the pivot 76a under the action of centrifugal force. At this time, the pressing part 761 of the centrifugal pendulum 76 near the rotating seat 74 pushes against the pressure plate 72, thereby causing the pressure plate 72 to overcome the elastic force of the reset elastic element 78 and cover the air inlet 70. This isolates the inner cavity 1a of the exhaust chamber 1 from the outside atmosphere, enabling normal vacuuming operations. When the micro vacuum pump A needs to perform vacuuming operations and the drive motor 5 is turned off, the output shaft 50 and the rotating seat 74 of the drive motor 5 stop rotating, the centrifugal force disappears, and the pressing part 761 of the centrifugal swing arm 76 no longer applies pressure to the pressure plate 72. Under the elastic force of the reset elastic element 78, the pressure plate 72 returns to its initial position, the air inlet 70 opens, and the inner cavity 1a of the exhaust chamber 1 is connected to the outside atmosphere. The outside atmosphere enters the inner cavity 1a of the exhaust chamber 1 through the air inlet 70, realizing vacuuming operations. Vacuuming and vacuuming can be achieved without relying on a solenoid valve, reducing production costs and reducing operating noise.

[0038] In specific implementation, it can be understood that when the output shaft 50 of the drive motor 5 rotates at a predetermined angular velocity to drive the centrifugal pendulum 76 to swing and push the pressure plate 72 to cover the air inlet 70, the centrifugal pendulum 76 is in a state of force balance. Therefore, whether the micro vacuum pump is tilted or inverted, the output shaft 50 rotates at the predetermined angular velocity to drive the centrifugal pendulum 76 to swing, which will also cause the centrifugal pendulum 76 to swing to the corresponding position and achieve balance. At this time, the centrifugal pendulum 76 will also push the pressure plate 72 to cover the air inlet 70.

[0039] In another optional embodiment of the invention, such as Figures 1-6 As shown, a pivot frame is symmetrically arranged on each of the opposite sides of the rotating seat 74, and a centrifugal swing rod 76 is pivotally mounted on each pivot frame 741. In this embodiment, by symmetrically arranging centrifugal swing rods 76 on the opposite side walls of the rotating seat 74, when the rotating seat 74 rotates under the drive of the output shaft 50, the centrifugal swing rods 76 on both sides can always symmetrically apply a pushing force to the pressure plate 72, so that the pressure plate 72 is stably maintained in the position covering the air inlet 70, ensuring the sealing of the pressure plate 72 to the air inlet 70.

[0040] In another optional embodiment of the invention, such as Figure 4 As shown, the bottom surface of the pressure plate 72 and the rotating seat 74 have a gap in the axial direction of the output shaft 50. The end of the pressing part 721 is inserted into the gap and abuts against the bottom surface of the rotating seat 74 when the output shaft 50 is not rotating. In this embodiment, when the output shaft 50 is not rotating, the end of the pressing part 761 abuts against the bottom surface of the rotating seat 74 to prevent the top of the centrifugal pendulum 76 from being too heavy and pressing on the pressure plate 72, thus preventing the pressure plate 72 from covering the air inlet 70. A counterweight 763 is assembled at the end of the centrifugal pendulum 76 away from the rotating seat 74. By adding the counterweight 763, the center of gravity position of the centrifugal pendulum 76 can be effectively adjusted so that the center of gravity is set at the end away from the rotating seat 74.

[0041] In another optional embodiment of the invention, such as Figures 1-6 As shown, a sealing gasket 721 is provided on the side of the pressure plate 72 facing the bottom wall 1b, directly opposite the air inlet 70. In this embodiment, the sealing gasket 721 effectively enhances the sealing effect of the pressure plate 72 on the air inlet 70, ensuring the airtightness of the micro vacuum pump during vacuuming operations. Specifically, the bottom surface of the pressure plate 721 has a recess, and the sealing gasket 721 is embedded in the recess.

[0042] In another optional embodiment of the invention, such as Figures 4-7As shown, the outer wall surface of the bottom wall 1b is also correspondingly recessed to form a noise reduction groove 14, one end of which is connected to the outer end opening of the air inlet 70, and the other end of which has a groove on the outer side of the exhaust chamber 1. The noise reduction groove 14 is filled with sound insulation cotton 16. In this embodiment, by setting the noise reduction groove 14 and assembling the sound insulation cotton 16 in the noise reduction groove 14, when the micro vacuum pump performs vacuum operation, the outside air rapidly enters the exhaust chamber 1 through the noise reduction groove 14 and the air inlet 70. On the one hand, the sound insulation cotton 16 can effectively reduce the airflow noise during air intake, and on the other hand, it can effectively prevent external foreign objects from entering the exhaust chamber 1 with the outside air.

[0043] In another optional embodiment of the invention, such as Figures 1-6 As shown, the pressure plate 72 is also provided with a guide hole 723 axially parallel to the output shaft 50. A guide rod 17, parallel to the output shaft 50 and correspondingly passing through the guide hole 723, is provided on the bottom wall 1b. In this embodiment, by sliding the pressure plate 72 onto the guide rod 17 through the guide hole 723, the guide hole 723 slides up and down on the guide rod 17, effectively guiding the up and down movement of the pressure plate 72. In specific implementation, the bottom end of the guide rod 17 is inserted and fixed in a pre-set positioning hole in the bottom wall 1b.

[0044] In another optional embodiment of the invention, such as Figures 1-6 As shown, a through hole 725 is provided in the middle of the pressure plate 72. A ball bearing 727 is fixedly assembled in the through hole 725. The output shaft 50 passes through the inner ring of the ball bearing 727 and is axially movable relative to the inner ring. In this embodiment, by providing the ball bearing 727 in the through hole 725 in the middle of the pressure plate 72, the ball bearing 727 ensures the normal rotation of the output shaft 50 in the middle of the pressure plate 72, avoids interference between the two, and effectively supports the pressure plate 72.

[0045] In another optional embodiment of the invention, such as Figures 1-7As shown, a stepped hole 18 is provided in the middle of the bottom wall 1b. One end of the stepped hole 18 that connects to the inner cavity 1a of the exhaust chamber 1 is the narrow diameter end, and the other end that is away from the exhaust chamber 1 is the wide diameter end. The output shaft 50 extends into the inner cavity 1a of the exhaust chamber 1 through the stepped hole. A sealing gasket 19 is also assembled in the wide diameter end. One side of the sealing gasket 19 abuts against the connecting stepped surface of the narrow diameter end and the wide diameter end, while on the opposite side, a contact ring 191 protrudes around the inner hole of the sealing gasket 19 for abutting against the end face of the drive motor 5. In this embodiment, by providing a stepped hole 18 in the bottom wall 1b and installing a sealing gasket 19 using the stepped hole 18, the sealing of the exhaust chamber 1 is ensured when the output shaft 50 extends into the inner cavity 1a of the exhaust chamber 1 through the stepped hole 18; moreover, the sealing gasket 19 has an abutment ring 191, which effectively enhances the sealing performance between the sealing gasket 19 and the drive motor 5.

[0046] In another optional embodiment of the invention, such as Figures 1-7 As shown, the reset elastic element 78 is a helical compression spring correspondingly sleeved on the output shaft 50. The middle part of the side surface of the pressure plate 72 facing the bottom wall 1b forms a corresponding convex ring 729 surrounding the through hole 725. One end of the helical compression spring 78 is sleeved on the convex ring 729, and the other end passes through the stepped hole 18 and the inner hole of the sealing washer 19 and is sleeved on the bearing seat 52 corresponding to the end face of the drive motor 5 for the output shaft 50 to pass through. In this embodiment, the reset elastic element 78 is a helical compression spring sleeved on the output shaft 50, which has a simple structure. Moreover, by using the two ends of the helical compression spring 78 to abut against the pressure plate 72 and the bearing seat 52 of the drive motor 5 respectively, it is convenient for the helical compression spring 78 to apply an elastic pushing force to the pressure plate 72; and by setting the convex ring 729, the positioning of the end of the helical compression spring 78 is effectively realized.

[0047] On the other hand, such as Figure 8 As shown in the figure, this embodiment of the invention further provides a miniature vacuum pumping device, including a miniature vacuum pump A and a controller B connected to a drive motor 5 of the vacuum pump A for controlling the operating state of the drive motor 5. The miniature vacuum pump is the same as in the above embodiment. In this embodiment, the miniature vacuum pumping device uses the aforementioned miniature vacuum pump A, which can effectively reduce the size and lower production costs and operating noise.

[0048] In addition, the exhaust chamber includes a cylinder body with several vertically connected and mutually isolated cylinder chambers, a bottom shell and a valve plate respectively sealed and connected to the bottom and top ends of the cylinder body, and a top cover sealed and connected to the top end of the valve plate. The air inlet and air inlet hole are both provided on the bottom shell. The sealing mechanism is assembled inside the bottom shell. The output shaft of the drive motor extends from the bottom surface of the bottom shell into the interior of the bottom shell. The exhaust nozzle is provided on the top cover. The valve plate is provided with an airflow hole and a pin for movably covering the outlet end of the airflow hole. The cup assembly includes a swing arm with multiple piston pins and multiple cups connected as one piece. The multiple piston pins and the multiple cups extend into the cylinder chamber from the bottom and top ends of each cylinder chamber respectively and are nested together in the cylinder chamber. The bottom end of the swing arm is provided with an eccentric shaft. The bottom end of the eccentric shaft is fixed on the rotating seat 74. The central axis of the eccentric shaft and the output shaft 50 are obliquely intersecting. Multiple parts located outside the cylinder chamber are clamped and fixed by the valve plate and the cylinder body.

[0049] The embodiments of the present invention have been described above with reference to the accompanying drawings. However, the present invention is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of the present invention without departing from the spirit and scope of the claims. All of these forms are within the scope of protection of the present invention.

Claims

1. A miniature vacuum pump, comprising an exhaust chamber with an inlet and an outlet, a cup assembly assembled in the inner cavity of the exhaust chamber, and a drive motor having an output shaft passing through the bottom wall of the exhaust chamber and extending into the inner cavity, and being drively connected to the cup assembly to drive the cup assembly, characterized in that, The miniature vacuum pump also includes a vacuum breaking component, which includes: An air inlet hole that penetrates the bottom wall of the exhaust chamber; A pressure plate that is movably fitted onto the section of the output shaft located in the exhaust chamber and correspondingly covers the air inlet; A rotating seat is coaxially fixedly assembled on the output shaft and located on the side of the pressure plate away from the bottom wall. A pivot frame is provided on the outer side of the rotating seat. The middle section utilizes a centrifugal pendulum pivotally mounted on a pivot frame on the outer side of the rotating seat, the pivot being perpendicular to the output shaft. The center of gravity of the centrifugal pendulum is located at the end away from the rotating seat, and the end of the centrifugal pendulum near the rotating seat bends and extends towards the pressure plate to form a pressing portion for pressing against the pressure plate; and A reset elastic element has one end fixed relative to the exhaust chamber and the other end abutting against the side of the pressure plate facing the bottom wall. It is used to push the pressure plate away from the bottom wall so that the air inlet is connected to the inner cavity of the exhaust chamber. When the output shaft rotates, the pressing part pushes against the pressure plate so that the pressure plate overcomes the elastic force of the reset elastic element and covers the air inlet. When the output shaft does not rotate, the pressing part does not apply pressure to the pressure plate. The pressure plate returns to its initial position under the elastic force of the reset elastic element and opens the air inlet.

2. The miniature vacuum pump as described in claim 1, characterized in that, A pivot frame is symmetrically arranged on each of the opposite sides of the rotating seat, and a centrifugal pendulum is pivotally mounted on each pivot frame.

3. The miniature vacuum pump as described in claim 1 or 2, characterized in that, The pressure plate and the bottom surface of the rotating seat have a gap in the axial direction of the output shaft. The end of the pressing part is inserted into the gap and abuts against the bottom surface of the rotating seat when the output shaft is not rotating.

4. The miniature vacuum pump as described in claim 1, characterized in that, A sealing gasket is provided on the side of the pressure plate facing the bottom wall, directly opposite the air inlet.

5. The miniature vacuum pump as described in claim 1, characterized in that, The outer wall of the bottom wall is also recessed to form a noise reduction groove with one end connected to the outer end opening of the air inlet and the other end having a groove on the outer side of the air collection and exhaust chamber. The noise reduction groove is filled with sound insulation cotton.

6. The miniature vacuum pump as described in claim 1, characterized in that, The pressure plate is also provided with a guide hole that is axially parallel to the output shaft, and a guide rod that is protruding from the bottom wall and is parallel to the output shaft and passes through the guide hole.

7. The miniature vacuum pump as described in claim 1 or 6, characterized in that, The pressure plate has a through hole in the middle, and a ball bearing is fixedly assembled in the through hole. The output shaft passes through the inner ring of the ball bearing and is axially movable relative to the inner ring.

8. The miniature vacuum pump as described in claim 7, characterized in that, A stepped hole is provided in the middle of the bottom wall. One end of the stepped hole that connects to the inner cavity of the exhaust chamber is the narrow diameter end, and the other end that is away from the exhaust chamber is the wide diameter end. The output shaft passes through the stepped hole and extends into the inner cavity of the exhaust chamber. A sealing gasket is also assembled inside the wide diameter end. One side of the sealing gasket abuts against the connecting stepped surface of the narrow diameter end and the wide diameter end, while on the opposite side, an abutting ring is provided that protrudes around the inner hole of the sealing gasket for abutting against the end face of the drive motor.

9. The miniature vacuum pump as described in claim 8, characterized in that, The reset elastic element is a helical compression spring correspondingly sleeved on the output shaft. The middle part of the side plate of the pressure plate facing the bottom wall is correspondingly convex to form a corresponding convex ring surrounding the through hole. One end of the helical compression spring is sleeved on the convex ring, and the other end passes through the stepped hole and the inner hole of the sealing gasket and is sleeved on the shaft seat corresponding to the end face of the drive motor for the output shaft to pass through.

10. A miniature vacuum pumping device, comprising a miniature vacuum pump and a controller connected to a drive motor of the miniature vacuum pump for controlling the operating state of the drive motor, characterized in that, The micro vacuum pump is the micro vacuum pump as described in any one of claims 1-9.

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