Multi-station vacuum degassing furnace

Abstract

The utility model relates to vacuum degassing furnace technical field, and disclose a kind of multi-station vacuum degassing furnace, including cavity, mechanical pump and molecular pump, through the front stage pipeline setting in the front stage valve of mechanical pump output end, setting in the front stage valve and molecular pump between the front stage air release valve, through connecting pipeline setting in the molecular pump input end of molecular pump plug-in valve, setting in the molecular pump and molecular pump plug-in valve between the vacuum gauge.The multi-station vacuum degassing furnace, through the three-stage vacuum system cooperation of mechanical pump, molecular pump and ion pump and the collaborative control of front stage valve, molecular pump plug-in valve and ion pump plug-in valve, the efficient vacuum pumping of multi-station vacuum degassing furnace is realized, heating controller and heating element cooperate to ensure cavity temperature stability, high vacuum gauge tube real-time monitoring vacuum degree and through total controller realize automation control, host computer provides intuitive operation interface, overall system structure is compact, control is accurate, energy consumption is low.

Description

Technical Field

[0001] This utility model relates to the field of vacuum degassing furnace technology, specifically a multi-station vacuum degassing furnace. Background Technology

[0002] A vacuum degassing furnace is a device specifically designed to heat materials in a vacuum environment to remove dissolved gases or volatile substances. It is widely used in metal, ceramic, and other applications requiring the removal of internal gases or impurities. By heating in a vacuum, oxidation reactions are effectively reduced, and gaseous components in materials can be removed more efficiently, improving the quality and performance of the final product.

[0003] However, traditional vacuum degassing equipment only supports the processing of a single sample, and traditional equipment may experience performance degradation or equipment damage due to overheating after long-term operation. In addition, traditional systems lack an effective centralized control system to manage the operation at different stages, which seriously affects the practicality and work efficiency of the device during use. Utility Model Content

[0004] The purpose of this section is to outline some aspects of embodiments of the present invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of this application, to avoid obscuring the purpose of these documents; however, such simplifications or omissions should not be construed as limiting the scope of the present invention.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A multi-station vacuum degassing furnace, comprising:

[0007] The system includes a chamber, a mechanical pump, and a molecular pump; a pre-valve located at the output end of the mechanical pump via a pre-pipeline; a pre-vent valve located between the pre-valve and the molecular pump; a molecular pump gate valve located at the input end of the molecular pump via a connecting pipe; and a vacuum gauge located between the molecular pump and the molecular pump gate valve.

[0008] An ion pump, an ion pump gate valve connected to the input end of the ion pump via a connecting pipe, a high vacuum gauge tube fixedly installed on the surface of the cavity via a flange interface, a heating element fixedly installed inside the cavity, and a heating controller electrically connected to the heating element inside the cavity via an overheating circuit are used to control the heating temperature inside the cavity.

[0009] As a further embodiment of this utility model: the cavity is composed of a left cavity and a right cavity, and a chiller is connected between the left cavity and the right cavity through a pipe.

[0010] As a further embodiment of this utility model: the output terminals of the mechanical pump, molecular pump, ion pump, fore-stage valve, molecular pump gate valve, ion pump gate valve, fore-stage venting valve, and high vacuum gauge are all electrically or communicatively connected to a main controller, and the interface of the main controller is communicatively connected to a host computer via a communication line.

[0011] As a further improvement of this utility model: the main controller is used to control the start-up and stop sequence of the mechanical pump, molecular pump and ion pump, the opening and closing status of the fore-stage valve, the molecular pump gate valve and the ion pump gate valve, and the temperature setpoint of the heating controller based on the monitoring data of the high vacuum gauge.

[0012] As a further improvement of this utility model: the surface of the host computer is provided with a process parameter setting interface, a vacuum degree display interface, and an equipment operation status monitoring interface.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] This invention achieves efficient vacuuming of a multi-station vacuum degassing furnace through a three-stage vacuum system consisting of a mechanical pump, a molecular pump, and an ion pump, coordinated with the pre-stage valve, the molecular pump gate valve, and the ion pump gate valve. The heating controller works in conjunction with the heating elements to ensure stable chamber temperature. The high-vacuum gauge monitors the vacuum level in real time and achieves automated control through the main controller. The host computer provides an intuitive operating interface. The overall system is compact, precise in control, and low in energy consumption, significantly improving equipment utilization and degassing efficiency. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of a multi-station vacuum degassing furnace.

[0016] Figure 2 This is a control connection diagram of the main controller in a multi-station vacuum degassing furnace.

[0017] In the diagram: 101, cavity; 102, mechanical pump; 103, fore-stage valve; 104, fore-stage vent valve; 105, molecular pump; 106, molecular pump gate valve; 107, vacuum gauge; 108, ion pump; 109, ion pump gate valve; 110, high vacuum gauge tube; 111, heating element; 112, heating controller; 113, main controller; 114, host computer; 115, chiller. Detailed Implementation

[0018] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0019] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0020] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments.

[0021] Example 1

[0022] Please see Figure 1-2 This is the first embodiment of the present invention, which provides a multi-station vacuum degassing furnace, comprising:

[0023] The chamber 101, mechanical pump 102 and molecular pump 105 are connected by a pre-stage valve 103 at the output end of mechanical pump 102 via a pre-stage pipeline, a pre-stage vent valve 104 between pre-stage valve 103 and molecular pump 105, a molecular pump gate valve 106 at the input end of molecular pump 105 via a connecting pipeline, and a vacuum gauge 107 between molecular pump 105 and molecular pump gate valve 106.

[0024] The ion pump 108, the ion pump gate valve 109 which is connected to the input end of the ion pump 108 via a connecting pipe, the high vacuum gauge tube 110 which is fixedly installed on the surface of the cavity 101 via a flange interface, the heating element 111 which is fixedly installed inside the cavity 101, and the heating controller 112 which is electrically connected to the heating element inside the cavity 101 via a heating circuit are used to control the heating temperature inside the cavity 101.

[0025] Specifically, cavity 101 consists of a left cavity and a right cavity, and a chiller 115 is connected between the left cavity and the right cavity via a pipe.

[0026] Furthermore, the chiller 115 can effectively regulate the temperature in the left and right cavities of the chamber 101, ensuring the stability and consistency of the internal environment of the two cavities.

[0027] Specifically, the output terminals of the mechanical pump 102, molecular pump 105, ion pump 108, fore-stage valve 103, molecular pump gate valve 106, ion pump gate valve 109, fore-stage vent valve 104, and high vacuum gauge tube 110 are all electrically or communicatively connected to a main controller 113. The interface of the main controller 113 is communicatively connected to a host computer 114 via a communication line.

[0028] Furthermore, the mechanical pump 102, molecular pump 105, ion pump 108, fore-stage valve 103, molecular pump gate valve 106, ion pump gate valve 109, fore-stage venting valve 104, and high vacuum gauge tube 110 are all connected to the main controller 113, realizing centralized control and status monitoring of the entire vacuum system, and improving the automation level and operational stability of the equipment.

[0029] Specifically, the main controller 113 is used to control the start-up and stop sequence of the mechanical pump 102, the molecular pump 105 and the ion pump 108, the opening and closing status of the fore-stage valve 103, the molecular pump gate valve 106 and the ion pump gate valve 109, and the temperature setpoint of the heating controller 112 based on the monitoring data of the high vacuum gauge 110.

[0030] Furthermore, based on the vacuum data fed back by the high vacuum gauge 110, the main controller 113 intelligently controls the start-up and shutdown sequence of the mechanical pump 102, the molecular pump 105, and the ion pump 108, as well as the opening and closing logic of each valve, to ensure that the system maintains the best working state at different stages, thereby improving the vacuuming efficiency and process consistency.

[0031] Specifically, the surface of the host computer 114 is equipped with a process parameter setting interface, a vacuum degree display interface, and an equipment operation status monitoring interface.

[0032] Furthermore, the host computer 114 is equipped with a process parameter setting interface, a vacuum degree display interface, and an equipment operation status monitoring interface. Users can intuitively view the current vacuum status, set operating parameters, and realize remote operation and fault warning through the interface, which significantly improves the ease of operation and intelligent management level of the equipment.

[0033] In operation, the operator first sets the required process parameters via the host computer 114, including heating temperature, vacuum threshold, and evacuation sequence. Then, the equipment is started. The main controller 113 monitors the vacuum level in the chamber 101 in real time according to the high vacuum gauge 110, automatically controls the opening of the fore-stage valve 103, and starts the mechanical pump 102 for initial vacuuming. When the pressure drops to the set value, the fore-stage valve 103 remains open, the molecular pump gate valve 106 opens, and the molecular pump 105 starts to further evacuate to a high vacuum state. After the set vacuum level is reached, the ion pump 108 is activated to maintain the ultra-high vacuum environment. Simultaneously, the heating controller... 112 controls the heating element 111 inside the cavity 101 according to the set temperature to ensure that the sample is fully degassed at the required temperature. In the cooling system, the chiller 115 provides continuous cooling to the molecular pump 105 and the ion pump 108 through the cooling water supply pipe and the return pipe to prevent the equipment from overheating and being damaged. During the entire operation, the operator can remotely monitor and adjust the process parameters through the process parameter setting interface of the host computer 114, and keep track of the current vacuum status in real time through the vacuum degree display interface. The equipment operation status monitoring interface can visualize the working status of each component, realizing efficient, safe and intelligent operation management.

[0034] In summary, through the three-stage vacuum system of mechanical pump 102, molecular pump 105 and ion pump 108, and the coordinated control of the fore-stage valve 103, molecular pump gate valve 106 and ion pump gate valve 109, efficient vacuuming of the multi-station vacuum degassing furnace is achieved. The heating controller 112 works with the heating element 111 to ensure the temperature stability of the cavity 101. The high vacuum gauge 110 monitors the vacuum level in real time and achieves automated control through the main controller 113. The host computer 114 provides an intuitive operating interface. The overall system has a compact structure, precise control, and low energy consumption, which significantly improves equipment utilization and degassing efficiency.

[0035] Example 2

[0036] This is the second embodiment of the present invention, which provides a single-station operation mode for a multi-station vacuum degassing furnace, including the following steps:

[0037] a) Initial state: All valves are closed, and the equipment is stopped;

[0038] b) Open the fore-stage valve 103 and the target station molecular pump gate valve 106, and start the mechanical pump 102 to pump air.

[0039] c) Molecular pump 105 is started when the gas pressure is lower than the start-up threshold of molecular pump 105;

[0040] d) Ion pump 108 is started when the gas pressure is lower than the start threshold of ion pump 108;

[0041] e) After the ion pump 108 reaches the stable operating threshold, close the molecular pump gate valve 106.

[0042] Example 3

[0043] This is the third embodiment of the present invention, which provides a multi-station simultaneous operation mode for a multi-station vacuum degassing furnace, including the following steps:

[0044] a) Initial state: All valves are closed, and the equipment is stopped;

[0045] b) Open the fore-stage valve 103 and the multiple station molecular pump slide valves 106, and start the mechanical pump 102 to pump air simultaneously.

[0046] c) Molecular pump 105 is started when the gas pressure in each chamber 101 is lower than the start threshold of molecular pump 105.

[0047] d) When the gas pressure in each chamber 101 is lower than the starting threshold of the ion pump 108, start the ion pump 108 at each station.

[0048] e) After the ion pump 108 reaches the stable operating threshold, close the molecular pump gate valve 106.

[0049] It is important to note that the constructions and arrangements of this application shown in several different exemplary embodiments are merely illustrative. Although only a few embodiments are described in detail in this disclosure, those who consult this disclosure will readily understand that many modifications are possible (e.g., changes in the size, dimensions, structure, shape and proportion of various elements, as well as parameter values ​​(e.g., temperature, pressure, etc.), mounting arrangements, use of materials, color, orientation, etc.) without substantially departing from the novel teachings and advantages of the subject matter described in this application). For example, an element shown as integrally formed may be composed of multiple parts or elements, the position of elements may be inverted or otherwise altered, and the nature or number or position of discrete elements may be changed or altered. Therefore, all such modifications are intended to be included within the scope of this utility model. The order or sequence of any process or method steps may be changed or rearranged according to alternative embodiments. In the claims, any "device plus function" clause is intended to cover the structure described herein that performs the function, and not only structural equivalents but also equivalent structures. Without departing from the scope of this invention, other substitutions, modifications, alterations, and omissions may be made in the design, operation, and arrangement of the exemplary embodiments. Therefore, this invention is not limited to the specific embodiments, but extends to various modifications that still fall within the scope of the appended claims.

[0050] Furthermore, in order to provide a concise description of exemplary embodiments, not all features of actual embodiments (i.e., those features that are not relevant to the best mode of carrying out the present invention as currently considered, or those features that are not relevant to implementing the present invention) may be omitted.

[0051] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those skilled in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0052] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A multi-station vacuum degassing furnace, characterized in that: include: The system includes a cavity (101), a mechanical pump (102), and a molecular pump (105), a pre-stage valve (103) located at the output end of the mechanical pump (102) via a pre-stage pipeline, a pre-stage vent valve (104) located between the pre-stage valve (103) and the molecular pump (105), a molecular pump gate valve (106) located at the input end of the molecular pump (105) via a connecting pipeline, and a vacuum gauge (107) located between the molecular pump (105) and the molecular pump gate valve (106). An ion pump (108), an ion pump gate valve (109) connected to the input end of the ion pump (108) via a connecting pipe, a high vacuum gauge tube (110) fixedly installed on the surface of the cavity (101) via a flange interface, a heating element (111) fixedly installed inside the cavity (101), and a heating controller (112) electrically connected to the heating element inside the cavity (101) via a heating line are used to control the heating temperature inside the cavity (101).

2. The multi-station vacuum degassing furnace according to claim 1, characterized in that: The cavity (101) consists of a left cavity and a right cavity, and a chiller (115) is connected between the left cavity and the right cavity by a pipe.

3. The multi-station vacuum degassing furnace according to claim 1, characterized in that: The output terminals of the mechanical pump (102), molecular pump (105), ion pump (108), fore-stage valve (103), molecular pump gate valve (106), ion pump gate valve (109), fore-stage vent valve (104), and high vacuum gauge (110) are all electrically or communicatively connected to a main controller (113), and the interface of the main controller (113) is communicatively connected to a host computer (114) via a communication line.

4. A multi-station vacuum degassing furnace according to claim 3, characterized in that: The main controller (113) is used to control the start-stop sequence of the mechanical pump (102), molecular pump (105) and ion pump (108), the opening and closing status of the fore-stage valve (103), the molecular pump gate valve (106) and the ion pump gate valve (109), and the temperature setpoint of the heating controller (112) based on the monitoring data of the high vacuum gauge (110).

5. A multi-station vacuum degassing furnace according to claim 3, characterized in that: The surface of the host computer (114) is provided with a process parameter setting interface, a vacuum degree display interface, and an equipment operation status monitoring interface.

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