Combined measuring instrument and calibration method for cantilever optical waveguide calibration

Abstract

A combined measuring instrument and calibration method for calibrating cantilever optical waveguides are disclosed. The combined measuring instrument includes a displacement stage, a white light source, a first collimating lens, a tube mirror, a CCD camera, a first non-polarizing beam splitter cube, a dichroic mirror, a quarter-wave plate, a laser source, a second collimating lens, a four-quadrant photodetector, a polarizing beam splitter cube, a second non-polarizing beam splitter cube, a first microscope objective, a second microscope objective, a reference mirror, an atomic force probe, a cantilever optical waveguide sample, a micro-force probe, an actuator, a piezoelectric ceramic actuator, a first precision displacement stage, a second precision displacement stage, a laser input module, and a photodiode. This invention significantly reduces the cost of various measurement requirements and applications, improves measurement efficiency, and features high measurement accuracy, rich measurement functions, and a compact structure, thereby enhancing the product's competitiveness.

Description

Technical Field

[0001] This invention belongs to the field of precision measurement device technology, and specifically relates to a combined measuring instrument and calibration method for cantilever optical waveguide calibration. Background Technology

[0002] Cantilevered optical waveguides can be integrated into liquid microfluidic systems, finding applications in key technological areas such as weak signal detection, information link parameter calibration, sensor-microsystem integration, and high-precision intelligent analysis within microfluidic sensor systems. The working principle of the cantilevered optical waveguide in a liquid microfluidic system is that the microfluidic field of the sample under test causes deflection of the cantilevered waveguide, resulting in a change in the system's output light intensity, which is then sensed by a photodiode. The elastic coefficient and sensitivity of the cantilevered optical waveguide are directly related to the microfluidic force; therefore, the research on corresponding calibration techniques and devices is crucial.

[0003] Currently, existing devices have considerable limitations in calibrating the "force-deformation-optical power" relationship of cantilever optical waveguides. Specifically, they have low calibration efficiency and sensitivity, poor anti-interference performance, complex system structure, and low resource sharing. Summary of the Invention

[0004] To address the aforementioned problems, the present invention aims to provide a combined measuring instrument and calibration method for cantilever optical waveguide calibration. With an integrated design sharing a common optical path, it integrates three-dimensional initial attitude measurement of cantilever optical waveguide, elastic coefficient calibration of cantilever optical waveguide, force-deformation-optical power calibration of cantilever optical waveguide, and elastic coefficient calibration of atomic force probe. It can be used individually or in combination for measurement, greatly reducing the cost of use.

[0005] To achieve the above objectives, the cantilevered optical waveguide calibration combined measuring instrument provided by the present invention includes a displacement stage, a white light source, a first collimating lens, a tube mirror, a CCD camera, a first non-polarizing beam splitter cube, a dichroic mirror, a quarter-wave plate, a laser source, a second collimating lens, a four-quadrant photodetector, a polarizing beam splitter cube, a second non-polarizing beam splitter cube, a first microscope objective, a second microscope objective, a reference mirror, an atomic force probe, a cantilevered optical waveguide sample, a micro-force probe, an actuator, a piezoelectric ceramic actuator, a first precision displacement stage, a second precision displacement stage, and a laser source. The system includes an optical input module and a photodiode; a CCD camera, a tube mirror, a first unpolarized beam splitter, a dichroic mirror, a quarter-wave plate, a second unpolarized beam splitter, and a second microscope objective, arranged in a row from top to bottom with their centers aligned, all mounted at the center of the front end of a vertically movable stage; a first collimating lens and a white light source are arranged in a row with their centers aligned at a distance from each other at the front end of the stage located on one side of the first unpolarized beam splitter, and the first collimating lens, white light source, and first unpolarized beam splitter are also aligned at their centers; the first microscope objective and the reference mirror are spaced apart by a distance of... The first microscope objective, the reference mirror, and the second non-polarizing beam splitter are arranged in a row at the front end of the displacement stage, with their centers aligned. The laser source, the second collimating lens, and the polarizing beam splitter are arranged in a row at intervals from top to bottom and are aligned at their centers, and are installed on the other side of the front end of the displacement stage. The four-quadrant photodetector is installed at the front end of the displacement stage, located outside the polarizing beam splitter, with the centers of the dichroic mirror, the polarizing beam splitter, and the four-quadrant photodetector aligned. The second precision displacement stage is installed directly below the second microscope objective. One end of the atomic force probe is connected to the second precision displacement stage in a manner that allows it to rotate in the horizontal plane, thus enabling it to rotate to the focal plane of the second microscope objective and align with the optical axis. The first precision displacement stage is positioned below the second microscope objective. The lower end of the micro-force probe is connected to the first precision displacement stage via an actuator and a piezoelectric ceramic driver, allowing the micro-force probe to move up and down under the influence of the first precision displacement stage. The cantilevered optical waveguide sample is horizontally positioned between the atomic force probe and the micro-force probe, with the laser input module and photodiode on both sides aligned with the center of the optical axis.

[0006] The displacement stage, white light source, first collimating lens, tube lens, CCD camera, first unpolarized beam splitter cube, dichroic mirror, quarter-wave plate, second unpolarized beam splitter cube, first microscope objective, second microscope objective, reference mirror, and cantilevered optical waveguide sample constitute a cantilevered optical waveguide three-dimensional initial attitude measurement device.

[0007] The displacement stage, dichroic mirror, quarter-wave plate, laser source, second collimating lens, four-quadrant photodetector, polarization beam splitter cube, second non-polarization beam splitter cube, second microscope objective, atomic force probe, micro-force probe, actuator, piezoelectric ceramic actuator, first precision displacement stage and second precision displacement stage constitute an atomic force probe elastic coefficient calibration device.

[0008] The cantilevered optical waveguide sample is plate-shaped and includes a substrate-mounted cantilevered optical waveguide sample and a substrate-free cantilevered optical waveguide sample.

[0009] When the cantilevered optical waveguide sample adopts a substrate-supported cantilevered optical waveguide sample, the displacement stage 1, dichroic mirror, quarter-wave plate, laser source, second collimating lens, four-quadrant photodetector, polarization beam splitter cube, second non-polarization beam splitter cube, second microscope objective, atomic force probe, substrate-supported cantilevered optical waveguide sample and second precision displacement stage constitute a cantilevered optical waveguide "force-deformation" relationship calibration device.

[0010] When the cantilevered optical waveguide sample adopts a substrate-free cantilevered optical waveguide sample, the displacement stage, dichroic mirror, quarter-wave plate, laser source, second collimating lens, four-quadrant photodetector, polarization beam splitter cube, second non-polarization beam splitter cube, second microscope objective, atomic force probe, substrate-free cantilevered optical waveguide sample, micro-force probe, actuator, piezoelectric ceramic actuator, first precision displacement stage and second precision displacement stage constitute the cantilevered optical waveguide "force-deformation" relationship calibration device.

[0011] The displacement stage, dichroic mirror, quarter-wave plate, laser source, second collimating lens, four-quadrant photodetector, polarization beam splitter cube, second non-polarization beam splitter cube, second microscope objective, atomic force probe, cantilevered optical waveguide sample, second precision displacement stage, laser input module and photodiode constitute a cantilevered optical waveguide "deformation-optical power" relationship calibration device.

[0012] The calibration method of the combined measuring instrument for cantilever optical waveguide calibration provided by the present invention includes the following steps performed in sequence:

[0013] Step 1: Using the aforementioned three-dimensional initial attitude measurement device for cantilevered optical waveguides, based on white light interferometry technology and employing a phase spectrum height estimation method, the three-dimensional initial attitude of the cantilevered optical waveguide is measured. This allows for estimation of the light transmission of the cantilevered optical waveguide before calibration of the "force-deformation-optical power" relationship, thereby improving the accuracy of subsequent calibration.

[0014] Step 2: Calibrate the elastic coefficient of the atomic force probe using the aforementioned atomic force probe elastic coefficient calibration device; this step is omitted if the calibration is for a substrate-free cantilevered optical waveguide.

[0015] Step 3: Select a calibration device for the force-deformation relationship of cantilever optical waveguides with different structures to calibrate cantilever optical waveguides without substrate or with substrate, and obtain the force-deformation relationship of the cantilever optical waveguides;

[0016] Step 4: Use the cantilever optical waveguide “deformation-optical power” relationship calibration device to calibrate the cantilever optical waveguide, obtain the cantilever optical waveguide “deformation-optical power” relationship, and combine it with the cantilever optical waveguide “force-deformation” relationship obtained in Step 3 to complete the cantilever optical waveguide “force-deformation-optical power” calibration.

[0017] In step 1, the method for measuring the three-dimensional initial attitude of the cantilevered optical waveguide using the aforementioned three-dimensional initial attitude measurement device, based on white light interferometry and employing a phase spectrum height estimation method, includes the following steps:

[0018] Step 1.1: Obtain the interference pattern of the cantilevered optical waveguide surface profile and extract the interference signal I at each measurement point in the interference pattern. B The signal at any measurement point in the interferogram is selected as the reference signal I. A ;

[0019] Step 1.2: Acquire the interference signal I B With reference signal I A cross power spectrum G AB The formula is as follows:

[0020] G AB =G A [G B ] *

[0021] Among them, G A G B Indicate I A ,I B The spectrum distribution after Fourier transform, * denotes conjugate operation;

[0022] Step 1.3: From the above cross-power spectrum G AB The phase information Φ is extracted, and then the height information H of the cantilever optical waveguide is obtained using the following formula, thereby determining the three-dimensional initial attitude of the cantilever optical waveguide:

[0023]

[0024] Where N is the number of points in the Discrete Fourier Transform, f i denoted as the cross-power spectrum frequency, and i is the ordinal number of the phase frequency information point after Fourier transform.

[0025] Compared with existing devices, the combined measuring instrument and calibration method for cantilever optical waveguide calibration provided by the present invention have the following advantages:

[0026] 1. This invention has the function of calibrating the force-deformation-optical power relationship of cantilever optical waveguides. It integrates the functions of three-dimensional initial attitude measurement of cantilever optical waveguides, calibrating the elastic coefficient of cantilever optical waveguides, calibrating the force-deformation-optical power of cantilever optical waveguides, and calibrating the elastic coefficient of atomic force probes. It can be used alone or in combination for measurement.

[0027] 2. This invention allows for the free selection of atomic force probes or micro-force probes for calibration of cantilevered optical waveguides with different structures, demonstrating strong applicability;

[0028] 3. This invention is based on white light interferometry and employs a phase spectrum height estimation algorithm to improve the accuracy of three-dimensional initial attitude measurement of cantilever optical waveguides. This allows for estimation of the light transmission of cantilever optical waveguides before calibration of the force-deformation-optical power relationship, thereby improving the accuracy of subsequent calibration.

[0029] 4. This invention greatly improves the ease of calibration by integrating multiple functions into one. The measurement process does not require changing the position of the cantilevered optical waveguide, thus ensuring the accuracy of the measurement results. At the same time, only one calibration is required for an atomic force probe to achieve repeatable measurements.

[0030] 5. This invention greatly reduces the cost of various measurement requirements and applications, improves measurement efficiency, and features high measurement accuracy, rich measurement functions, and compact structure, thereby enhancing the competitiveness of the product. Attached Figure Description

[0031] Figure 1 A schematic diagram of the combined measuring instrument for cantilever optical waveguide calibration provided by the present invention.

[0032] Figure 2 This is a schematic diagram of the cantilevered optical waveguide three-dimensional initial attitude measurement device in the combined measuring instrument provided by the present invention.

[0033] Figure 3 This is a schematic diagram of the atomic force probe elastic coefficient calibration device in the combined measuring instrument provided by the present invention.

[0034] Figures 4(a) and 4(b) are schematic diagrams of the force-deformation relationship calibration device for cantilever optical waveguides in the combined measuring instrument provided by the present invention when the cantilever optical waveguide has a substrate and when it does not have a substrate.

[0035] Figure 5 A schematic diagram of the calibration device for the "deformation-optical power" relationship of the cantilever optical waveguide in the combined measuring instrument provided by the present invention. Detailed Implementation

[0036] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0037] like Figure 1 As shown, the combined measuring instrument for cantilever optical waveguide calibration provided by the present invention includes a displacement stage 1, a white light source 2, a first collimating lens 3, a tube mirror 4, a CCD camera 5, a first unpolarized beam splitter cube 6, a dichroic mirror 7, a quarter-wave plate 8, a laser source 9, a second collimating lens 10, a four-quadrant photodetector 11, a polarized beam splitter cube 12, a second unpolarized beam splitter cube 13, a first microscope objective 14, a second microscope objective 15, a reference mirror 16, an atomic force probe 17, a cantilever optical waveguide sample 18, a micro-force probe 19, an actuator 20, a piezoelectric ceramic actuator 21, a first precision displacement stage 22, and a second precision displacement stage 23. The system includes a laser input module 24 and a photodiode 25; a CCD camera 5, a tube mirror 4, a first unpolarized beam splitter 6, a dichroic mirror 7, a quarter-wave plate 8, a second unpolarized beam splitter 13, and a second microscope objective 15, arranged in a row from top to bottom with their centers aligned, are all mounted at the center of the front end of a vertically movable stage 1; a first collimating lens 3 and a white light source 2 are arranged in a row with their centers aligned at a distance from each other at the front end of the stage 1 located on one side of the first unpolarized beam splitter 6; and a first microscope objective 14 and a reference mirror 16 are arranged in a row with their centers aligned at a distance from each other. A row of components is arranged at the front end of the displacement stage 1, located on one side of the second unpolarized beam splitter 13, with the first microscope objective 14, reference mirror 16, and the second unpolarized beam splitter 13 centered and aligned. The laser source 9, the second collimating lens 10, and the polarized beam splitter 12 are arranged in a row from top to bottom at intervals and centered, mounted on the other side of the front end of the displacement stage 1. A four-quadrant photodetector 11 is mounted at the front end of the displacement stage 1, located outside the polarized beam splitter 12, with the dichroic mirror 7, the polarized beam splitter 12, and the four-quadrant photodetector 11 centered and aligned. A second precision displacement stage 23 is mounted directly below the second microscope objective 15. (The last sentence appears to be incomplete and possibly refers to an atomic or atomic number.) One end of the force probe 17 is connected to the second precision displacement stage 23 in a manner that allows it to rotate in the horizontal plane, thus enabling it to rotate to the focal plane of the second microscope objective 15 and be flush with the optical axis; the first precision displacement stage 22 is located below the second microscope objective 15; the lower end of the micro-force probe 19 is connected to the first precision displacement stage 22 in sequence via the actuator 20 and the piezoelectric ceramic driver 21, thus enabling the micro-force probe 19 to move up and down under the drive of the first precision displacement stage 22; the cantilevered optical waveguide sample 18 is horizontally positioned between the atomic force probe 17 and the micro-force probe 19, with the laser input module 24 and photodiode 25 on both sides aligned with the center of the optical axis.

[0038] like Figure 2As shown, the displacement stage 1, white light source 2, first collimating lens 3, tube lens 4, CCD camera 5, first unpolarized beam splitter 6, dichroic mirror 7, quarter-wave plate 8, second unpolarized beam splitter 13, first microscope objective 14, second microscope objective 15, reference mirror 16, and cantilevered optical waveguide sample 18 constitute a cantilevered optical waveguide three-dimensional initial attitude measurement device.

[0039] like Figure 3 As shown, the displacement stage 1, dichroic mirror 7, quarter-wave plate 8, laser source 9, second collimating lens 10, four-quadrant photodetector 11, polarization beam splitter 12, second non-polarization beam splitter 13, second microscope objective 15, atomic force probe 17, micro-force probe 19, actuator 20, piezoelectric ceramic actuator 21, first precision displacement stage 22 and second precision displacement stage 23 constitute an atomic force probe elastic coefficient calibration device.

[0040] The cantilevered optical waveguide sample 18 is plate-shaped and includes a substrate cantilevered optical waveguide sample 18a and a substrateless cantilevered optical waveguide sample 18b.

[0041] As shown in Figure 4(a), when the cantilevered optical waveguide sample 18 adopts a substrate-supported cantilevered optical waveguide sample 18a, the displacement stage 1, dichroic mirror 7, quarter-wave plate 8, laser source 9, second collimating lens 10, four-quadrant photodetector 11, polarization beam splitter 12, second non-polarization beam splitter 13, second microscope objective 15, atomic force probe 17, substrate-supported cantilevered optical waveguide sample 18a, and second precision displacement stage 23 constitute a cantilevered optical waveguide "force-deformation" relationship calibration device.

[0042] As shown in Figure 4(b), when the cantilever optical waveguide sample 18 adopts a substrate-free cantilever optical waveguide sample 18b, the displacement stage 1, dichroic mirror 7, quarter-wave plate 8, laser source 9, second collimating lens 10, four-quadrant photodetector 11, polarization beam splitter 12, second non-polarization beam splitter 13, second microscope objective 15, atomic force probe 17, substrate-free cantilever optical waveguide sample 18b, micro-force probe 19, actuator 20, piezoelectric ceramic actuator 21, first precision displacement stage 22 and second precision displacement stage 23 constitute a cantilever optical waveguide "force-deformation" relationship calibration device.

[0043] like Figure 5As shown, the displacement stage 1, dichroic mirror 7, quarter-wave plate 8, laser source 9, second collimating lens 10, four-quadrant photodetector 11, polarization beam splitter 12, second non-polarization beam splitter 13, second microscope objective 15, atomic force probe 17, cantilevered optical waveguide sample 18, second precision displacement stage 23, laser input module 24, and photodiode 25 constitute a cantilevered optical waveguide "deformation-optical power" relationship calibration device.

[0044] The working principle of the combined measuring instrument for calibrating the force-deformation-optical power relationship of the cantilever optical waveguide provided by this invention is described below:

[0045] When needed to utilize Figure 2 When measuring the three-dimensional initial attitude of the cantilevered optical waveguide sample 18 using the cantilevered optical waveguide three-dimensional initial attitude measurement device shown, the atomic force probe 17 is moved away from the optical axis of the second microscope objective 15 by the second precision displacement stage 23; white light with a center wavelength of 560nm emitted from the white light source 2 is collimated by the first collimating lens 3 and output as a parallel beam that enters the first unpolarized beam splitter 6. The reflected beam passes sequentially through the dichroic mirror 7 and the quarter-wave plate 8 and enters the second unpolarized beam splitter 13, where it is split into a mutually perpendicular reference beam and a measurement beam, which then enter the first microscope objective 14 and the second microscope objective 15 respectively; the reference beam passes through the first... The microscope objective 14 converges onto the reference mirror 16; the measurement beam converges onto the cantilevered optical waveguide sample 18 after passing through the second microscope objective 15; the reference beam and the measurement beam are reflected at the surfaces of the reference mirror 16 and the cantilevered optical waveguide sample 18, respectively, and return to the second unpolarized beam splitter 13 and interfere. Then, the beam passes sequentially through the quarter-wave plate 8, the dichroic mirror 7, and the first unpolarized beam splitter 6, and then converges onto the CCD camera 5 through the tube mirror 4; the displacement stage 1 moves vertically and the CCD camera 5 collects the white light interference signal. Finally, based on the principle of white light interferometry, the three-dimensional initial attitude of the cantilevered optical waveguide sample 18 is measured.

[0046] When needed to utilize Figure 3When calibrating the elastic coefficient of the atomic force probe 17 using the atomic force probe elastic coefficient calibration device shown, the second precision displacement stage 23 is used to rotate the atomic force probe 17 to the focal plane of the second microscope objective 15 and align it with the optical axis. Then, the displacement stage 1 is moved vertically downward until the lower end of the atomic force probe 17 contacts the upper end of the micro-force probe 19. The red laser with a center wavelength of 635nm emitted by the laser source 9 passes through the second collimating lens 10 and enters the polarization beam splitter 12, where it is split into mutually perpendicular horizontally polarized light and vertically polarized light. Light, in which horizontally polarized light passes sequentially through a dichroic mirror 7, a quarter-wave plate 8, and a second unpolarized beam splitter 13, and then through a second microscope objective 15, converges onto the surface of the atomic force probe 17. Simultaneously, an actuator 20 applies an upward force to a micro-force probe 19, thereby causing deformation of the atomic force probe 17. The deformation of the atomic force probe 17 is output by the piezoelectric ceramic actuator 21, and the applied force is output by the micro-force probe 19. Finally, the elastic coefficient of the atomic force probe 17 is determined based on the relationship between the applied force and the deformation.

[0047] When it is necessary to calibrate the force-deformation relationship of the cantilevered optical waveguide sample 18a with a substrate using the cantilevered optical waveguide force-deformation relationship calibration device shown in Figure 4(a), the calibrated atomic force probe 17 is rotated to the focal plane of the second microscope objective 15 and aligned with the optical axis using the second precision displacement stage 23, and comes into contact with the top surface of the cantilevered optical waveguide sample 18a with a substrate. The red laser with a center wavelength of 635nm emitted by the laser source 9 passes through the second collimating lens 10 and enters the polarization beam splitter 12, where it is split into mutually perpendicular horizontally polarized light and vertically polarized light. The horizontally polarized light passes sequentially through the dichroic mirror 7, the quarter-wave plate 8, and the second non-polarizing beam splitter 13, and then converges at the atomic force probe 18a through the second microscope objective 15. 7. Surface; Simultaneously, a downward force is applied by the calibrated atomic force probe 17, causing deformation of the substrate cantilevered optical waveguide sample 18a; The laser beam is reflected on the surface of the substrate cantilevered optical waveguide sample 18a and sequentially passes through the second microscope objective 15, the second unpolarized beam splitter 13, the quarter-wave plate 8, and the dichroic mirror 7 before entering the polarized beam splitter 12 and being transmitted to the surface of the four-quadrant photodetector 11; The four-quadrant photodetector 11 detects the deformation of the substrate cantilevered optical waveguide sample 18a by detecting the power of the reflected laser, and finally determines the elastic coefficient of the substrate cantilevered optical waveguide sample 18a based on the elastic coefficient of the calibrated atomic force probe 17 and the deformation of the substrate cantilevered optical waveguide sample 18a.

[0048] When it is necessary to calibrate the force-deformation relationship of the substrate-free cantilever optical waveguide sample 18b using the cantilever optical waveguide force-deformation relationship calibration device shown in Figure 4(b), the calibration device shown in Figure 4(a) or the calibration device shown in Figure 4(b) can be used. In this case, the micro-force probe 19 is moved upward using the first precision displacement stage 22 until the upper end of the micro-force probe 19 contacts the bottom surface of the substrate-free cantilever optical waveguide sample 18b; the red laser with a center wavelength of 635nm emitted by the laser source 9 passes through the second collimating lens 10 and enters the polarization beam splitter 12, where it is split into mutually perpendicular beams. Horizontally polarized light and vertically polarized light are fed in sequence, with the horizontally polarized light passing through a dichroic mirror 7, a quarter-wave plate 8, and a second unpolarized beam splitter 13, and then through a second microscope objective 15, converging onto the surface of the substrate-free cantilevered optical waveguide sample 18b. Simultaneously, an actuator 20 applies an upward force to a micro-force probe 19, thereby causing deformation of the substrate-free cantilevered optical waveguide sample 18b. The deformation of the substrate-free cantilevered optical waveguide sample 18b is output by the piezoelectric ceramic actuator 21, and the applied force is output by the micro-force probe 19. Finally, the elastic coefficient of the substrate-free cantilevered optical waveguide sample 18b is determined based on the relationship between the applied force and the deformation.

[0049] When needed to utilize Figure 5When calibrating the deformation-optical power relationship of the cantilevered optical waveguide sample 18 using the calibration device shown, the calibrated atomic force probe 17 is rotated to the focal plane of the second microscope objective 15 and aligned with the optical axis using the second precision displacement stage 23, and then contacts the top surface of the cantilevered optical waveguide sample 18. A red laser with a center wavelength of 635 nm emitted from the laser source 9 passes through the second collimating lens 10 and enters the polarization beam splitter 12, where it is split into mutually perpendicular horizontally polarized light and vertically polarized light. The horizontally polarized light sequentially passes through the dichroic mirror 7, the quarter-wave plate 8, and the second unpolarized beam splitter 13, and then converges onto the surface of the atomic force probe 17 through the second microscope objective 15. Simultaneously, a downward force is applied by the calibrated atomic force probe 17, causing deformation of the cantilevered optical waveguide sample 18. The laser beam is reflected from the surface of the cantilevered optical waveguide sample 18 and sequentially passes through the second microscope objective 15, the second unpolarized beam splitter 13, the quarter-wave plate 8, and the dichroic mirror 7 before entering the polarized beam splitter 12 and being transmitted to the surface of the four-quadrant photodetector 11. The four-quadrant photodetector 11 detects the deformation of the cantilevered optical waveguide sample 18 by detecting the power of the reflected laser. At the same time, a 660nm wavelength laser is emitted using the laser input module 24. After being output from the cantilevered optical waveguide sample 18, the change in the optical power of the laser beam is detected by the photodiode 25. Finally, the "deformation-optical power" relationship of the cantilevered optical waveguide sample 18 is determined based on the deformation and the change in optical power.

[0050] like Figure 1 As shown, the calibration method using the combined measuring instrument for cantilever optical waveguide calibration provided by the present invention includes the following steps performed in sequence:

[0051] Step 1: Using the aforementioned three-dimensional initial attitude measurement device for cantilevered optical waveguides, based on white light interferometry technology and employing a phase spectrum height estimation method, the three-dimensional initial attitude of the cantilevered optical waveguide is measured. This allows for estimation of the light transmission of the cantilevered optical waveguide before calibration of the "force-deformation-optical power" relationship, thereby improving the accuracy of subsequent calibration.

[0052] Step 2: Calibrate the elastic coefficient of the atomic force probe using the aforementioned atomic force probe elastic coefficient calibration device; this step is omitted if the calibration is for a substrate-free cantilevered optical waveguide.

[0053] Step 3: Select a calibration device for the force-deformation relationship of cantilever optical waveguides with different structures to calibrate cantilever optical waveguides without substrate or with substrate, and obtain the force-deformation relationship of the cantilever optical waveguides;

[0054] Step 4: Use the cantilever optical waveguide “deformation-optical power” relationship calibration device to calibrate the cantilever optical waveguide, obtain the cantilever optical waveguide “deformation-optical power” relationship, and combine it with the cantilever optical waveguide “force-deformation” relationship obtained in Step 3 to complete the cantilever optical waveguide “force-deformation-optical power” calibration.

[0055] In step 1, the method for measuring the three-dimensional initial attitude of the cantilevered optical waveguide using the aforementioned three-dimensional initial attitude measurement device, based on white light interferometry and employing a phase spectrum height estimation method, includes the following steps:

[0056] Step 1.1: Obtain the interference pattern of the cantilevered optical waveguide surface profile and extract the interference signal I at each measurement point in the interference pattern. B The signal at any measurement point in the interferogram is selected as the reference signal I. A ;

[0057] Step 1.2: Acquire the interference signal I B With reference signal I A cross power spectrum G AB The formula is as follows:

[0058] G AB =G A [G B ] *

[0059] Among them, G A G B Indicate I A ,I B The spectrum distribution after Fourier transform, * denotes conjugate operation;

[0060] Step 1.3: From the above cross-power spectrum G AB The phase information Φ is extracted, and then the height information H of the cantilever optical waveguide is obtained using the following formula, thereby determining the three-dimensional initial attitude of the cantilever optical waveguide:

[0061]

[0062] Where N is the number of points in the Discrete Fourier Transform, f i denoted as the cross-power spectrum frequency, and i is the ordinal number of the phase frequency information point after Fourier transform.

[0063] In summary, this invention presents a combined measuring instrument for calibrating the force-deformation-optical power relationship of cantilevered optical waveguides. This instrument integrates a three-dimensional initial attitude measurement device for cantilevered optical waveguides, an atomic force probe elastic coefficient calibration device, a cantilevered optical waveguide flexural coefficient calibration device (i.e., a force-deformation relationship calibration device for cantilevered optical waveguides), and a cantilevered optical waveguide deformation-optical power relationship calibration device. Compared to existing calibration devices, this invention improves ease of use, significantly reduces costs associated with various measurement requirements and applications, and increases measurement efficiency. It also features high measurement accuracy, rich measurement functions, and a compact structure.

Claims

1. A combined measuring instrument for cantilever optical waveguide calibration, characterized in that: The combined measuring instrument for cantilever optical waveguide calibration includes a displacement stage (1), a white light source (2), a first collimating lens (3), a tube mirror (4), a CCD camera (5), a first unpolarized beam splitter cube (6), a dichroic mirror (7), a quarter-wave plate (8), a laser source (9), a second collimating lens (10), a four-quadrant photodetector (11), a polarized beam splitter cube (12), a second unpolarized beam splitter cube (13), a first microscope objective (14), a second microscope objective (15), a reference mirror (16), an atomic force probe (17), a cantilever optical waveguide sample (18), a micro-force probe (19), an actuator (20), and a piezoelectric ceramic actuator (21). The system comprises a precision displacement stage (22), a second precision displacement stage (23), a laser input module (24), and a photodiode (25); wherein, a CCD camera (5), a tube lens (4), a first non-polarizing beam splitter (6), a dichroic mirror (7), a quarter-wave plate (8), a second non-polarizing beam splitter (13), and a second microscope objective (15) are arranged in a row from top to bottom with their centers aligned, and are all installed in the middle of the front end of the displacement stage (1) which can move up and down; a first collimating lens (3) and a white light source (2) are arranged in a row with their spacing between them and are located at the front end of the displacement stage (1) on one side of the first non-polarizing beam splitter (6), and the first collimating lens (3), the white light source (2), and the second non-polarizing beam splitter (6) are arranged in a row with their spacing between them. The centers of the non-polarizing beam splitter cube (6) are aligned; the first microscope objective (14) and the reference mirror (16) are arranged in a row at intervals on the front end of the displacement stage (1) located on one side of the second non-polarizing beam splitter cube (13), and the centers of the first microscope objective (14), the reference mirror (16) and the second non-polarizing beam splitter cube (13) are aligned; the laser source (9), the second collimating lens (10) and the polarizing beam splitter cube (12) are arranged in a row at intervals from top to bottom and are aligned at the center, and are installed on the other side of the front end of the displacement stage (1); the four-quadrant photodetector (11) is installed on the front end of the displacement stage (1) located outside the polarizing beam splitter cube (12), and the dichroic mirror (7) and the polarizing beam splitter cube are also aligned. The cube (12) and the four-quadrant photodetector (11) are aligned at their centers; the second precision displacement stage (23) is mounted directly below the second microscope objective (15); one end of the atomic force probe (17) is connected to the second precision displacement stage (23) in a manner that allows it to rotate in the horizontal plane, thus enabling it to rotate to the focal plane of the second microscope objective (15) and be flush with the optical axis; the first precision displacement stage (22) is located below the second microscope objective (15); the lower end of the micro-force probe (19) is connected to the first precision displacement stage (22) in sequence via an actuator (20) and a piezoelectric ceramic actuator (21), thus enabling the micro-force probe (19) to move up and down under the drive of the first precision displacement stage (22);A cantilevered optical waveguide sample (18) is horizontally positioned between an atomic force probe (17) and a micro-force probe (19). A laser input module (24) and a photodiode (25) are positioned on either side of the cantilevered optical waveguide sample (18) and aligned with the center of the optical axis, respectively.

2. The combined measuring instrument for cantilever optical waveguide calibration according to claim 1, characterized in that: The displacement stage (1), white light source (2), first collimating lens (3), tube lens (4), CCD camera (5), first unpolarized beam splitter cube (6), dichroic mirror (7), quarter-wave plate (8), second unpolarized beam splitter cube (13), first microscope objective (14), second microscope objective (15), reference mirror (16), and cantilevered optical waveguide sample (18) constitute a cantilevered optical waveguide three-dimensional initial attitude measurement device.

3. The combined measuring instrument for cantilever optical waveguide calibration according to claim 2, characterized in that: The displacement stage (1), dichroic mirror (7), quarter-wave plate (8), laser source (9), second collimating lens (10), four-quadrant photodetector (11), polarization beam splitter (12), second non-polarization beam splitter (13), second microscope objective (15), atomic force probe (17), micro-force probe (19), actuator (20), piezoelectric ceramic actuator (21), first precision displacement stage (22), and second precision displacement stage (23) constitute an atomic force probe elastic coefficient calibration device.

4. The combined measuring instrument for cantilever optical waveguide calibration according to claim 3, characterized in that: The cantilevered optical waveguide sample (18) is plate-shaped and includes a substrate cantilevered optical waveguide sample (18a) and a substrateless cantilevered optical waveguide sample (18b).

5. The combined measuring instrument for cantilever optical waveguide calibration according to claim 4, characterized in that: When the cantilevered optical waveguide sample (18) adopts a substrate cantilevered optical waveguide sample (18a), the displacement stage (1), dichroic mirror (7), quarter-wave plate (8), laser source (9), second collimating lens (10), four-quadrant photodetector (11), polarization beam splitter (12), second non-polarization beam splitter (13), second microscope objective (15), atomic force probe (17), substrate cantilevered optical waveguide sample (18a), and second precision displacement stage (23) constitute a cantilevered optical waveguide "force-deformation" relationship calibration device.

6. The combined measuring instrument for cantilever optical waveguide calibration according to claim 4, characterized in that: When the cantilevered optical waveguide sample (18) adopts a substrate-free cantilevered optical waveguide sample (18b), the displacement stage (1), dichroic mirror (7), quarter-wave plate (8), laser source (9), second collimating lens (10), four-quadrant photodetector (11), polarization beam splitter (12), second non-polarization beam splitter (13), second microscope objective (15), atomic force probe (17), substrate-free cantilevered optical waveguide sample (18b), micro-force probe (19), actuator (20), piezoelectric ceramic actuator (21), first precision displacement stage (22) and second precision displacement stage (23) constitute a cantilevered optical waveguide "force-deformation" relationship calibration device.

7. The combined measuring instrument for cantilever optical waveguide calibration according to claim 5 or 6, characterized in that: The displacement stage (1), dichroic mirror (7), quarter-wave plate (8), laser source (9), second collimating lens (10), four-quadrant photodetector (11), polarization beam splitter (12), second non-polarization beam splitter (13), second microscope objective (15), atomic force probe (17), cantilevered optical waveguide sample (18), second precision displacement stage (23), laser input module (24), and photodiode (25) constitute a cantilevered optical waveguide "deformation-optical power" relationship calibration device.

8. A calibration method using the combined measuring instrument for cantilever optical waveguide calibration as described in claim 7, characterized in that: The calibration method includes the following steps performed in sequence: Step 1: Using the aforementioned three-dimensional initial attitude measurement device for cantilevered optical waveguides, based on white light interferometry technology and employing a phase spectrum height estimation method, the three-dimensional initial attitude of the cantilevered optical waveguide is measured. This allows for estimation of the light transmission of the cantilevered optical waveguide before calibration of the "force-deformation-optical power" relationship, thereby improving the accuracy of subsequent calibration. Step 2: Calibrate the elastic coefficient of the atomic force probe using the aforementioned atomic force probe elastic coefficient calibration device; this step is omitted if the calibration is for a substrate-free cantilevered optical waveguide. Step 3: Select a calibration device for the force-deformation relationship of cantilever optical waveguides with different structures to calibrate cantilever optical waveguides without substrate or with substrate, and obtain the force-deformation relationship of the cantilever optical waveguides; Step 4: Use the cantilever optical waveguide "deformation-optical power" relationship calibration device to calibrate the cantilever optical waveguide, obtain the cantilever optical waveguide "deformation-optical power" relationship, and combine it with the cantilever optical waveguide "force-deformation" relationship obtained in Step 3 to complete the cantilever optical waveguide "force-deformation-optical power" calibration.

9. The calibration method of the combined measuring instrument for cantilever optical waveguide calibration according to claim 8, characterized in that: In step 1, the method for measuring the three-dimensional initial attitude of the cantilevered optical waveguide using the aforementioned three-dimensional initial attitude measurement device, based on white light interferometry and employing a phase spectrum height estimation method, includes the following steps: Step 1.1: Obtain the interference pattern of the surface profile of the cantilevered optical waveguide, and extract the interference signal I at each measurement point in the interference pattern. B The signal at any measurement point in the interferogram is selected as the reference signal I. A ; Step 1.2: Acquire the interference signal I B With reference signal I A cross power spectrum G AB The formula is as follows: G AB =G A [G B ] * Among them, G A G B Indicate I A ,I B The spectrum distribution after Fourier transform, * denotes conjugate operation; Step 1.3: From the above cross-power spectrum G AB The phase information Φ is extracted, and then the height information H of the cantilever optical waveguide is obtained using the following formula, thereby determining the three-dimensional initial attitude of the cantilever optical waveguide: Where N is the number of points in the Discrete Fourier Transform, f i denoted as the cross-power spectrum frequency, and i is the ordinal number of the phase frequency information point after Fourier transform.

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