Mounting tool

Abstract

The application relates to a mounting tool in the technical field of semiconductor device manufacturing. The mounting tool comprises a fixed plate and a weight supporting plate rotatably connected to the fixed plate; the weight supporting plate is provided with a supporting part for supporting a weight to be mounted; one side of the fixed plate close to the weight supporting plate is provided with a clamping part, the clamping part can pass through the supporting part and extend into a mounting hole of the weight to be mounted; the clamping part is used for clamping an end part of a top pin to be mounted which is arranged in the mounting hole; the fixed plate is driven to rotate relative to the weight supporting plate, the clamping part can drive the top pin to be mounted to rotate along the axis of the top pin to be mounted, so that the top pin to be mounted is limited together with the weight to be mounted. The mounting tool can reduce the mounting difficulty of the top pin and the weight.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment manufacturing technology, and more specifically, to an mounting fixture. Background Technology

[0002] In semiconductor process reaction chambers, a wafer carrier is typically included. This carrier serves two purposes: firstly, it holds the wafer for specific processes within the reaction chamber; secondly, it provides components for loading and unloading the wafer, preventing damage during wafer transfer between reaction chambers. Taking a semiconductor chemical vapor deposition (CVD) apparatus as an example, the wafer carrier is located in the reaction chamber of the deposition equipment. This wafer carrier includes a heating plate, ejector pins, and a lift actuator. The heating plate has multiple perforations, and ejector pins are disposed within these perforations. The lift actuators, acting on the wafer placed on the heating plate, allow the wafer to move up and down.

[0003] Generally, to ensure the stability of the ejector pin during its lifting and lowering motion, a counterweight is installed below the ejector pin. The ejector pin has a locating shoulder below it; rotating the ejector pin allows this locating shoulder to engage with the locating boss of the counterweight, thus achieving proper positioning and installation of the ejector pin and counterweight. However, a common problem during the installation of the ejector pin and counterweight is the narrow gap between the cavity sidewall and the heating plate side, making manual installation difficult. Furthermore, the heating plate separates the ejector pin and counterweight, making it difficult to ensure proper installation in one go. If improper installation occurs, the counterweight may detach from the ejector pin, potentially damaging the cavity or the ceramic plate that mates with the ejector pin lifting mechanism, or even causing the ejector pin to break. Therefore, providing a new method for installing the ejector pin and counterweight is a pressing technical challenge that needs to be addressed. Summary of the Invention

[0004] The purpose of this invention is to provide an installation fixture that reduces the difficulty of installing the ejector pin and the counterweight.

[0005] The embodiments of the present invention are implemented as follows:

[0006] In one aspect, the present invention provides an installation fixture comprising a fixed plate and a counterweight support plate rotatably connected to the fixed plate; the counterweight support plate is provided with a support portion for supporting the counterweight to be installed; the fixed plate has a clamping portion on its side near the counterweight support plate, the clamping portion being able to extend through the support portion into the mounting hole of the counterweight to be installed; the clamping portion is used to clamp the end of the ejector pin to be installed inserted into the mounting hole; the fixed plate is driven to rotate relative to the counterweight support plate, and the clamping portion can drive the ejector pin to be installed to rotate along its axis, so that the ejector pin to be installed engages and is positioned with the counterweight to be installed. This installation fixture can reduce the difficulty of installing the ejector pin and the counterweight.

[0007] Optionally, the counterweight support plate is provided with a through cavity for accommodating the counterweight to be installed, and the support part is connected to the inner wall of the through cavity to support the counterweight to be installed.

[0008] Optionally, the counterweight support plate is also provided with an arc-shaped groove, and the side of the fixing plate near the counterweight support plate is provided with a limiting member that can extend into the arc-shaped groove; the center of the arc-shaped groove coincides with the center of the counterweight to be installed.

[0009] Optionally, the installation fixture also includes a stop; the side of the limiting member away from the fixed plate extends outward from the arc groove, and the stop is connected to the end of the limiting member away from the fixed plate to prevent the limiting member from falling out of the arc groove.

[0010] Optionally, the counterweight plate includes a first body and a first handle connected to the first body, with a support portion disposed on the first body.

[0011] Optionally, the first handle includes a first connecting plate and a second connecting plate; the first connecting plate is connected between the first body and the second connecting plate, and the second connecting plate is provided with a first notch.

[0012] Optionally, the clamping part includes two spaced-apart fixing pins, the gap between the two fixing pins being adapted to the radial dimension of the end of the ejector pin to be installed, and the two fixing pins being used to cooperate with each other to clamp the ejector pin to be installed.

[0013] Optionally, the fixing plate includes a second body and a second handle connected to the second body, with a fixing pin located on the side of the second body near the counterweight plate.

[0014] Optionally, the second handle includes a third connecting plate and a fourth connecting plate; the third connecting plate is connected between the second body and the fourth connecting plate, and the fourth connecting plate is provided with a second notch.

[0015] Optionally, the fixing plate and the counterweight support plate are arranged in parallel.

[0016] The beneficial effects of this invention include:

[0017] The installation fixture provided in this application includes a fixed plate and a counterweight support plate rotatably connected to the fixed plate; the counterweight support plate is provided with a support portion for supporting the counterweight to be installed; the fixed plate is provided with a clamping portion on the side near the counterweight support plate, and the clamping portion can pass through the support portion and extend into the mounting hole of the counterweight to be installed; the clamping portion is used to clamp the end of the ejector pin to be installed that passes through the mounting hole; the fixed plate is driven to rotate relative to the counterweight support plate, and the clamping portion can drive the ejector pin to be installed to rotate along its axis, so that the ejector pin to be installed and the counterweight to be installed are engaged and limited. In this way, during use, the user can first install the hammer to be installed on the support, then insert the ejector pin to be installed into the hammer. At this time, the clamping part can clamp the end of the ejector pin. Then, the hammer support plate is lifted upward, so that the radial limitation between the positioning shoulder and the positioning boss is released. Then, by driving the fixing plate to rotate relative to the hammer support plate with the clamping part as the center, the fixing plate can drive the ejector pin to be installed to rotate in the mounting hole of the hammer through the clamping part. In this way, the angle of the ejector pin to be installed in the hammer is changed, so that the positioning shoulder rotates to below the positioning boss. Then, the hammer support plate is reset, so that the positioning boss of the hammer to be installed can be placed above the positioning shoulder of the ejector pin to be installed, thereby realizing the axial limitation of the hammer and the ejector pin to be installed, thus preventing the hammer from falling off the ejector pin. The installation fixture provided in this application can assist in the installation of the hammer and the ejector pin to be installed, reduce the installation difficulty of the ejector pin and the hammer to be installed, and thus improve the risk caused by improper installation of the ejector pin and the hammer to be installed. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the installation fixture provided in an embodiment of the present invention;

[0020] Figure 2 This is a schematic diagram of the structure of the ejector pin to be installed according to an embodiment of the present invention;

[0021] Figure 3 This is a schematic diagram of the structure of the counterweight to be installed according to an embodiment of the present invention;

[0022] Figure 4 This is a schematic diagram of the structure of the counterweight support plate provided in an embodiment of the present invention;

[0023] Figure 5This is a schematic diagram of the structure of the fixing plate provided in an embodiment of the present invention;

[0024] Figure 6 This is one of the schematic diagrams showing the usage state of the installation tooling provided in the embodiments of the present invention;

[0025] Figure 7 This is the second schematic diagram showing the usage state of the installation tooling provided in the embodiments of the present invention;

[0026] Figure 8 This is the third schematic diagram illustrating the usage state of the installation fixture provided in the embodiments of the present invention;

[0027] Figure 9 This is the fourth schematic diagram illustrating the usage state of the installation fixture provided in the embodiments of the present invention.

[0028] Figure 10 Fifth schematic diagram of the usage state of the installation tooling provided in the embodiments of the present invention;

[0029] Figure 11 This is the sixth schematic diagram showing the usage state of the installation fixture provided in the embodiments of the present invention.

[0030] Icons: 10-Fixing plate; 11-Clamping part; 111-Fixing pin; 12-Limiting part; 13-Stop part; 14-Second body; 15-Second handle; 151-Third connecting plate; 152-Fourth connecting plate; 1521-Second notch; 20-Weighted hammer support plate; 21-Support part; 22-Through cavity; 23-Arc groove; 24-First body; 25-First handle; 251-First connecting plate; 252-Second connecting plate; 2521-First notch; 100-Weighted hammer to be installed; 110-Mounting hole; 120-Positioning boss; 200-Ejector pin to be installed; 210-Positioning shoulder. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0032] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0033] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0034] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0035] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0036] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0037] Please refer to Figure 1 This embodiment provides an installation fixture, which includes a fixed plate 10 and a counterweight support plate 20 rotatably connected to the fixed plate 10. The counterweight support plate 20 is provided with a support portion 21 for supporting the counterweight 100 to be installed. The fixed plate 10 has a clamping portion 11 on the side near the counterweight support plate 20, and the clamping portion 11 can pass through the support portion 21 and extend into the mounting hole 110 of the counterweight 100 to be installed. The clamping portion 11 is used to clamp the end of the ejector pin 200 to be installed that passes through the mounting hole 110. The fixed plate 10 is driven to rotate relative to the counterweight support plate 20, and the clamping portion 11 can drive the ejector pin 200 to be installed to rotate along its axis, so that the ejector pin 200 to be installed and the counterweight 100 to be installed are engaged and limited. This installation fixture can reduce the installation difficulty of the ejector pin and the counterweight.

[0038] It should be noted that, please refer to Figure 2 and Figure 3One end of the ejector pin 200 to be installed has a positioning shoulder 210, which is used to limit the engagement between the ejector pin 200 to be installed and the counterweight 100 to be installed.

[0039] The counterweight 100 to be installed has a through mounting hole 110, which is cross-shaped in this embodiment. A positioning boss 120 protrudes from the inner wall of the mounting hole 110. Figure 3 As shown, the bottom surface of the positioning boss 120 is used to mate with the top surface of the positioning shoulder 210 of the ejector pin 200 to be installed, thereby achieving the limiting engagement of the ejector pin 200 and the counterweight 100 to be installed.

[0040] Optionally, there are two positioning bosses 120, which are symmetrically arranged on the inner wall surface of the mounting hole 110. It should be understood that the end of the ejector pin 200 to be installed, which has a positioning shoulder 210, should be adapted to the mounting hole 110 and the positioning boss 120 of the counterweight 100 to be installed. Generally, when installing the counterweight 100 and the ejector pin 200, the ejector pin 200 to be installed is first inserted into the mounting hole 110, and then the ejector pin 200 or the counterweight 100 to be installed is rotated so that the upper surface of the positioning shoulder 210 of the ejector pin 200 to be installed rotates to correspond with the lower surface of the positioning boss 120. In this way, the upper surface of the positioning shoulder 210 and the lower surface of the positioning boss 120 can achieve a limiting fit, which can prevent the counterweight 100 to be installed from falling off the ejector pin 200.

[0041] The installation fixture provided in this application can be used to assist in the installation of the hammer 100 to be installed and the ejector pin 200 to be installed, so that the hammer 100 to be installed can be installed on one end of the ejector pin 200 to be installed, thereby achieving the limiting fit between the hammer 100 to be installed and the ejector pin 200 to be installed.

[0042] Please refer to Figure 4 As shown, the aforementioned hammer support plate 20 is provided with a support part 21, which can be used to support the hammer 100 to be installed.

[0043] The aforementioned fixing plate 10 is provided with a clamping part 11, which is located on the side of the fixing plate 10 near the counterweight support plate 20. In this embodiment, the clamping part 11 can pass through the support part 21 and extend into the mounting hole 110 of the counterweight 100 to be installed, which is mounted on the support part 21. Thus, when the fixing plate 10 is driven to rotate relative to the counterweight support plate 20, the fixing plate 10 can rotate around the clamping part 11. In this way, the ejector pin 200 to be installed can rotate with the fixing plate 10 under the clamping action of the clamping part 11, thereby changing the angle of the ejector pin 200 to be installed in the mounting hole 110 of the counterweight 100 to be installed, so that the positioning shoulder 210 of the ejector pin 200 to be installed and the positioning boss 120 of the counterweight 100 to be installed are correspondingly and limitedly engaged.

[0044] This application does not limit the specific structure of the clamping part 11, as long as the clamping part 11 can achieve the clamping function of the ejector pin 200 to be installed. Those skilled in the art can set the specific structure according to actual needs.

[0045] In summary, the installation fixture provided in this application includes a fixed plate 10 and a counterweight support plate 20 rotatably connected to the fixed plate 10. The counterweight support plate 20 is provided with a support portion 21 for supporting the counterweight 100 to be installed. The fixed plate 10 is provided with a clamping portion 11 on the side near the counterweight support plate 20. The clamping portion 11 can pass through the support portion 21 and extend into the mounting hole 110 of the counterweight 100 to be installed. The clamping portion 11 is used to clamp the end of the ejector pin 200 to be installed, which is inserted into the mounting hole 110. The fixed plate 10 is driven to rotate relative to the counterweight support plate 20, and the clamping portion 11 can drive the ejector pin 200 to be installed to rotate along its axis, so that the ejector pin 200 to be installed and the counterweight 100 to be installed are engaged and limited. In this way, during use, the user can first install the counterweight 100 to be installed on the support portion 21 (e.g., ...). Figure 7 and Figure 8 Then, the ejector pin 200 to be installed is inserted into the counterweight 100 to be installed. At this time, the clamping part 11 can clamp the end of the ejector pin 200 to be installed (e.g., Figure 9 and Figure 10 Then, the counterweight support plate 20 is raised upwards, so that the radial limitation between the positioning shoulder 210 and the positioning boss 120 is released. Then, the fixed plate 10 is driven to rotate relative to the counterweight support plate 20 with the clamping part 11 as the center (e.g., Figure 10 In this way, the fixing plate 10 can drive the ejector pin 200 to be installed to rotate within the mounting hole 110 of the counterweight 100 through the clamping part 11. This changes the angle of the ejector pin 200 within the counterweight 100, causing the positioning shoulder 210 to rotate below the positioning boss 120. Then, the counterweight support plate 20 is reset (as shown). Figure 11 In this way, the positioning boss 120 of the hammer to be installed 100 can be placed above the positioning shoulder 210 of the ejector pin to be installed 200, thereby achieving axial positioning of the hammer to be installed 100 and the ejector pin to be installed 200, thus preventing the hammer to be installed 100 from falling off the ejector pin to be installed 200. The installation fixture provided in this application can assist in the installation of the hammer to be installed 100 and the ejector pin to be installed 200, reduce the installation difficulty of the ejector pin to be installed 200 and the hammer to be installed 100, and thus improve the risk caused by improper installation of the ejector pin to be installed 200 and the hammer to be installed 100.

[0046] In order to facilitate the clamping part 11 to pass through the support part 21 and extend into the mounting hole 110 of the hammer 100 to be installed, the hammer support plate 20 is optionally provided with a through cavity 22 for receiving the hammer 100 to be installed, and the support part 21 is connected to the inner wall of the through cavity 22 to support the hammer 100 to be installed.

[0047] The aforementioned through cavity 22 facilitates the passage of the clamping part 11 and also accommodates and limits the installation of the hammer 100. It should be noted that the radial dimension of the through cavity 22 should be larger than the radial dimension of the hammer 100 to be installed, so as to avoid affecting the rotation of the hammer 100 along its axial direction.

[0048] The support part 21 is connected to the inner wall of the through cavity 22. In this way, the support part 21 can provide bottom support for the hammer 100 to be installed, and prevent the hammer 100 to be installed from falling out of the through cavity 22.

[0049] For example, the aforementioned support portion 21 can be as follows: Figure 4 or Figure 7 The plate-like structure shown. The support portion 21 can be a single unit, such as... Figure 4 It can also be set for two parallel options, such as... Figure 7 and Figure 8 However, it should be noted that the support part 21 should be designed to avoid interfering with the normal rotation of the clamping part 11.

[0050] Please refer to Figure 4 Optionally, the counterweight support plate 20 may also be provided with an arc-shaped groove 23, and the side of the fixing plate 10 near the counterweight support plate 20 is provided with a limiting member 12, which can extend into the arc-shaped groove 23; the center of the arc-shaped groove 23 coincides with the center of the counterweight 100 to be installed. In this way, the rotation angle of the fixing plate 10 can be limited by the cooperation of the arc-shaped groove 23 and the limiting member 12, thereby making the rotation angle of the fixing plate 10 more controllable.

[0051] The curvature of the arc groove 23 can be determined according to the required rotation angle of the fixed plate 10. Alternatively, the arc groove 23 can be configured as an annular groove, allowing the fixed plate 10 to rotate at any angle between 0° and 360° under the influence of the arc groove 23, thus adapting to various application scenarios.

[0052] Of course, in order to facilitate the rotation of the fixing plate 10 to any angle, a positioning structure can be set according to the required angle value, so that the fixing plate 10 can be positioned when rotated to any angle. For example, a serrated structure can be set in the arc groove 23, and the spacing between each serration can be the same or different, which can be determined according to the required angle value.

[0053] In order to prevent the limiting member 12 from detaching from the arc groove 23, in this embodiment, the installation fixture also includes a stop member 13; the side of the limiting member 12 away from the fixing plate 10 extends outward from the arc groove 23, and the stop member 13 is connected to the end of the limiting member 12 away from the fixing plate 10 to restrict the limiting member 12 from falling out of the arc groove 23.

[0054] It should be noted that the radial dimension of the stop 13 should be greater than the width of the arc groove 23.

[0055] Please refer to Figure 4 Optionally, the counterweight support plate 20 includes a first body 24 and a first handle 25 connected to the first body 24, with a support portion 21 disposed on the first body 24. The up-and-down movement of the counterweight support plate 20 can be achieved by driving the first handle 25 to move up and down.

[0056] For example, the first handle 25 includes a first connecting plate 251 and a second connecting plate 252; the first connecting plate 251 is connected between the first body 24 and the second connecting plate 252, and the second connecting plate 252 is provided with a first notch 2521. The first notch 2521 is provided to save materials and to facilitate gripping when the counterweight support plate 20 is manually driven to move up and down.

[0057] Please refer to Figure 6 and Figure 7 Optionally, the clamping part 11 includes two spaced-apart retaining pins 111. The gap between the two retaining pins 111 is adapted to the radial dimension of the end of the ejector pin 200 to be installed. The two retaining pins 111 are used to cooperate with each other to clamp the ejector pin 200 to be installed. In this way, when the ejector pin 200 to be installed is inserted between the two retaining pins 111, the two retaining pins 111 can clamp the ejector pin 200 to be installed.

[0058] Similarly, the fixing plate 10 includes a second body 14 and a second handle 15 connected to the second body 14, and a fixing pin 111 is located on the side of the second body 14 near the counterweight plate 20.

[0059] Optionally, the second handle 15 includes a third connecting plate 151 and a fourth connecting plate 152; the third connecting plate 151 is connected between the second body 14 and the fourth connecting plate 152, and the fourth connecting plate 152 is provided with a second notch 1521. The functions of the second handle 15 and the second notch 1521 are similar to those of the first handle 25 and the first notch 2521, as described above, and will not be repeated here.

[0060] In this embodiment, as Figure 4 and Figure 5 as well as Figure 8 and Figure 9As shown, the opening directions of the first notch 2521 and the second notch 1521 can be set to face each other.

[0061] In addition, in order to facilitate the smooth rotation of the fixing plate 10, in this embodiment, the fixing plate 10 and the counterweight support plate 20 are arranged in parallel.

[0062] The above description is merely an optional embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention can have various modifications and variations. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

[0063] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not describe the various possible combinations separately.

Claims

1. An installation tool characterized by, The installation tool comprises a fixed plate and a weight supporting plate rotatably connected to the fixed plate; the weight supporting plate is provided with a supporting part for supporting a weight to be installed; one side of the fixed plate close to the weight supporting plate is provided with a clamping part capable of extending into an installation hole of the weight to be installed through the supporting part; The clamping part is used for clamping an end of a needle to be installed arranged in the installation hole; the fixed plate is driven to rotate relative to the weight supporting plate, and the clamping part can drive the needle to be installed to rotate along its axis, so that the needle to be installed is limited together with the weight to be installed.

2. The mounting tool of claim 1, wherein The weight supporting plate is provided with a through cavity for accommodating the weight to be installed, and the supporting part is connected to the inner wall of the through cavity to support the weight to be installed.

3. The mounting tool of claim 1, wherein The weight supporting plate is further provided with an arc-shaped groove, one side of the fixed plate close to the weight supporting plate is provided with a limiting part capable of extending into the arc-shaped groove; the center of the arc-shaped groove coincides with the center of the weight to be installed.

4. The mounting tool of claim 3, wherein The installation tool further comprises a stopper; one side of the limiting part away from the fixed plate extends out of the arc-shaped groove and extends outward, and the stopper is connected to one end of the limiting part away from the fixed plate and is used for limiting the limiting part from falling out of the arc-shaped groove.

5. The mounting tool of claim 1, wherein The weight supporting plate comprises a first body and a first handle connected to the first body, and the supporting part is arranged on the first body.

6. The mounting tool of claim 5, wherein The first handle comprises a first connecting plate and a second connecting plate; the first connecting plate is connected between the first body and the second connecting plate, and the second connecting plate is provided with a first notch.

7. The mounting tool according to any one of claims 1 to 6, wherein The clamping part comprises two fixed pins arranged at intervals, and the gap between the two fixed pins is matched with the radial dimension of the end of the needle to be installed; the two fixed pins are used for clamping the needle to be installed.

8. The mounting tool of claim 7, wherein The fixed plate comprises a second body and a second handle connected to the second body, and the fixed pins are arranged on one side of the second body close to the weight supporting plate.

9. The mounting tool of claim 8, wherein, The second handle comprises a third connecting plate and a fourth connecting plate; the third connecting plate is connected between the second body and the fourth connecting plate, and the fourth connecting plate is provided with a second notch.

10. The mounting tool of claim 1, wherein The fixed plate and the weight supporting plate are arranged in parallel.

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