A device and method for adjusting the quality factor of a resonant gyroscope resonator

Abstract

A resonant gyro resonator quality factor adjustment device and method, the method places the assembled resonant gyro into the center of the accommodation space formed between the heating rod support rods; places the quality factor adjustment device loaded with the resonant gyro into a vacuum chamber as a whole; uses a gyro measurement circuit to locate the circumferential position of the resonator corresponding to the highest Q value point and the lowest Q value point of the resonant gyro resonator; thereby locally heating the resonator surface at the located lowest or highest Q value point to achieve local annealing of the metal film, so as to "raise" the lowest Q value point of the resonant gyro resonator, or "depress" the highest Q value point of the resonant gyro resonator, so as to optimize the circumferential Q value uniformity of the resonant gyro resonator. The present invention can realize the precise adjustment of the circumferential Q value of the resonant gyro resonator after assembly, realize the significant improvement of the Q value uniformity of the whole table, and ensure the accuracy of the resonant gyro.

Description

Technical Field

[0001] The invention belongs to the technical field of resonant gyroscopes, and in particular relates to a device and method for adjusting the quality factor of a resonant gyroscope resonator. Background Art

[0002] The resonant gyroscope is a new type of high-precision solid-state vibrating gyroscope. It is the only all-solid-state gyroscope that can achieve navigation-level working performance, except for laser gyroscopes and fiber optic gyroscopes. The resonant gyroscope has a simple structure, small size and light weight; its core component, the resonator, is made of ultra-low loss high-purity quartz material. The extremely high quality factor (Q value, more than 10 million) makes it require very little energy compensation during work, low power consumption, and has unique radiation resistance and power-off working characteristics. The resonant gyroscope has small internal physical loss and few failure factors, and has the unique advantages of high reliability, long life and maintenance-free throughout its life. Therefore, the resonant gyroscope has been widely used in various fields of land, sea, air and space.

[0003] The core component of a resonant gyroscope is the shell resonator inside the gyroscope. The Q value of the resonator is an important factor that limits the accuracy of the resonant gyroscope. It is a key indicator to measure the vibration performance of the resonator. It represents the ability of a vibrating element to store its own energy. For a shell vibrating gyroscope, the smaller the energy dissipation of the resonator itself, the stronger its ability to maintain the resonant amplitude, and the less external energy compensation is required. Therefore, for a high-precision resonant gyroscope, the resonator inside it usually has an extremely high quality factor. For a resonator, the Q value represents the ratio of the energy loss of one vibration cycle to the total energy of the resonator vibration. The lower the loss, the higher the Q value.

[0004] Among the various loss sources of the resonator, the support loss of the resonator and the loss caused by surface metallization are the main loss sources. Support loss, also known as anchor loss and anchor point damping, refers to the energy dissipation caused by the resonator's own energy being transmitted to the base in the form of vibration waves through the support part of the resonator when the resonator vibrates. In addition, the processing error of the resonator and the assembly error during the assembly of the resonator will cause the standing wave node of the n=2 mode of the resonator to deviate from the center of the support part, that is, the displacement of the support part is not zero when the resonator vibrates, resulting in energy dissipation. Before the assembly of the resonator, the Q value test results in non-repeatable measurement of the circumferential uniformity of the Q value before assembly due to the slight difference in the clamping method and force each time. Therefore, it is impossible to accurately adjust. After the resonator is assembled as a whole, its support fixed state no longer changes, and there is only a loss change caused by the change in environmental stress at the support, so that the circumferential Q value uniformity can be accurately adjusted. In addition, the loss caused by surface metallization refers to the electrostatic electrode formed by plating a conductive film on the surface of the resonator, and the driving and detection of the resonator are realized under the action of electrostatic force. At present, the surface of the resonator is usually metallized by coating a metal film. After the surface is coated, the internal stress non-uniformity of the metal film layer will also affect the uniformity of the circumferential Q value.

[0005] At present, there is no technical solution for adjusting the uniformity of the circumferential Q value of a resonant gyroscope. It is necessary to develop a technical solution for adjusting the quality factor of the resonant gyroscope resonator to solve the problem that the circumferential uniformity of the Q value of the resonator after assembly cannot meet the requirements in the existing resonant gyroscope assembly methods. Summary of the invention

[0006] To this end, the present invention provides a device and method for adjusting the quality factor of a resonant gyroscope resonator, which can accurately adjust the circumferential Q value uniformity of the resonant gyroscope resonator to ensure that the resonant gyroscope meets high-precision requirements.

[0007] In order to achieve the above-mentioned object, the present invention provides the following technical solutions: a resonant gyro resonator quality factor adjustment device, comprising a support base, a heating rod support rod, a high-frequency induction heating sheet, a heating rod body and a high-frequency induction heating coil;

[0008] A plurality of the heating rod support rods are fixed above the support base, the plurality of the heating rod support rods are arranged in a ring shape, and a receiving space for placing a resonant gyroscope is formed between the plurality of the heating rod support rods;

[0009] The upper part of the heating rod support rod is formed with an insertion hole, the high-frequency induction heating sheet is arranged inside the insertion hole, and the end of the heating rod body is inserted into and clamped inside the insertion hole by gravity;

[0010] The high-frequency induction heating coil surrounds the periphery of the heating rod body, and is used to generate a high-frequency electromagnetic field. The heating rod body concentrates the high-frequency electromagnetic field energy generated by the high-frequency induction heating coil on the high-frequency induction heating plate to locally heat the high-frequency induction heating plate.

[0011] As a preferred solution of the resonant gyro resonator quality factor adjustment device, a support flange is formed at the upper end of the support base, and a support rod avoidance groove is formed at the position of the support flange corresponding to the heating rod support rod; the lower end of the heating rod support rod is located inside the support rod avoidance groove;

[0012] A plurality of the heating rod support rods are tilted and gathered toward the center position of the support flange.

[0013] As a preferred solution of the quality factor adjustment device for the resonant gyroscope resonator, the support base material includes but is not limited to one of aluminum, copper, stainless steel, Kovar alloy, and ceramic, preferably a metal material.

[0014] As a preferred solution of the quality factor adjustment device for the resonant gyroscope resonator, the material of the heating rod support rod includes but is not limited to one of aluminum, copper, quartz, and ceramic materials, preferably a non-metallic material.

[0015] As a preferred solution for the quality factor adjustment device of the resonant gyroscope resonator, the material of the heating rod body includes but is not limited to one of titanium alloy materials, graphite, copper, stainless steel, and Kovar alloy materials, preferably a material with high magnetic permeability.

[0016] As a preferred solution of the quality factor adjustment device for the resonant gyroscope resonator, the material of the high-frequency induction heating plate is one of, but not limited to, copper, stainless steel, and Kovar alloy, preferably a material with strong ferromagnetism;

[0017] The high-frequency induction heating coil is made of copper.

[0018] The present invention also provides a method for adjusting the quality factor of a resonant gyroscope resonator, which adopts the above-mentioned device for adjusting the quality factor of a resonant gyroscope resonator, and comprises:

[0019] Place the assembled resonant gyroscope into the center of the accommodation space formed between the heating rod support rods;

[0020] The quality factor adjustment device installed in the resonant gyroscope is placed in a vacuum chamber as a whole; the circumferential position of the resonator corresponding to the highest point of the Q value and the lowest point of the Q value of the resonator of the resonant gyroscope is located by using a gyroscope measurement circuit;

[0021] By using the quality factor adjustment device, the surface of the resonator is locally heated at the lowest or highest point of the located Q value to achieve local annealing of the metal film, so as to "raise" the lowest point of the Q value of the resonant gyroscope resonator, or "lower" the highest point of the Q value of the resonant gyroscope resonator, so as to optimize the circumferential Q value uniformity of the resonant gyroscope resonator.

[0022] As a preferred solution for the quality factor adjustment method of the resonant gyroscope resonator, the method of locally heating the surface of the resonator is: when the quality factor adjustment device is working, the high-frequency induction heating coil is fixed by an external fixing frame, and the corresponding heating rod body is inserted into it. Under the high-frequency current, the heating rod body gathers the electromagnetic induction effect to heat the high-frequency induction heating plate.

[0023] As a preferred solution for the quality factor adjustment method of the resonant gyroscope resonator, the surface of the resonator is locally heated to a temperature above 700°C, and the metal film layer on the surface of the resonator is locally heat treated by thermal radiation from a high-frequency induction heating plate.

[0024] As a preferred scheme for the quality factor adjustment method of the resonant gyroscope resonator, after the Q value of the resonant gyroscope resonator is adjusted once, the circumferential Q value change curve of the resonant gyroscope resonator is measured again after the temperature drops to room temperature and stabilizes, and the resonant gyroscope resonator is adjusted again according to the results of the circumferential Q value change curve until the target uniformity accuracy is reached, and then the adjustment is stopped.

[0025] The invention has the following advantages: a support base, a heating rod support rod, a high-frequency induction heating sheet, a heating rod body and a high-frequency induction heating coil are provided; a plurality of the heating rod support rods are fixed above the support base, the plurality of the heating rod support rods are arranged in a ring shape, and a receiving space for placing a resonant gyroscope is formed between the plurality of the heating rod support rods; a plug hole is formed on the upper part of the heating rod support rod, the high-frequency induction heating sheet is arranged inside the plug hole, and the end of the heating rod body is inserted and clamped inside the plug hole by gravity; the high-frequency induction heating coil surrounds the periphery of the heating rod body, the high-frequency induction heating coil is used to generate a high-frequency electromagnetic field, and the heating rod body concentrates the high-frequency electromagnetic field energy generated by the high-frequency induction heating coil on the high-frequency induction heating sheet to locally heat the high-frequency induction heating sheet, thereby locally heating the surface of the resonator at the lowest or highest point of the positioned Q value, realizing local annealing of the metal film, so as to "raise" the lowest point of the Q value of the resonator of the resonator of the resonator of the resonator of the resonator of the resonator of the resonator of the resonator, or "press down" the highest point of the Q value of the resonator of the resonator of the resonator of the resonator, so as to optimize the circumferential Q value uniformity of the resonator of the resonator of the resonator of the resonator of the resonator of the resonator. The present invention can realize accurate adjustment of the circumferential Q value of the assembled resonant gyroscope resonator, realize a significant improvement in the uniformity of the Q value of the entire table, and ensure the accuracy of the resonant gyroscope. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the implementation methods of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for the implementation methods or the description of the prior art. Obviously, the drawings in the following description are only exemplary, and for ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0027] Figure 1 The circumferential Q value curves of the three-axis gyroscopes measured one by one are used to prove that the circumferential Q value of the resonator presents a trigonometric function distribution.

[0028] Figure 2 It is a schematic structural diagram of a quality factor adjustment device for a resonant gyroscope resonator provided in an embodiment of the present invention;

[0029] Figure 3 It is a partial schematic diagram of a high-frequency heating plate of a resonant gyroscope resonator quality factor adjustment device provided in an embodiment of the present invention;

[0030] Figure 4 The measured variation curve of the circumferential Q value of the resonator provided in the embodiment of the present invention;

[0031] Figure 5 A schematic diagram of the drift of the circumferential Q value curve of the resonator provided in an embodiment of the present invention when the environmental conditions change;

[0032] Figure 6 A schematic diagram of a resonator damping axis provided in an embodiment of the present invention;

[0033] Figure 7 A flow chart of a method for adjusting the quality factor of a resonant gyroscope resonator provided in an embodiment of the present invention;

[0034] Figure 8 A schematic diagram of placing a resonant gyroscope into a resonant gyroscope in which a quality factor adjustment device for a resonant gyroscope provided in an embodiment of the present invention is placed;

[0035] Fig. 9 The graph is a measured curve of the Q value of the resonant gyroscope resonator provided in the embodiment of the present invention before and after the local heat treatment.

[0036] In the figure: 101, support base; 102, heating rod support rod; 103, heating rod body; 104, high-frequency induction heating plate; 105, high-frequency induction heating coil; 106, accommodating space; 107, jack; 108, support flange; 109, support rod avoidance groove. DETAILED DESCRIPTION

[0037] The following is a description of the implementation of the present invention by specific embodiments. People familiar with the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0038] Usually, due to the structural advantages, the Q value of hemispherical resonators is better than that of other structural resonators. The Q value of hemispherical resonators processed by fused silica materials has exceeded 20 million. On the other hand, the applicant has successfully processed cylindrical shell resonators with a Q value of more than 20 million, which is the highest value reported internationally (reference: Zeng L, Pan Y, Luo Y, et al. Fused silica cylindrical shell resonators with 25 million Q factors [J]. Journal of Physics D: Applied Physics., fused silica cylindrical shell resonators with a Q value of 25 million), which is equivalent to the Q value of hemispherical resonators.

[0039] According to the different structures of the resonator, typical resonant gyroscopes include hemispherical resonant gyroscopes and cylindrical resonant gyroscopes. The inner surface of the resonant gyroscope is plated with a metal film, which together with the four pairs of electrodes on the electrode disk, a total of eight electrodes, constitute the gyroscope's eight drive and detection control electrodes. The resonant gyroscope mainly works in force balance mode and full-angle mode, and the distinction lies mainly in the detection and control logic of the circuit. When the gyroscope rotates, the Coriolis force will excite the detection mode of the resonator (another four-antinode vibration in the direction of 45° to the driving mode). The electrical signal generated by the detection mode vibration can be obtained by the detection electrode. In the open-loop mode, the intensity of this signal is proportional to the angular velocity of the gyroscope, from which the angular velocity of the carrier is obtained.

[0040] In the force balance mode, the amplitude of the gyroscope's detection mode is suppressed to zero by the electrostatic force applied by the electrode, and the magnitude of the electrostatic force is proportional to the external angular velocity. For a gyroscope controlled in the force balance mode, an AC voltage consistent with the resonant frequency of the resonator n=2 mode is applied through the thin film electrode. Under the action of the electrostatic force, the resonator is excited to vibrate in a four-amplitude mode, namely the driving mode. When the resonator has an axial input angular velocity Ω, under the action of the Coriolis force, the resonator will generate a sensitive mode in the 45° direction. This mode is detected by the thin film electrode, and after being processed by the circuit and algorithm, the obtained signal is applied to the resonator through the thin film electrode as a compensation signal to suppress the vibration of the detection mode; since the voltage amplitude required to suppress the vibration is proportional to the angular velocity, the angular velocity can be obtained by outputting this signal. Therefore, it is essentially a rate gyroscope.

[0041] The advantage of the resonant gyroscope working in full-angle mode is that it can achieve a large dynamic range measurement of the input angular velocity while ensuring high accuracy, which is of great significance for expanding the application range of the resonant gyroscope. When working in full-angle mode, under the action of electrostatic force, the resonator is excited to produce an initial four-amplitude vibration mode. When there is an axial input angular velocity of the resonator, the vibration standing wave on the resonator precesses due to the Coriolis force. The relationship between the precession angle θ0 of the standing wave and the actual input angle of the gyroscope is θ=Kθ0, where K is the precession factor of the standing wave of the hemispherical resonator. The vibration signal is obtained by detecting mutually orthogonal electrode pairs (with an angle of 45°), and the real-time input angle of the gyroscope is obtained by combining the orthogonal components. Therefore, it is essentially a rate-integrating gyroscope. At the same time, by solving the vibration signal in the orthogonal direction, the real-time excitation frequency and excitation voltage required for parameter excitation can be obtained. The resonant gyroscope working in full-angle mode has extremely high requirements for the circumferential uniformity of the Q value. The premise for achieving a resonant gyroscope with a navigation accuracy better than 0.01° / h is that the gyroscope has excellent overall performance, including smaller frequency splitting (mHz level) and excellent circumferential Q value uniformity (better than 10%).

[0042] Among the various loss sources of the resonator, the support loss of the resonator and the loss caused by surface metallization are the main loss sources. Support loss, also known as anchor loss and anchor point damping, refers to the energy dissipation caused by the resonator's own energy being transmitted to the base in the form of vibration waves through the support part of the resonator when the resonator vibrates. In addition, the processing error of the resonator and the assembly error during the assembly of the resonator will cause the standing wave node of the n=2 mode of the resonator to deviate from the center of the support part, that is, the displacement of the support part is not zero when the resonator vibrates, resulting in energy dissipation. Before the assembly of the resonator, the Q value test results in non-repeatable measurement of the circumferential uniformity of the Q value before assembly due to slight differences in the clamping method and force each time. Therefore, it is impossible to accurately adjust. After the resonator is assembled as a whole, its support fixing state no longer changes, and there is only a loss change caused by the change in environmental stress at the support, so that it can be accurately adjusted for circumferential Q value uniformity.

[0043] The loss caused by surface metallization refers to the electrostatic electrode formed by coating the surface of the resonator with a conductive film, which realizes the driving and detection of the resonator under the action of electrostatic force. At present, the surface of the resonator is usually metallized by coating a metal film. After the surface is coated, the internal stress non-uniformity of the metal film layer will also affect the uniformity of the circumferential Q value.

[0044] At present, existing reports on the research of the Q value of the resonator at home and abroad focus on the analysis and overall optimization of the loss of the resonator itself, and there are no literature reports on the adjustment of the uniformity of the Q value. The applicant of the present invention has developed a resonator with the highest Q value reported internationally, and first proposed the idea of ​​adjusting the uniformity of the circumferential Q value of the resonator by improving local stress in the field, and designed an experimental device, which provides a new idea and technical path for the adjustment of the uniformity of the circumferential Q value under extremely high Q values.

[0045] On the other hand, the applicant has conducted a large number of test experiments in the early stage for the circumferential Q value adjustment method disclosed in the present invention. Figure 1 The figure shows the circumferential Q value curves obtained by measuring the 3-axis gyroscope one by one. All samples show that the circumferential Q value of the resonator presents an approximate trigonometric function distribution. The Q value can be adjusted by heat treating the angular position of the resonator corresponding to the peak point of the trigonometric function, which provides theoretical feasibility for fixed-point adjustment.

[0046] In view of this, an embodiment of the present invention provides a device and method for adjusting the quality factor of a resonant gyroscope resonator, which can accurately adjust the uniformity of the circumferential Q value of the resonant gyroscope resonator to ensure that the resonant gyroscope meets high-precision requirements. The following is the specific content of the embodiment of the present invention.

[0047] See also Figure 2 and Figure 3The embodiment of the present invention provides a resonant gyro resonator quality factor adjustment device, comprising a support base 101, a heating rod support rod 102, a high-frequency induction heating sheet 104, a heating rod body 103 and a high-frequency induction heating coil 105;

[0048] A plurality of the heating rod support rods 102 are fixed on the support base 101, and the plurality of the heating rod support rods 102 are arranged in a ring shape, and a receiving space 106 for placing a resonant gyroscope is formed between the plurality of the heating rod support rods 102;

[0049] The upper part of the heating rod support rod 102 is formed with a plug hole 107, the high-frequency induction heating sheet 104 is arranged inside the plug hole 107, and the end of the heating rod body 103 is inserted and clamped inside the plug hole 107 by gravity;

[0050] The high-frequency induction heating coil 105 surrounds the periphery of the heating rod body 103 , and the high-frequency induction heating coil 105 is used to generate a high-frequency electromagnetic field. The heating rod body 103 concentrates the high-frequency electromagnetic field energy generated by the high-frequency induction heating coil 105 on the high-frequency induction heating plate 104 to locally heat the high-frequency induction heating plate 104 .

[0051] In this embodiment, a support flange 108 is formed at the upper end of the support base 101, and a support rod avoidance groove 109 is formed at the position of the support flange 108 corresponding to the position of the heating rod support rod 102; the lower end of the heating rod support rod 102 is located inside the support rod avoidance groove 109; and a number of the heating rod support rods 102 are tilted and gathered toward the center position of the support flange 108.

[0052] In this embodiment, the support base 101 is made of a material including but not limited to aluminum, copper, stainless steel, kovar alloy, and ceramic, preferably metal material, which can lower the center of gravity of the device and is easy to process.

[0053] In this embodiment, the material of the heating rod support rod 102 includes but is not limited to one of aluminum, copper, quartz, and ceramic materials, with metal material being preferred; thereby, it is not sensed by high-frequency electromagnetic fields.

[0054] In this embodiment, the material of the heating rod body 103 includes but is not limited to one of titanium alloy materials, graphite, copper, stainless steel, and Kovar alloy materials, preferably a material with high magnetic permeability; high magnetic permeability has a strong effect on electromagnetic field convergence, and can transfer more magnetic field energy to the high-frequency induction heating plate 104.

[0055] In this embodiment, the material of the high-frequency induction heating plate 104 includes but is not limited to one of copper, stainless steel, and Kovar alloy, and the material with strong ferromagnetism is preferred, as strong ferromagnetism has high high-frequency heating efficiency; the high-frequency induction heating coil 105 is made of copper material.

[0056] The problem to be solved by the device in this embodiment is that after the ultra-high Q value resonator has been developed, the circumferential uniformity of the Q value has become a difficulty that restricts the further improvement of the gyroscope accuracy. The circumferential uniformity of the Q value refers to measuring the Q value of the resonator in different directions at a certain angle step (for example, measuring once every 10°) in the circumferential direction (360°), and calculating the circumferential uniformity of the Q value based on the measurement results, and the calculation method is: [(maximum Q value-minimum Q value) / (maximum Q value+minimum Q value)]*2.

[0057] See also Figure 4 , which is the experimental test completed by the applicant. The test results show that the circumferential Q value of the resonator shows a sinusoidal change, and the circumferential Q value uniformity converted from the maximum and minimum value difference is 32.84%. It should be noted that Figure 4 There are only 0°-90° measurement data in the figure. This is because the angle between the high and low damping axes of the resonator (the smaller the damping, the higher the Q value) is 45°. Figure 6 As shown, in the 360° direction of the resonator, 4 maximum Q values ​​and 4 minimum Q values ​​will be repeatedly measured at intervals of 45°. Therefore, during measurement, the maximum and minimum values ​​can be measured within a 90° range, thereby measuring the circumferential Q value uniformity without measuring within a 360° range.

[0058] on the other hand, Figure 4 The Q value measurement curve will drift with temperature, that is, the measured Q value will not correspond to the original measurement angle (the measured value remains unchanged) as the external environmental conditions change. This is because environmental factors such as temperature and vibration change the stress distribution of the gyroscope, thereby changing its loss characteristics, causing the Q value curve to drift. The curve diagram after drift is shown in the figure below. Figure 5 Shown (not measured, only translated) Figure 4 Therefore, in order to achieve the purpose of accurately adjusting the Q value based on the measured change curve of the circumferential Q value of the resonator, it is necessary to ensure good environmental stability when the adjustment device is in operation.

[0059] In addition, surface coating has a dramatic effect on the thermoelastic loss of the resonator. On the one hand, this is because the mechanical quality factor of the metal material is lower than that of quartz. On the other hand, the internal stress of the metal film after coating is uneven, which is one of the sources of uneven circumferential Q value.

[0060] See also Figure 7The embodiment of the present invention further provides a method for adjusting the quality factor of a resonant gyroscope resonator, which adopts a resonant gyroscope resonator quality factor adjustment device of the above embodiment, comprising:

[0061] S1, placing the assembled resonant gyroscope into the center of the accommodation space 106 formed between the heating rod support rods 102;

[0062] S2, placing the quality factor adjustment device loaded into the resonant gyroscope into a vacuum chamber as a whole; using a gyroscope measurement circuit to locate the circumferential position of the resonator corresponding to the highest Q value point and the lowest Q value point of the resonator of the resonant gyroscope;

[0063] S3. Use the quality factor adjustment device to locally heat the surface of the resonator at the lowest or highest point of the located Q value to achieve local annealing of the metal film, so as to "raise" the lowest point of the Q value of the resonant gyroscope resonator, or "lower" the highest point of the Q value of the resonant gyroscope resonator, so as to optimize the circumferential Q value uniformity of the resonant gyroscope resonator.

[0064] In this embodiment, the assembled resonant gyroscope is first placed in the center of the quality factor adjustment device. Figure 8 As shown in the figure, the assembled hemispherical resonant gyroscope is placed in the figure, and a cylindrical resonant gyroscope can also be placed as needed. After the assembly is assembled, the quality factor adjustment device is placed in a vacuum chamber as a whole to avoid oxidation during the heating process. Using the gyroscope measurement circuit, the positioning Figure 4 The circumferential position of the resonator corresponding to the highest point of the Q value and the lowest point of the Q value is determined, and the quality factor adjustment device is used to locally heat the surface of the resonator at the located lowest or highest point of the Q value to achieve local annealing of the metal film. The lowest point of the Q value can be "raised" or the highest point of the Q value can be "lowered", thereby optimizing the circumferential Q value uniformity and achieving Q value adjustment.

[0065] In this embodiment, the local heating method for the surface of the resonator is as follows: when the quality factor adjustment device is working, the high-frequency induction heating coil 105 is fixed by an external fixing frame, and the corresponding heating rod body 103 is inserted, so that the heating rod body 103 gathers the electromagnetic induction effect under the high-frequency current, and the high-frequency induction heating plate 104 is heated, and the surface of the resonator is locally heated at a temperature above 700°C. Through the thermal radiation of the high-frequency induction heating plate 104, the metal film layer on the surface of the resonator is locally heat treated; after the Q value of the resonant gyro resonator is adjusted once, after the temperature drops to room temperature and stabilizes, the circumferential Q value change curve of the resonant gyro resonator is measured again, and the circumferential Q value change curve is adjusted again according to the result of the circumferential Q value change curve, until the target uniformity accuracy is reached, and then the adjustment is stopped.

[0066] Specifically, the local heating method is implemented as follows: when the quality factor adjustment device is working, after the high-frequency induction heating coil 105 is fixed by an external fixing frame, the corresponding heating rod body 103 is inserted as needed, and the high-frequency induction heating sheet 104 can be heated by electromagnetic induction under high-frequency current, through the electromagnetic induction effect concentrated by the heating rod body 103. The temperature of the high-frequency induction heating sheet 104 after heating can reach above 700°C. On this basis, the metal film layer on the surface of the resonator is locally heat treated by thermal radiation to improve the local stress of the film layer, thereby affecting the overall Q value distribution of the resonator and achieving Q value adjustment.

[0067] Among them, after one adjustment, when the temperature returns to room temperature and stabilizes, the circumferential Q value change curve of the resonator is measured again, and the adjustment is performed again according to the result until the target uniformity accuracy is reached, and then the adjustment is stopped. During iterative adjustment, each time the circumferential Q value of the resonator is measured, the consistency of environmental conditions should be ensured to avoid drift of the circumferential Q value curve.

[0068] See also Fig. 9 The feasibility of the quality factor adjustment device was verified through experiments. Before and after the adjustment, the circumferential Q value uniformity of the gyroscope was reduced from 5.95% to 3.13%, verifying the feasibility of the quality factor adjustment method of the resonant gyroscope resonator.

[0069] In summary, the present invention is provided with a support base 101, a heating rod support rod 102, a high-frequency induction heating sheet 104, a heating rod body 103 and a high-frequency induction heating coil 105; a plurality of the heating rod support rods 102 are fixed above the support base 101, and a plurality of the heating rod support rods 102 are arranged in a ring shape, and a receiving space 106 for placing a resonant gyroscope is formed between the plurality of the heating rod support rods 102; a plug hole 107 is formed on the upper portion of the heating rod support rod 102, the high-frequency induction heating sheet 104 is arranged inside the plug hole 107, and the end of the heating rod body 103 is inserted into and clamped inside the plug hole 107 by gravity; the high-frequency induction heating coil 105 surrounds the periphery of the heating rod body 103, and the high-frequency induction heating coil 105 is used to generate a high-frequency electromagnetic field, and the heating rod body 103 concentrates the high-frequency electromagnetic field energy generated by the high-frequency induction heating coil 105 on the high-frequency induction heating sheet 104 to locally heat the high-frequency induction heating sheet 104. The assembled resonant gyroscope is placed in the center of the accommodation space 106 formed between the heating rod support rods 102; the quality factor adjustment device loaded in the resonant gyroscope is placed in the vacuum chamber as a whole; the gyroscope measurement circuit is used to locate the circumferential position of the resonator corresponding to the highest Q value point and the lowest Q value point of the resonator of the resonant gyroscope; the surface of the resonator is locally heated at the located lowest or highest Q value point to achieve local annealing of the metal film, so as to "raise" the lowest Q value point of the resonant gyroscope resonator, or "depress" the highest Q value point of the resonant gyroscope resonator, so as to optimize the circumferential Q value uniformity of the resonant gyroscope resonator. The present invention can realize the precise adjustment of the circumferential Q value of the resonant gyroscope resonator after assembly, realize the significant improvement of the Q value uniformity of the whole table, and ensure the accuracy of the resonant gyroscope.

[0070] Although the present invention has been described in detail above by general description and specific embodiments, it is obvious to those skilled in the art that some modifications or improvements can be made to the present invention. Therefore, these modifications or improvements made without departing from the spirit of the present invention all belong to the scope of protection claimed by the present invention.

Claims

1. A device for adjusting the quality factor of a resonant gyroscope resonator, characterized in that: It comprises a support base (101), a heating rod support rod (102), a high-frequency induction heating sheet (104), a heating rod body (103) and a high-frequency induction heating coil (105); A plurality of the heating rod support rods (102) are fixed above the support base (101), the plurality of the heating rod support rods (102) are arranged in a ring shape, and a receiving space (106) for placing a resonant gyroscope is formed between the plurality of the heating rod support rods (102); The upper part of the heating rod support rod (102) is formed with an insertion hole (107), the high-frequency induction heating sheet (104) is arranged inside the insertion hole (107), and the end of the heating rod body (103) is inserted into and clamped inside the insertion hole (107) by gravity; The high-frequency induction heating coil (105) surrounds the periphery of the heating rod body (103), and the high-frequency induction heating coil (105) is used to generate a high-frequency electromagnetic field. The heating rod body (103) concentrates the high-frequency electromagnetic field energy generated by the high-frequency induction heating coil (105) on the high-frequency induction heating plate (104) to locally heat the high-frequency induction heating plate (104).

2. The device for adjusting the quality factor of a resonant gyroscope resonator according to claim 1, characterized in that: A support flange (108) is formed at the upper end of the support base (101), and a support rod avoidance groove (109) is formed at a position of the support flange (108) corresponding to the heating rod support rod (102); the lower end of the heating rod support rod (102) is located inside the support rod avoidance groove (109); The plurality of heating rod support rods (102) are tilted and gathered toward the center of the support flange (108).

3. The device for adjusting the quality factor of a resonant gyroscope resonator according to claim 1, characterized in that: The support base (101) is made of one of aluminum, copper, stainless steel, Kovar alloy and ceramic.

4. The device for adjusting the quality factor of a resonant gyroscope resonator according to claim 1, characterized in that: The heating rod support rod (102) is made of one of aluminum, copper, quartz and ceramic materials.

5. The device for adjusting the quality factor of a resonant gyroscope resonator according to claim 1, characterized in that: The material of the heating rod body (103) is one of titanium alloy, graphite, copper, stainless steel and Kovar alloy.

6. The device for adjusting the quality factor of a resonant gyroscope resonator according to claim 1, characterized in that: The material of the high-frequency induction heating plate (104) is one of copper, stainless steel and Kovar alloy; The high-frequency induction heating coil (105) is made of copper.

7. A method for adjusting the quality factor of a resonant gyroscope resonator, using a device for adjusting the quality factor of a resonant gyroscope resonator according to any one of claims 1 to 6, characterized in that: include: Place the assembled resonant gyroscope into the center of the accommodation space (106) formed between the heating rod support rods (102); The quality factor adjustment device installed in the resonant gyroscope is placed in a vacuum chamber as a whole; the circumferential position of the resonator corresponding to the highest point of the Q value and the lowest point of the Q value of the resonator of the resonant gyroscope is located by using a gyroscope measurement circuit; By using the quality factor adjustment device, the surface of the resonator is locally heated at the lowest or highest point of the located Q value to achieve local annealing of the metal film, so as to "raise" the lowest point of the Q value of the resonant gyroscope resonator, or "lower" the highest point of the Q value of the resonant gyroscope resonator, so as to optimize the circumferential Q value uniformity of the resonant gyroscope resonator.

8. A method for adjusting the quality factor of a resonant gyroscope resonator according to claim 7, characterized in that: The method for locally heating the surface of the resonator is as follows: when the quality factor adjustment device is working, a high-frequency induction heating coil (105) is fixed by an external fixing frame, and inserted into a corresponding heating rod body (103), and the heating rod body (103) is made to gather electromagnetic induction effect under high-frequency current to heat the high-frequency induction heating sheet (104).

9. A method for adjusting the quality factor of a resonant gyroscope resonator according to claim 8, characterized in that: The surface of the resonator is locally heated to a temperature above 700°C, and the metal film layer on the surface of the resonator is locally heat treated by heat radiation from a high-frequency induction heating sheet (104).

10. A method for adjusting the quality factor of a resonant gyroscope resonator according to claim 7, characterized in that: After the Q value of the resonant gyroscope resonator is adjusted once, the circumferential Q value change curve of the resonant gyroscope resonator is measured again after the temperature drops to room temperature and stabilizes. Adjustment is performed again according to the result of the circumferential Q value change curve until the target uniformity accuracy is reached and the adjustment is stopped.

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