Coated cutting tool and cutting tool

Abstract

The coated cutting tool of the present application has a substrate and at least one coating layer on the substrate. The coating layer contains cubic crystal which contains at least one element selected from among elements of Groups 4a, 5a, 6a of the periodic table, Al and Si; and at least one element selected from among C and N. The coating layer has a maximum value (I 1max ) of X-ray intensity in a measurement range of 0° or more and 90° or less in the X-ray intensity distribution of the alpha axis of the positive pole diagram with respect to the (111) plane of the cubic crystal, and an angle region (θ 1F ) in which the X-ray intensity is 85% or more of I 1max occupies 90% or more in a region of 30° or more and 90° or less.

Description

Technical Field

[0001] This invention relates to coated cutting tools and cutting tools. Background Technology

[0002] As cutting tools used in cutting processes such as turning and hobbing, coated tools are known to have coatings applied to the surface of substrates such as cemented carbide, cermet, and ceramic, thereby improving their wear resistance and other properties.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: International Publication No. 2019 / 146710

[0006] Patent Document 2: International Publication No. 2011 / 016488

[0007] Patent Document 3: International Publication No. 2010 / 007958 Summary of the Invention

[0008] One aspect of the coated cutting tool of the present invention comprises a substrate and at least one coating layer disposed on the substrate. The coating contains cubic crystals comprising at least one element selected from elements of groups 4a, 5a, and 6a of the periodic table, Al, and Si; and at least one element selected from C and N. The coating has a maximum X-ray intensity (I0) in the measurement range where the angle of the α-axis of the positive pole figure of the cubic crystal about the (111) plane is 0° or more and 90° or less. 1max Furthermore, the X-ray intensity is I. 1max More than 85% of the angular region (θ) 1F ), accounting for more than 90% of the area between 30° and 90°. Attached Figure Description

[0009] Figure 1 This is a perspective view showing an example of a coated cutting tool according to an embodiment.

[0010] Figure 2 This is a side sectional view showing an example of a coated cutting tool according to an embodiment.

[0011] Figure 3 This is a cross-sectional view showing an example of the coating in an embodiment.

[0012] Figure 4 yes Figure 3 An enlarged schematic diagram of section H is shown.

[0013] Figure 5It is a graph showing the X-ray intensity distribution of the positive pole figure of the cubic crystals contained in the coating of the embodiment about the (111) plane.

[0014] Figure 6 It is a graph showing the X-ray intensity distribution of the positive pole figure about the (200) plane of the cubic crystal crystal contained in the coating of the embodiment.

[0015] Figure 7 This is a front view showing an example of a cutting tool used in an embodiment.

[0016] Figure 8 This is a table summarizing the X-ray intensity distribution of the positive polarimetric diagram of the (111) plane for samples No.1 to No.8, which summarizes the various values ​​of the cubic crystal crystals contained in the coating.

[0017] Figure 9 This is a table summarizing the X-ray intensity distribution of the cubic crystals contained in the coating about the (200) plane of the positive polarimetric diagram for samples No.1 to No.6.

[0018] Figure 10 This is a table summarizing the results of cutting tests conducted on samples No.1 to No.8. Detailed Implementation

[0019] Hereinafter, with reference to the accompanying drawings, a detailed description will be provided of the methods (hereinafter referred to as "embodiments") for implementing the coated cutting tools and cutting tools of the present invention. However, the coated cutting tools and cutting tools of the present invention are not limited to this embodiment. Furthermore, the various embodiments can be suitably combined without departing from the scope of the processing. In addition, in the following embodiments, the same reference numerals are used for the same parts, and repeated descriptions are omitted.

[0020] Furthermore, in the embodiments shown below, expressions such as "certain," "orthogonal," "perpendicular," or "parallel" may be used, but these expressions do not need to be "certain," "orthogonal," "perpendicular," or "parallel" in the strict sense. That is, the above expressions, for example, allow for deviations in manufacturing precision, setting precision, etc.

[0021] There is room for further improvement in the aforementioned prior art regarding the enhancement of impact resistance.

[0022] Coated Cutting Tools

[0023] Figure 1 This is a perspective view illustrating an example of a coated cutting tool according to an embodiment. Additionally, Figure 2 This is a side sectional view showing an example of the coated cutting tool 1 according to the embodiment. For example... Figure 1 As shown, the coated cutting tool 1 of the embodiment has a blade body 2.

[0024] (Blade Body 2)

[0025] Blade body 2, for example, has an upper surface and a lower surface (with) Figure 1 The shape of the surfaces intersecting the Z-axis shown is a parallelogram-shaped hexahedron.

[0026] One corner of the blade body 2 functions as a cutting edge. The cutting edge has a first surface (e.g., an upper surface) and a second surface (e.g., a side surface) connected to the first surface. In this embodiment, the first surface functions as a "front face" to scrape away chips generated by cutting, and the second surface functions as a "back face." The cutting edge is located on at least a portion of the edge where the first and second surfaces intersect, and the coated tool 1 cuts the workpiece by bringing this cutting edge into contact with the workpiece.

[0027] A through hole 5 is provided in the center of the blade body 2, extending vertically through the blade body 2. A bolt 75 for mounting the coated tool 1 on the tool holder 70 (described later) is inserted into the through hole 5. Figure 7 ).

[0028] like Figure 2 As shown, the blade body 2 has a substrate 10 and a coating 20.

[0029] (Matrix 10)

[0030] The matrix 10 is formed, for example, of a cemented carbide. The cemented carbide contains W (tungsten), specifically WC (tungsten carbide). Alternatively, the cemented carbide may also contain Ni (nickel) and Co (cobalt). For example, the matrix 10 is formed of a WC-based cemented carbide with WC particles as the hard phase component and Co as the main component of the binder phase.

[0031] Alternatively, the matrix 10 can also be formed of cermet. Cermet, for example, contains Ti (titanium), specifically TiC (titanium carbide) or TiN (titanium nitride). Additionally, cermet can also contain Ni and Co.

[0032] Alternatively, the matrix 10 may also be formed from a cubic boron nitride sintered body containing cubic boron nitride (cBN) particles. The matrix 10 is not limited to cubic boron nitride (cBN) particles, but may also contain hexagonal boron nitride (hBN), rhombohedral boron nitride (rBN), wurtzite boron nitride (wBN), and other particles.

[0033] (Coating 20)

[0034] Coating 20, for example, is applied to the substrate 10 to improve its wear resistance, heat resistance, etc. Figure 2In this example, coating 20 completely covers the substrate 10. Coating 20 may be located at least on the substrate 10. When coating 20 is located on the first surface (here, the upper surface) of the substrate 10, the first surface has high wear resistance and heat resistance. When coating 20 is located on the second surface (here, the side surface) of the substrate 10, the second surface has high wear resistance and heat resistance.

[0035] Here, refer to Figure 3 The specific structure of coating 20 will be explained. Figure 3 This is a cross-sectional view showing an example of the coating 20 in the embodiment.

[0036] like Figure 3 As shown, coating 20 exhibits superior wear resistance compared to the intermediate layer 22 described later. Coating 20 has one or more metal nitride layers. Alternatively, coating 20 may have a first coating 23 composed of multiple stacked metal nitride layers, and a second coating 24 located on top of the first coating 23.

[0037] The coating 20 contains cubic crystals, which comprise at least one element selected from Groups 4a, 5a, and 6a of the periodic table, Al, and Si; and at least one element selected from C and N. Furthermore, the Group 4a elements are Ti, Zr, Hf, and Rf; the Group 5a elements are V, Nb, Ta, and Db; and the Group 6a elements are Cr, Mo, W, and Sg. The structure of the coating 20 will be described later.

[0038] (Middle layer 22)

[0039] An intermediate layer 22 may also be provided between the substrate 10 and the coating 20. Specifically, the intermediate layer 22 is in contact with the upper surface of the substrate 10 on one side (the lower surface in this case) and with the lower surface of the coating 20 (the first coating 23) on the other side (the upper surface in this case).

[0040] The intermediate layer 22 has a higher bonding strength with the substrate 10 than with the coating 20. Examples of metallic elements possessing this property include Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si, Y, and Ti. The intermediate layer 22 contains at least one of the aforementioned metallic elements. For example, the intermediate layer 22 may contain Ti. Furthermore, while Si is a half-metal element, in this specification, half-metal elements are also included among metallic elements.

[0041] When the intermediate layer 22 contains Ti, the Ti content of the intermediate layer 22 can be 1.5 atomic% or more. For example, the Ti content of the intermediate layer 22 can be 2.0 atomic% or more.

[0042] The intermediate layer 22 may also contain components other than the aforementioned metallic elements (Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si, Y, Ti). However, from the viewpoint of bonding with the substrate 10, the intermediate layer 22 contains at least 95 atomic% of the aforementioned metallic elements in total. More preferably, the intermediate layer 22 may contain at least 98 atomic% of the aforementioned metallic elements in total. Furthermore, the proportion of metallic components in the intermediate layer 22 can be specified, for example, by analysis using an EDS (energy-dispersive X-ray spectroscopy) instrument attached to a STEM (scanning transmission electron microscope).

[0043] Thus, in the coated cutting tool 1 of this embodiment, by providing an intermediate layer 22 between the substrate 10 and the coating 20, which has a higher wettability with the substrate 10 than with the coating 20, the adhesion between the substrate 10 and the coating 20 can be improved. Furthermore, because the adhesion between the intermediate layer 22 and the coating 20 is also high, it is difficult for the coating 20 to peel off from the intermediate layer 22.

[0044] The intermediate layer 22 can be formed using arc ion plating (AIP). AIP is a method that uses an electric arc discharge in a vacuum atmosphere to evaporate the target metal, which then combines with N2 gas to form a metal nitride film. In this case, the bias voltage applied to the substrate 10 can be above 400V. Furthermore, the coating 20 can also be formed using AIP.

[0045] Furthermore, the thickness of the intermediate layer 22 can be, for example, greater than 0.1 nm and less than 20.0 nm.

[0046] (First coating 23 and second coating 24)

[0047] Next, refer to Figure 4 The structures of the first coating 23 and the second coating 24 will be described. Figure 4 yes Figure 3 An enlarged schematic diagram of section H is shown.

[0048] like Figure 4 As shown, coating 20 has a first coating 23 located above intermediate layer 22 and a second coating 24 located above first coating 23.

[0049] The first coating 23 has a plurality of first layers 23a and a plurality of second layers 23b. The first coating 23 has a striped structure in which the first layers 23a and the second layers 23b are alternately stacked in the thickness direction.

[0050] The thicknesses of the first layer 23a and the second layer 23b can be less than 50 nm each. Because the first layer 23a and the second layer 23b are formed very thinly, the residual stress is small, and peeling and cracking are difficult to occur, so the durability of the coating 20 is high.

[0051] The first layer 23a is connected to the intermediate layer 22, and the second layer 23b is formed on the first layer 23a.

[0052] The first coating 23, specifically, the first layer 23a and the second layer 23b, may comprise at least one element selected from the group consisting of Al, Cr, Si, Group 5 elements, Group 6 elements, and Group 4 elements excluding Ti; and at least one element selected from the group consisting of C and N. Specifically, the first layer 23a and the second layer 23b may comprise at least one element selected from the group consisting of Al, Group 5 elements, Group 6 elements, and Group 4 elements excluding Ti; at least one element selected from the group consisting of C and N; Si; and Cr.

[0053] More specifically, the first layer 23a and the second layer 23b can contain Al, Cr, Si, and N. That is, the first layer 23a and the second layer 23b can be AlCrSiN layers containing Al, Cr, and Si nitrides. Furthermore, the term "AlCrSiN" means that Al, Cr, Si, and N exist in any proportion, and does not imply that Al, Cr, Si, and N must exist in a 1:1:1:1 ratio.

[0054] Thus, by placing the first layer 23a containing the metal (e.g., Si) contained in the intermediate layer 22 on top of the intermediate layer 22, the adhesion between the intermediate layer 22 and the coating 20 is high. As a result, the coating 20 is difficult to peel off from the intermediate layer 22, and therefore the coating 20 has high durability.

[0055] Layer 1 23a and layer 23b may also contain Al, Cr, Si, and N, respectively. Here, the Al content in layer 1 23a is designated as the first Al content, the Cr content in layer 1 23a as the first Cr content, and the Si content in layer 1 23a as the first Si content. Similarly, the Al content in layer 23b is designated as the second Al content, the Cr content in layer 23b as the second Cr content, and the Si content in layer 23b as the second Si content.

[0056] In this case, the first Al content can be greater than the second Al content, the first Cr content can be less than the second Cr content, and the first Si content can be greater than the second Si content. The total percentage of Al, Cr, and Si in the first coating 23 can be 98 atomic% or more.

[0057] The second coating 24 can contain Ti, Si, and N. That is, the second coating 24 can be a nitride layer (TiSiN layer) containing Ti and Si. Also, the term "TiSiN layer" means that Ti, Si, and N exist in any proportion, and does not mean that Ti, Si, and N must exist in a 1:1:1 ratio.

[0058] Therefore, for example, a low coefficient of friction in the second coating 24 can improve the anti-adhesion properties of the coated tool 1. Additionally, for example, a high hardness in the second coating 24 can improve the wear resistance of the coated tool 1. Furthermore, for example, a high oxidation initiation temperature in the second coating 24 can improve the oxidation resistance of the coated tool 1.

[0059] The second coating 24 has a striped structure with at least two layers arranged in the thickness direction. Each layer of the striped structure of the second coating 24 may, for example, contain Ti, Si, and N. In this case, the content of Ti (hereinafter referred to as "Ti content"), Si (hereinafter referred to as "Si content"), and N (hereinafter referred to as "N content") in the second coating 24 can be repeatedly increased or decreased along the thickness direction of the second coating 24. The total content of Ti and Si in the second coating 24 may be 98 atomic% or more. Furthermore, the second coating 24 may also have a third and a fourth layer alternately arranged in the thickness direction.

[0060] <X-ray intensity distribution of the positive pole figure of the (111) plane>

[0061] Figure 5 It is a graph showing the X-ray intensity distribution of the positive polarimetric diagram of the (111) plane of the cubic crystal contained in the coating 20 of the embodiment. Figure 5 The horizontal axis of the positive pole figure shown represents the angle of the α axis (tilt axis), and the vertical axis represents the X-ray intensity in the tilt direction.

[0062] The orientation of the (111) plane in the crystallization of cubic crystals can be evaluated based on the X-ray intensity distribution of the positive pole figure about the (111) plane. For example, when the peak appears at 45° in the X-ray intensity distribution of the positive pole figure about the (111) plane, there are more cubic crystals with the (111) plane tilted at 45° relative to the surface of the substrate 10.

[0063] like Figure 5 As shown, the coating 20 of the embodiment has a maximum X-ray intensity I in the measurement range where the angle of the α-axis in the X-ray intensity distribution of the positive pole diagram of the cubic crystal about the (111) plane is 0° or more and 90° or less. 1max .

[0064] Here, let the intensity be I. 1maxMore than 85% of the α-axis angular region is θ 1F In coating 20 of the embodiment, θ 1F In the region where the angle of the α-axis is above 30° and below 90°, the crystal orientation can be above 90%. Based on this configuration, the crystal orientation is relatively uniform, reducing sudden chipping. Therefore, the coated tool 1 with this coating 20 exhibits high impact resistance.

[0065] In addition, Figure 5 The positive electrode diagram shown for the (111) plane represents I. 1max The angle θ of the α axis 1max The angular region on the higher angle side is region 1, compared to θ. 1max The angular region located on the lower angle side is designated as region 2. Furthermore, let the minimum X-ray intensity in region 1 be I. 11min Let the minimum X-ray intensity in the second region be I. 12min .

[0066] In this case, in coating 20, I 1max with I 11min The difference (I) 1max -I 11min It can be less than I 1max with I 12min The difference (I) 1max -I 12min ), I 11min It can be I 1max More than 85% of them.

[0067] When the orientation of the coating 20 is configured in this way, regions with high crystal orientation will exist within the coating 20. Therefore, the coated tool 1 having this coating 20 can withstand impacts from all directions. Thus, the coated tool 1 of this embodiment has high impact resistance.

[0068] In addition, Figure 5 In the positive electrode diagram shown with respect to the (111) plane, in coating 20, I 12min It can also be I 1max More than 5% and less than 20%.

[0069] By configuring the orientation of the coating 20 in this way, the orientation in the direction of weak impact on the coating 20 can be reduced. Therefore, most of the orientation can be aligned with the direction of strong impact. Consequently, the coated cutting tool 1 with the coating 20 having this configuration exhibits high impact resistance.

[0070] In addition, Figure 5 In the positive electrode diagram shown with respect to the (111) plane, in coating 20, θ 1max It can be above 35° and below 55°.

[0071] θ 1max When this range exists, the coating 20 becomes more resistant to impacts from both the horizontal and vertical directions. Therefore, the coated cutting tool 1 with this coating 20 has high impact resistance.

[0072] In addition, such as Figure 5 In the positive electrode diagram shown with respect to the (111) plane, the coating 20 may have at least one inflection point in the first region.

[0073] When the orientation of the coating 20 is configured in this way, the area with higher orientation can be expanded. Therefore, the coated tool 1 with the coating 20 having this configuration has high impact resistance.

[0074] <X-ray intensity distribution of the positive pole figure of the (200) plane>

[0075] Figure 6 It is a graph showing the X-ray intensity distribution of the positive polarimetric diagram of the cubic crystals contained in the coating 20 of the embodiment about the (200) plane. Figure 6 The horizontal axis of the positive pole figure shown represents the angle of the α axis (tilt axis), and the vertical axis represents the X-ray intensity in the tilt direction.

[0076] like Figure 6 As shown, the coating 20 of the embodiment has a maximum X-ray intensity I in the measurement range where the angle of the α-axis in the X-ray intensity distribution of the positive pole diagram of the cubic crystal about the (200) plane is 0° or more and 90° or less. 2max Here, let I represent... 2max The angle of the α axis is θ 2max Compared to θ 2max The angular region on the higher angle side is region 3, compared to θ. 2max The angular region located on the lower angle side is designated as region 4. Furthermore, let the minimum X-ray intensity in region 3 be I. 23min The minimum X-ray intensity in region 4 is I. 24min .

[0077] exist Figure 6 In the positive electrode diagram shown about the (200) plane, in coating 20, I 2max with I 23min The difference (I) 2max -I 23min It can be less than I 2max with I 24min The difference (I) 2max -I 24min ), I 23min It can be I 2max More than 95% of them.

[0078] When coating 20 is configured in this way, coating 20 will have strength and I 2max The closely spaced areas can prevent chipping and breakage from impacts from all directions. Therefore, the coated tool 1 with this coating 20 has high impact resistance.

[0079] In addition, Figure 6 In the positive electrode diagram shown about the (200) plane, in coating 20, I 24min It can be I 2max More than 2% and less than 35%.

[0080] When the orientation of the coating 20 is configured in this way, the orientation in the direction of weak impact on the coating 20 can be reduced. Therefore, most of the orientation can be aligned with the direction of strong impact. Thus, the coated cutting tool 1 with the coating 20 having this configuration has high impact resistance.

[0081] In addition, Figure 6 The positive electrode diagram shown with respect to the (200) plane, the coating 20 of the embodiment, θ 2max It can also be above 70° and below 85°.

[0082] θ 2max When this range exists, the coating 20 becomes more resistant to impacts from both the horizontal and vertical directions. Therefore, the coated cutting tool 1 with this coating 20 has high impact resistance.

[0083] The coating 20 can be applied to the substrate 10, for example, by physical vapor deposition (PVD). For example, when the substrate 10 is held in place by the inner circumferential surface of the through hole 5, the coating 20 can be formed by the above-described vapor deposition method, so that the coating 20 covers the entire surface of the substrate 10 except for the inner circumferential surface of the through hole 5.

[0084] <Cutting Tools>

[0085] Next, refer to Figure 7 The structure of the cutting tool having the above-mentioned coated tool 1 will be described. Figure 7 This is a front view showing an example of a cutting tool used in an embodiment.

[0086] like Figure 7 As shown, the cutting tool 100 of the embodiment has a coated tool 1 and a tool holder 70 for fixing the coated tool 1.

[0087] The handle 70 is from the first end ( Figure 7 The upper end of the middle) faces the second end ( Figure 7 A rod-shaped member extending from the lower end of the blade. The handle 70 is made of, for example, steel or cast iron. Among these components, high-toughness steel is particularly preferred.

[0088] The tool holder 70 has a groove 73 at its first end. The groove 73 is the part for mounting the coated tool 1, and has a support surface that intersects the rotation direction of the workpiece and a limiting side that is inclined relative to the support surface. On the support surface, there is a threaded hole for tightening the bolt 75, which will be described later.

[0089] The coated cutting tool 1 is located in the slot 73 of the tool holder 70 and is mounted on the tool holder 70 by a bolt 75. That is, the bolt 75 is inserted into the through hole 5 of the coated cutting tool 1, and the front end of the bolt 75 is inserted into the threaded hole formed in the support surface of the slot 73, so that the threads are tightened. Thus, the coated cutting tool 1 is mounted on the tool holder 70 with the cutting edge protruding outward from the tool holder 70.

[0090] In this embodiment, a cutting tool for so-called turning is exemplified. Examples of turning include, for instance, internal diameter machining, external diameter machining, and grooving. However, the cutting tool is not limited to turning. For example, a coated tool 1 can also be used for hobbing. Examples of cutting tools for hobbing include, for instance, end mills such as face mills, front end mills, side end mills, and grooving end mills, as well as end mills such as single-flute end mills, multi-flute end mills, tapered end mills, and ball end mills.

[0091] (Manufacturing method)

[0092] Next, an example of the manufacturing method of the coated cutting tool 1 according to this embodiment will be described. Furthermore, the manufacturing method of the coated cutting tool according to this embodiment is not limited to the manufacturing method described below.

[0093] The coating can be formed, for example, by physical vapor deposition. Examples of physical vapor deposition methods include ion plating and sputtering. As an example, when making a coating by ion plating, the coating can be made by the following method.

[0094] First, an example of the manufacturing method for the intermediate layer is shown. In 8×10... -3 ~1×10 -4 The substrate is heated under reduced pressure (Pa) to achieve a surface temperature of 500–600 °C. Next, argon gas is introduced as the atmosphere gas, maintaining the pressure at 3.0 Pa. Then, argon bombardment is performed for 11 minutes with a bias voltage of -400 V. Following this, the pressure is reduced to 0.1 Pa, and an arc current of 130–160 A is applied to a Ti metal evaporation source for 0.3 minutes, forming a Ti-containing intermediate layer on the substrate surface. To achieve the desired intermediate layer thickness, the argon bombardment and Ti-containing intermediate layer formation processes can be repeated. However, in subsequent argon bombardment processes, the bias voltage is set to -200 V.

[0095] Next, an example of a method for preparing the first coating by ion plating will be presented. First, as an example, metal targets of Cr, Si, and Al, or composite alloy targets, or sintered targets are prepared.

[0096] Secondly, the target, which serves as the metal source, is evaporated and ionized through methods such as arc discharge or glow discharge. The ionized metal reacts with nitrogen (N2) gas, a nitrogen source, and the vapor phase is deposited on the surface of the substrate. Through these steps, an AlCrSiN layer can be formed.

[0097] In the above steps, the temperature of the substrate can be 500-600℃, the nitrogen pressure can be 1.0-6.0Pa, and a DC bias voltage of -50 to -200V can be applied to the substrate to make the arc discharge current 100-200A.

[0098] The composition of the first coating can be adjusted by independently controlling the voltage and current values ​​applied during arc discharge and glow discharge to each of the aluminum metal target, chromium metal target, aluminum-silicon composite alloy target, and chromium-silicon composite alloy target. Furthermore, the coating composition can also be adjusted by controlling the coating time and atmospheric pressure. In one embodiment, the ionization amount of the target metal can be varied by changing the voltage and current values ​​during arc discharge and glow discharge. Additionally, the ionization amount of the target metal can be periodically varied by periodically changing the current value during arc discharge and glow discharge for each target. By periodically changing the current value during arc discharge and glow discharge of the target at intervals of 0.01 to 0.5 minutes, the ionization amount of the target metal can be periodically varied. This allows for a structure in which the content ratio of each metal element varies periodically along the thickness direction of the coating.

[0099] When performing the above steps, the composition of Al, Si, and Cr is changed by decreasing the amount of Al and Si and increasing the amount of Cr. Then, the composition of Al, Si, and Cr is changed by increasing the amount of Al and Si and decreasing the amount of Cr. In this way, a first coating having a first layer and a second layer can be produced.

[0100] Next, an example of a method for manufacturing the second coating, which is the TiSiN layer, will be described.

[0101] Similar to the first coating, the second coating can also be formed by physical vapor deposition. As an example, firstly, a Ti metal target and a Ti-Si composite alloy target are prepared. Then, by independently controlling the voltage and current values ​​of the arc discharge and glow discharge applied to each prepared target, a second coating with a striped structure can be fabricated.

[0102] In the above steps, the temperature of the substrate can be 500-600℃, the nitrogen pressure can be 1.0-6.0Pa, and a DC bias voltage of -50 to -200V can be applied to the substrate to make the arc discharge current 100-200A and the arc current change period 0.01-0.5min.

[0103] Example

[0104] The embodiments of the present invention will be described in detail below. However, the present invention is not limited to the embodiments shown below.

[0105] A coated cutting tool consisting of a WC substrate, a Ti-containing intermediate layer, an AlCrSiN first coating, and a TiSiN second coating is designated as Sample No. 1. Sample No. 1 corresponds to an embodiment of the present invention.

[0106] In 1×10 -3 The substrate was heated under reduced pressure (Pa) to reach a surface temperature of 550°C. Then, argon gas was introduced as the atmosphere gas, and the pressure was maintained at 3.0 Pa. Next, argon bombardment was performed for 11 minutes with a bias voltage of -400 V. Then, the pressure was reduced to 0.1 Pa, and an arc current of 150 A was applied to the Ti metal evaporation source for 0.3 minutes, forming a Ti-containing layer on the substrate surface. The argon bombardment and Ti-containing layer formation processes were repeated a total of three times, resulting in an intermediate layer with a thickness of 8 nm. However, in the second and third argon bombardment processes, the bias voltage was set to -200 V.

[0107] <Treatment conditions for argon bombardment>

[0108] (1) Bias voltage: -400V

[0109] (2) Pressure: 3 Pa

[0110] (3) Processing time: 11 minutes

[0111] <Film formation conditions containing Ti layer>

[0112] (1) Arc current: 150A

[0113] (2) Bias voltage: -400V

[0114] (3) Pressure: 0.1 Pa

[0115] (4) Processing time: 0.3 minutes

[0116] <Argon bombardment conditions after the second time>

[0117] (1) Bias voltage: -200V

[0118] (2) Pressure: 3 Pa

[0119] (3) Processing time: 1 minute

[0120] The intermediate layer can also contain other metallic elements introduced by diffusion. For example, when the intermediate layer contains Ti, it can contain 50–98% atoms of metallic elements other than Ti.

[0121] Next, the first coating is formed. An atmospheric gas and N2 gas (as a nitrogen source) are introduced into the chamber containing the substrate, maintaining the internal pressure of the chamber at 3 Pa. Then, for Al metal, Cr metal, and Al... 50 Si 50 An alloy evaporation source was subjected to a bias voltage of -130V, and arc currents of 135–150A, 120–150A, and 110–120A were applied repeatedly over a period of 0.04 minutes, forming a first Al coating with an average thickness of 1.8 μm. 50 Cr 39 Si 11 N layers.

[0122] Next, a second coating is formed. For Ti metal and Ti... 50 Si 50 A bias voltage of -100V was applied to the alloy evaporation source, and arc currents of 100–200A and 100–200A were applied repeatedly at a period of 0.04 minutes over 10 minutes to form a second Ti coating with an average thickness of 1.2 μm. 86 Si 14 N layers.

[0123] The measurement conditions for the X-ray intensity distribution corresponding to sample No. 1 are as follows. Furthermore, when the normal to the sample surface lies on the plane determined by the incident and diffracted rays, the α angle is 90°. When the α angle is 90°, it is the center point on the polarimetric diagram.

[0124] (1) Flat collimator

[0125] (2) Scanning method: concentric circles

[0126] (3) β scan range: above 0° and below 360° / 2.5° interval

[0127] (4) θ is a fixed angle: Ti 86 Si 14 The diffraction angle of the (111) plane of the N crystal is between 36.0° and 38.0°, which is the angle at which the diffraction intensity reaches its maximum. Ti 86 Si 14 The diffraction angle of the (200) plane of the N crystal is between 42.0° and 44.0°, which is the angle at which the diffraction intensity reaches its maximum.

[0128] (5) α scan range: above 0° and below 90° / 2.5° step

[0129] (6) Target: CuKα, Voltage: 45kV, Current: 40mA

[0130] Cutting tests were conducted using a coated ball end mill of shape 2KMBL0200-0800-S4. During the cutting tests, the flank face of the cutter head was observed every 1 meter of cutting length, and the presence of chipping was assessed under a microscope. The number of impacts was calculated based on the cutting length at which chipping occurred. The test conditions are shown below. Additionally, as a comparative example, the same test was performed on conventional products (samples No. 2 to No. 8).

[0131] <Cutting Test Conditions>

[0132] (1) Workpiece material: SKD11H

[0133] (2) Rotation speed: 16900 min －1

[0134] (3) Table feed: 1320mm / min

[0135] (4) Depth of cut (ap×ae): 0.08mm×0.2mm

[0136] (5) Cutting condition: wet

[0137] (6) Coolant: oil mist

[0138] <X-ray intensity distribution of the positive pole figure of the (111) plane>

[0139] Figure 8 This is a table summarizing the X-ray intensity distribution of the positive polarimetric diagram of the (111) plane for samples No.1 to No.8, which summarizes the various values ​​of the cubic crystal crystals contained in the coating.

[0140] like Figure 8 As shown, in sample No. 1, the X-ray intensity is the maximum value I of the X-ray intensity. 1max More than 85% of the angular region (θ) 1F The angle θ is 56.8°. Additionally, in the angle region between 30° and 90°, θ... 1F The proportion occupied, i.e., θ 1F The percentage of (90°–30°) is 94.6%.

[0141] In contrast, the θ of samples No.2 to No.8 1F / (90°-30°), respectively 50.0%, 42.5%, 55.8%, 61.7%, 48.3%, 31.7% and 25.0%. That is, for samples No.2 to No.8 in the angle region above 30° and below 90°, θ 1F The proportions are all below 90%.

[0142] In addition, in sample No. 1, the maximum X-ray intensity I 1max The minimum X-ray intensity of region 1, I 11min The difference (I) 1max -I 11min The maximum X-ray intensity is 375. 1max The minimum X-ray intensity of region 2, I 12min The difference is 2663. Additionally, in sample No. 1, I... 11min For I 1max The ratio, i.e., I 11min / I 1max It is 86.8%.

[0143] Thus, in sample No.1, I 1max with I 11min The difference (I) 1max -I 11min Less than I 1max with I 12min The difference, I 11min For I 1max More than 85%. In contrast, in samples No.2 to No.8, I 11min All below I 1max 85%.

[0144] In addition, in sample No.1, I 12min For I 1max The ratio, i.e., I 12min / I 1max It is 6.0%. Thus, in sample No. 1, I 12min For I 1max The percentage is between 5% and 20%. In contrast, in samples No. 2–No. 4, No. 7, and No. 8, I... 12min Below I 1max 5% of samples No. 5 and No. 6, I 12min Higher than I 1max 20%.

[0145] Additionally, in sample No. 1, θ 1max It is 45°. Thus, in sample No. 1, θ 1max The angle is between 35° and 55°. In contrast, the angles of samples No. 2 to No. 8 are...1max The angles are 60°, 32.5°, 32.5°, 60°, 40°, 80°, and 60° respectively.

[0146] Furthermore, sample No. 1 has an inflection point at 60°. That is, sample No. 1 has one inflection point in region 1. In contrast, sample No. 2 has an inflection point at 85° in region 1, sample No. 3 has inflection points at 47.5° and 80° in region 1 respectively, and sample No. 4 has inflection points at 47.5°, 60°, and 82.5° in region 1 respectively. Sample No. 5 does not have an inflection point, sample No. 6 has an inflection point at 85° in region 1, sample No. 7 does not have an inflection point, and sample No. 8 has an inflection point at 75° in region 1.

[0147] <X-ray intensity distribution of the positive pole figure of the (200) plane>

[0148] Figure 9 This is a table summarizing the X-ray intensity distribution of the cubic crystals contained in the coating about the (200) plane of the positive polarimetric diagram for samples No.1 to No.6.

[0149] like Figure 9 As shown, in sample No. 1, the maximum X-ray intensity I 2max The minimum X-ray intensity in region 3, I 23min The difference (I) 2max -I 23min ) is 61, I 2max The minimum X-ray intensity in region 4 is I 24min The difference (I) 2max -I 24min The value is 4912. Additionally, in sample No. 1, I... 23min For I 2max The ratio, i.e., I 23min / I 2max The result is 98.8%. Thus, in sample No. 1, I... 2max with I 23min The difference (I) 2max -I 23min Less than I 2max with I 24min The difference (I) 2max -I 24min ), I 23min For I 2max More than 95% of them.

[0150] In contrast, in samples No. 2 to No. 6, I 23min For I 2max The ratio, i.e., I 23min / I 2max The percentages were 58.4%, 49.9%, 37.8%, 90.5%, and 56.9%, respectively, all below 95%.

[0151] In addition, in sample No.1, I 24min For I 2max The ratio is 2.4%. Thus, in sample No. 1, I 24min For I 2max The percentage is between 2% and 35%. In contrast, in samples No. 2 to No. 4, I... 24min Below I 2max 2% of samples No. 5 and No. 6, I 24min Higher than I 2max 35%.

[0152] Additionally, in sample No. 1, θ 2max The angle is 82.5°. Therefore, in sample No. 1, θ... 2max The angle is above 70° and below 85°. In contrast, the angles of samples No. 2 to No. 6 are... 2max The angles are 67.5°, 65°, 20°, 70°, 70°, and 75° respectively.

[0153] <Cut Test Results>

[0154] Figure 10 The table summarizes the results of the cutting tests conducted on samples No. 1 through No. 8. (For example...) Figure 10 As shown, sample No. 1, which corresponds to an embodiment of the present invention, did not break down even after 128,000 impacts. In contrast, samples No. 2 to No. 8, which are comparative examples, broke down after 30,000 to 50,000 impacts.

[0155] Thus, compared to samples No. 2 to No. 8 used as comparative examples, sample No. 1 in this embodiment of the invention experienced more impacts up to the point of chipping. Based on this result, it can be concluded that the coated cutting tool of the present invention exhibits high impact resistance.

[0156] As described above, the coated tool of the embodiment (for example, coated tool 1) includes a substrate (for example, substrate 10) and at least one coating layer (for example, coating 20) located on the substrate. The coating contains cubic crystals, which contain at least one element selected from elements of groups 4a, 5a, and 6a of the periodic table, Al, and Si; and at least one element selected from C and N. In addition, the coating has a maximum X-ray intensity (I) in the measurement range where the angle of the α-axis of the X-ray intensity distribution of the positive pole figure of the cubic crystal about the (111) plane is 0° or more and 90° or less.1max Furthermore, the X-ray intensity is I. 1max More than 85% of the angular region (θ) 1F ), accounting for more than 90% of the area between 30° and 90°.

[0157] Therefore, the coated cutting tool according to the embodiment can improve impact resistance.

[0158] besides, Figure 1 The shape of the coating tool 1 shown is only an example and is not intended to limit the shape of the coating tool of the present invention. The coating tool of the present invention may, for example, have a rotating shaft and a rod-shaped body extending from a first end toward a second end, a cutting edge located at the first end of the body, and a groove extending spirally from the cutting edge toward the second end of the body.

[0159] Further effects and variations can be readily derived by those skilled in the art. Therefore, the invention is presented in a broader manner, not limited to the specific details and representative embodiments expressed and described above. Thus, various modifications can be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents.

[0160] Symbol Explanation

[0161] 1 Coated cutting tools

[0162] 2. Blade body

[0163] 5 Through holes

[0164] 10 Matrix

[0165] 20 Coatings

[0166] 22 Intermediate Layer

[0167] 23 First Coating

[0168] 24 Second Coating

[0169] 70 Knife Handle

[0170] 73 Card Slots

[0171] 75 bolts

[0172] 100 Cutting Tools

Claims

1. A coated cutting tool having a substrate and at least one coating layer disposed on the substrate, The coating contains cubic crystals comprising at least one element selected from Groups 4a, 5a, and 6a of the periodic table, Al, and Si; and at least one element selected from C and N. The coating has a maximum X-ray intensity (I) within a measurement range of 0° to 90° in the X-ray intensity distribution of the positive pole figure of the cubic crystal about the (111) plane. 1max Furthermore, the X-ray intensity is I. 1max More than 85% of the angular region (θ) 1F ), accounting for more than 90% of the area between 30° and 90°.

2. The coated cutting tool according to claim 1, wherein, In the positive electrode diagram regarding the (111) plane, in the coating, the I is relatively represented. 1max The angle of the α axis (θ) 1max The minimum X-ray intensity (I) is found in the region on the high-angle side, i.e., region 1. 11min ) and the I 1max The difference (I) 1max -I 11min ), less than relative to θ 1max The minimum X-ray intensity (I) is found in the region on the low-angle side, i.e., region 2. 12min ) and the I 1max The difference (I) 1max -I 12min ), the I 11min For the I 1max More than 85%.

3. The coated cutting tool according to claim 2, wherein, In the positive electrode diagram of the (111) surface, the coating has at least one inflection point in the first region.

4. The coated cutting tool according to any one of claims 1 to 3, wherein, In the positive electrode diagram regarding the (111) plane, in the coating, the I 12min For the I 1max More than 5% and less than 20%.

5. The coated cutting tool according to any one of claims 1 to 3, wherein, In the positive electrode diagram regarding the (111) plane, the coating represents the I. 1max The angle of the α axis (θ) 1max () is above 35° and below 55°.

6. A cutting tool, comprising: A rod-shaped knife handle with a groove at the end; The coated cutting tool according to any one of claims 1 to 5 located in the slot.

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