A method and apparatus for processing hard and brittle insulating materials

Abstract

This disclosure relates to the field of processing technology for hard and brittle insulating materials, specifically to a method and apparatus for processing hard and brittle insulating materials. The technical solution provided in this disclosure utilizes the principle of microwave-assisted discharge. A conductive processing tool and a workpiece made of hard and brittle insulating material are placed within a microwave resonant cavity. Microwaves of a preset frequency are emitted into the microwave resonant cavity, causing reflection and accumulation of microwave energy. An electrolyte is then provided into the microwave resonant cavity, bringing the processing end of the processing tool and the processing area of ​​the workpiece into contact with the electrolyte. When the microwave energy generates a strong electric field at the processing end of the processing tool, resulting in a discharge, the electrolyte at the discharge location is affected by the high temperature of the discharge, forming a corrosive electrolyte. This corrosive electrolyte is then used to chemically etch the workpiece, thereby improving processing stability and increasing processing efficiency while ensuring processing accuracy.

Description

Technical Field

[0001] This disclosure relates to the field of processing technology for hard and brittle insulating materials, and specifically to a method and equipment for processing hard and brittle insulating materials. Background Technology

[0002] Hard and brittle insulating materials such as glass, quartz, and engineering ceramics are the "third generation of structural materials" after metals and plastics. They possess excellent comprehensive properties, including superhardness, wear resistance, high resistivity and melting point, and good thermal conductivity, making them widely used in microelectromechanical systems (MEMS). However, despite their superior performance and significant application value, the high hardness, brittleness, and electrical insulation of these ceramic materials pose considerable challenges to their processing.

[0003] Existing processing methods for hard and brittle insulating materials mainly include diamond grinding and electro-discharge machining (EDM). Diamond grinding is currently the most widely used and technologically mature method; however, it suffers from problems such as high diamond wheel wear, low processing efficiency, high processing cost, and susceptibility to micro-cracks and chipping on the machined surface. This is particularly problematic when machining microstructures, where the small tool size makes it prone to deformation or even breakage, affecting processing accuracy and stability. EDM for hard and brittle insulating materials is currently in the laboratory research stage and has not yet achieved industrial application. A necessary condition for EDM to generate discharge is the formation of a relatively complete hydrogen film on the electrode surface. However, this hydrogen film is unstable, and the working fluid circulation within the processing gap is poor, leading to poor discharge stability and low processing efficiency. Furthermore, the hydrogen film thickness varies considerably, making it difficult to guarantee processing accuracy. Therefore, existing processing methods for hard and brittle insulating materials cannot meet the comprehensive processing requirements of the workpieces, and there is an urgent need for a processing method with good stability and high precision. Summary of the Invention

[0004] In order to solve the problems in the related technology, the present disclosure provides a method and apparatus for processing hard and brittle insulating materials.

[0005] In a first aspect, this disclosure provides an apparatus for processing hard and brittle insulating materials, the apparatus comprising: a microwave feed device, a microwave resonant cavity, and a workpiece processing device, wherein...

[0006] The microwave feed device is configured to be connected to the microwave resonant cavity and is used to emit microwaves of a preset frequency into the microwave resonant cavity, so that the microwaves are reflected and accumulate microwave energy within the microwave resonant cavity.

[0007] The microwave resonant cavity is configured to resonate based on the microwaves, contain an electrolyte, and house a workpiece made of a hard and brittle insulating material.

[0008] The workpiece processing device includes a workpiece processing mechanism and a conductive processing tool, and is configured to process the workpiece. The workpiece processing mechanism is used to drive the processing tool to move relative to the workpiece. The processing tool is placed inside the microwave resonant cavity, and the non-processing end of the processing tool is connected to the workpiece processing mechanism.

[0009] When the microwave resonant cavity is filled with electrolyte, the microwave energy causes a strong electric field to be generated at the processing end of the processing tool, thereby forming a discharge. The electrolyte at the discharge location is affected by the high temperature of the discharge to form a corrosive electrolyte, which is then used to perform chemical etching on the workpiece.

[0010] Secondly, this disclosure provides an apparatus for processing hard and brittle insulating materials, the apparatus comprising: a microwave feeding device, a microwave resonant cavity, a workpiece processing device, and an electrolyte supply device, wherein...

[0011] The microwave feed device is configured to be connected to the microwave resonant cavity and is used to emit microwaves of a preset frequency into the microwave resonant cavity, so that the microwaves are reflected and accumulate microwave energy within the microwave resonant cavity.

[0012] The microwave resonant cavity is configured to resonate based on the microwaves and to accommodate a workpiece made of a hard and brittle insulating material.

[0013] The workpiece processing device includes a workpiece processing mechanism and a conductive processing tool, and is configured to process the workpiece. The workpiece processing mechanism is used to drive the processing tool to move relative to the workpiece. The processing tool is placed inside the microwave resonant cavity, and the non-processing end of the processing tool is connected to the workpiece processing mechanism.

[0014] The electrolyte supply device is configured to be connected to the workpiece processing device or the microwave resonant cavity, and is used to supply electrolyte to the microwave resonant cavity so that the processing end of the processing tool and the processing area of ​​the workpiece come into contact with the electrolyte. When the microwave energy causes the processing end of the processing tool to generate a strong electric field and thus form a discharge, the electrolyte at the discharge position is affected by the high temperature of the discharge to form a corrosive electrolyte. The corrosive electrolyte is then used to perform chemical etching on the workpiece.

[0015] According to an embodiment of this disclosure, the workpiece processing mechanism includes: a fixture, a machine tool guide shaft, a machine tool spindle, a machine tool column, and a machine tool worktable; the processing tool, the fixture, the machine tool guide shaft, the machine tool spindle, and the machine tool column are sequentially connected and arranged perpendicularly to the machine tool worktable; the microwave resonant cavity includes an end cover and a cavity body, the cavity body has no bottom surface, the end cover and the cavity body are capable of relative movement, and an openable door is provided on the end cover or the cavity body for placing the workpiece in so as to fix it on the machine tool worktable and removing the workpiece from the machine tool worktable;

[0016] Wherein, the non-machining end of the machining tool is fixed on the fixture; the fixture is fixed on the machine tool guide shaft; the machine tool guide shaft is fixed on the machine tool spindle through a first through hole provided on the end cover of the microwave resonant cavity; the machine tool spindle is movably connected to the machine tool column; the end cover is fixed on the machine tool column by a fixing seat; the cavity is closedly connected to the machine tool worktable.

[0017] The machine tool spindle is configured to reciprocate vertically on the machine tool column via an automatic feed adjustment device, thereby driving the machining tool to reciprocate vertically with the machine tool spindle;

[0018] The machine tool table is configured to move horizontally via the automatic feed adjustment device, thereby causing the workpiece to move horizontally with the machine tool table. This is to create relative movement between the machining tool and the workpiece through the vertical reciprocating motion and / or the horizontal motion, so as to process the workpiece in combination with the relative motion.

[0019] According to embodiments of this disclosure, wherein,

[0020] The microwave feed device includes a microwave source, a microwave source protection device, a dual-directional coupler, and a power meter. The microwave source, the microwave source protection device, the dual-directional coupler, and the processing tool are connected in sequence via a coaxial cable. The dual-directional coupler is connected to the power meter via a coaxial cable. The power meter is used to measure the microwave power incident on the microwave resonant cavity. The microwave source protection device includes a circulator or a DC blocker.

[0021] According to embodiments of this disclosure, wherein,

[0022] When the dual-directional coupler is connected to the machining tool, the fixture is also provided with an adapter. The dual-directional coupler and the machining tool are connected through the adapter on the fixture via a second through hole provided on the end cap of the microwave resonant cavity.

[0023] According to embodiments of this disclosure, when the device includes an electrolyte supply device, the electrolyte supply device includes: a supply mechanism and a supply pipe.

[0024] When the electrolyte supply device is connected to the workpiece processing device, the electrolyte supply device is specifically configured as follows:

[0025] One end of the liquid supply pipe is close to the machining tool for spraying electrolyte, and the other end is fixed to the fixture. The fixture has an internal hole, one end of which communicates with the internal hole of the machine tool guide shaft, and the other end communicates with the internal hole of the liquid supply pipe. One end of the liquid supply mechanism is connected to the machine tool guide shaft and communicates with its internal hole; the other end is used to inject electrolyte, allowing the electrolyte to enter the internal hole of the machine tool guide shaft through the liquid supply mechanism, and then be directly sprayed onto the machining area of ​​the workpiece and the machining tool via the hole in the fixture and the internal hole of the liquid supply pipe, or sprayed into the microwave resonant cavity, so that the machining end of the machining tool and the machining area of ​​the workpiece come into contact with the electrolyte. The fixture has an internal switching mechanism for controlling the start and stop of the liquid supply.

[0026] Alternatively, one end of the supply pipe is close to the machining tool for spraying electrolyte, and the other end is connected to one end of the supply mechanism through the internal hole of the fixture and the internal hole of the machine tool guide shaft that communicates with the internal hole of the fixture. This allows the electrolyte to enter the other end of the supply pipe from the supply mechanism and be sprayed directly onto the machining area of ​​the workpiece and the machining tool from one end. Alternatively, it can be sprayed into the microwave resonant cavity so that the machining end of the machining tool and the machining area of ​​the workpiece come into contact with the electrolyte.

[0027] When the electrolyte supply device is connected to the microwave resonant cavity, the specific configuration is as follows:

[0028] One end of the liquid supply pipe enters the microwave resonant cavity through a third through hole provided on the end cap of the microwave resonant cavity for spraying electrolyte. The other end is connected to the liquid supply mechanism for filling electrolyte, so that the electrolyte is sprayed directly from the liquid supply mechanism through the liquid supply pipe onto the processing area of ​​the workpiece and the processing tool, or sprayed into the microwave resonant cavity so that the processing end of the processing tool and the processing area of ​​the workpiece come into contact with the electrolyte.

[0029] According to embodiments of this disclosure, the device further includes: an electrolyte treatment device connected to the microwave resonant cavity for filtering and / or cooling the electrolyte; when the device includes an electrolyte supply device, the electrolyte treatment device is also connected to the electrolyte supply device for delivering the filtered and / or cooled electrolyte to the electrolyte supply device.

[0030] Thirdly, this disclosure provides a method for processing hard and brittle insulating materials, the method comprising:

[0031] A conductive machining tool and a workpiece made of hard and brittle insulating material are placed inside a microwave resonant cavity;

[0032] A microwave of a preset frequency is emitted into the microwave resonant cavity, causing the microwave to be reflected within the microwave resonant cavity and accumulating microwave energy.

[0033] When the microwave resonant cavity is filled with electrolyte, the microwave energy causes a strong electric field to be generated at the processing end of the processing tool, thereby forming a discharge. The electrolyte at the discharge location is affected by the high temperature of the discharge to form a corrosive electrolyte, which is then used to perform chemical etching on the workpiece.

[0034] Fourthly, this disclosure provides a method for processing hard and brittle insulating materials, the method comprising:

[0035] A conductive machining tool and a workpiece made of hard and brittle insulating material are placed inside a microwave resonant cavity;

[0036] A microwave of a preset frequency is emitted into the microwave resonant cavity, causing the microwave to be reflected within the microwave resonant cavity and accumulating microwave energy.

[0037] An electrolyte is provided into the microwave resonant cavity so that the processing end of the processing tool and the processing area of ​​the workpiece come into contact with the electrolyte. When the microwave energy causes the processing end of the processing tool to generate a strong electric field and thus form a discharge, the electrolyte at the discharge location is affected by the high temperature of the discharge to form a corrosive electrolyte. The workpiece is then chemically etched using the corrosive electrolyte.

[0038] According to embodiments of this disclosure, the method further includes: connecting the microwave resonant cavity to an electrolyte treatment device so as to filter and / or cool the electrolyte through the electrolyte treatment device;

[0039] When the method includes the step of providing an electrolyte into the microwave resonant cavity, the method further includes: connecting the electrolyte treatment device to a device for providing an electrolyte into the microwave resonant cavity, such that the electrolyte treatment device delivers filtered and / or cooled electrolyte to the device.

[0040] The technical solution provided in this disclosure utilizes the principle of microwave-assisted discharge. A conductive machining tool and a workpiece made of hard, brittle insulating material are placed inside a microwave resonant cavity. Microwaves of a preset frequency are emitted into the microwave resonant cavity, causing reflection and accumulating microwave energy. An electrolyte is then provided into the microwave resonant cavity, bringing the machining end of the machining tool and the machining area of ​​the workpiece into contact with the electrolyte. When the microwave energy generates a strong electric field at the machining end of the machining tool, resulting in a discharge, the electrolyte at the discharge location is affected by the high temperature of the discharge, forming a corrosive electrolyte. This corrosive electrolyte is then used to chemically etch the workpiece, thereby improving machining stability and increasing machining efficiency while ensuring machining accuracy.

[0041] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit this disclosure. Attached Figure Description

[0042] Other features, objects, and advantages of this disclosure will become more apparent from the following detailed description of non-limiting embodiments, taken in conjunction with the accompanying drawings. In the drawings:

[0043] Figure 1 This diagram shows a structural block diagram of an apparatus for processing hard and brittle insulating materials according to an embodiment of the present disclosure;

[0044] Figure 2 This diagram shows a structural block diagram of another apparatus for processing hard and brittle insulating materials according to an embodiment of the present disclosure;

[0045] Figure 3 A structural block diagram of another apparatus for processing hard and brittle insulating materials according to an embodiment of the present disclosure is shown.

[0046] Figure 4 This diagram illustrates the structural connection of a device for microwave-assisted electrical discharge machining of conductive materials according to a specific embodiment 1.

[0047] Figure 5 This diagram illustrates the structural connection of a device for microwave-assisted electrical discharge machining of conductive materials according to a specific embodiment 2.

[0048] Figure 6 This diagram illustrates the structural connection of a device for microwave-assisted electrical discharge machining of conductive materials according to specific embodiment 3.

[0049] Figure 7 This diagram illustrates the structural connection of a device for microwave-assisted electrical discharge machining of conductive materials according to specific embodiment 4.

[0050] Figure 8A flowchart illustrating a method for processing a hard and brittle insulating material according to an embodiment of the present disclosure is shown;

[0051] Figure 9 A flowchart illustrating another method for processing hard and brittle insulating materials according to an embodiment of the present disclosure is shown. Detailed Implementation

[0052] In the following, exemplary embodiments of the present disclosure will be described in detail with reference to the accompanying drawings to enable those skilled in the art to readily implement them. Furthermore, for clarity, portions unrelated to the description of exemplary embodiments have been omitted from the drawings.

[0053] In this disclosure, it should be understood that terms such as “comprising” or “having” are intended to indicate the presence of features, figures, steps, behaviors, components, parts or combinations thereof disclosed in this specification, and are not intended to exclude the possibility of the presence or addition of one or more other features, figures, steps, behaviors, components, parts or combinations thereof.

[0054] It should also be noted that, unless otherwise specified, the embodiments and features described in this disclosure can be combined with each other. This disclosure will now be described in detail with reference to the accompanying drawings and embodiments.

[0055] As mentioned earlier, existing processing methods for hard and brittle insulating materials, namely diamond grinding and electro-discharge machining, each have their own problems. Diamond grinding suffers from low processing efficiency, high processing cost, and a tendency for micro-cracks and chipping to occur on the processed surface. Furthermore, it exhibits low processing accuracy and poor processing stability when machining small structures. Electro-discharge machining of hard and brittle insulating materials is currently a relatively immature technology, suffering from poor discharge stability, low processing efficiency, and difficulty in guaranteeing processing accuracy.

[0056] To further improve processing stability and increase processing efficiency while ensuring processing accuracy, this disclosure provides a method for processing hard and brittle insulating materials. According to an embodiment of this disclosure, a conductive processing tool and a workpiece made of hard and brittle insulating material are placed in a microwave resonant cavity; microwaves of a preset frequency are emitted into the microwave resonant cavity, causing the microwaves to be reflected and accumulating microwave energy within the microwave resonant cavity; then an electrolyte is provided into the microwave resonant cavity, so that the processing end of the processing tool and the processing area of ​​the workpiece come into contact with the electrolyte. When the microwave energy causes a strong electric field to be generated at the processing end of the processing tool, thus forming a discharge, the electrolyte at the discharge location is affected by the high temperature of the discharge to form a corrosive electrolyte. The workpiece is then chemically etched using the corrosive electrolyte.

[0057] This disclosure utilizes the principle of microwave-assisted discharge. The machining tool and workpiece are placed within a microwave resonant cavity. When microwaves of a specific frequency are fed into the cavity, microwave reflection or resonance occurs within the cavity, accumulating microwave energy. When the machining end of the tool (i.e., the part actually close to the workpiece during machining) is affected by the microwave energy, a strong electric field is generated. This causes free electrons on the surface of the machining end to absorb external electromagnetic energy, thus accelerating their movement. When the electric field strength increases to a certain level, a breakdown discharge effect is achieved. If only the electric spark generated by the discharge is used to machine the workpiece, not only is the machining efficiency low due to the relatively small discharge energy, but the discharge conditions are also harsh, and energy controllability is poor. If the input energy is too small, the discharge temperature is insufficient to melt and remove the workpiece material. However, a large input energy reduces machining accuracy and causes severe burn-out of the machining tool, making it unsuitable for direct application in machining hard and brittle insulating materials.

[0058] This disclosure creatively combines microwave-assisted discharge and electrolyte. Specifically, an electrolyte is added into the microwave resonant cavity, so that the processing end of the processing tool and the processing area of ​​the workpiece come into contact with the electrolyte. When a discharge occurs, the electrolyte at the discharge location becomes corrosive due to the high temperature of the discharge. Then, the corrosive electrolyte is used to chemically etch and remove the workpiece. Combined with the relative movement between the processing tool and the workpiece, microstructure processing is performed on the workpiece. Compared to existing diamond grinding methods, this disclosure overcomes the problems of poor processing stability, low processing accuracy, and high processing cost caused by tool deformation or even breakage when grinding hard and brittle insulating materials, as the processing method adopted in this disclosure is non-contact processing. Compared to electrolytic electrical discharge machining and methods that only use electrical discharge generated by microwave discharge to process the workpiece, this disclosure does not use the high temperature of electrical discharge to melt and remove the workpiece material, but rather utilizes the effect of the high temperature of electrical discharge on the electrolyte, making it corrosive at high temperatures, and then using this corrosive electrolyte to chemically etch and remove the workpiece. Therefore, it overcomes the problems of poor discharge stability and low processing efficiency in electrolytic electrical discharge machining and electrical discharge machining that only uses microwave discharge to process hard and brittle insulating materials.

[0059] Figure 1 A structural block diagram of an apparatus for processing hard and brittle insulating materials according to an embodiment of the present disclosure is shown. Figure 1As shown, an apparatus for processing hard and brittle insulating materials includes: a microwave resonant cavity 210, a microwave feed device 220, and a workpiece processing device 230. The microwave resonant cavity 210 is configured to resonate based on the microwaves, contain an electrolyte, and hold a workpiece made of a hard and brittle insulating material. The microwave feed device 220 is connected to the microwave resonant cavity 210 and is used to emit microwaves of a preset frequency into the microwave resonant cavity 210, causing the microwaves to be reflected and accumulate microwave energy within the microwave resonant cavity 210. The workpiece processing device 230 includes a workpiece processing mechanism 231 and a conductive processing tool 232, and is configured to... The workpiece is processed, wherein the workpiece processing mechanism 231 drives the processing tool 232 to move relative to the workpiece. The processing tool 232 is placed inside the microwave resonant cavity 210, and the non-processing end of the processing tool 232 (i.e., the opposite end of the processing end of the processing tool) is connected to the workpiece processing mechanism 231. When the microwave resonant cavity 210 is filled with electrolyte, the microwave energy causes the processing end of the processing tool 232 to generate a strong electric field, thereby forming a discharge. The electrolyte at the discharge location is affected by the high temperature of the discharge to form a corrosive electrolyte, and the workpiece is chemically etched using the corrosive electrolyte.

[0060] Figure 2 A structural block diagram of another apparatus for processing hard and brittle insulating materials according to an embodiment of the present disclosure is shown. Figure 1As shown, an apparatus for processing hard and brittle insulating materials includes: a microwave resonant cavity 210, a microwave feed device 220, a workpiece processing device 230, and an electrolyte supply device 240. The microwave resonant cavity 210 is configured to resonate based on the microwaves and to hold a workpiece made of the hard and brittle insulating material. The microwave feed device 220 is connected to the microwave resonant cavity 210 and is used to emit microwaves of a preset frequency into the microwave resonant cavity 210, causing the microwaves to be reflected and accumulating microwave energy within the microwave resonant cavity 210. The workpiece processing device 230 includes a workpiece processing mechanism 231 and a conductive processing tool 232, and is configured to process the workpiece. The machining tool 232 is used to drive the movement of the machining tool 232 relative to the workpiece. The machining tool 232 is placed inside the microwave resonant cavity 210, and the non-machining end of the machining tool 232 is connected to the workpiece machining mechanism 231. The electrolyte supply device 240 is configured to be connected to the workpiece machining device 230 and to supply electrolyte to the microwave resonant cavity 210 so that the machining end of the machining tool 232 and the machining area of ​​the workpiece come into contact with the electrolyte. When the microwave energy causes the machining end of the machining tool 232 to generate a strong electric field and thus form a discharge, the electrolyte at the discharge position is affected by the high temperature of the discharge to form a corrosive electrolyte. The workpiece is then chemically etched using the corrosive electrolyte.

[0061] Figure 3 A structural block diagram of another apparatus for processing hard and brittle insulating materials according to an embodiment of the present disclosure is shown. Figure 3 As shown, compared to Figure 2 , Figure 3 The electrolyte supply device 240 included in the apparatus shown for processing hard and brittle insulating materials is configured to be connected to the microwave resonant cavity 210. In addition, Figure 2 Other structures, their specific components, and their interconnections in the device shown are related to... Figure 2 The devices shown are all the same, so they will not be described again here.

[0062] The following is combined Figure 2 The specific components of the device shown are described through two specific embodiments in a scenario where an electrolyte supply device is connected to a workpiece processing device.

[0063] Figure 4 The diagram shows a structural connection schematic of a device for microwave-assisted electrical discharge machining of conductive materials in specific embodiment 1.

[0064] like Figure 4As shown, the workpiece processing mechanism 231 includes: a fixture 6, a machine tool guide shaft 7, a machine tool spindle 8, a machine tool column 9, and a machine tool worktable 10; the processing tool 232, the fixture 6, the machine tool guide shaft 7, the machine tool spindle 8, and the machine tool column 9 are sequentially connected and vertically arranged with respect to the machine tool worktable 10; the microwave resonant cavity 210 includes a cavity 11 and an end cap 12. The cavity 11 has no bottom surface, and the cavity 11 and the end cap 12 of the microwave resonant cavity 210 can move relative to each other. The cavity 11 is provided with an openable door 13 for placing the workpiece 14 to fix it on the machine tool worktable 10 and for removing the workpiece 14 from the machine tool worktable 10. The openable door 13 can also be provided on the end cap 12; this embodiment only describes it as being provided on the cavity 11. In addition, a first through hole and a second through hole are provided on the end cap 12 of the microwave resonant cavity 210. The fixture 6 is used to clamp the machining tool 232. The non-machining end of the machining tool 232 is fixed on the fixture 6, and the fixture 6 is fixed on the machine tool guide shaft 7.

[0065] The machine tool guide shaft 7 is fixed to the machine tool spindle 8 through a first through hole provided on the end cover 12 of the microwave resonant cavity 210. The diameter of the first through hole is the same as the diameter of the machine tool guide shaft 7. The machine tool spindle 8 is movably connected to the machine tool column 9. By connecting an automatic feed adjustment device, the machine tool spindle 8 can move vertically reciprocally on the machine tool column 9 (e.g., ...). Figure 4 (as shown in the Z-axis direction), thereby driving the machining tool 232 to reciprocate vertically with the machine tool spindle 8; the device also includes a fixed base 5, the end cover 12 of the microwave resonant cavity 210 is fixed to the machine tool column 9 through the fixed base 5, the cavity 11 is enclosedly connected to the machine tool worktable 10, and the machine tool worktable 10 can perform horizontal movement (e.g., in the Z-axis direction), thereby driving the machining tool 232 to reciprocate vertically with the machine tool spindle 8; the device also includes a fixed base 5, the end cover 12 of the microwave resonant cavity 210 is fixed to the machine tool column 9 through the fixed base 5, the cavity 11 is enclosedly connected to the machine tool worktable 10, and through the connection of an automatic feed adjustment device, the machine tool worktable 10 can perform horizontal movement (e.g., in the Z-axis direction), thereby driving the machining tool Figure 4 (As shown in the X and Y axis directions), thereby causing the workpiece 14 to move horizontally with the machine tool table 10. The vertical reciprocating motion and / or the horizontal motion cause relative motion between the machining tool 232 and the workpiece 14, and the workpiece 14 is machined in combination with the relative motion.

[0066] The microwave feed device 220 includes: a solid-state microwave source 1, a microwave source protection device 2, a dual directional coupler 3, and a power meter 4. The solid-state microwave source 1, the microwave source protection device 2, the dual directional coupler 3, and the processing tool 232 are connected in sequence via a coaxial cable. The dual directional coupler 3 is connected to the power meter 4 via a coaxial cable.

[0067] Microwaves with a preset frequency are generated by a solid-state microwave source 1, transmitted via a coaxial cable through a microwave source protection device 2 and a dual-directional coupler 3 to a machining tool 232, and finally emitted into a microwave resonant cavity 210 through the machining tool 232. Additionally, the dual-directional coupler 3 collects the microwave incident and reflected signals and transmits them to a power meter 4, which measures the microwave incident and reflected power. Specifically, the microwave source protection device 2 includes a circulator or a DC blocker.

[0068] According to an embodiment of this disclosure, the fixture 6 is provided with an adapter interface, and the dual directional coupler 3 and the processing tool 232 are connected through the adapter interface on the fixture 6 via a second through hole provided on the end cap 12 of the microwave resonant cavity 210. The diameter of the second through hole is the same as the diameter of the coaxial cable used for connection, so as to confine the microwave in the microwave resonant cavity 210 and prevent it from dissipating.

[0069] The electrolyte supply device 240 includes a supply mechanism 15 and a supply pipe 16. Specifically, the supply mechanism 15 can supply electrolyte from the supply mechanism 15 to the supply pipe 16 via a hydraulic pump. Figure 4 In the scenario where the electrolyte supply device 240 is connected to the workpiece processing device 230, the electrolyte supply device 240 can be configured in the following two ways:

[0070] Method 1: One end of the liquid supply pipe 16 is close to the machining tool 232 for spraying electrolyte, and the other end is fixed on the fixture 6; wherein, the fixture 6 has a hole inside, one end of which communicates with the internal hole of the machine tool guide shaft 7, and the other end communicates with the internal hole of the liquid supply pipe 16; one end of the liquid supply mechanism 15 is connected to the machine tool guide shaft 7 and communicates with the internal hole of the machine tool guide shaft 7, and the other end is used to inject electrolyte, so that the electrolyte enters the internal hole of the machine tool guide shaft 7 through the liquid supply mechanism 15, and then is directly sprayed onto the machining area of ​​the workpiece 14 and the machining tool 232 through the hole of the fixture 6 and the internal hole of the liquid supply pipe 16, or sprayed into the microwave resonant cavity 210, so that the machining end of the machining tool 232 and the machining area of ​​the workpiece 14 come into contact with the electrolyte; the fixture 6 is provided with a switch mechanism inside for controlling the start and stop of the liquid supply. By setting a switch mechanism inside the fixture 6 to control the start and stop of the liquid supply, compared with the method of directly controlling the start and stop of the liquid supply by switching the hydraulic pump in the liquid supply mechanism 15, the liquid supply can be stopped immediately after the switch structure is closed, thus preventing the electrolyte remaining in the guide shaft and fixture from flowing down the liquid supply pipe under the action of gravity.

[0071] Method 2: One end of the supply pipe 16 is close to the machining tool 232 for spraying electrolyte, and the other end is connected to one end of the supply mechanism 15 through the internal hole of the fixture 6 and the internal hole of the machine tool guide shaft 7, which communicates with the internal hole of the fixture 6. This allows the electrolyte to enter the other end of the supply pipe 16 from the supply mechanism 15 and be directly sprayed onto the machining area of ​​the workpiece 14 and the machining tool 232, or sprayed into the microwave resonant cavity 210, so that the machining end of the machining tool 232 and the machining area of ​​the workpiece 14 come into contact with the electrolyte. In Method 2, the start and stop of the electrolyte supply can be controlled by turning the hydraulic pump in the supply mechanism 15 on or off.

[0072] Specifically, after feeding microwaves of a specific frequency into the microwave resonant cavity, microwave resonance is achieved within its internal space, thereby accumulating microwave energy. When the machining end of the tool is affected by the microwave energy, a strong electric field is generated, leading to a discharge. After adding an electrolyte into the microwave resonant cavity, the machining end of the tool and the machining area of ​​the workpiece come into contact with the electrolyte. The electrolyte at the discharge location becomes corrosive due to the high temperature of the discharge. Then, the corrosive electrolyte is used to chemically etch and remove parts from the workpiece. Combined with the relative movement between the tool and the workpiece, microstructures are machined on the workpiece. This equipment can improve the stability of the machining process while increasing processing efficiency while ensuring machining accuracy.

[0073] According to embodiments of this disclosure, the device may further include: an electrolyte treatment device connected to the microwave resonant cavity for filtering and / or cooling the electrolyte.

[0074] Figure 5 The diagram shows a structural connection of a device for microwave-assisted electrical discharge machining of conductive materials in specific embodiment 2.

[0075] like Figure 5 As shown, in specific embodiment 2, in Figure 4 An electrolyte treatment device 17 is added to the illustrated device. This device is connected to the microwave resonant cavity 210 and is used to filter and / or cool the electrolyte. Furthermore, the electrolyte treatment device 17 is also connected to the electrolyte supply device 15 to deliver the filtered and / or cooled electrolyte to the supply device 15, allowing for the reuse of the used electrolyte.

[0076] In practical implementation, the electrolyte treatment device can be selected to have only a filtration function, or it can have both filtration and cooling functions. The specific choice depends on the specific situation of the equipment and the electrolyte used. As for the specific structure of the electrolyte treatment device, the specific structure of existing electrolyte treatment devices can be adopted, and this disclosure does not limit it in this regard.

[0077] The following is combined Figure 3 The specific components of the device in the scenario where the electrolyte supply device is connected to the microwave resonant cavity are described through two specific embodiments.

[0078] Figure 6 The diagram shows a structural connection schematic of a device for microwave-assisted electrical discharge machining of conductive materials in specific embodiment 3.

[0079] like Figure 6 As shown, the workpiece processing mechanism 231 includes: a fixture 6, a machine tool guide shaft 7, a machine tool spindle 8, a machine tool column 9, and a machine tool worktable 10; the processing tool 232, the fixture 6, the machine tool guide shaft 7, the machine tool spindle 8, and the machine tool column 9 are sequentially connected and vertically arranged with respect to the machine tool worktable 10; the microwave resonant cavity 210 includes a cavity 11 and an end cap 12. The cavity 11 has no bottom surface, and the cavity 11 and the end cap 12 of the microwave resonant cavity 210 can move relative to each other. The cavity 11 is provided with an openable door 13 for placing the workpiece 14 to fix it on the machine tool worktable 10 and for removing the workpiece 14 from the machine tool worktable 10. The openable door 13 can also be provided on the end cap 12; this embodiment only describes it as being provided on the cavity 11. In addition, a first through hole and a second through hole are provided on the end cap 12 of the microwave resonant cavity 210. The fixture 6 is used to clamp the machining tool 232. The non-machining end of the machining tool 232 is fixed on the fixture 6, and the fixture 6 is fixed on the machine tool guide shaft 7.

[0080] The machine tool guide shaft 7 is fixed to the machine tool spindle 8 through a first through hole provided on the end cover 12 of the microwave resonant cavity 210. The diameter of the first through hole is the same as the diameter of the machine tool guide shaft 7. The machine tool spindle 8 is movably connected to the machine tool column 9. By connecting an automatic feed adjustment device, the machine tool spindle 8 can move vertically reciprocally on the machine tool column 9 (e.g., ...). Figure 6 (as shown in the Z-axis direction), thereby driving the machining tool 232 to reciprocate vertically with the machine tool spindle 8; the device also includes a fixed base 5, the end cover 12 of the microwave resonant cavity 210 is fixed to the machine tool column 9 through the fixed base 5, the cavity 11 is enclosedly connected to the machine tool worktable 10, and the machine tool worktable 10 can perform horizontal movement (e.g., in the Z-axis direction), thereby driving the machining tool 232 to reciprocate vertically with the machine tool spindle 8; the device also includes a fixed base 5, the end cover 12 of the microwave resonant cavity 210 is fixed to the machine tool column 9 through the fixed base 5, the cavity 11 is enclosedly connected to the machine tool worktable 10, and through the connection of an automatic feed adjustment device, the machine tool worktable 10 can perform horizontal movement (e.g., in the Z-axis direction), thereby driving the machining tool Figure 6 (As shown in the X and Y axis directions), thereby causing the workpiece 14 to move horizontally with the machine tool table 10. The vertical reciprocating motion and / or the horizontal motion cause relative motion between the machining tool 232 and the workpiece 14, and the workpiece 14 is machined in combination with the relative motion.

[0081] The microwave feed device 220 includes: a solid-state microwave source 1, a microwave source protection device 2, a dual directional coupler 3, and a power meter 4. The solid-state microwave source 1, the microwave source protection device 2, the dual directional coupler 3, and the processing tool 232 are connected in sequence via a coaxial cable. The dual directional coupler 3 is connected to the power meter 4 via a coaxial cable.

[0082] Microwaves with a preset frequency are generated by a solid-state microwave source 1, transmitted via a coaxial cable through a microwave source protection device 2 and a dual-directional coupler 3 to a machining tool 232, and finally emitted into a microwave resonant cavity 210 through the machining tool 232. Additionally, the dual-directional coupler 3 collects the microwave incident and reflected signals and transmits them to a power meter 4, which measures the microwave incident and reflected power. Specifically, the microwave source protection device 2 includes a circulator or a DC blocker.

[0083] According to an embodiment of this disclosure, the fixture 6 is provided with an adapter interface, and the dual directional coupler 3 and the processing tool 232 are connected through the adapter interface on the fixture 6 via a second through hole provided on the end cap 12 of the microwave resonant cavity 210. The diameter of the second through hole is the same as the diameter of the coaxial cable used for connection, so as to confine the microwave in the microwave resonant cavity 210 and prevent it from dissipating.

[0084] The electrolyte supply device 240 includes a supply mechanism 15 and a supply pipe 16. Specifically, the supply mechanism 15 can supply electrolyte from the supply mechanism 15 to the supply pipe 16 via a hydraulic pump. Figure 6 In the scenario where the electrolyte supply device 240 is connected to the microwave resonant cavity 210, the electrolyte supply device 240 is specifically configured as follows:

[0085] One end of the liquid supply pipe 16 enters the microwave resonant cavity through a third through hole provided on the end cap of the microwave resonant cavity 210 for spraying electrolyte. The other end is connected to the liquid supply mechanism 15 for filling electrolyte, so that the electrolyte is sprayed directly from the liquid supply mechanism 15 through the liquid supply pipe 16 onto the processing area of ​​the workpiece 14 and the processing tool 232, or sprayed into the microwave resonant cavity 210 so that the processing end of the processing tool 232 and the processing area of ​​the workpiece 14 come into contact with the electrolyte. In this case, the start and stop of the liquid supply can be controlled by turning the hydraulic pump in the liquid supply mechanism 15 on or off.

[0086] Specifically, the liquid supply pipe can be made of a flexible but not easily deformable material, such as a metal flexible hose. It is made of high-strength materials such as stainless steel, copper, and aluminum. These materials have good plasticity and strength, ensuring that the pipe will not break or deform during bending. Therefore, metal flexible hoses have high flexibility, corrosion resistance, and a suitable appearance, and can be customized according to the needs of different application scenarios to produce pipes of various diameters and bending angles. In this way, the electrolyte can be sprayed onto the processing area of ​​the workpiece 14 and the processing tool 232, or into the microwave resonant cavity 210, by adjusting the liquid supply direction of the liquid supply pipe 16. The diameter of the third through hole is the same as the diameter of the liquid supply pipe 16, so as to confine the microwaves within the microwave resonant cavity 210 and prevent them from dissipating.

[0087] According to embodiments of this disclosure, the device may further include: an electrolyte treatment device connected to the microwave resonant cavity for filtering and / or cooling the electrolyte.

[0088] Figure 7 The diagram shows a structural connection schematic of a device for microwave-assisted electrical discharge machining of conductive materials in specific embodiment 4.

[0089] like Figure 7 As shown, in specific embodiment 4, in Figure 6 An electrolyte treatment device 17 is added to the illustrated device. This device is connected to the microwave resonant cavity 210 and is used to filter and / or cool the electrolyte. Furthermore, the electrolyte treatment device 17 is also connected to the electrolyte supply device 15 to deliver the filtered and / or cooled electrolyte to the supply device 15, allowing for the reuse of the used electrolyte.

[0090] Figure 8 A flowchart illustrating a method for processing a hard and brittle insulating material according to an embodiment of the present disclosure is shown. Figure 8 As shown, the method for processing hard and brittle insulating materials includes the following steps S810 to S830:

[0091] In step S810, a conductive machining tool and a workpiece made of hard and brittle insulating material are placed inside the microwave resonant cavity.

[0092] According to embodiments of this disclosure, the structure of the machining tool can be designed according to the size of the hole or cavity in the workpiece being machined, and its types include forming electrodes and wire electrodes. The forming electrode has the same cross-sectional shape as the surface being machined and is used to machine various irregular holes, micro-holes, and complex cavities; the wire electrode is used to cut workpieces with ruled surfaces. The machining tool must be conductive, and its material can be a metal, such as copper, steel, and superhard alloys, or other materials with a dense structure and high mechanical strength, such as graphite. The forming size or cross-sectional size of the machining tool is determined according to the size of the cavity or hole being machined, and depends on the size of the three-dimensional microstructure.

[0093] According to embodiments of this disclosure, a microwave resonant cavity is a metallic cavity used as a resonant circuit in the microwave band. It is a closed metallic cavity in which the electromagnetic field is confined. Microwave resonant cavities come in many shapes, the most common being rectangular and cylindrical resonant cavities.

[0094] In step S820, microwaves of a preset frequency are emitted into the microwave resonant cavity, causing the microwaves to be reflected and accumulate microwave energy within the microwave resonant cavity.

[0095] The principle of a microwave resonant cavity is based on the resonance phenomenon. When the frequency of the microwave signal equals the natural frequency of the cavity, energy is maximized within the cavity for transmission and storage. Since resonant cavities are typically made of metal, their smooth internal metal walls reflect the microwave signal, causing it to propagate back and forth within the cavity, forming a standing wave. When the wavelength of the microwave signal is an integer multiple of the cavity's length, the standing wave reaches its maximum value, thus causing resonance. The frequency of the microwave signal is related to the shape, geometry, and waveform of the microwave resonant cavity. In practical implementation, a microwave resonant cavity and a matching microwave frequency can be selected according to actual needs.

[0096] According to embodiments of this disclosure, transmitting microwaves of a preset frequency into a microwave resonant cavity can be achieved in the following manner:

[0097] The microwave source, microwave source protection device, dual directional coupler and processing tool are connected in sequence using a coaxial cable. The dual directional coupler is connected to a power meter via a coaxial cable, so that the microwaves generated by the microwave source are emitted into the microwave resonant cavity through the processing tool. The power meter is used to measure the microwave power incident into the microwave resonant cavity.

[0098] According to embodiments of this disclosure, when the microwave source, microwave source protection device, dual directional coupler, and processing tool are connected sequentially, a coaxial cable is used as the transmission medium. Thus, microwaves with a preset frequency, generated by the microwave source, are transmitted to the processing tool via the coaxial cable through the microwave source protection device and dual directional coupler, and are ultimately emitted into the microwave resonant cavity by the processing tool.

[0099] Specifically, a microwave source is a device that generates microwave energy. A microwave source protection device is used to protect the microwave source. A dual directional coupler, connected to a power meter via a coaxial cable, is used to measure the incident and reflected microwave power during the microwave feeding process. The difference between the two yields the actual microwave power fed into the microwave resonant cavity. Additionally, the microwave reflection signal can be used as a feedback signal to adjust the microwave frequency. Therefore, by obtaining the actual fed microwave power and adjusting the microwave frequency emitted by the microwave source using the microwave reflection signal, the microwave frequency matching the microwave resonant cavity can be accurately and efficiently determined, thereby enabling the microwave resonant cavity to resonate more quickly.

[0100] According to embodiments of this disclosure, microwaves are emitted into a microwave resonant cavity through a processing tool. Since the microwaves act directly on the processing tool, the accumulated microwave energy can precisely affect the tiny gap between the processing tool and the workpiece, causing a strong electric field to be generated at the processing end of the processing tool, thereby forming a discharge. The electrolyte at the discharge location is affected by the high temperature of the discharge to form a corrosive electrolyte, and then the workpiece is chemically etched using the corrosive electrolyte.

[0101] In one specific embodiment, the microwave source is a solid-state microwave source. The microwaves generated by this fixed microwave source have a frequency of 2.45 GHz, a power P ranging from 0 ≤ P ≤ 3000 W, a duty cycle DR ranging from 5% ≤ DR ≤ 40%, and a pulse repetition frequency (PRF) ranging from 1 Hz ≤ PRF ≤ 1 MHz. Unlike traditional microwave sources, solid-state microwave sources are a new type of microwave power source that uses solid-state technology to replace traditional mechanical perturbation technology. They mainly consist of a laser, composite glass, and an amplifier, enabling directional control and high-precision positioning. They can generate high-power pulses and wideband modulation signals, and have advantages such as low cost, stable performance, and high safety and reliability.

[0102] In one specific embodiment, the microwave source protection device employs a circulator, which can prevent microwave source damage caused by microwave reflection signals generated during microwave discharge due to impedance mismatch or load changes.

[0103] In another specific embodiment, the microwave source protection device uses a DC blocker. The DC blocker prevents the microwave source from being damaged by high voltage and can effectively filter and block DC current, thereby improving the performance and stability of the fed microwave.

[0104] It should be noted that the method used in implementing this step is not limited to the method described above. As long as the method can achieve the following technical effect, namely: after transmitting microwaves of a preset frequency into the microwave resonant cavity, the microwaves are reflected and accumulate microwave energy within the microwave resonant cavity. Then, when the microwave resonant cavity is filled with electrolyte, the microwave energy causes a strong electric field to be generated at the processing end of the processing tool, thereby forming a discharge. The electrolyte at the discharge location is affected by the high temperature of the discharge to form a corrosive electrolyte, which is within the scope of protection of this disclosure.

[0105] In step S830, when the microwave resonant cavity is filled with electrolyte, the microwave energy causes the processing end of the processing tool to generate a strong electric field, thereby forming a discharge. The electrolyte at the discharge location is affected by the high temperature of the discharge to form a corrosive electrolyte, and the workpiece is chemically etched using the corrosive electrolyte.

[0106] Specifically, the electrolytes in this disclosure include, but are not limited to, alkaline electrolytes, such as sodium hydroxide and potassium hydroxide. At room temperature, alkaline electrolytes do not corrode the workpiece; they only corrode the workpiece when heated at high temperatures.

[0107] When processing a workpiece using the method described in this embodiment, the electrolyte can be pre-loaded into the microwave resonant cavity in a feasible manner. The processing end of the processing tool and the workpiece need to be placed in the electrolyte so that the processing end of the processing tool and the processing area of ​​the workpiece come into contact with the electrolyte. After discharge, the electrolyte at the discharge location is affected by the high temperature of the discharge to form a corrosive electrolyte. This corrosive electrolyte can chemically etch away hard and brittle insulating materials. Combined with the relative movement between the processing tool and the workpiece, microstructure processing can be performed on the hard and brittle insulating materials.

[0108] According to embodiments of this disclosure, the method for processing hard and brittle insulating materials further includes: connecting the microwave resonant cavity to an electrolyte treatment device, wherein the electrolyte treatment device is used to filter and / or cool the electrolyte.

[0109] Figure 9 A flowchart illustrating another method for processing hard and brittle insulating materials according to an embodiment of the present disclosure is shown.

[0110] like Figure 9 As shown, the method for processing hard and brittle insulating materials includes the following steps S910 to S930:

[0111] In step S910, a conductive machining tool and a workpiece made of hard and brittle insulating material are placed inside the microwave resonant cavity.

[0112] In step S920, microwaves of a preset frequency are emitted into the microwave resonant cavity, causing the microwaves to be reflected and accumulate microwave energy within the microwave resonant cavity.

[0113] In step S930, an electrolyte is provided into the microwave resonant cavity so that the processing end of the processing tool and the processing area of ​​the workpiece come into contact with the electrolyte. When the microwave energy causes the processing end of the processing tool to generate a strong electric field and thus form a discharge, the electrolyte at the discharge location is affected by the high temperature of the discharge to form a corrosive electrolyte. The corrosive electrolyte is then used to perform chemical etching on the workpiece.

[0114] When performing the methods described in the embodiments of this disclosure, the workpiece can be processed using the equipment described in the foregoing embodiments, or any equipment capable of performing the method steps described in the embodiments of this disclosure can be used to process the workpiece.

[0115] According to embodiments of this disclosure, the method for processing hard and brittle insulating materials further includes: connecting the microwave resonant cavity to an electrolyte treatment device, wherein the electrolyte treatment device is used to filter and / or cool the electrolyte. In addition, the method for processing hard and brittle insulating materials further includes: connecting the electrolyte treatment device to a device for supplying electrolyte to the microwave resonant cavity, so that the electrolyte treatment device delivers the filtered and / or cooled electrolyte to the device, thereby enabling the reuse of the used electrolyte.

[0116] The technical solution disclosed herein utilizes the principle of microwave-assisted discharge. A conductive machining tool and a workpiece made of hard, brittle insulating material are placed within a microwave resonant cavity. Microwaves of a preset frequency are emitted into the microwave resonant cavity, causing reflection and accumulating microwave energy. An electrolyte is then provided into the microwave resonant cavity, bringing the machining end of the machining tool and the machining area of ​​the workpiece into contact with the electrolyte. When the microwave energy generates a strong electric field at the machining end of the machining tool, resulting in a discharge, the electrolyte at the discharge location is affected by the high temperature of the discharge, forming a corrosive electrolyte. This corrosive electrolyte is then used to chemically etch the workpiece, thereby improving machining stability and increasing machining efficiency while maintaining machining accuracy.

[0117] The above description is merely a preferred embodiment of this disclosure and an explanation of the technical principles employed. Those skilled in the art should understand that the scope of the invention involved in this disclosure is not limited to technical solutions formed by specific combinations of the above-described technical features, but should also cover other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents without departing from the inventive concept. For example, technical solutions formed by substituting the above-described features with (but not limited to) technical features disclosed in this disclosure that have similar functions.

Claims

1. An apparatus for work hardening a brittle insulating material, characterized by, The device comprises a microwave feeding device, a microwave resonance cavity and a workpiece processing device, wherein, the microwave feeding device is arranged to be connected with the microwave resonance cavity, and is used to emit microwaves of a preset frequency into the microwave resonance cavity, so that the microwaves are reflected in the microwave resonance cavity to accumulate microwave energy; the microwave resonance cavity is arranged to form resonance based on the microwaves, contain electrolyte and place a workpiece made of hard and brittle insulating material; the workpiece processing device comprises a workpiece processing mechanism and a processing tool with electrical conductivity, and is arranged to process the workpiece, wherein the workpiece processing mechanism is used to drive the processing tool to move relative to the workpiece, the processing tool is placed in the microwave resonance cavity, and a non-processing end of the processing tool is connected with the workpiece processing mechanism; when the microwave resonance cavity contains electrolyte, the microwave energy causes the processing end of the processing tool to generate a strong electric field and then discharge, and electrolyte at the discharge position is affected by high temperature of the discharge to form electrolyte with corrosion, and the workpiece is chemically etched and processed by using the electrolyte with corrosion.

2. An apparatus for work hardening a brittle insulating material, characterized by The device comprises a microwave feeding device, a microwave resonance cavity, a workpiece processing device and an electrolyte providing device, wherein, the microwave feeding device is arranged to be connected with the microwave resonance cavity, and is used to emit microwaves of a preset frequency into the microwave resonance cavity, so that the microwaves are reflected in the microwave resonance cavity to accumulate microwave energy; the microwave resonance cavity is arranged to form resonance based on the microwaves and place a workpiece made of hard and brittle insulating material; the workpiece processing device comprises a workpiece processing mechanism and a processing tool with electrical conductivity, and is arranged to process the workpiece, wherein the workpiece processing mechanism is used to drive the processing tool to move relative to the workpiece, the processing tool is placed in the microwave resonance cavity, and a non-processing end of the processing tool is connected with the workpiece processing mechanism; the electrolyte providing device is arranged to be connected with the workpiece processing device or the microwave resonance cavity, and is used to provide electrolyte into the microwave resonance cavity, so that the processing end of the processing tool and a processing region of the workpiece contact the electrolyte, when the microwave energy causes the processing end of the processing tool to generate a strong electric field and then discharge, electrolyte at the discharge position is affected by high temperature of the discharge to form electrolyte with corrosion, and the workpiece is chemically etched and processed by using the electrolyte with corrosion.

3. The apparatus of claim 1 or 2, wherein Wherein, the workpiece processing mechanism comprises a clamp, a machine tool guide shaft, a machine tool main shaft, a machine tool column and a machine tool workbench; the processing tool, the clamp, the machine tool guide shaft, the machine tool main shaft and the machine tool column are sequentially connected and arranged perpendicularly to the machine tool workbench; the microwave resonance cavity comprises an end cover and a cavity body, the cavity body has no bottom surface, and the end cover and the cavity body can move relative to each other; a door that can be opened and closed is arranged on the end cover or the cavity body, and is used to put the workpiece in or take the workpiece out of the machine tool workbench. The non-processing end of the processing tool is fixed on the clamp; the clamp is fixed on the machine tool guide shaft; the machine tool guide shaft is fixed on the machine tool main shaft through a first through hole provided on an end cover of the microwave resonant cavity, and the machine tool main shaft is movably connected with the machine tool column; the end cover is fixed on the machine tool column through a fixing seat, and the cavity is closed connected to the machine tool workbench; The machine tool main shaft is arranged to vertically reciprocate on the machine tool column by connecting an automatic feeding adjusting device, thereby driving the processing tool to vertically reciprocate with the machine tool main shaft; The machine tool workbench is arranged to move horizontally by connecting the automatic feeding adjusting device, thereby driving the workpiece to move horizontally with the machine tool workbench, so as to make the processing tool and the workpiece relatively move by the vertical reciprocating motion and / or the horizontal motion, so as to process the workpiece in combination with the relative motion.

4. The apparatus of claim 3, wherein, The microwave feeding device comprises a microwave source, a microwave source protection device, a double directional coupler and a power meter, the microwave source, the microwave source protection device, the double directional coupler and the processing tool are sequentially connected through coaxial cables, and the double directional coupler is connected with the power meter through a coaxial cable; wherein the power meter is used for measuring the microwave power incident into the microwave resonant cavity, and the microwave source protection device comprises a circulator or a direct current isolator. The microwave feeding device comprises a microwave source, a microwave source protection device, a double directional coupler and a power meter, the microwave source, the microwave source protection device, the double directional coupler and the processing tool are sequentially connected through coaxial cables, and the double directional coupler is connected with the power meter through a coaxial cable; wherein the power meter is used for measuring the microwave power incident into the microwave resonant cavity, and the microwave source protection device comprises a circulator or a direct current isolator.

5. The apparatus of claim 4, wherein, When the double directional coupler is connected with the processing tool, the clamp is further provided with a transition interface, and the double directional coupler and the processing tool are connected through the transition interface on the clamp via a second through hole provided on an end cover of the microwave resonant cavity. When the equipment comprises an electrolyte providing device, the electrolyte providing device comprises a liquid supply mechanism and a liquid supply pipe, 6. The apparatus of claim 3, wherein, When the electrolyte providing device is connected with the workpiece processing device, the electrolyte providing device is specifically arranged as follows: One end of the liquid supply pipe is close to the processing tool and is used for spraying electrolyte, and the other end is fixed on the clamp; wherein the clamp has a hole, one end of the hole of the clamp is communicated with an inner hole of the machine tool guide shaft, and the other end of the hole of the clamp is communicated with an inner hole of the liquid supply pipe, one end of the liquid supply mechanism is connected with the machine tool guide shaft and is communicated with the inner hole of the machine tool guide shaft, and the other end of the liquid supply mechanism is used for filling electrolyte, so that the electrolyte enters the inner hole of the machine tool guide shaft from the liquid supply mechanism, and then is directly sprayed to the processing area of the workpiece and the processing tool via the hole of the clamp and the inner hole of the liquid supply pipe, or is sprayed into the microwave resonant cavity, so that the processing end of the processing tool and the processing area of the workpiece contact the electrolyte; a switch mechanism is arranged in the clamp and is used for controlling the start and stop of electrolyte supply. ​ ​ Alternatively, one end of the liquid supply pipe is arranged close to the machining tool for spraying electrolyte, and the other end is connected to one end of the liquid supply mechanism through the inner hole of the machine tool guide shaft and the inner hole of the clamp, so that the electrolyte enters the other end of the liquid supply pipe from the liquid supply mechanism and is directly sprayed from one end of the liquid supply pipe to the machining area of the workpiece and the machining tool, or is sprayed into the microwave resonant cavity, so that the machining end of the machining tool and the machining area of the workpiece are in contact with the electrolyte. When the electrolyte supply device is connected to the microwave resonant cavity, it is specifically arranged as follows: One end of the liquid supply pipe enters the microwave resonant cavity through the third through hole arranged on the end cover of the microwave resonant cavity for spraying electrolyte, and the other end is connected to the liquid supply mechanism for filling electrolyte, so that the electrolyte is directly sprayed from the liquid supply mechanism to the machining area of the workpiece and the machining tool through the liquid supply pipe, or is sprayed into the microwave resonant cavity, so that the machining end of the machining tool and the machining area of the workpiece are in contact with the electrolyte.

7. The apparatus of claim 1 or 2, wherein, The device further comprises an electrolyte treatment device connected to the microwave resonant cavity for filtering and / or cooling the electrolyte; when the device comprises an electrolyte supply device, the electrolyte treatment device is also connected to the electrolyte supply device for sending the filtered and / or cooled electrolyte to the electrolyte supply device.

8. A method for working a brittle insulating material, characterized in that, The method comprises: arranging a machining tool with electrical conductivity and a workpiece made of hard and brittle insulating material in a microwave resonant cavity; emitting microwaves of a preset frequency into the microwave resonant cavity to make the microwaves reflect in the microwave resonant cavity to accumulate microwave energy; when the microwave resonant cavity contains electrolyte, the microwave energy causes the machining end of the machining tool to generate a strong electric field and then discharge, and the electrolyte at the discharge position is affected by the high temperature of the discharge to form electrolyte with corrosion, and the workpiece is chemically etched and machined by using the electrolyte with corrosion.

9. A method for working a brittle insulating material, characterized in that, The method comprises: arranging a machining tool with electrical conductivity and a workpiece made of hard and brittle insulating material in a microwave resonant cavity; emitting microwaves of a preset frequency into the microwave resonant cavity to make the microwaves reflect in the microwave resonant cavity to accumulate microwave energy; providing electrolyte into the microwave resonant cavity so that the machining end of the machining tool and the machining area of the workpiece are in contact with the electrolyte, and when the microwave energy causes the machining end of the machining tool to generate a strong electric field and then discharge, the electrolyte at the discharge position is affected by the high temperature of the discharge to form electrolyte with corrosion, and the workpiece is chemically etched and machined by using the electrolyte with corrosion.

10. The method according to claim 8 or 9, characterized in that, The method further comprises connecting the microwave resonant cavity to an electrolyte treatment device to filter and / or cool the electrolyte by the electrolyte treatment device. When the method comprises the step of providing electrolyte into the microwave resonance cavity, the method further comprises connecting the electrolyte treatment device to an electrolyte providing device for providing electrolyte into the microwave resonance cavity, so that the electrolyte treatment device sends filtered and / or cooled electrolyte to the electrolyte providing device.

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