Multi-stage filtering device for stripping solution production

Abstract

The application relates to the technical field of stripping liquid production equipment, in particular to a multi-stage filtering device for stripping liquid production, which comprises a filtering device, a descaling mechanism is arranged in the filtering device, the descaling mechanism is composed of a power group, a transmission group and a cleaning assembly, the cleaning assembly is installed in the filtering device and is in transmission connection between the power group and the transmission group, a water supply structure matched with the cleaning assembly is fixedly installed on both sides of the filtering device, compared with the prior art, the water supply structure and the descaling mechanism are matched with each other, the bottom and the inner wall of the filtering device can be subjected to descaling treatment under the action of the cleaning assembly, the phenomenon that the staff cannot conveniently process due to the complication of the internal structure of the equipment is avoided, the dead angle of the filtering device can be better cleaned, and the working strength of the staff is reduced to a certain extent.

Description

Technical Field

[0001] This invention relates to the field of stripping fluid production equipment technology, specifically a multi-stage filtration device for stripping fluid production. Background Technology

[0002] Stripping fluid is mainly used for removing photoresist from glass in semiconductor and display manufacturing processes. In typical semiconductor and display manufacturing processes, photoresist needs to be coated on the surface of the material to be processed. After exposure, development, and etching processes, the mask pattern is transferred to the material to be processed. Then, stripping fluid is used to remove the residual photoresist without corroding other substrates. Therefore, stripping fluid plays a crucial role.

[0003] In the production process of stripping fluid, filtration is a crucial step. During the long-term production process, stripping fluid production equipment will accumulate a lot of dirt and residue on its inner walls. The dirt on the inner walls is usually cleaned manually using tools. However, the internal structure of the stripping fluid production equipment is relatively complex, and cleaning the hard-to-reach areas is not convenient. Therefore, further improvements are needed. Summary of the Invention

[0004] The purpose of this invention is to provide a multi-stage filtration device for the production of stripping fluid, so as to solve the problems mentioned in the background art.

[0005] To solve the above-mentioned technical problems, the present invention provides the following technical solution:

[0006] A multi-stage filtration device for producing stripping fluid, the multi-stage filtration device for producing stripping fluid comprising:

[0007] The filter equipment has a descaling mechanism inside, which consists of a power unit, a transmission unit and a cleaning component. The cleaning component is installed inside the filter equipment and is connected to the power unit and the transmission unit for descaling the bottom and inner wall of the filter equipment.

[0008] A water supply structure is used in conjunction with the cleaning components. The water supply structure is fixedly installed on both the inside and outside of the filtration equipment to supply water to the cleaning components.

[0009] As a further aspect of the present invention: the power unit includes:

[0010] A driving component is fixedly installed inside the filtration device. One end of the driving component is connected to a driving shaft, and the other end of the driving shaft located inside the filtration device is fixedly connected to a driving wheel.

[0011] The mounting plate is rotatably connected inside the filtration device and is connected to the drive wheel via a synchronous belt drive.

[0012] As a further aspect of the present invention: the cleaning component includes:

[0013] A fixing ring is fixedly installed inside the top of the filter device. The inner and outer ends of the fixing ring are respectively provided with an inner annular groove and an outer annular groove, and the bottom of the fixing ring is provided with a fixing gear.

[0014] Planetary gears are rotatably connected to one side of the mounting plate and mesh with a fixed gear. Several planetary gears are provided and distributed in a circumferential array about the mounting plate.

[0015] A connecting rod is located in the keyway in the middle of the planetary gear and slides therewith. One end of the connecting rod is provided with a connecting part 1. The vertical end of the connecting part 1 is rotatably engaged with the connecting rod, and the horizontal end of the connecting part 1 is slidably engaged with the outer annular groove. A roller brush is provided at the bottom of the connecting rod and slides therewith with the inner wall of the filter equipment.

[0016] A connecting shaft is rotatably connected inside the filtration device and has a telescopic structure. A second connecting part is provided on the side of the connecting shaft, and the second connecting part slides into the inner annular groove.

[0017] As a further aspect of the present invention, a slot is provided on one side of the planetary gear.

[0018] As a further aspect of the present invention: the transmission assembly includes:

[0019] A first transmission wheel is fixedly connected to one end of the drive shaft located outside the filtration device.

[0020] The second transmission wheel is fixedly connected to one end of the connecting shaft located outside the filtration device and is connected to the first transmission wheel via a transmission belt.

[0021] As a further aspect of the present invention: the water supply structure includes:

[0022] A water storage tank is fixedly installed on the top of the outer end of the filtration equipment. A mounting groove is provided in the middle of the fixing ring, and a connecting water pipe connected to the water storage tank is fixedly installed in the mounting groove.

[0023] As a further aspect of the present invention: a foot is provided at one end of the filter device located on the ground, and the foot is evenly distributed around the bottom of the filter device.

[0024] Compared with the prior art, the beneficial effects of the present invention are:

[0025] Compared with existing technologies, the descaling mechanism and water supply structure work together to descale the bottom and inner walls of the filter equipment under the action of the cleaning components. This avoids the inconvenience caused by the complexity of the internal structure of the equipment for the staff. It can also effectively clean the dead corners of the filter equipment and reduce the workload of the staff to a certain extent. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of the multi-stage filtration device for producing stripping fluid according to the present invention.

[0027] Figure 2 This is a schematic diagram of the internal structure of the filtration equipment in the multi-stage filtration device for producing stripping fluid according to the present invention.

[0028] Figure 3 This is a three-dimensional structural diagram of the fixing ring in the multi-stage filtration device for producing stripping fluid according to the present invention.

[0029] Figure 4 This is a partial structural diagram of the connecting shaft in the multi-stage filtration device for producing stripping fluid according to the present invention.

[0030] Figure 5 This is a planar structural diagram of the fixing ring in the multi-stage filtration device for producing stripping fluid according to the present invention.

[0031] Figure 6 This is a first structural schematic diagram of the cleaning component in the multi-stage filtration device for producing stripping fluid according to the present invention.

[0032] Figure 7 This is a second structural schematic diagram of the cleaning component in the multi-stage filtration device for producing stripping fluid according to the present invention.

[0033] Figure 8 This invention relates to a multi-stage filtration device for producing stripping fluid. Figure 7 A magnified schematic diagram of the structure at point A in the middle.

[0034] In the diagram: 1-Filtering equipment, 11-Foot base, 2-Water supply structure, 21-Water storage tank, 22-Connecting water pipe, 23-Mounting groove, 3-Descaling mechanism, 31-Power unit, 311-Drive shaft, 312-Drive component, 313-Drive wheel, 314-Mounting plate, 315-Synchronous belt, 32-Transmission unit, 321-Transmission wheel one, 322-Transmission belt, 323-Transmission wheel two, 34-Cleaning component, 341-Fixing ring, 342-Outer annular groove, 343-Fixing gear, 344-Connecting rod, 345-Connecting part one, 346-Connecting shaft, 347-Blade, 348-Roller brush, 349-Inner annular groove, 3410-Connecting part two, 3411-Planetary gear, 3412-Groove. Detailed Implementation

[0035] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0036] Please see Figures 1-8 This embodiment provides a multi-stage filtration device for producing stripping fluid, the multi-stage filtration device for producing stripping fluid includes:

[0037] The filter device 1 is equipped with a descaling mechanism 3, which consists of a power unit 31, a transmission unit 32 and a cleaning component 34. The cleaning component 34 is installed inside the filter device 1 and is connected to the power unit 31 and the transmission unit 32 for descaling the bottom and inner wall of the filter device 1.

[0038] A water supply structure 2 is used in conjunction with the cleaning component 34. The water supply structure 2 is fixedly installed on both the inner and outer sides of the filter equipment 1 and is used to supply water to the cleaning component 34.

[0039] Compared with existing technologies, through the cooperation between the descaling mechanism 3 and the water supply structure 2, the bottom and inner wall of the filter equipment 1 can be descaled under the action of the cleaning component 34. This avoids the inconvenience caused to the staff due to the complexity of the internal structure of the equipment. It can also effectively clean the dead corners of the filter equipment 1, and reduce the workload of the staff to a certain extent.

[0040] Please see Figures 1-2 In one embodiment, the power unit 31 includes:

[0041] A drive component 312 is fixedly installed inside the filter device 1. One end of the drive component 312 is connected to a drive shaft 311, and the end of the drive shaft 311 located inside the filter device 1 is fixedly connected to a drive wheel 313.

[0042] Mounting plate 314 is rotatably connected to the inside of the filter device 1 and is connected to the drive wheel 313 via a synchronous belt 315.

[0043] Please see Figures 2-8 In one embodiment, the cleaning component 34 includes:

[0044] A fixing ring 341 is fixedly installed inside the top of the filter device 1. The inner and outer ends of the fixing ring 341 are respectively provided with an inner annular groove 349 and an outer annular groove 342. A fixing gear 343 is provided at the bottom of the fixing ring 341.

[0045] Planetary gear 3411 is rotatably connected to one side of mounting disk 314 and meshes with fixed gear 343 for transmission. Several planetary gears 3411 are provided and are distributed in a circumferential array about mounting disk 314.

[0046] A connecting rod 344 is located in the keyway in the middle of the planetary gear 3411 and slides therewith. One end of the connecting rod 344 is provided with a connecting part 345. The vertical end of the connecting part 345 is rotatably engaged with the connecting rod 344, and the horizontal end of the connecting part 345 is slidably engaged with the outer annular groove 342. A roller brush 348 is provided at the bottom of the connecting rod 344 and slides therewith with the inner wall of the filter device 1.

[0047] The connecting shaft 346 is rotatably connected to the inside of the filter device 1 and is a telescopic structure. The side of the connecting shaft 346 is provided with a second connecting part 3410, which is slidably engaged with the inner annular groove 349.

[0048] It is worth noting that the heads of the first connecting part 345 and the second connecting part 3410 have the same inner diameter as the inner annular groove 349 and the outer annular groove 342, respectively, which makes the first connecting part 345 and the second connecting part 3410 slide more smoothly along the paths of the inner annular groove 349 and the outer annular groove 342, respectively.

[0049] As the filter 1 filters the stripping liquid for an extended period, a layer of dirt forms on the bottom and inner wall of the filter 1, which is difficult to remove and reduces the filtration efficiency. To avoid the inconvenience of manual cleaning, the drive component 312 inside the housing is activated. The drive component 312 then drives the drive wheel 313 and the transmission wheel 321 to rotate. Since the drive wheel 313 is connected to the mounting plate 314 via a synchronous belt 315, it can further drive the entire mounting plate 314 to rotate around the inside of the filter 1. Because the planetary gear 3411 on one side of the mounting plate 314 meshes with the fixed gear 343, the rotation of the mounting plate 314 enables the planetary gear 3411 to rotate. While revolving around the mounting plate 314, the connecting rod 344, which is slidably fitted with it, rotates around its own circumference, thereby causing the roller brush 348 at one end of the connecting rod 344 to rotate as well. As the connecting rod 344 revolves and rotates synchronously, due to the sliding fit between the connecting part 345 and the outer annular groove 342 on the outside of the fixing ring 341, the connecting part slides along the path of the outer annular groove 342 during the revolution of the connecting rod 344. Finally, the connecting rod 344 slides vertically along the groove 3412 in the middle of the planetary gear 3411. Through the revolution, rotation and vertical sliding of the roller brush 348, the inner wall of the filter equipment 1 can be cleaned, and dirt in a certain range at the bottom of the filter equipment 1 can be removed.

[0050] Please see Figures 1-2 In one embodiment, the transmission assembly 32 includes:

[0051] A transmission wheel 321 is fixedly connected to one end of the drive shaft 311 located outside the filter device 1.

[0052] The second transmission wheel 323 is fixedly connected to one end of the connecting shaft 346 located outside the filter device 1 and is connected to the first transmission wheel 321 via a transmission belt 322.

[0053] Please see Figure 2 , Figure 3 and Figure 5 In one embodiment, the water supply structure 2 includes:

[0054] Water storage tank 21 is fixedly installed on the top of the outer end of the filter device 1. The middle part of the fixing ring 341 is provided with an installation groove 23, and a connecting water pipe 22 connected to the water storage tank 21 is fixedly installed in the installation groove 23.

[0055] Please see Figures 1-2 In one embodiment, a foot 11 is provided at one end of the filter device 1 located on the ground. The foot 11 is evenly distributed around the bottom of the filter device 1, which can make the filter device 1 stand stably.

[0056] Since the transmission wheel 321 and the transmission wheel 323 are connected by the transmission belt 322, the connecting shaft 346 can be driven to rotate. The connecting shaft 346 then drives the blades 347 at the bottom of the filter device 1 to rotate. Since the connecting part 3410 on the side of the connecting shaft 346 forms a sliding fit with the inner annular groove 349 on the inner side of the fixing ring 341, the rotation of the connecting shaft 346 can drive the blades 347 to rotate. At the same time, the connecting shaft 346 can achieve extension and retraction adjustment under the action of the connecting part 3410. Through the lifting and rotation adjustment of the blades 347, when the water pump injects water from the water tank 21 into the filter device 1 through the connecting water pipe 22, the downward force of the blades 347 and the centrifugal force generated by the rotation can effectively stir and clean the bottom of the filter device 1. Through the action of the roller brush 348, the inner wall with a certain height at the bottom of the filter device 1 can be cleaned. Finally, the cleaned wastewater is discharged from the drain port, completing the descaling of the filter device 1.

[0057] It is worth noting that, in addition to the above technical solutions, the present invention also provides another embodiment, which differs from the above embodiments in that: a slot 3412 is provided on one side of the planetary gear 3411, which can make the planetary gear 3411 lighter without reducing its strength.

[0058] The working principle of this invention is:

[0059] In this embodiment, as the filter device 1 filters the stripping liquid for a long time, a layer of dirt will form on the bottom and inner wall of the filter device 1, which is difficult to remove and will also reduce the filtration effect of the filter device 1. To avoid the inconvenience of manual cleaning, the drive component 312 inside the housing is activated. The drive component 312 then drives the drive wheel 313 and the transmission wheel 321 to rotate. Since the drive wheel 313 is connected to the mounting plate 314 through the synchronous belt 315, it can further drive the entire mounting plate 314 to rotate around the inside of the filter device 1. Since the planetary gear 3411 on one side of the mounting plate 314 and the... The meshing transmission between the fixed gears 343, through the rotation of the mounting plate 314, enables the planetary gear 3411 to revolve around the mounting plate 314, while simultaneously driving the slidingly fitted connecting rod 344 to rotate around its own circumference. This, in turn, causes the roller brush 348 at one end of the connecting rod 344 to rotate accordingly. As the connecting rod 344 revolves and rotates synchronously, due to the sliding fit between the connecting part 345 and the outer annular groove 342 on the outer side of the fixed ring 341, the connecting part slides along the path of the outer annular groove 342 during the revolution of the connecting rod 344. Ultimately, this causes the connecting rod 344 to slide along the groove 3412 in the middle of the planetary gear 3411. Vertical sliding, through the revolution and rotation of the roller brush 348 and its vertical sliding, can clean the inner wall of the filter device 1, removing dirt from a certain area at the bottom of the filter device 1. Since the first transmission wheel 321 and the second transmission wheel 323 are connected by a transmission belt 322, they can further drive the connecting shaft 346 to rotate. The connecting shaft 346 then drives the blades 347 at the bottom of the filter device 1 to rotate accordingly. Because the second connecting part 3410 on the side of the connecting shaft 346 forms a sliding fit with the inner annular groove 349 inside the fixing ring 341, the rotation of the connecting shaft 346 allows the connecting shaft 346 to rotate. While driving the blades 347 to rotate, the connecting shaft 346 achieves telescopic adjustment under the action of the connecting part 3410. Through the lifting and rotation adjustment of the blades 347, when the water pump injects water from the water storage tank 21 into the filter equipment 1 through the connecting water pipe 22, the downward force of the blades 347 and the centrifugal force generated by the rotation can effectively stir and clean the bottom of the filter equipment 1. Through the action of the roller brush 348, the inner wall with a certain height at the bottom of the filter equipment 1 can be cleaned. Finally, the cleaned wastewater is discharged from the drain port, completing the descaling of the inside of the filter equipment 1.

[0060] Of course, those skilled in the art will recognize that the present invention is not limited to the details of the exemplary embodiments described above, but also includes the same or similar structures that can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0061] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0062] The technologies, shapes, and structures not described in detail in this invention are all known technologies.

Claims

1. A multi-stage filtration device for producing stripping fluid, characterized in that: The multi-stage filtration device for producing the stripping fluid includes: The filter equipment has a descaling mechanism inside, which consists of a power unit, a transmission unit and a cleaning component. The cleaning component is installed inside the filter equipment and is connected to the power unit and the transmission unit for descaling the bottom and inner wall of the filter equipment. A water supply structure that works in conjunction with the cleaning components is fixedly installed on both the inside and outside sides of the filtration equipment and is used to supply water to the cleaning components. The power unit includes: A driving component is fixedly installed inside the filtration device. One end of the driving component is connected to a driving shaft, and the other end of the driving shaft located inside the filtration device is fixedly connected to a driving wheel. The mounting plate is rotatably connected inside the filtration device and is connected to the drive wheel via a synchronous belt drive. The cleaning components include: A fixing ring is fixedly installed inside the top of the filter device. The inner and outer ends of the fixing ring are respectively provided with an inner annular groove and an outer annular groove, and the bottom of the fixing ring is provided with a fixing gear. Planetary gears are rotatably connected to one side of the mounting plate and mesh with a fixed gear. Several planetary gears are provided and distributed in a circumferential array about the mounting plate. A connecting rod is located in the keyway in the middle of the planetary gear and slides therewith. One end of the connecting rod is provided with a connecting part 1. The vertical end of the connecting part 1 is rotatably engaged with the connecting rod, and the horizontal end of the connecting part 1 is slidably engaged with the outer annular groove. A roller brush is provided at the bottom of the connecting rod and slides therewith with the inner wall of the filter equipment. A connecting shaft is rotatably connected inside the filter equipment and has a telescopic structure. A second connecting part is provided on the side of the connecting shaft, and the second connecting part slides in fit with the inner annular groove. When the connecting shaft rotates, it drives the blades at the bottom of the filter equipment to rotate accordingly. The transmission assembly includes: A first transmission wheel is fixedly connected to one end of the drive shaft located outside the filtration device. The second transmission wheel is fixedly connected to one end of the connecting shaft located outside the filtration device and is connected to the first transmission wheel via a transmission belt.

2. The multi-stage filtration device for producing stripping fluid according to claim 1, characterized in that: A slot is provided on one side of the planetary gear.

3. The multi-stage filtration device for producing stripping fluid according to claim 1, characterized in that: The water supply structure includes: A water storage tank is fixedly installed on the top of the outer end of the filtration equipment. A mounting groove is provided in the middle of the fixing ring, and a connecting water pipe connected to the water storage tank is fixedly installed in the mounting groove.

4. The multi-stage filtration device for producing stripping fluid according to claim 1, characterized in that: The filter device is equipped with feet on one end of its exterior facing the ground, and the feet are evenly distributed around the bottom of the filter device.

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