ATE probe missing detection method

Abstract

The application relates to the technical field of semiconductor precision instruments, and relates to an ATE probe missing loading detection method, which is realized on an ATE probe missing loading detection device and sequentially executes the following steps: step a, needle tube loading into a needle tube jig plate a; step b, connecting a conveying mechanism; step c, jig block moving out; step d, jig block detection; step e, missing removal; step f, jig block moving in; and step g, detection completion. The method can realize that the jig blocks in the outer frame of the left jig plate are moved into the empty outer frame on the right side by the conveying mechanism, in the moving process, the jig blocks without loading parts are removed by a removal mechanism, the jig blocks in the empty outer frame on the right side are all jig blocks loaded with parts, the loading rate of the jig plate on the right side reaches 100 percent, manual selection of workers is avoided, and the finished product rate of pre-assembly is improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor precision instrument technology, specifically a method for detecting missing ATE probes. Background Technology

[0002] ATE (Automatic Test Equipment) refers to IC testing equipment in a broad sense. It combines software and hardware, typically consisting of a large number of testing functions controlled by a computer to test the functionality of semiconductor chips. Testing equipment requires a large number of ATE probes, which places new demands on the production of ATE probes.

[0003] The ATE probe mainly consists of four parts: the needle tube, the needle tip, the spring, and the needle tail. During the production process, these four parts need to be pre-assembled. The needle tail, the spring, and the needle tip are inserted into the needle tube in sequence. After the pre-assembly is completed, rivet pits are made on the outer wall of the needle tube to complete the assembly.

[0004] To improve pre-assembly efficiency, jig plates are typically used for batch assembly, such as... Figure 12 As shown in the figure, the needle falls into the drain hole of the jig plate. By setting the drain hole on the jig plate, since the diameter of the drain hole is smaller than the flange on the outer wall of one end of the needle, the lower end of the needle can easily fall into the drain hole. Therefore, when multiple needles are scattered in the jig plate, after shaking, most of the needles can fall into the drain hole in the correct direction, which facilitates subsequent batch pre-assembly.

[0005] However, it cannot be guaranteed that all parts such as syringes will fall into the drain hole. After shaking, manual inspection is still required to pick out the parts that have not fallen into the drain hole and put the parts into the empty drain hole. Manual inspection is inefficient and has a high error rate, which reduces the yield of pre-assembled products. Summary of the Invention

[0006] To address the shortcomings of existing technologies that require manual inspection during the pre-assembly of ATE probes, this invention provides an ATE probe missing component detection device, its fixture board, and a detection method. This device enables automatic missing component detection with high efficiency and accuracy, thereby improving the yield of pre-assembled products.

[0007] To achieve the above objectives, the present invention provides the following technical solution: A method for detecting missing ATE probes includes the following steps: Step a: Insert the needle tubes into the needle tube fixture plate a; insert several needle tubes into the needle tube fixture plate, shake the needle tube fixture plate a, and let the needle tubes fall into the holes of the needle tube fixture plate a. Step b, connect to the conveying mechanism; open one side of the outer frame of the needle fixture plate a in step a and connect it to the left side of the conveying mechanism, and open the outer frame side of the other needle fixture plate a that does not contain the fixture block and connect it to the right side of the conveying mechanism. Step c, jig block removed; the jig block inside the left outer frame is sent into the guide frame via the conveyor belt of the conveyor mechanism; Step d, jig block detection; determine whether a needle is inserted inside the jig block on the guide frame by using the camera of the removal mechanism; Step e, Removal of missing parts; Remove the jig block without needles from the guide frame using a pusher plate; Step f, jig block is moved in; the jig block containing the syringe is sent into the empty outer frame on the right side by a conveyor belt; Step g, inspection complete; remove the empty outer frame after it is filled with fixture blocks.

[0008] Furthermore, the method is applied to an ATE probe missing detection device, which includes a fixture plate, a conveying mechanism, and a removal mechanism.

[0009] Compared with the prior art, the present invention provides an ATE probe missing component detection device, its fixture plate, and the detection method, which have the following beneficial effects: First, the present invention provides an ATE probe missing component detection device, comprising: a fixture plate, a conveying mechanism, and a removal mechanism. The fixture plate includes: an outer frame and fixture blocks. An opening is provided on one side of the outer frame, and several sliding grooves facing the opening are provided inside the outer frame. A row of fixture blocks is slidably disposed in each sliding groove. Each fixture block is provided with a hole for the probe component to fall into. With this structure, the conveying mechanism can move the fixture blocks in the outer frame of the left fixture plate to the empty outer frame on the right. During the movement, the removal mechanism removes the fixture blocks inside that do not contain components, so that all the fixture blocks in the empty outer frame on the right are fixture blocks containing components. This makes the loading rate of the right fixture plate reach 100%, avoiding manual selection by workers and improving the pre-assembled finished product rate.

[0010] Secondly, the present invention provides a fixture plate for pre-assembling ATE probes, comprising: an outer frame and fixture blocks. The outer frame has an opening on one side, and the interior of the outer frame has several grooves facing the opening. Each groove contains a row of fixture blocks, and each fixture block has a hole for the probe components to fall into. With this structure, the fixture blocks can slide out from inside the outer frame to check whether components are installed inside. After inspection, the fixture blocks can slide back into the outer frame to reassemble the fixture plate, facilitating automatic inspection of the fixture plate, saving labor, and ensuring a high yield rate.

[0011] Third, the present invention provides a method for detecting missing parts in ATE probes, comprising: step a, inserting a needle tube into a needle tube fixture plate a; step b, connecting to a conveying mechanism; step c, removing fixture blocks; step d, detecting fixture blocks; step e, removing missing parts; step f, inserting fixture blocks; and step g, completing the detection. This method enables the removal and detection of fixture blocks in the fixture plate during the ATE probe pre-assembly process, removing fixture blocks without inserted parts, and reassembling fixture blocks with inserted parts into the fixture plate. This avoids manual inspection of whether missing parts are inserted in the fixture plate, achieving automatic inspection and ensuring a 100% part insertion rate in the fixture plate, thereby improving the pre-assembly yield. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the pre-assembled device of the present invention; Figure 2 for Figure 1 A top view of the pre-assembled device in the diagram; Figure 3 for Figure 2 A schematic diagram of the conveying mechanism in the diagram; Figure 4 for Figure 3 A schematic diagram of the side structure; Figure 5 for Figure 2 A schematic diagram of the removal mechanism in the middle; Figure 6 This is a schematic diagram of the structure at the gap of the conveying mechanism; Figure 7 This is a side view of the structure at the gap in the conveying mechanism; Figure 8 A schematic diagram of the structure after the pre-assembly device switches to the slide rail; Figure 9 A schematic diagram of the specific structure of the fixture plate; Figure 10 for Figure 9 A cross-sectional view of the central jig plate; Figure 11 This is a flowchart of the detection method of the present invention; Figure 12 This is a schematic diagram of the structure after the needle falls into the hole of the fixture plate; The components are: 1. Fixture plate; 2. Conveying mechanism; 3. Removal mechanism; 1-1. Outer frame; 1-2. Fixture block; 1-3. Frame; 2-1. Conveyor belt; 2-2. Guide frame; 3-1. Camera; 3-2. Push plate; 3-3. Support plate; 3-4. Connecting plate; 3-5. Slide plate; 1-1-1. Outer frame; 1-1-2. Comb teeth; 8-10; 2-1-1. First protrusion; 2-1-2. Second protrusion. Detailed Implementation

[0013] The specific embodiments of the present invention will now be described in further detail with reference to the accompanying drawings.

[0014] Method 1 The following is a specific implementation method of an ATE probe missing detection device.

[0015] Combination Figure 1 and Figure 2 As shown, this embodiment discloses an ATE probe missing component detection device, including: a fixture plate 1, a conveying mechanism 2 and a removal mechanism 3. The fixture plate 1 includes: an outer frame 1-1 and fixture blocks 1-2. An opening is provided on one side of the outer frame 1-1, and a plurality of sliding grooves facing the opening are provided inside the outer frame 1-1. A row of fixture blocks 1-2 is slidably arranged in each sliding groove, and each fixture block 1-2 is provided with a leakage hole for the probe component to fall into. By setting two jig plates 1 opposite each other on both sides of the conveying mechanism 2, and setting a removal mechanism 3 on the conveying mechanism 2, the conveying mechanism moves the jig blocks 1-2 in the outer frame 1-1 of the left jig plate 1 to the empty outer frame 1-1 on the right. During the movement, the removal mechanism 3 removes the jig blocks 1-2 that are not loaded with parts, so that all the jig blocks 1-2 loaded in the empty outer frame 1-1 on the right are jig blocks 1-2 loaded with parts, so that the loading rate of the jig plate 1 on the right reaches 100%, avoiding manual selection by workers and improving the pre-assembled finished product rate.

[0016] Combination Figure 2 As shown, the conveying mechanism 2 can be connected to the outer frame 1-1 on both sides. The openings of the two outer frames 1-1 are both facing the conveying mechanism 2, and the conveying mechanism 2 can move the jig block 1-2 inside the outer frame 1-1 on one side to the outer frame 1-1 on the other side. The removal mechanism 3 is installed on the conveying mechanism 2. The removal mechanism 3 is used to remove part of the jig block 1-2 on the conveying mechanism 2. The part of the jig block 1-2 is the jig block 1-2 in the hole that does not have the probe part installed.

[0017] Specifically, in combination Figure 3 and Figure 4 As shown, the conveying mechanism 2 includes a conveyor belt 2-1 and a guide frame 2-2. The conveyor belt 2-1 is used to drive the jig block 1-2 to slide, and the guide frame 2-2 is used to guide the jig block 1-2 to move from the inside of the outer frame 1-1 on one side to the inside of the outer frame 1-1 on the other side.

[0018] The outer frame 1-1 is hollowed out, allowing the bottom of the jig block 1-2 inside the outer frame 1-1 to contact the surface of the conveyor belt 2-1. When the conveyor belt 2-1 rotates, the jig block 1-2 can move one row through friction. To ensure the friction between the conveyor belt 2-1 and the jig block 1-2, and to ensure the accuracy of the conveyor belt 2-1 in conveying the jig block 1-2, and to prevent the jig block 1-2 from sliding relative to the conveyor belt 2-1, a first protrusion 2-1-1 facing the jig block 1-2 is provided on the conveyor belt 2-1, and a second protrusion 2-1-2 facing the conveyor belt 2-1 is provided on the jig block 1-2. The guide frame 2-2 consists of two parallel clamping plates that clamp the conveyor belt 2-1. A gap is left between the two clamping plates for the jig block 1-2 to slide. The ends of the two clamping plates are connected to the sliding groove inside the outer frame 1-1. Specifically, in combination Figure 5 As shown, the removal mechanism 3 includes a camera 3-1 and a push plate 3-2. The camera 3-1 is mounted on the guide frame 2-2 in front of the push plate 3-2. The camera 3-1 is used to determine whether a probe component is installed inside the fixture block 1-2. The push plate 3-2 is mounted on the guide frame 2-2. The push plate 3-2 is used to remove the fixture block 1-2 without a probe component from the guide frame 2-2 inside the leak hole.

[0019] Camera 3-1 takes pictures above jig block 1-2 and uses machine vision to determine whether a part is installed inside jig block 1-2. There are two push plates 3-2. The two push plates 3-2 are clamped on both sides of jig block 1-2. When jig block 1-2 without a part is moved between the two push plates 3-2, the push plates 3-2 move in a direction perpendicular to the guide frame 2-2 to push out jig block 1-2. Specifically, in combination Figure 6 and Figure 7 As shown, there are two conveyor belts 2-1 arranged at the front and back, with a gap between the two conveyor belts 2-1, and the push plate 3-2 is arranged in the gap.

[0020] A support plate 3-3 is provided at the bottom of the push plate 3-2. The support plate 3-3 is located in the gap between the two conveyor belts 2-1 and is used to support the jig block 1-2 in the gap from the bottom. The two push plates 3-2 are connected by a connecting plate 3-4. The connecting plate 3-4 covers the top of the jig block 1-2 and its two ends are fixedly connected to the two push plates 3-2 respectively. After the push plate 3-2 moves, the jig block 1-2 is pushed out from the side. The bottom of the jig block 1-2 is not supported by the support plate 3-3 and falls down. The push plate 3-2 is reset. Specifically, the guide frame 2-2 is broken in the middle, the push plate 3-2 is embedded in the break, the push plate 3-2 can slide up and down along the break, and the jig block 1-2 inside the push plate 3-2 falls off when the push plate 3-2 slides down.

[0021] Specifically, in combination Figure 8 As shown, the side of the conveying mechanism 2 is connected to one side of a single slide of the outer frame 1-1, and the conveying mechanism 2 and the removal mechanism 3 can move up and down to switch and connect with different slides of the outer frame 1-1.

[0022] Camera 3-1 and push plate 3-2 are both mounted on slide plate 3-5. Slide plate 3-5 can slide up and down intermittently. Conveyor belt 2-1 and guide frame 2-2 are connected to slide plate 3-5 and slide with slide plate 3-5. Through the intermittent sliding of slide plate 3-5, conveyor belt 2-1 and guide frame 2-2 switch to dock with the slide groove of outer frame 1-1. Slide plate 3-5 is driven to slide intermittently by slide plate motor. Slide plate 3-5 is equipped with an electromagnet with spring reset. The extended end of the electromagnet is connected to push plate 3-2 to drive push plate 3-2 to slide.

[0023] Method 2 The following is a specific embodiment of a fixture plate for an ATE probe missing detection device. This fixture plate can be implemented independently or as a key structure of the ATE probe missing detection device disclosed in Specific Embodiment 1.

[0024] Combination Figure 9 and Figure 10 As shown, the fixture plate of the ATE probe missing component detection device disclosed in this embodiment includes: an outer frame 1-1 and fixture blocks 1-2. An opening is provided on one side of the outer frame 1-1, and a plurality of sliding grooves facing the opening are provided inside the outer frame 1-1. A row of fixture blocks 1-2 is slidably arranged in each sliding groove, and each fixture block 1-2 is provided with a leakage hole for the probe component to fall into.

[0025] The outer frame 1-1 includes: an outer frame body 1-1-1 and comb teeth 1-1-2. The outer frame body 1-1-1 is entirely hollow and open on one side. Several comb teeth 1-1-2 are spaced apart inside the outer frame body 1-1-1. One end of each comb tooth 1-1-2 is fixedly connected to the inside of the outer frame body 1-1-1, while the other end is suspended. A groove is formed between adjacent comb teeth 1-1-2. Protruding guide strips are provided on the sides of the comb teeth 1-1-2. The sides of the fixture block 1-2 are correspondingly arranged with the guide strips. The fixture plate 1 is equipped with a guide groove. After the fixture block 1-2 slides into the groove, the top height of the fixture block 1-2 is equal to the top height of the comb teeth 1-1-2, and the top height of the fixture block 1-2 and the comb teeth 1-1-2 is less than the top height of the outer frame 1-1-1. The fixture plate 1 also includes a frame 1-3, which can be detachably fastened to the opening on one side of the outer frame 1-1 to prevent the fixture block 1-2 from slipping off. At the same time, it forms a guide frame with the part of the outer frame 1-1-1 that is higher than the fixture block 1-2 to prevent the parts from shaking out.

[0026] The jig block 1-2 can slide out from inside the outer frame 1-1 to check whether parts are installed inside. After inspection, the jig block 1-2 can slide back into the outer frame 1-1 to reconstruct the jig plate 1, which facilitates automatic inspection of the jig plate 1, saves labor, and ensures the yield rate.

[0027] Method 3 The following is a specific implementation method for an ATE probe missing detection method. This method can be implemented alone or applied to an ATE probe missing detection device disclosed in Specific Implementation Method 1.

[0028] Combination Figure 11 As shown, an ATE probe missing component detection method includes the following steps: Step a: Insert the needle tubes into the needle tube fixture plate a; insert several needle tubes into the needle tube fixture plate, shake the needle tube fixture plate a, and let the needle tubes fall into the holes of the needle tube fixture plate a. Step b, connect to the conveying mechanism; open one side of the outer frame of the needle fixture plate a in step a and connect it to the left side of the conveying mechanism, and open the outer frame side of the other needle fixture plate a that does not contain the fixture block and connect it to the right side of the conveying mechanism. Step c, jig block removed; the jig block inside the left outer frame is sent into the guide frame via the conveyor belt of the conveyor mechanism; Step d, jig block detection; determine whether a needle is inserted inside the jig block on the guide frame by using the camera of the removal mechanism; Step e, Removal of missing parts; Remove the jig block without needles from the guide frame using a pusher plate; Step f, jig block is moved in; the jig block containing the syringe is sent into the empty outer frame on the right side by a conveyor belt; Step g, inspection complete; remove the empty outer frame after it is filled with fixture blocks; The above steps yield a needle fixture plate a, in which each internal leak hole is filled with a needle tube; Since the insertion direction of the syringe is reversed, the syringe needs to be reversed to facilitate subsequent pre-assembly. Step h, flip the needle tube; fasten the needle tube fixture plate b onto the needle tube fixture plate a filled with needle tubes, flip the fastened needle tube fixture plate a and needle tube fixture plate b as a whole, and the needle tubes in the needle tube fixture plate a will fall into the needle tube fixture plate b after flipping. After obtaining the needle fixture plate b, which is correctly oriented and filled with needles, the needle tail needs to be inserted into the needle. To facilitate insertion, the needle tail is also scattered into the needle tail fixture plate a, just like with the needle tube. After shaking, the needle tail fixture plate a is checked for missing needle tails, and the needle tail fixture plate a is filled with needle tails. Similarly, to facilitate subsequent pre-assembly, the needle tail needs to be reversed. Step i, needle tail flipping; fasten needle tail fixture plate b onto needle tail fixture plate a which is full of needle tails, flip the fastened needle tail fixture plate a and needle tail fixture plate b as a whole, and the needle tails in needle tail fixture plate a will fall into needle tail fixture plate b after flipping. To facilitate the batch loading of needle tails, the drainage holes on needle tail fixture plate a and needle tail fixture plate b are set to correspond to the drainage holes on needle tube fixture plate b. Step j, insert the needle tail; cover the needle tail fixture plate b with a mask and flip it over. Then, fasten the flipped needle tail fixture plate b and the mask onto the needle tube fixture plate b. Remove the mask and the needle tail falls into the needle tube. Next, the springs are installed. Since the springs do not have a right or wrong orientation, the springs are simply scattered into the spring fixture plate b. After shaking, the spring fixture plate b is checked for missing springs. To facilitate the batch installation of springs, the leakage holes on the spring fixture plate b are set to correspond to the leakage holes on the needle fixture plate b. Step k: Insert the spring; After covering the spring fixture plate b with a mask, flip it over, and fasten the flipped spring fixture plate b and the mask onto the syringe fixture plate b. Remove the mask, and the spring will fall into the syringe. Finally, insert the needles. For ease of insertion, similar to the syringe tube, sprinkle the needles into needle fixture plate a. After shaking, perform a leak check on needle fixture plate a to obtain a fully loaded needle fixture plate a. Again, for ease of subsequent pre-assembly, the needles need to be rotated. Step 1, needle flipping; fasten needle fixture plate b onto needle fixture plate a which is full of needles, flip the fastened needle fixture plate a and needle fixture plate b as a whole, and the needles in needle fixture plate a will fall into needle fixture plate b after flipping. To facilitate the batch loading of needles, the drainage holes on needle fixture plate a and needle fixture plate b are set to correspond to the drainage holes on needle tube fixture plate b. Step m, insert the needle; cover the needle fixture plate b with a mask and flip it over. Then, attach the flipped needle fixture plate b and the mask to the syringe fixture plate b, remove the mask, and the needle will fall into the syringe.

[0029] Complete the pre-assembly of the probe.

[0030] The needle tail fixture plate b, spring fixture plate b, and needle head fixture plate b have all undergone a missing part inspection.

[0031] Specifically, the method is applied to an ATE probe missing detection device, which includes: a fixture plate 1, a conveying mechanism 2, and a removal mechanism 3.

[0032] Throughout the entire probe pre-assembly process, the needle tube fixture plate a, needle tail fixture plate b, spring fixture plate b, and needle head fixture plate b are automated for missing parts detection. This not only has high detection efficiency but also greater accuracy than manual detection, achieving a 100% fixture plate loading rate and reducing the scrap rate.

[0033] It should be noted that the above are merely specific embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

[0034] It should also be noted that all the technical features listed in the above specific embodiments can be arranged and combined, as long as they are not contradictory. Those skilled in the art can exhaustively calculate the result of each arrangement and combination based on the mathematical knowledge of permutations and combinations learned in high school. All the results of permutations and combinations should be understood as being disclosed in this application.

Claims

1. A method for detecting missing ATE probes, characterized in that, Includes the following steps: Step a, insert the needle tube into the needle tube fixture plate a; insert several needle tubes into the needle tube fixture plate, shake the needle tube fixture plate a, so that the needle tubes fall into the drain hole of the needle tube fixture plate a; the fixture plate (1) includes: an outer frame (1-1) and fixture blocks (1-2), an opening is provided on one side of the outer frame (1-1), and several sliding grooves facing the opening are provided inside the outer frame (1-1), and a row of fixture blocks (1-2) is slidably arranged in each sliding groove, and each fixture block (1-2) is provided with a drain hole for the probe parts to fall into; Step b, connect to the conveying mechanism; open one side of the outer frame (1-1) of the needle fixture plate a in step a and connect it to the left side of the conveying mechanism (2), and open one side of the outer frame (1-1) of the other needle fixture plate a that does not have the fixture block (1-2) installed inside and connect it to the right side of the conveying mechanism (2). Step c, jig block is removed; jig block (1-2) in the left outer frame (1-1) is sent into guide frame (2-2) via conveyor belt (2-1) of conveyor mechanism (2). Step d, jig block detection; determine whether a needle is installed inside the jig block (1-2) on the guide frame (2-2) by using the camera (3-1) of the removal mechanism (3); Step e, Removal of missing parts; Remove the jig block (1-2) without the needle inserted from the guide frame (2-2) using the push plate (3-2); Step f, jig block is moved in; the jig block (1-2) containing the syringe is sent into the empty outer frame (1-1) on the right side via conveyor belt (2-1); Step g, inspection complete; remove the empty outer frame (1-1) after it is filled with fixture blocks (1-2).

2. The method for detecting missing ATE probes according to claim 1, characterized in that, The method is applied to an ATE probe missing detection device, which includes: a fixture plate (1), a conveying mechanism (2), and a removal mechanism (3).

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