An air flotation placement machine suction head

Abstract

An air-floating placement machine suction head relates to the fields of semiconductor processing and microelectronic component manufacturing. The air bearing is a cylindrical structure, with a thrust plate, an annular plate, fixed to the bottom of the air bearing. A rotary motor is rotatably mounted on the top of the air bearing, and a pneumatic Z-axis is rotatably mounted on the bottom of the air bearing. The pneumatic Z-axis is connected to the rotary motor for transmission. A square slot is provided at the bottom of the pneumatic Z-axis, extending from the thrust plate. An air intake duct runs through the center of the rotary motor and the pneumatic Z-axis. A square cylinder slides into the slot, leaving an air-floating gap. Throttling micropores are machined in the side walls of the square cylinder. The suction head is integrally connected to the bottom of the square cylinder. Preload springs connect the two sides of the suction head to the bottom of the pneumatic Z-axis. An air intake hole is provided at the center of the bottom surface of the suction head, and vacuum ducts are machined on the sides, with a vacuum connector installed at the outer end. Through the ingenious arrangement of the rotary motor, pneumatic Z-axis, and square cylinder, the suction head can simultaneously meet the requirements of rapid, high-precision radial rotation and axial displacement.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor processing and microelectronic component manufacturing, in particular to an air-floating placement machine suction head. Background Art

[0002] The full name of the placement machine is "surface mount system", which is mainly used in the automated assembly production line of electronic crystal components. It can accurately place electronic crystal components on the corresponding solder joints of the PCB motherboard through the rapid movement of the placement suction head.

[0003] At present, the suction heads of placement machines generally move in a single direction or have their position improved. For example, the Chinese utility model patents with announcement number CN214592706U and announcement number CN215898341U only partially change the movement mode or surface contact performance of the suction head. Another example is the Chinese invention patent with announcement number CN1226907B, which changes the configuration of the suction head according to the special circumstances of use to prevent damage and falling of electronic crystal components.

[0004] However, with the continuous improvement of wafer manufacturing and processing technology, the thickness of electronic crystal components has gradually shrunk from 5-10μm to 3-5nm, which has also put forward higher requirements on the performance of the placement machine suction head. Not only must the surface roughness and flatness be strictly guaranteed, but also the operation accuracy of the placement machine suction head during axial displacement and radial rotation movements must be guaranteed. However, it is difficult for existing placement machine suction heads to meet the above requirements at the same time. Especially during the high-speed movement of the placement machine, the slight vibration caused by the rapid movement of the placement machine suction head will cause the electronic crystal components to shift or even fall off.

[0005] Therefore, there is an urgent need to optimize the structure of the placement machine suction head so that it can stably adsorb electronic crystal components while having effective radial rotation and axial displacement movements to meet the higher requirements of wafer manufacturing at this stage for the performance of the placement machine suction head. Summary of the Invention

[0006] In order to solve the shortcomings of the background technology, the present invention provides an air-floating placement machine suction head, which can simultaneously meet the suction head's fast and high-precision radial rotation and axial displacement movements through the ingenious arrangement of a rotary motor, a pneumatic Z-axis and a square cylinder.

[0007] To achieve the above-mentioned purpose, the present invention adopts the following technical scheme: an air-floating placement machine suction head, comprising an air-floating bearing, a thrust plate, a rotary motor, a pneumatic Z-axis, a square cylinder and a suction head, wherein the air-floating bearing is a cylindrical structure and is used for connection and fixation of the placement machine, the thrust plate is an annular plate and is coaxially fixed to the bottom end of the air-floating bearing, and an annular groove is left on the inner side between the thrust plate and the air-floating bearing, the rotary motor is coaxially mounted on the top end of the air-floating bearing, the pneumatic Z-axis is coaxially mounted on the bottom end of the air-floating bearing, an annular wing is integrally provided in the middle position of the side wall of the pneumatic Z-axis and is rotatably clamped in the annular groove, and the air-floating bearing is fixed to the bottom end of the air-floating bearing. The top end of the dynamic Z-axis is connected to the rotary motor for transmission. A square groove is set in the center of the bottom end of the pneumatic Z-axis and extends out through the center hole of the thrust plate. An air intake duct is set through the center of the rotary motor and the pneumatic Z-axis. The square cylinder is slidably inserted in the square groove and leaves an air floating gap. A plurality of throttling micropores are evenly processed on the side wall of the square cylinder. The suction head is connected as a whole with the bottom end of the square cylinder. The relative positions on both sides of the suction head are connected to the corresponding positions on both sides of the bottom end of the pneumatic Z-axis through two pre-tightening springs. An air suction hole is set in the center of the bottom surface of the suction head. A vacuum air duct is processed on the side of the suction head and connected to the suction hole. A vacuum joint is installed at the outer end of the vacuum air duct.

[0008] Furthermore, the pneumatic Z-axis and the rotary motor are coaxially connected via a coupling.

[0009] Furthermore, an infrared distance sensor is fixedly installed on the side of the suction head.

[0010] Furthermore, the bottom surface of the suction head is processed with a M-shaped air groove radiating from the suction hole as the center.

[0011] Furthermore, the air floating gap is 0.02 mm, and the aperture of the throttling micropore is 0.05-0.08 mm.

[0012] Compared with the prior art, the beneficial effects of the present invention are as follows: the present invention improves the overall structure, movement mode and adsorption mode of the placement machine suction head as a whole, the rotary motor serves as the power source for the radial rotation of the suction head, and the square cylinder at the bottom end of the pneumatic Z-axis adopts air floating motion combined with a pre-tightened spring to realize the axial extension and contraction of the suction head, with low friction loss and long service life, and can enable the suction head to simultaneously meet fast, high-precision radial rotation motion and axial displacement motion, solving the shortcomings of the current placement machine suction head. The overall structure is simple and reasonable, easy to assemble and repair and debug, and helps to improve the movement stability, movement accuracy and adsorption efficiency of the placement machine, and is widely used in wafer manufacturing and processing industries. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 1 is an axonometric diagram of the suction head of the air-floating mounter of the present invention;

[0014] Figure 2 1 is a schematic diagram of the X-axis longitudinal section of the air float placement machine suction head of the present invention;

[0015] Figure 3 1 is a schematic diagram of the Y-axis longitudinal section of the air flotation mounter suction head of the present invention;

[0016] Figure 4 1 is a bottom view schematic diagram of the air flotation mounter suction head of the present invention;

[0017] Figure 5 It is a schematic longitudinal section of the square cylinder and the suction head of the present invention. DETAILED DESCRIPTION

[0018] The technical solutions of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0019] like Figures 1 to 5 As shown, an air-floating placement machine suction head includes an air-floating bearing 1, a thrust plate 2, a rotary motor 3, a pneumatic Z-axis 4, a coupling 5, an air inlet duct 6, a square cylinder 7, a suction head 8, and a preload spring 9. The air-floating bearing 1 and the thrust plate 2 constitute a stator structure for fixing the entire device on the placement machine, and the rotary motor 3, the pneumatic Z-axis 4, the square cylinder 7, and the suction head 8 constitute a rotor structure, which can simultaneously realize radial rotation and axial displacement of the suction head 8.

[0020] Combine Figures 1 and 2 as well as Figure 5As shown, the air bearing 1 is a cylindrical structure used for connection and fixation to the placement machine. A flange can be integrally provided on the top edge of the air bearing 1 for connection and fixation between the air bearing 1 and the placement machine. The thrust plate 2 is an annular plate coaxially fixed to the bottom end of the air bearing 1. An annular groove is provided on the inner side between the thrust plate 2 and the air bearing 1 to limit the axial displacement of the pneumatic Z-axis 4, ensuring that the pneumatic Z-axis 4 can only perform radial rotational motion. The rotary motor 3 is coaxially mounted on the top of the air bearing 1 and serves as the power source for the radial rotational motion of the suction head 8, capable of rotation and angular displacement. The pneumatic Z-axis 4 is coaxially rotatably installed at the bottom end of the air bearing 1. An annular wing is integrally provided in the middle position of the side wall of the pneumatic Z-axis 4 and is rotatably clamped in the annular groove. The top end of the pneumatic Z-axis 4 is connected to the rotary motor 3 for transmission. To facilitate installation and disassembly, the pneumatic Z-axis 4 and the rotary motor 3 are preferably coaxially connected through a coupling 5. A square groove is provided at the center of the bottom end of the pneumatic Z-axis 4 and extends out through the center hole of the thrust plate 2 for the installation of the square cylinder 7 to realize the axial displacement movement of the suction head 8. The radial surface of the pneumatic Z-axis 4 plays a role of rotary support, and the normal surface plays an axial support role. An air intake duct 6 is set through the center of the rotary motor 3 and the pneumatic Z axis 4. The coupling 5 has a rubber gasket and does not affect the air tightness of the air intake duct 6 at the connection position between the pneumatic Z axis 4 and the rotary motor 3. The square cylinder 7 is slidably inserted in the square groove and leaves an air flotation gap. The preferred air flotation gap is 0.02mm. The side wall of the square cylinder 7 is evenly processed with multiple throttling micropores 7-1. The preferred aperture of the throttling micropores 7-1 is 0.05~0.08mm. An external air supply device with adjustable flow is used to supply air to the square groove through the air intake duct 6. The square cylinder 7 can extend to the bottom under the action of the multiple throttling micropores 7-1, thereby realizing the axial displacement of the suction head 8, and at the same time, it can form an air flotation effect in the air flotation gap. The gas is finally discharged through the gap at the square groove position, so that the square cylinder 7 has the advantages of low friction loss and long service life.

[0021] Combine Figures 3 to 5As shown, the suction head 8 is integrally connected to the bottom of the square cylinder 7. Two preload springs 9 connect the two opposite sides of the suction head 8 to corresponding positions on either side of the bottom of the pneumatic Z-axis 4. When the air inlet duct 6 is not supplying air, the two preload springs 9 act to keep the suction head 8 in contact with the bottom of the pneumatic Z-axis 4, at which point the suction head 8 reaches the initial (shortest) position of axial displacement. An air intake hole 8-1 is located at the center of the bottom surface of the suction head 8. A vacuum air channel 8-2 is machined on the side of the suction head 8 and communicates with the suction hole 8-1. A vacuum connector 8-3 is installed at the outer end of the vacuum air channel 8-2. An external vacuum pump is connected to the vacuum connector 8-3 to generate negative pressure at the suction hole 8-1, which is used to secure the electronic crystal component. Once the electronic crystal component is transferred to the designated location, the external vacuum pump can be disconnected to release the electronic crystal component. Furthermore, an infrared distance sensor 8-5 can be fixedly mounted on the side of the suction head 8 to monitor and sense the distance between the suction head 8 and the electronic crystal component in real time. In order to improve the performance of the suction head 8, a M-shaped air groove 8-4 can be processed in a divergent shape with the suction hole 8-1 as the center on the bottom surface of the suction head 8. Through the setting of the M-shaped air groove 8-4, the adsorption area of ​​the suction hole 8-1 is expanded. After adsorbing the electronic crystal components, the M-shaped air groove 8-4 has a 45° offset interval between each groove, so that the wafers to be welded can be randomly grabbed, and the position of the wafers can be adjusted by rotating the main shaft to achieve angle adaptation, reduce the wafer arrangement process, and thus save semiconductor chip processing time.

[0022] The present invention connects the rotary motor 3 with the pneumatic Z-axis 4 through a coupling 5, so that the rotor part can realize radial rotation through the control of the rotary motor 3, and at the same time, a square groove is set at the bottom end of the pneumatic Z-axis 4 and a square cylinder 7 is installed. The suction head 8 and the square cylinder 7 are an integrated structure. The rotary motor 3 sets an air intake duct 6 between the pneumatic Z-axis 4 to supply air to the square cylinder 7. Under the action of the high-pressure airflow, the suction head 8 can move without resistance in the Z-axis direction. The flow rate of the high-pressure airflow can be adjusted to control the downward displacement distance of the suction head 8. The number and arrangement of the throttling micropores 7-1 on the side wall of the square cylinder 7 can be determined in advance by calculation, and the two sides of the suction head 8 are connected to the two sides of the bottom end of the pneumatic Z-axis 4 by a pre-tightening spring 9 to realize the reset of the suction head 8 when no air is supplied. The structure is simple and reasonable, easy to assemble and repair and debug, and can solve the problem that the current placement machine suction head cannot simultaneously meet radial rotation motion and axial displacement motion.

[0023] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other configurations without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims, not the foregoing description, and all variations coming within the meaning and range of equivalents of the claims are intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

[0024] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. An air-floating chip mounter suction head, characterized by: The invention comprises an air-floating bearing (1), a thrust plate (2), a rotary motor (3), a pneumatic Z-axis (4), a square cylinder (7) and a suction head (8); the air-floating bearing (1) is a cylindrical structure and is used for connection and fixation of a patch machine; the thrust plate (2) is an annular plate and is coaxially fixed to the bottom end of the air-floating bearing (1); an annular groove is left on the inner side between the thrust plate (2) and the air-floating bearing (1); the rotary motor (3) is coaxially rotatably mounted on the top end of the air-floating bearing (1); the pneumatic Z-axis (4) is coaxially rotatably mounted on the bottom end of the air-floating bearing (1); an annular wing is integrally provided at the middle position of the side wall of the pneumatic Z-axis (4) and is rotatably clamped in the annular groove; the top end of the pneumatic Z-axis (4) is connected to the rotary motor (3) for transmission; the bottom end of the pneumatic Z-axis (4) is connected to the rotary motor (3) for transmission. A square groove is provided at the center and extends out through the center hole of the thrust plate (2); an air intake duct (6) is provided through the center of the rotary motor (3) and the pneumatic Z axis (4); the square cylinder (7) is slidably inserted in the square groove and leaves an air floating gap; a plurality of throttling micropores (7-1) are evenly processed on the side wall of the square cylinder (7); the suction head (8) is connected to the bottom end of the square cylinder (7) as a whole; the relative positions on both sides of the suction head (8) are connected to the corresponding positions on both sides of the bottom end of the pneumatic Z axis (4) through two preloaded springs (9); an air intake hole (8-1) is provided at the center of the bottom surface of the suction head (8); a vacuum air duct (8-2) is processed on the side of the suction head (8) and is connected to the air intake hole (8-1); a vacuum joint (8-3) is installed at the outer end of the vacuum air duct (8-2).

2. The air-floating chip mounter suction head according to claim 1, characterized in that: The pneumatic Z-axis (4) and the rotary motor (3) are coaxially connected via a coupling (5).

3. The air-floating chip mounter suction head according to claim 1 or 2, characterized in that: An infrared distance sensor (8-5) is fixedly installed on the side of the suction head (8).

4. The air-floating chip mounter suction head according to claim 1, characterized in that: The bottom surface of the suction head (8) is processed with a M-shaped air groove (8-4) in a divergent shape with the air suction hole (8-1) as the center.

5. The air-floating chip mounter suction head according to claim 1, characterized in that: The air floating gap is 0.02 mm, and the aperture of the throttling micropore (7-1) is 0.05-0.08 mm.

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