A furnace body adsorption system and its control method

Abstract

The present invention provides a furnace body adsorption system and its control method. The furnace body adsorption system includes an adsorption water tank assembly, a high-level liquid supplementing assembly, a first water storage tank, a second water storage tank, a spare water bucket, a pump valve assembly, and a pre-stirring assembly. The adsorption water tank assembly includes an adsorption water tank, a lifting mechanism, and a furnace body fixing tooling. The pre-stirring assembly includes a stirring bucket and a first mixer. The high-level liquid supplementing assembly includes a high-level water tank and a second mixer. The furnace body is fixed by the furnace body fixing tooling, and the furnace body fixing tooling is driven by the lifting mechanism to repeatedly lift and lower, so that the materials in the adsorption water tank are adsorbed into the furnace body, improving the anti-permeability ability of the furnace body; the high-level water tank is used to supplement materials into the adsorption water tank, the pre-stirring assembly is used to supplement adsorption raw materials into the high-level water tank, the water storage tank is used to supplement water into the high-level water tank, and through the cooperation of the pump valve assembly, precise control of adsorption and liquid supplementing is achieved. The overall automation degree is high, the working efficiency is high, and the application requirements are met.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor process furnace manufacturing, and particularly to a furnace body adsorption system and a control method thereof. Background Art

[0002] Plasma Enhanced Chemical Vapor Deposition (PECVD) equipment is a technology mainly used in semiconductor coating processes, that is, appropriate process gases are introduced into a high-vacuum process furnace, and chemical reactions of the process gases are caused by low-pressure radio frequency glow discharge at a certain temperature to form a thin film on the semiconductor surface.

[0003] In the production of the process furnace body, it is necessary to immerse the furnace body in an adsorption material so that the adsorption material enters the micropores inside the furnace body, improve the comprehensive performance of the furnace body, and prevent process gases from permeating or depositing onto the furnace body during the semiconductor process. Currently, the adsorption equipment has a simple structure, low automation degree, and low working efficiency, and cannot meet the application requirements, so improvements are needed. Summary of the Invention

[0004] The purpose of the present invention is to solve the disadvantages existing in the prior art, and to propose a furnace body adsorption system and a control method thereof, which improve the automation degree and working efficiency and meet the application requirements.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] A furnace body adsorption system includes an adsorption water tank assembly, a high-level liquid supply assembly, a first water storage tank, a second water storage tank, a spare water bucket, and a pump valve assembly.

[0007] The pump valve assembly includes a circulating vacuum pump, a centrifugal pump, a first control valve, a second control valve, a third control valve, and a fourth control valve.

[0008] The adsorption water tank assembly includes an adsorption water tank, a lifting mechanism, and a furnace body fixing tooling. The lifting mechanism is used to drive the furnace body fixing tooling to repeatedly lift and lower in the adsorption water tank; the high-level liquid supply assembly includes a high-level water tank; liquid level sensors are provided in the adsorption water tank, the high-level water tank, the first water storage tank, and the second water storage tank, and the liquid level sensors are respectively used to detect the liquid levels of the adsorption water tank, the high-level water tank, the first water storage tank, and the second water storage tank.

[0009] The circulating vacuum pump is connected between the first water storage tank and the spare water bucket through a pipeline. The first control valve is connected between the adsorption water tank and the high-level water tank through a pipeline. The second control valve is connected between the first water storage tank and the second water storage tank through a pipeline. The third control valve, the centrifugal pump, and the fourth control valve are sequentially connected between the second water storage tank and the high-level water tank through a pipeline. The spare water bucket is also connected to the centrifugal pump through a pipeline.

[0010] Preferably, the lifting mechanism includes lifting cylinders provided on both sides of the adsorption water tank and lifting brackets respectively connected to the piston rods of the lifting cylinders on both sides. The piston rods of the lifting cylinders are arranged vertically upward. The lifting brackets are arranged inside the adsorption water tank, and the furnace body fixing tooling is arranged on the lifting brackets.

[0011] Preferably, the furnace body fixing tooling includes a perforated mesh cylinder plate, an upper cover plate, a lower cover plate, and support rods. The upper cover plate and the lower cover plate are arranged in parallel. The perforated mesh cylinder plate is in a cylindrical shape and is arranged between the upper cover plate and the lower cover plate. The perforated mesh cylinder plate is covered with mesh holes. There are multiple support rods, and the multiple support rods are evenly spaced along the outer circumference of the perforated mesh cylinder plate, and both ends of each support rod are respectively connected to the upper cover plate and the lower cover plate.

[0012] Preferably, the adsorption water tank assembly further includes a ceiling frame and a monorail crane. The ceiling frame is arranged above the adsorption water tank, and the monorail crane is movably arranged on the ceiling frame. The monorail crane is used to lift and install the furnace body fixing tooling into the adsorption water tank or lift and transport the furnace body fixing tooling out of the adsorption water tank.

[0013] Preferably, the furnace body adsorption system further includes a pre-stirring assembly. The pre-stirring assembly includes a stirring bucket filled with adsorption raw materials and a first mixer arranged in the stirring bucket. The pump valve assembly further includes a first self-priming pump. The first self-priming pump is connected between the stirring bucket and the high-level water tank through a pipeline. The stirring bucket is also connected to the fourth control valve through a pipeline. A concentration detector is arranged in the high-level water tank. The concentration detector is used to detect the material concentration in the high-level water tank. The first self-priming pump is used to start when the material concentration in the high-level water tank is lower than the set concentration value to supplement the adsorption raw materials in the stirring bucket to the high-level water tank.

[0014] Preferably, the high-level liquid supplementing assembly further includes a second mixer arranged in the high-level water tank. The second mixer is used to stir the materials in the high-level water tank.

[0015] Preferably, the pump valve assembly further includes a second self-priming pump, which is connected between the adsorption water tank and the high-level water tank through a pipeline.

[0016] Preferably, the first water storage tank and the second water storage tank are also respectively provided with a pressure gauge for detecting the pressure in the first water storage tank and the second water storage tank.

[0017] According to another aspect of the present invention, there is provided a control method for a furnace body adsorption system. Based on the furnace body adsorption system described above, the control method includes:

[0018] After the system is started, the circulating vacuum pump and the lifting mechanism are turned on, and the lifting mechanism is used to drive the furnace body fixing tooling to repeatedly lift and lower in the adsorption water tank at a set frequency;

[0019] After a first time interval after the circulating vacuum pump is turned on, the first control valve is opened to allow the material in the high-level water tank to enter the adsorption water tank;

[0020] After a second time interval after the first control valve is opened, the third control valve, the centrifugal pump, and the fourth control valve are opened to supplement the water in the second water storage tank or the standby water bucket to the high-level water tank;

[0021] When the liquid level in the first water storage tank is higher than the first set liquid level, the second control valve is opened to allow the water in the first water storage tank to flow into the second water storage tank.

[0022] Preferably, the furnace body adsorption system further includes a pre-stirring assembly, which includes a stirring bucket filled with adsorption raw materials and a first stirrer disposed in the stirring bucket; the pump valve assembly further includes a first self-priming pump, which is connected between the stirring bucket and the high-level water tank through a pipeline; a concentration detector and a second stirrer are provided in the high-level water tank.

[0023] Among them, after the system is started, the first stirrer and the second stirrer are turned on to pre-stir the adsorption raw materials in the stirring bucket by using the first stirrer, and to stir the materials in the high-level water tank by using the second stirrer; when the concentration of the materials in the high-level water tank is lower than the set concentration value, the first self-priming pump is turned on to supplement the adsorption raw materials in the stirring bucket to the high-level water tank.

[0024] Compared with the prior art, the beneficial effects of the present invention are as follows: The present invention uses a furnace body fixing tooling to fix the furnace body, and drives the furnace body fixing tooling to lift repeatedly through a lifting mechanism, so that the materials in the adsorption water tank are adsorbed into the furnace body, improving the anti-permeability ability of the furnace body; the high-level water tank is used to supplement materials into the adsorption water tank, the pre-stirring assembly is used to supplement adsorption raw materials into the high-level water tank, and the water storage tank is used to supplement water into the high-level water tank. Through the cooperation of the pump valve assembly, precise control of adsorption and liquid supplement is achieved. The overall automation degree is high, the working efficiency is high, and the application requirements are met. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a connection block diagram of a furnace body adsorption system according to an embodiment of the present invention.

[0026] Figure 2 It is a structural schematic diagram of a furnace body adsorption system according to an embodiment of the present invention.

[0027] Figure 3 It is a structural schematic diagram of a furnace body adsorption system according to an embodiment of the present invention from another perspective.

[0028] Figure 4 It is a structural schematic diagram of an adsorption water tank assembly according to an embodiment of the present invention.

[0029] Figure 5 It is a structural schematic diagram of a furnace body fixing tooling according to an embodiment of the present invention.

[0030] Figure 6 It is a structural schematic diagram of a high-level liquid supplement assembly according to an embodiment of the present invention.

[0031] In the figure, 10 - adsorption water tank assembly, 11 - adsorption water tank, 121 - lifting cylinder, 122 - lifting bracket, 13 - furnace body fixing tooling, 131 - hole mesh cylinder plate, 132 - upper cover plate, 133 - lower cover plate, 134 - support rod, 14 - ceiling frame, 15 - monorail crane, 20 - high-level liquid supplement assembly, 21 - high-level water tank, 22 - second mixer, 30 - first water storage tank, 40 - second water storage tank, 50 - spare water bucket, 60 - pre-stirring assembly, 61 - stirring bucket, 62 - first mixer, 71 - circulation vacuum pump, 72 - centrifugal pump, 73 - first control valve, 74 - second control valve, 75 - third control valve, 76 - fourth control valve, 77 - first self-priming pump, 78 - second self-priming pump. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0032] To make the objectives, technical solutions and advantages of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are some but not all of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the described embodiments of the present invention without creative efforts fall within the scope of protection of the present invention. It can be understood that, without conflict, some technical means described in the various embodiments herein may be replaced or combined with each other.

[0033] In the description of the present invention, if there are terms such as "first", "second", etc., they are only used to distinguish the described objects and do not have any sequential or technical meanings. Thus, the objects defined with "first", "second", etc. may explicitly or implicitly include one or more of such objects. Also, words such as "one" or "a" do not indicate a quantity limitation but rather indicate the existence of at least one, and "multiple" means not less than two.

[0034] In the description of the specification of the present invention, reference to "an embodiment" or "some embodiments" etc. means that a specific feature, structure or characteristic described in conjunction with the embodiment is included in one or more embodiments of the present invention. Thus, the statements "in an embodiment", "in some embodiments", "in other some embodiments", "in still other embodiments" etc. that appear in different places in this specification are not necessarily all referring to the same embodiment, but rather mean "one or more but not all of the embodiments", unless otherwise specifically emphasized in other ways.

[0035] Please refer to Figures 1 to 6 , the present invention provides a furnace body adsorption system, which includes an adsorption water tank assembly 10, a high-level liquid supplementing assembly 20, a first water storage tank 30, a second water storage tank 40, a spare water bucket 50 and a pump valve assembly. Among them, the adsorption water tank assembly 10 is used for performing the furnace body adsorption operation, the high-level liquid supplementing assembly 20 is used for supplementing materials to the adsorption water tank assembly 10, and the first water storage tank 30, the second water storage tank 40, the spare water bucket 50 and the pump valve assembly cooperate to supplement water to the high-level liquid supplementing assembly 20.

[0036] Specifically, the pump valve assembly includes a circulating vacuum pump 71, a centrifugal pump 72, a first control valve 73, a second control valve 74, a third control valve 75 and a fourth control valve 76.

[0037] The adsorption water tank assembly 10 includes an adsorption water tank 11, a lifting mechanism, and a furnace body fixing tooling 13. The adsorption water tank 11 is used to hold the materials required for the furnace body adsorption process. The furnace body fixing tooling 13 is used to fixedly install the furnace body workpiece. The lifting mechanism is used to drive the furnace body fixing tooling 13 to repeatedly lift and lower in the adsorption water tank 11. The high-level liquid supply assembly 20 includes a high-level water tank 21. Liquid level sensors are provided in the adsorption water tank 11, the high-level water tank 21, the first water storage tank 30, and the second water storage tank 40, and the liquid level sensors are respectively used to detect the liquid levels of the adsorption water tank 11, the high-level water tank 21, the first water storage tank 30, and the second water storage tank 40.

[0038] The circulation vacuum pump 71 is connected between the first water storage tank 30 and the spare water bucket 50 through a pipeline. The first control valve 73 is connected between the adsorption water tank 11 and the high-level water tank 21 through a pipeline. The second control valve 74 is connected between the first water storage tank 30 and the second water storage tank 40 through a pipeline. The third control valve 75, the centrifugal pump 72, and the fourth control valve 76 are sequentially connected between the second water storage tank 40 and the high-level water tank 21 through a pipeline; the spare water bucket 50 is also connected to the centrifugal pump 72 through a pipeline.

[0039] In application, the furnace body workpiece is fixed on the furnace body fixing tooling 13 and is integrally sent into the adsorption water tank 11. After the system is started, the circulation vacuum pump 71 and the lifting mechanism are turned on. The lifting mechanism is used to drive the furnace body fixing tooling 13 to repeatedly lift and lower in the adsorption water tank 11 at a set frequency, so that the materials in the adsorption water tank 11 are adsorbed onto the furnace body workpiece, enhancing the anti-permeability ability of the furnace body. When the first time interval has passed after the circulation vacuum pump 71 is turned on, the first control valve 73 is opened so that the materials in the high-level water tank 21 enter the adsorption water tank 11; when the second time interval has passed after the first control valve 73 is opened, the third control valve 75, the centrifugal pump 72, and the fourth control valve 76 are opened to supplement the water in the second water storage tank 40 or the spare water bucket 50 to the high-level water tank 21; when the liquid level in the first water storage tank 30 is higher than the first set liquid level, the second control valve 74 is opened so that the water in the first water storage tank 30 flows into the second water storage tank 40. Among them, parameters such as the set frequency, the first time interval, the second time interval, and the first set liquid level can be reasonably set according to the actual situation.

[0040] In the furnace body adsorption system of the present invention, through the cooperation of each component, precise control of adsorption and liquid supply is achieved, the overall automation degree is high, the working efficiency is high, and the application requirements are met.

[0041] Refer to in combination Figures 2 to 4In some embodiments, the lifting mechanism includes a lifting cylinder 121 disposed on both sides of the adsorption water tank 11 and a lifting bracket 122 respectively connected to the piston rods of the lifting cylinders 121 on both sides, the piston rods of the lifting cylinders 121 are vertically arranged upward, the lifting bracket 122 is arranged in the adsorption water tank 11, and the furnace body fixing tool 13 is arranged on the lifting bracket 122. Among them, the lifting cylinder 121 can use a commercially available linear cylinder product, and the lifting cylinder 121 is used to drive the furnace body fixing tool 13 to rise and fall repeatedly, so that the furnace body repeatedly enters the material in the adsorption water tank 11, thereby improving the adsorption effect.

[0042] See also Figure 5 In some embodiments, the furnace body fixing tool 13 includes a mesh cylinder plate 131, an upper cover plate 132, a lower cover plate 133 and a support rod 134. The upper cover plate 132 and the lower cover plate 133 are arranged in parallel. The mesh cylinder plate 131 is cylindrical and arranged between the upper cover plate 132 and the lower cover plate 133. The mesh cylinder plate 131 is provided with mesh holes all over. There are multiple support rods 134, which are evenly arranged along the outer periphery of the mesh cylinder plate 131, and the two ends of each support rod 134 are respectively connected to the upper cover plate 132 and the lower cover plate 133. In application, the furnace body is sleeved on the outside of the furnace body fixing tool 13, and the multiple support rods 134 are used to support the heating wire inside the furnace body. The mesh holes all over the mesh cylinder plate 131 are conducive to the material inside to pass through the mesh holes and be adsorbed to the inner wall of the furnace body.

[0043] Furthermore, the adsorption water tank assembly 10 further includes a ceiling frame 14 and a monorail crane 15. The ceiling frame 14 is disposed above the adsorption water tank 11. The monorail crane 15 is movably disposed on the ceiling frame 14. The monorail crane 15 is used to hoist the furnace body fixing tool 13 into the adsorption water tank 11, or to hoist and transport the furnace body fixing tool 13 out of the adsorption water tank 11. The monorail crane 15 can be a commercially available monorail crane product.

[0044] See also Figure 1 In some embodiments, the furnace adsorption system further includes a pre-mixing assembly 60, which includes a mixing barrel 61 containing adsorption raw materials and a first mixer 62 disposed in the mixing barrel 61, and the first mixer 62 is used to pre-mix the adsorption raw materials in the mixing barrel 61. The pump valve assembly further includes a first self-priming pump 77, which is connected between the mixing barrel 61 and the high-level water tank 21 through a pipeline, and the mixing barrel 61 is also connected to the fourth control valve 76 through a pipeline. A concentration detector is provided in the high-level water tank 21, and the concentration detector is used to detect the material concentration in the high-level water tank 21. The first self-priming pump 77 is used to start when the material concentration in the high-level water tank 21 is lower than the set concentration value, so as to replenish the adsorption raw materials in the mixing barrel 61 to the high-level water tank 21.

[0045] In some embodiments, the high-level liquid supply assembly 20 further includes a second agitator 22 disposed in the high-level water tank 21, and the second agitator 22 is used to agitate the materials in the high-level water tank 11. In application, the first self-priming pump 77 adds the adsorption raw materials in the mixing barrel 61 to the high-level water tank 21, and the third control valve 75, the centrifugal pump 72, and the fourth control valve 76 cooperate to add the water in the second water storage tank 40 to the high-level water tank 21. The second agitator 22 is used to uniformly mix the adsorption raw materials and water to form materials with the required concentration in the adsorption water tank. In some embodiments, after the system is started, the second agitator 22 is always turned on at a speed of 15 revolutions per minute.

[0046] See Figure 1 , the pump valve assembly further includes a second self-priming pump 78, and the second self-priming pump 78 is connected between the adsorption water tank 11 and the high-level water tank 21 through a pipeline. In application, when the adsorption water tank 11 needs to be cleaned, the second self-priming pump 78 can be turned on to extract the materials in the adsorption water tank 11 to the high-level water tank 21.

[0047] Furthermore, pressure gauges are respectively provided on the first water storage tank 30 and the second water storage tank 40, and the pressure gauges are used to detect the pressures of the first water storage tank 30 and the second water storage tank 40.

[0048] According to another aspect of the present invention, a control method for a furnace body adsorption system is provided. Based on the furnace body adsorption system described above, the control method includes:

[0049] After the system is started, the circulating vacuum pump 71 and the lifting mechanism are turned on, and the lifting mechanism is used to drive the furnace body fixing tooling 13 to repeatedly lift and lower in the adsorption water tank 11 at a set frequency;

[0050] After the first time interval has passed since the circulating vacuum pump 71 is turned on, the first control valve 73 is opened so that the materials in the high-level water tank 21 enter the adsorption water tank 11;

[0051] After the second time interval has passed since the first control valve 73 is opened, the third control valve 75, the centrifugal pump 72, and the fourth control valve 76 are opened to supplement the water in the second water storage tank 40 or the spare water bucket 50 to the high-level water tank 21;

[0052] When the liquid level in the first water storage tank 30 is higher than the first set liquid level, the second control valve 74 is opened so that the water in the first water storage tank 30 flows into the second water storage tank 40.

[0053] Among them, the furnace body workpiece is fixed on the furnace body fixing tooling 13 and is integrally fed into the adsorption water tank 11; parameters such as the set frequency, the first time interval, the second time interval, the first set liquid level, etc. can be reasonably set according to the actual situation. For example, in one embodiment, the set frequency is 10 times per minute, that is, the lifting mechanism drives the furnace body fixing tooling 13 to lift and lower repeatedly 10 times per minute; the first time interval is 10 seconds, and the second time interval is 8 seconds.

[0054] Furthermore, the furnace body adsorption system further includes a pre-stirring assembly 60. The pre-stirring assembly 60 includes a stirring barrel 61 filled with adsorption raw materials and a first stirrer 62 disposed in the stirring barrel 61; the pump valve assembly further includes a first self-priming pump 77. The first self-priming pump 77 is connected between the stirring barrel 61 and the high-level water tank 21 through a pipeline; a concentration detector and a second stirrer 22 are provided in the high-level water tank 21.

[0055] Among them, after the system is started, the first stirrer 62 and the second stirrer 22 are started to pre-stir the adsorption raw materials in the stirring barrel 61 by using the first stirrer 62 and stir the materials in the high-level water tank 21 by using the second stirrer 22; when the concentration of the materials in the high-level water tank 21 is lower than the set concentration value, the first self-priming pump 77 is started to supplement the adsorption raw materials in the stirring barrel 61 to the high-level water tank 21.

[0056] In summary, the present invention provides a furnace body adsorption system and its control method. The furnace body is fixed by the furnace body fixing tooling, and the lifting mechanism drives the furnace body fixing tooling to lift and lower repeatedly, so that the materials in the adsorption water tank are adsorbed into the furnace body, improving the anti-permeability ability of the furnace body; the high-level water tank is used to supplement materials to the adsorption water tank, the pre-stirring assembly is used to supplement adsorption raw materials to the high-level water tank, and the water storage tank is used to supplement water to the high-level water tank. Through the cooperation of the pump valve assembly, precise control of adsorption and liquid supplement is achieved. The overall automation degree is high, the work efficiency is high, and the application requirements are met.

[0057] The present invention has been described by the above related embodiments. However, the above embodiments are only examples for implementing the present invention. It must be pointed out that the disclosed embodiments do not limit the scope of the present invention. On the contrary, modifications and refinements made without departing from the spirit and scope of the present invention fall within the scope of patent protection of the present invention.

Claims

1. A furnace body adsorption system, characterized in that: it includes an adsorption water tank assembly, a pre-stirring assembly, a high-level liquid supplementing assembly, a first water storage tank, a second water storage tank, a spare water bucket and a pump valve assembly; the pump valve assembly includes a first self-priming pump, a circulating vacuum pump, a centrifugal pump, a first control valve, a second control valve, a third control valve and a fourth control valve; the adsorption water tank assembly includes an adsorption water tank, a lifting mechanism and a furnace body fixing tooling, and the lifting mechanism is used to drive the furnace body fixing tooling to repeatedly lift in the adsorption water tank; the furnace body fixing tooling includes a perforated mesh cylinder plate, an upper cover plate, a lower cover plate and support rods, the upper cover plate and the lower cover plate are arranged in parallel, the perforated mesh cylinder plate is cylindrical, the perforated mesh cylinder plate is arranged between the upper cover plate and the lower cover plate, and the perforated mesh cylinder plate is covered with mesh holes; there are multiple support rods, and the multiple support rods are evenly spaced along the outer periphery of the perforated mesh cylinder plate, and both ends of each support rod are respectively connected to the upper cover plate and the lower cover plate; the pre-stirring assembly includes a stirring bucket filled with adsorption raw materials and a first stirrer arranged in the stirring bucket; the high-level liquid supplementing assembly includes a high-level water tank; a concentration detector and a second stirrer are arranged in the high-level water tank; the first self-priming pump is connected between the stirring bucket and the high-level water tank through a pipeline; liquid level sensors are arranged in the adsorption water tank, the high-level water tank, the first water storage tank and the second water storage tank, and the liquid level sensors are respectively used to detect the liquid levels of the adsorption water tank, the high-level water tank, the first water storage tank and the second water storage tank; the circulating vacuum pump is connected between the first water storage tank and the spare water bucket through a pipeline, the first control valve is connected between the adsorption water tank and the high-level water tank through a pipeline, the second control valve is connected between the first water storage tank and the second water storage tank through a pipeline, the third control valve, the centrifugal pump and the fourth control valve are sequentially connected between the second water storage tank and the high-level water tank through a pipeline; the spare water bucket is also connected to the centrifugal pump through a pipeline; the stirring bucket is also connected to the fourth control valve through a pipeline.

2. The furnace body adsorption system according to claim 1, characterized in that: the lifting mechanism includes lifting cylinders arranged on both sides of the adsorption water tank and lifting brackets respectively connected to the piston rods of the lifting cylinders on both sides, the piston rods of the lifting cylinders are vertically upward, the lifting brackets are arranged in the adsorption water tank, and the furnace body fixing tooling is arranged on the lifting brackets.

3. The furnace body adsorption system according to claim 1, characterized in that: the adsorption water tank assembly further includes a ceiling frame and a monorail crane, the ceiling frame is arranged above the adsorption water tank, the monorail crane is movably arranged on the ceiling frame, and the monorail crane is used to hoist the furnace body fixing tooling into the adsorption water tank or hoist and transport the furnace body fixing tooling out of the adsorption water tank.

4. The furnace body adsorption system according to claim 1, characterized in that: The pump valve assembly further includes a second self-priming pump, and the second self-priming pump is connected between the adsorption water tank and the high-level water tank through a pipeline.

5. The furnace body adsorption system according to claim 1, characterized in that: pressure gauges are respectively arranged on the first water storage tank and the second water storage tank, and the pressure gauges are used to detect the pressures of the first water storage tank and the second water storage tank.

6. A control method for a furnace body adsorption system, characterized in that: providing the furnace body adsorption system according to any one of claims 1 to 5, and the control method includes: after the system is started, starting the circulating vacuum pump and the lifting mechanism, and using the lifting mechanism to drive the furnace body fixing tooling to lift and lower repeatedly in the adsorption water tank at a set frequency; when a first time interval has passed after the circulating vacuum pump is started, opening the first control valve so that the material in the high-level water tank enters the adsorption water tank; when a second time interval has passed after the first control valve is opened, opening the third control valve, the centrifugal pump and the fourth control valve to supplement the water in the second water storage tank or the standby water bucket to the high-level water tank; when the liquid level in the first water storage tank is higher than the first set liquid level, opening the second control valve so that the water in the first water storage tank flows into the second water storage tank.

7. The control method for a furnace body adsorption system according to claim 6, characterized in that: the furnace body adsorption system further includes a pre-stirring assembly, the pre-stirring assembly includes a stirring barrel filled with adsorption raw materials and a first stirrer arranged in the stirring barrel; the pump valve assembly further includes a first self-priming pump, and the first self-priming pump is connected between the stirring barrel and the high-level water tank through a pipeline; a concentration detector and a second stirrer are arranged in the high-level water tank; wherein, after the system is started, the first stirrer and the second stirrer are started immediately to pre-stir the adsorption raw materials in the stirring barrel by using the first stirrer and stir the materials in the high-level water tank by using the second stirrer; when the concentration of the materials in the high-level water tank is lower than the set concentration value, the first self-priming pump is started to supplement the adsorption raw materials in the stirring barrel to the high-level water tank.

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