Special gas delivery apparatus, method and semiconductor process system based on liquid gas source

Abstract

The application relates to a special gas conveying device based on a liquid gas source, a method and a semiconductor process system, and the special gas conveying device comprises a carrier gas supply unit, a mixed gas output unit, a detection unit, a purge unit, a discharge unit, a first pressure relief unit and a second pressure relief unit. The device has the following advantages: the discharge unit is arranged, the mixed gas and the purge gas can be discharged in a partitioned manner, the pressure of tail gas treatment at the rear end can be reduced, the environment can be protected, and the harm of tail gas leakage can be prevented; the first pressure relief unit and the second pressure relief unit are arranged, the gas inlet of the carrier gas and the outlet of the mixed gas can be pressure relieved, the safety of the device and the system is improved, the safety of personnel life and property is protected, and the stability of the production process is ensured; and the detection unit is arranged, the gas in the bottle can be tested in advance, whether the unused steel bottle reaches the process condition can be known before formal use, time cost can be saved, and efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of auxiliary equipment technology for semiconductor epitaxial machines, and in particular to a special gas delivery device, method, and semiconductor process system based on a liquid gas source. Background Technology

[0002] In the process of providing special gas sources for process equipment, special gas sources can be divided into liquid sources and gas sources according to their state in the cylinder, which is mainly determined by their physical properties. However, since current silicon epitaxial growth technology uses vapor deposition, even liquid gas sources are ultimately supplied in gaseous form.

[0003] Chinese invention patent (CN217584034U) discloses a special gas conveying device (such as...) Figure 1 , Figure 2 As shown), it includes a cabinet containing two gas source cylinders and gas supply lines. The gas supply lines include a TCS pipe connected to the two gas source cylinders and a hydrogen and argon pipe connected to the TCS pipe. Multiple pneumatic diaphragm valves are installed on the TCS pipe, hydrogen pipe, and argon pipe. The cabinet contains a smoke detector and a flame detector. The smoke detector, flame detector, and multiple pneumatic diaphragm valves are all electrically connected to the controller. Among them, 2 is a gas source cylinder, mainly used to store the gas source. 32 is a carrier gas input line. Because the liquid special gas cannot be used directly by the machine, the general practice is to mix it with the gas source by using a carrier gas that does not react with the gas source, and then transport the mixed gas to the process machine. The mixed gas transport line is 31. In addition, 33 is a purging line, and 5 and 8 are exhaust gas discharge lines.

[0004] However, existing technical solutions have the following drawbacks:

[0005] 1. Lack of safety pressure relief function: Due to problems such as high temperature and blockage of the delivery pipeline, overpressure may occur in the pipeline. If there is no pressure relief function, it is easy to cause pipeline damage, resulting in leakage and causing harm to personnel, equipment and environment.

[0006] 2. The emission system is poorly designed, with only one outlet, which cannot separate the emission of harmful process gases and conventional inert gases. This will increase the pressure on the downstream exhaust gas treatment and is not conducive to environmental protection.

[0007] 3. Without a testing system, it is impossible to predict in advance whether the gas source can be used;

[0008] 4. The remaining liquid in the cylinder cannot be fully utilized, which will cause waste and pollution.

[0009] Currently, no effective solutions have been proposed for the problems existing in related technologies, such as the lack of safety pressure relief function, the inability to separately discharge harmful process gases and conventional inert gases, the inability to predict in advance whether the gas source can be used, and the inability to fully utilize the remaining liquid in the cylinder. Summary of the Invention

[0010] The purpose of this invention is to address the shortcomings of existing technologies by providing a special gas delivery device and method based on a liquid gas source, thereby solving problems such as the lack of a safety pressure relief function, the inability to separately discharge harmful process gases and conventional inert gases, the inability to predict in advance whether the gas source can be used, and the inability to fully utilize the remaining liquid in the cylinder.

[0011] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0012] In a first aspect, the present invention provides a special gas conveying device based on a liquid gas source, comprising:

[0013] A carrier gas supply unit is connected to a carrier gas source and a liquid source storage device, respectively, and is used to supply carrier gas to the liquid source storage device so that the carrier gas and the liquid source gas are mixed inside the liquid source storage device to form a mixed gas.

[0014] A mixed gas output unit is connected to a liquid source storage device and a process machine, respectively, and is used to output mixed gas to the process machine.

[0015] A detection unit, which is connected to the gas mixing output unit, is used to detect the liquid source gas output by the gas mixing output unit when the carrier gas is not supplied to the liquid source storage device.

[0016] A purging unit is connected to the carrier gas supply unit and the gas mixing output unit respectively, and is used to purge the carrier gas supply unit and the gas mixing output unit with purging gas respectively;

[0017] The emission unit is connected to the carrier gas supply unit and the gas mixing output unit respectively, and is used to emit the gas from the carrier gas supply unit and the gas mixing output unit.

[0018] The first pressure relief unit is connected to the carrier gas supply unit and the discharge unit respectively, and is used to relieve pressure on the carrier gas supply unit.

[0019] The second pressure relief unit is connected to the gas-mixing output unit and the emission unit respectively, and is used to relieve pressure on the gas-mixing output unit.

[0020] In some of these embodiments, it also includes:

[0021] A reverse bubbling unit, which is connected to a liquid source storage device, is used to transport the residual liquid source gas in the liquid source storage device to the process equipment or exhaust gas treatment equipment.

[0022] Secondly, the present invention also provides a special gas transportation method based on a liquid gas source, applied to the special gas transportation equipment as described in any one of claims 1 to 6, comprising:

[0023] The carrier gas supply unit acquires carrier gas and delivers it to the liquid source storage device, so that the carrier gas and liquid source gas are mixed inside the liquid source storage device to form a mixed gas;

[0024] The gas mixing output unit acquires mixed gas and outputs mixed gas to the process equipment;

[0025] In the event of excessive pressure at the carrier gas inlet of the liquid source storage device, the first pressure relief unit can perform pressure relief.

[0026] If the pressure at the outlet of the mixed gas in the liquid source storage device is too high, the second pressure relief unit can relieve the pressure.

[0027] In some of these embodiments, it also includes:

[0028] The reverse bubbling unit obtains the driving gas and introduces it into the liquid source storage device through the outlet. The driving gas can transport the special gas remaining in the liquid source storage device to the exhaust gas treatment equipment or process equipment through the inlet of the liquid source storage device.

[0029] In some of these embodiments, it also includes:

[0030] When the volume of liquid source gas in one liquid source storage device reaches the minimum preset threshold, the detection unit is activated to detect the liquid source gas in another liquid source storage device.

[0031] If the inspection is passed, the purging unit and the discharge unit will purge and replace the pipelines of the entire equipment.

[0032] In the case of purging and replacement, the purging unit and the discharge unit purge the liquid source storage device;

[0033] After purging is complete, replace the liquid source storage device;

[0034] After the replacement is completed, the purging unit and the discharge unit purge and pressurize the entire equipment.

[0035] Thirdly, the present invention also provides a semiconductor process system, comprising:

[0036] Special gas delivery equipment as described in the first aspect.

[0037] The present invention adopts the above technical solution and has the following technical effects compared with the prior art:

[0038] This invention discloses a special gas conveying device, method, and semiconductor process system based on a liquid gas source. By setting up an emission unit, the mixed gas and purge gas can be emitted in separate zones, which can reduce the pressure of downstream tail gas treatment, protect the environment, and prevent the hazards of tail gas leakage. Furthermore, by setting up a first pressure relief unit and a second pressure relief unit, the carrier gas inlet and the mixed gas outlet can be depressurized, improving the safety of the equipment and system, protecting the lives and property of personnel, and ensuring the stability of the production process. In addition, by setting up a detection unit, the gas in the next cylinder can be tested in advance, so that it can be known whether the unused cylinder meets the process conditions before formal use, which can save time and improve efficiency. Attached Figure Description

[0039] Figures 1-2 This is a schematic diagram of the existing technology;

[0040] Figure 3 This is a schematic diagram (a) of a special gas conveying device according to an embodiment of the present invention;

[0041] Figure 4 This is a schematic diagram (II) of a special gas conveying device according to an embodiment of the present invention;

[0042] Figure 5 This is a schematic diagram (iii) of a special gas conveying device according to an embodiment of the present invention;

[0043] Figure 6 This is a schematic diagram (four) of a special gas conveying device according to an embodiment of the present invention;

[0044] Figure 7 This is a schematic diagram (V) of a special gas conveying device according to an embodiment of the present invention;

[0045] Figure 8 This is a specific embodiment of a special gas conveying device according to an embodiment of the present invention.

[0046] The reference numerals in the attached figures are:

[0047] 100. Carrier gas supply unit; 110. Carrier gas supply element; 120. First valve element; 130. First pressure monitoring element; 140. Second pressure monitoring element; 200. Mixed gas output unit; 210. Mixed gas output element; 220. Second valve element; 230. Third pressure monitoring element; 300. Detection unit; 310. Detection element; 320. Third valve element; 400. Purge unit; 410. Purge element; 420. Fourth valve element; 430. Fourth pressure monitoring element; 500. Discharge unit; 510. Power gas Supply element; 520, Vacuum element; 530, Fifth valve element; 540, First discharge element; 550, Sixth valve element; 560, Second discharge element; 570, Seventh valve element; 580, Fifth pressure monitoring element; 600, First pressure relief unit; 610, First pressure relief element; 620, Eighth valve element; 700, Second pressure relief unit; 710, Second pressure relief element; 720, Ninth valve element; 800, Reverse bubbling unit; 810, Propulsion gas supply element; 820, Tenth valve element; 830, Sixth pressure monitoring element. Detailed Implementation

[0048] To make the objectives, technical solutions, and advantages of this application clearer, the application is described and illustrated below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application. All other embodiments obtained by those skilled in the art based on the embodiments provided in this application without inventive effort are within the scope of protection of this application.

[0049] Obviously, the accompanying drawings described below are merely some examples or embodiments of this application. Those skilled in the art can apply this application to other similar scenarios based on these drawings without any inventive effort. Furthermore, it is understood that although the efforts made in this development process may be complex and lengthy, for those skilled in the art related to the content disclosed in this application, any changes to design, manufacturing, or production based on the technical content disclosed in this application are merely conventional technical means and should not be construed as insufficient disclosure of the content of this application.

[0050] In this application, the reference to "embodiment" means that a specific feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment that is mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described in this application may be combined with other embodiments without conflict.

[0051] Unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms “a,” “an,” “an,” “the,” and similar words used in this application do not indicate quantity limitation and may indicate singular or plural. The terms “comprising,” “including,” “having,” and any variations thereof used in this application are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or device that includes a series of steps or modules (units) is not limited to the listed steps or units, but may also include steps or units not listed, or may include other steps or units inherent to these processes, methods, products, or devices. The terms “connected,” “linked,” “coupled,” and similar words used in this application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. “Multiple” used in this application refers to two or more. “And / or” describes the relationship between related objects, indicating that three relationships may exist; for example, “A and / or B” can represent: A alone, A and B simultaneously, and B alone. The character " / " generally indicates that the preceding and following objects are in an "or" relationship. The terms "first," "second," and "third" used in this application are merely to distinguish similar objects and do not represent a specific ordering of the objects.

[0052] Example 1

[0053] This embodiment relates to the special gas delivery equipment of the present invention.

[0054] In one illustrative embodiment of the present invention, a special gas delivery device is connected to a liquid source storage device.

[0055] like Figure 3As shown, a special gas conveying device for a liquid gas source includes a carrier gas supply unit 100, a mixed gas output unit 200, a detection unit 300, a purging unit 400, a discharge unit 500, a first pressure relief unit 600, and a second pressure relief unit 700. The carrier gas supply unit 100 is connected to both a carrier gas source and a liquid source storage device, supplying carrier gas to the liquid source storage device to mix the carrier gas with the liquid source gas inside the storage device to form a mixed gas. The mixed gas output unit 200 is connected to both the liquid source storage device and a process machine, outputting the mixed gas to the process machine. The detection unit 300 is connected to the mixed gas output unit 200, detecting the liquid source gas output by the mixed gas output unit 200 when no carrier gas is supplied to the liquid source storage device. The purging unit 400 is connected to the carrier gas supply unit 100. The gas mixing output unit 200 is connected to the carrier gas supply unit 100 and the gas mixing output unit 200 respectively using purge gas; the exhaust unit 500 is connected to the carrier gas supply unit 100 and the gas mixing output unit 200 respectively and is used to exhaust the gas from the carrier gas supply unit 100 and the gas mixing output unit 200; the first pressure relief unit 600 is connected to the carrier gas supply unit 100 and the exhaust unit 500 respectively and is used to relieve pressure on the carrier gas supply unit 100; the second pressure relief unit 700 is connected to the gas mixing output unit 200 and the exhaust unit 500 respectively and is used to relieve pressure on the gas mixing output unit 200.

[0056] like Figure 3 and Figure 4 As shown, the carrier gas supply unit 100 includes a carrier gas supply element 110 and a first valve element 120. The carrier gas supply element 110 is connected to both a carrier gas source and a liquid source storage device, and is used to supply carrier gas to the liquid source storage device to mix the carrier gas with the liquid source gas inside the liquid source storage device to form a mixed gas. The first valve element 120 is disposed in the pipeline connecting the carrier gas supply element 110 to the carrier gas source and the liquid source storage device, and is used to control the flow in this pipeline.

[0057] Specifically, the carrier gas supply element 110 includes a carrier gas supply pipeline. A first end of the carrier gas supply pipeline is connected to a carrier gas source, and a second end of the carrier gas supply pipeline is connected to a liquid source storage device.

[0058] It should be noted that the first and second ends of the carrier gas supply pipeline are the two ends along its length.

[0059] In some of these embodiments, the carrier gas supply line includes, but is not limited to, stainless steel pipes.

[0060] Specifically, the carrier gas supply pipeline includes a main carrier gas supply pipeline and a branch carrier gas supply pipeline. The first end of the main carrier gas supply pipeline is connected to the carrier gas source; the first end of the branch carrier gas supply pipeline is connected to the second end of the main carrier gas supply pipeline, and the second end of the branch carrier gas supply pipeline is connected to the carrier gas inlet of the liquid source storage device.

[0061] It should be noted that the first and second ends of the main carrier gas supply pipeline are the two ends of its length direction, respectively.

[0062] It should be noted that the first and second ends of the carrier gas supply branch pipe are the two ends of its length direction, respectively.

[0063] In some of these embodiments, the carrier gas source includes, but is not limited to, an H2 source.

[0064] In some of these embodiments, the main carrier gas supply pipeline includes, but is not limited to, stainless steel pipes.

[0065] In some of these embodiments, the carrier gas supply branch line includes, but is not limited to, stainless steel pipes.

[0066] Specifically, the first valve element 120 includes a first regulating valve, a first manual diaphragm valve, a first check valve, a second manual diaphragm valve, a first pneumatic diaphragm valve, and a second pneumatic diaphragm valve. The system comprises the following components: a first regulating valve located on the main carrier gas supply line to regulate the flow rate and pressure of the carrier gas from the carrier gas source to the main carrier gas supply line; a first manual diaphragm valve located on the main carrier gas supply line downstream of the first regulating valve; a third manual diaphragm valve that is normally open and can be manually closed in an emergency; a first check valve located on the main carrier gas supply line downstream of the third manual diaphragm valve to prevent backflow of carrier gas entering the main carrier gas supply line; a second manual diaphragm valve located on the branch carrier gas supply line downstream of the first check valve; a fourth manual diaphragm valve that is normally open and can be manually closed in an emergency; a first pneumatic diaphragm valve located on the branch carrier gas supply line downstream of the second manual diaphragm valve to control the flow between the carrier gas supply line and the liquid source storage device; and a second pneumatic diaphragm valve located on the branch carrier gas supply line downstream of the first pneumatic diaphragm valve to control the flow between the carrier gas supply line and the liquid source storage device.

[0067] In some of these embodiments, the first valve element 120 includes, but is not limited to, a regulating valve, a check valve, or a diaphragm valve.

[0068] Furthermore, the carrier gas supply unit 100 also includes a first pressure monitoring element 130. The first pressure monitoring element 130 is disposed in the pipeline connecting the carrier gas supply unit 110 and the liquid source storage device, and is used to monitor the pressure in the pipeline.

[0069] Specifically, the first pressure monitoring element 130 includes a first pressure monitoring pipeline and a first pressure monitor. The first end of the first pressure monitoring pipeline is connected to the carrier gas supply pipeline and is located between the first regulating valve and the first manual diaphragm valve; the first pressure monitor is connected to the second end of the first pressure monitoring pipeline and can display the pressure information in the carrier gas supply pipeline in real time.

[0070] More specifically, the first pressure monitoring line is connected to the main carrier gas supply line.

[0071] It should be noted that the first end and the second end of the first pressure monitoring pipeline are the two ends of its length, respectively.

[0072] In some of these embodiments, the first pressure monitoring line includes, but is not limited to, a stainless steel pipe.

[0073] In some of these embodiments, the first pressure monitor includes, but is not limited to, a pressure gauge.

[0074] Furthermore, the carrier gas supply unit 100 also includes a second pressure monitoring element 140. The second pressure monitoring element 140 is disposed in the pipeline connecting the carrier gas supply element 110 and the liquid source storage device, and is located at the connection between the carrier gas supply element 110 and the liquid source storage device, for monitoring the pressure at the inlet of the carrier gas.

[0075] Specifically, the second pressure monitoring element 140 includes a second pressure monitoring pipeline and a second pressure monitor. The first end of the second pressure monitoring pipeline is connected to the carrier gas supply pipeline and is located between the first pneumatic diaphragm valve and the second pneumatic diaphragm valve; the second pressure monitor is connected to the second end of the second pressure monitoring pipeline and can monitor the pressure information at the carrier gas inlet in real time and transmit it to the central control room.

[0076] More specifically, the second pressure monitoring line is connected to the carrier gas supply branch line.

[0077] It should be noted that the first and second ends of the second pressure monitoring pipeline are the two ends along its length, respectively.

[0078] In some of these embodiments, the second pressure monitoring line includes, but is not limited to, a stainless steel pipe.

[0079] In some of these embodiments, the second pressure monitor includes, but is not limited to, a pressure sensor.

[0080] like Figure 3 and Figure 4As shown, the gas mixing output unit 200 includes a gas mixing output element 210 and a second valve element 220. The gas mixing output element 210 is connected to a liquid source storage device and a process machine, respectively, and is used to output mixed gas to the process machine. The second valve element 220 is disposed in the pipeline connecting the gas mixing output element 210 to the liquid source storage device and the process machine, and is used to control the flow in the pipeline.

[0081] Specifically, the gas mixing output element 210 includes a gas mixing output pipeline. The first end of the gas mixing output pipeline is connected to a liquid source storage device, and the second end of the gas mixing output pipeline is connected to a process machine.

[0082] It should be noted that the first and second ends of the mixed-gas output pipeline are the two ends along its length, respectively.

[0083] In some of these embodiments, the mixed-gas output line includes, but is not limited to, a stainless steel pipe.

[0084] Specifically, the mixed gas output pipeline includes a main mixed gas output pipeline and a branch mixed gas output pipeline. The first end of the main mixed gas output pipeline is connected to the process equipment; the first end of the branch mixed gas output pipeline is connected to the second end of the main mixed gas output pipeline, and the second end of the branch mixed gas output pipeline is connected to the mixed gas outlet of the liquid source storage equipment.

[0085] It should be noted that the first and second ends of the mixed-gas output main pipeline are the two ends of its length direction, respectively.

[0086] It should be noted that the first and second ends of the mixed gas output branch pipe are the two ends of its length direction, respectively.

[0087] In some of these embodiments, the main gas-fuel output pipeline includes, but is not limited to, a stainless steel pipe.

[0088] In some of these embodiments, the mixed-gas output branch line includes, but is not limited to, a stainless steel pipe.

[0089] Specifically, the second valve element 220 includes a third pneumatic diaphragm valve, a fourth pneumatic diaphragm valve, a third manual diaphragm valve, and a fourth manual diaphragm valve. The third pneumatic diaphragm valve is located upstream of the gas-mixed output pipeline where it connects to the emission unit 500, and is used to control the connection between the gas-mixed output pipeline and the liquid source storage device. The fourth pneumatic diaphragm valve is located downstream of the gas-mixed output pipeline where it connects to the emission unit 500, and is used to control the connection between the gas-mixed output pipeline and the liquid source storage device and the emission unit 500. The third manual diaphragm valve is located downstream of the fourth pneumatic diaphragm valve in the gas-mixed output pipeline. In actual operation, the third manual diaphragm valve is normally open and can be manually closed in an emergency. The fourth manual diaphragm valve is located downstream of the third manual diaphragm valve in the gas-mixed output pipeline. In actual operation, the third manual diaphragm valve is normally open and can be manually closed in an emergency.

[0090] More specifically, the third pneumatic diaphragm valve is installed in the mixed gas output branch line; the fourth pneumatic diaphragm valve is installed in the mixed gas output branch line; the third manual diaphragm valve is installed in the mixed gas output branch line; and the fourth manual diaphragm valve is installed in the mixed gas output main line.

[0091] Furthermore, the gas mixing output unit 200 also includes a third pressure monitoring element 230. The third pressure monitoring element 230 is disposed in the pipeline connecting the gas mixing output element 210 and the liquid source storage device, and is located at the connection between the gas mixing output element 210 and the liquid source storage device, for monitoring the pressure at the gas mixing outlet.

[0092] Specifically, the third pressure monitoring element 230 includes a third pressure monitoring pipeline and a third pressure monitor. The first end of the third pressure monitoring pipeline is connected to the mixed gas output pipeline and is located between the third pneumatic diaphragm valve and the fourth pneumatic diaphragm valve; the second end of the third pressure monitoring pipeline is connected to the third pressure monitoring device, which can monitor the pressure information at the outlet of the mixed gas in real time and transmit it to the central control room.

[0093] More specifically, the third pressure monitoring line is connected to the mixed gas output branch line.

[0094] It should be noted that the first and second ends of the third pressure monitoring pipeline are the two ends along its length, respectively.

[0095] In some of these embodiments, the third pressure monitoring line includes, but is not limited to, a stainless steel pipe.

[0096] In some embodiments, the third pressure monitor includes, but is not limited to, a pressure sensor.

[0097] like Figure 3 and Figure 4As shown, the detection unit 300 includes a detection element 310 and a third valve element 320. The detection element 310 is connected to the gas mixing output unit 200 and is used to detect the liquid source gas output by the gas mixing output unit 200 when the carrier gas is not supplied to the liquid source storage device. The third valve element 320 is disposed in the pipeline connecting the detection element 310 and the gas mixing output unit 200 and is used to control the flow in the pipeline.

[0098] Specifically, the detection element 310 is connected to the gas-mixing output element 210; the third valve element 320 is disposed in the pipeline connecting the detection element 310 and the gas-mixing output element 210.

[0099] Specifically, the detection element 310 includes a gas analyzer and a detection pipeline. The first end of the detection pipeline is connected to the gas analyzer, and the second end of the detection pipeline is connected to the mixed gas delivery pipeline.

[0100] Furthermore, the connection point between the detection pipeline and the gas mixing delivery pipeline is located between the fourth pneumatic diaphragm valve and the third manual diaphragm valve.

[0101] It should be noted that the first and second ends of the testing pipeline are the two ends along its length.

[0102] In some embodiments, the gas analyzer includes, but is not limited to, a gas chromatograph.

[0103] In some embodiments, the detection conduit includes, but is not limited to, stainless steel tubing.

[0104] Specifically, the detection pipeline includes a main detection pipeline and a branch detection pipeline. The first end of the main detection pipeline is connected to the gas analyzer; the first end of the branch detection pipeline is connected to the second end of the main detection pipeline, and the second end of the branch detection pipeline is connected to the mixed gas delivery branch pipeline. The connection point between the branch detection pipeline and the mixed gas delivery branch pipeline is located between the fourth pneumatic diaphragm valve and the third manual diaphragm valve.

[0105] It should be noted that the first and second ends of the main pipeline are the two ends of its length, respectively; the first and second ends of the branch pipeline are the two ends of its length, respectively.

[0106] In some embodiments, the detection main pipeline includes, but is not limited to, a stainless steel pipe.

[0107] In some embodiments, the detection branch line includes, but is not limited to, stainless steel pipes.

[0108] Specifically, the third valve element 320 includes a test valve. The test valve is located in the detection line and is used to control the flow between the detection line and the gas analyzer.

[0109] More specifically, the test valve is located in the test branch line.

[0110] In some of these embodiments, the third valve element 320 includes, but is not limited to, a test valve.

[0111] like Figure 3 and Figure 4 As shown, the purging unit 400 includes a purging element 410 and a fourth valve element 420. The purging element 410 is connected to both the carrier gas supply unit 100 and the gas mixing output unit 200, and is used to purge the carrier gas supply unit 100 and the gas mixing output unit 200 with purging gas. The fourth valve element 420 is disposed in the pipeline connecting the purging element 410 to the carrier gas supply unit 100 and the gas mixing output unit 200, and is used to control the flow in this pipeline.

[0112] Specifically, the purging element 410 is connected to the carrier gas supply element 110 and the gas mixing output element 210 respectively; the fourth valve element 420 is disposed in the pipeline connecting the purging element 410 to the carrier gas supply element 110 and the gas mixing output element 210.

[0113] Specifically, the purging element 410 includes a purging pipeline. The first end of the purging pipeline is connected to a purging gas source, and the second end of the purging pipeline is connected to a carrier gas supply pipeline and a mixed gas output pipeline, respectively.

[0114] It should be noted that the first and second ends of the purging pipeline are the two ends along its length.

[0115] In some of these embodiments, the purge gas source includes, but is not limited to, a PN2 source.

[0116] Specifically, the purging pipeline includes a main purging pipeline, a first purging branch pipeline, a second purging branch pipeline, and a third purging branch pipeline. The first end of the main purging pipeline is connected to the purging gas source; the first end of the first purging branch pipeline is connected to the second end of the main purging pipeline; the first end of the second purging branch pipeline is connected to the second end of the first purging branch pipeline, and the second end of the second purging branch pipeline is connected to the carrier gas supply branch pipeline; the first end of the third purging branch pipeline is connected to the second end of the first purging branch pipeline, and the second end of the third purging branch pipeline is connected to the mixed gas output branch pipeline.

[0117] It should be noted that the first and second ends of the main purging pipeline are the two ends of its length direction, respectively; the first and second ends of the first purging branch pipeline are the two ends of its length direction, respectively; the first and second ends of the second purging branch pipeline are the two ends of its length direction, respectively; and the first and second ends of the third purging branch pipeline are the two ends of its length direction, respectively.

[0118] In some embodiments, the main purging line includes, but is not limited to, a stainless steel pipe.

[0119] In some of these embodiments, the first purging branch line includes, but is not limited to, a stainless steel pipe.

[0120] In some embodiments, the second purging branch line includes, but is not limited to, a stainless steel pipe.

[0121] In some embodiments, the third purging branch line includes, but is not limited to, a stainless steel pipe.

[0122] Specifically, the fourth valve element 420 includes a second regulating valve, a fifth pneumatic diaphragm valve, a micro-leakage valve, a second check valve, a sixth pneumatic diaphragm valve, a seventh pneumatic diaphragm valve, and an eighth pneumatic diaphragm valve. The system includes: a second regulating valve located in the purge pipeline to regulate the flow rate and pressure of the purge gas from the purge gas source to the purge pipeline; a fifth pneumatic diaphragm valve located in the purge pipeline downstream of the second regulating valve to control the flow between the purge pipeline and the purge gas source; a micro-leak valve located in the purge pipeline in parallel with the fifth pneumatic diaphragm valve, where a small amount of nitrogen is constantly passed through to ensure the cleanliness of the overall equipment pipeline; a second check valve located in the purge pipeline downstream of the micro-leak valve to prevent backflow of the purge gas; a sixth pneumatic diaphragm valve located in the purge pipeline to control the flow between the purge pipeline and the carrier gas supply pipeline and the mixed gas output pipeline; a seventh pneumatic diaphragm valve located in the purge pipeline to control the flow between the purge pipeline and the carrier gas supply pipeline; and an eighth pneumatic diaphragm valve located in the purge pipeline to control the flow between the purge pipeline and the mixed gas output pipeline.

[0123] More specifically, the second regulating valve is located in the main purge line; the fifth pneumatic diaphragm valve is located in the main purge line; the micro-leak valve is located in the main purge line; the second check valve is located in the main purge line; the sixth pneumatic diaphragm valve is located in the first purge branch line; the seventh pneumatic diaphragm valve is located in the second purge branch line; and the eighth pneumatic diaphragm valve is located in the third purge branch line.

[0124] In some of these embodiments, the fourth valve element 420 includes, but is not limited to, a regulating valve, a micro-leakage valve, a check valve, and a diaphragm valve.

[0125] Furthermore, the purging unit 400 also includes a fourth pressure monitoring element 430. The fourth pressure monitoring element 430 is disposed in the pipeline connecting the purging element 410, the carrier gas supply unit 100, and the mixing gas output unit 200, and is used to monitor the pressure in the pipeline.

[0126] Specifically, the fourth pressure monitoring element 430 is installed in the pipeline that connects the purging element 410 with the carrier gas supply element 110 and the gas mixing output element 210.

[0127] Specifically, the fourth pressure monitoring element 430 includes a fourth pressure monitoring line and a fourth pressure monitor. The first end of the fourth pressure monitoring line is connected to the purge line and is located between the second regulating valve and the fifth pneumatic diaphragm valve; the fourth pressure monitor is connected to the second end of the fourth pressure monitoring line and can display the pressure information within the purge line in real time. More specifically, the fourth pressure monitoring line is connected to the main purge line.

[0128] It should be noted that the first and second ends of the fourth pressure monitoring pipeline are the two ends along its length, respectively.

[0129] In some of these embodiments, the fourth pressure monitoring line includes, but is not limited to, a stainless steel pipe.

[0130] In some of these embodiments, the fourth pressure monitor includes, but is not limited to, a pressure gauge.

[0131] like Figure 3 and Figure 4 As shown, the emission unit 500 includes a power gas supply element 510, a vacuum element 520, a fifth valve element 530, a first emission element 540, a sixth valve element 550, a second emission element 560, and a seventh valve element 570. The system includes a power gas supply element 510 for supplying power gas; a vacuum element 520 connected to the power gas supply element 510, the carrier gas supply unit 100, and the mixed gas output unit 200 for providing negative vacuum pressure to the pipelines of the liquid source storage device and the overall equipment; a fifth valve element 530 located in the pipeline connecting the vacuum element 520, the power gas supply element 510, the carrier gas supply unit 100, and the mixed gas output unit 200 for controlling the flow in the pipeline; a first discharge element 540 connected to the vacuum element 520 and the exhaust gas treatment device for discharging the mixed gas; a sixth valve element 550 located in the pipeline connecting the first discharge element 540, the vacuum element 520, and the exhaust gas treatment device for controlling the flow in the pipeline; a second discharge element 560 connected to the vacuum element 520 and the exhaust gas treatment device for discharging purge gas; and a seventh valve element 570 located in the pipeline connecting the second discharge element 560, the vacuum element 520, and the exhaust gas treatment device for controlling the flow in the pipeline.

[0132] Specifically, the vacuum element 520 is connected to the carrier gas supply element 110 and the gas mixing output element 210, respectively.

[0133] Specifically, the power gas supply element 510 includes a power gas source and a power gas supply pipeline. The first end of the power gas supply pipeline is connected to the power gas source, and the second end of the power gas supply pipeline is connected to the vacuum element 520.

[0134] It should be noted that the first and second ends of the power gas supply pipeline are the two ends along its length, respectively.

[0135] It should be noted that the vacuum element 520 uses a venturi device to create a vacuum, which requires a power gas. In this embodiment, the power gas is GN2.

[0136] In some of these embodiments, the power source includes, but is not limited to, a GN2 source.

[0137] In some of these embodiments, the power gas supply line includes, but is not limited to, stainless steel pipes.

[0138] Specifically, the vacuum element 520 includes a vacuum generator, a main vacuum line, a first vacuum branch line, a second vacuum branch line, and a third vacuum branch line. The vacuum generator is connected to the second gas supply line, the main vacuum line, the first exhaust element 540, and the second exhaust element 560, respectively, to provide a vacuum negative pressure, allowing the gas in the entire equipment and pipelines to be discharged to the exhaust gas treatment equipment through the first exhaust element 540 and the second exhaust element 560. The first end of the vacuum line is connected to the vacuum generator, and the second end of the vacuum line is connected to the carrier gas supply line and the mixed gas output line, respectively.

[0139] Furthermore, the connection point between the vacuum line and the carrier gas supply line is located between the first pneumatic diaphragm valve and the second pneumatic diaphragm valve; the connection point between the vacuum line and the mixed gas supply line is located between the third pneumatic diaphragm valve and the fourth pneumatic diaphragm valve.

[0140] It should be noted that the first and second ends of the vacuum tube are the two ends along its length.

[0141] In some of these embodiments, the vacuum generator includes, but is not limited to, a Venturi generator.

[0142] In some of these embodiments, the vacuum tubing includes, but is not limited to, stainless steel tubing.

[0143] Specifically, the vacuum pipeline includes a main vacuum pipeline, a first vacuum branch pipeline, a second vacuum branch pipeline, and a third vacuum branch pipeline. The first end of the main vacuum pipeline is connected to the vacuum generator; the first end of the first vacuum branch pipeline is connected to the second end of the main vacuum pipeline; the first end of the second vacuum branch pipeline is connected to the second end of the first vacuum branch pipeline, and the second end of the second vacuum branch pipeline is connected to the carrier gas supply branch pipeline, with the connection point between the second vacuum branch pipeline and the carrier gas supply branch pipeline located between the first pneumatic diaphragm valve and the second pneumatic diaphragm valve; the first end of the third vacuum branch pipeline is connected to the second end of the first vacuum branch pipeline, and the second end of the third vacuum branch pipeline is connected to the mixed gas output branch pipeline, with the connection point between the third vacuum branch pipeline and the mixed gas output branch pipeline located between the third pneumatic diaphragm valve and the fourth pneumatic diaphragm valve.

[0144] It should be noted that the first and second ends of the main vacuum pipeline are the two ends of its length direction, respectively; the first and second ends of the first vacuum branch pipeline are the two ends of its length direction, respectively; the first and second ends of the second vacuum branch pipeline are the two ends of its length direction, respectively; and the first and second ends of the third vacuum branch pipeline are the two ends of its length direction, respectively.

[0145] Furthermore, the second vacuum branch line and the second purging branch line are the same line; the third vacuum branch line and the third purging branch line are the same line.

[0146] In some of these embodiments, the main vacuum pipeline includes, but is not limited to, stainless steel tubing.

[0147] In some of these embodiments, the first vacuum branch line includes, but is not limited to, a stainless steel pipe.

[0148] In some of these embodiments, the second vacuum branch line includes, but is not limited to, a stainless steel pipe.

[0149] In some of these embodiments, the third vacuum branch line includes, but is not limited to, a stainless steel pipe.

[0150] Specifically, the fifth valve element 530 includes a seventh pneumatic diaphragm valve, an eighth pneumatic diaphragm valve, a ninth pneumatic diaphragm valve, a fifth manual diaphragm valve, and a third check valve. The seventh pneumatic diaphragm valve is located in the vacuum line and controls the flow between the vacuum line and the carrier gas supply line; the eighth pneumatic diaphragm valve is located in the vacuum line and controls the flow between the vacuum line and the mixed gas output line; the ninth pneumatic diaphragm valve is located in the vacuum line and downstream of the seventh and eighth pneumatic diaphragm valves, controlling the flow between the vacuum line and the carrier gas supply line and the mixed gas output line; the fifth manual diaphragm valve is located in the vacuum line and downstream of the ninth pneumatic diaphragm valve. In actual operation, the fifth manual diaphragm valve is normally open and can be manually closed in emergencies; the second check valve is located in the vacuum line and downstream of the fifth manual diaphragm valve to prevent gas backflow. More specifically, the seventh pneumatic diaphragm valve is located in the second vacuum branch line; the eighth pneumatic diaphragm valve is located in the third vacuum branch line; the ninth pneumatic diaphragm valve is located in the first vacuum branch line; the fifth manual diaphragm valve is located in the main vacuum line; and the third check valve is located in the main vacuum line.

[0151] In some of these embodiments, the fifth valve element 530 includes, but is not limited to, a check valve or a diaphragm valve.

[0152] Specifically, the first emission element 540 includes a first emission pipeline. A first end of the first emission pipeline is connected to a vacuum generator, and a second end of the first emission pipeline is connected to an exhaust gas treatment device.

[0153] It should be noted that the first end and the second end of the first discharge pipe are the two ends of its length direction, respectively.

[0154] In some of these embodiments, the first discharge line includes, but is not limited to, a stainless steel pipe.

[0155] Specifically, the sixth valve element 550 includes a tenth pneumatic diaphragm valve. This tenth pneumatic diaphragm valve is located in the first discharge line and is used to control the connection between the first discharge line and the exhaust gas treatment equipment.

[0156] In some of these embodiments, the sixth valve element 550 includes, but is not limited to, a diaphragm valve.

[0157] Specifically, the second emission element 560 includes a second emission pipeline. A first end of the second emission pipeline is connected to a vacuum generator, and a second end of the second emission pipeline is connected to an exhaust gas treatment device.

[0158] It should be noted that the first and second ends of the second discharge pipe are the two ends along its length.

[0159] In some of these embodiments, the second discharge line includes, but is not limited to, a stainless steel pipe.

[0160] Specifically, the seventh valve element 570 includes an eleventh pneumatic diaphragm valve. This eleventh pneumatic diaphragm valve is located in the second discharge line and is used to control the connection between the second discharge line and the exhaust gas treatment equipment.

[0161] In some of these embodiments, the seventh valve element 570 includes, but is not limited to, a diaphragm valve.

[0162] It should be noted that by setting the first emission element 540 and the second emission element 560, the mixed gas and the purge gas can be emitted in separate zones; that is, when the mixed gas needs to be emitted, the corresponding sixth valve element 550 on the first emission element 540 can be opened; when the purge gas needs to be emitted, the corresponding seventh valve element 570 on the second emission element 560 can be opened.

[0163] Furthermore, the emission unit 500 also includes a fifth pressure monitoring element 580. The fifth pressure monitoring element 580 is disposed in the pipeline connecting the vacuum element 520, the carrier gas supply unit 100, and the gas mixing output unit 200, and is used to monitor the pressure in the pipeline.

[0164] Specifically, the fifth pressure monitoring element 580 includes a fifth pressure monitoring line and a fifth pressure monitor. The first end of the fifth pressure monitoring line is connected to the vacuum line and is located upstream of the fifth manual diaphragm valve; the fifth pressure monitor is connected to the second end of the fifth pressure monitoring line and can monitor the pressure information in the vacuum line in real time and transmit the pressure information to the central control room.

[0165] It should be noted that the first and second ends of the fifth pressure monitoring pipeline are the two ends along its length, respectively.

[0166] In some embodiments, the fifth pressure monitoring line includes, but is not limited to, a stainless steel pipe.

[0167] In some embodiments, the fifth pressure monitor includes, but is not limited to, a pressure gauge.

[0168] like Figure 3 and Figure 4 As shown, the first pressure relief unit 600 includes a first pressure relief element 610 and an eighth valve element 620. The first pressure relief element 610 is connected to both the carrier gas supply unit 100 and the discharge unit 500, and is located at the connection point between the carrier gas supply unit 100 and the liquid source storage device. It is used to relieve pressure when the pressure at the carrier gas inlet of the liquid source storage device exceeds a first preset pressure threshold. The eighth valve element 620 is disposed in the pipeline connecting the first pressure relief element 610 to the carrier gas supply unit 100 and the discharge unit 500, and is used to control the flow in that pipeline.

[0169] Specifically, the first pressure relief element 610 is connected to the carrier gas supply element 110 and the vacuum element 520 respectively; the eighth valve element 620 is disposed in the pipeline connecting the first pressure relief element 610 to the carrier gas supply element 110 and the vacuum element 520.

[0170] Specifically, the first pressure relief element 610 includes a first pressure relief pipeline and a first pressure relief valve. The first end of the first pressure relief pipeline is connected to a vacuum pipeline, and the second end of the first pressure relief pipeline is connected to a carrier gas supply pipeline. The first pressure relief valve is disposed in the first pressure relief pipeline and is used to relieve pressure when the pressure at the carrier gas inlet of the liquid source storage device exceeds a first preset pressure threshold.

[0171] More specifically, the connection point between the first end of the first pressure relief line and the vacuum line is located between the ninth pneumatic diaphragm valve and the fifth manual diaphragm valve, and the connection point between the second end of the first pressure relief line and the carrier gas supply line is located between the first pneumatic diaphragm valve and the second pneumatic diaphragm valve.

[0172] More specifically, the first end of the first pressure relief line is connected to the first vacuum branch line, and the connection point between the first end of the first pressure relief line and the first vacuum branch line is located downstream of the ninth pneumatic diaphragm valve. The second end of the first pressure relief line is connected to the second purge branch line (second vacuum branch line), and the connection point between the second end of the first pressure relief line and the second purge branch line (second vacuum branch line) is located upstream of the seventh pneumatic diaphragm valve.

[0173] It should be noted that the first end and the second end of the first pressure relief pipeline are the two ends of its length, respectively.

[0174] It should be noted that the first preset pressure threshold is 100 psig to 150 psig; preferably, the first preset pressure threshold is 100 psig or 150 psig.

[0175] In some of these embodiments, the first pressure relief line includes, but is not limited to, a stainless steel pipe.

[0176] In some of these embodiments, the first pressure relief valve includes, but is not limited to, a safety valve.

[0177] Specifically, the eighth valve element 620 includes a sixth manual diaphragm valve and a fourth check valve. The sixth manual diaphragm valve is located in the first pressure relief line and upstream of the first pressure relief valve. In actual operation, the sixth manual diaphragm valve is a normally open valve and can be manually closed in an emergency. The fourth check valve is located in the first pressure relief line and downstream of the first pressure relief valve to prevent gas backflow.

[0178] In some of these embodiments, the eighth valve element 620 includes, but is not limited to, a diaphragm valve and a check valve.

[0179] like Figure 3 and Figure 4 As shown, the second pressure relief unit 700 includes a second pressure relief element 710 and a ninth valve element 720. The second pressure relief element 710 is connected to the gas mixing output unit 200 and the discharge unit 500, respectively, and is located at the connection between the gas mixing output unit 200 and the liquid source storage device. It is used to relieve pressure when the pressure at the gas mixing outlet of the liquid source storage device exceeds a second preset pressure threshold. The ninth valve element 720 is disposed in the pipeline connecting the second pressure relief element 710 to the gas mixing output unit 200 and the discharge unit 500, and is used to control the flow in the pipeline.

[0180] Specifically, the second pressure relief element 710 is connected to the gas mixing output element 210 and the vacuum element 520 respectively; the ninth valve element 720 is disposed in the pipeline connecting the second pressure relief element 710 to the gas mixing output element 210 and the vacuum element 520.

[0181] Specifically, the second pressure relief element 710 includes a second pressure relief line and a second pressure relief valve. The first end of the second pressure relief line is connected to a vacuum line, and the second end of the second pressure relief line is connected to a second vacuum branch line. The connection point between the second end of the second pressure relief line and the first vacuum branch line is located downstream of the ninth pneumatic diaphragm valve. The second pressure relief valve is located in the second pressure relief line and is used to relieve pressure when the pressure at the outlet of the mixed gas exceeds a second preset pressure threshold.

[0182] More specifically, the connection point between the first end of the second pressure relief line and the vacuum line is located between the seventh pneumatic diaphragm valve and the fifth manual diaphragm valve, and the connection point between the second end of the second pressure relief line and the mixed gas output line is located between the third pneumatic diaphragm valve and the fourth pneumatic diaphragm valve.

[0183] More specifically, the first end of the second pressure relief line is connected to the first vacuum branch line, and the connection point between the first end of the second pressure relief line and the first vacuum branch line is located downstream of the ninth pneumatic diaphragm valve. The second end of the second pressure relief line is connected to the second purge branch line (third vacuum branch line), and the connection point between the second end of the second pressure relief line and the second purge branch line (third vacuum branch line) is located upstream of the eighth pneumatic diaphragm valve.

[0184] It should be noted that the first and second ends of the second pressure relief pipeline are the two ends along its length, respectively.

[0185] It should be noted that the second preset pressure threshold is 100 psig to 150 psig; preferably, the second preset pressure threshold is 100 psig or 150 psig.

[0186] In some of these embodiments, the second pressure relief line includes, but is not limited to, a stainless steel pipe.

[0187] In some of these embodiments, the second pressure relief valve includes, but is not limited to, a safety valve.

[0188] Specifically, the ninth valve element 720 includes a seventh manual diaphragm valve and a fifth check valve. The seventh manual diaphragm valve is located in the second pressure relief line and upstream of the second pressure relief valve. In actual operation, the ninth manual diaphragm valve is a normally open valve and can be manually closed in an emergency. The fifth check valve is located in the second pressure relief line and downstream of the second pressure relief valve to prevent gas backflow.

[0189] In some of these embodiments, the ninth valve element 720 includes, but is not limited to, a diaphragm valve and a check valve.

[0190] The usage method of this embodiment is as follows:

[0191] (a) Carrier gas supply

[0192] The system opens the first regulating valve, the first pneumatic diaphragm valve, and the second pneumatic diaphragm valve, allowing the carrier gas to enter the interior of the liquid source storage device through the carrier gas supply pipeline, thereby mixing the carrier gas with the liquid gas source to obtain a mixed gas.

[0193] (II) Mixed Gas Output

[0194] The system opens the third and fourth pneumatic diaphragm valves, allowing the mixed gas to be delivered to the process equipment through the mixed gas output pipeline under the propulsion of the carrier gas.

[0195] (III) Conduct testing before replacing the liquid source storage device.

[0196] When the liquid gas source inside one liquid source storage device is depleted, the system opens the test valve connected to the other liquid source storage device, allowing the special gas inside the liquid source storage device to be analyzed by a gas analyzer through the detection branch pipeline, thereby enabling the special gas to be verified in advance.

[0197] (iv) Purge before replacing liquid source storage equipment

[0198] If the liquid gas source inside the liquid source storage device on one side is exhausted, the liquid source storage device needs to be replaced. However, before replacement, the pipeline and liquid source storage device need to be purged. That is, the system opens the second regulating valve, the fifth pneumatic diaphragm valve, the micro-leak valve, the first pneumatic diaphragm valve, the fourth pneumatic diaphragm valve, the fifth pneumatic diaphragm valve, the sixth pneumatic diaphragm valve, the seventh pneumatic diaphragm valve, the eighth pneumatic diaphragm valve, the ninth pneumatic diaphragm valve, the tenth pneumatic diaphragm valve, and the eleventh pneumatic diaphragm valve, so that the purging gas can replace the gas in the purging main pipeline, the purging branch pipeline, the mixed gas output pipeline, the third vacuum branch pipeline, the second vacuum branch pipeline, the first vacuum branch pipeline, and the vacuum main pipeline.

[0199] After the residual mixed gas in the pipeline is replaced, the system opens the second, third, eighth, and ninth pneumatic diaphragm valves and closes the fourth pneumatic diaphragm valve, allowing the purging gas to enter the liquid source storage device through the purging main pipeline, purging branch pipeline, and second vacuum branch pipeline, and to purge the liquid source storage device. The purged gas can then be discharged through the third vacuum branch pipeline, first vacuum branch pipeline, and vacuum main pipeline.

[0200] (v) Replacement of liquid source storage equipment

[0201] After purging the liquid source storage device, the system closes the second and third pneumatic diaphragm valves and then replaces the liquid source storage device.

[0202] (vi) Pressure holding

[0203] After the liquid source storage device is replaced, the system opens the second regulating valve, the fifth pneumatic diaphragm valve, the micro-leak valve, the first pneumatic diaphragm valve, the fourth pneumatic diaphragm valve, the fifth pneumatic diaphragm valve, the sixth pneumatic diaphragm valve, the seventh pneumatic diaphragm valve, the eighth pneumatic diaphragm valve, and the ninth pneumatic diaphragm valve, allowing the purging gas to enter the purging main pipeline, the purging branch pipeline, the mixed gas output pipeline, the third vacuum branch pipeline, the second vacuum branch pipeline, the first vacuum branch pipeline, and the vacuum main pipeline. By observing the pressure gauge, if there is no pressure drop within a certain period of time, it is considered that the pressure holding is completed.

[0204] After the pressure holding is completed, the system opens the eleventh diaphragm valve, and the purging gas used for pressure holding can be discharged through the second discharge pipeline.

[0205] (vii) Pressure relief

[0206] If excessive pressure occurs at the inlet of the carrier gas and the outlet of the mixed gas, the equipment can automatically open the first and second pressure relief valves to relieve pressure in the pipeline, thus ensuring the safety of the overall equipment.

[0207] The advantages of this embodiment are that by setting up an emission unit, the mixed gas and purge gas can be emitted in separate zones, which can reduce the pressure of downstream tail gas treatment, protect the environment, and prevent the hazards of tail gas leakage. Furthermore, by setting up a first pressure relief unit and a second pressure relief unit, the carrier gas inlet and the mixed gas outlet can be depressurized, improving the safety of equipment and systems, protecting the lives and property of personnel, and ensuring the stability of the production process. In addition, by setting up a detection unit, the gas in the next cylinder can be tested in advance, so that it can be known whether the unused cylinder meets the process conditions before formal use, which can save time and improve efficiency.

[0208] Example 2

[0209] This embodiment is a modified embodiment of embodiment 1. The special gas delivery device is connected to several liquid source storage devices, and the structures of the carrier gas supply unit 100, the mixed gas output unit 200, the purging unit 400, the emission unit 500, the detection unit 300, the first pressure relief unit 600, and the second pressure relief unit 700 are different.

[0210] Specifically, there are several carrier gas supply branch lines, and the first end of each of the several carrier gas supply branch lines is connected to the second end of the main carrier gas supply line, and the second end of each of the several carrier gas supply branch lines is connected to the corresponding liquid source storage device.

[0211] The number of carrier gas supply branch lines is matched with the number of liquid source storage devices. Generally, the number of carrier gas supply branch lines equals the number of liquid source storage devices.

[0212] Specifically, there are several second manual diaphragm valves, several first pneumatic diaphragm valves, and several second pneumatic diaphragm valves, and each of these valves is equipped with a corresponding carrier gas supply branch pipeline.

[0213] It should be noted that the number of the second manual diaphragm valve, the first pneumatic diaphragm valve, and the second pneumatic diaphragm valve is matched with the number of carrier gas supply branch lines. It should be understood that the number of the second manual diaphragm valve, the first pneumatic diaphragm valve, and the second pneumatic diaphragm valve is the same as the number of carrier gas supply branch lines.

[0214] Specifically, there are several second pressure monitoring elements 140, and each of the several second pressure monitoring elements 140 is connected to a corresponding carrier gas supply branch.

[0215] The number of second pressure monitoring elements 140 matches the number of carrier gas supply branch lines. Generally, the number of second pressure monitoring elements 140 is equal to the number of carrier gas supply branch lines. Specifically, there are several mixed gas output branch lines, and these mixed gas output branch lines are connected to corresponding liquid source storage devices.

[0216] The number of gas-liquid outlet branch lines is matched with the number of liquid source storage devices. Generally, the number of gas-liquid outlet branch lines equals the number of liquid source storage devices.

[0217] Specifically, there are several third pneumatic diaphragm valves, several fourth pneumatic diaphragm valves, and several third manual diaphragm valves, and each of these valves is equipped with a corresponding gas mixing output branch pipeline.

[0218] It should be noted that the number of the third pneumatic diaphragm valve, the fourth pneumatic diaphragm valve, and the third manual diaphragm valve is matched with the number of gas-mixing output branch lines. It should be understood that the number of the third pneumatic diaphragm valve, the fourth pneumatic diaphragm valve, and the third manual diaphragm valve is the same as the number of gas-mixing output branch lines.

[0219] Specifically, there are several third pressure monitoring elements 230, and each of the several third pressure monitoring elements 230 is connected to a corresponding mixed gas output branch pipe.

[0220] The number of third pressure monitoring elements 230 is matched with the number of mixed-gas output branch lines. Generally, the number of third pressure monitoring elements 230 is equal to the number of mixed-gas output branch lines.

[0221] Specifically, there are several test branch lines, and these test branch lines are connected to the corresponding mixed gas output branch lines.

[0222] The number of inspection branch lines should match the number of gas mixture output branch lines. Generally, the number of inspection branch lines equals the number of gas mixture output branch lines.

[0223] Specifically, there are several test valves, and each test valve is equipped with a corresponding test branch pipeline.

[0224] It should be noted that the number of test valves is matched to the number of test branch lines. It should be understood that the number of test valves is the same as the number of test branch lines.

[0225] Specifically, there are several first purge branch lines, second purge branch lines, and third purge branch lines. The first ends of several first purge branch lines are connected to the second ends of the purge main line, the second purge branch lines are connected to the corresponding first purge branch lines and the corresponding carrier gas supply branch lines, and the third purge branch lines are connected to the corresponding first purge branch lines and the corresponding mixed gas output branch lines.

[0226] The number of first purge branch lines matches the number of liquid source storage devices. Generally, the number of first purge branch lines equals the number of liquid source storage devices.

[0227] The number of second purging branch lines should match the number of carrier gas supply branch lines. Generally, the number of second purging branch lines is the same as the number of carrier gas supply branch lines.

[0228] The number of third purging branch lines should match the number of mixed gas output branch lines. Generally, the number of third purging branch lines is the same as the number of mixed gas output branch lines.

[0229] Specifically, there are several sixth, seventh, and eighth pneumatic diaphragm valves, with several sixth pneumatic diaphragm valves installed in the corresponding first purge branch line, several seventh pneumatic diaphragm valves installed in the corresponding second purge branch line, and several eighth pneumatic diaphragm valves installed in the corresponding third purge branch line.

[0230] It should be noted that the number of the sixth pneumatic diaphragm valves matches the number of the first purge branch lines. It should be understood that the number of the sixth pneumatic diaphragm valves is the same as the number of the first purge branch lines.

[0231] It should be noted that the number of the seventh pneumatic diaphragm valves matches the number of the second purge branch lines. It should be understood that the number of the seventh pneumatic diaphragm valves is the same as the number of the second purge branch lines.

[0232] It should be noted that the number of the eighth pneumatic diaphragm valves matches the number of the third purge branch lines. It should be understood that the number of the eighth pneumatic diaphragm valves is the same as the number of the third purge branch lines.

[0233] Specifically, there are several first vacuum branch lines, second vacuum branch lines, and third vacuum branch lines. The first ends of several first vacuum branch lines are connected to the second ends of the main vacuum line, several second vacuum branch lines are connected to the corresponding first vacuum branch lines and carrier gas supply branch lines, and several third vacuum branch lines are connected to the corresponding first vacuum branch lines and mixed gas output branch lines.

[0234] The number of first vacuum branch lines is matched with the number of liquid source storage devices. Generally, the number of first vacuum branch lines is the same as the number of liquid source storage devices.

[0235] The number of second vacuum branch lines should match the number of carrier gas supply branch lines. Generally, the number of second vacuum branch lines is the same as the number of carrier gas supply branch lines.

[0236] The number of third vacuum branch lines should match the number of gas mixing output branch lines. Generally, the number of third vacuum branch lines is the same as the number of gas mixing output branch lines.

[0237] Specifically, there are several seventh pneumatic diaphragm valves, eighth pneumatic diaphragm valves, and ninth pneumatic diaphragm valves. Several seventh pneumatic diaphragm valves are respectively installed in the corresponding second vacuum branch line, several eighth pneumatic diaphragm valves are respectively installed in the corresponding third vacuum branch line, and several ninth pneumatic diaphragm valves are respectively installed in the corresponding first vacuum branch line.

[0238] It should be noted that the number of the seventh pneumatic diaphragm valves matches the number of the second vacuum branch lines. It should be understood that the number of the seventh pneumatic diaphragm valves is the same as the number of the second vacuum branch lines.

[0239] It should be noted that the number of the eighth pneumatic diaphragm valves matches the number of the third vacuum branch lines. It should be understood that the number of the eighth pneumatic diaphragm valves is the same as the number of the third vacuum branch lines.

[0240] It should be noted that the number of the ninth pneumatic diaphragm valves matches the number of the first purge branch lines. It should be understood that the number of the ninth pneumatic diaphragm valves is the same as the number of the first purge branch lines.

[0241] Specifically, there are several first pressure relief units 600, and each of the several first pressure relief units 600 is connected to a corresponding liquid source storage device.

[0242] The number of first pressure relief units 600 is matched with the number of liquid source storage devices. Generally, the number of first pressure relief units 600 is the same as the number of liquid source storage devices.

[0243] Specifically, there are several second pressure relief units 700, and each of the several second pressure relief units 700 is connected to a corresponding liquid source storage device.

[0244] The number of second pressure relief units 700 is matched with the number of liquid source storage devices. Generally, the number of second pressure relief units 700 is the same as the number of liquid source storage devices.

[0245] The usage method of this embodiment is the same as that of Embodiment 1, and will not be repeated here.

[0246] The advantage of this embodiment is that by connecting the carrier gas supply unit, the gas mixing output unit, the detection unit, the purging unit, the emission unit, the first pressure relief unit, and the second pressure relief unit to multiple liquid source storage devices, the system can switch to another liquid source storage device when one liquid source storage device is exhausted, thus ensuring the continuity of equipment operation.

[0247] Example 3

[0248] This embodiment is a modified embodiment of Embodiments 1 and 2.

[0249] like Figure 6 and Figure 7 As shown, the special gas conveying equipment also includes a reverse bubbling unit 800. The reverse bubbling unit 800 is connected to the liquid source storage device and is used to convey the residual liquid source gas in the liquid source storage device to the process equipment or exhaust gas treatment equipment.

[0250] like Figure 7As shown, the reverse bubbling unit 800 includes a propellant gas supply element 810 and a tenth valve element 820. The propellant gas supply element 810 is connected to the gas mixing output unit 200 and is used to provide propellant gas and transport the residual liquid gas source in the liquid source storage device to the process equipment or to the exhaust gas treatment device through the emission unit 500. The tenth valve element 820 is disposed in the pipeline connecting the propellant gas supply element 810 and the gas mixing output unit 200 and is used to control the flow in this pipeline.

[0251] Specifically, the gas supply element 810 is connected to the gas mixing output element 210; the tenth valve element 820 is installed in the pipeline that connects the gas supply element 810 to the gas mixing output element 210.

[0252] Specifically, the actuating gas supply element 810 includes an actuating gas supply line. A first end of the actuating gas supply line is connected to an actuating gas source, and a second end of the actuating gas supply line is connected to a mixed gas output line.

[0253] Specifically, the actuating gas supply pipeline includes an actuating gas supply main pipeline and an actuating gas supply branch pipeline. The first end of the actuating gas supply main pipeline is connected to the actuating gas source; the first end of the actuating gas supply branch pipeline is connected to the second end of the actuating gas supply main pipeline, and the second end of the actuating gas supply branch pipeline is connected to the mixed gas output branch pipeline. The connection point between the actuating gas supply branch pipeline and the mixed gas output branch pipeline is located between the third pneumatic diaphragm valve and the fourth pneumatic diaphragm valve.

[0254] More specifically, the gas supply branch line is connected to the third purge branch line (third vacuum branch line), and the connection point between the gas supply branch line and the third purge branch line (third vacuum branch line) is located downstream (upstream) of the seventh pneumatic diaphragm valve.

[0255] It should be noted that the first and second ends of the main gas supply pipeline are the two ends of its length direction; the first and second ends of the branch gas supply pipeline are the two ends of its length direction.

[0256] In some of these embodiments, the propellant gas source includes, but is not limited to, an H2 source.

[0257] In some of these embodiments, the main gas supply line includes, but is not limited to, a stainless steel pipe.

[0258] In some of these embodiments, the gas supply branch line includes, but is not limited to, a stainless steel pipe.

[0259] Specifically, the tenth valve element 820 includes a third regulating valve, an eighth manual diaphragm valve, a sixth check valve, a ninth manual diaphragm valve, and a twelfth pneumatic diaphragm valve. The third regulating valve is located in the actuating gas supply line and is used to regulate the flow and pressure of the actuating gas into the actuating gas supply line. The eighth manual diaphragm valve is located in the actuating gas supply line and downstream of the third regulating valve. In actual operation, the tenth manual diaphragm valve is a normally open valve and can be manually closed in an emergency. The sixth check valve is located in the actuating gas supply line and downstream of the eighth manual diaphragm valve, and is used to prevent backflow of the actuating gas. The ninth manual diaphragm valve is located in the actuating gas supply line and downstream of the sixth check valve. In actual operation, the ninth manual diaphragm valve is a normally open valve and can be manually closed in an emergency. The twelfth pneumatic diaphragm valve is located in the actuating gas supply line and downstream of the ninth manual diaphragm valve, and is used to control the flow between the actuating gas supply branch line and the third vacuum branch line.

[0260] More specifically, the third regulating valve is located on the main gas supply line; the eighth manual diaphragm valve is located on the main gas supply line; the sixth check valve is located on the main gas supply line; the ninth manual diaphragm valve is located on the branch gas supply line; and the twelfth pneumatic diaphragm valve is located on the branch gas supply line.

[0261] In some of these embodiments, the tenth valve element 820 includes, but is not limited to, a regulating valve, a diaphragm valve, and a check valve.

[0262] Furthermore, there are several gas supply branches, and each of the gas supply branches is connected to a corresponding gas mixing output branch.

[0263] More specifically, each of the several gas supply branches is connected to a corresponding third purging branch (third vacuum branch).

[0264] The number of gas supply branch lines should be matched with the number of liquid source storage devices. Generally, the number of gas supply branch lines should be the same as the number of liquid source storage devices.

[0265] Specifically, there are several ninth manual diaphragm valves and twelfth pneumatic diaphragm valves, and these several ninth manual diaphragm valves and twelfth pneumatic diaphragm valves are respectively installed in the corresponding actuating gas supply branch lines.

[0266] It should be noted that the number of the ninth manual diaphragm valve and the twelfth pneumatic diaphragm valve corresponds to the number of actuating gas supply branch lines. It should be understood that the number of the ninth manual diaphragm valve and the twelfth pneumatic diaphragm valve is the same as the number of actuating gas supply branch lines.

[0267] Furthermore, the reverse bubbling unit 800 also includes a sixth pressure monitoring element 830. The sixth pressure monitoring element 830 is disposed in the pipeline that connects the gas supply element 810 and the gas mixing output unit 200, and is used to monitor the pressure in the pipeline.

[0268] Specifically, the sixth pressure monitoring element 830 is installed in the pipeline that connects the gas supply element 810 and the gas mixing output element 210.

[0269] Specifically, the sixth pressure detection element 310 includes a sixth pressure monitoring line and a sixth pressure monitor. The first end of the sixth pressure monitoring line is connected to the driving gas supply line; the sixth pressure monitor is connected to the second end of the sixth pressure monitoring line and can display the pressure in the fourth gas supply line in real time.

[0270] Specifically, the connection between the sixth pressure monitoring line and the propellant gas supply line is located between the third regulating valve and the eighth manual diaphragm valve.

[0271] More specifically, the sixth pressure monitoring line is connected to the main gas supply line.

[0272] It should be noted that the first and second ends of the sixth pressure monitoring pipeline are the two ends along its length, respectively.

[0273] In some embodiments, the sixth pressure monitoring line includes, but is not limited to, a stainless steel pipe.

[0274] In some embodiments, the sixth pressure monitor includes, but is not limited to, a pressure gauge.

[0275] The usage method of this embodiment is as follows:

[0276] When the liquid gas source inside the liquid source storage device is exhausted, due to factors such as the internal structure of the liquid source storage device, a certain amount of liquid gas source remains inside the liquid source storage device. At this time, the system activates the third regulating valve and opens the twelfth pneumatic diaphragm valve, allowing the propelling gas to enter the liquid source storage device through the propelling gas supply main pipeline, the propelling gas supply branch pipeline, and the third vacuum branch pipeline. This allows the residual liquid gas source inside the liquid source storage device to enter the exhaust gas treatment equipment through the second vacuum branch pipeline, the first vacuum branch pipeline, the vacuum main pipeline, and the first discharge pipeline, or to enter the process equipment through the second vacuum branch pipeline, the third vacuum branch pipeline, and the conveying pipeline.

[0277] The advantage of this embodiment is that by setting up a reverse bubbling unit, the carrier gas is reversed through the outlet of the mixed gas on the mixed gas output pipeline. By using bubbling, the remaining liquid gas inside the liquid source storage device can be reversed, so that the remaining liquid gas inside the liquid source storage device can be transported to the process machine or tail gas treatment equipment through the original carrier gas inlet. This makes full use of the remaining liquid gas inside the liquid source storage device and avoids waste and pollution.

[0278] Example 4

[0279] This embodiment relates to a special gas delivery method based on a liquid gas source according to the present invention, which is applied to the special gas delivery equipment described in Embodiments 1 to 3.

[0280] A special gas delivery method for a liquid gas source includes:

[0281] The carrier gas supply unit acquires carrier gas and delivers it to the liquid source storage device, so that the carrier gas and liquid source gas are mixed inside the liquid source storage device to form a mixed gas;

[0282] The gas mixing output unit acquires mixed gas and outputs mixed gas to the process equipment;

[0283] In the event of excessive pressure at the carrier gas inlet of the liquid source storage device, the first pressure relief unit can perform pressure relief.

[0284] If the pressure at the outlet of the mixed gas in the liquid source storage device is too high, the second pressure relief unit can relieve the pressure.

[0285] Furthermore, it also includes:

[0286] The reverse bubbling unit obtains the driving gas and introduces it into the liquid source storage device through the outlet. The driving gas can transport the special gas remaining in the liquid source storage device to the exhaust gas treatment equipment or process equipment through the inlet of the liquid source storage device.

[0287] Furthermore, it also includes:

[0288] When the volume of liquid source gas in one liquid source storage device reaches the minimum preset threshold, the detection unit is activated to detect the liquid source gas in another liquid source storage device.

[0289] If the inspection is passed, the purging unit and the discharge unit will purge and replace the pipelines of the entire equipment.

[0290] In the case of purging and replacement, the purging unit and the discharge unit purge the liquid source storage device;

[0291] After purging is complete, replace the liquid source storage device;

[0292] After the replacement is completed, the purging unit and the discharge unit purge and pressurize the entire equipment.

[0293] Furthermore, special gas delivery methods include:

[0294] (a) Carrier gas supply

[0295] The system opens the first valve element, allowing the carrier gas to enter the interior of the liquid source storage device through the carrier gas supply element, thereby mixing the carrier gas with the liquid gas source to obtain a mixed gas.

[0296] (II) Mixed Gas Output

[0297] The system opens the second valve element, allowing the mixed gas to be delivered to the process equipment through the mixed gas output element under the push of the carrier gas.

[0298] (III) Reverse bubbling

[0299] When the liquid gas source inside the liquid source storage device is exhausted, due to factors such as the internal structure of the liquid source storage device, a certain amount of liquid gas source remains inside the liquid source storage device. At this time, the system activates the tenth valve element, so that the driving gas can enter the interior of the liquid source storage device through the driving gas supply element, thereby allowing the residual liquid gas source inside the liquid source storage device to enter the exhaust gas treatment equipment or enter the process machine through the pipeline.

[0300] (iv) Conduct testing before replacing the liquid source storage device.

[0301] When the liquid gas source inside one liquid source storage device is depleted, the system opens the third valve element connected to the other liquid source storage device, allowing the special gas inside the liquid source storage device to enter the detection element, thereby enabling the special gas to be verified in advance.

[0302] (v) Purge before replacing liquid source storage equipment.

[0303] If the liquid gas source inside the liquid source storage device on one side is exhausted, the liquid source storage device needs to be replaced. However, before replacement, the pipeline and liquid source storage device need to be purged. That is, the system opens the fourth valve element, the fifth valve element, the sixth valve element, and the seventh valve element so that the purging gas can replace the gas in the pipeline.

[0304] After the residual mixed gas in the pipeline is replaced, the system opens the fifth and seventh valve elements and closes the second valve element, so that the purging gas can enter the interior of the liquid source storage device through the pipeline and purge the liquid source storage device. The purged gas can then be discharged through the pipeline.

[0305] (vi) Replacement of liquid source storage equipment

[0306] After purging the liquid source storage device, close the first and second valve elements and replace the liquid source storage device.

[0307] (vii) Pressure holding

[0308] After the liquid source storage device is replaced, the system opens the first valve element, the second valve element, and the fourth valve element to allow the purging gas to enter the pipeline. By observing the pressure gauge, if there is no pressure drop within a certain period of time, the pressure holding is considered to be completed.

[0309] After the pressure holding is completed, the system opens the fifth and seventh valve elements, and the purging gas used for pressure holding can be discharged through the pipeline.

[0310] (viii) Pressure relief

[0311] If excessive pressure occurs at the inlet of the carrier gas and the outlet of the mixed gas, the equipment can automatically open the first and second pressure relief valves to relieve pressure in the pipeline, thus ensuring the safety of the overall equipment.

[0312] More specifically, the special gas delivery method in this embodiment is as follows:

[0313] (1) The system opens the first regulating valve, the first pneumatic diaphragm valve and the second pneumatic diaphragm valve, so that the carrier gas can enter the interior of the liquid source storage device through the carrier gas supply pipeline, thereby mixing the carrier gas with the liquid gas source to obtain a mixed gas.

[0314] (2) The system opens the third pneumatic diaphragm valve and the fourth pneumatic diaphragm valve, so that the mixed gas is delivered to the process machine through the mixed gas output pipeline under the push of the carrier gas.

[0315] (3) When the liquid gas source inside the liquid source storage device is exhausted, due to factors such as the internal structure of the liquid source storage device, there is still a certain amount of liquid gas source inside the liquid source storage device. At this time, the system starts the third regulating valve and opens the twelfth pneumatic diaphragm valve, so that the driving gas can enter the liquid source storage device through the driving gas supply main pipeline, the driving gas supply branch pipeline, and the third vacuum branch pipeline. Thus, the residual liquid gas source inside the liquid source storage device enters the tail gas treatment equipment through the second vacuum branch pipeline, the first vacuum branch pipeline, the vacuum main pipeline, and the first discharge pipeline, or enters the process machine through the second vacuum branch pipeline, the third vacuum branch pipeline, and the conveying pipeline.

[0316] (4) When the liquid gas source inside one liquid source storage device is exhausted, the system opens the test valve connected to the other liquid source storage device, so that the special gas in the liquid source storage device can be analyzed by the gas analyzer through the detection branch pipe, thereby verifying the special gas in advance.

[0317] (5) If the liquid gas source inside the liquid source storage device on one side is exhausted, the liquid source storage device needs to be replaced. However, before replacement, the pipeline and liquid source storage device need to be purged. That is, the system opens the second regulating valve, the fifth pneumatic diaphragm valve, the micro-leak valve, the first pneumatic diaphragm valve, the fourth pneumatic diaphragm valve, the fifth pneumatic diaphragm valve, the sixth pneumatic diaphragm valve, the seventh pneumatic diaphragm valve, the eighth pneumatic diaphragm valve, the ninth pneumatic diaphragm valve, the tenth pneumatic diaphragm valve, and the eleventh pneumatic diaphragm valve so that the purging gas can replace the gas in the purging main pipeline, the purging branch pipeline, the mixed gas output pipeline, the third vacuum branch pipeline, the second vacuum branch pipeline, the first vacuum branch pipeline, and the vacuum main pipeline.

[0318] After the residual mixed gas in the pipeline is replaced, the system opens the second, third, eighth, and ninth pneumatic diaphragm valves and closes the fourth pneumatic diaphragm valve, allowing the purging gas to enter the liquid source storage device through the purging main pipeline, purging branch pipeline, and second vacuum branch pipeline, and to purge the liquid source storage device. The purged gas can then be discharged through the third vacuum branch pipeline, first vacuum branch pipeline, and vacuum main pipeline.

[0319] (6) After purging the liquid source storage device, the system closes the second pneumatic diaphragm valve and the third pneumatic diaphragm valve and performs the replacement operation on the liquid source storage device.

[0320] (7) After the liquid source storage device is replaced, the system opens the second regulating valve, the fifth pneumatic diaphragm valve, the micro-leak valve, the first pneumatic diaphragm valve, the fourth pneumatic diaphragm valve, the fifth pneumatic diaphragm valve, the sixth pneumatic diaphragm valve, the seventh pneumatic diaphragm valve, the eighth pneumatic diaphragm valve, and the ninth pneumatic diaphragm valve, so that the purging gas can enter the purging main pipeline, the purging branch pipeline, the mixed gas output pipeline, the third vacuum branch pipeline, the second vacuum branch pipeline, the first vacuum branch pipeline, and the vacuum main pipeline. By observing the pressure gauge, if there is no pressure drop within a certain period of time, it is considered that the pressure holding is completed.

[0321] After the pressure holding is completed, the system opens the eleventh diaphragm valve, and the purging gas used for pressure holding can be discharged through the second discharge pipeline.

[0322] (8) In the event of excessive pressure at the inlet of the carrier gas and the outlet of the mixed gas, the equipment can automatically open the first pressure relief valve and the second pressure relief valve to relieve pressure on the pipeline, thus ensuring the safety of the overall equipment.

[0323] Example 5

[0324] This embodiment relates to a semiconductor process system of the invention.

[0325] One illustrative embodiment of the present invention is a semiconductor process system, including a special gas delivery device as described in any one of Embodiments 1 to 3.

[0326] Furthermore, the semiconductor process system also includes several process chambers and several process equipment connected to special gas delivery equipment.

[0327] Specifically, several process equipment are connected to the gas mixing output unit 200.

[0328] Example 6

[0329] This embodiment is a specific implementation of the present invention, corresponding to Embodiments 1 to 3.

[0330] like Figure 8 As shown, a special gas delivery system includes a liquid storage module, a gas supply module, a delivery module, a discharge module, a purging module, a detection module, a pressure relief module, and a reverse bubbling module.

[0331] The liquid storage module includes TCS ISO 7T, manual diaphragm valves MVO and MVI, and pneumatic diaphragm valves PV6R, PV6L, PV7R, and PV7L.

[0332] The gas supply module includes a PUSH GAS Intlet, a regulating valve REG2, a pressure gauge PG2, manual diaphragm valves MV5, MV4R, and MV4L, a check valve CV2, and pneumatic diaphragm valves PV5R and PV5L.

[0333] The conveying module includes EXP OUT, TCS Outer, manual diaphragm valves MV1R, MV1L, MV2R, MV2L, and manual diaphragm valves LPIR and LPIL.

[0334] The emission module includes GN2 Inter, Vent Outlet, vacuum generator VG / BV / CV, check valve CV3, manual diaphragm valve MV3, pressure sensor PT3, and pneumatic diaphragm valves PV3R, PV3L, PV1R, PV1L, PV2R, and PV2L.

[0335] The purging module includes PN2 Inter, regulating valve REG1, pressure gauge PG1, pneumatic diaphragm valve PGI, micro-leakage valve PGBV, check valve CV1, and pneumatic diaphragm valves PV4R and PV4L.

[0336] The detection module includes TEST and the test valve TEV.

[0337] The pressure relief module includes manual diaphragm valves MSIVR1, MSIVR2, MSIVL1, and MSIVL2; pressure relief valves SVR1, SVR2, SVL1, and SVL2; check valves CV4R, CV5R, CV4L, and CV5L; and pressure sensors PT1R, PT2R, PT1L, and PT2L.

[0338] The reverse bubbling module includes a RETURN BACK PUSH GAS Intlet, a regulating valve REG3, a pressure gauge PG3, manual diaphragm valves MV6, MV5R, and MV5L, a check valve CV6, and pneumatic diaphragm valves PV6R and PV6L.

[0339] The usage method of this embodiment is as follows:

[0340] (1) The system opens REG2, PV5R, and PV7R, allowing the carrier gas to enter the interior of the liquid source storage device through the carrier gas supply pipeline, thereby mixing the carrier gas with the liquid gas source to obtain a mixed gas.

[0341] (2) The system opens PV6R and LPIR, so that the mixed gas is delivered to the process machine through the mixed gas output pipeline under the push of the carrier gas.

[0342] (3) When the liquid gas source inside the liquid source storage device is exhausted, due to factors such as the internal structure of the liquid source storage device, there is still a certain amount of liquid gas source inside the liquid source storage device. At this time, the system starts REG3 and opens PV6R, so that the driving gas can enter the liquid source storage device through the driving gas supply main pipeline, the driving gas supply branch pipeline, and the third vacuum branch pipeline. Thus, the residual liquid gas source inside the liquid source storage device enters the tail gas treatment equipment through the second vacuum branch pipeline, the first vacuum branch pipeline, the vacuum main pipeline, and the first discharge pipeline, or enters the process machine through the second vacuum branch pipeline, the third vacuum branch pipeline, and the conveying pipeline.

[0343] (4) When the liquid gas source inside one liquid source storage device is exhausted, the system opens the TEV connected to the other liquid source storage device, so that the special gas in the liquid source storage device can be analyzed by the gas analyzer through the detection branch pipe, thereby verifying the special gas in advance.

[0344] (5) If the liquid gas source inside the liquid source storage device on one side is exhausted, the liquid source storage device needs to be replaced. However, before replacement, the pipeline and liquid source storage device need to be purged. That is, the system opens REG1, PGI, PGBV, PV4R, PV1R, PV2R, PV3R, and LPIR so that the purging gas can replace the purging main pipeline, purging branch pipeline, mixed gas output pipeline, third vacuum branch pipeline, second vacuum branch pipeline, first vacuum branch pipeline, and vacuum main pipeline.

[0345] After the residual mixed gas in the pipeline is replaced, the system opens PV6R, PV7R, PV1R, PV2R, and PV3R, and closes LPIR, so that the purging gas can enter the liquid source storage device through the purging main pipeline, purging branch pipeline, and second vacuum branch pipeline, and purge the liquid source storage device. The purged gas can be discharged through the third vacuum branch pipeline, first vacuum branch pipeline, and vacuum main pipeline.

[0346] (6) After purging the liquid source storage device, manually turn off MVO and MVI to complete the replacement of the liquid source storage device.

[0347] (7) After the liquid source storage device is replaced, open REG1, PGI, PGBV, PV4R, PV1R, PV2R, PV3R, LPIR, PV6R, and PV7R in the system, and manually open MVO and MVI to allow the purge gas to enter the purge main pipeline, purge branch pipeline, mixed gas output pipeline, third vacuum branch pipeline, second vacuum branch pipeline, first vacuum branch pipeline, and vacuum main pipeline. If there is no pressure drop within a certain period of time by observing the pressure gauge, it is considered that the pressure holding is completed.

[0348] After the pressure holding is completed, the system opens PV3R, and the purging gas used for pressure holding can be discharged through the second exhaust line.

[0349] (8) If the pressure is too high at the inlet of the carrier gas and the outlet of the mixed gas, the equipment can automatically open SVR1 and SVR2 to depressurize the pipeline and ensure the safety of the overall equipment.

[0350] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0351] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A special gas conveying device for a liquid gas source, characterized in that, include: A carrier gas supply unit is connected to a carrier gas source and a liquid source storage device, respectively, and is used to supply carrier gas to the liquid source storage device so that the carrier gas and the liquid source gas are mixed inside the liquid source storage device to form a mixed gas. A mixed gas output unit is connected to a liquid source storage device and a process machine, respectively, and is used to output mixed gas to the process machine. A detection unit, which is connected to the gas mixing output unit, is used to detect the liquid source gas output by the gas mixing output unit when the carrier gas is not supplied to the liquid source storage device. A purging unit is connected to the carrier gas supply unit and the gas mixing output unit respectively, and is used to purge the carrier gas supply unit and the gas mixing output unit with purging gas respectively; The emission unit is connected to the carrier gas supply unit and the gas mixing output unit respectively, and is used to emit the gas from the carrier gas supply unit and the gas mixing output unit. The first pressure relief unit is connected to the carrier gas supply unit and the discharge unit respectively, and is used to relieve pressure on the carrier gas supply unit. The second pressure relief unit is connected to the gas-mixing output unit and the emission unit respectively, and is used to relieve pressure on the gas-mixing output unit. A reverse bubbling unit, which is connected to a liquid source storage device, is used to transport the liquid source gas remaining in the liquid source storage device to the process machine or exhaust gas treatment device. The reverse bubbling unit includes: A propelling gas supply element is connected to the gas mixing output unit to provide propelling gas and transport the residual liquid gas source in the liquid source storage device to the process machine or to the exhaust gas treatment device through the emission unit; A tenth valve element is disposed in the pipeline connecting the gas supply element and the gas mixing output unit, and is used to control the flow in the pipeline; A sixth pressure monitoring element is provided in the pipeline connecting the driving gas supply element and the gas mixing output unit, and is used to monitor the pressure in the pipeline.

2. The special gas conveying equipment according to claim 1, characterized in that, The carrier gas supply unit includes: A carrier gas supply element is connected to a carrier gas source and a liquid source storage device, respectively, and is used to supply carrier gas to the liquid source storage device so that the carrier gas and the liquid source gas are mixed inside the liquid source storage device to form a mixed gas. A first valve element is disposed in the pipeline connecting the carrier gas supply element to the carrier gas source and the liquid source storage device, and is used to control the flow in the pipeline; and / or The gas-mixed output unit includes: A gas mixing output element is connected to a liquid source storage device and a process machine, respectively, and is used to output a mixed gas to the process machine. A second valve element is disposed in the pipeline connecting the gas mixing output element to the liquid source storage device and the process equipment, and is used to control the flow in the pipeline; and / or The detection unit includes: A detection element, which is connected to the gas mixing output unit, is used to detect the liquid source gas output by the gas mixing output unit when the carrier gas is not supplied to the liquid source storage device. A third valve element, wherein the third valve element is disposed in the pipeline connecting the detection element and the gas-liquid output unit, is used to control the flow in the pipeline; and / or The purging unit includes: A purging element is connected to the carrier gas supply unit and the gas mixing output unit respectively, and is used to purge the carrier gas supply unit and the gas mixing output unit with purging gas respectively; A fourth valve element, wherein the fourth valve element is disposed in the pipeline connecting the purging element, the carrier gas supply unit, and the mixing gas output unit, is used to control the flow in the pipeline; and / or The emission unit includes: A power gas supply element, wherein the power gas supply element is used to provide power gas; A vacuum element, which is connected to the power gas supply element, the carrier gas supply unit, and the mixed gas output unit respectively, is used to provide vacuum negative pressure to the pipelines of the liquid source storage device and the overall device; The fifth valve element is disposed in the pipeline connecting the vacuum element, the power gas supply element, the carrier gas supply unit, and the gas mixing output unit, and is used to control the flow in the pipeline; The first emission element is connected to the vacuum element and the exhaust gas treatment equipment respectively, and is used to emit the mixed gas. A sixth valve element is provided in the pipeline connecting the first discharge element, the vacuum element, and the exhaust gas treatment equipment, and is used to control the flow in the pipeline. The second emission element is connected to the vacuum element and the exhaust gas treatment equipment respectively, and is used to emit purge gas; A seventh valve element, wherein the seventh valve element is disposed in the pipeline connecting the second discharge element and the vacuum element and the exhaust gas treatment equipment, is used to control the flow in the pipeline; and / or The first pressure relief unit includes: The first pressure relief element is connected to the carrier gas supply unit and the discharge unit respectively, and is located at the connection between the carrier gas supply unit and the liquid source storage device. It is used to relieve pressure when the pressure at the carrier gas inlet of the liquid source storage device exceeds a first preset pressure threshold. An eighth valve element, wherein the eighth valve element is disposed in the pipeline connecting the first pressure relief element, the carrier gas supply unit, and the discharge unit, is used to control the flow in the pipeline; and / or The second pressure relief unit includes: The second pressure relief element is connected to the gas mixing output unit and the emission unit respectively, and is located at the connection between the gas mixing output unit and the liquid source storage device. It is used to relieve pressure when the pressure at the gas mixing outlet of the liquid source storage device exceeds a second preset pressure threshold. A ninth valve element is provided in the pipeline that connects the second pressure relief element, the mixed gas output unit, and the emission unit, and is used to control the flow in the pipeline.

3. The special gas conveying equipment according to claim 2, characterized in that, The carrier gas supply unit also includes: A first pressure monitoring element is disposed in the pipeline connecting the carrier gas supply element and the liquid source storage device, for monitoring the pressure within the pipeline; and / or The carrier gas supply unit also includes: A second pressure monitoring element is disposed in the pipeline connecting the carrier gas supply element and the liquid source storage device, and is located at the connection point between the carrier gas supply element and the liquid source storage device, for monitoring the pressure at the carrier gas inlet of the liquid source storage device; and / or The gas-mixing output unit also includes: A third pressure monitoring element is disposed in the pipeline connecting the gas-mixing output element and the liquid source storage device, and is located at the connection point between the gas-mixing output element and the liquid source storage device, for monitoring the pressure at the gas-mixing outlet of the liquid source storage device; and / or The purging unit further includes: A fourth pressure monitoring element is disposed in the pipeline connecting the purging element, the carrier gas supply unit, and the mixing gas output unit, for monitoring the pressure within the pipeline; and / or The emission unit also includes: A fifth pressure monitoring element is installed in the pipeline connecting the vacuum element, the carrier gas supply unit, and the gas mixing output unit, and is used to monitor the pressure in the pipeline.

4. A special gas transport method based on a liquid gas source, characterized in that, Applied to the special gas conveying equipment as described in any one of claims 1 to 3, comprising: The carrier gas supply unit acquires carrier gas and delivers it to the liquid source storage device, so that the carrier gas and liquid source gas are mixed inside the liquid source storage device to form a mixed gas; The gas mixing output unit acquires mixed gas and outputs mixed gas to the process equipment; In the event of excessive pressure at the carrier gas inlet of the liquid source storage device, the first pressure relief unit can perform pressure relief. In the event of excessive pressure at the outlet of the mixed gas in the liquid source storage device, the second pressure relief unit can relieve the pressure. The reverse bubbling unit obtains the driving gas and introduces it into the liquid source storage device through the outlet. The driving gas can transport the special gas remaining in the liquid source storage device to the exhaust gas treatment equipment or process equipment through the inlet of the liquid source storage device.

5. The special gas delivery method according to claim 4, characterized in that, Also includes: When the volume of liquid source gas in one liquid source storage device reaches the minimum preset threshold, the detection unit is activated to detect the liquid source gas in another liquid source storage device. If the inspection is passed, the purging unit and the discharge unit will purge and replace the pipelines of the entire equipment. In the case of purging and replacement, the purging unit and the discharge unit purge the liquid source storage device; After purging is complete, replace the liquid source storage device; After the replacement is completed, the purging unit and the discharge unit purge and pressurize the entire equipment.

6. A semiconductor process system, characterized in that, include: The special gas conveying device as described in any one of claims 1 to 3.

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