Phase shifter and method for manufacturing a phase shifter

Abstract

A phase shifter and a method for making a phase shifter are provided. The phase shifter includes at least one phase shifter cell, the phase shifter cell including: a substrate base; a first conductive line and a second conductive line on the substrate base and spaced apart; a bridge on the first conductive line and the second conductive line, wherein the bridge is connected to the first conductive line and the second conductive line; and a third conductive line on a side of the bridge distal from the substrate base.

Description

Technical Field

[0001] This disclosure relates to the field of electronic technology. More specifically, it relates to a phase shifter and a method for fabricating the phase shifter. Background Technology

[0002] A phase shifter is a device that can adjust the phase of a wave. With the development of radio frequency micromechanical technology, MEMS phase shifters have attracted increasing attention. Compared with traditional phase shifters, MEMS phase shifters mainly use semiconductor materials as substrates and are fabricated through microfabrication techniques. They have advantages such as wide bandwidth, low loss, low cost, ultra-miniaturization, and ease of integration with ICs, MMIC circuits, etc. Summary of the Invention

[0003] Embodiments of this disclosure provide a phase shifter. The phase shifter includes at least one phase shifter unit, the phase shifter unit comprising:

[0004] Substrate;

[0005] A first and a second wire spaced apart on the substrate;

[0006] A bridging portion on the first conductor and the second conductor, wherein the bridging portion is connected to the first conductor and the second conductor;

[0007] A third conductor on the side of the bridging portion away from the substrate.

[0008] In some embodiments, the phase shifter unit further includes an isolation layer that at least covers the surface of the third conductor facing the substrate.

[0009] In some embodiments, the isolation layer further covers the surface of the third conductor away from the substrate and the side surface between the surface of the third conductor away from the substrate and the surface of the third conductor facing the substrate.

[0010] In some embodiments, the bridging portion includes a bridging structure disposed opposite to the substrate, a first anchor portion connecting the bridging structure to the first conductor, and a second anchor portion connecting the bridging structure to the second conductor. The bridging structure includes a middle portion, a first portion extending from the middle portion to the first anchor portion, and a second portion extending from the middle portion to the second anchor portion. The projection of the middle portion on the substrate overlaps with the projection of the third conductor on the substrate.

[0011] In some embodiments, the width of the intermediate portion satisfies at least one of the following:

[0012] The width of the middle portion is greater than the width of the first portion, and

[0013] The width of the middle portion is greater than the width of the second portion.

[0014] In some embodiments, the phase shifter unit further includes:

[0015] A support portion is disposed on the surface of the substrate on which the first and second conductors are disposed, and the projection of the support portion on the substrate overlaps with the projection of the bridge structure on the substrate.

[0016] In some embodiments, the projection of the support portion onto the substrate falls within the projection of the middle portion of the bridging portion onto the substrate.

[0017] In some embodiments, the support portion includes at least two sub-support portions, wherein, in the extending direction of the bridging portion, the at least two sub-support portions are located on different sides of the middle portion of the bridging portion.

[0018] In some embodiments, the support portion includes four sub-support portions, which correspond one-to-one with the four corners of the middle portion of the bridging portion.

[0019] In some embodiments, the middle portion of the bridging portion has a through hole.

[0020] The isolation layer further includes a first extension extending from the surface of the third conductor toward the substrate toward the substrate, the first extension having a first sub-part passing through the via and a second sub-part opposite to the substrate surface, the second sub-part being connected to the end of the first sub-part toward the substrate, and wherein the size of the projection of the second sub-part onto the substrate is larger than the size of the projection of the via onto the substrate.

[0021] In some embodiments, the extension direction of the second sub-part is perpendicular to the extension direction of the first sub-part.

[0022] In some embodiments, the distance from the second sub-part to the substrate is less than or equal to the distance from the bridging portion to the substrate.

[0023] In some embodiments, the bridge structure has a first surface away from the substrate and a second surface facing the substrate, wherein the area of ​​the via on the first surface is smaller than the area of ​​the via on the second surface.

[0024] In some embodiments, the isolation layer has a second extension, the third sub-part of the second extension extends from the side surface of the third conductor toward the substrate, and the fourth sub-part of the second extension extends from the end of the third sub-part near the substrate toward the middle portion of the bridging portion.

[0025] The bridging portion has a third extension portion, a fifth sub-part of the third extension portion extending from the side of the middle portion of the bridging portion away from the substrate toward the third conductor, and a sixth sub-part of the third extension portion extending from the side of the fifth sub-part toward the third conductor toward the third sub-part, wherein the projection of the fourth sub-part onto the substrate overlaps with the projection of the sixth sub-part onto the substrate.

[0026] In some embodiments, the bridging portion has a fourth extension portion, a seventh sub-portion of the fourth extension portion extending from a surface of the bridging portion away from the substrate in a direction away from the substrate, and an eighth sub-portion of the fourth extension portion extending from an end of the seventh sub-portion away from the substrate toward the third wire.

[0027] The isolation layer has the fifth extension, which extends from the third conductor toward the substrate toward the seventh sub-part, wherein the projection of the fifth extension on the substrate overlaps with the projection of the eighth sub-part on the substrate.

[0028] In some embodiments, the third conductor includes a first sub-conductor portion, a second sub-conductor portion located on both sides of the first sub-conductor portion, and a sidewall connecting the first sub-conductor portion and the second sub-conductor portion. The first sub-conductor portion is located on the side of the bridging portion away from the substrate, and the second sub-conductor portion is located in the same plane as the first conductor and the second conductor.

[0029] In some embodiments, the third conductor is entirely on the side of the bridging portion away from the substrate.

[0030] In some embodiments, the insulating layer comprises a silicon nitrogen compound;

[0031] At least one of the first wire, the second wire, and the third wire comprises at least one of the following materials: molybdenum-nickel-titanium alloy, copper, and combinations thereof;

[0032] The bridging portion includes at least one of the following: molybdenum, aluminum, and a combination thereof.

[0033] Embodiments of the present invention also provide a method for fabricating a phase shifter, comprising forming at least one phase shifter unit, wherein forming at least one phase shifter unit includes:

[0034] A first and second conductive wire spaced apart are formed on a substrate.

[0035] A bridging portion is formed on the first conductor and the second conductor, wherein the bridging portion connects the first conductor and the second conductor;

[0036] A third conductor is formed on the side of the bridging portion away from the substrate.

[0037] In some embodiments, the method further includes forming an isolation layer that at least covers the surface of the third conductor facing the substrate.

[0038] In some embodiments, forming the first conductor, the second conductor, the bridging portion, the third conductor, and the isolation layer includes:

[0039] A first conductive material layer is formed on the substrate.

[0040] The first conductive material layer is patterned to form the first wire and the second wire;

[0041] A first sacrificial layer is formed between the first conductor and the second conductor;

[0042] The bridging portion is formed on the first sacrificial layer;

[0043] A second sacrificial layer is formed on the bridging portion;

[0044] The isolation layer is formed on the second sacrificial layer;

[0045] A third conductive layer is formed on the isolation layer;

[0046] Remove the first sacrificial layer and the second sacrificial layer.

[0047] In some embodiments, the bridging portion includes a bridge structure disposed opposite to the substrate, a first anchor portion connecting the bridge structure to the first conductor, and a second anchor portion connecting the bridge structure to the second conductor. The bridge structure includes a middle portion, a first portion extending from the middle portion to the first anchor portion, and a second portion extending from the middle portion to the second anchor portion. The projection of the middle portion onto the substrate overlaps with the projection of the third conductor onto the substrate. The width of the middle portion satisfies at least one of the following:

[0048] The width of the middle portion is greater than the width of the first portion, and

[0049] The width of the middle portion is greater than the width of the second portion.

[0050] In some embodiments, the method further includes:

[0051] Before forming the first sacrificial layer, a support portion is formed between the first conductor and the second conductor, wherein the projection of the support portion on the substrate falls within the projection of the middle portion of the bridging portion on the substrate.

[0052] In some embodiments, the intermediate portion of the bridging portion has a through-hole, and the insulating layer further includes a first extension extending from the surface of the third conductor toward the substrate, the first extension having a first sub-portion passing through the through-hole and a second sub-portion opposite to the substrate surface, the second sub-portion being connected to the end of the first sub-portion toward the substrate, and wherein the size of the projection of the second sub-portion onto the substrate is larger than the size of the projection of the through-hole onto the substrate.

[0053] The formation of the first conductor, the second conductor, the bridging portion, the third conductor, and the isolation layer includes:

[0054] A first conductive material layer is formed on the substrate.

[0055] The first conductive material layer is patterned to form the first wire and the second wire;

[0056] A first sub-sacrificial layer is formed between the first conductor and the second conductor;

[0057] The second sub-part is formed on the first sub-sacrificial layer;

[0058] A second sub-sacrificial layer is formed on the second sub-part to form the first sacrificial layer;

[0059] The bridging portion having the through hole is formed on the first sacrificial layer;

[0060] A second sacrificial layer is formed on the bridging portion;

[0061] The isolation layer having the first sub-part is formed on the second sacrificial layer;

[0062] A third conductive layer is formed on the isolation layer;

[0063] Remove the first sacrificial layer and the second sacrificial layer.

[0064] In some embodiments, the isolation layer has a second extension, a third sub-part of the second extension extending from the side surface of the third conductor toward the substrate, and a fourth sub-part of the second extension extending from the end of the third sub-part near the substrate toward the middle portion of the bridging portion.

[0065] The bridging portion has a third extension, a fifth sub-portion of which extends from the side of the middle portion of the bridging portion away from the substrate toward the third conductor, and a sixth sub-portion of the third extension extends from the side of the fifth sub-portion toward the third conductor toward the third sub-portion, wherein the projection of the fourth sub-portion on the substrate overlaps with the projection of the sixth sub-portion on the substrate.

[0066] The formation of the first conductor, the second conductor, the bridging portion, the third conductor, and the isolation layer includes:

[0067] A first conductive material layer is formed on the substrate.

[0068] The first conductive material layer is patterned to form the first wire and the second wire;

[0069] A first sacrificial layer is formed between the first conductor and the second conductor;

[0070] A bridge structure opposite to the substrate is formed on the first sacrificial layer, a first anchor portion connecting the bridge structure to the first conductor, and a second anchor portion connecting the bridge structure to the second conductor.

[0071] The fourth sub-part is formed on the bridge deck structure;

[0072] The third extension portion forming the bridging portion;

[0073] Form the isolation layer;

[0074] A third conductive layer is formed on the isolation layer;

[0075] Remove the first sacrificial layer.

[0076] In some embodiments, the bridging portion has a fourth extension portion, a seventh sub-portion of the fourth extension portion extending from a surface of the bridging portion away from the substrate in a direction away from the substrate, and an eighth sub-portion of the fourth extension portion extending from an end of the seventh sub-portion away from the substrate toward the third wire.

[0077] The isolation layer has a fifth extension that extends from the third conductor toward the substrate toward the seventh sub-part, wherein the projection of the fifth extension onto the substrate overlaps with the projection of the eighth sub-part onto the substrate.

[0078] The formation of the first conductor, the second conductor, the bridging portion, the third conductor, and the isolation layer includes:

[0079] A first conductive material layer is formed on the substrate.

[0080] The first conductive material layer is patterned to form the first wire and the second wire;

[0081] A first sacrificial layer is formed between the first conductor and the second conductor;

[0082] A bridge structure opposite to the substrate is formed on the first sacrificial layer, a first anchor portion connecting the bridge structure to the first conductor, and a second anchor portion connecting the bridge structure to the second conductor.

[0083] The fifth extension is formed on the bridge deck structure;

[0084] The seventh and eighth sub-parts forming the bridging portion;

[0085] Form the isolation layer;

[0086] A third conductive layer is formed on the isolation layer;

[0087] Remove the first sacrificial layer. Attached Figure Description

[0088] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings of the embodiments will be briefly described below. It should be understood that the drawings described below only relate to some embodiments of the present invention and are not intended to limit the present invention, wherein:

[0089] Figure 1A This is a schematic diagram of a phase shifter according to an embodiment of the present invention;

[0090] Figure 1B This is a perspective view of a phase shifter according to an embodiment of the present invention;

[0091] Figure 2 For the phase shifter according to an embodiment of the present invention along Figure 1B A schematic diagram of the cross-section AA';

[0092] Figure 3 This is a cross-sectional schematic diagram of a phase shifter according to an embodiment of the present invention;

[0093] Figure 4A This is a top view of the bridging portion according to an embodiment of the present invention;

[0094] Figure 4B This is a top view of the bridging portion according to an embodiment of the present invention;

[0095] Figure 5A For the adoption of embodiments of the present invention Figure 4B A conceptual diagram of the phase shifter in the bridging section;

[0096] Figure 5B For the adoption of embodiments of the present invention Figure 4B A perspective view of the phase shifter at the bridging section;

[0097] Figure 6 This is a schematic diagram of a phase shifter according to an embodiment of the present invention;

[0098] Figure 7 for Figure 6 A perspective view of the phase shifter;

[0099] Figure 8 for Figure 7 A schematic diagram of the cross-section of a phase shifter;

[0100] Figure 9 This is a schematic cross-sectional view of a phase shifter according to an embodiment of the present invention;

[0101] Figure 10 This is a partial schematic diagram of a phase shifter according to an embodiment of the present invention;

[0102] Figure 11 This is a schematic cross-sectional view of the phase shifter in the on-state of the driving voltage according to an embodiment of the present invention;

[0103] Figure 12 This is a schematic cross-sectional view of a phase shifter according to an embodiment of the present invention;

[0104] Figure 13 for Figure 12 A schematic diagram of the cross-section of the phase shifter when the driving voltage is in the on state;

[0105] Figure 14 for Figure 12 A partial cross-sectional schematic diagram of the bridging section of the phase shifter;

[0106] Figure 15 for Figure 12 A perspective view of the bridging section of the phase shifter;

[0107] Figure 16 This is a schematic cross-sectional view of a phase shifter according to an embodiment of the present invention;

[0108] Figure 17 for Figure 16 A partial cross-sectional schematic diagram of the bridging section of the phase shifter;

[0109] Figure 18 for Figure 16 Perspective view of the bridging section of the phase shifter;

[0110] Figure 19 This is a schematic cross-sectional view of a phase shifter according to an embodiment of the present invention;

[0111] Figure 20 This is a schematic flowchart of a method for fabricating a phase shifter according to an embodiment of the present invention;

[0112] Figure 21 This is a schematic flowchart of a method for fabricating a phase shifter according to an embodiment of the present invention;

[0113] Figure 22 This is a schematic flowchart of a method for fabricating a phase shifter according to an embodiment of the present invention;

[0114] Figure 23 This is a schematic flowchart of a method for fabricating a phase shifter according to an embodiment of the present invention;

[0115] Figure 24 This is a schematic flowchart of a method for fabricating a phase shifter according to an embodiment of the present invention. Detailed Implementation

[0116] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention without creative effort are also within the scope of protection of the present invention.

[0117] When describing the elements and embodiments of the present invention, the articles “a,” “an,” “the,” and “described” are intended to indicate the presence of one or more elements. The terms “comprising,” “including,” “containing,” and “having” are intended to be inclusive and indicate that additional elements besides those listed may be present.

[0118] For the purposes described below, as indicated by their orientation in the accompanying drawings, the terms “upper,” “lower,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” and their derivatives shall apply to the invention. The terms “overlapping,” “on top of,” “positioned on,” or “positioned on top of” mean that a first element, such as a first structure, exists on a second element, such as a second structure, wherein an intermediate element, such as an interface structure, may exist between the first and second elements. The term “contact” means connecting a first element, such as a first structure, and a second element, such as a second structure, where there may or may not be other elements at the interface between the two elements.

[0119] Figure 1A This is a schematic diagram of a phase shifter according to an embodiment of the present invention. Figure 1B This is a perspective view of a phase shifter according to an embodiment of the present invention. Figure 2 For the phase shifter according to an embodiment of the present invention along Figure 1B A schematic cross-sectional view of section AA'. As shown, a phase shifter according to an embodiment of the present invention may include at least one phase shifter unit 100. The phase shifter unit may include: a substrate 1, a first conductive line 2 and a second conductive line 3 spaced apart on the substrate 1, a bridging portion 4 on the first conductive line 2 and the second conductive line 3, and a third conductive line 5 on the side of the bridging portion 4 away from the substrate 1. Figure 1A As shown, the bridging portion 4 is connected to the first conductor 2 and the second conductor 3, and the bridging portion 4 is spaced apart from the substrate.

[0120] In some embodiments, the first and second conductors can be grounded, and the third conductor can be used as a signal transmission line. The first, second, and third conductors of the phase shifter according to an embodiment of the invention can form a suspended waveguide. For such a phase shifter, when a driving voltage is applied to the third conductor, the bridging portion is attracted, deforming towards the third conductor and contacting it; after the driving voltage is disconnected, the bridging portion resets. Compared to conventional phase shifters, for the phase shifter of the embodiment of the invention, after the driving voltage applied to the third conductor is disconnected, the bridging portion can separate from the third conductor more quickly using gravity. This solves the problem of difficulty in quickly separating the membrane bridge from the signal line due to adhesion during the use of conventional phase shifters. Furthermore, the combined effect of gravity and elasticity of the bridging portion allows for faster reset of the bridging portion after the driving voltage applied to the third conductor is disconnected, thereby effectively reducing the response time.

[0121] Furthermore, in the conventional manufacturing process of phase shifters, the bridging portion is prone to collapse downwards, thus preventing phase shifting. However, in the embodiments of the present invention, even if the bridging portion collapses downwards, it will move due to the upward attraction towards the third conductor after voltage is applied, thus enabling normal operation.

[0122] In conventional phase shifters, the height of the bridging section is typically increased to prevent collapse, but this leads to an increase in the driving voltage. In embodiments of the present invention, the distance between the bridge section and the third conductor can be made smaller, thereby reducing the driving voltage.

[0123] In some embodiments, the phase shifter unit further includes an isolation layer that at least covers the surface of the third conductive wire facing the substrate. The isolation layer not only isolates the third conductive layer but also supports it.

[0124] In some embodiments, the phase shifter may include multiple phase shifter units to achieve a greater phase shift range.

[0125] It should be noted that, in Figure 1A and 1B In one embodiment, the third conductor includes a first sub-conductor portion, second sub-conductor portions located on both sides of the first sub-conductor portion, and a sidewall connecting the first and second sub-conductor portions. The first sub-conductor portion is located on the side of the bridging portion away from the substrate, and the second sub-conductor portion is located in the same plane as the first and second conductors. However, the third conductor is not limited to the case shown in the figures. In other embodiments, the third conductor may also be configured to be entirely located on the side of the bridging portion away from the substrate. The third conductor will be described below in a similar manner to... Figure 1A The method described is as follows: instead of being entirely located on the side of the bridging portion away from the substrate, an example is provided.

[0126] Figure 3 This is a cross-sectional schematic diagram of a phase shifter according to an embodiment of the present invention. Figure 2 As shown, the phase shifter unit further includes an isolation layer 6, which covers the surface S1 of the third conductor 5 facing the substrate 1, and also covers the surface S2 of the third conductor 5 away from the substrate 1 and the side surfaces S3 and S4 between the surface S1 of the third conductor 5 away from the substrate 1 and the surface S1 of the third conductor 5 facing the substrate 1. This better ensures that the third conductor has sufficient support and does not deform.

[0127] The insulating layer may be made of a silicon nitride compound, for example, SiNx. At least one of the first, second, and third conductors may include at least one of the following materials: molybdenum-nickel-titanium alloy, copper, and combinations thereof. The bridging portion may include at least one of the following: molybdenum, aluminum, and combinations thereof.

[0128] like Figure 3 As shown, the bridging portion 4 includes a bridging structure 40 disposed opposite to the substrate 1, a first anchor portion 41 connecting the bridging structure 40 to the first conductor 2, and a second anchor portion 42 connecting the bridging structure to the second conductor 3. The bridging structure 40 includes a middle portion 40-2, a first portion 40-1 extending from the middle portion 40-2 to the first anchor portion 41, and a second portion 40-3 extending from the middle portion to the second anchor portion, wherein the projection of the middle portion 40-2 on the substrate 1 overlaps with the projection of the third conductor 5 on the substrate 1.

[0129] The inventors discovered that during phase shifting, the stress change at the bridging section is mainly concentrated in the middle part of the bridging section. Therefore, this stress change can be amplified by adjusting the shape of the bridging section. Furthermore, since the phase shifter used in this invention is a capacitive phase shifter, the capacitance is only positively correlated with the contact area between the bridging section and the third conductor, and is independent of the shape of the bridging section. Therefore, the inventors have proposed several further embodiments.

[0130] For example, the width of the middle section can be set to satisfy at least one of the following:

[0131] The width of the middle part is greater than the width of the first part, and the width of the middle part is greater than the width of the second part.

[0132] Figure 4A and 4B This is a top view of the bridging portion according to an embodiment of the present invention. Figure 5A For the adoption of embodiments of the present invention Figure 4B A conceptual diagram of the phase shifter in the bridging section. Figure 5B For the adoption of embodiments of the present invention Figure 4B A perspective view of the phase shifter at the bridging section.

[0133] and Figure 4A In comparison, Figure 4B In this embodiment, the middle portion 40-2 is set to have a width greater than the width of the first portion 40-1 and also greater than the width of the second portion 40-2. This narrows the first and second portions next to the middle portion of the bridging portion, that is, it limits them to a spindle shape that is narrow at both ends and wide in the middle, which makes it easier for the bridging portion to deform and shift, thereby improving the on / off response speed of the phase shifter unit.

[0134] The spindle shape of the bridging part is not limited to Figure 4BThe specific shape can also be other shapes that are narrow at both ends and wide in the middle. For example, one of the first and second parts can be set to be narrower than the middle part. The first and second parts of the bridging portion are also not set to be so narrow that they curl up. Through the improvements of this embodiment, the phase shifter unit of the present invention can be more easily driven by current to perform phase shifting, thereby reducing the driving voltage and response time.

[0135] Figure 6 This is a schematic diagram of a phase shifter according to an embodiment of the present invention. Figure 7 for Figure 6 A perspective view of the phase shifter. Figure 8 for Figure 7 A schematic diagram of the cross-section of a phase shifter. (See diagram below.) Figure 6-8 As shown, in an embodiment of the present invention, the phase shifter unit 800 may further include a support portion 7, which is disposed on the surface of the substrate 1 on which the first conductive line 2 and the second conductive line 3 are disposed, and the projection of the support portion 7 on the substrate 1 overlaps with the projection of the bridge structure 40 on the substrate 1. This provides support for the bridging portion to prevent it from collapsing. To ensure that the support portion has sufficient rigidity to prevent deformation, the support portion may be made of a silicon nitride compound. For example, the support portion may include SiNx.

[0136] Figure 9 This is a cross-sectional schematic diagram of a phase shifter according to an embodiment of the present invention. Figure 9 As shown, the support portion 7 can be configured such that its projection on the substrate falls within the projection of the middle portion of the bridging portion on the substrate. This allows the support portion to provide support for the area of ​​greatest stress change in the bridging portion (i.e., the middle portion), better preventing bridging portion collapse. Bridging portion collapse typically occurs during the release of the sacrificial layer in the manufacturing process, or during phase shifter operation due to excessive displacement of the bridging portion, leading to damage and inability to reset. The solution in the embodiment of the present invention can prevent bridging portion collapse.

[0137] Figure 10 This is a partial schematic diagram of a phase shifter according to an embodiment of the present invention. In some embodiments, the support portion may include at least two sub-support portions, and in the extending direction of the bridging portion, the at least two sub-support portions are located on different sides of the middle portion of the bridging portion. Figure 10 As shown, the support portion can include four sub-support portions, and each of the four sub-support portions corresponds one-to-one with one of the four corners of the middle portion of the bridging portion. This better prevents the bridging portion from collapsing.

[0138] Figure 11 This is a schematic cross-sectional view of the phase shifter in the on-state drive voltage according to an embodiment of the present invention. Figure 11As shown, when the driving voltage applied to the third conductor 5 is in the on state, the bridging portion is attracted and deforms towards the third conductor. When the driving voltage is off, refer to... Figure 9 Because of the presence of the support, the bridging section is not prone to collapse.

[0139] Figure 12 This is a cross-sectional schematic diagram of a phase shifter according to an embodiment of the present invention. Figure 12 As shown, the middle portion 40 of the bridging portion has a through-hole V1. The insulating layer also includes a first extension 51 extending from the surface of the third conductor 5 toward the substrate 1. The first extension 51 has a first sub-portion 511 passing through the through-hole V1 and a second sub-portion 512 opposite to the substrate surface 1. The second sub-portion 512 is connected to the end of the first sub-portion 511 toward the substrate 1, and the size of the projection of the second sub-portion 512 onto the substrate 1 is larger than the size of the projection of the through-hole V1 onto the substrate 1. This "inverted T-shaped" structure can also better prevent the bridging portion from collapsing.

[0140] Figure 13 for Figure 12 A schematic diagram of the cross-section of the phase shifter when the drive voltage is in the on-state. (See diagram below.) Figure 13 As shown, when the driving voltage applied to the third conductor 5 is in the on state, the bridging portion is attracted and deforms towards the third conductor. When the driving voltage is off, refer to... Figure 12 Because of the presence of the first extension of the isolation layer, the bridging section is not prone to collapse.

[0141] like Figure 12-13 As shown, the extension direction of the second sub-part 512 can be perpendicular to the extension direction of the first sub-part 511. The distance from the second sub-part 512 to the substrate 1 can be less than or equal to the distance from the bridging portion to the substrate, so as to better prevent the bridging portion from collapsing.

[0142] Figure 14 for Figure 12 A partial cross-sectional diagram of the bridging section of the phase shifter (e.g., along...). Figure 1A BB' section in the middle). Figure 15 for Figure 12 A perspective view of the bridging section of the phase shifter. (See diagram below.) Figure 12 , 13 As shown in Figure 15, the bridge structure has a first surface S11 away from the substrate (see Figure 15). Figure 12 The via is located on the first surface S11 and the second surface S12 facing the substrate, wherein the area of ​​the via on the first surface S11 is smaller than the area of ​​the via on the second surface S12.

[0143] Figure 16 This is a cross-sectional schematic diagram of a phase shifter according to an embodiment of the present invention. Figure 16As shown, the isolation layer 6 has a second extension 61, a third sub-part 613 of which extends from the side surface of the third conductor 5 toward the substrate 1, and a fourth sub-part 614 of which extends from the end of the third sub-part 613 near the substrate 1 toward the middle portion 40 of the bridging portion. The bridging portion has a third extension 43, a fifth sub-part 435 of which extends from the side of the middle portion 40 of the bridging portion away from the substrate 1 toward the third conductor 5, and a sixth sub-part 436 of which extends from the side of the fifth sub-part toward the third conductor toward the third sub-part 613. The projection of the fourth sub-part onto the substrate overlaps with the projection of the sixth sub-part onto the substrate.

[0144] Figure 17 for Figure 16 A partial cross-sectional diagram of the bridging section of the phase shifter (e.g., along...). Figure 1A BB' section in the middle). Figure 18 for Figure 16 A perspective view of the bridging section of the phase shifter. (See diagram below.) Figure 16-18 As shown, compared to the previous embodiment, the middle part of the bridging part is thickened, which makes the bridging part more susceptible to the influence of gravity and more likely to adhere to the third wire after the driving voltage is disconnected.

[0145] Figure 19 This is a cross-sectional schematic diagram of a phase shifter according to an embodiment of the present invention. Figure 19 As shown, the bridging portion has a fourth extension 44, a seventh sub-portion 447 of which extends from the surface of the bridging portion away from the substrate 1 in a direction away from the substrate, and an eighth sub-portion 448 of which extends from the end of the seventh sub-portion 447 away from the substrate 1 toward the third conductor 5. The insulating layer 6 has a fifth extension 65, which extends from the side of the third conductor 5 toward the substrate 1 toward the seventh sub-portion. The projection of the fifth extension 65 onto the substrate 1 overlaps with the projection of the eighth sub-portion 448 onto the substrate.

[0146] Figure 20 This is a schematic flowchart of a method for fabricating a phase shifter according to an embodiment of the present invention. Figure 20 As shown, a method for fabricating a phase shifter according to an embodiment of the present invention may include:

[0147] S1. Form a spaced-apart first wire and a second wire on a substrate;

[0148] S3. Forming a bridging portion on the first conductor and the second conductor, wherein the bridging portion connects the first conductor and the second conductor;

[0149] S5. Form a third conductor on the side of the bridging portion away from the substrate.

[0150] In some embodiments of the present invention, the method for fabricating a phase shifter further includes forming an isolation layer that at least covers the surface of a third conductor facing the substrate.

[0151] Figure 21 This is a schematic flowchart of a method for fabricating a phase shifter according to an embodiment of the present invention. Figure 21 The method can prepare such as Figures 1A-5B The phase shifter shown in the image. Figure 21 As shown, forming the first conductor, the second conductor, the bridging portion, the third conductor, and the isolation layer includes:

[0152] S11. A first conductive material layer is formed on the substrate;

[0153] S12. Pattern the first conductive material layer to form a first wire and a second wire;

[0154] S13. A first sacrificial layer is formed between the first conductor and the second conductor;

[0155] S14. A bridging portion is formed on the first sacrificial layer;

[0156] S15. A second sacrificial layer is formed on the bridging section;

[0157] S16. An isolation layer is formed on the second sacrificial layer;

[0158] S17. A third conductor layer is formed on the isolation layer;

[0159] S18. Remove the first and second sacrificial layers.

[0160] In some embodiments, the bridging portion may include a bridging structure disposed opposite to the substrate, a first anchor portion connecting the bridging structure to the first conductor, and a second anchor portion connecting the bridging structure to the second conductor. The bridging structure includes a middle portion, a first portion extending from the middle portion to the first anchor portion, and a second portion extending from the middle portion to the second anchor portion. The projection of the middle portion onto the substrate overlaps with the projection of the third conductor onto the substrate. The width of the middle portion satisfies at least one of the following: the width of the middle portion is greater than the width of the first portion, and the width of the middle portion is greater than the width of the second portion. A method for fabricating a phase shifter according to an embodiment of the present invention may further include:

[0161] S7. Before forming the first sacrificial layer, a support portion is formed between the first conductor and the second conductor, wherein the projection of the support portion on the substrate falls within the projection of the middle portion of the bridging portion on the substrate.

[0162] Figure 22 This is a schematic flowchart of a method for fabricating a phase shifter according to an embodiment of the present invention. Figure 22 The method can prepare such as Figures 12-15 The phase shifter shown in the image. Figure 21 As shown, in an embodiment of the present invention, forming the first conductor, the second conductor, the bridging portion, the third conductor, and the isolation layer may include:

[0163] S21. A first conductive material layer is formed on a substrate;

[0164] S22. Pattern the first conductive material layer to form a first wire and a second wire;

[0165] S23. A first sub-sacrificial layer is formed between the first conductor and the second conductor;

[0166] S24. A second sub-part is formed on the first sub-sacrificial layer;

[0167] S25. Form a second sub-sacrificial layer on the second sub-part to form a first sacrificial layer;

[0168] S26. A bridging portion with through holes is formed on the first sacrificial layer;

[0169] S27. A second sacrificial layer is formed on the bridging section;

[0170] S28. An isolation layer with a first sub-part is formed on the second sacrificial layer;

[0171] S29. A third conductor layer is formed on the isolation layer;

[0172] S30. Remove the first and second sacrificial layers.

[0173] Figure 23 This is a schematic flowchart of a method for fabricating a phase shifter according to an embodiment of the present invention. Figure 23 The method can prepare such as Figures 16-18 The phase shifter shown in the image. Figure 23 As shown, in embodiments of the present invention, forming the first conductor, the second conductor, the bridging portion, the third conductor, and the isolation layer may include:

[0174] S31. A first conductive material layer is formed on a substrate;

[0175] S32. Pattern the first conductive material layer to form the first conductive wire and the second conductive wire;

[0176] S33. A first sacrificial layer is formed between the first conductor and the second conductor;

[0177] S34. A bridge structure with a bridging portion formed on a first sacrificial layer and disposed opposite to a substrate, a first anchor portion connecting the bridge structure to a first conductor, and a second anchor portion connecting the bridge structure to a second conductor;

[0178] S35. A fourth sub-section is formed on the bridge deck structure;

[0179] S36. The third extension forming the bridging portion;

[0180] S37. Form an isolation layer;

[0181] S38. A third conductor layer is formed on the isolation layer;

[0182] S39. Remove the first sacrificial layer.

[0183] Figure 24 This is a schematic flowchart of a method for fabricating a phase shifter according to an embodiment of the present invention. Figure 24 The method can prepare such as Figure 19 The phase shifter shown in the image. Figure 23 As shown, in embodiments of the present invention, forming the first conductor, the second conductor, the bridging portion, the third conductor, and the isolation layer may include:

[0184] S41. A first conductive material layer is formed on a substrate;

[0185] S42. Pattern the first conductive material layer to form a first wire and a second wire;

[0186] S43. A first sacrificial layer is formed between the first conductor and the second conductor;

[0187] S44. A bridge structure with a bridging portion formed on a first sacrificial layer and disposed opposite to a substrate, a first anchor portion connecting the bridge structure to a first conductive wire, and a second anchor portion connecting the bridge structure to a second conductive wire;

[0188] S45. A fifth extension is formed on the bridge deck structure;

[0189] S46. The seventh and eighth sub-parts forming the bridging section;

[0190] S47. Form an isolation layer;

[0191] S48. A third conductive layer is formed on the isolation layer;

[0192] S49. Remove the first sacrificial layer.

[0193] A particular embodiment has been described, and these embodiments are shown by way of example only and are not intended to limit the scope of this disclosure. In fact, the novel embodiments described herein can be implemented in various other forms; furthermore, various omissions, substitutions, and changes may be made to the form of the embodiments described herein without departing from the spirit of this disclosure. The appended claims and their equivalents are intended to cover such forms or modifications that fall within the scope and spirit of this disclosure.

[0194] A particular embodiment has been described, which is shown by way of example only and is not intended to limit the scope of the invention. In fact, the novel embodiments described herein can be implemented in various other forms; furthermore, various omissions, substitutions, and changes can be made to the form of the embodiments described herein without departing from the spirit of the invention. The appended claims and their equivalents are intended to cover such forms or modifications that fall within the scope and spirit of the invention.

Claims

1. A phase shifter, the phase shifter comprising at least one phase shifter unit, The phase shifter unit includes: Substrate; A first and a second wire spaced apart on the substrate; A bridging portion on the first conductor and the second conductor, wherein the bridging portion is connected to the first conductor and the second conductor; A third conductive line on the side of the bridging portion away from the substrate. An isolation layer, which at least covers the surface of the third conductor facing the substrate, The bridging portion includes a bridge structure disposed opposite to the substrate, a first anchor portion connecting the bridge structure to the first conductor, and a second anchor portion connecting the bridge structure to the second conductor. The bridge structure includes a middle portion, a first portion extending from the middle portion to the first anchor portion, and a second portion extending from the middle portion to the second anchor portion. The projection of the middle portion onto the substrate overlaps with the projection of the third conductor onto the substrate. The middle portion of the bridging part has a through hole. The isolation layer further includes a first extension extending from the surface of the third conductor toward the substrate toward the substrate, the first extension having a first sub-part passing through the via and a second sub-part opposite to the substrate surface, the second sub-part being connected to the end of the first sub-part toward the substrate, and wherein the size of the projection of the second sub-part onto the substrate is larger than the size of the projection of the via onto the substrate.

2. The phase shifter according to claim 1, wherein, The isolation layer also covers the surface of the third conductor away from the substrate and the side surface between the surface of the third conductor away from the substrate and the surface of the third conductor facing the substrate.

3. The phase shifter according to claim 2, wherein, The width of the middle portion satisfies at least one of the following: The width of the middle portion is greater than the width of the first portion, and The width of the middle portion is greater than the width of the second portion.

4. The phase shifter according to claim 2, wherein the phase shifter unit further comprises: A support portion is disposed on the surface of the substrate on which the first and second conductors are disposed, and the projection of the support portion on the substrate overlaps with the projection of the bridge structure on the substrate.

5. The phase shifter according to claim 4, wherein, The projection of the support portion onto the substrate falls within the projection of the middle portion of the bridging portion onto the substrate.

6. The phase shifter according to claim 4, wherein, The support portion includes at least two sub-support portions, wherein, in the extending direction of the bridging portion, the at least two sub-support portions are located on different sides of the middle portion of the bridging portion.

7. The phase shifter according to claim 6, wherein, The support portion includes four sub-support portions, which correspond one-to-one with the four corners of the middle portion of the bridging portion.

8. The phase shifter according to claim 2, wherein, The extension direction of the second sub-part is perpendicular to the extension direction of the first sub-part.

9. The phase shifter according to claim 8, wherein, The distance from the second sub-part to the substrate is less than or equal to the distance from the bridging portion to the substrate.

10. The phase shifter according to claim 9, wherein, The bridge structure has a first surface away from the substrate and a second surface facing the substrate, wherein the area of ​​the via on the first surface is smaller than the area of ​​the via on the second surface.

11. The phase shifter according to claim 10, wherein, The isolation layer has a second extension, a third sub-part of the second extension extending from the side surface of the third conductor toward the substrate, and a fourth sub-part of the second extension extending from the end of the third sub-part near the substrate toward the middle portion of the bridging portion. The bridging portion has a third extension portion, a fifth sub-part of the third extension portion extending from the side of the middle portion of the bridging portion away from the substrate toward the third conductor, and a sixth sub-part of the third extension portion extending from the side of the fifth sub-part toward the third conductor toward the third sub-part, wherein the projection of the fourth sub-part onto the substrate overlaps with the projection of the sixth sub-part onto the substrate.

12. The phase shifter according to claim 11, wherein, The bridging portion has a fourth extension portion, a seventh sub-portion of the fourth extension portion extending from the surface of the bridging portion away from the substrate in a direction away from the substrate, and an eighth sub-portion of the fourth extension portion extending from the end of the seventh sub-portion away from the substrate toward the third wire. The isolation layer has a fifth extension that extends from the third conductor toward the substrate toward the seventh sub-part, wherein the projection of the fifth extension onto the substrate overlaps with the projection of the eighth sub-part onto the substrate.

13. The phase shifter according to any one of claims 1-12, wherein, The third conductor includes a first sub-conductor portion, a second sub-conductor portion located on both sides of the first sub-conductor portion, and a sidewall connecting the first sub-conductor portion and the second sub-conductor portion. The first sub-conductor portion is located on the side of the bridging portion away from the substrate, and the second sub-conductor portion is located on the same plane as the first conductor and the second conductor.

14. The phase shifter according to any one of claims 1-12, wherein, The third conductor is entirely located on the side of the bridging portion away from the substrate.

15. The phase shifter according to any one of claims 1-12, wherein, The isolation layer comprises a nitrogen-silicon compound; At least one of the first wire, the second wire, and the third wire comprises at least one of the following materials: molybdenum-nickel-titanium alloy, copper, and combinations thereof; The bridging portion includes at least one of the following: molybdenum, aluminum, and a combination thereof.

16. A method for fabricating a phase shifter, comprising forming at least one phase shifter unit, wherein forming at least one phase shifter unit comprises: A first and second conductive wire spaced apart are formed on a substrate. A bridging portion is formed on the first conductor and the second conductor, wherein the bridging portion connects the first conductor and the second conductor; A third conductive line is formed on the side of the bridging portion away from the substrate; An isolation layer is formed that at least covers the surface of the third conductive wire facing the substrate. The bridging portion includes a bridge structure disposed opposite to the substrate, a first anchor portion connecting the bridge structure to the first conductor, and a second anchor portion connecting the bridge structure to the second conductor. The bridge structure includes a middle portion, a first portion extending from the middle portion to the first anchor portion, and a second portion extending from the middle portion to the second anchor portion. The projection of the middle portion on the substrate overlaps with the projection of the third conductor on the substrate. The width of the middle portion satisfies at least one of the following: The width of the middle portion is greater than the width of the first portion, and The width of the middle portion is greater than the width of the second portion. The bridging portion has a through-hole in the middle part, and the isolation layer further includes a first extension extending from the surface of the third conductor toward the substrate toward the substrate. The first extension has a first sub-part passing through the through-hole and a second sub-part opposite to the substrate surface. The second sub-part is connected to the end of the first sub-part toward the substrate, and the size of the projection of the second sub-part onto the substrate is larger than the size of the projection of the through-hole onto the substrate.

17. The method according to claim 16, wherein, The formation of the first conductor, the second conductor, the bridging portion, the third conductor, and the isolation layer includes: A first conductive material layer is formed on the substrate. The first conductive material layer is patterned to form the first wire and the second wire; A first sacrificial layer is formed between the first conductor and the second conductor; The bridging portion is formed on the first sacrificial layer; A second sacrificial layer is formed on the bridging portion; The isolation layer is formed on the second sacrificial layer; A third conductive layer is formed on the isolation layer; Remove the first sacrificial layer and the second sacrificial layer.

18. The method of claim 17, further comprising: Before forming the first sacrificial layer, a support portion is formed between the first conductor and the second conductor, wherein the projection of the support portion on the substrate falls within the projection of the middle portion of the bridging portion on the substrate.

19. The method of claim 16, wherein, The formation of the first conductor, the second conductor, the bridging portion, the third conductor, and the isolation layer includes: A first conductive material layer is formed on the substrate. The first conductive material layer is patterned to form the first wire and the second wire; A first sub-sacrificial layer is formed between the first conductor and the second conductor; The second sub-part is formed on the first sub-sacrificial layer; A second sub-sacrificial layer is formed on the second sub-part to form a first sacrificial layer; The bridging portion having the through hole is formed on the first sacrificial layer; A second sacrificial layer is formed on the bridging portion; The isolation layer having the first sub-part is formed on the second sacrificial layer; A third conductive layer is formed on the isolation layer; Remove the first sacrificial layer and the second sacrificial layer.

20. The method of claim 16, wherein, The isolation layer has a second extension, a third sub-part of the second extension extending from the side surface of the third conductor toward the substrate, and a fourth sub-part of the second extension extending from the end of the third sub-part near the substrate toward the middle portion of the bridging portion. The bridging portion has a third extension, a fifth sub-portion of which extends from the side of the middle portion of the bridging portion away from the substrate toward the third conductor, and a sixth sub-portion of the third extension extends from the side of the fifth sub-portion toward the third conductor toward the third sub-portion, wherein the projection of the fourth sub-portion on the substrate overlaps with the projection of the sixth sub-portion on the substrate. The formation of the first conductor, the second conductor, the bridging portion, the third conductor, and the isolation layer includes: A first conductive material layer is formed on the substrate. The first conductive material layer is patterned to form the first wire and the second wire; A first sacrificial layer is formed between the first conductor and the second conductor; A bridge structure opposite to the substrate is formed on the first sacrificial layer, a first anchor portion connecting the bridge structure to the first conductor, and a second anchor portion connecting the bridge structure to the second conductor. The fourth sub-part is formed on the bridge deck structure; A third extension portion forming the bridging portion; Form the isolation layer; A third conductive layer is formed on the isolation layer; Remove the first sacrificial layer.

21. The method according to claim 16, wherein, The bridging portion has a fourth extension portion, a seventh sub-portion of the fourth extension portion extending from the surface of the bridging portion away from the substrate in a direction away from the substrate, and an eighth sub-portion of the fourth extension portion extending from the end of the seventh sub-portion away from the substrate toward the third wire. The isolation layer has a fifth extension that extends from the third conductor toward the substrate toward the seventh sub-part, wherein the projection of the fifth extension onto the substrate overlaps with the projection of the eighth sub-part onto the substrate. The formation of the first conductor, the second conductor, the bridging portion, the third conductor, and the isolation layer includes: A first conductive material layer is formed on the substrate. The first conductive material layer is patterned to form the first wire and the second wire; A first sacrificial layer is formed between the first conductor and the second conductor; A bridge structure opposite to the substrate is formed on the first sacrificial layer, a first anchor portion connecting the bridge structure to the first conductor, and a second anchor portion connecting the bridge structure to the second conductor. The fifth extension is formed on the bridge deck structure; The seventh and eighth sub-parts forming the bridging portion; Form the isolation layer; A third conductive layer is formed on the isolation layer; Remove the first sacrificial layer.

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