Filtration device and filtration method

Abstract

This invention discloses a filtration device and a filtration method. The filtration device includes a reaction module, a filtration module, a collection module, and a liquid circulation module. The reaction module receives harmful gases and heats the harmful gases to molecularize multiple harmful substances in the gases, generating multiple harmful particles. The filtration module receives the harmful gases and performs a water washing action on them, causing the multiple harmful particles to adhere to the liquid. The collection module receives the liquid with the adhered harmful particles. The liquid circulation module supplies the liquid to the filtration module. Therefore, the filtration device and filtration method of this invention improve the efficiency of removing harmful substances from gases.

Description

Technical Field

[0001] This invention relates to a filtration device and a filtration method, and more particularly to a filtration device and a filtration method capable of effectively removing harmful substances from gases. Background Technology

[0002] In the case of particulate matter exhaust gas treatment systems in high-tech manufacturing, many exhaust gas reduction processes require the collection of fine dust. Fine dust in exhaust gas consists of extremely fine solid particles that remain suspended in the air for extended periods. Particles larger than 10 micrometers in diameter are classified as coarse particles, which are adsorbed by nasal hairs or the mucous membranes of the nasopharynx. Fine dust particles smaller than 10 micrometers in diameter (PM10) are suspended particles; once inhaled, they travel along the trachea and bronchi all the way to the lungs.

[0003] Fine dust particles with a diameter of less than 2.5 micrometers are classified as fine particulate matter (PM2.5), while those smaller than 0.1 micrometers are classified as ultrafine particulate matter. Both PM10 and PM2.5 are difficult to handle with existing gas scrubbers and separators, potentially causing exhaust duct blockage.

[0004] Therefore, how to overcome the above-mentioned defects through structural design improvements has become one of the important issues to be addressed in this field. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide a filtration device and filtration method that address the shortcomings of the prior art.

[0006] To address the aforementioned technical problems, one technical solution adopted by the present invention is to provide a filtration device, comprising a reaction module, a filtration module, a collection module, and a liquid circulation module. The reaction module receives harmful gases and heats the harmful gases to molecularize multiple harmful substances in the gases, generating multiple harmful particles. The filtration module is connected to the reaction module and receives the harmful gases, performing a water washing action on the harmful gases to adhere the multiple harmful particles to the liquid. The collection module is connected to the filtration module and receives the liquid containing the adhered harmful particles. The liquid circulation module is connected to the reaction module and the filtration module, supplying the liquid to the filtration module. The reaction module includes a first chamber unit, at least one heating unit, a conveying unit, multiple first nozzle units, a water washing unit, and a conduction unit. The first cavity unit is detachably connected to at least one external process device and receives the harmful gases generated by the at least one external process device. The first cavity unit has a first barrier wall that divides the interior of the first cavity unit into a pyrolysis chamber and a cooling chamber. The center of the first barrier wall has a first opening, through which the pyrolysis chamber and the cooling chamber communicate with each other. One wall surface of the first cavity unit corresponding to the pyrolysis chamber protrudes towards the first barrier wall to form an annular wall. At least one heating unit is disposed within the first cavity unit and is used to heat the first cavity unit to molecularize the plurality of harmful substances in the first cavity unit, thereby generating the plurality of harmful particles. A delivery unit is detachably connected to the first cavity unit, the filtration module, and the collection module. The delivery unit receives the harmful gases transmitted by the first cavity unit and guides the harmful gases to the filtration module. The plurality of first nozzle units are respectively disposed within the first cavity unit and the conveying unit. The plurality of first nozzle units are connected to the liquid circulation module. The plurality of first nozzle units are used to receive the liquid provided by the liquid circulation module and spray the liquid into the first cavity unit and the conveying unit. The water washing unit is disposed within the cooling chamber. The water washing unit has a receiving space and a water washing channel. The water washing channel penetrates a portion of the body of the water washing unit and connects the receiving space and the cooling chamber. The first baffle wall portion has a plurality of second through holes, and the receiving space and the pyrolysis chamber are interconnected through the plurality of second through holes. One of the first nozzle units passes through the first cavity unit and the water washing unit, and is used to spray the liquid into the receiving space.The conduction unit passes through the first opening and the water washing unit, and connects the pyrolysis chamber and the cooling chamber. The filtration module includes a second chamber unit and multiple second nozzle units. The second chamber unit is detachably connected to the delivery unit and receives the harmful gas containing the multiple harmful particles. The second chamber unit is a multi-section tubular structure. One section of the second chamber unit has a second blocking wall and a protrusion. The protrusion is formed by protruding outward from the center of the second blocking wall. The second blocking wall has multiple first through holes, dividing the interior of the second chamber unit into an upper chamber and a lower chamber. The protrusion has a first channel, and the upper chamber and the lower chamber are interconnected through the multiple first through holes and the first channel. The plurality of second nozzle units are disposed within the second cavity unit and connected to the liquid circulation module. The plurality of second nozzle units are located in the upper chamber, one of which corresponds to the first channel and the other corresponds to the second barrier wall. The plurality of second nozzle units are used to receive the liquid provided by the liquid circulation module and spray the liquid into the interior of the second cavity unit.

[0007] Preferably, the temperature at which the at least one heating unit heats the first cavity unit is between 600 degrees Celsius and 900 degrees Celsius.

[0008] Preferably, the liquid circulation module includes at least one first infusion unit, at least one second infusion unit, and a recovery unit. The at least one first infusion unit is connected to the plurality of first nozzle units, the plurality of second nozzle units, and an external liquid supply end. The at least one first infusion unit receives the liquid supplied by the external liquid supply end and supplies the liquid to the plurality of first nozzle units and the plurality of second nozzle units. The at least one second infusion unit is connected to an external liquid collection end. The recovery unit is connected to the collection module and the at least one second infusion unit. The recovery unit is used to recover the liquid collected by the collection module and supply the liquid to the at least one second infusion unit. The at least one second infusion unit is used to guide the liquid to the external liquid collection end.

[0009] Preferably, the filtration device further includes a control module connected to the at least one heating unit, the at least one first infusion unit, and the recovery unit, and the control module is used to control the operation of the at least one heating unit, the at least one first infusion unit, and the recovery unit.

[0010] To solve the above-mentioned technical problems, another technical solution adopted by the present invention is to provide a filtration method applicable to the above-mentioned filtration device. The filtration method includes the following steps: receiving the harmful gas through the reaction module and heating the harmful gas using the reaction module to molecularize the plurality of harmful substances in the harmful gas, thereby generating the plurality of harmful particles; receiving the harmful gas through the filtration module and performing a water washing action on the harmful gas using the filtration module to cause the plurality of harmful particles to adhere to the liquid; and receiving the liquid with the adhered harmful particles through the collection module.

[0011] Preferably, the step of generating the plurality of harmful particles further includes the following steps: receiving the harmful gas generated by the at least one external process device through the first cavity unit; and heating the plurality of harmful substances through the at least one heating unit to molecularize the plurality of harmful substances in the first cavity unit, thereby generating the plurality of harmful particles.

[0012] Preferably, the step of generating the plurality of harmful particles further includes the following steps: receiving the harmful gas containing the plurality of harmful particles through the second cavity unit; and receiving the liquid through the plurality of second nozzle units, and spraying the liquid into the interior of the second cavity unit using the plurality of second nozzle units so that the liquid comes into contact with the plurality of harmful particles.

[0013] One beneficial effect of the present invention is that the filtration device provided by the present invention can receive harmful gases through a reaction module, which heats the harmful gases to molecularize multiple harmful substances in the harmful gases, thereby generating multiple harmful particles; a filtration module is connected to the reaction module, which receives the harmful gases and performs a water washing action on the harmful gases to cause the multiple harmful particles to adhere to the liquid; a collection module is connected to the filtration module, which receives the liquid with the adhered harmful particles; and a liquid circulation module is connected to the reaction module and the filtration module, which supplies the liquid to the filtration module. The reaction module... The module includes a first cavity unit, at least one heating unit, a conveying unit, multiple first nozzle units, a water washing unit, and a conduction unit. The first cavity unit is detachably connected to at least one external process device and receives the harmful gases generated by the at least one external process device. The first cavity unit has a first barrier wall that divides the interior of the first cavity unit into a pyrolysis chamber and a cooling chamber. The center of the first barrier wall has a first opening, through which the pyrolysis chamber and the cooling chamber communicate with each other. One wall surface of the first cavity unit corresponding to the pyrolysis chamber protrudes towards the first barrier wall to form an annular wall. At least one heating unit is disposed within the first cavity unit. This heating unit heats the first cavity unit to molecularize the plurality of harmful substances within it, thereby generating the plurality of harmful particles. A delivery unit is detachably connected to the first cavity unit, the filtration module, and the collection module. The delivery unit receives the harmful gas transmitted from the first cavity unit and guides it to the filtration module. A plurality of first nozzle units are respectively disposed within the first cavity unit and the delivery unit. These first nozzle units are connected to the liquid circulation module and receive the liquid from the liquid circulation module. The liquid is supplied and sprayed into the first cavity unit and the conveying unit. The washing unit is disposed in the cooling chamber, and has a receiving space and a washing channel. The washing channel penetrates a portion of the washing unit and connects the receiving space and the cooling chamber. The first blocking wall has multiple second through holes, and the receiving space and the pyrolysis chamber are interconnected through these second through holes. One of the first nozzle units passes through the first cavity unit and the washing unit, and is used to spray the liquid into the receiving space. The conducting unit passes through the first port and the washing unit, and connects the pyrolysis chamber and the cooling chamber.The filtration module includes a second cavity unit and multiple second nozzle units. The second cavity unit is detachably connected to the delivery unit and receives the harmful gas containing the multiple harmful particles. The second cavity unit is a multi-section tubular structure. One section of the second cavity unit has a second barrier wall and a protrusion. The protrusion is formed by protruding outward from the center of the second barrier wall. The second barrier wall has multiple first through holes, dividing the interior of the second cavity unit into an upper chamber and a lower chamber. The protrusion has a first channel, and the upper chamber and the lower chamber are interconnected through the multiple first through holes and the first channel. The plurality of second nozzle units are disposed within the second cavity unit and connected to the liquid circulation module. The plurality of second nozzle units are located in the upper chamber, one of which corresponds to the first channel and the other corresponds to the second barrier wall. The plurality of second nozzle units are used to receive the liquid provided by the liquid circulation module and spray the liquid into the interior of the second cavity unit to improve the effect of removing harmful substances from the gas.

[0014] Another beneficial effect of the present invention is that the filtration method provided by the present invention can improve the effect of removing harmful substances from the gas by means of the technical solution of "receiving the harmful gas through the reaction module and heating the harmful gas using the reaction module to molecularize the multiple harmful substances in the harmful gas to generate the multiple harmful particles; receiving the harmful gas through the filtration module and washing the harmful gas with water using the filtration module to make the multiple harmful particles adhere to the liquid; and receiving the liquid with the harmful particles adhered to it through the collection module".

[0015] To further understand the features and technical content of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings provided are for reference and illustration only and are not intended to limit the present invention. Attached Figure Description

[0016] Figure 1 This is a flowchart illustrating the filtering method according to an embodiment of the present invention.

[0017] Figure 2 This is a partial perspective view of the filtration device according to an embodiment of the present invention.

[0018] Figure 3 This is a schematic diagram of the structure of the filtering device according to one embodiment of the present invention.

[0019] Figure 4This is a partial cross-sectional schematic diagram of the reaction module of the filtration device according to an embodiment of the present invention.

[0020] Figure 5 This is a schematic diagram of the filtering device from another perspective according to an embodiment of the present invention.

[0021] Figure 6 This is a partial cross-sectional schematic diagram of the filtration module of the filtration device according to an embodiment of the present invention.

[0022] Figure 7 This is a schematic diagram comparing the dust removal efficiency of the filtration device of the present invention with that of conventional dust removal equipment.

[0023] Figure 8 This is a schematic diagram comparing the dust removal capabilities of the filtration device of the present invention with those of conventional dust removal equipment.

[0024] Figure label:

[0025] Z: Filtering device; 1: Reaction module; 10: First cavity unit; 10a: First barrier wall; 10b: First opening; 10c: Annular wall; 10d: Second through hole; 100: Pyrolysis chamber; 101: Cooling chamber; 102: First conveying unit; 11: Heating unit; 12: Conveying unit; 13: First nozzle unit; 14: Water washing unit; 140: Accommodation space; 141: Water washing channel; 15: Conducting unit; 2: Filtering module; 20 200: Second cavity unit; 200: Second barrier wall; 200a: First through hole; 201: Protrusion; 201a: First channel; 202: Upper chamber; 203: Lower chamber; 204: Discharge section; 21: Second nozzle unit; 22: Filter unit; 3: Collection module; 4: Liquid circulation module; 40: First infusion unit; 41: Second infusion unit; 42: Recovery unit; 5: Control module; 6: Device body; L1-L5: Lines. Detailed Implementation

[0026] The following specific embodiments illustrate the implementation of the "filtration device and filtration method" disclosed in this invention. Those skilled in the art can understand the advantages and effects of this invention from the content disclosed in this specification. This invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this invention. Furthermore, the accompanying drawings of this invention are for simple illustrative purposes only and are not depictions of actual dimensions; this is stated in advance. The following embodiments will further describe the relevant technical content of this invention in detail, but the disclosed content is not intended to limit the scope of protection of this invention.

[0027] It should be understood that while terms such as "first," "second," and "third" may be used in this document to describe various components, these components should not be limited by these terms. These terms are primarily used to distinguish one component from another. Furthermore, the term "or" as used herein should, as appropriate, include any combination of one or more related listed items.

[0028] Example

[0029] Please see Figures 1 to 8 The figures show a flow chart of the filtration method according to an embodiment of the present invention, a partial three-dimensional schematic diagram of the filtration device, a structural schematic diagram of the filtration device from one perspective, a partial cross-sectional schematic diagram of the reaction module of the filtration device, a structural schematic diagram of the filtration device from another perspective, and a partial cross-sectional schematic diagram of the filtration removal module of the filtration device. They also include a comparative schematic diagram of the dust removal efficiency and dust removal capacity of the filtration device of the present invention and conventional dust removal equipment. As shown in the figures, an embodiment of the present invention provides a filtration method applicable to a filtration device Z; the filtration device Z may include a reaction module 1, a filtration module 2, a collection module 3, and a liquid circulation module 4. The implementation of the filtration method of the present invention is described below.

[0030] First, harmful gases can be received through reaction module 1, and the harmful gases can be heated by reaction module 1 to molecularize multiple harmful substances in the harmful gases, thereby generating multiple harmful particles (step S100).

[0031] For example, coordination Figures 1 to 4As shown, the reaction module 1 of the filtration device Z can be connected to at least one external process equipment (not shown in the figure); wherein, the external process equipment can be semiconductor process equipment or other types of industrial process equipment, but is not limited thereto. The reaction module 1 can receive harmful gases discharged from the external process equipment and heat the received harmful gases to molecularize multiple harmful substances in the harmful gases, thereby generating multiple harmful particles (e.g., fine suspended particles). Further, the reaction module 1 may include a first cavity unit 10, at least one heating unit 11, a conveying unit 12, and multiple first nozzle units 13. The interior of the first cavity unit 10 has a first baffle wall portion 10a, which divides the interior of the first cavity unit 10 into a pyrolysis chamber 100 and a cooling chamber 101. The center of the first baffle wall portion 10a may have a first opening 10b, through which the pyrolysis chamber 100 and the cooling chamber 101 can communicate with each other; wherein, the first baffle wall portion 10a may be an integral structure with the body of the first cavity unit 10. The first cavity unit 10, corresponding to one of the walls of the pyrolysis chamber 100, can protrude toward the first blocking wall portion 10a to form an annular wall portion 10c. One end (i.e., the top) of the first cavity unit 10 extends outward to form at least one first conveying portion 102, which is detachably connected to at least one external process device and communicates with the pyrolysis chamber 100; wherein, the first conveying portion 102 may be a tubular structure. The first conveying portion 102 receives harmful gases (e.g., toxic and flammable gases) generated by the external process device and guides the harmful gases into the pyrolysis chamber 100. At least one heating unit 11 may be disposed in the pyrolysis chamber 100 of the first cavity unit 10; wherein, the heating unit 11 may be inserted into the pyrolysis chamber 100 from the top of the first cavity unit 10. Heating unit 11 generates heat energy (e.g., heating unit 11 can release heat energy between 600 degrees Celsius and 900 degrees Celsius, preferably 800 degrees Celsius) to heat multiple harmful substances inside the first cavity unit 10, causing the multiple harmful substances in the first cavity unit 10 to be molecularized, thereby generating multiple harmful particles. Delivery unit 12 can be connected to the other end of the first cavity unit 10, and the interior of delivery unit 12 is in communication with the cooling chamber 101; wherein, delivery unit 12 can be a delivery pipe structure. Multiple first nozzle units 13 can be respectively disposed in the first cavity unit 10 and delivery unit 12 and connected to the liquid circulation module 4. Multiple first nozzle units 13 can receive liquid (e.g., water or a specific coolant, but not limited thereto) provided by the liquid circulation module 4 and respectively supply liquid to the cooling chamber 101 and the interior of delivery unit 12.

[0032] Therefore, in coordination Figures 1 to 4As shown, in step S100 above, the first conveying unit 102 of the reaction module 1 first receives the harmful gas generated by the external process equipment and guides the harmful gas into the pyrolysis chamber 100. Next, the pyrolysis chamber 100 of the first chamber unit 10 can be heated by at least one heating unit 11 to perform a thermal pyrolysis reaction on multiple harmful substances in the harmful gas within the pyrolysis chamber 100, causing the harmful substances to undergo combustion decomposition (e.g., SiH4 + 2O2 → SiO2 + 2H2O), thereby molecularizing the multiple harmful substances in the harmful gas to form harmful particles. Next, the harmful gas containing harmful particles flows into the cooling chamber 101 through the first inlet 10b. At this time, liquid is sprayed onto the cooling chamber 101 using the first nozzle unit 13 to filter out larger harmful particles (such as suspended particles) from the harmful gas, i.e., by using liquid contact with the harmful gas to make the suspended particles adhere to the liquid. At the same time, since the harmful gas also carries a large amount of heat energy, spraying liquid onto the cooling chamber 101 through the first nozzle unit 13 can also cool down the harmful gas and the cooling chamber 101. Then, the liquid in the cooling chamber 101 flows into the conveying unit 12.

[0033] Next, harmful gases can be received through the filter module 2, and the harmful gases can be washed with water using the filter module 2 so that multiple harmful particles are adhered to the liquid (step S102).

[0034] For example, coordination Figures 1 to 3 , Figure 5 and Figure 6 As shown, the bottom of the reaction module 1 can be connected to the bottom of the filtration module 2 via the conveying unit 12; the bottom of the filtration module 2 is also connected to the collection module 3. The filtration module 2 can receive the harmful gas conveyed by the conveying unit 12 of the reaction module 1 and perform a water washing action on the harmful gas so that multiple harmful particles are adhered to the liquid; the liquid carrying the harmful particles can flow into the collection module 3.

[0035] Furthermore, in coordination Figures 1 to 3 , Figure 5 and Figure 6As shown, the filtration module 2 may include a second cavity unit 20 and multiple second nozzle units 21. The second cavity unit 20 is detachably connected to the delivery unit 12 of the reaction module 1 and receives harmful gas containing multiple harmful particles. The second cavity unit 20 may be a multi-section tubular structure; one section of the second cavity unit 20 may have a second barrier wall portion 200 and a protrusion 201 inside, the protrusion 201 being formed by protruding outward from the center of the second barrier wall portion 200; wherein, the barrier wall portion 200 may be an integral structure with the body of the second cavity unit 20. The second barrier wall portion 200 may have multiple first through holes 200a penetrating the body, the second barrier wall portion 200 dividing the interior of the second cavity unit 20 into an upper half chamber 202 and a lower half chamber 203. The protrusion 201 may have a first channel 201a penetrating the body. The upper chamber 202 and the lower chamber 203 are interconnected through multiple first through holes 200a and first channels 201a. Furthermore, the top of the second chamber unit 20 may have a discharge section 204, which communicates with the upper chamber 202 and can be connected to an external exhaust device (not shown in the figure). Multiple second nozzle units 21 are disposed within the second chamber unit 20 and located in the upper chamber 202. One second nozzle unit 21 corresponds to the first channel 201a, and another second nozzle unit 21 corresponds to the second baffle wall 200. The multiple second nozzle units 21 are used to receive liquid provided by the liquid circulation module 4 and spray the liquid into the interior of the second chamber unit 20 to allow the liquid to contact multiple harmful particles. In addition, a second nozzle unit 21 may also be disposed within the second chamber unit 20 near the discharge section 204, which is used to spray liquid into the interior of the second chamber unit 20 to further filter harmful particles.

[0036] Therefore, in coordination Figures 1 to 3 , Figure 5 and Figure 6As shown, in step S102 above, the bottom of the second cavity unit 20 can receive the harmful gas containing multiple harmful particles delivered by the conveying unit 12. Then, the harmful gas containing smaller harmful particles (e.g., fine suspended particles) flows from the lower half chamber 203 to the upper half chamber 202 through multiple first through holes 200a and first channels 201a. At this time, liquid can be sprayed into the first channel 201a through one of the second nozzle units 21, and at the same time, liquid can also be sprayed into the upper surface of the second barrier wall 200 using another second nozzle unit 21, so that the liquid comes into contact with multiple harmful particles in the harmful gas, thereby filtering out the harmful particles in the harmful gas. Next, the liquid carrying smaller harmful particles can flow to the bottom of the second chamber unit 20 and then to the collection module 3 for collection; while the harmful gas that enters the upper chamber 202 through the first through hole 200a and the first channel 201a can be transformed into purified gas through the above-mentioned filtration process and delivered to the external exhaust device (not shown in the figure) by the discharge part 204 at the top of the filter module 2.

[0037] Then, the liquid with harmful particles adhering to it can be received through the collection module 3 (step S104).

[0038] For example, coordination Figure 1 , Figure 2 , Figure 3 and Figure 5 As shown, the collection module 3 can be connected to the bottom of the conveying unit 12 of the reaction module 1 and the filtration module 2, and the collection module 3 communicates with the interior of the conveying unit 12 and the lower chamber 203. Therefore, the liquid carrying harmful particles generated in steps S100 and S102 will flow into the collection module 3 for collection. The collection module 3 can be a collection tank structure. The operator can also remove the waste liquid collected by the collection module 3 for further processing.

[0039] Therefore, the filtration method of the present invention can utilize the above-described technical solution to first perform a thermal decomposition reaction on the harmful gas using the reaction module 1, so that the harmful substances in the harmful gas are molecularized to form multiple harmful particles; then, the filtration module 2 is used to filter out the harmful particles in the harmful gas, so that the harmful gas is purified to form purified gas, thereby effectively filtering out the harmful substances carried in the harmful gas and purifying the harmful gas.

[0040] Furthermore, in coordination Figure 7 and Figure 8As shown in the two comparison tables, the filter device Z of the present invention, combined with the above-described filtration method, far surpasses the capabilities of traditional dust removal equipment in both efficiency and dust removal capacity. The filter device Z of the present invention can effectively filter out up to 90% of fine suspended particulate matter (PM2.5) from harmful gases. Figure 7 In the diagram, line L1 represents the filter device Z of the present invention with a spray head, line L2 represents the filter device Z of the present invention without a spray head, and line L3 represents a conventional filter device. Figure 8 In the diagram, line L4 represents an existing filtration device, while line L5 represents the filtration device Z of the present invention.

[0041] It is worth mentioning that, in conjunction with Figure 2 and Figure 3 As shown, the liquid circulation module 4 of the present invention may include at least one first liquid delivery unit 40, at least one second liquid delivery unit 41, and a recovery unit 42. The at least one first liquid delivery unit 40 may be connected to an external liquid supply terminal (not shown in the figure, but the external liquid supply terminal may be a process cooling water (PCW) system, but is not limited thereto), multiple first nozzle units 13, and multiple second nozzle units 21. The first liquid delivery unit 40 may receive liquid supplied by the external liquid supply terminal and supply liquid to the multiple first nozzle units 13 and multiple second nozzle units 21. The first liquid delivery unit 40 may be a multi-connector pipe structure with multiple branch pipes, or a one-to-one delivery pipe structure, but is not limited thereto. The at least one second liquid delivery unit 41 is connected to the recovery unit 42 and the external liquid receiving terminal. The second liquid delivery unit 41 may also be a multi-connector pipe structure with multiple branch pipes, or a one-to-one delivery pipe structure, but is not limited thereto. The recovery unit 42 is connected to the collection module 3; the recovery unit 42 may be a pump device with extraction and filtration functions, but is not limited thereto. Therefore, after the liquid in the collection module 3 is recovered by the recovery unit 42, the recovery unit 42 will transport the liquid to the second liquid delivery unit 41; and the second liquid delivery unit 41 can guide the recovered liquid to an external liquid collection end (not shown in the figure, the external liquid collection end may be a waste liquid treatment device, but is not limited thereto).

[0042] Furthermore, the reaction module 1 of the present invention may also include a water washing unit 14 and a conduction unit 15. For example, in conjunction with... Figure 4As shown, the water washing unit 14 can be disposed in the cooling chamber 101. The water washing unit 14 can be a basin-shaped structure and can have a receiving space 140 and a water washing channel 141. The first blocking wall portion 10a can also have multiple second through holes 10d penetrating the main body, and the receiving space 140 and the pyrolysis chamber 100 are interconnected through the multiple second through holes 10d. The water washing channel 141 penetrates part of the main body of the water washing unit 14 and connects the receiving space 140 and the cooling chamber 101. The conduction unit 15 passes through the first opening 10b and the water washing unit 14 and connects the pyrolysis chamber 100 and the cooling chamber 101. Furthermore, one of the first nozzle units 13 of the reaction module 1 can pass through the first cavity unit 10 and the water washing unit 14 for spraying liquid into the receiving space 140. Therefore, during the thermal pyrolysis reaction in the pyrolysis chamber 100, harmful particles falling towards the first barrier wall 10a can fall into the accommodating space 140 through the second through hole 10d; then, liquid is sprayed into the accommodating space 140 through the first nozzle unit 13 to carry the harmful particles and transport them to the conveying unit 12; finally, the liquid carrying the harmful particles can flow to the collection module 3 for collection.

[0043] Furthermore, the filtration module 2 of the present invention may include a plurality of filtration units 22. For example, in conjunction with Figure 6 As shown, the filter unit 22 can be a filter material of metal or other materials. Multiple filter units 22 can be disposed on the second barrier wall portion 200 and correspond to multiple first through holes 200a. Therefore, by providing multiple filter units 22, a large water-air contact area can be provided to improve the mass transfer efficiency of the two interfaces, and it has excellent treatment efficiency for harmful substances (such as hydrofluoric acid and fluorine gas).

[0044] Furthermore, the filtration device Z of the present invention may also include a control module 5, for example, in conjunction with... Figure 3 As shown, the control module 5 can be connected to the heating unit 11, the first infusion unit 40, and the recovery unit 42 to control the heating unit 11, the first infusion unit 40, and the recovery unit 42. Furthermore, the control module 5 controls the heating unit 11 to turn on and off, controls the first infusion unit 40 to transfer and stop liquid transfer, and controls the recovery unit 42 to collect and stop the liquid in the collection module 3, according to operator instructions or preset programs.

[0045] Furthermore, the filtration device Z of the present invention may also include a device body 6, which is a shell structure. (In conjunction with...) Figure 3 As shown, the reaction module 1, filtration module 2, collection module 3, liquid circulation module 4, and control module 5 can be installed inside the device body 6.

[0046] Furthermore, based on the above, the present invention proposes a filtration device Z, comprising a reaction module 1, a filtration module 2, and a collection module 3. The reaction module 1 receives harmful gases and heats them to molecularize multiple harmful substances, generating multiple harmful particles. The filtration module 2 is connected to the reaction module 1 and receives the harmful gases, performing a water washing action to adhere the harmful particles to the liquid. The collection module 3 is connected to the filtration module 2 and receives the liquid containing the adhered harmful particles. A liquid circulation module 4 is connected to both the reaction module 1 and the filtration module 2 and supplies liquid to the filtration module 2.

[0047] However, the examples given above are merely one possible embodiment and are not intended to limit the invention.

[0048] Beneficial effects of the embodiments

[0049] One of the beneficial effects of the present invention is that the filtration device Z provided by the present invention can receive harmful gases through a reaction module 1, which heats the harmful gases to molecularize multiple harmful substances in the harmful gases, thereby generating multiple harmful particles; a filtration module 2 connected to the reaction module 1, which receives the harmful gases and performs a water washing action on the harmful gases to make multiple harmful particles adhere to the liquid; a collection module 3 connected to the filtration module 2, which receives the liquid with the harmful particles adhering to it; and a liquid circulation module 4 connected to the reaction module 1 and the filtration module 2, which supplies liquid to the filtration module 2. The reaction module 1 includes a first cavity unit 10 and at least one heating unit 1. 1. A conveying unit 12, multiple first nozzle units 13, a water washing unit 14, and a conduction unit 15. A first cavity unit 10 is detachably connected to at least one external process device and receives harmful gases generated by at least one external process device. The interior of the first cavity unit 10 has a first barrier wall 10a, which divides the interior of the first cavity unit 10 into a pyrolysis chamber 100 and a cooling chamber 101. The center of the first barrier wall 10a has a first opening 10b, through which the pyrolysis chamber 100 and the cooling chamber 101 are interconnected. One wall surface of the first cavity unit 10 corresponding to the pyrolysis chamber 100 protrudes towards the first barrier wall 10a to form an annular wall 10c. At least one heating unit 11 is disposed within the first cavity unit 10. The heating unit 11 heats the first cavity unit 10 to molecularize multiple harmful substances within it, generating multiple harmful particles. A conveying unit 12 is detachably connected to the first cavity unit 10, the filtration module 2, and the collection module 3. The conveying unit 12 receives the harmful gas transmitted from the first cavity unit 10 and guides it to the filtration module 2. Multiple first nozzle units 13 are respectively disposed within the first cavity unit 10 and the conveying unit 12. The multiple first nozzle units 13 are connected to the liquid circulation module 4 and receive the liquid provided by the liquid circulation module 4, spraying it towards the first cavity unit 10. Liquid is sprayed inside the first cavity unit 10 and the conveying unit 12. A water washing unit 14 is disposed in the cooling chamber 101. The water washing unit 14 has a receiving space 140 and a water washing channel 141. The water washing channel 141 penetrates part of the body of the water washing unit 14 and connects the receiving space 140 and the cooling chamber 101. The first blocking wall portion 10a has multiple second through holes 10d, and the receiving space 140 and the pyrolysis chamber 100 are interconnected through these multiple second through holes 10d. One of the first nozzle units 13 passes through the first cavity unit 10 and the water washing unit 14, and is used to spray liquid into the receiving space 140. A conduction unit 15 passes through the first port 10b and the water washing unit 14 and connects the pyrolysis chamber 100 and the cooling chamber 101.The filtration module 2 includes a second cavity unit 20 and multiple second nozzle units 21. The second cavity unit 20 is detachably connected to the delivery unit 12 and receives harmful gas containing multiple harmful particles. The second cavity unit 20 is a multi-section tubular structure. One section of the second cavity unit 20 has a second barrier wall portion 200 and a protrusion portion 201. The protrusion portion 201 is formed by protruding outward from the center of the second barrier wall portion 200. The second barrier wall portion 200 has multiple first through holes 200a. The second barrier wall portion 200 divides the interior of the second cavity unit 20 into an upper half chamber 202 and a lower half chamber 203. The protrusion portion 201 has a first channel 201a. The upper half chamber 202 and the lower half chamber 203 are interconnected through the multiple first through holes 200a and the first channel 201a. Multiple second nozzle units 21 are disposed within the second cavity unit 20 and connected to the liquid circulation module 4. The multiple second nozzle units 21 are located in the upper half of the cavity 202. One second nozzle unit 21 corresponds to the first channel 201a, and another second nozzle unit 21 corresponds to the second barrier wall 200. The multiple second nozzle units 21 are used to receive the liquid provided by the liquid circulation module 4 and spray the liquid into the interior of the second cavity unit 20 to improve the effect of removing harmful substances from the gas.

[0050] Another beneficial effect of the present invention is that the filtration method provided by the present invention can improve the effect of removing harmful substances from the gas by means of the technical solution of "receiving harmful gas through reaction module 1 and heating the harmful gas using reaction module 1 to make multiple harmful substances in the harmful gas molecularized to generate multiple harmful particles; receiving harmful gas through filtration module 2 and washing the harmful gas with water using filtration module 2 to make multiple harmful particles adhere to the liquid; and receiving the liquid with the adhered harmful particles through collection module 3".

[0051] Furthermore, the filtration device Z and filtration method of the present invention, through the above-described technical solution, utilize the reaction module 1 to first perform a thermal decomposition reaction on the harmful gas, causing the harmful substances in the harmful gas to be molecularized and form multiple harmful particles; then, the filtration module 2 is used to filter out the harmful particles in the harmful gas, thus purifying the harmful gas and forming purified gas, thereby effectively filtering out the harmful substances carried in the harmful gas and purifying the harmful gas. Moreover, compared with traditional dust removal equipment, the filtration device Z of the present invention far exceeds the capabilities of traditional dust removal equipment in terms of efficiency and dust removal capacity; the filtration device Z of the present invention can effectively filter out fine suspended particles (PM2.5) in harmful gases, up to 90%.

[0052] The content disclosed above is only a preferred and feasible embodiment of the present invention, and is not intended to limit the scope of protection of the claims of the present invention. Therefore, all equivalent technical changes made based on the content of the present invention specification and drawings are included within the scope of protection of the claims of the present invention.

Claims

1. A filtration device, characterized in that, include: A reaction module receives harmful gas and heats the harmful gas to molecularize multiple harmful substances in the harmful gas, thereby generating multiple harmful particles. A filtration module is connected to the reaction module. The filtration module is used to receive the harmful gas and perform a water washing action on the harmful gas so that the multiple harmful particles are adhered to the liquid. A collection module, connected to the filtration module, is used to receive the liquid with the harmful particles adhering to it; as well as A liquid circulation module is connected to the reaction module and the filtration module, and the liquid circulation module is used to supply the liquid to the filtration module; The reaction module includes: A first cavity unit, detachably connected to at least one external process device, and receiving the harmful gases generated by the at least one external process device, has a first barrier wall portion inside, which divides the interior of the first cavity unit into a pyrolysis chamber and a cooling chamber. The first barrier wall portion has a first opening at its center, through which the pyrolysis chamber and the cooling chamber communicate with each other. One of the wall surfaces of the first cavity unit corresponding to the pyrolysis chamber protrudes towards the first barrier wall portion to form an annular wall portion. At least one heating unit is disposed within the first cavity unit, and the at least one heating unit is used to heat the first cavity unit to molecularize the plurality of harmful substances in the first cavity unit, thereby generating the plurality of harmful particles; A delivery unit is detachably connected to the first cavity unit, the filtration module, and the collection module. The delivery unit is used to receive the harmful gas transmitted by the first cavity unit and guide the harmful gas to the filtration module. A plurality of first nozzle units are respectively disposed in the first cavity unit and the conveying unit. The plurality of first nozzle units are connected to the liquid circulation module. The plurality of first nozzle units are used to receive the liquid provided by the liquid circulation module and spray the liquid into the first cavity unit and the conveying unit. A water washing unit is disposed in the cooling chamber. The water washing unit has a receiving space and a water washing channel. The water washing channel penetrates a portion of the body of the water washing unit and connects the receiving space and the cooling chamber. The first baffle wall has multiple second through holes, and the receiving space and the pyrolysis chamber are interconnected through these second through holes. One of the first nozzle units passes through the first cavity unit and the water washing unit, and is used to spray the liquid into the receiving space. A conduction unit is provided, which passes through the first opening and the water washing unit and connects the pyrolysis chamber and the cooling chamber; The filtering module includes: A second cavity unit, detachably connected to the conveying unit, receives the harmful gas containing the plurality of harmful particles; wherein the second cavity unit is a multi-section tubular structure, one section of the second cavity unit having a second baffle wall and a protrusion, the protrusion being formed by protruding outward from the center of the second baffle wall, the second baffle wall having a plurality of first through holes, the second baffle wall dividing the interior of the second cavity unit into an upper chamber and a lower chamber, the protrusion having a first channel, the upper chamber and the lower chamber being interconnected through the plurality of first through holes and the first channel; and A plurality of second nozzle units are disposed within the second cavity unit and connected to the liquid circulation module. The plurality of second nozzle units are located in the upper chamber, one of which corresponds to the first channel and the other corresponds to the second barrier wall. The plurality of second nozzle units are used to receive the liquid provided by the liquid circulation module and spray the liquid into the interior of the second cavity unit.

2. The filtration device according to claim 1, characterized in that, The temperature at which the at least one heating unit heats the first cavity unit is between 600 degrees Celsius and 900 degrees Celsius.

3. The filtration device according to claim 1, characterized in that, The liquid circulation module includes: At least one first infusion unit is connected to the plurality of first nozzle units, the plurality of second nozzle units and an external liquid supply terminal. The at least one first infusion unit receives the liquid provided by the external liquid supply terminal and supplies the liquid to the plurality of first nozzle units and the plurality of second nozzle units. At least one second infusion unit, the at least one second infusion unit being connected to an external infusion receiving end; and A recovery unit is connected to the collection module and the at least one second infusion unit. The recovery unit is used to recover the liquid collected by the collection module and supply the liquid to the at least one second infusion unit. The at least one second infusion unit is used to guide the liquid to the external receiving end.

4. The filtration device according to claim 3, characterized in that, The filtration device further includes a control module connected to the at least one heating unit, the at least one first infusion unit, and the recovery unit. The control module is used to control the operation of the at least one heating unit, the at least one first infusion unit, and the recovery unit.

5. A filtration method, characterized in that, The filtration method, applicable to any one of claims 1 to 4, comprises the following steps: The harmful gas is received by the reaction module and heated by the reaction module to molecularize the multiple harmful substances in the harmful gas, thereby generating the multiple harmful particles. The harmful gas is received through the filtration module, and the harmful gas is washed with water using the filtration module to cause the plurality of harmful particles to adhere to the liquid; and The collection module receives the liquid containing the harmful particles.

6. The filtration method according to claim 5, characterized in that, The step of generating the plurality of harmful particles further includes the following steps: The first cavity unit receives the harmful gases generated by the at least one external process device. as well as The plurality of harmful substances are heated by the at least one heating unit to molecularize the plurality of harmful substances in the first cavity unit, thereby generating the plurality of harmful particles.

7. The filtration method according to claim 5, characterized in that, The step of generating the plurality of harmful particles further includes the following steps: The harmful gas containing the plurality of harmful particles is received through the second cavity unit; and The liquid is received by the plurality of second nozzle units and sprayed into the interior of the second cavity unit by the plurality of second nozzle units so that the liquid comes into contact with the plurality of harmful particles.

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