Cavity cover opening and closing device and control method thereof, processing equipment

Abstract

The application relates to the technical field of machining, in particular to a cavity cover opening and closing device and a control method thereof and a machining equipment, to solve the problems that a cavity cover is directly hinged to a cavity, resulting in a small operation space for cavity cover maintenance or repair and low efficiency. The cavity cover opening and closing device comprises a first hinge seat, a second hinge seat, a third hinge seat, a support rod, a first telescopic rod assembly and a second telescopic rod assembly, a cavity cover outer wall of the cavity cover is rotatably connected with a first end of the support rod, so that the cavity cover can rotate based on the support rod, and the cavity cover is opened or closed relative to the cavity. After the cavity cover is opened relative to the cavity, the cavity cover is separated from or close to the cavity under the action of the second telescopic rod assembly, the cavity cover can be far away from the cavity, the operation space is increased when the cavity cover or components on the cavity cover are repaired or maintained, the convenience of repair or maintenance is improved, and the repair and maintenance efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of processing technology, and in particular to a cavity cover opening and closing device and its control method, as well as processing equipment. Background Technology

[0002] Some processing equipment includes a cavity with a cover and a body, where the cover is used to close the cavity. The cover is typically hinged directly to the cavity for opening and closing.

[0003] However, when the cavity cover needs to be repaired or maintained, the operating space for repair or maintenance is small and inefficient because the cavity cover is directly hinged to the cavity. Summary of the Invention

[0004] In view of this, embodiments of this application provide a cavity cover opening and closing device and its control method, as well as processing equipment, to solve the problem that the cavity cover is directly hinged to the cavity, resulting in a small operating space and low efficiency for cavity cover repair or maintenance.

[0005] In a first aspect, one embodiment of this application provides a cavity cover opening and closing device applied to a processing equipment. The processing equipment includes a cavity, which includes a cavity body and a cavity cover for closing the cavity body. The cavity cover includes an inner wall and an outer wall, wherein when the cavity cover is closed to the cavity body, the inner wall of the cavity cover is located inside the cavity, and the outer wall of the cavity cover is located at the top of the cavity cover. The cavity cover opening and closing device is disposed outside the cavity, wherein the cavity cover opening and closing device includes: a first hinge seat, a second hinge seat, and a third hinge seat, all fixedly disposed relative to the cavity body; a support rod including a first end and a second end, wherein the first end is rotatably connected to the outer wall of the cavity cover to form a first rotating pair rotating about a first axis, and the second end is hinged to the first hinge seat to form a second rotating pair rotating about a second axis; and a first telescopic rod assembly including a third end and a fourth end, wherein the third end is rotatably connected to the outer wall of the cavity cover. The first telescopic rod assembly forms a third revolute joint that rotates about a third axis, and a fourth end is hinged to a second hinge seat to form a fourth revolute joint that rotates about a fourth axis. Under the action of the first telescopic rod assembly, the cavity cover rotates about a first axis, thereby opening or closing the cavity cover relative to the cavity. The second telescopic rod assembly includes a fifth end and a sixth end, wherein the fifth end is rotatably connected to a support rod to form a fifth revolute joint that rotates about a fifth axis, and the sixth end is hinged to a third hinge seat to form a sixth revolute joint that rotates about a sixth axis. After the cavity cover is opened relative to the cavity, under the action of the second telescopic rod assembly, the support rod connected to the cavity cover and the first telescopic rod assembly rotate about the second axis and the fourth axis respectively, thereby separating or bringing the cavity cover closer to the cavity. The first axis, second axis, third axis, fourth axis, fifth axis, and sixth axis are parallel.

[0006] In conjunction with the first aspect, in some implementations of the first aspect, the cavity cover opening and closing device further includes a connecting plate, and the first telescopic rod assembly is rotatably connected to the cavity cover through the connecting plate; wherein, the connecting plate includes a first connecting part and a second connecting part, the first connecting part is fixedly connected to the cavity cover, and the second connecting part is rotatably connected to a third end.

[0007] In conjunction with the first aspect, in some implementations of the first aspect, the first connecting portion is parallel to the cavity cover, the second connecting portion is set at an obtuse angle to the first connecting portion, and the second connecting portion extends away from the cavity cover.

[0008] In conjunction with the first aspect, in some implementations of the first aspect, the cavity cover opening and closing device further includes a first rotating shaft, the axis of the first rotating shaft being collinear with the first axis; wherein, the first end includes a first shaft hole, the connecting plate has a second shaft hole, the first rotating shaft passes through the first shaft hole and the second shaft hole, so that the connecting plate is rotatably connected to the first rotating shaft, and the first end is connected to the first rotating shaft to realize that the first end is rotatably connected to the outer wall of the cavity cover.

[0009] In conjunction with the first aspect, in some implementations of the first aspect, the cavity cover opening and closing device further includes a second rotating shaft, the axis of the second rotating shaft being collinear with the fifth axis; wherein the first end further includes a third shaft hole, the fifth end further includes a fourth shaft hole, and the second rotating shaft passes through the third shaft hole and the fourth shaft hole so that the fifth end is rotatably connected to the support rod.

[0010] In conjunction with the first aspect, in some implementations of the first aspect, the first end includes a first rod portion and a second rod portion arranged intersecting the extension direction of the support rod; the first rod portion is rotatably connected to the connecting plate to achieve a rotatable connection between the first end and the outer wall of the cavity cover; the second rod portion is rotatably connected to the fifth end to achieve a rotatable connection between the fifth end and the support rod; the second included angle between the second rod portion and the support rod is smaller than the first included angle between the first rod portion and the support rod. In conjunction with the first aspect, in some implementations of the first aspect, during the separation of the cavity cover from the cavity body, the extension length of the second telescopic rod assembly gradually decreases, and during the approach of the cavity cover to the cavity body, the extension length of the second telescopic rod assembly gradually increases.

[0011] In conjunction with the first aspect, in some implementations of the first aspect, the first hinge seat, the second hinge seat, the third hinge seat, the support rod, the first telescopic rod assembly, and the second telescopic rod assembly are all disposed on the same side of the cavity, and the first hinge seat, the second hinge seat, and the third hinge seat are all disposed obliquely below the cavity.

[0012] In conjunction with the first aspect, in some implementations of the first aspect, the cavity cover opening and closing device further includes a base, which is connected to the cavity, and a first hinge seat, a second hinge seat, and a third hinge seat are disposed on the base; wherein the first hinge seat, the second hinge seat, and the third hinge seat are detachably connected to the base, or the first hinge seat, the second hinge seat, and the third hinge seat are integrally formed with the base.

[0013] In conjunction with the first aspect, in some implementations of the first aspect, the first hinge seat, the second hinge seat, the third hinge seat, the support rod, the first telescopic rod assembly, and the second telescopic rod assembly form a cavity cover opening and closing module; the cavity cover opening and closing device includes two cavity cover opening and closing modules; wherein, the cavity is a cube, and the two cavity cover opening and closing modules are symmetrically arranged on the same side of the cavity with respect to the symmetrical face of the cavity.

[0014] In conjunction with the first aspect, in some implementations of the first aspect, the cavity cover opening and closing device further includes a drive module for driving the first telescopic rod assembly and / or the second telescopic rod assembly to adjust the extension length of the first telescopic rod assembly and / or the second telescopic rod assembly. The drive module includes one or more of the following combinations: an electric drive unit, a pneumatic drive unit, and a hydraulic drive unit.

[0015] Secondly, one embodiment of this application provides a processing apparatus, comprising: a chamber, including a cavity body and a cavity cover for closing the cavity body, the cavity cover including an inner wall and an outer wall, wherein, when the cavity cover is closed with the cavity body, the inner wall of the cavity cover is located inside the cavity body, and the outer wall of the cavity cover is located at the top of the cavity cover; and a cavity cover opening and closing device as described in any one of the first aspects, the cavity cover opening and closing device being disposed outside the cavity body and configured to realize the opening or closing of the cavity cover relative to the cavity body, and to realize the separation or proximity of the cavity cover from the cavity body.

[0016] Thirdly, one embodiment of this application provides a cavity cover opening and closing control method, applied to the cavity cover opening and closing device described in any one of the first aspects. The cavity cover opening and closing control method includes: controlling the extension length of the first telescopic rod assembly to rotate the cavity cover around a first axis, thereby realizing the opening or closing of the cavity cover relative to the cavity; when the cavity cover is opened relative to the cavity, controlling the extension length of the second telescopic rod assembly to rotate the support rod connected to the cavity cover and the first telescopic rod assembly around a second axis and a fourth axis respectively, thereby realizing the separation or proximity of the cavity cover from the cavity.

[0017] In conjunction with the third aspect, in some implementations of the third aspect, when the cavity cover is separated from the cavity body, the extension length of the first telescopic rod assembly and / or the second telescopic rod assembly is controlled to adjust the flip angle of the cavity cover relative to the cavity body.

[0018] The cavity cover opening and closing device provided in this application includes a first hinge seat, a second hinge seat, a third hinge seat, a support rod, a first telescopic rod assembly, and a second telescopic rod assembly. The outer wall of the cavity cover is rotatably connected to the first end of the support rod, allowing the cavity cover to rotate based on the support rod, thus opening or closing the cavity cover relative to the cavity. After the cavity cover is opened relative to the cavity, the second telescopic rod assembly causes the cavity cover to separate from or move closer to the cavity, allowing the cavity cover to move away from the cavity. This increases the operating space for repairing or maintaining the cavity cover or its components, improving the convenience of repair or maintenance, and thus improving repair and maintenance efficiency. Attached Figure Description

[0019] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0020] Figure 1 The diagram shown is a structural schematic of the first state of the cavity cover opening and closing device provided in an embodiment of this application.

[0021] Figure 2 The diagram shown is a first-state frontal view of an application scenario for a cavity cover opening and closing device provided in an embodiment of this application.

[0022] Figure 3 The diagram shown is a top view of the first state of an application scenario for a cavity cover opening and closing device provided in an embodiment of this application.

[0023] Figure 4 The diagram shown is a left-side view of the first state of an application scenario for a cavity cover opening and closing device provided in an embodiment of this application.

[0024] Figure 5 The diagram shown is a structural schematic of the second state of the cavity cover opening and closing device provided in an embodiment of this application.

[0025] Figure 6 The diagram shown is a frontal view of the second state of an application scenario for a cavity cover opening and closing device provided in an embodiment of this application.

[0026] Figure 7 The diagram shown is a left-side view of the second state of an application scenario for a cavity cover opening and closing device provided in an embodiment of this application.

[0027] Figure 8The diagram shown is a structural schematic of the third state of the cavity cover opening and closing device provided in an embodiment of this application.

[0028] Figure 9 The diagram shown is a left-view perspective of the third state of an application scenario for a cavity cover opening and closing device provided in an embodiment of this application.

[0029] Figure 10 The diagram shown is a top view of the third state of an application scenario for a cavity cover opening and closing device provided in an embodiment of this application.

[0030] Figure 11 The diagram shown is a structural schematic of a support frame and a first hinge seat hinged together according to an embodiment of this application.

[0031] Figure 12 The diagram shown is a flowchart of a cavity cover opening and closing control method provided in an embodiment of this application.

[0032] Figure 13 The diagram shown is a flowchart of a cavity cover opening and closing control method provided in another embodiment of this application.

[0033] Figure 14 The diagram shown is a flowchart of a cavity cover opening and closing control method provided in another embodiment of this application.

[0034] Figure 15 The diagram shown is a flowchart of a cavity cover opening and closing control method provided in another embodiment of this application.

[0035] Figure label:

[0036] 1. Processing equipment; 10. Chamber; 11. Cavity body; 12. Cavity cover; 120. Outer wall of cavity cover; 2. Cavity cover opening and closing device; 21. First hinge seat; 210. Second revolute joint; 22. Second hinge seat; 221. Fourth revolute joint; 23. Third hinge seat; 231. Sixth revolute joint; 24. Support rod; 240. First end; 2401. First shaft hole; 2402. Third shaft hole; 2403. First rod part; 2404. Second rod part; 241. Second end; 242. 5. Rotary joint; 25. First telescopic rod assembly; 250. Third end; 251. Fourth end; 26. Second telescopic rod assembly; 260. Fifth end; 2600. Fourth shaft hole; 261. Sixth end; 27. Connecting plate; 270. First connecting part; 271. Second connecting part; 272. Seventh rotary joint; 274. Second shaft hole; 28. First rotating shaft; 29. ​​Second rotating shaft; α. First included angle; β. Second included angle; 3. Base; 4. Cavity cover opening and closing module; 5. Drive sub-module. Detailed Implementation

[0037] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0038] Some processing equipment contains chambers consisting of a cover and a body, with the cover used to close the chamber. The cover is typically hinged directly to the body for opening and closing. In some applications, components such as flow equalizers, heating plates, and various pipes are also mounted on the cover. However, when repair or maintenance of the cover or its components is required, the direct hinge to the body necessitates manual operation within the chamber. This not only risks damaging internal components and creates limited operating space, but also poses safety risks due to the often elevated position, resulting in significant inconvenience and low efficiency in maintenance.

[0039] To address the above problems, this application provides a cavity cover opening and closing device and its control method, as well as a processing equipment. The specific structure of the cavity cover opening and closing device and the processing equipment, and the specific steps of the cavity cover opening and closing control method are described in detail below with reference to the accompanying drawings and specific embodiments.

[0040] Figure 1 The diagram shown is a structural schematic of the first state of the cavity cover opening and closing device provided in an embodiment of this application. Figure 2 The diagram shown is a first-state frontal view of an application scenario for a cavity cover opening and closing device provided in an embodiment of this application. Figure 3 The diagram shown is a top view of the first state of an application scenario for a cavity cover opening and closing device provided in an embodiment of this application. Figure 4 The diagram shown is a left-side view of the first state of an application scenario for a cavity cover opening and closing device provided in an embodiment of this application.

[0041] refer to Figures 1 to 4 The cavity cover opening and closing device 2 is applied to the processing equipment 1. The processing equipment 1 includes a cavity 10, which includes a cavity body 11 and a cavity cover 12 for closing the cavity body 11. The cavity cover 12 includes an inner wall (not shown in the figure) and an outer wall 120. When the cavity cover 12 is closed with the cavity body 11, the inner wall of the cavity cover is located inside the cavity 10, and the outer wall 120 is located on top of the cavity cover 12. The cavity cover opening and closing device 2 is disposed outside the cavity 10.

[0042] The cavity cover opening and closing device 2 includes a first hinge seat 21, a second hinge seat 22, a third hinge seat 23, a support rod 24, a first telescopic rod assembly 25, and a second telescopic rod assembly 26. The first hinge seat 21, the second hinge seat 22, and the third hinge seat 23 are all fixedly disposed relative to the cavity 11. The support rod 24 includes a first end 240 and a second end 241. The first end 240 is rotatably connected to the outer wall 120 of the cavity cover to form a first revolute joint (not shown in the figure) that rotates about a first axis. The second end 241 is hinged to the first hinge seat 21 to form a second revolute joint 210 that rotates about a second axis. The first telescopic rod assembly 25 includes a third end 250 and a fourth end 251. The third end 250 is rotatably connected to the outer wall 120 of the cavity cover to form a third rotating pair (not shown in the figure) that rotates about a third axis. The fourth end 251 is hinged to the second hinge seat 22 to form a fourth rotating pair 221 that rotates about a fourth axis. Under the action of the first telescopic rod assembly 25, the cavity cover 12 rotates about the first axis, thereby opening or closing the cavity cover 12 relative to the cavity 11.

[0043] The second telescopic rod assembly 26 includes a fifth end 260 and a sixth end 261. The fifth end 260 is rotatably connected to the support rod 24 to form a fifth revolute joint 242 that rotates about a fifth axis. The sixth end 261 is hinged to the third hinge seat 23 to form a sixth revolute joint 231 that rotates about a sixth axis. After the cavity cover 12 is opened relative to the cavity 11, under the action of the second telescopic rod assembly 26, the support rod 24 connected to the cavity cover 12 and the first telescopic rod assembly 25 rotate about the second axis and the fourth axis respectively, thereby separating or bringing the cavity cover 12 closer to the cavity 11. The first axis, second axis, third axis, fourth axis, fifth axis, and sixth axis are parallel.

[0044] The shape of the chamber 10 can be configured according to actual conditions. In some embodiments, the shape of the chamber can be a cube, a hexagonal prism, a cylinder, etc. The closing direction of the chamber cover 12 covering the chamber 11 can be configured according to actual conditions. In some embodiments, the chamber cover 12 can cover the chamber 11 from above, or it can cover the chamber 11 from an oblique angle above. The inner wall of the chamber cover 12 can be the surface facing the chamber 11 when the chamber cover 12 covers the chamber 11. The outer wall 120 of the chamber cover can be the surface away from the chamber 11 when the chamber cover 12 covers the chamber 11.

[0045] The cavity cover opening and closing device 2, or the components included in the cavity cover opening and closing device 2, can be located anywhere outside the cavity 10. The first hinge seat 21, the second hinge seat 22, and the third hinge seat 23 can be any structure capable of hinged to the second end 241, the fourth end 251, and the sixth end 261, respectively. The first hinge seat 21, the second hinge seat 22, and the third hinge seat 23 are all fixedly disposed relative to the cavity 11, meaning the hinge seats will not move or rotate relative to the cavity 11. For example, the first hinge seat 21, the second hinge seat 22, and the third hinge seat 23 can be disposed on an object that is stationary or fixed relative to the cavity 11. The support rod 24 can be any object capable of providing support, and its shape and material can be configured according to actual conditions. The first telescopic rod assembly 25 and the second telescopic rod assembly 26 can be any telescopic or variable-length rod-like structure, or a telescopic arm, telescopic shaft, telescopic bracket, telescopic tube, etc. The aforementioned rotatable connection method can be any connection method capable of enabling relative rotation between the two components. For example, the two components can be rotatably connected by a shaft-hole fit.

[0046] Figure 5 The diagram shown is a structural schematic of the second state of the cavity cover opening and closing device provided in an embodiment of this application. Figure 6 The diagram shown is a frontal view of the second state of an application scenario for a cavity cover opening and closing device provided in an embodiment of this application. Figure 7 The diagram shown is a left-side view of the second state of an application scenario for a cavity cover opening and closing device provided in an embodiment of this application. Figure 8 The diagram shown is a structural schematic of the third state of the cavity cover opening and closing device provided in an embodiment of this application. Figure 9 The diagram shown is a front view of the third state of an application scenario for a cavity cover opening and closing device provided in an embodiment of this application. Figure 10 The diagram shown is a top view of the third state of an application scenario for a cavity cover opening and closing device provided in an embodiment of this application.

[0047] For example, such as Figures 1 to 10 As shown, based on the positional relationship between the cavity cover 12 and the cavity 11, the states between the cavity cover 12 and the cavity 11 can include: a closed state, an open state, and a separated state. The first state can be the closed state. The second state can be the open state, and the third state can be the separated state.

[0048] For example, when the state between the cavity cover 12 and the cavity 11 needs to change from a closed state to an open state, that is, when the cavity cover 12 needs to be opened from the cavity 11, since the third end 250 of the first telescopic rod assembly 25 is rotatably connected to the outer wall 120 of the cavity cover 12, and the first end 240 of the support rod 24 is rotatably connected to the outer wall 120 of the cavity cover 12, a first rotating pair rotating around the first axis is formed. Under the action of the first telescopic rod assembly 25, for example, the length of the first telescopic rod assembly 25 gradually shortens, or the extension length gradually decreases. The cavity cover 12 is driven by the first telescopic rod assembly 25 to rotate clockwise around the first axis, thereby opening the cavity cover 12 relative to the cavity 11, that is, the state between the cavity cover 12 and the cavity 11 becomes an open state. For example, when the state between the cavity cover 12 and the cavity 11 needs to change from an open state to a closed state, the length of the first telescopic rod assembly 25 gradually increases, or the extension length gradually increases. The cavity cover 12 is driven by the first telescopic rod assembly 25 to rotate counterclockwise around the first axis, thereby closing the cavity cover 12 relative to the cavity 11, that is, the state between the cavity cover 12 and the cavity 11 becomes a closed state. The rotatable connection between the third end 250 of the first telescopic rod assembly 25 and the outer wall 120 of the cavity cover 12 can be used to compensate for the angular displacement between the first telescopic rod assembly 25 and the cavity cover 12 to maintain the normal operation of the system.

[0049] For example, after the cavity cover 12 is opened relative to the cavity 11, that is, the state between the cavity cover 12 and the cavity 11 is open, when it needs to be separated, since the fifth end 260 of the second telescopic rod assembly 26 is rotatably connected to the support rod 24, and the second end 241 of the support rod 24 is hinged to the first hinge seat 21, a second rotating pair 210 is formed to rotate around the second axis. Under the action of the second telescopic rod assembly 26, for example, the length of the second telescopic rod assembly 26 gradually shortens, or the extension length gradually decreases, and the support rod 24 is driven by the second telescopic rod assembly 26 to rotate clockwise around the second axis. Since the first end 240 of the support rod is rotatably connected to the outer wall 120 of the cavity cover 12, the third end 250 of the first telescopic rod assembly 25 is rotatably connected to the outer wall 120 of the cavity cover 12, and the fourth end 251 of the first telescopic rod assembly 25 is hinged to the second hinge seat 22, a fourth rotating pair 221 that rotates around the fourth axis is formed. When the support rod 24 is driven to rotate, the cavity cover 12 is driven to move away from the cavity 11 along with the support rod 24. The first telescopic rod assembly 25 is also driven by the cavity cover 12 to rotate clockwise around the fourth axis, thus realizing the separation of the cavity cover 12 from the cavity 11.

[0050] In some embodiments, after the cavity cover 12 reaches the desired or preset position, the flip angle of the cavity cover 12 relative to the cavity body 11 can be adjusted by adjusting the extension length of the first telescopic rod assembly 25 and / or the second telescopic rod assembly 26. When the cavity cover 12 is separated from the cavity body 11, adjusting the flip angle of the cavity cover 12 relative to the cavity body 11 by controlling the extension length of the first telescopic rod assembly 25 and / or the second telescopic rod assembly 26 facilitates observation of the cavity cover 12 from different angles. This makes it easier to adjust the cavity cover 12 to a suitable angle when repairing or maintaining the cavity cover 12 or the components on the cavity cover 12, further improving the convenience of repair or maintenance.

[0051] For example, when the state between the cavity cover 12 and the cavity 11 needs to change from a separated state to an open state, or when the cavity cover 12 needs to be close to the cavity 11 by a preset distance but still in a separated state, under the action of the second telescopic rod assembly 26, for example, the length of the second telescopic rod assembly 26 gradually increases, or the extension length gradually increases, and the support rod 24 is driven by the second telescopic rod assembly 26 to rotate counterclockwise around the second axis corresponding to the second revolute joint 210. When the support rod 24 is driven to rotate, the cavity cover 12 is driven to move closer to the cavity 11 with the support rod 24, and the first telescopic rod assembly 25 is also driven by the cavity cover 12 to rotate counterclockwise around the fourth axis corresponding to the fourth revolute joint 221, thereby realizing the closeness between the cavity cover 12 and the cavity 11, or changing the state between the cavity cover 12 and the cavity 11 from a separated state to an open state.

[0052] In some embodiments, after the cavity cover 12 is opened relative to the cavity 11, the support rod 24 connected to the cavity cover 12 and the first telescopic rod assembly 25 rotate around the second axis and the fourth axis respectively under the action of the first telescopic rod assembly 25 and the second telescopic rod assembly 26, thereby separating or bringing the cavity cover 12 closer to the cavity 11. Exemplarily, when the state between the cavity cover 12 and the cavity 11 changes from an open state to a separated state, or when the cavity cover 12 is moved away from the cavity 11, the first telescopic rod assembly 25 and the second telescopic rod assembly 26 simultaneously change their lengths. For example, the extension lengths of both the first telescopic rod assembly 25 and the second telescopic rod assembly 26 gradually decrease, and both simultaneously drive the support rod 24 connected to the cavity cover 12 to rotate clockwise around the second axis corresponding to the second revolute joint 210, thereby changing the state between the cavity cover 12 and the cavity 11 from an open state to a separated state, or moving the cavity cover 12 away from the cavity 11. When the state between the cavity cover 12 and the cavity 11 changes from a separated state to an open state, or when the cavity cover 12 is brought closer to the cavity 11, the extension lengths of the first telescopic rod assembly 25 and the second telescopic rod assembly 26 gradually increase. At the same time, the two drive the support rod 24 connected to the cavity cover 12 to rotate counterclockwise around the second axis corresponding to the second rotating pair 210, thereby realizing the change of the state between the cavity cover 12 and the cavity 11 from a separated state to an open state, or bringing the cavity cover 12 closer to the cavity 11.

[0053] The cavity cover opening and closing device 2 includes a first hinge seat 21, a second hinge seat 22, a third hinge seat 23, a support rod 24, a first telescopic rod assembly 25, and a second telescopic rod assembly 26. The outer wall 120 of the cavity cover 12 is rotatably connected to the first end 240 of the support rod 24, allowing the cavity cover 12 to rotate based on the support rod 24, thus opening or closing the cavity cover 12 relative to the cavity 11. After the cavity cover 12 is opened relative to the cavity 11, the second telescopic rod assembly 26 causes the cavity cover 12 to separate from or move closer to the cavity 11, allowing the cavity cover 12 to move away from the cavity 11. This increases the operating space for repairing or maintaining the cavity cover 12 or the components on the cavity cover 12, improving the convenience of repair or maintenance, and thus improving repair and maintenance efficiency.

[0054] In some embodiments, such as Figure 1 and Figure 4 As shown, the cavity cover opening and closing device 2 also includes a connecting plate 27. The first telescopic rod assembly 25 is rotatably connected to the cavity cover 12 via the connecting plate 27. The connecting plate 27 includes a first connecting portion 270 and a second connecting portion 271. The first connecting portion 270 is fixedly connected to the cavity cover 12, and the second connecting portion 271 is rotatably connected to the third end 250 of the first telescopic rod assembly 25. The fixed connection method between the first connecting portion 270 and the cavity cover 12 can be set according to actual needs. For example, the first connecting portion 270 can be fixedly connected to the cavity cover 12 by means of screws and bolts. By setting the connecting plate 27, the third end 250 of the first telescopic rod assembly 25 can be rotatably connected to the cavity cover 12 via the connecting plate 27, which increases the arrangement range and flexibility of the first telescopic rod assembly 25 and makes it easier for the cavity cover opening and closing device 2 to adapt to different sizes of installation space and working space.

[0055] In some embodiments, such as Figure 1 , Figure 4 and Figure 5As shown, the first connecting portion 270 is parallel to the cavity cover 12, and the second connecting portion 271 is set at an obtuse angle to the first connecting portion 270, and the second connecting portion 271 extends away from the cavity cover 12. The second connecting portion 271 is rotatably connected to the third end 250 of the first telescopic rod assembly 25, forming, for example, a seventh revolute joint 272 that rotates about a seventh axis. With the second connecting portion 271 and the first connecting portion 270 set at an obtuse angle, and the second connecting portion 271 extending away from the cavity cover 12, this configuration, when the cavity cover 12 rotates about the first axis based on the support rod 24, results in a smaller lever arm between the first telescopic rod assembly 25 and the first axis, thus reducing the torque experienced by the first telescopic rod assembly 25 when rotating the cavity cover 12, making it more labor-saving. Furthermore, it facilitates a uniform change in the length of the first telescopic rod assembly 25, for example, a gradually decreasing extension length, which increases the lifespan of the first telescopic rod assembly 25 and makes the cavity cover opening and closing device 2 operate more smoothly.

[0056] In some embodiments, such as Figure 1 , Figure 5 and Figure 11 As shown, the cavity cover opening and closing device 2 also includes a first rotating shaft 28. The axis of the first rotating shaft 28 is collinear with the first axis. The first end 240 includes a first shaft hole 2401, and the connecting plate 27 has a second shaft hole 274. The first rotating shaft 28 passes through the first shaft hole 2401 and the second shaft hole 274, so that the connecting plate 27 is rotatably connected to the first rotating shaft 28, and the first end 240 is connected to the first rotating shaft 28 to achieve a rotatable connection between the first end 240 and the outer wall 120 of the cavity cover. This arrangement allows the support rod 24 to be rotatably connected to the cavity cover 12 through the connecting plate 27 and the first rotating shaft 28. By setting the connecting plate 27, the cavity cover 12 is rotatably connected to the support rod 24 and the first telescopic rod assembly 25 respectively, simplifying the connection between the cavity cover 12 and the cavity cover opening and closing device 2, making the cavity cover opening and closing device 2 easy to install. In addition, the connection between the first end 240 and the first rotating shaft 28 can be a fixed connection or a rotatable connection.

[0057] In some embodiments, such as Figure 1 , Figure 5 and Figure 11As shown, the cavity cover opening and closing device 2 also includes a second rotating shaft 29. The axis of the second rotating shaft 29 is collinear with the fifth axis corresponding to the fifth rotating pair 242. The first end 240 also includes a third shaft hole 2402, and the fifth end 260 also includes a fourth shaft hole 2600. The second rotating shaft 29 passes through the third shaft hole 2402 and the fourth shaft hole 2600, so that the fifth end 260 is rotatably connected to the support rod 24. This arrangement allows the second telescopic rod assembly 26 to be rotatably connected to the support rod 24 via the second rotating shaft 29. The connection position between the second rotating shaft 29 and the support rod 24 can be the fourth shaft hole 2600 of the fifth end 260, or it can be a shaft hole provided at other positions on the support rod 24.

[0058] like Figure 5 As shown, the cavity cover opening and closing device 2 includes a first rotating shaft 28 and a second rotating shaft 29, i.e., two rotating shafts that can be installed independently. This arrangement helps to increase the reliability and flexibility of the cavity cover opening and closing device 2. Exemplarily, under the action of the first telescopic rod assembly 25, the cavity cover 12 is opened and closed relative to the cavity 11 via the first rotating shaft 28; under the action of the second telescopic rod assembly 26, the cavity cover 12 is separated from and brought closer to the cavity 11 via the second rotating shaft 29. This helps to better realize their respective functions and provides a more convenient maintenance and debugging method.

[0059] In some embodiments, the cavity cover opening and closing device 2 includes only the first rotating shaft 28, excluding the second rotating shaft 29. Exemplarily, the second telescopic rod assembly 26 is also rotatably connected to the support rod 24 via the first rotating shaft 28. This simplifies the construction of the cavity cover opening and closing device 2, reduces costs, improves device operating efficiency, and reduces energy consumption.

[0060] In some embodiments, the cavity cover opening and closing device 2 includes only the second rotating shaft 29, that is, it does not include the first rotating shaft 28. Exemplarily, the outer wall 120 of the cavity cover 12 is rotatably connected to the first telescopic rod assembly 25 via a connecting plate 27, and the outer wall 120 of the cavity cover 12 is rotatably connected to the support rod 24 via another connecting plate (not shown in the figure). The arrangement and number of rotating shafts in the cavity cover opening and closing device 2 can be set according to actual needs.

[0061] In some embodiments, such as Figure 5 and Figure 11As shown, the first end 240 includes a first rod portion 2403 and a second rod portion 2404 that intersect the extending direction of the support rod 24. The first rod portion 2403 is rotatably connected to the connecting plate 27, so that the first end 240 is rotatably connected to the outer wall 120 of the cavity cover. The second rod portion 2404 is rotatably connected to the fifth end, so that the fifth end 260 is rotatably connected to the support rod 24. The second included angle β between the second rod portion 2404 and the support rod 24 is smaller than the first included angle α between the first rod portion 2403 and the support rod 24. This configuration allows the rotatable connection between the first end 240 and the outer wall 120 of the cavity cover to be closer to the second end 241 of the support rod 24 than the rotatable connection between the fifth end 260 and the support rod 24. The position of the second rod portion 2404 is lower than the position of the first rod portion 2403, which helps to reduce the stroke of the second telescopic rod assembly 26. The separation and approach of the cavity cover 12 and the cavity 11 can be achieved with a smaller stroke, improving the operating efficiency of the device. Furthermore, the specifications of the second telescopic rod assembly 26 can be set to be smaller, which helps to reduce costs.

[0062] In some embodiments, the first rod portion 2403 has a first shaft hole 2401, and the second rod portion 2404 has a third shaft hole 2402. The second included angle β between the second rod portion 2404 and the support rod 24 is smaller than the first included angle α between the first rod portion 2403 and the support rod 24. This arrangement makes the third shaft hole 2402 closer to the second end 241 of the support rod 24 than the first shaft hole 2401, thereby making the rotatable connection between the first end 240 and the outer wall 120 of the cavity cover closer to the second end 241 of the support rod 24 than the rotatable connection between the fifth end 260 and the support rod 24. The position of the second rod portion 2404 is lower than the position of the first rod portion 2403, which helps to reduce the stroke of the second telescopic rod assembly 26. The separation and approach of the cavity cover 12 and the cavity 11 can be achieved with a smaller stroke, improving the operating efficiency of the device. Furthermore, the specifications of the second telescopic rod assembly 26 can be set to be smaller, which helps to reduce costs.

[0063] In some embodiments, during the separation of the cavity cover 12 from the cavity body 11, the extension length of the second telescopic rod assembly 26 gradually decreases, and during the approach of the cavity cover 12 to the cavity body 11, the extension length of the second telescopic rod assembly 26 gradually increases. This configuration ensures that during the separation of the cavity cover 12 from the cavity body 11, the second telescopic rod assembly 26 separates the cavity cover 12 from the cavity body 11 by contraction, and during the approach of the cavity cover 12 to the cavity body 11, the second telescopic rod assembly 26 separates the cavity cover 12 from the cavity body 11 by extension. This results in a smaller and more uniformly varied torque on the second telescopic rod assembly 26, thus extending its lifespan.

[0064] In some embodiments, such as Figure 1 and Figure 4 As shown, the first hinge seat 21, the second hinge seat 22, the third hinge seat 23, the support rod 24, the first telescopic rod assembly 25, and the second telescopic rod assembly 26 are all located on the same side of the chamber 10, and the first hinge seat 21, the second hinge seat 22, and the third hinge seat 23 are all located diagonally below the chamber 10. By placing the first hinge seat 21, the second hinge seat 22, the third hinge seat 23, the support rod 24, the first telescopic rod assembly 25, and the second telescopic rod assembly 26 on the same side of the chamber 10, they can all be located above, below, in front of, behind, to the left, or to the right of the chamber 10. This arrangement helps save the installation and working space occupied by the chamber cover opening and closing device 2.

[0065] In some application scenarios, the cavity cover 12 is positioned high. Repairing or maintaining the cavity cover 12 or its components often requires climbing inside the cavity 11, which can easily damage the components inside the cavity 11 and results in a low safety factor. By exemplarily placing the first hinge seat 21, the second hinge seat 22, and the third hinge seat 23 all obliquely below the cavity 10, such as... Figure 7 and Figure 10 As shown, the first hinge seat 21, the second hinge seat 22, and the third hinge seat 23 are all located on the lower right side of the chamber 10. When the chamber cover 12 changes from the open state to the separated state relative to the chamber 11, the chamber cover 12 can move to the lower right side of the chamber 11, so that the chamber cover 12 can be separated from the chamber 11 and moved to a lower position, which increases the operating space and enables the chamber cover 12 or the components on the chamber cover 12 to be repaired or maintained at a lower position, avoiding the need for climbing to a height, preventing damage to the components inside the chamber 11, and improving the operating safety factor.

[0066] The relative positions of the first hinge seat 21, the second hinge seat 22, and the third hinge seat 23 can be set according to actual needs. In some embodiments, such as Figure 1 and Figure 2 As shown, the first hinge seat 21, the second hinge seat 22, and the third hinge seat 23 are arranged sequentially. Exemplarily, the first hinge seat 21 and the second hinge seat 22 are configured such that the second axis corresponding to the second revolute joint 210 and the fourth axis corresponding to the fourth revolute joint 221 are collinear. This arrangement simplifies the movement of the support rod 24 and the first telescopic rod assembly 25 during the separation or approach of the cavity cover 12 and the cavity body 11, reducing the difficulty of debugging the cavity cover opening and closing device 2.

[0067] In some embodiments, the cavity cover opening and closing device 2 further includes a base. A first hinge seat 21, a second hinge seat 22, and a third hinge seat 23 are disposed on the base. In some embodiments, the base 3 is disposed obliquely below the cavity 10. In some embodiments, such as Figure 4 and Figure 5As shown, the base 3 is connected to the chamber 10. This arrangement ensures that the first hinge seat, the second hinge seat, and the third hinge seat are all fixed relative to the chamber. In some embodiments, the base 3 is independently disposed, i.e., it is not disposed on the chamber 10. In some embodiments, the first hinge seat 21, the second hinge seat 22, and the third hinge seat 23 are detachably connected to the base 3, making the hinge seat and the base 3 detachable for easy maintenance and replacement. In some embodiments, the first hinge seat 21, the second hinge seat 22, and the third hinge seat 23 are integrally formed with the base 3, thereby reducing the manufacturing process of the hinge seat and the base 3 and improving production efficiency. Exemplarily, when the first hinge seat 21, the second hinge seat 22, and the third hinge seat 23 are integrally formed with the base 3, the base 3 includes a base body, which can be relatively thick, and the base body has a notch facing away from the chamber. Exemplarily, a pivot is provided within the notch to achieve hinge connection.

[0068] In some embodiments, such as Figure 2 and Figure 5 As shown, the first hinge seat 21, the second hinge seat 22, the third hinge seat 23, the support rod 24, the first telescopic rod assembly 25, and the second telescopic rod assembly 26 form the cavity cover opening and closing module 4. The cavity cover opening and closing device 2 includes two cavity cover opening and closing modules 4. The two cavity cover opening and closing modules 4 provide increased support and stability for the cavity cover 12 to open, close, separate, or approach the cavity body 11, distribute the load, reduce component burden, lower the risk of component damage, increase safety, and extend service life.

[0069] In some embodiments, such as Figures 1 to 3 As shown, the chamber 10 is a cube, and the two cover opening and closing modules 4 are symmetrically arranged on the same side of the chamber 10 with respect to the symmetrical face of the chamber 10. This arrangement provides better balance and stability for the cover opening and closing device 2 to open, close, separate, or move closer to the chamber body 11, which helps to distribute and evenly distribute the load, reduces the complexity of the cover opening and closing device 2, and improves its maintainability. Arranging them on the same side also helps to reduce the installation and working space occupied by the cover opening and closing device 2.

[0070] In some embodiments, the cavity cover opening and closing device 2 further includes a drive module. The drive module is used to drive the first telescopic rod assembly 25 and / or the second telescopic rod assembly 26 to adjust the extension length of the first telescopic rod assembly 25 and / or the second telescopic rod assembly 26. The drive module includes one or more combinations of the following: an electric drive unit, a pneumatic drive unit, and a hydraulic drive unit. Exemplarily, the drive module may include multiple drive sub-modules, each drive sub-module driving one telescopic rod assembly. Exemplarily, such as... Figure 5As shown, the drive submodule 5 drives the first telescopic rod assembly 25. The drive submodule 5 includes a hydraulic drive unit. Exemplarily, the telescopic mechanism formed by the drive submodule and the telescopic rod assembly includes one or more of the following telescopic mechanisms: hydraulic telescopic mechanism, cylinder telescopic mechanism, magnetic telescopic mechanism, electric telescopic mechanism, etc. Exemplarily, the drive module can also achieve joint drive of the first telescopic rod assembly 25 and the second telescopic rod assembly 26. The drive module can drive the cavity cover opening and closing device 2 to operate, and the configuration of the drive module allows the cavity cover 12 to stop at any position during movement, which is beneficial for precise control of the cavity cover 12 position, facilitates operator observation of the cavity cover 12, and increases operational safety.

[0071] The above text combined Figures 1 to 11 The previous section described in detail the embodiment of the cavity cover opening and closing device 2 of this application. The following section describes in detail the embodiment of the processing equipment 1 of this application. It should be understood that the description of the embodiment of the cavity cover opening and closing device 2 corresponds to the description of the embodiment of the processing equipment 1. Therefore, any parts not described in detail can be referred to the preceding description of the embodiment of the cavity cover opening and closing device 2.

[0072] like Figure 1 As shown, one embodiment of this application also provides a processing apparatus 1. The processing apparatus 1 includes a chamber 10 and a cover opening / closing device 2 mentioned in any of the above embodiments. The chamber 10 includes a cavity 11 and a cover 12 for closing the cavity 11. The cover 12 includes an inner wall (not shown) and an outer wall 120. When the cover 12 is closed to the cavity 11, the inner wall is located inside the chamber 10, and the outer wall 120 is located on top of the cover 12. The cover opening / closing device 2 is disposed outside the chamber 10 and configured to open or close the cover 12 relative to the cavity 11, and to separate or bring the cover 12 closer to the cavity 11. The composition, structure, and advantages of the cover opening / closing device 2 have been described in detail above and will not be repeated here. The processing apparatus 1 can be any apparatus used to process a workpiece. For example, the processing apparatus 1 can be a coating apparatus. Exemplarily, the processing equipment 1 may also include a base 3 for supporting the chamber 10 and / or the chamber cover opening and closing device 2. Exemplarily, the processing equipment 1 may also include a vacuum system, an electrical system, etc.

[0073] The processing equipment 1 provided in this application embodiment includes a cavity cover opening and closing device 2 comprising a first hinge seat 21, a second hinge seat 22, a third hinge seat 23, a support rod 24, a first telescopic rod assembly 25, and a second telescopic rod assembly 26. The outer wall 120 of the cavity cover 12 is rotatably connected to the first end 240 of the support rod 24, allowing the cavity cover 12 to rotate based on the support rod 24, thus opening or closing the cavity cover 12 relative to the cavity 11. After the cavity cover 12 is opened relative to the cavity 11, the second telescopic rod assembly 26 causes the cavity cover 12 to separate from or approach the cavity 11, allowing the cavity cover 12 to move away from the cavity 11. This increases the operating space for repairing or maintaining the cavity cover 12 or the components on the cavity cover 12, improving the convenience of repair or maintenance, and thus improving repair and maintenance efficiency.

[0074] The above text combined Figures 1 to 11 The following describes in detail two embodiments of the cavity cover opening and closing device of this application, in conjunction with... Figures 12 to 15 This document describes in detail embodiments of the cavity cover opening and closing control method of this application. It should be understood that the description of the cavity cover opening and closing device 2 embodiments corresponds to the description of the cavity cover opening and closing control method embodiments; therefore, any parts not described in detail can be referred to the preceding cavity cover opening and closing device 2 embodiments.

[0075] Figure 12 The diagram shown is a flowchart of a cavity cover opening and closing control method provided in an embodiment of this application.

[0076] like Figure 12 As shown, one embodiment of this application also provides a cavity cover opening and closing control method, applied to the cavity cover opening and closing device 2 mentioned in any of the above embodiments. The cavity cover opening and closing control method includes the following steps.

[0077] S10: Control the extension length of the first telescopic rod assembly 25 to make the cavity cover 12 rotate around the first axis, thereby opening or closing the cavity cover 12 relative to the cavity 11.

[0078] S20: When the cavity cover 12 is opened relative to the cavity 11, the extension length of the second telescopic rod assembly 26 is controlled so that the support rod 24 connected to the cavity cover 12 and the first telescopic rod assembly 25 rotate around the second axis and the fourth axis respectively, thereby realizing the separation or proximity of the cavity cover 12 and the cavity 11.

[0079] The cavity cover opening and closing control method provided in this application embodiment uses a cavity cover opening and closing device 2 including a first hinge seat 21, a second hinge seat 22, a third hinge seat 23, a support rod 24, a first telescopic rod assembly 25, and a second telescopic rod assembly 26. The outer wall 120 of the cavity cover 12 is rotatably connected to the first end 240 of the support rod 24, allowing the cavity cover 12 to rotate based on the support rod 24, thereby opening or closing the cavity cover 12 relative to the cavity 11. After the cavity cover 12 is opened relative to the cavity 11, the second telescopic rod assembly 26 causes the cavity cover 12 to separate from or move closer to the cavity 11, allowing the cavity cover 12 to move away from the cavity 11. This increases the operating space for repairing or maintaining the cavity cover 12 or the components on the cavity cover 12, improving the convenience of repair or maintenance, and thus improving repair and maintenance efficiency.

[0080] Figure 13 The diagram shown is a flowchart of a cavity cover opening and closing control method provided in another embodiment of this application.

[0081] like Figure 13 As shown, the cavity cover opening and closing control method may include the following steps.

[0082] S10: Control the extension length of the first telescopic rod assembly 25 to make the cavity cover 12 rotate around the first axis, thereby opening or closing the cavity cover 12 relative to the cavity 11.

[0083] S30: When the cavity cover 12 is opened relative to the cavity 11, the extension length of the first telescopic rod assembly 25 and the second telescopic rod assembly 26 is controlled so that the support rod 24 connected to the cavity cover 12 and the first telescopic rod assembly 25 rotate around the second axis and the fourth axis respectively, thereby realizing the separation or proximity of the cavity cover 12 from the cavity 11.

[0084] In this embodiment, the separation or proximity of the cavity cover 12 and the cavity 11 is achieved through the combined action of the first telescopic rod assembly 25 and the second telescopic rod assembly 26. The cooperation method between the first telescopic rod assembly 25 and the second telescopic rod assembly 26 can be set according to the actual situation.

[0085] Figure 14 The diagram shown is a flowchart of a cavity cover opening and closing control method provided in another embodiment of this application. Figure 15 The diagram shown is a flowchart of a cavity cover opening and closing control method provided in another embodiment of this application.

[0086] like Figure 14 and Figure 15 As shown, after step S20 or S30, the cavity cover opening and closing control method further includes the following steps.

[0087] S40: When the cavity cover 12 is separated from the cavity 11, control the extension length of the first telescopic rod assembly 25 and / or the second telescopic rod assembly 26 to adjust the flip angle of the cavity cover 12 relative to the cavity 11.

[0088] Since the first telescopic rod assembly 25 is rotatably connected to the outer wall 120 of the cavity cover 12, the tilt angle of the cavity cover 12 relative to the cavity 11 can be adjusted by controlling the extension length of the first telescopic rod assembly 25. Since the first end 240 of the support rod 24 is rotatably connected to the outer wall 120 of the cavity cover 12, and the fifth end 260 of the second telescopic rod assembly 26 is rotatably connected to the support rod 24, the tilt angle of the cavity cover 12 relative to the cavity 11 can also be adjusted by controlling the extension length of the second telescopic rod assembly 26. For example, the rotatable connection between the first end 240 of the support rod 24 and the outer wall 120 of the cavity cover 12 and the rotatable connection between the first telescopic rod assembly 25 and the outer wall 120 of the cavity cover 12 are not achieved through the same connector, such as the connecting plate 27. Therefore, the tilt angle of the cavity cover 12 relative to the cavity 11 can also be adjusted by simultaneously controlling the extension lengths of the first telescopic rod assembly 25 and the second telescopic rod assembly 26.

[0089] When the cavity cover 12 is separated from the cavity 11, the rotation angle of the cavity cover 12 relative to the cavity 11 can be adjusted by controlling the extension length of the first telescopic rod assembly 25 and / or the second telescopic rod assembly 26. This facilitates observation of the cavity cover 12 from different angles and makes it easier to adjust the cavity cover 12 to a suitable rotation angle when repairing or maintaining the cavity cover 12 or the components on the cavity cover 12, further improving the convenience of repair and maintenance.

[0090] It should be noted that the opening, closing, separation, or proximity of the cover 12 relative to the cavity 11 can be performed independently. There is no sequential relationship between the above steps. In some embodiments, the cavity is in a closed state. Based on step S10, the cover 12 is opened relative to the cavity 11; then, based on step S20, the cover 12 is separated from the cavity 11; subsequently, based on step S20, the cover 12 can be brought closer to the cavity 11; finally, based on step S10, the cover 12 is closed relative to the cavity 11. The above steps S10, S20, and / or S30, S40 can be performed in any order and combination.

[0091] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0092] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0093] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0094] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0095] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A cavity cover opening and closing device, characterized in that, An apparatus for use in processing equipment includes a chamber, the chamber comprising a body and a cover for closing the body, the cover comprising an inner wall and an outer wall, wherein when the cover is closed to the body, the inner wall is located inside the chamber, and the outer wall is located at the top of the cover; a cover opening and closing device is located outside the chamber, the cover opening and closing device comprising: The first hinge seat, the second hinge seat, and the third hinge seat are all fixedly disposed relative to the cavity; The support rod includes a first end and a second end, wherein the first end is rotatably connected to the outer wall of the cavity cover to form a first rotating pair that rotates about a first axis, and the second end is hinged to the first hinge seat to form a second rotating pair that rotates about a second axis. The first telescopic rod assembly includes a third end and a fourth end, wherein the third end is rotatably connected to the outer wall of the cavity cover to form a third rotating pair that rotates about a third axis, and the fourth end is hinged to the second hinge seat to form a fourth rotating pair that rotates about a fourth axis, so that under the action of the first telescopic rod assembly, the cavity cover rotates about the first axis, thereby opening or closing the cavity cover relative to the cavity. The second telescopic rod assembly includes a fifth end and a sixth end, wherein the fifth end is rotatably connected to the support rod to form a fifth rotating pair that rotates about a fifth axis, and the sixth end is hinged to the third hinge seat to form a sixth rotating pair that rotates about a sixth axis. After the cavity cover is opened relative to the cavity body, under the action of the second telescopic rod assembly, the support rod connected to the cavity cover and the first telescopic rod assembly rotate about the second axis and the fourth axis respectively, thereby realizing the separation or proximity of the cavity cover from the cavity body. Wherein, the first axis, the second axis, the third axis, the fourth axis, the fifth axis, and the sixth axis are parallel; The cavity cover opening and closing device further includes a connecting plate, and the first telescopic rod assembly is rotatably connected to the cavity cover through the connecting plate; The connecting plate includes a first connecting part and a second connecting part. The first connecting part is fixedly connected to the cavity cover, and the second connecting part is rotatably connected to the third end.

2. The cavity cover opening and closing device according to claim 1, characterized in that, The first connecting portion is parallel to the cavity cover, the second connecting portion is set at an obtuse angle to the first connecting portion, and the second connecting portion extends away from the cavity cover.

3. The cavity cover opening and closing device according to claim 1, characterized in that, The first end includes a first rod portion and a second rod portion that are arranged intersecting the extension direction of the support rod; The first rod portion is rotatably connected to the connecting plate, so that the first end is rotatably connected to the outer wall of the cavity cover; The second rod portion is rotatably connected to the fifth end, so that the fifth end is rotatably connected to the support rod; The second included angle between the second rod portion and the support rod is smaller than the first included angle between the first rod portion and the support rod.

4. The cavity cover opening and closing device according to any one of claims 1 to 3, characterized in that, During the separation of the cavity cover from the cavity body, the extension length of the second telescopic rod assembly gradually decreases; during the approach of the cavity cover to the cavity body, the extension length of the second telescopic rod assembly gradually increases.

5. The cavity cover opening and closing device according to any one of claims 1 to 3, characterized in that, The first hinge seat, the second hinge seat, the third hinge seat, the support rod, the first telescopic rod assembly, and the second telescopic rod assembly are all disposed on the same side of the cavity, and the first hinge seat, the second hinge seat, and the third hinge seat are all disposed obliquely below the cavity.

6. The cavity cover opening and closing device according to any one of claims 1 to 3, characterized in that, It also includes a base, which is connected to the chamber, and the first hinge seat, the second hinge seat and the third hinge seat are disposed on the base; The first hinge seat, the second hinge seat, and the third hinge seat are detachably connected to the base, or The first hinge seat, the second hinge seat, and the third hinge seat are integrally formed with the base.

7. The cavity cover opening and closing device according to any one of claims 1 to 3, characterized in that, The first hinge seat, the second hinge seat, the third hinge seat, the support rod, the first telescopic rod assembly, and the second telescopic rod assembly form a cavity cover opening and closing module; The cavity cover opening and closing device includes two cavity cover opening and closing modules; The chamber is a cube, and the two chamber cover opening and closing modules are symmetrically arranged on the same side of the chamber with respect to the symmetrical face of the chamber.

8. The cavity cover opening and closing device according to any one of claims 1 to 3, characterized in that, It also includes a drive module for driving the first telescopic rod assembly and / or the second telescopic rod assembly to adjust the extension length of the first telescopic rod assembly and / or the second telescopic rod assembly. The drive module includes one or more of the following combinations: an electric drive unit, a pneumatic drive unit, and a hydraulic drive unit.

9. A processing equipment, characterized in that, include: A chamber includes a cavity body and a cover for closing the cavity body. The cover includes an inner wall and an outer wall, wherein when the cover is closed to the cavity body, the inner wall is located inside the cavity body, and the outer wall is located at the top of the cover. The cavity cover opening and closing device according to any one of claims 1 to 8, wherein the cavity cover opening and closing device is disposed outside the cavity and configured to open or close the cavity cover relative to the cavity body, and to separate or bring the cavity cover away from or close to the cavity body.

10. A method for controlling the opening and closing of a cavity cover, characterized in that, The cavity cover opening and closing device according to any one of claims 1 to 8, wherein the cavity cover opening and closing control method comprises: By controlling the extension length of the first telescopic rod assembly, the cavity cover is rotated around the first axis, thereby opening or closing the cavity cover relative to the cavity. When the cavity cover is opened relative to the cavity, the extension length of the second telescopic rod assembly is controlled, so that the support rod connected to the cavity cover and the first telescopic rod assembly rotate around the second axis and the fourth axis respectively, thereby realizing the separation or proximity of the cavity cover from the cavity.

11. The cavity cover opening and closing control method according to claim 10, characterized in that, When the cavity cover is separated from the cavity body, the extension length of the first telescopic rod assembly and / or the second telescopic rod assembly is controlled to adjust the flip angle of the cavity cover relative to the cavity body.

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