A rapid sample changing device and a rapid sample changing method thereof

Abstract

This invention relates to a rapid sample changing device. A first vacuum valve is provided between an exposure chamber and a first sample changing chamber, and a second vacuum valve is provided between the exposure chamber and a second sample changing chamber. A sample stage is installed in the exposure chamber, and a movable sample holder is fixed to an electromagnetic hanging rod by an electromagnetic adsorption device. A first conveying rod is configured to move between the first sample changing chamber and the exposure chamber under vacuum to transfer the sample holder from a first position in the first sample changing chamber to a second position in the exposure chamber. A second conveying rod is configured to move between the exposure chamber and the second sample changing chamber under vacuum to transfer the sample holder from the second position in the exposure chamber to a third position in the second sample changing chamber. This invention also relates to a rapid sample changing method within the rapid sample changing device. According to the rapid sample changing device and method of this invention, the vacuum state of the exposure chamber is not disrupted during sample replacement, achieving rapid sample replacement and improving experimental efficiency.

Description

Technical Field

[0001] This invention relates to photolithography, and more specifically to a rapid sample change apparatus and method thereof. Background Technology

[0002] Extreme ultraviolet (EUV) lithography, as the next-generation lithography technology, has been entrusted by the semiconductor industry with the mission of saving Moore's Law. EUV photoresist is a key material in the manufacture of integrated circuits, and its performance directly affects the performance of integrated circuit chips. The core exposure performance of EUV photoresist mainly includes three aspects: sensitivity, resolution, and edge roughness. Characterizing these exposure properties is a necessary condition for EUV photoresist research and development and a crucial step in optimizing EUV photoresist formulations.

[0003] X-ray interferometry (XIL) is a novel and advanced micro- and nanofabrication technique that uses the interference fringes of two or more coherent X-ray beams to expose photoresist. It can fabricate nanostructures with cycles of tens or even hundreds of nanometers. The principle of XIL is to use a mask grating to split a single X-ray beam into multiple coherent beams, generating interference fringes on the photoresist to expose it. The exposed pattern is then recorded. The performance of the photoresist can be characterized by detecting the quality of the exposed pattern. Currently, XIL is the only experimental technique that can simultaneously detect three exposure properties of photoresist in a single exposure.

[0004] Factors affecting the final exposure fringe resolution, besides the mask grating period, include the stability of the exposure system and the development process. To improve the stability of the exposure system, current methods include: attaching the sample to a vacuum-sealed surface such as... Figure 2 The sample holder 6' shown is suspended from the sample holder 6' by three suspension holes 61'. Figure 3 The sample holder 6' is attached to the three electromagnetic rods 12' of the sample stage 11' shown. Specifically, the sample holder 6' is pressed onto the sample stage 11' by three fixing springs 13'. After exposure, the three fixing springs 13' must be released before the sample holder 6' can be removed. The fixing springs 13' have two states: a pressed state and a relaxed state. These two states need to be manually changed to compress or relax the sample holder 6'. In the relaxed state, the fixing spring 13' is stuck on a fixing pin. To change to the pressed state, the fixing spring 13' must be manually rotated to disengage from the fixing pin, and then the sample holder 6' can be pressed onto the sample stage 11'.

[0005] Due to the transmission characteristics of extreme ultraviolet light / soft X-rays, the exposure chamber needs to be in a vacuum state. A considerable amount of time is required to acquire this vacuum before exposure; after exposure, the vacuum state must be broken and the chamber restored to atmospheric conditions before the sample can be manually replaced. Therefore, under current conditions, the time spent acquiring and releasing the vacuum during a complete exposure process is often longer than the actual exposure experiment time, leading to low experimental efficiency and wasted exposure resources. Summary of the Invention

[0006] To address the problems of low experimental efficiency in the prior art, the present invention provides a rapid sample changing device and a rapid sample changing method thereof.

[0007] According to the rapid sample changing device of the present invention, it includes an exposure chamber, a first sample changing chamber, a second sample changing chamber, a first conveying rod, and a second conveying rod. A first vacuum valve is provided between the exposure chamber and the first sample changing chamber, and a second vacuum valve is provided between the exposure chamber and the second sample changing chamber. A sample stage is installed in the exposure chamber, and a movable sample holder is fixed to an electromagnetic hanging rod on the sample stage by an electromagnetic adsorption device. The first conveying rod is configured to move between the first sample changing chamber and the exposure chamber under vacuum to transfer the sample holder from a first position in the first sample changing chamber to a second position in the exposure chamber. The second conveying rod is configured to move between the exposure chamber and the second sample changing chamber under vacuum to transfer the sample holder from the second position in the exposure chamber to a third position in the second sample changing chamber.

[0008] Preferably, the first and second conveyor rods are detachably connected to the sample holder.

[0009] Preferably, the sample holder is made of magnetic material.

[0010] Preferably, the position of the sample holder fixed on the sample stage is moved by a first motor and a second motor.

[0011] Preferably, the first sample exchange chamber and the second sample exchange chamber are located on both sides of the exposure chamber.

[0012] According to the rapid sample changing method of the rapid sample changing device of the present invention, the method includes the following steps: S1, closing the first vacuum valve and the second vacuum valve, evacuating the exposure chamber and the second sample changing chamber to a vacuum state to put them into working state, and exposing the first sample changing chamber to atmospheric conditions; S2, placing the first sample holder into the first sample changing chamber and connecting it to the first conveying rod, at which time the first sample holder is in the first position; S3, turning on the vacuum pump of the first sample changing chamber to evacuate the vacuum of the first sample changing chamber until the vacuum of the first sample changing chamber and the vacuum of the exposure chamber reach the same level; S4, opening the first vacuum valve, conveying the first sample holder to the exposure chamber through the first conveying rod, and suspending it on the electromagnetic hanging rod, at which time the first sample holder is in the first position. S5. The first sample holder is in the second position; S6. The electromagnetic rod is energized to make it magnetic, and the first sample holder is attracted to the electromagnetic rod; S7. The connection between the first conveyor rod and the first sample holder is disconnected, and the first conveyor rod is removed from the exposure chamber and returned to the first sample exchange chamber; S8. The first vacuum valve is closed, and the exposure experiment begins; S9. After the exposure experiment in the exposure chamber is completed, the second vacuum valve is opened, the second conveyor rod is connected to the first sample holder, and the electromagnetic rod is de-energized; S10. The first sample holder is taken out into the second sample exchange chamber using the second conveyor rod, and the second vacuum valve is closed. At this time, the first sample holder is in the third position; S11. The vacuum of the second sample exchange chamber is restored to atmospheric level, and the first sample holder is taken out.

[0013] Preferably, after step S7, the first sample changing chamber is restored to atmospheric conditions, the second sample holder is placed into the first sample changing chamber, and after being connected to the first transfer rod, the vacuum pump of the first sample changing chamber is turned on to evacuate the vacuum of the first sample changing chamber until the vacuum of the first sample changing chamber and the vacuum of the exposure chamber reach the same level.

[0014] Preferably, after step S9, steps S4-S7 are repeated to place the second sample holder into the exposure chamber and the third sample holder into the first sample changing chamber.

[0015] Preferably, after the first sample holder is removed in step S10, the vacuum pump of the second sample changing chamber is turned on to evacuate the vacuum of the second sample changing chamber until the vacuum of the second sample changing chamber reaches the same level as the vacuum of the exposure chamber.

[0016] According to the rapid sample changing device and method of the present invention, the vacuum state of the exposure chamber is not disrupted during sample changing through the first sample changing chamber, the second sample changing chamber, the first conveying rod, the second conveying rod and the electromagnetic adsorption device, thereby achieving rapid sample changing and improving experimental efficiency. Attached Figure Description

[0017] Figure 1 This is a top view of a rapid sample changing device according to a preferred embodiment of the present invention.

[0018] Figure 2 This is a diagram of the external shape of a sample holder in the prior art.

[0019] Figure 3 This is a side view of a sample stage in the prior art. Detailed Implementation

[0020] The preferred embodiments of the present invention are given below with reference to the accompanying drawings and described in detail.

[0021] like Figure 1 As shown, a rapid sample-changing apparatus according to a preferred embodiment of the present invention, used for synchrotron X-ray interferolithography, includes an exposure chamber 1, a first sample-changing chamber 2, and a second sample-changing chamber 3. A first vacuum valve 4 is disposed between the exposure chamber 1 and the first sample-changing chamber 2, and a second vacuum valve 4 is disposed between the exposure chamber 1 and the second sample-changing chamber 3. In this embodiment, the first sample-changing chamber 2 and the second sample-changing chamber 3 are respectively located on the left and right sides of the exposure chamber 1 in a 180° straight line arrangement. It should be understood that the straight line arrangement is only an example and not a limitation; for example, the first sample-changing chamber 2 and the second sample-changing chamber 3 can also be arranged at 90°.

[0022] like Figure 1 As shown, a sample stage 11 is installed inside the exposure chamber 1, and a movable sample holder 6 is suspended from three electromagnetic rods 12 on the sample stage 11 through three suspension holes. Specifically, the sample holder 6 is fixed to the electromagnetic rods 12 by an electromagnetic adsorption device. It should be understood that the suspension holes of the sample holder 6 can be configured to... Figure 2 The existing technology is the same, and adjustments can be made as needed. Furthermore, the position of the sample holder 6 fixed on the sample stage 11 can be moved by the first motor 13 and the second motor 14 to complete the exposure as needed. Specifically, the sample holder 6 of the present invention is made of magnetic material so that it can be attracted by an electromagnet. An electromagnetic adsorption device replaces the fixing spring in the prior art to fix the sample holder 6 to the sample stage 11, thereby avoiding the manual operation of the fixing spring required in the prior art. This allows for sample replacement without disrupting the vacuum of the exposure chamber 1, achieving rapid sample replacement and improving experimental efficiency.

[0023] like Figure 1 As shown, the rapid sample changing device according to this embodiment further includes a first conveying rod 7 and a second conveying rod 8, wherein the first conveying rod 7 moves between the first sample changing chamber 2 and the exposure chamber 1 to transfer the sample holder 6 from a first position 61 in the first sample changing chamber 2 to a second position 62 in the exposure chamber 1, and the second conveying rod 8 moves between the exposure chamber 1 and the second sample changing chamber 3 to transfer the sample holder 6 from the second position 62 in the exposure chamber 1 to a third position 63 in the second sample changing chamber 3.

[0024] It should be understood that the detachable connection method between the conveyor rods 7 and 8 and the sample holder 6 can be selected as needed. In one embodiment, screw holes are pre-drilled on the side of the sample holder 6, and screws are pre-drilled at the connecting ends of the conveyor rods 7 and 8, thereby connecting the sample holder 6 to the conveyor rods 7 and 8. In another embodiment, a clamp is installed at the connecting end of the conveyor rods 7 and 8, and the sample holder 6 is connected to the conveyor rods 7 and 8 through the clamp.

[0025] The following is a brief explanation of the quick sample change method.

[0026] (1) Close the first vacuum valve 4 and the second vacuum valve 5. Before exposure, the exposure chamber 1 and the second sample exchange chamber 3 are evacuated to a vacuum state to put them into working state, while the first sample exchange chamber 2 is in an atmospheric state.

[0027] (2) After pasting the first sample to be tested onto the first sample holder 6, the first sample holder 6 is placed into the first sample changing chamber 2 and connected to the first conveying rod 7. At this time, the first sample holder 6 is in the first position 61.

[0028] (3) Turn on the vacuum pump of the first sample exchange chamber 2 to evacuate the vacuum of the first sample exchange chamber 2 until the vacuum of the first sample exchange chamber 2 and the vacuum of the exposure chamber 1 reach the same level.

[0029] (4) Open the first vacuum valve 4 and transfer the first sample holder 6 to the exposure chamber 1 through the first transfer rod 7 and suspend it on the electromagnetic hanging rod 12. At this time, the first sample holder 6 is in the second position 62.

[0030] (5) Power the electromagnetic rod 12 to make it magnetic, and attract the first sample holder 6 onto the electromagnetic rod 12.

[0031] (6) Disconnect the connection between the first transfer rod 7 and the first sample holder 6, remove the first transfer rod 7 from the exposure chamber 1, and return it to the first sample changing chamber 2.

[0032] (7) Close the first vacuum valve 4 and start the exposure experiment.

[0033] (8) Return the first sample changing chamber 2 to atmospheric state, attach the second sample to be tested to the second sample holder 6, place the second sample holder 6 into the first sample changing chamber 2, connect it to the first transfer rod 7, turn on the vacuum pump of the first sample changing chamber 2 to evacuate the vacuum of the first sample changing chamber 2 until the vacuum of the first sample changing chamber 2 and the vacuum of the exposure chamber 1 reach the same level.

[0034] (9) After the exposure experiment in the exposure chamber 1 is completed, open the second vacuum valve 5, connect the second transfer rod 8 to the first sample holder 6, and then de-energize the electromagnetic hanging rod 12.

[0035] (10) Use the second transfer rod 8 to take out the first sample holder 6 into the second sample changing chamber 3 and close the second vacuum valve 5. At this time, the first sample holder 6 is in the third position 63.

[0036] (11) Repeat steps (4)-(7) above to place the second sample holder 6 into the exposure chamber 1 and the third sample holder 6 into the first sample changing chamber 2.

[0037] (12) Restore the vacuum of the second sample changing chamber 3 to atmospheric state. After taking out the first sample holder 6, turn on the vacuum pump of the second sample changing chamber 3 to evacuate the vacuum of the second sample changing chamber 3 until the vacuum of the second sample changing chamber 3 and the vacuum of the exposure chamber 1 reach the same level.

[0038] At this point, a complete sample change process is complete.

[0039] Clearly, this invention controls the magnetism by switching on the electromagnetic rod 12, thereby fixing the sample holder 6 to the electromagnetic rod 12. Thus, by adding sample changing chambers 2 and 3, conveying rods 7 and 8, and an electromagnetic adsorption device, this invention enables rapid sample changing.

[0040] The above description is merely a preferred embodiment of the present invention and is not intended to limit the scope of the invention. Various variations can be made to the above embodiments of the present invention. That is, all simple and equivalent changes and modifications made based on the claims and description of this invention fall within the protection scope of the claims of this patent. All aspects not described in detail in this invention are conventional technical content.

Claims

1. A rapid sample changing device, characterized in that, The rapid sample change device includes an exposure chamber, a first sample change chamber, a second sample change chamber, a first transfer rod, and a second transfer rod. A first vacuum valve is provided between the exposure chamber and the first sample change chamber, and a second vacuum valve is provided between the exposure chamber and the second sample change chamber. A sample stage is installed in the exposure chamber, and a movable sample holder is fixed to an electromagnetic hanger on the sample stage by an electromagnetic adsorption device. The first transfer rod is configured to move between the first sample change chamber and the exposure chamber under vacuum to transfer the sample holder from a first position in the first sample change chamber to a second position in the exposure chamber. The second transfer rod is configured to move between the exposure chamber and the second sample change chamber under vacuum to transfer the sample holder from the second position in the exposure chamber to a third position in the second sample change chamber.

2. The rapid sample changing device according to claim 1, characterized in that, The first and second transfer rods are detachably connected to the sample holder.

3. The rapid sample changing device according to claim 1, characterized in that, The sample holder is made of magnetic material.

4. The rapid sample changing device according to claim 1, characterized in that, The position of the sample holder fixed on the sample stage is moved by the first motor and the second motor.

5. The rapid sample changing device according to claim 1, characterized in that, The first and second sample change chambers are located on either side of the exposure chamber.

6. The rapid sample changing method of the rapid sample changing device according to any one of claims 1-5, characterized in that, This rapid resampling method includes the following steps: S1, close the first vacuum valve and the second vacuum valve, and evacuate the exposure chamber and the second sample exchange chamber to a vacuum state to put them into working state, while the first sample exchange chamber is exposed to atmospheric conditions; S2, the first sample holder is placed into the first sample changing chamber and connected to the first conveyor rod. At this time, the first sample holder is in the first position. S3, turn on the vacuum pump of the first sample changing chamber to evacuate the vacuum of the first sample changing chamber until the vacuum of the first sample changing chamber and the vacuum of the exposure chamber reach the same level; S4, open the first vacuum valve, and transfer the first sample holder into the exposure chamber through the first transfer rod, and suspend it on the electromagnetic hanging rod. At this time, the first sample holder is in the second position. S5, energize the electromagnetic rod to make it magnetic, and attract the first sample holder onto the electromagnetic rod; S6, disconnect the connection between the first conveyor rod and the first sample holder, remove the first conveyor rod from the exposure chamber, and return it to the first sample changing chamber; S7, close the first vacuum valve and begin the exposure experiment; S8, after the exposure experiment in the exposure chamber is completed, open the second vacuum valve, connect the second transfer rod to the first sample holder, and then de-energize the electromagnetic rod; S9, use the second conveyor rod to take out the first sample holder into the second sample exchange chamber, and close the second vacuum valve. At this time, the first sample holder is in the third position. S10, restore the vacuum of the second sample changing chamber to atmospheric state, and remove the first sample holder.

7. The rapid sample change method according to claim 6, characterized in that, After step S7, the first sample changing chamber is restored to atmospheric conditions, the second sample holder is placed into the first sample changing chamber and connected to the first transfer rod, and the vacuum pump of the first sample changing chamber is turned on to evacuate the vacuum of the first sample changing chamber until the vacuum of the first sample changing chamber and the vacuum of the exposure chamber reach the same level.

8. The rapid sample change method according to claim 7, characterized in that, After step S9, repeat steps S4-S7 to place the second sample holder into the exposure chamber and the third sample holder into the first sample exchange chamber.

9. The rapid sample change method according to claim 6, characterized in that, After the first sample holder is removed in step S10, the vacuum pump of the second sample changing chamber is turned on to evacuate the vacuum of the second sample changing chamber until the vacuum of the second sample changing chamber reaches the same level as the vacuum of the exposure chamber.

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