A driving transmission device and an epitaxial equipment reaction device

Abstract

The present application provides a driving transmission device, which is used in the technical field of epitaxial equipment. Specifically, it is a driving transmission device, including a driving shaft. The upper end of the driving shaft is connected to a rotating tray in the reaction chamber; the lower end of the driving shaft is connected to a driving component arranged outside the reaction chamber, and the driving component drives the driving shaft to drive the rotating tray to rotate. The above driving transmission device drives the rotating tray to rotate through a driving component with controllable rotation speed and start / stop, and the rotation speed and start / stop position of the rotating tray are also controllable, thus solving the problem that the rotation speed and start / stop position of the rotating tray cannot be controlled in the prior art. The present application also provides an epitaxial equipment reaction device, including the above driving transmission device, and further including a reaction chamber and a rotating tray. The epitaxial equipment reaction device provided by the present application realizes the controllable rotation speed and start / stop position of the rotating tray by using the driving transmission device of the present application, and can conveniently control the processing process of the wafer.

Description

Technical Field

[0001] The present application relates to the technical field of epitaxial equipment, and particularly relates to a driving transmission device and an epitaxial equipment reaction device. Background Art

[0002] The working environment inside the reaction chamber of a silicon carbide epitaxial equipment is high temperature and high vacuum. Therefore, it is necessary to maintain its relatively sealed working state with respect to the outside. In the prior art, a rotating tray is arranged inside the reaction chamber, and a rotating limit shaft is arranged below the rotating tray, which plays a role in restricting the freedom degree of the rotating tray in the horizontal direction, so that the tray rotates at a fixed position. Gas is introduced from the air inlet at the bottom of the reaction chamber and output from the air inlet holes with an inclined angle uniformly arranged along the circumference below the rotating tray. In this way, multiple airflows can lift the rotating tray and drive the rotating tray to rotate, thereby driving the wafer on the rotating tray to rotate inside the reaction chamber.

[0003] Although the airtightness of the reaction chamber can be well maintained by the air flow, the rotation speed, stop position, etc. of the rotating tray driven by the air flow are uncontrollable and unmonitorable. Summary of the Invention

[0004] In view of this, the present application provides a driving transmission device and an epitaxial equipment reaction device, which can control the rotation speed and stop position of the rotating tray inside the reaction chamber, realize the controllable rotation speed and start / stop position of the rotating tray, and can conveniently control the processing process of the wafer.

[0005] In order to achieve the above object, the present application provides the following technical solutions:

[0006] A driving transmission device, comprising:

[0007] A driving shaft, the upper end of the driving shaft is connected to the rotating tray inside the reaction chamber; the lower end of the driving shaft is connected to a driving component arranged outside the reaction chamber, and the driving component drives the driving shaft to drive the rotating tray to rotate.

[0008] Optionally, it further includes a housing hermetically connected to the reaction chamber, the driving shaft is arranged inside the housing, the driving component is arranged outside the housing, and the lower end of the driving shaft transmits torque to the driving component through a magnetic coupling.

[0009] Optionally, the driving shaft can drive the rotating tray to lift inside the reaction chamber.

[0010] Optionally, the housing includes an upper housing and a lower housing, the upper housing is communicated with the reaction chamber; the lower end of the driving shaft is arranged inside the lower housing and is rotatably connected to the lower housing, and the upper end of the driving shaft can be telescopic inside the upper housing.

[0011] Optionally, the upper housing is of a rigid structure and is an integral structure with the reaction chamber. The housing further includes a telescopic middle housing, and the middle housing is disposed between the upper housing and the lower housing.

[0012] Optionally, the lower end of the upper housing and the upper end of the middle housing are connected by a connecting flange, and a sealing ring is disposed between the lower end face of the upper housing and the upper end face of the middle housing.

[0013] Optionally, a driven member of the magnetic coupling is disposed at the bottom of the inner cavity of the lower housing. The driven member is connected to the lower end of the drive shaft. A driving member of the magnetic coupling is further disposed at a position corresponding to the driven member outside the lower housing, and the driving member is connected to the output shaft of the driving component.

[0014] Optionally, a rotating bearing is disposed between the drive shaft and the lower housing, and a heat insulation sleeve is disposed at a portion of the outer periphery of the drive shaft in contact with the rotating bearing and the driven member.

[0015] Optionally, the rotating bearing is a ceramic bearing.

[0016] Optionally, the driven member includes a disk-shaped driven main body. A driven magnetic steel is embedded in an end face of the driven main body close to the bottom of the lower housing. The driven magnetic steels are uniformly distributed in the circumferential direction of the driven main body. The number of the driven magnetic steels is even and the magnetic pole directions of adjacent driven magnetic steels are opposite. There is a gap between the end face of the driven magnetic steel and the inner wall of the lower housing. The driving member includes a disk-shaped driving main body. A driving magnetic steel is embedded in an end face of the driving main body close to the bottom of the lower housing. The driving magnetic steels are uniformly distributed in the circumferential direction of the driving main body. The number of the driving magnetic steels is the same as that of the driven magnetic steels and the magnetic pole directions of adjacent driven magnetic steels are opposite. There is a gap between the end face of the driving magnetic steel and the inner wall of the lower housing.

[0017] Optionally, balls are further embedded in an end face of the driven main body close to the bottom of the lower housing, and the balls abut against the inner wall of the lower housing.

[0018] Optionally, a support shaft is disposed on the inner wall at the bottom of the lower housing, and the driven main body is sleeved on the support shaft and can rotate relative to the support shaft.

[0019] Optionally, a driven fork is disposed on an end face of the driven main body away from the bottom of the lower housing. The driven fork can be inserted into the lower end face of the drive shaft and drive the drive shaft to rotate.

[0020] Optionally, a mounting hole is disposed in the middle of the driving main body, and the output shaft of the motor is inserted into the mounting hole and fixedly connected to the driving main body by bolts.

[0021] Optionally, a dropped object deposition chamber is further provided in the lower housing.

[0022] For the drive transmission device provided by the present application, the drive shaft is driven by a drive component disposed outside the reaction chamber, and then the rotating tray in the reaction chamber is driven. Since the rotation speed and start / stop of the drive component are controllable, the rotation speed and start / stop position of the rotating tray are also controllable. In this way, the problem that the rotating tray lifted and driven by the air flow in the prior art cannot control the rotation speed and start / stop position is solved.

[0023] The present application further provides an epitaxial equipment reaction device, including the drive transmission device, and further including the reaction chamber and the rotating tray.

[0024] For the epitaxial equipment reaction device provided by the present application, by using the drive transmission device of the present application, the controllable rotation speed and start / stop position of the rotating tray are realized, and the processing process of the wafer can be conveniently controlled. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained according to the provided drawings without creative efforts.

[0026] Figure 1 It is a schematic diagram of the rotating tray and its related structures in the reaction chamber in the prior art;

[0027] Figure 2 It is a schematic cross-sectional view of the epitaxial equipment reaction device of the present application;

[0028] Figure 3 It is a schematic cross-sectional view of the drive transmission device of the present application;

[0029] Figure 4 It is a schematic diagram of the magnetic coupling in the present application;

[0030] Figure 5 It is a schematic diagram of the driven member in the present application.

[0031] In Figures 1 - 5 :

[0032] 1. Drive shaft; 2. Housing; 21. Upper housing; 211. Connecting flange; 22. Middle housing; 23. Lower housing; 231. Rotating bearing; 232. Dropped object deposition chamber; 233. Heat insulation sleeve;

[0033] 3. Magnetic coupling; 31. Driving member; 311. Driving main body; 312. Driving magnet; 313. Mounting screw; 314. Coupling housing;

[0034] 32. Driven member; 321. Driven fork; 322. Driven magnet; 323. Sleeve; 324. Ball; 325. Support shaft; 326. Limiting inner ring; 327. Limiting outer ring;

[0035] 4. Motor; 41. Motor output shaft; 5. Connecting member; 6. Rotating tray; 7. Reaction chamber; 81. Air inlet; 82. Air inlet hole; 83. Rotation limiting shaft. Detailed implementation manners

[0036] The present application provides a driving transmission device, which can control the rotation speed and start / stop position of the rotating tray in the reaction chamber.

[0037] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0038] As Figure 1 shown, in the prior art, a rotating tray 6 is provided at the bottom of the inner cavity of the reaction chamber 7. A rotation limiting shaft 83 is provided below the rotating tray 6. The rotation limiting shaft 83 restricts the freedom degree of the rotating tray 6 in the XY axis direction, but does not restrict its lifting in the vertical direction, nor does it restrict the rotation of the rotating tray 6 at a fixed position. An air inlet passage communicating with the inner cavity of the reaction chamber 7 is also provided at the bottom of the reaction chamber 7. During operation, gas is introduced into the air inlet passage from the air inlet 81 of the air inlet passage, and enters the reaction chamber 7 through the air inlet passage and into a plurality of elongated air inlet holes 82 which are circumferentially and uniformly arranged along the rotation limiting shaft 83 and radially distributed on the bottom wall of the reaction chamber 7. These air inlet holes 82 also have an inclination with respect to the plane where the bottom wall of the reaction chamber 7 is located. In this way, multiple airflows ejected from the plurality of air inlet holes 82 can lift the rotating tray 6 and drive the rotating tray 6 to rotate, thereby driving the wafers on the rotating tray 6 to rotate in the reaction chamber 7. Since the gas outlet flow rate in the reaction chamber 7 is much larger than the gas inlet flow rate, the pressure in the reaction chamber 7 is far lower than the atmospheric pressure, forming a relatively high vacuum degree.

[0039] As Figures 2 - 3As shown in the figure, the drive transmission device of the present application includes a vertically arranged drive shaft 1. The upper end of the drive shaft 1 is connected to the rotating tray 6 in the reaction chamber 7 through a connecting member 5. The lower end of the drive shaft 1 extends outside the reaction chamber 7 and is connected to a drive component arranged below the reaction chamber 7. In this embodiment, the drive component is a motor 4. In this way, when the output shaft 41 of the motor rotates, it drives the drive shaft 1 to rotate, and then drives the connecting member 5 and the rotating tray 6 to rotate.

[0040] Since the rotation speed and start / stop of the motor 4 are controllable, therefore, the rotation speed and start / stop position of the rotating tray 6 are also controllable. This solves the problem in the prior art that the rotating tray 6 lifted and driven by the air flow cannot control the rotation speed and start / stop position. Although the motor 4 drive can make the rotation speed and start / stop position of the rotating tray 6 controllable, the motor 4 cannot withstand high temperatures and needs to be arranged outside the reaction chamber 7.

[0041] Optionally, as Figures 2 - 3 shown, the drive transmission device of the present application further includes a housing 2 hermetically connected to the reaction chamber 7. The drive shaft 1 is arranged inside the housing 2, and the motor 4 is arranged outside the housing 2. The drive shaft 1 transmits torque to the motor 4 through a magnetic coupling 3.

[0042] Arranging the motor 4 outside the reaction chamber 7 solves the problem that the motor 4 cannot withstand high temperatures. However, the reaction chamber 7 needs to maintain a relatively vacuum state, and the sealing performance at the connection between the reaction chamber 7 and the drive transmission device and at the connection between the drive transmission device and the motor 4 needs to be ensured. In this embodiment, the drive shaft 1 is arranged inside the housing 2 hermetically connected to the reaction chamber 7, and the motor 4 is arranged outside the sealed housing 2. The motor 4 and the drive shaft 1 do not need to be in direct contact, but the torque transmission between the drive shaft 1 inside the housing 2 and the motor 4 outside the housing 2 is realized through the magnetic connection of the magnetic coupling 3, thereby realizing the conversion of dynamic sealing to static sealing and being able to well ensure the sealing performance between the housing 2 and the reaction chamber 7.

[0043] Optionally, the drive shaft 1 can drive the rotating tray 6 to move up and down in the reaction chamber 7.

[0044] Since the internal structure of the reaction chamber 7 determines that the rotating tray 6 must move up and down to complete the feeding and discharging and subsequent chemical vapor deposition process. The rotating tray 6 has a loading / unloading position and a reaction position. After the loading / unloading is completed, the rotating tray 6 will move to the reaction position and then perform chemical vapor deposition. When the chemical vapor deposition is completed, it will return to the loading / unloading position to perform loading / unloading, and cycle in turn. In the prior art, the lifting of the rotating tray 6 needs to be realized by additional mechanical structures and components. In the present application, the driving shaft 1 itself is used to drive the rotating tray 6 to move up and down in the reaction chamber 7, and there is no need to separately use additional mechanical structures to lift the rotating tray 6.

[0045] Optionally, asFigures 2 - 3 As shown, the housing 2 includes an upper housing 21 and a lower housing 23. The upper housing 21 is in communication with the reaction chamber 7. The lower end of the drive shaft 1 is disposed within the lower housing 23 and is rotatably connected to the lower housing 23. The upper end of the drive shaft 1 can telescopically move within the upper housing 21.

[0046] In order to enable the drive shaft 1 to drive the rotating tray 6 to lift and lower within the reaction chamber 7, the housing 2 that remains sealed relative to the reaction chamber 7 needs to be at least divided into two parts, namely the upper housing 21 and the lower housing 23. The lower end of the drive shaft 1 is installed within the lower housing 23 and is rotatably connected to the lower housing 23. Therefore, some components for supporting and rotating the drive shaft 1 need to be installed within the lower housing 23, such as the rotating bearing 231 and the driven member 32 of the magnetic coupling 3 and other components. And the drive shaft 1 will not generate axial movement relative to the lower housing 23, otherwise the continuous rotation of the drive shaft 1 cannot be achieved; while the upper end of the drive shaft 1 can generate axial movement relative to the upper housing 21, that is, it can telescopically move within the upper housing 21.

[0047] Optionally, as Figures 2 - 3 shown, the upper housing 21 is a rigid structure and is an integral structure with the reaction chamber 7. The housing 2 further includes a telescopic middle housing 22, and the middle housing 22 is disposed between the upper housing 21 and the lower housing 23.

[0048] In order to enable the upper end of the drive shaft 1 to telescopically move within the upper housing 21, the upper housing 21 can be set as a telescopic structure. However, considering that the telescopic upper housing 21 generally uses a relatively soft and low-strength material, it is easy to be damaged, and it is not easy to achieve a sealed connection at the part connected to the reaction chamber 7. Therefore, the upper housing 21 is set as a rigid integral structure with the reaction chamber 7. The upper end of the upper housing 21 extends deep into the cavity of the reaction chamber 7, and the lower end of the upper housing 21 extends outside the reaction chamber 7. The upper housing 21 and the lower housing 23 are connected through the telescopic middle housing 22. Even if the middle housing 22 is damaged, it can be replaced at any time; it is relatively easy to connect the cylindrical upper housing 21 and the cylindrical middle housing 22. In this embodiment, the middle housing 22 can adopt a corrugated pipe.

[0049] In a preferred embodiment, as Figures 2 - 3 shown, the lower end of the upper housing 21 and the upper end of the middle housing 22 are connected through a connecting flange 211. The connecting flange 211 includes an upper flange and a lower flange. A sealing ring is provided between the lower end face of the upper housing 21 and the upper end face of the middle housing 22. The connecting flange 211 can keep the upper housing 21 and the lower housing 23 pressed together, and the sealing ring between the upper housing 21 and the lower housing 23 further improves the sealing performance between the two.

[0050] In a preferred embodiment, as Figures 2 - 3As shown in the figure, the magnetic coupling 3 includes a driving member 31 and a driven member 32. The driven member 32 is arranged at the bottom of the inner cavity of the lower housing 23 and is connected to the lower end of the driving shaft 1. The lower end of the driving shaft 1 is inserted into the driven member 32 and fixedly connected to the driven member 32. The driving member 31 is arranged at a position outside the lower housing 23 corresponding to the driven member 32. An external housing for accommodating the driving member 31 is also arranged outside the lower housing 23, which plays a role in protecting the driving member 31 and preventing it from falling off. The lower housing 23 is a non-magnet, or at least the part of the lower housing 23 between the driving member 31 and the driven member 32 is a non-magnet, so as not to cause an obstacle to the torque transmission between the driving member 31 and the driven member 32. In this way, the motor output shaft 41 is connected to the driving member 31 and drives the driving member 31 to rotate. The driving member 31 outputs torque to the driven member 32 in the lower housing 23 through magnetic force and drives the driven member 32 to rotate, thereby driving the driving shaft 1 to rotate.

[0051] In a preferred embodiment, as Figures 2 - 3 shown, a rotating bearing 231 is arranged between the driving shaft 1 and the lower housing 23, and a heat insulation sleeve 233 is arranged on the part of the outer periphery of the driving shaft 1 in contact with the rotating bearing 231 and the driven member 32.

[0052] Although the distance between the lower end of the driving shaft 1 and the reaction chamber 7 is relatively far, there is still heat transfer. In order to protect the rotating bearing 231 and the driven member 32 and improve their service life, a heat insulation sleeve 233 is arranged on the part of the outer periphery of the driving shaft 1 in contact with the rotating bearing 231 and the driven member 32. By directly contacting the heat insulation sleeve 233 with the rotating bearing 231 and the driven member 32, the damage caused by heat transfer is reduced.

[0053] In a preferred embodiment, since the components in the drive transmission are also easily affected by corrosive gases due to being connected to the reaction chamber 7, the rotating bearing 231 is set as a ceramic bearing resistant to high temperature and corrosion. Correspondingly, the relevant components in the drive transmission are all made of corrosion-resistant materials in terms of materials.

[0054] Specifically, as Figures 3 - 4 shown, the driven member 32 of the magnetic coupling 3 includes a disc-shaped driven main body. A plurality of sector-shaped driven permanent magnets 322 are embedded on the end face of the driven main body close to the bottom of the lower housing 23. The driven permanent magnets 322 are evenly distributed in the circumferential direction of the driven main body, and the lower end faces of the driven permanent magnets 322 protrude from the lower end face of the driven main body, so that the driven permanent magnets 322 are closer to the end face of the bottom of the lower housing 23 and also closer to the gap of the active permanent magnet;

[0055] The number of the driven permanent magnets 322 is even and the magnetic pole directions of adjacent driven permanent magnets 322 are opposite. There is a gap between the end face of the driven permanent magnet 322 and the inner wall of the lower housing 23;

[0056] Similar to the structural arrangement of the follower 32, the driving member 31 includes a disc-shaped driving main body 311. On the end face of the driving main body 311 close to the bottom of the lower housing 23, driving magnets 312 are embedded. The driving magnets 312 are evenly distributed in the circumferential direction of the driving main body 311. The number of driving magnets 312 is the same as that of the driven magnets 322, and the magnetic pole directions of adjacent driven magnets 322 are opposite. There is a gap between the end face of the driving magnet 312 and the inner wall of the lower housing 23.

[0057] Except for the driving magnet and the driven magnets 322, all other components in the driving transmission device are non-magnetic to avoid interference with the two.

[0058] In this way, the driving magnet and the driven magnets 322 are separated by the end face at the bottom of the lower housing 23, but the torque can be transmitted through magnetic force.

[0059] In addition, a coupling housing 314 is provided at the bottom of the lower housing 23. The driving member 31 is arranged in the coupling housing 314, and the inner cavity of the coupling housing 314 is independent of the inner cavity of the driving transmission device.

[0060] As Figure 5 shown, in the circumferential direction of the follower main body, the magnetic poles of the driven magnets 322 are successively SNSNSN. Correspondingly, in the circumferential direction of the driving main body 311, the magnetic poles of the driving magnets are also successively SNSNSN; it is ensured that after the driving magnet 312 and the driven magnets 322 experience circumferential slippage due to an overload torque, they can quickly resume magnetic force coupling transmission.

[0061] In a preferred embodiment, as Figures 4 - 5 shown, in order to better support the follower main body without generating excessive friction, balls 324 are also embedded on the end face of the follower main body close to the bottom of the lower housing 23. The balls 324 can abut against the inner wall of the lower housing 23. When the follower main body rotates relative to the end face at the bottom of the lower housing 23, the balls 324 themselves can roll relative to the follower main body, so that the sliding friction can be converted into rolling friction.

[0062] In a preferred embodiment, a support shaft 325 is provided on the inner wall at the bottom of the lower housing 23. The support shaft 325 is integrally provided with the lower housing 23. The follower main body is sleeved on the support shaft 325 and can rotate relative to the support shaft 325. In this way, the support shaft 325 provides better radial positioning for the follower main body.

[0063] Preferably, as Figures 4 - 5 shown, in order to reduce the friction coefficient between the two, a sleeve 323 is also provided between the support shaft 325 and the follower main body. The balls 324 are embedded on the lower end face of the sleeve 323; the sleeve 323 can rotate relative to the support shaft 325 together with the follower main body;

[0064] Preferably, as Figure 4 shown, a limiting inner ring 326 and a limiting outer ring 327 are further provided on the upper end faces of the support shaft 325 and the sleeve 323 inside the driven main body, so as to better fix the support shaft 325 and the sleeve 323 relative to the driven main body.

[0065] In a preferred embodiment, as Figure 4 shown, in order to better connect and position the driven main body with the driving shaft 1 and prevent displacement and misalignment, on the end face of the driven main body away from the bottom of the lower housing 23, that is Figure 4 on the upper middle end face, a plurality of driven fork 321 are provided. The driven fork 321 are evenly distributed along the circumferential direction of the driven main body. A groove corresponding to the driven fork 321 is provided on the lower end face of the driving shaft 1. The driven fork 321 can be inserted into the groove to drive the driving shaft 1 to rotate.

[0066] In a preferred embodiment, as Figure 4 shown, an installation hole is provided in the middle of the driving main body 311. The motor output shaft 41 is inserted into the installation hole and fixedly connected to the driving main body 311 through installation screws 313. In this way, when the motor output shaft 41 rotates, it can drive the driving main body 311 to rotate, and then transmit the torque to the driven member 32 in the lower housing 23.

[0067] In a preferred embodiment, as Figures 2 - 3 shown, a platform is further provided on the circumference of the driving shaft 1 above the rotating bearing 231 in the lower housing 23. The platform and the inner wall of the lower housing 23 form a dropped object deposition chamber 232. The silicon carbide particles dropped in the reaction chamber 7 in the reaction chamber 7 are likely to drop into the gap of the lower housing 23 at the lower end of the driving shaft 1. The dropped object deposition chamber 232 can guide the particulate matter into it, reducing the damage to the driving shaft 1 by the particulate matter.

[0068] The present application also provides an epitaxial equipment reaction device, including a driving transmission device, and further including a reaction chamber 7 and a rotating tray 6.

[0069] The epitaxial equipment reaction device provided by the present application realizes the controllable rotation speed and start-stop position of the rotating tray 6 by using the driving transmission device of the present application, and can conveniently control the processing process of the wafer.

[0070] The basic principle of the present application is described above in combination with specific embodiments. However, it should be noted that the advantages, advantages, effects, etc. mentioned in the present application are only examples and not limitations. It cannot be considered that these advantages, advantages, effects, etc. are essential for each embodiment of the present application. In addition, the above-disclosed specific details are only for the purpose of illustration and easy understanding, rather than limitations. The above details do not limit the present application to necessarily adopt the above specific details to implement.

[0071] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any way. Words such as "including", "comprising", "having", etc. are open-ended terms, meaning "including but not limited to", and can be used interchangeably with each other. The word "or" and "and" used herein refer to the word "or" and can be used interchangeably with each other, unless the context clearly indicates otherwise. The phrase "such as" used herein refers to the phrase "such as but not limited to" and can be used interchangeably with each other.

[0072] It should also be noted that in the devices, equipment, and methods of this application, each component or each step can be decomposed or recombined. These decompositions or recombinations should be regarded as equivalent solutions of this application.

[0073] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to the broadest scope consistent with the principles and novel features disclosed herein.

[0074] It should be understood that the qualifiers "first", "second", "third", "fourth", "fifth", and "sixth" used in the description of the embodiments of this application are only for more clearly elaborating the technical solutions and cannot be used to limit the protection scope of this application.

[0075] The above description has been given for purposes of illustration and description. In addition, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions, and sub-combinations thereof.

Claims

1. A driving transmission device, characterized in that, Comprising: A drive shaft, the upper end of the drive shaft is connected to a rotating tray inside the reaction chamber; the lower end of the drive shaft is connected to a drive component arranged outside the reaction chamber, and the drive component drives the drive shaft to drive the rotating tray to rotate. A housing hermetically connected to the reaction chamber, the drive shaft is arranged inside the housing, the drive component is arranged outside the housing, and the lower end of the drive shaft transmits torque to the drive component through a magnetic coupling. The drive shaft can drive the rotating tray to lift and lower inside the reaction chamber. The housing includes an upper housing and a lower housing, the upper housing is communicated with the reaction chamber; the lower end of the drive shaft is arranged inside the lower housing and is rotatably connected to the lower housing, and the upper end of the drive shaft can telescopically move inside the upper housing. The upper housing is of a rigid structure and is an integral structure with the reaction chamber, and the housing further includes a telescopic middle housing, and the middle housing is arranged between the upper housing and the lower housing. The lower end of the upper housing and the upper end of the middle housing are connected by a connecting flange, and a sealing ring is arranged between the lower end face of the upper housing and the upper end face of the middle housing.

2. The driving transmission device according to claim 1, characterized in that, The bottom of the inner cavity of the lower housing is provided with a driven part of the magnetic coupling, the driven part is connected to the lower end of the drive shaft, and a driving part of the magnetic coupling is also arranged at a position corresponding to the driven part outside the lower housing, and the driving part is connected to the output shaft of the drive component.

3. The driving transmission device according to claim 2, characterized in that, A rotating bearing is arranged between the drive shaft and the lower housing, and a heat insulation sleeve is arranged on the part of the outer circumference of the drive shaft in contact with the rotating bearing and the driven part.

4. The driving transmission device according to claim 3, characterized in that, The rotating bearing is a ceramic bearing.

5. The driving transmission device according to claim 2, characterized in that, The driven part includes a disc-shaped driven main body, and driven magnetic steels are embedded on the end face of the driven main body close to the bottom of the lower housing, the driven magnetic steels are evenly distributed in the circumferential direction of the driven main body, the number of the driven magnetic steels is even and the adjacent driven magnetic steels have opposite pole directions, and there is a gap between the end face of the driven magnetic steel and the inner wall of the lower housing; the driving part includes a disc-shaped driving main body, and driving magnetic steels are embedded on the end face of the driving main body close to the bottom of the lower housing, the driving magnetic steels are evenly distributed in the circumferential direction of the driving main body, the number of the driving magnetic steels is the same as the number of the driven magnetic steels and the adjacent driven magnetic steels have opposite pole directions, and there is a gap between the end face of the driving magnetic steel and the inner wall of the lower housing.

6. The driving transmission device according to claim 5, characterized in that, Ball bearings are also embedded on the end face of the driven main body close to the bottom of the lower housing, and the ball bearings abut against the inner wall of the lower housing.

7. The driving transmission device according to claim 5, characterized in that, A support shaft is arranged on the inner wall of the bottom of the lower housing, and the driven main body is sleeved on the support shaft and can rotate relative to the support shaft.

8. The driving transmission device according to claim 5, characterized in that, A driven fork is arranged on the end face of the driven main body away from the bottom of the lower housing, and the driven fork can be inserted into the lower end face of the drive shaft and drive the drive shaft to rotate.

9. The driving transmission device according to claim 5, characterized in that, An installation hole is arranged in the middle of the driving main body, and the output shaft of the motor is inserted into the installation hole and is fixedly connected to the driving main body through bolts.

10. The driving transmission device according to claim 1, characterized in that, A deposition chamber for falling objects is also arranged inside the lower housing.

11. An epitaxial equipment reaction device, including the driving transmission device according to any one of claims 1-10, characterized in that, It further includes the reaction chamber and the rotating tray.

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