Foil throttling self-adapting static pressure air floating thrust bearing

Abstract

A foil throttling self-adaptive static pressure gas floating thrust bearing, which comprises a spring seat (1), a bearing base (2), a foil self-adaptive assembly (3) and a flat foil (4), wherein the foil self-adaptive assembly (3) comprises a spring (31), a piston (32) and a gas pipe quick connector (33), characterized in that the bearing base (2) is a hollow cylinder, the spring seat (1) is installed on the upper surface of the bearing base (2), the flat foil (4) is installed on the lower surface of the bearing base (2), and the foil self-adaptive assembly (3) is located inside the bearing base (2), wherein the piston (32) is installed on the upper surface of the flat foil (4), the spring (31) is located on the upper surface of the piston (32), and the gas pipe quick connector (33) is installed on the upper surface of the piston (32). The foil throttling static pressure gas floating thrust bearing has superior micro-vibration suppression performance and a longer service life.

Description

Technical fields:

[0001] This invention belongs to the field of air bearings, specifically relating to a foil-throttling adaptive hydrostatic air bearing for thrust bearings. Background technology:

[0002] Hydrostatic air-bearing thrust bearings utilize the hydrostatic effect created by external gas at a certain pressure entering the bearing clearance through a throttle to form a pressure air film that supports external loads. Compared to traditional bearings, hydrostatic air-bearing thrust bearings have outstanding advantages such as zero or extremely low friction, long service life, cleanliness and pollution-free operation, and resistance to high and low temperatures. They are widely used in equipment requiring high motion precision. As the precision of precision measuring instruments and ultra-precision machining equipment develops towards the nanometer level, the micrometer-level vibration of hydrostatic air-bearing thrust bearings, as key load-bearing components in these instruments, can significantly affect their performance.

[0003] The introduction of equalizing grooves can improve the load-bearing capacity of hydrostatic air-bearing thrust bearings, but it can also cause nonlinear micro-amplitude self-excited vibrations in the air-bearing bearings. Studies by scholars at home and abroad have found that structural parameters such as the cross-sectional shape and depth of the equalizing groove have a significant impact on the micron-level vibration of hydrostatic air-bearing thrust bearings. For example, reducing the inclination angle of the vertical wall of the equalizing groove can effectively suppress the generation of cyclones and reduce the micro-vibrations of the hydrostatic air-bearing bearings. However, once the equalizing groove structure of the hydrostatic air-bearing thrust bearing is completed, its structural parameters cannot be changed according to the operating conditions and bearing performance requirements.

[0004] The foil structure has adaptive characteristics, and the shape and depth of the equalizing groove can be adjusted by the deformation of the foil itself, thereby improving the load-bearing capacity and stability of the hydrostatic air-bearing thrust bearing. Summary of the Invention:

[0005] The purpose of this invention is to provide a foil-throttling adaptive hydrostatic air-bearing thrust bearing, which can make the flat foil adaptively deform according to the working conditions, structure and other requirements through the foil adaptive component, especially to suppress the micro-vibration of the hydrostatic air-bearing thrust bearing and improve the load-bearing capacity and stability of the hydrostatic air-bearing thrust bearing.

[0006] To achieve the objectives of this invention, the following technical solution is proposed:

[0007] A foil-type adaptive hydrostatic air-bearing thrust bearing includes: a spring seat (1), a bearing base (2), a foil adaptive assembly (3), and a flat foil (4). The foil adaptive assembly (3) includes a spring (31), a piston (32), and a quick-connect fitting (33) for an air tube. The bearing base (2) is a hollow cylinder. The spring seat (1) is mounted on the upper surface of the bearing base (2), and the flat foil (4) is mounted on the lower surface of the bearing base (2). The foil adaptive assembly (3) is located inside the bearing base (2). The foil adaptive assembly (3) is characterized in that the piston (32) is mounted on the upper surface of the flat foil (4), the spring (31) is located on the upper surface of the piston (32), and the quick-connect fitting (33) for an air tube is mounted on the upper surface of the piston (32).

[0008] Furthermore, the spring seat (1) and the bearing base (2) are installed by bolts.

[0009] Furthermore, the flat foil (4) and the bearing base (2) are installed by welding or by strong adhesive.

[0010] Furthermore, the piston (32) and the flat foil (4) are installed by welding or by strong adhesive.

[0011] Furthermore, the flat foil (4) is a cylinder, the diameter D3 of the flat foil (4) is less than or equal to the outer diameter D1 of the bearing base (2), the diameter D3 of the flat foil (4) is greater than the inner diameter D2 of the bearing base (2), and the height h1 of the flat foil (4) is 0.1~2mm.

[0012] Furthermore, the flat foil (4) has a cylindrical hole (41) at its center, the diameter of the cylindrical hole (41) is d1 = 0.05~0.3mm, and the height of the cylindrical hole (41) is equal to the height h1 of the flat foil (4).

[0013] Furthermore, the piston (32) is a cylinder, the diameter of the piston (32) is D4 = D2 - δD, δD = 0.1 ~ 0.4 mm, and the height h3 of the piston (32) is less than the height h2 of the bearing base (2).

[0014] Furthermore, the piston (32) has a cylindrical hole (321) at the center of its lower end and a threaded hole (322) at its upper end. The cylindrical hole (321) and the threaded hole (322) are connected. The diameter of the cylindrical hole (321) is d1. The height of the cylindrical hole (321) is h4 = 0.1~3mm. The sum of the height h4 of the cylindrical hole (321) and the height h5 of the threaded hole (322) is equal to the height h3 of the piston (32). The diameter of the threaded hole (322) is greater than the diameter of the cylindrical hole (321).

[0015] Furthermore, the spring seat (1) is a hollow cylinder, the outer diameter D5 of the spring seat (1) is less than or equal to the outer diameter D1 of the bearing base (2), and the inner diameter D6 of the spring seat (1) is less than the diameter D4 of the piston (32).

[0016] Furthermore, the quick-connect fitting (33) is installed in the threaded hole (322) at the upper end of the piston, and the outer diameter d2 of the quick-connect fitting (33) is smaller than the inner diameter D6 of the spring seat (1).

[0017] Furthermore, the spring (31) can be a plurality of small springs or a large spring.

[0018] Furthermore, the plurality of small springs (31) are evenly distributed circumferentially on the upper surface of the piston (32).

[0019] Furthermore, the large spring (311) is located at the center of the upper surface of the piston (32), the inner diameter d3 of the large spring (311) is greater than the outer diameter d2 of the quick-connect fitting (33) of the air pipe, and the outer diameter d4 of the large spring (311) is less than or equal to the diameter D4 of the piston (32).

[0020] Features of this invention:

[0021] This invention provides a foil-type throttling adaptive hydrostatic air-bearing thrust bearing. In the foil adaptive assembly, a spring is used as an elastic support, enabling the flat foil to adapt to changes in film pressure. The flat foil can deform accordingly, affecting the redistribution of film pressure. The interaction between foil deformation and film pressure change achieves a dynamic equilibrium, thereby improving the stability of the foil-type throttling hydrostatic air-bearing thrust bearing. Furthermore, the deformation of the flat foil generates elastic damping from the foil itself, the spring itself, and Coulomb friction damping between the foil and the piston, and between the piston and the quick-connect fitting of the air tube. These damping effects effectively absorb the eddy energy of the gas within the film, suppressing self-excited vibration of the film, further enhancing the stability of the foil-type throttling hydrostatic air-bearing thrust bearing. Compared to existing simple orifice throttling hydrostatic air-bearing thrust bearings, the foil-type throttling hydrostatic air-bearing thrust bearing exhibits superior micro-vibration suppression performance and a longer service life. Attached image description:

[0022] Figure 1 This is a cross-sectional view of the spring of the present invention when it consists of multiple small springs, wherein, Figure 1 (a) Mark the serial number above, Figure 1 (b) Mark the dimensions;

[0023] Figure 2 This is a partially enlarged cross-sectional view of the present invention when the spring is a plurality of small springs;

[0024] Figure 3This is a cross-sectional view of the spring in this invention when it is a large spring.

[0025] 1-Spring seat, 2-Bearing base, 3-Foil self-adaptive assembly, 4-Flat foil, 31-Spring, 32-Piston, 33-Quick-connector for air tube, 311-Large spring, 321-Cylindrical hole in the center of piston, 322-Threaded hole in the center of piston, 41-Cylindrical hole in the center of flat foil. Detailed implementation method:

[0026] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments. The illustrative embodiments and descriptions are only used to explain the present invention and are not intended to unduly limit the present invention.

[0027] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0028] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0029] For ease of description, spatial relative terms such as "above," "over," "on the upper surface," "above," "upper end," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "above" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0030] Example 1, refer to Figure 1 and Figure 2 .

[0031] A foil-type throttling adaptive hydrostatic air-float thrust bearing, comprising

[0032] The package includes a spring seat (1), a bearing base (2), a foil adaptive assembly (3), and a flat foil (4). The foil adaptive assembly (3) includes a spring (31), a piston (32), and a quick-connect tubing connector (33). The bearing base (2) is a hollow cylinder. The spring seat (1) is mounted on the upper surface of the bearing base (2). The flat foil (4) is mounted on the lower surface of the bearing base (2). The foil adaptive assembly (3) is located inside the bearing base (2). The foil adaptive assembly (3) is characterized in that the piston (32) is mounted on the upper surface of the flat foil (4), the spring (31) is located on the upper surface of the piston (32), and the quick-connect tubing connector (33) is mounted on the upper surface of the piston (32).

[0033] The spring seat (1) and the bearing base (2) are installed by bolts.

[0034] The flat foil (4) is installed to the bearing base (2) by welding or by strong adhesive.

[0035] The piston (32) and the flat foil (4) are installed by welding or by strong adhesive.

[0036] The flat foil (4) is a cylinder. The diameter D3 of the flat foil (4) is less than or equal to the outer diameter D1 of the bearing base (2). The diameter D3 of the flat foil (4) is greater than the inner diameter D2 of the bearing base (2). The height h1 of the flat foil (4) is 0.1-2 mm.

[0037] The flat foil (4) has a cylindrical hole (41) in the center. The diameter of the cylindrical hole (41) is d1 = 0.05~0.3mm, and the height of the cylindrical hole (41) is equal to the height h1 of the flat foil (4).

[0038] The piston (32) is a cylinder with a diameter D4 = D2 - δD, where δD = 0.1 to 0.4 mm. The height h3 of the piston (32) is less than the height h2 of the bearing base (2).

[0039] The piston (32) has a cylindrical hole (321) at the center of its lower end and a threaded hole (322) at its upper end. The cylindrical hole (321) and the threaded hole (322) are connected. The diameter of the cylindrical hole (321) is d1. The height of the cylindrical hole (321) is h4 = 0.1~3mm. The sum of the height h4 of the cylindrical hole (321) and the height h5 of the threaded hole (322) is equal to the height h3 of the piston (32). The diameter of the threaded hole (322) is greater than the diameter of the cylindrical hole (321).

[0040] The spring seat (1) is a hollow cylinder. The outer diameter D5 of the spring seat (1) is less than or equal to the outer diameter D1 of the bearing base (2). The inner diameter D6 of the spring seat (1) is less than the diameter D4 of the piston (32).

[0041] The quick-connector (33) is installed in the threaded hole (322) at the upper end of the piston. The outer diameter d2 of the quick-connector (33) is smaller than the inner diameter D6 of the spring seat (1).

[0042] The spring (31) is a plurality of small springs.

[0043] The plurality of small springs (31) are evenly distributed circumferentially on the upper surface of the piston (32).

[0044] Compared with existing simple small-hole throttling static pressure air-floating thrust bearings, the foil throttling static pressure air-floating thrust bearing has superior performance in suppressing micro-vibrations and a longer service life.

[0045] In some embodiments, reference is made to Figure 3 The spring (31) is a large spring (311). The large spring (311) is located at the center of the upper surface of the piston (32). The inner diameter d3 of the large spring is greater than the outer diameter d2 of the quick-connect fitting for the air pipe, and the outer diameter d4 of the large spring is less than or equal to the diameter D4 of the piston (32).

[0046] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A foil-type throttling adaptive hydrostatic air-float thrust bearing, comprising: A spring seat (1), a bearing base (2), a foil adaptive assembly (3), and a flat foil (4) are provided. The foil adaptive assembly (3) includes a spring (31), a piston (32), and a quick-connect tubing connector (33). The bearing base (2) is a hollow cylinder. The spring seat (1) is installed on the upper surface of the bearing base (2). The flat foil (4) is installed on the lower surface of the bearing base (2). The foil adaptive assembly (3) is located inside the bearing base (2). The foil adaptive assembly (3) is characterized in that the piston (32) is installed on the upper surface of the flat foil (4). The spring (31) is located on the upper surface of the piston (32). The quick-connect tubing connector (33) is installed on the upper surface of the piston (32).

2. The foil-type throttling adaptive hydrostatic air-float thrust bearing according to claim 1, characterized in that: The spring seat (1) and the bearing base (2) are installed by bolts.

3. The foil-type throttling adaptive hydrostatic air-float thrust bearing according to claim 1, characterized in that: The flat foil (4) is installed to the bearing base (2) by welding or by strong adhesive.

4. The foil-type throttling adaptive hydrostatic air-float thrust bearing according to claim 1, characterized in that: The piston (32) and the flat foil (4) are installed by welding or by strong adhesive.

5. The foil-type throttling adaptive hydrostatic air-float thrust bearing according to claim 1, characterized in that: The flat foil (4) is a cylinder. The diameter D3 of the flat foil (4) is less than or equal to the outer diameter D1 of the bearing base (2). The diameter D3 of the flat foil (4) is greater than the inner diameter D2 of the bearing base (2). The height h1 of the flat foil (4) is 0.1~2mm.

6. The foil-type throttling adaptive hydrostatic air-float thrust bearing according to claim 5, characterized in that: The flat foil (4) has a cylindrical hole (41) in the center. The diameter of the cylindrical hole (41) is d1 = 0.05~0.3mm, and the height of the cylindrical hole (41) is equal to the height h1 of the flat foil (4).

7. The foil-type throttling adaptive hydrostatic air-float thrust bearing according to claim 1, characterized in that: The piston (32) is a cylinder with a diameter D4 = D2 - δD, where δD = 0.1~0.4 mm. The height h3 of the piston (32) is less than the height h2 of the bearing base (2).

8. A foil-type throttling adaptive hydrostatic air-float thrust bearing according to claim 7, characterized in that: The piston (32) has a cylindrical hole (321) at the center of its lower end and a threaded hole (322) at its upper end. The cylindrical hole (321) and the threaded hole (322) are connected. The diameter of the cylindrical hole (321) is d1. The height of the cylindrical hole (321) is h4 = 0.1~3mm. The sum of the height h4 of the cylindrical hole (321) and the height h5 of the threaded hole (322) is equal to the height h3 of the piston (32). The diameter of the threaded hole (322) is greater than the diameter of the cylindrical hole (321).

9. A foil-type throttling adaptive hydrostatic air-float thrust bearing according to claim 1, characterized in that: The spring seat (1) is a hollow cylinder. The outer diameter D5 of the spring seat (1) is less than or equal to the outer diameter D1 of the bearing base (2). The inner diameter D6 of the spring seat (1) is less than the diameter D4 of the piston (32).

10. A foil-type throttling adaptive hydrostatic air-float thrust bearing according to claim 8 or claim 9, characterized in that: The quick-connector (33) is installed in the threaded hole (322) at the upper end of the piston. The outer diameter d2 of the quick-connector (33) is smaller than the inner diameter D6 of the spring seat (1).

11. A foil-type throttling adaptive hydrostatic air-float thrust bearing according to claim 1, characterized in that: The spring (31) can be a plurality of small springs or a large spring.

12. A foil-type throttling adaptive hydrostatic air-float thrust bearing according to claim 11, characterized in that: The plurality of small springs (31) are evenly distributed circumferentially on the upper surface of the piston (32).

13. A foil-type throttling adaptive hydrostatic air-float thrust bearing according to claim 11, characterized in that: The large spring (311) is located at the center of the upper surface of the piston (32). The inner diameter d3 of the large spring (311) is greater than the outer diameter d2 of the quick-connect fitting (33) of the air pipe. The outer diameter d4 of the large spring (311) is less than or equal to the diameter D4 of the piston (32).

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