Parallel hvpe filtration device

Abstract

The application discloses a parallel HVPE filtering device. The parallel HVPE filtering device comprises at least two filtering units and at least two connecting pipelines. The at least two filtering units comprise a first filtering unit and a second filtering unit. The first filtering unit comprises a first container and a first filtering mechanism. The first container has a first cavity, and the first filtering mechanism is arranged in the first cavity. An air inlet and a first air outlet are arranged on the first container. The second filtering unit comprises a second container and a second filtering mechanism. The second container has a second cavity, and the second filtering mechanism is arranged in the second cavity. The at least two connecting pipelines comprise a first connecting pipeline and a second connecting pipeline. The first connecting pipeline and the second connecting pipeline are communicated with the first cavity and the second cavity respectively. An overall air outlet is arranged on the second connecting pipeline. The application can realize self-classification collection of gallium-containing ammonium chloride and ammonium chloride, and can better cool and solidify the gallium-containing ammonium chloride gas.

Description

Technical Field

[0001] This invention belongs to the field of exhaust gas filtration technology, and specifically relates to a parallel HVPE filtration device. Background Technology

[0002] The main principle of HVPE (Hydride Vapor Phase Epitaxy) for growing nitrides is as follows: using metallic gallium as a group III gallium source, ammonia (NH3) as a group V nitrogen source, and hydrogen chloride (HCl) as a reactant gas, the nitrides react with the metallic gallium in the gallium boat under the transport of a carrier gas (hydrogen or nitrogen) to generate gallium chloride (GaCl3). The nitrides are then transported above the substrate by the carrier gas and react with NH3 to generate GaN, which is then deposited on the substrate.

[0003] Hydride vapor phase epitaxy (HVPE) equipment is used in compound growth processes. It is mainly used to epitaxially grow a thick film or crystal such as GaAs or GaN on the substrate surface in a high-temperature environment by passing hydride gases such as H2 and HCl. The side reaction produces a large amount of NH4Cl powder, which is discharged from the exhaust port. This causes the air inlet of the filter element in the existing design to become blocked, and the filtration capacity quickly reaches saturation. The current solution is to frequently replace the filter in the exhaust gas system. This affects the production capacity of HVPE, reduces the gallium mobility of HVPE, and increases the operating cost of the equipment. Summary of the Invention

[0004] The main objective of this invention is to provide a parallel HVPE filtration device, thereby overcoming the shortcomings of the prior art.

[0005] To achieve the aforementioned objectives, the technical solution adopted by this invention includes:

[0006] This invention provides a parallel HVPE filter device, comprising:

[0007] At least two filtration units, including a first filtration unit and a second filtration unit, wherein the first filtration unit includes a first container and a first filtration mechanism, the first container has a first chamber inside, the first filtration mechanism is disposed in the first chamber, and the first container has an air inlet communicating with the first chamber; the second filtration unit includes a second container and a second filtration mechanism, the second container has a second chamber inside, and the second filtration mechanism is disposed in the second chamber.

[0008] At least two connecting pipes, including a first connecting pipe and a second connecting pipe, wherein the first connecting pipe is connected to the first chamber and the second chamber respectively; the second connecting pipe is connected to the first chamber and the second chamber respectively, and a total air outlet is provided on the second connecting pipe; the first connecting pipe and the second connecting pipe are spaced apart along the direction of gravity.

[0009] Furthermore, the first container is provided with a first air outlet communicating with the first chamber, and the second container is provided with a second air outlet communicating with the second chamber. The second connecting pipe is connected to the first air outlet and the second air outlet respectively.

[0010] When the ammonium chloride mixture (including gallium-containing sodium chloride gas and pure ammonium chloride gas) enters the first filtration unit through the inlet, the pure ammonium chloride gas, due to its lower density and the suction effect of the second outlet, travels through the first connecting pipe to the second filtration unit, where it cools and solidifies into powder, falling onto the second filtration mechanism. The gallium-containing ammonium chloride gas, due to its higher density and the suction effect of the first outlet, quickly reaches the bottom of the first filtration unit. However, due to the suction effect of the second outlet, some of the gallium-containing ammonium chloride gas flows back towards the second filtration unit. The two airflows intertwine to form a cyclone, thus lengthening the path of the gallium-containing ammonium chloride gas, allowing for better cooling and solidification into powder, which falls onto the first filtration mechanism within the first filtration unit. Furthermore, since the gallium-containing ammonium chloride solid is collected on the first filtration mechanism and the pure ammonium chloride solid is collected on the second filtration mechanism, this achieves graded collection of the gallium-containing ammonium chloride solid and the pure ammonium chloride solid.

[0011] Furthermore, the first chamber includes a first top portion near the top end face of the first container and a first bottom portion near the bottom end face of the first container, the first filter mechanism is disposed in the first bottom portion, the air inlet is directly connected to the first top portion, and the first air outlet is directly connected to the first bottom portion.

[0012] The second chamber includes a second top portion near the top end face of the second container and a second bottom portion near the bottom end face of the second container. The second filter mechanism is disposed in the second bottom portion. The second air outlet is directly connected to the second bottom portion. The first connecting pipe is connected to the first top portion and the second top portion respectively. The top end face and the bottom end face are arranged opposite each other along the direction of gravity.

[0013] Furthermore, the air inlet is located on the top end face of the first container.

[0014] Furthermore, the first air outlet and the second air outlet are located on the same horizontal plane.

[0015] Furthermore, the first container is provided with a first connection port, which is connected to the first chamber, and the second container is provided with a second connection port, which is connected to the second chamber. The two ends of the first connecting pipe are respectively connected to the first connection port and the second connection port, wherein the first connection port is directly connected to the first top part, and the second connection port is directly connected to the second top part.

[0016] Furthermore, the first connection port and the second connection port are located on the same horizontal plane.

[0017] Furthermore, the inner diameter of the first connecting pipe is greater than 45mm.

[0018] Furthermore, the first connection port, the second connection port, the first air outlet, and the second air outlet have the same diameter.

[0019] Furthermore, the first filter mechanism fills the first bottom portion, and the first air outlet is covered by the first filter mechanism.

[0020] Furthermore, the second filter mechanism fills the second bottom portion, and the second air outlet is covered by the second filter mechanism.

[0021] Furthermore, a first support mechanism is provided at the bottom of the first chamber, the first filter mechanism is disposed on the first support mechanism, a first gap is formed between the first filter mechanism and the bottom of the first chamber, and the first air outlet is directly connected to the first gap.

[0022] Furthermore, a second support mechanism is provided at the bottom of the second chamber, and the second filter mechanism is disposed on the second support mechanism. A second gap is formed between the second filter mechanism and the bottom of the second chamber, and the second air outlet is directly connected to the second gap.

[0023] Furthermore, the first filtration mechanism and the second filtration mechanism are arranged on the same horizontal plane.

[0024] Furthermore, the first chamber and the second chamber have the same volume.

[0025] Furthermore, the depth of the first chamber and the second chamber is greater than or equal to 600 mm.

[0026] Furthermore, the first filtration mechanism and the second filtration mechanism have the same volume.

[0027] Furthermore, the first filtration mechanism and / or the second filtration mechanism includes a filter screen.

[0028] Compared with the prior art, the advantages of the present invention include: the parallel HVPE filter device provided by the present invention can realize the self-classified collection of gallium-containing ammonium chloride and ammonium chloride, can better cool and solidify gallium-containing ammonium chloride gas, and avoid the use of water cooling or extended filter devices. Moreover, it can effectively prevent the problem of filter blockage caused by the mixing of gallium-containing ammonium chloride gas and ammonium chloride gas, eliminating the need for frequent filter replacement, which helps to increase the production capacity of HVPE, improve the gallium utilization rate of HVPE, and reduce the operating cost of the equipment. In addition, compared with using a single filter unit, the present invention can reduce the number of times the parallel HVPE filter device is cleaned in the same amount of time, thus reducing cleaning costs. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of a parallel HVPE filter device provided in a typical embodiment of the present invention;

[0031] Figure 2 This is a schematic diagram of another parallel HVPE filter device provided in a typical embodiment of the present invention;

[0032] Figure 3 This is a schematic diagram of the airflow inside a parallel HVPE filter device provided in a typical embodiment of the present invention. Detailed Implementation

[0033] In view of the shortcomings of the prior art, the inventors of this invention, through long-term research and extensive practice, have proposed the technical solution of this invention. The following will further explain and illustrate the technical solution, its implementation process, and its principles in conjunction with the accompanying drawings and specific embodiments. It should be noted that the embodiments of this invention are mainly used to explain and illustrate the structural composition and working principle of a parallel HVPE filter device. Unless otherwise specified, all components constituting this parallel HVPE filter device are known to those skilled in the art and can be obtained commercially or processed using conventional processes known to those skilled in the art. Therefore, their specific materials, dimensions, etc., are not limited here.

[0034] This invention provides a parallel HVPE filtration device, comprising: at least two filtration units and at least two connecting pipes; the at least two filtration units include a first filtration unit and a second filtration unit; the first filtration unit includes a first container and a first filtration mechanism; the first container has a first chamber, and the first filtration mechanism is disposed within the first chamber; the first container has an air inlet and a first air outlet; the second filtration unit includes a second container and a second filtration mechanism; the second container has a second chamber, and the second filtration mechanism is disposed within the second chamber; the at least two connecting pipes include a first connecting pipe and a second connecting pipe, both of which are respectively connected to the first chamber and the second chamber, and the second connecting pipe has a main air outlet.

[0035] In another embodiment, in addition to the first and second filter units, at least two filter units also include at least one third filter unit. The third filter unit is connected to the first or third filter unit via a connecting pipe. Multiple third filter units can also be connected sequentially via connecting pipes. The structure of the third filter unit is the same as that of the first or second filter unit. It should be noted that the first, second, and third filter units are connected via a first and a second connecting pipe. The first and second connecting pipes are arranged in pairs, and the connection positions and connection structures of the first and second connecting pipes with the first, second, and third filter units are the same.

[0036] It should be noted that the parallel HVPE filter device formed by two filter units and two connecting pipes can achieve the effect of reducing the occurrence of clogging problems. The following uses the basic scheme of the parallel HVPE filter device, which includes two filter units and two connecting pipes, as an example to specifically illustrate the specific scheme of the parallel HVPE filter device provided by the present invention.

[0037] Please see Figure 1 In a typical implementation case, the parallel HVPE filter device includes a first filter unit and a second filter unit. The first filter unit and the second filter unit are connected and connected via a first connecting pipe 410 and a second connecting pipe 420, respectively. The air inlet 120 of the parallel HVPE filter device is located on the first filter unit, and the total air outlet 421 is located on the second connecting pipe 420. The suction mechanism is connected to the total air outlet 421. The suction speed provided by the suction mechanism can be 3.6cfm-6.2cfm. When the suction mechanism is working, part of the airflow entering through the air inlet 120 passes through the first filter unit and the second connecting pipe 420 and is discharged from the total air outlet 421. The other part passes through the first filter unit, the first connecting pipe 410, and the second filter unit in sequence and is discharged from the total air outlet 421.

[0038] Specifically, the first filtration unit includes a first container 100 and a first filtration mechanism 310. The first container 100 has a first chamber 110 inside, and the first filtration mechanism 310 is disposed in the first chamber 110. The second filtration unit includes a second container 200 and a second filtration mechanism 320. The second container 200 has a second chamber 210 inside, and the second filtration mechanism 320 is disposed in the second chamber 210. The first container 100 and the second container 200 are connected by a first connecting pipe 410 and a second connecting pipe 420, respectively. The first chamber 110 and the second chamber 210 are connected by a first connecting pipe 410 and a second connecting pipe 420, respectively. The first connecting pipe 410 and the second connecting pipe 420 are spaced apart along the direction of gravity, and the first connecting pipe 410 is located above the second connecting pipe 420.

[0039] Specifically, the first chamber 110 and the second chamber 210 have the same shape and volume. As a preferred option, the first container 100 and the second container 200 can also have the same shape and volume.

[0040] Specifically, the first container 100 is provided with an air inlet 120, a first air outlet 130 and a first connection port 140 communicating with the first chamber 110, and the second container 200 is provided with a second connection port 230 and a second air outlet 220 communicating with the second chamber 210. The first connecting pipe 410 is connected to the first connecting port 140 and the second connecting port 230 respectively, and the second connecting pipe 420 is connected to the first air outlet 130 and the second air outlet 220 respectively.

[0041] Specifically, the first chamber 110 includes a first top portion near the top end face of the first container 100 and a first bottom portion near the bottom end face of the first container 100. The first filter mechanism 310 is disposed in the first bottom portion. The air inlet 120 is disposed on the top end face and directly communicates with the first top portion. The first connection port 140 and the first air outlet 130 are disposed on the side of the first container 100. The first connection port 140 directly communicates with the first top portion, and the first air outlet 130 directly communicates with the first bottom portion. In contrast, the second chamber 210 includes a second top portion near the top end face of the second container 200 and a second bottom portion near the bottom end face of the second container 200. The second filter mechanism 320 is disposed in the second bottom portion. The second connection port 230 and the second air outlet 220 are disposed on the side of the second container 200. The second connection port 230 directly communicates with the second top portion, and the second air outlet 220 directly communicates with the second bottom portion. The top and bottom end faces of the first container 100 and the second container 200 are arranged opposite each other along the direction of gravity.

[0042] Specifically, the first container 100 and the second container 200 are arranged on the same horizontal plane; more specifically, the first air outlet 130 and the second air outlet 220 are located on the same horizontal plane; more specifically, the first connection port 140 and the second connection port 230 are located on the same horizontal plane; more specifically, the first filter mechanism 310 and the second filter mechanism 320 are arranged on the same horizontal plane.

[0043] Furthermore, the diameters of the first connection port 140, the second connection port 230, the first air outlet 130, and the second air outlet 220 are the same.

[0044] Specifically, such as Figure 1 As shown, the first filter mechanism 310 can fill the first bottom portion, and the first air outlet 130 is covered by the first filter mechanism 310; the second filter mechanism 320 can fill the second bottom portion, and the second air outlet 220 is covered by the second filter mechanism 320.

[0045] In other implementations, such as Figure 2 As shown, a first support mechanism is provided at the bottom of the first chamber 110, and a first filter mechanism 310 is provided on the first support mechanism. A first gap is formed between the first filter mechanism 310 and the bottom of the first chamber 110, and the first air outlet 130 is directly connected to the first gap. A second support mechanism is provided at the bottom of the second chamber 210, and a second filter mechanism 320 is provided on the second support mechanism. A second gap is formed between the second filter mechanism 320 and the bottom of the second chamber 210, and the second air outlet 220 is directly connected to the second gap.

[0046] It should be noted that the first support mechanism is used to support and fix the first filter mechanism 310, but will not interfere with the filtering function of the first filter mechanism 310. The first support mechanism can be fixed to the side wall or bottom of the first chamber 110. For example, the first support mechanism can be a support frame, etc. Correspondingly, the second support mechanism can also be a support frame, etc.

[0047] Specifically, the first chamber 110 and the second chamber 210 have the same volume, and the depth of the first chamber 110 and the second chamber 210 is greater than or equal to 600 mm; more specifically, the first filter mechanism 310 and the second filter mechanism 320 have the same volume. For example, the first filter mechanism 310 and the second filter mechanism 320 can both be filter screens, etc.

[0048] Specifically, the main air outlet 421 is located in the middle area of ​​the second connecting pipe 420.

[0049] When the ammonium chloride mixture (containing gallium-containing sodium chloride gas and pure ammonium chloride gas) enters the first chamber 110 through the inlet 120, the pure ammonium chloride gas, due to its lower density and the suction effect of the second outlet 220, will pass through the first connecting pipe 410 from the first chamber 110 into the second chamber 210, where it will cool and solidify into powder and fall onto the second filter mechanism 320 located in the second chamber 210. The gallium-containing ammonium chloride gas, due to its higher density and the suction effect of the first outlet 130, will quickly reach the bottom of the first chamber 110. However, due to the suction effect of the second outlet 220, some of the gallium-containing ammonium chloride gas will flow back towards the second chamber 210. The two airflows intertwine to form a cyclone, thus lengthening the path of the gallium-containing ammonium chloride gas and allowing it to cool more effectively into solid powder, which then falls onto the first filter mechanism 310 located in the first chamber 110. (See also...) Figure 3 , Figure 3 This is a schematic diagram of the airflow inside a parallel HVPE filter device provided in a typical embodiment of the present invention. Figure 3 The value on the vertical axis represents the density of the particles. Figure 3 Different colored lines represent the trajectories of a particle's motion, through Figure 3 It can visualize the flow of massless particles within the computational domain; by Figure 3 It can be seen that there is a clear cyclone in the first bottom area of ​​the first chamber 110. Under the action of the cyclone, the travel distance of the airflow entering the first chamber 110 is extended, which allows the gas to be cooled down better and form a solid. Compared with using a single filter unit, this solution can reduce the cleaning frequency of the filter unit. The time interval for cleaning the filter unit is extended by about 4 times. For example, when using only one filter unit, the filter unit needs to be cleaned after two growth processes, but when using two filter units, the filter unit only needs to be cleaned after eight growth processes, which helps to reduce cleaning costs.

[0050] The parallel HVPE filtration device provided by this invention can achieve self-graded collection of gallium-containing ammonium chloride and ammonium chloride, which can better cool and solidify gallium-containing ammonium chloride gas and avoid the use of water cooling or extended filtration devices. In addition, the parallel HVPE filtration device provided by this invention can also effectively prevent the problem of clogging of the filtration mechanism caused by the mixing of gallium-containing ammonium chloride gas and ammonium chloride gas.

[0051] It should be understood that the above embodiments are merely illustrative of the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and implement it accordingly. They should not be construed as limiting the scope of protection of the present invention. All equivalent changes or modifications made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A parallel HVPE filter device, characterized in that, include: At least two filtration units, including a first filtration unit and a second filtration unit, wherein the first filtration unit includes a first container and a first filtration mechanism, the first container has a first chamber inside, the first filtration mechanism is disposed in the first chamber, and the first container has an air inlet communicating with the first chamber; the second filtration unit includes a second container and a second filtration mechanism, the second container has a second chamber inside, and the second filtration mechanism is disposed in the second chamber. At least two connecting pipes, including a first connecting pipe and a second connecting pipe, wherein the first connecting pipe is connected to the first chamber and the second chamber respectively, the second connecting pipe is connected to the first chamber and the second chamber respectively, and a total air outlet is provided on the second connecting pipe, and the first connecting pipe and the second connecting pipe are spaced apart along the direction of gravity; An air extraction mechanism is connected to the main air outlet; The first container is provided with a first air outlet communicating with the first chamber, and the second container is provided with a second air outlet communicating with the second chamber. The second connecting pipe is connected to the first air outlet and the second air outlet respectively. The first chamber includes a first top portion near the top end face of the first container and a first bottom portion near the bottom end face of the first container. The first filter mechanism is disposed in the first bottom portion. The air inlet is directly connected to the first top portion, and the first air outlet is directly connected to the first bottom portion. The second chamber includes a second top portion near the top end face of the second container and a second bottom portion near the bottom end face of the second container. The second filter mechanism is disposed in the second bottom portion. The second air outlet is directly connected to the second bottom portion. The first connecting pipe is connected to the first top portion and the second top portion respectively. The top end face and the bottom end face are arranged opposite each other along the direction of gravity. The air inlet is disposed on the top end face of the first container.

2. The parallel HVPE filter device according to claim 1, characterized in that: The first air outlet and the second air outlet are located on the same horizontal plane.

3. The parallel HVPE filter device according to claim 1, characterized in that: The first container is provided with a first connection port, which is connected to the first chamber. The second container is provided with a second connection port, which is connected to the second chamber. The two ends of the first connecting pipe are respectively connected to the first connection port and the second connection port. The first connection port is directly connected to the first top part, and the second connection port is directly connected to the second top part.

4. The parallel HVPE filter device according to claim 3, characterized in that: The first connection port and the second connection port are located on the same horizontal plane.

5. The parallel HVPE filter device according to claim 3 or 4, characterized in that: The first filtration mechanism and the second filtration mechanism are arranged on the same horizontal plane.

6. The parallel HVPE filter device according to claim 3, characterized in that: The inner diameter of the first connecting pipe is greater than 45mm.

7. The parallel HVPE filter device according to claim 3, characterized in that: The first connection port, the second connection port, the first air outlet, and the second air outlet have the same diameter.

8. The parallel HVPE filter device according to claim 1, characterized in that: The first filter mechanism fills the first bottom portion, and the first air outlet is covered by the first filter mechanism.

9. The parallel HVPE filter device according to claim 1 or 8, characterized in that: The second filter mechanism fills the second bottom portion, and the second air outlet is covered by the second filter mechanism.

10. The parallel HVPE filter device according to claim 1, characterized in that: A first support mechanism is provided at the bottom of the first chamber, and the first filter mechanism is disposed on the first support mechanism. A first gap is formed between the first filter mechanism and the bottom of the first chamber, and the first air outlet is directly connected to the first gap.

11. The parallel HVPE filter device according to claim 1, characterized in that: The bottom of the second chamber is provided with a second support mechanism, the second filter mechanism is disposed on the second support mechanism, a second gap is formed between the second filter mechanism and the bottom of the second chamber, and the second air outlet is directly connected to the second gap.

12. The parallel HVPE filter device according to claim 1, characterized in that: The first chamber and the second chamber have the same volume.

13. The parallel HVPE filter device according to claim 1 or 12, characterized in that: The depth of the first chamber and the second chamber is greater than or equal to 600 mm.

14. The parallel HVPE filter device according to claim 1, characterized in that: The main air outlet is located in the middle area of ​​the second connecting pipe.

15. The parallel HVPE filter device according to claim 1, characterized in that: The first filtration mechanism and the second filtration mechanism have the same volume.

16. The parallel HVPE filter device according to claim 1, characterized in that: The first filtration mechanism and / or the second filtration mechanism includes a filter screen.

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