A carrier plate device

Abstract

The application discloses a carrier plate device, which comprises a supporting frame and at least one tray, the tray is installed on the supporting frame, the tray comprises a body and a supporting rib connected to the body, a first side of the body is used for supporting a substrate, the supporting rib is connected to a second side of the body, and the first side of the body is an upward convex arc. The carrier plate device has a high carrier plate occupancy ratio and high tray strength, ensures the overall flatness of the carrier plate device, and reduces the abnormal probability of automatic film placing.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and more particularly to a carrier plate device. Background Technology

[0002] The effective wafer placement area length of the carrier is generally a fixed value due to equipment limitations. However, the width of the effective wafer placement area can be adjusted by changing the center distance between two adjacent wafer positions. The smaller the center distance, the more wafers can be placed in the effective wafer placement area, thus increasing the proportion of wafers on the carrier. Conversely, the larger the center distance, the smaller the proportion.

[0003] In the industry, the entire setup for carrying silicon wafers for coating is typically called a carrier plate. The carrier plate includes a tray and a frame for holding the tray. The individual carriers on the carrier plate used to hold the silicon wafers are called the trays. The main beams on both sides of the frame contact transfer rollers, which then move the carrier plate for transport. Firstly, in actual operation, if the center-to-center distance between adjacent silicon wafer positions is reduced to increase the carrier plate's occupancy, the ribs between two adjacent cutouts on the tray (used for substrate placement) become very narrow. This weakens the tray's strength, causing it to sag when placed on the carrier plate, reducing the overall flatness of the carrier plate and leading to an increase in abnormal wafer handling during automated wafer loading / unloading. Secondly, if the frame vibrates during transport, this vibration causes the tray to vibrate, resulting in a shift in the position of the silicon wafers placed on the tray. This affects the uniformity of the coating process and may also cause an increase in abnormal wafer handling during automated wafer loading / unloading. Furthermore, during the coating process, the increased temperature of the tray causes it to deform, which in turn causes the silicon wafers placed on the tray to shift in position. Additionally, the deformation creates a gap between the tray and the silicon wafer, affecting the uniformity of the coating. This can result in the coated silicon wafers having electrical conductivity on both sides, thus impacting battery performance. Summary of the Invention

[0004] The purpose of this invention is to provide a carrier plate device with a high carrier plate ratio and high tray strength, which ensures the overall flatness of the carrier plate device and reduces the probability of abnormal automatic film placement.

[0005] To achieve the above-mentioned technical effects, the technical solution of the present invention is as follows:

[0006] The present invention discloses a carrier plate device, comprising: a support frame; at least one tray, the tray being mounted on the support frame, the tray comprising a body and a support rib connected to the body, a first side of the body being used to support a substrate, and the support rib being connected to a second side of the body.

[0007] In some embodiments, the body is provided with a plurality of placement positions, each placement position is used to support one substrate, the plurality of placement positions are arranged in multiple rows and columns, and the support ribs are provided between two adjacent rows of placement positions and extend along the row direction.

[0008] In some embodiments, the body has a fixed edge extending along its contour, and the support frame includes a frame body and at least one support beam assembly connected within the frame body, the fixed edge being connected to the support beam assembly via a connecting component.

[0009] In some specific embodiments, there are multiple connecting components, and the multiple connecting components are spaced apart along the outline of the body.

[0010] In some more specific embodiments, the connecting assembly includes: a limiting block, which is installed on a first side of the body and has a buffer gap with the tray; a connecting bolt, which passes through the support beam assembly and the body and through the limiting block; a connecting nut, which is installed on the connecting bolt; and a connecting washer, which is sleeved on the connecting bolt and sandwiched between the connecting nut and the limiting block.

[0011] In some optional embodiments, the body is provided with a mounting groove, and the limiting block includes a plug-in part and a stop part. The plug-in part is plugged into the mounting groove, and the stop part is connected to the plug-in part and abuts against the connecting gasket.

[0012] In some specific embodiments, the frame body includes: a plurality of first main beams arranged in parallel, each of the first main beams extending along a first direction; and two second main beams extending along a second direction, the two second main beams respectively connected to the two ends of the plurality of first main beams, and a buffer area exists between the second main beams and the support beam group in the first direction.

[0013] In some more specific embodiments, the frame body also includes reinforcing beams disposed within the first main beam and / or the second main beam.

[0014] In some specific embodiments, the frame body includes a baffle plate, which provides the buffer area.

[0015] In some more specific embodiments, the baffle plate is connected to the second main beam and the support beam assembly on both sides along the first direction, respectively.

[0016] In some embodiments, the support beam assembly includes: a plurality of first support beams, each of which extends along a first direction and is connected to the frame body; and a plurality of second support beams, each of which extends along a second direction and is connected at both ends to two parallel first support beams.

[0017] In some specific embodiments, the second support beam includes a crossbeam and support heads connected to both ends of the crossbeam. The support heads are connected to the first support beam via a locking assembly. The locking assembly includes a locking bolt, a locking washer, and a locking nut. The locking bolt passes through the support head and the first support beam. The locking nut is fitted to the locking bolt. The locking washer is installed on the locking bolt and sandwiched between the locking nut and the first support beam.

[0018] The beneficial effects of the carrier plate device of the present invention are as follows:

[0019] Since the tray consists of a main body and supporting ribs connected to it, the supporting ribs enhance the overall strength of the tray and reduce its deformation. Due to the reinforcing effect of the supporting ribs, the width of the ribs between two adjacent open sections on the main body (the open sections are used to place the substrates) can be made narrower, ensuring the overall strength of the tray while increasing the substrate-to-body ratio of the carrier device. Simultaneously, during actual manufacturing, when the supporting ribs are welded to the second side of the main body, the first side of the main body becomes an upwardly convex arc. When the tray is installed on the support frame, the upward deformation on the first side can counteract the sagging deformation of the entire tray under gravity, ensuring the overall flatness of the carrier device and reducing the probability of abnormal automated substrate placement.

[0020] The carrier plate is transported along the second direction. The main beam of the frame contacts the transport rollers, and vibrations are transmitted to the tray, causing substrate displacement and uneven coating. Therefore, a buffer area is set to reduce the transmission of vibrations to the tray. In addition, a baffle plate is set to further prevent swirling during the coating process, thus ensuring coating uniformity.

[0021] In addition, when the pallet is installed on the frame, the connecting assembly also includes a limiting block. The limiting block maintains a buffer gap with the pallet in both the horizontal and vertical directions. This effectively releases the thermal expansion and contraction of the pallet during heating and cooling, while ensuring that the amount of pallet deformation is limited to the same range, effectively solving the deformation problem of large-sized pallets.

[0022] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the carrier plate device according to an embodiment of the present invention;

[0024] Figure 2 This is a schematic diagram of the structure of the tray according to an embodiment of the present invention;

[0025] Figure 3 This is a schematic diagram of the support frame of the carrier plate device according to an embodiment of the present invention;

[0026] Figure 4 This is a cross-sectional view of the connection structure between the tray and the support frame according to an embodiment of the present invention;

[0027] Figure 5 This is a partial enlarged structural schematic diagram of the support frame at the connection position between the baffle plate and the second main beam according to an embodiment of the present invention;

[0028] Figure 6 This is a partial enlarged structural schematic diagram of the support frame at the connection position between the baffle plate and the second support beam according to an embodiment of the present invention;

[0029] Figure 7 This is a partial enlarged structural schematic diagram of the support frame at the connection position between the first support beam and the second support beam, according to an embodiment of the present invention.

[0030] Figure 8 This is a cross-sectional view of the first main beam of the support frame in an embodiment of the present invention.

[0031] Figure 9 This is a partial enlarged view of the carrier plate device of an embodiment of the present invention at the positions of two adjacent trays; reference numerals:

[0032] 100. Support frame; 110. Frame body; 111. First main beam; 1111. Reinforcing beam; 112. Second main beam; 113. Barrier plate; 120. Support beam assembly; 121. First support beam; 122. Second support beam; 1221. Support head; 1222. Crossbeam;

[0033] 200. Tray; 210. Body; 211. Fixed edge; 2111. Mounting groove; 212. Placement position; 220. Supporting rib;

[0034] 300. Connecting component; 310. Limiting block; 311. Insertion part; 312. Stop part; 320. Connecting bolt; 330. Connecting nut; 340. Connecting washer;

[0035] 400. Locking assembly; 410. Locking bolt; 420. Locking nut; 430. Locking washer;

[0036] 500, First mounting component; 510, First mounting bolt; 520, First mounting nut; 530, First mounting washer;

[0037] 600. Second mounting assembly; 610. Second mounting bolt; 620. Second mounting nut; 630. Third mounting washer; 640. Third mounting washer;

[0038] 700, Fixing component; 710, Fixing bolt; 720, Fixing nut; 730, First fixing washer; 740, Second fixing washer. Detailed Implementation

[0039] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0040] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0041] Furthermore, features specified as "first" or "second" may explicitly or implicitly include one or more of those features, used to distinguish and describe features, without any order or emphasis. In the description of this invention, unless otherwise stated, "multiple" means two or more.

[0042] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0043] The following is for reference. Figures 1-9 The specific structure of the carrier plate device according to an embodiment of the present invention is described.

[0044] This invention discloses a carrier plate device, such as Figure 1 and Figure 2As shown, the carrier plate device includes a support frame 100 and at least one tray 200, with the tray 200 mounted on the support frame 100. The tray 200 includes a body 210 and a support rib 220 connected to the body 210. A first side of the body 210 supports a substrate, and the support rib 220 is connected to a second side of the body 210, with the first side of the body 210 being an upwardly convex arc shape. It is understood that because the tray 200 includes the body 210 and the support rib 220 connected to the body 210, the support rib 220 can improve the overall strength of the tray 200 and reduce the amount of deformation. Due to the reinforcing effect of the support rib 220, the width of the support rib 220 between two adjacent open positions on the body 210 (open positions for placing substrates) can be made narrower, ensuring the overall strength of the tray 200 while also increasing the carrier plate ratio of the carrier plate device. Meanwhile, during actual processing, when the support ribs 220 are welded to the second side of the body 210, the first side of the body 210 is made into an upwardly convex arc shape. When the tray 200 is installed on the support frame 100, the upwardly convex deformation on the first side can offset the sagging deformation of the entire tray 200 under the action of gravity, ensuring the overall flatness of the carrier plate device and reducing the probability of abnormal automatic plate placement.

[0045] It should be added that during the manufacturing process of pallet 200, the two ends of the body 210 are placed on the pad block, so that the body 210 automatically droops. Then, the support ribs 220 are welded to the body 210. The support ribs 220 and the body 210 have multiple weld points. The presence of the weld points enables the body 210 to form an upwardly convex arch.

[0046] refer to Figure 2 As shown, the main body 210 has multiple placement positions 212, each of which is used to support one substrate. The multiple placement positions 212 are arranged in multiple rows and columns. Supporting ribs 220 are located between adjacent rows of placement positions 212 and extend along the row direction. It can be understood that the multiple rows and columns of placement positions 212 on the main body 210, each capable of accommodating one substrate, increases the load-bearing capacity of the tray 200, thereby increasing the load-bearing capacity of the carrier device. Furthermore, the placement of the supporting ribs 220 between adjacent rows of placement positions 212 effectively enhances the strength of the main body 210, thereby increasing the strength of the tray 200.

[0047] refer to Figure 2 and Figure 3As shown, the body 210 has a fixed edge 211 extending along its contour. The support frame 100 includes a frame body 110 and at least one support beam assembly 120 connected within the frame body 110. The fixed edge 211 is connected to the support beam assembly 120 via a connecting component 300. It can be understood that the body 210 is fixed to the support frame 100 by the connection between the fixed edge 211 and the support beam assembly 120. The large contact area between the fixed edge 211 and the support frame 100 can better ensure the stable support of the support frame 100.

[0048] Further, refer to Figure 4 As shown, the connecting assembly 300 includes a limiting block 310, a connecting bolt 320, a connecting nut 330, and a connecting washer 340. The limiting block 310 is installed on the first side of the fixed edge 211, maintaining a buffer gap between the limiting block 310 and the tray 200 in both the horizontal and vertical directions. The connecting bolt 320 passes through the support beam assembly 120, the fixed edge 211, and the limiting block 310. The connecting nut 330 is installed on the connecting bolt 320. The connecting washer 340 is sleeved on the connecting bolt 320 and sandwiched between the connecting nut 330 and the limiting block 310. It can be understood that in actual operation, the limiting block 310 is installed on the first side of the body 210, then the connecting bolt 320 is passed through the support beam assembly 120, the fixed edge 211, and the limiting block 310 from bottom to top, then the connecting washer 340 is installed on the connecting bolt 320, and finally the connecting nut 330 is used to lock it in place. This connection method can improve the connection stability between the pallet 200 and the support frame 100. On the other hand, the buffer gap in the vertical direction can effectively release the thermal expansion and contraction of the pallet 200 when it is heated and cooled, and effectively solve the deformation problem of large-sized pallets 200.

[0049] Optional, see reference Figure 4 As shown, a mounting groove 2111 is provided on the fixed edge 211. The limiting block 310 includes an insertion part 311 and a stop part 312. The insertion part 311 is inserted into the mounting groove 2111, and the stop part 312 is connected to the insertion part 311 and abuts against the connecting gasket 340. It can be understood that the insertion part 311 is inserted into the mounting groove 2111, which leaves a buffer gap in both the horizontal and vertical directions. This effectively releases the thermal expansion and contraction generated by the tray 200 during heating and cooling, effectively solving the deformation problem of the large-sized tray 200. In addition, due to the presence of the limiting block 310, the deformation of the tray 200 is further limited to the same range, thereby making the deformation of the area of ​​the tray 200 that carries the substrate as the mask area similar, avoiding the phenomenon of incomplete masking and electrical conduction between the front and back of the battery cells after coating, which affects the battery efficiency.

[0050] Optionally, there may be multiple connecting components 300, which are spaced apart along the outline of the body 210. It is understood that multiple connecting components 300 can improve the connection stability between the fixed edge 211 and the support beam assembly 120, thereby improving the connection stability between the pallet 200 and the support frame 100.

[0051] refer to Figure 3 As shown, the main frame 110 includes multiple first main beams 111 and second main beams 112. The multiple first main beams 111 are arranged in parallel, each extending along a first direction. There are two second main beams 112, each extending along a second direction, and each second main beam 112 is connected to both ends of the multiple first main beams 111. The support beam assembly 120 includes multiple first support beams 121 and multiple second support beams 122. Each first support beam 121 extends along the first direction and is connected to the first main beam 111. Each second support beam 122 extends along the second direction and is connected at both ends to two parallel first support beams 121.

[0052] Furthermore, there is a buffer zone between the second main beam 112 and the support beam assembly 120 in the first direction. Since the carrier plate is transported along the second direction, the second main beam 112 of the frame body 110 comes into contact with the transport rollers, and vibrations are transmitted to the tray 200, causing substrate displacement and uneven coating. Therefore, the buffer zone is set to reduce the transmission of vibrations to the tray 200.

[0053] Preferably, the frame body 110 further includes a baffle plate 113, which provides the buffer area. Specifically, the baffle plate 113 is connected to the second main beam 112 and the second support beam 122 on both sides along the first direction. Since the coating method uses an upper and lower coating method, if the buffer area is set as a hollow area, there will be a coating phenomenon around the coating. Therefore, it is necessary to add a baffle plate 113 to block it. It can be understood that the frame body 110 includes multiple first main beams 111, second main beams 112 and baffle plates 113. On the one hand, it can make the frame body 110 stronger, thereby ensuring the flatness of the carrier plate device. On the other hand, it can simplify the structure of the frame body 110, reduce the weight of the frame body 110, and facilitate transportation and handling. Meanwhile, the space within the frame body 110 is divided into multiple parts by multiple first support beams 121 and multiple second support beams 122. Each part is used to place a tray 200. This not only enhances the support for the tray 200 and ensures the stability of the tray 200 within the support frame 100, but also improves the strength of the frame body 110 and prevents the phenomenon of coating wrapping during the coating process. This helps to ensure the flatness and coating uniformity of the entire carrier plate device.

[0054] Further, refer to Figure 5 and Figure 6 As shown, the baffle plate 113 is connected to the second main beam 112 and the second support beam 122 on both sides along the first direction via the first mounting assembly 500 and the second mounting assembly 600, respectively. This facilitates installation and improves the stability of the connection between the baffle plate 113 and the second main beam 112 and the second support beam 122.

[0055] Furthermore, refer to Figure 5 As shown, the first mounting assembly 500 includes a first mounting bolt 510, a first mounting nut 520, and a first mounting washer 530. The first mounting bolt 510 passes through the second main beam 112 and the baffle plate 113 from bottom to top. The first mounting nut 520 is fitted to the first mounting bolt 510. The first mounting washer 530 is installed on the first mounting bolt 510 and sandwiched between the first mounting nut 520 and the baffle plate 113. Thus, the connection between the baffle plate 113 and the second main beam 112 is achieved through the first mounting bolt 510 and the first mounting nut 520, simplifying the installation, improving the connection strength between the baffle plate 113 and the second main beam 112, and the added first mounting washer 530 can prevent the first mounting nut 520 from slipping during installation and disassembly.

[0056] Furthermore, refer to Figure 6 As shown, the second mounting assembly 600 includes a second mounting bolt 610, a second mounting nut 620, a second mounting washer 630, and a third mounting washer 640. The second mounting bolt 610 passes through the second support beam 122 and the baffle plate 113 from bottom to top. The second mounting nut 620 is fitted to the second mounting bolt 610. The second mounting washer 630 and the third mounting washer 640 are mounted on the second mounting bolt 610 and sandwiched between the second mounting nut 620 and the baffle plate 113. Thus, the connection between the baffle plate 113 and the second support beam 122 is achieved through the second mounting bolt 610 and the second mounting nut 620, simplifying the installation, improving the connection strength between the baffle plate 113 and the second support beam 122, and the added second mounting washer 630 and third mounting washer 640 can prevent the second mounting nut 620 from slipping during installation and disassembly.

[0057] Furthermore, refer to Figure 7As shown, the second support beam 122 includes a crossbeam 1222 and support heads 1221 connected to both ends of the crossbeam 1222. The support heads 1221 are connected to the first support beam 121 via a locking assembly 400. The locking assembly 400 includes a locking bolt 410, a locking washer 430, and a locking nut 420. The locking bolt 410 passes through the support head 1221 and the first support beam 121. The locking nut 420 is fitted to the locking bolt 410. The locking washer 430 is installed on the locking bolt 410 and sandwiched between the locking nut 420 and the first support beam 121. Understandably, during actual assembly, the support head 1221 is welded to the crossbeam 1222, and then the locking bolt 410 is passed through the support head 1221 and the first support beam 121. Specifically, the locking washer 430 can be installed onto the locking bolt 410 from bottom to top, passing through the support head 1221 and the first support beam 121, and then tightened with the locking nut 420. This facilitates installation and improves the connection stability between the second support beam 122 and the first support beam 121.

[0058] refer to Figure 8 As shown, the frame body 110 also includes a reinforcing beam 1111 disposed within the first main beam 111. It can be understood that the added reinforcing beam 1111 can improve the strength of the first main beam 111, thereby improving the strength of the frame body 110.

[0059] refer to Figure 9 As shown, a fixing assembly 700 is provided between the gaps of two adjacent trays 200. The fixing assembly 700 includes a fixing bolt 710, a fixing nut 720, a first fixing washer 730, and a second fixing washer 740. The fixing bolt 710 passes through the second support beam 122. The fixing nut 720, the first fixing washer 730, and the second fixing washer 740 are installed on the fixing bolt 710. The second fixing washer 740 abuts against the two adjacent trays 200. Thus, the fixing assembly 700 can press the two trays 200 tightly against the second support beam 122, thereby further improving the connection stability of the trays 200 on the support frame 100.

[0060] Example:

[0061] like Figures 1-9As shown, the carrier plate device includes a support frame 100 and four trays 200. The support frame 100 includes a frame body 110 and two support beam groups 120 connected within the frame body 110. The frame body 110 includes three first main beams 111, two second main beams 112, and two baffle plates 113. The three first main beams 111 are arranged in parallel, and each first main beam 111 extends along a first direction. There are two second main beams 112, which extend along a second direction and are respectively connected to both ends of the plurality of first main beams 111. Each first main beam 111 is provided with a reinforcing beam 1111. Each support beam group 120 includes two first support beams 121 and three second support beams 122. Each first support beam 121 extends along the first direction and is connected to the first main beam 111. Each second support beam 122 extends along the second direction and is respectively connected at both ends to the two parallel first support beams 121. The second support beam 122 includes a crossbeam 1222 and support heads 1221 connected to both ends of the crossbeam 1222. The support heads 1221 are connected to the first support beam 121 via a locking assembly 400. The locking assembly 400 includes a locking bolt 410, a locking washer 430, and a locking nut 420. The locking bolt 410 passes through the support head 1221 and the first support beam 121. The locking nut 420 is fitted to the locking bolt 410. The locking washer 430 is installed on the locking bolt 410 and sandwiched between the locking nut 420 and the first support beam 121. Each baffle plate 113 is connected to the second main beam 112 and the second support beam 122 via a first mounting assembly 500 and a second mounting assembly 600. The first mounting assembly 500 includes a first mounting bolt 510, a first mounting nut 520, and a first mounting washer 530. The first mounting bolt 510 passes through the second main beam 112 and the baffle plate 113 from bottom to top. The first mounting nut 520 is fitted with the first mounting bolt 510. The first mounting washer 530 is installed on the first mounting bolt 510 and sandwiched between the first mounting nut 520 and the baffle plate 113. The second mounting assembly 600 includes a second mounting bolt 610, a second mounting nut 620, a second mounting washer 630, and a third mounting washer 640. The second mounting bolt 610 passes through the second support beam 122 and the baffle plate 113 from bottom to top. The second mounting nut 620 is fitted with the second mounting bolt 610. The second mounting washer 630 and the third mounting washer 640 are installed on the second mounting bolt 610 and sandwiched between the second mounting nut 620 and the baffle plate 113.

[0062] The tray 200 is mounted on the support frame 100. The tray 200 includes a body 210 and support ribs 220 connected to the body 210. The body 210 has forty placement positions 212, each placement position 212 for supporting one substrate. The placement positions 212 are arranged in eight rows and five columns. The support ribs 220 are located between two adjacent rows of placement positions 212 and extend along the row direction. The body 210 has a fixed edge 211 extending along its contour. The fixed edge 211 is connected to two first support beams 121 and two second support beams 122 via connecting components 300. The connecting assembly 300 includes a limiting block 310, a connecting bolt 320, a connecting nut 330, and a connecting washer 340. The limiting block 310 is installed on the first side of the fixed edge 211. A portion of the connecting bolt 320 of the connecting assembly 300 passes through the support beam group 120 (first support beam 121 or two second support beams 122), the fixed edge 211, and the limiting block 310 from bottom to top. The connecting nut 330 is installed on the connecting bolt 320, and the connecting washer 340 is sleeved on the connecting bolt 320 and sandwiched between the connecting nut 330 and the limiting block 310. The fixed edge 211 is provided with a mounting groove 2111. The limiting block 310 includes an insertion part 311 and a stop part 312. The insertion part 311 is inserted into the mounting groove 2111, and the stop part 312 is connected to the insertion part 311 and abuts against the connecting washer 340. A fixing component 700 is provided between the gaps of two adjacent trays 200. The fixing component 700 includes a fixing bolt 710, a fixing nut 720, a first fixing washer 730 and a second fixing washer 740. The fixing bolt 710 passes through the second support beam 122. The fixing nut 720, the first fixing washer 730 and the second fixing washer 740 are installed on the fixing bolt 710. The second fixing washer 740 abuts against the two adjacent trays 200.

[0063] In the description of this specification, references to terms such as "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0064] The above description is only a preferred embodiment of the present invention. For those skilled in the art, there will be changes in the specific implementation and application scope based on the ideas of the present invention. The content of this specification should not be construed as a limitation of the present invention.

Claims

1. A carrier plate device, characterized in that, include: Support frame (100); At least one tray (200) is mounted on the support frame (100). The tray (200) includes a body (210) and a support rib (220) connected to the body (210). A first side of the body (210) is used to support a substrate, and the support rib (220) is connected to a second side of the body (210). The body (210) has a fixed side (211) extending along its contour, and the support frame (100) includes a frame body (110) and at least one support beam group (120) connected within the frame body (110), the fixed side (211) being connected to the support beam group (120) via a connecting assembly (300). The main frame (110) includes: Multiple first main beams (111) are arranged in parallel, and each first main beam (111) extends along a first direction; The second main beam (112) consists of two beams, which extend along a second direction. The two beams (112) are respectively connected to the two ends of a plurality of first main beams (111), and there is a buffer area between the second main beam (112) and the support beam group (120) in a first direction.

2. The carrier plate device according to claim 1, characterized in that, The main body (210) is provided with a plurality of placement positions (212), each placement position (212) is used to support one substrate, the plurality of placement positions (212) are arranged in multiple rows and columns, and the supporting ribs (220) are provided between two adjacent rows of placement positions (212) and extend along the row direction.

3. The carrier plate device according to claim 1, characterized in that, There are multiple connecting components (300), and the multiple connecting components (300) are spaced apart along the outline of the body (210).

4. The carrier plate device according to claim 3, characterized in that, The connection component (300) includes: A limiting block (310) is installed on the first side of the body (210) and has a buffer gap with the tray (200); A connecting bolt (320) passes through the support beam assembly (120) and the body (210), and also passes through the limiting block (310); A connecting nut (330) is mounted on the connecting bolt (320); A connecting washer (340) is sleeved on the connecting bolt (320) and sandwiched between the connecting nut (330) and the limiting block (310).

5. The carrier plate device according to claim 4, characterized in that, The main body (210) is provided with a mounting groove (2111). The limiting block (310) includes a plug-in part (311) and a stop part (312). The plug-in part (311) is plugged into the mounting groove (2111), and the stop part (312) is connected to the plug-in part (311) and abuts against the connecting gasket (340).

6. The carrier plate device according to claim 1, characterized in that, The main frame (110) also includes reinforcing beams (1111) disposed within the first main beam (111) and / or the second main beam (112).

7. The carrier plate device according to claim 1, characterized in that, The frame body (110) includes a baffle plate (113), which provides the buffer area.

8. The carrier plate device according to claim 1, characterized in that, The support beam assembly (120) includes: A plurality of first support beams (121), each of the first support beams (121) extending along a first direction and connected to the frame body (110); Multiple second support beams (122), each second support beam (122) extends along a second direction and its two ends are respectively connected to two parallel first support beams (121); The second support beam (122) includes a crossbeam (1222) and support heads (1221) connected to both ends of the crossbeam (1222). The support heads (1221) are connected to the first support beam (121) via a locking assembly (400); wherein: The locking assembly (400) includes a locking bolt (410), a locking washer (430), and a locking nut (420). The locking bolt (410) passes through the support head (1221) and the first support beam (121). The locking nut (420) is fitted to the locking bolt (410). The locking washer (430) is installed on the locking bolt (410) and sandwiched between the locking nut (420) and the first support beam (121).

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