Semi-closed helium leak detection device

Abstract

This application relates to a semi-closed helium leak detection device, including a detection component. The detection component includes a helium mass spectrometer leak detector. A detection disk is fixedly arranged on the helium mass spectrometer leak detector. A rubber pad is fixedly arranged on the detection disk. A helium detection hole communicating with the helium mass spectrometer leak detector is opened on the rubber pad. A test piece can be placed on the rubber pad to cover the helium detection hole. The helium mass spectrometer leak detector can evacuate the helium detection hole. The semi-closed helium leak detection device further includes a first nozzle for spraying helium gas on the top of the test piece and a second nozzle for spraying helium gas on the side of the test piece. The first nozzle and the second nozzle are connected to a helium gas bag through a pipeline. The semi-closed helium leak detection device further includes a screw barrel. A screw pitch groove is opened on the screw barrel. The second nozzle can spiral up or down along the screw pitch groove, which can make the helium gas spraying more uniform, thereby shortening the detection time. This application can achieve the technical effect of quickly detecting leaks in the test piece.

Description

Technical Field

[0001] The present application relates to the field of vacuum leak detection, and in particular to a semi-closed helium leak detection device. Background Art

[0002] The Vacuum Decay Method (VDM) is a relatively new non-destructive leak detection method. In the vacuum decay method, the tester places the vacuum package into the test chamber, evacuates the test chamber, and monitors the vacuum level and vacuum change in the test chamber within a predetermined test time through an absolute pressure / differential pressure sensor. Changes in absolute pressure and differential pressure indicate the presence of a leak in the package. The vacuum decay leak detection method (F2338-05) approved by the American Society for Testing and Materials (ASTM) has passed the FDA certification, and this method is recognized as a standard packaging integrity test method. However, the sensitivity of the vacuum decay method depends on two key parameters of the test fixture and the test: time and pressure. For ordinary vacuum packages, its test cycle takes several seconds, which is difficult to meet the requirements of rapid on-line detection, resulting in a relatively high test cost. Summary of the Invention

[0003] In order to achieve rapid detection of vacuum packages, the present application provides a semi-closed helium leak detection device.

[0004] The semi-closed helium leak detection device provided by the present application adopts the following technical solutions:

[0005] The semi-closed helium leak detection device includes a detection component, a first jet component, and a second jet component. The detection component includes a helium mass spectrometer leak detector, a test base, and a detection disk. The test base is fixedly arranged on the helium mass spectrometer leak detector, the top of the test base is fixedly connected to the detection disk, a rubber pad is fixedly arranged on the detection disk, and a through hole is formed in the rubber pad to form a helium detection hole. The test piece can be placed on the helium detection hole and cover the helium detection hole. The first jet component includes a first jet orifice, and the first jet orifice can jet helium gas towards the top of the test piece. The second jet component includes a second jet orifice, and the second jet orifice can jet helium gas towards the side of the test piece.

[0006] By adopting the above technical solutions, through the settings of the first nozzle and the second nozzle, the cooperation of the first nozzle and the second nozzle can achieve uniform helium injection for the test piece, which is a necessary condition for leak detection of the test piece; through the setting of the helium mass spectrometer leak detector, the helium mass spectrometer leak detector can achieve the technical effect of vacuum pumping, and the helium mass spectrometer leak detector can also detect helium in the extracted gas. If there is a helium component, it means that there is a leak in the test piece and the airtightness is poor; through the setting of the rubber pad, a helium detection hole is provided on the rubber pad. When the test piece is placed on the rubber pad, the helium detection hole can be covered. The rubber pad can seal the surface in contact with the test piece, forming a sealed cavity between the test piece and the helium detection hole, and can achieve the technical effect of preventing helium from passing between the rubber pad and the test piece.

[0007] In a specific feasible implementation, through holes are formed in the detection disc to form detection disc holes, and the detection disc holes are communicated with the helium detection holes. Through holes are provided in the test base, and a vacuum tube is arranged in the through holes. One end of the vacuum tube is communicated with the helium mass spectrometer leak detector, and the other end is communicated with the detection disc holes.

[0008] By adopting the above technical solutions, through the setting of the detection disc, the detection disc can support and fix the rubber pad. A detection disc hole is provided inside the detection disc, and the detection disc hole is communicated with the helium detection hole. A vacuum tube is arranged in the test base, and the vacuum tube, the detection disc hole and the helium detection hole are communicated. The helium mass spectrometer leak detector can pump vacuum for the test piece, so that the test piece is tightly attached to the rubber pad. When there is a leak hole in the test piece, the helium gas around the test piece can be inhaled into the helium detection hole through the leak hole, and then inhaled into the helium mass spectrometer leak detector through the detection disc hole and the vacuum tube for detection.

[0009] In a specific feasible implementation, a telescopic sleeve is also fixedly arranged on the helium mass spectrometer leak detector. The telescopic sleeve includes a bottom cylinder part and a telescopic part. A screw cylinder fixing frame is fixedly arranged on the bottom cylinder part, and a top plate is fixedly arranged on the telescopic part.

[0010] By adopting the above technical solutions, through the setting of the telescopic sleeve, the telescopic sleeve can fix the screw cylinder fixing frame and the top plate. The screw cylinder fixing frame and the top plate can support and fix the device components. The telescopic sleeve includes a bottom cylinder part and a telescopic part, and the top plate is fixedly arranged on the telescopic part, which helps the top plate to realize the functions of rising and falling.

[0011] In a specific feasible implementation, a motor is fixedly arranged on the top plate. The motor is fixedly arranged on the top of the top plate. The motor includes a rotating shaft, a transmission key is fixedly arranged on the rotating shaft, the rotating shaft is fixedly connected with a transmission sleeve through the transmission key, and a sleeve flange is arranged on the transmission sleeve.

[0012] By adopting the above technical solution, through the setting of the motor and the rotating shaft, the function of providing and transmitting power can be achieved. A transmission key is fixedly arranged on the rotating shaft, and the rotating shaft is fixedly connected with a transmission sleeve through the transmission key, which can achieve the technical effect of enabling the transmission sleeve to rotate.

[0013] In a specific feasible implementation, a thrust bearing is arranged inside the top plate. A rotating cylinder is installed on the thrust bearing. A rotating cylinder flange is arranged on the rotating cylinder. The rotating cylinder is installed on the thrust bearing through the rotating cylinder flange, and the rotating cylinder flange is fixedly connected with the sleeve flange.

[0014] By adopting the above technical solution, through the setting of the sleeve flange and the rotating cylinder flange, the sleeve flange and the rotating cylinder flange are fixedly arranged, which can achieve the function of power transmission between the rotating cylinder and the transmission sleeve. The rotating cylinder flange is installed on the thrust bearing, and the thrust bearing is fixedly arranged on the top plate. The top plate can support the thrust bearing. The thrust bearing can make the rotation more stable. The thrust bearing can also support the rotating cylinder and the transmission sleeve, reduce the vertical pressure formed by the rotating cylinder and the transmission sleeve on the rotating shaft, protect the motor, and help the motor rotate normally.

[0015] In a specific feasible implementation, vertical plates are fixedly arranged on the outer surface of the rotating cylinder. A plurality of vertical plates are fixedly arranged at intervals around the outer surface of the rotating cylinder. A driving groove is formed between the vertical plates. The first nozzle is fixedly arranged inside the rotating cylinder.

[0016] By adopting the above technical solution, through the setting of the vertical plates, a driving groove is jointly formed between the vertical plates and the rotating cylinder, and the driving groove can play a role in driving rotation; by arranging the first nozzle inside the rotating cylinder, it is helpful to align the first nozzle with the top of the workpiece to be measured and spray helium gas.

[0017] In a specific feasible implementation, a screw cylinder is arranged on the screw cylinder fixing frame. A through groove is formed on the screw cylinder to form a screw pitch groove. Anti-slip lines are arranged on the inner wall of the screw pitch groove. The rotating cylinder is sleeved inside the screw cylinder.

[0018] By adopting the above technical solution, through the setting of the screw cylinder, a screw pitch groove is formed on the screw cylinder, and the screw pitch groove can play a role in limiting the movement track; by arranging anti-slip lines on the screw pitch groove, the anti-slip lines are helpful for the roller to move along the screw pitch groove.

[0019] In a specific feasible implementation, the second jetting assembly further includes a connecting arm. A roller is rotatably arranged on the connecting arm. The roller passes through the screw pitch groove and extends into the driving groove. Anti-slip lines are arranged on the roller.

[0020] By adopting the above technical solution, through the setting of the roller, anti-slip lines are provided on the roller, which helps the roller move better along the anti-slip lines in the thread groove; through the setting of the connecting arm, the connecting arm can fix the roller.

[0021] In a specific feasible implementation, a fixing plate is fixedly arranged on the connecting arm, the second nozzle is fixedly arranged on the fixing plate, a fixed circular plate is fixedly arranged in the rotating cylinder, and the first nozzle is fixedly arranged on the fixed circular plate.

[0022] By adopting the above technical solution, through the setting of the fixing plate, the fixing plate can fix the second nozzle, and through the setting of the fixed circular plate, the fixed circular plate can fix the first nozzle.

[0023] In a specific feasible implementation, the first nozzle and the second nozzle are connected to a helium gas bag through a pipeline.

[0024] By adopting the above technical solution, through the setting of the helium gas bag, the helium gas bag can provide helium gas for the device.

[0025] In summary, the present application includes at least one of the following beneficial technical effects:

[0026] 1. Through the setting of the rubber pad, a test piece can be placed on the rubber pad. A helium detection hole is provided in the rubber pad. When the test piece is placed on the rubber pad, the test piece can cover the helium detection hole. The rubber pad can seal the surface of the test piece to prevent helium gas from passing between the test piece and the sealing pad. When the helium mass spectrometer starts to evacuate, the test piece can be tightly adsorbed on the rubber pad. Since the rubber pad itself has elasticity, when the test piece is adsorbed, the rubber pad generates elastic deformation to wrap the side of the test piece, which can further seal the test piece.

[0027] 2. Through the setting of the screw cylinder, a thread groove is provided on the screw cylinder. The second jetting assembly includes a connecting arm. The connecting arm is connected to a roller through a bearing. The roller and the thread groove are connected through anti-slip lines. The other end of the connecting arm is fixedly connected to a fixing plate, and the second nozzle is fixedly arranged on the fixing plate. When the roller rolls along the thread groove, the second nozzle can spiral up or down along the thread groove, which helps the helium gas ejected from the second nozzle to reach the test piece more evenly, improves the wrapping property of the helium gas around the test piece, and when there is a leak hole in the test piece, the helium gas can be timely pumped into the helium detection cavity from the leak hole, thus achieving the technical effect of shortening the detection time. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 is an overall schematic diagram showing a semi-closed helium leak detection device;

[0029] Figure 2 It is a schematic diagram reflecting the installation structure of the test base;

[0030] Figure 3 It is a cross-sectional view showing the internal structure of the semi-enclosed helium quality leak detection device;

[0031] Figure 4 yes Figure 3 A partial enlarged view of the middle A;

[0032] Figure 5 is a schematic diagram of the installation position of the second jet assembly;

[0033] Figure 6 It is a schematic diagram showing the specific installation position of the roller.

[0034] Description of reference numerals: 21, helium mass spectrometer leak detector; 22, test base; 221, vacuum tube; 23, test plate; 231, rubber pad; 232, helium detection hole; 233, test plate hole; 234, rubber sealing ring; 24, test piece; 31, first nozzle; 32, second nozzle; 33, fixed circular plate; 5, top plate; 51, motor; 511, rotating shaft; 512, transmission key; 513, Transmission sleeve; 514, thrust bearing; 515, sleeve flange; 52, rotating drum; 521, vertical plate; 522, driving groove; 523, rotating drum flange; 53, supporting cavity; 6, screw barrel fixing frame; 61, screw barrel; 611, screw groove; 612, anti-slip pattern; 623, connecting arm; 625, roller; 626, fixing plate; 7, telescopic sleeve; 71, bottom barrel part; 72, telescopic part. DETAILED DESCRIPTION

[0035] The following is combined with Figures 1 - 6 This application is described in further detail.

[0036] The embodiment of the present application discloses a semi-enclosed helium quality leak detection device. Figure 1 and Figure 2, including a detection component, the detection component includes a helium mass spectrometer leak detector 21. A test base 22 is fixedly arranged at the top of the helium mass spectrometer leak detector 21. A through hole is formed in the test base 22, and a vacuum tube 221 is arranged in the through hole. The top of the test base 22 is fixedly connected with a detection disc 23. In the embodiment of the present application, the detection disc 23 is arranged to be circular. A rubber pad 231 is fixedly arranged on the detection disc 23. The shape and size of the rubber pad 231 are both matched with the detection disc 23. A through hole is formed inside the detection disc 23 to form a detection disc hole 233. The aperture of the detection disc hole 233 is set to be larger than the outer diameter of the vacuum tube 221. A rubber sealing ring 234 is sleeved on the vacuum tube 221. After the rubber sealing ring 234 shrinks on the vacuum tube 221 at low temperature, the vacuum tube 221 is connected to the detection disc hole 233 by socket connection. A through hole is formed at the position of the rubber pad 231 corresponding to the detection disc 23 to form a helium detection hole 232. The workpiece to be tested 24 is placed on the rubber pad 231 and covers the helium detection hole 232 for detection. The detection disc 23 and the test base 22 are specifically set to be detachably connected, and the detection disc 23 can be replaced according to the shape of the workpiece to be tested 24, so as to improve the test range of the device. The base 1 is specifically set to be rectangular. Four telescopic sleeves 7 are fixedly arranged on the base 1 by screws. The four telescopic sleeves 7 are respectively fixedly arranged near the four corners of the base 1. The telescopic sleeve 7 includes a bottom barrel part 71 and a telescopic part 72. Specifically, the telescopic sleeve 7 is fixedly arranged on the base 1 through the bottom barrel part 71. The diameter of the telescopic part 72 is set to be smaller than the diameter of the bottom barrel part 71. The telescopic part 72 is sleeved inside the bottom barrel part 71. A screw barrel fixing frame 6 is fixedly connected to the position of the bottom barrel part 71 close to the telescopic part 72. The screw barrel fixing frame 6 is specifically set to be in the shape of a rectangular plate.

[0037] Refer to Figure 3 and Figure 4, a top plate 5 is fixedly arranged at the top of the telescopic part 72. A motor 51 is fixedly arranged on the top plate 5 through bolts. The motor 51 includes a rotating shaft 511 which is arranged towards the top plate 5. A transmission key 512 is fixedly arranged on the rotating shaft 511. The rotating shaft 511 is fixedly connected with a transmission sleeve 513 through the transmission key 512. A cavity is formed inside the top plate 5 to form a support cavity 53. The transmission sleeve 513 is rotatably arranged in the support cavity 53. A gap is reserved between the transmission sleeve 513 and the inner wall of the support cavity 53 to facilitate the rotation of the transmission sleeve 513. A sleeve flange 515 is integrally formed at one end of the transmission sleeve 513 away from the motor 51. The sleeve flange 515 is fixedly connected with a rotating cylinder 52 through bolts. A rotating cylinder flange 523 is integrally formed at one end of the rotating cylinder 52 close to the transmission sleeve 513. The rotating cylinder 52 is specifically fixedly connected with the sleeve flange 515 through the rotating cylinder flange 523. A thrust bearing 514 is arranged inside the top plate 5. One side of the rotating cylinder flange 523 away from the sleeve flange 515 is installed at the top position of the thrust bearing 514. The thrust bearing 514 can make the rotation between the rotating cylinder 52 and the transmission sleeve 513 more stable. A first jet component is fixedly arranged inside the rotating cylinder 52. The first jet component includes a first jet orifice 31 and a fixed circular plate 33. The first jet orifice 31 is fixedly arranged at the bottom of the fixed circular plate 33. The fixed circular plate 33 is fixedly arranged inside the rotating cylinder 52. The first jet orifice 31 can jet helium gas towards the top position of the workpiece to be measured 24.

[0038] Refer to Figure 5 and Figure 6, the rotary drum 52 is arranged in a cylindrical shape, and a plurality of vertical plates 521 are welded around the outer side of the rotary drum 52 for one week around the rotating shaft 511. The length of the vertical plate 521 is the same as the height of the rotary drum 52, and a driving groove 522 is formed between the plurality of vertical plates 521. A screw cylinder 61 is arranged on the screw cylinder fixing frame 6. The diameter of the rotary drum 52 is set to be smaller than the diameter of the screw cylinder 61. This setting enables the rotary drum 52 to extend into the screw cylinder 61. When the motor 51 drives the transmission sleeve 513 to rotate, the transmission sleeve 513 can drive the rotary drum 52 to rotate in the screw cylinder 61. The screw cylinder 61 is arranged in a cylindrical tubular structure. The top and bottom of the screw cylinder 61 are open. A through groove is formed around the side of the screw cylinder 61 to form a screw pitch groove 611. A second air jet assembly is arranged on the screw cylinder 61. The second air jet assembly includes connecting arms 623. There are two connecting arms 623. A roller 625 is rotatably arranged on the side of the two connecting arms 623 close to the screw cylinder 61. One end of the roller 625 away from the connecting arm 623 passes through the screw pitch groove 611 and extends into the driving groove 522. Anti-slip threads 612 are formed on the roller 625, and anti-slip threads 612 are formed on the groove wall of the screw pitch groove 611. The roller 625 and the screw pitch groove 611 can be engaged through the anti-slip threads 612. There is an angle between the two connecting arms 623. This setting can adapt to the slope of the screw pitch groove 611. One end of the connecting arm 623 away from the roller 625 is also fixedly provided with a fixing plate 626. The two connecting arms 623 are fixedly connected through the fixing plate 626. The second air jet assembly further includes a second air jet port 32. The second air jet port 32 is arranged on the fixing plate 626. The second air jet port 32 can spray helium gas toward the side of the test piece 24. Both the first air jet port 31 and the second air jet port 32 are connected to a helium gas bag through pipelines.

[0039] The implementation principle of the embodiment of this application is as follows: Place the test piece 24 on the rubber pad 231 so that the bottom surface of the test piece 24 covers the helium detection hole 232. Start the equipment, and the helium mass spectrometry detector 21 starts to evacuate, which can tightly adsorb the test piece 24 on the rubber pad 231. The motor 51 starts to drive the transmission sleeve 513 to rotate, and the transmission sleeve 513 drives the rotating cylinder 52 to rotate. When the rotating cylinder 52 rotates, the vertical plate 521 plays a limiting role on the roller 625 arranged in the driving groove 522. The roller 625 can climb or descend along the shape of the spiral groove 611 in the direction of the rotation of the rotating cylinder 52, thereby driving the second nozzle 32 to spiral up or down along the spiral groove 611, so that the second nozzle 32 can uniformly spray helium gas around the test piece 24, thereby shortening the detection time. When the roller 625 climbs or descends along the spiral groove 611 in the direction of the rotation of the rotating cylinder 52, it can change the force with which the second nozzle 32 sprays helium gas on the test piece 24. The helium mass spectrometry leak detector 21 evacuates the helium detection hole 232. If there is a leak hole in the test piece 24, helium gas can be sucked into the detection by the helium mass spectrometry leak detector 21 through the leak hole, and a reminder signal is sent to the operator to inform the operator that the test piece 24 fails the test. If there is no leak hole in the test piece 24, there is no reminder, and finally the function of quickly testing the test piece 24 is realized.

[0040] The above are all the preferred embodiments of this application, and the protection scope of this application is not limited thereby. Therefore, all equivalent changes made according to the structure, shape, and principle of this application shall be covered within the protection scope of this application.

Claims

1. Semi-enclosed helium quality leak detection device, characterized by: The invention comprises a detection component, a first jet component and a second jet component, wherein the detection component comprises a helium mass spectrometer leak detector (21), a test base (22) and a test disk (23), wherein the test base (22) is fixedly arranged on the helium mass spectrometer leak detector (21), the top of the test base (22) is fixedly connected to the test disk (23), a rubber pad (231) is fixedly arranged on the test disk (23), a through hole is opened on the rubber pad (231) to form a helium detection hole (232), a test piece (24) can be placed on the helium detection hole (232) and cover the helium detection hole (232), and the first jet component comprises a first nozzle (31), and the first nozzle (31) can spray toward the top of the test piece (24) The second jetting assembly comprises a second jet (32), and the second jet (32) can jet helium toward the side of the test piece (24); the second jetting assembly also comprises a connecting arm (623), and a roller (625) is rotatably arranged on the connecting arm (623), and the roller (625) passes through the screw groove (611) and extends into the driving groove (522), and the roller (625) is provided with an anti-slip pattern (612); a fixing plate (626) is fixedly arranged on the connecting arm (623), and the second jetting assembly (32) is fixedly arranged on the fixing plate (626); a fixing circular plate (33) is fixedly arranged in the rotating cylinder (52), and the first jetting assembly (31) is fixedly arranged on the fixing circular plate (33).

2. The semi-enclosed helium quality leak detection device according to claim 1, characterized in that: The detection disk (23) is provided with a through hole to form a detection disk hole (233), the detection disk hole (233) is connected to the helium detection hole (232), the test base (22) is provided with a through hole, a vacuum tube (221) is arranged in the through hole, one end of the vacuum tube (221) is connected to the helium mass spectrometer leak detector (21), and the other end is connected to the detection disk hole (233).

3. The semi-enclosed helium leak detection device according to claim 1, characterized in that: A telescopic sleeve (7) is also fixedly arranged on the helium mass spectrometer leak detector (21), and the telescopic sleeve (7) comprises a bottom cylinder portion (71) and a telescopic portion (72), a screw barrel fixing frame (6) is fixedly arranged on the bottom cylinder portion (71), and a top plate (5) is fixedly arranged on the telescopic portion (72).

4. The semi-enclosed helium leak detection device according to claim 3, characterized in that: A motor (51) is fixedly arranged on the top plate (5), and the motor (51) is fixedly arranged on the top of the top plate (5). The motor (51) comprises a rotating shaft (511), and a transmission key (512) is fixedly arranged on the rotating shaft (511). The rotating shaft (511) is fixedly connected to a transmission sleeve (513) via the transmission key (512), and a sleeve flange (515) is arranged on the transmission sleeve (513).

5. The semi-enclosed helium leak detection device according to claim 4, characterized in that: A thrust bearing (514) is arranged inside the top plate (5), a rotating drum (52) is mounted on the thrust bearing (514), a rotating drum flange (523) is arranged on the rotating drum (52), the rotating drum (52) is mounted on the thrust bearing (514) via the rotating drum flange (523), and the rotating drum flange (523) is fixedly connected to the sleeve flange (515).

6. The semi-enclosed helium leak detection device according to claim 5, characterized in that: A vertical plate (521) is fixedly arranged on the outer surface of the rotating drum (52), and a plurality of the vertical plates (521) are fixedly arranged at intervals around the outer surface of the rotating drum (52), and a driving groove (522) is formed between the vertical plates (521). The first nozzle (31) is fixedly arranged inside the rotating drum (52).

7. The semi-enclosed helium quality leak detection device according to claim 6, characterized in that: A screw barrel (61) is arranged on the screw barrel fixing frame (6), a through groove is provided on the screw barrel (61) to form a screw groove (611), an anti-slip pattern (612) is provided on the inner wall of the screw groove (611), and the rotating barrel (52) is inserted into the screw barrel (61).

8. The semi-enclosed helium leak detection device according to claim 1, characterized in that: The first nozzle (31) and the second nozzle (32) are connected to a helium bag via a pipeline.

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