A composite polishing method based on water-based two-phase flow and abrasive particle flow

Abstract

The application discloses a kind of based on water-based two-phase flow and abrasive flow composite polishing method, comprising: using water-based two-phase flow to the micro inner channel structure is polished, obtain from original roughness polishing to 1.6 μm~5.6 μm range in specific roughness critical value and corresponding critical polishing time, and according to critical polishing time determines water-based two-phase flow actual polishing time;According to the aspect ratio, the abrasive grain size of abrasive flow required in the abrasive flow polishing process, the abrasive flow medium viscosity and the abrasive flow medium pressure are determined;Using abrasive flow medium to the micro inner channel structure after polishing by water-based two-phase flow is polished, according to the relationship between the discharge weight of abrasive flow medium used and the roughness of micro inner channel structure, the required abrasive flow polishing time is obtained;Using other micro inner channel structures in the same batch to carry out batch polishing.The composite polishing method of the application can well control the small turning channel deformation in micro inner channel structure.

Claims

1. A composite polishing method based on water-based two-phase flow and abrasive flow, characterized in that, For polishing micro-internal flow channel structures with an aperture ≤3mm, a length-to-diameter ratio >50:1, and curves, the composite polishing method includes: S1: Polish the micro-internal flow channel structure using a water-based two-phase flow to obtain a specific roughness critical value and corresponding critical polishing time for the micro-internal flow channel structure from its original roughness to the range of 1.6μm~5.6μm. The actual polishing time of the water-based two-phase flow is then determined based on the critical polishing time. The specific roughness critical value represents the roughness value of the micro-internal flow channel structure corresponding to the point where the flow rate changes abruptly during the polishing process of the water-based two-phase flow medium. The actual polishing time of the water-based two-phase flow = -3min, where, This indicates the critical polishing time; S2: Determine the abrasive particle size, abrasive flow medium viscosity, and abrasive flow medium pressure required for the abrasive flow polishing process based on the aspect ratio of the micro-internal flow channel structure. S3: Polish the micro-internal flow channel structure after water-based two-phase flow polishing using abrasive flow media. The required abrasive flow polishing time is obtained based on the relationship between the output weight of the abrasive flow media and the roughness of the micro-internal flow channel structure. S4: Using the actual polishing time of the water-based two-phase flow, the polishing time of the abrasive flow, the abrasive particle size of the abrasive flow, the viscosity of the abrasive flow medium, and the pressure of the abrasive flow medium, batch polish other micro-fine internal flow channel structures in the same batch.

2. The composite polishing method based on water-based two-phase flow and abrasive flow according to claim 1, characterized in that, S1 includes: A water-based two-phase flow medium is added to the material cylinder. An initial polishing time for water-based two-phase flow polishing is set. The polishing equipment is started to polish the micro-internal flow channel structure and the flow rate of the water-based two-phase flow medium is measured in real time. It is determined whether the flow rate has an abrupt change point. If so, the roughness value of the micro-internal flow channel structure at the time of the abrupt change point and the corresponding critical polishing time are obtained. The actual polishing time of the water-based two-phase flow is determined based on the critical polishing time. The actual polishing time of the water-based two-phase flow is slightly shorter than the critical polishing time. If not, polishing continues until the flow rate of the water-based two-phase flow medium has an abrupt change point.

3. The composite polishing method based on water-based two-phase flow and abrasive flow according to claim 2, characterized in that, The water-based two-phase flow medium includes silicon carbide particles and water, wherein the mass concentration of the silicon carbide particles is 50%, and the pressure of the water-based two-phase flow is 3~5 MPa.

4. The composite polishing method based on water-based two-phase flow and abrasive flow according to claim 1, characterized in that, S3 includes: Abrasive flow medium is added to the material cylinder, and the abrasive particle size, abrasive flow medium viscosity, abrasive flow medium pressure, and initial polishing time of abrasive flow polishing are set according to the aspect ratio of the micro-internal flow channel structure. The polishing equipment is started to polish the micro-internal flow channel structure that has been polished by water-based two-phase flow. The weight of the abrasive flow medium flowing out of the micro-internal flow channel structure is measured in real time. The relationship between the output weight of the abrasive flow medium and the roughness of the micro-internal flow channel structure is established. The weight of the abrasive flow medium flowing out of the micro-internal flow channel structure when the roughness reaches a predetermined value and the corresponding abrasive flow polishing time are obtained.

5. The composite polishing method based on water-based two-phase flow and abrasive flow according to claim 4, characterized in that, Real-time measurement of the weight of the abrasive fluid medium flowing out of the micro-internal flow channel structure includes: An electronic balance is placed at the outlet end of the abrasive fluid medium in the micro-internal flow channel structure, so that the outflowing abrasive fluid medium falls onto the tray of the electronic balance, and the weight of the outflowing abrasive fluid medium per unit time is monitored based on the reading of the electronic balance.

6. The composite polishing method based on water-based two-phase flow and abrasive flow according to claim 1, characterized in that, The abrasive fluid medium includes dimethyl silicone oil and silicon carbide abrasive, wherein the mass concentration of the silicon carbide abrasive is 70%.

7. The composite polishing method based on water-based two-phase flow and abrasive flow according to claim 1, characterized in that, Before S1, it also includes: A first tooling connector is installed at the polishing medium outlet of the micro-internal flow channel structure to be polished. One end of the first tooling connector is sealed and fixed to the polishing medium outlet in the axial direction, so that the water-based two-phase flow medium flows from the micro-internal flow channel structure into the axial through hole of the first tooling connector during the water-based two-phase flow polishing process. The inner diameter of the axial through hole is slightly larger than the inner diameter of the micro-internal flow channel structure.

8. The composite polishing method based on water-based two-phase flow and abrasive flow according to claim 7, characterized in that, The procedure before step S3 also includes: After the water-based two-phase flow polishing is completed, the first tooling joint is removed, and a second tooling joint is installed at the polishing medium outlet of the micro-fine internal flow channel structure after water-based two-phase flow polishing. One end of the second tooling joint is sealed and fixed to the polishing medium outlet in the axial direction, so that the abrasive flow medium flows from the micro-fine internal flow channel structure into the axial through hole of the second tooling joint during the abrasive flow polishing process.

9. The composite polishing method based on water-based two-phase flow and abrasive flow according to claim 7 or 8, characterized in that, When the aspect ratio of the micro-internal flow channel structure to be polished is 50:1 to 70:1, the safe length of the first tooling joint is 0.5 to 1.2 cm, and the safe length of the second tooling joint is 1.0 to 2.2 cm; when the aspect ratio of the micro-internal flow channel structure to be polished is 70:1 to 100:1, the safe length of the first tooling joint is 0.7 to 1.5 cm, and the safe length of the second tooling joint is 1.5 to 3.0 cm; when the aspect ratio of the micro-internal flow channel structure to be polished is 100:1 to 150:1, the safe length of the first tooling joint is 1.0 to 2.0 cm, and the safe length of the second tooling joint is 2.0 to 3.5 cm; when the aspect ratio of the micro-internal flow channel structure to be polished is >150:1, the safe length of the first tooling joint is 1.8 to 5 cm, and the safe length of the second tooling joint is 3.0 to 7.5 cm.

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