A three-degree-of-freedom, long-stroke micro-positioning platform with high space utilization

Abstract

This invention belongs to the field of micro-nano positioning technology, and particularly relates to a high-space-utilization three-degree-of-freedom, long-stroke micro-positioning platform, comprising a base and XY-axis and Z-axis platforms mounted on the base. The Z-axis platform is perpendicular to the base and has a frame-like three-dimensional structure, with an inductive actuator inside for Z-axis motion. The XY-axis platform is parallel to the base and adopts a three-dimensional symmetrical design, including multiple flexible support frames symmetrically arranged around the Z-axis platform. One end of each flexible support frame is connected to the Z-axis platform via a power output baffle, and the other end is connected to a voice coil motor via a thin, folded flexible leaf spring. The voice coil motor drives the XY-axis platform to achieve translational motion in the XY-axis direction. This invention's three-degree-of-freedom micro-positioning platform, with its three-dimensional structure design, achieves higher space utilization. Furthermore, its hybrid design minimizes decoupling between mechanisms, resulting in high motion accuracy and strong load-bearing capacity.

Description

Technical Field

[0001] This invention belongs to the field of micro-nano positioning technology, and in particular relates to a three-degree-of-freedom long-stroke micro-positioning platform with high space utilization. Background Technology

[0002] The statements in this section are merely background information related to the present invention and do not necessarily constitute prior art.

[0003] With the continuous development of micro-nano positioning technology, ultra-precision micro-positioning platforms have been widely used in semiconductor manufacturing, ultra-precision machining, optical adjustment, biomedical engineering and other fields.

[0004] Currently, the most common high-precision, long-stroke three-degree-of-freedom micro-positioning platforms are X-axis and Y-axis translation and Z-axis rotation, while XYZ-axis three-degree-of-freedom translational micro-positioning platforms have been relatively less studied. Existing XYZ-axis three-degree-of-freedom translational micro-positioning platforms mostly employ planar designs for the XY-axis translation mechanism, and use piezoelectric ceramics combined with a flexible mechanism for direct actuation of the Z-axis translation. This results in problems such as low space utilization and a small Z-axis stroke. Summary of the Invention

[0005] To overcome the shortcomings of the prior art, the present invention provides an XYZ axis three-degree-of-freedom translational micro-positioning platform that simultaneously possesses high space utilization, high precision, and large stroke.

[0006] To achieve the above objectives, one or more embodiments of the present invention provide the following technical solutions:

[0007] The first aspect of the present invention provides a three-degree-of-freedom large-stroke micro-positioning platform with high space utilization, including a base and an XY-axis platform and a Z-axis platform disposed on the base;

[0008] The Z-axis platform is set vertically to the base and has a frame-type three-dimensional structure. The interior of the frame-type three-dimensional structure is equipped with a bionic particle for realizing Z-axis direction movement.

[0009] The XY-axis platform is arranged parallel to the base and adopts a three-dimensional symmetrical structure design. It includes multiple flexible support frames symmetrically arranged around the Z-axis platform. One end of the flexible support frame is connected to the Z-axis platform through a power output baffle, and the other end is connected to the voice coil motor through a thin folded flexible leaf spring. The voice coil motor is used to drive the XY-axis platform to achieve translational motion in the XY-axis direction.

[0010] The above one or more technical solutions have the following beneficial effects:

[0011] (1) The three-degree-of-freedom micro-positioning platform of the present invention adopts a three-dimensional structure design, which can achieve a higher space utilization rate. At the same time, it adopts a hybrid design, that is, the XY axes are connected in parallel and the Z axis is connected in series between the XY axes, which reduces the decoupling between the mechanisms, increases the motion accuracy, and strengthens the load-bearing capacity.

[0012] (2) The three-degree-of-freedom micro-positioning platform of the present invention adopts two types of quadrangular prism-quadrangular prism parallel and symmetrical parallel T-shaped structures for the XY axis platform, which are suitable for smaller workspaces and occasions requiring high-frequency drive or high-speed motion, so that the XY axis platform has higher natural frequency and better coupling performance and better motion stability.

[0013] (3) The three-degree-of-freedom micro-positioning platform of the present invention adopts a biomimetic structure design for the Z-axis, which has the advantages of large stroke and high speed. The hollow design is more suitable for applications in fields such as biomedical engineering and optical systems.

[0014] Advantages of additional aspects of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0015] The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an improper limitation of the invention.

[0016] Figure 1 This is a schematic diagram of a three-degree-of-freedom, long-stroke micro-positioning platform structure with high space utilization provided in an embodiment of the present invention;

[0017] Figure 2 This is a schematic diagram of the overall structure of a three-degree-of-freedom, long-stroke micro-positioning platform with high space utilization provided in an embodiment of the present invention;

[0018] Figure 3 This is a top view of the micro-positioning platform structure according to an embodiment of the present invention;

[0019] Figure 4 This is a structural diagram of the XY-axis platform symmetrical flexible support frame according to an embodiment of the present invention;

[0020] Figure 5 This is a schematic diagram of the Z-axis platform structure according to an embodiment of the present invention;

[0021] Figure 6 This is a schematic diagram of the Z-axis platform bionic bionic structure according to an embodiment of the present invention;

[0022] Figure 7 This is a schematic diagram of the lower limb structure of a bionic animal according to an embodiment of the present invention.

[0023] In the figure, 1. Thin folded flexible leaf spring; 2. Flexible support frame; 201 Frame of flexible support frame; 202 T-shaped flexible beam; 2021 First crossbeam; 2022 First vertical beam; 2023 Flexible crossbeam; 20231 Upper arc groove; 20232 Lower arc groove; 3. Z-axis platform; 4. Base; 5. External guide leaf spring; 6. Power output baffle; 7. Fixed seat; 8. Carrying plate; 9. Bionic particle upper limb end; 901 Bionic particle body; 902 Upper limb end driving foot; 10. Bionic particle lower limb end; 11. Upper limb end lever amplification mechanism; 12. Upper limb end piezoelectric stack; 13. Lower limb end power storage mechanism; 14. Lower limb end driving foot; 15. Lower limb end piezoelectric stack; 16. Lower limb end fixed guide mechanism. Detailed Implementation

[0024] It should be noted that the following detailed description is illustrative and intended to provide further explanation of the invention. Unless otherwise specified, all technical and scientific terms used in this invention have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains.

[0025] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, or combinations thereof.

[0026] Example 1

[0027] like Figure 1 , Figure 2 As shown, this embodiment discloses a three-degree-of-freedom large-stroke micro-positioning platform with high space utilization, including a base and an XY-axis platform and a Z-axis platform disposed on the base;

[0028] The Z-axis platform is set vertically to the base and has a frame-type three-dimensional structure. The interior of the frame-type three-dimensional structure is equipped with a bionic particle for realizing Z-axis direction movement.

[0029] The XY-axis platform is arranged parallel to the base and adopts a three-dimensional symmetrical structure design. It includes multiple flexible support frames symmetrically arranged around the Z-axis platform. One end of the flexible support frame is connected to the Z-axis platform through a power output baffle, and the other end is connected to an external voice coil motor through a thin folded flexible leaf spring. The external voice coil motor is used to drive the XY-axis platform to achieve translational motion in the XY-axis direction.

[0030] As a further technical solution, such as Figure 3 , Figure 4As shown, the four flexible support frames in this invention are symmetrically arranged in a cross shape around the Z-axis platform. Each flexible support frame is connected to the Z-axis platform through a power output baffle, and an external guide leaf spring is provided at the connection between the power output baffle and the Z-axis platform.

[0031] The flexible support frame adopts a symmetrical parallel T-shaped structure design at the front end, and the flexible hinge in the middle adopts an arc-shaped design, which reduces the error caused by the deformation of the support frame and improves the motion decoupling capability of the XY axis platform. The rear end is connected to the power output baffle 6, which effectively transmits the horizontal power to the Z-axis platform 3.

[0032] Specifically: Each of the flexible support frames 201 is a rigid rectangular frame structure with a notch at one end, and has a T-shaped flexible beam 202 and four flexible crossbeams 203 inside; one end of the T-shaped flexible beam 202 extends out of the notch of the rectangular frame and connects to the power output baffle 6; the four flexible crossbeams 203 have the same structure and are symmetrically arranged at the four corners of the rectangular frame 201; the two ends of each flexible crossbeam 203 are connected to the T-shaped flexible beam 202 and the flexible support frame 201 by arc flexible hinges.

[0033] The upper and lower arc-shaped grooves 2031 and 2032 are respectively provided on the upper and lower end faces of the arc flexible hinge. Each set of arc-shaped grooves has the same shape and structure and is symmetrically distributed on the left and right sides relative to the center line of the arc flexible hinge.

[0034] The T-shaped flexible beam 202 includes a first horizontal beam 2021 and a first vertical beam 2022. The first horizontal beam 2021 is connected to the center of the first vertical beam 2022. The first horizontal beam 2021 is arranged parallel to the flexible horizontal beam 203. The first vertical beam 2022 is vertically arranged in the middle of the flexible support frame 201, and its left and right sides are respectively connected to the flexible horizontal beam 203.

[0035] As a further technical solution, the XY-axis platform is connected to an external voice coil motor through the fixed threaded holes on the thin folded flexible leaf spring 1. The thin folded flexible leaf spring adopts a quadrangular prism-quadrangular prism parallel structure design, and is connected to the base on both sides by bolts for overall fixation of the XY-axis platform. Adjacent thin folded flexible leaf springs 1 are in contact with each other. The thin folded flexible leaf spring has two small threaded holes in the middle for connecting to the voice coil motor, so as to realize the power input of the XY axis.

[0036] The base 4 has a thin, folded flexible leaf spring 1 connected to the XY axis platform at one end and connected to an external fixed platform at the other end to fix the entire platform. The folded flexible leaf spring is designed in three dimensions to improve space utilization.

[0037] Through the above structural design, the present invention makes the XY-axis platform suitable for smaller workspaces and occasions requiring high-frequency drive or high-speed motion, giving the XY-axis platform a higher natural frequency, better coupling performance, and better motion stability; and the overall XY-axis platform has a symmetrical three-dimensional structural design, which gives the platform a better platform space utilization rate.

[0038] As a further technical solution, the X-axis platform and Y-axis platform use the same principle for motion.

[0039] An external voice coil motor is used to drive the XY-axis platform to achieve translational motion in the XY-axis direction, including: the external voice coil motor pushes a thin sheet folding flexible leaf spring to generate a thrust parallel to the X-axis direction, the thin sheet folding flexible leaf spring transmits the translational force to the flexible support frame, and the flexible support frame then transmits the force to the external guide leaf spring of the Z-axis platform through the power output baffle to achieve translational motion of the Z-axis platform in the X-axis direction;

[0040] The external voice coil motor drives the thin, folded flexible leaf spring to generate a thrust parallel to the Y-axis. The thin, folded flexible leaf spring transmits the translational force to the flexible support frame, which then transmits the force to the external guide leaf spring of the Z-axis platform through the power output baffle, thereby realizing the translational movement of the Z-axis platform in the Y-axis direction.

[0041] As a further technical solution, such as Figure 5 , Figure 6 As shown, the Z-axis platform 3 adopts a hollow design in the middle, which is more suitable for applications in fields such as biomedical engineering and optical systems.

[0042] The Z-axis platform includes a hollow fixed base 7 and an inductive particle; the fixed base 7 has two symmetrical guide rails 701 arranged along its axial direction inside; the upper part of the inductive particle is connected to the loading plate 8, and the two sides are slidably connected to the guide rails 701; the inductive particle is driven by a piezoelectric stack to move along the guide rails 701 inside the fixed base 7.

[0043] Specifically, the upper limb end 9 and the lower limb end 10 of the bionic bionic unit constitute the bionic bionic unit;

[0044] The bionic bionic upper limb end 9 includes two symmetrically arranged bionic bionic bodies 901, four upper limb end lever amplification mechanisms 11, two upper limb end driving feet 902, and an upper limb end piezoelectric stack 12.

[0045] The bionic prototype body 901 is a straight beam type, with an isosceles triangular structure at the top of its cross-section, and rectangular structures at the middle and bottom. The side length of the middle rectangular structure is equal to the length of the base of the upper isosceles triangle, and the side length of the bottom rectangular structure is less than the side length of the middle rectangular structure. The upper limb driving foot 902 is a T-shaped straight beam type, and the upper limb lever amplification mechanism 11 is an irregular polygonal structure with rounded flexible hinges at its three corners.

[0046] The piezoelectric stack 12 at the upper limb end is arranged vertically, and its two ends are respectively connected to the bionic organism body 901;

[0047] Two upper limb end driving feet 902 are symmetrically arranged at the middle of the left and right sides of the upper limb end piezoelectric stack 12, and one end of the upper limb end driving foot 902 abuts against the guide rail 701 on the fixed base 7.

[0048] The two upper limb lever amplification mechanisms 11 are flexibly connected to the upper bionic organism body 901, the carrier plate 8, and the upper limb driving foot 902, respectively.

[0049] The two upper limb lever amplification mechanisms 11 at the lower part are flexibly connected to the lower bionic body 901, the upper limb driving foot 902 and the fixing plate at the lower limb of the bionic animal, respectively.

[0050] The carrier plate 8 located on the upper part of the upper limb end 9 of the bionic animal and the fixing plate located on the lower part of the upper limb end 9 of the bionic animal are respectively provided with V-shaped grooves that match the upper part of the bionic animal body 901 on the end face that contacts the bionic animal body 901.

[0051] The bionic organism's lower limb end includes a lower limb end fixing plate, a lower limb end power storage mechanism 13, a lower limb end driving foot 14, a lower limb end piezoelectric stack 15, and a lower limb end fixing and guiding mechanism 16;

[0052] The lower limb end fixing plate, the lower limb end power storage mechanism 13, the lower limb end piezoelectric stack 15 and the lower limb end fixing guide mechanism 16 are arranged sequentially from top to bottom, and the lower limb end driving foot 14 is arranged symmetrically on the left and right sides.

[0053] The lower limb end of the bionic animal is connected to the upper limb end of the bionic animal through a fixing plate. The lower end face of the fixing plate is connected to the lower limb end power storage mechanism 13. The lower limb end power storage mechanism 13, the lower limb end driving foot 14, and the lower limb end fixed guide mechanism 16 are all T-shaped straight beam structures, but with different dimensions.

[0054] The lower limb driving feet 14 are symmetrically arranged in the fixed base 7 and are initially positioned at a certain distance from the guide rail 701. The two sides of the lower limb power storage mechanism 13 are respectively connected to the upper ends of the symmetrically arranged lower limb driving feet 14 through flexible power storage leaf springs. The lower limb piezoelectric stack 15 is placed horizontally, and its two ends are respectively connected to the middle of the lower limb driving feet 14.

[0055] like Figure 7 As shown, the lower limb end fixing guide mechanism 16 and the lower limb end power storage mechanism 13 are symmetrically arranged. The two sides of the lower limb end fixing guide mechanism 16 are connected to the lower ends of the symmetrically arranged lower limb end driving feet 14 by flexible power storage leaf springs. The lower limb end fixing guide mechanism 16 is used to fix the lower ends of the lower limb end driving feet 14 and maintain the symmetry of the upper and lower structures of the bionic particle lower limb end 10.

[0056] In this invention, both the upper limb lever amplification mechanism 11 and the lower limb power storage mechanism 13 are made of 7075 aviation aluminum material; the function of the piezoelectric stack is to elongate when the voltage is increased. By using the bionic particle structure designed in this invention, the above-mentioned structural movement can be achieved when the piezoelectric stack elongates.

[0057] When the piezoelectric stack 12 at the upper limb end is energized, it achieves elongation movement. Initially, the two upper limb end driving feet 902 of the bionic generator respectively press against the guide rail 701 in the fixed seat 7, and the piezoelectric stack 12 at the upper limb end is in a normal non-elongated state.

[0058] When a voltage is applied to the piezoelectric stack 12 at the upper limb end, the piezoelectric stack 12 at the upper limb end elongates, causing the lever amplification mechanism 11 at the upper limb end to deform, so that the upper limb end 9 of the bionic bionic transistor leaves the guide rail surface of the fixed seat 7, and the upper limb end 9 of the bionic bionic transistor can achieve left and right opening and closing movements in the guide rail of the fixed seat 7.

[0059] The piezoelectric stack 15 at the lower limb end can also achieve elongation movement when energized. Initially, there is a small gap between the driving foot 14 at the lower limb end and the guide rail 701 in the fixed base 7, and the piezoelectric stack 15 at the lower limb end is in a normal, non-elongated state.

[0060] When a voltage is applied to the piezoelectric stack 15 at the upper limb end, the piezoelectric stack 15 at the upper limb end extends, causing the driving foot 14 at the lower limb end to move to the side and upward. At this time, the driving foot 14 at the lower limb end presses against the guide rail of the fixed seat 7, and compresses the energy storage mechanism 13 at the lower limb end, causing the energy storage mechanism 13 at the lower limb end to deform and accumulate elastic force.

[0061] At this time, the upper limb end 9 of the bionic quantum achieves opening and closing motion in the guide rail of the fixed seat 7, and the elastic force accumulated by the lower limb end power storage mechanism 13 is transmitted to the upper limb end 9 of the bionic quantum, so that the upper limb end 9 of the bionic quantum drives the carrier plate 8 to move in the Z-axis direction.

[0062] Those skilled in the art will understand that the modules or steps of the present invention described above can be implemented using general-purpose computer devices. Optionally, they can be implemented using computer-executable program code, thereby allowing them to be stored in a storage device for execution by a computer device, or they can be fabricated as separate integrated circuit modules, or multiple modules or steps can be fabricated as a single integrated circuit module. The present invention is not limited to any particular combination of hardware and software.

[0063] While the specific embodiments of the present invention have been described above in conjunction with the accompanying drawings, this is not intended to limit the scope of protection of the present invention. Those skilled in the art should understand that various modifications or variations that can be made by those skilled in the art without creative effort based on the technical solutions of the present invention are still within the scope of protection of the present invention.

Claims

1. A high space utilization three-degree-of-freedom large-stroke micro-positioning platform, characterized in that, The base, the XY-axis platform and the Z-axis platform are arranged on the base; The Z-axis platform is arranged perpendicularly to the base and has a frame structure, and a bionic motor is arranged in the frame structure for realizing movement in the Z-axis direction; the Z-axis platform comprises a fixed seat, a moving guide rail is arranged in the fixed seat along the axial direction, the upper part of the bionic motor is connected to a carrier plate, and the two sides of the bionic motor are slidably arranged on the moving guide rail; the bionic motor comprises a bionic motor upper limb end and a bionic motor lower limb end; The bionic motor upper limb end comprises two symmetrically arranged bionic motor bodies, four upper limb end lever amplification mechanisms, two upper limb end driving feet and one upper limb end piezoelectric stack; The upper limb end piezoelectric stack is arranged vertically, and the two ends of the upper limb end piezoelectric stack are respectively connected to the bionic motor bodies; The two upper limb end driving feet are symmetrically arranged at the middle positions of the two sides of the upper limb end piezoelectric stack, and one end of the upper limb end driving feet abuts against the moving guide rail of the fixed seat; The two upper limb end lever amplification mechanisms at the upper part are respectively flexibly connected to the upper bionic motor bodies, the carrier plate and the upper limb end driving feet; The two upper limb end lever amplification mechanisms at the lower part are respectively connected to the lower bionic motor bodies, the upper limb end driving feet and the lower limb end fixing plate of the bionic motor lower limb end; The bionic motor lower limb end comprises, from top to bottom, a lower limb end fixing plate, a lower limb end force storage mechanism, a lower limb end piezoelectric stack, a lower limb end fixing guide mechanism and left and right symmetrically arranged lower limb end driving feet; The bottom of the lower limb end fixing plate is connected to the lower limb end force storage mechanism; The lower limb end driving feet are symmetrically arranged in the fixed seat, and are spaced apart from the guide rail at the initial position, the lower limb end piezoelectric stack is arranged horizontally, and the two ends of the lower limb end piezoelectric stack are respectively connected to the middle parts of the lower limb end driving feet; The two sides of the lower limb end force storage mechanism and the lower limb end fixing guide mechanism are respectively connected to the upper ends and the lower ends of the lower limb end driving feet through flexible force storage leaf springs; The XY-axis platform is arranged parallel to the base and has a symmetrical structure, comprises a plurality of flexible support frames symmetrically arranged around the Z-axis platform, one end of each flexible support frame is connected to the Z-axis platform through a power output baffle, the other end of each flexible support frame is connected to a voice coil motor through a sheet folding flexible leaf spring, the voice coil motor is used for driving the XY-axis platform to realize translational movement in the XY-axis direction, and the sheet folding flexible leaf spring has a four-prism-four-prism parallel structure.

2. The high space utilization three-degree-of-freedom large-stroke micro-positioning platform according to claim 1, wherein, Each flexible support frame has a rectangular frame structure with a notch at one end, and a T-shaped flexible beam and four flexible cross beams are arranged in the rectangular frame structure; The two ends of each flexible cross beam are respectively connected to the T-shaped flexible beam and the flexible support frame through a circular arc flexible hinge, and one end of the T-shaped flexible beam extends out of the notch of the flexible support frame and is connected to the power output baffle.

3. The high-space-utilization three-degree-of-freedom large-stroke micro-positioning platform according to claim 2, wherein, The four flexible cross beams have the same structure and are symmetrically arranged at the four corners of the rectangular frame.

4. The high-space-utilization three-degree-of-freedom large-stroke micro-positioning platform according to claim 1, wherein, The two ends of the sheet folding flexible leaf spring are respectively fixed on the base through bolts, and adjacent sheet folding flexible leaf springs are arranged in contact with each other.

5. The high-space-utilization three-degree-of-freedom large-stroke micro-positioning platform according to claim 1, wherein, An external guide leaf spring is arranged at the connection between the power output baffle and the Z-axis platform.

6. A high space utilization three-degree-of-freedom large stroke micro-positioning platform according to claim 5, wherein, The voice coil motor is used for driving the XY axis platform to realize parallel motion in the XY axis direction, and comprises: the voice coil motor pushes the thin sheet folding flexible leaf spring to generate thrust parallel to the X axis direction, the thin sheet folding flexible leaf spring transmits the parallel motion force to the flexible support frame, and the flexible support frame transmits the force to the external guide leaf spring of the Z axis platform through the power output baffle to realize parallel motion of the Z axis platform in the X axis direction. The voice coil motor pushes the thin sheet folding flexible leaf spring to generate thrust parallel to the Y axis direction, the thin sheet folding flexible leaf spring transmits the parallel motion force to the flexible support frame, and the flexible support frame transmits the force to the external guide leaf spring of the Z axis platform through the power output baffle to realize parallel motion of the Z axis platform in the Y axis direction.

7. A high space utilization three-degree-of-freedom large stroke micro-positioning platform as claimed in claim 1, characterized in that, The bionic driver adopts a piezoelectric stack drive.

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