Carrying path switching device, carrying system, and carrying path switching method

Abstract

The X support mechanism (41) has a conveyer support member (61) attached to the end portion (321) of the movable linear conveyer (3) and a uniaxial robot (51) attached to the fixed linear conveyer (2a) and guiding the conveyer support member (61) in the Y direction. With this support mechanism (41) having the conveyer support member (61) and the uniaxial robot (51), the end portion (321) of the movable linear conveyer (3) can be firmly supported to the fixed linear conveyer (2a). The support mechanism (43) has a conveyer support member (81) attached to the end portion (32r) of the movable linear conveyer (3) and a Y-axis conveyer guide (71) attached to the fixed linear conveyer (2b) and guiding the conveyer support member (81) in the Y direction. With this support mechanism (43) having the conveyer support member (81) and the Y-axis conveyer guide (71), the end portion (32r) of the movable linear conveyer (3) can be firmly supported to the fixed linear conveyers (2b).

Description

Technical Field

[0001] This invention relates to a technique for switching the transport path of a table conveyor between two fixed linear conveyors arranged on both sides of a movable linear conveyor, using a movable linear conveyor. Background Technology

[0002] Patent Document 1 describes a circulating transport device that uses a movable linear conveyor to transport a tabletop conveyor between two fixed linear conveyors arranged side-by-side. In this device, the movable linear conveyor is capable of moving between a position opposite one of the two fixed linear conveyors and a position opposite the other. The movable linear conveyor transfers the tabletop conveyor between the fixed linear conveyors at the position opposite to one of them, and between the two fixed linear conveyors at the position opposite to the other.

[0003] Prior art literature

[0004] Patent documents

[0005] Patent Document 1: WO2021 / 229781 Summary of the Invention

[0006] The problem that the invention aims to solve

[0007] Furthermore, in the aforementioned circulating transport device, both fixed linear conveyors that transfer the conveyor platform between the movable linear conveyor and the movable linear conveyor are positioned on one side of the movable linear conveyor. Therefore, the movable linear conveyor only needs to be able to transfer the platform conveyor between itself and the fixed linear conveyor positioned on one side of the movable linear conveyor.

[0008] In contrast, in a device where two fixed linear conveyors are arranged on either side of a movable linear conveyor, the movable linear conveyor needs to perform both the transfer of a platform conveyor between one fixed linear conveyor on one side of the movable linear conveyor and the transfer of a platform conveyor between the fixed linear conveyors on the other side of the movable linear conveyor. Therefore, there are scenarios where the platform conveyor is located at one end of the movable linear conveyor and is biased to one side relative to the load of the movable linear conveyor, and scenarios where the platform conveyor is located at the other end of the movable linear conveyor and is biased to the other side relative to the load of the movable linear conveyor. Consequently, when transferring a platform conveyor between one fixed linear conveyor, one end of the movable linear conveyor sinks, or when transferring a platform conveyor between the fixed linear conveyors on the other side, the other end of the movable linear conveyor sinks, thus creating the problem that the transfer of the platform conveyor between the fixed linear conveyors cannot be performed properly.

[0009] In view of the above-mentioned problems, the present invention aims to overcome the bias of the load relative to the movable linear conveyor and support the movable linear conveyor, and to properly perform the transfer of conveyor platforms between the movable linear conveyor and the fixed linear conveyors arranged on both sides of the movable linear conveyor.

[0010] Methods for solving problems

[0011] The transport path switching device of the present invention includes: a movable linear conveyor for transporting a conveyor platform along a predetermined transport direction; a first support mechanism for supporting a first end portion of the movable linear conveyor that is one side of the conveyor in the transport direction; and a second support mechanism for supporting a second end portion of the movable linear conveyor that is the opposite side of one side in the transport direction. The first and second support mechanisms support the movable linear conveyor, which moves along the switching direction within a movable range including a first position and a second position that are different from each other in the switching direction inclined relative to the transport direction. A first fixed linear conveyor is positioned opposite the first position from one side of the transport direction. The second fixed linear conveyor is opposite to the second position from the other side of the transport direction. The movable linear conveyor stops at the first position and transfers the conveyor platform between itself and the first fixed linear conveyor. The movable linear conveyor stops at the second position and transfers the conveyor platform between itself and the second fixed linear conveyor. The first support mechanism has a first movable member installed at the first end of the movable linear conveyor and a first guide portion installed on the first fixed linear conveyor and guiding the first movable member in the switching direction. The second support mechanism has a second movable member installed at the second end of the movable linear conveyor and a second guide portion installed on the second fixed linear conveyor and guiding the second movable member in the switching direction.

[0012] The conveying system of the present invention comprises: a first fixed linear conveyor that drives the conveyor platform along the conveying direction; a second fixed linear conveyor that drives the conveyor platform along the conveying direction; and the aforementioned conveying path switching device, which is disposed between the first fixed linear conveyor and the second fixed linear conveyor in the conveying direction.

[0013] The transport path switching method of the present invention includes a step of moving a movable linear conveyor of a transport conveyor platform along a predetermined transport direction within a movable range including a first position and a second position that are different from each other in the switching direction relative to the transport direction. A first end, which is one side of the movable linear conveyor in the transport direction, is supported by a first support mechanism, and a second end, which is the opposite side of the movable linear conveyor in the transport direction, is supported by a second support mechanism. A first fixed linear conveyor is opposite to the first position from one side of the transport direction, and a second fixed linear conveyor is opposite to the first position from the other side of the transport direction. The two positions are opposite each other. The movable linear conveyor stops at the first position and transfers the conveyor platform between the first fixed linear conveyor and the second fixed linear conveyor. The movable linear conveyor stops at the second position and transfers the conveyor platform between the second fixed linear conveyor and the second fixed linear conveyor. The first support mechanism has a first movable member installed at the first end of the movable linear conveyor and a first guide part installed on the first fixed linear conveyor and guiding the first movable member in the switching direction. The second support mechanism has a second movable member installed at the second end of the movable linear conveyor and a second guide part installed on the second fixed linear conveyor and guiding the second movable member in the switching direction.

[0014] In the present invention (transport path switching device, transport system, and transport path switching method) configured as described above, a first support mechanism is provided to support a first end of a movable linear conveyor on one side in the transport direction, and a second support mechanism is provided to support a second end of a movable linear conveyor on the opposite side in the transport direction. Specifically, the first support mechanism has a first movable member mounted on the first end of the movable linear conveyor and a first guide portion mounted on a first fixed linear conveyor and guiding the first movable member in the switching direction. With this first support mechanism having a first movable member and a first guide portion, the first end of the movable linear conveyor can be firmly supported on the first fixed linear conveyor. Therefore, even when the load relative to the movable linear conveyor is biased towards the first end, the sinking of the first end opposite to the first fixed linear conveyor can be suppressed, and the transfer of the conveyor platform between the first fixed linear conveyor and the first end can be appropriately performed. Furthermore, the second support mechanism has a second movable member mounted on the second end of the movable linear conveyor and a second guide portion mounted on a second fixed linear conveyor and guiding the second movable member in the switching direction. This second support mechanism, with its second movable component and second guide, securely supports the second end of the movable linear conveyor to the second fixed linear conveyor. Therefore, even when the load relative to the movable linear conveyor is biased towards the second end, sinking of the second end opposite the second fixed linear conveyor can be suppressed, and the transfer of conveyor platforms between the second fixed linear conveyor and the second end can be appropriately performed. As a result, the bias of the load relative to the movable linear conveyor can be overcome, the movable linear conveyor can be supported, and the transfer of conveyor platforms between the fixed linear conveyors arranged on both sides of the movable linear conveyor and the movable linear conveyor can be appropriately performed.

[0015] Furthermore, the transport path switching device can also be configured such that the first guide section has a drive source, which drives the first movable member along the switching direction to move the movable linear conveyor along the switching direction. In this configuration, the drive source of the first guide section enables the movable linear conveyor to move along the switching direction between a first position and a second position. In particular, by equipping the first guide section with a drive source, the functions of driving and guiding the first movable member can be compactly achieved using a single functional unit like the first guide section, thus enabling miniaturization of the transport path switching device.

[0016] Furthermore, the transport path switching device can also be configured as follows: a first guide section has a ball screw arranged parallel to the switching direction, a first movable member is connected to the nut of the ball screw, and a drive source rotates the screw shaft of the ball screw to drive the first movable member along the switching direction. With this structure, a ball screw-type single-axis robot arranged on one side of the movable linear conveyor can move the movable linear conveyor along the switching direction.

[0017] Furthermore, the transport path switching device can be configured such that: a first guide section has a first drive source, and a second guide section has a second drive source; the first drive source drives the movable linear conveyor to move in the switching direction by driving the first movable member in the switching direction, and the second drive source drives the movable linear conveyor to move in the switching direction by driving the second movable member in the switching direction. In this configuration, the movable linear conveyor can move between a first position and a second position in the switching direction via the first drive source of the first guide section and the second drive source of the second guide section. In particular, by equipping the first guide section with a first drive source, the functions of driving and guiding the first movable member can be compactly achieved using a single functional unit like the first guide section, and by equipping the second guide section with a second drive source, the functions of driving and guiding the second movable member can be compactly achieved using a single functional unit like the second guide section, thus enabling miniaturization of the transport path switching device.

[0018] Furthermore, the transport path switching device can also be configured as follows: a first guide section has a first ball screw arranged parallel to the switching direction, a first movable member is connected to the nut of the first ball screw, a first drive source rotates the screw shaft of the first ball screw to drive the first movable member along the switching direction, a second guide section has a second ball screw arranged parallel to the switching direction, a second movable member is connected to the nut of the second ball screw, and a second drive source rotates the screw shaft of the second ball screw to drive the second movable member along the switching direction. With this structure, by using a ball screw-type single-axis robot arranged on one side of the movable linear conveyor and a ball screw-type single-axis robot arranged on the other side of the movable linear conveyor, the movable linear conveyor can be moved along the switching direction.

[0019] Furthermore, the transport path switching device can also be configured as follows: the transport path switching device further includes a control unit that controls the operation of the first drive source and the operation of the second drive source. When the movable linear conveyor and the first fixed linear conveyor are facing each other in the transport direction, the control unit stops the operation of the second drive source and controls the position of the movable linear conveyor to a first position by the operation of the first drive source. When the movable linear conveyor and the second fixed linear conveyor are facing each other in the transport direction, the control unit stops the operation of the first drive source and controls the position of the movable linear conveyor to a second position by the operation of the second drive source. With this structure, when the first fixed linear conveyor and the movable linear conveyor are facing each other in the transport direction, interference from the operation of the second drive source can be prevented, and the movable linear conveyor can be accurately positioned relative to the first fixed linear conveyor by the first drive source, thereby achieving smooth transfer of the table conveyor. Furthermore, when the second fixed linear conveyor and the movable linear conveyor are positioned relative to each other in the transport direction, interference from the first drive source can be prevented, and the movable linear conveyor can be accurately positioned relative to the second fixed linear conveyor by the second drive source, thus achieving smooth transfer of the tabletop conveyor. It should be noted that the scenario of positioning the fixed linear conveyor and the movable linear conveyor relative to each other in the transport direction is representatively exemplified by the scenario of transferring a tabletop conveyor between the fixed and movable linear conveyors. However, the above control is also effective in scenarios where the fixed and movable linear conveyors are positioned relative to each other without the purpose of transferring the tabletop conveyor.

[0020] Furthermore, the transport path switching device can also be configured as follows: the transport path switching device further includes: a linkage mechanism mounted on the movable linear conveyor at a mounting position between a first end and a second end in the transport direction; and a single-axis robot, which moves the movable linear conveyor in the switching direction by driving the linkage mechanism in the switching direction. The linkage mechanism has a first spherical bearing mounted on the movable linear conveyor, a second spherical bearing mounted on a sliding member of the single-axis robot, and a rod connecting the first and second spherical bearings. One end of the rod is supported by the first spherical bearing, and the other end of the rod opposite to one end is supported by the second spherical bearing. With this structure, the parallelism error between the first and second guides and the single-axis robot can be absorbed by the degrees of freedom of the linkage mechanism. Therefore, the movable linear conveyor can move smoothly in the switching direction.

[0021] Furthermore, the conveying path switching device can also be configured as follows: the first movable member has a first support surface that faces the bottom surface of the first end from below, and the first movable member and the first end are positioned by the first support surface colliding with the bottom surface of the first end; the first guide has a first mounting surface that collides with the bottom surface of the first fixed linear conveyor from below, and the first guide and the first fixed linear conveyor are positioned by the first mounting surface colliding with the bottom surface of the first fixed linear conveyor; the second movable member has a second support surface that faces the bottom surface of the second end from below, and the second movable member and the second end are positioned by the second support surface colliding with the bottom surface of the second end; the second guide has a second mounting surface that collides with the bottom surface of the second fixed linear conveyor from below, and the second guide and the second fixed linear conveyor are positioned by the second mounting surface colliding with the bottom surface of the second fixed linear conveyor. In this structure, by aligning the first mounting surface of the transport path switching device with the bottom surface of the first fixed linear conveyor and the second mounting surface of the transport path switching device with the bottom surface of the second fixed linear conveyor, the first and second fixed linear conveyors and the movable linear conveyor can be easily positioned. Therefore, the workload of personnel required for installing the transport path switching device opposite the first and second fixed linear conveyors can be reduced.

[0022] Furthermore, the transport path switching device can also be configured as follows: the movable range includes a third position different from at least the second position among the first and second positions; a third fixed linear conveyor is opposite to the third position from the other side of the transport direction; the movable linear conveyor stops at the third position and transfers the conveyor platform between the movable linear conveyor and the third fixed linear conveyor; and the second guide portion of the second support mechanism is mounted on the third fixed linear conveyor. In this configuration, the second guide portion of the second support mechanism is mounted on the third fixed linear conveyor. With this second support mechanism, the second end of the movable linear conveyor can be firmly supported on the third fixed linear conveyor. Therefore, even when the load relative to the movable linear conveyor is biased towards the second end, the sinking of the second end opposite to the third fixed linear conveyor can be suppressed, and the transfer of the conveyor platform between the third fixed linear conveyor and the second end can be appropriately performed.

[0023] Furthermore, the transport path switching device can also be configured as follows: the movable range includes a fourth position different from at least one of the first and second positions; a fourth fixed linear conveyor is opposite the fourth position from one side of the transport direction; the movable linear conveyor stops at the fourth position and transfers the conveyor platform between the movable linear conveyor and the fourth fixed linear conveyor; and a first guide portion of the first support mechanism is mounted on the fourth fixed linear conveyor. In this configuration, the first guide portion of the first support mechanism is mounted on the fourth fixed linear conveyor. With this first support mechanism, the first end of the movable linear conveyor can be firmly supported on the fourth fixed linear conveyor. Therefore, even when the load relative to the movable linear conveyor is biased towards the first end, the sinking of the first end opposite the fourth fixed linear conveyor can be suppressed, and the transfer of the conveyor platform between the fourth fixed linear conveyor and the first end can be appropriately performed.

[0024] Furthermore, the transport path switching device can also be configured as follows: the transport path switching device further includes: a first mounting member for mounting the first support mechanism on a first mounting base for mounting the first fixed linear conveyor; and a second mounting member for mounting the second support mechanism on a second mounting base for mounting the second fixed linear conveyor. In this configuration, the first and second support mechanisms are supported by the first and second mounting members, thereby reducing the load applied to the first and second fixed linear conveyors.

[0025] Invention Effects

[0026] According to the present invention, it is possible to overcome the bias of the load relative to the movable linear conveyor and support the movable linear conveyor, and to properly perform the transfer of conveyor platforms between the movable linear conveyor and the fixed linear conveyors arranged on both sides of the movable linear conveyor. Attached Figure Description

[0027] Figure 1A It is a top view schematically showing the structure and operation of the invention's conveying system.

[0028] Figure 1B It is a top view schematically showing the structure and operation of the invention's conveying system.

[0029] Figure 1C It is a top view schematically showing the structure and operation of the invention's conveying system.

[0030] Figure 1D It is a top view schematically showing the structure and operation of the invention's conveying system.

[0031] Figure 1E It is a top view schematically showing the structure and operation of the invention's conveying system.

[0032] Figure 2 It is shown Figures 1A to 1E The diagram shows the electrical structure of the substrate handling system.

[0033] Figure 3 This is a front view schematically showing a first example of a branch handling device included in a substrate handling system.

[0034] Figure 4 This is a schematic side view of a support mechanism that supports a movable linear conveyor using a single-axis robot.

[0035] Figure 5 This is a schematic side view of a support mechanism that supports a movable linear conveyor via sliding guides.

[0036] Figure 6 This is a front view schematically showing a second example of a branch handling device included in a substrate handling system.

[0037] Figure 7 This is a flowchart illustrating an example of transfer control in a branch handling device equipped with two single-axis robots.

[0038] Figure 8 This is a front view schematically showing a third example of a branch handling device included in a substrate handling system.

[0039] Figure 9 It is shown schematically. Figure 8 A side view of an example of a linkage mechanism in a branch conveying device. Detailed Implementation

[0040] Figures 1A to 1E This is a top view schematically illustrating the structure and operation of the conveying system of the present invention. Figure 2 It is shown Figures 1A to 1E The diagram shows a block diagram of the electrical structure of the substrate handling system. In the figures of this specification, the X direction (horizontal), the Y direction (orthogonal to the X direction, also horizontal), and the Z direction (vertical) are appropriately shown. Also appropriately shown are the X1 sides (Figs. 1-1) facing opposite directions in the X direction. Figure 1E (left side of the paper) and Xr side (Figure 1~) Figure 1E (Right side of the paper).

[0041] like Figures 1A to 1E As shown, the conveying system 1 comprises two mounting bases 11 and four fixed linear conveyors 2. It should be noted that, when distinguishing between the two mounting bases 11, they are appropriately referred to as mounting bases 11l and 11r; and when distinguishing between the four fixed linear conveyors 2, they are appropriately referred to as fixed linear conveyors 2a, 2b, 2c, and 2d. Furthermore, in... Figure 2 In the diagram, one fixed linear conveyor 2 is shown to represent four fixed linear conveyors 2.

[0042] Two mounting bases 11l and 11r are arranged at a distance 12 in the X direction, and when viewed from above, they form a rectangle consisting of two sides parallel to the X direction and two sides parallel to the Y direction. Two of the four fixed linear conveyors 2, 2a and 2d, are arranged on the upper surface 111 of the mounting base 11l on the Xl side, and two fixed linear conveyors 2b and 2c are arranged on the upper surface 111 of the mounting base 11r on the Xr side. The upper surface 111 of each mounting base 11l and 11r is a horizontal plane orthogonal to the Z direction.

[0043] All four fixed linear conveyors 2 are arranged parallel to the X-direction. Specifically, two fixed linear conveyors 2a and 2d on mounting base 11l are arranged side-by-side with each other in the X-direction, and two fixed linear conveyors 2b and 2c on mounting base 11r are arranged side-by-side with each other in the X-direction. Furthermore, fixed linear conveyors 2a on mounting base 11l and 2c on mounting base 11r are arranged in a straight line in the X-direction, and fixed linear conveyors 2d on mounting base 11l and 2b on mounting base 11r are arranged in a straight line in the X-direction. Moreover, the conveying system 1 is capable of transporting the tabletop conveyor T between these fixed linear conveyors 2a, 2b, 2c, and 2d.

[0044] The fixed linear conveyor 2 includes a linear housing 21 extending along the X direction. Viewed from above, the linear housing 21 is rectangular, consisting of two sides parallel to the X direction and two sides parallel to the Y direction. The linear housing 21 has flanges 23 protruding to both sides in the Y direction. These flanges 23 are fastened to the upper surface 111 of the mounting base 11 by screws, thereby fixing the fixed linear conveyor 2 to the upper surface 111 of the mounting base 11. Furthermore, the Xl-side end face 21l and the Xr-side end face 21r of the linear housing 21 are vertically aligned perpendicular to the X direction.

[0045] The tabletop conveyor T can engage and disengage from the linear housing 21 in the X direction. Specifically, the tabletop conveyor T can engage with the upper part of the linear housing 21 by entering from the Xl side end face 21l, and engage with the upper part of the linear housing 21 by entering from the Xr side end face 21r. The tabletop conveyor T, thus engaged with the linear housing 21, is guided by the linear housing 21 in the X direction. Furthermore, the tabletop conveyor T, engaged with the linear housing 21, disengages from the upper part of the linear housing 21 by withdrawing from the end face 21l towards the Xl side, and disengages from the upper part of the linear housing 21 by withdrawing from the end face 21r towards the Xr side.

[0046] Furthermore, the fixed linear conveyor 2 has a linear motor stator 25 and a linear scale 27 disposed within the linear housing 21. Figure 2 The linear motor stator 25 has coils that generate a magnetic field corresponding to the applied current. In contrast, the pedestal conveyor T has a permanent magnet as a movable element. The linear motor stator 25 drives the pedestal conveyor T in the X direction by the magnetic force generated between the stator 25 and the movable element of the pedestal conveyor T, which is engaged with the linear housing 21. Furthermore, a linear scale 27 detects the position (X coordinate) of the pedestal conveyor T in the X direction.

[0047] The movable linear conveyor 3, viewed from above, is positioned at a distance 12 between mounting bases 11l and 11r in the X direction. The movable linear conveyor 3 includes a linear housing 31 extending along the X direction, which, viewed from above, is a rectangle formed by two sides parallel to the X direction and two sides parallel to the Y direction. The linear housing 31 has flanges 33 protruding to both sides in the Y direction. Furthermore, the Xl-side end face 31l and the Xr-side end face 31r of the linear housing 31 are vertically aligned perpendicular to the X direction.

[0048] The tabletop conveyor T can engage and disengage from the linear housing 31 in the X direction. Specifically, the tabletop conveyor T can engage with the upper part of the linear housing 31 by entering from the Xl side towards the end face 31l, and can also engage with the upper part of the linear housing 31 by entering from the Xr side towards the end face 31r. The tabletop conveyor T, thus engaged with the linear housing 31, is guided by the linear housing 31 in the X direction. Furthermore, the tabletop conveyor T, engaged with the linear housing 31, disengages from the upper part of the linear housing 31 by withdrawing from the end face 31l towards the Xl side, and disengages from the upper part of the linear housing 31 by withdrawing from the end face 31r towards the Xr side.

[0049] Furthermore, the movable linear conveyor 3 has a linear motor stator 35 and a linear scale 37 disposed within the linear housing 31. Figure 2 The linear motor stator 35 has coils that generate a magnetic field corresponding to the applied current. This linear motor stator 35 drives the pedestal conveyor T in the X direction by the magnetic force generated between the stator and a movable element of the pedestal conveyor T engaged with the linear housing 31. Furthermore, a linear scale 37 detects the position (X coordinate) of the pedestal conveyor T in the X direction.

[0050] Within the interval 12 where the movable linear conveyor 3 is configured, the movable range Ym of the movable linear conveyor 3 extends parallel to the Y direction. The conveying system 1 includes a conveyor moving unit 4 provided within the movable range Ym, which moves the movable linear conveyor 3 within the movable range Ym along the Y direction. The conveyor moving unit 4 has a support mechanism 41 disposed on the Xl side of the movable range Ym and a support mechanism 43 disposed on the Xr side of the movable range Ym.

[0051] The support mechanism 41 includes a single-axis robot 51 arranged parallel to the Y direction. The single-axis robot 51 has a robot body 52 extending along the Y direction. The robot body 52 has a robot housing 521 extending along the Y direction and a ball screw 523 arranged parallel to the Y direction within the robot housing 521. The robot housing 521 is fixed to the upper surface 111 of the mounting base 111 via a fixing plate 13. Specifically, the fixing plate 13 is arranged from above, spanning the upper surface 111 of the mounting base 11 and the upper surface 521t of the robot housing 521 of the single-axis robot 51 in the X direction. Furthermore, the Xl-side end of the fixing plate 13 is fastened and fixed to the upper surface 111 of the mounting base 11 using screws (fastening members), and the Xr-side end of the fixing plate 13 is fastened and fixed to the upper surface 521t of the robot housing 521 of the single-axis robot 51 using screws (fastening members). Specifically, each fixing plate 13 is configured relative to the fixed linear conveyors 2a and 2d such that a pair of fixing plates 13 clamp the fixed linear conveyor 2 from the Y direction. Furthermore, the robot housing 521 is fixed to the fixed linear conveyors 2a and 2d respectively, as described later. Additionally, the single-axis robot 51 has a drive motor 531 mounted in the Y direction at one end of the robot body 52 and an encoder 532 for detecting the rotational position of the drive motor 531. Figure 2 The drive motor 531 is connected to the ball screw 523. The nut of the ball screw 523 of the single-axis robot 51 is connected to the end of the movable linear conveyor 3 on the X1 side. When the drive motor 531 rotates the screw shaft of the ball screw 523, the movable linear conveyor 3 moves in the Y direction.

[0052] Furthermore, the support mechanism 43 has a Y-axis conveyor guide 71 extending parallel to the Y direction. The Y-axis conveyor guide 71 is fixed to the upper surface 111 of the mounting base 11r via a fixing plate 13. Specifically, the fixing plate 13 is arranged from above, spanning the upper surface 111 of the mounting base 11r and the upper surface 722t of the Y-axis conveyor guide 71 in the X direction. The Xr-side end of the fixing plate 13 is fastened and fixed to the upper surface 111 of the mounting base 11 using screws (fastening members), and the Xl-side end of the fixing plate 13 is fastened and fixed to the upper surface 722t of the Y-axis conveyor guide 71 using screws (fastening members). In particular, each fixing plate 13 is arranged relative to the fixed linear conveyors 2b and 2c in such a way that a pair of fixing plates 13 sandwich the fixed linear conveyors 2 in the Y direction. Furthermore, the Y-axis conveyor guide 71 is fixed to the fixed linear conveyors 2b and 2c respectively, as described later. Y-axis conveyor guide 71 is connected to the Xr side end of movable linear conveyor 3, guiding movable linear conveyor 3, which moves by the driving force of drive motor 531, along the Y direction.

[0053] Furthermore, the handling system 1 has a control unit 100 that controls four fixed linear conveyors 2, movable linear conveyors 3, and a single-axis robot 51. Figure 2 The control unit 100 is composed of a processor such as a CPU (Central Processing Unit) or an FPGA (Field Programmable Gate Array). The control unit 100 adjusts the current applied to the stator 25 of the linear motor based on the position of the platform conveyor T detected by the linear scale 27, thereby performing feedback control of the position of the platform conveyor T relative to each fixed linear conveyor 2. Furthermore, the control unit 100 adjusts the current applied to the stator 35 of the linear motor based on the position of the platform conveyor T detected by the linear scale 37, thereby performing feedback control of the position of the platform conveyor T in the X direction relative to the movable linear conveyor 3. Moreover, the control unit 100 adjusts the rotational position of the drive motor 531 based on the rotational position of the drive motor 531 detected by the encoder 532, in other words, the position (Y coordinate) of the movable linear conveyor 3 in the Y direction, thereby performing feedback control of the position of the platform conveyor T in the Y direction relative to the single-axis robot 51.

[0054] In the conveying system 1, the movable linear conveyor 3 is capable of moving along the Y direction within its movable range Ym, and can be located at any of the multiple relative positions Lf1 and Lf2 included within the movable range Ym. Here, the relative positions Lf1 and Lf2 are positions that are different from each other in the Y direction. Relative position Lf1 is opposite to the fixed linear conveyors 2a and 2c in the X direction, and relative position Lf2 is opposite to the fixed linear conveyors 2b and 2d in the X direction. That is, the movable linear conveyor 3 located at relative position Lf1 is opposite to the Xr-side end face 21r of the fixed linear conveyor 2a from the Xr side, and opposite to the Xl-side end face 21l of the fixed linear conveyor 2c from the Xl side. Similarly, the movable linear conveyor 3 located at relative position Lf2 is opposite to the Xr-side end face 21r of the fixed linear conveyor 2d from the Xr side, and opposite to the Xl-side end face 21l of the fixed linear conveyor 2b from the Xl side.

[0055] It should be noted that the support mechanism 41 supports the movable linear conveyor 3 on the fixed linear conveyor 2a with a gap between the end face 31l of the movable linear conveyor 3 located at the relative position Lf1 and the end face 21r of the fixed linear conveyor 2a. Similarly, the support mechanism 43 supports the movable linear conveyor 3 on the fixed linear conveyor 2c with a gap between the end face 31r of the movable linear conveyor 3 located at the relative position Lf1 and the end face 21l of the fixed linear conveyor 2c. Likewise, the support mechanism 41 supports the movable linear conveyor 3 on the fixed linear conveyor 2d with a gap between the end face 31l of the movable linear conveyor 3 located at the relative position Lf2 and the end face 21r of the fixed linear conveyor 2d. Furthermore, the support mechanism 43 supports the movable linear conveyor 3 on the fixed linear conveyor 2b by leaving a gap between the end face 31r of the movable linear conveyor 3 located at the relative position Lf2 and the end face 21l of the fixed linear conveyor 2b.

[0056] Therefore, the control unit 100 controls the single-axis robot 51 to position the movable linear conveyor 3 at a relative position Lf1, and controls both the fixed linear conveyor 2a and the movable linear conveyor 3, thereby enabling the transfer of the tabletop conveyor T between the fixed linear conveyor 2a and the movable linear conveyor 3. Furthermore, the control unit 100 controls the single-axis robot 51 to position the movable linear conveyor 3 at a relative position Lf1, and controls both the fixed linear conveyor 2c and the movable linear conveyor 3, thereby enabling the transfer of the tabletop conveyor T between the fixed linear conveyor 2c and the movable linear conveyor 3.

[0057] Alternatively, the control unit 100 controls the single-axis robot 51 to position the movable linear conveyor 3 at a relative position Lf2, and controls both the fixed linear conveyor 2d and the movable linear conveyor 3, thereby enabling the transfer of the tabletop conveyor T between the fixed linear conveyor 2d and the movable linear conveyor 3. Furthermore, the control unit 100 controls the single-axis robot 51 to position the movable linear conveyor 3 at a relative position Lf2, and controls both the fixed linear conveyor 2b and the movable linear conveyor 3, thereby enabling the transfer of the tabletop conveyor T between the fixed linear conveyor 2b and the movable linear conveyor 3.

[0058] Here, the transfer of the platform conveyor T between the fixed linear conveyor 2 and the movable linear conveyor 3 includes two actions: the movement of the platform conveyor T from the fixed linear conveyor 2 to the movable linear conveyor 3 and the movement of the platform conveyor T from the movable linear conveyor 3 to the fixed linear conveyor 2.

[0059] This control unit 100 can move the tabletop conveyor T in various ways, especially performing branch conveying as follows. For example, in Figure 1A In the first system, the platform conveyor T engages with the fixed linear conveyor 2a. In contrast, in the transport system 1, two fixed linear conveyors 2b and 2c are arranged side-by-side on the Xr side of the fixed linear conveyor 2a with the platform conveyor T engaged. Therefore, when transporting the platform conveyor T from the fixed linear conveyor 2a to the Xr side, both fixed linear conveyors 2b and 2c can be used as transport destinations. That is, the transport path can branch off from any of these fixed linear conveyors 2b and 2c and transport the platform conveyor T (branch transport). It should be noted that this branch transport can be performed between fixed linear conveyor 2b (transport origin) and fixed linear conveyors 2a and 2d (transport destinations), between fixed linear conveyor 2c (transport origin) and fixed linear conveyors 2a and 2d (transport destinations), and between fixed linear conveyor 2d (transport origin) and fixed linear conveyors 2b and 2c (transport destinations).

[0060] Here, use Figure 1A Figure 1F illustrates an example of branching transport of a tabletop conveyor T from a fixed linear conveyor 2a to a fixed linear conveyor 2b. Figure 1A In the middle, the movable linear conveyor 3 stops at a relative position Lf1 opposite to the fixed linear conveyor 2a, which is engaged with the tabletop conveyor T. Figures 1A-1B In the process, the platform conveyor T is transferred from the fixed linear conveyor 2a to the movable linear conveyor 3. After the transfer from the platform conveyor T to the movable linear conveyor 3 is completed, the movable linear conveyor 3 moves from the relative position Lf1 towards the relative position Lf2 along the Y direction. Figure 1CWhen the movable linear conveyor 3 reaches the relative position Lf2 opposite to the fixed linear conveyor 2b, it stops at that relative position Lf2. Figure 1D Then, in Figures 1D-1E In the process, the tabletop conveyor T is transferred from the movable linear conveyor 3 to the fixed linear conveyor 2b.

[0061] Figure 3 This is a front view schematically illustrating a first example of a branch conveying device included in a substrate handling system. This branch conveying device A includes the aforementioned movable linear conveyor 3 and conveyor moving unit 4. Figure 3 The diagram shows a substrate 19 placed on the mounting surface of the conveying system 1, a mounting base 11 placed on the substrate 19, a fixed linear conveyor 2 mounted on the mounting base 11, and a branch conveying device A. The conveyor moving unit 4 of the branch conveying device A, as described above, has a support mechanism 41 and a support mechanism 43. The support mechanism 41 moves the movable linear conveyor 3 along the Y-direction via a single-axis robot 51, and the support mechanism 43 guides the movable linear conveyor 3 along the Y-direction via a Y-axis conveyor guide 71.

[0062] Figure 4 This is a schematic side view of a support mechanism that supports a movable linear conveyor using a single-axis robot. Figure 4 The support mechanism 41 shown has a single-axis robot 51 arranged parallel to the Y direction. The single-axis robot 51 has a robot body 52 extending along the Y direction and a drive motor 531 mounted at one end of the robot body 52 in the Y direction. The robot body 52 has a robot housing 521, a ball screw 523 housed in the robot housing 521, and a slider 525 arranged on the Xr side of the robot housing 521. Figure 3 The ball screw 523 has a screw shaft 523a extending parallel to the Y direction and a nut 523b screwed to the screw shaft 523a. A drive motor 531 is connected to the screw shaft 523a, and a slider 525 is connected to the nut 523b via a connecting member (not shown). Therefore, when the drive motor 531 rotates the screw shaft 523a, the nut 523b moves in the Y direction, and the slider 525 moves in the Y direction along with the nut 523b. In this way, the single-axis robot 51 transmits the driving force of the drive motor 531 to the slider 525 through the ball screw 523, thereby guiding the slider 525 along the Y direction (the direction in which the ball screw 523 extends) and applying the driving force of the drive motor 531 to the slider 525. Thus, the slider 525 moves in the Y direction.

[0063] The upper surface 521t of the robot housing 521 abuts against the bottom surface 23b of the flange 23 of the fixed linear conveyor 2 from below. The contact between the upper surface 521t and the bottom surface 23b positions the robot housing 521 on the fixed linear conveyor 2. In particular, as... Figure 3 As shown, the Xr-side end 22r of the fixed linear conveyor 2 on the Xl side protrudes from the mounting base 11 for mounting the fixed linear conveyor 2 towards the Xr side. In contrast, the robot housing 521 of the single-axis robot 51 faces the end 22r of the fixed linear conveyor 2 from below, and overlaps with the end 22r when viewed from above. Furthermore, at the end 22r of the fixed linear conveyor 2, the flange 23 of the fixed linear conveyor 2 and the upper surface 521t of the robot housing 521 are fastened and fixed by screws S (fastening components).

[0064] It should be noted that, as Figure 4 As shown, in the Y direction, the robot housing 521 of the single-axis robot 51 is longer than the movable range Ym, including the movable range Ym. Two fixed linear conveyors 2a and 2d are located between the two ends of the robot housing 521. Furthermore, the upper surface 521t of the robot housing 521 is fastened and fixed to the respective flanges 23 of the two fixed linear conveyors 2a and 2d by screws S.

[0065] Furthermore, the support mechanism 41 has a conveyor support member 61 disposed on the Xr side of the sliding member 525. The conveyor support member 61 has an upright mounting plate 611 erected vertically in the Z direction orthogonal to the X direction, a horizontal plate 612 horizontally disposed at the upper end of the upright mounting plate 611, and a support member 613 disposed between the upright mounting plate 611 and the horizontal plate 612. The upright mounting plate 611 abuts against the sliding member 525 from the Xr side and is fastened and fixed to the sliding member 525 by screws S.

[0066] The upper surface 612t of the horizontal plate 612 abuts against the bottom surface 33b of the flange 33 of the movable linear conveyor 3 from below. The abutment between the upper surface 612t and the bottom surface 33b positions the conveyor support member 61 on the movable linear conveyor 3. Furthermore, the flange 33 of the movable linear conveyor 3 and the upper surface 612t of the horizontal plate 612 of the conveyor support member 61 are fastened and fixed by screws S (fastening components).

[0067] Thus, the single-axis robot 51 installed on the fixed linear conveyor 2 supports the conveyor support component 61 installed on the movable linear conveyor 3 in the Z direction. That is, the support mechanism 41, which has the single-axis robot 51 and the conveyor support component 61, functions to support the movable linear conveyor 3 on the fixed linear conveyor 2.

[0068] Furthermore, the single-axis robot 51 installed on the fixed linear conveyor 2 drives and guides the conveyor support component 61 installed on the movable linear conveyor 3 along the Y direction. That is, the support mechanism 41, which has the single-axis robot 51 and the conveyor support component 61, functions to drive the movable linear conveyor 3 along the Y direction relative to the fixed linear conveyor 2 and guide the movement of the movable linear conveyor 3 opposite to the fixed linear conveyor 2 along the Y direction.

[0069] Figure 5 This is a schematic side view of a support mechanism that supports a movable linear conveyor via sliding guides. Figure 5 The support mechanism 43 shown has a Y-axis conveyor guide 71, which has a base 72 extending along the Y direction and a sliding guide 73 extending along the Y direction.

[0070] The base frame 72 has an upright mounting plate 721 erected orthogonally to the X direction along the Z direction and a horizontal plate 722 horizontally positioned at the upper end of the upright mounting plate 721. A sliding guide 73 is fixed to the X1 side of the upright mounting plate 721. The sliding guide 73 has a Y-axis guide rail 731 extending parallel to the Y direction, which is fixed to the horizontal plate 722 of the base frame 72. Furthermore, the sliding guide 73 has a sliding member 732 that engages with the Y-axis guide rail 731, and the sliding member 732 moves along the Y-axis guide rail 731 in the Y direction.

[0071] The upper surface 722t of the horizontal plate 722 abuts against the bottom surface 23b of the flange 23 of the fixed linear conveyor 2 from below. Through the contact between the upper surface 722t and the bottom surface 23b, the Y-axis conveyor guide 71 is positioned on the fixed linear conveyor 2. In particular, as... Figure 3 As shown, the X1-side end 22l of the fixed linear conveyor 2 on the Xr side protrudes from the mounting base 11 for mounting the fixed linear conveyor 2 towards the X1 side. In contrast, the base 72 of the Y-axis conveyor guide 71 faces the end 22l of the fixed linear conveyor 2 from below, overlapping the end 22l in a top view. Furthermore, at the end 22l of the fixed linear conveyor 2, the flange 23 of the fixed linear conveyor 2 and the upper surface 722t of the horizontal plate 722 are fastened and fixed by screws S (fastening components).

[0072] It should be noted that, as Figure 5As shown, in the Y direction, the Y-axis guide rail 731 is longer than the movable range Ym by including the movable range Ym, and the base frame 72 supporting the Y-axis guide rail 731 is also longer than the movable range Ym by including the movable range Ym. In contrast, two fixed linear conveyors 2b and 2c are located between the two ends of the base frame 72. Furthermore, the upper surface 722t of the horizontal plate 722 of the base frame 72 is fastened and fixed to the respective flanges 23 of the two fixed linear conveyors 2b and 2c by screws S.

[0073] Furthermore, the support mechanism 43 has a conveyor support member 81 disposed on the X1 side of the slider 732. The conveyor support member 81 has an upright mounting plate 811 erected vertically in the Z direction orthogonal to the X direction and a horizontal plate 812 horizontally disposed at the upper end of the upright mounting plate 811. The upright mounting plate 811 is fixed to the side of the slider 732 on the X1 side. Therefore, the conveyor support member 81 is guided in the Y direction by the slider 732, which moves along the Y-axis guide rail 731, and is supported by the Y-axis conveyor guide member 71, overcoming gravity in the Z direction.

[0074] The upper surface 812t of the horizontal plate 812 of the conveyor support component 81 abuts against the bottom surface 33b of the flange 33 of the movable linear conveyor 3 from below. The contact between the upper surface 812t and the bottom surface 33b positions the conveyor support component 81 on the movable linear conveyor 3. Furthermore, the flange 33 of the movable linear conveyor 3 and the upper surface 812t of the horizontal plate 812 of the conveyor support component 81 are fastened and fixed by screws S (fastening components).

[0075] Thus, the Y-axis conveyor guide 71 installed on the fixed linear conveyor 2 supports the conveyor support member 81 installed on the movable linear conveyor 3 in the Z direction. That is, the support mechanism 43, which has the Y-axis conveyor guide 71 and the conveyor support member 81, functions to support the movable linear conveyor 3 on the fixed linear conveyor 2.

[0076] Furthermore, the Y-axis conveyor guide 71 installed on the fixed linear conveyor 2 guides the conveyor support member 81 installed on the movable linear conveyor 3 along the Y direction. That is, the support mechanism 43, which has the Y-axis conveyor guide 71 and the conveyor support member 81, functions to guide the movement of the movable linear conveyor 3, which is opposite to the fixed linear conveyor 2, along the Y direction.

[0077] Thus, the branch conveying device A includes a support mechanism 41 that supports the Xl-side end 32l of the movable linear conveyor 3 to the Xr-side end 22r of the fixed linear conveyor 2, and a support mechanism 43 that supports the Xr-side end 32r of the movable linear conveyor 3 to the Xl-side end 22l of the fixed linear conveyor 2. Figure 4 as well as Figure 5 To illustrate the operation of the branch conveying device A along the Y direction. For example... Figure 4 As shown, when the drive motor 531 drives the screw shaft 523a of the ball screw 523, the sliding member 525 is fixed. Figure 3 The conveyor support member 61 moves along the Y direction, and the movable linear conveyor 3 fixed to the conveyor support member 61 moves along the Y direction. Furthermore, as... Figure 5 As shown, the movement of the movable linear conveyor 3 is guided along the Y direction by the Y-axis guide rail 731 of the Y-axis conveyor guide 71. Thus, the movable linear conveyor 3 is driven and guided along the Y direction by the single-axis robot 51 and guided along the Y direction by the Y-axis guide rail 731, thereby enabling it to move along the Y direction within a movable range Ym including relative positions Lf1 and Lf2.

[0078] In the first example described above, a support mechanism 41 (first support mechanism) is provided to support the end 32l (first end) of the movable linear conveyor 3 on the Xl side (one side) in the X direction (transportation direction), and a support mechanism 43 (second support mechanism) is provided to support the end 32r (second end) of the movable linear conveyor 3 on the Xr side (the other side) in the X direction. In particular, the support mechanism 41 has a conveyor support member 61 (first movable member) mounted on the end 32l of the movable linear conveyor 3 and a single-axis robot 51 (first guide part) mounted on the fixed linear conveyor 2a (first fixed linear conveyor) and guiding the conveyor support member 61 in the Y direction (switching direction). With this support mechanism 41 having the conveyor support member 61 and the single-axis robot 51, the end 32l of the movable linear conveyor 3 can be firmly supported on the fixed linear conveyor 2a. Therefore, even when the load is biased towards end 32l relative to the movable linear conveyor 3, the sinking of end 32l opposite to the fixed linear conveyor 2a can be suppressed, and the transfer of the platform conveyor T between the fixed linear conveyor 2a and end 32l can be performed appropriately. Furthermore, the support mechanism 43 has a conveyor support member 81 (second movable member) mounted on end 32r of the movable linear conveyor 3 and a Y-axis conveyor guide member 71 (second guide portion) mounted on the fixed linear conveyor 2b (second fixed linear conveyor) and guiding the conveyor support member 81 along the Y direction. With this support mechanism 43 having the conveyor support member 81 and the Y-axis conveyor guide member 71, the end 32r of the movable linear conveyor 3 can be firmly supported on the fixed linear conveyor 2b. Therefore, even when the load is biased towards end 32r relative to the movable linear conveyor 3, the sinking of end 32r opposite to the fixed linear conveyor 2b can be suppressed, and the transfer of the platform conveyor T between the fixed linear conveyor 2b and end 32r can be performed appropriately. As a result, the bias of the load relative to the movable linear conveyor 3 can be overcome and the movable linear conveyor 3 can be supported, and the transfer of the platform conveyor T between the fixed linear conveyors 2a, 2b arranged on both sides of the movable linear conveyor 3 and the movable linear conveyor 3 can be performed appropriately.

[0079] Furthermore, the single-axis robot 51 has a drive motor 531 (drive source), which drives the conveyor support member 61 along the Y direction to move the movable linear conveyor 3 along the Y direction. That is, the drive motor 531 of the single-axis robot 51 can move the movable linear conveyor 3 along the Y direction between relative positions Lf1 (first position) and Lf2 (second position). In particular, by using a single functional unit such as the single-axis robot 51, the functions of driving and guiding the conveyor support member 61 can be compactly realized, and the branch handling device A (handling path switching device) can be miniaturized.

[0080] Furthermore, the single-axis robot 51 has a ball screw 523 arranged parallel to the Y direction. The conveyor support member 61 is connected to the nut 523b of the ball screw 523, and the drive motor 531 rotates the screw shaft 523a of the ball screw 523, thereby driving the conveyor support member 61 along the Y direction. With this structure, the ball screw-type single-axis robot 51 arranged on the X1 side of the movable linear conveyor 3 enables the movable linear conveyor 3 to move along the Y direction.

[0081] Furthermore, the conveyor support member 61 has an upper surface 612t (first support surface) that faces the bottom surface 33b of the end 32l of the movable linear conveyor 3 from below. The conveyor support member 61 and the end 32l of the movable linear conveyor 3 are positioned by the contact between the upper surface 612t and the bottom surface 33b of the end 32l. Similarly, the single-axis robot 51 has an upper surface 521t (first mounting surface) that contacts the bottom surface 23b of the fixed linear conveyors 2a and 2d from below. The single-axis robot 51 and the fixed linear conveyors 2a and 2d are positioned by the contact between the upper surface 521t and the bottom surface 23b of the fixed linear conveyors 2a and 2d. Furthermore, the conveyor support member 81 has an upper surface 812t (second support surface) that faces the bottom surface 33b of the end 32r of the movable linear conveyor 3 from below. The conveyor support member 81 and the end 32r of the movable linear conveyor 3 are positioned by the contact between the upper surface 812t and the bottom surface 33b of the end 32r. Additionally, the Y-axis conveyor guide 71 has an upper surface 722t (second mounting surface) that contacts the bottom surface 23b of the fixed linear conveyors 2b and 2c from below. The Y-axis conveyor guide 71 and the fixed linear conveyors 2b and 2c are positioned by the contact between the upper surface 722t and the bottom surface 23b of the fixed linear conveyors 2b and 2c. In this structure, by colliding the upper surface 521t of the branch conveying device A with the bottom surface 23b of the fixed linear conveyors 2a and 2d, and by colliding the upper surface 722t of the branch conveying device A with the bottom surface 23b of the fixed linear conveyors 2b and 2c, the fixed linear conveyors 2a, 2b, 2c, 2d and the movable linear conveyor 3 can be easily positioned. Therefore, the workload of personnel required for the installation of the branch conveying device A, which is opposite to the fixed linear conveyors 2a, 2b, 2c, 2d, can be reduced.

[0082] Furthermore, the fixed linear conveyor 2c (the third fixed linear conveyor) is positioned opposite the relative position Lf1 (the third position) from the Xr side in the X direction, while the movable linear conveyor 3 stops at the relative position Lf1 and transfers the table conveyor T between the movable linear conveyor 2c and the fixed linear conveyor 2c. The Y-axis conveyor guide 71 of the support mechanism 43 is mounted on the fixed linear conveyor 2c. This support mechanism 43 securely supports the end 32r of the movable linear conveyor 3 to the fixed linear conveyor 2c. Therefore, even when the load relative to the movable linear conveyor 3 is biased towards the end 32r, the sinking of the end 32r opposite to the fixed linear conveyor 2c can be suppressed, and the transfer of the table conveyor T between the fixed linear conveyor 2c and the end 32r can be performed appropriately.

[0083] Furthermore, the fixed linear conveyor 2d (the fourth fixed linear conveyor) is positioned opposite the relative position Lf2 (the fourth position) from the Xl side in the X direction, while the movable linear conveyor 3 stops at the relative position Lf2 and transfers the table conveyor T between the movable linear conveyor 2d and the fixed linear conveyor 2d. The single-axis robot 51 of the support mechanism 41 is mounted on the fixed linear conveyor 2d. This support mechanism 41 securely supports the end 32l of the movable linear conveyor 3 to the fixed linear conveyor 2d. Therefore, even when the load relative to the movable linear conveyor 3 is biased towards the end 32l, the sinking of the end 32l opposite to the fixed linear conveyor 2d can be suppressed, and the transfer of the table conveyor T between the fixed linear conveyor 2d and the end 32l can be performed appropriately.

[0084] Furthermore, the branch conveying device A includes a fixing plate 13 (first mounting component) for mounting the support mechanism 41 on the mounting base 11r (first mounting base) for mounting the fixed linear conveyors 2a and 2d, and a fixing plate 13 (second mounting component) for mounting the support mechanism 43 on the mounting base 11l (second mounting base) for mounting the fixed linear conveyors 2b and 2c. In this structure, the support mechanisms 41 and 43 are supported by the fixing plates 13, thereby reducing the load applied to the fixed linear conveyors 2a, 2b, 2c, and 2d.

[0085] Figure 6 This is a front view schematically illustrating a second example of a branch conveying device included in a substrate conveying system. Here, it is compared with... Figure 3 The first example will be described with a focus on its differences, and common parts will be labeled with corresponding reference numerals and descriptions will be omitted as appropriate. In this second example, the support mechanism 43 replaces the Y-axis conveyor guide 71 (first example) to have a single-axis robot 51, and replaces the conveyor support member 81 (first example) to have a conveyor support member 61. That is, the support mechanism 43 has the same structure as the support mechanism 41.

[0086] In the support mechanism 43, the upper surface 521t of the single-axis robot 51 abuts against the bottom surface 23b of the end 22l of the fixed linear conveyor 2 from below. Furthermore, at the end 22l, the upper surface 521t of the single-axis robot 51 is fastened and fixed to the flange 23 of the fixed linear conveyor 2 by screws S. Moreover, in the support mechanism 43, the conveyor support member 61 is fixed to the sliding member 525 of the single-axis robot 51, and the upper surface 612t of the conveyor support member 61 abuts against the bottom surface 33b of the end 32r of the movable linear conveyor 3 from below, and is fastened and fixed to the flange 33 of the movable linear conveyor 3 at the end 32r. Therefore, the support mechanism 43 can support the end 32r of the movable linear conveyor 3 against the end 22l of the fixed linear conveyor 2, and drive and guide the end 32r of the movable linear conveyor 3 along the Y direction.

[0087] Thus, in the second example, the support mechanism 43 has a conveyor support member 61 (second movable member) mounted on the end 32r of the movable linear conveyor 3 and a single-axis robot 51 (second guide part) mounted on the fixed linear conveyor 2b (second fixed linear conveyor) and guiding the conveyor support member 61 in the Y direction (switching direction). With this support mechanism 43 having the conveyor support member 61 and the single-axis robot 51, the end 32r of the movable linear conveyor 3 can be firmly supported on the fixed linear conveyor 2b. Therefore, even when the load relative to the movable linear conveyor 3 is biased towards the end 32r, the sinking of the end 32r opposite to the fixed linear conveyor 2b can be suppressed, and the transfer of the platform conveyor T between the fixed linear conveyor 2b and the end 32r can be appropriately performed. It should be noted that the support mechanism 43 can also achieve the same effect for the fixed linear conveyor 2c (third fixed linear conveyor).

[0088] Furthermore, the single-axis robot 51 (first guide unit) of support mechanism 41 has a drive motor 531 (first drive source), and the single-axis robot 51 (second guide unit) of support mechanism 43 has a drive motor 531 (second drive source). The drive motors 531 of each of support mechanisms 41 and 43 drive the movable linear conveyor 3 in the Y direction by driving the conveyor support member 61 (first and second movable members) in the Y direction. In this structure, the movable linear conveyor 3 can be moved in the Y direction between relative positions Lf1 and Lf2 by the drive motors 531 of each of support mechanisms 41 and 43. In particular, in support mechanisms 41 and 43, the functions of driving and guiding the conveyor support member 61 can be compactly realized using a single functional unit such as the single-axis robot 51, enabling miniaturization of the branch handling device A (handling path switching device).

[0089] Furthermore, in the support mechanisms 41 and 43, the single-axis robot 51 (first and second guide parts) each has a ball screw 523 (first and second ball screws) arranged parallel to the Y direction. In contrast, the conveyor support member 61 (first and second movable members) is connected to the nut 523b of the ball screw 523, and the drive motor 531 rotates the screw shaft 523a of the ball screw 523, thereby driving the conveyor support member 61 along the Y direction. With this structure, by using a ball screw-type single-axis robot 51 arranged on the X1 side of the movable linear conveyor 3 and a ball screw-type single-axis robot 51 arranged on the Xr side of the movable linear conveyor 3, the movable linear conveyor 3 can be moved along the Y direction.

[0090] In addition, in such Figure 6 In the second example, where branch handling devices A of single-axis robots 51 are installed on both sides of the movable linear conveyor 3, the control unit 100 can also control the drive motor 531 of each single-axis robot 51 as follows.

[0091] Figure 7 This is a flowchart illustrating an example of transfer control in a branch transport device equipped with two single-axis robots. The flowchart shows that the transfer of the table conveyor T between the fixed linear conveyor 2 and the movable linear conveyor 3 is performed under the control of the control unit 100.

[0092] In step S101, it is determined whether to perform the transfer of the tabletop conveyor T. Then, if it is determined that the tabletop conveyor T is to be transferred (yes in step S101), proceed to step S102. In step S102, it is determined whether the fixed linear conveyor 2 that transfers the tabletop conveyor T between the movable linear conveyor 3 and the movable linear conveyor 3 is the fixed linear conveyor 2a, 2d on the X1 side of the movable linear conveyor 3 or the fixed linear conveyor 2b, 2c on the Xr side of the movable linear conveyor 3.

[0093] When the fixed linear conveyor 2 is on the Xl side, the control unit 100 stops the operation of the drive motor 531 of the support mechanism 43 on the Xr side, and performs the aforementioned feedback control on the drive motor 531 of the support mechanism 41 on the Xl side, positioning the table conveyor T at a relative position Lf1 or Lf2 (step S103). At this time, the drive motor 531 of the support mechanism 43 stops (no servo), so the single-axis robot 51 of the support mechanism 43 does not function to drive the movable linear conveyor 3, but only guides the movable linear conveyor 3 along the Y direction. Thus, after positioning the movable linear conveyor 3 at a relative position Lf1 or Lf2, the table conveyor T is transferred between the movable linear conveyor 3 and the fixed linear conveyor 2 on the Xl side of the movable linear conveyor 3 (step S104).

[0094] When the fixed linear conveyor 2 is on the Xr side, the control unit 100 stops the operation of the drive motor 531 of the support mechanism 41 on the Xl side, and performs the aforementioned feedback control on the drive motor 531 of the support mechanism 43 on the Xr side, positioning the table conveyor T at a relative position Lf1 or Lf2 (step S105). At this time, the drive motor 531 of the support mechanism 41 stops (no servo), so the single-axis robot 51 of the support mechanism 41 does not function to drive the movable linear conveyor 3, but only guides the movable linear conveyor 3 along the Y direction. Thus, after positioning the movable linear conveyor 3 at a relative position Lf1 or Lf2, the table conveyor T is transferred between the movable linear conveyor 3 and the fixed linear conveyor 2 on the Xr side of the movable linear conveyor 3 (step S106).

[0095] exist Figure 7 In the transfer control, the control unit 100 controls the operation of the drive motors 531 (first and second drive sources) of the support mechanisms 41 and 43 respectively. Specifically, when transferring the table conveyor T between the movable linear conveyor 3 and the fixed linear conveyors 2a and 2d on the Xl side, the control unit 100 stops the operation of the drive motor 531 of the support mechanism 43 on the Xr side, and controls the position of the movable linear conveyor 3 to relative positions Lf1 and Lf2 by the operation of the drive motor 531 of the support mechanism 41 on the Xl side (step S103). Furthermore, when transferring the table conveyor T between the movable linear conveyor 3 and the fixed linear conveyors 2b and 2c on the Xr side, the control unit 100 stops the operation of the drive motor 531 of the support mechanism 41 on the Xl side, and controls the position of the movable linear conveyor 3 to relative positions Lf1 and Lf2 by the operation of the drive motor 531 of the support mechanism 43 on the Xr side (step S105). In this structure, when transferring the table conveyor T between the fixed linear conveyors 2a and 2d and the movable linear conveyor 3, interference from the operation of the drive motor 531 of the support mechanism 43 can be prevented. Furthermore, the movable linear conveyor 3 is accurately positioned relative to the fixed linear conveyors 2a and 2d by the drive motor 531 of the support mechanism 41, thus achieving smooth transfer of the table conveyor T. Similarly, when transferring the table conveyor T between the fixed linear conveyors 2b and 2c and the movable linear conveyor 3, interference from the operation of the drive motor 531 of the support mechanism 41 can be prevented. Furthermore, the movable linear conveyor 3 is accurately positioned relative to the fixed linear conveyors 2b and 2c by the drive motor 531 of the support mechanism 43, thus achieving smooth transfer of the table conveyor T.

[0096] Figure 8 This is a front view schematically illustrating a third example of a branch conveying device included in a substrate conveying system. Figure 9 It is shown schematically. Figure 8 A side view of an example of a linkage mechanism in a branch conveying device. Here, it is compared with... Figure 3 The first example is described with a focus on its differences, and common parts are labeled with corresponding reference numerals and descriptions are omitted where appropriate. In this third example, the support mechanism 41 replaces the single-axis robot 51 (first example) with a Y-axis conveyor guide 71, and replaces the conveyor support member 61 (first example) with a conveyor support member 81. That is, the support mechanism 41 has the same structure as the support mechanism 43.

[0097] In the support mechanism 41, the upper surface 722t of the Y-axis conveyor guide 71 abuts against the bottom surface 23b of the end 22r of the fixed linear conveyor 2 from below. Furthermore, at this end 22r, the upper surface 722t of the Y-axis conveyor guide 71 is fastened and fixed to the flange 23 of the fixed linear conveyor 2 by screws S. Moreover, in the support mechanism 41, the conveyor support member 81 is fixed to the sliding member 732 of the Y-axis conveyor guide 71, and the upper surface 812t of the conveyor support member 81 abuts against the bottom surface 33b of the end 32l of the movable linear conveyor 3 from below, and is fastened and fixed to the flange 33 of the movable linear conveyor 3 at this end 32l. Therefore, the support mechanism 41 can support the end 32l of the movable linear conveyor 3 against the end 22r of the fixed linear conveyor 2 and guide the end 32l of the movable linear conveyor 3 along the Y direction.

[0098] Furthermore, in Figure 8 In the conveyor moving unit 4, a single-axis robot 51 is arranged along the Y direction on a support frame 18 placed on a base plate 19. Furthermore, the single-axis robot 51 and the movable linear conveyor 3 are connected via a linkage mechanism 9. Figure 9 As shown, the linkage mechanism 9 has a mounting plate 91 and a spherical bearing 92 fixed on the upper surface of the mounting plate 91. Furthermore, the linkage mechanism 9 has a mounting plate 94 disposed above the mounting plate 91 and a spherical bearing 95 fixed on the lower surface of the mounting plate 94.

[0099] Furthermore, the linkage mechanism 9 has a rod 97 connecting the spherical bearing 92 and the spherical bearing 95. One end 971 of the rod 97 is supported by the spherical bearing 95, and the other end 972 of the rod 97, opposite to end 971, is supported by the spherical bearing 92. The rod 97 has two rotational degrees of freedom relative to the spherical bearing 92 and two rotational degrees of freedom relative to the spherical bearing 95. That is, the rod 97 can rotate relative to the spherical bearing 92 and relative to the spherical bearing 95, respectively, about two mutually orthogonal rotation axes.

[0100] Furthermore, mounting plate 91 is fastened and fixed to the upper surface of the slider 525 of the single-axis robot 51 by screws S. Mounting plate 94 is also fastened and fixed to the bottom surface 33b of the flange 33 of the movable linear conveyor 3 by screws S. Mounting plate 94 is fixed to the movable linear conveyor 3 at a central position between end 32l and end 32r in the X direction. Therefore, when the drive motor 531 drives the slider 525 in the Y direction via the ball screw 523, the movable linear conveyor 3, connected to the slider 525 via the linkage mechanism 9, moves in the Y direction.

[0101] Thus, in the third example, a linkage mechanism 9 is mounted on the movable linear conveyor 3 at a mounting position (the position of the mounting plate 94) between the ends 32l and 32r of the movable linear conveyor 3, and a single-axis robot 51 is provided to move the movable linear conveyor 3 in the Y direction by driving the linkage mechanism 9 in the Y direction. The linkage mechanism 9 has a spherical bearing 95 (first spherical bearing) mounted on the movable linear conveyor 3 via the mounting plate 94, a spherical bearing 92 (second spherical bearing) mounted on the slider 525 of the single-axis robot 51 via the mounting plate 91, and a rod 97 connecting the spherical bearings 95 and 92. One end 971 of the rod 97 is supported by the spherical bearing 95, and the other end 972 of the rod 97 is supported by the spherical bearing 92. With this structure, the parallelism error between the Y-axis conveyor guide 71 of each of the support mechanisms 41 and 43 and the single-axis robot 51 can be absorbed by the degrees of freedom of the spherical bearings 92 and 95 of the linkage mechanism 9. Therefore, the movable linear conveyor 3 can move smoothly along the Y direction.

[0102] Thus, in the above embodiments, the conveying system 1 corresponds to an example of the "conveying system" of the present invention, the mounting base 11l corresponds to an example of the "first mounting base" of the present invention, the mounting base 11r corresponds to an example of the "second mounting base" of the present invention, the fixing plate 13 corresponds to an example of the "first and second mounting components" of the present invention, the control unit 100 corresponds to an example of the "control unit" of the present invention, the fixed linear conveyor 2a corresponds to an example of the "first fixed linear conveyor" of the present invention, the fixed linear conveyor 2b corresponds to an example of the "second fixed linear conveyor" of the present invention, the fixed linear conveyor 2c corresponds to an example of the "third fixed linear conveyor" of the present invention, the fixed linear conveyor 2d corresponds to an example of the "fourth fixed linear conveyor" of the present invention, the movable linear conveyor 3 corresponds to an example of the "movable linear conveyor" of the present invention, the end 32l corresponds to an example of the "first end" of the present invention, the end 32r corresponds to an example of the "second end" of the present invention, the support mechanism 41 corresponds to an example of the "first support mechanism" of the present invention, the support mechanism 43 corresponds to an example of the "second support mechanism" of the present invention, and the branch conveying device A corresponds to... In one example of the "transport path switching device" of the present invention, the relative position Lf1 corresponds to one example of the "first position" of the present invention, the relative position Lf2 corresponds to one example of the "third position" of the present invention, the relative position Lf2 corresponds to one example of the "second position" of the present invention, the relative position Lf2 corresponds to one example of the "fourth position" of the present invention, the tabletop conveyor T corresponds to one example of the "conveyor table" of the present invention, the X direction corresponds to one example of the "transport direction" of the present invention, the Xl side corresponds to one example of the "one side" of the present invention, the Xr side corresponds to one example of the "other side" of the present invention, the Y direction corresponds to one example of the "switching direction" of the present invention, the movable range Ym corresponds to one example of the "movable range" of the present invention, the linkage mechanism 9 corresponds to one example of the "linkage mechanism" of the present invention, the single-axis robot 51 corresponds to one example of the "single-axis robot" of the present invention, the spherical bearing 95 corresponds to one example of the "first spherical bearing" of the present invention, the spherical bearing 92 corresponds to one example of the "second spherical bearing" of the present invention, the rod 97 corresponds to one example of the "rod" of the present invention, one end 971 corresponds to one example of the "one end" of the present invention, and the other end 972 corresponds to one example of the "other end" of the present invention.

[0103] In the first case ( Figure 3 In this invention, the conveyor support component 61 of the support mechanism 41 is equivalent to an example of the "first movable component" of the present invention, the single-axis robot 51 of the support mechanism 41 is equivalent to an example of the "first guide" of the present invention, the conveyor support component 81 of the support mechanism 43 is equivalent to an example of the "second movable component" of the present invention, and the Y-axis conveyor guide 71 of the support mechanism 43 is equivalent to an example of the "second guide" of the present invention.

[0104] In the second case ( Figure 6 In the present invention, the conveyor support component 61 of the support mechanism 41 is equivalent to an example of the "first movable component" of the present invention, the single-axis robot 51 of the support mechanism 41 is equivalent to an example of the "first guide" of the present invention, the conveyor support component 61 of the support mechanism 43 is equivalent to an example of the "second movable component" of the present invention, and the single-axis robot 51 of the support mechanism 43 is equivalent to an example of the "second guide" of the present invention.

[0105] In the third case ( Figure 8 In this invention, the conveyor support component 81 of the support mechanism 41 corresponds to an example of the "first movable component" of the present invention, the Y-axis conveyor guide 71 of the support mechanism 41 corresponds to an example of the "first guide" of the present invention, the conveyor support component 81 of the support mechanism 43 corresponds to an example of the "second movable component" of the present invention, and the Y-axis conveyor guide 71 of the support mechanism 43 corresponds to an example of the "second guide" of the present invention.

[0106] In the first case ( Figure 3 In this invention, the upper surface 612t corresponds to an example of the "first support surface" of the present invention, the upper surface 521t corresponds to an example of the "first mounting surface" of the present invention, the upper surface 812t corresponds to an example of the "second support surface" of the present invention, and the upper surface 722t corresponds to an example of the "second mounting surface" of the present invention.

[0107] In the second case ( Figure 6 In the above, the upper surface 612t on the Xl side corresponds to an example of the "first support surface" of the present invention, the upper surface 521t on the Xl side corresponds to an example of the "first mounting surface" of the present invention, the upper surface 612t on the Xr side corresponds to an example of the "second support surface" of the present invention, and the upper surface 521t on the Xr side corresponds to an example of the "second mounting surface" of the present invention.

[0108] In the third case ( Figure 8 In the above, the upper surface 812t on the Xl side corresponds to an example of the "first support surface" of the present invention, the upper surface 722t on the Xl side corresponds to an example of the "first mounting surface" of the present invention, the upper surface 812t on the Xr side corresponds to an example of the "second support surface" of the present invention, and the upper surface 722t on the Xr side corresponds to an example of the "second mounting surface" of the present invention.

[0109] It should be noted that the present invention is not limited to the above-described embodiments, and various modifications can be made to the embodiments without departing from its spirit. For example, the branch conveying device A described above does not necessarily require the substrate 19. Therefore, the branch conveying device A may be placed directly on the mounting surface without using the substrate 19.

[0110] Furthermore, the number and configuration of the fixed linear conveyors 2 used in the conveying system 1 can be appropriately changed. For example, modifications can be made such as shifting the position of the fixed linear conveyor 2c along the Y direction, shifting the position of the fixed linear conveyor 2d along the Y direction, omitting the fixed linear conveyor 2c, or omitting the fixed linear conveyor 2d. Moreover, the number of fixed linear conveyors 2 arranged side-by-side on the Xr or Xl side in the X direction is not limited to two, but can be three or more. The aforementioned support mechanisms 41 and 43, which support the movable linear conveyors 3 from both sides, can also achieve the same effect for three or more fixed linear conveyors 2 arranged in this way.

[0111] Furthermore, the direction (switching direction) in which the movable linear conveyor 3 is driven can be varied in many ways. Therefore, the direction in which the movable linear conveyor 3 is driven is not limited to the horizontal direction, but can also be vertical. In this case, the branch conveying device A can branch the conveying path of the table conveyor T in the vertical direction.

[0112] Explanation of reference numerals in the attached figures

[0113] 1…Transportation System

[0114] 11l…Mounting Base (First Mounting Base)

[0115] 11r…Mounting Base (Second Mounting Base)

[0116] 13… Fixing plate (first and second mounting components)

[0117] 100…Control Department

[0118] 2… Fixed linear conveyor

[0119] 2a… Fixed linear conveyor (first fixed linear conveyor)

[0120] 2b… ​​Fixed linear conveyor (second fixed linear conveyor)

[0121] 2c… Fixed linear conveyor (third fixed linear conveyor)

[0122] 2d… Fixed linear conveyor (fourth fixed linear conveyor)

[0123] 3…Movable linear conveyor

[0124] 32l… End (First End)

[0125] 32r…end (second end)

[0126] 41…Supporting Mechanism (First Supporting Mechanism)

[0127] 43… Supporting Mechanism (Second Supporting Mechanism)

[0128] A… Branch transport device (transport path switching device)

[0129] Lf1…relative position (first position, third position)

[0130] Lf2…relative positions (second position, fourth position)

[0131] T… Tabletop Conveyor

[0132] X…X direction (movement direction)

[0133] Xl…Xl side (one side)

[0134] Xr…Xr side (the other side)

[0135] Y…Y direction (switch direction)

[0136] Ym…Mobility Range

Claims

1. A transport path switching device, comprising: A movable linear conveyor that moves the conveyor platform along a predetermined transport direction; A first support mechanism supports a first end portion of the movable linear conveyor, which is located on one side of the conveying direction; and The second support mechanism supports the second end of the movable linear conveyor, which is located on the opposite side of the first side in the transport direction. The first support mechanism and the second support mechanism support the movable linear conveyor, which moves along the switching direction within a movable range including a first position and a second position that are different from each other in a switching direction inclined relative to the transport direction. A first fixed linear conveyor is opposite the first position from one side of the transport direction. The second fixed linear conveyor is opposite the second position from the other side of the transport direction. The movable linear conveyor stops at the first position and transfers the conveyor platform between itself and the first fixed linear conveyor. The movable linear conveyor stops at the second position and transfers the conveyor platform between itself and the second fixed linear conveyor. The first support mechanism has a first movable component mounted on the first end of the movable linear conveyor and a first guide portion mounted on the first fixed linear conveyor and guiding the first movable component along the switching direction. The second support mechanism has a second movable component mounted on the second end of the movable linear conveyor and a second guide portion mounted on the second fixed linear conveyor and guiding the second movable component along the switching direction.

2. The transport path switching device according to claim 1, wherein, The first guide section has a drive source. The drive source causes the movable linear conveyor to move in the switching direction by driving the first movable component in the switching direction.

3. The transport path switching device according to claim 2, wherein, The first guide portion has a ball screw arranged parallel to the switching direction. The first movable part is connected to the nut of the ball screw. The drive source rotates the ball screw shaft, thereby driving the first movable component along the switching direction.

4. The transport path switching device according to claim 1, wherein, The first guide section has a first driving source. The second guide section has a second drive source. The first drive source moves the movable linear conveyor along the switching direction by driving the first movable component along the switching direction. The second drive source moves the movable linear conveyor in the switching direction by driving the second movable component in the switching direction.

5. The transport path switching device according to claim 4, wherein, The first guide portion has a first ball screw arranged parallel to the switching direction. The first movable part is connected to the nut of the first ball screw. The first drive source rotates the screw shaft of the first ball screw, thereby driving the first movable component along the switching direction. The second guide has a second ball screw arranged parallel to the switching direction. The second movable part is connected to the nut of the second ball screw. The second drive source causes the screw shaft of the second ball screw to rotate, thereby driving the second movable component along the switching direction.

6. The transport path switching device according to claim 4 or 5, wherein, The transport path switching device also includes a control unit that controls the operation of the first drive source and the operation of the second drive source. The control unit is configured such that, When the movable linear conveyor and the first fixed linear conveyor are positioned relative to each other in the transport direction, the operation of the second drive source is stopped, and the position of the movable linear conveyor is controlled to the first position by the operation of the first drive source. When the movable linear conveyor and the second fixed linear conveyor are positioned relative to each other in the transport direction, the operation of the first drive source is stopped, and the position of the movable linear conveyor is controlled to the second position by the operation of the second drive source.

7. The transport path switching device according to claim 1, wherein, The transport path switching device also includes: A linkage mechanism is mounted on the movable linear conveyor at a mounting position between the first end and the second end in the transport direction; and A single-axis robot moves a movable linear conveyor along the switching direction by driving the linkage mechanism along the switching direction. The linkage mechanism includes a first spherical bearing mounted on the movable linear conveyor, a second spherical bearing mounted on the slider of the single-axis robot, and a rod connecting the first spherical bearing and the second spherical bearing. One end of the rod is supported by the first spherical bearing, and the other end of the rod opposite to the first end is supported by the second spherical bearing.

8. The transport path switching device according to any one of claims 1 to 7, wherein, The first movable member has a first support surface that faces the bottom surface of the first end from below. The first movable component and the first end are positioned by the first support surface colliding with the bottom surface of the first end. The first guide portion has a first mounting surface that contacts the bottom surface of the first fixed linear conveyor from below. The first guide and the first fixed linear conveyor are positioned by the first mounting surface colliding with the bottom surface of the first fixed linear conveyor. The second movable member has a second support surface that faces the bottom surface of the second end from below. The second movable component and the second end are positioned by the second support surface contacting the bottom surface of the second end. The second guide portion has a second mounting surface that collides with the bottom surface of the second fixed linear conveyor from below. The second guide and the second fixed linear conveyor are positioned by the second mounting surface colliding with the bottom surface of the second fixed linear conveyor.

9. The transport path switching device according to any one of claims 1 to 8, wherein, The movable range includes a third position that is different from at least the second position among the first position and the second position. The third fixed linear conveyor is opposite the third position from the other side of the transport direction. The movable linear conveyor stops at the third position and transfers the conveyor platform between itself and the third fixed linear conveyor. The second guide portion of the second support mechanism is mounted on the third fixed linear conveyor.

10. The transport path switching device according to any one of claims 1 to 9, wherein, The movable range includes a fourth position that is different from at least the first position among the first position and the second position. The fourth fixed linear conveyor is opposite the fourth position from the side of the transport direction. The movable linear conveyor stops at the fourth position and transfers the conveyor platform between itself and the fourth fixed linear conveyor. The first guide portion of the first support mechanism is mounted on the fourth fixed linear conveyor.

11. The transport path switching device according to any one of claims 1 to 10, wherein, The transport path switching device also includes: A first mounting component mounts the first support mechanism onto a first mounting base for mounting the first fixed linear conveyor; and The second mounting component mounts the second support mechanism onto a second mounting base for mounting the second fixed linear conveyor.

12. A material handling system, comprising: The first fixed linear conveyor drives the conveyor platform along the transport direction; A second fixed linear conveyor drives the conveyor platform along the transport direction; and The transport path switching device according to any one of claims 1 to 11 is disposed between the first fixed linear conveyor and the second fixed linear conveyor in the transport direction.

13. A method for switching a transport path, comprising the steps of: moving a movable linear conveyor that transports a conveyor platform along a predetermined transport direction within a movable range including a first position and a second position that are different from each other in a switching direction inclined relative to the transport direction; The first end, which is one side of the movable linear conveyor in the transport direction, is supported by a first support mechanism. The second end of the movable linear conveyor, which is located on the opposite side of the first side in the transport direction, is supported by a second support mechanism. A first fixed linear conveyor is opposite the first position from one side of the transport direction. The second fixed linear conveyor is opposite the second position from the other side of the transport direction. The movable linear conveyor stops at the first position and transfers the conveyor platform between itself and the first fixed linear conveyor. The movable linear conveyor stops at the second position and transfers the conveyor platform between itself and the second fixed linear conveyor. The first support mechanism has a first movable component mounted on the first end of the movable linear conveyor and a first guide portion mounted on the first fixed linear conveyor and guiding the first movable component along the switching direction. The second support mechanism has a second movable component mounted on the second end of the movable linear conveyor and a second guide portion mounted on the second fixed linear conveyor and guiding the second movable component along the switching direction.

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