Dual-side polishing pad face shape measurement and dressing process optimization system and optimization method

Abstract

The application provides a double-sided polishing pad surface type measurement and dressing process optimization system and method, and relates to the technical field of double-sided polishing processing. The system comprises a surface type measurement system, a polishing pad dressing model system and a dressing process optimization system. The surface type measurement system is used for measuring the flatness data of the polishing pad, judging the surface type of the current polishing pad according to the flatness information and calculating the dressing amount. The polishing pad dressing model system comprises a dressing track model and a material removal rate model, which are respectively used for calculating the dressing track formed by the dressing wheel on the polishing pad surface and the removal rate of the polishing pad surface material in the dressing process, and combining the required dressing amount of the polishing pad to determine the dressing time. The dressing process optimization system is used for combining the real-time surface type of the polishing pad and the polishing pad dressing model to optimize the current polishing pad state to obtain the best dressing process parameters and dressing time. The dressing efficiency can be improved by the scheme.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of double-sided lapping, in particular to a double-sided lapping grinding disc surface type measurement and dressing process optimization system and method. BACKGROUND

[0002] Double-sided lapping is a process in which a workpiece is placed in a planetary wheel, and the workpiece is subjected to planetary motion under the drive of a center wheel, while the upper and lower grinding discs are rotated under a certain pressure to remove material from the upper and lower surfaces of the workpiece. Double-sided lapping not only has high efficiency, but also effectively ensures the surface accuracy and surface quality of the workpiece. Therefore, as a commonly used high-precision processing method, double-sided lapping is widely used in the processing of thin sheet parts such as semiconductor substrates, heat-conducting substrates, and mobile phone panels. However, during double-sided lapping, the surface material of the workpiece is removed at the same time, and the surface of the grinding disc is gradually worn. Due to the regularity of planetary motion in the double-sided lapping process, the surface of the grinding disc is unevenly worn, and as the surface type error of the grinding disc surface increases, it will seriously affect the accuracy and consistency of the workpiece. When the surface type error of the grinding disc surface reaches a certain value, the grinding disc must be dressed. Therefore, rapid measurement and dressing of the grinding disc are very important to improve the efficiency of double-sided lapping.

[0003] Currently, the industry mainly uses a micrometer measurement method to manually measure the flatness and surface type of the grinding disc surface at regular intervals, which is not only inefficient, but also easily affected by the experience and skill level of the operator, and cannot guarantee the accuracy of the flatness measurement data. At the same time, the subsequent dressing is also based on experience and lacks theoretical basis, which not only reduces the dressing efficiency, but also easily causes over-dressing or incomplete dressing. The invention patent CN114659474B discloses a grinding disc flatness detection method, device, equipment and storage medium, which proposes a new method for rapid measurement, effectively improving the measurement efficiency and accuracy of the surface type of the double-sided lapping disc, but it cannot combine the measurement results with the dressing process to improve the dressing efficiency of the grinding disc, and the double-sided lapping disc dressing efficiency is low, and over-dressing or incomplete dressing easily occurs. SUMMARY

[0004] The present application discloses a double-sided lapping grinding disc surface type measurement and dressing process optimization system, which aims to improve the existing problem of low double-sided grinding disc dressing efficiency, over-dressing or incomplete dressing.

[0005] The present application adopts the following scheme:

[0006] The present application provides a double-sided lapping grinding disc surface type measurement and dressing process optimization system, the grinding disc includes an upper grinding disc and a lower grinding disc, comprising a surface type measurement system, a grinding disc dressing model system and a dressing process optimization system, wherein,

[0007] The surface type measurement system is used to measure the flatness data of the grinding disc, and to determine the surface type of the current grinding disc according to the flatness information, and to calculate the trimming amount required for the grinding disc to reach the preset flatness standard specification;

[0008] The grinding disc trimming model system comprises a trimming track model and a material removal rate model, the trimming track model is used to calculate the trimming track formed by the trimming wheel on the surface of the grinding disc, and the material removal rate model is used to calculate the material removal rate of the grinding disc surface by the trimming wheel during the trimming process based on the length of the trimming track and the pressure applied by the upper grinding disc, and the trimming time is determined by combining the required trimming amount of the grinding disc;

[0009] The trimming process optimization system is used to combine the real-time surface type of the grinding disc and the grinding disc trimming model to optimize the trimming process parameters and the trimming time according to the current state of the grinding disc.

[0010] Further, the surface type measurement system uses a laser displacement sensor to measure the flatness data of the upper grinding disc and the lower grinding disc to obtain N original data of the upper grinding disc and the lower grinding disc along the radial direction, respectively, uses wavelet transform to remove the interference of the grinding disc surface abrasive and pit factors in the original data to obtain filtered data, and takes the average value of each as the flatness curve of the upper grinding disc and the lower grinding disc, and uses a polynomial fitting method to determine the surface type of the double-sided grinding disc 61 in this state and to calculate the required trimming amount of each grinding disc.

[0011] Further, the trimming track model is based on three trimming parameters of the upper grinding disc speed, the center wheel speed and the lower grinding disc speed to establish a trimming track model formed by an abrasive A on the surface of the grinding disc:

[0012]

[0013]

[0014] In the formula, r p is the center distance between the center wheel and the trimming wheel, θ is the initial phase of the center wheel and the trimming wheel, Z1 is the number of teeth of the center wheel, Z2 is the number of teeth of the trimming wheel, Z3 is the number of teeth of the outer gear, ω c is the center wheel speed, ω d is the grinding disc speed, r is the center distance between the abrasive A and the trimming wheel, φ is the initial phase of the abrasive A and the trimming wheel, and t is the trimming time.

[0015] Further, it can divide the track of the grinding disc and divide the grid of the trimming wheel, calculate the track length of the abrasive of the trimming wheel moving in the track B i of the grinding disc Thus, the track density of each track area is obtained according to the following formula: In the formula, is the area of the track under the lower grinding disc, ρ Bi is the track density; and the standard deviation of the track density under different speed ratio conditions is calculated as an evaluation index of track uniformity VCSD.

[0016] Further, the material removal rate model can calculate the material removal rate model of the dressing wheel dressing different grinding disc tracks based on the dressing track model and the pressure parameters of the dressing process:

[0017]

[0018] wherein, is the material removal rate of the grinding disc track B i , η is the abrasive track repetition rate, s ABC is the abrasive track cross-sectional area, and T is the dressing period.

[0019] Further, the dressing process optimization system is configured to perform clustering processing on the track density under different speed ratio conditions using the K-Means mean method according to the dressing track model, then calculate the planeness data of the upper grinding disc and the lower grinding disc and the Euclidean distance of each cluster center, determine which cluster the planeness data of the current grinding disc belongs to, and combine the material removal rate model and the required dressing amount of the grinding disc to calculate the dressing time t under the speed ratio condition of the cluster, the material removal amount v of the grinding disc during dressing, the planeness high of the grinding disc after dressing is completed, and the Euclidean distance d of the planeness data and the best planeness.

[0020] Further, the comprehensive evaluation index of the best grinding disc dressing quality is obtained through the following optimization algorithm model:

[0021] f = a1 x t' + a2 x v' + a3 x d'

[0022] wherein, f is the comprehensive evaluation index of the grinding disc dressing quality, a1 is the weight coefficient of the dressing time, a2 is the weight coefficient of the grinding disc material removal amount, and a3 is the weight coefficient of the Euclidean distance of the planeness after dressing is completed and the best planeness, wherein t', v', and d' are the data corresponding to t, v, and d after normalization processing; by calculating f under the condition that the planeness data of the current grinding disc belongs to the cluster, the smaller the values of the three groups of data t, v, and d, the higher the dressing quality of the grinding disc, and the minimum value of f under the condition that the cluster belongs to is selected as the best dressing process parameters and dressing time under the evaluation condition.

[0023] The application also provides a double-sided grinding disc surface type measurement and dressing process optimization method, a double-sided grinding disc surface type measurement and dressing process optimization system according to any one of the above, comprising the following steps:

[0024] S1. Measure the flatness data of the grinding disc using the surface shape measurement system, determine the surface shape of the current grinding disc based on the flatness information, and calculate the amount of trimming required to achieve the preset flatness standard specification for the grinding disc.

[0025] S2. Calculate the dressing trajectory formed by the dressing wheel on the grinding disc surface using the dressing trajectory model of the grinding disc dressing model system; calculate the material removal rate of the dressing wheel on the grinding disc surface during the dressing process using the material removal rate model based on the length of the dressing trajectory and the pressure applied to the upper grinding disc, and determine the dressing time in combination with the required dressing amount of the grinding disc.

[0026] S3. The grinding process optimization system is used to combine the real-time surface shape of the grinding disc with the grinding disc trimming model to optimize the process based on the current state of the grinding disc and obtain the best trimming process parameters and trimming time.

[0027] Beneficial effects:

[0028] This invention utilizes a laser sensor to measure the high-precision flatness data of the upper and lower grinding discs on a double-sided grinding wheel, detects changes in the grinding disc surface shape, establishes a grinding disc dressing model and process optimization algorithm, and determines the optimal dressing process parameters and dressing time based on the current grinding disc surface shape. With this invention, users can achieve the required flatness standard for the grinding disc with a single dressing operation, effectively reducing the frequency of multiple dressings and flatness checks, thus improving dressing efficiency while ensuring the dressing quality of the grinding disc surface. Attached Figure Description

[0029] Figure 1 This is a logic block diagram of the method for measuring and optimizing the surface shape of a double-sided grinding disc according to an embodiment of the present invention.

[0030] Figure 2 This is a schematic diagram illustrating the data acquisition method during the surface measurement process;

[0031] Figure 3 The original curve acquired by the laser displacement sensor;

[0032] Figure 4 This is the flatness curve of the grinding disc along the radial direction;

[0033] Figure 5 A flowchart for determining the surface shape of a double-sided grinding disc;

[0034] Figure 6 A schematic diagram illustrating the track and grid division for the grinding wheel and dressing wheel;

[0035] Figure 7 The curves show the variation under different speed ratios;

[0036] Figure 8 The grinding wheel dressing trajectory curves under different speed ratios;

[0037] Figure 9 A flowchart for the trajectory clustering processing algorithm;

[0038] Figure 10 A comparison chart of the flatness data of the grinding wheel before and after dressing;

[0039] Reference numerals: 21 - Grinding disc rotation direction; 22 - Laser sensor probe movement direction; 61 - Grinding disc 61; 62 - Dressing wheel; 63 - Center wheel. Detailed Implementation

[0040] Example 1

[0041] Combination Figure 1 This embodiment provides a double-sided grinding disc surface shape measurement and dressing process optimization system. The grinding disc 61 includes an upper grinding disc and a lower grinding disc, and includes a surface shape measurement system, a grinding disc dressing model system, and a dressing process optimization system. The surface shape measurement system measures the flatness data of the grinding disc, determines the current surface shape of the grinding disc 61 based on the flatness information, and calculates the dressing amount required to achieve a preset flatness standard for the grinding disc 61. The grinding disc dressing model system includes a dressing trajectory model and a material removal rate model. The dressing trajectory model calculates the dressing trajectory formed by the dressing wheel 62 on the surface of the grinding disc 61. The material removal rate model calculates the material removal rate of the dressing wheel 62 on the grinding disc surface during the dressing process based on the length of the dressing trajectory and the pressure applied by the upper grinding disc, and determines the dressing time by combining this with the required dressing amount for the grinding disc 61. The dressing process optimization system combines the real-time surface shape of the grinding disc with the grinding disc dressing model to optimize the current grinding disc state and obtain the best dressing process parameters and dressing time.

[0042] In this embodiment, the research object is the grinding disc 61, which includes an upper grinding disc and a lower grinding disc, and the dressing wheel 62 is a dressing wheel 62 in the form of bonded abrasive.

[0043] The surface shape measurement system uses a laser displacement sensor to measure the flatness data of the upper and lower grinding discs. The data acquisition method is as follows: Figure 2 As shown, N raw data points along the radial direction of the upper and lower grinding discs are obtained respectively, where 21 represents the grinding disc rotation direction; 22 represents the laser sensor probe movement direction. Figure 3 As shown, analysis revealed that the main interference factors in the original data were abrasive grains and pits on the surface of the grinding disc 61, as well as the influence of vibration during data acquisition. Wavelet analysis and wavelet reconstruction were used to remove interference factors from the original data and obtain filter curves. The average of N filter curves for both the upper and lower grinding discs was taken as the flatness curve hig□ of the grinding disc. Figure 4 As shown.

[0044] like Figure 5 As shown, in order to determine the surface shape of the grinding disc 61, the axisymmetric method is used to restore the flatness curve on the diameter of the grinding disc 61, and the polynomial fitting method is used to determine the surface shape of the upper and lower grinding discs in this state, and calculate the amount of trimming required to reach the flatness standard.

[0045] It should be noted that the surface shape measurement system can exist independently, and the corresponding dressing parameters can be manually selected based on the surface shape determined by the system, or it can be integrated with the grinding wheel dressing model system to intelligently select dressing parameters.

[0046] The dressing trajectory model is based on three dressing parameters: the rotational speed of the upper grinding disc, the rotational speed of the central wheel 63, and the rotational speed of the lower grinding disc. It establishes a dressing trajectory model of a point abrasive grain A on the dressing wheel 62 on the grinding disc.

[0047]

[0048] In the formula, r p Let θ be the center distance between the center gear 63 and the dressing gear 62, θ be the initial phase between the center gear 63 and the dressing gear 62, Z1 be the number of teeth on the center gear 63, Z2 be the number of teeth on the disc of the dressing gear 62, Z3 be the number of teeth on the external gear ring, and ω be the number of teeth on the external gear ring. c For the center wheel, the rotational speed is 63, ω d φ is the grinding disc rotation speed, r is the center distance between abrasive grain A and dressing wheel 62, φ is the initial phase between abrasive grain A and dressing wheel 62, and t is the dressing time.

[0049] like Figure 6 As shown, to evaluate the dressing trajectory on the grinding disc under different speed ratios, the grinding disc and dressing wheel 62 were divided into tracks and meshes, respectively, and the abrasive grains of the dressing wheel 62 were calculated under different grinding disc tracks B. i The length of the trajectory formed below Track density in each orbital region: And the trajectory density uniformity (VCSD) under different speed ratios, for example, setting the speed ratio K = upper (lower) grinding disc speed / center wheel speed, the VCSD changes under different speed ratios as follows: Figure 7 As shown, some trajectory density curves are as follows: Figure 8 As shown.

[0050] Based on the dressing trajectory model and the pressure parameters of the dressing process, a material removal rate model for dressing wheel 62 dressing different grinding disc tracks is established:

[0051]

[0052] In the formula, η is the abrasive particle trajectory repetition rate, and s ABC Let T be the cross-sectional area of ​​the abrasive grain trajectory and T be the dressing cycle.

[0053] like Figure 9 As shown, based on the trimming trajectory model, the K-Means method is used to divide the trajectory density under different speed ratios into k clusters. Different sizes of grinding discs and trimming wheels 62 correspond to different trimming trajectory densities, therefore the cluster allocation value—k value—is different. To improve the applicability of the algorithm, the contour coefficient method is used to automatically determine the number of grinding disc trajectory density groups k, which is then applied to the trimming of grinding discs of various sizes. Specifically, after dividing the trajectory density under different speed ratios into k clusters, the Euclidean distance D between the flatness data hig□ of the upper and lower grinding discs and the cluster centers of each group is calculated to determine which cluster the flatness data belongs to. Combining the material removal rate model and the required trimming amount □ of the grinding disc, the trimming time t, the material removal amount v of the grinding disc during the trimming process, the flatness hig□ of the grinding disc after trimming, and the Euclidean distance d between the flatness data and the optimal flatness are calculated under the speed ratio of that cluster.

[0054] It should be noted that the flatness data and trajectory density data have different lengths, requiring data length processing and normalization of the flatness data. A process optimization model is then established based on the above parameters:

[0055] f=a1×t′+a2×v′+a3×d′

[0056] In the formula, a1 is the weighting coefficient of the dressing time t, a2 is the weighting coefficient of the amount of grinding disc material removed, and a3 is the weighting coefficient of the Euclidean distance between the flatness after dressing and the optimal flatness. t′, v′, and d′ are the data corresponding to t, v, and d after normalization.

[0057] Calculate the value of f under the current cluster conditions for the flatness data of grinding disc 61. For the three sets of data t, v, and d, the smaller the value, the higher the dressing quality of grinding disc 61. Select the minimum value of f under the current cluster conditions as the optimal dressing process parameters and dressing time t under the evaluation conditions. best .

[0058] like Figure 10 As shown, the optimized dressing parameters can effectively dress the current state of the grinding wheel 61, and the dressing time required for the current grinding wheel is calculated from the above model: t best =228s <t index =746s,t ibdex The dressing time is calculated based on the given dressing parameters for the grinding disc. Therefore, the optimized dressing parameters improve the dressing efficiency of the grinding disc while ensuring the dressing quality.

[0059] When the surface shapes of the upper and lower grinding discs are different, their dressing parameters should not be the same. The corresponding optimal dressing speed ratio should be selected separately, and the speed of the center wheel 63 should be kept constant. By changing the speed of the upper and lower grinding discs, the corresponding surface shapes of the upper and lower grinding discs can be dressed.

[0060] Simultaneously, when the flatness of the upper and lower grinding discs of a double-sided grinding disc is different, the dressing time will also be different. If the dressing time t up >t down , t up For the time required for the upper grinding wheel to be dressed, t down The grinding wheel dressing time is taken into account, with the longer dressing time being the primary factor, i.e., t = t_d. up When the rest time reaches t down At the same time, keep the upper grinding disc rotation speed constant, and change the lower grinding disc rotation speed to achieve the minimum speed ratio for VCSD under the conditions of the respective cluster for uniform dressing, to prevent over-dressing or reverse dressing of the lower grinding disc; if the dressing time t up <t down Then t down As the main term, t = t up The speed of the upper grinding disc is changed while the speed of the lower grinding disc remains constant.

[0061] Example 2

[0062] This embodiment provides a method for measuring and optimizing the surface profile of a double-sided grinding disc, which includes the following steps according to the aforementioned system for measuring and optimizing the surface profile of a double-sided grinding disc:

[0063] S1. Measure the flatness data of the grinding disc using the surface shape measurement system, determine the surface shape of the current grinding disc based on the flatness information, and calculate the amount of trimming required to achieve the preset flatness standard specification for the grinding disc.

[0064] S2. Calculate the dressing trajectory formed by the dressing wheel 62 on the surface of the grinding disc using the dressing trajectory model of the grinding disc dressing model system; calculate the material removal rate of the dressing wheel 62 on the surface of the grinding disc during the dressing process using the material removal rate model based on the length of the dressing trajectory and the pressure applied by the upper grinding disc, and determine the dressing time in combination with the required dressing amount of the grinding disc.

[0065] S3. The grinding process optimization system is used to combine the real-time surface shape of the grinding disc with the grinding disc trimming model to optimize the process based on the current state of the grinding disc and obtain the best trimming process parameters and trimming time.

[0066] It should be understood that the above are merely preferred embodiments of the present invention, and the scope of protection of the present invention is not limited to the above embodiments. All technical solutions that fall within the scope of the present invention are within the scope of protection of the present invention.

[0067] The accompanying drawings used in the above description of the embodiments only illustrate certain embodiments of the present invention and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

Claims

1. A system for measuring and optimizing the surface profile of a double-sided grinding disc and a finishing process, wherein the grinding disc comprises an upper grinding disc and a lower grinding disc, characterized in that, This includes a surface measurement system, a grinding disc dressing model system, and a dressing process optimization system, among which... The surface shape measurement system is used to measure the flatness data of the grinding disc, determine the current surface shape of the grinding disc based on the flatness information, and calculate the amount of dressing required for the grinding disc to reach the preset flatness standard. The grinding disc dressing model system includes a dressing trajectory model and a material removal rate model. The dressing trajectory model is used to calculate the dressing trajectory formed by the dressing wheel on the grinding disc surface. The material removal rate model calculates the material removal rate of the dressing wheel on the grinding disc surface during the dressing process based on the length of the dressing trajectory and the pressure applied to the upper grinding disc, and determines the dressing time in combination with the required dressing amount of the grinding disc. The trimming process optimization system combines the real-time surface profile of the grinding disc with the grinding disc trimming model to optimize the current grinding disc condition and obtain the best trimming process parameters and trimming time. The surface profile measurement system uses a laser displacement sensor to measure the flatness data of the upper and lower grinding discs to obtain N original data points along the radial direction of the upper and lower grinding discs respectively. Wavelet transform is used to remove the interference of abrasive particles and pits on the grinding disc surface from the original data to obtain filtered data. The average value of each is taken as the flatness curve of the upper and lower grinding discs. Polynomial fitting method is used to determine the surface profile of the double-sided grinding disc in this state and calculate the trimming amount required for each grinding disc.

2. The double-sided grinding disc surface shape measurement and dressing process optimization system according to claim 1, characterized in that, The dressing trajectory model described above is based on three dressing parameters: the upper grinding disc speed, the center wheel speed, and the lower grinding disc speed, to establish a dressing trajectory model formed by a point abrasive grain A on the dressing wheel on the grinding disc surface. ； In the formula, The center distance between the center wheel and the dressing wheel. This represents the initial phase between the center wheel and the dressing wheel. The number of teeth on the center gear To adjust the number of teeth on the wheel disc, This refers to the number of teeth on the external gear ring. For the rotational speed of the center wheel, The rotational speed of the grinding disc. The center distance between abrasive grain A and the dressing wheel. Let A be the initial phase between abrasive grain A and the dressing wheel. This is for rest and adjustment time.

3. The double-sided grinding disc surface shape measurement and dressing process optimization system according to claim 2, characterized in that, It can divide the grinding disc into tracks, divide the dressing wheel into meshes, and calculate the abrasive grains of the dressing wheel on the grinding disc tracks. Length of the trajectory of the downward motion Therefore, the trajectory density of each orbital region can be obtained according to the following formula: In the formula, Let this be the area of ​​the grinding disc under the track. The trajectory density is calculated, and the standard deviation of the trajectory density under different speed ratios is used as the trajectory uniformity. Evaluation indicators.

4. The double-sided grinding disc surface shape measurement and dressing process optimization system according to claim 3, characterized in that, The material removal rate model can calculate the material removal rate model for different grinding disc tracks when the dressing wheel is dressing, based on the dressing trajectory model and the pressure parameters of the dressing process. In the formula, This refers to the repeatability of abrasive grain trajectories. For the cross-sectional area of ​​the abrasive trajectory, This is the repair cycle. For the grinding wheel track Material removal rate.

5. The double-sided grinding disc surface shape measurement and dressing process optimization system according to claim 4, characterized in that, The trimming process optimization system is configured to cluster the trajectory density under different speed ratios based on the trimming trajectory model using the K-Means method. It then calculates the Euclidean distance between the flatness data of the upper and lower grinding discs and each cluster center to determine which cluster the current grinding disc's flatness data belongs to. Finally, combining the material removal rate model and the required trimming amount of the grinding disc, it calculates the trimming time under the specified speed ratio for that cluster. Material removal amount from the grinding disc during the finishing process The flatness of the grinding disc after trimming And the Euclidean distance between the flatness data and the optimal flatness .

6. The double-sided grinding disc surface profile measurement and dressing process optimization system according to claim 5, characterized in that, The optimal comprehensive evaluation index for grinding disc dressing quality is obtained through the following optimization algorithm model: In the formula, f is the comprehensive evaluation index of the grinding disc dressing quality, which is... This is a weighting factor for the adjustment time. This is a weighting coefficient for the amount of material removed from the grinding disc. The weighting coefficient is the Euclidean distance between the flatness after trimming and the optimal flatness, where... , , After normalization , , The corresponding data; calculated based on the cluster conditions to which the flatness data of the current grinding disc belongs. ,for , , The smaller the value of the three sets of data, the higher the dressing quality of the grinding disc. The minimum value of f under the corresponding cluster conditions is selected as the optimal dressing process parameter and dressing time under the evaluation conditions.

7. A method for optimizing the surface profile measurement and finishing process of a double-sided grinding disc, comprising the following steps, according to any one of claims 1-6: S1. Measure the flatness data of the grinding disc using the surface shape measurement system, determine the surface shape of the current grinding disc based on the flatness information, and calculate the amount of trimming required to achieve the preset flatness standard specification for the grinding disc. S2. Calculate the dressing trajectory formed by the dressing wheel on the grinding disc surface using the dressing trajectory model of the grinding disc dressing model system; calculate the material removal rate of the dressing wheel on the grinding disc surface during the dressing process using the material removal rate model based on the length of the dressing trajectory and the pressure applied to the upper grinding disc, and determine the dressing time in combination with the required dressing amount of the grinding disc. S3. The grinding process optimization system is used to combine the real-time surface shape of the grinding disc with the grinding disc trimming model to optimize the process based on the current state of the grinding disc and obtain the best trimming process parameters and trimming time.

Images