Carrying path switching device, carrying system, and carrying path switching method

Abstract

The present application provides a carrying path switching device, a carrying system and a carrying path switching method. A support mechanism is provided to allow the end face of the movable linear conveyor to displace in the X direction to the Xr side. The support mechanism is spaced apart in the X direction between the end face of the movable linear conveyor at the relative position (Lf1) or the relative position (Lf2) and the end face of the fixed linear conveyor, and supports the end of the movable linear conveyor to the end of the fixed linear conveyor. In this way, by supporting the movable linear conveyor to the support mechanism of the fixed linear conveyor to provide a spacing between the end face of the movable linear conveyor and the end face of the fixed linear conveyor, a reliable spacing can be formed therebetween. Therefore, the displacement of the released end face can be absorbed by the spacing, avoiding the contact between the end face of the movable linear conveyor and the end face of the fixed linear conveyor.

Description

Technical Field

[0001] This invention relates to a technique for switching the transport path of a table conveyor between two fixed linear conveyors arranged on both sides of a movable linear conveyor, using a movable linear conveyor. Background Technology

[0002] Patent Document 1 describes a circulating transport device that uses a movable linear conveyor to transport a tabletop conveyor between two fixed linear conveyors arranged side-by-side. In this device, the movable linear conveyor is capable of moving between a position opposite one of the two fixed linear conveyors and a position opposite the other. The movable linear conveyor transfers the tabletop conveyor between the fixed linear conveyors at the position opposite to one of them, and between the two fixed linear conveyors at the position opposite to the other.

[0003] Furthermore, in such linear conveyors, deformation may occur due to heat generation, as shown in Patent Document 2. Especially in fixed linear conveyors mounted on a mounting base, as in Patent Document 1, the elongation along the length is constrained, thus warping due to heat generation is possible. Therefore, in Patent Document 1, when supporting the frame of the fixed linear conveyor on the mounting base, one end of the frame is fixed to the mounting base, while the other end is not fixed, thereby suppressing frame warping associated with heat generation.

[0004] Prior art literature

[0005] Patent documents

[0006] Patent Document 1: WO2021 / 229781

[0007] Patent Document 2: Japanese Patent Application Publication No. 2019-083597 Summary of the Invention

[0008] The problem that the invention aims to solve

[0009] Furthermore, the aforementioned thermal deformation can also occur in movable linear conveyors. Moreover, in structures where the transport path is switched between fixed linear conveyors positioned on either side of the movable linear conveyor, thermal deformation of the movable linear conveyor becomes difficult to manage. That is, a movable linear conveyor positioned between fixed linear conveyors on one side and another is used to switch the transport path. In this case, when transferring a conveyor platform between fixed linear conveyors on one side, one end of the movable linear conveyor faces that fixed linear conveyor; when transferring a conveyor platform between fixed linear conveyors on the other side, the other end of the movable linear conveyor faces that fixed linear conveyor. Therefore, even if one end of the movable linear conveyor is released, as described above, the movable linear conveyor will warp when the fixed linear conveyor facing that end comes into contact with that end due to thermal deformation.

[0010] In view of the above-mentioned problems, the present invention aims to prevent contact between the movable linear conveyor and the fixed linear conveyor adjacent to it due to thermal deformation of the movable linear conveyor, thereby suppressing the warping of the movable linear conveyor.

[0011] Methods for solving problems

[0012] The transport path switching device of the present invention includes: a movable linear conveyor for transporting a conveyor platform along a predetermined transport direction; and a conveyor moving unit for moving the movable linear conveyor between a first position and a second position that are different from each other in a switching direction inclined relative to the transport direction, wherein a first fixed linear conveyor is opposite to the first position from one side of the transport direction, and a second fixed linear conveyor is opposite to the second position from the other side of the transport direction opposite to one side, wherein the movable linear conveyor stops at the first position and transfers the conveyor platform between itself and the first fixed linear conveyor, and the movable linear conveyor stops at the second position and transfers the conveyor platform between itself and the second fixed linear conveyor, the conveyor moving unit having a support mechanism on the other side, wherein the other end of the movable linear conveyor located at the second position is spaced apart from the second fixed linear conveyor along the transport direction, and the movable linear conveyor is supported on the second fixed linear conveyor, and the other end of the movable linear conveyor is allowed to be displaced to the other side in the transport direction.

[0013] The conveying system of the present invention comprises: a first fixed linear conveyor that drives the conveyor platform along the conveying direction; a second fixed linear conveyor that drives the conveyor platform along the conveying direction; and the aforementioned conveying path switching device, which is disposed between the first fixed linear conveyor and the second fixed linear conveyor in the conveying direction.

[0014] The transport path switching method of the present invention includes the steps of moving a movable linear conveyor that transports a conveyor platform along a predetermined transport direction between a first position and a second position that are different from each other in a switching direction in which a conveyor moving unit is inclined relative to the transport direction. A first fixed linear conveyor is opposite to the first position from one side of the transport direction, and a second fixed linear conveyor is opposite to the second position from the other side of the transport direction opposite to the first side. The movable linear conveyor stops at the first position and transfers the conveyor platform between itself and the first fixed linear conveyor. The movable linear conveyor stops at the second position and transfers the conveyor platform between itself and the second fixed linear conveyor. The conveyor moving unit has a support mechanism on the other side, which has a gap along the transport direction between the other end of the movable linear conveyor located at the second position (which is the other end) and the second fixed linear conveyor, and supports the movable linear conveyor on the second fixed linear conveyor. The other side support mechanism allows the other end of the movable linear conveyor to be displaced to the other side in the transport direction.

[0015] In the present invention (transport path switching device, transport system, and transport path switching method) configured in this way, a support mechanism is provided on one side that allows the other end of the movable linear conveyor to displace to the other side in the transport direction, in other words, releasing the other end of the movable linear conveyor. Specifically, this support mechanism creates a gap in the transport direction between the other end of the movable linear conveyor in its second position and the second fixed linear conveyor, and supports the movable linear conveyor on the second fixed linear conveyor. Thus, by supporting the movable linear conveyor on the support mechanism of the second fixed linear conveyor, a gap is created between the other end of the movable linear conveyor and the second fixed linear conveyor, thereby reliably forming a gap between them. Therefore, the displacement of the released other end can be absorbed by this gap, preventing contact between the other end of the movable linear conveyor and the second fixed linear conveyor. This prevents contact between the movable linear conveyor and the adjacent fixed linear conveyor due to thermal deformation of the movable linear conveyor, suppressing warping of the movable linear conveyor.

[0016] Furthermore, the transport path switching device can also be configured as follows: the other side support mechanism has a movable component mounted on the movable linear conveyor, a guide portion mounted on the second fixed linear conveyor, a guided component guided by the guide portion in the switching direction, and a other side support portion supporting the movable component on the guided component. This other side support portion allows the movable component to move to the other side relative to the guided component in the transport direction and constrains the movable component relative to the guided component in the switching direction. In this configuration, the movable component is mounted on the movable linear conveyor and supported by the other side support portion on the guided component guided in the switching direction. This other side support portion constrains the movable component relative to the guided component in the switching direction; therefore, when the guided component is guided in the switching direction, the movable component moves with the guided component, and the movable linear conveyor moves with the movable component. In this way, the movable linear conveyor can be appropriately guided in the switching direction. Furthermore, the other side support allows the movable component to move to the other side relative to the guided component in the transport direction. Therefore, the movable component can move to the other side due to thermal deformation of the movable linear conveyor without hindering the displacement of the other end of the movable linear conveyor. As a result, both guiding the movable linear conveyor along the switching direction and suppressing warping of the movable linear conveyor can be achieved.

[0017] Furthermore, the transport path switching device can also be configured as follows: the other side support has: a shaft, mounted on one of the movable part and the guided part and extending along the transport direction; and a sliding bearing, mounted on another part of the movable part and the guided part, different from one of the parts, and open along the transport direction, the shaft being embedded in the sliding bearing and sliding relative to the sliding bearing along the transport direction. With this structure, both guiding the movable linear conveyor along the switching direction and suppressing warping of the movable linear conveyor can be achieved using a simple structure.

[0018] Furthermore, the conveying path switching device can also be configured as follows: the other side support mechanism has a limiting member disposed on the other side of the movable member. Due to the displacement of the other end to the other side caused by the thermal deformation of the movable linear conveyor, the movable member displaces to the other side and collides with the limiting member, thereby limiting the displacement of the movable member to the other side. In this state, a gap exists between the other end of the movable linear conveyor and the second fixed linear conveyor. With this structure, in cases of large thermal deformation, the displacement of the other end of the movable linear conveyor can be suppressed by the limiting member, preventing contact between the other end of the movable linear conveyor and the second fixed linear conveyor.

[0019] Furthermore, the transport path switching device can also be configured as follows: the conveyor moving unit has a side support mechanism, which creates a gap along the transport direction between one end of the movable linear conveyor (located in the first position) and the first fixed linear conveyor, and supports the movable linear conveyor on the first fixed linear conveyor. The side support mechanism allows one end of the movable linear conveyor to be displaced to one side in the transport direction. In this configuration, a side support mechanism is provided that allows one end of the movable linear conveyor to be displaced to one side in the transport direction, in other words, releasing one end of the movable linear conveyor. In particular, this side support mechanism creates a gap along the transport direction between one end of the movable linear conveyor (located in the first position) and the first fixed linear conveyor, and supports the movable linear conveyor on the first fixed linear conveyor. Thus, by creating a gap between one end of the movable linear conveyor and the first fixed linear conveyor through a side support mechanism that supports the movable linear conveyor on the first fixed linear conveyor, a gap can be reliably formed between them. Therefore, this interval can absorb the displacement at one end, preventing one end of the movable linear conveyor from contacting the first fixed linear conveyor. This avoids contact between the movable linear conveyor and the adjacent fixed linear conveyor due to thermal deformation of the movable linear conveyor, suppressing warping of the movable linear conveyor.

[0020] Furthermore, the transport path switching device can also be configured as follows: a side support mechanism includes a single-axis robot mounted on a first fixed linear conveyor, a driven component driven by the single-axis robot in the switching direction, and a side support portion supporting the movable linear conveyor on the driven component. The side support portion allows the movable linear conveyor to move to one side relative to the driven component in the transport direction and constrains the movable linear conveyor relative to the driven component in the switching direction. In this configuration, the movable linear conveyor is supported by the side support portion on the driven component driven by the single-axis robot in the switching direction. This side support portion constrains the movable linear conveyor relative to the driven component in the switching direction, so when the driven component is driven in the switching direction, the movable linear conveyor moves along with the driven component. Thus, the movable linear conveyor can be appropriately driven in the switching direction. Furthermore, the side support portion allows the movable linear conveyor to move to one side relative to the driven component in the transport direction, so the movable linear conveyor can move to one side due to thermal deformation without hindering the displacement of one end of the movable linear conveyor. As a result, it is possible to achieve both the driving of the movable linear conveyor along the switching direction and the suppression of warping of the movable linear conveyor.

[0021] Furthermore, the transport path switching device can also be configured such that one side support is a sliding guide arranged along the transport direction. With this structure, both guiding the movable linear conveyor along the switching direction and suppressing warping of the movable linear conveyor can be achieved using a simple structure.

[0022] Furthermore, the transport path switching device can also be configured such that one side support mechanism has a fixing component, which is fixed to the drive component and the movable linear conveyor at a position between the one side support and the other side support mechanism in the transport direction. In this structure, the deformation of the movable linear conveyor is dispersed to both sides of the position where it is fixed by the fixing component. Therefore, the displacement at both ends of the movable linear conveyor can be balanced, and the two gaps between the movable linear conveyor and the fixed linear conveyors located at both ends can be effectively utilized, effectively preventing contact between the ends of the movable linear conveyor and the fixed linear conveyors.

[0023] Furthermore, the transport path switching device can also be configured as follows: the conveyor moving unit has a side support mechanism, which creates a gap along the transport direction between one end of the movable linear conveyor (located in the first position) and the first fixed linear conveyor, and supports the movable linear conveyor on the first fixed linear conveyor. The side support mechanism constrains the movable linear conveyor in the transport direction. With this structure, contact between one end of the movable linear conveyor and the fixed linear conveyor can be reliably avoided.

[0024] Furthermore, the transport path switching device can also be configured as follows: the other side support mechanism includes a single-axis robot mounted on the second fixed linear conveyor, a driven component driven by the single-axis robot in the switching direction, and a support portion on the other side supporting the movable linear conveyor on the driven component. This other side support portion allows the movable linear conveyor to move to the other side relative to the driven component in the transport direction and constrains the movable linear conveyor relative to the driven component in the switching direction. In this configuration, the movable linear conveyor is supported by the driven component driven by the single-axis robot in the switching direction via the other side support portion. This other side support portion constrains the movable linear conveyor relative to the driven component in the switching direction, so that when the driven component is driven in the switching direction, the movable linear conveyor moves along with the driven component. Thus, the movable linear conveyor can be appropriately driven in the switching direction. Furthermore, the other side support allows the movable linear conveyor to move to the other side relative to the driven component in the transport direction. Therefore, the movable linear conveyor can move to the other side due to thermal deformation without hindering the displacement of the other end of the movable linear conveyor. As a result, both the driving of the movable linear conveyor along the switching direction and the suppression of warping of the movable linear conveyor can be achieved.

[0025] Invention Effects

[0026] According to the present invention, contact between the movable linear conveyor and the fixed linear conveyor adjacent to it, caused by thermal deformation of the movable linear conveyor, can be avoided, thereby suppressing the warping of the movable linear conveyor. Attached Figure Description

[0027] Figure 1A It is a top view schematically showing the structure and operation of the invention's conveying system.

[0028] Figure 1B It is a top view schematically showing the structure and operation of the invention's conveying system.

[0029] Figure 1C It is a top view schematically showing the structure and operation of the invention's conveying system.

[0030] Figure 1D It is a top view schematically showing the structure and operation of the invention's conveying system.

[0031] Figure 1E It is a top view schematically showing the structure and operation of the invention's conveying system.

[0032] Figure 2 It is shown Figures 1A-1E The diagram shows the electrical structure of the substrate handling system.

[0033] Figure 3 This is a front view schematically showing a first example of a branch handling device included in a substrate handling system.

[0034] Figure 4 This is a schematic side view of a support mechanism that supports a movable linear conveyor using a single-axis robot.

[0035] Figure 5 This is a schematic side view of a support mechanism that supports a movable linear conveyor via sliding guides.

[0036] Figure 6 It is shown schematically. Figure 5 A partially enlarged cross-sectional view showing the function of the support mechanism.

[0037] Figure 7 This is a front view schematically showing a second example of a branch handling device included in a substrate handling system.

[0038] Figure 8 This is a front view schematically showing a third example of a branch handling device included in a substrate handling system.

[0039] Figure 9This is a flowchart illustrating an example of transfer control in a branch handling device equipped with two single-axis robots.

[0040] Figure 10 This is a front view schematically showing a fourth example of a branch handling device included in a substrate handling system.

[0041] Figure 11 It is shown schematically. Figure 10 A side view of an example of a linkage mechanism in a branch conveying device.

[0042] Figure 12 This is a front view schematically showing a fifth example of a branch handling device included in a substrate handling system. Detailed Implementation

[0043] Figures 1A-1E This is a top view schematically illustrating the structure and operation of the conveying system of the present invention. Figure 2 It is shown Figures 1A-1E The diagram shows a block diagram of the electrical structure of the substrate handling system. In the figures of this specification, the X direction (horizontal), the Y direction (orthogonal to the X direction, also horizontal), and the Z direction (vertical) are shown as appropriate. Also shown as appropriate are the X1 sides (facing opposite directions in the X direction). Figures 1A-1E (left side of the paper) and Xr side ( Figures 1A-1E (Right side of the paper).

[0044] like Figures 1A-1E As shown, the conveying system 1 comprises two mounting bases 11 and four fixed linear conveyors 2. It should be noted that, when distinguishing between the two mounting bases 11, they are appropriately referred to as mounting bases 11l and 11r; and when distinguishing between the four fixed linear conveyors 2, they are appropriately referred to as fixed linear conveyors 2a, 2b, 2c, and 2d. Furthermore, in... Figure 2 In the diagram, one fixed linear conveyor 2 is shown to represent four fixed linear conveyors 2.

[0045] Two mounting bases 11l and 11r are arranged at a distance 12 in the X direction, and in top view, they are rectangles formed by two sides parallel to the X direction and two sides parallel to the Y direction. Two of the four fixed linear conveyors 2, 2a and 2d, are arranged on the upper surface 111 of the mounting base 11l on the Xl side, and two fixed linear conveyors 2b and 2c are arranged on the upper surface 111 of the mounting base 11r on the Xr side. The upper surface 111 of each mounting base 11l and 11r is a horizontal plane orthogonal to the Z direction.

[0046] All four fixed linear conveyors 2 are arranged parallel to the X-direction. Specifically, two fixed linear conveyors 2a and 2d on mounting base 11l are arranged side-by-side with each other in the X-direction, and two fixed linear conveyors 2b and 2c on mounting base 11r are arranged side-by-side with each other in the X-direction. Furthermore, fixed linear conveyors 2a on mounting base 11l and 2c on mounting base 11r are arranged in a straight line in the X-direction, and fixed linear conveyors 2d on mounting base 11l and 2b on mounting base 11r are arranged in a straight line in the X-direction. Moreover, the conveying system 1 is capable of transporting the tabletop conveyor T between these fixed linear conveyors 2a, 2b, 2c, and 2d.

[0047] The fixed linear conveyor 2 includes a linear housing 21 extending along the X direction. Viewed from above, the linear housing 21 is rectangular, consisting of two sides parallel to the X direction and two sides parallel to the Y direction. The linear housing 21 has flanges 23 protruding to both sides in the Y direction. These flanges 23 are fastened to the upper surface 111 of the mounting base 11 by screws, thereby fixing the fixed linear conveyor 2 to the upper surface 111 of the mounting base 11. Furthermore, the Xl-side end face 21l and the Xr-side end face 21r of the linear housing 21 are vertically aligned perpendicular to the X direction.

[0048] The tabletop conveyor T can engage and disengage from the linear housing 21 in the X direction. Specifically, the tabletop conveyor T can engage with the upper part of the linear housing 21 by entering from the Xl side end face 21l, and engage with the upper part of the linear housing 21 by entering from the Xr side end face 21r. The tabletop conveyor T, thus engaged with the linear housing 21, is guided by the linear housing 21 in the X direction. Furthermore, the tabletop conveyor T, engaged with the linear housing 21, disengages from the upper part of the linear housing 21 by withdrawing from the end face 21l towards the Xl side, and disengages from the upper part of the linear housing 21 by withdrawing from the end face 21r towards the Xr side.

[0049] Furthermore, the fixed linear conveyor 2 has a linear motor stator 25 and a linear scale 27 disposed within the linear housing 21. Figure 2 The linear motor stator 25 has coils that generate a magnetic field corresponding to the applied current. In contrast, the pedestal conveyor T has a permanent magnet as a movable element. The linear motor stator 25 drives the pedestal conveyor T in the X direction by the magnetic force generated between the stator 25 and the movable element of the pedestal conveyor T, which is engaged with the linear housing 21. Furthermore, a linear scale 27 detects the position (X coordinate) of the pedestal conveyor T in the X direction.

[0050] The movable linear conveyor 3, viewed from above, is positioned at a distance 12 between mounting bases 11l and 11r in the X direction. The movable linear conveyor 3 includes a linear housing 31 extending along the X direction, which, viewed from above, is a rectangle formed by two sides parallel to the X direction and two sides parallel to the Y direction. The linear housing 31 has flanges 33 protruding to both sides in the Y direction. Furthermore, the Xl-side end face 31l and the Xr-side end face 31r of the linear housing 31 are vertically aligned perpendicular to the X direction.

[0051] The tabletop conveyor T can engage and disengage from the linear housing 31 in the X direction. Specifically, the tabletop conveyor T can engage with the upper part of the linear housing 31 by entering from the Xl side towards the end face 31l, and can also engage with the upper part of the linear housing 31 by entering from the Xr side towards the end face 31r. The tabletop conveyor T, thus engaged with the linear housing 31, is guided by the linear housing 31 in the X direction. Furthermore, the tabletop conveyor T, engaged with the linear housing 31, disengages from the upper part of the linear housing 31 by withdrawing from the end face 31l towards the Xl side, and disengages from the upper part of the linear housing 31 by withdrawing from the end face 31r towards the Xr side.

[0052] Furthermore, the movable linear conveyor 3 has a linear motor stator 35 and a linear scale 37 disposed within the linear housing 31. Figure 2 The linear motor stator 35 has coils that generate a magnetic field corresponding to the applied current. The linear motor stator 35 drives the pedestal conveyor T in the X direction by magnetic force generated between the stator and a movable element of the pedestal conveyor T engaged with the linear housing 31. Furthermore, a linear scale 37 detects the position (X coordinate) of the pedestal conveyor T in the X direction.

[0053] Within the interval 12 where the movable linear conveyor 3 is configured, the movable range Ym of the movable linear conveyor 3 extends parallel to the Y direction. The conveying system 1 includes a conveyor moving unit 4 provided within the movable range Ym, which moves the movable linear conveyor 3 within the movable range Ym along the Y direction. The conveyor moving unit 4 has a support mechanism 41 disposed on the Xl side of the movable range Ym and a support mechanism 43 disposed on the Xr side of the movable range Ym.

[0054] The support mechanism 41 includes a single-axis robot 51 arranged parallel to the Y direction. The single-axis robot 51 has a robot body 52 extending along the Y direction. The robot body 52 has a robot housing 521 extending along the Y direction and a ball screw 523 arranged parallel to the Y direction within the robot housing 521. The robot housing 521 is fixed to the upper surface 111 of the mounting base 111 via a fixing plate 13. Specifically, the fixing plate 13 is arranged from the top, spanning the upper surface 111 of the mounting base 11 and the upper surface 521t of the robot housing 521 of the single-axis robot 51 in the X direction. Furthermore, the Xl-side end of the fixing plate 13 is fastened and fixed to the upper surface 111 of the mounting base 11 using screws (fastening members), and the Xr-side end of the fixing plate 13 is fastened and fixed to the upper surface 521t of the robot housing 521 of the single-axis robot 51 using screws (fastening members). Specifically, each fixing plate 13 is configured relative to the fixed linear conveyors 2a and 2d such that a pair of fixing plates 13 clamp the fixed linear conveyor 2 from the Y direction. Furthermore, the robot housing 521 is fixed to the fixed linear conveyors 2a and 2d respectively, as described later. Additionally, the single-axis robot 51 has a drive motor 531 mounted in the Y direction at one end of the robot body 52 and an encoder 532 for detecting the rotational position of the drive motor 531. Figure 2 The drive motor 531 is connected to the ball screw 523. The nut of the ball screw 523 of the single-axis robot 51 is connected to the end of the movable linear conveyor 3 on the X1 side. When the drive motor 531 rotates the screw shaft of the ball screw 523, the movable linear conveyor 3 moves in the Y direction.

[0055] Furthermore, the support mechanism 43 has a Y-axis conveyor guide 71 extending parallel to the Y direction. The Y-axis conveyor guide 71 is fixed to the upper surface 111 of the mounting base 11r via a fixing plate 13. Specifically, the fixing plate 13 is arranged from the top, spanning the upper surface 111 of the mounting base 11r and the upper surface 722t of the Y-axis conveyor guide 71 in the X direction. The Xr-side end of the fixing plate 13 is fastened and fixed to the upper surface 111 of the mounting base 11 using screws (fastening members), and the Xl-side end of the fixing plate 13 is fastened and fixed to the upper surface 722t of the Y-axis conveyor guide 71 using screws (fastening members). In particular, each fixing plate 13 is arranged relative to the fixed linear conveyors 2b and 2c in such a way that a pair of fixing plates 13 sandwich the fixed linear conveyors 2 in the Y direction. Moreover, the Y-axis conveyor guide 71 is fixed to the fixed linear conveyors 2b and 2c respectively, as described later. Y-axis conveyor guide 71 is connected to the Xr side end of movable linear conveyor 3, guiding movable linear conveyor 3, which moves by the driving force of drive motor 531, along the Y direction.

[0056] Furthermore, the handling system 1 has a control unit 100 that controls four fixed linear conveyors 2, movable linear conveyors 3, and a single-axis robot 51. Figure 2 The control unit 100 is composed of a processor such as a CPU (Central Processing Unit) or an FPGA (Field Programmable Gate Array). The control unit 100 adjusts the current applied to the stator 25 of the linear motor based on the position of the platform conveyor T detected by the linear ruler 27, thereby performing feedback control of the position of the platform conveyor T relative to each fixed linear conveyor 2. Furthermore, the control unit 100 adjusts the current applied to the stator 35 of the linear motor based on the position of the platform conveyor T detected by the linear ruler 37, thereby performing feedback control of the position of the platform conveyor T in the X direction relative to the movable linear conveyor 3. Moreover, the control unit 100 adjusts the rotational position of the drive motor 531 based on the rotational position of the drive motor 531 detected by the encoder 532, in other words, the position (Y coordinate) of the movable linear conveyor 3 in the Y direction, thereby performing feedback control of the position of the platform conveyor T in the Y direction relative to the single-axis robot 51.

[0057] In the conveying system 1, the movable linear conveyor 3 is capable of moving along the Y direction within its movable range Ym, and can be located at any of the multiple relative positions Lf1 and Lf2 included within the movable range Ym. Here, the relative positions Lf1 and Lf2 are positions that are different from each other in the Y direction. Relative position Lf1 is opposite to the fixed linear conveyors 2a and 2c in the X direction, and relative position Lf2 is opposite to the fixed linear conveyors 2b and 2d in the X direction. That is, the movable linear conveyor 3 located at relative position Lf1 is opposite to the Xr-side end face 21r of the fixed linear conveyor 2a from the Xr side, and opposite to the Xl-side end face 21l of the fixed linear conveyor 2c from the Xl side. Similarly, the movable linear conveyor 3 located at relative position Lf2 is opposite to the Xr-side end face 21r of the fixed linear conveyor 2d from the Xr side, and opposite to the Xl-side end face 21l of the fixed linear conveyor 2b from the Xl side.

[0058] It should be noted that the movable linear conveyor 3 is supported on the fixed linear conveyor 2a by a support mechanism 41 with a gap between the end face 31l of the movable linear conveyor 3 located at the relative position Lf1 and the end face 21r of the fixed linear conveyor 2a. Similarly, the movable linear conveyor 3 is supported on the fixed linear conveyor 2c by a support mechanism 43 with a gap between the end face 31r of the movable linear conveyor 3 located at the relative position Lf1 and the end face 21l of the fixed linear conveyor 2c. Likewise, the movable linear conveyor 3 is supported on the fixed linear conveyor 2d by a support mechanism 41 with a gap between the end face 31l of the movable linear conveyor 3 located at the relative position Lf2 and the end face 21r of the fixed linear conveyor 2d. Furthermore, the movable linear conveyor 3 is supported on the fixed linear conveyor 2b by the support mechanism 43 in such a way that there is a gap between the end face 31r of the movable linear conveyor 3 located at the relative position Lf2 and the end face 21l of the fixed linear conveyor 2b.

[0059] Therefore, the control unit 100 controls the single-axis robot 51 to position the movable linear conveyor 3 at a relative position Lf1, and controls both the fixed linear conveyor 2a and the movable linear conveyor 3, thereby enabling the transfer of the tabletop conveyor T between the fixed linear conveyor 2a and the movable linear conveyor 3. Furthermore, the control unit 100 controls the single-axis robot 51 to position the movable linear conveyor 3 at a relative position Lf1, and controls both the fixed linear conveyor 2c and the movable linear conveyor 3, thereby enabling the transfer of the tabletop conveyor T between the fixed linear conveyor 2c and the movable linear conveyor 3.

[0060] Alternatively, the control unit 100 controls the single-axis robot 51 to position the movable linear conveyor 3 at a relative position Lf2, and controls both the fixed linear conveyor 2d and the movable linear conveyor 3, thereby enabling the transfer of the tabletop conveyor T between the fixed linear conveyor 2d and the movable linear conveyor 3. Furthermore, the control unit 100 controls the single-axis robot 51 to position the movable linear conveyor 3 at a relative position Lf2, and controls both the fixed linear conveyor 2b and the movable linear conveyor 3, thereby enabling the transfer of the tabletop conveyor T between the fixed linear conveyor 2b and the movable linear conveyor 3.

[0061] Here, the transfer of the platform conveyor T between the fixed linear conveyor 2 and the movable linear conveyor 3 includes two actions: the movement of the platform conveyor T from the fixed linear conveyor 2 to the movable linear conveyor 3 and the movement of the platform conveyor T from the movable linear conveyor 3 to the fixed linear conveyor 2.

[0062] This control unit 100 can move the tabletop conveyor T in various ways, especially performing branch conveying as follows. For example, in Figure 1A In the first system, the platform conveyor T engages with the fixed linear conveyor 2a. In contrast, in the transport system 1, two fixed linear conveyors 2b and 2c are arranged side-by-side on the Xr side of the fixed linear conveyor 2a with the platform conveyor T engaged. Therefore, when transporting the platform conveyor T from the fixed linear conveyor 2a to the Xr side, both fixed linear conveyors 2b and 2c can be used as transport destinations. That is, the transport path can branch off from any of these fixed linear conveyors 2b and 2c and transport the platform conveyor T (branch transport). It should be noted that this branch transport can be performed between fixed linear conveyor 2b (transport origin) and fixed linear conveyors 2a and 2d (transport destinations), between fixed linear conveyor 2c (transport origin) and fixed linear conveyors 2a and 2d (transport destinations), and between fixed linear conveyor 2d (transport origin) and fixed linear conveyors 2b and 2c (transport destinations).

[0063] Here, use Figures 1A-1E This illustrates an example of branching transport of a tabletop conveyor T from a fixed linear conveyor 2a to a fixed linear conveyor 2b. Figure 1A In the middle, the movable linear conveyor 3 stops at a relative position Lf1 opposite to the fixed linear conveyor 2a, which is engaged with the tabletop conveyor T. Figures 1A-1B In the process, the tabletop conveyor T is transferred from the fixed linear conveyor 2a to the movable linear conveyor 3. After the transfer from the tabletop conveyor T to the movable linear conveyor 3 is completed, the movable linear conveyor 3 moves from the relative position Lf1 towards the relative position Lf2 along the Y direction. Figure 1C When the movable linear conveyor 3 reaches the relative position Lf2 opposite to the fixed linear conveyor 2b, it stops at that relative position Lf2. Figure 1D Then, in Figures 1D-1E In the process, the tabletop conveyor T is transferred from the movable linear conveyor 3 to the fixed linear conveyor 2b.

[0064] Figure 3 This is a front view schematically illustrating a first example of a branch conveying device included in a substrate handling system. This branch conveying device A includes the aforementioned movable linear conveyor 3 and conveyor moving unit 4. Figure 3The diagram shows a substrate 19 placed on the mounting surface of the conveying system 1, a mounting base 11 placed on the substrate 19, a fixed linear conveyor 2 mounted on the mounting base 11, and a branch conveying device A. The conveyor moving unit 4 of the branch conveying device A, as described above, has a support mechanism 41 and a support mechanism 43. The support mechanism 41 moves the movable linear conveyor 3 along the Y-direction via a single-axis robot 51, and the support mechanism 43 guides the movable linear conveyor 3 along the Y-direction via a Y-axis conveyor guide 71.

[0065] Figure 4 This is a schematic side view of a support mechanism that supports a movable linear conveyor using a single-axis robot. Figure 4 The support mechanism 41 shown has a single-axis robot 51 arranged parallel to the Y direction. The single-axis robot 51 has a robot body 52 extending along the Y direction and a drive motor 531 mounted at one end of the robot body 52 in the Y direction. The robot body 52 has a robot housing 521, a ball screw 523 housed in the robot housing 521, and a slider 525 arranged on the Xr side of the robot housing 521. Figure 3 The ball screw 523 has a screw shaft 523a extending parallel to the Y direction and a nut 523b screwed to the screw shaft 523a. A drive motor 531 is connected to the screw shaft 523a, and a slider 525 is connected to the nut 523b via a connecting member (not shown). Therefore, when the drive motor 531 rotates the screw shaft 523a, the nut 523b moves in the Y direction, and the slider 525 moves in the Y direction along with the nut 523b. In this way, the single-axis robot 51 transmits the driving force of the drive motor 531 to the slider 525 through the ball screw 523, thereby guiding the slider 525 along the Y direction (the direction in which the ball screw 523 extends) and applying the driving force of the drive motor 531 to the slider 525. Thus, the slider 525 moves in the Y direction.

[0066] The upper surface 521t of the robot housing 521 abuts against the bottom surface 23b of the flange 23 of the fixed linear conveyor 2 from below. The contact between the upper surface 521t and the bottom surface 23b positions the robot housing 521 on the fixed linear conveyor 2. In particular, as... Figure 3 As shown, the Xr-side end 22r of the fixed linear conveyor 2 on the Xl side protrudes from the mounting base 11 for mounting the fixed linear conveyor 2 towards the Xr side. In contrast, the robot housing 521 of the single-axis robot 51 faces the end 22r of the fixed linear conveyor 2 from below, overlapping it in a top view. Furthermore, at the end 22r of the fixed linear conveyor 2, the flange 23 of the fixed linear conveyor 2 and the upper surface 521t of the robot housing 521 are fastened and fixed by screws S (fastening components).

[0067] It should be noted that, as Figure 4 As shown, in the Y direction, the robot housing 521 of the single-axis robot 51 is longer than the movable range Ym, including the movable range Ym. Two fixed linear conveyors 2a and 2d are located between the two ends of the robot housing 521. Furthermore, the upper surface 521t of the robot housing 521 is fastened and fixed to the flanges 23 of the two fixed linear conveyors 2a and 2d by screws S.

[0068] Furthermore, the support mechanism 41 has a conveyor support member 61 disposed on the Xr side of the sliding member 525. The conveyor support member 61 has an upright mounting plate 611 erected vertically in the Z direction orthogonal to the X direction, a horizontal plate 612 horizontally disposed at the upper end of the upright mounting plate 611, and a support 613 disposed between the upright mounting plate 611 and the horizontal plate 612. The upright mounting plate 611 abuts against the sliding member 525 from the Xr side and is fastened and fixed to the sliding member 525 by screws S.

[0069] The upper surface 612t of the horizontal plate 612 abuts against the bottom surface 33b of the flange 33 of the movable linear conveyor 3 from below. The abutment between the upper surface 612t and the bottom surface 33b positions the conveyor support member 61 on the movable linear conveyor 3. Furthermore, the flange 33 of the movable linear conveyor 3 and the upper surface 612t of the horizontal plate 612 of the conveyor support member 61 are fastened and fixed by screws S (fastening components).

[0070] Thus, the single-axis robot 51 installed on the fixed linear conveyor 2 supports the conveyor support component 61 installed on the movable linear conveyor 3 in the Z direction. That is, the support mechanism 41, which has the single-axis robot 51 and the conveyor support component 61, functions to support the movable linear conveyor 3 on the fixed linear conveyor 2.

[0071] Furthermore, the single-axis robot 51 installed on the fixed linear conveyor 2 drives and guides the conveyor support component 61 installed on the movable linear conveyor 3 along the Y direction. That is, the support mechanism 41, which has the single-axis robot 51 and the conveyor support component 61, functions to drive the movable linear conveyor 3 along the Y direction relative to the fixed linear conveyor 2 and guide the movement of the movable linear conveyor 3 opposite to the fixed linear conveyor 2 along the Y direction.

[0072] Figure 5 This is a schematic side view of a support mechanism that supports a movable linear conveyor via sliding guides. Figure 6 It is shown schematically. Figure 5 A partially enlarged cross-sectional view showing the function of the support mechanism. Figure 5 as well as Figure 6The support mechanism 43 shown has a Y-axis conveyor guide 71, which has a base frame 72 extending along the Y direction, two sliding guides 73 extending along the Y direction, and support sliding members 74 mounted on these sliding guides 73.

[0073] The base frame 72 has an upright mounting plate 721 erected orthogonally to the X direction along the Z direction and a horizontal plate 722 horizontally positioned at the upper end of the upright mounting plate 721. Each sliding guide 73 is fixed to the X1 side of the upright mounting plate 721. Each sliding guide 73 has a Y-axis guide rail 731 extending parallel to the Y direction, which is fixed to the horizontal plate 722 of the base frame 72. Furthermore, each sliding guide 73 has a sliding member 732 that engages with the Y-axis guide rail 731, and the sliding member 732 moves along the Y-axis guide rail 731 in the Y direction. A supporting sliding member 74 is a flat plate erected orthogonally to the X direction and fixed to the X1 side of the sliding member 732 of each of the two sliding guides 73. The supporting sliding member 74 moves along the two Y-axis guide rails 731 in the Y direction.

[0074] The upper surface 722t of the horizontal plate 722 abuts against the bottom surface 23b of the flange 23 of the fixed linear conveyor 2 from below. Through the contact between the upper surface 722t and the bottom surface 23b, the Y-axis conveyor guide 71 is positioned on the fixed linear conveyor 2. In particular, as... Figure 3 As shown, the Xl-side end 22l of the fixed linear conveyor 2 on the Xr side protrudes from the mounting base 11 for mounting the fixed linear conveyor 2 towards the Xl side. In contrast, the base 72 of the Y-axis conveyor guide 71 faces the end 22l of the fixed linear conveyor 2 from below, overlapping the end 22l in a top view. Furthermore, at the end 22l of the fixed linear conveyor 2, the flange 23 of the fixed linear conveyor 2 and the upper surface 722t of the horizontal plate 722 are fastened and fixed by screws S (fastening components).

[0075] It should be noted that, as Figure 5 As shown, in the Y direction, the Y-axis guide rail 731 is longer than the movable range Ym by including the movable range Ym, and the base frame 72 supporting the Y-axis guide rail 731 is also longer than the movable range Ym by including the movable range Ym. In contrast, two fixed linear conveyors 2b and 2c are located between the two ends of the base frame 72. Furthermore, the upper surface 722t of the horizontal plate 722 of the base frame 72 is fastened and fixed to the flange 23 of each of the two fixed linear conveyors 2b and 2c by screws S.

[0076] Furthermore, the support mechanism 43 has a conveyor support member 81 disposed on the Xl side of the support slider 74. The conveyor support member 81 has an upright mounting plate 811 erected vertically in the Z direction orthogonal to the X direction and a horizontal plate 812 horizontally disposed at the upper end of the upright mounting plate 811. The upright mounting plate 811 is opposite to the support slider 74 from the Xl side, and has a hole 813 extending through in the X direction.

[0077] In particular, the support mechanism 43 has a locking support portion 85 that supports the conveyor support member 81 via a support slider 74. The locking support portion 85 has a shaft 851 protruding from the support slider 74 towards the Xl side parallel to the X direction and a sliding bearing 852 embedded in a hole 813 in the conveyor support member 81. The sliding bearing 852 has an opening 853 extending in the X direction, into which the shaft 851 is inserted. That is, the sliding bearing 852 bears the shaft 851 inserted into the opening 853. Thus, the conveyor support member 81 engages with the shaft 851 protruding from the support slider 74 via the sliding bearing 852. The sliding bearing 852 allows the shaft 851 to move relative to it in the X direction, and on the other hand, constrains the shaft 851 relative to it in the Y and Z directions.

[0078] In other words, shaft 851 allows the conveyor support member 81 to move in the X direction. Therefore, the conveyor support member 81 can move in the X direction relative to the Y-axis conveyor guide 71. Furthermore, shaft 851 constrains the conveyor support member 81 in the Y direction. Therefore, the conveyor support member 81 is guided in the Y direction by a support slider 74 that moves along the Y-axis guide rail 731. Moreover, shaft 851 constrains the conveyor support member 81 in the Z direction. Therefore, the conveyor support member 81 overcomes gravity in the Z direction and is supported by the Y-axis conveyor guide 71.

[0079] It should be noted that in this example, a shaft 851 is provided on the supporting slider 74, and a sliding bearing 852 is provided on the vertical mounting plate 811. However, the same function can be achieved by providing a sliding bearing 852 on the supporting slider 74 and a shaft 851 on the vertical mounting plate 811.

[0080] The upper surface 812t of the horizontal plate 812 of the conveyor support component 81 abuts against the bottom surface 33b of the flange 33 of the movable linear conveyor 3 from below. The abutment between the upper surface 812t and the bottom surface 33b positions the conveyor support component 81 on the movable linear conveyor 3. Furthermore, the flange 33 of the movable linear conveyor 3 and the upper surface 812t of the horizontal plate 812 of the conveyor support component 81 are fastened and fixed by screws S (fastening components).

[0081] Thus, the Y-axis conveyor guide 71 installed on the fixed linear conveyor 2 supports the conveyor support member 81 installed on the movable linear conveyor 3 in the Z direction. That is, the support mechanism 43, which has the Y-axis conveyor guide 71 and the conveyor support member 81, functions to support the movable linear conveyor 3 on the fixed linear conveyor 2.

[0082] Furthermore, the Y-axis conveyor guide 71 installed on the fixed linear conveyor 2 guides the conveyor support member 81 installed on the movable linear conveyor 3 along the Y direction. That is, the support mechanism 43, which has the Y-axis conveyor guide 71 and the conveyor support member 81, functions to guide the movement of the movable linear conveyor 3, which is opposite to the fixed linear conveyor 2, along the Y direction.

[0083] Thus, the branch conveying device A includes a support mechanism 41 that supports the Xl-side end 32l of the movable linear conveyor 3 to the Xr-side end 22r of the fixed linear conveyor 2, and a support mechanism 43 that supports the Xr-side end 32r of the movable linear conveyor 3 to the Xl-side end 22l of the fixed linear conveyor 2. Figure 4 as well as Figure 5 To illustrate the operation of the branch conveying device A along the Y direction. For example... Figure 4 As shown, when the drive motor 531 drives the screw shaft 523a of the ball screw 523, the sliding member 525 is fixed. Figure 3 The conveyor support member 61 moves along the Y direction, and the movable linear conveyor 3 fixed to the conveyor support member 61 moves along the Y direction. Furthermore, as... Figure 5 As shown, the movement of the movable linear conveyor 3 is guided along the Y direction by the Y-axis guide rail 731 of the Y-axis conveyor guide 71. Thus, the movable linear conveyor 3 is driven and guided along the Y direction by the single-axis robot 51 and guided along the Y direction by the Y-axis guide rail 731, thereby enabling it to move along the Y direction within a movable range Ym including relative positions Lf1 and Lf2.

[0084] And, as Figure 6As shown, the support mechanism 43 on the Xr side of the branch conveying device A functions to absorb the elongation of the movable linear conveyor 3 along the X direction, which is associated with heat generation. Specifically, the support mechanism 43 creates a gap Da between the end face 21l of the fixed linear conveyor 2 and the end face 31r of the movable linear conveyor 3, and supports the movable linear conveyor 3 against the fixed linear conveyor 2. Furthermore, the Y-axis conveyor guide 71 mounted on the fixed linear conveyor 2 and the conveyor support member 81 mounted on the movable linear conveyor 3 are separated in the X direction corresponding to the gap Da. Therefore, a gap Da is provided in the X direction between the horizontal plates 722 and 812 that are opposite each other in the X direction, and a gap Db is provided in the X direction between the support sliding member 74 and the vertical mounting plate 811 that are opposite each other in the X direction.

[0085] When the linear housing 31 of the movable linear conveyor 3 elongates in the X direction, for example, due to heat released from the linear motor stator 25 by the current applied to it, the end face 31r of the movable linear conveyor 3 displaces towards the Xr side in the X direction. Furthermore, accompanying the elongation of the movable linear conveyor 3, the conveyor support member 81 also displaces towards the Xr side in the X direction. Figure 6 A comparison of the "permissible state" and "restricted state" columns reveals that the intervals Da and Db narrow as the movable linear conveyor 3 undergoes thermal deformation. In other words, the thermal deformation of the movable linear conveyor 3 is absorbed by the interval Da, thereby preventing contact between the movable linear conveyor 3 and the fixed linear conveyor 2.

[0086] Furthermore, the support mechanism 43 has a limiting plate 87, which is disposed in the X direction between the Y-axis conveyor guide 71 and the conveyor support member 81. The limiting plate 87 has a ring shape and is inserted into the shaft 851 from the outside. That is, the limiting plate 87 is supported by the shaft 851 by engaging with it. The limiting plate 87 can be fixed to the support slider 74 or the vertically mounted plate 811, or it can be left unfixed. Moreover, when the limiting plate 87 is fixed to either one, it is not necessary for the limiting plate 87 to engage with the shaft 851, nor is it necessary for the limiting plate 87 to have a ring shape.

[0087] The limiting plate 87 is disposed at a distance Db between the supporting slider 74 and the upright mounting plate 811, and has a predetermined thickness in the X direction. Therefore, when the displacement of the end face 31r of the movable linear conveyor 3 towards the Xr side increases and the upright mounting plate 811 approaches the supporting slider 74, the upright mounting plate 811 contacts the limiting plate 87 from the Xl side, and the supporting slider 74 contacts the limiting plate 87 from the Xr side. That is, the upright mounting plate 811 collides from the Xl side with the limiting plate 87 supported on the supporting slider 74 from the Xr side. Thus, as Figure 6As shown in the "Restricted State" column, the displacement of the conveyor support member 81 towards the Xr side is restricted. In this restricted state, a gap Da is ensured between the end face 31r of the movable linear conveyor 3 and the end face 21l of the fixed linear conveyor 2. That is, the restrictor plate 87 prevents the end face 31r of the movable linear conveyor 3 from contacting the end face 21l of the fixed linear conveyor 2 by restricting the displacement towards the Xr side of the end face 31r of the movable linear conveyor 3 by a predetermined amount or more.

[0088] In the first example described above, a support mechanism 43 (another-side support mechanism) is provided that allows the end face 31r (the other end) of the movable linear conveyor 3 to move in the X direction (transport direction) towards the Xr side (the other side), in other words, releasing the end face 31r of the movable linear conveyor 3. In particular, this support mechanism 43 leaves a gap Da in the X direction between the end face 31r of the movable linear conveyor 3 at a relative position Lf1 (first position) or a relative position Lf2 (second position) and the end face 21l of the fixed linear conveyor 2, and supports the end 32r of the movable linear conveyor 3 on the end 22l of the fixed linear conveyor 2. Thus, by providing a gap Da between the end face 31r of the movable linear conveyor 3 and the end face 21l of the fixed linear conveyor 2 through the support mechanism 43 supporting the movable linear conveyor 3 on the fixed linear conveyor 2, a gap Da can be reliably formed between them. Therefore, the displacement of the released end face 31r can be absorbed by the interval Da, preventing contact between the end face 31r of the movable linear conveyor 3 and the end face 21l of the fixed linear conveyor 2. In this way, contact between the movable linear conveyor 3 and the adjacent fixed linear conveyor 2, caused by thermal deformation of the movable linear conveyor 3, can be avoided, suppressing the occurrence of warping of the movable linear conveyor 3.

[0089] Furthermore, the support mechanism 43 includes a conveyor support member 81 (movable member) mounted on the movable linear conveyor 3, a sliding guide 73 (guide portion) mounted on the fixed linear conveyor 2, and a support sliding member 74 (guided member) guided by the sliding guide 73 in the Y direction (switching direction). The support mechanism 43 also includes a locking support portion 85 (other side support portion) that supports the conveyor support member 81 against the support sliding member 74. The locking support portion 85 allows the conveyor support member 81 to move relative to the support sliding member 74 towards the Xr side in the X direction, and constrains the conveyor support member 81 relative to the support sliding member 74 in the Y direction. In this configuration, the conveyor support member 81 is mounted on the movable linear conveyor 3 and is supported by the locking support portion 85 against the support sliding member 74 guided in the Y direction. The engaging support 85 constrains the conveyor support member 81 relative to the support slider 74 in the Y direction. Therefore, when the support slider 74 is guided in the Y direction, the conveyor support member 81 moves with the support slider 74, and the movable linear conveyor 3 moves with the conveyor support member 81. In this way, the movable linear conveyor 3 can be properly guided in the Y direction. Furthermore, the engaging support 85 allows the conveyor support member 81 to move towards the Xr side relative to the support slider 74 in the X direction. Therefore, the conveyor support member 81 can move towards the Xr side due to thermal deformation of the movable linear conveyor 3 without hindering the displacement of the end face 31r of the movable linear conveyor 3. As a result, both the guidance of the movable linear conveyor 3 in the Y direction and the suppression of warping of the movable linear conveyor 3 can be achieved.

[0090] Furthermore, the engaging support portion 85 has a shaft 851 that is mounted on one of the conveyor support member 81 and the support slider 74 and extends in the X direction, and a sliding bearing 852 that is mounted on another component different from the one in the conveyor support member 81 and the support slider 74 and opens in the X direction. The shaft 851 is embedded in the sliding bearing 852 and slides relative to the sliding bearing 852 in the X direction. With this structure, both guiding the movable linear conveyor 3 in the Y direction and suppressing warping of the movable linear conveyor 3 can be achieved using a simple structure.

[0091] Furthermore, the support mechanism 43 has a limiting plate 87 (limiting member) provided on the Xr side of the conveyor support member 81. Due to the displacement of the end face 31r towards the Xr side caused by the thermal deformation of the movable linear conveyor 3, the conveyor support member 81 displaces towards the Xr side and comes into contact with the limiting plate 87, thereby limiting the displacement of the conveyor support member 81 towards the Xr side by the limiting plate 87. Thus, with the displacement of the conveyor support member 81 towards the Xr side limited by the limiting plate 87, there is a gap Da between the end face 31r of the movable linear conveyor 3 and the end face 21l of the fixed linear conveyor 2. With this structure, in the case of large thermal deformation, the displacement of the end face 31r of the movable linear conveyor 3 can be suppressed by the limiting plate 87, preventing contact between the end face 31r of the movable linear conveyor 3 and the end face 21l of the fixed linear conveyor 2.

[0092] Furthermore, the support mechanism 41 of the conveyor moving unit 4 has an X-direction gap between the end face 31l of the movable linear conveyor 3 on the Xl side (one side) and the end face 21r of the fixed linear conveyor 2 located at the relative position Lf1 (first position) or the relative position Lf2 (second position), and supports the movable linear conveyor 3 on the fixed linear conveyor 2. This support mechanism 41 differs from the support mechanism 43 in that it constrains the movable linear conveyor 3 in the X direction. In this structure, the constraint of the support mechanism 41 suppresses the displacement of the end face 31l of the movable linear conveyor 3 towards the Xl side, thus reliably preventing contact between the end face 31l of the movable linear conveyor 3 and the end face 21r of the fixed linear conveyor 2.

[0093] Incidentally, the gap between the end face 31l of the movable linear conveyor 3 and the end face 21r of the fixed linear conveyor 2, ensured by the support mechanism 41, does not need to absorb the thermal expansion of the movable linear conveyor 3; it only needs to prevent interference between the end faces 31l and 21r. Therefore, this gap can also be... Figure 6 The interval Da is relatively narrow.

[0094] Figure 7 This is a front view schematically illustrating a second example of a branch conveying device included in a substrate conveying system. Here, it is compared with... Figure 3 The explanation focuses on the differences in the first example, with common parts labeled with corresponding reference numerals and descriptions omitted as appropriate. In this second example, a connection is made between the end face 31l of the movable linear conveyor 3 and the end face 21r of the fixed linear conveyor 2 (2a, 2d). Figure 6 The interval Da is equivalent to the interval Dc used for heat deformation absorption. The support mechanism 41 supports the end 32l of the movable linear conveyor 3 to the end 22r of the fixed linear conveyor 2 (2a, 2d). It should be noted that the intervals Da and Dc do not need to have the same width, and their widths can also be different.

[0095] In particular, the support mechanism 41 has a sliding support portion 63, which supports the movable linear conveyor 3 to the conveyor support member 61 in a manner that allows it to move in the X direction. The sliding support portion 63 is a sliding guide member having a guide rail 631 parallel to the X direction and a sliding member 632 that engages with the guide rail 631, the sliding member 632 being able to move along the guide rail 631 in the X direction. The guide rail 631 is fixed to the upper surface 612t of the horizontal plate 612. The sliding member 632 abuts against the bottom surface 33b of the flange 33 of the movable linear conveyor 3 from below and is fastened and fixed to the flange 33 by screws S. Thus, the X1-side end 32l of the movable linear conveyor 3 is supported to the conveyor support member 61 in a manner that allows it to move in the X direction via the sliding support portion 63. Therefore, in the event of thermal expansion of the movable linear conveyor 3, the end face 31l of the movable linear conveyor 3 can be displaced towards the X1 side within a range of Dc.

[0096] Furthermore, the support mechanism 41 has screws Sa (fastening members) that fasten and fix the flange 33 of the movable linear conveyor 3 to the conveyor support member 61 between the sliding support portion 63 and the conveyor support member 81 in the X direction. With this structure, the thermal expansion of the movable linear conveyor 3 in the X direction can occur dispersedly to both sides of the screws Sa. For thermal expansion occurring on the Xr side of the screws Sa, the support mechanism 43 allows the end face 31r of the movable linear conveyor 3 to displace towards the Xr side within a distance Da to absorb it. Furthermore, for thermal expansion occurring on the Xl side of the screws Sa, the support mechanism 41 allows the end face 31l of the movable linear conveyor 3 to displace towards the Xl side within a distance Dc to absorb it.

[0097] In the second example described above, a support mechanism 41 is provided that allows the end face 31l of the movable linear conveyor 3 to displace in the X direction toward the Xl side, in other words, to release the end face 31l of the movable linear conveyor 3. Specifically, this support mechanism 41 creates a gap Dc in the X direction between the end face 31l of the movable linear conveyor 3 at relative positions Lf1 or Lf2 and the end face 21r of the fixed linear conveyor 2, and supports the end 32l of the movable linear conveyor 3 against the end 22r of the fixed linear conveyor 2. Thus, by providing a gap Dc between the end face 31l of the movable linear conveyor 3 and the end face 21r of the fixed linear conveyor 2 through the support mechanism 41 supporting the movable linear conveyor 3 against the fixed linear conveyor 2, a gap Dc can be reliably formed between them. Therefore, the displacement of the released end face 31l can be absorbed by this gap Dc, preventing contact between the end face 31l of the movable linear conveyor 3 and the end face 21r of the fixed linear conveyor 2. In this way, the contact between the movable linear conveyor 3 and the fixed linear conveyor 2 adjacent to it can be avoided due to thermal deformation of the movable linear conveyor 3, thus suppressing the warping of the movable linear conveyor 3.

[0098] Furthermore, the support mechanism 41 includes a single-axis robot 51 mounted on the fixed linear conveyor 2 and a conveyor support member 61 driven by the single-axis robot 51 in the Y direction. The support mechanism 41 also includes a sliding support portion 63 (one-sided support portion) that supports the movable linear conveyor 3 on the conveyor support member 61. This sliding support portion 63 allows the end portion 32l of the movable linear conveyor 3 to move towards the X1 side relative to the conveyor support member 61 in the X direction, while simultaneously constraining the end portion 32l of the movable linear conveyor 3 relative to the conveyor support member 61 in the Y direction. Thus, the movable linear conveyor 3 is supported by the sliding support portion 63 on the conveyor support member 61 driven by the single-axis robot 51 in the Y direction. Since the sliding support portion 63 constrains the movable linear conveyor 3 relative to the conveyor support member 61 in the Y direction, the movable linear conveyor 3 moves along with the conveyor support member 61 when the conveyor support member 61 is driven in the Y direction. This allows the movable linear conveyor 3 to be driven appropriately in the Y direction. Furthermore, the sliding support 63 allows the end portion 32l of the movable linear conveyor 3 to move towards the Xl side relative to the conveyor support member 61 in the X direction. Therefore, the end portion 32l of the movable linear conveyor 3 can move towards the Xl side due to thermal deformation of the movable linear conveyor 3 without hindering the displacement of the end face 31l of the movable linear conveyor 3. As a result, both the driving of the movable linear conveyor 3 in the Y direction and the suppression of warping of the movable linear conveyor 3 can be achieved.

[0099] Furthermore, the sliding support 63 is a sliding guide provided along the X direction. With this structure, the functions of guiding the movable linear conveyor 3 along the Y direction and suppressing the warping of the movable linear conveyor 3 can be achieved using such a simple structure as the sliding guide.

[0100] Furthermore, the support mechanism 41 has screws Sa (fixing members) that fix the conveyor support member 61 and the movable linear conveyor 3 in the X direction at a position between the sliding support part 63 and the support mechanism 43. In this structure, the deformation of the movable linear conveyor 3 is dispersed to both sides of the position fixed by the screws Sa. Therefore, the displacement of the end faces 31r and 31l of the movable linear conveyor 3 can be balanced, and the two intervals Da and Dc between the movable linear conveyor 3 and the fixed linear conveyor 2 located at these end faces 31r and 31l can be effectively utilized to effectively prevent contact between the end faces 31r and 31l of the movable linear conveyor 3 and the end faces 21l and 21r of the fixed linear conveyor.

[0101] Figure 8 This is a front view schematically illustrating a third example of a branch transport device included in a substrate transport system. Here, it is compared with... Figure 7 The second example will be described with a focus on its differences, and common parts will be labeled with corresponding reference numerals and descriptions will be omitted as appropriate. In this third example, the support mechanism 43 replaces the Y-axis conveyor guide 71 (second example) to have a single-axis robot 51, and replaces the conveyor support member 81 (second example) to have a conveyor support member 61 and a sliding support 63. That is, the support mechanism 43 has the same structure as the support mechanism 41, except that it is fixed based on screw Sa.

[0102] In the support mechanism 43, the upper surface 521t of the single-axis robot 51 abuts against the bottom surface 23b of the end 22l of the fixed linear conveyor 2 from below. Furthermore, at the end 22l, the upper surface 521t of the single-axis robot 51 is fastened and fixed to the flange 23 of the fixed linear conveyor 2 by screws S. In the support mechanism 43, a conveyor support member 61 is fixed to the slider 525 of the single-axis robot 51, and this conveyor support member 61 supports the end 32r of the movable linear conveyor 3 via a sliding support portion 63. Thus, the Xr-side end 32r of the movable linear conveyor 3 is supported by the conveyor support member 61 in a manner that allows it to move in the X direction via the sliding support portion 63. Therefore, in the event of thermal expansion of the movable linear conveyor 3, the end face 31r of the movable linear conveyor 3 can be displaced towards the Xr side within a distance Da.

[0103] In addition, in such Figure 8In the third example, where branch handling devices A with single-axis robots 51 are installed on both sides of the movable linear conveyor 3, the control unit 100 can also control the drive motor 531 of each single-axis robot 51 as follows.

[0104] Figure 9 This is a flowchart illustrating an example of transfer control in a branch transport device equipped with two single-axis robots. The flowchart shows that the transfer of the table conveyor T between the fixed linear conveyor 2 and the movable linear conveyor 3 is performed under the control of the control unit 100.

[0105] In step S101, it is determined whether to perform the transfer of the tabletop conveyor T. Then, if it is determined that the tabletop conveyor T is to be transferred ("Yes" in step S101), proceed to step S102. In step S102, it is determined whether the fixed linear conveyor 2 that transfers the tabletop conveyor T between the movable linear conveyor 3 and the movable linear conveyor 3 is the fixed linear conveyor 2a, 2d on the X1 side of the movable linear conveyor 3 or the fixed linear conveyor 2b, 2c on the Xr side of the movable linear conveyor 3.

[0106] When the fixed linear conveyor 2 is on the Xl side, the control unit 100 stops the operation of the drive motor 531 of the support mechanism 43 on the Xr side, and performs the aforementioned feedback control on the drive motor 531 of the support mechanism 41 on the Xl side, positioning the table conveyor T at a relative position Lf1 or Lf2 (step S103). At this time, the drive motor 531 of the support mechanism 43 stops (no servo), so the single-axis robot 51 of the support mechanism 43 does not function to drive the movable linear conveyor 3, but only guides the movable linear conveyor 3 along the Y direction. Thus, after positioning the movable linear conveyor 3 at a relative position Lf1 or Lf2, the table conveyor T is transferred between the movable linear conveyor 3 and the fixed linear conveyor 2 on the Xl side of the movable linear conveyor 3 (step S104).

[0107] When the fixed linear conveyor 2 is on the Xr side, the control unit 100 stops the operation of the drive motor 531 of the support mechanism 41 on the Xl side, and performs the aforementioned feedback control on the drive motor 531 of the support mechanism 43 on the Xr side, positioning the table conveyor T at a relative position Lf1 or Lf2 (step S105). At this time, the drive motor 531 of the support mechanism 41 stops (no servo), so the single-axis robot 51 of the support mechanism 41 does not function to drive the movable linear conveyor 3, but only guides the movable linear conveyor 3 along the Y direction. Thus, after positioning the movable linear conveyor 3 at a relative position Lf1 or Lf2, the table conveyor T is transferred between the movable linear conveyor 3 and the fixed linear conveyor 2 on the Xr side of the movable linear conveyor 3 (step S106).

[0108] exist Figure 9 In the transfer control, the control unit 100 controls the operation of the drive motors 531 (first and second drive sources) of the support mechanisms 41 and 43 respectively. Specifically, when transferring the table conveyor T between the movable linear conveyor 3 and the fixed linear conveyors 2a and 2d on the Xl side, the control unit 100 stops the operation of the drive motor 531 of the support mechanism 43 on the Xr side, and controls the position of the movable linear conveyor 3 to relative positions Lf1 and Lf2 by the operation of the drive motor 531 of the support mechanism 41 on the Xl side (step S103). Furthermore, when transferring the table conveyor T between the movable linear conveyor 3 and the fixed linear conveyors 2b and 2c on the Xr side, the control unit 100 stops the operation of the drive motor 531 of the support mechanism 41 on the Xl side, and controls the position of the movable linear conveyor 3 to relative positions Lf1 and Lf2 by the operation of the drive motor 531 of the support mechanism 43 on the Xr side (step S105). In this structure, when transferring the table conveyor T between the fixed linear conveyors 2a and 2d and the movable linear conveyor 3, interference from the operation of the drive motor 531 of the support mechanism 43 can be prevented. Furthermore, the movable linear conveyor 3 is accurately positioned relative to the fixed linear conveyors 2a and 2d by the drive motor 531 of the support mechanism 41, thus achieving smooth transfer of the table conveyor T. Similarly, when transferring the table conveyor T between the fixed linear conveyors 2b and 2c and the movable linear conveyor 3, interference from the operation of the drive motor 531 of the support mechanism 41 can be prevented. Furthermore, the movable linear conveyor 3 is accurately positioned relative to the fixed linear conveyors 2b and 2c by the drive motor 531 of the support mechanism 43, thus achieving smooth transfer of the table conveyor T.

[0109] Figure 10 This is a front view schematically showing a fourth example of a branch conveying device included in a substrate conveying system. Figure 11 It is shown schematically. Figure 10 A side view of an example of a linkage mechanism in a branch conveying device. Here, it is compared with... Figure 3 The description focuses on the differences in the first example, with common parts labeled with corresponding reference numerals and descriptions omitted as appropriate. In this fourth example, the support mechanism 41 replaces the single-axis robot 51 (first example) with a Y-axis conveyor guide 71, and replaces the conveyor support member 61 (first example) with a conveyor support member 81. That is, the support mechanism 41 has the same structure as the support mechanism 43.

[0110] In the support mechanism 41, the upper surface 722t of the Y-axis conveyor guide 71 abuts against the bottom surface 23b of the end 22r of the fixed linear conveyor 2 from below. Furthermore, at this end 22r, the upper surface 722t of the Y-axis conveyor guide 71 is fastened and fixed to the flange 23 of the fixed linear conveyor 2 by screws S. Moreover, in the support mechanism 41, a conveyor support member 81 is fixed to the sliding member 732 of the Y-axis conveyor guide 71, and the upper surface 812t of this conveyor support member 81 abuts against the bottom surface 33b of the end 32l of the movable linear conveyor 3 from below, and is fastened and fixed to the flange 33 of the movable linear conveyor 3 at this end 32l. Therefore, the support mechanism 41 can support the end 32l of the movable linear conveyor 3 against the end 22r of the fixed linear conveyor 2 and guide the end 32l of the movable linear conveyor 3 along the Y direction.

[0111] Furthermore, in Figure 10 In the conveyor moving unit 4, a single-axis robot 51 is arranged along the Y direction on a support frame 18 placed on a base plate 19. Furthermore, the single-axis robot 51 and the movable linear conveyor 3 are connected via a linkage mechanism 9. Figure 11 As shown, the linkage mechanism 9 has a mounting plate 91 and a spherical bearing 92 fixed on the upper surface of the mounting plate 91. Furthermore, the linkage mechanism 9 has a mounting plate 94 disposed above the mounting plate 91 and a spherical bearing 95 fixed on the lower surface of the mounting plate 94.

[0112] Furthermore, the linkage mechanism 9 has a rod 97 connecting the spherical bearing 92 and the spherical bearing 95. One end 971 of the rod 97 is supported by the spherical bearing 95, and the other end 972 of the rod 97, opposite to end 971, is supported by the spherical bearing 92. The rod 97 has two rotational degrees of freedom relative to the spherical bearing 92 and two rotational degrees of freedom relative to the spherical bearing 95. That is, the rod 97 can rotate relative to the spherical bearing 92 and relative to the spherical bearing 95, respectively, about two mutually orthogonal rotation axes.

[0113] Furthermore, mounting plate 91 is fastened and fixed to the upper surface of the slider 525 of the single-axis robot 51 by screws S. Mounting plate 94 is also fastened and fixed to the bottom surface 33b of the flange 33 of the movable linear conveyor 3 by screws S. Mounting plate 94 is fixed to the movable linear conveyor 3 at a central position between end 32l and end 32r in the X direction. Therefore, when the drive motor 531 drives the slider 525 in the Y direction via the ball screw 523, the movable linear conveyor 3, connected to the slider 525 via the linkage mechanism 9, moves in the Y direction.

[0114] Thus, in the fourth example, a linkage mechanism 9 is mounted on the movable linear conveyor 3 at a mounting position (the position of the mounting plate 94) between the ends 32l and 32r of the movable linear conveyor 3, and a single-axis robot 51 is used to move the movable linear conveyor 3 in the Y direction by driving the linkage mechanism 9 in the Y direction. The linkage mechanism 9 has a spherical bearing 95 (first spherical bearing) mounted on the movable linear conveyor 3 via the mounting plate 94, a spherical bearing 92 (second spherical bearing) mounted on the slider 525 of the single-axis robot 51 via the mounting plate 91, and a rod 97 connecting the spherical bearing 95 and the spherical bearing 92. Furthermore, one end 971 of the rod 97 is supported by the spherical bearing 95, and the other end 972 of the rod 97 is supported by the spherical bearing 92. With this structure, the parallelism error between the Y-axis conveyor guide 71 of each of the support mechanisms 41 and 43 and the single-axis robot 51 can be absorbed by the degrees of freedom of the spherical bearings 92 and 95 of the linkage mechanism 9. Therefore, the movable linear conveyor 3 can move smoothly along the Y direction.

[0115] Figure 12 This is a front view schematically illustrating a fifth example of a branch transport device included in a substrate transport system. Here, it is compared with... Figure 8 The description focuses on the differences from the third example, with common parts labeled with corresponding reference numerals and descriptions omitted as appropriate. In this fifth example, in the support mechanism 41, the Y-axis conveyor guide 71 is installed at the end 22l of the fixed linear conveyor 2 instead of the single-axis robot 51 (third example), and the conveyor support member 81 is installed at the end 32r of the movable linear conveyor 3 instead of the conveyor support member 61. That is, the support mechanism 41 in the fifth example has the same characteristics as the first example ( Figure 3 The support mechanism 43 of the fifth example has a common structure. However, in the support mechanism 41 of the fifth example, the engaging support part 85 is not provided, and the upright mounting plate 811 is fixed to the support sliding member 74. Therefore, the support mechanism 41 constrains the end 32r of the movable linear conveyor 3 in the X direction. Therefore, the thermal expansion of the movable linear conveyor 3 cannot be absorbed in the support mechanism 41, but is absorbed by the gap Da in the support mechanism 43.

[0116] Thus, in the fifth example, the support mechanism 43 (the other side support mechanism) includes a single-axis robot 51 mounted on the fixed linear conveyor 2 (the second fixed linear conveyor), a conveyor support member 61 (the driven member) driven by the single-axis robot 51 in the Y direction (switching direction), and a sliding support portion 63 (the other side support portion) supporting the movable linear conveyor 3 on the conveyor support member 61. This sliding support portion 63 allows the end portion 32r of the movable linear conveyor 3 to move towards the Xr side (the other side) relative to the conveyor support member 61 in the X direction (transportation direction), and constrains the end portion 32r of the movable linear conveyor 3 relative to the conveyor support member 61 in the Y direction. That is, the movable linear conveyor 3 is supported by the conveyor support member 61 driven by the single-axis robot 51 in the Y direction via the sliding support portion 63. The sliding support 63 constrains the movable linear conveyor 3 relative to the conveyor support member 61 in the Y direction. Therefore, when the conveyor support member 61 is driven in the Y direction, the movable linear conveyor 3 moves along with the conveyor support member 61. In this way, the movable linear conveyor 3 can be driven appropriately in the Y direction. Furthermore, the sliding support 63 allows the movable linear conveyor 3 to move towards the Xr side relative to the conveyor support member 61 in the X direction. Therefore, the end 32r of the movable linear conveyor 3 can move towards the Xr side due to thermal deformation of the movable linear conveyor 3 without hindering the displacement of the end face 31r of the movable linear conveyor 3. As a result, both the driving of the movable linear conveyor 3 in the Y direction and the suppression of warping of the movable linear conveyor 3 can be achieved.

[0117] Thus, in the above embodiments, the conveying system 1 corresponds to an example of the "conveying path switching device" of the present invention, the fixed linear conveyor 2a corresponds to an example of the "first fixed linear conveyor" of the present invention, the fixed linear conveyor 2b corresponds to an example of the "second fixed linear conveyor" of the present invention, the movable linear conveyor 3 corresponds to an example of the "movable linear conveyor" of the present invention, the end face 31l corresponds to an example of the "other end" of the present invention, the conveyor moving unit 4 corresponds to an example of the "conveyor moving unit" of the present invention, the support mechanism 41 corresponds to an example of the "one-side support mechanism" of the present invention, the support mechanism 43 corresponds to an example of the "other-side support mechanism" of the present invention, the single-axis robot 51 corresponds to an example of the "single-axis robot" of the present invention, and the conveyor support component 61 corresponds to... In one example of the "driven component" of the present invention, the sliding support 63 corresponds to one example of the "one-side support" or "other-side support" of the present invention, the branch conveying device A corresponds to one example of the "conveying path switching device" of the present invention, the interval Da corresponds to one example of the "interval" of the present invention, the relative position Lf1 corresponds to one example of the "first position" of the present invention, the relative position Lf2 corresponds to one example of the "second position" of the present invention, the screw Sa corresponds to one example of the "fixing component" of the present invention, the tabletop conveyor T corresponds to one example of the "conveyor table" of the present invention, the X direction corresponds to one example of the "conveying direction" of the present invention, the Xl side corresponds to one example of the "one side" of the present invention, the Xr side corresponds to one example of the "other side" of the present invention, and the Y direction corresponds to one example of the "switching direction" of the present invention.

[0118] In the first case ( Figure 3 ), second case ( Figure 7 )as well as Figure 10 In the fourth example, the conveyor support member 81 corresponds to an example of the "movable member" of the present invention, the sliding guide 73 corresponds to an example of the "guide part" of the present invention, the supporting sliding member 74 corresponds to an example of the "guided member" of the present invention, the engaging support part 85 corresponds to an example of the "other side support part" of the present invention, the shaft 851 corresponds to an example of the "shaft" of the present invention, the sliding bearing 852 corresponds to an example of the "sliding bearing" of the present invention, and the limiting plate 87 corresponds to an example of the "limiting member" of the present invention.

[0119] It should be noted that the present invention is not limited to the above-described embodiments. Various modifications can be made to the above-described embodiments without departing from its spirit. For example, the mechanism that allows displacement of the end face 31l or end face 31r opposite to the gap for absorbing heat deformation between the fixed linear conveyor 2 and the movable linear conveyor 3 is not limited to the above-described engaging support 85 (shaft 851 and sliding bearing 852) and sliding support 63 (sliding guide), but may also be, for example, an LM stroke bushing.

[0120] Furthermore, the aforementioned branch conveying device A does not necessarily require the substrate 19. Therefore, the branch conveying device A can be placed directly on the mounting surface without using the substrate 19.

[0121] Furthermore, the number and configuration of the fixed linear conveyors 2 used in the conveying system 1 can be appropriately changed. For example, modifications can be made such as shifting the position of the fixed linear conveyor 2c along the Y direction, shifting the position of the fixed linear conveyor 2d along the Y direction, omitting the fixed linear conveyor 2c, or omitting the fixed linear conveyor 2d.

[0122] Furthermore, the direction (switching direction) in which the movable linear conveyor 3 is driven can be varied in many ways. Therefore, the direction in which the movable linear conveyor 3 is driven is not limited to the horizontal direction, but can also be the vertical direction. In this case, the branch conveying device A can branch the conveying path of the table conveyor T in the vertical direction.

[0123] Explanation of reference numerals in the attached figures

[0124] 1…Transportation system (transportation path switching device)

[0125] 2a… Fixed linear conveyor (first fixed linear conveyor)

[0126] 2b… ​​Fixed linear conveyor (second fixed linear conveyor)

[0127] 3…Modible linear conveyor

[0128] 31l… End face (the other end)

[0129] 4… Conveyor moving unit

[0130] 41… Supporting mechanism (one-sided supporting mechanism)

[0131] 43… Supporting mechanism (supporting mechanism on the other side)

[0132] 51…Single-axis robot

[0133] 61… Conveyor support components (driven components)

[0134] 63… Sliding support section (one side support section, the other side support section)

[0135] A… Branch transport device (transport route switching device)

[0136] Da…interval

[0137] Lf1…relative position (first position)

[0138] Lf2…relative position (second position)

[0139] Sa… Screw (fixed component)

[0140] T… Tabletop Conveyor

[0141] X…X direction (movement direction)

[0142] Xl…Xl side (one side)

[0143] Xr…Xr side (the other side)

[0144] Y…Y direction (switching directions)

Claims

1. A transport path switching device, comprising: A movable linear conveyor that transports conveyor platforms along a predetermined transport direction; and The conveyor moving unit moves the movable linear conveyor between a first position and a second position that are different from each other in a switching direction that is inclined relative to the transport direction. A first fixed linear conveyor is opposite the first position from one side of the transport direction. The second fixed linear conveyor corresponds to the second position from the side opposite to the first side in the transport direction. The movable linear conveyor stops at the first position and transfers the conveyor platform between itself and the first fixed linear conveyor. The movable linear conveyor stops at the second position and transfers the conveyor platform between itself and the second fixed linear conveyor. The conveyor moving unit has a support mechanism on another side, which is spaced apart from the other end of the movable linear conveyor (which is the other end) located in the second position from the second fixed linear conveyor along the transport direction, and supports the movable linear conveyor on the second fixed linear conveyor. The other side support mechanism allows the other end of the movable linear conveyor to be displaced to the other side in the transport direction.

2. The transport path switching device according to claim 1, wherein, The other side support mechanism has a movable component mounted on the movable linear conveyor, a guide portion mounted on the second fixed linear conveyor, a guided component guided by the guide portion along the switching direction, and a support portion on the other side supporting the movable component on the guided component. The other side support allows the movable member to move relative to the guided member to the other side in the transport direction, and constrains the movable member relative to the guided member in the switching direction.

3. The transport path switching device according to claim 2, wherein, The other side support portion has: a shaft, mounted on one of the movable member and the guided member and extending along the transport direction; and a sliding bearing, mounted on another member of the movable member and the guided member, different from the first member, and open along the transport direction. The shaft is embedded in the sliding bearing and slides relative to the sliding bearing in the transport direction.

4. The transport path switching device according to claim 2, wherein, The other side support mechanism has a limiting member disposed on the other side of the movable part. Based on the displacement of the other end to the other side caused by the thermal deformation of the movable linear conveyor, the movable part, as it displaces to the other side, comes into contact with the limiting member, thereby limiting the displacement of the movable part to the other side by the limiting member. With the displacement of the movable member to the other side limited by the limiting member, there is a gap between the other end of the movable linear conveyor and the second fixed linear conveyor.

5. The transport path switching device according to claim 3, wherein, The other side support mechanism has a limiting member disposed on the other side of the movable part. Based on the displacement of the other end to the other side caused by the thermal deformation of the movable linear conveyor, the movable part, as it displaces to the other side, comes into contact with the limiting member, thereby limiting the displacement of the movable part to the other side by the limiting member. With the displacement of the movable member to the other side limited by the limiting member, there is a gap between the other end of the movable linear conveyor and the second fixed linear conveyor.

6. The transport path switching device according to any one of claims 1 to 5, wherein, The conveyor moving unit has a side support mechanism, which has a gap along the transport direction between one end of the movable linear conveyor (located at the first position) and the first fixed linear conveyor, and supports the movable linear conveyor on the first fixed linear conveyor. The side support mechanism allows one end of the movable linear conveyor to be displaced to one side in the transport direction.

7. The transport path switching device according to claim 6, wherein, The side support mechanism includes a single-axis robot mounted on the first fixed linear conveyor, a driven component driven by the single-axis robot along the switching direction, and a side support portion supporting the movable linear conveyor on the driven component. The side support allows the movable linear conveyor to move to one side relative to the driven component in the transport direction and constrains the movable linear conveyor relative to the driven component in the switching direction.

8. The transport path switching device according to claim 7, wherein, The side support is a sliding guide that is arranged along the transport direction.

9. The transport path switching device according to claim 7 or 8, wherein, The one-sided support mechanism has a fixing component that fixes the driven component and the movable linear conveyor at a position between the one-sided support and the other-sided support mechanism in the transport direction.

10. The transport path switching device according to any one of claims 1 to 5, wherein, The conveyor moving unit has a side support mechanism, which has a gap along the transport direction between one end of the movable linear conveyor (located at the first position) and the first fixed linear conveyor, and supports the movable linear conveyor on the first fixed linear conveyor. The side support mechanism constrains the movable linear conveyor in the transport direction.

11. The transport path switching device according to claim 1, wherein, The other side support mechanism includes a single-axis robot mounted on the second fixed linear conveyor, a driven component driven by the single-axis robot along the switching direction, and a support portion supporting the movable linear conveyor on the other side of the driven component. The other side support allows the movable linear conveyor to move to the other side relative to the driven member in the transport direction and constrains the movable linear conveyor relative to the driven member in the switching direction.

12. A material handling system, comprising: The first fixed linear conveyor drives the conveyor platform along the transport direction; A second fixed linear conveyor drives the conveyor platform along the transport direction; and The transport path switching device according to any one of claims 1 to 11 is disposed between the first fixed linear conveyor and the second fixed linear conveyor in the transport direction.

13. A method for switching a transport path, comprising the step of moving a movable linear conveyor that transports a conveyor platform along a predetermined transport direction between a first position and a second position that are different from each other in a switching direction in which the conveyor moving unit is inclined relative to the transport direction. A first fixed linear conveyor is opposite the first position from one side of the transport direction. The second fixed linear conveyor corresponds to the second position from the side opposite to the first side in the transport direction. The movable linear conveyor stops at the first position and transfers the conveyor platform between itself and the first fixed linear conveyor. The movable linear conveyor stops at the second position and transfers the conveyor platform between itself and the second fixed linear conveyor. The conveyor moving unit has a support mechanism on another side, which is spaced apart from the other end of the movable linear conveyor (which is the other end) located in the second position from the second fixed linear conveyor along the transport direction, and supports the movable linear conveyor on the second fixed linear conveyor. The other side support mechanism allows the other end of the movable linear conveyor to be displaced to the other side in the transport direction.

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