A HMDS chemical safety protection device

Abstract

A HMDS chemical safety protection device belongs to the field of chemical safety protection technology. The invention includes a stainless steel tank body and an HMDS glass bottle placed inside the stainless steel tank body. A first protection component is provided on the top of the stainless steel tank body. A detection component is fixedly provided on the bottom surface of the first protection component. A bracket is fixedly connected to the outer wall of the stainless steel tank body. A plurality of electric push rods are fixedly installed on the top surface of the bracket. The movable ends of the plurality of electric push rods are commonly fixedly connected to a second protection component. The second protection component is sealed and slidably arranged with the outer wall of the stainless steel tank body. A connection component is fixedly provided on the top surface of the first protection component. The present invention prevents HDMS leakage from being discovered and handled in time by staff through the detection component provided. The HMDS chemicals are further safely protected by the first protection component and the second protection component provided to prevent volatile HMDS gas from directly escaping and causing serious pollution to the production environment.

Description

Technical Field

[0001] The present invention relates to the technical field of chemical safety protection, in particular to an HMDS chemical safety protection device. Background Art

[0002] HMDS (hexamethyldisilazane) is a colorless, transparent, alkaline liquid. It can be used as a surface hydrophobic treatment agent for fumed silica and as a reagent to provide nitrogen atoms in organic synthesis reactions. It can also be used as an additive for silicon carbide fibers to improve their heat resistance and strength. It can also be used as an anti-precipitation agent for coatings.

[0003] Currently, after HMDS is loaded into a glass bottle, nitrogen can be introduced into the bottle and the HMDS in the bottle can be squeezed out through a discharge pipe for use. When it is exhausted, it needs to be replaced. In addition, the HMDS glass bottle is usually placed in a stainless steel tank for safety protection. However, this safety protection device still has some shortcomings during use, such as:

[0004] HMDS is a colorless, transparent liquid. When cracks appear in the glass bottle in use, HMDS leaks into the stainless steel tank and cannot be discovered and handled in time by the staff. The pressure of the nitrogen gas introduced into the glass bottle causes the crack to further expand, which can easily lead to more serious leakage accidents. The stainless steel tank is only isolated from the external space by a cover, and the safety is relatively low when HMDS leaks. When the glass bottle is replaced, the cover on the top of the stainless steel tank is opened, and the volatile HMDS gas escapes directly, which can easily cause serious pollution to the production environment.

[0005] In response to the above problems, a HMDS chemical safety protection device is proposed. Summary of the Invention

[0006] The purpose of the present invention is to provide an HMDS chemical safety protection device, which solves the above-mentioned problems by working with the device.

[0007] To achieve the above-mentioned objectives, the present invention provides the following technical solutions: an HMDS chemical safety protection device, comprising a stainless steel tank body and an HMDS glass bottle placed inside the stainless steel tank body, a first protection component being provided at the top of the stainless steel tank body, a detection component being fixedly provided on the bottom surface of the first protection component, a bracket being fixedly connected to the outer wall of the stainless steel tank body, a plurality of electric push rods being fixedly installed on the top surface of the bracket, a second protection component being fixedly connected to the movable ends of the plurality of electric push rods, the second protection component being sealingly and slidingly arranged with the outer wall of the stainless steel tank body, and a connecting component being fixedly provided on the top surface of the first protection component.

[0008] Furthermore, the first protection component includes an upper box body, a connecting sleeve is fixedly connected to the top surface of the inner cavity of the upper box body, the HMDS glass bottle is located in the inner circle of the connecting sleeve, and a plurality of first wedge blocks are fixedly connected to the side wall of the inner cavity of the upper box body, and the plurality of first wedge blocks are arranged in a circular array.

[0009] Furthermore, the detection component includes an outer cover shell fixedly connected to the top surface of the upper box body and an air duct passing through the top wall of the upper box body. A detection bottle is fixedly connected to the side wall of the inner cavity of the outer cover shell, and the detection bottle is filled with phenolphthalein solution. One end of the air duct is connected to the interior of the detection bottle, and the other end of the air duct is connected to the interior of the stainless steel tank body.

[0010] Furthermore, the detection bottle is a transparent container, and a color sensor is fixedly connected to the top wall of the inner cavity of the outer cover shell, and the color sensor is arranged facing the detection bottle.

[0011] Furthermore, the second protection component includes a lower box body fixedly connected to the movable ends of multiple electric push rods, an annular groove is provided on the top surface of the lower box body, an organic solvent is filled inside the annular groove, and multiple fixed partitions are fixedly connected to the upper end of the side wall of the inner cavity of the annular groove. The multiple fixed partitions are arranged at intervals, and the top surface of the fixed partition is flush with the outer surface of the annular groove opening.

[0012] Furthermore, a retaining ring is fixedly connected to the edge of the top surface of the lower box body, and a plurality of springs are fixedly connected to the inner ring side wall of the retaining ring. A second wedge block is fixedly connected to the end of each spring away from the retaining ring, and the plurality of second wedge blocks are correspondingly arranged directly below the plurality of first wedge blocks. A movable partition is fixedly connected to the bottom surface of each of the second wedge blocks, and each of the movable partitions slides against the top wall of the lower box body.

[0013] Furthermore, the connecting assembly includes a bottle cap joint body placed at the mouth of the HMDS glass bottle and a bottle cap outer ring threadedly connected to the outer wall of the mouth of the HMDS glass bottle. The bottle cap joint body is sealed in the inner ring of the bottle cap outer ring, and the bottle cap outer ring is fixedly connected to the top surface of the upper box body by bolts.

[0014] Furthermore, a pressure-bearing through-type joint is fixedly provided on the top surface of the bottle cap joint body, a discharge pipe is provided through the pressure-bearing through-type joint, and one end of the discharge pipe extends to the inner bottom end of the HMDS glass bottle.

[0015] Furthermore, an empty tank signal sensor is provided on the discharge pipe.

[0016] Furthermore, a driving air joint is fixedly provided on the top surface of the bottle cap joint body, and one end of the driving air joint is fixedly connected to an air inlet pipe.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] 1. Through the provided outer cover, air duct, detection bottle and color sensor components, when the HMDS liquid in the HMDS glass bottle leaks, the HMDS enters the stainless steel tank body and then volatilizes into the detection bottle through the air duct. Since HMDS is alkaline, it enters the phenolphthalein solution in the detection bottle, causing the phenolphthalein to turn red. The color change of phenolphthalein is detected by the color sensor, which then sends a signal to the external controller. The external controller activates multiple electric push rods and initiates further safety protection measures to prevent the HDMS leak from being discovered and handled by staff in a timely manner, thereby preventing more serious accidents.

[0019] 2. Through the upper box body, lower box body and electric push rod components, after the detection component detects the leakage of HMDS, the external controller starts the multiple electric push rods installed on the bracket. The movable ends of the multiple electric push rods simultaneously drive the second protection component to slide upward along the stainless steel tank body and approach the first protection component. Finally, the first protection component and the second protection component are in close contact with each other, forming a closed space at the connection between the stainless steel tank body and the connecting sleeve, further enhancing the safety protection of HMDS chemicals.

[0020] 3. Through the provision of the annular groove, organic solvent, first wedge block, second wedge block, spring, movable partition and fixed partition components, in the process of the second protective component rising and approaching the first protective component, the inclined surfaces of the first wedge block and the second wedge block are released from the contact, the second wedge block is squeezed by the first wedge block and slides to the side close to the retaining ring, and the movable partition moves to one side together under the drive of the second wedge block, so that the gaps between the multiple fixed partitions are exposed, so that the organic solvent in the annular groove is exposed to the stainless steel tank body, the volatilized HMDS is absorbed, and preliminary treatment is carried out, thereby avoiding the problem of volatilized HMDS gas escaping when the upper box body is opened, causing pollution to the production environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the overall structure of an HMDS chemical safety protection device proposed in the present invention;

[0022] Figure 2 This is a schematic structural diagram of an HMDS chemical safety protection device proposed by the present invention with the upper box body removed;

[0023] Figure 3 This is a structural diagram of the stainless steel tank and bracket part of the HMDS chemical safety protection device proposed by the present invention;

[0024] Figure 4 This is a structural schematic diagram of the upper box body portion of an HMDS chemical safety protection device proposed in the present invention;

[0025] Figure 5 This is a cross-sectional view of the internal structure of the detection component part of the HMDS chemical safety protection device proposed by the present invention;

[0026] Figure 6 for Figure 2 A magnified schematic diagram of the structure of part A;

[0027] Figure 7 This is a partial cross-sectional schematic diagram of the lower box body of an HMDS chemical safety protection device proposed by the present invention;

[0028] Figure 8 This is a structural schematic diagram of the connecting component and the HMDS glass bottle part in the HMDS chemical safety protection device proposed in the present invention.

[0029] In the figure: 1. Stainless steel tank body; 2. First protection component; 21. Upper box body; 22. Connecting sleeve; 23. First wedge; 3. Detection component; 31. Outer cover shell; 32. Air guide tube; 33. Detection bottle; 34. Color sensor; 4. Bracket; 5. Electric push rod; 6. Second protection component; 61. Lower box body; 611. Annular groove; 62. Fixed partition; 63. Retaining ring; 64. Spring; 65. Second wedge; 66. Movable partition; 7. Connecting component; 71. Bottle cap connector body; 72. Bottle cap outer ring; 73. Pressure-bearing through-type connector; 731. Discharge pipe; 732. Empty tank signal sensor; 74. Drive air connector; 741. Inlet pipe; 8. HMDS glass bottle. DETAILED DESCRIPTION

[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0031] In order to solve the technical problem that HMDS leaks into the stainless steel tank 1 and cannot be discovered and handled in time by the staff, such as Figure 1 、 Figure 5 and Figure 8 As shown, the following preferred technical solutions are provided:

[0032] A HMDS chemical safety protection device includes a stainless steel tank body 1 and an HMDS glass bottle 8 placed inside the stainless steel tank body 1. A first protection component 2 is provided on the top of the stainless steel tank body 1, and a detection component 3 is fixedly provided on the bottom surface of the first protection component 2. A bracket 4 is fixedly connected to the outer wall of the stainless steel tank body 1, and a plurality of electric push rods 5 are fixedly installed on the top surface of the bracket 4. The movable ends of the plurality of electric push rods 5 are commonly fixedly connected to a second protection component 6. The second protection component 6 is sealed and slidably arranged with the outer wall of the stainless steel tank body 1, and a connecting component 7 is fixedly provided on the top surface of the first protection component 2.

[0033] The detection component 3 includes an outer cover shell 31 fixedly connected to the top surface of the upper box body 21 and an air duct 32 passing through the top wall of the upper box body 21. A detection bottle 33 is fixedly connected to the side wall of the inner cavity of the outer cover shell 31. The detection bottle 33 is filled with phenolphthalein solution. One end of the air duct 32 is connected to the interior of the detection bottle 33, and the other end of the air duct 32 is connected to the interior of the stainless steel tank body 1; when the HMDS liquid in the HMDS glass bottle 8 leaks, the HMDS enters the interior of the stainless steel tank body 1. After volatilization, the HMDS enters the interior of the detection bottle 33 through the air duct 32. Since HMDS is alkaline, it enters the phenolphthalein solution after it enters the phenolphthalein, causing the phenolphthalein solution to turn red.

[0034] The detection bottle 33 is a transparent container, and a color sensor 34 is fixedly connected to the top wall of the inner cavity of the outer cover shell 31. The color sensor 34 is a prior art and its principle is not repeated here. The color sensor 34 is arranged opposite the detection bottle 33. The color sensor 34 monitors the color of the phenolphthalein solution through the transparent detection bottle 33. When the phenolphthalein solution encounters the alkaline HMDS solution and turns red, the color change is detected by the color sensor 34, and then the signal is transmitted to the external controller. The external controller starts multiple electric push rods 5, and starts further safety protection measures, avoiding the problem that the HMDS leakage cannot be discovered and handled by the staff in time, causing more serious leakage accidents.

[0035] The connecting assembly 7 includes a bottle cap joint body 71 placed at the mouth of the HMDS glass bottle 8 and a bottle cap outer ring 72 threadedly connected to the outer wall of the mouth of the HMDS glass bottle 8. The bottle cap joint body 71 is sealed in the inner ring of the bottle cap outer ring 72, and the bottle cap outer ring 72 is fixedly connected to the top surface of the upper box body 21 by bolts; the bottle cap outer ring 72 forms a planar seal with the upper flange surface of the bottle cap joint body 71, and presses the bottle cap joint body 71. The lower flange surface of the bottle cap joint body 71 forms a planar seal with the bottle mouth, and can be rotated at any position within 360° on the plane until it reaches the most suitable position for pipe laying, and then the bottle cap outer ring 72 is rotated to tighten the bottle cap to avoid twisting of the pipeline, and then the bottle cap outer ring 72 is fixed to the top surface of the upper box body 21 by bolts, so that the connection between the HMDS glass bottle 8 and the upper box body 21 is sealed.

[0036] A pressure-bearing through-type joint 73 is fixedly provided on the top surface of the bottle cap joint body 71, and a discharge pipe 731 is provided through the pressure-bearing through-type joint 73, and one end of the discharge pipe 731 extends to the inner bottom end of the HMDS glass bottle 8; the pressure-bearing through-type joint 73 can flexibly adjust the length of the discharge pipe 731, and then lock the nut of the joint so that the discharge pipe 731 can be fixed.

[0037] An empty tank signal sensor 732 is provided on the discharge pipe 731; when nitrogen is introduced through the drive air connector 74 and the air inlet pipe 741, if the sensor detects that HMDS liquid flows through the discharge pipe 731, it is determined that there is HMDS liquid in the HMDS glass bottle 8; otherwise, it is determined that the bottle is empty and the glass bottle needs to be replaced.

[0038] A driving gas connector 74 is fixedly provided on the top surface of the bottle cap connector body 71, and one end of the driving gas connector 74 is fixedly connected to an air inlet pipe 741; when in use, high-purity nitrogen gas of a certain pressure is introduced into the HMDS glass bottle 8 through the air inlet pipe 741 to press the HMDS liquid out of the HMDS glass bottle 8 to the target position.

[0039] In order to solve the technical problems that the stainless steel tank body 1 is only isolated from the external space by the cover, the safety is relatively low when HMDS leaks, and the volatile HMDS gas escapes directly when the cover on the top of the stainless steel tank body 1 is opened, which is easy to cause serious pollution to the production environment. Figure 2-Figure 7 As shown, the following preferred technical solutions are provided:

[0040] The first protective component 2 includes an upper box body 21, and a connecting sleeve 22 is fixedly connected to the top surface of the inner cavity of the upper box body 21. The HMDS glass bottle 8 is located in the inner circle of the connecting sleeve 22. A plurality of first wedge blocks 23 are fixedly connected to the side wall of the inner cavity of the upper box body 21, and the plurality of first wedge blocks 23 are arranged in a circular array; the connecting sleeve 22 is used to connect and fix the first protective component 2 to the stainless steel tank body 1. During installation, the HMDS glass bottle 8 passes through the inner circle of the connecting sleeve 22, and will not cause any obstruction to the taking and placing of the HMDS glass bottle 8.

[0041] The second protection component 6 includes a lower box body 61 fixedly connected to the movable ends of multiple electric push rods 5. An annular groove 611 is provided on the top surface of the lower box body 61. The annular groove 611 is filled with an organic solvent. The upper end of the inner cavity side wall of the annular groove 611 is fixedly connected with multiple fixed partitions 62. The multiple fixed partitions 62 are arranged at intervals, and the top surface of the fixed partition 62 is flush with the outer surface of the opening of the annular groove 611.

[0042] A retaining ring 63 is fixedly connected to the edge of the top surface of the lower box body 61, and a plurality of springs 64 are fixedly connected to the inner ring side wall of the retaining ring 63. The end of each spring 64 away from the retaining ring 63 is fixedly connected to a second wedge block 65. The plurality of second wedge blocks 65 are correspondingly arranged directly below the plurality of first wedge blocks 23. A movable partition 66 is fixedly connected to the bottom surface of each second wedge block 65. Each movable partition 66 slides against the top wall of the lower box body 61. The movable partition 66 is arranged between the fixed partitions 62. In normal use, it can separate the fixed partitions 62. The partition 66 is sealed to prevent the volatilization of the internal organic solvent in the annular groove 611. When HMDS leaks, the movable partition 66 slides along the top surface of the lower box body 61 under the drive of the second wedge block 65, releasing the blockage of the gap between the fixed partition 62, so that the organic solvent in the annular groove 611 is exposed to the internal environment of the stainless steel tank body 1. The volatilized HMDS gas can be dissolved in the organic solvent, which prevents the volatilized HMDS gas from escaping into the external environment when the upper box body 21 is opened due to the inability to be absorbed and processed, causing a larger range of pollution to the production environment.

[0043] Specifically, when HMDS liquid leaks into the stainless steel tank body 1 and its volatile gas is detected by the detection component 3, the external controller starts multiple electric push rods 5 installed on the bracket 4. The movable ends of the multiple electric push rods 5 simultaneously drive the second protection component 6 to slide upward along the stainless steel tank body 1 and approach the first protection component 2. Finally, the first protection component 2 and the second protection component 6 are in close contact with each other, forming a closed space at the connection between the stainless steel tank body 1 and the connecting sleeve 22, thereby further enhancing the safety protection of HMDS and avoiding a larger range of leakage of HMDS volatile gas.

[0044] Furthermore, as the second protective assembly 6 ascends and approaches the first protective assembly 2, the inclined surfaces of the first wedge 23 and the second wedge 65 are released from contact. The second wedge 65 is squeezed by the first wedge 23 and slides toward the side near the retaining ring 63. Driven by the second wedge 65, the movable partition 66 moves to the side, exposing the gaps between the multiple fixed partitions 62. This allows the organic solvent in the annular groove 611 to be exposed to the stainless steel tank body 1, absorbing the volatilized HMDS and performing preliminary treatment. This prevents the volatilized HMDS gas from escaping when the upper box body 21 is opened, causing pollution to the production environment. After the leaked HMDS is treated, the multiple electric push rods 5 drive the lower box body 61 to descend along the stainless steel tank body 1, gradually separating the lower box body 61 from the upper box body 21. Under the elastic force of the spring 64, the second wedge 65 drives the movable partition 66 to return to its original position, again sealing the gaps between the fixed partitions 62 and preventing the organic solvent in the annular groove 611 from evaporating to the outside.

[0045] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0046] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A HMDS chemical safety protection device, comprising a stainless steel tank body (1) and an HMDS glass bottle (8) placed inside the stainless steel tank body (1), characterized in that: A first protection component (2) is provided at the top of the stainless steel tank body (1), a detection component (3) is fixedly provided on the bottom surface of the first protection component (2), a bracket (4) is fixedly connected to the outer wall of the stainless steel tank body (1), a plurality of electric push rods (5) are fixedly installed on the top surface of the bracket (4), and the movable ends of the plurality of electric push rods (5) are fixedly connected to a second protection component (6), the second protection component (6) is sealingly slidably provided with the outer wall of the stainless steel tank body (1), and a connection component (7) is fixedly provided on the top surface of the first protection component (2); The first protection assembly (2) comprises an upper box body (21), a connecting sleeve (22) is fixedly connected to the top surface of the inner cavity of the upper box body (21), the HMDS glass bottle (8) is located in the inner circle of the connecting sleeve (22), and a plurality of first wedge blocks (23) are fixedly connected to the side wall of the inner cavity of the upper box body (21), and the plurality of first wedge blocks (23) are arranged in a circumferential array; The detection assembly (3) comprises an outer cover shell (31) fixedly connected to the top surface of the upper box body (21) and an air guide tube (32) penetrating the top wall of the upper box body (21); a detection bottle (33) is fixedly connected to the side wall of the inner cavity of the outer cover shell (31); the detection bottle (33) contains a phenolphthalein solution; one end of the air guide tube (32) is in communication with the interior of the detection bottle (33), and the other end of the air guide tube (32) is in communication with the interior of the stainless steel tank body (1); The detection bottle (33) is a transparent container, and a color sensor (34) is fixedly connected to the top wall of the inner cavity of the outer cover shell (31), and the color sensor (34) is arranged facing the detection bottle (33); The second protection assembly (6) comprises a lower box body (61) fixedly connected to the movable ends of the plurality of electric push rods (5), an annular groove (611) is provided on the top surface of the lower box body (61), an organic solvent is contained in the annular groove (611), a plurality of fixed partitions (62) are fixedly connected to the upper end of the inner cavity side wall of the annular groove (611), the plurality of fixed partitions (62) are arranged at intervals, and the top surface of the fixed partition (62) is flush with the outer surface of the opening of the annular groove (611); A retaining ring (63) is fixedly connected to the edge of the top surface of the lower box body (61), and a plurality of springs (64) are fixedly connected to the inner ring side wall of the retaining ring (63). An end of each of the springs (64) away from the retaining ring (63) is fixedly connected to a second wedge block (65). The plurality of second wedge blocks (65) are correspondingly arranged directly below the plurality of first wedge blocks (23). A movable partition (66) is fixedly connected to the bottom surface of each of the second wedge blocks (65), and each of the movable partitions (66) slides against the top wall of the lower box body (61).

2. The HMDS chemical safety protection device according to claim 1, characterized in that: The connecting assembly (7) comprises a bottle cap connector body (71) placed at the mouth of the HMDS glass bottle (8) and a bottle cap outer ring (72) threadedly connected to the outer wall of the mouth of the HMDS glass bottle (8); the bottle cap connector body (71) is sealed in the inner ring of the bottle cap outer ring (72); and the bottle cap outer ring (72) is fixedly connected to the top surface of the upper box body (21) by bolts.

3. The HMDS chemical safety protection device according to claim 2, characterized in that: A pressure-bearing through-type joint (73) is fixedly provided on the top surface of the bottle cap joint body (71), a discharge pipe (731) is provided through the pressure-bearing through-type joint (73), and one end of the discharge pipe (731) extends to the inner bottom end of the HMDS glass bottle (8).

4. The HMDS chemical safety protection device according to claim 3, characterized in that: An empty tank signal sensor (732) is provided on the discharge pipe (731).

5. The HMDS chemical safety protection device according to claim 4, characterized in that: A driving air joint (74) is fixedly provided on the top surface of the bottle cap joint body (71), and one end of the driving air joint (74) is fixedly connected to an air inlet pipe (741).

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