Pressure closed loop zr spindle module with overload protection

Abstract

The embodiment of the application discloses a pressure closed-loop ZR shaft module with overload protection, which comprises a Z-axis motor, an R-axis motor, a sliding plate and a base, the Z-axis motor is arranged on the base, the sliding plate is connected with the mover of the Z-axis motor, the ZR shaft module further comprises a pressure sensor and a limiting mechanism arranged at the bottom of the base, the R-axis motor is connected with the sliding plate through the pressure sensor, the limiting mechanism comprises a limiting block, a limiting hole is arranged in the middle of the limiting block, the rotating shaft of the R-axis motor passes through the limiting hole, limiting screw holes penetrating through two ends are arranged on the side wall of the limiting hole, and limiting screws for limiting the rotating shaft of the R-axis motor are arranged in the limiting screw holes. The application has the advantages of simple structure and convenient adjustment, can avoid the risk that the sensor is damaged due to overload use and external force impact during use of the ZR shaft module, and can increase the radial rigidity of the rotating shaft while protecting the sensor.

Description

Technical Field

[0001] This invention relates to the field of semiconductor chip pickup and mounting technology, and in particular to a pressure closed-loop ZR axis module with overload protection. Background Technology

[0002] In automated production, robotic arms are increasingly widely used. In the grasping of small workpieces (such as miniature ICs, especially semiconductor chips with dimensions in the micrometer range), there are high requirements for the overall structure of the robotic arm and for the control of its Z-axis precision, force, and stability. Therefore, the force control precision of the robotic arm's ZR-axis module is extremely important.

[0003] Existing ZR axis modules typically use sensors to detect the pressure applied in the Z-axis direction, and then control the Z-axis motor based on the measured pressure. Most existing ZR axis modules lack overload protection for the sensors. When the R-axis motor's rotation shaft is subjected to pressure, it will deflect in the XY-axis direction, which not only affects the sensor's force detection accuracy in the Z-axis direction, but also easily leads to sensor overload damage. Summary of the Invention

[0004] The technical problem to be solved by the embodiments of the present invention is to provide a pressure closed-loop ZR shaft module with overload protection, so as to realize overload protection and improve force control accuracy.

[0005] To address the aforementioned technical problems, this invention proposes a pressure closed-loop ZR-axis module with overload protection, comprising a Z-axis motor, an R-axis motor, a sliding plate, and a base. The Z-axis motor is mounted on the base, and the sliding plate connects to the mover of the Z-axis motor. The ZR-axis module also includes a pressure sensor and a corresponding limiting mechanism located at the bottom of the base. The R-axis motor is connected to the sliding plate via the pressure sensor. The limiting mechanism includes a limiting block with a limiting hole in the center. The rotating shaft of the R-axis motor passes through the limiting hole, and the sidewall of the limiting hole has a limiting screw hole with both ends extending through it. A limiting screw for limiting the rotating shaft of the R-axis motor is correspondingly installed in the limiting screw hole.

[0006] Furthermore, the limiting block is provided with a deformation groove, and a locking screw hole is provided on the limiting hole corresponding to the deformation groove. A locking screw is installed in the locking screw hole, and the limiting block is fixed to the bottom of the base by the locking screw.

[0007] Furthermore, the longitudinal section of the deformation groove is T-shaped, and the bottom of the deformation groove extends to the bottom of the limiting block.

[0008] Furthermore, the inner side of the deformation groove is connected to the limiting screw hole.

[0009] Furthermore, there are four sets of limiting screw holes, limiting screws, locking screw holes, locking screws, and deformation grooves. The four sets of limiting screw holes are distributed at equal angles around the center of the limiting hole, and the four sets of locking screw holes are respectively located between two sets of limiting screw holes.

[0010] Furthermore, the limiting hole is square, and the four sets of limiting screw holes are perpendicular to the four sides of the square.

[0011] Furthermore, the front end of the limiting screw is a ball head.

[0012] Furthermore, the pressure sensor includes a limiting plate, a strain unit, and a strain detection unit. The two ends of the strain unit are connected to a sliding plate and an R-axis motor, respectively. The limiting plate is located above the strain unit. The top of the strain unit near the R-axis motor is provided with a Z-phase limiting bolt spaced at a preset distance from the limiting plate. The strain detection unit detects the pressure on the R-axis motor by detecting the deformation of the strain unit.

[0013] The beneficial effects of the present invention are as follows: the present invention has a simple structure and is easy to adjust; the present invention can avoid the risk of sensor damage caused by overload use and external impact during the use of ZR axis module; the present invention increases the radial rigidity of the rotating shaft while providing protection. Attached Figure Description

[0014] Figure 1 This is a front view of the pressure closed-loop ZR shaft module with overload protection according to an embodiment of the present invention.

[0015] Figure 2 This is a partial cross-sectional view of the pressure closed-loop ZR shaft module with overload protection according to an embodiment of the present invention, viewed from a bottom angle.

[0016] Figure 3 yes Figure 2 Enlarged view of point F in the middle.

[0017] Figure 4 This is a perspective view of the limiting mechanism according to an embodiment of the present invention.

[0018] Figure 5 This is a side view of the limiting mechanism according to an embodiment of the present invention.

[0019] Figure 6 This is a three-dimensional structural diagram of the limiting mechanism according to an embodiment of the present invention.

[0020] Figure 7 This is a three-dimensional structural diagram of the limiting screw according to an embodiment of the present invention.

[0021] Figure 8 This is a three-dimensional structural diagram of the pressure sensor according to an embodiment of the present invention.

[0022] Explanation of icon numbers

[0023] Base 10, Z-axis motor 11, R-axis motor 12, sliding plate 13, Z-axis motion guide rail 14, rotating shaft 15, pressure sensor 20, limiting plate 21, strain gauge 22, Z-phase limiting bolt 23, limiting mechanism 30, limiting block 31, limiting hole 32, limiting screw hole 33, limiting screw 34, deformation groove 35, locking screw hole 36. Detailed Implementation

[0024] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0025] In this embodiment of the invention, directional indicators (such as up, down, left, right, front, back, etc.) are only used to explain the relative positional relationship and movement of each component in a specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0026] Furthermore, in this invention, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features.

[0027] Please refer to Figures 1 to 8 The pressure closed-loop ZR axis module with overload protection in this embodiment of the invention includes a Z-axis motor, an R-axis motor, a sliding plate, a base, a pressure sensor, and a limiting mechanism located at the bottom of the base.

[0028] The Z-axis motor is mounted on the base, and a sliding plate connects to the Z-axis motor's mover. The R-axis motor is connected to the sliding plate via a pressure sensor.

[0029] The limiting mechanism includes a limiting block with a limiting hole in the center. The rotating shaft of the R-axis motor passes through the limiting hole. A limiting screw hole with both ends extending through the limiting hole is located on the side wall of the limiting hole. A limiting screw for limiting the rotating shaft of the R-axis motor is installed in the limiting screw hole. By rotating the limiting screw, a suitable clearance is maintained between the front end of the limiting screw and the rotating shaft. This clearance not only prevents contact and friction between the rotating shaft and the limiting screw during vertical movement, but also allows sufficient space for the deformation of the pressure sensor within its range. That is, the clearance between the limiting screw and the rotating shaft is less than or equal to the maximum range deformation of the pressure sensor. Therefore, when the rotating shaft is subjected to a violent impact exceeding the sensor's range, the limiting screw will stop the rotating shaft, preventing further displacement and deformation beyond the sensor's maximum range deformation, thus protecting the sensor from damage.

[0030] Preferably, the front end of the limiting screw is a ball head, meaning the limiting screw uses a ball-end screw. Because the ball head has only one highest point, adjusting it makes it easier to control the distance between the screw and the rotating shaft. This distance is achieved through minute adjustments by turning the screw, allowing for more accurate adjustment of the displacement (too close a distance will affect the pressure sensor's range and easily interfere with the movement of the rotating shaft in the R and Z axes). Furthermore, the ball head on the screw is rotatable. Therefore, if the rotating shaft deflects, causing contact and friction between the shaft and the ball head, or if the straightness of the rotating shaft deteriorates, this friction is rolling friction, which reduces frictional force and prevents the rotating shaft from being damaged too quickly.

[0031] Since the gap between the rotating shaft and the limiting screw is smaller than the amount of offset when the rotating shaft is subjected to the same radial force, the radial offset of the rotating shaft can be increased by the limiting screw when the rotating shaft is pushing materials under radial force, thus increasing the rigidity of the rotating shaft.

[0032] In one implementation, the limiting block has a deformation groove, and a vertically extending locking screw hole is provided on the limiting hole corresponding to the deformation groove. A locking screw is installed in the locking screw hole, and the limiting block is fixed to the bottom of the base by the locking screw. When the locking screw is tightened, the locking screw compresses the deformation groove, thereby causing the limiting block to deform, which in turn compresses the limiting screw in the limiting screw hole, preventing the limiting screw from loosening and affecting the limiting of the rotating shaft.

[0033] In one implementation, the longitudinal section of the deformation groove is T-shaped, and the bottom of the deformation groove extends through to the bottom of the limiting block, that is, the bottom of the T-shape extends to the bottom end face of the limiting block.

[0034] In one implementation, the inner side of the deformation groove communicates with the limiting screw hole, which facilitates the side wall of the limiting screw hole to press the limiting screw inside the limiting screw hole when the locking screw is tightened.

[0035] In one embodiment, there are four sets of limiting screw holes, limiting screws, locking screw holes, locking screws, and deformation grooves. The four sets of limiting screw holes are distributed at equal angles around the center of the limiting hole. The four sets of limiting screw holes are spaced 90° apart. The four sets of locking screw holes are located between two sets of limiting screw holes, respectively. The four sets of locking screw holes are distributed at equal angles around the center of the limiting hole. The four sets of locking screw holes are spaced 90° apart.

[0036] Preferably, the limiting hole is square, and the four sets of limiting screw holes are perpendicular to the four sides of the square. That is, the four sets of locking screw holes are located on the lines connecting the four corners of the square and the center of the limiting hole.

[0037] The limiting mechanism of this invention protects the rotating shaft from damage when subjected to conditions exceeding the pressure sensor's range or external impact, thus reducing economic losses. The limiting mechanism is also easy to adjust and improves the radial rigidity of the rotating shaft.

[0038] This invention allows users to easily adjust the detection range of the pressure closed-loop ZR axis module with overload protection, which can prevent large deviations of the rotating axis when subjected to lateral (XY axis direction) pressure, thus avoiding the impact on Z axis direction pressure detection and improving force control accuracy; at the same time, it will not interfere with the movement of the rotating axis (up and down, rotational movement).

[0039] In one embodiment, the pressure sensor includes a limiting plate, a strain gauge, and a strain detection unit. A sliding plate and an R-axis motor are respectively connected to both ends of the strain gauge. The limiting plate is located above the strain gauge. A Z-phase limiting bolt, spaced at a preset distance from the limiting plate, is provided on the top of the strain gauge near the R-axis motor. The strain detection unit detects the pressure on the R-axis motor by detecting the deformation of the strain gauge. The preset distance corresponds to the range of the pressure sensor, preventing overload in the Z-axis direction and protecting the strain gauge of the pressure sensor.

[0040] In practice, the strain gauge is hollowed out in the middle, and a pressure signal amplifier can be used to amplify the signal from the pressure sensor. The output of the Z-axis motor can be adjusted in real time according to the pressure value.

[0041] The pressure sensor is positioned between the R-axis motor and the sliding plate. The load on the pressure sensor consists only of the weight of the R-axis motor itself plus the pressure applied by the product being picked up. Positioning the pressure sensor close to the front of the R-axis motor ensures more accurate force control feedback and a faster response time. It also prevents excessive load on the pressure sensor during high-speed operation from generating significant inertia that could negatively impact its performance.

[0042] In one embodiment, the ZR axis module further includes a Z-axis motion guide rail, and a sliding plate is disposed on the Z-axis motion guide rail to improve the stability of the sliding plate during movement.

[0043] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A pressure closed-loop ZR shaft module with overload protection, comprising a Z-axis motor, an R-axis motor, a sliding plate and a base, the Z-axis motor is arranged on the base, and the sliding plate is connected to the mover of the Z-axis motor, characterized in that, The ZR shaft module further comprises a pressure sensor and a limiting mechanism arranged on the bottom of the base, the R-axis motor is connected to the sliding plate through the pressure sensor, the limiting mechanism comprises a limiting block, a limiting hole is formed in the middle of the limiting block, the rotating shaft of the R-axis motor passes through the limiting hole, limiting screw holes are formed in the side wall of the limiting hole and extend through both ends, limiting screws for limiting the rotating shaft of the R-axis motor are arranged in the limiting screw holes, and a gap is maintained between the front end of the limiting screw and the rotating shaft; A deformation groove is arranged in the limiting block, locking screw holes are formed in the limiting hole corresponding to the deformation groove, locking screws are arranged in the locking screw holes, and the limiting block is fixed to the bottom of the base through the locking screws; The longitudinal section of the deformation groove is T-shaped, and the bottom of the deformation groove extends to the bottom of the limiting block; The limiting screw holes, the limiting screws, the locking screw holes, the locking screws, the deformation grooves all have four groups, the four groups of limiting screw holes are distributed at equal angles around the center of the limiting hole, and the four groups of locking screw holes are respectively located between two groups of limiting screw holes.

2. The pressure closed loop ZR axle module with overload protection of claim 1, wherein, The inner side of the deformation groove is communicated with the limiting screw hole.

3. The pressure closed loop ZR axle module with overload protection of claim 1, wherein, The limiting hole is square, and the four groups of limiting screw holes are respectively perpendicular to the four sides of the square.

4. The pressure closed loop ZR axle module with overload protection of claim 1, wherein, The front end of the limiting screw is a ball head.

5. The pressure closed loop ZR axle module with overload protection of claim 1, wherein, The pressure sensor comprises a limiting plate, a strain part, and a strain detection part, the strain part is connected to the sliding plate and the R-axis motor at both ends, the limiting plate is located above the strain part, a Z-phase limiting bolt is arranged on the top of the side close to the R-axis motor of the strain part and spaced apart from the limiting plate by a preset distance, and the strain detection part detects the pressure borne by the R-axis motor by detecting the deformation amount of the strain part.

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