Active oxygen supply device, active oxygen-using treatment device, and active oxygen-using treatment method

Abstract

Provided is an active oxygen supply device capable of more stably treating the surface of an object to be treated using active oxygen. The active oxygen supply device is provided with a housing having an opening portion, and a plasma exciter and an ozone decomposing device included in the inside thereof. In the plasma exciter, a first electrode, a dielectric, and a second electrode are stacked in this order. When a voltage is applied to the plasma exciter, the plasma exciter blows an induced flow containing ozone from the first electrode in a first direction that is a direction along the surface of the dielectric. The ozone decomposing device decomposes the ozone to generate active oxygen in the induced flow. The plasma exciter and the ozone decomposing device are configured to cause the induced flow containing the active oxygen to flow out to the outside of the housing through the opening portion. An edge portion of the second electrode on a second direction side opposite to the first direction has a protruding portion extending in the second direction, and overlaps with the first electrode only in the protruding portion. The protruding portion has a width that is constant in the second direction.

Description

Technical Field

[0001] This disclosure relates to an active oxygen supply device, a treatment device using active oxygen, and a treatment method using active oxygen. Background Technology

[0002] Ultraviolet light and ozone are known as means of sterilizing items. As a solution to the problem that sterilization using ultraviolet light is limited to the parts of the object being sterilized that are irradiated by ultraviolet light, Patent Document 1 discloses a method that uses a sterilization device having an ozone supply device, an ultraviolet light generating lamp, and a stirring device to stir and sterilize active oxygen generated by irradiating ozone with ultraviolet light generated by the ultraviolet light generating lamp, and even sterilizes the shaded parts of the sample.

[0003] Citation List

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. H01-025865

[0006] Non-patent literature

[0007] Non-patent document 1: Masanobu WAKASA et al., "Magnetic Field Effect on the Photocatalytic Reaction with TiO2 Semiconductor Film", Journal of The Society of Photographic Science and Technology of Japan, 69, 4, 271-275 (2006) Summary of the Invention

[0008] The problem the invention aims to solve

[0009] The inventors investigated the sterilization performance provided by the sterilization method according to Patent Document 1 and found that the provided sterilization performance was approximately equivalent to that provided by a conventional sterilization method using only ozone. This finding is unexpected, as the sterilization ability of active oxygen is said to be substantially greater than that of ozone.

[0010] At least one aspect of this disclosure relates to an active oxygen supply apparatus that can more stably treat the surface of a workpiece with active oxygen. Another aspect of this disclosure relates to an active oxygen treatment apparatus that can more stably treat the surface of a workpiece with active oxygen. Yet another aspect of this disclosure relates to an active oxygen treatment method that enables more stable treatment of the surface of a workpiece with active oxygen.

[0011] Solution for solving the problem

[0012] At least one aspect of this disclosure provides an active oxygen supply device, comprising:

[0013] A housing having at least one opening;

[0014] Plasma actuator configured inside the housing; and

[0015] Ozone decomposition device, in which

[0016] The plasma actuator comprises a first electrode, a dielectric, and a second electrode stacked sequentially.

[0017] The first electrode is an exposed electrode disposed on a first surface that serves as a dielectric.

[0018] By applying a voltage between the first and second electrodes, the plasma actuator generates a dielectric barrier discharge from the first electrode toward the second electrode and causes an induced flow containing ozone to be blown out from the first electrode in a first direction, which is a direction along the dielectric surface.

[0019] The ozone decomposition device decomposes the ozone contained in the induced flow to generate reactive oxygen species in the induced flow, thus making the induced flow contain reactive oxygen species.

[0020] The plasma actuator and ozone decomposition device are configured to allow an induced flow containing active oxygen to exit from the opening to the outside of the housing.

[0021] When the plasma actuator is viewed from the second electrode side, a protrusion extending in the second direction is provided on the edge of the second electrode on the side opposite to the first direction, and the protrusion overlaps only with the first electrode.

[0022] The protrusion has a constant width along the second direction.

[0023] At least one aspect of this disclosure provides a treatment apparatus using active oxygen, the apparatus treating the surface of an object to be treated by using active oxygen and comprising:

[0024] A housing having at least one opening;

[0025] Plasma actuator configured inside the housing; and

[0026] Ozone decomposition device, in which

[0027] The plasma actuator comprises a first electrode, a dielectric, and a second electrode stacked sequentially.

[0028] The first electrode is an exposed electrode disposed on a first surface that serves as a dielectric.

[0029] By applying a voltage between the first and second electrodes, the plasma actuator generates a dielectric barrier discharge from the first electrode toward the second electrode and causes an induced flow containing ozone to be blown out from the first electrode in a first direction, which is a direction along the dielectric surface.

[0030] The ozone decomposition device decomposes the ozone contained in the induced flow to generate reactive oxygen species in the induced flow, thus making the induced flow contain reactive oxygen species.

[0031] The plasma actuator and ozone decomposition device are configured to allow an induced flow containing active oxygen to exit from the opening to the outside of the housing.

[0032] When the plasma actuator is viewed from the second electrode side, a protrusion extending in the second direction is provided on the edge of the second electrode on the side opposite to the first direction, and the protrusion overlaps only with the first electrode.

[0033] The protrusion has a constant width along the second direction.

[0034] At least one aspect of this disclosure provides a treatment method for treating the surface of an object by using active oxygen, the treatment method comprising:

[0035] The process of preparing a treatment device for active oxygen, in which...

[0036] Treatment devices using active oxygen include:

[0037] A housing having at least one opening;

[0038] Plasma actuator configured inside the housing; and

[0039] Ozone decomposition device, in which

[0040] The plasma actuator comprises a first electrode, a dielectric, and a second electrode stacked sequentially.

[0041] The first electrode is an exposed electrode disposed on a first surface that serves as a dielectric.

[0042] By applying a voltage between the first and second electrodes, the plasma actuator generates a dielectric barrier discharge from the first electrode toward the second electrode and causes an induced flow containing ozone to be blown out from the first electrode in a first direction, which is a direction along the dielectric surface.

[0043] The ozone decomposition device decomposes the ozone contained in the induced flow to generate reactive oxygen species in the induced flow, thus making the induced flow contain reactive oxygen species.

[0044] The plasma actuator and ozone decomposition device are configured to allow an induced flow containing active oxygen to exit from the opening to the outside of the housing.

[0045] When the plasma actuator is viewed from the second electrode side, a protrusion extending in the second direction is provided on the edge of the second electrode on the side opposite to the first direction, and the protrusion overlaps only with the first electrode.

[0046] The protrusion has a constant width along the second direction.

[0047] The processing method further includes:

[0048] A process in which a prepared treatment apparatus using active oxygen and a workpiece are positioned at a location where the surface of the workpiece is exposed to the induced flow of the active oxygen-containing induced flow from an opening; and

[0049] A process of causing an induced flow containing active oxygen to flow out from an opening and treating the surface of the object being treated by using active oxygen.

[0050] The effects of the invention

[0051] According to at least one aspect of this disclosure, an active oxygen supply apparatus can be provided that allows for more stable treatment of the surface of a workpiece using active oxygen. According to another aspect of this disclosure, a treatment apparatus can be provided that uses active oxygen to treat the surface of a workpiece using active oxygen, allowing for more stable treatment. According to yet another aspect of this disclosure, a treatment method using active oxygen can be provided that allows for more stable treatment of the surface of a workpiece using active oxygen. Attached Figure Description

[0052] [ Figure 1 The diagram shows a schematic cross-sectional view of the active oxygen supply device.

[0053] [ Figure 2 The diagram shows the configuration of a plasma actuator.

[0054] [ Figure 3 A diagram illustrating the shape of the edge of the first electrode and the relative positions of the first and second electrodes.

[0055] [ Figure 4 This diagram illustrates the relationship between the first electrode and the second electrode.

[0056] [ Figure 5 [A schematic diagram illustrating the overlap between electrodes.]

[0057] [ Figure 6 [A schematic diagram illustrating the overlap between electrodes.]

[0058] [ Figure 7 [A schematic diagram illustrating the overlap between electrodes.]

[0059] [ Figure 8 [Illustrative diagram of a variation of the shape of the protrusion of the second electrode.]

[0060] [ Figure 9 The diagram shows a schematic cross-sectional view of the active oxygen supply device. Detailed Implementation

[0061] In this disclosure, unless otherwise specified, the terms "above XX and below YY" and "XX to YY" representing numerical ranges respectively mean numerical ranges including both the lower and upper limits as endpoints. When numerical ranges are described in segments, the upper and lower limits of each numerical range can be arbitrarily combined. Furthermore, in this disclosure, for example, the phrase "selected from at least one of the groups consisting of XX, YY, and ZZ" means any of the following combinations: XX, YY, ZZ, XX and YY, XX and ZZ, YY and ZZ, and XX, YY, and ZZ.

[0062] In this disclosure, the use of active oxygen to “treat” an object includes all types of treatments that can be performed with active oxygen, such as surface modification (hydrophilization), sterilization, deodorization, and bleaching of the treated surface of the object using active oxygen.

[0063] Furthermore, according to this disclosure, the term "bacterium" as the object of "sterilization" refers to microorganisms, including fungi, bacteria, single-celled algae, viruses, and protozoa, as well as animal or plant cells (including stem cells, dedifferentiated cells, and differentiated cells), tissue cultures, fusion cells (including hybridomas) obtained through genetic engineering, dedifferentiated cells, and transformants (microorganisms). Examples of viruses include norovirus, rotavirus, influenza virus, adenovirus, coronavirus, measles virus, rubella virus, hepatitis virus, herpesvirus, and HIV. Examples of bacteria include Staphylococcus, Escherichia coli, Salmonella, Pseudomonas aeruginosa, Vibrio cholerae, Shigella, Bacillus anthracis, Mycobacterium tuberculosis, Clostridium botulinum, Clostridium tetani, and Streptococcus. Furthermore, examples of fungi include Trichophyton, Aspergillus, and Candida. Therefore, "sterilization" according to this disclosure even includes virus inactivation.

[0064] Furthermore, the reactive oxygen species in this disclosure include, for example, free radicals generated from the decomposition of ozone (O3), such as superoxide (·O2). - ) or hydroxyl radical (·OH).

[0065] Referring to the accompanying drawings, the following describes in detail, by way of example, various methods for implementing this disclosure. Note that the dimensions, materials, shapes, and relative configurations of the constituent components described in these methods will vary appropriately depending on the composition of the components to which this disclosure is applied and various conditions. In other words, the scope of this disclosure is not intended to be limited to these methods. Furthermore, in the following description, components with the same function are indicated by the same reference numerals in the drawings, and their description may be omitted.

[0066] Based on the research conducted by the inventors, the reason for the limited sterilization ability of the sterilization device according to Patent Document 1 is speculated as follows.

[0067] In Patent Document 1, ozone is irradiated with ultraviolet light to excite the ozone and generate reactive oxygen species with extremely high antibacterial power. The reactive oxygen species mentioned herein are, for example, superoxide anion radicals (O2). - It is a general term for highly reactive active oxygen species, such as hydroxyl radicals (·OH), which can immediately oxidize and decompose bacteria or viruses due to their high reactivity.

[0068] However, since ozone has an extremely high ability to absorb ultraviolet light, it can be assumed that in the sterilization device according to Patent Document 1, the generation of reactive oxygen species is limited to the vicinity of the ultraviolet light generating lamp. In other words, it can be assumed that ultraviolet light cannot satisfactorily reach ozone located far from the ultraviolet light generating lamp, and that reactive oxygen species are unlikely to be generated in locations far from the ultraviolet light generating lamp.

[0069] Furthermore, reactive oxygen species are extremely unstable, and, for example, are thought to have 10 -6 O2 has an extremely short half-life of 1 second. - and with 10 -9 The extremely short half-life of ·OH (within seconds) rapidly transforms into stable oxygen and water. Therefore, it is considered difficult to passively fill the interior of the sterilization device with reactive oxygen generated near the ultraviolet lamp. In other words, it can be considered that sterilization using the sterilization method according to Patent Document 1 is essentially carried out using ozone. Therefore, it can be considered that the sterilization performance provided by the sterilization method according to Patent Document 1 is approximately equivalent to the sterilization performance provided by conventional sterilization methods using only ozone.

[0070] Through this consideration, the inventors recognized that when treating a workpiece using active oxygen, it is necessary to more actively place the workpiece and the surface to be treated in an active oxygen atmosphere. Then, as a result of research based on this recognition, the inventors discovered that by using the active oxygen supply device and the active oxygen treatment device described in this disclosure, active oxygen can reliably reach the workpiece while maintaining its treatment capacity. As a result, the inventors found that the workpiece can be placed more actively in an active oxygen atmosphere and treated stably.

[0071] The following will use Figure 1 A provides a description of an active oxygen supply device (processing device using active oxygen) 101 according to an embodiment of the present disclosure. The active oxygen supply device 101 according to an embodiment of the present disclosure includes an ultraviolet light source 102 and a plasma exciter 103 serving as an ozone decomposition device 102 inside a housing 107 having at least one opening 106.

[0072] The ultraviolet light source 102, used as an ozone decomposition device, irradiates the induced flow 105 with ultraviolet light to generate reactive oxygen species in the induced flow 105. Figure 1 In Figure A, reference numeral 104 indicates the object being processed.

[0073] Figure 2 A shows a cross-sectional structure of an embodiment of the plasma actuator 103. The plasma actuator is a so-called DBD (Dielectric Barrier Discharge) plasma actuator (hereinafter referred to as "DBD-PA"), wherein a first electrode 203, having an exposed end face, is provided on one surface of the dielectric 201 (hereinafter also referred to as the "first surface"), and a second electrode 205 is provided on the surface opposite the first surface (hereinafter also referred to as the "second surface"). Figure 2 In Figure A, reference numeral 206 denotes a dielectric substrate, wherein the second electrode 205 is embedded along the thickness direction of the plasma exciter to prevent the formation of induced current from the end face of the second electrode. A voltage can be applied between the first and second electrodes by means of a power supply 207.

[0074] In the plasma actuator 103, a first electrode 203 and a second electrode 205, disposed between a dielectric 201, are arranged, for example, in a staggered and diagonal manner. By applying a voltage from a power source 207 between these electrodes (between the two electrodes), a dielectric barrier discharge is generated from the first electrode 203 toward the second electrode 205. Then, along the direction extending from the second electrode ( Figure 2 Arrow 208 in A) induces a jet-like flow generated by plasma 202 from the edge 204 of the first electrode 203 along the exposed portion (the portion not covered by the first electrode) 201-1 of the first surface of the dielectric 201.

[0075] Simultaneously, an air intake flow is generated from the space inside the container toward the electrode. Electrons in the surface plasma 202 collide with oxygen molecules in the air, causing the oxygen molecules to dissociate and produce oxygen atoms. The resulting oxygen atoms collide with undissociated oxygen molecules to produce ozone. As a result, through the action of the jet-like flow generated by the surface plasma 202 and the air intake flow, an induced flow 105 containing a high concentration of ozone is generated from the edge 204 of the first electrode 203 along the surface of the dielectric 201.

[0076] The plasma exciter 103 and the ozone decomposition device 102 are configured to allow an induced flow 105 containing active oxygen to flow out from the opening 106 to the outside of the housing 107 to supply the processing surface 104-1 of the workpiece 104.

[0077] In other words, in the plasma actuator, a first electrode 203, a dielectric 201, and a second electrode 205 are stacked sequentially, and the first electrode 203 is an exposed electrode disposed on a first surface of the dielectric 201. When a voltage is applied between the first electrode 203 and the second electrode 205, the plasma actuator generates a dielectric barrier discharge from the first electrode 203 toward the second electrode 205 and induces a current from the first electrode 203 along a first direction that is one direction along the first surface of the dielectric 201. Figure 2 (The direction of arrow 208 in A) is blown out.

[0078] More specifically, a dielectric barrier discharge is generated from the edge portion 204 on one side of the first electrode 203 toward the second electrode 205, and an induced flow as a unidirectional jet flows from the edge portion 204 on one side of the first electrode 203 along the first surface of the dielectric 201 in a first direction. Figure 2 (The direction of arrow 208 in A) is blown out.

[0079] Meanwhile, in the cross section along the thickness direction of the plasma exciter, there exists a second electrode 205 extending in the direction of the induced flow (first direction).

[0080] More specifically, for example, the plasma actuator has a dielectric 201, and when a cross-section along the thickness direction of the plasma actuator is observed, the first electrode 203 and the second electrode 205 are obliquely arranged relative to each other across the dielectric 201 along the thickness direction of the plasma actuator. The first electrode 203 is configured to cover a portion of the first surface of the dielectric 201, and the first surface of the dielectric has an exposed portion 201-1 not covered by the first electrode 203.

[0081] Figure 2B is a view of the plasma actuator from the first surface side of the dielectric. At least a portion of the exposed portion 201-1 overlaps with the second electrode 205, shown by the dashed line. Consequently, the overlap between the exposed portion and the second electrode corresponds to... Figure 2 The region in B is formed by the dotted line representing electrode 205 and the edge portion 204.

[0082] Furthermore, the edge portion of the second electrode on the side opposite to the first direction has a protrusion extending in the second direction. The first electrode and the second electrode overlap only on the protrusion.

[0083] By applying a voltage between the first and second electrodes, in a cross-section along the thickness direction ( Figure 2 In A), an ozone-containing induced flow is generated from the edge portion 204 on the first direction side of the first electrode 203 along the exposed portion of the dielectric that overlaps with the second electrode 205.

[0084] The induced flow allows for the easy supply of high concentrations of ozone to a specific location, for example, by jetting along the wall of the exposed portion 201-1. The length of the exposed portion 201-1 along the induced flow direction (i.e., the length from the edge portion 204 on the first direction side of the first electrode to the end of the first surface of the dielectric) is not particularly limited, but is preferably 0.1 to 50 mm, more preferably 0.5 to 20 mm, or even more preferably 1.0 to 10 mm. The longer the length, the longer the plasma 202 extends, and the longer the induced flow reaches. Simultaneously, when the length is extremely long, the distance to the opening 106 increases. Therefore, the above range is preferred.

[0085] The ultraviolet light source 102, used as the ozone decomposition device 102, irradiates the induced flow 105 with ultraviolet light to decompose the ozone in the induced flow 105 and generate reactive oxygen species (hereinafter also referred to as "ROS", an abbreviation for reactive oxygen species) in the induced flow. Figure 1 As shown in A, the plasma exciter 103 and the ultraviolet light source 102 are configured to cause an induced flow 105 containing active oxygen to flow out from the opening 106 to the outside of the housing 107 to supply the processing surface 104-1 of the workpiece 104.

[0086] Note that in Figure 1 In step A, ultraviolet light from ultraviolet light source 102 also irradiates the surface of the workpiece 104. In this case, even if the ozone in the induced flow 105 is not completely decomposed into active oxygen in the active oxygen supply device, the ozone that has reached the surface of the workpiece 104 will be decomposed in situ by ultraviolet light to generate active oxygen, thus improving the treatment efficiency.

[0087] However, in the active oxygen supply device according to this disclosure, irradiating the workpiece with ultraviolet light from an ultraviolet light source is not a necessary component. For example, as Figure 1 As shown in B, plasma actuators with such a configuration, where the ultraviolet light source 102 cannot be directly visually confirmed from the opening 106, are also within the scope of this disclosure. According to... Figure 1 In the plasma actuator of B, as a result of the decomposition of ozone by ultraviolet light from ultraviolet light source 102, an induced flow 105-1 containing active oxygen flows out from opening 106 to supply to the processing surface 104-1 of the workpiece 104.

[0088] In other words, in the active oxygen supply device according to the embodiment of the present disclosure, an ozone-containing induced flow 105 from the plasma exciter (plasma generating device) 103 flows out from the opening 106 to the outside of the housing 107 to supply the processing surface 104-1 of the workpiece 104, and the ozone decomposition device 102 decomposes the ozone (e.g., the ultraviolet light source 102 irradiates the induced flow 105 with ultraviolet light) to generate active oxygen in the induced flow 105, thereby actively supplying active oxygen to the area near the processing surface 104-1, specifically a spatial area at a height of up to, for example, about 1 mm above the processing surface (hereinafter also referred to as the "surface area").

[0089] Therefore, active oxygen can be supplied to the surface of the workpiece before it is converted into oxygen and water. As a result, the treated surface 104-1 of the workpiece 104 is reliably treated with active oxygen.

[0090] Figure 3 A is a plan view of the plasma actuator according to an embodiment of the present disclosure, observed from the side of the first electrode 203. Figure 3 In A, the X-axis is an axis parallel to the direction (first direction) in which the induced flow 105 is blown out from the plasma actuator 103, and the first direction is the +X direction. Simultaneously, the Y-axis is an axis perpendicular to the X-axis and extending along the surface of the dielectric, extending to... Figure 3 The direction to the left of A is the +Y direction. Furthermore, the Z-axis, perpendicular to the plane of the paper, is the axis along the thickness direction of the plasma actuator, as shown below. Figure 3 A cross-sectional view of the plasma actuator shown in Figure A. Figure 3 As shown in B, the direction extending toward the first electrode 203 is the +Z direction.

[0091] A first electrode 203 is disposed on a first surface of dielectric 201 to cover a portion of the surface of dielectric 201. Figure 3 C is observed from the second electrode side. Figure 3 A planar view obtained from the plasma actuator shown in Figure A. Figure 3 As shown in Figure C, the edge portion of the second electrode 205 on the -X direction side (the second direction opposite to the first direction) is provided with a protrusion 301 extending along the -X direction (the second direction) and having a length (width) along the Y-axis direction, wherein the length (width) along the Y-axis direction is constant along the -X direction (constant along the X-axis).

[0092] Specifically, the portion having a rectangular wave shape with a constant amplitude along the first direction and corresponding to the width (twice the amplitude) 302 of the vibration of this waveform is a convex portion. Note that in Figure 3 In C, to facilitate the explanation of the positional relationship between the second electrode 205 and the first electrode, the first electrode, located on the opposite side of the dielectric 201, is represented by a dotted line.

[0093] Figure 4 A is Figure 3 The perspective view shown in A is a plan view, that is, a view assuming that the first electrode 203 and the dielectric 201 are transparent, in order to facilitate the illustration of the positional relationship between the first electrode 203 and the second electrode 205.

[0094] like Figure 3 C Figure 4 A and Figure 4 As shown in Figure B, the edge portion 204 on the +X direction side of the first electrode 203 overlaps with the second electrode only at the protrusion 301 of the second electrode 205. Specifically, as... Figure 4 A and Figure 4 As shown in Figure B, the distance 401 between the front end portion of the -X direction side (second direction side) of the protrusion 301 of the second electrode 205 and the edge portion 204 of the +X direction side (first direction side) of the first electrode 203 is greater than 0 μm. Furthermore, the distance 403 between the edge portion 204 of the +X direction side (first direction side) of the first electrode 203 and the non-protruding portion (the portion closest to the first direction side that serves as the base of the protrusion) 400 of the second electrode 205 on the -X direction side is also greater than 0 μm.

[0095] When a voltage is applied between the first electrode 203 and the second electrode 205, the strongest dielectric barrier discharge occurs at the portion of the shortest distance between the two electrodes. For example, as Figure 5 A and Figure 5 As shown in Figure B, when each of the edge portion 204 of the first electrode 203 and the edge portion 501 on the -X direction side of the second electrode has a straight shape along the -Y- to +Y direction, when the edge portion 204 and the edge portion 501 are separated from each other, in order to generate a dielectric barrier discharge, the voltage applied between the two electrodes needs to be relatively increased. Note that the case where the edge portion 204 and the edge portion 501 are separated from each other can also be referred to as the case where the overlap is negative.

[0096] At the same time, such as Figure 6 A and Figure 6 As shown in B, when the edge portion 204 overlaps with the edge portion 501 without a protrusion, that is, when the overlap amount is positive, the electrostatic capacitance of the plasma actuator may increase, thereby reducing the utilization efficiency of the energy applied between the two electrodes for induced flow generation.

[0097] like Figure 7 A and Figure 7 As further shown in B, the energy utilization efficiency for induced flow generation is highest when edge portion 204 and edge portion 501 coincide with each other along the X-axis direction. However, adjusting the positions of the first electrode 203 and the second electrode 205 to make edge portion 204 and edge portion 501 coincide with each other may limit the speed during the production process of the plasma actuator.

[0098] Furthermore, in the plasma actuator according to this disclosure, when the plasma actuator is viewed from the second electrode side, the edge portion of the second electrode 205 on the -X direction side (the second direction side opposite to the first direction) is provided with a protrusion 301 extending in the -X direction. In addition, the edge portion 204 of the second electrode 205 and the edge portion 204 of the first electrode 203 on the +X direction side overlap only with the protrusion 301 of the second electrode 205.

[0099] By providing such a structure, and Figure 6 A and Figure 6 Compared to the configuration shown in B, the increase in electrostatic capacitance of the plasma actuator can be suppressed. Simultaneously, induced current is mainly generated at the overlap between the edge 204 of the first electrode 203 and the protrusion of the second electrode 205. Therefore, as long as the width of the protrusion 301 remains constant along the -X direction extending from the protrusion, the length of the dielectric barrier discharge and the amount of induced current generated remain almost unchanged even when the overlap 401 between the first electrode 203 and the second electrode 205 varies. Furthermore, the power consumption variation is also small.

[0100] As a result, in the production of plasma actuators, compared with the provision based on Figure 7 A and Figure 7 Compared to configuration B, strict control over the positional relationship between the first electrode 203 and the second electrode 205 is not required. Furthermore, a longer processing width (length along the Y-axis) can be processed with low power consumption.

[0101] As a result, using the active oxygen supply device according to this disclosure, it is believed that active oxygen can be supplied to the treated material more efficiently and stably, and the treatment efficiency of the treated material can be further improved.

[0102] In the plasma actuator according to this embodiment, the length 405 of the protrusion is not particularly limited, but is preferably 100 μm or more and 10,000 μm or less, or particularly preferably 300 μm or more and 3,000 μm or less.

[0103] The overlap 401 between the first and second electrodes exceeds 0 μm and is less than the length 405 of the protrusion. A preferred lower limit is, for example, 50 μm.

[0104] Furthermore, the distance 403 between the non-convex portion 400 (the protrusion closest to the +X direction side) of the edge portion on the -X direction side of the second electrode 205 and the edge portion 204 of the first electrode is greater than 0 μm and less than the length 405 of the protrusion. In particular, it is preferable to set the distance 403 to a value of 50 μm or more and 5000 μm or less.

[0105] In the plasma actuator 103, the shape of the protrusion at the edge of the second electrode is not limited to, for example... Figure 3 The rectangle shown in C has four 90° corners. In other words, as long as the width of the convex part along the Y-axis is equal along the -X direction, its shape is not particularly restricted. For example, ... Figure 8 As shown in A, we can list quadrilaterals whose shape includes two pairs of opposite sides that are parallel to each other and two pairs of opposite angles that are equal to each other. As another example, such as... Figure 8 As shown in B, cases where the shape has curved edges extending along the -X direction can be listed.

[0106] The shape and number of protrusions can be appropriately set based on the relationship between the expected induced current generation and power consumption, and are not particularly limited. From the viewpoint of achieving stable discharge throughout the edge portion 204, it is preferable to arrange protrusions continuously, and more preferably to arrange multiple protrusions with substantially the same shape regularly. Substantially the same shape means that they do not need to be exactly the same, but only need to achieve the same degree of similarity without impairing the effects of this disclosure.

[0107] like Figure 4 As shown in Figure A, it is preferable to have multiple protrusions, with the bases of the multiple protrusions existing on the same line segment (Lb) and the tops of the multiple protrusions existing on the same line segment (Lt). Furthermore, it is preferable that the line segment Lt connecting the tops of the multiple protrusions is parallel to the edge 204 of the first electrode 203. More preferably, the line segment Lb connecting the bases of the multiple protrusions, the line segment Lt connecting the tops of the multiple protrusions, and the edge 204 of the first electrode 203 are parallel to each other. This facilitates achieving a more stable discharge.

[0108] Preferably, the top of the protrusion has a straight shape. Preferably, the protrusion has a rectangular shape. More preferably, the protrusion has a rectangular wave shape.

[0109] The protrusion only needs to have a constant width along the second direction. For example... Figure 4 A, Figure 8 A and Figure 8 As shown in B, the protrusions preferably have a periodic and regular waveform shape. The wavelength of each waveform shape is not particularly limited, but is preferably, for example, 0.1 mm to 10 mm, or more preferably 0.5 mm to 5 mm. The amplitude is also not particularly limited, but is preferably, for example, 0.1 mm to 10 mm, or more preferably 0.5 mm to 5 mm.

[0110] like Figure 4 As shown in Figure A, it is assumed that the sum of the length (length along the direction perpendicular to the second direction) 406 of the width of the edge portion of the protrusion 301 facing the second direction (-X direction) on the second direction side of the second electrode is L. 1 Assume that the length of the edge portion of the second electrode on the second direction side, in the direction perpendicular to the second direction, is L. 2 At this time, L 1 / L 2 The value can be appropriately set based on the relationship between the expected amount of induced flow generation and power consumption, and there are no particular limitations, but it is preferred, for example, to be about 0.2 to 0.8, or more preferably to be about 0.3 to 0.7.

[0111] like Figure 4 A and Figure 4 As shown in Figure B, the edge portion 205-2 on the +X direction side of the second electrode 205 exists in front of the edge portion 204 on the +X direction side of the first electrode 203 along the +X direction. The presence of the second electrode extending in the +X direction in front of the edge portion 204 of the first electrode 203 can further improve the directivity of the induced flow 105 in the +X direction.

[0112] Furthermore, the edge portion 204 on the first direction side of the first electrode 203 preferably has a straight shape extending in a direction perpendicular to the first direction and along the first surface of the dielectric (i.e., the Y-axis direction). This further stabilizes the discharge and the generation of the ozone-containing induced flow.

[0113] There are no particular restrictions on the materials used to constitute the first and second electrodes, as long as the materials have excellent conductivity. For example, metals such as copper, aluminum, stainless steel, gold, silver, or platinum, plated or vapor-deposited metals, conductive carbon materials such as carbon black, graphite, or carbon nanotubes, and composite materials obtained by mixing conductive carbon materials with resins, etc., can be used. The materials constituting the first electrode and the materials constituting the second electrode can be the same or different.

[0114] From the viewpoint of avoiding electrode corrosion and ensuring uniform discharge, the material constituting the first electrode is preferably aluminum, stainless steel, or silver. For the same reason, the material constituting the second electrode is also preferably aluminum, stainless steel, or silver.

[0115] The shapes of the first and second electrodes can be flat, linear, or needle-shaped without particular limitation. The first electrode is preferably flat. Similarly, the second electrode is preferably flat. When at least one of the first and second electrodes has a flat shape, the aspect ratio (length of the longer side / length of the shorter side) of the flat plate is preferably 2 or more.

[0116] There are no particular limitations on the dielectric material, as long as it is a material with high electrical insulation properties. For example, resins such as polyimide, polyester, fluoropolymers, silicone resins, acrylic resins, and phenolic resins, glass, ceramics, and composite materials obtained by mixing these with resins can be used. From the viewpoint of strength and insulation, ceramics, glass, or silicone resins are preferred. In particular, flexible silicone resins can increase the degree of freedom in the shape of the plasma actuator.

[0117] Provided that the first and second electrodes are electrically insulated from each other, the shorter the minimum distance between them, the more likely dielectric barrier discharge will occur. Therefore, the thickness of the dielectric portion between the first electrode 203 and the second electrode 205 is preferably small enough that it will not cause dielectric breakdown when a voltage is applied to the two electrodes. Specifically, when using an AC voltage of 100 to 100 kVpp as the applied voltage, the thickness of the dielectric portion can preferably be set to 10 μm to 1000 μm, or more preferably 10 μm to 200 μm. Meanwhile, the shortest distance between the first and second electrodes is preferably less than 200 μm, or more preferably 100 μm to 200 μm.

[0118] Regardless of whether the electrode is the first or second electrode, there is no particular limitation on the electrode thickness, but it can be set from 10 μm to 1000 μm. When the thickness is greater than 10 μm, the resistance decreases, and plasma is likely to be generated. When the thickness is less than 1000 μm, electric field concentration easily occurs, resulting in easy generation of plasma.

[0119] Regardless of whether the electrode is the first electrode or the second electrode, there is no particular limitation on the length (electrode width) of the electrode along the first direction (X-axis direction), but it can be set to more than 1000 μm.

[0120] When the edge of the second electrode is exposed, plasma may also be generated from the edge of the second electrode, forming an induced flow toward the opposite side of the induced flow 105 originating from the first electrode. In the active oxygen supply device according to this embodiment, the ozone concentration in the internal space of the active oxygen supply device, outside the surface area of ​​the workpiece, is preferably set as low as possible. Furthermore, it is preferable not to generate gas flow within the container that might disrupt the induced flow 105. Therefore, it is preferable not to generate an induced flow originating from the second electrode. Therefore, as Figure 2 A and Figure 3 As shown in B, the second electrode 205 is preferably covered by a dielectric such as a dielectric substrate 206 or embedded in the dielectric 201 to prevent plasma from being generated from the edge of the second electrode.

[0121] The second electrode only needs to be embedded to a degree that prevents plasma generation from its edges, and for example, a portion of the surface of the second electrode may be exposed, with the exposed surface of the second electrode forming the same plane as the dielectric substrate 206 or the dielectric 201. Preferably, the edges of the second electrode are covered by the dielectric substrate 206 or the dielectric 201. Therefore, for example, the plasma actuator is preferably an SDBD (single dielectric barrier discharge) plasma actuator.

[0122] An induced flow 105 containing a high concentration of ozone flows in a direction that is the direction of the jet-like flow caused by surface plasma extending from the edge 204 of the first electrode 203 along the exposed portion 201-1 of the first surface of the dielectric 201; that is, the direction in which it extends from the edge 204 of the first electrode 203 along the exposed portion 201-1 of the first surface of the dielectric. The induced flow is a gaseous flow containing a high concentration of ozone, and its velocity is approximately several meters per second to tens of meters per second.

[0123] There are no particular limitations on the voltage applied between the first electrode 203 and the second electrode 205 of the plasma actuator, as long as the voltage in the embodiment causes the plasma actuator to generate plasma. This voltage can be a DC voltage or an AC voltage, but an AC voltage is preferred. Using a pulsed voltage is also a preferred embodiment.

[0124] Furthermore, the amplitude and frequency of the voltage can be appropriately set to adjust the flow rate of the induced flow and the ozone concentration in the induced flow. In this case, an appropriate choice can be made from the following perspectives: the ozone concentration generated in each induced flow according to the effective active oxygen concentration or effective active oxygen quantity required for the treatment purpose, or the generated active oxygen being supplied to the surface area of ​​the treated object while maintaining the effective active oxygen concentration or effective active oxygen quantity according to the treatment purpose.

[0125] For example, the amplitude of the voltage can be set to 1kV to 100kV. In addition, the frequency of the voltage can preferably be set to 1kHz or higher, or more preferably to 10kHz to 100kHz.

[0126] When using AC voltage as the voltage, there are no particular restrictions on the waveform of the AC voltage, and sine waves, square waves, or triangle waves can be used, but from the viewpoint of voltage rise rate, square waves are preferred.

[0127] The duty cycle of the voltage can also be appropriately selected, but a higher voltage rise rate is preferred. Preferably, the voltage is applied such that it rises from the bottom of the wavelength amplitude to its peak at a rate of 4,000,000 V / s or higher.

[0128] Note that it is preferable to set the value (voltage / film thickness) obtained by dividing the amplitude of the voltage to be applied between the first electrode 203 and the second electrode 205 by the film thickness of the dielectric 201 to 10 kV / mm or more.

[0129] Ozone Decomposition Device

[0130] The active oxygen supply device or active oxygen treatment device includes an ozone decomposition device 102. The ozone decomposition device decomposes the ozone contained in the induced flow to generate active oxygen in the induced flow. As an ozone decomposition device, an ozone decomposition device that can act on and decompose the ozone contained in the induced flow can be used. As an ozone decomposition device, an ozone decomposition device that can decompose ozone without disturbing the induced flow is preferred.

[0131] Preferably, the ozone decomposition device is at least one device selected from the group consisting of: an ultraviolet light source for irradiating an ozone-containing induced flow with ultraviolet light to generate active oxygen in the induced flow; a heating device for heating the ozone-containing induced flow to generate active oxygen in the induced flow; and a humidifying device for humidifying the ozone-containing induced flow to generate active oxygen in the induced flow. The ozone decomposition device may also be a combination thereof. For example, the ozone decomposition device may be a device that heats the induced flow while irradiating it with ultraviolet light, or it may be a device that humidifies the interior of the housing while irradiating and heating the induced flow with ultraviolet light. More preferably, the ozone decomposition device is an ultraviolet light source. Descriptions of each device are given below.

[0132] <Ultraviolet Light Sources and Ultraviolet Light>

[0133] There are no particular restrictions on the ultraviolet (UV) light source, as long as it can irradiate UV light that can excite ozone and generate reactive oxygen species. There are also no particular restrictions on the UV light source, as long as it has the wavelength and illuminance required to excite ozone and achieve the effective reactive oxygen concentration or amount required for the treatment purpose.

[0134] For example, the peak value of the light absorption spectrum of ozone is 260 nm, so the peak wavelength of ultraviolet light is preferably 220 nm to 310 nm, more preferably 253 nm to 285 nm, or even more preferably 253 nm to 266 nm.

[0135] As specific ultraviolet light sources, low-pressure mercury lamps, cold cathode tube ultraviolet lamps (UV-CCL), or ultraviolet LEDs can be used, where mercury is encapsulated in quartz glass along with an inert gas such as argon or neon. The wavelengths of low-pressure mercury lamps and cold cathode tube ultraviolet lamps can be appropriately selected from 254 nm, etc. Meanwhile, from the viewpoint of output performance, the wavelengths of ultraviolet LEDs can be appropriately selected from 265 nm, 275 nm, and 280 nm, etc.

[0136] <Heating device>

[0137] The heating device 102 is not particularly limited, as long as it can provide thermal energy to stimulate ozone in the induced flow and generate active oxygen. Since the thermal decomposition of ozone begins at about 100°C, a device that can heat the induced flow to about 120°C is preferred. However, when the temperature exceeds 120°C, the treated material may suffer thermal degradation, such as melting or decomposition; therefore, the temperature is preferably below 200°C. The temperature is preferably between 100 and 140°C, or more preferably between 110 and 130°C.

[0138] There are no particular limitations on the heating device, and various types can be used, such as ceramic heaters, cylindrical heaters, sheathed heaters, electric heaters, or oil heaters. In the case of devices including metal-based heating elements, the heating element is preferably made of a material with excellent oxidation resistance, such as nickel-chromium alloys or tungsten. Preferably, a cylindrical heater is used.

[0139] Humidifier

[0140] The humidification device 102 is not particularly limited, as long as it can generate active oxygen in the induced flow by humidifying the interior of the housing to contain water and by decomposing ozone in the induced flow with water. Humidification as referred to herein means supplying water to an object, and the form of water is not particularly limited and can be at least one selected from the group consisting of gases, liquids, and solids. Known water can be optionally used as the water supplied, and substances other than water can also be included.

[0141] There are no particular restrictions on humidification devices, and devices such as vaporization humidification devices or mist humidification devices can be used.

[0142] Preferably, the humidification device has directional properties (hereinafter also referred to as directional) regarding the direction of water supply, thereby not increasing the humidity near the plasma exciter. By having directional properties, the humidification device can effectively humidify the vicinity of the induced flow or the surface of the object being treated without increasing the humidity near the plasma exciter.

[0143] To make the humidifier directional, known methods can be appropriately used. For example, methods can be used to deliver water by setting up a fan and thereby generating airflow, or by using an air pump or the like to apply appropriate pressure to the water so that the water is ejected in the target direction. In order to prevent the flow of the induced flow from being disturbed, it is preferable to point the humidifier in the same direction as the direction of each induced flow (first direction).

[0144] <Configuration of plasma actuator, ozone decomposition device and treated material>

[0145] In the active oxygen supply device 101, the location of the plasma exciter 103 that generates an induced flow containing ozone is not particularly limited, as long as the plasma exciter is configured such that the induced flow 105, maintained at an effective active oxygen concentration or amount according to the treatment purpose, flows out from the opening to the outside of the housing and is supplied to the surface of the object being treated, due to the ultraviolet light emitted from the ultraviolet light source 102 (which is an ozone decomposition device). This also applies to cases where the ozone decomposition device is a heating device or a humidification device.

[0146] For example, the plasma actuator and ozone decomposition device can be appropriately configured so that the induced flow 105 containing the generated active oxygen is supplied to the surface of the object being treated over the shortest distance.

[0147] Optionally, for example, the plasma exciter may be suitably configured such that the processing surface 104-1 of the workpiece is included on the extension line of the edge portion 204 on the first direction side of the first electrode 203 of the plasma exciter along the direction extending from the first surface of the dielectric (its exposed portion 201-1). For example, the extension line preferably contacts the processing surface 104-1.

[0148] Furthermore, the extension line of the first electrode 203 of the plasma actuator extending along the first surface of the dielectric in the same direction (same as the +X direction) preferably faces the opening. This allows the induced flow to easily exit from the opening to the outside of the housing.

[0149] Assuming that when the opening of the active oxygen supply device is vertically downward, the narrow angle formed between the extension line 201-1-1 of the direction extending from the edge of the first electrode of the plasma actuator along the exposed portion 201-1 of the first surface of the dielectric and the horizontal plane (a plane perpendicular to the vertical direction) is θ (hereinafter also referred to as the plasma actuator incident angle or PA incident angle, see [link]). Figure 9A). There are no particular limitations on the narrow angle θ, as long as the narrow angle θ is an angle that allows for the active supply of induced flow to the surface area of ​​the object to be treated while maintaining an effective concentration or amount of active oxygen according to the treatment purpose, or an angle that allows for treatment with active oxygen, but preferably 0° to 90°, or more preferably 30° to 70°.

[0150] By configuring the plasma actuator and ozone decomposition device as described above, an induced flow containing active oxygen and having a certain flow rate can be locally supplied to a region near the surface of the workpiece, or the region can be treated with active oxygen. Furthermore, the induced flow exits from the opening, flows along the surface of the workpiece, and the portion of the workpiece being treated, excluding the portion facing the opening, is also exposed to the induced flow containing active oxygen. This allows for the treatment of a wider range of surfaces 104-1 with active oxygen.

[0151] Furthermore, the plasma exciter can be appropriately configured such that the processing surface 104-1 of the workpiece is included along the extension line of the first direction (the direction in which the induced flow is blown out). It is assumed that when the opening of the active oxygen supply device is vertically downward, the narrow angle formed between the first direction (the direction in which the induced flow is blown out) and the horizontal plane (a plane perpendicular to the vertical direction) is θ'. The angle θ' is preferably 0° to 90°, or more preferably 30° to 70°.

[0152] There are no other special restrictions on ozone decomposition devices, as long as the ozone decomposition device is configured to allow the generation of active oxygen in the induced flow and to allow the surface of the object to be treated to be treated while maintaining an effective concentration or amount of active oxygen according to the treatment purpose.

[0153] As described above, an ozone-containing induction stream is actively supplied to the area near the surface of the object being treated. Furthermore, when the ozone decomposition device is an ultraviolet light source, reactive oxygen species can be generated in the induction stream by irradiating it with ultraviolet light. Therefore, by irradiating the induction stream with ultraviolet light, ozone is excited, causing the induction stream in a state of generating reactive oxygen species to be actively supplied to the surface of the object being treated, and also significantly increasing the concentration or amount of reactive oxygen species on the surface of the object being treated.

[0154] There are no other particular restrictions on the relative positions of the ozone decomposition device and the plasma exciter, as long as the ozone decomposition device and the plasma exciter are configured to allow the generation of active oxygen in the induced flow and to allow the surface of the object to be treated to be treated while maintaining an effective concentration or amount of active oxygen according to the treatment purpose.

[0155] Furthermore, since the distance between the ozone decomposition device and the plasma actuator varies depending on the treatment objective, it is impossible to specify the distance in a general way. For example, the distance between the surface of the dielectric of the plasma actuator facing the ozone decomposition device and the ozone decomposition device is preferably set to 10 mm or less, or more preferably 4 mm or less. However, it is not necessary to place the plasma actuator within approximately 10 mm of the ozone decomposition device. As long as factors that enable ozone decomposition, such as ultraviolet irradiance or wavelength, are considered, and the active oxygen in the induced flow has an effective concentration according to the treatment objective, the distance between the ozone decomposition device and the plasma actuator is not particularly limited.

[0156] Optionally, it is also a preferred embodiment to provide a moving device for at least one of the ozone decomposition device and the plasma actuator, and to make at least one of the ozone decomposition device and the plasma actuator movable so as to achieve a uniform degree of ozone decomposition.

[0157] The relative positions of the active oxygen supply device and the treated object are suitable as long as at least one of the active oxygen supply device and the treated object is configured such that active oxygen is generated in the induced flow and the surface of the treated object is exposed to the induced flow that maintains an effective concentration or amount of active oxygen according to the treatment purpose.

[0158] When the ozone decomposition device is an ultraviolet light source, the ultraviolet light source can be positioned at a location where the surface of the object being treated can be irradiated by ultraviolet light or at a location where the surface of the object being treated cannot be irradiated by ultraviolet light. Even when the surface of the object being treated cannot be irradiated by ultraviolet light from the ultraviolet light source, the treatment device using active oxygen according to this embodiment can treat the surface being treated by exposing the surface to be treated to active oxygen in the induced flow.

[0159] Similarly, in the same manner as when the ozone decomposition device is a heating device, the heating device can be positioned at a location where the surface of the object being treated can be heated or at a location where the surface of the object being treated cannot be heated.

[0160] In sterilization processes using ultraviolet light, only the surface irradiated by the ultraviolet light is sterilized. However, in sterilization processes using the active oxygen supply device according to this disclosure, bacteria present in locations accessible to active oxygen can be sterilized. Therefore, for example, even bacteria present between fibers that are difficult to sterilize using external ultraviolet irradiation can be sterilized.

[0161] Simultaneously, when the ultraviolet light source is configured to irradiate the surface of the object to be treated, which is placed outside the housing, through an opening, undecomposed ozone present in the induced flow can be decomposed in situ on the treated surface, thereby generating reactive oxygen species. As a result, the degree and efficiency of treatment can be further improved.

[0162] In this case, there are no particular limitations on the ultraviolet irradiance at the surface of the object being treated or in the opening. However, even if, for example, it is at the surface of the object being treated or in the opening, it is preferable to set the ultraviolet irradiance to decompose the ozone contained in the induced flow, generate active oxygen in the induced flow, and provide an effective concentration or amount of active oxygen according to the treatment purpose. Specifically, for example, a preferred example of the ultraviolet irradiance at the surface of the object being treated or in the opening is 40 μW / cm². 2 The above, preferably 100 μW / cm 2 Above, 400 μW / cm is even better. 2 The above, or particularly preferred, is 1000 μW / cm 2 That's all. There's no specific upper limit for illuminance, but it can be set to, for example, 10000 μW / cm². 2 the following.

[0163] Meanwhile, the distance between the ozone decomposition device and the surface of the object being treated only needs to be adjusted according to the treatment purpose and is not particularly limited. However, considering the lifetime of the active oxygen contained in the induced flow, it is preferable to set it to, for example, 10 mm or less, or more preferably 4 mm or less. However, it is not necessary to position the object being treated such that the surface of the object being treated is within approximately 10 mm of the ozone decomposition device. As long as the active oxygen in the induced flow can be set to an effective concentration according to the treatment purpose by incorporating factors that enable ozone decomposition, such as ultraviolet irradiance, the distance between the ozone decomposition device and the object being treated is not particularly limited.

[0164] Under conditions where the ozone in the induced flow is not decomposed by the ozone decomposition device, the ozone generation rate per unit time in the plasma exciter is preferably 15 μg / min or more, or more preferably 30 μg / min or more. There is no particular upper limit to the ozone generation rate, but it is, for example, 1000 μg / min or less. In other words, the preferred range is about 15 μg / min or more and 1000 μg / min or less.

[0165] The induced flow rate only needs to be, for example, a speed that allows the generated active oxygen to be actively supplied to the surface area of ​​the object being treated while maintaining an effective active oxygen concentration or effective active oxygen amount according to the treatment purpose, the speed being, for example, about 0.01 m / s to 100 m / s as described above.

[0166] As described above, the ozone concentration and flow rate of the induced flow generated from the plasma exciter can be controlled by the thickness or material of the electrodes and dielectric, or by the type, amplitude or frequency of the voltage to be applied.

[0167] <Shell and openings>

[0168] The active oxygen supply device disclosed herein includes a housing 107 having at least one opening 106, and an ozone decomposition device 102 and a plasma exciter 103, each disposed inside the housing.

[0169] There are no particular limitations on the opening, as long as the opening, in the embodiment, allows the induced flow 105 containing active oxygen generated by the plasma actuator 103 and the ozone decomposition device 102 to flow out to the outside of the housing 107. The size of the opening, the position of the opening, and the relative position of the opening to the object being treated can be appropriately selected so that, for example, the generated active oxygen can be actively supplied to the surface area of ​​the object being treated while maintaining an effective active oxygen concentration or effective active oxygen amount according to the treatment purpose.

[0170] Furthermore, the distance between the plasma actuator and the opening is preferably such that the distance between the plasma actuator and the workpiece is short, so that the active oxygen in the induced flow can be used more effectively for the intended treatment. Therefore, it is preferable to position the plasma actuator closer to the opening. To protect the plasma actuator, it is also preferable to position it backward from the opening. For example, it is preferable to position the plasma actuator on the inner wall of the housing such that the end of the plasma actuator closer to the opening is 0.5 mm to 1.5 mm from the edge of the opening in the inner wall of the housing.

[0171] The active oxygen supply device disclosed herein can be used not only for sterilization of the treated material, but also for all applications implemented by supplying active oxygen to the treated material. For example, the active oxygen supply device disclosed herein can also be used for deodorization of the treated material, bleaching of the treated material, or hydrophilic surface treatment of the treated material.

[0172] Furthermore, the treatment device using active oxygen disclosed herein can not only be used for sterilization of the treated object, but also for, for example, deodorization of the treated object, bleaching of the treated object, or hydrophilic surface treatment of the treated object.

[0173] This disclosure also provides a method for treating the surface of an object with active oxygen, the method comprising:

[0174] The steps for preparing the above-mentioned treatment device using active oxygen;

[0175] A process in which a prepared treatment apparatus using active oxygen and a workpiece are positioned relative to each other, exposing the surface of the workpiece to the induced flow as the induced flow exits from the opening; and

[0176] A process of causing an induced flow containing active oxygen to flow out from an opening to treat the surface of a workpiece with active oxygen.

[0177] Note that in this disclosure, "effective active oxygen concentration or effective active oxygen quantity" refers to the concentration or quantity of active oxygen required to achieve purposes such as sterilization, deodorization, bleaching, or hydrophilization of the treated material, and can be appropriately adjusted according to the purpose by utilizing the thickness and material of the electrodes and dielectric constituting the plasma exciter, the type, amplitude, and frequency of the voltage to be applied, the degree of ozone decomposition by means of the ozone decomposition device (ultraviolet irradiance and irradiation time, heating temperature, heating time, humidification amount and humidification time), or the incident angle of the PA.

[0178] Example

[0179] The present disclosure will be described in more detail below using examples and comparative examples, but the embodiments of the present disclosure are not limited thereto.

[0180] <Example 1>

[0181] 1. Production of active oxygen supply devices

[0182] To the glass plate used as the dielectric (5mm in length and 18mm in width (along) Figure 2 On a first surface (in the paper depth direction of A) with a thickness of 150 μm, an aluminum foil with a length of 2.5 mm, a width of 15 mm, and a thickness of 100 μm is bonded together using adhesive tape to form a first electrode. Simultaneously, on a second surface of a glass plate, an aluminum foil with a length of 3 mm, a width of 15 mm, and a thickness of 100 μm is bonded together using adhesive tape, angled to the aluminum foil bonded to the first surface, thereby forming a second electrode. Furthermore, the second surface including the second electrode is covered with polyimide tape. Thus, a plasma actuator A-1 is produced, wherein the first and second electrodes are configured such that the edges of the first electrode on the +X direction side and the edges of the second electrode on the -X direction side overlap each other over a width of 0.5 mm when a dielectric (glass plate) is inserted therebetween. Two plasma actuators A-1 are prepared.

[0183] Note that the first and second electrodes of the plasma exciter use [equipment with specific characteristics]. Figure 3 A to Figure 3Those with the shapes shown in C. Specifically, the edge portion 204 on the +X direction side of the first electrode has a straight line shape extending along the Y-axis direction, and on the edge portion on the -X direction side of the second electrode, rectangular protrusions (rectangular waveforms with an amplitude of 1 mm, a wavelength of 2 mm, and a duty cycle of 0.5) are periodically provided. Then, Figure 4 The overlap amount 401 shown in A is set to +0.3mm.

[0184] Due to the overlap between the electrodes shown in the perspective view, the discharge length is 8 mm. The discharge length corresponds to the total width of the protrusions of the second electrode that overlaps with the first electrode, i.e., L. 1 / L 2 The value is approximately 0.53 for 8mm / 15mm.

[0185] Then, the housing 107 of the active oxygen supply device 101 is prepared with a height of 25 mm, a width of 20 mm, a length of 170 mm, and a thickness of 2 mm, and has the following characteristics: Figure 9 The case shown in Figure A is a trapezoidal cross-section made of ABS resin. This is illustrated as a plan view of the case obtained by observing it from the opening side. Figure 9 As shown in B, the housing has a center relative to the length direction ( Figure 9 A rectangular opening 106, 7 mm wide and 15 mm long, symmetrical about the left and right sides of the one-dot broken line (in B). Then, two pre-produced plasma actuators 103 are fixed to... Figure 9 The inclined portion of the inner wall of the housing 107 in A. The angle θ (having the same value as the incident angle PA described above) formed at the intersection of the extension line 201-1-1 of each plasma actuator 103 along the direction of the exposed portion 201-1 of the first surface of the dielectric 201 and the processing surface 104-1 of the workpiece is 45°. Furthermore, at the location where the plasma actuator 103 is to be installed in the longitudinal direction of the housing, such as Figure 9 As shown in B, the center along the length of the shell coincides with the center along the length (18 mm) of the plasma actuator.

[0186] Furthermore, an ultraviolet lamp 102 (cold cathode tube ultraviolet lamp, trade name: UW / 9F89 / 9, manufactured by Stanley Electric Co., Ltd., cylindrical in shape with a diameter of 9 mm, peak wavelength = 254 nm) is disposed inside the housing. The ultraviolet lamp 102 is configured such that the distance between the ultraviolet lamp 102 and the exposed portion 201-1 of the first surface of the dielectric 201 of the plasma exciter is (…). Figure 9Reference numeral 903 in Figure A is 2 mm, and the distance between the ultraviolet light source and the surface of the plate facing the ultraviolet light source when the plate is in contact with the opening 106 of the housing 107 is 2 mm. Figure 9 Reference numeral 901 in Figure A is 3mm. Thus, an active oxygen supply device (a treatment device using active oxygen) according to this embodiment is manufactured.

[0187] An illuminance meter (trade name: Spectral Radiometer USR-45D, manufactured by Ushio Inc.) is installed at the opening 106 of the active oxygen supply device 101, which serves as the supply port for active oxygen, to measure the ultraviolet illuminance. The illuminance is determined to be 1370 μW / cm² based on the integrated value of the spectrum. 2 At this time, the plasma actuator is not powered on, and therefore is not affected by the ultraviolet radiation being shielded by the ozone generated from the plasma actuator. Since the object to be treated is placed, for example, at the opening 106, the ultraviolet irradiance measured under such conditions will be regarded as the ultraviolet irradiance at the surface of the object to be treated.

[0188] Subsequently, to calculate the amount of ozone generated from the plasma exciter 103, the active oxygen supply device 101 was placed in a sealed container (not shown) with a volume of 1 liter. The sealed container was provided with an opening that could be sealed with a rubber stopper to allow gas to be drawn from the interior using a syringe. Then, a voltage with a sinusoidal waveform having an amplitude of 3.2 kV and a frequency of 80 kHz was applied to the plasma exciter 103 without turning on the ultraviolet lamp, and after one minute, 100 ml of gas was collected from the sealed container. The collected gas was drawn by an ozone detection tube (trade name: 182SB, manufactured by Komei Rikagaku Kogyo Co., Ltd.) to determine the measured ozone concentration (PPM) contained in the induced flow from the plasma exciter 103. Using the value of the measured ozone concentration, the amount of ozone generated per unit time was calculated based on the following expression.

[0189] [Mathematical Expression 1]

[0190]

[0191] As a result, the ozone generation per unit time was 24 μg / min.

[0192] Finally, the ozone generation was measured when both the plasma actuator 103 and the ultraviolet lamp 102 were operating. As described above, the operating conditions for the plasma actuator 103 were: when only the plasma actuator 103 was operating, it generated 24 μg / min of ozone. Meanwhile, as described above, the operating conditions for the ultraviolet lamp 102 were: when only the ultraviolet lamp 102 was operating, the illuminance was 1370 μW / cm². 2As a result, the ozone generation rate was 3 μg / min when both the plasma exciter 103 and the ultraviolet lamp 102 were operating. The 21 μg / min decrease from 24 μg / min can be considered as the amount of ozone that has been converted into reactive oxygen species.

[0193] As a result of visually confirming the discharge state at this time, a spatially and temporally uniform discharge is obtained at the edge portion 204 of the first electrode where the first electrode and the second electrode overlap.

[0194] 2-1. Reactive oxygen species detection test (methylene blue absorbance)

[0195] The presence or absence of reactive oxygen species in the induced flow from the opening is confirmed by decolorization with methylene blue (see Non-Patent Literature 1). Methylene blue is a crystalline powder with a blue luster and is soluble in water and ethanol, and is therefore used as a staining agent or indicator in solution. Methylene blue reacts with reactive oxygen species and is decomposed, and the blue color disappears. Therefore, the presence or absence of reactive oxygen species in the induced flow can be confirmed based on the decolorization of methylene blue (disappearance of blue color).

[0196] Specifically, the following steps are performed: Methylene blue (manufactured by Kanto Chemical Co., Inc., premium grade) and distilled water are mixed to prepare a 0.01% methylene blue aqueous solution. 15 ml of the methylene blue aqueous solution is placed in a covered petri dish (AB4000, cylindrical, 88 mm in diameter, manufactured by EikenChem Co., Ltd.). Then, the surface of the methylene blue aqueous solution in the covered petri dish is considered the treatment surface 104-1 of the object being treated, and the active oxygen supply device 101 is configured to... Figure 9 The distance 905 between the liquid surface in A and the active oxygen supply device 101 is 1.4 mm.

[0197] Then, an AC voltage of 3.2 kV with a sinusoidal waveform at a frequency of 80 kHz was applied between the first and second electrodes of the plasma exciter in the active oxygen supply device. Simultaneously, the ultraviolet lamp was turned on, and an induced flow from the opening was supplied to the liquid surface for 30 minutes. Note that the ultraviolet lamp was adjusted so that the illuminance at the liquid surface was 1370 μW / cm² without turning on the power to the plasma exciter. 2 .

[0198] The methylene blue aqueous solution after induced flow irradiation was transferred from a covered petri dish to a cell, and the change in the absorbance of methylene blue was measured using a spectrophotometer (trade name: V-570, manufactured by JASCO Corporation). Since methylene blue exhibits strong absorption at a wavelength of 664 nm, the degree of decolorization can be calculated from the change in absorbance at this wavelength. In this experiment, firstly, distilled water was placed in the reference cell, and a 0.01% methylene blue aqueous solution before induced flow irradiation was placed in the sample cell, and its absorbance was measured to be 2.32 Abs. Simultaneously, the absorbance of the methylene blue aqueous solution treated with the reactive oxygen supply device was 0.05 Abs. Therefore, the absorbance reduction rate after treatment, relative to the absorbance of methylene blue at 664 nm before treatment, was ((2.32-0.05) / 2.32)×100=97.8%.

[0199] 2-2. Treatment (sterilization) test

[0200] Using the active oxygen supply device 101 according to this embodiment, an E. coli sterilization test was performed according to the following procedure. Note that all instruments used in this sterilization test were sterilized by autoclaving. This sterilization test was conducted in a clean bench.

[0201] First, *Escherichia coli* (trade name "KWIK-STIK (E. coli) ATCC8739", manufactured by Microbiologics, Inc.) was placed in an Erlenmeyer flask containing LB medium (2g tryptone, 1g yeast extract, and 1g sodium chloride were added to distilled water until a final volume of 200ml) and incubated at 37°C with shaking at 80 rpm for 48 hours. The resulting *E. coli* culture had a bacterial count of 9.2 × 10⁻⁶. 9 (CFU / ml).

[0202] Sample No. 1 was produced by adding 0.010 ml of cultured bacterial suspension onto a 3 cm long and 1 cm wide qualitative filter paper (product number: No. 5C, manufactured by Advantec Co., Ltd.) using a micropipette. The bacterial suspension was added only to one side of the filter paper. Sample No. 2 was produced similarly.

[0203] Then, sample No. 1 was immersed in a test tube containing 10 ml of buffer (trade name: Gibco PBS, manufactured by Thermo Fisher Scientific Inc.) for 1 hour. Note that to prevent the bacterial culture on the filter paper from drying out, the time from adding the bacterial culture to the filter paper to immersion in the buffer was set to 60 seconds.

[0204] Next, place 1 ml of buffer solution (hereinafter referred to as "1 / 1 solution") containing sample No. 1 into a test tube containing 9 ml of buffer solution to prepare a dilution (hereinafter referred to as "1 / 10 dilution"). Prepare 1 / 100, 1 / 1000, and 1 / 10000 dilutions in the same manner, except changing the dilution factor of the buffer solution.

[0205] Then, 0.050 ml of the 1 / 1 solution was sampled and spread onto stamp medium (PETANCHECK 25PT1025, manufactured by Eiken Chemical Co., Ltd.). This operation was repeated to prepare two stamp media spread with the 1 / 1 solution. Both stamp media were placed in a thermostat (trade name: IS600, manufactured by Yamato Scientific Co., Ltd.) and incubated at 37°C for 24 hours. The colony counts produced in the two stamp media were counted, and the average value was calculated.

[0206] In addition, for each of the 1 / 10, 1 / 100, 1 / 1000, and 1 / 10000 dilutions, two smeared stamp media were prepared and cultured in the same manner as described above. The colony counts produced in each stamp media were then counted, and their average values ​​were calculated. Table 1-1 shows the results.

[0207] [Table 1-1]

[0208] Table 1-1

[0209] Sample No. 1 (Blank) 1 / 1 liquid ＞100 1 / 10 liquid ＞100 1 / 100 liquid 54 1 / 1000 liquid 4 1 / 10000 liquid 0

[0210] The results shown in Table 1-1 above indicate that the colony count was 54 when the 1 / 100 dilution was cultured. Therefore, the bacterial count present in 0.050 ml of the 1 / 1 dilution associated with sample No. 1 was 54 × 10⁻⁶. 2 =5400 (CFU).

[0211] Next, the following operations will be performed on sample No.2.

[0212] In the center of a plastic plate 30cm long, 30cm wide, and 5mm thick, a recess 3.5cm long, 1.5cm wide, and 1.2mm deep is created. A piece of filter paper 3.5cm long and 1.5cm wide is placed in the recess. Sample No. 2 is positioned on the filter paper with its bacterial droplet facing the bottom of the recess. Then, on the upper surface of the plastic plate, an active oxygen supply device is positioned so that the center of its opening along the length direction coincides with the center of the recess along the length direction, and the center of its opening along the width direction coincides with the center of the recess along the lateral direction. At this point, [the following is a continuation of the previous sentence, likely a technical description of the device]. Figure 9 The distance 905 shown in A (the distance from the front end of the opening side of the plasma actuator to the surface of the filter paper facing the UV lamp) is set to 1.4 mm.

[0213] Because the depth of the recess is 1.2 mm and the thickness of the filter paper is approximately 0.2 mm, the bacterial culture adhesion surface of each sample does not directly contact the opening of the active oxygen supply device. Then, an AC voltage of 3.2 kVpp with a sinusoidal waveform at a frequency of 80 kHz is applied between the two electrodes of the active oxygen supply device, while the ultraviolet lamp is turned on to supply an induced flow to the filter paper. The supply time (treatment time) is set to 2 seconds. Note that the ultraviolet lamp is adjusted so that the illuminance measured on the surface of the filter paper facing the ultraviolet lamp is 1370 μW / cm². 2 .

[0214] During the process of using the active oxygen supply device, in order to prevent the filter paper with the bacterial solution from drying out as much as possible, the time from adding the bacterial solution to the filter paper to immersing it in the buffer solution is set to 60 seconds.

[0215] The treated sample No. 2, along with the filter paper placed at the bottom of the concave section, was immersed for 1 hour in a test tube containing 10 ml of buffer (trade name: Gibco PBS; Thermo Fisher Scientific Inc.). Then, 1 ml of the immersed buffer (hereinafter referred to as "1 / 1 solution") was placed in a test tube containing 9 ml of buffer to prepare a dilution (1 / 10 dilution). 1 / 100, 1 / 1000, and 1 / 10000 dilutions were prepared in the same manner, except that the dilution factor of the buffer was varied.

[0216] Then, 0.050 ml of the 1 / 1 solution was sampled and spread onto stamp medium (trade name: PETAN CHECK25PT1025, manufactured by Eiken Chemical Co., Ltd.). This operation was repeated to prepare two stamp media spread with the 1 / 1 solution. The two stamp media were placed in a thermostat (trade name: IS600, manufactured by Yamato Scientific Co., Ltd.) and incubated at 37°C for 24 hours. The number of colonies produced in each stamp medium associated with the 1 / 1 solution was counted, and the average value was calculated. Furthermore, for each of the 1 / 10, 1 / 100, 1 / 1000, and 1 / 10000 dilutions, two spread stamp media were prepared in the same manner as described above and incubated. The number of colonies produced in each stamp medium associated with each dilution was then counted, and the average value was calculated. Table 1-2 shows the results.

[0217] [Table 1-2]

[0218] Table 1-2

[0219] Sample No. 2 1 / 1 liquid 0 1 / 10 liquid 0 1 / 100 liquid 0 1 / 1000 liquid 0 1 / 10000 liquid 0

[0220] As shown in Table 1-1, the bacterial count in 0.050 ml of the half-liquid associated with sample No. 1 (not treated with the active oxygen supply device) was 5400 (CFU), while the bacterial count in 0.050 ml of the half-liquid associated with the treated sample No. 2 was 0 (CFU). Therefore, it was found that 100.00% (5400-0 / 5400×100) sterilization was achieved by using the active oxygen supply device according to this embodiment for 2 seconds.

[0221] 2-3. Current Consumption Test

[0222] Connect the first and second electrodes of plasma actuator A-1 to the high-frequency high-voltage inverter, and connect a DC power supply (programmable multiplexer) (trade name: PPS303, manufactured by AS ONE Corporation) to the high-frequency high-voltage inverter. Apply a 20V DC voltage to the DC power supply to make the high-frequency high-voltage inverter output a 3kVpp AC voltage. The DC current consumption at this time is measured using the ammeter built into the DC power supply. The result is a current consumption of 0.060A.

[0223] (Example 2)

[0224] Except for changing the overlap between the first and second electrodes from 0.3 mm to 0.7 mm, plasma actuator A-2 was manufactured in a similar manner to plasma actuator A-1. Then, except for using plasma actuator A-2, the reactive oxygen supply device was manufactured and evaluated in the same manner as in Example 1.

[0225] (Example 3)

[0226] The convex shape of the edge portion on the -X direction side of the second electrode is used as follows: Figure 8 The parallelogram shape shown in A. Specifically, the convex shape is a parallelogram with a height of 2 mm, a width of 1 mm, and an acute angle of 75 degrees, and the amplitude, wavelength, and duty cycle are set to 1 mm, 2 mm, and 0.5, respectively. Otherwise, plasma actuator B-1 is manufactured similarly to plasma actuator A-1. Therefore, the overlap between the first and second electrodes is 0.3 mm. Except for using plasma actuator B-1, the active oxygen supply device is manufactured and evaluated in the same manner as in Example 1.

[0227] (Example 4)

[0228] Except for changing the overlap between the first and second electrodes to 0.7 mm, plasma actuator B-2 was manufactured in a similar manner to plasma actuator B-1. Then, except for using plasma actuator B-2, the reactive oxygen supply device was manufactured and evaluated in the same manner as in Example 1.

[0229] (Example 5)

[0230] The convex shape of the edge portion on the -X direction side of the second electrode is used as follows: Figure 8 The shape shown in B is specifically a shape with a height of 2 mm and a width of 1 mm, connected by a straight line and two parallel curves, with the amplitude, wavelength, and duty cycle set to 1 mm, 2 mm, and 0.5, respectively. As the curved shape, a sinusoidal waveform with nodes at both ends of the curve, an amplitude of 0.3 mm, and a wavelength of 2 mm is used. Otherwise, plasma actuator C-1 is produced similarly to plasma actuator A-1. Therefore, the overlap between the first and second electrodes is 0.3 mm. Except for using plasma actuator C-1, the active oxygen supply device is produced and evaluated in the same manner as in Example 1.

[0231] (Example 6)

[0232] Except for changing the overlap between the first and second electrodes to 0.7 mm, plasma actuator C-2 was manufactured in a similar manner to plasma actuator B-1. Then, except for using plasma actuator C-2, the reactive oxygen supply device was manufactured and evaluated in the same manner as in Example 1.

[0233] The evaluation results are shown in Table 2.

[0234] [Table 2]

[0235] Table 2

[0236]

[0237] As is evident from the comparison between Examples 1-2, 3-4, and 5-6, in a plasma actuator including a second electrode with a protrusion of constant width along the Y-axis, the discharge length and ozone quantity remain unchanged even when the overlap between the first and second electrodes along the X-axis varies, and the change in current consumption is also small. Therefore, an active oxygen supply device with small performance errors during production can be provided.

[0238] This disclosure includes the following components and methods.

[0239] (Component 1)

[0240] An active oxygen supply device, comprising:

[0241] A housing having at least one opening;

[0242] Plasma actuator configured inside the housing; and

[0243] Ozone decomposition device, in which

[0244] The plasma actuator comprises a first electrode, a dielectric, and a second electrode stacked sequentially.

[0245] The first electrode is an exposed electrode disposed on a first surface that serves as a dielectric.

[0246] By applying a voltage between the first and second electrodes, the plasma actuator generates a dielectric barrier discharge from the first electrode toward the second electrode and causes an induced flow containing ozone to be blown out from the first electrode in a first direction, which is a direction along the dielectric surface.

[0247] The ozone decomposition device decomposes the ozone contained in the induced flow to generate reactive oxygen species in the induced flow, thus making the induced flow contain reactive oxygen species.

[0248] The plasma actuator and ozone decomposition device are configured to allow an induced flow containing active oxygen to exit from the opening to the outside of the housing.

[0249] When the plasma actuator is viewed from the second electrode side, a protrusion extending in the second direction is provided on the edge of the second electrode on the side opposite to the first direction, and the protrusion overlaps only with the first electrode.

[0250] The protrusion has a constant width along the second direction.

[0251] (Component 2)

[0252] According to the active oxygen supply device constituting component 1, wherein,

[0253] When observing the cross-section of the plasma actuator along its thickness direction,

[0254] The first and second electrodes are arranged obliquely to each other across a dielectric material along the thickness direction of the plasma exciter.

[0255] The first electrode is configured as part of a first surface covering the dielectric, and

[0256] The first surface has an exposed portion that is not covered by the first electrode.

[0257] When the plasma actuator is viewed from the first electrode side, at least a portion of the exposed portion overlaps with the second electrode therebetween, and

[0258] In a cross-section along the thickness direction, an ozone-inducing flow is blown out from the edge of the first electrode on the first direction side along the exposed portion of the dielectric that overlaps with the second electrode.

[0259] (Component 3)

[0260] According to the active oxygen supply device constituting 1 or 2, the edge portion of the first direction side of the first electrode has a straight shape extending in a direction perpendicular to the first direction and along the first surface of the dielectric.

[0261] (Component 4)

[0262] According to the active oxygen supply device constituting any one of 1 to 3, the protrusions include a plurality of protrusions having substantially the same shape arranged in succession.

[0263] (Component 5)

[0264] According to any one of the active oxygen supply devices constituting 1 to 4, the protrusion has a periodic and regular waveform shape.

[0265] (Composition 6)

[0266] According to any one of the active oxygen supply devices constituting 1 to 5, the protrusion has a rectangular wave shape.

[0267] (Component 7)

[0268] According to the active oxygen supply device comprising any one of 1 to 6, wherein the ozone decomposition device is at least one device selected from the group consisting of:

[0269] An ultraviolet light source that irradiates an ozone-containing induced stream with ultraviolet light to generate reactive oxygen species in the induced stream;

[0270] A heating device that heats an induced flow containing ozone to generate reactive oxygen species in the induced flow; and

[0271] A humidification device that humidifies an induced flow containing ozone to generate active oxygen in the induced flow.

[0272] (Composition 8)

[0273] A treatment apparatus using active oxygen, the apparatus treating the surface of an object to be treated by using active oxygen and comprising:

[0274] A housing having at least one opening;

[0275] Plasma actuator configured inside the housing; and

[0276] Ozone decomposition device, in which

[0277] The plasma actuator comprises a first electrode, a dielectric, and a second electrode stacked sequentially.

[0278] The first electrode is an exposed electrode disposed on a first surface that serves as a dielectric.

[0279] By applying a voltage between the first and second electrodes, the plasma actuator generates a dielectric barrier discharge from the first electrode toward the second electrode and causes an induced flow containing ozone to be blown out from the first electrode in a first direction, which is a direction along the dielectric surface.

[0280] The ozone decomposition device decomposes the ozone contained in the induced flow to generate reactive oxygen species in the induced flow, thus making the induced flow contain reactive oxygen species.

[0281] The plasma actuator and ozone decomposition device are configured to allow an induced flow containing active oxygen to exit from the opening to the outside of the housing.

[0282] When the plasma actuator is viewed from the second electrode side, a protrusion extending in the second direction is provided on the edge of the second electrode on the side opposite to the first direction, and the protrusion overlaps only with the first electrode.

[0283] The protrusion has a constant width along the second direction.

[0284] (Method 9)

[0285] A treatment method for treating the surface of an object by using active oxygen, the treatment method comprising:

[0286] The process of preparing a treatment device for active oxygen, in which...

[0287] Treatment devices using active oxygen include:

[0288] A housing having at least one opening;

[0289] Plasma actuator configured inside the housing; and

[0290] Ozone decomposition device, in which

[0291] The plasma actuator comprises a first electrode, a dielectric, and a second electrode stacked sequentially.

[0292] The first electrode is an exposed electrode disposed on a first surface that serves as a dielectric.

[0293] By applying a voltage between the first and second electrodes, the plasma actuator generates a dielectric barrier discharge from the first electrode toward the second electrode and causes an induced flow containing ozone to be blown out from the first electrode in a first direction, which is a direction along the dielectric surface.

[0294] The ozone decomposition device decomposes the ozone contained in the induced flow to generate reactive oxygen species in the induced flow, thus making the induced flow contain reactive oxygen species.

[0295] The plasma actuator and ozone decomposition device are configured to allow an induced flow containing active oxygen to exit from the opening to the outside of the housing.

[0296] When the plasma actuator is viewed from the second electrode side, a protrusion extending in the second direction is provided on the edge of the second electrode on the side opposite to the first direction, and the protrusion overlaps only with the first electrode.

[0297] The protrusion has a constant width along the second direction.

[0298] The processing method further includes:

[0299] A process in which a prepared treatment apparatus using active oxygen and a workpiece are positioned at a location where the surface of the workpiece is exposed to the induced flow of the active oxygen-containing induced flow from an opening; and

[0300] A process of causing an induced flow containing active oxygen to flow out from an opening and treating the surface of the object being treated by using active oxygen.

[0301] This disclosure is not limited to the above-described embodiments, and various changes and modifications may be made therein without departing from the spirit and scope of this disclosure. Therefore, the appended claims are attached to set forth the scope of this disclosure.

[0302] This application claims priority to Japanese Patent Application No. 2021-215338, filed on December 28, 2021, the entire contents of which are incorporated herein by reference.

[0303] Explanation of reference numerals in the attached figures

[0304] 101 Active Oxygen Supply Device (A treatment device using active oxygen)

[0305] 102 Ozone Decomposition Device (Ultraviolet Light Source (Ultraviolet Lamp))

[0306] 103 Plasma Actuator

[0307] 104 Items to be processed

[0308] 104-1 Processed surface of the workpiece

[0309] 105 Induced Flow

[0310] 106 Opening

[0311] 107 Housing

Claims

1. An active oxygen supply device, comprising: A housing having at least one opening; A plasma actuator disposed inside the housing; and Ozone decomposition device, in which The plasma actuator comprises a first electrode, a dielectric, and a second electrode stacked sequentially. The first electrode is an exposed electrode disposed on a first surface that serves as one surface of the dielectric. By applying a voltage between the first electrode and the second electrode, the plasma actuator generates a dielectric barrier discharge from the first electrode toward the second electrode and causes an ozone-containing induced flow to be blown out from the first electrode in a first direction, which is a direction along the dielectric surface. The ozone decomposition device decomposes the ozone contained in the induced flow to generate reactive oxygen species in the induced flow, and the induced flow becomes an induced flow containing reactive oxygen species. The plasma actuator and the ozone decomposition device are configured to allow the induced flow containing active oxygen to exit from the opening to the outside of the housing. When the plasma actuator is viewed from the second electrode side, the edge of the second electrode on the side opposite to the first direction has a protrusion extending along the second direction, and only the protrusion overlaps with the first electrode. The protrusion has a constant width along the second direction.

2. The active oxygen supply device according to claim 1, wherein, When observing the cross-section of the plasma exciter along its thickness direction, The first electrode and the second electrode are arranged obliquely to each other across the dielectric along the thickness direction of the plasma exciter. The first electrode is configured to cover a portion of the first surface of the dielectric, and The first surface has an exposed portion that is not covered by the first electrode. When the plasma actuator is viewed from the first electrode side, at least a portion of the exposed portion overlaps with the second electrode therebetween, and In a cross-section along the thickness direction, the ozone-containing induced flow is blown out from the edge of the first electrode on the first direction side along the exposed portion of the dielectric that overlaps with the second electrode.

3. The active oxygen supply device according to claim 1 or 2, wherein the edge portion of the first electrode on the first direction side has a straight shape extending in a direction perpendicular to the first direction and along the first surface of the dielectric.

4. The active oxygen supply device according to claim 1 or 2, wherein the protrusion comprises a plurality of protrusions having substantially the same shape arranged in succession.

5. The active oxygen supply device according to claim 1 or 2, wherein the protrusion has a periodic and regular waveform shape.

6. The active oxygen supply device according to claim 1 or 2, wherein the protrusion has a rectangular wave shape.

7. The active oxygen supply device according to claim 1 or 2, wherein the ozone decomposition device is at least one device selected from the group consisting of: An ultraviolet light source irradiates the ozone-containing induced flow with ultraviolet light to generate reactive oxygen species in the induced flow; A heating device that heats the ozone-containing induced flow to generate active oxygen in the induced flow; and A humidifying device that humidifies the ozone-containing induced flow to generate active oxygen in the induced flow.

8. A treatment apparatus using active oxygen, the apparatus treating the surface of an object to be treated by using active oxygen and comprising: A housing having at least one opening; A plasma actuator disposed inside the housing; and Ozone decomposition device, in which The plasma actuator comprises a first electrode, a dielectric, and a second electrode stacked sequentially. The first electrode is an exposed electrode disposed on a first surface that serves as one surface of the dielectric. By applying a voltage between the first electrode and the second electrode, the plasma actuator generates a dielectric barrier discharge from the first electrode toward the second electrode and causes an ozone-containing induced flow to be blown out from the first electrode in a first direction, which is a direction along the dielectric surface. The ozone decomposition device decomposes the ozone contained in the induced flow to generate reactive oxygen species in the induced flow, and the induced flow becomes an induced flow containing reactive oxygen species. The plasma actuator and the ozone decomposition device are configured to allow the induced flow containing active oxygen to exit from the opening to the outside of the housing. When the plasma actuator is viewed from the second electrode side, the edge of the second electrode on the side opposite to the first direction has a protrusion extending along the second direction, and only the protrusion overlaps with the first electrode. The protrusion has a constant width along the second direction.

9. A treatment method for treating the surface of an object by using active oxygen, the treatment method comprising: The process of preparing a treatment device for active oxygen, in which... The treatment device using active oxygen includes: A housing having at least one opening; A plasma actuator configured inside the housing; and Ozone decomposition device, in which The plasma actuator comprises a first electrode, a dielectric, and a second electrode stacked sequentially. The first electrode is an exposed electrode disposed on a first surface that serves as one surface of the dielectric. By applying a voltage between the first electrode and the second electrode, the plasma actuator generates a dielectric barrier discharge from the first electrode toward the second electrode and causes an ozone-containing induced flow to be blown out from the first electrode in a first direction, which is a direction along the dielectric surface. The ozone decomposition device decomposes the ozone contained in the induced flow to generate reactive oxygen species in the induced flow, and the induced flow becomes an induced flow containing reactive oxygen species. The plasma actuator and the ozone decomposition device are configured to allow the induced flow containing active oxygen to exit from the opening to the outside of the housing. When the plasma actuator is viewed from the second electrode side, the edge of the second electrode on the side opposite to the first direction has a protrusion extending along the second direction, and only the protrusion overlaps with the first electrode. The protrusion has a constant width along the second direction. The processing method further includes: A process in which a prepared treatment apparatus using active oxygen and the workpiece are positioned at a location where the surface of the workpiece exposed to the induced flow of the active oxygen-containing flow is exposed to the flow; and The process of causing the induced flow containing active oxygen to flow out from the opening and treating the surface of the object to be treated by using active oxygen.

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