A differential pressure control system

By monitoring and adjusting the pressure data on the reaction chamber side and bypass side in real time, using the PID operator and electronic regulating valve to achieve pressure balance, solving the problem of pressure imbalance during the spraying of flexible luminescent materials, and improving control accuracy and product quality.

CN118550331BActive Publication Date: 2025-06-17GUOJING SHENGTAI (QINGDAO) DIGITAL DISPLAY TECHNOLOGY CO LTD
View PDF 2 Cites 0 Cited by

Patent Information

Application Number
CN202410720849.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-06-05
Publication Date
2025-06-17
Estimated Expiration
2044-06-05

AI Technical Summary

Technical Problem

During the spraying of flexible luminescent materials, the pressure in the reaction chamber and the bypass is unbalanced, resulting in unstable product quality.

Method used

The pressure data on the reaction chamber and bypass side are monitored in real time by pre-deploying electronic pressure gauge, and the control instructions are issued to the electronic regulating valve using a PID operator to adjust the valve opening to achieve pressure balance. When the control is abnormal, the pressure difference is controlled by the flow controller on the bypass side and the optimized flow is recorded for application.

Benefits of technology

The balance control of pressure data on the reaction chamber side and bypass side is realized, the pressure difference control accuracy is improved, and the product quality is ensured.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN118550331B_ABST
    Figure CN118550331B_ABST
Patent Text Reader

Abstract

The present invention provides a differential pressure control system. It relates to the technical field of differential pressure control. The system includes: real-time monitoring of the pressure data on the reaction chamber side and the pressure data on the bypass side according to a pre-deployed electronic differential pressure gauge and summarizing the data; when it is detected that the pressure data is inconsistent, sending a deviation control instruction to an electronic control valve according to a PID arithmetic unit to adjust the valve opening until the pressure data is consistent; when the control is abnormal, performing differential pressure control on the flow rate of the bypass side according to the flow controller on the bypass side, and when it is detected that the pressure data is consistent and the differential pressure control accuracy is not lower than the preset control accuracy, recording the flow rate on the bypass side as the optimized flow rate and applying the control; continuously monitoring and real-time feedback to adjust the pressure data on the reaction chamber side and the pressure data on the bypass side; achieving both pressure balance control and improving the differential pressure control accuracy.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The present invention relates to the technical field of differential pressure control, and particularly relates to a differential pressure control system. Background Art

[0002] Flexible light-emitting materials are an important type of semiconductor material. Spraying gas light-emitting materials on flexible substrates to achieve flexible light-emitting materials has become an important development direction for flexible light-emitting displays. During the spraying process, some materials need to be sprayed in multiple layers, which requires a consistent "reaction chamber - bypass" switching combination valve. When the raw material needs to enter the reaction chamber, it is switched to the reaction chamber; when it does not need to go to the reaction chamber, it needs to go to the bypass (VENT). This requires the pressure balance between the two pipelines of the reaction chamber and the bypass, that is, to ensure that the differential pressure between the reaction chamber and the bypass is zero. If the pressure is unbalanced and unstable, the quality of the product will be affected.

[0003] Therefore, the present invention provides a differential pressure control system. Summary of the Invention

[0004] The present invention provides a differential pressure control system, which is used to: real-time monitor the pressure data on the reaction chamber side and the bypass side according to a pre-deployed electronic differential pressure gauge and perform data aggregation; when the monitored pressure data is inconsistent, issue a deviation control instruction to an electronic control valve according to a PID arithmetic unit to adjust the valve opening to make the pressure data consistent; when the control is abnormal, perform differential pressure control on the flow rate of the bypass side according to the flow rate controller on the bypass side, and when the monitored pressure data is consistent and the differential pressure control accuracy is not lower than the preset control accuracy, record the flow rate of the bypass side as the optimized flow rate and apply the control; continuously monitor and provide real-time feedback to adjust the pressure data on the reaction chamber side and the bypass side; thus achieving both pressure balance control and improving the differential pressure control accuracy.

[0005] The present invention provides a differential pressure control system, including:

[0006] A differential pressure monitoring module, which is used to real-time monitor the pressure data on the reaction chamber side and the bypass side according to a pre-deployed electronic differential pressure gauge and perform data aggregation;

[0007] A differential pressure control module, which is used to, when the pressure data on the reaction chamber side and the bypass side are inconsistent, issue a deviation control instruction to an electronic control valve according to a PID arithmetic unit to adjust the valve opening to make the pressure data on the bypass side consistent with the pressure data on the reaction chamber side;

[0008] A control optimization module, which is used to, when the control is abnormal, perform differential pressure control on the flow rate of the bypass side according to the flow rate controller on the bypass side, and when the monitored pressure data is consistent and the differential pressure control accuracy is not lower than the preset control accuracy, record the flow rate of the bypass side as the optimized flow rate and apply the control;

[0009] A differential pressure feedback module for continuously monitoring and real-time feedback regulation of the pressure data on the reaction chamber side and the bypass side.

[0010] According to a differential pressure control system provided by the present invention, the differential pressure monitoring module includes:

[0011] A differential pressure deployment unit for pre-deploying an electronic differential pressure gauge at a preset monitoring position. When the electronic differential pressure gauge correctly monitors the pressure data on the reaction chamber side and the bypass side, the pre-deployment is completed;

[0012] A differential pressure monitoring unit for continuously monitoring the pressure data on the reaction chamber side and the bypass side according to the pre-deployed electronic differential pressure gauge;

[0013] A differential pressure summarizing unit for real-time transmitting the pressure data to a differential pressure control platform and summarizing the data according to the monitoring period.

[0014] According to a differential pressure control system provided by the present invention, the differential pressure monitoring module further includes:

[0015] A data cleaning unit for cleaning the summarized data, removing the error data in the pressure data and supplementing the missing data;

[0016] A warning unit for analyzing the summarized data after cleaning. When it is monitored that the pressure data on the reaction chamber side is inconsistent with the pressure data on the bypass side, it is determined that there is a differential pressure in the reaction chamber, and a reminder for differential pressure control is given;

[0017] Obtain the pressure threshold on the reaction chamber side and the pressure threshold on the bypass side. When it is monitored that the pressure data exceeds the corresponding pressure threshold, it is determined that the pressure is abnormal, the pressure abnormal data is marked and a pressure abnormal alarm is executed.

[0018] According to a differential pressure control system provided by the present invention, the differential pressure control module includes:

[0019] A differential pressure input unit for obtaining the differential pressure data when the pressure data on the reaction chamber side is inconsistent with the pressure data on the bypass side, determining the deviation of the differential pressure data and inputting it into a PID arithmetic unit;

[0020] A PID control unit for generating a deviation control instruction according to the PID arithmetic unit and sending it to an electronic control valve to adjust the valve opening to make the pressure data on the bypass side consistent with the pressure data on the reaction chamber side;

[0021] A control switching unit for switching the differential pressure control strategy when it is monitored that the control is abnormal;

[0022] Wherein, when the pressure data on the reaction chamber side is higher than the pressure data on the bypass side, the valve opening is reduced according to the deviation control instruction;

[0023] When the pressure data on the reaction chamber side is lower than the pressure data on the bypass side, increase the valve opening according to the deviation control instruction.

[0024] According to a differential pressure control system provided by the present invention, a control switching unit includes:

[0025] A differential pressure abnormality block, configured to locate the abnormal period of differential pressure control of the PID arithmetic unit when it is monitored that the PID arithmetic unit generates and issues a deviation control instruction to the electronic control valve, and there is still a differential pressure when adjusting the valve opening;

[0026] A valve opening block, configured to locate the fully open period and the fully closed period when it is monitored that the valve opening of the electronic control valve is at the fully open position or the fully closed position;

[0027] A control switching block, configured to match the abnormal period of differential pressure control of the PID arithmetic unit with the fully open period and the fully closed period. If there is no matching period, continue to adjust the deviation control instruction according to the PID arithmetic unit, and adjust the valve opening until the pressure data on the bypass side is consistent with the pressure data on the reaction side;

[0028] Otherwise, switch the differential pressure control strategy of the PID arithmetic unit to the differential pressure control strategy of the flow controller.

[0029] According to a differential pressure control system provided by the present invention, a control optimization module includes:

[0030] A reaction chamber side flow control unit, configured to enable the differential pressure control strategy of the flow controller. Among them, when the process of the reaction chamber remains unchanged, the parameter data of the flow controller on the reaction chamber side remains unchanged;

[0031] A valve opening optimization unit, configured to obtain the first parameter data of the bypass side flow controller when enabling the differential pressure control strategy of the flow controller;

[0032] If the valve opening of the electronic control valve is at the fully open position, record the corresponding bypass side pressure data as the minimum bypass side pressure data under the first parameter data;

[0033] If the valve opening of the electronic control valve is at the fully closed position, record the corresponding bypass side pressure data as the maximum bypass side pressure data under the first parameter data;

[0034] Determine the change relationship curve between the valve opening and the bypass side pressure data according to the bypass side maximum and minimum pressure data under the first parameter data in combination with historical monitoring data;

[0035] Preset a bypass side pressure data adjustment rate range and a minimum proportional adjustment valve opening. When it is monitored that the bypass side pressure data adjustment rate is not within the preset bypass side pressure data adjustment rate range, determine the optimized valve opening of the electronic control valve according to the change relationship curve;

[0036] Otherwise, determine the optimized valve opening of the electronic regulating valve according to the preset optimal valve opening;

[0037] A bypass side flow control unit, configured to obtain an optimized pressure data range corresponding to first parameter data of the optimized valve opening of the electronic regulating valve;

[0038] Obtain the reaction chamber side pressure data, and combine the maximum and minimum optimized pressure data of the optimized pressure data range to determine the second parameter data of the bypass side flow controller;

[0039] A differential pressure control unit, configured to perform simulated flow control according to the second parameter data of the bypass side flow controller, and calculate the differential pressure control accuracy of the simulated flow control;

[0040] ; where represents the differential pressure control accuracy of the simulated flow control; represents the flow density of the bypass side flow; represents the bypass side flow under the first parameter data of the bypass side flow controller; represents the bypass side flow increase or decrease amount under the second parameter data of the bypass side flow controller during the i1-th simulated flow control; represents the flow circulation capacity quantization value under the second parameter data of the bypass side flow controller during the i1-th simulated flow control; represents the bypass side pressure data when the valve is fully open / fully closed; represents the reaction chamber side pressure data corresponding to the fully open / fully closed valve opening; represents the number of control times of the simulated flow control;

[0041] When it is monitored that the bypass side pressure data is consistent with the reaction chamber side pressure data during the simulated flow control process, the valve opening of the electronic regulating valve corresponding to the bypass side pressure data is within the optimized valve opening range, and the differential pressure control accuracy is not lower than the preset control accuracy, record the bypass side flow of the simulated flow control as the optimized flow and perform application control.

[0042] According to a differential pressure control system provided by the present invention, a differential pressure feedback module includes:

[0043] A feedback control unit, configured to monitor the regulating differential pressure after the valve adjustment or the adjustment of the bypass side flow controller according to a pre-deployed electronic differential pressure gauge. If there is the regulating differential pressure, the PID arithmetic unit generates a regulating differential pressure control instruction according to the regulating differential pressure and issues it to the electronic regulating valve to adjust the valve opening for the second time until the bypass side pressure data is consistent with the reaction chamber side pressure data;

[0044] A cycle control unit is used to set a differential pressure control period, regularly determine the deviation between the pressure data on the bypass side and the pressure data on the reaction chamber side, and input it into a PID arithmetic unit for differential pressure cycle control.

[0045] A differential pressure control system provided by the present invention further includes:

[0046] A differential pressure visualization module is used to visually display the differential pressure value between the pressure data on the reaction chamber side and the pressure data on the bypass side;

[0047] An early warning control module is used to generate corresponding early warnings and execute abnormal control when the pressure is abnormal or the differential pressure control is abnormal.

[0048] Compared with the prior art, the beneficial effects of the present application are as follows:

[0049] According to the pre-deployed electronic differential pressure gauge, the pressure data on the reaction chamber side and the pressure data on the bypass side are monitored in real time and data is summarized; when the monitored pressure data is inconsistent, a deviation control instruction is issued to the electronic control valve according to the PID arithmetic unit to adjust the valve opening to make the pressure data consistent; when the control is abnormal, differential pressure control is performed on the flow rate on the bypass side according to the flow controller on the bypass side. When the monitored pressure data is consistent and the differential pressure control accuracy is not lower than the preset control accuracy, the flow rate on the bypass side is recorded as the optimized flow rate and applied for control; continuously monitor and provide real-time feedback to adjust the pressure data on the reaction chamber side and the pressure data on the bypass side; both realize pressure balance control and improve differential pressure control accuracy.

[0050] Other features and advantages of the present invention will be described in the following description of the specification, and part of them will be obvious from the description of the specification, or will be understood by implementing the present invention. The objectives and other advantages of the present invention can be achieved and obtained by the structures specifically pointed out in the written specification and the drawings.

[0051] Next, through the drawings and embodiments, the technical solutions of the present invention will be further described in detail. Description of the Drawings

[0052] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the following drawings are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0053] Figure 1 It is a schematic structural diagram of a differential pressure control system provided in an embodiment of the present invention. Detailed Embodiments

[0054] To make the objectives, technical solutions, and advantages of the present invention clearer, the following will clearly and completely describe the technical solutions in the present invention in conjunction with the accompanying drawings in the present invention. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present invention without creative efforts belong to the scope of protection of the present invention.

[0055] As Figure 1 shown, an embodiment of the present invention provides a differential pressure control system, which mainly includes the following structures:

[0056] A differential pressure monitoring module, configured to monitor the pressure data on the reaction chamber side and the pressure data on the bypass side in real time according to a pre-deployed electronic differential pressure gauge and summarize the data;

[0057] A differential pressure control module, configured to, when it is detected that the pressure data on the reaction chamber side is inconsistent with the pressure data on the bypass side, issue a deviation control instruction to an electronic control valve according to a PID arithmetic unit, and adjust the valve opening degree until the pressure data on the bypass side is consistent with the pressure data on the reaction chamber side;

[0058] A control optimization module, configured to, when a control anomaly occurs, perform differential pressure control on the flow rate on the bypass side according to the flow rate controller on the bypass side, and when it is detected that the pressure data is consistent and the differential pressure control accuracy is not lower than a preset control accuracy, record the flow rate on the bypass side as the optimized flow rate and apply the control;

[0059] A differential pressure feedback module, configured to continuously monitor and real-time feedback the adjustment of the pressure data on the reaction chamber side and the pressure data on the bypass side.

[0060] In this embodiment, the electronic differential pressure gauge is used to monitor the pressure data on the reaction chamber side and the pressure data on the bypass side in real time.

[0061] In this embodiment, the PID arithmetic unit is configured to generate and issue a deviation control instruction to an electronic control valve when the pressure data is inconsistent, and adjust the valve opening degree until the pressure data on the bypass side is consistent with the pressure data on the reaction chamber side. For example, if the pressure data a1 on the bypass side > the pressure data a2 on the reaction chamber side, then a deviation control instruction b1 is generated and issued to the electronic control valve for differential pressure control.

[0062] In this embodiment, a control anomaly occurs, for example, adjusting the valve opening degree of the control valve cannot make the pressure data on the bypass side consistent with the pressure data on the reaction chamber side.

[0063] In this embodiment, the flow rate controller on the bypass side is used to control the flow rate entering the bypass side.

[0064] In this embodiment, the differential pressure control accuracy, for example, controls the pressure data on the bypass side to fluctuate no more than c1 above and below the pressure data on the reaction chamber side.

[0065] In this embodiment, the optimized flow rate refers to the optimized adjustment of the flow controller on the bypass side when control anomalies occur. For example, the flow rate bypassed on the bypass side is adjusted from d1 to the optimized flow rate d2 to improve the differential pressure control accuracy.

[0066] The beneficial effects of the above technical solution are as follows: The pressure data on the reaction chamber side and the bypass side are monitored in real time by the pre-deployed electronic differential pressure gauge and the data is summarized; when the monitored pressure data is inconsistent, a deviation control instruction is sent to the electronic control valve according to the PID arithmetic unit to adjust the valve opening to make the pressure data consistent; when control anomalies occur, differential pressure control is performed on the flow rate on the bypass side according to the flow controller on the bypass side. When the monitored pressure data is consistent and the differential pressure control accuracy is not lower than the preset control accuracy, the flow rate on the bypass side is recorded as the optimized flow rate and applied for control; the pressure data on the reaction chamber side and the bypass side are continuously monitored and adjusted in real time; both pressure balance control is achieved and the differential pressure control accuracy is improved.

[0067] An embodiment of the present invention provides a differential pressure control system, and a differential pressure monitoring module, including:

[0068] A differential pressure deployment unit for pre-deploying an electronic differential pressure gauge at a preset monitoring position. When the electronic differential pressure gauge correctly monitors the pressure data on the reaction chamber side and the bypass side, the pre-deployment is completed;

[0069] A differential pressure monitoring unit for monitoring the pressure data on the reaction chamber side and the bypass side in real time according to the pre-deployed electronic differential pressure gauge;

[0070] A differential pressure summarization unit for transmitting the pressure data to the differential pressure control platform in real time and summarizing the data according to the monitoring period.

[0071] In this embodiment, the preset monitoring position is, for example, the positions after the flow controllers on the reaction chamber side and the bypass side.

[0072] In this embodiment, data summarization is performed according to the monitoring period. For example, data summarization is performed every t1 time period to achieve continuous real-time monitoring.

[0073] The beneficial effects of the above technical solution are as follows: By pre-deploying an electronic differential pressure gauge to monitor the differential pressure between the reaction chamber side and the bypass side, it is beneficial to analyze the differential pressure subsequently and lay a data foundation for differential pressure control.

[0074] An embodiment of the present invention provides a differential pressure control system, and the differential pressure monitoring module further includes:

[0075] A data cleaning unit for cleaning the summarized data, removing the error data in the pressure data and supplementing the missing data;

[0076] A warning unit is used to analyze the summary data after cleaning. When it is detected that the pressure data on the reaction chamber side is inconsistent with the pressure data on the bypass side, it is determined that there is a pressure difference in the reaction chamber, and a reminder for pressure difference control is given.

[0077] Obtain the pressure threshold on the reaction chamber side and the pressure threshold on the bypass side. When it is detected that the pressure data exceeds the corresponding pressure threshold, it is determined that the pressure is abnormal, the abnormal pressure data is marked, and a pressure abnormality alarm is executed.

[0078] In this embodiment, error data, for example, the pressure data exceeds the working range of the electronic differential pressure gauge.

[0079] In this embodiment, missing data, for example, data not detected by the electronic differential pressure gauge.

[0080] In this embodiment, the pressure difference control is used to ensure that the pressure data on the bypass side is consistent with the pressure data on the reaction chamber side.

[0081] In this embodiment, the pressure threshold on the reaction chamber side is inconsistent with the pressure threshold on the bypass side.

[0082] In this embodiment, when it is detected that the pressure data exceeds the corresponding pressure threshold, for example, the pressure data a1 on the bypass side is not lower than the pressure threshold b1 on the bypass side, then there is a pressure abnormality on the bypass side, which affects the normal operation, and the pressure data a1 on the bypass side is marked as abnormal pressure data.

[0083] The beneficial effects of the above technical solutions are as follows: Through data cleaning, the correctness of the summary data is ensured; the summary data is analyzed to determine the pressure difference and a reminder for pressure difference control is given, which is beneficial to improving the efficiency of pressure difference control; the execution of the pressure abnormality alarm ensures the normal operation of the pressure difference control work.

[0084] An embodiment of the present invention provides a pressure difference control system, and the pressure difference control module includes:

[0085] A pressure difference input unit is used to obtain the pressure difference data when the pressure data on the reaction chamber side is inconsistent with the pressure data on the bypass side, determine the deviation of the pressure difference data, and input it into the PID arithmetic unit.

[0086] A PID control unit is used to generate a deviation control instruction according to the PID arithmetic unit and send it to the electronic control valve to adjust the valve opening to make the pressure data on the bypass side consistent with the pressure data on the reaction chamber side.

[0087] A control switching unit is used to switch the pressure difference control strategy when it is detected that the control is abnormal.

[0088] Among them, when the pressure data on the reaction chamber side is higher than the pressure data on the bypass side, the valve opening is reduced according to the deviation control instruction.

[0089] When the pressure data on the reaction chamber side is lower than the pressure data on the bypass side, increase the valve opening according to the deviation control instruction.

[0090] In this embodiment, differential pressure data where the pressure data on the reaction chamber side is inconsistent with the pressure data on the bypass side is obtained. For example, if the pressure data on the reaction chamber side is a1 and the pressure data on the bypass side is a2, then the differential pressure data is (a1, a2).

[0091] In this embodiment, determine the deviation of the differential pressure data and input it into the PID controller. For example, the deviation of the differential pressure data (a1, a2) is a1 - a2.

[0092] In this embodiment, when the deviation a1 - a2 is positive, that is, when the pressure data on the reaction chamber side is higher than the pressure data on the bypass side, reduce the valve opening according to the deviation control instruction.

[0093] In this embodiment, when the deviation a1 - a2 is negative, that is, when the pressure data on the reaction chamber side is lower than the pressure data on the bypass side, increase the valve opening according to the deviation control instruction.

[0094] In this embodiment, the deviation control instruction is used to send to the electronic control valve to control the valve opening. For example, generate a deviation control instruction b1 according to the deviation a1 - a2, and the electronic control valve adjusts the valve opening c1.

[0095] In this embodiment, differential pressure control strategies, such as the differential pressure control strategy of the PID controller and the differential pressure control strategy of the flow controller.

[0096] The beneficial effect of the above technical solution is that: the deviation control instruction is generated by the PID controller and sent to the electronic control valve, and the valve opening is adjusted to make the pressure data on the bypass side consistent with the pressure data on the reaction chamber side, effectively realizing the pressure balance control.

[0097] The embodiment of the present invention provides a differential pressure control system, a control switching unit, including:

[0098] A differential pressure anomaly block, used to locate the abnormal period of the differential pressure control of the PID controller when it is monitored that the deviation control instruction generated by the PID controller and sent to the electronic control valve still has a differential pressure when adjusting the valve opening;

[0099] A valve opening block, used to locate the fully open period and the fully closed period when it is monitored that the valve opening of the electronic control valve is the fully open opening or the fully closed opening;

[0100] A control switching block, used to match the abnormal period of the differential pressure control of the PID controller with the fully open period and the fully closed period. If there is no matching period, continue to adjust the deviation control instruction according to the PID controller to adjust the valve opening to make the pressure data on the bypass side consistent with the pressure data on the reaction side;

[0101] Otherwise, switch the differential pressure control strategy of the PID controller to the differential pressure control strategy of the flow controller.

[0102] In this embodiment, when it is monitored that the PID controller generates and issues a deviation control instruction to the electronic control valve, and there is still a differential pressure when adjusting the valve opening, that is, the differential pressure control by the PID controller cannot achieve differential pressure control. For example, when the valve opening is adjusted to the fully open position, there is still a differential pressure between the pressure data on the reaction chamber side and the pressure data on the bypass side.

[0103] In this embodiment, during the abnormal period of the differential pressure control of the PID controller, for example, if there is still a differential pressure when adjusting the valve opening during the monitoring period t1, then the monitoring period t1 is the abnormal period of the differential pressure control of the PID controller.

[0104] In this embodiment, the abnormal period of the differential pressure control of the PID controller is matched with the fully open period and the fully closed period. For example, the abnormal period t1 of the differential pressure control of the PID controller, the fully open period t2, and the fully closed period t3 are matched in terms of time period.

[0105] In this embodiment, there is a matching period. For example, there is an overlapping period between t1 and t2.

[0106] In this embodiment, the differential pressure control strategy of the PID controller refers to the strategy of performing differential pressure control by issuing a deviation control instruction through the PID controller.

[0107] In this embodiment, the differential pressure control strategy of the flow controller refers to the strategy of achieving differential pressure control by controlling the flow rate of the flow controller on the bypass side.

[0108] The beneficial effects of the above technical solution are as follows: By locating the abnormal period of the differential pressure control of the PID controller and switching the differential pressure control strategy of the PID controller to the differential pressure control strategy of the flow controller, it is beneficial to ensure that the valve opening is not in the fully open / fully closed position, which is convenient for improving the differential pressure control accuracy subsequently.

[0109] The embodiment of the present invention provides a differential pressure control system, a control optimization module, including:

[0110] A flow control unit on the reaction chamber side, configured to enable the differential pressure control strategy of the flow controller. Among them, when the process of the reaction chamber remains unchanged, the parameter data of the flow controller on the reaction chamber side remains unchanged;

[0111] A valve opening optimization unit, configured to obtain the first parameter data of the flow controller on the bypass side when enabling the differential pressure control strategy of the flow controller;

[0112] If the valve opening of the electronic control valve is in the fully open position, record the minimum pressure data on the bypass side corresponding to the bypass side pressure data as the first parameter data;

[0113] If the valve opening of the electronic control valve is the fully closed opening, record the corresponding bypass side pressure data as the maximum bypass side pressure data under the first parameter data;

[0114] Determine the change relationship curve between the valve opening and the bypass side pressure data according to the maximum and minimum bypass side pressure data under the first parameter data in combination with historical monitoring data;

[0115] Preset the bypass side pressure data adjustment rate range and the minimum proportional adjustment valve opening. When it is monitored that the bypass side pressure data adjustment rate is not within the preset bypass side pressure data adjustment rate range, determine the optimized valve opening of the electronic control valve according to the change relationship curve;

[0116] Otherwise, determine the optimized valve opening of the electronic control valve according to the preset optimal valve opening;

[0117] The bypass side flow control unit is used to obtain the optimized pressure data range under the first parameter data corresponding to the optimized valve opening of the electronic control valve;

[0118] Obtain the reaction chamber side pressure data, and combine the maximum and minimum optimized pressure data of the optimized pressure data range to determine the second parameter data of the bypass side flow controller;

[0119] The differential pressure control unit is used to perform simulated flow control according to the second parameter data of the bypass side flow controller and calculate the differential pressure control accuracy of the simulated flow control;

[0120] ; where represents the differential pressure control accuracy of the simulated flow control; represents the flow density of the bypass side flow; represents the bypass side flow under the first parameter data of the bypass side flow controller; represents the bypass side flow increase or decrease under the second parameter data of the bypass side flow controller during the i1th simulated flow control; represents the flow circulation capacity quantization value under the second parameter data of the bypass side flow controller during the i1th simulated flow control; represents the bypass side pressure data when the valve is fully open / fully closed; represents the reaction chamber side pressure data corresponding to the fully open / fully closed valve opening; represents the number of control times of the simulated flow control;

[0121] When it is monitored that the bypass side pressure data is consistent with the reaction chamber side pressure data during the simulated flow control process, the valve opening of the electronic control valve corresponding to the bypass side pressure data is within the optimized valve opening range, and the differential pressure control accuracy is not lower than the preset control accuracy, record the bypass side flow of the simulated flow control as the optimized flow and perform application control.

[0122] In this embodiment, when the process of the reaction chamber remains unchanged, the parameter data of the flow controller on the reaction chamber side remains unchanged; while the flow on the reaction chamber side is determined by the process and cannot be easily changed.

[0123] In this embodiment, the first parameter data of the bypass side flow controller when the differential pressure control strategy of the flow controller is enabled refers to the parameter data that controls the flow circulation capacity of the bypass side flow controller when the differential pressure control strategy of the flow controller is enabled. For example, the quantification value a1 of the flow circulation capacity of the bypass side flow controller when the differential pressure control strategy of the flow controller is enabled corresponds to the first parameter data b1.

[0124] In this embodiment, the quantification value of the flow circulation capacity of the bypass side flow controller refers to the quantification value of the flow that can enter the bypass side flow controller per unit time.

[0125] In this embodiment, the change relationship curve between the valve opening and the bypass side pressure data is determined. For example, when the valve opening changes from the fully closed opening to the fully open opening, the corresponding bypass side pressure data changes from c1 - c2, then the curve c1c2 is the change relationship curve between the valve opening and the bypass side pressure data.

[0126] In this embodiment, the adjustment rate of the bypass side pressure data refers to the change value of the pressure data when adjusting the valve opening. For example, near the fully open valve opening, the valve opening is adjusted in the smallest proportion, and the pressure data change value is c3; near the half-open valve opening, the valve opening is adjusted in the smallest proportion, and the pressure data change value is c4.

[0127] In this embodiment, a preset range of the adjustment rate of the bypass side pressure data is used to limit the change value of the pressure data corresponding to the smallest proportion of adjusting the valve opening, so as to ensure the differential pressure control accuracy. For example, if the change value c3 of the pressure data when the valve opening is adjusted in the smallest proportion exceeds the preset range of the adjustment rate of the bypass side pressure data, it is difficult to achieve fine differential pressure control, which will lead to a decrease in differential pressure control accuracy.

[0128] In this embodiment, the valve opening is adjusted in the smallest proportion, for example, the smallest adjustment of the valve opening is 1 degree.

[0129] In this embodiment, the optimized valve opening of the electronic control valve is determined according to the change relationship curve. For example, when the valve opening is in the 0.1 - 0.9 opening range and the adjustment rate of the bypass side pressure data is within the preset range of the adjustment rate of the bypass side pressure data, then the 0.1 - 0.9 opening range is the optimized valve opening of the electronic control valve.

[0130] In this embodiment, a preset optimal valve opening is set, for example, 0.15 - 0.95.

[0131] In this embodiment, the optimized pressure data range corresponding to the optimized valve opening of the electronic control valve refers to the pressure data range for differential pressure control by the PID controller. For example, the optimized pressure data range is (c1, c3). When the pressure data on the reaction chamber side is within (c1, c3), differential pressure control is performed according to the PID controller; otherwise, differential pressure control is performed according to the flow controller.

[0132] In this embodiment, the second parameter data of the bypass side flow controller refers to the parameter data for controlling the flow capacity of the bypass side flow controller when enabling the differential pressure control strategy of the flow controller. For example, the second parameter data is b2, corresponding to the quantified value a2 of the flow capacity of the bypass side flow controller when enabling the differential pressure control strategy of the flow controller.

[0133] In this embodiment, the optimized flow rate, for example, the optimized flow rate d2, adjusts the flow rate entering the bypass side from d1 to d2, which not only realizes differential pressure control but also improves the differential pressure control accuracy.

[0134] The beneficial effects of the above technical solution are: when the control is abnormal, the differential pressure control of the flow rate on the bypass side is performed according to the flow controller on the bypass side, and the flow rate on the bypass side is recorded as the optimized flow rate and applied for control, which not only effectively realizes differential pressure control but also improves the differential pressure control accuracy.

[0135] An embodiment of the present invention provides a differential pressure control system, and a differential pressure feedback module, including:

[0136] A feedback control unit for monitoring the adjusted differential pressure after the valve is adjusted or the bypass side flow controller is adjusted according to a pre-deployed electronic differential pressure gauge. If there is the adjusted differential pressure, the PID controller generates an adjusted differential pressure control instruction according to the adjusted differential pressure and issues it to the electronic control valve to secondarily adjust the valve opening until the pressure data on the bypass side is consistent with the pressure data on the reaction chamber side;

[0137] A cycle control unit for setting a differential pressure control period and regularly determining the deviation between the pressure data on the bypass side and the pressure data on the reaction chamber side and inputting it into the PID controller for differential pressure cycle control.

[0138] In this embodiment, the adjusted differential pressure refers to the differential pressure after the PID controller performs differential pressure control or the bypass side flow controller performs differential pressure control.

[0139] In this embodiment, the adjusted differential pressure control instruction is used to secondarily control the adjusted differential pressure to ensure the pressure balance between the reaction chamber side and the bypass side.

[0140] In this embodiment, the differential pressure control period, for example, is the t1 period.

[0141] The beneficial effects of the above technical solution are as follows: By continuously monitoring and adjusting the pressure data on the reaction chamber side and the bypass side in real time, the pressure control balance is effectively ensured, thereby ensuring the material quality.

[0142] The embodiment of the present invention provides a differential pressure control system, further comprising:

[0143] A differential pressure visualization module for visually displaying the differential pressure between the pressure data on the reaction chamber side and the pressure data on the bypass side;

[0144] An early warning control module for generating corresponding warnings and performing abnormal control when the pressure is abnormal or the differential pressure control is abnormal.

[0145] In this embodiment, if there is a differential pressure between the pressure data on the reaction chamber side and the pressure data on the bypass side, the corresponding differential pressure value is visually marked with a color. For example, it is visually processed with a red mark.

[0146] In this embodiment, when the pressure is abnormal, a pressure abnormal warning is generated and abnormal control is performed. For example, the valve opening of the bypass side is adjusted to release the pressure.

[0147] The beneficial effects of the above technical solution are as follows: By visualizing the differential pressure, it is beneficial for the staff to discover the differential pressure and perform differential pressure control; generating warnings and performing abnormal control is beneficial for ensuring the normal and stable operation of the differential pressure control.

[0148] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A pressure difference control system, characterized in that: include: A pressure differential monitoring module is used to monitor the pressure data of the reaction chamber side and the bypass side in real time according to the pre-deployed electronic pressure differential gauge and summarize the data; The pressure difference control module is used for sending a deviation control instruction to the electronic regulating valve according to the PID operator when the pressure data on the reaction chamber side is detected to be inconsistent with the pressure data on the bypass side, so as to adjust the valve opening until the pressure data on the bypass side is consistent with the pressure data on the reaction chamber side; The control optimization module is used to perform pressure difference control on the flow on the bypass side according to the flow controller on the bypass side when the control is abnormal. When the monitored pressure data is consistent and the pressure difference control accuracy is not lower than the preset control accuracy, the bypass side flow is recorded as the optimized flow and the control is applied; The pressure difference feedback module is used for continuous monitoring and real-time feedback adjustment of the pressure data on the reaction chamber side and the bypass side; Among them, the control optimization module includes: A reaction chamber side flow control unit, used to enable a flow controller pressure difference control strategy, wherein when the reaction chamber process remains unchanged, the reaction chamber side flow controller parameter data remains unchanged; A valve opening optimization unit, used for obtaining first parameter data of a bypass side flow controller when a pressure difference control strategy of the flow controller is enabled; If the valve opening of the electronic regulating valve is fully open, the corresponding bypass side pressure data is recorded as the minimum bypass side pressure data under the first parameter data; If the valve opening of the electronic regulating valve is fully closed, the corresponding bypass side pressure data is recorded as the maximum bypass side pressure data under the first parameter data; Determine a curve of the relationship between the valve opening and the bypass side pressure data according to the bypass side maximum pressure data under the first parameter data and the historical monitoring data; A bypass side pressure data regulation rate range and a minimum proportional regulation valve opening are preset, and when it is monitored that the bypass side pressure data regulation rate is not within the preset bypass side pressure data regulation rate range, the optimized valve opening of the electronic regulating valve is determined according to the change relationship curve; Otherwise, determining the optimal valve opening of the electronic control valve according to the preset optimal valve opening; A bypass side flow control unit, used to obtain an optimized pressure data range under the first parameter data corresponding to the optimized valve opening of the electronic control valve; Acquire the pressure data of the reaction chamber side, and determine the second parameter data of the bypass side flow controller by combining the maximum value optimized pressure data of the optimized pressure data range; A pressure difference control unit, used for performing analog flow control according to the second parameter data of the bypass side flow controller, and calculating the pressure difference control accuracy of the analog flow control; ;in, Indicates the differential pressure control accuracy of analog flow control; Indicates the flow density of the bypass side flow; Indicates the bypass side flow rate under the first parameter data of the bypass side flow controller; Indicates The amount of flow increase or decrease on the bypass side under the second parameter data of the bypass side flow controller during the secondary simulation flow control; Indicates The quantitative value of the flow capacity of the bypass side flow controller under the second parameter data during the secondary simulation flow control; Indicates the bypass side pressure data when the valve is fully open / fully closed; Indicates the pressure data on the reaction chamber side when the valve is fully open / fully closed; Indicates the control times of simulated flow control; When it is monitored that the bypass side pressure data during the simulated flow control process is consistent with the reaction chamber side pressure data, the valve opening of the electronic regulating valve corresponding to the bypass side pressure data is within the optimized valve opening range and the pressure difference control accuracy is not lower than the preset control accuracy, the bypass side flow of the simulated flow control is recorded as the optimized flow and application control is performed.

2. A pressure difference control system according to claim 1, characterized in that: Differential pressure monitoring module, including: The pressure differential deployment unit is used to pre-deploy an electronic pressure differential gauge at a preset monitoring position. When the electronic pressure differential gauge correctly monitors the pressure data on the reaction chamber side and the pressure data on the bypass side, the pre-deployment is completed; A pressure differential monitoring unit, used to monitor the pressure data on the reaction chamber side and the bypass side in real time according to a pre-deployed electronic pressure differential gauge; The pressure difference aggregation unit is used to transmit the pressure data to the pressure difference control platform in real time and aggregate the data according to the monitoring period.

3. A pressure difference control system according to claim 2, characterized in that: The differential pressure monitoring module also includes: A data cleaning unit is used to clean the summary data, remove erroneous data from the pressure data, and supplement missing data; The warning unit is used to analyze the summary data of the cleaning completion. When the pressure data on the reaction chamber side is monitored to be inconsistent with the pressure data on the bypass side, it is determined that there is a pressure difference in the reaction chamber, and a warning is given to perform pressure difference control; The pressure threshold of the reaction chamber side and the pressure threshold of the bypass side are obtained. When the monitored pressure data exceeds the corresponding pressure threshold, the pressure is determined to be abnormal, the pressure abnormal data is marked and a pressure abnormal alarm is executed.

4. A pressure difference control system according to claim 1, characterized in that: Differential pressure control module, comprising: A pressure difference input unit, used to obtain pressure difference data when the pressure data on the reaction chamber side is inconsistent with the pressure data on the bypass side, determine the deviation of the pressure difference data and input it into the PID operator; A PID control unit is used to generate a deviation control instruction according to the PID operator and send it to the electronic control valve to adjust the valve opening until the pressure data on the bypass side is consistent with the pressure data on the reaction chamber side; A control switching unit, used to switch the pressure difference control strategy when a control abnormality is detected; Wherein, when the pressure data on the reaction chamber side is higher than the pressure data on the bypass side, the valve opening is reduced according to the deviation control instruction; When the pressure data on the reaction chamber side is lower than the pressure data on the bypass side, the valve opening is increased according to the deviation control instruction.

5. A pressure difference control system according to claim 4, characterized in that: Control switching unit, comprising: The pressure difference abnormality block is used to locate the abnormal period of the PID operator pressure difference control when it is detected that the PID operator generates and sends a deviation control command to the electronic control valve, and there is still a pressure difference when the valve opening is adjusted; The valve opening block is used to locate the fully open opening period and the fully closed opening period when the valve opening of the electronic regulating valve is monitored to be fully open or fully closed; A control switching block is used to match the abnormal period of the differential pressure control of the PID operator with the fully open opening period and the fully closed opening period. If there is no matching period, the deviation control instruction is continuously adjusted according to the PID operator to adjust the valve opening until the bypass side pressure data is consistent with the reaction side pressure data; Otherwise, switch the PID operator pressure difference control strategy to the flow controller pressure difference control strategy.

6. A pressure difference control system according to claim 1, characterized in that: Differential pressure feedback module, including: A feedback control unit is used to monitor the regulated pressure difference after the valve is adjusted or after the bypass side flow controller is adjusted according to the pre-deployed electronic differential pressure gauge. If the regulated pressure difference exists, the PID operator generates a regulated pressure difference control instruction according to the regulated pressure difference and sends it to the electronic regulating valve, and secondarily adjusts the valve opening until the bypass side pressure data is consistent with the reaction chamber side pressure data; The circulation control unit is used to set the pressure difference control cycle, regularly determine the deviation between the bypass side pressure data and the reaction chamber side pressure data and input it into the PID operator to perform pressure difference circulation control.

7. A pressure difference control system according to claim 1, characterized in that: Also includes: A pressure difference visualization module is used to visualize the pressure difference between the pressure data on the reaction chamber side and the pressure data on the bypass side; The early warning control module is used to generate corresponding early warnings and perform abnormal control when the pressure is abnormal or the pressure difference control is abnormal.

Citation Information

Patent Citations

  • Backpressure gas path device, reaction chamber base backpressure control method and reaction chamber

    CN111599718A

  • Semiconductor device and chamber pressure control method

    CN112281143A