Dispensing valve drive device and dispensing equipment

By using a combination of piezoelectric stacking part and a pressing part in the dispensing valve drive device, the problem of large control deviation in the prior art is solved, and more precise dispensing valve control is achieved, and the quality and accuracy of dispensing are improved. .

CN118577446BActive Publication Date: 2025-01-17SHENZHEN TENSUN IND EQUIP
View PDF 6 Cites 0 Cited by

Patent Information

Application Number
CN202411056179.2
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-08-02
Publication Date
2025-01-17
Estimated Expiration
2044-08-02

AI Technical Summary

Technical Problem

The existing dispensing valve drive devices have large control deviations, which affects the quality and accuracy of dispensing.

Method used

Design a dispensing valve driving device, by setting two piezoelectric stacking parts between the driving part of the driving lever and the base, and controlling its height to adjust in the opposite direction by changing the voltage, pushing the working part of the driving lever to lift up Or press down, use the pressing part to press the driving lever to the piezoelectric stacking part to limit errors caused by temperature changes and ensure accurate movement.

Benefits of technology

It reduces the deviation of the drive device during the control process, improves the quality and accuracy of the glue dispensing, and ensures accurate control of the glue dispensing valve.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN118577446B_ABST
    Figure CN118577446B_ABST
Patent Text Reader

Abstract

The present invention is applicable to the technical field of dispensing equipment, and provides a dispensing valve driving device and a dispensing equipment, wherein the dispensing valve driving device comprises a base, a driving lever, a piezoelectric stacking part and a clamping part. The dispensing equipment comprises the above-mentioned dispensing valve driving device. Compared with the dispensing valve driving device in the prior art, two piezoelectric stacking parts are arranged between the driving part of the driving lever and the base, and the heights of the two piezoelectric stacking parts are simultaneously controlled by changing the voltage to adjust in opposite directions to push the working part of the driving lever to lift up or press down. And because the contact position between the clamping part and the driving lever is constant, the error caused by the temperature rise of the two piezoelectric stacking parts after long-term operation will not be transmitted to the driving lever, so that the movement of the working part of the driving lever is more precise, and then the control of the dispensing valve by the working part is more precise, which reduces the deviation of the dispensing valve driving device in the control process and improves the quality and accuracy of dispensing.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The invention belongs to the technical field of glue dispensing equipment, and in particular relates to a glue dispensing valve driving device and glue dispensing equipment. Background Art

[0002] Glue dispensing is a process step that needs to be applied in the fields of mobile phone manufacturing, semiconductors, PCB (Printed Circuit Board) manufacturing, SMT (Surface Mount Technology) manufacturing, etc. Glue dispensing is usually carried out using glue dispensing equipment. During the working process of the glue dispensing equipment, a glue dispensing valve driver is usually used to control the working state of the glue dispensing valve. However, most of the existing glue dispensing valve drivers have the problem of large control deviation, which seriously affects the quality and accuracy of glue dispensing. Summary of the invention

[0003] The purpose of the present invention is to provide a dispensing valve driving device and a dispensing device, aiming to solve the technical problem of large control deviation existing in the prior art dispensing valve driving device when in use.

[0004] The present invention is implemented in this way. In a first aspect, a dispensing valve driving device is provided, comprising:

[0005] a base having a mounting surface;

[0006] A driving lever is arranged at a distance from the mounting surface, the driving lever comprises a driving part and a working part, the driving part and the working part are respectively located at two ends of the driving lever, the working part is used to connect with the control end of the dispensing valve to drive the control end to move when the driving lever moves;

[0007] There are two piezoelectric stacking parts, both of which are supported between the mounting surface and the driving part, and the two piezoelectric stacking parts are spaced apart along the length direction of the driving lever, and the piezoelectric stacking parts are used to change their own height when the voltage applied to themselves changes, so as to drive the driving lever to move, and the height change directions of the two piezoelectric stacking parts are always opposite; and

[0008] A clamping portion is at least partially connected to the driving lever, and is used to apply a force to the driving lever toward the piezoelectric stacking portion to press the driving lever against the piezoelectric stacking portion. The connection position between the clamping portion and the driving lever is a first connection position, and the connection position between the piezoelectric stacking portion and the driving lever is a second connection position. The first connection position is located between the two second connection positions.

[0009] In an optional embodiment, the working part is provided with a pressure head portion for connecting to the control end of the dispensing valve, and an adjustment structure is provided between the pressure head portion and the working part, and the adjustment structure is used to adjust the relative position of the pressure head portion and the working part.

[0010] In an optional embodiment, the adjustment structure includes a connecting rod and a locking piece, at least a portion of the connecting rod is threadedly connected to the working part, the pressure head part is connected to the end of the connecting rod, the locking piece is mounted on the connecting rod and threadedly connected to the connecting rod, and the locking piece is used to fix the connecting rod after the adjustment of the connecting rod is completed.

[0011] In an optional embodiment, a deflection structure is further provided between the piezoelectric stack portion and the driving lever and / or the base, and when the height dimension of the piezoelectric stack portion changes, the piezoelectric stack portion can be deflected as a whole by the deflection structure.

[0012] In an optional embodiment, the deflection structure includes a hinge portion and a rotation axis, wherein a portion of the hinge portion is connected to the piezoelectric stack portion, another portion of the hinge portion is connected to the rotation axis, and the rotation axis is rotationally connected to the driving portion or the base.

[0013] In an optional embodiment, the deflection structure includes a connecting block having a deformation portion that can be elastically deformed when subjected to an external force.

[0014] In an optional embodiment, the dispensing valve driving device further includes a stabilizing structure, and the stabilizing structure is disposed in a region between the driving lever and the mounting surface, and the stabilizing structure is used to maintain the stability of the movement of the driving lever.

[0015] In an optional embodiment, the stabilizing structure includes an elastic connector, which can undergo elastic deformation when subjected to force, and the elastic connector only has the freedom to undergo elastic deformation along the height direction of the piezoelectric stacking portion, one end of the elastic connector is connected to the driving lever, and the other end of the elastic connector is connected to the mounting surface.

[0016] In an optional embodiment, the stabilizing structure includes a limit pin, a first end of the limit pin is connected to the mounting surface, a second end of the limit pin extends in a direction close to the driving lever, a limit groove is provided on the driving lever, the second end of the limit pin is movably inserted into the limit groove through the mouth of the limit groove, and the interior of the limit groove only has the freedom to move along the height direction of the piezoelectric stacking part relative to the limit pin.

[0017] In a second aspect, a dispensing device is provided, comprising a dispensing valve driving device as described in any one of the above items.

[0018] The technical effect of the present invention relative to the prior art is: by arranging two piezoelectric stacking parts between the driving part and the base of the driving lever, the two piezoelectric stacking parts are arranged at intervals along the length direction of the driving lever, and are also connected to the driving lever through at least part of the clamping part, and a force toward the piezoelectric stacking part is applied to the driving lever to clamp the driving lever against the piezoelectric stacking part. The connection position between the clamping part and the driving lever is the first connection position, and the connection position between the piezoelectric stacking part and the driving lever is the second connection position, and the first connection position is located between the two second connection positions. Compared with the dispensing valve driving device in the prior art, the two piezoelectric stacking parts are arranged between the driving part and the base of the driving lever, and the heights of the two piezoelectric stacking parts are simultaneously controlled by changing the voltage to adjust in opposite directions to push the working part of the driving lever to be lifted up or pressed down. Since the first connection position is located between the two second connection positions and the contact position between the clamping part and the driving lever is constant, the height change of the two piezoelectric stacking parts caused by temperature rise after working for a long time will be limited by the clamping part, so that the error caused by temperature rise will not be transmitted to the driving lever, making the movement of the working part of the driving lever more precise, and then making the working part more precise in controlling the dispensing valve, reducing the deviation of the driving device in the control process, and improving the quality and accuracy of dispensing.

[0019] It can be understood that the beneficial effects of the second aspect mentioned above can be found in the relevant description of the first aspect mentioned above, and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments of the present invention or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 is a schematic structural diagram of a dispensing valve driving device provided in Embodiment 1 of the present invention;

[0022] Figure 2 is a schematic structural diagram of a dispensing valve driving device provided in Embodiment 2 of the present invention;

[0023] Figure 3 is a schematic diagram of the structure of a dispensing valve driving device provided in Embodiment 3 of the present invention;

[0024] Figure 4 is a schematic structural diagram of a dispensing valve driving device provided in a fourth embodiment of the present invention;

[0025] Figure 5 is a structural schematic diagram of a dispensing valve driving device provided in Embodiment 5 of the present invention;

[0026] Figure 6 is a structural schematic diagram of a dispensing valve driving device provided in Embodiment 6 of the present invention;

[0027] Figure 7 is a structural schematic diagram of a dispensing valve driving device provided in Embodiment 7 of the present invention;

[0028] Figure 8 is a schematic structural diagram of a dispensing valve driving device provided in Embodiment 8 of the present invention;

[0029] Fig. 9 It is a structural schematic diagram of a dispensing valve driving device provided in Embodiment 9 of the present invention.

[0030] Description of reference numerals:

[0031] 1. Base; 101. Mounting surface; 2. Driving lever; 201. Driving part; 202. Working part; 3. Piezoelectric stacking part; 4. Pressing part; 401. Pressing rod body; 402. Pressing cap; 5. Pressing head part; 6. Adjusting structure; 601. Connecting rod; 602. Locking piece; 7. Position detection unit; 8. Deflection structure; 801. Hinge part; 802. Rotating axis; 803. Connecting block; 804. Deformation part; 9. Stabilizing structure; 901. Elastic connecting part; 902. Limiting pin; 903. Limiting groove; 10. Temperature detection unit. DETAILED DESCRIPTION

[0032] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0033] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0034] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0035] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments.

[0037] Please refer to Figures 1 to 9 As shown, in an embodiment of the present invention, a dispensing valve driving device is provided, and the dispensing valve driving device includes a base 1, a driving lever 2, a piezoelectric stacking part 3 and a pressing part 4. The base 1 has a mounting surface 101. The driving lever 2 is spaced apart from the mounting surface 101, and the driving lever 2 has a driving part 201 and a working part 202, and the driving part 201 and the working part 202 are respectively located at the two ends of the driving lever 2, and the working part 202 is used to connect with the control end of the dispensing valve to drive the control end to move when the driving lever 2 moves. There are two piezoelectric stacking parts 3, and both piezoelectric stacking parts 3 are supported between the mounting surface 101 and the driving part 201. The two piezoelectric stacking parts 3 are spaced apart along the length direction of the driving lever 2, and the piezoelectric stacking part 3 is used to change its own height when the voltage applied to itself changes, so as to promote the movement of the driving lever 2, and the height change directions of the two piezoelectric stacking parts 3 are always opposite. The clamping portion 4 is at least partially connected to the driving lever 2, and is used for applying a force toward the piezoelectric stacking portion 3 to the driving lever 2 so as to press the driving lever 2 against the piezoelectric stacking portion 3. The connection position between the clamping portion 4 and the driving lever 2 is a first connection position, and the connection position between the piezoelectric stacking portion 3 and the driving lever 2 is a second connection position. The first connection position is located between the two second connection positions.

[0038] Specifically, the base 1 refers to a supporting component with a certain volume, and the base 1 can be in the shape of a block, a plate, or a combination of multiple shapes. The mounting surface 101 refers to a surface structure with a certain area, and the mounting surface 101 can be a plane structure. The driving lever 2 refers to a rigid component with a certain length, and the shape of the driving lever 2 can be a column, a block, or a strip. The driving lever 2 and the mounting surface 101 are arranged at intervals from each other, and the driving lever 2 is generally arranged in a direction parallel to the mounting surface 101. The driving part 201 refers to an area on the driving lever 2 close to one end, and the working part 202 refers to an area on the driving lever 2 close to the other end. The driving part 201 and the working part 202 can be spaced from each other or connected together. The clamping part 4 refers to a component with a certain volume, and the clamping part 4 can be a single component, and its shape can be a block, a rod, or a column. The clamping part 4 can also be a combination of multiple shapes. The clamping part 4 can be connected to the driving lever 2 at one end and to the base 1 at the other end. The driving lever 2 can be pressed against the piezoelectric stacking part 3 by applying a pulling force to the driving lever 2 through the clamping part 4, so that both the driving lever 2 and the piezoelectric stacking part 3 are fixed on the base 1.

[0039] The piezoelectric stacking part 3 refers to a structure composed of a plurality of components made of piezoelectric materials stacked together, and the overall shape of the piezoelectric stacking part 3 can be columnar, block-shaped or rod-shaped. The end of the piezoelectric stacking part 3 can be connected to the driving lever 2 or the base 1 by bonding, abutting or clamping. The piezoelectric material refers to a material that can generate voltage under the action of an external force, or generate mechanical strain (such as dimensional change) by applying a voltage. By stacking a plurality of plates made of piezoelectric materials together and applying a certain initial voltage to the piezoelectric stacking part 3, the size of each plate made of piezoelectric material will change after the voltage applied to the piezoelectric stacking part 3 changes. At this time, the sum of the deformation amounts of the plates made of the plurality of piezoelectric materials is the overall dimensional change amount of the piezoelectric stacking part 3. The height direction of the piezoelectric stacking part 3 refers to the extension direction of the line between the base 1 and the driving lever 2 at the position where the piezoelectric stacking part 3 is located.

[0040] The working principle of the dispensing valve drive device in this embodiment is as follows:

[0041] When working, the same initial voltage is first applied to the two piezoelectric stacking parts 3. At this time, the working part 202 of the driving lever 2 is located in the initial position. When the driving lever 2 needs to swing downward relative to the initial position, the voltage applied to the piezoelectric stacking part 3 farther away from the working part 202 can be increased, and the voltage applied to the piezoelectric stacking part 3 closer to the working part 202 can be reduced. At this time, the height of the piezoelectric stacking part 3 farther away from the working part 202 increases, and the height of the piezoelectric stacking part 3 closer to the working part 202 decreases, and the first connecting position is located between the two second connecting positions, so that the working part 202 of the driving lever 2 can be swung downward with the first connecting position as the axis point. When the driving lever 2 needs to swing upward relative to the initial position, the voltage applied to the piezoelectric stacking portion 3 farther from the working portion 202 can be reduced, and the voltage applied to the piezoelectric stacking portion 3 closer to the working portion 202 can be increased. At this time, the height of the piezoelectric stacking portion 3 farther from the working portion 202 is reduced, and the height of the piezoelectric stacking portion 3 closer to the working portion 202 is increased, and the first connecting position is located between the two second connecting positions. Therefore, the working portion 202 of the driving lever 2 can swing upward with the first connecting position as the axis point, so that the working portion 202 can control the dispensing valve.

[0042] The dispensing valve driving device provided by the embodiment of the present invention is provided with two piezoelectric stacking parts 3 between the driving part 201 of the driving lever 2 and the base 1, and the two piezoelectric stacking parts 3 are arranged at intervals along the length direction of the driving lever 2. And it is also connected to the driving lever 2 through at least part of the pressing part 4, and a force toward the piezoelectric stacking part 3 is applied to the driving lever 2 to press the driving lever 2 against the piezoelectric stacking part 3. The connection position between the pressing part 4 and the driving lever 2 is the first connection position, and the connection position between the piezoelectric stacking part 3 and the driving lever 2 is the second connection position, and the first connection position is located between the two second connection positions. Compared with the dispensing valve driving device in the prior art, the two piezoelectric stacking parts 3 are arranged between the driving part 201 of the driving lever 2 and the base 1, and the heights of the two piezoelectric stacking parts 3 are simultaneously controlled by changing the voltage to adjust in opposite directions to push the working part 202 of the driving lever 2 to be lifted or pressed down. And because the contact position between the clamping part 4 and the driving lever 2 is constant, the height change of the two piezoelectric stacking parts 3 caused by temperature increase after long-term operation will be limited by the clamping part 4, so that the error caused by temperature increase will not be transmitted to the driving lever 2, making the movement of the working part 202 of the driving lever 2 more precise, and then the working part 202 controls the dispensing valve more accurately, reducing the deviation of the dispensing valve drive device during the control process and improving the quality and accuracy of dispensing.

[0043] In addition, the working pressure difference applied to the two piezoelectric stacking parts 3 and the frequency of the pressure difference change can be kept consistent, so that the temperature rise amplitude of the two piezoelectric stacking parts 3 is also kept consistent. At this time, the errors caused by temperature rise on the two piezoelectric stacking parts 3 will also offset each other, and will not be amplified by the swing of the driving lever 2, thereby effectively ensuring the accuracy of the displacement output at the working part 202 of the driving lever 2.

[0044] In one embodiment, see Figures 1 to 9 The clamping part 4 includes a clamping rod body 401 and a clamping cap 402. The first end of the clamping rod body 401 is movably connected to the base 1. The second end of the clamping rod body 401 extends to the side of the driving lever 2 away from the base 1 after passing through the driving lever 2. The clamping cap 402 is arranged at the second end of the clamping rod body 401, and the clamping cap 402 abuts against the side of the driving lever 2 away from the base 1. Specifically, the clamping rod body 401 refers to a rod-shaped component with a certain length. The clamping rod body 401 is generally arranged along the height direction of the piezoelectric stacking part 3. The first end of the clamping rod body 401 can be movably connected to the base 1 by means of threaded connection or the like. The second end of the clamping rod body 401 extends to the side of the driving lever 2 away from the base 1 after passing through the driving lever 2. The clamping cap 402 is arranged at the second end of the clamping rod body 401, and the clamping cap 402 abuts against the side of the driving lever 2 away from the base 1. The clamping rod body 401 can be rotated to move along its own axis under the action of the thread, so that the clamping cap 402 pushes the driving lever 2 toward the piezoelectric stacking part 3, making the installation and fixation of the driving lever 2 more convenient.

[0045] In an optional embodiment, a positioning groove is further provided at the surface where the driving lever 2 contacts the two piezoelectric stacking parts 3. The specific positioning groove refers to a groove structure with a certain depth, and one end of the piezoelectric stacking part 3 can be abutted against the bottom surface of the positioning groove. The positioning groove can provide an indication of the position of the installation of the piezoelectric stacking part 3 during assembly, thereby improving the efficiency and accuracy of assembly.

[0046] In addition, the driving lever 2 can be made of a material with high thermal conductivity, such as metal, and the heat generated by the piezoelectric stacking part 3 can be transferred to the driving lever 2 by the piezoelectric stacking part 3 abutting against the driving lever 2. This can improve the heat dissipation performance of the driving lever 2 and the piezoelectric stacking part 3, avoid the error caused by the temperature increase of the piezoelectric stacking part 3 to a certain extent, and improve the accuracy of the system.

[0047] In one embodiment, see Figures 1 to 9, a pressure head 5 for connecting with the control end of the dispensing valve is provided on the working part 202, and an adjustment structure 6 is provided between the pressure head 5 and the working part 202, and the adjustment structure 6 is used to adjust the relative position of the pressure head 5 and the working part 202. Specifically, the pressure head 5 refers to a component with a certain volume, and the pressure head 5 can be connected with the control end of the dispensing valve by abutment, hinge, fastener or clamping, etc., and the adjustment structure 6 refers to a component or assembly that can adjust the distance between two objects, and its function is to adjust the relative position of the pressure head 5 and the working part 202. By setting the pressure head 5 on the working part 202 to be connected with the control end of the dispensing valve, and providing the adjustment structure 6 between the pressure head 5 and the working part 202, the relative position between the pressure head 5 and the working part 202 can be adjusted by the adjustment structure 6 before working, so that the pressure head 5 is at the zero position, so as to eliminate the errors caused by manufacturing and assembly, thereby further ensuring the stability and accuracy of the displacement output at the working part 202.

[0048] In one embodiment, see Figures 1 to 9 The adjustment structure 6 includes a connecting rod 601 and a locking member 602. At least a portion of the connecting rod 601 is threadedly connected to the working portion 202. The pressure head 5 is connected to the end of the connecting rod 601. The locking member 602 is sleeved on the connecting rod 601 and threadedly connected to the connecting rod 601. The locking member 602 is used to fix the connecting rod 601 after the adjustment of the connecting rod 601 is completed. Specifically, the connecting rod 601 refers to a rod-shaped component with a certain length. At least a portion of the connecting rod 601 is threadedly connected to the working portion 202. It means that a mounting hole can be provided at the working portion 202 of the driving lever 2. The mounting hole can be a blind hole or a through hole. At least a portion of the connecting rod 601 is arranged in the mounting hole, and the connecting rod 601 is threadedly connected to the inner wall of the mounting hole. The locking member 602 refers to a component with a certain volume, and the locking member 602 can be columnar, block-shaped, etc. The locking member 602 is provided with a mounting hole, and the connecting rod 601 is inserted into the mounting hole to achieve the locking member 602 being sleeved on the outside of the connecting rod 601. When the position of the pressure head 5 needs to be adjusted, the connecting rod 601 can be rotated around its own axis, so that the connecting rod 601 can move along its own axis relative to the working part 202 under the action of the thread of the connecting rod 601, and the pressure head 5 is connected to the end of the connecting rod 601, and when the connecting rod 601 moves, the pressure head 5 can be driven to move together, so that the position of the pressure head 5 can be adjusted. At the same time, a locking piece 602 is also mounted on the outside of the connecting rod 601, and the locking piece 602 is threadedly connected to the connecting rod 601. After the position of the connecting rod 601 is adjusted into place, the locking piece 602 can be rotated to move the locking piece 602 along the axial direction of the connecting rod 601 to a position abutting against the driving lever 2, thereby fixing the position of the connecting rod 601 and preventing the connecting rod 601 from loosening during operation.

[0049] In an alternative embodiment, see Figures 1 to 9 The locking member 602 is columnar, and the cross-section of the locking member 602 is polygonal, so that the locking member 602 can be rotated more conveniently.

[0050] In one embodiment, see Figures 1 to 9 The dispensing valve driving device also includes a position detection unit 7, which is used to detect the position of the pressure head 5. Specifically, the position detection unit 7 refers to a component that can detect the change in the position of an object. The position detection unit 7 can be inductive, differential transformer, eddy current, Hall sensor, grating, magnetic grating, etc. Through the setting of the position detection unit 7, it is possible to monitor in real time whether the position of the pressure head 5 is accurate, and further improve the accuracy of the displacement output.

[0051] In an alternative embodiment, see Figures 1 to 9 The position detection unit 7 includes a sensed part and a sensor, wherein the sensor is arranged on the base 1, and the sensed part can be arranged on the working part 202 of the driving lever 2 or on the pressure head 5, wherein the sensor can be an inductive sensor, a differential transformer sensor, an eddy current sensor, a Hall sensor sensor, a grating sensor, a magnetic grating sensor, etc. At this time, the sensed part can be a grating plate, a magnetic part, etc., and the position detection can be made more accurate through the mutual cooperation between the sensed part and the sensor. The sensor can also be electrically connected to the control unit, and the control unit can also be connected to the voltage input terminal of the piezoelectric stacking part 3. The control unit can determine whether the deviation of the working part 202 is too large by receiving the data measured by the sensor, and adjust the voltage applied to the piezoelectric stacking part 3 accordingly according to the result of the determination, so as to realize the closed loop of the entire control.

[0052] In addition, a support platform for installing the sensor may be provided on the base 1 . The support platform is provided on the installation surface 101 and protrudes from the installation surface 101 , so that the installation of the sensor is more convenient and firm.

[0053] In one embodiment, see Figures 1 to 9, a deflection structure 8 is also provided between the piezoelectric stacking part 3 and the driving lever 2 and / or the base 1, and when the height dimension of the piezoelectric stacking part 3 changes, the piezoelectric stacking part 3 can be deflected as a whole through the deflection structure 8. Specifically, the deflection structure 8 refers to a component or part that can deflect an object relative to its original position through its own movement or deformation. The deflection structure 8 is provided between the piezoelectric stacking part 3 and the driving lever 2 and / or the base 1, including the following situations: Situation 1, the deflection structure 8 is provided between the piezoelectric stacking part 3 and the driving lever 2. Situation 2, the deflection structure 8 is provided between the piezoelectric stacking part 3 and the base 1. Situation 3, the deflection structure 8 is provided between the piezoelectric stacking part 3 and the base 1 and between the piezoelectric stacking part 3 and the driving lever 2. Through the provision of the deflection structure 8, when the driving lever 2 swings as a whole, the piezoelectric stacking part 3 can be offset as a whole through the deflection structure 8, thereby avoiding the bending of the piezoelectric stacking part 3 and affecting the height change of the piezoelectric stacking part 3, and further improving the accuracy of the displacement output of the working part 202 of the driving lever 2.

[0054] In one embodiment, see Figure 1 , Figure 2 as well as Figure 7 The deflection structure 8 includes a hinge portion 801 and a rotation axis 802. At least a portion of the hinge portion 801 is connected to the piezoelectric stack portion 3, and another portion of the hinge portion 801 is connected to the rotation axis 802. The rotation axis 802 is rotationally connected to the driving portion 201 or the base 1. Specifically, the hinge portion 801 refers to a component with a certain volume, and the hinge portion 801 can be block-shaped, plate-mounted or columnar. The rotation axis 802 refers to a cylindrical component with a certain length. By abutting one end of the piezoelectric stack portion 3 against the hinge portion 801, and then the hinge portion 801 is rotationally connected to the driving lever 2 or the base 1 through the rotation axis 802, the piezoelectric stack portion 3 is deflected about the axis of the rotation axis 802.

[0055] In addition, the driving lever 2 or the base 1 may also be provided with a rotating structure for cooperating with the rotating shaft 802. The rotating structure may be a groove provided on the driving lever 2 or the base 1. The rotating shaft 802 is rotatably provided in the groove and can rotate relative to the inner wall of the groove. The rotating structure may also be a sleeve connected to the driving lever 2 or the base 1. At least part of the rotating shaft 802 is rotatably inserted in the sleeve.

[0056] In another embodiment, see Figures 3 to 6 as well as Figure 8 , Fig. 9The deflection structure 8 includes a connecting block 803, and the connecting block 803 has a deformation portion 804 that can be elastically deformed when subjected to an external force. Specifically, the connecting block 803 refers to a component with a certain volume, and the deformation portion 804 refers to a portion on the connecting block 803 that can be elastically deformed when subjected to an external force. The deformation portion 804 can be formed by reducing the local thickness of the connecting block 803, and the deformation portion 804 can also be a composite elastic material between two rigid components to form the entire connecting block 803. By arranging the connecting block 803 between the piezoelectric stacking part 3 and the driving lever 2 and / or the base 1, and having the deformation portion 804 that can be elastically deformed when subjected to an external force on the connecting block 803, the piezoelectric stacking part 3 can be offset as a whole through the deformation portion 804 when the driving lever 2 swings, thereby avoiding the bending of the piezoelectric stacking part 3 and affecting the height change of the piezoelectric stacking part 3, and further improving the accuracy of the displacement output of the working part 202 of the driving lever 2.

[0057] In one embodiment, see Figure 1 , Figures 5 to 9 The dispensing valve driving device further includes a stabilizing structure 9, and the stabilizing structure 9 is disposed in the area between the driving lever 2 and the mounting surface 101, and the stabilizing structure 9 is used to maintain the stability of the movement of the driving lever 2. Specifically, the stabilizing structure 9 refers to a component or assembly used to restrict an object to move in only one direction. By setting the stabilizing structure 9, the driving lever 2 can only move in the height direction along the piezoelectric stacking part 3 or in the direction close to the height direction of the piezoelectric stacking part 3, which can make the movement of the driving lever 2 more stable, and improve the stability and accuracy of the displacement.

[0058] In one embodiment, see Figure 1 , Figure 5 and Figure 6 The stabilizing structure 9 includes an elastic connector 901, which can be elastically deformed when subjected to force, and the elastic connector 901 only has the freedom to be elastically deformed along the height direction of the piezoelectric stacking part 3, one end of the elastic connector 901 is connected to the driving lever 2, and the other end of the elastic connector 901 is connected to the mounting surface 101. Specifically, the elastic connector 901 refers to a component with a certain elasticity, and the elastic connector 901 only has the freedom to be elastically deformed along the height direction of the piezoelectric stacking part 3, and the elastic connector 901 can be an elastic sheet. By connecting one end of the elastic connector 901 to the driving lever 2 and the other end of the elastic connector 901 to the mounting surface 101, the driving lever 2 can only swing along the height direction of the piezoelectric stacking part 3 or close to the height direction of the piezoelectric stacking part 3 under the action of the elastic connector 901, avoiding the driving lever 2 from deflecting in other directions during the swinging process, thereby making the swinging of the driving lever 2 more stable and reliable.

[0059] In another embodiment, see Figures 7 to 9 The stabilizing structure 9 includes a stop pin 902, a first end of which is connected to the mounting surface 101, a second end of which extends toward the direction close to the driving lever 2, a stop groove 903 is provided on the driving lever 2, a second end of which is inserted into the stop groove 903 through the mouth of the stop groove 903, and the interior of the stop groove 903 has only a degree of freedom of movement along the height direction of the piezoelectric stacking part 3 relative to the stop pin 902. Specifically, the stop pin 902 refers to a columnar component with a certain height, and the first end of the stop pin 902 can be connected to the mounting surface 101 by welding, fasteners or clamping. The limiting groove 903 refers to a groove structure with a certain depth. When in use, the depth direction of the limiting groove 903 can be made parallel to the height direction of the piezoelectric stacking part 3. At this time, the second end of the limiting pin 902 is movably inserted into the limiting groove 903. The bottom surface of the limiting groove 903 and the second end of the limiting pin 902 can be spaced apart, but the side wall of the limiting groove 903 abuts against the second end of the limiting pin 902, so that the limiting pin 902 only has the freedom to move along the height direction of the piezoelectric stacking part 3 relative to the inner wall of the limiting groove 903. Therefore, through the cooperation between the limiting pin 902 and the limiting groove 903, the driving lever 2 can only swing along the height direction of the piezoelectric stacking part 3 or close to the height direction of the piezoelectric stacking part 3, so that the displacement of the driving lever 2 is more stable.

[0060] In one embodiment, see Figures 1 to 9 , the dispensing valve driving device also includes a temperature detection unit 10, which is arranged on the driving lever 2 and / or the piezoelectric stacking part 3, and the temperature detection unit 10 is used to detect the temperature of the piezoelectric stacking part 3. Specifically, the temperature detection unit 10 refers to a component that can detect the temperature of an object, and the temperature detection unit 10 can be a thermocouple type, a thermistor or an infrared type. The temperature detection unit 10 is arranged on the driving lever 2 and / or the piezoelectric stacking part 3, including the following situations: Situation 1, the temperature detection unit 10 is arranged on the driving lever 2. Situation 2, the temperature detection unit 10 is arranged on the piezoelectric stacking part 3. Situation 3, the temperature detection unit 10 is arranged on both the driving lever 2 and the piezoelectric stacking part 3. When in use, the temperature detection unit 10 can be connected to the alarm device through the control unit, and an alarm is issued when the temperature of the piezoelectric stacking part 3 is too high, which can prevent the piezoelectric stacking part 3 from being damaged due to excessive temperature caused by long-term use, thereby improving the safety of the use of the piezoelectric stacking part 3.

[0061] In an alternative embodiment, see Figures 1 to 9The temperature detection unit 10 is disposed on the driving lever 2, and the temperature detection unit 10 is disposed at a position of the driving lever 2 close to the piezoelectric stacking part 3. A mounting hole may be disposed on the driving lever 2, and the temperature detection unit 10 is inserted into the mounting hole. By mounting the temperature detection unit 10 on the driving lever 2 close to the piezoelectric stacking part 3, the temperature detection of the two piezoelectric stacking parts 3 can be realized by one temperature detection unit 10.

[0062] In the second aspect, a dispensing device is provided, comprising any of the dispensing valve driving devices described above. Specifically, when in use, the pressure head 5 can be in contact with the driving end of the dispensing valve, and the height of the two piezoelectric stacking parts 3 can be adjusted in opposite directions by changing the voltage to simultaneously control the lifting or pressing of the working part 202 of the driving lever 2 to achieve control of the driving end of the dispensing valve. It can be understood that the beneficial effects of the second aspect described above can be referred to the relevant description in the first aspect described above, and will not be repeated here.

[0063] The above are only preferred embodiments of the present invention, and only specifically describe the technical principles of the present invention. These descriptions are only for explaining the principles of the present invention and cannot be interpreted as limiting the scope of protection of the present invention in any way. Based on the explanations here, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention, and other specific implementations of the present invention that can be associated with by technicians in this field without creative labor, should be included in the scope of protection of the present invention.

Claims

1. A dispensing valve driving device, characterized in that: include: a base having a mounting surface; A driving lever is arranged at a distance from the mounting surface, the driving lever comprises a driving part and a working part, the driving part and the working part are respectively located at two ends of the driving lever, the working part is used to connect with the control end of the dispensing valve, so as to drive the control end to move when the driving lever moves, and the driving lever is made of a material with high thermal conductivity; There are two piezoelectric stacking parts, both of which are supported between the mounting surface and the driving part, and the two piezoelectric stacking parts are arranged at intervals along the length direction of the driving lever, and the piezoelectric stacking parts are used to change their own height when the voltage applied to themselves changes, so as to drive the driving lever to move, and the height change directions of the two piezoelectric stacking parts are always opposite; as well as a pressing portion, at least partially connected to the driving lever, for applying a force to the driving lever toward the piezoelectric stack portion to press the driving lever against the piezoelectric stack portion, wherein the connection position between the pressing portion and the driving lever is a first connection position, the connection position between the piezoelectric stack portion and the driving lever is a second connection position, and the first connection position is located between two of the second connection positions; The dispensing valve driving device also includes a stabilizing structure, and the stabilizing structure is arranged in the area between the driving lever and the mounting surface, and the stabilizing structure is used to maintain the stability of the movement of the driving lever, and the stabilizing structure includes an elastic connecting member, and the elastic connecting member is an elastic sheet body, and the elastic connecting member can be elastically deformed when subjected to force, and the elastic connecting member only has the degree of freedom to elastically deform along the height direction of the piezoelectric stacking part, one end of the elastic connecting member is connected to the driving lever, and the other end of the elastic connecting member is connected to the mounting surface; The working part is provided with a pressure head portion for connecting with the control end of the dispensing valve, and an adjustment structure is provided between the pressure head portion and the working part, and the adjustment structure is used to adjust the relative position of the pressure head portion and the working part; The dispensing valve driving device also includes a position detection unit, which includes a sensed part and a sensor, wherein the sensor is arranged on the base, the sensed part is arranged on the working part of the driving lever or on the pressure head part, and the position detection unit is used to detect the position of the pressure head part, and the position detection unit is electrically connected to the control unit, and the control unit is also connected to the voltage input end of the piezoelectric stacking part, and the control unit is used to determine whether the deviation of the working part is too large by receiving the data measured by the sensor, and adjust the voltage applied to the piezoelectric stacking part according to the result of the determination; The dispensing valve driving device also includes a temperature detection unit, which is arranged on the driving lever and / or the piezoelectric stacking part, and is used to detect the temperature of the piezoelectric stacking part.

2. The dispensing valve driving device according to claim 1, characterized in that: The adjustment structure includes a connecting rod and a locking piece, wherein the connecting rod is at least partially threadedly connected to the working part, the pressure head is connected to the end of the connecting rod, the locking piece is sleeved on the connecting rod and threadedly connected to the connecting rod, and the locking piece is used to fix the connecting rod after the adjustment of the connecting rod is completed.

3. The dispensing valve driving device according to claim 1, characterized in that: A deflection structure is further provided between the piezoelectric stack part and the driving lever and / or the base, and when the height dimension of the piezoelectric stack part changes, the piezoelectric stack part can be deflected as a whole through the deflection structure.

4. The dispensing valve driving device according to claim 3, characterized in that: The deflection structure includes a hinge part and a rotation axis, wherein a part of the hinge part is connected to the piezoelectric stack part, another part of the hinge part is connected to the rotation axis, and the rotation axis is rotationally connected to the driving part or the base.

5. The dispensing valve driving device according to claim 3, characterized in that: The deflection structure comprises a connecting block having a deformation portion which can be elastically deformed when subjected to an external force.

6. A dispensing device, characterized in that: It comprises a dispensing valve driving device as described in any one of claims 1 to 5.

Citation Information

Patent Citations

  • Actuator to dynamically adjust showerhead tilt in a semiconductor processing apparatus

    CN107034445A

  • Injection valve

    CN108144789A

  • Piezoelectric dispensing valve actuating module with contact structure and piezoelectric dispensing valve

    CN210585656U

  • Jet dispensing valve

    CN213644733U

  • Lever safety valve

    CN214534687U