A MEMS sensor embedded packaging structure and packaging method thereof

Abstract

The present invention relates to the field of MEMS sensor packaging technology, and discloses a MEMS sensor embedded packaging structure and a packaging method thereof, including a protective box, a protruding block fixedly connected to the surface of the protective box, a sealing cover arranged on the top of the protective box, a cross fixedly connected to the top of the sealing cover, a slide frame fixedly connected to the bottom of the sealing cover, and a positioning ring inserted into the inner wall of the slide frame. When the present invention requires packaging of the MEMS sensor, the sealing cover is rotated inside the protective box by twisting the cross, so that the sealing cover can be withdrawn from the inside of the protective box through a thread, and the embedded component will be moved out of the inside of the protective box through elasticity. After the MEMS sensor is placed inside the embedded component, the MEMS sensor is fixed and limited to avoid shaking of the MEMS sensor inside the protective box, resulting in the risk of easy damage to the movable structure inside the MEMS sensor and easy delamination of the bonding structure.

Description

Technical Field

[0001] The present invention relates to the technical field of MEMS sensor packaging, and in particular to a MEMS sensor embedded packaging structure and a packaging method thereof. Background Art

[0002] MEMS sensors, or micro-electromechanical systems, involve multiple disciplines and technologies such as electronics, mechanics, materials, physics, chemistry, biology, and medicine, and have broad application prospects. The most common form is a chip with an integrated circuit. When producing MEMS sensors, in order to avoid direct exposure of the chip, the MEMS sensor needs to be packaged;

[0003] When packaging the MEMS sensor, it is necessary to package the MEMS sensor with a protective film, and then put the MEMS sensor into the inside of a box for packaging, so as to package and protect the MEMS sensor. However, the MEMS sensor is not fixed inside the box. When the MEMS sensor is transported, the MEMS sensor will contact and collide with the inner wall of the box, resulting in damage to the movable structure inside the MEMS sensor and the risk of easy delamination of the bonding structure, causing damage to the MEMS sensor. Summary of the invention

[0004] The object of the present invention is to provide a MEMS sensor embedded packaging structure and a packaging method thereof to solve the problems raised in the above background technology.

[0005] In order to solve the above technical problems, the present invention is achieved through the following technical solutions:

[0006] The present invention is a MEMS sensor embedded packaging structure and a packaging method thereof, comprising a protective box, a protruding block fixedly connected to the surface of the protective box, a sealing cover arranged above the protective box, a cross fixedly connected to the top of the sealing cover, a slide frame fixedly connected to the bottom of the sealing cover, a positioning ring inserted into the inner wall of the slide frame, and further comprising:

[0007] An embedded component, the embedded component comprises an embedded plate, a groove protection pad is fixedly connected to the top of the embedded plate, an extension rod is fixedly connected to the surface of the embedded plate, and a positioning rod is fixedly connected to the inner wall of the extension rod;

[0008] A stabilizing component, the stabilizing component comprises a spherical rod, an end of the spherical rod is hinged with an extrusion rod, one end of the extrusion rod away from the spherical rod is fixedly connected to a rubber rod, a surface of the rubber rod is fixedly connected to a slide plate, and one end of the slide plate away from the rubber rod is fixedly connected to the surface of the extrusion rod;

[0009] The protective component includes a base plate, the bottom of the base plate is fixedly connected to the bottom of the inner wall of the protective box, the surface of the base plate is fixedly connected to an expansion plate, the top of the base plate is fixedly connected to an elastic rod, the top of the elastic rod is fixedly connected to a positioning plate, and the top of the positioning plate is fixedly connected to a rubber protruding pad.

[0010] Furthermore, the surface of the sealing cover is adapted to the inner wall of the protection box, and the surface of the sealing cover is threadedly connected to the inner wall of the protection box, and the sealing cover is slidably connected to the surface of the positioning ring through a slide groove frame, and the positioning ring is arranged above the positioning rod.

[0011] Further, the embedded component includes a fixing ring, the surface of the fixing ring is fixedly connected to the inner wall of the protective box, the inner wall of the fixing ring is fixedly connected to a concave hole plate, the surface of the concave hole plate is slidably connected to a lifting frame, and the inner wall of the lifting frame is fixedly connected to a sliding block;

[0012] The bottom of the inner wall of the concave hole plate is fixedly connected with a spring, the top of the spring is fixedly connected with the bottom of the sliding block, and the top of the positioning rod is fixedly connected with a connecting rod.

[0013] Furthermore, the inner wall of the lifting frame contacts the surface of the recessed hole plate, the extension rod is located on the lower surface of the positioning rod, the surface of the sliding block is slidably connected to the inner wall of the recessed hole plate, the top of the connecting rod is fixedly connected to the bottom of the positioning ring, the bottom of the positioning rod is fixedly connected to the surface of the lifting frame, and the positioning rod is located at one end of the extension rod away from the embedded plate.

[0014] Further, the stabilizing component comprises a right-angle plate, the right-angle plate is fixedly connected to the inner wall of the fixing ring, a round rod is fixedly connected to the surface of the right-angle plate, a stabilizing frame is slidably connected to the surface of the round rod, a cylindrical frame is fixedly connected to the top of the stabilizing frame, a rectangular frame is rotatably connected to the inner wall of the cylindrical frame, and a supporting frame is fixedly connected to the upper surface of the rectangular frame;

[0015] The surface of the support frame is fixedly connected to the end of the spherical rod, and the support frame is located at the end of the spherical rod away from the extrusion rod. The end of the stabilizing frame is fixedly connected to the synchronous frame, and the bottom of the synchronous frame is fixedly connected to the extrusion rubber block.

[0016] Furthermore, the rubber rod is located above the groove protection pad, the bottom of the spherical rod is fixedly connected with a spring sheet, the end of the spring sheet away from the spherical rod is hinged to the surface of the extrusion rod, the surface of the support frame is fixedly connected with a shaping spring sheet, and the end of the shaping spring sheet away from the support frame is fixedly connected to the surface of the cylindrical frame.

[0017] Furthermore, the bottom of the right-angle plate extends to the bottom outer end of the fixing ring, and the bottom of the right-angle plate contacts the bottom of the inner wall of the protective box, the synchronous frame is located at one end of the stabilizing frame away from the cylindrical frame, the end of the synchronous frame away from the stabilizing frame is fixedly connected to the bottom of the embedded plate, and the top of the rectangular frame extends to above the cylindrical frame.

[0018] Further, the protective component includes a push frame, the inner wall of the push frame is slidably connected to the surface of the expansion plate, the surface of the push frame is fixedly connected with a downward pressure ball, the surface of the expansion plate is fixedly connected with a limit frame, the surface of the limit frame is hinged with an inclined plate, the end of the inclined plate away from the limit frame is hinged with a pull rod, the top of the pull rod is fixedly connected to a connecting frame, the top of the connecting frame is hinged with an auxiliary rod, the end of the auxiliary rod is hinged to the surface of the rectangular frame, the end of the auxiliary rod away from the rectangular frame is hinged with a bent plate, and the bottom of the bent plate is fixedly connected to the bottom of the inner wall of the protective box;

[0019] The top of the bottom plate is fixedly connected with a load-bearing frame, the top of the load-bearing frame is fixedly connected with a load-bearing contact pad, the top of the push frame is hinged with a conveying rod, and one end of the conveying rod away from the push frame is hinged with the surface of the positioning plate.

[0020] Furthermore, the load-bearing frame extends from one end of the base plate to the outer end of the base plate, the top of the load-bearing contact pad corresponds to the bottom of the extruded rubber block, the bottom of the conveying rod passes through the load-bearing frame and extends to the outer end of the load-bearing frame, the bottom of the downward pressure ball contacts the top of the inclined plate, and the limit frame is located at one end of the expansion plate close to the base plate.

[0021] Furthermore, the MEMS sensor embedded packaging structure and the packaging method include the following steps:

[0022] S1: When packaging the MEMS sensor, the sealing cover is twisted in a cross shape and rotated inside the protective box, so that the sealing cover can be withdrawn from the protective box through the thread, and the embedded component is moved out of the protective box through elasticity;

[0023] S2: When the lifting frame moves, the connection between the positioning rod and the extension rod is used to push the embedded plate upward, so that the embedded plate can push the groove protection pad to move out of the outer end of the protection box, thereby facilitating the MEMS sensor to be embedded into the groove protection pad for fixation;

[0024] S3: The rubber rod is reset to the top of the MEMS sensor through the spring, and the top of the MEMS sensor is squeezed by the rubber rod, thereby improving the stability of the MEMS sensor after packaging;

[0025] S4: When the auxiliary rod moves downward, the rectangular frame pushes the spherical rod to move downward, so that the extrusion rod can push the rubber rod through the spherical rod to contact the top of the MEMS sensor and extrude and fix the MEMS sensor, further improving the stability of the MEMS sensor after packaging.

[0026] The present invention has the following beneficial effects:

[0027] When the present invention needs to package the MEMS sensor, the sealing cover is rotated inside the protective box by twisting it in a cross shape, so that the sealing cover can be withdrawn from the interior of the protective box through a thread, and the embedded component will be moved out of the interior of the protective box through elasticity. After the MEMS sensor is placed inside the embedded component, the MEMS sensor is fixed and limited to avoid shaking of the MEMS sensor inside the protective box, which may cause the risk of easy damage to the movable structure inside the MEMS sensor and easy delamination of the bonding structure. A stabilizing component is provided inside the protective box, which can squeeze and fix the top of the MEMS sensor, thereby further improving the stability of the MEMS sensor after packaging, and the extrusion strength of the stabilizing component is increased by the protective component. If the protective box shakes during transportation, the protective component can position the MEMS sensor inside the embedded component to prevent it from falling off.

[0028] After the sealing cover of the present invention is separated from the inner wall of the protective box, the sliding block uses the elasticity of the spring to push the lifting frame to slide on the surface of the recessed hole plate. When moving, the lifting frame uses the connection between the positioning rod and the extension rod to push the embedded plate to move upward, so that the embedded plate can push the groove protection pad to move out of the outer end of the protective box, thereby facilitating the embedding of the MEMS sensor into the interior of the groove protection pad for fixation. After the sealing cover is fixed to the interior of the protective box by threads, the sealing cover will push the embedded plate downward through the positioning ring, so that the groove protection pad can drive the MEMS sensor to be stored in the interior of the protective box for packaging.

[0029] The stabilizing frame of the present invention is connected to the bottom of the embedded plate through a synchronous frame. When the embedded plate moves upward, the stabilizing frame will slide upward on the surface of the round rod. When the stabilizing frame slides upward, the connection between the cylindrical frame and the rectangular frame pushes the round rod to move upward, so that the rubber rod can be positioned above the groove protection pad. When the MEMS sensor is embedded into the interior of the groove protection pad, the MEMS sensor will contact the surface of the slide plate, and the MEMS sensor will push the extrusion rod to move toward one end of the cylindrical frame through the slide plate, thereby improving the convenience of the MEMS sensor during packaging. The rubber rod is reset to the top of the MEMS sensor through the spring sheet, and the top of the MEMS sensor is squeezed by the rubber rod, thereby improving the stability of the MEMS sensor after packaging. The rectangular frame is positioned at the top of the cylindrical frame through the shaping spring sheet, thereby preventing the extrusion rod from affecting the MEMS sensor embedded in the interior of the groove protection pad.

[0030] When the embedded plate of the present invention moves downward, it contacts the top of the rubber protruding pad, and the rubber protruding pad pushes the elastic rod to move downward. When the elastic rod moves downward, it pushes the conveying rod to move downward through the positioning plate. When the conveying rod moves downward, it pushes the push frame to slide on the surface of the expansion plate, and the downward pressure ball can squeeze the inclined plate downward through the movement of the push frame. When the inclined plate moves downward, the auxiliary rod is pulled downward through the connection between the pull rod and the connecting frame. When the auxiliary rod moves downward, it pushes the round ball rod to move downward through the rectangular frame, so that the extrusion rod can push the rubber rod through the round ball rod to contact the top of the MEMS sensor and extrude and fix the MEMS sensor, further improving the stability of the MEMS sensor after packaging, and reducing the risk of easy damage to the internal movable structure and easy delamination of the bonding structure when the MEMS disc is too thin. The auxiliary rod is fixed to the bottom of the inner wall of the protective box through the bending plate, thereby improving the stability of the auxiliary rod during operation.

[0031] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for describing the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0033] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0034] Figure 2 It is a schematic diagram of the cross-sectional structure of the protection box of the present invention;

[0035] Figure 3 It is a schematic diagram of the structure of the present invention;

[0036] Figure 4 It is a schematic diagram of the overall structure of the embedded component of the present invention;

[0037] Figure 5 This is a schematic diagram of the overall structure of the stabilizing component of the present invention;

[0038] Figure 6 This is a schematic diagram of the right-angle plate structure of the present invention;

[0039] Figure 7 This is a schematic diagram of the overall structure of the protective component of the present invention;

[0040] Figure 8 This is a schematic diagram of the structure of the protective component of the present invention;

[0041] Fig. 9It is a schematic diagram of the process structure of the present invention.

[0042] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0043] In the figure: 1, protective box; 2, protruding block; 3, sealing cover; 4, cross; 5, slide frame; 6, positioning ring; 7, embedded component; 8, stabilizing component; 9, protective component; 10, fixing ring; 11, concave hole plate; 12, positioning rod; 13, sliding block; 14, groove protective pad; 15, connecting rod; 16, spring; 17, lifting frame; 18, extension rod; 19, embedded plate; 20, round rod; 21, stabilizing frame; 22, cylindrical frame; 23, supporting frame; 24, round ball rod; 25, slide plate ; 26. Spring piece; 27. Extrusion rod; 28. Rectangular frame; 29. ​​Shaped spring piece; 30. Rubber rod; 31. Right-angle plate; 32. Synchronous frame; 33. Extruded rubber block; 40. Limit frame; 41. Bending plate; 42. Auxiliary rod; 43. Connecting frame; 44. Pull rod; 45. Inclined plate; 46. Bottom plate; 47. Positioning plate; 48. Rubber protrusion pad; 49. Load-bearing frame; 50. Expansion plate; 51. Down-pressing ball; 52. Conveying rod; 53. Elastic rod; 54. Push frame; 55. Load-bearing contact pad. DETAILED DESCRIPTION

[0044] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0045] See also Figure 1-Figure 9As shown, the present invention is a MEMS sensor embedded packaging structure and a packaging method thereof, comprising a protective box 1, a protruding block 2 is fixedly connected to the surface of the protective box 1, a sealing cover 3 is arranged above the protective box 1, and a cross 4 is fixedly connected to the top of the sealing cover 3. When the present invention needs to package the MEMS sensor, the sealing cover 3 is twisted by the cross 4 to rotate inside the protective box 1, so that the sealing cover 3 can be withdrawn from the inside of the protective box 1 through a thread, and the embedded component 7 will be moved out of the inside of the protective box 1 through elasticity. After the MEMS sensor is placed inside the embedded component 7, the MEMS sensor is fixed and limited to avoid the MEMS sensor from being damaged. The MEMS sensor shakes inside the protective box 1, which may cause the risk of the movable structure inside the MEMS sensor being easily damaged and the bonding structure being easily delaminated. A stabilizing component 8 is provided inside the protective box 1. The stabilizing component 8 can squeeze and fix the top of the MEMS sensor, thereby further improving the stability of the MEMS sensor after packaging, and the squeezing force of the stabilizing component 8 is increased by the protective component 9. When the protective box 1 shakes during transportation, the protective component 9 can position the MEMS sensor inside the embedded component 7 to prevent it from falling off. The bottom of the sealing cover 3 is fixedly connected with a slide frame 5, and the inner wall of the slide frame 5 is plugged with a positioning ring 6. It also includes:

[0046] The embedded component 7 includes an embedded plate 19, a groove protection pad 14 is fixedly connected to the top of the embedded plate 19, an extension rod 18 is fixedly connected to the surface of the embedded plate 19, and a positioning rod 12 is fixedly connected to the inner wall of the extension rod 18;

[0047] The stabilizing component 8 includes a spherical rod 24, an extrusion rod 27 is hinged at the end of the spherical rod 24, an end of the extrusion rod 27 away from the spherical rod 24 is fixedly connected to a rubber rod 30, a surface of the rubber rod 30 is fixedly connected to a slide plate 25, and an end of the slide plate 25 away from the rubber rod 30 is fixedly connected to the surface of the extrusion rod 27;

[0048] The protective component 9 includes a bottom plate 46, the bottom of the bottom plate 46 is fixedly connected to the bottom of the inner wall of the protective box 1, the surface of the bottom plate 46 is fixedly connected to an expansion plate 50, the top of the bottom plate 46 is fixedly connected to an elastic rod 53, the top of the elastic rod 53 is fixedly connected to a positioning plate 47, and the top of the positioning plate 47 is fixedly connected to a rubber protrusion pad 48.

[0049] The surface of the sealing cover 3 is adapted to the inner wall of the protection box 1 , and the surface of the sealing cover 3 is threadedly connected to the inner wall of the protection box 1 . The sealing cover 3 is slidingly connected to the surface of the positioning ring 6 through the slide groove frame 5 , and the positioning ring 6 is arranged above the positioning rod 12 .

[0050] The embedded component 7 includes a fixing ring 10, the surface of which is fixedly connected to the inner wall of the protective box 1, and the inner wall of the fixing ring 10 is fixedly connected to a recessed hole plate 11. After the sealing cover 3 of the present invention is separated from the inner wall of the protective box 1, the sliding block 13 uses the elasticity of the spring 16 to push the lifting frame 17 to slide on the surface of the recessed hole plate 11. When moving, the lifting frame 17 uses the connection between the positioning rod 12 and the extension rod 18 to push the embedded plate 19 to move upward, so that the embedded plate 19 can push the groove protection pad 14 to move out of the outer end of the protective box 1, so as to facilitate the MEMS sensor to be embedded in the groove protection pad 14 for fixing. After the sealing cover 3 is fixed to the inside of the protective box 1 by threads, the sealing cover 3 will push the embedded plate 19 to move downward through the positioning ring 6, so that the groove protection pad 14 can drive the MEMS sensor to be stored in the inside of the protective box 1 for packaging. The surface of the recessed hole plate 11 is slidably connected to the lifting frame 17, and the inner wall of the lifting frame 17 is fixedly connected to the sliding block 13.

[0051] A spring 16 is fixedly connected to the bottom of the inner wall of the concave hole plate 11 , the top of the spring 16 is fixedly connected to the bottom of the sliding block 13 , and a connecting rod 15 is fixedly connected to the top of the positioning rod 12 .

[0052] The inner wall of the lifting frame 17 contacts the surface of the recessed hole plate 11, the extension rod 18 is located on the lower surface of the positioning rod 12, the surface of the sliding block 13 is slidably connected to the inner wall of the recessed hole plate 11, the top of the connecting rod 15 is fixedly connected to the bottom of the positioning ring 6, the bottom of the positioning rod 12 is fixedly connected to the surface of the lifting frame 17, and the positioning rod 12 is located at the end of the extension rod 18 away from the embedded plate 19.

[0053] The stabilizing component 8 includes a right-angle plate 31, which is fixedly connected to the inner wall of the fixing ring 10, and a round rod 20 is fixedly connected to the surface of the right-angle plate 31, and a stabilizing frame 21 is slidably connected to the surface of the round rod 20, and a cylindrical frame 22 is fixedly connected to the top of the stabilizing frame 21. The stabilizing frame 21 of the present invention is connected to the bottom of the embedded plate 19 through a synchronous frame 32. When the embedded plate 19 moves upward, the stabilizing frame 21 will slide upward on the surface of the round rod 20. When the stabilizing frame 21 slides upward, the connection between the cylindrical frame 22 and the rectangular frame 28 pushes the spherical rod 24 to move upward, so that the rubber rod 30 can be positioned above the groove protection pad 14. When the MEMS sensor is embedded in the interior of the groove protection pad 14, the MEMS The sensor will contact the surface of the slide plate 25, and the MEMS sensor will push the extrusion rod 27 to move toward one end of the cylindrical frame 22 through the slide plate 25, thereby improving the convenience of the MEMS sensor during packaging. The rubber rod 30 is reset to the top of the MEMS sensor through the spring 26, and the top of the MEMS sensor is squeezed by the rubber rod 30, thereby improving the stability of the MEMS sensor after packaging. The rectangular frame 28 is positioned at the top of the cylindrical frame 22 through the shaping spring 29 to prevent the extrusion rod 27 from affecting the MEMS sensor embedded in the inside of the groove protection pad 14. The inner wall of the cylindrical frame 22 is rotatably connected with the rectangular frame 28, and the upper surface of the rectangular frame 28 is fixedly connected with the support frame 23;

[0054] The surface of the support frame 23 is fixedly connected to the end of the spherical rod 24, and the support frame 23 is located at the end of the spherical rod 24 away from the extrusion rod 27. The end of the stabilizing frame 21 is fixedly connected to the synchronous frame 32, and the bottom of the synchronous frame 32 is fixedly connected to the extrusion rubber block 33.

[0055] The rubber rod 30 is located above the groove protection pad 14, and the bottom of the spherical rod 24 is fixedly connected with a spring piece 26. The end of the spring piece 26 away from the spherical rod 24 is hinged to the surface of the extrusion rod 27. The surface of the support frame 23 is fixedly connected with a shaping spring piece 29. The end of the shaping spring piece 29 away from the support frame 23 is fixedly connected to the surface of the cylindrical frame 22.

[0056] The bottom of the right-angle plate 31 extends to the bottom outer end of the fixed ring 10, and the bottom of the right-angle plate 31 contacts the bottom of the inner wall of the protective box 1. The synchronous frame 32 is located at the end of the stabilizing frame 21 away from the cylindrical frame 22. The end of the synchronous frame 32 away from the stabilizing frame 21 is fixedly connected to the bottom of the embedded plate 19, and the top of the rectangular frame 28 extends to the top of the cylindrical frame 22.

[0057] The protective component 9 includes a push frame 54, the inner wall of which is slidably connected to the surface of the expansion plate 50, the surface of the push frame 54 is fixedly connected with a downward pressure ball 51, the surface of the expansion plate 50 is fixedly connected to the limit frame 40, the surface of the limit frame 40 is hinged with an inclined plate 45, the end of the inclined plate 45 away from the limit frame 40 is hinged with a pull rod 44, the top of the pull rod 44 is fixedly connected to a connecting frame 43, the top of the connecting frame 43 is hinged with an auxiliary rod 42, the end of the auxiliary rod 42 is hinged to the surface of the rectangular frame 28, when the embedded plate 19 of the present invention moves downward, it contacts the top of the rubber protruding pad 48, the rubber protruding pad 48 pushes the elastic rod 53 to move downward, when the elastic rod 53 moves downward, it pushes the conveying rod 52 to move downward through the positioning plate 47, when the conveying rod 52 moves downward, it pushes the push frame 54 to slide on the surface of the expansion plate 50, and the downward pressure ball 51 can pass through the push frame 54 The movable extrusion inclined plate 45 moves downward. When the inclined plate 45 moves downward, the auxiliary rod 42 is pulled downward by the connection between the pull rod 44 and the connecting frame 43. When the auxiliary rod 42 moves downward, the spherical rod 24 is pushed downward by the rectangular frame 28, so that the extrusion rod 27 can push the rubber rod 30 through the spherical rod 24 to contact the top of the MEMS sensor and extrude and fix the MEMS sensor, further improving the stability of the MEMS sensor after packaging, and reducing the risk of easy damage to the internal movable structure and easy delamination of the bonding structure when the MEMS disc is too thin. The auxiliary rod 42 is fixed to the bottom of the inner wall of the protective box 1 by the bending plate 41, improving the stability of the auxiliary rod 42 during operation. The end of the auxiliary rod 42 away from the rectangular frame 28 is hinged with the bending plate 41, and the bottom of the bending plate 41 is fixedly connected to the bottom of the inner wall of the protective box 1.

[0058] The top of the bottom plate 46 is fixedly connected to a load-bearing frame 49 , the top of the load-bearing frame 49 is fixedly connected to a load-bearing contact pad 55 , the top of the push frame 54 is hinged to a conveying rod 52 , and one end of the conveying rod 52 away from the push frame 54 is hinged to the surface of the positioning plate 47 .

[0059] One end of the load-bearing frame 49 away from the bottom plate 46 extends to the outer end of the bottom plate 46, the top of the load-bearing contact pad 55 corresponds to the bottom of the extruded rubber block 33, the bottom of the conveying rod 52 passes through the load-bearing frame 49 and extends to the outer end of the load-bearing frame 49, the bottom of the downward pressure ball 51 contacts the top of the inclined plate 45, and the limit frame 40 is located at one end of the expansion plate 50 close to the bottom plate 46.

[0060] A MEMS sensor embedded packaging structure and packaging method, comprising the following steps:

[0061] S1: When packaging the MEMS sensor, the sealing cover 3 is twisted and rotated inside the protective box 1 through the cross 4, so that the sealing cover 3 can be withdrawn from the interior of the protective box 1 through the thread, and the embedded component 7 will be moved out of the interior of the protective box 1 through elasticity;

[0062] S2: When the lifting frame 17 moves, the connection between the positioning rod 12 and the extension rod 18 is used to push the embedding plate 19 to move upward, so that the embedding plate 19 can push the groove protection pad 14 to move out of the outer end of the protection box 1, thereby facilitating the MEMS sensor to be embedded into the groove protection pad 14 for fixation;

[0063] S3: The rubber rod 30 is reset to the top of the MEMS sensor through the spring 26, and the top of the MEMS sensor is squeezed by the rubber rod 30, so as to improve the stability of the MEMS sensor after packaging;

[0064] S4: When the auxiliary rod 42 moves downward, it pushes the spherical rod 24 downward through the rectangular frame 28, so that the extrusion rod 27 can push the rubber rod 30 through the spherical rod 24 to contact the top of the MEMS sensor and extrude and fix the MEMS sensor, further improving the stability of the MEMS sensor after packaging.

[0065] When in use, when it is necessary to package the MEMS sensor, the sealing cover 3 is twisted and rotated inside the protective box 1 through the cross 4, so that the sealing cover 3 can be withdrawn from the inside of the protective box 1 through the thread, and the embedded component 7 will be moved out of the inside of the protective box 1 through elasticity. After the MEMS sensor is placed inside the embedded component 7, the MEMS sensor is fixed and limited to avoid the MEMS sensor shaking inside the protective box 1, which may cause the risk of easy damage to the movable structure inside the MEMS sensor and easy delamination of the bonding structure. A stabilizing component 8 is arranged inside the protective box 1, and the stabilizing component 8 can squeeze and fix the top of the MEMS sensor, thereby further improving the stability of the MEMS sensor after packaging, and through the protective component 9 By increasing the squeezing force of the stabilizing component 8, when the protective box 1 shakes during transportation, the protective component 9 can position the MEMS sensor inside the embedded component 7 to prevent it from falling off. After the sealing cover 3 is separated from the inner wall of the protective box 1, the sliding block 13 uses the elasticity of the spring 16 to push the lifting frame 17 to slide on the surface of the recessed hole plate 11. When moving, the lifting frame 17 uses the connection between the positioning rod 12 and the extension rod 18 to push the embedded plate 19 to move upward, so that the embedded plate 19 can push the groove protection pad 14 to move out of the outer end of the protective box 1, thereby facilitating the MEMS sensor to be embedded in the groove protection pad 14 for fixing. After the sealing cover 3 is fixed to the inside of the protective box 1 by threads, the sealing cover 3 will push the embedded plate 19 to move downward through the positioning ring 6, so that the recessed hole plate 11 can be fixed to the inner wall of the protective box 1. The groove protection pad 14 can drive the MEMS sensor to be stored inside the protection box 1 for packaging. The stabilizing frame 21 is connected to the bottom of the embedded plate 19 through the synchronous frame 32. When the embedded plate 19 moves upward, the stabilizing frame 21 will slide upward on the surface of the round rod 20. When the stabilizing frame 21 slides upward, it pushes the round ball rod 24 upward through the connection between the cylindrical frame 22 and the rectangular frame 28, so that the rubber rod 30 can be positioned above the groove protection pad 14. When the MEMS sensor is embedded into the inside of the groove protection pad 14, the MEMS sensor will contact the surface of the slide plate 25, and the MEMS sensor will push the extrusion rod 27 to move toward one end of the cylindrical frame 22 through the slide plate 25, thereby improving the convenience of packaging the MEMS sensor. The rubber rod 30 is connected to the cylindrical frame 28 through the synchronous frame 32, thereby improving the convenience of packaging the MEMS sensor. The spring piece 26 is reset to the top of the MEMS sensor, and the top of the MEMS sensor is squeezed by the rubber rod 30, so as to improve the stability of the MEMS sensor after packaging. The rectangular frame 28 is positioned at the top of the cylindrical frame 22 by the shaping spring piece 29 to prevent the squeezing rod 27 from affecting the MEMS sensor embedded in the inside of the groove protection pad 14. When the embedding plate 19 moves downward, it contacts the top of the rubber protruding pad 48. The rubber protruding pad 48 pushes the elastic rod 53 to move downward. When the elastic rod 53 moves downward, it pushes the conveying rod 52 to move downward through the positioning plate 47. When the conveying rod 52 moves downward, it pushes the push frame 54 to slide on the surface of the expansion plate 50. The downward pressing ball 51 can squeeze the inclined plate 45 downward through the movement of the push frame 54.When the inclined plate 45 moves downward, the auxiliary rod 42 is pulled downward by the connection between the pull rod 44 and the connecting frame 43. When the auxiliary rod 42 moves downward, the spherical rod 24 is pushed downward by the rectangular frame 28, so that the extrusion rod 27 can push the rubber rod 30 through the spherical rod 24 to contact the top of the MEMS sensor and squeeze and fix the MEMS sensor, further improving the stability of the MEMS sensor after packaging, and reducing the risk of easy damage to the internal movable structure and easy delamination of the bonding structure when the MEMS disc is too thin. The auxiliary rod 42 is fixed to the bottom of the inner wall of the protective box 1 through the bending plate 41, which improves the stability of the auxiliary rod 42 during operation.

[0066] The preferred embodiments of the present invention disclosed above are only used to help illustrate the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A MEMS sensor embedded packaging structure, comprising a protective box (1), a protruding block (2) is fixedly connected to the surface of the protective box (1), a sealing cover (3) is arranged above the protective box (1), a cross (4) is fixedly connected to the top of the sealing cover (3), a slide frame (5) is fixedly connected to the bottom of the sealing cover (3), and a positioning ring (6) is inserted into the inner wall of the slide frame (5), characterized in that: Also includes: An embedded component (7), the embedded component (7) comprising an embedded plate (19), the top of the embedded plate (19) being fixedly connected to a groove protection pad (14), the surface of the embedded plate (19) being fixedly connected to an extension rod (18), and the inner wall of the extension rod (18) being fixedly connected to a positioning rod (12); A stabilizing component (8), the stabilizing component (8) comprising a spherical rod (24), an end of the spherical rod (24) being hingedly connected to an extrusion rod (27), an end of the extrusion rod (27) away from the spherical rod (24) being fixedly connected to a rubber rod (30), a surface of the rubber rod (30) being fixedly connected to a slide plate (25), and an end of the slide plate (25) away from the rubber rod (30) being fixedly connected to the surface of the extrusion rod (27); A protective component (9), the protective component (9) includes a bottom plate (46), the bottom of the bottom plate (46) is fixedly connected to the bottom of the inner wall of the protective box (1), the surface of the bottom plate (46) is fixedly connected to an expansion plate (50), the top of the bottom plate (46) is fixedly connected to an elastic rod (53), the top of the elastic rod (53) is fixedly connected to a positioning plate (47), and the top of the positioning plate (47) is fixedly connected to a rubber protruding pad (48).

2. A MEMS sensor embedded packaging structure according to claim 1, characterized in that: The surface of the sealing cover (3) is matched with the inner wall of the protection box (1), and the surface of the sealing cover (3) is threadedly connected to the inner wall of the protection box (1). The sealing cover (3) is slidably connected to the surface of the positioning ring (6) through a sliding groove frame (5), and the positioning ring (6) is arranged above the positioning rod (12).

3. The MEMS sensor embedded packaging structure according to claim 1, characterized in that: The embedded component (7) comprises a fixing ring (10), the surface of the fixing ring (10) is fixedly connected to the inner wall of the protection box (1), the inner wall of the fixing ring (10) is fixedly connected to a concave hole plate (11), the surface of the concave hole plate (11) is slidably connected to a lifting frame (17), and the inner wall of the lifting frame (17) is fixedly connected to a sliding block (13); A spring (16) is fixedly connected to the bottom of the inner wall of the recessed hole plate (11), the top of the spring (16) is fixedly connected to the bottom of the sliding block (13), and the top of the positioning rod (12) is fixedly connected to a connecting rod (15).

4. The MEMS sensor embedded packaging structure according to claim 3, characterized in that: The inner wall of the lifting frame (17) contacts the surface of the recessed hole plate (11), the extension rod (18) is located on the lower surface of the positioning rod (12), the surface of the sliding block (13) is slidably connected to the inner wall of the recessed hole plate (11), the top of the connecting rod (15) is fixedly connected to the bottom of the positioning ring (6), the bottom of the positioning rod (12) is fixedly connected to the surface of the lifting frame (17), and the positioning rod (12) is located at one end of the extension rod (18) away from the embedded plate (19).

5. The MEMS sensor embedded packaging structure according to claim 1, characterized in that: The stabilizing component (8) comprises a right-angle plate (31), the right-angle plate (31) is fixedly connected to the inner wall of the fixing ring (10), the surface of the right-angle plate (31) is fixedly connected to a round rod (20), the surface of the round rod (20) is slidably connected to a stabilizing frame (21), the top of the stabilizing frame (21) is fixedly connected to a cylindrical frame (22), the inner wall of the cylindrical frame (22) is rotatably connected to a rectangular frame (28), and the upper surface of the rectangular frame (28) is fixedly connected to a supporting frame (23); The surface of the support frame (23) is fixedly connected to the end of the spherical rod (24), and the support frame (23) is located at an end of the spherical rod (24) away from the extrusion rod (27). The end of the stabilizing frame (21) is fixedly connected to a synchronous frame (32), and the bottom of the synchronous frame (32) is fixedly connected to an extrusion rubber block (33).

6. The MEMS sensor embedded packaging structure according to claim 5, characterized in that: The rubber rod (30) is located above the groove protection pad (14); the bottom of the spherical rod (24) is fixedly connected with a spring sheet (26); one end of the spring sheet (26) away from the spherical rod (24) is hinged to the surface of the extrusion rod (27); the surface of the support frame (23) is fixedly connected with a shaping spring sheet (29); one end of the shaping spring sheet (29) away from the support frame (23) is fixedly connected to the surface of the cylindrical frame (22).

7. The MEMS sensor embedded packaging structure according to claim 5, characterized in that: The bottom of the right-angle plate (31) extends to the bottom outer end of the fixing ring (10), and the bottom of the right-angle plate (31) contacts the bottom of the inner wall of the protective box (1). The synchronous frame (32) is located at one end of the stabilizing frame (21) away from the cylindrical frame (22). The end of the synchronous frame (32) away from the stabilizing frame (21) is fixedly connected to the bottom of the embedded plate (19), and the top of the rectangular frame (28) extends above the cylindrical frame (22).

8. The MEMS sensor embedded packaging structure according to claim 1, characterized in that: The protective component (9) comprises a push frame (54), the inner wall of the push frame (54) is slidably connected to the surface of the expansion plate (50), the surface of the push frame (54) is fixedly connected to a downward pressure ball (51), the surface of the expansion plate (50) is fixedly connected to a limit frame (40), the surface of the limit frame (40) is hinged with an inclined plate (45), the end of the inclined plate (45) away from the limit frame (40) is hinged with a pull rod (44), the top of the pull rod (44) is fixedly connected to a connecting frame (43), the top of the connecting frame (43) is hinged with an auxiliary rod (42), the end of the auxiliary rod (42) is hinged to the surface of the rectangular frame (28), the end of the auxiliary rod (42) away from the rectangular frame (28) is hinged with a bent plate (41), the bottom of the bent plate (41) is fixedly connected to the bottom of the inner wall of the protective box (1); The top of the base plate (46) is fixedly connected to a load-bearing frame (49), the top of the load-bearing frame (49) is fixedly connected to a load-bearing contact pad (55), the top of the push frame (54) is hingedly connected to a conveying rod (52), and one end of the conveying rod (52) away from the push frame (54) is hingedly connected to the surface of the positioning plate (47).

9. The MEMS sensor embedded packaging structure according to claim 8, characterized in that: One end of the load-bearing frame (49) away from the bottom plate (46) extends to the outer end of the bottom plate (46), the top of the load-bearing contact pad (55) corresponds to the bottom of the extruded rubber block (33), the bottom of the conveying rod (52) passes through the load-bearing frame (49) and extends to the outer end of the load-bearing frame (49), the bottom of the downward pressure ball (51) contacts the top of the inclined plate (45), and the limit frame (40) is located at one end of the expansion plate (50) close to the bottom plate (46).

10. A MEMS sensor embedded packaging method, using the MEMS sensor embedded packaging structure according to claim 9, characterized in that: The following steps are involved: S1: When packaging the MEMS sensor, the sealing cover (3) is twisted by the cross (4) to rotate inside the protection box (1), so that the sealing cover (3) can be withdrawn from the inside of the protection box (1) through the thread, and the embedded component (7) will be moved out of the inside of the protection box (1) through elasticity; S2: When the lifting frame (17) moves, the connection between the positioning rod (12) and the extension rod (18) is used to push the embedding plate (19) upward, so that the embedding plate (19) can push the groove protection pad (14) to move out of the outer end of the protection box (1), thereby facilitating the MEMS sensor to be embedded in the groove protection pad (14) for fixation; S3: the rubber rod (30) is reset to the top of the MEMS sensor through the spring sheet (26), and the top of the MEMS sensor is pressed by the rubber rod (30), thereby improving the stability of the MEMS sensor after packaging; S4: When the auxiliary rod (42) moves downward, it pushes the spherical rod (24) to move downward through the rectangular frame (28), so that the extrusion rod (27) can push the rubber rod (30) through the spherical rod (24) to contact the top of the MEMS sensor and squeeze and fix the MEMS sensor, thereby further improving the stability of the MEMS sensor after packaging.

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