RF power supply equipment and RF power supply system

Abstract

The present application provides a radio frequency power supply device and a radio frequency power supply system, which relate to the field of radio frequency technology. The radio frequency power supply device includes N radio frequency sources and a frequency switching unit; the N radio frequency sources are used to output N radio frequency signals respectively, and the frequencies of the N radio frequency signals are different from each other; one end of the frequency switching unit is connected to the N radio frequency sources respectively, and the other end of the frequency switching unit is used to connect to a first load, wherein the frequency switching unit has an adjustable resonant frequency, so that a target radio frequency signal among the N radio frequency signals is output to the first load according to the resonant frequency of the frequency switching unit; wherein N≥2. The present application can output a target radio frequency signal among multiple radio frequency signals to a load.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a radio frequency power supply device and a radio frequency power supply system. Background Art

[0002] At present, as the application scope of RF power becomes wider and wider, RF power begins to power more and more core process equipment, which also puts higher requirements on RF power. That is, in some application scenarios, it is necessary to switch one of the multiple RF sources to output to the powered device in time to meet the requirements of the powered device at different stages. Therefore, how to switch the required RF signal to the powered device according to specific needs has become a problem that needs to be considered. Summary of the invention

[0003] The present application provides a radio frequency power supply device and a radio frequency power supply system, which can output a target radio frequency signal among multiple radio frequency signals to a load.

[0004] In a first aspect, a radio frequency power supply device is provided, comprising N radio frequency sources and a frequency switching unit; the N radio frequency sources are used to respectively output N radio frequency signals, and the frequencies of the N radio frequency signals are different from each other; one end of the frequency switching unit is respectively connected to the N radio frequency sources, and the other end of the frequency switching unit is used to connect to a first load, wherein the frequency switching unit has an adjustable resonant frequency so that a target radio frequency signal among the N radio frequency signals is output to the first load according to the resonant frequency of the frequency switching unit; wherein N≥2.

[0005] In a possible implementation, when the resonant frequency of the frequency switching unit is switched to be the same as the frequency of a certain radio frequency signal, the radio frequency signal having the resonant frequency is allowed to pass through and be output to the first load.

[0006] In a possible embodiment, the RF power supply device also includes N protection units, which are connected one-to-one between the N RF sources and one end of the frequency switching unit, and each protection unit is used to prevent other N-1 RF signals except the corresponding RF signal from being transmitted to the corresponding RF source.

[0007] In a possible implementation, the RF power supply device further includes N impedance matching units, which are connected one-to-one between the N RF sources and one end of the frequency switching unit; wherein the reactance value of the frequency switching unit is zero, and each RF source performs impedance matching with the first load through a correspondingly connected impedance matching unit.

[0008] In a possible implementation, the frequency switching unit includes a series resonance module, which has an adjustable resonance frequency. The resonance frequency of the series resonance module is adjusted to be the same as the frequency of the target RF signal to maintain low impedance for the target RF signal and high impedance for other N-1 RF signals, thereby only allowing the target RF signal to be output to the first load.

[0009] In a possible embodiment, the RF power supply device also includes a shunt unit, which is connected to a connection point between the N RF sources and one end of the frequency switching unit, and the shunt unit is used to maintain low impedance for at least part of the other N-1 RF signals according to the frequencies of the N RF signals, so that at least part of the other N-1 RF signals can pass through.

[0010] In a possible implementation, the shunt unit includes two shunt modules, each of which is connected to a connection point between the N RF sources and one end of the frequency switching unit, wherein one shunt module is used to maintain low impedance for at least one RF signal having a frequency greater than a target frequency, so that at least one RF signal having a frequency greater than the target frequency passes through, and the other shunt module is used to maintain low impedance for at least one RF signal having a frequency less than the target frequency, so that at least one RF signal having a frequency less than the target frequency passes through; wherein the target frequency is the frequency of the target RF signal.

[0011] In a possible implementation, the two shunt modules include a first shunt module and a second shunt module, and the shunt unit also includes a first frequency selection module and a second frequency selection module, the first frequency selection module is connected between the first shunt module and the second load, and the second frequency selection module is connected between the second shunt module and the third load; wherein the first frequency selection module and the second frequency selection module both have an adjustable resonant frequency, so as to select one of the at least one RF signal passing through the first shunt module to be output to the second load according to the resonant frequency of the first frequency selection module, and select one of the at least one RF signal passing through the second shunt module to be output to the third load according to the resonant frequency of the second frequency selection module.

[0012] In a possible implementation, the shunt unit includes N-1 shunt modules, each shunt module is connected to a connection point between the N RF sources and the frequency switching unit, and the N-1 shunt modules respectively maintain low impedance to the other N-1 RF signals.

[0013] In a possible implementation, the shunt unit further includes N-1 rectifier modules, which are connected to the N-1 shunt modules in a one-to-one correspondence, and the N-1 rectifier modules are used to rectify the other N-1 RF signals respectively; or, the shunt unit further includes N-1 energy consumption modules, which are connected to the N-1 shunt modules in a one-to-one correspondence, and the N-1 energy consumption modules are used to consume the electrical energy of the other N-1 RF signals.

[0014] In a second aspect, a radio frequency power supply system is also provided, the radio frequency power supply system comprising a radio frequency power supply device. The radio frequency power supply device comprises N radio frequency sources and a frequency switching unit; the N radio frequency sources are used to output N radio frequency signals respectively, and the frequencies of the N radio frequency signals are different from each other; one end of the frequency switching unit is connected to the N radio frequency sources respectively, and the other end of the frequency switching unit is used to connect to a first load, wherein the frequency switching unit has an adjustable resonant frequency, so that the target radio frequency signal among the N radio frequency signals is output to the first load according to the resonant frequency of the frequency switching unit; wherein N≥2.

[0015] The RF power supply device and RF power supply system of the present application, by setting a frequency switching unit with an adjustable resonant frequency, can allow a target RF signal among N RF signals with different frequencies output by N RF sources to pass through and be output to a first load according to the resonant frequency of the frequency switching unit. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0017] Figure 1 It is a block diagram of a radio frequency power supply device in one embodiment of the present application.

[0018] Figure 2 It is a block diagram of a radio frequency power supply device in another embodiment of the present application.

[0019] Figure 3 It is a block diagram of a radio frequency power supply device in another embodiment of the present application.

[0020] Figure 4 Schematic diagram of a circuit of an impedance matching unit in an embodiment of the present application.

[0021] Figure 5 It is a block diagram of a radio frequency power supply device in yet another embodiment of the present application.

[0022] Figure 6FIG. 4 is a circuit diagram of a series resonance module in an embodiment of the present application.

[0023] Figure 7 for Figure 5 The shunt unit of the radio frequency power supply device shown is a block diagram showing two shunt modules.

[0024] Figure 8 It is a block diagram of a radio frequency power supply device in yet another embodiment of the present application.

[0025] Fig. 9 A block diagram of a rectifier module is shown for a radio frequency power supply device in an embodiment of the present application.

[0026] Fig.10 A block diagram of an energy consumption module is shown for a radio frequency power supply device in an embodiment of the present application.

[0027] Fig.11 It is a block diagram of a radio frequency power supply system in one embodiment of the present application.

[0028] Explanation of the accompanying drawings: 10, RF power supply equipment, 100, RF source, RFS, RF signal, 200, frequency switching unit, 210, series resonance module, TS, target RF signal, Cr, resonant capacitor, Lr, resonant inductor, 300, protection unit, 400, impedance matching unit, C1, first capacitor, L1, first inductor, 500, shunt unit, 510, shunt module, 520, first shunt module, 530, second shunt module, 540, first frequency selection module, 550, second frequency selection module, 560, rectifier module, 570, energy consumption module, RL1, first load, RL2, second load, RL3, third load, 1000, RF power supply system. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0030] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0031] In the following, the terms "first" and "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "plurality" means two or more.

[0032] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.

[0033] See also Figure 1 , Figure 1 FIG. 1 is a block diagram of a radio frequency power supply device in an embodiment of the present application. Figure 1 As shown, the present application provides a radio frequency power supply device 10, which includes N radio frequency sources 100 and a frequency switching unit 200; the N radio frequency sources 100 are used to output N radio frequency signals RFS respectively, and the frequencies of the N radio frequency signals RFS are different from each other; one end of the frequency switching unit 200 is connected to the N radio frequency sources 100 respectively, and the other end of the frequency switching unit 200 is used to connect to a first load RL1, wherein the frequency switching unit 200 has an adjustable resonant frequency, so that according to the resonant frequency of the frequency switching unit 200, a target radio frequency signal TS in the N radio frequency signals RFS is output to the first load RL1; wherein N≥2.

[0034] Therefore, the above-mentioned RF power supply device 10 in the present application, by setting the frequency switching unit 200 to have an adjustable resonant frequency, can enable the target RF signal TS among the N RF signals RFS with different frequencies output by the N RF sources 100 to pass according to the resonant frequency of the frequency switching unit 200 and output it to the first load RL1.

[0035] In one or more embodiments, the frequency switching unit 200 may include electronic components such as capacitors, inductors, and resistors to form a resonant circuit such as a series LC resonant circuit and a series RC resonant circuit. Further, the resonant frequency of the resonant circuit such as the series LC resonant circuit and the series RC resonant circuit is adjusted by adjusting the capacitance value, inductance value, resistance value and other parameters corresponding to the electronic components such as capacitors, inductors, and resistors.

[0036] In one or more embodiments, when the resonant frequency of the frequency switching unit 200 is switched to be the same as the frequency of a certain radio frequency signal RFS, the radio frequency signal RFS having the resonant frequency is allowed to pass through and output to the first load RL1 .

[0037] Therefore, the RF power supply device 10 in the present application utilizes the resonant frequency of the frequency switching unit 200 to maintain low impedance for a certain RF signal RFS with the same frequency, and can select the target RF signal TS from N RF signals RFS with different frequencies to pass through and output to the first load RL1.

[0038] See also Figure 2 , Figure 2 FIG. 1 is a block diagram of a radio frequency power supply device in another embodiment of the present application. Figure 2 As shown, the RF power supply device 10 also includes N protection units 300, which are connected one by one between the N RF sources 100 and one end of the frequency switching unit 200, and each protection unit 300 is used to prevent other N-1 RF signals RFS except the corresponding RF signal RFS from being transmitted to the corresponding RF source 100.

[0039] Therefore, the above-mentioned RF power supply device 10 in the present application can prevent other N-1 RF signals RFS except the corresponding RF signal RFS from being transmitted to the corresponding RF source 100 by setting N protection units 300 connected one by one between N RF sources 100 and one end of the frequency switching unit 200.

[0040] Specifically, when N RF sources 100 output N RF signals RFS respectively, only the target RF signal TS among the N RF signals RFS is output to the first load RL1, and other RF signals RFS are not allowed to pass through the frequency switching unit 200, but will oscillate repeatedly between the N RF sources 100 and the frequency switching unit 200, continuously impacting the N RF sources 100 and the frequency switching unit 200, which not only affects the output of the target RF signal TS, but also causes damage or even destruction to the N RF sources 100. Therefore, the protection unit 300 prevents the other N-1 RF signals RFS except the corresponding RF signal RFS from being transmitted to the corresponding RF source 100, so that the N RF sources 100 can be protected, that is, the N RF sources 100 are isolated.

[0041] In one or more embodiments, when the RF power supply device 10 includes or does not include N protection units 300, in order to further prevent other RF signals RFS except the target RF signal TS from failing to pass through the frequency switching unit 200 and affecting the N RF sources 100, the power values ​​of other RF signals RFS except the target RF signal TS can be set to be below a preset power threshold to reduce or even avoid affecting the N RF sources 100, that is, the output power values ​​of other RF sources 100 corresponding to other RF signals RFS are all below the preset power threshold. The preset power threshold can be set according to specific needs, such as 1W, 2W, etc.

[0042] In one or more embodiments, each protection unit 300 may include a signal follower, a logic gate circuit, or other devices that only allow the corresponding RF source 100 to transmit in one direction to the frequency switching unit 200, thereby preventing other N-1 RF signals RFS except the corresponding RF signal RFS from being transmitted to the corresponding RF source 100. Each protection unit 300 may also include a protection capacitor and a protection inductor, which may be connected in series to form a series LC resonant circuit with a resonant frequency. The resonant frequency of each protection unit 300 is the same as the frequency of the RF signal RFS output by the corresponding RF source 100, so as to maintain low impedance to the RF signal RFS output by the corresponding RF source 100, allow the RF signal RFS output by the corresponding RF source 100 to be transmitted to the frequency switching unit 200 through the protection unit 300, and maintain high impedance to the RF signals RFS output by the other N-1 RF sources 100 except the corresponding RF signal RFS, thereby preventing the other N-1 RF signals RFS from being transmitted to the corresponding RF source 100.

[0043] See also Figure 3 , Figure 3 FIG. 1 is a block diagram of a radio frequency power supply device in another embodiment of the present application. Figure 3 As shown, the RF power supply device 10 also includes N impedance matching units 400, which are connected one by one between the N RF sources 100 and one end of the frequency switching unit 200; wherein the reactance value of the frequency switching unit 200 is zero, and each RF source 100 is impedance matched with the first load RL1 through the correspondingly connected impedance matching unit 400.

[0044] Thus, the above-mentioned RF power supply device 10 in the present application, by setting N impedance matching units 400 to be connected one by one between N RF sources 100 and one end of the frequency switching unit 200, and configuring the reactance value of the frequency switching unit 200 to be zero, each impedance matching unit 400 only impedance matches the corresponding RF source 100 with the first load RL1 at the resonant frequency output by the corresponding RF source 100, thereby achieving the output of non-reflected power, that is, the power output by the corresponding RF source 100 is all forward power, without considering the reactance value of the frequency switching unit 200.

[0045] Please also read Figure 4 , Figure 4 FIG. 1 is a circuit diagram of an impedance matching unit in an embodiment of the present application. Figure 3 , Figure 4 As shown, each impedance matching unit 400 includes a first capacitor C1 and a first inductor L1, and the first capacitor C1 and the first inductor L1 are connected in series between the corresponding RF source 100 and one end of the frequency switching unit 200, the first capacitor C1 is an adjustable capacitor, and the first inductor L1 is an adjustable inductor, and the corresponding RF source 100 and the first load RL1 are impedance matched at the resonant frequency output by the corresponding RF source 100 by adjusting the capacitance value of the first capacitor C1 and / or the inductance value of the first inductor L1.

[0046] See also Figure 5 , Figure 5 FIG. 1 is a block diagram of a radio frequency power supply device in another embodiment of the present application. Figure 5 As shown, the frequency switching unit 200 includes a series resonance module 210, and the series resonance module 210 has an adjustable resonance frequency. The resonance frequency of the series resonance module 210 is adjusted to be the same as the frequency of the target RF signal TS to maintain low impedance to the target RF signal TS and maintain high impedance to the other N-1 RF signals RFS, thereby only allowing the target RF signal TS to be output to the first load RL1.

[0047] Therefore, the above-mentioned RF power supply device 10 in the present application, by setting the frequency switching unit 200 to include a series resonance module 210, can utilize the resonance characteristics of the series resonance module 210 so that the resonance frequency of the series resonance module 210 is the same as the frequency of the target RF signal TS, so as to maintain low impedance to the target RF signal TS and maintain high impedance to the other N-1 RF signals RFS, thereby only allowing the target RF signal TS to be output to the first load RL1.

[0048] One end of the series resonant module 210 is connected to the N RF sources 100 , and the other end of the series resonant module 210 is connected to the first load RL1 .

[0049] Please also read Figure 6 , Figure 6 FIG. 1 is a circuit diagram of a series resonance module in an embodiment of the present application. Figure 5 , Figure 6 As shown, the series resonant module 210 includes a resonant capacitor Cr and a resonant inductor Lr, which are connected in series. The resonant capacitor Cr is an adjustable capacitor, and the resonant inductor Lr is an adjustable inductor. The capacitance value of the resonant capacitor Cr and the inductance value of the resonant inductor Lr are adjusted to adjust the resonant frequency of the series resonant module 210.

[0050] One end of the resonant capacitor Cr is connected to the N RF sources 100 , the other end of the resonant capacitor Cr is connected to one end of the resonant inductor Lr, and the other end of the resonant inductor Lr is connected to the first load RL1 .

[0051] It should be noted that, in order to make the reactance value of the frequency switching unit 200 always zero and avoid affecting the impedance matching between the N impedance matching units 400 and the N RF sources 100 and the first load RL1, the overall reactance value of the sum of the capacitive reactance value of the resonant capacitor Cr and the inductive reactance value of the resonant inductor Lr needs to be always zero, so that the reactance value of the series resonant module 210 is always zero, and then the reactance value of the frequency switching unit 200 is always zero. Therefore, it is necessary to control the capacitance value of the resonant capacitor Cr and the inductance value of the resonant inductor Lr when adjusting the resonant frequency of the series resonant module 210. The reactance value of the series resonant module 210 can be always zero by adjusting the capacitance value of the resonant capacitor Cr and the inductance value of the resonant inductor Lr at the same time. Specifically, the capacitance value of the resonant capacitor Cr can be increased while the inductance value of the resonant inductor Lr can be decreased, and the capacitance value of the resonant capacitor Cr can be decreased while the inductance value of the resonant inductor Lr can be increased, so that the overall resonant frequency of the resonant capacitor Cr and the resonant inductor Lr changes, and the overall reactance value is always zero, that is, the reactance value of the series resonant module 210 is always zero.

[0052] Furthermore, the capacitance value of the resonant capacitor Cr and the inductance value of the resonant inductor Lr for achieving the desired resonant frequency and the overall reactance value of zero can be obtained by looking up a table. The capacitance value of the resonant capacitor Cr and the inductance value of the resonant inductor Lr for achieving the desired resonant frequency and maintaining the overall reactance value of zero can also be calculated by calculation.

[0053] In one or more embodiments, the series resonant module 210 has a narrow frequency range for allowing passage, but in order to avoid false passage, the frequency difference between any two radio frequency signals RFS can be made greater than a first preset threshold. The first preset threshold can be set according to specific needs. This prevents other N-1 radio frequency signals RFS from passing through the frequency switching unit 200 by mistake, thereby improving the frequency selection accuracy of the frequency switching unit 200.

[0054] Please refer again Figure 5 .like Figure 5 As shown, the RF power supply device 10 also includes a shunt unit 500, which is connected to a connection point between the N RF sources 100 and one end of the frequency switching unit 200. The shunt unit 500 is used to maintain low impedance for at least part of the other N-1 RF signals RFS according to the frequencies of the N RF signals RFS, so that at least part of the other N-1 RF signals RFS can pass through.

[0055] Therefore, the above-mentioned RF power supply device 10 in the present application, as mentioned above, in order to prevent other RF signals RFS that are not allowed to pass through the frequency switching unit 200 from repeatedly oscillating between the N RF sources 100 and the frequency switching unit 200, a shunt unit 500 is provided to maintain low impedance for at least part of the other N-1 RF signals RFS according to the frequencies of the N RF signals RFS, so that at least part of the other N-1 RF signals RFS can pass through without affecting the target RF signal TS whose frequencies are different from those of the other N-1 RF signals RFS and being output to the first load RL1 through the frequency switching unit 200.

[0056] In one or more embodiments, the shunt unit 500 may include a filter having a filtering frequency range, maintaining low impedance for the RF signal RFS having a frequency within the filtering frequency range, and the filtering frequency range does not include the frequency of the target RF signal TS to avoid the target RF signal TS passing through the shunt unit 500 without being output to the first load RL1.

[0057] In one or more embodiments, at least part of the other N-1 radio frequency signals RFS may be directly filtered out or consumed by the shunt unit 500, or may be reused after conversion, or may be stored after conversion.

[0058] See also Figure 7 , Figure 7 for Figure 5 The shunt unit of the RF power supply device shown in the figure includes a block diagram of two shunt modules. Figure 7As shown, the shunt unit 500 includes two shunt modules 510, each of which is connected to a connection point between N RF sources 100 and one end of the frequency switching unit 200, wherein one shunt module 510 is used to maintain low impedance for at least one RF signal RFS having a frequency greater than a target frequency, so that at least one RF signal RFS having a frequency greater than the target frequency passes through, and the other shunt module 510 is used to maintain low impedance for at least one RF signal RFS having a frequency less than the target frequency, so that at least one RF signal RFS having a frequency less than the target frequency passes through; wherein the target frequency is the frequency of the target RF signal TS.

[0059] Therefore, the above-mentioned RF power supply device 10 in the present application, by configuring two shunt modules 510 to maintain low impedance for at least one RF signal RFS with a frequency greater than the target frequency and at least one RF signal RFS with a frequency less than the target frequency, can allow all other N-1 RF signals RFS to pass through, thereby eliminating the adverse effects of repeated oscillations of the RF signal RFS between the N RF sources 100 and the frequency switching unit 200.

[0060] In one or more embodiments, the two shunt modules 510 may be a high-pass filter and a low-pass filter, respectively, and their respective filtering frequency ranges are set according to the target frequency.

[0061] See also Figure 8 , Figure 8 FIG. 1 is a block diagram of a radio frequency power supply device in yet another embodiment of the present application. Figure 7 The two diversion modules 510 shown include Figure 8 The first shunt module 520 and the second shunt module 530 shown, the shunt unit 500 also includes a first frequency selection module 540 and a second frequency selection module 550, the first frequency selection module 540 is connected between the first shunt module 520 and the second load RL2, and the second frequency selection module 550 is connected between the second shunt module 530 and the third load RL3; wherein the first frequency selection module 540 and the second frequency selection module 550 both have an adjustable resonant frequency, so as to select one of the at least one RF signal RFS passing through the first shunt module 520 to be output to the second load RL2 according to the resonant frequency of the first frequency selection module 540, and select one of the at least one RF signal RFS passing through the second shunt module 530 to be output to the third load RL3 according to the resonant frequency of the second frequency selection module 550.

[0062] Thus, the above-mentioned RF power supply device 10 in the present application selects one of the at least one RF signal RFS passing through the first shunt module 520 to be output to the second load RL2 through the first frequency selection module 540, and selects one of the at least one RF signal RFS passing through the second shunt module 530 to be output to the third load RL3 through the second frequency selection module 550, and can output to three loads of high frequency, medium frequency and low frequency at the same time, and maximize the use of the RF signals RFS output by N RF sources 100 to meet the needs of multiple loads with different required frequencies.

[0063] The more specific structures of the first frequency selection module 540 and the second frequency selection module 550 may refer to the relevant contents of the frequency switching unit 200 in any of the aforementioned embodiments, which will not be described in detail here.

[0064] In one or more embodiments, when the resonant frequency of the frequency switching unit 200 changes, the filtering frequency ranges of the first shunt module 520 and the second shunt module 530 will also change accordingly, and thus the resonant frequencies of the first frequency selection module 540 and the second frequency selection module 550 can be adjusted or not as needed.

[0065] Please also read Fig. 9 and Fig.10 , Fig. 9 A block diagram of a rectifier module is shown for a radio frequency power supply device in an embodiment of the present application. Fig.10 The block diagram of the energy consumption module of the radio frequency power supply device in one embodiment of the present application is shown. Fig. 9 , Fig.10 As shown, the shunt unit 500 includes N-1 shunt modules 510, each of which is connected to a connection point between N RF sources 100 and the frequency switching unit 200, and the N-1 shunt modules 510 respectively maintain low impedance to the other N-1 RF signals RFS.

[0066] Therefore, the above-mentioned RF power supply device 10 in the present application, by setting N-1 shunt modules 510 to maintain low impedance for the other N-1 RF signals RFS respectively, so that the other N-1 RF signals RFS pass through the N-1 shunt modules 510 respectively, which can avoid the mixing of the N-1 RF signals RFS, resulting in difficulty in subsequent processing of the N-1 RF signals RFS.

[0067] like Fig. 9 As shown, the shunt unit 500 further includes N-1 rectifier modules 560, the N-1 rectifier modules 560 are connected to the N-1 shunt modules 510 in a one-to-one correspondence, and the N-1 rectifier modules 560 are used to rectify the other N-1 radio frequency signals RFS respectively; or, as Fig.10As shown, the shunt unit 500 also includes N-1 energy consumption modules 570, which are connected to the N-1 shunt modules 510 in a one-to-one correspondence, and the N-1 energy consumption modules 570 are used to consume the electrical energy of the other N-1 radio frequency signals RFS.

[0068] Therefore, in the above-mentioned RF power supply device 10 in the present application, when the shunt unit 500 further includes N-1 rectifier modules 560, each rectifier module 560 rectifies the corresponding RF signal RFS to recover the energy of the corresponding RF signal RFS. When the shunt unit 500 further includes N-1 energy consumption modules 570, each energy consumption module 570 consumes the electrical energy of the corresponding RF signal RFS to avoid the harm caused by the continuous oscillation of the corresponding RF signal RFS.

[0069] In one or more embodiments, each rectifier module 560 may include electronic components such as diodes to form a half-wave rectifier circuit, a full-wave rectifier circuit, etc., so as to rectify the corresponding RF signal RFS to recover the energy of the corresponding RF signal RFS.

[0070] Among them, the energy of the rectified RF signal RFS can be stored in an energy storage module (not shown in the figure) so that the energy storage module can provide power to N RF sources 100 and other modules that require power when needed. The energy of the rectified RF signal RFS can also directly provide power to N RF sources 100 and other modules that require power.

[0071] In one or more embodiments, each energy consumption module 570 may include electronic components such as resistors to consume the electrical energy of the corresponding radio frequency signal RFS.

[0072] In some embodiments, the above-mentioned capacitors, inductors and other electronic components of the present application can adjust the capacitance value, inductance value and other parameters corresponding to the capacitors, inductors and other electronic components in various ways, for example, by rotating a motor, a gating circuit of multiple electronic components, etc. to adjust the capacitance value, inductance value and other parameters corresponding to the capacitors, inductors and other electronic components. Among them, the gating circuit of multiple electronic components can include multiple capacitors with different capacitance values ​​and / or multiple inductors with different inductance values.

[0073] In some embodiments, the present application may further include a control unit (not shown in the figure), which controls and adjusts the above-mentioned capacitors, inductors and other electronic components, and controls and adjusts the N RF sources 100 to output or not output the RF signal RFS, as well as the power value of the output RF signal RFS. The control unit may be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microcontroller such as a microcontroller unit (MCU).

[0074] The RF power supply device 10 of the present application, through the above-mentioned structure, can output the target RF signal TS among the N RF signals RFS with different frequencies output by N RF sources 100 to the first load RL1, and can protect the N RF sources 100 and the frequency switching unit 200, and can also perform impedance matching between the N RF sources 100 and the first load RL1, and can simultaneously meet the needs of multiple loads with different required frequencies.

[0075] See also Fig.11 , Fig.11 FIG. 1 is a block diagram of a radio frequency power supply system in an embodiment of the present application. Fig.11 As shown, the present application further provides a radio frequency power supply system 1000, and the radio frequency power supply system 1000 includes the radio frequency power supply device 10 of any of the aforementioned embodiments.

[0076] Please refer again Figure 1 .like Figure 1 As shown, the RF power supply device 10 includes N RF sources 100 and a frequency switching unit 200; the N RF sources 100 are used to output N RF signals RFS respectively, and the frequencies of the N RF signals RFS are different from each other; one end of the frequency switching unit 200 is connected to the N RF sources 100 respectively, and the other end of the frequency switching unit 200 is used to connect to the first load RL1, wherein the frequency switching unit 200 has an adjustable resonant frequency, so that the target RF signal TS in the N RF signals RFS is output to the first load RL1 according to the resonant frequency of the frequency switching unit 200; wherein N≥2.

[0077] The more specific structure of the RF power supply device 10 may refer to the relevant content of the RF power supply device 10 in any of the aforementioned embodiments, which will not be described in detail here.

[0078] like Figure 1 , Fig.11 As shown, the RF power supply device 10 is connected to at least the first load RL1, and is used to output a target RF signal TS to at least the first load RL1.

[0079] The RF power supply device 10 and the RF power supply system 1000 of the present application, through the above-mentioned structure, can output the target RF signal TS among the N RF signals RFS with different frequencies output by N RF sources 100 to the first load RL1, and can protect the N RF sources 100 and the frequency switching unit 200, and can also perform impedance matching between the N RF sources 100 and the first load RL1, and can simultaneously meet the needs of multiple loads with different required frequencies.

[0080] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A radio frequency power supply device, characterized in that: include: N radio frequency sources, used to respectively output N radio frequency signals, wherein the frequencies of the N radio frequency signals are different from each other; a frequency switching unit, one end of which is connected to the N RF sources respectively, and the other end of which is used to connect to a first load, wherein the frequency switching unit has an adjustable resonant frequency, so that a target RF signal among the N RF signals is output to the first load according to the resonant frequency of the frequency switching unit; Where N≥2; The RF power supply device further includes N impedance matching units, which are connected one by one between the N RF sources and one end of the frequency switching unit; wherein the reactance value of the frequency switching unit is zero, each RF source performs impedance matching with the first load through the corresponding impedance matching unit, and each impedance matching unit performs impedance matching between the corresponding RF source and the first load at the frequency of the RF signal output by the corresponding RF source; The frequency switching unit includes a series resonance module, and the series resonance module has an adjustable resonance frequency so that the frequency switching unit has an adjustable resonance frequency; the series resonance module includes a resonance capacitor and a resonance inductor, and the resonance capacitor and the resonance inductor are connected in series, the resonance capacitor is an adjustable capacitor, and the resonance inductor is an adjustable inductor, wherein, when adjusting the resonance frequency of the series resonance module, the capacitance value of the resonance capacitor is increased while the inductance value of the resonance inductor is correspondingly decreased, or the capacitance value of the resonance capacitor is decreased while the inductance value of the resonance inductor is correspondingly increased, so as to adjust the resonance frequency of the series resonance module and make the reactance value of the series resonance module always zero.

2. The radio frequency power supply device according to claim 1, characterized in that: When the resonant frequency of the frequency switching unit is switched to be the same as the frequency of a certain radio frequency signal, the radio frequency signal having the resonant frequency is allowed to pass through and output to the first load.

3. The radio frequency power supply device according to claim 1, characterized in that: The RF power supply device also includes N protection units, which are connected one-to-one between the N RF sources and one end of the frequency switching unit, and each protection unit is used to prevent other N-1 RF signals except the corresponding RF signal from being transmitted to the corresponding RF source.

4. The radio frequency power supply device according to claim 2, characterized in that: The resonant frequency of the series resonant module is adjusted to be the same as the frequency of the target RF signal to maintain low impedance for the target RF signal and high impedance for other N-1 RF signals, thereby allowing only the target RF signal to be output to the first load.

5. The radio frequency power supply device according to claim 4, characterized in that: The RF power supply device also includes a shunt unit, which is connected to a connection point between the N RF sources and one end of the frequency switching unit. The shunt unit is used to maintain low impedance for at least part of the other N-1 RF signals according to the frequencies of the N RF signals, so that at least part of the other N-1 RF signals can pass through.

6. The radio frequency power supply device according to claim 5, characterized in that: The shunt unit includes two shunt modules, each of which is connected to a connection point between the N RF sources and one end of the frequency switching unit, wherein one shunt module is used to maintain low impedance for at least one RF signal having a frequency greater than a target frequency, so that at least one RF signal having a frequency greater than the target frequency passes through, and the other shunt module is used to maintain low impedance for at least one RF signal having a frequency less than the target frequency, so that at least one RF signal having a frequency less than the target frequency passes through; wherein the target frequency is the frequency of the target RF signal.

7. The radio frequency power supply device according to claim 6, characterized in that: The two shunt modules include a first shunt module and a second shunt module, and the shunt unit also includes a first frequency selection module and a second frequency selection module, the first frequency selection module is connected between the first shunt module and the second load, and the second frequency selection module is connected between the second shunt module and the third load; wherein the first frequency selection module and the second frequency selection module both have an adjustable resonant frequency, so as to select one of the at least one RF signal passing through the first shunt module to be output to the second load according to the resonant frequency of the first frequency selection module, and select one of the at least one RF signal passing through the second shunt module to be output to the third load according to the resonant frequency of the second frequency selection module.

8. The radio frequency power supply device according to claim 5, characterized in that: The shunt unit includes N-1 shunt modules, each of which is connected to a connection point between the N RF sources and the frequency switching unit, and the N-1 shunt modules respectively maintain low impedance to the other N-1 RF signals.

9. The radio frequency power supply device according to claim 8, characterized in that: The shunt unit also includes N-1 rectifier modules, which are connected to the N-1 shunt modules in a one-to-one correspondence, and the N-1 rectifier modules are used to rectify the other N-1 RF signals respectively; or, the shunt unit also includes N-1 energy consumption modules, which are connected to the N-1 shunt modules in a one-to-one correspondence, and the N-1 energy consumption modules are used to consume the electrical energy of the other N-1 RF signals.

10. A radio frequency power supply system, characterized in that: Comprising the radio frequency power supply device as described in any one of claims 1-9.

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