An optical detection device

Abstract

The application relates to an optical detection device. The optical detection device comprises a transmission unit, a first detection unit, a rotating device and a second detection unit. The transmission unit is sequentially provided with a first detection station, a rotating station and a second detection station. The first detection unit is located at the first detection station and is used for detecting a to-be-detected object from a first orientation. The rotating device is located at the rotating station and is used for rotating the to-be-detected object by a preset angle. The second detection unit is located at the second detection station and is used for detecting the to-be-detected object from a second orientation. The second orientation is different from the first orientation. The application mainly solves the problem that the missing detection rate of the optical detection device needs to be reduced.

Description

Technical Field

[0001] This invention relates to optical inspection equipment. Background Technology

[0002] In the electronics manufacturing industry, AOI (Optical Automated Inspection) equipment is a crucial inspection tool and process quality control tool for ensuring product quality. For example, for glass cover products such as mobile phone cover glass and tablet computer cover glass, relying on manual visual inspection is not only inefficient and costly, but also prone to missed inspections or misjudgments. Optical inspection equipment can achieve automated inspection, solving the above-mentioned problems of manual inspection.

[0003] Optical automated inspection equipment can illuminate the object under test (DUT) in different ways and angles using corresponding optical paths, and then image the DUT using a camera to obtain bright-field imaging, dark-field imaging, or transmission imaging. A key difference between bright-field and dark-field imaging lies in the angles of the illumination source and the camera. In bright-field imaging, the illumination light is reflected directly from the DUT's surface to the camera, resulting in a darker image of the DUT's surface texture against a brighter background. Conversely, dark-field imaging avoids direct reflection of the illumination light from the DUT's surface, resulting in a brighter image of the DUT's surface texture against a darker background. Transmission imaging involves positioning the camera and illumination source on opposite sides of the DUT's surface perpendicular to it; the location of a defect on the DUT will produce an image different from other locations.

[0004] Currently, optical inspection equipment can detect most defects in the test object, but there will still be cases of missed detection, and sometimes it is not easy to meet the customer's missed detection rate standard. Summary of the Invention

[0005] The main technical problem this invention addresses is the need to reduce the false negative rate of optical detection equipment.

[0006] In one aspect, the present invention provides an optical detection device.

[0007] An optical inspection device, comprising:

[0008] The transmission unit is provided with a first detection station, a rotary station and a second detection station in sequence;

[0009] A first detection unit is located at the first detection station and is used to detect the object to be tested from a first position.

[0010] A rotating device is located at the rotating station and is used to rotate the object to be tested by a preset angle.

[0011] The second detection unit is located at the second detection station and is used to detect the object to be tested from a second position, wherein the second position is different from the first position.

[0012] The first detection unit includes a first light source and a first camera; the first light source includes two sets of light source groups, which are arranged in a symmetrical manner, and the plane of symmetry of the two sets of light source groups is used to determine the position of the bearing surface of the object to be measured; the first camera includes two cameras, which are arranged symmetrically along the plane of symmetry.

[0013] The light source group includes bright field light sources and dark field light sources. In the same light source group, there are at least two dark field light sources and at least one bright field light source. At least one bright field light source is located between two adjacent dark field light sources, such that at least one dark field light source is located between the bright field light source and the camera.

[0014] The first detection unit also includes a contour light source, which has a light-emitting body arrangement shape adapted to the three-dimensional surface shape at the edge of the object to be measured, and is used to cooperate with the camera on the same side to achieve bright-field imaging of the edge of the object to be measured.

[0015] In one technical solution, the rotating device includes:

[0016] A lifting unit is used to move the object to be tested on the transmission unit up and down; the lifting unit includes a suction cup for adsorbing and fixing the object to be tested.

[0017] A rotating unit is connected to the lifting unit via a transmission mechanism and is used to drive the lifting unit to rotate.

[0018] In one technical solution, the light source group includes a transmission light source, which is used in conjunction with a camera located on a different side of the plane of symmetry to achieve transmission imaging of the object under test.

[0019] In one technical solution, the transmitted light source and the bright field light source are the same light source.

[0020] In one technical solution, the light emitted by the two sets of light sources converges on the same straight line of the surface of the object under test, and the distance between the light-emitting surfaces of the bright field light source and the dark field light source and the preset position of the surface of the object under test remains consistent.

[0021] In one technical solution, the second detection unit includes a second light source and a second camera;

[0022] The second light source includes:

[0023] A dark field light source is provided, and the dark field light source and the second camera are respectively disposed on the same side of the surface supporting the object under test, so as to cooperate with the second camera to realize dark field imaging of the object under test;

[0024] A transmission light source is provided, and the transmission light source and the second camera are respectively disposed on different sides of the surface supporting the object to be tested, for use in conjunction with the second camera to realize transmission imaging of the object to be tested.

[0025] In one technical solution, the orientation of the second camera is perpendicular to the surface of the object to be measured, and the two dark field light sources are symmetrical with respect to the axis of the camera and have an angle with the axis of the camera, the angle being no greater than 25 degrees.

[0026] In one technical solution, the transmission light source includes:

[0027] Light-emitting components;

[0028] A light-diffusing plate is located on the side of the light-emitting component closer to the dark field light source, and is used to form uniform planar light;

[0029] And a beam splitter, which is located on the side of the light-diffusing plate away from the light-emitting component, and is inclined relative to the light-diffusing plate; the beam splitter is used to transmit part of the light from the light-emitting component to form a transmission image, and to reflect the light emitted from the dark field light source to reduce or avoid the light emitted from the dark field light source from shining on the light-diffusing plate and reflecting towards the second camera.

[0030] In one technical solution, when the optical detection device performs detection:

[0031] The first detection unit is used for detection, and then the second detection unit is used for detection. The preset angle is 90 degrees or 180 degrees.

[0032] Alternatively, the second detection unit can be used for detection first, followed by the first detection unit, with the preset angle being 90 degrees or 180 degrees.

[0033] In one technical solution, when the first detection unit or the second detection unit performs detection, the corresponding light sources in the corresponding detection unit are lit up in a set order, and the corresponding camera only performs one or more image acquisitions when the corresponding light source is lit up.

[0034] The beneficial effects of this invention are:

[0035] According to the optical inspection device of the above embodiment, since the first detection unit and the second detection unit can detect the object under test along two different first and second directions respectively, it can avoid the defect being undetectable by the camera when a single detection direction is used and the detection direction is perpendicular to the defect extension direction. It can realize the detection of defects with different extension directions, thereby reducing the false negative rate and improving the accuracy of the detection results. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of the overall structure of an optical detection device according to the present invention;

[0037] Figure 2 This is a schematic diagram of the transmission unit in an optical inspection device.

[0038] Figure 3 This is a schematic diagram of the structure of the first detection unit in an optical inspection device.

[0039] Figure 4 This is a schematic diagram of the first detection unit in an optical inspection device.

[0040] Figure 5 This is the timing control diagram for the first detection unit;

[0041] Figure 6 This is a schematic diagram of the structure of the second detection unit in an optical inspection device;

[0042] Figure 7 This is a timing control diagram for the second detection unit in an optical inspection device.

[0043] List of feature names corresponding to the labels in the figure:

[0044] 10. First detection unit; 11. First light source; 12. First camera; 13. Contouring light source;

[0045] 20. Second detection unit; 21. Dark field light source; 22. Second camera; 23. Transmitted light source; 24. Beam splitter;

[0046] 30. Transmission unit; 31. First inspection station; 32. Second inspection station; 33. Rotation station; 34. Reset station;

[0047] 40. The object to be tested. Detailed Implementation

[0048] The present invention will now be described in further detail with reference to specific embodiments and accompanying drawings. Similar elements in different embodiments are referred to by associated similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of this application. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, certain operations related to this application are not shown or described in the specification. This is to avoid obscuring the core parts of this application with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0049] Furthermore, the features, operations, or characteristics described in the specification can be combined in any suitable manner to form various embodiments. At the same time, the steps or actions in the method description can be rearranged or adjusted in a manner obvious to those skilled in the art. Therefore, the various orders in the specification and drawings are only for the clear description of a particular embodiment and do not imply a necessary order, unless otherwise stated that a particular order must be followed.

[0050] The serial numbers assigned to components in this document, such as "first" and "second," are used only to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages).

[0051] An embodiment of an optical detection device according to the present invention:

[0052] In one embodiment, the optical inspection equipment is used to inspect mobile phone glass covers. Mobile phone glass covers have numerous surface defects of various shapes, requiring a sophisticated optical path system and inspection process to ensure comprehensive inspection of the cover, reduce the rate of missed defects, and guarantee inspection quality.

[0053] like Figure 1 and Figure 2 The optical inspection equipment includes: a transmission unit 30, which is sequentially provided with a first inspection station 31, a rotation station 33, and a second inspection station 32; a first inspection unit 10, located at the first inspection station 31, which is used to inspect the object 40 to be tested from a first position; a rotation device, located at the rotation station 33, which is used to rotate the object 40 to be tested by a preset angle; and a second inspection unit 20, located at the second inspection station 32, which is used to inspect the object 40 to be tested from a second position; wherein the second position is different from the first position.

[0054] As a preferred implementation method, such as Figure 2 The transmission unit 30 employs a magnetic wheel conveyor line, which supports the object under test 40 and moves it, allowing the object to be scanned along the conveying direction of the magnetic wheel conveyor line for detection. The magnetic wheel conveyor line can use conventional magnetic wheel modules, relying on the magnetic wheels to transmit torque. Power transmission is non-contact, with no mechanical wear, longer lifespan, and no dust. In the magnetic wheel conveyor line, the gap between adjacent support wheels supporting the object under test 40 allows light generated by a light source to pass through and enter the camera, thereby achieving imaging of the object under test 40. The support wheels supporting the object under test 40 can be magnetic wheels or ordinary rollers. When using ordinary rollers, the magnetic wheels only serve to transmit driving force. In other embodiments, the transmission unit 30 can also be replaced with other forms, such as a conventional roller conveyor line, where the roller shafts can be driven by gears, chains, or synchronous belts. Figure 2 As shown, when the object under test 40 is at the first detection station 31, its long side is in the same direction as the transmission direction of the transmission unit 30. However, when the object under test 40 is at the second detection station 32, its long side is perpendicular to the transmission direction of the transmission unit 30. Therefore, the number of rollers (two rows) used to support the object under test 40 at the first detection station 31 is less than the number of rollers (four rows) used to support the object under test 40 at the second detection station 32.

[0055] In one embodiment, a reset station 34 is provided after the transmission unit 30 and the second detection station 32. The reset station 34 can rotate the object to be tested 40 back to its initial position, so that the long side of the object to be tested 40 continues to be consistent with the transmission direction of the transmission unit 30. Setting up the reset station 34 allows the object to be tested 40 to be fed in its initial state. At this time, the feeding device and the unloading device can use the same equipment, which helps to save costs.

[0056] As a preferred implementation method, such as Figure 3 , Figure 6 The first detection unit 10 includes a first light source 11 and a first camera 12. The first light source 11 includes two light source groups arranged symmetrically. The plane of symmetry of the two light source groups is used to determine the position of the bearing surface of the object under test 40. The first camera 12 includes two cameras arranged symmetrically along the plane of symmetry. The light source groups include: a bright field light source, which is used to cooperate with the camera located on the same side of the plane of symmetry to achieve bright field imaging of the object under test 40; a dark field light source, which is used to cooperate with the camera located on the same side of the plane of symmetry to achieve dark field imaging of the object under test 40; and a transmission light source, which is used to cooperate with the camera located on a different side of the plane of symmetry to achieve transmission imaging of the object under test 40.

[0057] Specifically, in one embodiment, the transmission unit 30 is arranged horizontally to form a horizontal surface supporting the object under test 40, and two sets of light sources are distributed vertically. In one embodiment, each light source group of the first light source 11 includes light source A, light source B, light source C, and light source D. Light sources A, B, C, and D all have a length direction, and this length direction is perpendicular to the transmission direction of the transmission unit 30. Light sources A, B, C, and D can all form a straight light spot on the object under test 40. In one embodiment, the light emitted by the two sets of light sources converges on the same straight line on the surface supporting the object under test 40, and the distance between the emitting surfaces of the bright field light source and the dark field light source and the preset position on the surface supporting the object under test 40 remains consistent. Figure 6 In the embodiment shown, the light emission directions of light sources A, B, C, and D are focused on a straight line, converging at a point when viewed perpendicular to the plane of the paper; and light sources A, B, C, and D are arranged in an arc shape, with the distances between light sources A, B, C, and D and the test position on the test object 40 being consistent.

[0058] Since the brightness required for a dark field light source is much higher than that required for a bright field light source and a transmitted light source, in this embodiment, light sources A, C, and D are used together to form a dark field light source, relying on a larger number of light sources to achieve higher brightness, while light source B serves as the bright field light source. Simultaneously, the transmitted light source and the bright field light source are the same light source. Taking the upper light source group as an example, light source B, located above the surface of the object under test 40, can not only be adapted to the camera below the surface of the object under test 40 to achieve transmitted imaging, but also to the camera above the surface of the object under test 40 to achieve bright field imaging. Besides the difference in light source brightness, another major difference between bright field imaging and dark field imaging lies in the arrangement angle of the illumination source and the camera. Bright field imaging involves the illumination light being reflected directly to the camera after hitting the surface of the object under test 40. In this case, the uneven structure of the surface of the object under test 40 will form a darker image against a brighter background. Dark field imaging, on the other hand, avoids the illumination light being reflected directly to the camera after hitting the surface of the object under test 40. Therefore, in one embodiment, in the same light source group, there are at least two dark field light sources and at least one bright field light source, and at least one bright field light source is located between two adjacent dark field light sources, so that at least one dark field light source is located between the bright field light source and the camera, which can make full use of space, has a compact structure, facilitates the arrangement of the light source group, and can also increase the illumination range of the dark field light source on the object 40 under test.

[0059] As a preferred implementation method, such as Figure 3The first detection unit 10 further includes a contour light source 13. The contour light source 13 has a light-emitting element arrangement shape adapted to the three-dimensional surface shape at the edge of the object under test 40, and is used to cooperate with the camera on the same side to achieve bright-field imaging of the edge of the object under test 40. In one embodiment, the light-emitting elements of the contour light source 13 are LED beads arranged in a matrix, or lamp tubes arranged parallel to and around the edge of the object under test 40. A light-diffusing component is provided on the side of the light-emitting elements close to the bearing surface of the object under test 40, which can make the light more uniform. The contour light source 13 can be used to specifically detect the edge of the object under test 40, thereby achieving more comprehensive detection. Preferably, the contour light source 13 may include a light-diffusing component, which can make the light emitted by the LED beads or lamp tubes more uniform. When the uniform light shines on the object under test 40, it can achieve a more continuous and uniform illumination effect, thereby improving the detection quality.

[0060] In one embodiment, the object to be tested 40 is rectangular with four edges. Correspondingly, four contour light sources 13 are provided, each used to illuminate the three-dimensional surface of the rectangular object to be tested 40 at one of its four edges. In other embodiments, the number of contour light sources 13 can be increased or decreased depending on different detection requirements. For example, if only the two long sides of the object to be tested 40 are to be detected, only two contour light sources 13 can be provided, each corresponding to one of the two long sides of the object to be tested 40.

[0061] Preferably, the shape of the light emitters of the contour light source 13 is consistent with the shape of the three-dimensional surface at the edge of the object under test 40. In some other embodiments, when the edge of the mobile phone glass cover is of a different shape, the shape of the light emitters of the contour light source 13 can be changed accordingly. For example, in some other embodiments, the edge of the mobile phone glass cover may be a chamfered edge, that is, the cross-sectional profile at the edge includes an inclined straight profile line, which connects the top profile line and the side profile line of the object under test 40. In this case, the shape of the light emitters of the contour light source 13 is consistent with the shape of the chamfered edge at the edge of the object under test 40, which can cooperate with the corresponding first camera 12 to realize bright-field imaging of the three-dimensional surface at the edge of the object under test 40, thereby achieving a higher detection rate. As a typical application in the field of optical inspection equipment, the first camera 12 in the first detection unit 10 adopts a line scan camera, which can perform line imaging of the object under test 40 along the moving direction of the object under test 40 relative to the camera. The imaging is a straight line perpendicular to the transmission direction of the transmission unit 30. After all effective imaging is stitched together, a complete image of the entire object under test 40 can be obtained. In other embodiments, the camera may also directly acquire an overall image of the object under test 40.

[0062] When the object to be tested 40 passes through the first detection station 31 under the drive of the transmission unit 30, such as Figure 7Bright-field light source, dark-field light source, and transmitted light source are sequentially illuminated under the control of the light source controller. The corresponding first camera 12 acquires images when the bright-field light source, dark-field light source, and transmitted light source are illuminated, respectively, to achieve imaging. Dark-field imaging can detect defects such as scratches, chipping, discoloration, white spots, and dirt on the mobile phone glass cover. Bright-field imaging can detect defects such as bright spots, discoloration, bumps, and dents on the mobile phone glass cover. Transmitted imaging can detect defects such as indentations, bumps, light leakage, and missing corners in the screen printing on the mobile phone glass cover. By controlling the imaging size of the camera along the conveying direction of the object under test 40 and the conveying speed of the module, each part of the object under test 40 can be subjected to transmitted imaging and dark-field imaging in a line scan manner. After stitching, a complete image of the entire object under test 40 can be obtained. Figure 1 In the illustrated embodiment, the first detection unit 10 detects the object 40 from a first position, which is parallel to the length direction of the object 40. Depending on the detection requirements, the first detection unit 10 may also perform only one or two of bright-field detection, dark-field detection, and transmission detection.

[0063] In order to perform more comprehensive inspection of the test object 40 and reduce the missed detection rate, the rotating device of the rotating station 33 can rotate the test object 40 by 90°, so that the test object 40 can be inspected from a second position, which is a position parallel to the width direction of the test object 40.

[0064] In one embodiment, the rotating device includes: a lifting unit for lifting the test object 40 on the transmission unit 30; the lifting unit includes a suction cup for adsorbing and fixing the test object 40; and a rotating unit, which is connected to the lifting unit for driving the lifting unit to rotate. In one embodiment, the rotating unit is driven by a motor and can achieve rotation at a set angle. The lifting unit is fixed on the rotating unit and can drive the suction cup to lift. During operation, the lifting unit descends, the suction cup picks up the test object 40, then the lifting unit drives the suction cup and the test object 40 to rise and rotate 90°. The lifting unit descends again, and the suction cup releases the test object 40, thus completing the rotation of the test object 40. In other embodiments, the rotating device can be replaced with other forms as long as it can complete the rotation of the test object 40, which can be achieved by those skilled in the art without creative effort. For example, in other embodiments, the rotating unit can be fixed on the lifting unit. The lifting unit can be implemented in various forms such as a cylinder, hydraulic cylinder, robotic arm, or lead screw nut. The reset station 34 can adopt the same structure as the rotating unit.

[0065] The rotated test object 40 continues to move with the conveyor unit and is inspected by the second inspection unit 20 at the second inspection station 32. The second inspection unit 20 includes a second light source and a second camera 22; the second light source includes: a dark field light source 21, which is respectively disposed on the same side of the bearing surface of the test object 40, and is used to cooperate with the second camera 22 to realize dark field imaging of the test object 40; and a transmission light source 23, which is respectively disposed on different sides of the bearing surface of the test object 40, and is used to cooperate with the second camera 22 to realize transmission imaging of the test object 40.

[0066] In one embodiment, the second camera 22 is oriented perpendicular to the bearing surface of the object under test 40, and the two dark-field light sources 21 are symmetrical with respect to the camera axis and form an angle with the camera axis, the angle being no greater than 25°. As a preferred embodiment, the angle between the two dark-field light sources 21 and the optical axis of the second camera 22 is 10°, resulting in a compact structure. In other embodiments, the number of dark-field light sources 21 can be increased or decreased. Similar to the dark-field light sources 21 in the first light source 11, the dark-field light sources 21 in the second light source also have a length direction, and this length direction is perpendicular to the transmission direction of the transmission unit 30. The distance between the two dark-field light sources 21 and the measurement position on the object under test 40 is the same. In other embodiments, the second camera 22 can also be arranged at an angle, with its axis forming an acute angle with the bearing surface of the object under test 40. Furthermore, in other embodiments, the number of dark-field light sources 21 in the second detection unit 20 can also be increased or decreased, as long as the corresponding detection requirements are met. Furthermore, in other embodiments, depending on the detection requirements, the second detection unit 20 may perform only one or two of bright field detection, dark field detection, and transmission detection.

[0067] In one embodiment, as shown in FIG8, the transmission light source 23 includes: a light-emitting component; a light-diffusing plate located on the side of the light-emitting component near the dark field light source 21 for forming uniform planar light; and a beam splitter 24 located on the side of the light-diffusing plate away from the light-emitting component. The beam splitter 24 is inclined relative to the light-diffusing plate and is used to transmit part of the light from the light-emitting component to form a transmission image, and to reflect the light emitted from the dark field light source 21 to reduce or prevent the light emitted from the dark field light source 21 from shining onto the light-diffusing plate and reflecting towards the second camera 22. The beam splitter 24 can transmit a portion of the light emitted by the transmission light source 23 to meet the requirements of transmission imaging, and can also reflect the light emitted from the dark field light source 21. This avoids the light emitted from the dark field light source 21 hitting the light homogenizing plate and then being reflected into the second camera 22. This can achieve transmission detection and avoid interference with dark field detection caused by setting up the transmission light source 23. It allows transmission detection and dark field detection to be integrated into one place, and can adapt to the small angle between the dark field light source 21 and the second camera 22, avoiding severe reflection from the light homogenizing plate at small angles.

[0068] In one embodiment, the reflectivity of the beam splitter 24 is greater than 50%. As a preferred embodiment, the reflectivity of the beam splitter 24 is 90% to 95%, and the transmittance of the beam splitter 24 is 5% to 10%. The beam splitter 24, with the above-mentioned light emission and transmittance characteristics, can more effectively avoid the impact of dark field detection.

[0069] As the object under test 40 passes through the second detection station 32 driven by the transmission unit 30, as shown in Figure 9, the dark field light source 21 and the transmission light source 23 are sequentially lit under the control of the light source controller. The corresponding second camera 22 performs one or more image acquisitions when the dark field light source 21 and the transmission light source 23 are lit, thereby achieving imaging. By controlling the imaging size of the camera along the conveying direction of the object under test 40 and the conveying speed of the module, each part of the object under test 40 can be subjected to transmission imaging and dark field imaging in a line scan manner. After stitching, a complete image of the entire object under test 40 can be obtained.

[0070] When the optical inspection equipment performs inspection: first, the first inspection unit 10 is used for inspection, and then the second inspection unit 20 is used for inspection. In other embodiments, the second inspection unit 20 can be used first, followed by the first inspection unit 10. Preferably, the preset angle between the first position of the object under test 40 during inspection by the first inspection unit 10 and the second position of the object under test 40 during inspection by the second inspection unit 20 is 90 degrees, which facilitates the stitching of a complete image and data processing. In other embodiments, this preset angle can also be adjusted according to the defect situation; for example, it can be 180 degrees. Different directions of movement result in different inspection results, which can also help reduce the false negative rate.

[0071] The above examples illustrate the present invention only to aid in understanding it and are not intended to limit the scope of the invention. Those skilled in the art can make various simple deductions, modifications, or substitutions based on the principles of this invention.

Claims

1. An optical detection device, characterized by The utility model relates to a kind of detection device, including: Transmission unit (30), the transmission unit (30) is sequentially provided with first detection station (31), rotating station (33) and second detection station (32); First detection unit (10), the first detection unit (10) is located in the first detection station (31), and the first detection unit (10) is used to detect object from first orientation; Rotating device, the rotating device is located in the rotating station (33), and the rotating device is used to rotate object by preset angle; Second detection unit (20), the second detection unit (20) is located in the second detection station (32), and the second detection unit (20) is used to detect object from second orientation;Wherein, the second orientation is different from the first orientation; The first detection unit (10) includes first light source (11) and first camera (12);The first light source (11) includes two groups of light source groups, and two groups of the light source groups are arranged in face symmetry, and the symmetry plane of two groups of the light source groups is used to determine the position of object bearing surface;The first camera (12) includes two cameras, and two cameras are symmetrically arranged along the symmetry plane; The light source group includes bright field light source and dark field light source, in the same light source group, dark field light source is provided with at least two, and bright field light source is provided with at least one and at least one bright field light source is located between two adjacent dark field light sources, so that at least one dark field light source is located between bright field light source and camera; First detection unit (10) further includes profiling light source (13), and profiling light source (13) has the light-emitting body arrangement shape for adapting to the three-dimensional surface shape at the edge of object (40), to match the camera on the same side to realize the bright field imaging of the edge of object (40).

2. The optical detection device of claim 1, wherein, The rotating device includes: Lifting unit, lifting unit is used to drive the object on the transmission unit (30) to lift;The lifting unit includes suction disc, and the suction disc is used to adsorb and fix the object; Rotating unit, the rotating unit is drivingly connected with the lifting unit, for driving the lifting unit to rotate.

3. The optical detection device according to claim 1 or 2, characterized in that The light source group includes transmission light source, and the transmission light source is used to cooperate with the camera on the different side of the symmetry plane to realize the transmission imaging of the object.

4. The optical detection device of claim 3, wherein, The transmission light source and the bright field light source are the same light source.

5. The optical detection device of claim 3, wherein, The light rays emitted by two groups of the light source groups converge on the same straight line of the object bearing surface, and the distance between the light-emitting surface of the bright field light source and the dark field light source (21) and the preset position of the object bearing surface remains consistent.

6. The optical detection device of claim 1 or 2, wherein The second detection unit (20) includes second light source and second camera (22); The second light source includes: Dark field light source (21), the dark field light source (21) and the second camera (22) are respectively arranged on the same side of object bearing surface, for cooperating with the second camera (22) to realize the dark field imaging of the object; Transmission light source (23), the transmission light source (23) and the second camera (22) are respectively arranged on the different side of object bearing surface, for cooperating with the second camera (22) to realize the transmission imaging of the object.

7. The optical detection device of claim 6, wherein, The second camera (22) is perpendicular to the object carrying surface, and the two dark field light sources (21) are symmetric to the axis of the camera and have an angle with the axis of the camera, and the angle is not greater than 25 degrees.

8. The optical detection device of claim 6, wherein, The transmission light source (23) comprises: a light emitting component; a light homogenizing plate located on the side of the light emitting component close to the dark field light source (21) for forming uniform plane light; and a light splitting sheet (24) located on the side of the light homogenizing plate away from the light emitting component, the light splitting sheet (24) is arranged obliquely relative to the light homogenizing plate; the light splitting sheet (24) is used for transmitting part of the light of the light emitting component to form transmission imaging and reflecting the light from the dark field light source (21) so as to reduce or avoid the light from the dark field light source (21) from being reflected to the light homogenizing plate and then to the second camera (22).

9. The optical detection device of claim 1 or 2, wherein, When the optical detection device detects: first, the first detection unit (10) is used for detection, and then the second detection unit (20) is used for detection, and the preset angle is 90 degrees or 180 degrees; or, first, the second detection unit (20) is used for detection, and then the first detection unit (10) is used for detection, and the preset angle is 90 degrees or 180 degrees.

10. The optical detection device of claim 1 or 2, wherein, When the first detection unit (10) or the second detection unit (20) detects, each corresponding light source in the corresponding detection unit is lit in a set order, and the corresponding camera only collects one or more images when the corresponding light source is lit.

Images