Grinding table maintenance device and method for maintaining a grinding table
By designing a grinding disc maintenance device, multiple cleaning heads and a moving control unit are used to achieve automated cleaning, which solves the problem of low cleaning efficiency of the grinding disc and improves the surface quality of silicon wafers.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- XIAN ESWIN MATERIAL TECHNOLOGY CO LTD
- Filing Date
- 2024-06-24
- Publication Date
- 2026-06-12
Smart Images
Figure CN118650548B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a grinding and polishing plate maintenance device and its maintenance method. Background Technology
[0002] Silicon wafers are the most commonly used semiconductor material, an essential component in chip manufacturing, and account for the highest cost. With the rapid development of chip technology, the demand for silicon wafers has increased dramatically. Double-sided grinding is a crucial process in silicon wafer manufacturing. It involves placing the diced silicon wafer between upper and lower grinding discs. As the discs rotate, the grinding fluid and pressure work together to roughen and thin the surface of the wafer.
[0003] Double-sided grinding generates a large amount of byproducts such as silicon slag and grinding slurry residue. These byproducts are discharged from the grooves of the lower die. However, after multiple processing cycles, a large amount of solid byproducts accumulates in the grooves, causing drainage blockage. Furthermore, the silicon slag and grinding slurry residue retained on the lower die can scratch the surface of the silicon wafer during double-sided grinding, leading to a decrease in wafer quality. Therefore, the grooves of the lower die need to be cleaned regularly. However, current cleaning solutions suffer from incomplete cleaning and rely on manual cleaning, resulting in low efficiency. Summary of the Invention
[0004] To address the aforementioned technical problems, this invention provides a grinding disc maintenance device and its maintenance method, thereby solving the problem of low cleaning efficiency of the grinding disc.
[0005] To achieve the above objectives, the technical solution adopted in this embodiment of the invention is: a grinding disc maintenance device, wherein the grinding disc includes a grinding surface, and a plurality of grooves are provided on the grinding surface. In the width direction of the grooves, the grooves include a central region and corner regions located on opposite sides of the central region.
[0006] The maintenance device includes a grinding disc cleaning structure, which includes a first cleaning head, a second cleaning head, and a third cleaning head for cleaning the inside of the groove. In a first direction, the first cleaning head and the third cleaning head are located on opposite sides of the second cleaning head. The first cleaning head and the third cleaning head are respectively configured to extend into the groove to clean the corner area, and the second cleaning head is configured to extend into the groove to clean the middle area. When cleaning the groove, the first direction is parallel to the width direction of the groove.
[0007] A movement control unit is configured to control the grinding disc cleaning structure to move in a second direction, perpendicular to the first direction, to clean the groove.
[0008] Optionally, the grinding disc cleaning structure includes a blade body, one end of which is provided with a first cleaning head, a second cleaning head, and a third cleaning head.
[0009] Optionally, the grinding disc cleaning structure includes a first cleaning part, a second cleaning part, and a third cleaning part that are independently arranged. The first cleaning part includes a first blade and a first cleaning head located at one end of the first blade. The second cleaning part includes a second blade and a second cleaning head located at one end of the second blade. The third cleaning part includes a third blade and a third cleaning head located at one end of the third blade.
[0010] Optionally, in the second direction, the first cleaning section, the second cleaning section, and the third cleaning section are arranged at intervals.
[0011] Optionally, the second blade extends along a third direction, which is perpendicular to the first direction and also perpendicular to the second direction;
[0012] At least one of the first blade and the third blade is inclined, and the angle between the extension direction of the inclined first blade or the third blade and the third direction is an acute angle.
[0013] Optionally, in the first direction, the first cleaning head and the third cleaning head are symmetrically arranged relative to the second cleaning head. The first cleaning head includes a first cleaning surface and a second cleaning surface arranged adjacent to each other. The first cleaning surface and the second cleaning surface are configured such that when cleaning the trench, the first cleaning surface can fit against the sidewall of the trench, and the second cleaning surface can fit against the bottom of the trench.
[0014] Optionally, the grinding disc cleaning structure further includes a nozzle connected to a water storage structure via a pipe, the nozzle being configured to spray cleaning fluid onto the grinding disc.
[0015] Optionally, a measuring structure may also be included, configured to measure parameters of the cleaned trench, including the depth of the trench.
[0016] Optionally, the trench measurement structure includes:
[0017] The first pressure sensing unit is configured to extend into the groove in one of the first cleaning head, the second cleaning head, and the third cleaning head, and when it senses that the pressure on the cleaning head extending into the groove is greater than a preset value, it sends a first signal to the motion control unit to control the corresponding cleaning head to stop moving.
[0018] The first measuring unit is configured to calculate the length of the corresponding cleaning head extending from the corresponding cleaning head based on the movement speed and movement time of the corresponding cleaning head after the corresponding cleaning head stops moving, and to obtain the depth of the channel based on the length of the corresponding cleaning head extending from the corresponding cleaning head.
[0019] Optionally, a measuring structure is also included, configured to measure parameters of the cleaned trench, including the depth and width of the trench;
[0020] The measurement structure includes:
[0021] The second pressure sensing unit is configured to send a first signal to the motion control unit to control the corresponding cleaning part to stop moving when the first cleaning part or the third cleaning part extends into the groove and senses that the pressure on the cleaning head corresponding to the first cleaning part or the third cleaning part is greater than a preset value.
[0022] The second measuring unit is configured to calculate the length of the corresponding cleaning part after the corresponding cleaning part stops moving, based on the movement speed and movement time of the corresponding cleaning part, and to obtain the width of the groove based on the length of the corresponding cleaning part and the tilt angle of the conductor of the corresponding cleaning part.
[0023] This invention also provides a method for maintaining a grinding disc, comprising the following steps:
[0024] Clean the grooves of the grinding disc;
[0025] Obtain parameters of the cleaned trench, including the depth and width of the trench.
[0026] The beneficial effects of this invention are as follows: The grinding disc maintenance device provided in this application includes a grinding disc cleaning structure, which includes a first cleaning head, a second cleaning head, and a third cleaning head for cleaning the inside of the groove. The first cleaning head and the second cleaning head are respectively configured to extend into the groove to clean the corner area, and the second cleaning head is configured to extend into the groove to clean the middle area. With the cooperation of the first cleaning head, the second cleaning head, and the third cleaning head, the groove can be cleaned efficiently and thoroughly. In addition, in this application, the movement of the first cleaning head, the second cleaning head, and the third cleaning head is controlled by a motion control unit to realize automatic cleaning of the groove, which improves cleaning efficiency compared to manual cleaning. Attached Figure Description
[0027] Figure 1 A schematic diagram showing the structure of the grinding disc;
[0028] Figure 2This is a schematic diagram of the grinding disc maintenance device in an embodiment of the present invention;
[0029] Figure 3 This is a schematic diagram of the grinding disc maintenance device in an embodiment of the present invention;
[0030] Figure 4 A schematic diagram showing the first cleaning head, the second cleaning head, and the third cleaning head in an embodiment of the present invention;
[0031] Figure 5 A schematic diagram showing the measurement of the depth and width of the trench. Detailed Implementation
[0032] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the described embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.
[0033] Unless otherwise defined, the technical or scientific terms used in this disclosure shall have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. The terms “first,” “second,” and similar terms used in this disclosure do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the terms “an,” “a,” or “the,” and similar terms do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms “including,” “comprising,” or “containing,” and similar terms mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. The terms “connected,” “linked,” or similar terms are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. The terms “upper,” “lower,” “left,” and “right,” etc., are used only to indicate relative positional relationships, and these relative positional relationships may change accordingly when the absolute position of the described objects changes.
[0034] like Figures 1-4 As shown, this embodiment provides a grinding disc maintenance device. The grinding disc includes a grinding surface, and a plurality of grooves 10 are provided on the grinding surface. In the width direction of the grooves 10, the grooves 10 include a central region and corner regions located on opposite sides of the central region.
[0035] The maintenance device includes a grinding disc cleaning structure, which includes a first cleaning head 2, a second cleaning head 1, and a third cleaning head 3 for cleaning the inside of the groove 10, in a first direction (reference). Figure 3 In the X direction, the first cleaning head 2 and the third cleaning head 3 are located on opposite sides of the second cleaning head 1. The first cleaning head 2 and the third cleaning head 3 are respectively configured to extend into the groove 10 to clean the corner area. The second cleaning head 1 is configured to extend into the groove 10 to clean the middle area. When cleaning the groove 10, the first direction is parallel to the width direction of the groove 10.
[0036] The mobile control unit is configured to control the grinding disc cleaning structure in a second direction (reference). Figure 2 The second direction moves in the Y direction to clean the groove 10, and the second direction is perpendicular to the first direction.
[0037] The grinding disc cleaning structure includes a first cleaning head 2, a second cleaning head 1, and a third cleaning head 3 for cleaning the inside of the groove 10. The first cleaning head 2 and the third cleaning head 3 are respectively configured to extend into the groove 10 to clean the corner areas, and the second cleaning head 1 is configured to extend into the groove 10 to clean the middle area. With the cooperation of the first cleaning head 2, the second cleaning head 1, and the third cleaning head 3, the groove 10 can be cleaned efficiently and thoroughly. In this application, the movement of the first cleaning head 2, the second cleaning head 1, and the third cleaning head 3 is controlled by a motion control unit to achieve automatic cleaning of the groove 10, which improves cleaning efficiency compared to manual cleaning.
[0038] It should be noted that the mobile control unit can directly control the movement of the first cleaning head 2, the second cleaning head 1, and the third cleaning head 3 to clean the groove 10 on the grinding disc, or it can control the grinding disc maintenance device as a whole to move, thereby driving the movement of the first cleaning head 2, the second cleaning head 1, and the third cleaning head 3, as long as the first cleaning head 2, the second cleaning head 1, and the third cleaning head 3 can automatically clean the groove 10.
[0039] In an exemplary embodiment, the grinding disc maintenance device includes a carrier 5, with the first cleaning head 2, the second cleaning head 1, and the third cleaning head 3 connected to the carrier 5. Rollers 6 are provided on the carrier 5 to contact and move on the surface of the grinding disc, facilitating the cleaning of the grooves 10. Alternatively, in other embodiments, the carrier 5 can be suspended from a fixed structure via a slide rail, facilitating the movement of the first cleaning head 2, the second cleaning head 1, and the third cleaning head 3. Or, the carrier 5 can be directly connected to a robotic arm, which can serve as part of a moving control unit and is connected to the drive motor of the moving control unit via a transmission component.
[0040] In an exemplary embodiment, the grinding disc cleaning structure includes a blade body, one end of which is provided with a first cleaning head 2, a second cleaning head 1, and a third cleaning head 3.
[0041] The first cleaning head 2, the second cleaning head 1, and the third cleaning head 3 are integrated into one unit, forming three cutting heads on a single blade body.
[0042] In an exemplary embodiment, the grinding disc cleaning structure includes a first cleaning part, a second cleaning part, and a third cleaning part that are independently arranged. The first cleaning part includes a first blade and a first cleaning head 2 located at one end of the first blade. The second cleaning part includes a second blade and a second cleaning head 1 located at one end of the second blade. The third cleaning part includes a third blade and a third cleaning head 3 located at one end of the third blade.
[0043] The first cleaning section, the second cleaning section, and the third cleaning section are arranged in a separate manner, which facilitates flexible setting of the positions of the first cleaning head 2, the second cleaning head 1, and the third cleaning head 3.
[0044] In some embodiments, the grinding disc maintenance device includes a carrier 5, and the first cleaning part, the second cleaning part and the third cleaning part are all detachably connected to the carrier 5, that is, the first blade body, the second blade body and the third blade body are connected to the carrier 5, which facilitates the independent maintenance and replacement of the first cleaning part, the second cleaning part and the third cleaning part.
[0045] In some embodiments, the grinding disc maintenance device includes a carrier 5, and the first blade, the second blade, and the third blade are rotatably connected to the carrier 5 via a rotating shaft, so that the angles of the first cleaning head 2, the second cleaning head 1, and the third cleaning head 3 can be flexibly adjusted to thoroughly clean the groove 10 without leaving any dead corners.
[0046] In an exemplary embodiment, the grinding disc maintenance device includes a carrier 5 with a receiving cavity inside. The bottom of the carrier 5 has an opening. The movement control unit is further configured to control the telescopic movement of the first cleaning part, the second cleaning part, and the third cleaning part, switching between a retracted state within the receiving cavity and an extended state extending from the opening into the receiving cavity. This allows the first cleaning part, the second cleaning part, and the third cleaning part to be retracted entirely into the receiving cavity when not in operation, reducing the overall storage space of the grinding disc maintenance device and protecting the first cleaning part, the second cleaning part, and the third cleaning part, thus extending their service life.
[0047] In an exemplary embodiment, the first cleaning head, the second cleaning head, and the third cleaning head are spaced apart in the second direction. This avoids mutual interference between the first cleaning head 2, the second cleaning head 1, and the third cleaning head 3. (Refer to...) Figure 2 It should be noted that, Figure 2 for Figure 3 Side view.
[0048] In an exemplary embodiment, the second blade extends along a third direction, which is perpendicular to the first direction and also perpendicular to the second direction;
[0049] At least one of the first blade and the third blade is inclined, and the angle between the extension direction of the inclined first blade or the third blade and the third direction is an acute angle.
[0050] When cleaning the groove 10 of the grinding disc, the extension direction of the second blade is perpendicular to the surface of the grinding disc, and the first blade and the third blade are both inclined to the surface of the grinding disc, which facilitates the first blade, the second blade and the third blade to clean the corresponding areas of the groove 10.
[0051] For example, both the first blade and the third blade are inclined, and the inclination directions are opposite, so that the first blade and the third blade can clean the corresponding corner areas respectively.
[0052] In an exemplary embodiment, in the first direction, the first cleaning head 2 and the third cleaning head 3 are symmetrically arranged relative to the second cleaning head 1. The first cleaning head 2 includes a first cleaning surface 21 and a second cleaning surface 22 arranged adjacent to each other. The first cleaning surface 21 and the second cleaning surface 22 are configured such that, when cleaning the groove 10, the first cleaning surface 21 can fit against the sidewall of the groove 10, and the second cleaning surface 22 can fit against the bottom of the groove 10. Similarly, the corresponding cleaning surface of the third cleaning head 3 can correspondingly fit against the bottom and the corresponding sidewall of the groove 10.
[0053] In the depth direction of the groove 10, the cross-section of the groove 10 is rectangular. The bottom and sidewalls of the groove 10 are perpendicular to each other. The first cleaning head 2 includes a first cleaning surface 21 and a second cleaning surface 22 that are perpendicular to each other to clean at least a portion of the bottom and at least a portion of the sidewalls of one corner area of the groove 10, respectively. The third cleaning head 3 includes a third cleaning surface 31 and a fourth cleaning surface 32 that are perpendicular to each other to clean at least a portion of the bottom and at least a portion of the sidewalls of the other corner area of the groove 10, respectively. During cleaning, the first cleaning surface 21 and the second cleaning surface 22 can be completely in contact with the bottom and one sidewall of the groove 10, respectively, and the third cleaning surface 31 and the fourth cleaning surface 32 can be completely in contact with the bottom and the other sidewall of the groove 10, respectively, to effectively and thoroughly clean the groove 10. Figure 3 The grinding disc 100 is shown, in which the first cleaning head 2, the second cleaning head 1, and the third cleaning head 3 all extend into the groove 10 and fit against the corresponding area of the groove 10 to clean the corresponding area of the groove 10.
[0054] For example, the cleaning surface of the second cleaning head 1 is curved, but it is not limited thereto.
[0055] In an exemplary embodiment, the grinding disc cleaning structure further includes a nozzle 4 connected to a water storage structure via a pipe, the nozzle 4 being configured to spray cleaning fluid onto the grinding disc.
[0056] By configuring the nozzle 4, the surface of the grinding disc and the inside of the groove 10 can be sprayed and cleaned before and after the groove 10 is cleaned by the first cleaning head 2, the second cleaning head 1, and the third cleaning head 3.
[0057] The cleaning solution can be ultrapure water, but is not limited to it.
[0058] In an exemplary embodiment, a measuring structure is also included, configured to measure parameters of the cleaned trench 10, including the depth of the trench 10.
[0059] The depth of the groove 10 is measured and compared with the preset standard depth of the groove 10, so that the grinding disc can be replaced in a timely manner when the depth of the groove 10 does not meet the requirements.
[0060] For example, during the cleaning process of the groove 10, the depth of the groove 10 is measured in real time to improve the accuracy of the depth measurement and obtain complete data of the groove 10 so that the grinding disc can be replaced in time when the parameters of the groove 10 do not meet the requirements (for example, the area of the region that does not meet the preset standard parameters of the groove 10 is larger than the preset area).
[0061] In an exemplary embodiment, the trench 10 measuring structure includes:
[0062] The first pressure sensing unit is configured to extend into the groove 10 in one of the first cleaning head 2, the second cleaning head 1, and the third cleaning head 3, and when it senses that the pressure on the cleaning head extending into the groove 10 is greater than a preset value, it sends a first signal to the motion control unit to control the corresponding cleaning head to stop moving.
[0063] The first measuring unit is configured to calculate the length of the corresponding cleaning head after the corresponding cleaning head stops moving, based on the movement speed and movement time of the corresponding cleaning head, and to obtain the depth L1 of the channel based on the length of the corresponding cleaning head.
[0064] refer to Figure 5 The width L2 of the groove 10 can be calculated based on the tilt angle θ of the first blade of the first cleaning head 2 and the extension length of the first blade (which is also the extension length of the first cleaning head).
[0065] It should be noted that, in Figure 5 There is a gap between the carrier 5 and the groove 10, which is only for schematic diagram and is not included in the calculation here. In actual use, this gap can be obtained by measurement. The actual depth of the groove can be obtained by subtracting the value of the gap from the value obtained by the inclination angle θ of the first blade of the first cleaning head 2 and the extension length of the first blade.
[0066] The preset value can be 150N, but is not limited to this.
[0067] In an exemplary embodiment, a measuring structure is also included, configured to measure parameters of the cleaned trench 10, the parameters including the depth and width of the trench 10;
[0068] The measurement structure includes:
[0069] The second pressure sensing unit is configured to send a first signal to the motion control unit to control the corresponding cleaning part to stop moving when the first cleaning part or the third cleaning part extends into the groove 10 and senses that the pressure on the cleaning head corresponding to the first cleaning part or the third cleaning part is greater than a preset value.
[0070] The second measuring unit is configured to calculate the length of the corresponding cleaning part after the corresponding cleaning part stops moving, based on the movement speed and movement time of the corresponding cleaning part, and to obtain the width of the groove 10 based on the length of the corresponding cleaning part and the tilt angle of the conductor of the corresponding cleaning part.
[0071] This invention also provides a method for maintaining a grinding disc, comprising the following steps:
[0072] Clean the grooves 10 of the grinding disc;
[0073] Obtain parameters of the cleaned trench 10, including the depth and width of the trench 10.
[0074] Cleaning the grooves 10 of the grinding disc specifically includes:
[0075] Clean the grinding disc by spraying cleaning fluid;
[0076] The first cleaning head 2, the second cleaning head 1, and the third cleaning head 3 are automatically controlled to extend into the groove 10 according to a preset trajectory and move along the extension direction of the groove 10 to clean the groove 10.
[0077] After all grooves 10 have been cleaned, spray cleaning fluid onto the grinding disc to remove any remaining contaminants.
[0078] It should be noted that during the process of cleaning the groove 10 by extending into it through the first cleaning head 2, the second cleaning head 1, and the third cleaning head 3, the nozzle 4 can always be in working condition to remove dirt in a timely manner.
[0079] It should be noted that the parameters of the trench 10 can be obtained before cleaning, after cleaning, or in real time during cleaning, and there is no limitation on this.
[0080] The following points need to be explained:
[0081] (1) The accompanying drawings of the embodiments of this disclosure only involve the structures involved in the embodiments of this disclosure. Other structures can be referred to the general design.
[0082] (2) For clarity, the thickness of layers or regions is enlarged or reduced in the drawings used to describe embodiments of the present disclosure, i.e., these drawings are not drawn to actual scale. It will be understood that when an element such as a layer, film, region or substrate is referred to as being “above” or “below” another element, the element may be “directly” located “above” or “below” the other element or there may be intermediate elements.
[0083] (3) Where there is no conflict, the embodiments of this disclosure and the features in the embodiments can be combined with each other to obtain new embodiments.
[0084] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of the present invention, and the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.
Claims
1. A grinding table maintenance device, characterized in that, The grinding disc includes a grinding surface, on which multiple grooves are provided. In the width direction of the grooves, the grooves include a central region and corner regions located on opposite sides of the central region. The maintenance device includes a grinding disc cleaning structure, which includes a first cleaning head, a second cleaning head, and a third cleaning head for cleaning the inside of the groove. In a first direction, the first cleaning head and the third cleaning head are located on opposite sides of the second cleaning head. The first cleaning head and the third cleaning head are respectively configured to extend into the groove to clean the corner area, and the second cleaning head is configured to extend into the groove to clean the middle area. When cleaning the groove, the first direction is parallel to the width direction of the groove. A mobile control unit is configured to control the grinding disc cleaning structure to move in a second direction to clean the groove, the second direction being perpendicular to the first direction; The grinding disc cleaning structure includes a first cleaning part, a second cleaning part, and a third cleaning part that are independently set. The first cleaning part includes a first blade and a first cleaning head located at one end of the first blade. The second cleaning part includes a second blade and a second cleaning head located at one end of the second blade. The third cleaning part includes a third blade and a third cleaning head located at one end of the third blade. In the second direction, the first cleaning section, the second cleaning section, and the third cleaning section are arranged at intervals. In the first direction, the first cleaning head and the third cleaning head are symmetrically arranged relative to the second cleaning head. The first cleaning head includes a first cleaning surface and a second cleaning surface arranged adjacent to each other. The first cleaning surface and the second cleaning surface are configured such that when cleaning the groove, the first cleaning surface can fit against the side wall of the groove, and the second cleaning surface can fit against the bottom of the groove. It also includes a measuring structure configured to measure parameters of the cleaned trench, including the depth of the trench; The measurement structure includes: The first pressure sensing unit is configured to extend into the groove in one of the first cleaning head, the second cleaning head, and the third cleaning head, and when it senses that the pressure on the cleaning head extending into the groove is greater than a preset value, it sends a first signal to the motion control unit to control the corresponding cleaning head to stop moving. The first measuring unit is configured to calculate the length of the corresponding cleaning head extending from its position based on the movement speed and movement time of the corresponding cleaning head after the corresponding cleaning head stops moving, and to obtain the depth of the groove based on the length of the corresponding cleaning head extending from its position.
2. The grinding disc maintenance device according to claim 1, characterized in that, The grinding disc cleaning structure includes a blade body, and one end of the blade body is provided with a first cleaning head, a second cleaning head, and a third cleaning head.
3. The grinding disc maintenance device according to claim 1, characterized in that, The second blade extends along a third direction, which is perpendicular to the first direction and also perpendicular to the second direction. At least one of the first blade and the third blade is inclined, and the angle between the extension direction of the inclined first blade or the third blade and the third direction is an acute angle.
4. The grinding disc maintenance device according to claim 1, characterized in that, In the first direction, the first cleaning head and the third cleaning head are symmetrically arranged relative to the second cleaning head. The first cleaning head includes a first cleaning surface and a second cleaning surface arranged adjacent to each other. The first cleaning surface and the second cleaning surface are configured such that when cleaning the trench, the first cleaning surface can fit against the sidewall of the trench, and the second cleaning surface can fit against the bottom of the trench.
5. The grinding disc maintenance device according to claim 1, characterized in that, The grinding disc cleaning structure also includes a nozzle connected to a water storage structure via a pipe, the nozzle being configured to spray cleaning fluid onto the grinding disc.
6. The grinding disc maintenance device according to claim 3, characterized in that, It also includes a measuring structure configured to measure parameters of the cleaned trench, the parameters including the depth and width of the trench; The measurement structure includes: The second pressure sensing unit is configured to send a first signal to the motion control unit to control the corresponding cleaning part to stop moving when the first cleaning part or the third cleaning part extends into the groove and senses that the pressure on the cleaning head corresponding to the first cleaning part or the third cleaning part is greater than a preset value. The second measuring unit is configured to calculate the length of the corresponding cleaning part after the corresponding cleaning part stops moving, based on the movement speed and movement time of the corresponding cleaning part, and to obtain the width of the groove based on the length of the corresponding cleaning part and the tilt angle of the blade of the corresponding cleaning part.
7. A method for maintaining a grinding disc, applied to the grinding disc maintenance device according to any one of claims 1-6, characterized in that, Includes the following steps: Clean the grooves of the grinding disc; Obtain parameters of the cleaned trench, including the depth and width of the trench.